High-power radio frequency power supply and control method thereof

Abstract

The invention discloses a high-power radio frequency power supply and a control method thereof. The high-power radio frequency power supply comprises a signal source circuit, an ATT circuit, a power division circuit, a first switch radio frequency power amplification circuit, a second switch radio frequency power amplification circuit, a combining circuit, an LC filter circuit, a detection circuit, a power supply circuit and a control circuit. The first switch radio frequency power amplification circuit comprises a first switch, a first amplitude modulation and phase modulation circuit and a first amplification circuit PA1 which are cascaded; the second switch radio frequency power amplification circuit comprises a second switch, a second amplitude modulation and phase modulation circuit and a second amplification circuit PA2 which are cascaded; the input end of the control circuit is connected with the output end of the detection circuit, and a plurality of output ends of the control circuit are respectively connected with the control ends of the signal source circuit, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit and the power supply circuit. Two or more switch radio frequency power amplification circuits with switches and amplitude modulation and phase modulation circuits are combined to output high-efficiency and high-power radio frequency signals.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a high-power radio frequency power supply and a control method thereof. Background Art

[0002] At present, with the development of industry and semiconductor technology, many high-power industrial equipment, medical equipment, and semiconductor processing equipment use RF power supplies designed with transistors with high efficiency, long life, and small size as the driving source of the equipment. With the development of the manufacturing process of the above industrial equipment, the power of the RF power supply is required to be larger and larger, and the accuracy is also higher and higher. However, the power of the existing single transistor is limited, and the design of a high-power RF power supply is difficult. When adjusting the target power, the software is generally used to adjust the target output power. The response speed is generally in milliseconds or seconds, and there are problems of slow or excessive response speed. At the same time, the output impedance of the RF power supply is generally a fixed 50 ohm output, and the input impedance of a general plasma chamber does not match the output impedance of the RF power supply and will change according to the characteristics of the gas in the plasma chamber. It is necessary to add a matcher between the RF power supply and the plasma chamber to adjust the output impedance of the RF power supply and the input impedance of the plasma chamber. However, the matcher is limited by the adjustment range of its capacitance and can only meet the impedance matching between the RF power supply and the plasma chamber in most cases.

[0003] Therefore, in order to solve the above problems of low power of a single transistor, high difficulty in designing a high-power RF power supply, slow response speed, and full coverage of output impedance matching, the present invention proposes a high-power RF power supply. Summary of the invention

[0004] The purpose of the present invention is to provide a high-power RF power supply and a control method thereof, which adopts two or more switching RF power amplifier circuits with switches and amplitude modulation and phase modulation circuits to combine and output high-efficiency and high-power RF signals to solve the problems of low power of a single transistor, high difficulty in designing a high-power RF power supply, slow response speed, and full coverage of output impedance matching.

[0005] The first aspect of the present invention provides a high-power radio frequency power supply, including: a signal source circuit, an ATT circuit, a power division circuit, a first switch radio frequency power amplifier circuit, a second switch radio frequency power amplifier circuit, a combining circuit, an LC filter circuit, a detection circuit, a power supply circuit and a control circuit;

[0006] The output end of the signal source circuit is connected to the input end of the ATT circuit, the output end of the ATT circuit is connected to the input end of the power division circuit, one output end of the power division circuit is connected to the input end of the first switch RF power amplifier circuit, the other output end of the power division circuit is connected to the input end of the second switch RF power amplifier circuit, the output ends of the first switch RF power amplifier circuit and the second switch RF power amplifier circuit are respectively connected to the two input ends of the combiner circuit, the output end of the combiner circuit is connected to the input end of the LC filter circuit, the output end of the LC filter circuit is connected to the main path input end of the detector circuit, and the main path output end of the detector circuit is the RF output end of the high-power RF power supply;

[0007] The signal source circuit outputs a radio frequency signal of set frequency and amplitude, which is divided into two paths through the ATT circuit to the power division circuit, and is respectively amplified by the first switch radio frequency power amplifier circuit and the second switch radio frequency power amplifier circuit, and then input into the combining circuit for combining, and then filtered by the LC filtering circuit, and finally output through the main path of the detection circuit;

[0008] The first switch RF power amplifier circuit includes a cascaded first switch, a first amplitude modulation and phase modulation circuit, and a first amplifier circuit PA1, the input end of the first switch is the input end of the first switch RF power amplifier circuit, and the output end of the first amplifier circuit PA1 is the output end of the first switch RF power amplifier circuit;

[0009] The second switch RF power amplifier circuit includes a cascaded second switch, a second amplitude modulation and phase modulation circuit, and a second amplifier circuit PA2, the input end of the second switch is the input end of the second switch RF power amplifier circuit, and the output end of the second amplifier circuit PA2 is the output end of the second switch RF power amplifier circuit;

[0010] The power, frequency and duty cycle of the output signal are adjusted by adjusting the switch state and the switch interval time of the first switch and the second switch, and the power after the combined circuit is adjusted by adjusting the amplitude and phase of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit;

[0011] The input end of the power supply circuit is the power supply input end of the high-power radio frequency power supply, and the multiple output ends of the power supply circuit are respectively connected to the power supply ends of the amplifiers in the first amplifying circuit PA1 and the second amplifying circuit PA2;

[0012] The input end of the control circuit is connected to the output end of the detection circuit, and the multiple output ends of the control circuit are respectively connected to the signal source circuit, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit and the control end of the power supply circuit; the detection circuit couples and extracts the forward power signal and the reverse power signal and outputs them to the control circuit after processing. After calculation and processing by the control circuit, the control circuit controls the signal source circuit, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit and the power supply circuit, so that the high-power radio frequency power supply outputs a radio frequency signal with a target frequency, duty cycle and target power.

[0013] Further, the positions of the first switch and the first amplitude modulation and phase modulation circuit are interchanged, or the first switch and the first amplitude modulation and phase modulation circuit are separately or together integrated in the first amplifying circuit PA1;

[0014] The second switch and the second amplitude modulation and phase modulation circuit are interchanged in position, or the second switch and the second amplitude modulation and phase modulation circuit are integrated separately or together in the second amplifying circuit PA2.

[0015] Furthermore, the first switch and the second switch are combined into a main switch and placed at the input end of the power division circuit.

[0016] Furthermore, the amplifier circuit is a single power amplifier module or is composed of a plurality of power amplifier modules combined in parallel; the combining method includes a balanced combining method and a Doherty combining method;

[0017] The power amplifier module includes at least one stage of amplifier circuit structure, and the amplifier circuit structure includes a single-tube amplifier structure, a balanced combining structure, a push-pull amplifier structure and a Doherty structure.

[0018] Furthermore, the power amplifier module includes a cascaded pre-amplifier, a driver amplifier and a final amplifier;

[0019] The final amplifier includes a power divider, a first final amplifier C-1, a second final amplifier C-2 and a combiner; wherein the pre-amplifier and the driver amplifier amplify the input signal according to a certain gain, output the power divider, and divide it into two paths through the power divider, one path is amplified by the first final amplifier C-1, and the other path is amplified by the second final amplifier C-2, and the two amplified signals are combined at the combiner and then output;

[0020] The input end and the output end of the first final-stage amplifier C-1 and the second final-stage amplifier C-2 are provided with an input matching circuit and an output matching circuit respectively.

