Environment-friendly treatment system for recombining substances by plasma technology and control method of environment-friendly treatment system

Abstract

The invention discloses an environment-friendly treatment system for recombining substances based on a plasma technology and a control method of the environment-friendly treatment system. The eco-friendly treatment system comprises a gas supply system, a plasma source and a reaction collision tube. The gas supply system is configured to provide an ignition gas and a gas to be treated. The plasma source is connected with the gas supply system and is configured to receive the ignition gas and a part of the to-be-treated gas and generate low-temperature high-density plasma. The reaction collision tube is disposed downstream of the gas supply system and the plasma source. The low-temperature high-density plasma and the other part of the to-be-treated gas flow into the reaction collision pipe, and collide in the reaction collision pipe so as to recombine substances contained in the to-be-treated gas. Molecular bonding is broken through high-frequency oscillation, and compared with a traditional thermal plasma treatment / thermal combustion mode, energy can be saved by several times.

Description

Technical Field

[0001] The present application relates to the field of plasma technology, and in particular to an environmentally friendly treatment system and a control method thereof based on the recombination of substances using plasma technology. Background Art

[0002] DC plasma torch technology can generate high-temperature thermal plasma, and the technology has been widely used in the industrial field. Nowadays, the use of high-temperature thermal plasma to treat waste has been implemented in many countries. Its working principle is to apply the heat energy of high-temperature plasma to the waste, so that the chemical bonds between the organic substances in the waste are destroyed, and then atomized, ionized, and pyrolyzed. However, in the current application of DC plasma torch technology, the service life of the torch electrode is short. For devices that need to operate for a long time, frequent shutdowns to replace electrodes will lead to reduced efficiency.

[0003] On the other hand, the application of different plasma technologies requires different device designs and matching temperature or power regulation. Wrong plasma temperature or power will cause the cavity wall of the plasma device to be sputtered or contaminate downstream devices.

[0004] In view of this, it is necessary to provide a new environmentally friendly treatment system and a control method thereof based on the plasma technology to reorganize substances to solve the above problems. Summary of the invention

[0005] The present application provides an environmentally friendly treatment system and a control method thereof based on the use of plasma technology to reorganize substances, which can solve the shortcomings of traditional high-temperature thermal plasma treatment of waste.

[0006] On the one hand, the present application provides an environmental treatment system based on the recombination of substances by plasma technology, comprising: a gas supply system, a plasma source and a reaction collision tube. The gas supply system is arranged downstream of a solid waste treatment device, wherein the gas supply system is configured to provide an ignition gas and a gas to be treated, and the gas to be treated comes from the output of the solid waste treatment device. The plasma source is connected to the gas supply system, configured to receive the ignition gas and a portion of the gas to be treated, and to generate a low-temperature high-density plasma based on the gas to be treated and a corresponding radio frequency (RF) frequency. The reaction collision tube is arranged downstream of the gas supply system and the plasma source, wherein the low-temperature high-density plasma and another portion of the gas to be treated flow into the reaction collision tube, and the two collide in the reaction collision tube so that the substances contained in the gas to be treated are recombined.

[0007] In some embodiments, the reaction collision tube includes an inlet end, an outlet end and a side wall located between the inlet end and the outlet end, and another part of the gas to be processed enters the reaction collision tube through an opening on the side wall of the reaction collision tube so that a low-pressure zone is formed at the inlet end of the reaction collision tube and a gas flow is formed from the inlet end to the outlet end; and wherein the low-temperature and high-density plasma enters the reaction collision tube from the inlet end of the reaction collision tube, the low-temperature and high-density plasma passes through the low-pressure zone to reduce its working pressure, and the low-temperature and high-density plasma advances together with the gas flow, and then collides with the gas to be processed in the reaction collision tube so that the substances contained in the gas to be processed are recombined.

[0008] In some embodiments, the pressure of the low temperature high density plasma is less than 20 Torr and the density is greater than 10 12 / cm -3 .

[0009] In some embodiments, the environmental treatment system further includes: a spectrometer and a controller. The spectrometer is coupled to the reaction collision tube and is configured to obtain a spectrum data in the reaction collision tube. The controller is electrically connected to the gas supply system, the plasma source and the spectrometer, and is configured to receive the spectrum data from the spectrometer to generate an analysis result, and control the gas supply system to provide the gas flow and flow ratio of the to-be-treated gas to the plasma source and the reaction collision tube respectively and / or control the RF frequency or power of the plasma source according to the analysis result.

[0010] In some embodiments, the analysis result includes obtaining the type and / or wavelength variation of the substance contained in the gas to be treated based on the aspect ratio and half-peak width of the wavelength spectrum peak.

[0011] In some embodiments, the environmental treatment system further includes: a catalyst reaction chamber, disposed downstream of the reaction collision tube, configured to receive the residual gas output from the reaction collision tube, wherein the catalyst in the catalyst reaction chamber oxidizes or reduces the residual gas.

[0012] In some embodiments, the environmental protection processing system further includes: a pump configured to control the pressure of the low-temperature high-density plasma.

[0013] In some embodiments, the gas supply system is further configured to provide a process-assisting gas, and the gas supply system transmits the process-assisting gas to the plasma source or the reaction collision tube to adjust the gas amount.

[0014] In some embodiments, the process-assisting gas includes hydrogen or oxygen.

[0015] In some embodiments, the gas supply system includes a gas separator configured to separate macromolecular gas from the gas to be processed, and the macromolecular gas is transmitted to the plasma source, and the rest of the gas to be processed is transmitted to the reaction collision tube.

