Device and method for vacuumizing quartz crucible by using electric arc method

Abstract

The invention relates to the technical field of quartz crucible preparation, and particularly discloses an electric arc method quartz crucible vacuumizing device and method.The electric arc method quartz crucible vacuumizing device comprises a vacuum pump and a mold which is arranged above the vacuum pump and used for producing a quartz crucible, a heat conduction cavity filled with heat conduction liquid is formed in the side wall of the mold, and a flow disturbing device is arranged in the heat conduction cavity and can rotate in the circumferential direction of the heat conduction cavity; two air inlets are formed in the rear portion of the heat conduction cavity and connected with the positive pressure end of the vacuum pump in the mode that one air inlet is selected, the outer wall of the mold is provided with a heat conduction structure, and micropore groups are formed in the inner wall of the mold and collected through a cavity formed in the side wall of the mold. The interior of the mold is vacuumized through the vacuum pump to form a negative pressure environment, bubble residues in the quartz melt forming process are effectively reduced, meanwhile, the circulating heat dissipation design of the heat conduction cavity in the side wall of the mold is combined, vacuum forming and temperature control are achieved at the same time, the influence of gas expansion at the high temperature on the crucible structure is reduced, and the problem of heat dissipation hysteresis is solved.

Description

Technical Field

[0001] The invention relates to the technical field of quartz crucible preparation, and in particular to an arc-process quartz crucible vacuum pumping device and method. Background Art

[0002] The vacuum device of arc quartz crucible is one of the core components in the production process. Its function is to optimize the transparency of the inner layer of the crucible and reduce bubble defects by establishing a vacuum environment. For example, the prior art publication number "CN117209122" discloses an invention patent application entitled "Arc electrode device for producing quartz crucible, arc furnace and method for producing quartz crucible", and the description of the patent application records in detail the method for preparing the quartz crucible: "Quartz crucibles are generally made by vacuum arc method, and the process includes: pouring high-purity quartz sand raw materials into a graphite mold or a metal mold, uniformly forming the quartz sand raw materials on the inner surface of the mold by a molding device, then melting the quartz sand at a high temperature of more than 3000°C by a high-temperature arc furnace, and finally forming a quartz (glass) crucible by rapid cooling"; In the preparation process of the quartz crucible, in order to ensure that the quartz crucible does not generate many bubbles, the inside of the mold needs to be evacuated during the molding process of the quartz crucible. Since the quartz crucible generates high heat during the molding process, in order to prevent the mold from deforming, the quartz crucible is also deformed when the mold is evacuated. Therefore, the prior art needs to dissipate heat from the mold during vacuuming, and a common means is to circulate coolant. However, since the coolant is circulated through a continuous cavity, in actual applications, there is a hysteresis in heat dissipation in some positions of the mold, so it is necessary to improve this. Summary of the invention

[0003] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0004] The present invention provides an arc method quartz crucible vacuum pumping device and method, which can solve the problem that "in actual application of the mold, some positions of the mold have heat dissipation hysteresis causing deformation of the quartz crucible". The specific scheme is as follows: On the one hand, the present invention provides an arc method quartz crucible vacuum pump, comprising a vacuum pump and a mold for producing a quartz crucible above the vacuum pump, a heat conduction cavity filled with heat conduction liquid is formed in the side wall of the mold, a flow disturbance device is provided in the heat conduction cavity, the flow disturbance device rotates along the circumference of the heat conduction cavity, two air inlets are arranged outside the heat conduction cavity, the two air inlets are connected to the positive pressure end of the vacuum pump by selectively inletting air, the outer wall of the mold has a heat conduction structure, the inner wall of the mold is provided with a micropore group, the micropore group is collected by a chamber formed in the side wall of the mold, the chamber is located between the mold cavity and the heat conduction cavity of the mold, and the chamber is connected to the negative pressure end of the vacuum pump; While working: The negative pressure end of the vacuum pump evacuates the mold through the chamber and micropores; The gas at the positive pressure end of the vacuum pump enters the heat transfer cavity through one of the air inlets, and then pushes the flow disturbance device to rotate in the heat transfer cavity, thereby disturbing the heat transfer fluid in the heat transfer cavity.

[0005] Preferably, the heat conduction cavity comprises: The annular main body section is continuously distributed along the circumference of the mold side wall; The longitudinal terminating section is closed with the upper and lower end surfaces of the mold, and its bottom is provided with an arc extension portion matching the bottom wall of the mold.

[0006] Preferably, the top of the heat-conducting cavity is connected to the outside through at least one exhaust hole to release the gas in the heat-conducting cavity.

[0007] Preferably, the spoiler is rod-shaped and has an arc-shaped structure extending along the circumference of the heat conduction cavity.

[0008] Preferably, a negative pressure cavity is opened at the bottom of the mold, and the negative pressure cavity is connected with the mold cavity of the mold through a cavity and a micropore group formed in the side wall of the mold. The negative pressure cavity is connected to the negative pressure end of a vacuum pump. The negative pressure cavity, the cavity and the micropore group are evacuated by the vacuum pump to form a vacuum environment inside the mold.

