Monitoring system, monitoring method thereof, optical system and working method thereof

Abstract

The invention relates to a monitoring system, a monitoring method thereof, an optical system and a working method thereof. The monitoring system comprises a first optical assembly, a second optical assembly and an adjusting module. The adjusting module is used for synchronously adjusting the rotation angles of the first reflector and the second reflector relative to the normal plane of the surface of the sample, so that the sample forms first signal light along the first illumination light which is perpendicular to the surface, has different heights and is reflected along the same point on the surface of the sample to be collected at the same position of the first detector. The detection precision of the sample surface is improved.

Description

Technical Field

[0001] The present disclosure relates to the field of detection technology, and in particular to a monitoring system and a monitoring method thereof, an optical system and a working method thereof. Background Art

[0002] The semiconductor industry is prone to defects in the production process of wafers due to its complex processes, numerous procedures, and small device size. These defects will not only seriously affect chip performance, but also increase costs. Therefore, in each process of semiconductor production, the detection link is crucial.

[0003] During the wafer inspection process, it is often necessary to detect wafer surface defects by means of illumination. During the defect detection process, the height of the wafer surface changes, that is, the wafer surface shifts in a direction perpendicular to the wafer surface, causing the test point for defect detection to shift in a direction parallel to the wafer surface, resulting in a deviation in the detected defect position, thereby reducing the detection accuracy. Summary of the invention

[0004] The present disclosure provides a monitoring system and a monitoring method thereof, an optical system and a working method thereof, so as to solve the problem of how to improve the detection accuracy.

[0005] In a first aspect, the present disclosure provides a monitoring system, comprising: a first optical component, comprising a first reflector, the first reflector is used to reflect a first illumination light and make the first illumination light obliquely incident on a sample surface, the sample surface reflects the first illumination light to form a first signal light; a second optical component, comprising a second reflector, an imaging component and a first detector, the imaging component is used to image the sample surface to the first detector using the first signal light, the first detector is used to obtain a detection image of the sample surface according to the first signal light, and form a light spot on the photosensitive surface of the first detector, the second reflector is used to make the light spot formed by the first signal light reflected from the sample surface at a preset calibration position on the photosensitive surface of the first detector be at a preset position; an adjustment module is used to synchronously adjust the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface, so that the first illumination light reflected from the sample at different heights perpendicular to the surface and at the same point along the sample surface to form a first signal light is collected at the same position of the first detector.

[0006] Optionally, the adjustment module is used to make the incident position of the first illumination light on the sample have a first change amount along the direction parallel to the converging plane, and the conjugate point of the light spot of the first detector on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector in the object side conjugate plane, and the first change amount is equal to the second change amount.

[0007] Optionally, the second reflector is located in the optical path between the imaging assembly and the first detector, the first reflector and the second reflector rotate in opposite directions, and the second change amount is (d 3* ∠2) / M or (d 3* tan∠2) / M, d3 is the distance between the second reflector and the first detector, ∠2 is the rotation angle of the second reflector, and M is the magnification of the imaging component; or, the second reflector is located in the optical path between the imaging component and the sample, the first reflector and the second reflector rotate in opposite directions, and the second change is d2*∠2 or d 2* tan∠2; d2 is the distance between the second reflector and the object focal plane of the imaging component; or, the imaging component includes a first collimator and a second focusing mirror, the first collimator is used to collimate the first signal light, and the second focusing mirror is used to focus the first signal light; the second reflector is located in the light path between the first collimator and the second focusing mirror; the rotation direction of the first reflector is opposite to that of the second reflector; the second change is f2*tan∠2 or f2*∠2, f2 is the focal length of the first collimator.

[0008] Optionally, the first optical component also includes a first focusing mirror, which is used to focus the first illumination light; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light, and the first illumination light is incident on the first focusing mirror in parallel; the first change amount is f1*tan∠1 or f1*∠1; ∠1 is the rotation angle of the first reflector, and f1 is the focal length of the first focusing mirror; or, the first focusing mirror and the first reflector are arranged along the incident direction of the first illumination light, and the first change amount is d1*tan∠1, or d1*∠1, and d1 is the distance between the first reflector and the first illumination light converging surface.

[0009] Optionally, the imaging assembly includes a first collimator and a second focusing mirror, the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light; the first change amount is f1*tan∠1 or f1*∠1, and the second change amount is f2*tan∠2 or f2*∠2.

[0010] Optionally, the focal length of the first focusing mirror is equal to the focal length of the first collimating mirror; the adjustment directions of the first reflecting mirror and the second reflecting mirror are opposite, and the adjustment amounts are the same.

[0011] Optionally, the optical path from the first reflector to the sample surface and the optical path from the second reflector to the sample surface are symmetrical about a normal plane to the sample surface.

[0012] Optionally, it also includes: a control system, used to determine whether the light spot deviates from a preset position based on the detection image; if so, the control system controls the adjustment module to synchronously adjust the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface.

[0013] In a second aspect, the present disclosure provides a monitoring method applied to a monitoring system as described in the first aspect, comprising: reflecting a first illumination light through a first reflector and making the first illumination light incident on a sample surface, wherein the sample surface reflects the first illumination light to form a first signal light; acquiring a detection image of the sample surface through a second optical component; performing monitoring processing on the sample according to the detection image, wherein the monitoring processing comprises: if the light spot deviates from a preset position, synchronously adjusting the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface through an adjustment module, so that the first illumination light reflected by the sample at different points perpendicular to the surface and at the same point along the sample surface forms a first signal light which is collected at the same position of the first detector.

[0014] Optionally, the sample is monitored and processed according to the detection image, including: judging whether the light spot deviates from a preset position according to the detection image; if the light spot deviates from the preset position, determining the rotation direction of the first reflector and the second reflector according to the deviation direction of the light spot from the preset position, and synchronously adjusting the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface according to the rotation direction until the light spot is at the preset position.

[0015] Optionally, there is no reflective element between the first reflector and the sample, and there is no reflective element between the second reflector and the sample surface; or, an even number of reflective elements are arranged between the first reflector and the sample, and an even number of reflective elements are arranged between the second reflector and the sample surface; and the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface are synchronously adjusted by the adjustment module, including: synchronously adjusting the first reflector and the second reflector to rotate in opposite directions relative to the normal plane of the sample surface by the adjustment module.

[0016] Optionally, synchronously adjusting the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface through the adjustment module also includes: adjusting the first reflector through the adjustment module so that the incident position of the first illumination light on the sample has a first change amount along the direction parallel to the converging plane, and adjusting the second reflector so that the light spot of the first detector at the conjugate point on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector in the object side conjugate plane, and the first change amount is equal to the second change amount.

[0017] Optionally, if the optical path from the first reflector to the sample surface is symmetrical with the optical path from the second reflector to the sample surface about the normal plane of the sample surface; or, the imaging assembly includes a first collimator and a second focusing mirror, and the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light, and the focal length of the first focusing mirror is equal to the focal length of the first collimator; the first reflector is adjusted by the adjustment module so that the incident position of the first illumination light on the sample has a first change in parallel to the converging plane, and the second reflector is adjusted so that the light spot of the first detector at the conjugate point on the object side has a second change in parallel to the photosensitive surface of the first detector in the direction of the object side conjugate plane, and the first change is equal to the second change, including: adjusting the first reflector and the second reflector by the adjustment module so that the rotation angles of the first reflector and the second reflector are the same.

[0018] In a third aspect, the present disclosure provides an optical system, comprising: a monitoring system as described in the first aspect; a processing system, comprising: a light source component, wherein the light source component is suitable for providing a first illumination light to a first optical component.