[0016] On the other hand, the present application provides a control method, which is applied to an environmental treatment system based on the recombination of substances by plasma technology, wherein the environmental treatment system includes a gas supply system, a plasma source and a reaction collision tube, and the gas supply system is arranged downstream of a solid waste treatment device. The control method includes: controlling the gas supply system to provide an ignition gas and a gas to be treated, wherein the gas to be treated comes from the output of the solid waste treatment device; transmitting the ignition gas and a portion of the gas to be treated to the plasma source; controlling the plasma source to generate a low-temperature high-density plasma based on the gas to be treated and a corresponding radio frequency (RF) frequency; and transmitting the low-temperature high-density plasma and another portion of the gas to be treated to the reaction collision tube so that the two collide in the reaction collision tube to recombine the substances contained in the gas to be treated.

[0017] In some embodiments, the reaction collision tube comprises an inlet end, an outlet end and a side wall between the inlet end and the outlet end. The control method further comprises: controlling another part of the gas to be processed to enter the reaction collision tube through an opening on the side wall of the reaction collision tube so as to form a low pressure zone at the inlet end of the reaction collision tube and form a gas flow from the inlet end to the outlet end; and controlling the low temperature and high density plasma to enter the reaction collision tube from the inlet end of the reaction collision tube, wherein the low temperature and high density plasma passes through the low pressure zone to reduce its working pressure, and the low temperature and high density plasma advances together with the gas flow, and then collides with the gas to be processed in the reaction collision tube so that the substances contained in the gas to be processed are recombined.

[0018] In some embodiments, the pressure of the low temperature high density plasma is less than 20 Torr and the density is greater than 10 12 / cm -3 .

[0019] In some embodiments, the environmental protection treatment system also includes a spectrometer and a controller, and the control method also includes: controlling the spectrometer to obtain spectral data in the reaction collision tube; and controlling the controller to receive the spectral data from the spectrometer to generate an analysis result, and according to the analysis result, controlling the gas supply system to provide the gas flow and flow ratio of the gas to be treated to the plasma source and the reaction collision tube respectively and / or controlling the RF frequency or power of the plasma source.

[0020] In some embodiments, the analysis result includes obtaining the type and / or wavelength variation of the substance contained in the gas to be treated based on the aspect ratio and half-peak width of the wavelength spectrum peak.

[0021] In some embodiments, the environmental treatment system further includes a catalyst reaction chamber, and the control method further includes: controlling the catalyst reaction chamber to receive the residual gas output from the reaction collision tube; and oxidizing or reducing the residual gas through the catalyst in the catalyst reaction chamber.

[0022] In some embodiments, the environmental protection treatment system further includes a pump, and the control method further includes: controlling the pressure of the low-temperature high-density plasma by the pump.

[0023] In some embodiments, the control method further includes: controlling the gas supply system to provide a process auxiliary gas; and transmitting the process auxiliary gas to the plasma source or the reaction collision tube to adjust the gas amount.

[0024] In some embodiments, the process-assisting gas includes hydrogen or oxygen.

[0025] In some embodiments, the gas supply system includes a gas separator, and the control method further includes: separating the macromolecular gas in the gas to be processed by the gas separator; and transmitting the macromolecular gas to the plasma source, and transmitting the rest of the gas to be processed to the reaction collision tube.

[0026] Compared with the prior art, the environmentally friendly treatment system and control method of the present application based on plasma technology for reorganizing substances can treat a variety of gases. The plasma technology of low-temperature, low-pressure, high-density plasma is used to reorganize substances in a physical way, using high-frequency oscillation to break molecular bonds. High-temperature electrons collide with gas molecules to directly ionize gas molecules, which can save several times more energy than traditional thermal plasma treatment / thermal combustion methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0028] Figure 1 A schematic diagram showing an environmentally friendly treatment system based on the recombination of substances using plasma technology according to an embodiment of the present application;

[0029] Figure 2 show Figure 1 A schematic diagram of the gas supply system; and

[0030] Figure 3 show Figure 1 Schematic diagram of the reaction collision tube. DETAILED DESCRIPTION

[0031] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein. Instead, these embodiments are provided so that the present application will be more comprehensive and complete and the concepts of the example embodiments will be fully conveyed to those skilled in the art. The accompanying drawings are only schematic illustrations of the present application and are not necessarily drawn to scale. The same reference numerals in the figures represent the same or similar parts, and thus their repeated description will be omitted.

[0032] The environmental protection treatment system based on the reorganization of substances by plasma technology and its control method of the present application can be combined with a waste treatment system. The focus of waste treatment is to stabilize, reduce and detoxify the waste. At present, the mainstream of waste treatment is to use incineration and thermal cracking. However, it is difficult to fully recover the potential energy and resources in the waste by incineration. In view of this, the present application can improve resource recovery efficiency and reduce energy loss by combining plasma technology with an environmental protection treatment system.

[0033] Please refer to Figure 1 , which shows a schematic diagram of an environmentally friendly treatment system based on plasma technology to reorganize substances according to an embodiment of the present application. The environmentally friendly treatment system 1 based on plasma technology to reorganize substances of the present application includes a gas supply system 10, a plasma source 20, a reaction collision tube 30, a catalyst reaction chamber 40, a pump 50, an exhaust gas detection unit 60, a spectrometer 70, a controller 80 and a solid waste treatment device 90.

[0034] like Figure 1As shown, the gas supply system 10 is disposed downstream of the solid waste treatment device 90. The gas supply system 10 is configured to provide ignition gas, gas to be treated and / or process auxiliary gas, wherein the gas to be treated comes from the output of the solid waste treatment device 90. The plasma source 20 and the reaction collision tube 30 are connected to the gas supply system 10 to receive the gas from the gas supply system 10, wherein the reaction collision tube 30 is disposed downstream of the plasma source 20.