[0021] Further, the detection circuit includes a main path, a forward coupling sampling circuit, a reverse coupling sampling circuit and a signal processing circuit;

[0022] The input end of the main path is connected to the output end of the LC filter circuit, and the output end of the main path is the RF output end of the high-power RF power supply;

[0023] The forward coupling sampling circuit is used to couple and extract the radio frequency signal input from the main path input end of the detection circuit, that is, the forward power signal, and output it to the first input end of the signal processing circuit; the reverse coupling sampling circuit is used to couple and extract the radio frequency signal reflected from the main path output end of the detection circuit, that is, the reverse power signal, and output it to the second input end of the signal processing circuit;

[0024] The forward coupling sampling circuit and the reverse coupling sampling circuit are composed of one or more arbitrary combinations of microstrip coupling, capacitive coupling, winding coil coupling, copper ring coupling, and cavity coupling;

[0025] The signal processing circuit converts the coupled input forward power signal and reverse power signal into level signals or digital signals respectively and outputs them to the control circuit for analysis and processing; the signal processing circuit is composed of any one of a diode detection circuit, an integrated IC chip detection circuit, and a high-speed ADC analog-to-digital conversion circuit or any combination of circuits.

[0026] Furthermore, the power division circuit includes several sub-power division circuits, and the combining circuit also includes several sub-combining circuits. The output end of the power division circuit is connected to the input end of the sub-power division circuit, and the output end of each sub-power division circuit is connected to the input end of a switching RF power amplifier circuit. The output end of the switching RF power amplifier circuit is connected to the input end of the sub-combining circuit, and the output end of the sub-combining circuit is connected to the input end of the combining circuit.

[0027] Furthermore, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit, the detection circuit, the control circuit and the power supply circuit constitute a closed-loop automatic gain control module M1, so that the high-power RF power supply can output a RF signal with a target frequency, duty cycle and target power;

[0028] The control method of the closed-loop automatic gain control module M1 is as follows: after the control circuit receives the target power setting value, it retrieves the data under the corresponding power, performs initial parameter configuration on the signal source circuit, the ATT circuit, the first amplitude modulation and phase modulation circuit, the second amplitude modulation and phase modulation circuit and the power supply circuit, controls the signal source circuit to send a signal of corresponding frequency and amplitude, and outputs it to the power division circuit after adjustment by the ATT circuit, and divides it into two paths, which are respectively adjusted by the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit, and then power amplified by the first amplifier circuit PA1 and the second amplifier circuit PA2, and finally outputted by the detection circuit while performing closed-loop gain adjustment, that is, the power of the forward power signal is extracted by coupling with the detection circuit, and compared with the target power, and the control circuit controls the power supply circuit in real time according to the comparison result to make it output the gate voltage or / and drain voltage corresponding to the first amplifier circuit PA1 and the second amplifier circuit PA2, or adjusts the control level of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit in real time, so that the signal power value outputted by the detection circuit meets the set target power value requirement;

[0029] In addition, the control circuit also adjusts the power, frequency and duty cycle of the output signal by controlling the switching state and switching interval time of the first switch and the second switch.

[0030] Furthermore, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit, the detection circuit and the control circuit constitute a closed-loop automatic gain control module M2, so as to realize that the high-power RF power supply outputs a RF signal with a target frequency, duty cycle and target power;

[0031] The control method of the closed-loop automatic gain control module M2 is as follows: after the control circuit receives the target power setting value, it retrieves the data under the corresponding power, performs initial parameter configuration on the signal source circuit, the ATT circuit, the first amplitude modulation and phase modulation circuit, the second amplitude modulation and phase modulation circuit and the power supply circuit, controls the signal source circuit to send a signal of corresponding frequency and amplitude, and outputs it to the power division circuit after adjustment by the ATT circuit, and divides it into two paths, which are respectively adjusted by the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit, and then power amplified by the first amplifier circuit PA1 and the second amplifier circuit PA2, and finally outputted by the detection circuit while performing closed-loop gain adjustment, that is, the power of the forward power signal is extracted by coupling the detection circuit and compared with the target power, and the control circuit controls the ATT circuit in real time according to the comparison result to adjust the attenuation of the ATT circuit, or adjusts the control level of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit in real time, so that the signal power value output by the detection circuit meets the set target power value requirement;

[0032] In addition, the control circuit also adjusts the power, frequency and duty cycle of the output signal by controlling the switching state and switching interval time of the first switch and the second switch.

[0033] According to a second aspect of the present invention, there is provided a control method, which is applied to the high-power RF power supply according to the first aspect, and the method comprises the following steps:

[0034] S1, startup, program loading and internal parameter configuration, including initial parameter data of signal source circuit, ATT circuit, first switch, first amplitude modulation and phase modulation circuit, second switch, second amplitude modulation and phase modulation circuit, power supply circuit and configuration parameters corresponding to each frequency, duty cycle and power level, configuration is completed and standby;

[0035] S2. The target frequency, duty cycle, target power value and RF power on instruction are received through the control circuit, and the control circuit retrieves the corresponding configuration parameters and turns on the RF power output;

[0036] S3, the control circuit obtains the forward power signal and the reverse power signal extracted by the detection circuit coupling and processed by the detection circuit, wherein the forward power signal corresponds to the actual output frequency, duty cycle and power, and the reverse power signal corresponds to the output reflected power;

[0037] S4, judging whether the actual reflected power exceeds the alarm threshold;

[0038] S5. If yes, the control circuit adjusts the ATT circuit parameters or the output voltage parameters of the power circuit to reduce the output power, or controls the signal source circuit to turn off or the first switch and the second switch to turn off and output a fault alarm signal;

[0039] S6, judging whether the actual frequency, duty cycle and actual power value exceed the target frequency, duty cycle and target power value;

[0040] S7, the control circuit automatically adjusts the actual frequency, duty cycle and power through the closed-loop automatic gain control module M1 or the closed-loop automatic gain control module M2 to achieve the target frequency, duty cycle and target power values, and saves and executes the adjusted parameters after calibration;

[0041] S8, if the control circuit receives the new target frequency, duty cycle and target power value, the control circuit retrieves the corresponding configuration parameters for configuration, and implements real-time adjustment of the frequency, duty cycle and power value through the signal source circuit and the automatic gain control module M1. If the requirements are not met, step S3 is executed again;

[0042] S9. If the control circuit receives a fault alarm signal or an external fault signal, it shuts down the RF output or the power supply according to the preset operation, otherwise it works normally.