[0019] Optionally, the first illumination light is also used to form a second signal light after passing through the sample surface; the processing system also includes: a detection module, the detection module is used to collect the second signal light and detect the sample surface according to the second signal light.

[0020] In a fourth aspect, the present disclosure provides a working method of an optical system, comprising: providing a first illumination light to a first optical component through a light source component; using the monitoring method of the monitoring system described in the second aspect, so that the first illumination light reflected by the sample at different heights perpendicular to the surface and at the same point along the sample surface forms a first signal light and is collected at the same position of a first detector; after the monitoring method, the sample is detected by a processing system.

[0021] Optionally, the first illumination light is also used to form a second signal light after passing through the sample surface; detecting the sample using the first illumination light through the processing system includes: collecting the second signal light formed by the first illumination light passing through the sample surface through a detection module, and detecting the sample surface based on the second signal light.

[0022] The present disclosure provides a monitoring system and a monitoring method thereof, an optical system and a working method thereof, wherein the first reflector of the first optical component reflects a first illumination light and makes the first illumination light obliquely incident on a sample surface, and the sample surface reflects the first illumination light to form a first signal light; an imaging component of the second optical component uses the first signal light to image the sample surface to a first detector; the first detector acquires a detection image of the sample surface according to the first signal light, and forms a light spot on the photosensitive surface of the first detector, and the light spot formed by the first signal light reflected from the sample surface at a preset calibration position on the photosensitive surface of the first detector is at a preset position through the second reflector; an adjustment module is used to synchronously adjust the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface, so that the first illumination light reflected from the sample at different heights perpendicular to the surface and at the same point along the sample surface to form a first signal light is collected at the same position of the first detector.

[0023] The present disclosure provides a monitoring system, which uses an adjustment module to synchronously adjust the incident light path of a first illumination light incident on a sample surface and the reflected light path of a first signal light, so as to adjust the light spot to a preset position on a first detector. In the process, the incident position of the first illumination light on the sample surface is also synchronously adjusted, thereby eliminating the phenomenon of inaccurate detection position caused by the deviation of the incident position of the first illumination light along the direction of the sample surface due to the change in the height of the sample surface, thereby improving the detection accuracy of the sample surface.

[0024] Other features and advantages of the present disclosure will be described in the following description, and partly become apparent from the description, or be understood by implementing the present disclosure. The purpose and other advantages of the present disclosure can be realized and obtained by the structures particularly pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present disclosure will be described in more detail below based on embodiments and with reference to the accompanying drawings: Figure 1 A schematic diagram of the structure of a monitoring system provided in an embodiment of the present disclosure.

[0026] Figure 2 A schematic diagram of the structure of a monitoring system provided in another embodiment of the present disclosure.

[0027] Figure 3A schematic diagram of the structure of a monitoring system provided in another embodiment of the present disclosure.

[0028] Figure 4 A schematic diagram of the structure of a monitoring system provided in another embodiment of the present disclosure.

[0029] Figure 5 A schematic diagram of the structure of a monitoring system provided in another embodiment of the present disclosure.

[0030] Figure 6 A flowchart of a monitoring method of a monitoring system provided in an embodiment of the present disclosure.

[0031] Figure 7 A schematic diagram of the structure of an optical system provided in an embodiment of the present disclosure.

[0032] Figure 8 A flowchart of a working method of an optical system provided in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the technical solution of the present disclosure, and to fully understand and implement how the present disclosure applies technical means to solve technical problems and achieve the corresponding technical effects, the technical solution in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only embodiments of a part of the present disclosure, not all of the embodiments. The embodiments of the present disclosure and the various features in the embodiments can be combined with each other without conflict, and the technical solutions formed are all within the scope of protection of the present disclosure. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the present disclosure.

[0034] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present disclosure described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products, or devices.

[0035] It should be noted that the steps shown in the flowcharts of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and that, although a logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0036] Figure 1 Schematic diagram of a monitoring system provided by an embodiment of the present disclosure. Figure 1 As shown, a monitoring system includes: a first optical component 100, a second optical component 200 and an adjustment module (not shown in the figure).

[0037] The first optical component 100 includes a first reflector 110, which is used to reflect the first illumination light 90 and make the first illumination light 90 obliquely incident on the surface of the sample 300, and the first illumination light 90 is reflected by the surface of the sample 300 to form a first signal light 91; The second optical component 200 includes a second reflector 220, an imaging component 230 and a first detector 240. The imaging component 230 is used to use the first signal light 91 to image the surface of the sample 300 to the first detector 240. The first detector 240 is used to obtain a detection image of the surface of the sample 300 based on the first signal light 91 and form a light spot 400 on the photosensitive surface of the first detector 240. The second reflector 220 is used to make the light spot 400 formed by the first signal light 91 reflected from the surface of the sample 300 at a preset calibration position on the photosensitive surface of the first detector 240 be at a preset position.

[0038] The adjustment module is used to synchronously adjust the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the sample 300 surface, so that the first illumination light 90 reflected by the sample 300 at different heights perpendicular to its surface and at the same point along the surface of the sample 300 forms a first signal light 91 which is collected at the same position of the first detector 240.

[0039] refer to Figure 1As shown, the monitoring system can be applied in an optical system for processing the surface of a sample 300, wherein a first optical component 100 is used to provide a first illumination light 90 as a detection light to the surface of the sample 300, and the first illumination light 90 is reflected by the surface of the sample 300 to form a first signal light 91; a second optical component 200 is used to image the surface of the sample 300 with the first signal light 91, and to determine whether a light spot 400 formed by the first signal light 91 on the first detector 240 is at a preset position 500, so as to adjust the first transmitting mirror 110 and the second reflecting mirror 220 through an adjustment module according to the offset between the light spot 400 and the preset position 500, so as to automatically adjust the incident position 310 of the first illumination light 90 incident on the surface of the sample 300 on the surface of the sample 300, so that when the height of the surface of the sample 300 changes, the first illumination light 90 can be at the same incident position on the surface of the sample 300 through the adjustment module, thereby improving the detection accuracy of the sample.

[0040] Specifically, refer to Figure 1 As shown, the first optical component 100 and the second optical component 200 are located on the same side of the sample 300. Figure 1 As shown, the first optical component 100 includes a first reflector 110, so as to make the first illumination light 90 obliquely incident on the surface of the sample 300 through the first reflector. Obliquely incident on the surface of the sample 300 can be understood as the incident angle of the first illumination light 90 on the surface of the sample 300 is an acute angle.

[0041] Continue to refer Figure 1 The first reflector 110 reflects the first illumination light 90 and makes it obliquely incident on the surface of the sample 300 . The first illumination light 90 is reflected by the surface of the sample 300 to form a first signal light 91 . The first signal light 91 is received by the second optical component 200 .

[0042] refer to Figure 1 , the second optical component 200 includes a second reflector 220, an imaging component 230 and a first detector 240. The imaging component 230 can receive the first signal light 91 and use the first signal light 91 to image the surface of the sample 300 to the first detector 240, the first detector 240 can obtain a detection image of the surface of the sample 300 according to the first signal light 91, and form a light spot 400 on the photosensitive surface of the first detector 240, and the second reflector 220 is used to make the light spot 400 formed by the first signal light 91 reflected from the surface of the sample 300 at the preset calibration position on the photosensitive surface of the first detector 240 be at a preset position 500.

[0043] The preset calibration position is the height position of the sample 300 when the surface of the sample 300 is detected. For example, the preset calibration position can be a position at any height of the surface of the sample 300.