[0035] In the present application, the solid waste treatment device 90 is, for example, a carbonization furnace, and the downstream end of the gas supply system 10 can be connected to a recovery device. The waste will first undergo a carbonization reaction in the carbonization furnace, and then the reacted gas (to be treated gas) will be transmitted to the gas supply system 10, the plasma source 20 and the reaction collision tube 30 to use plasma to dissociate the to-be-treated gas. Carbonization technology is to improve the recovery rate of energy and resources by converting the carbon component in organic matter into carbon-containing substances. In some embodiments, the waste gas generated by the carbonization furnace usually contains methane. In some embodiments, when methane with a flow rate of 5000sccm is used as the waste to be treated and plasma is generated with an RF power of 5KW, methane can produce more than 95% of hydrogen and solid carbon through a plasma dissociation reaction, effectively avoiding the generation of a large amount of CO, CO2 and nitrogen oxides. The hydrogen and carbon after the reaction can be collected and reused by a recovery device. Hydrogen is mainly used as a reactant in the chemical industry (e.g., petrochemical, glass and pharmaceutical industries). Carbon can be used in carbon fuel cells or sold in the form of carbon filaments.

[0036] For details, please refer to Figure 2 , which shows Figure 1 Schematic diagram of a gas supply system. The gas supply system 10 includes a first gas flow controller 11, a second gas flow controller 12, a third gas flow controller 13, a fourth gas flow controller 14 and a gas separator 15. The first gas flow controller 11 is connected between an ignition gas supply source and a plasma source 20. The first gas flow controller 11 is configured to control the flow rate of the ignition gas received from the ignition gas supply source flowing into the plasma source 20. The ignition gas generally uses a gas with low ionization energy and easy dissociation, such as argon.

[0037] like Figure 2As shown, the gas separator 15 is connected between the solid waste treatment device 90 and the second gas flow controller 12 and the third gas flow controller 13. In addition, the second gas flow controller 12 is connected to the plasma source 20, and the third gas flow controller 13 is connected to the reaction collision tube 30. The solid waste treatment device 90 outputs the gas to be treated, and the macromolecular gas in the gas to be treated is transmitted to the plasma source 20 through the gas separator 15, the second gas flow controller 12 and the third gas flow controller 13, and the remaining gas to be treated (that is, the remaining gas other than the macromolecular gas) is transmitted to the reaction collision tube 30. Specifically, the gas separator 15 is configured to distinguish the gas to be treated received from the solid waste treatment device 90 according to the size of the gas molecules. That is, the gas separator 15 uses, for example, an osmotic pressure difference to separate the macromolecular gas in the gas to be treated. The separated macromolecular gas is transmitted to a path provided with the second gas flow controller 12, and the remaining gas to be treated is transmitted to a path provided with the third gas flow controller 13. The second gas flow controller 12 is configured to control the flow rate of the macromolecular gas separated from the gas to be treated into the plasma source 20. The third gas flow controller 13 is configured to control the flow rate of the remaining gas to be treated into the reaction collision tube 30. Optionally, the diversion ratio of the gas to be treated to the plasma source 20 and the reaction collision tube 30 can be 0-50SLM to 0-1000SLM. It should be understood that, depending on the work requirements, the controller 80 can obtain corresponding information through power monitoring, spectral analysis, exhaust gas detection, etc., and analyze / calculate the multiple information to automatically adjust the diversion ratio of the gas to be treated, which will be described in detail later.

[0038] Alternatively, if Figure 2 As shown, the fourth gas flow controller 14 is connected between the process auxiliary gas supply source and the plasma source 20 and the reaction collision tube 30. The fourth gas flow controller 14 is configured to control the flow rate of the process auxiliary gas received from the process auxiliary gas supply source into the plasma source 20 and the reaction collision tube 30. The process auxiliary gas is a reducing or oxidizing gas, including hydrogen or oxygen. For example, the process auxiliary gas can directly reduce NO or oxidize NO to NO2, and then can be removed by catalytic reduction when it enters the catalyst reaction chamber 40 later. It should be understood that when the amount of gas to be treated is insufficient, the gas supply system 10 transmits the process auxiliary gas to the plasma source 20 and / or the reaction collision tube 30 to adjust the gas amount. Specifically, the controller 80 can determine how much process auxiliary gas needs to be provided to the plasma source 20 and / or the reaction collision tube 30 through the spectral data obtained from the spectrometer 70 and / or the detection results obtained from the tail gas detection unit.

[0039] In some embodiments, the first gas flow controller 11, the second gas flow controller 12, the third gas flow controller 13 and the fourth gas flow controller 14 are preferably mass flow controllers (MFCs). However, it should be understood that the working environment of the mass flow controller usually requires a higher pressure difference. Excessive pressure will reduce the mean free path of electrons in the plasma generated subsequently, increasing the difficulty of dissociation of the gas plasma. Therefore, in order to avoid increasing the overall pressure of the reaction line, in this embodiment, the flow control with a flow rate greater than 50SLM preferably uses a mechanical control valve to control the flow rate.

[0040] like Figure 1 As shown, the plasma source 20 is connected to the gas supply system 10, and is configured to receive the ignition gas and a portion of the gas to be treated (i.e., the macromolecular gas in the gas to be treated), and to generate plasma based on the gas to be treated and the corresponding radio frequency (RF) frequency. In this embodiment, the plasma generated by the plasma source 20 is a low-temperature, low-pressure, high-density plasma, and the plasma source 20 is preferably a transformer coupled plasma (TCP).

[0041] Plasma is the fourth state of matter and can be used to dissociate gases. Plasma can be divided into high-temperature plasma and low-temperature plasma according to its temperature. The temperature of high-temperature plasma is between 10 6 Up to 10 8 K, while the temperature of low-temperature plasma is between room temperature and tens of thousands K. Furthermore, plasma rings can be divided into hot plasma with a pressure above 100 Torr and cold plasma (non-thermal equilibrium plasma) with a pressure below 1 Torr.

