A stepped microheater for phase change photonic devices and its fabrication method

By designing a stepped microheater and optimizing the electrode structure and thermal management, the problems of low heating efficiency and large heat loss in traditional phase change photonic devices have been solved, realizing efficient and rapid phase change material state changes, which is suitable for efficient integration and large-scale production of photonic devices.

CN119916594BActive Publication Date: 2026-06-30HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Filing Date
2025-02-24
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Traditional phase-change photonic devices have low heating efficiency, high heat loss, and slow switching speed due to their heating electrode structure.

Method used

A stepped microheater is designed, comprising a substrate, a bottom electrode, an intermediate electrode, a top electrode, and a phase change material thin film. By optimizing the shape and thickness of the electrodes, an open stepped structure is adopted to optimize the current distribution, so that the current density in the heating area reaches the peak and Joule heat is concentrated in the heating area. Combined with the perforation design of the cladding, thermal management is optimized.

Benefits of technology

It achieves high heating efficiency, low heat loss, fast switching speed, and simple preparation process, making it easy to integrate and mass-produce.

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Abstract

This application belongs to the field of optoelectronics, specifically disclosing a stepped microheater for phase-change photonic devices and its fabrication method. The microheater includes a substrate, a phase-change material thin film, and at least three electrode layers. Except for the bottom electrode, the remaining electrodes are arranged in an open stepped pattern on both sides of the phase-change material thin film from bottom to top. A heating region is formed on the bottom electrode, and the phase-change material thin film is disposed above the heating region. The open stepped structure of the electrodes optimizes the current distribution on the electrodes when a driving signal is applied to the top electrode, causing the current density in the heating region to reach a peak value, thereby generating Joule heating in the heating region and achieving a change in the state of the phase-change material thin film. The stepped microheater for phase-change photonic devices provided in this application features high heating efficiency, low heat loss, and fast switching speed.
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