[0044] In this embodiment, the sample 300 used is, for example, a wafer. In other embodiments, the sample 300 may also be a chip, a display panel, or a mobile phone glass shell, etc., which are samples that can be subjected to surface defect detection.

[0045] The preset position 500 is any position of the photosensitive surface of the first detector 240. Specifically, the preset position 500 may be the center of the photosensitive surface of the first detector 240.

[0046] Specifically, during the adjustment process, the second reflector 220 can be used to ensure that the light spot formed on the surface of the first detector 240 by the first signal light 91 reflected by the sample 300 at the preset calibration position is located at the center of the photosensitive surface.

[0047] When testing multiple samples, due to different thicknesses of the samples 300 or vibration of the samples 300, the height of the surface of the samples 300 may change in the thickness direction. Figure 1 and Figure 2 As shown, when different samples 300 are tested, the position of the surface of the sample 300 in the second direction Z may change. For example, when the sample 300 is tested, the sample 300 needs to be replaced, and the replaced sample 300 has a different thickness from the previous sample 300, so the surface position of the different samples 300 is offset in the second direction Z. Figure 1 and Figure 2 For example, when the thickness D2 of the replaced sample 300 is greater than the thickness D1 of the previous sample 300, if there is no adjustment module of the present application, the incident position 310 of the first illumination light 90 on the surface of the sample 300 will be offset to the left in the first direction X, resulting in the light spot 400 formed by the first signal light 91 formed by the first illumination light 90 reflected from the surface of the sample 300 on the first detector 240 and also being offset from the preset position 500. The light spot 400 is also the actual position of the image formed by the first signal light 91 on the photosensitive surface of the first detector 240. Therefore, the incident position 310 of the first illumination light 90 on the surface of the sample 300 can be adjusted so that the same point to be measured on the surface of the sample 300 at different heights forms the same light spot on the photosensitive surface of the first detector 240, thereby avoiding the position change of the incident position of the first illumination light 90 on the surface of the sample 300 in the direction perpendicular to the height of the sample 300 due to the change in the height of the sample 300. The height direction is perpendicular to the surface of the sample 300.

[0048] Therefore, in an embodiment of the present application, an adjustment module is provided in the monitoring system, and an adjustment device is used to synchronously adjust the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300, so that the first illumination light 90 reflected by the sample 300 at different heights perpendicular to the surface of the sample 300 and at the same point along the surface of the sample 300 forms a first signal light 91 which is collected at the same position of the first detector.

[0049] In the monitoring system, when the height of the surface of the sample 300 changes, causing the incident position 310 of the first illumination light 90 on the surface of the sample 300 to shift, the second reflector 220 is adjusted by the adjustment module to adjust the light spot 400 to a preset position 500 on the first detector 240, and the first reflector 110 is also synchronously adjusted to adjust the incident position 310 of the first illumination light 90 on the surface of the sample 300, thereby eliminating the phenomenon of inaccurate detection position caused by the deviation of the incident position 310 of the first illumination light 90 on the surface of the sample 300 due to the change in the height of the sample 300 surface.

[0050] It should be noted that the adjustment module synchronously adjusts the first reflector 110 and the second reflector 220 , which does not emphasize the synchronization in time, but refers to adjusting both the first reflector 110 and the second reflector 220 .

[0051] The preset calibration position is a position having preset coordinates in the height direction. For example, the preset calibration position may be a position having a coordinate of 0 in the height direction of the optical processing device coordinate system.

[0052] The monitoring system synchronously adjusts the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300 through the adjustment module, so as to synchronously adjust the incident light path A of the first optical component 100 and the light path (reflection light path B) where the first signal light 91 is located, so that the first illumination light 90 reflected from the sample 300 at different heights perpendicular to the surface of the sample 300 and at the same point along the surface of the sample 300 to form the first signal light 91 can be collected at the same position of the first detector 240, so as to eliminate the phenomenon that the incident position 310 of the first illumination light 90 is offset due to the change in the surface height of the sample 300, and the position to be detected on the surface of the sample 300 can be accurately collected, thereby obtaining accurate position information of surface defects of the sample 300 and improving the detection accuracy of the surface of the sample 300.

[0053] The first detector 240 is, for example, a time delay integration detector (TDI), a charge coupled device (CCD), a position sensitive detector (PSD), or a photomultiplier tube array (PMT), and no specific limitation is given herein.

[0054] In this embodiment, the monitoring system also includes a control system, which is used to determine whether the light spot deviates from the preset position based on the detection image of the first detector; if so, the control system controls the adjustment module to synchronously adjust the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the sample 300 surface until the light spot in the detection image is located at the preset position.

[0055] Specifically, the second optical component 200 uses the first signal light 91 to form a light spot 400 on the photosensitive surface of the first detector 240, and the control system can obtain the detection image of the first detector 240, which includes the preset position 500 of the light spot imaging. It can be understood that the preset position 500 is a preset collection area within a certain range, and the size of the preset collection area can be set according to actual conditions. For example, the preset position can be the center of the detection image; it is not specifically limited here. If the light spot 400 deviates from the preset position 500, that is, the light spot 400 is not formed within the range of the preset position 500, then the control system controls the adjustment module to synchronously adjust the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300, so that the first illumination light 90 reflected by the sample 300 at different points perpendicular to the surface and along the same point of the sample 300 forms the first signal light 91 and is collected at the same position of the first detector 240. If it is determined that the light spot 400 does not deviate from the preset position 500, that is, the light spot 400 is formed within the range of the preset position 500, no adjustment is required.

[0056] like Figure 1 , Figures 3 to 5 The first optical component 100 further includes a first focusing mirror 120, which is used to focus the first illumination light 90 onto the surface of the sample 300, wherein the arrangement order of the incident light path A of the first reflecting mirror 110 and the first focusing mirror 120 in the incident direction can be interchanged, such as Figure 1 As shown, the first reflector 110 and the first focusing mirror 120 are arranged along the incident light path A of the incident direction of the first illumination light 90, as shown in FIG. Figure 4As shown, the first focusing mirror 120 and the first reflecting mirror 110 are arranged along the incident light path A of the incident direction of the first illumination light 90. In the second optical assembly 200, the first detector 240 is always located in the light path after the imaging assembly 230, and the positional relationship between the second reflecting mirror 220 and the imaging assembly 230 can be interchanged, as shown in FIG. Figure 3 and Figure 4 As shown, the second reflector 220 is located in the optical path between the imaging assembly 230 and the first detector 240. Figure 5 As shown, the second reflector 220 is located in the optical path before the imaging component 230 , that is, the second reflector 220 is located in the optical path between the imaging component 230 and the sample 300 .

[0057] The imaging component may be an integral structure or a structure composed of multiple components, such as Figures 1 to 5 As shown, for example, the imaging assembly 230 may include a first collimator 231 and a second focusing lens 232, wherein the first collimator 231 is used to collimate the first signal light 91, and the second focusing lens 232 is used to focus the first signal light 91. Figure 1 As shown, the second reflecting mirror 220 may also be located in the optical path between the first collimating mirror 231 and the second focusing mirror 232 .