[0042] Generally speaking, the use of high-temperature plasma will increase heat loss and the device needs to use corresponding heat-resistant materials, which increases the construction and maintenance costs of the device. In addition, atmospheric pressure plasma is prone to limiting the types of gases used (for example, carbon fluorides with strong bonding energy) due to insufficient energy density. In a plasma device, increasing power may not necessarily increase plasma density, but only increases ion bombardment and thermal electrons, and does not help the dissociation of the gas. In addition, the cavity wall is sputtered and the downstream is polluted due to the increase in the average potential between the electrode and the cavity wall. The environmental protection treatment system 1 based on the reorganization of substances with plasma technology provided in the present application can overcome the above-mentioned shortcomings, which integrates the advantages of plasma with real-time monitoring technology. The environmental protection treatment system 1 based on the reorganization of substances with plasma technology provided in the present application can be used in waste treatment, resource recovery, resource regeneration and material development, etc., expanding the application of resource regeneration technology and reducing the maintenance cost of the system.

[0043] Plasma is generated by collision. Electrons are accelerated in an electric field to obtain extremely high kinetic energy. When electrons collide with gas molecules or atoms, because the mass of electrons is much smaller than that of gas molecules or atoms, the result of the collision is not to increase the kinetic energy of gas molecules or atoms, but to increase their potential energy through inelastic collisions. The increase in potential energy will cause the migration of electrons in molecules or atoms. Sufficient energy can cause electrons to break away from molecules or atoms, that is, produce an ionization reaction. Since the charge of electrons is fixed, to increase the kinetic energy of electrons, it is necessary to increase the energy density or increase the mean free path. Therefore, in the present application, the plasma generated by the plasma source 20 is a low-temperature, low-pressure, and high-density plasma. Optionally, its pressure is less than 20 Torr and its density is greater than 10 12 / cm -3 . When the pressure is less than 1 Torr, it means that the number of gas particles inside is quite small, the probability of collision is also small, and the mean free path is large. When the mean free path is extremely large, electrons can be accelerated to high kinetic energy by the electric field, and their electron temperature (Te) can be as high as 30,000 degrees Celsius. Because ions have a much larger mass than electrons, the kinetic energy obtained by electric field acceleration is much smaller than that of electrons. Therefore, the temperature of ions (Tg) is lower than that of electrons, at about 200 degrees Celsius. In other words, the low-temperature, low-pressure, high-density plasma used in this application is a non-thermal equilibrium plasma, and the temperatures of various particles are different.

[0044] like Figure 1 As shown, the reaction collision tube 30 is arranged downstream of the gas supply system 10 and the plasma source 20. Low temperature and high density plasma and another part of the gas to be processed (that is, the rest of the gas to be processed) flow into the reaction collision tube 30, and the two collide in the reaction collision tube 30 so that the substances contained in the gas to be processed are reorganized. The plasma source 20 and the reaction collision tube 30 of the present application constitute a remote plasma system. That is, the gas to be processed is mainly introduced into the reaction collision tube 30, and the main collision reaction is also carried out in the reaction collision tube 30, rather than in the area of ​​plasma discharge (in the plasma source 20). Therefore, the reaction collision tube 30 is avoided from being damaged by plasma. Moreover, since what is introduced is low temperature and high density plasma, the reaction collision tube 30 is avoided from being damaged by high temperature, and its service life is improved.

[0045] In the reaction collision tube 30, the main energy is transferred to the electrons, and the high-temperature electrons collide with the gas molecules to directly free the gas molecules. In addition, the generated activation radicals can decompose the harmful gas molecules in the gas to be treated into harmless or easy-to-handle gases. Specifically, the low-temperature plasma is rich in electrons, ions, free radicals and excited state molecules, in which high-energy electrons collide with gas molecules (atoms), converting energy into the internal energy of ground state molecules (atoms), and a series of processes such as excitation, dissociation, and ionization occur, so that the gas is in an activated state. This provides excellent effects for some reactions that require a lot of activation energy (such as the removal of pollutants that are difficult to degrade in the atmosphere). In addition, it can also be used to treat volatile organic pollutants and sulfur-containing pollutants with low concentrations, high flow rates, and large flows. Therefore, the use of low-temperature, low-pressure, and high-density plasma does not require heating of all gases, so it has the advantages of low energy consumption and has the ability to simultaneously treat multiple harmful gases. In addition, the plasma technology of low-temperature, low-pressure, and high-density plasma adopted in this application is to reorganize the material in a physical way, and use high-frequency oscillation to break the molecular bonds, which can save several times more energy than the traditional thermal plasma treatment / thermal combustion method.

[0046] Furthermore, in the prior art, waste is treated with thermal plasma, which uses a plasma torch to emit a very high temperature (greater than 10,000°C) flame, and applies the heat energy of the high temperature plasma to the waste. The chemical bonds between the organic substances in the waste are broken, and then atomized, ionized, and pyrolyzed. After these organic substances are treated with high temperature plasma, only some simple molecules or atoms such as hydrogen, carbon monoxide, carbon dioxide, and hydrogen chloride are produced, and it is difficult to combine into other larger or more complex molecules.