[0043] In general, the above technical solutions conceived by the present invention can achieve the following beneficial effects compared with the prior art:

[0044] The high-power RF power supply of the present invention realizes RF high-power output by combining two or more switching RF power amplifier circuits. The internal circuit can also form a closed-loop automatic gain control module M1 or a closed-loop automatic gain control module M2 to realize fast automatic gain control of the frequency, duty cycle and power of the output signal, and can realize microsecond response and adjustment of the output power at the corresponding frequency, greatly improving the adjustment speed of the RF power supply. At the same time, the amplitude and phase of each amplifier circuit can be adjusted by the switch and amplitude modulation and phase modulation circuit in the switching RF power amplifier circuit to realize the optimal high-power combined output. At the same time, pulse signals with different frequencies and duty cycles can be output by controlling the different switching time states of the first switch and the second switch, and the efficiency can be optimized under different powers. Moreover, the detection coupling sampling and signal processing of the output signal can calibrate the signal frequency and output power, so that the actual output power meets the set target power value, thereby ensuring the power accuracy of the RF power supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 A circuit diagram of a high-power radio frequency power supply provided in an embodiment of the present application;

[0046] Figure 2 A circuit structure diagram of an amplifier circuit PA corresponding to a high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0047] Figure 3 A circuit structure diagram of a final amplifier in an amplifier circuit PA corresponding to a high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0048] Figure 4 A circuit structure diagram of a power amplifier circuit corresponding to a high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0049] Figure 5 A circuit structure diagram of a power amplifier circuit corresponding to another high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0050] Figure 6 A circuit structure diagram of a power amplifier circuit corresponding to another high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0051] Figure 7 A circuit structure diagram of a power amplifier circuit corresponding to a high-power radio frequency power supply circuit provided in an embodiment of the present application;

[0052] Figure 8 This is an internal structure diagram of a control circuit corresponding to a high-power RF power supply circuit provided in an embodiment of the present application. DETAILED DESCRIPTION

[0053] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. Based on the embodiments provided in this application, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0054] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0055] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0056] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0057] The present application provides a high-power RF power supply applied to the field of semiconductor technology, which includes: a signal source circuit, an ATT circuit, a power division circuit, a switch RF power amplifier circuit 1, a switch RF power amplifier circuit 2, a combining circuit, an LC filtering circuit, a detection circuit, a power supply circuit and a control circuit; the RF main signal output by the signal source circuit is divided into two paths through the ATT circuit to the power division circuit, and is amplified by the switch RF power amplifier circuit 1 and the switch RF power amplifier circuit 2 respectively, and then input into the combining circuit for combining, and then filtered by the LC filtering circuit and the detection circuit for output, and the detection circuit collects the output RF main signal and then outputs a forward signal and a reverse signal, and after calculation and processing, the control circuit controls the output of the required RF power signal. The present invention adopts two or more switch RF power amplifier circuits with switches and amplitude modulation and phase modulation circuits to combine and output high-efficiency and high-power RF signals, and the output signal is filtered and closed-loop gain controlled, which effectively solves the signal quality and power control stability problems under high power, and at the same time adopts switches and amplitude modulation and phase modulation circuits to support pulse and amplitude and phase adjustment, which greatly improves the application range of the product.

[0058] An embodiment of the present application provides a high-power RF power supply, which includes: a signal source circuit, an ATT circuit, a power division circuit, a switching RF power amplifier circuit 1, a switching RF power amplifier circuit 2, a combining circuit, an LC filtering circuit, a detection circuit, a power supply circuit and a control circuit; wherein the switching RF power amplifier circuit 1 is composed of a switch 1, an amplitude modulation and phase modulation circuit 1, and an amplifier circuit PA1 in cascade; the switching RF power amplifier circuit 2 is composed of a switch 2, an amplitude modulation and phase modulation circuit 2, and an amplifier circuit PA2 in cascade.

[0059] The output end of the signal source circuit is connected to the input end of the ATT circuit, the control end of the signal source circuit is connected to one of the control output ends of the control circuit, the output end of the ATT circuit is connected to the input end of the power divider circuit, the control end of the ATT circuit is connected to another control output end of the control circuit, one output end of the power divider circuit is connected to the input end of the switching RF power amplifier circuit 1, the other output end of the power divider circuit is connected to the input end of the switching RF power amplifier circuit 2, the output ends of the switching RF power amplifier circuit 1 and the switching RF power amplifier circuit 2 are respectively connected to the two input ends of the combining circuit, the output end of the combining circuit is connected to the input end of the LC filter circuit, the output end of the LC filter circuit is connected to the main path input end of the detection circuit, and the main path output end of the detection circuit is the RF output end of this high-power RF power supply.

[0060] The RF signal output by the signal source circuit is divided into two paths through the ATT circuit to the power division circuit, and is amplified by the switching RF power amplifier circuit 1 and the switching RF power amplifier circuit 2 respectively, input into the combining circuit for combining, filtered by the LC filtering circuit, and finally output through the main path of the detection circuit. The detection circuit couples the extracted forward power signal and reverse power signal and outputs them to the control circuit after processing. After calculation and processing by the control circuit, the control circuit controls the power supply device to output the required RF power signal.

[0061] Specifically, the switching RF power amplifier circuit 1 is composed of a cascade connection of switch 1, an amplitude modulation and phase modulation circuit 1, and an amplifier circuit PA1, the input end of the switch 1 is the input end of the switching RF power amplifier circuit 1, the output end of the switch 1 is connected to the input end of the amplitude modulation and phase modulation circuit 1, the output end of the amplitude modulation and phase modulation circuit 1 is connected to the input end of the amplifier circuit PA1, and the output end of the amplifier circuit PA1 is the output end of the switching RF power amplifier circuit 1; the switching RF power amplifier circuit 2 is composed of a cascade connection of switch 2, an amplitude modulation and phase modulation circuit 2, and an amplifier circuit PA2, the input end of the switch 2 is the input end of the switching RF power amplifier circuit 2, the output end of the switch 2 is connected to the input end of the amplitude modulation and phase modulation circuit 2, the output end of the amplitude modulation and phase modulation circuit 2 is connected to the input end of the amplifier circuit PA2, and the output end of the amplifier circuit PA2 is the output end of the switching RF power amplifier circuit 2.

[0062] Among them, switch 1 and switch 2 are used to control the on and off of the signal input to the switch RF power amplifier circuit 1 and the switch RF power amplifier circuit 2, or to perform pulse amplification signal control, that is, to control the switch switching frequency according to the pulse frequency and duty cycle. Therefore, by controlling the different switching time states of switch 1 and switch 2, pulse signals with different frequencies and duty cycles can be output, and by controlling the on and off of switch 1 and switch 2, the signal working states of the switch RF power amplifier circuit 1 and the switch RF power amplifier circuit 2 can be controlled respectively, thereby achieving efficiency under different powers.

[0063] The AM phase modulation circuit 1 and the AM phase modulation circuit 2 are amplitude and phase adjustment circuits respectively, and the amplitude and phase can be continuously or discontinuously adjustable. Under different combined output power conditions, the switching RF power amplifier circuit composed of the power division circuit, the switching RF power amplifier circuit 1, the switching RF power amplifier circuit 2, and the combining circuit can achieve the optimal efficiency of the amplifier circuit by adjusting the amplitude and phase of the AM phase modulation circuit 1 and the AM phase modulation circuit 2 (two amplifiers are combined to achieve maximum power, the combined amplitude and phase of the two amplifiers must be equal, the combined power is maximum, the corresponding power loss is reduced, the output power and efficiency are improved, in other words, the power is maximum when the efficiency is highest).

[0064] In this embodiment, the control ends of the switch 1, the amplitude modulation phase modulation circuit 1, the switch 2, and the amplitude modulation phase modulation circuit 2 in the switch RF power amplifier circuit are respectively connected to four output ports of the control circuit. In addition, the switch 1 and the amplitude modulation phase modulation circuit 1 can also be interchanged, or separately or together integrated in the amplifier circuit PA1; wherein, the switch 2 and the amplitude modulation phase modulation circuit 2 can also be interchanged, or separately or together integrated in the amplifier circuit PA1.

[0065] Amplifier circuit PA1 and amplifier circuit PA2 are respectively RF power amplifier modules including at least one stage of amplifier circuit, and the structure of each stage of amplifier circuit can be a single-tube amplifier structure, a balanced combining structure, a push-pull amplifier structure, or a Doherty structure, and the amplifiers therein can operate in Class A, Class B, Class AB, Class C, Class D, and Class E.