[0009] Preferably, a switching device is provided on the outside of the two air inlets, and the switching device includes a fixed sleeve, which is fixedly connected to the outer wall of the mold, one end of the fixed sleeve is connected to two air inlet pipes corresponding to the positions of the two air inlets, and the other ends of the two air inlet pipes are fixedly connected to an air collecting plate, both air inlet pipes are connected to the air collecting plate, the outside of the air collecting plate is covered with a rotating plate, the rotating plate is rotatably connected to the inner wall of the air collecting plate, the middle of the rotating plate is connected to a rotating sleeve, and the rotating sleeve is arranged on the top of the second pipe.

[0010] Preferably, the outer wall of the rotating disk is connected to an impeller, the inner wall of the air collecting disk is provided with an annular groove, the impeller can rotate in the annular groove, an air inlet hole is opened at the bottom of the air collecting disk, the gas flow path of the air inlet hole is tangent to the inner wall of the annular groove, the outside of the air inlet hole is connected to the top of the first pipe through the third pipe, the top of the first pipe is connected to a dispersion box, the dispersion box is used to disperse the airflow at the positive pressure end of the vacuum pump, and the end of the third pipe away from the air collecting disk is connected to the top of the dispersion box and communicates with the inside of the dispersion box.

[0011] Preferably, the rotating disk is hollow and has a slot at one end of the rotating disk close to the air intake pipe. One end of the rotating disk contacts the gas collecting disk and is configured so that when the projection surface of the slot completely or partially overlaps with the projection surface at the inlet of the air intake pipe, the gas in the rotating disk can enter the air intake pipe through the slot.

[0012] Preferably, the spoiler device includes a spoiler plate having a hollow structure inside, and the heat transfer fluid is installed in the area outside the spoiler plate in the heat transfer cavity. When the spoiler plate rotates, the heat transfer fluid rotates synchronously in the heat transfer cavity with the rotation of the spoiler plate, so that the heat transfer fluid flows regularly in the heat transfer cavity.

[0013] On the other hand, the present invention provides a method for evacuating a quartz crucible by an arc method, comprising the following steps: S1. Using a vacuum pump, the inside of the mold is evacuated through a heat-conducting cavity provided in the side wall of the mold and a micropore group connected thereto, wherein the micropore group is connected to a negative pressure end of the vacuum pump through a cavity in the side wall of the mold; S2. The gas generated by the positive pressure end of the vacuum pump is introduced into the heat transfer cavity through a selected air inlet, so that the flow disturbance device in the heat transfer cavity rotates under the drive of the gas to disturb the heat transfer liquid in the heat transfer cavity, so as to quickly cool down the side wall of the mold.

[0014] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects: 1. The present invention uses a vacuum pump to evacuate the inside of the mold to form a negative pressure environment, which effectively reduces the residual bubbles in the quartz melt molding process. At the same time, combined with the circulating heat dissipation design of the heat conduction cavity on the side wall of the mold, vacuum molding and temperature control are achieved at the same time. The vacuum environment promotes the close accumulation of quartz particles, reduces the influence of gas expansion on the crucible structure under high temperature, and the spoiler in the heat conduction cavity drives the heat conduction liquid to flow in a directional manner, which can quickly export the heat of the mold cavity, avoid local overheating and cause the quartz material to crack or deform, and solve the hysteresis problem of heat dissipation.

[0015] 2. The present invention actively stirs the heat transfer liquid to form turbulence through the spoiler in the heat transfer cavity, thereby improving the heat exchange efficiency of the mold side wall. The coordination between the spoiler and the gap in the heat transfer cavity allows the liquid to flow in multiple paths, avoiding the heat dissipation blind spot caused by local liquid flow stagnation, and can use the fluid inertia to enhance heat transfer. The air pressure drive mechanism of the spoiler is linked with the vacuum pump system, and can dynamically adjust the speed according to the production stage. For example, it can accelerate heat dissipation in the high-temperature melting stage and reduce disturbances in the cooling and shaping stage, thereby accurately matching the heat load requirements of different process nodes, avoiding the high energy consumption problem of the external cooling device, and solving the reliability risk of the traditional water cooling system caused by pipeline blockage or leakage.

[0016] 3. The present invention utilizes the gas output from the positive pressure end of the vacuum pump to drive the spoiler to rotate, thereby realizing the recycling of energy. The switching device automatically switches the gas input path through the periodic connection and disconnection of the rotating disk slot and the intake pipe, thereby ensuring the continuous unidirectional rotation of the spoiler, simplifying the mechanical structure, and reducing maintenance costs. The precise control of the air flow by the pressure regulating valve realizes the stepless adjustment of the spoiler rotation speed. The tangential airflow between the impeller and the annular groove increases the stability of the rotational power and avoids sudden changes in rotation speed due to pressure fluctuations.

[0017] 4. The micropores on the inner wall of the mold of the present invention achieve the dual goals of efficient gas discharge and zero particle leakage through the synergistic effect of negative pressure suction and particle characteristics. The design of the inner diameter of the micropores fully considers the dense stacking effect of quartz particles, and cooperates with the continuous adsorption force of vacuum negative pressure to prevent tiny particles from entering the micropores and causing blockage.