[0047] For details, please refer to Figure 3 , which shows Figure 1The schematic diagram of the reaction collision tube is shown in FIG. The reaction collision tube 30 includes an inlet end 31, an outlet end 32 and a side wall 33 located between the inlet end 31 and the outlet end 32. The inlet end 31 and the outlet end 32 are located on opposite sides of each other, and an opening 34 is formed on the side wall 33. The low-temperature high-density plasma output by the plasma source 20 enters the reaction collision tube from the inlet end 31 of the reaction collision tube 30. Another part of the gas to be processed outputted by the third gas flow controller 13 enters the reaction collision tube 30 through the opening 34 on the side wall 33 of the reaction collision tube 30. The angle between the opening 34 connecting the channel inside the reaction collision tube 30 and the side wall 33 is, for example, -15° to +15°. Through the design of the angle, the introduction of the gas to be processed at an angle can produce a turbulent effect, thereby stagnating the gas to be processed and the plasma, so as to increase the time for the plasma to react with the gas to be processed. On the other hand, the gas to be treated enters from the side wall 33 of the reaction collision tube 30, so that the gas flow rate inside the reaction collision tube 30 is accelerated, thereby forming a low-pressure zone at the inlet end 31 of the reaction collision tube 30, and forming an airflow from the inlet end 31 to the outlet end 32 inside the reaction collision tube 30. On the other hand, the low-temperature and high-density plasma that enters the reaction collision tube 30 from the inlet end 31 passes through the low-pressure zone to reduce its working pressure, thereby increasing the mean free path of the particles. The low-temperature and high-density plasma advances together with the airflow in the reaction collision tube 30, and then collides with the gas to be treated in the reaction collision tube 30 to reorganize the substances contained in the gas to be treated. On the other hand, after the gas to be treated is dissociated by plasma, volatile organic gases (volatile organic compounds, VOCs) and carbon oxides (CO x ), and nitrogen oxides (NO x ) is close to zero emission, and has a removal rate of more than 99% for chlorofluorocarbons (CFCs), sulfur hexafluoride (SF6), trifluoromethane (CHF3), octafluoropropane (C3F8), octafluorocyclobutane (C4F8), and nitrogen trifluoride (NF3), while carbon tetrafluoride (CF4) can also have a removal rate of more than 95%.

[0048] like Figure 3 As shown, the plasma source 20 operates at a relatively low pressure to generate a higher density plasma. Due to the low operating pressure, the probability of collision between particles becomes smaller, so there will be better isotropy. Furthermore, through the formation of a low-pressure zone at the inlet end 31 of the reaction collision tube 30, the acceleration direction of the particles is parallel to the reaction collision tube 30, thereby generating an isotropic impact flow. Specifically, the low-pressure zone is prone to form a high-energy plasma flow, and the airflow vortex generated by the introduction of the gas to be treated forms an effective collision with the electron flow of the plasma, thereby improving the efficiency of the gas collision.

[0049] like Figure 1 As shown, the catalyst reaction chamber 40 is disposed downstream of the reaction collision tube 30. The catalyst reaction chamber 40 is configured to receive the residual gas output from the reaction collision tube 30, and the catalyst in the reaction collision tube 30 performs an oxidation or reduction reaction on the residual gas.

[0050] Specifically, the residual gas in the reaction collision tube 30 that has not been dissociated can be bombarded by plasma on the nanocatalyst net in the catalyst reaction chamber 40 to oxidize or reduce the residual gas flowing through. Specifically, electrons have reducing properties, and holes have oxidizing properties. Holes react with hydroxyl radicals (-OH) on the surface of the nanocatalyst net to generate highly oxidizing hydroxyl radicals (OH·). Electrons react with oxygen molecules to generate superoxide radicals (·O2)2 2- . Active hydroxyl radicals and superoxide radicals can decompose organic matter into carbon dioxide and water, thus achieving a purification effect. Since the nanocatalyst net is set in a plasma environment, the nanocatalyst net will not partially or completely lose its activity due to the adsorption of other compounds. The material of the nanocatalyst net can be selected according to the type of gas to be treated. The optional materials include titanium dioxide, nano zinc, nano gold, vanadium, molybdenum, tungsten, nickel metal oxides, etc.

[0051] like Figure 1 As shown, the pump 50 is disposed downstream of the reaction collision tube 30, for example, optionally, the pump 50 is connected between the catalyst reaction chamber 40 and the tail gas detection unit 60. The pump 50 is configured to provide the required working pressure of the plasma, that is, to control the pressure of the low-temperature, low-pressure, high-density plasma. The high-flow pump 50 can maintain the working pressure of the plasma stable, allowing the system to maintain a negative pressure state, and preventing the gas from flowing back to the upstream components (for example, from the reaction collision tube 30 to the plasma source 20).

[0052] like Figure 1 As shown, the spectrometer 70 is coupled to the reaction collision tube 30 and is configured to obtain spectral data in the reaction collision tube 30. In some embodiments, the connection between the spectrometer 70 and the reaction collision tube 30 includes a window made of a transparent material, and the spectrometer 70 includes an optical fiber head. The optical fiber head is aligned with the window for receiving a corresponding optical signal. The spectrometer 70 generates corresponding spectral data according to the received optical signal.

[0053] like Figure 1As shown, the controller 80 is electrically connected to the above-mentioned components, for example, the gas supply system 10, the plasma source 20, the catalyst reaction chamber 40, the pump 50, the exhaust gas detection unit 60, the spectrometer 70, etc. The controller 80 includes a processor 81 and a memory 82. The processor 81 and the memory 82 are electrically connected to each other. It should be understood that the controller 80 may also include one or more of the following components: a circuit board, a power supply circuit, etc. The memory 82 is configured to store computer programs. The processor 81 reads the computer programs stored in the memory 82 and runs programs corresponding to these computer programs to perform operations on each component in the environmental protection treatment system 1. For example, the controller 80 is configured to receive spectral data from the spectrometer 70 to generate analysis results. The analysis results include the type and / or wavelength change amount of the substance contained in the gas to be treated based on the depth-to-width ratio and half-peak width of the wavelength spectrum peak. The controller 80 controls the gas supply system 10 to respectively provide the gas flow and flow ratio of the to-be-processed gas to the plasma source 20 and the reaction collision tube 30 and / or controls the RF frequency or power of the plasma source 20 according to the analysis result.

[0054] In some embodiments, the spectrometer 70 is used to record the spectral data during the plasma reaction. The controller 80 can perform primary operations on the spectral data and determine the wavelength groups with the highest correlation with the gas to be treated. Among the wavelength groups, the group with the least interference is selected as the main wavelength group of the gas to be treated. For the selected main wavelength group, the equation is fitted to obtain the depth-to-width ratio and half-peak width of the main wavelength spectrum peak. The obtained information is used as the basis for gas dissociation and species judgment. Furthermore, the reaction collision tube 30 can also be diagnosed, and the plasma reaction in the reaction collision tube 30 can be monitored in real time to ensure that the entire process is carried out within the control range. For example, the controller 80 can retroactively control the gas supply flow rate and ratio of the gas supply system 10 according to the analyzed gas type, or retroactively control the magnetic field and electric field strength of the plasma source 20. Furthermore, the controller 80 can also analyze the health of the coating in the reaction collision tube 30 through the acquired spectral data.