[0058] like Figure 1 As shown, the first optical component 100 is composed of a first reflector 110 and a first focusing mirror 120 arranged in sequence along the incident light path A of the first illumination light 90. The first focusing mirror 120 is used to focus the first illumination light 90 reflected by the first reflector 110 onto the surface of the sample 300. The second optical component 200 is composed of a first collimator 231, a second reflector 220, a second focusing mirror 232, and a first detector 240 located at the back focal plane of the second focusing mirror 232, which are arranged in sequence along the reflected light path B of the first signal light 91. The first collimator 231 and the second focusing mirror 232 jointly use the first signal light 91 to image the surface of the sample 300. The second reflector 220 can be located at any position in the parallel light path after the collimating surface of the first collimator 231, and the first reflector 110 can be located at any position in the light path before the first focusing mirror 120.

[0059] In a specific embodiment, Figure 1 As shown, the imaging assembly 230 includes a first collimator 231 and a second focusing mirror 232, the first detector 240 is located at the rear focal plane of the second focusing mirror 232; the first reflector 110 and the first focusing mirror 120 are arranged along the incident direction of the first illumination light 90; the second reflector 220 is located between the first collimator 231 and the second focusing mirror 232; the first illumination light reflected by the first reflector 110 is parallel light. The focal length of the first focusing mirror 120 is equal to the focal length of the first collimator 231.

[0060] refer to Figure 1 As shown, the light paths on both sides of the normal plane of the surface of the sample 300 include an incident light path A and a reflected light path B. Figure 1 The reflected light path B from the second reflector 220 to the surface of the sample 300 and the incident light path A from the first reflector 110 to the sample 300 are shown to be symmetrical about the normal plane of the surface of the sample 300. In other embodiments of the present application, the reflected light path B from the second reflector 220 to the surface of the sample 300 and the incident light path A from the first reflector 110 to the sample 300 may be asymmetrical about the normal plane of the surface of the sample 300.

[0061] In one embodiment, specifically, in the process of the control system controlling the adjustment module to synchronously adjust the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300, the control system can be used to control the adjustment module so that the incident position 310 of the first illumination light 90 on the sample 300 has a first change amount along the convergence plane parallel to the first focusing mirror 120, and the light spot of the first detector 240 at the conjugate point on the object side has a second change amount along the photosensitive plane parallel to the first detector 240 in the direction of the object side conjugate plane, and the first change amount is equal to the second change amount.

[0062] refer to Figure 1 and Figure 2 When the surface of the sample 300 changes in the second direction Z, the adjustment module can be used to synchronously adjust the first reflector 110 and the second reflector 220 to rotate in opposite directions relative to the normal plane of the surface of the sample 300, so that the first illumination light 90 has a first change amount on the incident position 310 of the sample 300 parallel to the convergence surface, and the light spot of the first detector 240 has a second change amount on the conjugate point of the object side parallel to the photosensitive surface of the first detector 240 in the direction of the object side conjugate plane, and the first change amount is equal to the second change amount, so as to adjust the symmetrical optical path, so as to eliminate the deviation of the incident position 310 of the first illumination light 90 caused by the height change of the sample 300 surface, and accurately collect the position to be detected on the surface of the sample 300, so as to obtain accurate surface information of the sample 300 and improve the processing accuracy of the surface of the sample 300.

[0063] Specifically, Figure 1As shown, the first focusing mirror 120 and the first collimating mirror 231 both have focal lengths, the focal length of the first focusing mirror 120 is denoted as f1, and the focal length of the first collimating mirror 231 is denoted as f2. The first illumination light 90 can be adjusted to have a first change amount of f1*tan∠1 or f1*∠1 on the incident position 310 of the sample 300 parallel to the convergence plane through the adjustment module; ∠1 is the rotation angle of the first reflector, and f1 is the focal length of the first focusing mirror 120. The light spot of the first detector 240 can be adjusted to have a second change amount of f2*tan∠2 or f2*∠2 on the object side conjugate point along the direction of the object side conjugate plane parallel to the photosensitive surface of the first detector 240 through the adjustment module, and f2 is the focal length of the first collimating mirror 231. Wherein, the first change amount is equal to the second change amount, that is, the control system controls the adjustment module so that f1*tan∠1=f2*tan∠2 or f1*∠1=f2*∠2. When the first reflector rotates by ∠1, the second reflector rotates by ∠2 accordingly. Wherein, when the focal length f1 of the first focusing mirror 120 is equal to the focal length f2 of the first collimating mirror 231, the rotation angle ∠1 of the first reflector 110 is equal to the rotation angle ∠2 of the second reflector 220, and the adjustment directions of the first reflector 110 and the second reflector 220 are opposite, and the adjustment amounts are the same. That is, in the process of adjusting the incident light path A and the reflected light path B by using the adjustment module, the first reflector 110 and the second reflector 220 can be synchronously adjusted to rotate in opposite directions relative to the normal plane of the surface of the sample 300, so that the rotation angle of the first reflector 110 is the same as the rotation angle of the second reflector 220. The first illumination light is incident on the first focusing mirror 120 in parallel.

[0064] The first change amount and the second change amount are both vectors. For example, the projection of the first change amount on the surface normal of the sample 300 along the second direction Z upward can be recorded as the positive direction, and the projection of the first change amount on the surface normal of the sample 300 along the opposite direction of the second direction Z downward can be recorded as the negative direction. When the first change amount is equal to the second change amount, the projection direction of the second change amount is also consistent with the projection direction of the first change amount.

[0065] In one embodiment, reference Figure 3 As shown, the first optical assembly 100 is composed of a first reflector 110 and a first focusing mirror 120 arranged in sequence along the incident optical path A of the first illumination light 90, and the second reflector 220 is located in the optical path between the imaging assembly 230 and the first detector 240. The second optical assembly 200 is composed of an imaging assembly 230, a second reflector 220 and a first detector 240 arranged in sequence along the reflected optical path B of the first signal light 91. In this embodiment, the imaging assembly 230 includes a first collimator 231 and a second focusing mirror 232 arranged along the reflected optical path B. The first detector 240 is located at the rear focal plane of the second focusing mirror 232.

[0066] It should be noted that, in the above embodiments, the first detector 240 is located at the rear focal plane of the second focusing mirror 232, and the optical path between the first collimator 231 and the second focusing mirror 232 is parallel. In other embodiments, the first detector 240 may not be located at the rear focal plane of the second focusing mirror 232, and the optical path between the first collimator 231 and the second focusing mirror 232 is not parallel. The first reflector 110 may be located between the first collimator 231 and the second focusing mirror 232. The adjustment angle of the first reflector 110 and the second reflector 220 is synchronously adjusted to ensure that the first change amount is equal to the second change amount, and no further details are given here. In this embodiment, the first reflector is located in a parallel light path, the second reflector is also located in a parallel light path, the first reflector is at any position of the first collimating mirror and the second focusing mirror, and the second reflector is located at any position of the parallel light path after the first focusing mirror. The rotation angle and rotation direction of the first reflector and the second reflector are fixed. Therefore, the position requirements for the first reflector and the second reflector during the installation process are very low, which can be more conducive to accurate monitoring.