[0018] Other features and advantages of the present invention will be described in the following specific embodiments, and part of them will become obvious from the description, or will be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them: Figure 1 This is a three-dimensional diagram of the mold in use of the present invention; Figure 2 It is an overall stereogram of the mold of the present invention; Figure 3 It is a front cross-sectional view of the present invention; Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle; Figure 5 is a side sectional view of the mold of the present invention; Figure 6 A perspective view of a first embodiment of a spoiler according to the present invention; Figure 7 A perspective view of a second embodiment of the spoiler of the present invention; Figure 8 A top view of a second embodiment of the spoiler of the present invention; Fig. 9 A top view of a third embodiment of the spoiler of the present invention; Fig.10 It is a top cross-sectional view of the present invention; Fig.11 This is a first-view stereoscopic image of the rear side of the present invention; Fig.12 A second perspective rear-side stereogram of the present invention; Fig.13 An exploded view of one side of the switching device of the present invention; Fig.14 It is an exploded view of the other side of the switching device of the present invention; Fig.15 It is a schematic diagram of the specific structure of the impeller of the present invention; Fig.16 It is a schematic diagram of the installation of the impeller and the gas collecting plate of the present invention.

[0020] The reference numerals are as follows: 1. Processing room; 2. Mold; 3. Observation walkway; 4. Vacuum pump; 5. Base; 6. Spoiler; 7. Support seat; 8. Heat transfer chamber; 9. Quartz crucible; 10. Electrode; 11. Exhaust hole; 12. Mold cover; 13. Micropore; 14. Limiting ring; 15. Arc section; 16. Air inlet; 17. One-way valve; 18. Bump; 19. First pipeline; 20. Second pipeline; 21. Fixed sleeve; 22. Gas collecting plate; 23. Air inlet pipe; 24. Rotating plate; 25. Impeller; 26. Notch; 27. Dispersion box; 28. Air inlet; 29. ​​Third pipeline; 30. Pressure regulating valve; 31. Rotating sleeve; 32. Ring groove; 33. Negative pressure chamber. DETAILED DESCRIPTION

[0021] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used to explain the principles of the present invention together with the embodiments of the present invention.

[0022] Embodiment 1: Figure 1As shown, this embodiment provides an arc method quartz crucible vacuum pumping device, including a vacuum pump 4 and a mold 2 above it, the vacuum pump 4 and the mold 2 are installed in a processing room 1, the side wall of the processing room 1 is also provided with an observation walkway 3, which can monitor the operation status in the mold 2, a base 5 is provided at the bottom of the mold 2, and support seats 7 are provided on both sides of the base 5 and the mold 2, the support seat 7 is fixed in the processing room 1, and the vacuum pump 4 is installed between the two support seats 7; like Figure 2 , Figure 3 , Figure 5 As shown, the middle part of the mold 2 is a mold cavity, and the quartz crucible 9 is made in the mold cavity. A heat-conducting cavity 8 is opened or formed around the mold cavity, that is, inside the side wall of the mold 2. A spoiler device is arranged inside the heat-conducting cavity 8, and the spoiler device includes a spoiler 6. The spoiler 6 can rotate along the circumferential direction of the heat-conducting cavity 8 inside the heat-conducting cavity 8. The heat-conducting cavity 8 includes an annular main body section, and the annular main body section is continuously distributed along the circumference of the side wall of the mold 2; and a longitudinal termination section, the longitudinal termination section is closed with the upper and lower end surfaces of the mold 2, and the bottom of the longitudinal termination section has an arc extension portion matching the bottom wall of the mold 2. An electrode 10 is arranged inside the mold 2, and the electrode 10 is installed in the middle of the mold cover 12 at the top of the mold 2. A protrusion matching the top edge of the mold 2 is arranged around the bottom of the mold cover 12, so that the mold cover 12 can be matched and installed with the top of the mold 2. The outer wall of the mold 2 has a heat-conducting structure, and the heat-conducting structure can specifically be a heat dissipation fin, a fan, a water-cooling circulation component or any component with a heat dissipation effect; like Figure 4 As shown, a plurality of micropores 13 are also provided on the inner wall of the mold 2, and the plurality of micropores 13 are evenly distributed inside the mold 2, and the plurality of micropores 13 form a micropore group, wherein the micropore group is collected by a chamber formed in the side wall of the mold 2, and the chamber is provided between the mold cavity of the mold 2 and the heat conducting cavity 8, and the micropore group is provided on the side wall of the chamber close to the mold cavity of the mold 2, and the inner diameter of each micropore 13 is smaller than the outer diameter of the quartz material particles. For example, the quartz material particles used in the production of the quartz crucible 9 generally have a diameter of 177-180 microns, and therefore the inner diameter of the micropore 13 is preferably smaller than 177 microns; As a possible embodiment, due to the dense stacking effect, the inner diameter of the micropore 13 may also be larger than the outer diameter of the adaptive material particles. This phenomenon is mainly related to the interaction between particles and the particle characteristics. Its principle and practical application scenarios are as follows: The key mechanisms of dense stacking effect are as follows: Friction and bridging between particles: When particles accumulate on the screen surface, friction, van der Waals force (for micron-sized particles) or electrostatic adsorption will form mechanical bite or bridging structures between particles, causing the particles to be "stuck" in the micropores13; Example: Micron-sized quartz sand (e.g. 80 mesh, 177 μm) may clump due to electrostatic adsorption when drying, forming agglomerates with a diameter much larger than the micropores 13, which hinders passage; Influence of screening dynamics: If the vibration or air flow disturbance during the screening process is not enough to destroy the stacking structure, the particles will form a dense layer due to their own gravity or external pressure (such as squeezing of upper particles), reducing the screening efficiency; like Figure 3 As shown, a negative pressure cavity 33 is provided at the bottom of the mold 2 and the base 5. The negative pressure cavity 33 is connected to the mold cavity of the mold 2 through a cavity and a micropore group formed in the side wall of the mold 2. The negative pressure cavity 33 is connected to the negative pressure end of the vacuum pump 4. The negative pressure cavity 33, the cavity and the micropore group are evacuated by the vacuum pump 4, thereby forming a vacuum environment inside the mold 2.