[0055] In some embodiments, the controller 80 adjusts the process parameters related to the plasma dissociation reaction according to the depth-to-width ratio and half-peak width of the wavelength spectrum peak of each segment. Specifically, according to theories such as Planck blackbody radiation, Maxwell rate distribution, Doppler shift, Fermi-Dirac, etc., the changes in various parameters of the plasma reaction process, such as temperature, pressure, speed, composition and electromagnetic field, are determined. For example, according to the Planck blackbody radiation theory, the relationship between the glow intensity of the wavelength and the reaction temperature can be determined. According to the Doppler shift theory, when the luminous particle moves in the direction of the detector of the spectrometer, the detected wavelength becomes shorter and blue shift occurs. On the contrary, when the luminous particle moves away from the detector direction of the spectrometer, the detected wavelength becomes longer and red shift occurs. Due to the speed and thermal motion of the particles, the spectrum will be widened, so the relationship with the reaction temperature can be determined according to the change in wavelength and corresponding adjustments can be made. In this embodiment, the corresponding wavelength can be found according to the half-peak width, and compared with the standard value to calculate the wavelength blue shift or red shift of the wavelength width. Furthermore, according to the Lorentz distribution theory, the broadening of the spectral line is caused by the interaction between atoms and other atoms or molecules, and the spectral line broadens as the pressure increases, and the relationship with the pressure is determined. In other words, the controller 80 can determine the problem points and the optimal reaction range of the plasma process using the spectral data. The controller 80 can also calculate the ignition energy of the device, the conversion capacity of the reaction gas, the leakage situation, the dissociation rate, the stability of the reaction, and other information based on the spectral data. In addition, the controller 80 makes adjustments to the reaction collision tube 30 and the plasma 20 based on the feedback data, so that the reaction process conditions of the plasma are controlled within the set range.

[0056] In some embodiments, according to the following formula (1) and formula (2), the spectrum peak obtained by the spectrometer will change with the change of temperature and concentration (pressure) in the reaction collision tube 30. As the temperature and concentration (pressure) increase, the spectrum peak also increases accordingly. Compared with the standard threshold, the controller 80 can calculate the pressure and temperature in the reaction collision tube 30, and determine whether there is a leak and make corresponding adjustments.

[0057] Formula (1): Ipq = Ne˙N[Qpq(Ve)˙Ve], where Ipq is the light intensity value corresponding to the target wavelength in the spectrum data obtained by the spectrometer. Ne is the electron density. N is the density of atoms or ions in the reaction gas. Ve is the electron movement speed. Qpq(Ve) is the electron energy at the electron movement speed Ve.

[0058] Formula (2): Ve=(2KTe / Me) 1 / 2 , where Te is the temperature of the electron and Me is the mass of the electron.

[0059] Therefore, through the analysis results of the spectrum, it is possible to determine the type of reactive gas, and retroactively control the gas flow rate and gas ratio, as well as retroactively control the magnetic field, electric field and electric field strength of the plasma source 20. In addition, based on the obtained spectral data combined with the Doppler theory, the plasma electric field strength can be calculated, and the health of the plasma source 20 can be further calculated.

[0060] like Figure 1 As shown, the exhaust gas detection unit 60 is disposed downstream of the catalyst reaction chamber 40. In some embodiments, the exhaust gas detection unit 60 can detect the components of the exhaust gas after dissociation. The controller 80 back-traces the type of auxiliary process gas input into the reaction collision tube 30 based on the detected components. Specifically, although the low-temperature, low-pressure, and high-density plasma can dissociate multi-molecular gases into single-atom or single-molecular gases, the multi-element gas flow may be synthesized into undesirable molecules at the end of the reaction collision tube 30. The controller 80 can analyze the components of the exhaust gas based on the detection results obtained from the exhaust gas detection unit 60 and perform corresponding back-tracing control operations. For example, when the analyzed exhaust gas contains nitrogen oxides (NO x ), the controller 80 backtracks to control the gas supply system to input a process auxiliary gas including hydrogen, nitrogen and oxygen or urea into the reaction collision tube 30 to reduce the nitrogen oxides into N2 and H2O.

[0061] In some embodiments, the controller 80 can determine the composition of the exhaust gas based on the detection results obtained from the exhaust gas detection unit 60, and retroactively control the nanocatalyst mesh in the catalyst reaction chamber based on the analyzed components. Specifically, according to the analysis results, the controller 80 can retroactively control the pulse current applied to the nanocatalyst mesh to trigger the catalyst activity. Taking the metal titanium mesh that has been surface-treated with micro-arc oxidation as the nanocatalyst mesh as an example, the metal titanium mesh has sub-micron-level surface features. A pulse current of 60 to 800 KHz is applied using the titanium in the center as an electrode. The micropores on the surface of the metal titanium mesh will accumulate charges to increase the static voltage, thereby forming a large number of electrons or holes. Electrons or holes will destroy the charges flowing through the gas molecules, so that the electrostatic field can be increased by 3 to 10 times.

[0062] The present application also provides a control method, which is applied to the environmental protection treatment system 1 based on the plasma technology for reorganizing substances as described above. As described above, the environmental protection treatment system 1 includes a gas supply system 10, a plasma source 20, a reaction collision tube 30, a catalyst reaction chamber 40, a pump 50, an exhaust gas detection unit 60, a spectrometer 70, a controller 80 and a solid waste treatment device 90. The gas supply system 10 is arranged downstream of the solid waste treatment device 90. The control method of the present application specifically includes the following operations.

[0063] Firstly, a gas supply system is controlled to provide ignition gas and gas to be treated, wherein the gas to be treated comes from the output of a solid waste treatment device.