[0066] The power division circuit, the switching RF power amplifier circuit 1, the switching RF power amplifier circuit 2, and the combining circuit constitute a high-power RF amplifier circuit. Among them, the switching RF power amplifier circuit 1 and the switching RF power amplifier circuit 2 can be amplifier circuits with the same frequency, power, circuit and device, or amplifier circuits with different frequencies or powers or circuits and devices, and constitute symmetrical or asymmetrical combining amplifier circuits, same-frequency or different-frequency combining amplifier circuits. There can also be two or more switching RF power amplifier circuits 1, two or more switching RF power amplifier circuits 2 that are combined in pairs or simultaneously to form a multi-channel high-power RF amplifier circuit that combines multiple power amplifier circuits.

[0067] The combining circuit includes but is not limited to a circuit designed by a microstrip and discrete components in a balanced or unbalanced combining manner, a combining circuit constructed by an inductor, a capacitor and a resistor, a combining circuit composed of a magnetic winding, or an integrated RF combining device. The power splitter circuit is used to split the signal output by the ATT circuit and output it to the input ends of the switching RF power amplifier circuit 1 and the switching RF power amplifier circuit 2 respectively. The ATT circuit is an amplitude adjustable device, and the control parameters of the ATT circuit are adjusted by the control circuit to adjust the amplitude or gain of the ATT circuit.

[0068] The signal source circuit is used to generate a radio frequency signal or / and a radio frequency signal combined with an external source input signal and output it to the ATT circuit.

[0069] The LC filter circuit may include but is not limited to a filter circuit composed of an inductor and a capacitor mounted on a printed circuit board, a filter circuit composed of one or a combination of a cavity filter, a dielectric filter, and an LTCC filter, or a filter circuit with reverse isolation composed of an isolator or a capacitor and an inductor. The LC filter circuit may be a low-pass filter circuit, a band-pass filter circuit, or a high-pass filter circuit.

[0070] The detection circuit is composed of a main path, a forward coupling sampling circuit, a reverse coupling sampling circuit, and a signal processing circuit. The input end of the main path is connected to the output end of the LC filter circuit, and the output end of the main path is the RF output end of the high-power RF power supply. The forward coupling sampling circuit is used to couple and extract the RF signal input from the input end of the main path of the detection circuit, that is, the forward power signal, and output it to the first input end of the signal processing circuit. The reverse coupling sampling circuit is used to couple and extract the RF signal reflected from the output end of the main path of the detection circuit, that is, the reverse power signal, and output it to the second input end of the signal processing circuit. The output end of the signal processing circuit is connected to one of the input ends of the control circuit.

[0071] The forward coupling sampling circuit and the reverse coupling sampling circuit can be composed of one or more arbitrary combinations of microstrip coupling, capacitor coupling, winding coil coupling, copper ring coupling, and cavity coupling. The signal processing circuit converts the coupled input forward power signal and reverse power signal into level signals or digital signals and outputs them to the control circuit for analysis and processing; the signal processing circuit includes but is not limited to any one of the diode detection circuit, integrated IC chip detection circuit, and high-speed ADC analog-to-digital conversion circuit or any combination of circuits.

[0072] The input end of the power supply circuit is the AC power input end of the high-power RF power supply, the control end is connected to another output end of the control circuit, and multiple output ends of the power supply are respectively connected to the power supply ends of the amplifiers in the amplifier circuit PA1 and the amplifier circuit PA2. The power supply module includes an AC-DC module and a DC-DC module. The AC-DC module converts the external AC power into a DC voltage, and the DC-DC module converts the DC voltage into the power supply voltage required by the internal amplifier circuit and the chip.

[0073] Among them, the first input end of the control circuit is connected to the external interface, the second input end is connected to the output end of the detection circuit, and the multiple output ends are respectively connected to the signal source circuit, the ATT circuit, the switch 1, the amplitude modulation and phase modulation circuit 1, the switch 2, the amplitude modulation and phase modulation circuit 2, and the control end of the power supply circuit.

[0074] The control circuit at least includes a high-speed processing unit, a logic control unit, an AD / DA unit, a storage unit, and a temperature detection circuit, which are used to perform calculations on the level signal output by the detection circuit, and to control and perform temperature detection on the signal source circuit, the power supply module, the switching RF power amplifier circuit 1, and the switching RF power amplifier circuit 2.

[0075] In this embodiment, a high-power RF amplifier circuit, an LC filter circuit, a detection circuit, a control circuit, and a power supply module can form a closed-loop automatic gain control module M1 to achieve rapid response and automatic control of the target output power value set for the high-power RF power supply; wherein the output end of the detection circuit is connected to one of the input ends of the control circuit, and one of the output ends of the control circuit is connected to the control input end of the power supply circuit.

[0076] The automatic gain control method of the automatic gain control module M1 is as follows: after the control circuit receives the target power setting value, it retrieves the data at the corresponding power, configures the parameters of the signal source circuit, the ATT circuit, the high-power RF amplifier circuit, and the power module, controls the signal source circuit to send a signal of corresponding frequency and amplitude, which is output to the high-power RF amplifier circuit after adjustment by the ATT circuit, and performs closed-loop gain adjustment while being output by the detection circuit, that is, the signal extracted and converted by the detection circuit is input to the control circuit for calculation, and compared with the corresponding parameters at the target power, and the control circuit controls the power module in real time to output the gate voltage and / or drain voltage corresponding to the amplifier circuit PA1 and the amplifier circuit PA2, or adjusts the control level of the amplitude modulation and phase modulation circuit 1 and the amplitude modulation and phase modulation circuit 2 in real time, so that the signal power value output by the detection circuit meets the set target power value requirement.

[0077] In addition, the control circuit can also control the switch state and the switch interval time of switch 1 and / or switch 2 to output pulse signals with different powers, frequencies and duty cycles in a closed loop.

[0078] In this embodiment, the ATT circuit, the high-power RF amplifier circuit, the LC filter circuit, the detection circuit, and the control circuit can form a closed-loop automatic gain control module M2 to achieve rapid response and automatic control of the target output power value set for the high-power RF power supply; wherein one of the output ends of the control circuit is connected to the control input end of the ATT circuit.

[0079] The automatic gain control method of the automatic gain control module M2 is as follows: after the control circuit receives the target power setting value, it retrieves the data at the corresponding power, configures the parameters of the signal source circuit, the ATT circuit, the high-power RF amplifier circuit, and the power supply module, and controls the signal source circuit to send a signal of corresponding frequency and amplitude, which is output to the high-power RF amplifier circuit after adjustment by the ATT circuit, and is output by the detection circuit while performing closed-loop gain adjustment, that is, the signal extracted and converted by the detection circuit is input to the control circuit for calculation, and after comparison with the corresponding parameters at the target power, the control circuit controls and adjusts the attenuation of the ATT circuit in real time, or adjusts the control level of the amplitude modulation and phase modulation circuit 1 and the amplitude modulation and phase modulation circuit 2 in real time, so that the signal power value output by the detection circuit meets the set target power value requirement.

[0080] In addition, the control circuit can also control the switch state and the switch interval time of switch 1 and / or switch 2 to output pulse signals with different powers, frequencies and duty cycles in a closed loop.

[0081] In addition, the present invention also provides specific embodiments.