[0023] like Figure 6 As shown in the figure, as a possible embodiment, one specific configuration of the spoiler 6 is: a circle of limiting ring 14 is arranged at the bottom of the spoiler 6 (for the convenience of display, the limiting ring 14 in the figure has a gap, and in fact the limiting ring 14 is a full-circle ring structure), and the spoiler 6 and the limiting ring 14 are connected by an arc segment 15, and the arc segment 15 is used to match the shape of the bottom of the heat conduction cavity 8; like Figure 7 , Figure 8 As shown in the figure, as a possible embodiment, another specific configuration of the spoiler 6 is: a circle of limiting rings 14 is set at the bottom of the spoiler 6, and the spoiler 6 and the limiting ring 14 are connected by an arc segment 15. The spoiler device is rod-shaped and has an arc structure extending circumferentially along the heat conduction cavity 8. Specifically explained as follows: the shape of the spoiler 6 is inclined, and the specific inclination is to allow the spoiler 6 to have a certain extension along the axial direction of the heat conduction cavity 8. It can also be understood that the spoiler 6 is twisted around the central axis of the heat conduction cavity 8 to form an inclination angle. In order to match the annular heat conduction cavity 8, the spoiler 6 has an inclination angle, such as Figure 8 As shown in the top view of the middle spoiler 6, the spoiler 6 also has an arc structure that is concentrically matched with the heat conduction cavity 8 in the top view direction, so that the spoiler 6 can rotate normally inside the heat conduction cavity 8; As a possible embodiment, in the two specific configurations of the spoiler 6, there is a gap between the top and / or bottom of the spoiler 6 and the upper and / or lower ends of the heat-conducting cavity 8, so that when the heat-conducting liquid in the heat-conducting cavity 8 is disturbed by the spoiler 6, the heat-conducting liquid can pass through the top and / or bottom of the spoiler 6. Optionally, there is also a gap between the two side surfaces of the spoiler 6 and the side wall of the heat-conducting cavity 8, so that the heat-conducting liquid in the heat-conducting cavity 8 can be disturbed inside the heat-conducting cavity 8, so that the heat-conducting liquid flows in the side wall of the mold 2; like Fig. 9As shown, as a possible embodiment, the spoiler 6 is configured to be wide and hollow inside. With this solution, when the spoiler 6 rotates, the heat transfer fluid in the part other than the hollow inside of the spoiler 6 can rotate synchronously with the rotation of the spoiler 6, so that the heat transfer fluid flows regularly inside the heat transfer cavity 8; It should be noted that the above-mentioned thermal conductive fluid can be a water-based thermal conductive fluid or an oil-based thermal conductive fluid. The water-based thermal conductive fluid is a heat carrier with water as the core, and mainly achieves temperature adaptability and anti-corrosion functions by adding different components. The water-based thermal conductive fluid can be: pure water liquid, ethylene glycol-based solution, propylene glycol-based solution, ethylene glycol-based, propylene glycol-based, etc. Oil-based thermal fluids can be: biphenyl ether mixtures, alkyl biphenyl type synthetic oils.