[0067] refer to Figure 3 In this embodiment, when the surface of the sample 300 changes in the second direction Z, the rotation directions of the first reflector 110 and the second reflector 220 can be adjusted by the adjustment module so that the two rotate in opposite directions, and the first reflector 110 can be adjusted by the adjustment module so that the first illumination light 90 has a first change amount of f1*tan∠1 or f1*∠1 on the incident position 310 of the sample 300 along the direction parallel to the convergence plane; ∠1 is the rotation angle of the first reflector 110, and f1 is the focal length of the first focusing mirror 120; the second reflector 220 can be adjusted by the adjustment module so that the light spot of the first detector 240 has a second change amount of (d 3* ∠2) / M or (d 3* tan∠2) / M, d3 is the distance between the second reflector 220 and the first detector 240, ∠2 is the rotation angle of the second reflector 220, and M is the magnification of the imaging component 230; wherein the magnification of the imaging component 230 may be the sum of the magnification of the first collimating mirror 231 and the magnification of the second focusing mirror 232. When the first reflector 110 and the second reflector 220 are adjusted by the adjustment module, the first change amount is equal to the second change amount, that is, the control system controls the adjustment module so that f1*tan∠1=(d 3* tan∠2) / M, or f1*∠1=(d 3*∠2) / M, so that the first illumination light 90 reflected by the sample 300 at different heights perpendicular to the surface forms the first signal light 91 to be collected at the same position of the first detector 240. When the first reflector rotates by ∠1, the second reflector rotates by ∠2 accordingly. The first illumination light is incident on the first focusing mirror in parallel.

[0068] In one embodiment, illustratively, the arrangement of the first focusing mirror 120 and the first reflecting mirror 110 in the incident light path A may also be changed. Figure 4 As shown, the first optical component 100 is composed of a first focusing mirror 120 and a first reflecting mirror 110 arranged in sequence along the incident optical path A of the first illumination light 90, and the second optical component 200 is composed of an imaging component 230, a second reflecting mirror 220 and a first detector 240 arranged in sequence along the reflected optical path B of the first signal light 91. In this embodiment, the imaging component 230 includes a first collimating mirror 231 and a second focusing mirror 232 arranged along the reflected optical path B. The first detector 240 is located at the rear focal plane of the second focusing mirror 232.

[0069] refer to Figure 4 In the monitoring system, when the surface of the sample 300 changes in the second direction Z, the rotation directions of the first reflector 110 and the second reflector 220 can be adjusted by the adjustment module so that the two rotate in opposite directions. The first reflector 110 is adjusted by the adjustment module so that the first illumination light 90 has a first change amount on the incident position 310 of the sample 300 parallel to the convergence plane, and the first change amount is d1*tan∠1, or the first change amount is d1*∠1, d1 is the distance between the first reflector 110 and the convergence plane of the first illumination light; the second reflector 220 is adjusted by the adjustment module so that the light spot of the first detector 240 has a second change amount (d 3* ∠2) / M or (d 3* tan∠2) / M, d3 is the distance between the second reflector 220 and the first detector 240, ∠2 is the rotation angle of the second reflector 220, and M is the magnification of the imaging component 230; wherein the magnification of the imaging component 230 may be the sum of the magnification of the first collimating mirror 231 and the magnification of the second focusing mirror 232. When the first reflector 110 and the second reflector 220 are adjusted by the adjustment module, the first change amount is equal to the second change amount, that is, the control system controls the adjustment module so that d1*tan∠1=(d 3* tan∠2) / M, or d1*∠1=(d 3*∠2) / M, so that the first illumination light 90 reflected by points of different heights perpendicular to the surface of the sample 300 forms the first signal light 91 which is collected at the same position of the first detector 240. When the first reflector rotates by ∠1, the second reflector rotates by ∠2 accordingly.

[0070] In one embodiment, illustratively, the arrangement of the second reflector 220 and the imaging assembly 230 in the reflection light path B may also be changed. Figure 5 As shown, the first optical assembly 100 is composed of a first focusing mirror 120 and a first reflecting mirror 110 arranged in sequence along the incident optical path A of the first illumination light 90, and the second optical assembly 200 is composed of a second reflecting mirror 220, an imaging assembly 230 and a first detector 240 arranged in sequence along the reflected optical path B of the first signal light 91. In this embodiment, the imaging assembly 230 includes a first collimating mirror 231 and a second focusing mirror 232 arranged along the reflected optical path B. The first detector 240 is located at the back focal plane of the second focusing mirror 232 or other positions.

[0071] like Figure 5 As shown, in the monitoring system, when the surface of the sample 300 changes in the second direction Z, the first reflector 110 is adjusted by the adjustment module so that the first illumination light 90 has a first change amount of d1*tan∠1 or d1*∠1 on the incident position 310 of the sample 300 along the direction parallel to the convergence plane, where d1 is the distance between the first reflector 110 and the convergence plane of the first illumination light; the second reflector 220 is adjusted by the adjustment module so that the light spot of the first detector 240 has a second change amount of d2*∠2 or d3*∠1 on the conjugate point of the object side along the direction parallel to the photosensitive surface of the first detector 240 in the direction of the conjugate plane of the object side. 2* tan∠2; d2 is the distance between the second reflector and the object focal plane of the imaging component; wherein, when the first reflector 110 and the second reflector 220 are adjusted by the adjustment module, the first change amount is equal to the second change amount, that is, the control system controls the adjustment module so that d1*tan∠1= d 2* tan∠2, or d1*∠1= d 2* tan∠2, so that the first illumination light 90 reflected by the sample 300 at different heights perpendicular to the surface forms the first signal light 91 which is collected at the same position of the first detector 240. When the first reflector rotates by ∠1, the second reflector rotates by ∠2 accordingly.

[0072] Therefore, the monitoring system can adjust the first reflector 110 through the adjustment module to correct the incident position 310 of the first illumination light 90 on the surface of the sample 300, and adjust the second reflector 220 to correct the light spot 400 formed by the first signal light 91 on the first detector 240 to the same preset position 500 of the first detector 240, thereby improving the detection accuracy of the surface of the sample 300.

[0073] In the above embodiment, in order to ensure that the adjustment angles of the first reflector 110 and the second reflector 220 are consistent during the adjustment process, the optical path from the first reflector 110 to the surface of the sample 300 and the optical path from the second reflector 220 to the surface of the sample 300 are symmetrical about the normal plane of the surface of the sample 300. In other embodiments, they may also be asymmetrical.

[0074] In this embodiment, the regulating module is a piezoelectric regulating device, or a motor or a manual control module.

[0075] Figure 6 Flow chart of a monitoring method of a monitoring system provided in an embodiment of the present disclosure. The monitoring method of the monitoring system is used in the monitoring system provided in the above embodiment, such as Figure 6 As shown, a monitoring method of a monitoring system includes: Step S110, reflecting the first illumination light through the first reflector and making the first illumination light obliquely incident on the surface of the sample 300, and the sample surface reflects the first illumination light to form a first signal light; Step S120, acquiring a detection image of the sample surface through a second optical component; Step S130, monitoring and processing the sample according to the detection image, the monitoring and processing including: if the light spot deviates from the preset position, synchronously adjusting the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface through the adjustment module, so that the first illumination light reflected by the sample at different heights perpendicular to the surface and at the same point along the sample surface forms a first signal light and is collected at the same position of the first detector.

[0076] Combination Figure 1 and Figure 2 As shown, before or during the processing of the sample 300, when the thickness D2 of the replaced sample 300 is greater than the thickness D1 of the previous sample 300 or the sample vibrates up and down during the processing, the incident position 310 of the first illumination light 90 on the surface of the sample 300 is offset in the first direction X. Simultaneously, the light spot 400 formed by the first signal light 91 formed by the first illumination light 90 reflected from the surface of the sample 300 and formed on the first detector 240 is also offset from the preset position 500. In order to obtain the offset of the light spot 400 and the preset position 500, In order to obtain the offset of the incident position 310 on the surface of the sample 300, it is necessary to obtain a detection image of the surface of the sample 300 through the second optical component 200; according to the offset of the light spot 400 in the detection image and the preset position 500, the first reflector 110 and the second reflector 220 are synchronously adjusted by the adjustment module to rotate in opposite directions relative to the normal plane of the surface of the sample 300, so that the first illumination light 90 reflected from the sample 300 at different heights perpendicular to the surface and at the same point along the sample surface forms a first signal light which is collected at the same position of the first detector.