[0082] Embodiment 1

[0083] like Figure 1 As shown, a circuit structure diagram of a 13.56MHz / 6KW adjustable RF power supply of the first embodiment of the present invention includes: a signal source circuit, an ATT circuit, a power division circuit, a switching RF power amplifier circuit 1, a switching RF power amplifier circuit 2, a combining circuit, an LC filtering circuit, a detection circuit, a power supply circuit, and a control circuit; wherein, the switching RF power amplifier circuit 1 is composed of a switch 1, an amplitude modulation and phase modulation circuit 1, and an amplifier circuit PA1 in cascade; the switching RF power amplifier circuit 2 is composed of a switch 2, an amplitude modulation and phase modulation circuit 2, and an amplifier circuit PA2 in cascade.

[0084] The output end of the signal source circuit is connected to the input end of the ATT circuit, the control end of the signal source circuit is connected to one of the control output ends of the control circuit, the output end of the ATT circuit is connected to the input end of the power divider circuit, the control end of the ATT circuit is connected to another control output end of the control circuit, one output end of the power divider circuit is connected to the input end of the switching RF power amplifier circuit 1, the other output end of the power divider circuit is connected to the input end of the switching RF power amplifier circuit 2, the output ends of the switching RF power amplifier circuit 1 and the switching RF power amplifier circuit 2 are respectively connected to the two input ends of the combining circuit, the output end of the combining circuit is connected to the input end of the LC filter circuit, the output end of the LC filter circuit is connected to the main path input end of the detection circuit, and the main path output end of the detection circuit is the RF output end of the high-power RF power supply.

[0085] Among them, the switching RF power amplifier circuit 1 is composed of a cascade of switch 1, an amplitude modulation and phase modulation circuit 1, and an amplifier circuit PA1. The input end of switch 1 is the input end of the switching RF power amplifier circuit 1, the output end of switch 1 is connected to the input end of the amplitude modulation and phase modulation circuit 1, the output end of the amplitude modulation and phase modulation circuit 1 is connected to the input end of the amplifier circuit PA1, and the output end of the amplifier circuit PA1 is the output end of the switching RF power amplifier circuit 1.

[0086] Among them, the switching RF power amplifier circuit 2 is composed of a cascade of switch 2, an amplitude modulation and phase modulation circuit 2, and an amplifier circuit PA2. The input end of switch 2 is the input end of the switching RF power amplifier circuit 2, the output end of switch 2 is connected to the input end of the amplitude modulation and phase modulation circuit 2, the output end of the amplitude modulation and phase modulation circuit 2 is connected to the input end of the amplifier circuit PA2, and the output end of the amplifier circuit PA2 is the output end of the switching RF power amplifier circuit 2.

[0087] Among them, the input end of the power supply circuit is the AC power input end of this high-power RF power supply, its control end is connected to another output end of the control circuit, and multiple output ends of its power supply are respectively connected to the power supply ends of the amplifiers in the amplifier circuit PA1 and the amplifier circuit PA2.

[0088] Among them, the first input end of the control circuit is connected to the external interface, the second input end is connected to the output end of the detection circuit, and the multiple output ends are respectively connected to the signal source circuit, the ATT circuit, the switch 1, the amplitude modulation and phase modulation circuit 1, the switch 2, the amplitude modulation and phase modulation circuit 2, and the control end of the power supply circuit.

[0089] Among them, the signal source circuit outputs a radio frequency signal of a set frequency to the radio frequency input end of the ATT circuit according to the instruction of the control circuit; the signal source circuit in this embodiment can generate a CW single-tone signal of any frequency within the frequency range of 12.88MHz-14.22MHz or a CW swept frequency signal within the frequency range of 12.88MHz-14.22MHz according to the instruction of the control circuit, and can also generate a pulse signal at this frequency, and can adjust the frequency and duty cycle of the pulse signal according to the use requirements.

[0090] The ATT circuit is used to adjust the amplitude and phase of the input RF signal based on the control circuit signal, and output it to the RF input end of the high-power RF power amplifier circuit. The ATT circuit in this embodiment includes but is not limited to: a voltage-controlled attenuator, a digitally controlled attenuator, and an amplitude modulation and phase modulation circuit composed of discrete components and an amplitude adjustment circuit and a phase modulator circuit.

[0091] The high-power RF power amplifier circuit is used to amplify the RF signal inputted from its RF input terminal with high efficiency and high linearity, and can adjust the matching parameters of the amplifier in the module according to the input signal frequency, so that the output power and efficiency of the amplifier at this frequency are in the optimal state. The power supply terminal of the high-power RF power amplifier circuit is connected to the output terminal of the power supply circuit, and the output voltage of the power supply circuit can be controlled by the control circuit according to the output power, and the adjustment step of the output voltage of the power supply circuit can be roughly adjusted and fine-tuned according to the power difference between the set target power value and the original power value and the voltage value difference of the corresponding high-power RF power amplifier circuit at this power.

[0092] Furthermore, Figure 2 FIG. 1 shows a circuit structure diagram of an amplifier circuit PA corresponding to a high-power radio frequency power supply circuit operating at 12.88 MHz to 14.22 MHz in the first embodiment of the present invention. Figure 2 As shown, the amplifier circuit PA is composed of a pre-amplifier A, a driving amplifier B, a power divider, a final amplifier C-1, a final amplifier C-2, and a combiner in cascade, wherein the pre-amplifier and the driving amplifier amplify the input signal at a certain gain, output the power divider, and divide it into two paths through the power divider, one of which is amplified by the final amplifier C-1, and the other is amplified by the final amplifier C-2. The two amplified signals are combined at the combiner and output.

[0093] like Figure 3 As shown, the input and output ends of the final amplifier in the amplifier circuit PA include input matching and output matching circuits respectively. By adjusting the input and output matching parameters of the pre-amplifier A, the driver amplifier B, and the final amplifier C, the output power, efficiency and other parameters of the amplifier circuit at different frequencies are obtained. The amplifier circuit PA in the high-power RF power amplifier can also include but is not limited to 2 or more Figure 2 The corresponding amplifier modules are high-power amplifier modules that are combined by balanced combining or Doherty combining.

[0094] Furthermore, Figure 4 , Figure 5 , Figure 6 The structure change diagrams of the corresponding switch and amplitude modulation and phase modulation circuit in a high-power RF power supply circuit of the first embodiment are shown respectively, wherein: Figure 5 exist Figure 4 On the basis of, the design positions of switch 1 and amplitude modulation phase modulation circuit 1 in the circuit are interchanged, and the design positions of switch 2 and amplitude modulation phase modulation circuit 2 in the circuit are interchanged, Figure 6 exist Figure 4 On the basis of, the position of the switch circuit is designed at the input end of the power divider circuit.

[0095] Furthermore, Figure 7 A combining circuit structure diagram of a power amplifier circuit corresponding to a high-power RF power supply circuit of the first embodiment is shown, wherein the input end of the power divider 1 is the input end of the amplifier circuit, the two output ends of the power divider 1 are respectively connected to the input ends of the power divider 2 and the power divider 3, the two output ends of the power divider 2 are respectively connected to the input ends of the amplifier PA1 and the amplifier PA2, the two output ends of the power divider 3 are respectively connected to the input ends of the amplifier PA3 and the amplifier PA4, the output ends of the amplifier PA1 and the amplifier PA2 are respectively connected to the two input ends of the combiner T1, the output ends of the amplifier PA3 and the amplifier PA4 are respectively connected to the two input ends of the combiner T2, the output ends of the combiner T1 and the combiner T2 are respectively connected to the two input ends of the combiner T3, the output end of the combiner T3 is the output end of the combining circuit, and the combining circuit can realize the combined amplification output of multiple amplifiers, thereby providing a higher power output for the RF power supply.