[0024] like Fig.10 As shown, two air inlets 16 are provided at the rear end of the heat-conducting cavity 8, and the outer ends of the air inlets 16 are connected to the positive pressure end of the vacuum pump 4. The high-pressure gas generated by the positive pressure end of the vacuum pump 4 can selectively enter the heat-conducting cavity 8 from the two air inlets 16, thereby pushing the spoiler 6 by air pressure, so that the spoiler 6 rotates inside the heat-conducting cavity 8, and a one-way valve 17 is installed inside the two air inlets 16, so that the liquid inside the heat-conducting cavity 8 will not flow back from the air inlets 16, but the gas can enter the heat-conducting cavity 8 normally, and at least one exhaust hole 11 is provided at the top of the heat-conducting cavity 8, and the gas inside the heat-conducting cavity 8 can be discharged through the exhaust hole 11, and the exhaust volume achieved by the number and diameter of the exhaust holes 11 is greater than the volume of the gas injected into the air inlet 16, so that a high-pressure environment is not formed inside the heat-conducting cavity 8; like Fig.10 As shown, the spoiler 6 is configured not to pass between the two air inlets 16, so that the spoiler 6 does not lose the driving force of the air pressure. Therefore, a low-protrusion block 18 is also provided at the bottom of the heat conduction cavity 8. The block 18 can block the spoiler 6 without affecting the air pressure power. Specifically, it blocks the spoiler 6 by contacting and limiting the arc segment 15. A dotted line is formed between the two blocks 18, and the spoiler 6 does not exceed the dotted line portion when rotating.

[0025] like Fig.11 , Fig.12 As shown, the positive pressure end at the rear end of the vacuum pump 4 is connected to a first pipe 19, the top end of the first pipe 19 is connected to a second pipe 20, and the top end of the second pipe 20 is connected to two air inlets 16, so that the high-pressure gas generated by the vacuum pump 4 can enter the heat transfer cavity 8 through the air inlet 16, and the gas can enter the heat transfer cavity 8 from one of the two air inlets 16 through a switching device.

[0026] like Fig.13 , Fig.14 , Fig.15 , Fig.16 As shown, the switching device includes a fixed sleeve 21, which is fixedly connected to the outer wall of the mold 2, one end of the fixed sleeve 21 is connected to two air inlet pipes 23 corresponding to the positions of the two air inlets 16, the other ends of the two air inlet pipes 23 are fixedly connected to an air collecting plate 22, the two air inlet pipes 23 are both connected to the air collecting plate 22, the outside of the air collecting plate 22 is covered with a rotating plate 24, the rotating plate 24 is rotatably connected to the inner wall of the air collecting plate 22, the middle part of the rotating plate 24 is connected to a rotating sleeve 31, the rotating sleeve 31 is sleeved on the top of the second pipe 20, so that when the rotating plate 24 rotates, the second pipe 20 can normally intake air, and in order to ensure the sealing, the inner wall of the rotating sleeve 31 and / or the outer wall of the second pipe 20 are provided with a sealing ring, so that the connection position between the two is in close contact and sealed, so that the gas in the second pipe 20 will not leak; The outer wall of the rotating disk 24 is connected to the impeller 25, and the inner wall of the gas collecting disk 22 is provided with a ring groove 32. The teeth on the impeller 25 rotate in the ring groove 32, and a sealed ring groove 32 is formed between the ring groove 32 and the outer wall of the rotating disk 24. The bottom of the gas collecting disk 22 is provided with an air inlet 28. The gas flow path of the air inlet 28 is tangent to the inner wall of the ring groove 32. The outside of the air inlet 28 is connected to the top of the first pipeline 19 through the third pipeline 29. The top of the first pipeline 19 is connected to a dispersion box 27. The dispersion box 27 is used to vacuum The airflow of the pump 4 is dispersed, and one end of the third pipe 29 away from the gas collecting plate 22 is connected to the top of the dispersion box 27 and communicated with the inside of the dispersion box 27, so that when the vacuum pump 4 is working, the gas can enter the annular groove 32 through the third pipe 29 and the air inlet 28, thereby driving the impeller 25 to rotate by the air pressure; by arranging a pressure regulating valve 30 in the middle of the third pipe 29, the flow rate of the third pipe 29 entering the annular groove 32 is controlled, thereby indirectly controlling the driving force of the air pressure, thereby achieving the purpose of adjusting the rotation speed of the rotating disk 24; In the above scheme, the airflow enters the annular groove 32 from the air inlet 28 to realize the uninterrupted rotation of the rotating disk 24, and the gas enters the gas collecting disk 22 from the rotating sleeve 31, so that the gas is periodically blown alternately to the two air inlet pipes 23; It should be noted that the pressure regulating valve 30 can be one of the following: Self-operated pressure regulating valve: The valve core is driven by the medium's own pressure, without the need for external energy, and is suitable for stable gas supply systems (such as urban heating pipelines).