[0077] The monitoring method of the monitoring system can automatically calibrate the incident position 310 of the first illumination light 90 on the surface of the sample 300 by adjusting the incident light path A of the first optical component 100 and the reflected light path B of the first optical component 100 when the surface of the sample 300 changes in the second direction Z perpendicular to the surface of the sample 300, so as to obtain accurate surface defect information of the sample 300 and improve the detection accuracy of the sample 300.

[0078] In one embodiment, in step S130, monitoring processing is performed on the sample according to the detection image, including: Step S132, judging whether the light spot deviates from the preset position according to the detected image; if the light spot deviates from the preset position, executing step S134; if the light spot does not deviate from the preset position, no adjustment is required; Step S134, determining the rotation direction of the first reflector and the second reflector according to the deviation direction of the light spot from the preset position, and synchronously adjusting the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface according to the rotation direction until the light spot is at the preset position.

[0079] Figures 1 to 5 The monitoring systems of the illustrated embodiments may all be referenced herein.

[0080] Specifically, refer to Figure 1 and Figure 2 , a detection image of the first detector 240 can be obtained, and the detection image includes the preset position 500 of the light spot imaging. If the light spot 400 is not formed within the range of the preset position 500, that is, the position of the light spot 400 and the preset position 500 are offset, it means that the incident position 310 of the first illumination light 90 to the sample is also offset. The offset of the light spot 400 and the preset position 500 includes the offset direction and the offset amount.

[0081] like Figure 2As shown, the light spot position 400 has an offset in the first direction relative to the preset position 500, so it can be obtained that the incident position 310 of the sample has an offset in the first direction relative to the point to be measured of the sample. Therefore, the rotation direction of the first reflector and the second reflector is determined according to the deviation direction of the light spot from the preset position, and the rotation angles of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300 are synchronously adjusted according to the rotation direction, and the position of the light spot 400 is gradually adjusted until the light spot is within the range of the preset position 500. Through such a repeated adjustment process, the first illumination light 90 reflected from the sample 300 at different heights perpendicular to the surface and the same point along the sample surface to form the first signal light 91 is collected at the same position of the first detector 240, so that the first illumination light 90 does not deviate at the incident position 310 on the surface of the sample 300, so that the surface of the sample 300 is imaged and collected at the same position, thereby improving the detection accuracy of the surface of the sample 300.

[0082] In other embodiments of the present application, if the light spot deviates from the preset position, step S134 is executed, including: determining the rotation angle and rotation direction of the first reflector and the second reflector according to the offset and deviation direction of the light spot from the preset position; after determining the rotation angle and rotation direction, respectively adjusting the first reflector and the second reflector through the adjustment module. Specifically, before performing the monitoring process, the first correspondence between the offset of the light spot from the preset position and the rotation angle, and the second correspondence between the offset direction and the rotation direction can be stored in the monitoring system, and the rotation angle and rotation direction can be directly obtained according to the first correspondence and the second correspondence during the monitoring process. The first correspondence can be a data list or a function relationship. This method can avoid repeated adjustment of the first reflector and the second reflector, thereby improving the processing speed.

[0083] If after replacing the sample or during the processing of the sample by the processing system, it is determined based on the detection image that the light spot 400 has not deviated from the preset position 500, that is, the light spot 400 is formed within the range of the preset position 500, then it means that the incident position 310 of the first illumination light 90 to the sample has not shifted relative to the point to be measured of the sample, and no adjustment is required.

[0084] The monitoring method of the monitoring system monitors the offset of the light spot 400 and the preset position 500 based on the detection image, so as to synchronously adjust the incident light path A of the first optical component 100 and the light path (reflection light path B) where the first signal light 91 is located according to the offset between the two, so that the first illumination light 90 reflected from the sample 300 at different heights perpendicular to the surface and at the same point along the sample surface to form the first signal light 91 can be collected at the same position of the first detector 240, so as to calibrate the offset of the light spot caused by the position offset of the incident position 310 of the first illumination light 90 due to the change in the surface height of the sample 300, thereby realizing automatic correction of the incident position 310 of the first illumination light 90 on the surface of the sample 300 and improving the detection accuracy of the surface of the sample 300.

[0085] In one embodiment, in step S130, Figure 5 As shown, there is no reflective element between the first reflector 110 and the sample 300, and there is no reflective element between the second reflector 220 and the surface of the sample 300; the rotation angles of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300 are synchronously adjusted by the adjustment module, including: the first reflector 110 and the second reflector 220 are synchronously adjusted to rotate in opposite directions relative to the normal plane of the surface of the sample 300 by the adjustment module.

[0086] Specifically, when there is no reflective element between the first reflector 110 and the sample 300 and between the second reflector 220 and the sample 300, that is, there is no other reflective element between the first reflector 110 and the sample 300 that changes the oblique incident direction of the first illumination light 90 and the surface of the sample 300, and there is no other reflective element between the second reflector 220 and the sample 300 that changes the direction of the optical path of the first signal light 91 reflected to the second reflector 220, when the rotation method is used for adjustment, the first reflector 110 and the second reflector 220 can be synchronously adjusted by the adjustment module. 0 is rotated in opposite directions relative to the normal plane of the sample 300 surface, so that the first illumination light 90 reflected from the sample 300 at different heights perpendicular to the surface and at the same point along the sample surface to form the first signal light 91 can be collected at the same position of the first detector 240, so as to calibrate the light spot offset phenomenon caused by the position offset of the incident position 310 of the first illumination light 90 due to the change of the surface height of the sample 300, thereby realizing automatic correction of the incident position 310 of the first illumination light 90 on the surface of the sample 300 and the position of the light spot 400 formed by the first signal light 91 on the first detector 240.

[0087] In one embodiment, a reflective element may be provided between the first reflector 110 and the sample 300, and a reflective element may also be provided between the second reflector 220 and the sample 300. For example, when an even number of reflective elements are provided between the first reflector 110 and the sample 300, and an even number of reflective elements are provided between the second reflector 220 and the sample 300, the first reflector 110 and the second reflector 220 may be synchronously adjusted by the adjustment module to rotate in opposite directions relative to the normal plane of the surface of the sample 300. Alternatively, a reflective element may be provided between the first reflector 110 and the sample 300, and a reflective element may also be provided between the second reflector 220 and the sample 300. For example, when an odd number of reflective elements are provided between the first reflector 110 and the sample 300, and an odd number of reflective elements are provided between the second reflector 220 and the sample 300, the first reflector 110 and the second reflector 220 may be synchronously adjusted by the adjustment module to rotate in opposite directions relative to the normal plane of the surface of the sample 300.

[0088] In another embodiment, when an even number of reflective elements are provided between the first reflector 110 and the sample 300, and a single reflective element is provided between the second reflector 220 and the sample 300, the first reflector 110 and the second reflector 220 can be synchronously adjusted by the adjustment module to rotate in the same direction relative to the normal plane of the surface of the sample 300. Alternatively, when an odd number of reflective elements are provided between the first reflector 110 and the sample 300, and two single reflective elements are provided between the second reflector 220 and the sample 300, the first reflector 110 and the second reflector 220 can be synchronously adjusted by the adjustment module to rotate in the same direction relative to the normal plane of the surface of the sample 300.