[0096] The LC filter circuit is used to filter the input high-power RF signal based on the control circuit signal and then output it to the RF input end of the detection circuit.

[0097] Among them, the detection circuit is used to perform forward power sampling and reverse power sampling on the RF signal incident on the input end and the RF signal reflected on the output end, and then output them to the signal processing circuit; the detection circuit in this embodiment 1 is composed of a main path, a forward coupling sampling circuit, a reverse coupling sampling circuit, and a signal processing circuit. The input end of the main path is connected to the output end of the LC filter circuit, and the output end of the main path is the RF output end of the high-power RF power supply; the forward coupling sampling circuit is used to couple and extract the RF signal input from the input end of the main path of the detection circuit, that is, the forward power signal, and output it to the first input end of the signal processing circuit, and the reverse coupling sampling circuit is used to couple and extract the RF signal reflected by the output end of the main path of the detection circuit, that is, the reverse power signal, and output it to the second input end of the signal processing circuit, and the output end of the signal processing circuit is connected to one of the input ends of the control circuit; the forward coupling sampling circuit and the reverse coupling sampling circuit can be composed of one or more arbitrary combinations of microstrip coupling, capacitor coupling, winding coil coupling, copper ring coupling, and cavity coupling; the forward coupling sampling circuit is used to collect the amplitude and phase of the RF signal output by the LC filter circuit, and the reverse coupling sampling circuit is used to collect the amplitude and phase of the RF signal reflected by the output end of the detection circuit.

[0098] Among them, the output end of the signal processing circuit is connected to the input end of the control circuit, and is used to perform level conversion or analog-to-digital conversion on the input forward power sampling signal and the reverse power sampling signal and then output them to the control circuit for processing; wherein, the signal processing circuit in this embodiment 1 includes but is not limited to any one of a diode detection circuit, an integrated chip detection circuit, and an ADC analog-to-digital conversion circuit or a combination of circuits.

[0099] Among them, the power supply circuit is used to convert the AC input voltage into a DC voltage, provide the DC voltage required for the signal source circuit, ATT circuit, signal processing circuit, and active circuits in the control circuit, and supply power to the high-power RF power amplifier circuit based on the control circuit signal; wherein, the power supply circuit in this embodiment one includes an AC-DC power supply module, a DC-DC power supply module, and an LDO voltage regulator circuit, wherein the AC-DC power supply module is used to convert the input 220VAC alternating current into a DC voltage in the voltage range of 10V-60V that can be adjusted according to the control level, wherein the DC-DC power supply module is used to convert the DC voltage converted by the AC-DC power supply module into a fixed DC voltage, wherein the LDO voltage regulator circuit is used to stabilize the DC voltage output by the DC-DC power supply module and convert it into the voltage required for the active device or IC chip in this embodiment one to work.

[0100] Among them, the control circuit is used to receive external device information and panel control information, and at the same time realize internal signal control, logic processing, data conversion and storage functions; Figure 8As shown, in the first embodiment, the control circuit includes an interface unit, a high-speed processing unit, a logic control unit, an AD / DA unit, a storage unit, and a temperature detection circuit; wherein the interface unit is used to adapt to the docking and signal conversion of different communication or operation interfaces; the high-speed processing unit is used to receive instructions and information from external devices or local operation interfaces to implement internal parameter configuration, logic control, information reporting and other functions; the logic control unit is used to control the working status of each internal module; the AD / DA unit is used to convert the internal analog signal into a digital signal or convert the digital signal into an analog signal and then output it; the storage unit is used to store various instructions and information.

[0101] Among them, the RF power supply of the first embodiment also includes an automatic gain control circuit, in which the ATT circuit, the high-power RF power amplifier circuit, the LC filter circuit, the detection circuit, the signal processing circuit, and the error amplifier circuit 2 in the control circuit can constitute an automatic gain control module M2 to achieve rapid response and adjustment of the set power value of the RF power supply in microseconds; wherein, the control circuit also includes a reference circuit, one end of the reference circuit is connected to the AD / DA unit, and the other end is connected to the control end of the ATT circuit or the power supply circuit, and different control and protection thresholds are set by setting different reference voltages, thereby achieving closed-loop control of the ATT circuit or the closed-loop control of the power supply circuit.

[0102] The automatic gain control method of the automatic gain control module M2 is as follows: after the control circuit receives the target power setting value, it retrieves the data at the corresponding power, configures the parameters of the signal source circuit, the ATT circuit, the high-power RF amplifier circuit, and the power supply module, and controls the signal source circuit to send a signal of corresponding frequency and amplitude, which is output to the high-power RF amplifier circuit after adjustment by the ATT circuit, and is output by the detection circuit while performing closed-loop gain adjustment, that is, the signal extracted and converted by the detection circuit is input to the control circuit for calculation, and after comparison with the corresponding parameters at the target power, the control circuit controls and adjusts the attenuation of the ATT circuit in real time, or adjusts the control level of the amplitude modulation and phase modulation circuit 1 and the amplitude modulation and phase modulation circuit 2 in real time, so that the signal power value output by the detection circuit meets the set target power value requirement.

[0103] The control circuit can also be used to control the switch state and the switch interval time of switch 1 and / or switch 2 to output pulse signals with different powers, frequencies and duty cycles in a closed loop.

[0104] In some embodiments, the high-power RF power amplifier circuit of this embodiment can also be a RF power amplifier module with a fixed width match, and its operating bandwidth can cover the frequency range of use; at the same time, the LC filter circuit can also be a LC filter circuit with a fixed width match, and its operating bandwidth can cover the frequency range of use.

[0105] In some embodiments, the RF power supply of this embodiment can also adjust the matching parameters of the circuit related to frequency and power or the device model or the number of amplifiers, so that the RF power supply of this embodiment operates in a frequency range of 400KHz, 2MHz, 13.56MHz, 27.12MHz, 40.68MHz, etc., and achieves a rated output of 600W, 1000W, 1500W, 2000W, 3000W, 5000W, 10000W or even higher power, and the output power can be continuously adjustable from 5W or 1% of the rated power to the rated output power.

[0106] Embodiment 2

[0107] A high-power RF power supply corresponding to the second embodiment of the present invention, wherein the circuit principle block diagram of the RF power supply can be based on the first embodiment, wherein the automatic gain control circuit can also be transformed from the automatic gain control module M2 to the automatic gain control module M1, specifically: a high-power RF power amplifier circuit, an LC filter circuit, a detection circuit, a detection circuit, a control circuit, and a power supply circuit can constitute the automatic gain control module M1, so as to achieve a rapid response and adjustment of the set power value of the RF power supply in microseconds; wherein the first input end of the error amplifier circuit 1 included in the control circuit is connected to the output end of the signal processing circuit, and the second input end thereof is connected to the reference level signal corresponding to the frequency and the output power inside the control circuit, and the output end of the error amplifier circuit 1 is connected to the control input end of the power supply circuit.