[0027] Proportional pressure regulating valve: adjusts the opening in proportion through electrical or gas signals to achieve high-precision pressure control; Piston pressure regulating valve: uses the up and down movement of the piston to change the position of the valve core. It has a simple structure and can withstand high pressure difference. It is suitable for industrial high-pressure gas circuits. Diaphragm pressure regulating valve: The valve core is driven by the deformation of the diaphragm, with compact structure and high sensitivity, suitable for low pressure difference and high precision regulation; Sleeve-type pressure regulating valve: It adopts the structure of sleeve and valve core, reduces fluid impact through the balance hole, and is suitable for high pressure difference and high noise environment; In order to achieve the effect of allowing the gas to selectively enter the heat transfer chamber 8 from the two air inlets 16, firstly, the rotating disk 24 is configured as a hollow setting, and a slot 26 is opened at one end of the rotating disk 24 close to the air inlet pipe 23. The slot 26 has a certain length, so as to provide a longer air intake time when the rotating disk 24 rotates. It should be noted that one end of the rotating disk 24 is in contact with the air collecting disk 22, so that only when the projection surface of the slot 26 overlaps or partially overlaps with the projection surface at the inlet of the air inlet pipe 23, the gas can enter the air inlet pipe 23 through the slot 26. When the projection surface of the slot 26 does not overlap with the projection surface at the inlet of the air inlet pipe 23, the air inlet pipe 23 is in a closed state. It should be noted that the edge of the slot 26 does not affect the sealing of the annular groove 32, and the annular groove 32 is not in an absolutely sealed state, but is a relatively sealed space formed by the close contact between the parts. In this way, when the gas enters from the air inlet hole 28, it can normally drive the impeller 25 to rotate, and the small amount of leakage caused by the relative sealed space will not affect the driving force of the gas.

[0028] Through the above scheme, when the scheme is implemented, the negative pressure end of the vacuum pump 4 evacuates the interior of the mold 2, and at the same time, the positive pressure end of the vacuum pump 4 outputs high-pressure gas, and the high-pressure gas enters the cavity of the rotating disk 24 through the first pipe 19 and the second pipe 20, and then enters the air inlet pipe 23 through the notch 26, and finally blows into the heat transfer cavity 8 from the air inlet 16, thereby pushing the spoiler 6 to move, and blowing air through the third pipe 29 drives the impeller 25 to rotate, so that the rotating disk 24 rotates, so that the notch 26 is periodically covered at the entrance of the two air inlet pipes 23, so that the gas is periodically blown to the two ends of the heat transfer cavity 8, specifically: when the gas of one of the air inlet pipes 23 blows to one end of the heat transfer cavity 8, it can drive the spoiler 6 to rotate to the other side, and when the spoiler 6 rotates to the other side of the heat transfer cavity 8, the airflow of the corresponding air inlet pipe 23 on the other side continues to blow, so that the spoiler 6 starts to turn back. The switching device of the present application integrates the functions of periodic air intake and switching speed, and controls them in a coordinated manner.

[0029] Embodiment 2: The technical solution of this embodiment is different from that of Embodiment 1 in that this embodiment provides a method for vacuumizing a quartz crucible by an arc method, comprising the following steps: S1. The inside of the mold 2 is evacuated by using a vacuum pump 4 through a heat-conducting cavity 8 arranged in the side wall of the mold 2 and a micropore group connected thereto, wherein the micropore group is connected to the negative pressure end of the vacuum pump 4 through a cavity in the side wall of the mold 2.

[0030] Vacuuming and particle filling: Start the vacuum pump 4, and evacuate the inside of the mold 2 through the negative pressure chamber 33, the mold side wall chamber and the micropore group to form a negative pressure environment. The quartz particles are heated and melted by the electrode 10 of the mold cover 12 on the top of the mold 2. The vacuum environment promotes the close accumulation of particles and reduces the residual bubbles. The inner diameter design of the micropores 13 combines the dense accumulation effect of quartz particles and the vacuum adsorption force to prevent particles from entering the micropores 13, ensuring efficient gas discharge.

[0031] S2. The gas generated by the positive pressure end of the vacuum pump 4 is introduced into the heat transfer cavity 8 through a selected air inlet 16, so that the flow disturbance device in the heat transfer cavity 8 rotates under the drive of the gas to disturb the heat transfer liquid in the heat transfer cavity 8, so that the side wall of the mold 2 is quickly cooled down.

[0032] Heat dissipation by heat transfer liquid circulation: The heat transfer cavity 8 is filled with heat transfer liquid, and the high-pressure gas output by the positive pressure end of the vacuum pump 4 is transported to the switching device through the first pipe 19 and the second pipe 20. The gas drives the spoiler 6 in the heat transfer cavity 8 to rotate, stirring the heat transfer liquid to form turbulence, thereby enhancing the heat exchange efficiency of the side wall of the mold 2. The gap design between the spoiler 6 and the heat transfer cavity 8 allows the liquid to flow in multiple paths, avoiding heat dissipation blind spots and accelerating heat transfer through fluid inertia.

[0033] S3. Spoiler drive and speed regulation: The switching device periodically connects the air inlet pipe 23 through the notch 26 of the rotating disk 24, alternately inputs gas into the two air inlets 16, drives the spoiler 6 to continuously rotate in one direction, and the pressure regulating valve 30 adjusts the air flow rate of the third pipeline 29, controls the tangential airflow intensity of the impeller 25 in the annular groove 32, and realizes stepless regulation of the speed of the spoiler 6. The rotation of the spoiler 6 is accelerated in the high-temperature melting stage to enhance heat dissipation, and the speed is reduced in the cooling and shaping stage to reduce disturbance.