[0089] For example, two reflective elements are arranged between the first reflector 110 and the sample 300, and the oblique incident direction of the first illumination light 90 and the surface of the sample 300 does not change after the light path of the first illumination light 90 is reflected by the two reflective elements and adjusted. In the case where two reflective elements are arranged between the second reflector 220 and the sample 300, and the light path direction of the first signal light 91 reflected to the second reflector 220 does not change after the light path of the first signal light 91 is adjusted by the two reflective elements, the first reflector 110 and the second reflector 220 can also be synchronously adjusted to rotate in opposite directions relative to the normal plane of the surface of the sample 300 through the adjustment module.

[0090] In one embodiment, in the monitoring method of the monitoring system, the first reflector 110 and the second reflector 220 are synchronously adjusted by the adjustment module to rotate in opposite directions relative to the normal plane of the surface of the sample 300, including: The first reflector 110 is adjusted by the adjustment module so that the first illumination light 90 has a first change amount on the incident position 310 of the sample 300 parallel to the convergence plane, and the second reflector 220 is adjusted so that the light spot of the first detector 240 has a second change amount at the conjugate point on the object side along the direction of the object side conjugate plane parallel to the photosensitive surface of the first detector 240, and the first change amount is equal to the second change amount.

[0091] refer to Figure 3-Figure 4 , the second reflector 220 is located in the optical path between the imaging assembly 230 and the first detector 240, and the monitoring method further comprises: adjusting the first reflector 110 and the second reflector 220 to rotate in opposite directions by the adjusting module, and adjusting the second reflector 220 by the adjusting module so that the second change amount is (d 3* ∠2) / M or (d 3* tan∠2) / M, d3 is the distance between the second reflecting mirror 220 and the first detector 240, ∠2 is the rotation angle of the second reflecting mirror 220, and M is the magnification of the imaging component 230.

[0092] refer to Figure 5 , the second reflector 220 is located in the optical path between the imaging assembly 230 and the sample 300; the monitoring method further comprises: adjusting the first reflector 110 and the second reflector 220 to rotate in opposite directions through the adjustment module, and adjusting the second reflector 220 through the adjustment module so that the second change amount is d2*∠2 or d 2* tan∠2; d2 is the distance between the second reflector 220 and the object focal plane of the imaging component.

[0093] refer to Figure 1 The imaging component 230 includes a first collimator 231 and a second focusing mirror 232, the first collimator 231 is used to collimate the first signal light 91, and the second focusing mirror 232 is used to focus and image the first signal light 91; the second reflector 220 is located in the light path between the first collimator 231 and the second focusing mirror 232; the monitoring method also includes: adjusting the rotation directions of the first reflector 110 and the second reflector 220 to be opposite through the adjustment module, and adjusting the second reflector 220 through the adjustment module so that the second change amount is f2*tan∠2 or f2*∠2, where f2 is the focal length of the first collimator 231.

[0094] refer to Figure 1 and Figure 3The first optical component 100 also includes a first focusing mirror 120, and the focal length of the first focusing mirror 120 is equal to the focal length of the first collimating mirror 231; the first reflector 110 and the first focusing mirror 120 are arranged along the incident direction of the first illumination light 90; the monitoring method also includes: adjusting the first reflector 110 through the adjustment module so that the first change amount is f1*tan∠1 or f1*∠1; ∠1 is the rotation angle of the first reflector 110, and f1 is the focal length of the first focusing mirror 120.

[0095] refer to Figure 4 and Figure 5 The first focusing mirror 120 and the first reflecting mirror 110 are arranged along the incident direction of the first illumination light. The working method also includes: adjusting the first reflecting mirror 110 through the adjustment module so that the first change amount is d1*tan∠1 or d1*∠1, where d1 is the distance between the first reflecting mirror 110 and the first illumination light converging surface.

[0096] In this embodiment, by utilizing an adjustment module to synchronously adjust the first reflector 110 and the second reflector 220 to rotate in opposite directions relative to the normal plane of the surface of the sample 300, the rotation angle of the first reflector 110 and the rotation angle of the second reflector 220 are synchronously adjusted, thereby adjusting the incident light path A of the first optical component 100 and the reflected light path B of the first optical component 100, so as to synchronously adjust the position of the light spot 400 formed by the first signal light 91 on the first detector 240 and the incident position 310 of the first illumination light 90 on the surface of the sample 300, so as to obtain accurate surface defect information of the sample 300 and improve the detection accuracy of the sample 300.

[0097] If the optical path from the first reflector to the sample surface is symmetrical with the optical path from the second reflector to the sample surface about the normal plane of the sample surface; or, the imaging component includes a first collimator and a second focusing mirror, and the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light, and the focal length of the first focusing mirror is equal to the focal length of the first collimator; the first reflector is adjusted by the adjustment module so that the incident position of the first illumination light on the sample has a first change amount along the direction parallel to the converging surface, and the second reflector is adjusted so that the conjugate point of the first detector light spot on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector on the object side, and the first change amount is equal to the second change amount, including: adjusting the first reflector and the second reflector by the adjustment module so that the rotation angles of the first reflector and the second reflector are the same.

[0098] Figure 7Schematic diagram of the structure of an optical system provided by an embodiment of the present disclosure. Figure 7 As shown, an optical system includes: the monitoring system and the processing system provided by any one of the above embodiments, wherein the processing system includes a light source component, wherein the light source component is suitable for providing a first illumination light to the first optical component 100.

[0099] It should be noted that Figures 1 to 5 The monitoring systems of the illustrated embodiments can all be introduced into this embodiment.

[0100] Specifically, in this embodiment, combined with Figure 1 and Figure 7 In detail, the light source assembly includes a light source 52 and a beam splitter assembly PBS, and the beam splitter assembly PBS splits the light emitted by the light source 52 into a first illumination light and a second illumination light. The first illumination light and the second illumination light have different incident angles on the sample surface. The first illumination light is incident obliquely on the sample surface, and the second illumination light can be incident obliquely or vertically on the sample surface. Figure 7 The dashed portion 70 is the second illumination light emitted from the beam splitting assembly PBS.

[0101] In one embodiment, the first illumination light and the second illumination light may also be provided by different light sources. Exemplarily, the light source assembly may further include a plurality of light sources to generate the first illumination light and the second illumination light with different incident angles using different light sources.

[0102] like Figure 7 As shown, the first illumination light 90 is emitted toward the first optical component 100, and can be reflected by the first reflector 110 of the first optical component 100 so as to be obliquely incident on the surface of the sample 300. The surface of the sample 300 reflects the first illumination light 90 to form a first signal light (not shown in the figure).

[0103] In the optical system, the second optical component 200 in the monitoring system is used to image the surface of the sample 300 with the first signal light 91, and detect whether the position of the light spot 400 formed by the first signal light 91 on the first detector 240 is at a preset position, so as to adjust the first transmitting mirror 110 and the second reflecting mirror 220 through the adjustment module according to the offset of the light spot 400 from the preset position to automatically adjust the incident position 310 of the first illumination light 90 incident on the surface of the sample 300 on the surface of the sample 300, so that when the height of the surface of the sample 300 changes, the first illumination light 90 can be incident on the same point to be measured through the adjustment module, thereby improving the detection accuracy of the sample.

[0104] The embodiment of the present application provides an optical system, which includes the monitoring system provided in the above embodiment. Since the principle of solving the problem in the optical system is similar to that of the above monitoring system, the implementation of the monitoring system in the optical system can refer to the implementation of the above monitoring system, and the repeated parts will not be repeated.