[0108] The automatic gain control method of the automatic gain control module M1 is as follows: after the control circuit receives the target power setting value, it retrieves the data at the corresponding power, configures the parameters of the signal source circuit, the ATT circuit, the high-power RF amplifier circuit, and the power module, controls the signal source circuit to send a signal of corresponding frequency and amplitude, which is output to the high-power RF amplifier circuit after adjustment by the ATT circuit, and performs closed-loop gain adjustment while being output by the detection circuit, that is, the signal extracted and converted by the detection circuit is input to the control circuit for calculation, and compared with the corresponding parameters at the target power, and the control circuit controls the power module in real time to output the gate voltage and / or drain voltage corresponding to the amplifier circuit PA1 and the amplifier circuit PA2, or adjusts the control level of the amplitude modulation and phase modulation circuit 1 and the amplitude modulation and phase modulation circuit 2 in real time, so that the signal power value output by the detection circuit meets the set target power value requirement.

[0109] The control circuit can also be used to control the switch state and the switch interval time of switch 1 and / or switch 2 to output pulse signals with different powers, frequencies and duty cycles in a closed loop.

[0110] Finally, the control method of this high-power RF power supply is:

[0111] S1, start, program loading and internal parameter configuration, including the initial experience data of the signal source circuit, ATT circuit, switch 1 in the high-power RF amplifier circuit, AM phase modulation circuit 1, switch 2, AM phase modulation circuit 2, and amplifier circuit PA1, the various power amplifier tubes in the amplifier circuit PA1, and the power module circuit and the corresponding data acquisition parameters under each power level, and convert them into corresponding configuration parameters, the configuration is completed and standby;

[0112] S2. Receive instructions such as target power value or pulse frequency and duty cycle and RF power on through the external interface or operation interface of the control circuit, and the control circuit retrieves the preset configuration parameters under the corresponding target power or pulse frequency and duty cycle, including the amplifier, switch and amplitude modulation and phase modulation configuration parameters in the high-power RF power amplifier circuit, and turns on the RF power output;

[0113] S3, the control circuit obtains the forward power signal and the reverse power signal extracted by the detection circuit coupling and converted and processed by the signal processing circuit in the detection circuit, wherein the forward power signal corresponds to the actual output power, and the reverse power signal corresponds to the output reflected power;

[0114] S4. "The actual reflected power exceeds the alarm threshold"?

[0115] S5, the control circuit analyzes and processes the reflected signal output by the detection circuit, adjusts the ATT parameter or the output voltage parameter of the power supply circuit to reduce the output power, or controls the signal source circuit, or switch 1 and switch 2 and turns off the input source signal or turns off the high-power RF amplifier circuit and outputs an alarm signal;

[0116] S6, "The actual power value or pulse frequency and duty cycle value exceed the target value"?

[0117] S7, the control circuit analyzes and calibrates the signal output by the detection circuit, and automatically adjusts the closed-loop automatic gain control module M1 or the closed-loop automatic gain control module M2 so that the actual value reaches the target frequency value range, and saves and executes the adjusted parameters after calibration;

[0118] S8, when the control circuit receives the new target power value, the control circuit calls the preset corresponding configuration parameters for configuration, and adjusts the pulse frequency and power value in real time through the signal source circuit and the automatic gain control module M1. If the requirements are not met, the control circuit executes S3 again;

[0119] S9. When the control circuit receives a fault alarm signal or an external fault signal from the signal source circuit, the detection circuit, the power supply circuit, or the temperature detection circuit, it shuts down the RF output or the power supply according to the preset operation, otherwise it works normally.

[0120] It should be pointed out that the technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. In addition, according to the needs of implementation, the various steps / components described in this application can be split into more steps / components, and two or more steps / components or partial operations of steps / components can be combined into new steps / components to achieve the purpose of the present invention.

[0121] It is easy for a person skilled in the art to understand that the above-mentioned embodiments only express several implementation methods of the present application, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A high-power radio frequency power supply, characterized in that: include: Signal source circuit, ATT circuit, power division circuit, first switch RF power amplifier circuit, second switch RF power amplifier circuit, combining circuit, LC filter circuit, detection circuit, power supply circuit and control circuit; The output end of the signal source circuit is connected to the input end of the ATT circuit, the output end of the ATT circuit is connected to the input end of the power division circuit, one output end of the power division circuit is connected to the input end of the first switch RF power amplifier circuit, the other output end of the power division circuit is connected to the input end of the second switch RF power amplifier circuit, the output ends of the first switch RF power amplifier circuit and the second switch RF power amplifier circuit are respectively connected to the two input ends of the combiner circuit, the output end of the combiner circuit is connected to the input end of the LC filter circuit, the output end of the LC filter circuit is connected to the main path input end of the detector circuit, and the main path output end of the detector circuit is the RF output end of the high-power RF power supply; The signal source circuit outputs a radio frequency signal of set frequency and amplitude, which is divided into two paths through the ATT circuit to the power division circuit, and is respectively amplified by the first switch radio frequency power amplifier circuit and the second switch radio frequency power amplifier circuit, and then input into the combining circuit for combining, and then filtered by the LC filtering circuit, and finally output through the main path of the detection circuit; The first switch RF power amplifier circuit includes a cascaded first switch, a first amplitude modulation and phase modulation circuit, and a first amplifier circuit PA1, the input end of the first switch is the input end of the first switch RF power amplifier circuit, and the output end of the first amplifier circuit PA1 is the output end of the first switch RF power amplifier circuit; The second switch RF power amplifier circuit includes a cascaded second switch, a second amplitude modulation and phase modulation circuit, and a second amplifier circuit PA2, the input end of the second switch is the input end of the second switch RF power amplifier circuit, and the output end of the second amplifier circuit PA2 is the output end of the second switch RF power amplifier circuit; The power, frequency and duty cycle of the output signal are adjusted by adjusting the switch state and the switch interval time of the first switch and the second switch, and the power after the combined circuit is adjusted by adjusting the amplitude and phase of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit; The input end of the power supply circuit is the power supply input end of the high-power radio frequency power supply, and the multiple output ends of the power supply circuit are respectively connected to the power supply ends of the amplifiers in the first amplifying circuit PA1 and the second amplifying circuit PA2; The input end of the control circuit is connected to the output end of the detection circuit, and the multiple output ends of the control circuit are respectively connected to the signal source circuit, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit and the control end of the power supply circuit; the detection circuit couples and extracts the forward power signal and the reverse power signal and outputs them to the control circuit after processing. After calculation and processing by the control circuit, the control circuit controls the signal source circuit, the ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit and the power supply circuit, so that the high-power radio frequency power supply outputs a radio frequency signal with a target frequency, duty cycle and target power.

2. The high-power radio frequency power supply according to claim 1, characterized in that: The positions of the first switch and the first amplitude modulation and phase modulation circuit are interchanged, or the first switch and the first amplitude modulation and phase modulation circuit are separately or together integrated in the first amplification circuit PA1; The second switch and the second amplitude modulation and phase modulation circuit are interchanged in position, or the second switch and the second amplitude modulation and phase modulation circuit are integrated separately or together in the second amplifying circuit PA2.

3. The high-power radio frequency power supply according to claim 1, characterized in that: The first switch and the second switch are combined into a main switch and are placed at the input end of the power dividing circuit.

4. The high-power radio frequency power supply according to claim 1, characterized in that: The amplifier circuit is a single power amplifier module or is composed of multiple power amplifier modules in parallel; the combining methods include balanced combining and Doherty combining; The power amplifier module includes at least one stage of amplifier circuit structure, and the amplifier circuit structure includes a single-tube amplifier structure, a balanced combining structure, a push-pull amplifier structure and a Doherty structure.