[0034] S4. Operation of the pneumatic switching device: the gas collecting disk 22 is periodically connected and disconnected with the air inlet pipe 23 through the notch 26 of the rotating disk 24 to automatically switch the gas input path. The rotating sleeve 31 is sealed and connected with the second pipeline 20 to ensure that the gas only enters the target air inlet pipe 23 through the notch 26 to avoid leakage. The protrusion 18 limits the rotation range of the spoiler 6 to prevent it from blocking the air inlet 16, thereby ensuring driving continuity.

[0035] S5. Dynamic micropore blocking prevention and gas discharge: The vacuum pump 4 continuously draws suction from the negative pressure cavity 33, and the airflow on the surface of the micropores 13 dynamically peels off the loose particles to keep the micropore group unobstructed. The friction and bridging effect between the quartz particles form a self-locking structure, which cooperates with the vacuum adsorption force to achieve gas discharge and zero particle leakage. The exhaust hole 11 discharges the gas in the heat transfer cavity 8 to balance the cavity pressure and avoid liquid reflux or high pressure risks.

[0036] In summary, the present invention uses the vacuum pump 4 to evacuate the inside of the mold 2 to form a negative pressure environment, effectively reducing the residual bubbles in the quartz melt molding process, and at the same time, combined with the circulating heat dissipation design of the heat conduction cavity 8 on the side wall of the mold 2, vacuum molding and temperature control are achieved at the same time. The vacuum environment promotes the close accumulation of quartz particles, reduces the influence of gas expansion on the crucible structure at high temperature, and the spoiler 6 in the heat conduction cavity 8 drives the heat conduction liquid to flow in a directional manner, which can quickly remove the heat from the mold cavity, avoid local overheating and cause the quartz material to crack or deform, and solve the hysteresis of heat dissipation.

[0037] The spoiler 6 in the heat transfer cavity 8 actively stirs the heat transfer liquid to form turbulence, thereby improving the heat exchange efficiency of the side wall of the mold 2. The coordination between the spoiler 6 and the gap between the heat transfer cavity 8 allows the liquid to flow in multiple paths, avoiding the heat dissipation blind spot caused by local liquid flow stagnation, and can also use the fluid inertia to enhance heat transfer. The air pressure drive mechanism of the spoiler 6 is linked with the vacuum pump 4 system, and can dynamically adjust the speed according to the production stage, such as accelerating heat dissipation in the high-temperature melting stage and slowing down disturbances in the cooling and finalizing stage, thereby accurately matching the heat load requirements of different process nodes, avoiding the high energy consumption problem of the external cooling device, and solving the reliability risk of the traditional water cooling system caused by pipe blockage or leakage.

[0038] The spoiler 6 is driven to rotate by the gas output from the positive pressure end of the vacuum pump 4, thus realizing the recycling of energy. The switching device automatically switches the gas input path by periodically switching the notch 26 of the rotating disk 24 and the air inlet pipe 23, thereby ensuring the continuous unidirectional rotation of the spoiler 6, simplifying the mechanical structure and reducing the maintenance cost. The speed of the spoiler 6 is adjusted steplessly by the precise control of the air flow by the pressure regulating valve 30. The tangential airflow between the impeller 25 and the annular groove 32 increases the stability of the rotational power and avoids sudden changes in speed caused by air pressure fluctuations.

[0039] The micropores on the inner wall of mold 2 achieve the dual goals of efficient gas discharge and zero particle leakage through the synergistic effect of negative pressure suction and particle characteristics. The inner diameter design of micropore 13 fully considers the dense accumulation effect of quartz particles, and cooperates with the continuous adsorption force of vacuum negative pressure to prevent tiny particles from entering micropore 13 and causing blockage.

[0040] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the embodiments of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0042] The term "plurality" in this article refers to two or more than two. The term "and / or" in this article is just a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone.

[0043] In the embodiments of the present application, the devices or elements referred to or implied must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise precisely and specifically specified.

[0044] Parallel: The parallelism defined in this application is not limited to absolute parallelism. This definition of parallelism can be understood as basic parallelism, which allows for non-absolute parallelism due to factors such as assembly tolerance, design tolerance, and the influence of structural flatness. Small angular errors are allowed. For example, an assembly error range of less than 10 degrees can be understood as a parallel relationship.

[0045] Vertical: The verticality defined in this application is not limited to an absolute vertical intersection relationship (angle of 90 degrees). It allows for non-absolute vertical intersection relationships caused by factors such as assembly tolerance, design tolerance, and influence of structural flatness. It also allows for errors in a small angle range. For example, the assembly error range of 80 to 100 degrees can be understood as a vertical relationship.