[0064] Next, the ignition gas and a portion of the gas to be processed are transported to a plasma source.

[0065] Next, the plasma source is controlled to generate low-temperature and high-density plasma based on the gas to be processed and the corresponding radio frequency (RF) frequency.

[0066] Next, the low-temperature high-density plasma and another portion of the gas to be processed are transmitted into the reaction collision tube so that the two collide in the reaction collision tube to reorganize the substances contained in the gas to be processed.

[0067] Specifically, the reaction collision tube includes an inlet end, an outlet end, and a side wall located between the inlet end and the outlet end, and the control method further includes the following operations.

[0068] When the gas supply system is controlled to provide the gas to be processed, another part of the gas to be processed is controlled to enter the reaction collision tube through an opening on the side wall of the reaction collision tube so that a low pressure area is formed at the inlet end of the reaction collision tube and a gas flow is formed from the inlet end to the outlet end.

[0069] Furthermore, the low-temperature high-density plasma is controlled to enter the reaction collision tube from the inlet end of the reaction collision tube, wherein the low-temperature high-density plasma passes through the low-pressure zone to reduce its working pressure, and the low-temperature high-density plasma moves forward together with the gas flow, and then collides with the gas to be processed in the reaction collision tube so that the substances contained in the gas to be processed are recombined.

[0070] Optionally, the pressure of the low temperature high density plasma is less than 20 Torr and the density is greater than 10 12 / cm -3 .

[0071] In some embodiments, when the material recombination of the gas to be processed is performed in the reaction collision tube, the control method further includes the following operations.

[0072] The spectrometer is controlled to obtain spectrum data in the reaction collision tube, and the controller is controlled to receive the spectrum data from the spectrometer to generate an analysis result. Furthermore, the controller controls the gas supply system to provide the gas flow and flow ratio of the to-be-processed gas to the plasma source and the reaction collision tube respectively and / or controls the RF frequency or power of the plasma source according to the analysis result.

[0073] In some embodiments, the analysis result includes obtaining the type and / or wavelength variation of the substance contained in the gas to be treated based on the aspect ratio and half-peak width of the wavelength spectrum peak.

[0074] In some embodiments, after the substances contained in the gas to be treated are reorganized, the control method further includes the following operations.

[0075] The catalyst reaction chamber is controlled to receive the residual gas output from the reaction collision tube, and the residual gas is oxidized or reduced by the catalyst in the catalyst reaction chamber.

[0076] In some embodiments, when generating low-temperature, low-pressure, high-density plasma by an electric source, the control method further includes the following operations.

[0077] The pressure of low-temperature, high-density plasma is controlled by a pump.

[0078] In some embodiments, when controlling the gas supply system to provide the ignition gas and the gas to be treated, the control method further includes the following operations.

[0079] The gas supply system is controlled to provide process auxiliary gas, and the process auxiliary gas is transmitted to the plasma source or the reaction collision tube to adjust the gas amount. Optionally, the process auxiliary gas includes hydrogen or oxygen.

[0080] In some embodiments, when controlling the gas supply system to provide the gas to be treated, the control method further includes the following operations.

[0081] The macromolecular gas in the gas to be treated is separated by a gas separator and transmitted to a plasma source, and the remaining gas to be treated is transmitted to a reaction collision tube.

[0082] In the present embodiment, the processor 81 is generally configured to control the overall operation of the controller 80. The processor may include one or more processors to execute instructions and then perform actions in all or part of the steps in the above-mentioned control method. In addition, the processor 81 may include one or more modules that facilitate the interaction between the processor 81 and other components. For example, the processor may include a communication module to facilitate the interaction between the communication component and the processor 81. The memory 82 is configured to store various types of data to support the operation of the controller 80. Examples of such data include instructions for any application or method for operating on the controller 80. The memory 82 can be implemented using any type of volatile or non-volatile memory device or a combination thereof. The power circuit supplies power to various components of the controller 80. The power circuit may include a power management system, one or more power supplies, and any other components associated with the generation, management and distribution of power of the controller 80. In an exemplary embodiment, the controller 80 can be implemented by an independent terminal device or an integrated controller, microcontroller and other electronic components.

[0083] In summary, the environmentally friendly treatment system and control method of the present application for reorganizing substances by plasma technology can treat a variety of gases. The plasma technology of low-temperature, low-pressure, high-density plasma is used to reorganize substances by physical means, using high-frequency oscillation to break molecular bonds. High-temperature electrons collide with gas molecules to directly ionize gas molecules, which can save several times more energy than traditional thermal plasma treatment / thermal combustion methods.

[0084] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. An environmentally friendly treatment system based on the reorganization of substances using plasma technology, characterized in that: include: a gas supply system disposed downstream of the solid waste treatment device, wherein the gas supply system is configured to provide ignition gas and gas to be treated, and the gas to be treated is output from the solid waste treatment device; a plasma source connected to the gas supply system, configured to receive the ignition gas and a portion of the gas to be treated, and to generate a low-temperature high-density plasma based on the gas to be treated and a corresponding radio frequency (RF) frequency; as well as A reaction collision tube is arranged downstream of the gas supply system and the plasma source, wherein the low-temperature high-density plasma and another part of the gas to be processed flow into the reaction collision tube, and the two collide in the reaction collision tube to allow the substances contained in the gas to be processed to recombine.

2. The environmentally friendly treatment system for reorganizing substances based on plasma technology as claimed in claim 1, characterized in that: The reaction collision tube comprises an inlet end, an outlet end and a side wall between the inlet end and the outlet end, another part of the gas to be processed enters the reaction collision tube through an opening on the side wall of the reaction collision tube so that a low pressure zone is formed at the inlet end of the reaction collision tube and a gas flow is formed from the inlet end to the outlet end; and wherein the low temperature and high density plasma enters the reaction collision tube from the inlet end of the reaction collision tube, the low temperature and high density plasma passes through the low pressure zone to reduce its working pressure, and the low temperature and high density plasma advances together with the gas flow, and then collides with the gas to be processed in the reaction collision tube so that the substances contained in the gas to be processed are recombined.