5. The high-power radio frequency power supply according to claim 4, characterized in that: The power amplifier module includes a cascaded pre-amplifier, a driver amplifier and a final amplifier; The final amplifier includes a power divider, a first final amplifier C-1, a second final amplifier C-2 and a combiner; wherein the pre-amplifier and the driver amplifier amplify the input signal according to a certain gain, output the power divider, and divide it into two paths through the power divider, one path is amplified by the first final amplifier C-1, and the other path is amplified by the second final amplifier C-2, and the two amplified signals are combined at the combiner and then output; The input end and the output end of the first final-stage amplifier C-1 and the second final-stage amplifier C-2 are provided with an input matching circuit and an output matching circuit respectively.

6. The high-power radio frequency power supply according to claim 1, characterized in that: The detection circuit includes a main path, a forward coupling sampling circuit, a reverse coupling sampling circuit and a signal processing circuit; The input end of the main path is connected to the output end of the LC filter circuit, and the output end of the main path is the RF output end of the high-power RF power supply; The forward coupling sampling circuit is used to couple and extract the radio frequency signal input from the main path input end of the detection circuit, that is, the forward power signal, and output it to the first input end of the signal processing circuit; the reverse coupling sampling circuit is used to couple and extract the radio frequency signal reflected from the main path output end of the detection circuit, that is, the reverse power signal, and output it to the second input end of the signal processing circuit; The forward coupling sampling circuit and the reverse coupling sampling circuit are composed of one or more arbitrary combinations of microstrip coupling, capacitive coupling, winding coil coupling, copper ring coupling, and cavity coupling; The signal processing circuit converts the coupled input forward power signal and reverse power signal into level signals or digital signals respectively and outputs them to the control circuit for analysis and processing; The signal processing circuit is composed of any one of a diode detection circuit, an integrated IC chip detection circuit, and a high-speed ADC analog-to-digital conversion circuit or any combination of circuits.

7. The high-power radio frequency power supply according to claim 1, characterized in that: The power division circuit includes several sub-power division circuits, and the combining circuit also includes several sub-combining circuits. The output end of the power division circuit is connected to the input end of the sub-power division circuit, and the output end of each sub-power division circuit is connected to the input end of a switching RF power amplifier circuit. The output end of the switching RF power amplifier circuit is connected to the input end of the sub-combining circuit, and the output end of the sub-combining circuit is connected to the input end of the combining circuit.

8. The high-power radio frequency power supply according to claim 1, characterized in that: The first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit, the detection circuit, the control circuit and the power supply circuit constitute a closed-loop automatic gain control module M1, which enables the high-power RF power supply to output a RF signal with a target frequency, duty cycle and target power; The control method of the closed-loop automatic gain control module M1 is as follows: after the control circuit receives the target power setting value, it retrieves the data under the corresponding power, performs initial parameter configuration on the signal source circuit, the ATT circuit, the first amplitude modulation and phase modulation circuit, the second amplitude modulation and phase modulation circuit and the power supply circuit, controls the signal source circuit to send a signal of corresponding frequency and amplitude, and outputs it to the power division circuit after adjustment by the ATT circuit, and divides it into two paths, which are respectively adjusted by the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit, and then power amplified by the first amplifier circuit PA1 and the second amplifier circuit PA2, and finally outputted by the detection circuit while performing closed-loop gain adjustment, that is, the power of the forward power signal is extracted by coupling with the detection circuit, and compared with the target power, and the control circuit controls the power supply circuit in real time according to the comparison result to make it output the gate voltage or / and drain voltage corresponding to the first amplifier circuit PA1 and the second amplifier circuit PA2, or adjusts the control level of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit in real time, so that the signal power value outputted by the detection circuit meets the set target power value requirement; In addition, the control circuit also adjusts the power, frequency and duty cycle of the output signal by controlling the switching state and switching interval time of the first switch and the second switch.

9. The high-power radio frequency power supply according to claim 8, characterized in that: The ATT circuit, the first switch, the first amplitude modulation and phase modulation circuit, the second switch, the second amplitude modulation and phase modulation circuit, the detection circuit and the control circuit constitute a closed-loop automatic gain control module M2, which enables the high-power RF power supply to output a RF signal with a target frequency, duty cycle and target power; The control method of the closed-loop automatic gain control module M2 is as follows: after the control circuit receives the target power setting value, it retrieves the data under the corresponding power, performs initial parameter configuration on the signal source circuit, the ATT circuit, the first amplitude modulation and phase modulation circuit, the second amplitude modulation and phase modulation circuit and the power supply circuit, controls the signal source circuit to send a signal of corresponding frequency and amplitude, and outputs it to the power division circuit after adjustment by the ATT circuit, and divides it into two paths, which are respectively adjusted by the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit, and then power amplified by the first amplifier circuit PA1 and the second amplifier circuit PA2, and finally outputted by the detection circuit while performing closed-loop gain adjustment, that is, the power of the forward power signal is extracted by coupling the detection circuit and compared with the target power, and the control circuit controls the ATT circuit in real time according to the comparison result to adjust the attenuation of the ATT circuit, or adjusts the control level of the first amplitude modulation and phase modulation circuit and the second amplitude modulation and phase modulation circuit in real time, so that the signal power value output by the detection circuit meets the set target power value requirement; In addition, the control circuit also adjusts the power, frequency and duty cycle of the output signal by controlling the switching state and switching interval time of the first switch and the second switch.

10. A control method, applied to the high-power radio frequency power supply according to claim 9, characterized in that: The method comprises the following steps: S1, startup, program loading and internal parameter configuration, including initial parameter data of signal source circuit, ATT circuit, first switch, first amplitude modulation and phase modulation circuit, second switch, second amplitude modulation and phase modulation circuit, power supply circuit and configuration parameters corresponding to each frequency, duty cycle and power level, configuration is completed and standby; S2. The target frequency, duty cycle, target power value and RF power on instruction are received through the control circuit, and the control circuit retrieves the corresponding configuration parameters and turns on the RF power output; S3, the control circuit obtains the forward power signal and the reverse power signal extracted by the detection circuit coupling and processed by the detection circuit, wherein the forward power signal corresponds to the actual output frequency, duty cycle and power, and the reverse power signal corresponds to the output reflected power; S4, judging whether the actual reflected power exceeds the alarm threshold; S5. If yes, the control circuit adjusts the ATT circuit parameters or the output voltage parameters of the power circuit to reduce the output power, or controls the signal source circuit to turn off or the first switch and the second switch to turn off and output a fault alarm signal; S6, judging whether the actual frequency, duty cycle and actual power value exceed the target frequency, duty cycle and target power value; S7, the control circuit automatically adjusts the actual frequency, duty cycle and power through the closed-loop automatic gain control module M1 or the closed-loop automatic gain control module M2 to achieve the target frequency, duty cycle and target power values, and saves and executes the adjusted parameters after calibration; S8, if the control circuit receives the new target frequency, duty cycle and target power value, the control circuit retrieves the corresponding configuration parameters for configuration, and implements real-time adjustment of the frequency, duty cycle and power value through the signal source circuit and the automatic gain control module M1. If the requirements are not met, step S3 is executed again; S9. If the control circuit receives a fault alarm signal or an external fault signal, it shuts down the RF output or the power supply according to the preset operation, otherwise it works normally.

Images