[0046] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An arc-process quartz crucible vacuum pumping device, comprising a vacuum pump (4) and a mold (2) for producing a quartz crucible above it, characterized in that: A heat-conducting cavity (8) filled with heat-conducting liquid is formed in the side wall of the mold (2), a flow-turbulating device is provided in the heat-conducting cavity (8), and the flow-turbulating device rotates along the circumference of the heat-conducting cavity (8), two air inlets (16) are provided outside the heat-conducting cavity (8), and the two air inlets (16) are connected to the positive pressure end of the vacuum pump (4) by selectively inletting air, the outer wall of the mold (2) has a heat-conducting structure, and a micropore group is provided on the inner wall of the mold (2), and the micropore group is collected by a cavity formed in the side wall of the mold (2), and the cavity is located between the mold cavity of the mold (2) and the heat-conducting cavity (8), and the cavity is connected to the negative pressure end of the vacuum pump (4); While working: The negative pressure end of the vacuum pump (4) draws a vacuum inside the mold (2) through the chamber and the micropore group; The gas at the positive pressure end of the vacuum pump (4) enters the heat transfer cavity (8) through one of the air inlets (16), and then pushes the flow disturbance device to rotate in the heat transfer cavity (8), thereby disturbing the heat transfer liquid in the heat transfer cavity (8).

2. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: The heat conduction cavity (8) comprises: An annular main body segment, continuously distributed along the circumference of the side wall of the mold (2); The longitudinal end section is closed with the upper and lower end surfaces of the mold (2), and its bottom has an arc extension portion matching the bottom wall of the mold (2).

3. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: The top of the heat conduction cavity (8) is connected to the outside through at least one exhaust hole to release the gas in the heat conduction cavity (8).

4. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: The spoiler is rod-shaped and has an arc-shaped structure extending along the circumference of the heat-conducting cavity (8).

5. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: A negative pressure cavity (33) is provided at the bottom of the mold (2). The negative pressure cavity (33) is connected to the mold cavity of the mold (2) via a cavity and a micropore group formed in the side wall of the mold (2). The negative pressure cavity (33) is connected to the negative pressure end of a vacuum pump (4). The negative pressure cavity (33), the cavity and the micropore group are evacuated by the vacuum pump (4), so that a vacuum environment is formed inside the mold (2).

6. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: A switching device is provided outside the two air inlets (16), the switching device comprising a fixed sleeve (21), the fixed sleeve (21) being fixedly connected to the outer wall of the mold (2), one end of the fixed sleeve (21) being connected to two air inlet pipes (23) corresponding to the positions of the two air inlets (16), the other ends of the two air inlet pipes (23) being fixedly connected to an air collecting plate (22), the two air inlet pipes (23) being communicated with the air collecting plate (22), the outside of the air collecting plate (22) being covered with a rotating plate (24), the rotating plate (24) being rotatably connected to the inner wall of the air collecting plate (22), the middle of the rotating plate (24) being connected to a rotating sleeve (31), the rotating sleeve (31) being sleeved on the top end of the second pipe (20).

7. The arc quartz crucible vacuum pumping device according to claim 6, characterized in that: The outer wall of the rotating disk (24) is connected to an impeller (25), the inner wall of the gas collecting disk (22) is provided with an annular groove (32), the impeller (25) can rotate in the annular groove (32), the bottom of the gas collecting disk (22) is provided with an air inlet hole (28), the gas flow path of the air inlet hole (28) is tangent to the inner wall of the annular groove (32), the outside of the air inlet hole (28) is connected to the top of the first pipe (19) through a third pipe (29), the top of the first pipe (19) is connected to a dispersion box (27), the dispersion box (27) is used to disperse the airflow at the positive pressure end of the vacuum pump (4), and one end of the third pipe (29) away from the gas collecting disk (22) is connected to the top of the dispersion box (27) and communicates with the inside of the dispersion box (27).

8. The arc quartz crucible vacuum pumping device according to claim 7, characterized in that: The rotating disk (24) is hollow, and a notch (26) is provided at one end of the rotating disk (24) close to the air inlet pipe (23). One end of the rotating disk (24) contacts the gas collecting disk (22), and is configured such that when a projection surface of the notch (26) completely overlaps or partially overlaps a projection surface at an inlet of the air inlet pipe (23), gas in the rotating disk (24) can enter the air inlet pipe (23) through the notch (26).

9. The arc quartz crucible vacuum pumping device according to claim 1, characterized in that: The spoiler device comprises a spoiler plate (6), the interior of the spoiler plate (6) having a hollow structure, and a heat transfer liquid is contained in a region outside the spoiler plate (6) in the heat transfer cavity (8). When the spoiler plate (6) rotates, the heat transfer liquid rotates synchronously in the heat transfer cavity along with the rotation of the spoiler plate (6), so that the heat transfer liquid flows regularly in the heat transfer cavity (8).

10. A method for evacuating a quartz crucible by an electric arc method, using the quartz crucible evacuation device by an electric arc method according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1. Using a vacuum pump (4) to evacuate the interior of the mold (2) through a heat-conducting cavity (8) disposed in the side wall of the mold (2) and a micropore group connected thereto, wherein the micropore group is connected to the negative pressure end of the vacuum pump (4) through a cavity in the side wall of the mold (2); S2. The gas generated by the positive pressure end of the vacuum pump (4) is introduced into the heat transfer cavity (8) through a selected air inlet (16), so that the flow disturbance device in the heat transfer cavity (8) rotates under the drive of the gas, thereby disturbing the heat transfer liquid in the heat transfer cavity (8), so as to quickly cool the side wall of the mold (2).

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