3. The environmentally friendly treatment system based on plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The pressure of the low temperature high density plasma is less than 20 Torr and the density is greater than 10 12 / cm -3 .

4. The environmentally friendly treatment system based on plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The environmental protection treatment system also includes: a spectrometer coupled to the reaction collision tube and configured to obtain spectral data in the reaction collision tube; and A controller is electrically connected to the gas supply system, the plasma source and the spectrometer, and is configured to receive the spectral data from the spectrometer to generate an analysis result, and to control the gas supply system to respectively provide the gas flow rate and flow rate ratio of the to-be-treated gas to the plasma source and the reaction collision tube and / or control the RF frequency or power of the plasma source according to the analysis result.

5. The environmentally friendly treatment system for reorganizing substances based on plasma technology as claimed in claim 4, characterized in that: The analysis result includes the type of substance contained in the gas to be processed and / or the change amount of the wavelength obtained based on the aspect ratio and half-peak width of the wavelength spectrum peak.

6. The environmentally friendly treatment system based on plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The environmental protection treatment system further includes: a catalyst reaction chamber, which is arranged downstream of the reaction collision tube and is configured to receive the residual gas output from the reaction collision tube, wherein the catalyst in the catalyst reaction chamber performs an oxidation or reduction reaction on the residual gas.

7. The environmentally friendly treatment system based on the plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The environmental protection treatment system also includes: a pump configured to control the pressure of the low-temperature and high-density plasma.

8. The environmentally friendly treatment system based on plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The gas supply system is further configured to provide a process auxiliary gas, and the gas supply system transmits the process auxiliary gas to the plasma source or the reaction collision tube to adjust a gas amount.

9. The environmentally friendly treatment system based on the plasma technology for reorganizing substances according to claim 8, characterized in that: The process auxiliary gas includes hydrogen or oxygen.

10. The environmentally friendly treatment system based on the plasma technology for reorganizing substances as claimed in claim 1, characterized in that: The gas supply system includes a gas separator configured to separate a macromolecular gas from the gas to be processed, and the macromolecular gas is transmitted to the plasma source, and the rest of the gas to be processed is transmitted to the reaction collision tube.

11. A control method, applied to an environmentally friendly treatment system based on the reorganization of substances using plasma technology, characterized in that: The environmental protection treatment system includes a gas supply system, a plasma source and a reaction collision tube, the gas supply system is arranged downstream of the solid waste treatment device, and the control method includes: Controlling the gas supply system to provide ignition gas and gas to be treated, wherein the gas to be treated comes from the output of the solid waste treatment device; delivering the ignition gas and a portion of the gas to be treated to the plasma source; Controlling the plasma source to generate low-temperature and high-density plasma based on the gas to be processed and a corresponding radio frequency (RF) frequency; and The low-temperature high-density plasma and another portion of the gas to be processed are transmitted into the reaction collision tube so that the two collide in the reaction collision tube to recombine the substances contained in the gas to be processed.

12. The control method according to claim 11, characterized in that: The reaction collision tube comprises an inlet end, an outlet end and a side wall between the inlet end and the outlet end, and the control method further comprises: Controlling another portion of the gas to be processed to enter the reaction collision tube through the opening on the side wall of the reaction collision tube so as to form a low pressure area at the inlet end of the reaction collision tube and form a gas flow from the inlet end to the outlet end; and The low-temperature and high-density plasma is controlled to enter the reaction collision tube from the inlet end of the reaction collision tube, wherein the low-temperature and high-density plasma passes through the low-pressure zone to reduce its working pressure, and the low-temperature and high-density plasma moves forward together with the gas flow, and then collides with the gas to be processed in the reaction collision tube so that the substances contained in the gas to be processed are recombined.

13. The control method according to claim 11, characterized in that: The pressure of the low temperature high density plasma is less than 20 Torr and the density is greater than 10 12 / cm -3 .

14. The control method according to claim 11, characterized in that: The environmental protection treatment system further includes a spectrometer and a controller, and the control method further includes: controlling the spectrometer to obtain spectral data in the reaction collision tube; and The controller is controlled to receive the spectral data from the spectrometer to generate an analysis result, and according to the analysis result, the gas supply system is controlled to respectively provide the gas flow and flow ratio of the to-be-treated gas to the plasma source and the reaction collision tube and / or control the RF frequency or power of the plasma source.

15. The control method according to claim 14, characterized in that: The analysis result includes the type of substance contained in the gas to be processed and / or the change amount of the wavelength obtained based on the aspect ratio and half-peak width of the wavelength spectrum peak.

16. The control method according to claim 11, characterized in that: The environmental protection treatment system further includes a catalyst reaction chamber, and the control method further includes: controlling the catalyst reaction chamber to receive the residual gas output from the reaction collision tube; and The residual gas is subjected to oxidation or reduction reaction by the catalyst in the catalyst reaction chamber.

17. The control method according to claim 11, characterized in that: The environmental protection treatment system further includes a pump, and the control method further includes: controlling the pressure of the low-temperature and high-density plasma by the pump.

18. The control method according to claim 11, characterized in that: The control method further comprises: controlling the gas supply system to provide process auxiliary gas; and The process auxiliary gas is delivered to the plasma source or the reaction collision tube to adjust the gas amount.

19. The control method according to claim 18, characterized in that: The process auxiliary gas includes hydrogen or oxygen.

20. The control method according to claim 11, characterized in that: The gas supply system includes a gas separator, and the control method further includes: Separating the macromolecular gas from the gas to be treated by the gas separator; and The macromolecular gas is transported to the plasma source, and the rest of the gas to be processed is transported to the reaction collision tube.

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