[0105] In this optical system, Figure 7 As shown, the first illumination light 90 is also used to form a second signal light 75 after passing through the surface of the sample 300; the processing system also includes: a detection module, the detection module is used to collect the second signal light 75, and detect the surface of the sample 300 according to the second signal light 75. Specifically, in this embodiment, the second signal light 75 is formed by the first illumination light 90 being scattered by the surface of the sample 300.

[0106] Continue to refer Figure 7 As shown, the optical system further includes: the detection module includes a collecting mirror 78 and a second image detector 80. The optical path of the first illumination light 90 after being reflected by the surface of the sample 300 is received by the second optical component, and the first illumination light 90 is also scattered by the surface of the sample 300 to form a second signal light 75. The detection module collects the second signal light 75 scattered from the surface of the sample 300 through the collecting mirror 78; the second signal light 75 from the collecting mirror 78 is obtained through the second image detector 80, and the surface of the sample 300 is detected according to the second signal light 75. Exemplarily, the collecting mirror 78 can be a lens, or a reflective cup, the reflective cup is an ellipsoidal mirror or a parabolic mirror, and the second image detector 80 is, for example, a photodetector (photomultiplier tube, PMT).

[0107] The processing system also includes a carrying device for carrying samples; a driver for driving the sample and the processing system to move relative to each other so that the processing system scans and processes the sample surface; and when detecting the surface of the sample 300 according to the second signal light 75, the second image detector 80 is specifically used to determine the position of the target to be measured along a direction parallel to the sample surface according to the movement).

[0108] In other embodiments, the processing system may not include a detection component, and the processing system is specifically used to perform photolithography or cutting on the sample 300 according to the first illumination light 90. The processing system may be a laser cutting system or a photolithography system.

[0109] Figure 8 A working method of an optical system provided in an embodiment of the present disclosure is applied to the optical system provided in the above embodiment, such as Figure 8 As shown, a working method of an optical system comprises: Step S210, providing a first illumination light to the first optical component through the light source component; Step S220, using the monitoring method of the monitoring system, the first illumination light reflected from the sample at different heights perpendicular to the surface and at the same point on the sample surface is formed into a first signal light and collected at the same position of the first detector; Step S230, after the monitoring method, the sample is detected by the processing system using the first illumination light.

[0110] The monitoring method embodiments of the monitoring system of the present application can all be introduced into this embodiment. Figure 1 and Figure 7 The following is a detailed description using the example shown.

[0111] refer to Figure 1 and Figure 7 As shown, a first illumination light 90 is provided to the first optical component 100 through a light source component, and the first illumination light 90 can be reflected by a first reflector 110 of the first optical component 100 and made to be incident obliquely on the surface of the sample 300. The surface of the sample 300 reflects the first illumination light 90 to form a first signal light (not shown in the figure); the first illumination light 90 scattered by the surface of the sample 300 forms a second signal light 75; the second optical component 200 is used to obtain a detection image of the surface of the sample 300 according to the first signal light 91, and it is determined according to the detection image whether the position of the light spot 400 formed by the first signal light 91 on the first detector 240 is at a preset position 500, so as to adjust the rotation direction and angle of the first transmitting mirror 110 and the second reflector 220 according to the offset of the light spot 400 and the preset position 500, so as to automatically adjust the incident position 310 of the first illumination light 90 incident on the surface of the sample 300 on the surface of the sample 300, so as to make the first illumination light 90 incident on the same point to be measured when the height of the surface of the sample 300 changes, thereby improving the detection accuracy of the sample. After the monitoring method of the monitoring system is adjusted, the second signal light 75 scattered from the surface of the sample 300 is collected by the detection module in the processing system; the second signal light 75 from the collecting mirror 78 is acquired by the second image detector 80, and the surface of the sample 300 is detected based on the second signal light 75.

[0112] In the monitoring method of the above-mentioned monitoring system, the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface are synchronously adjusted through the adjustment module according to the detection image, including: judging whether the light spot deviates from the preset position according to the detection image; if the light spot deviates from the preset position, determining the rotation direction of the first reflector and the second reflector according to the deviation direction of the light spot from the preset position, and synchronously adjusting the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface according to the rotation direction until the light spot is at the preset position.

[0113] In the monitoring method of the above-mentioned monitoring system, there is no reflective element between the first reflector and the sample, and there is no reflective element between the second reflector and the sample surface; or, an even number of reflective elements are arranged between the first reflector and the sample, and an even number of reflective elements are arranged between the second reflector and the sample surface; and the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface is synchronously adjusted by the adjustment module, including: synchronously adjusting the first reflector and the second reflector to rotate in opposite directions relative to the normal plane of the sample surface by the adjustment module.

[0114] In the monitoring method of the above-mentioned monitoring system, the rotation angle of the first reflector 110 and the second reflector 220 relative to the normal plane of the surface of the sample 300 is synchronously adjusted through the adjustment module, including: adjusting the first reflector 110 through the adjustment module so that the first illumination light 90 has a first change in the incident position 310 of the sample 300 along the direction parallel to the convergence plane, and adjusting the second reflector 220 so that the light spot of the first detector 240 has a second change in the direction of the object-side conjugate plane at the conjugate point on the object side along the direction parallel to the photosensitive surface of the first detector 240, and the first change is equal to the second change.

[0115] In the monitoring method of the above-mentioned monitoring system, if the optical path from the first reflector to the sample surface is symmetrical with the optical path from the second reflector to the sample surface about the normal plane of the sample surface; or, the imaging component includes a first collimator and a second focusing mirror, and the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light, and the focal length of the first focusing mirror is equal to the focal length of the first collimator; the first reflector is adjusted by the adjustment module so that the incident position of the first illumination light on the sample has a first change amount along the direction parallel to the converging surface, and the second reflector is adjusted so that the conjugate point of the first detector spot on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector on the object side, and the first change amount is equal to the second change amount, including: adjusting the first reflector and the second reflector by the adjustment module so that the rotation angles of the first reflector and the second reflector are the same.

[0116] For a detailed description of the monitoring method of the above monitoring system, please refer to the contents of the aforementioned embodiment and will not be described in detail again.

[0117] The embodiment of the present application provides a working method of an optical system, and the detection method of the optical system includes the monitoring method of the monitoring system provided in the above embodiment. Since the principle of solving the problem of the optical system is similar to that of the above monitoring system, the implementation of the monitoring method used in the optical system can refer to the implementation of the monitoring method of the above monitoring system, and the repeated parts will not be repeated.

[0118] In the embodiments provided in the present disclosure, it should be understood that the disclosed devices and methods can also be implemented in other ways. The device embodiments described above are merely schematic. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architecture, functions and operations of the devices, methods and computer program products according to multiple embodiments of the present disclosure. In this regard, each box in the flowchart or block diagram can represent a module, a program segment or a part of a code, and the above-mentioned module, program segment or a part of the code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, and the combination of boxes in the block diagram and / or flowchart can be implemented with a dedicated hardware-based system that performs a specified function or action, or can be implemented with a combination of dedicated hardware and computer instructions.

[0119] It should be noted that in the present disclosure, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element limited by the sentence "includes a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0120] Although the embodiments disclosed in the present disclosure are as above, the above contents are only embodiments adopted for facilitating the understanding of the present disclosure and are not intended to limit the present disclosure. Any technician in the technical field to which the present disclosure belongs can make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed in the present disclosure, but the scope of patent protection of the present disclosure shall still be subject to the scope defined in the attached claims.

Claims

1. A monitoring system, characterized in that: include: A first optical component includes a first reflector, wherein the first reflector is used to reflect the first illumination light and make the first illumination light obliquely incident on the sample surface, and the sample surface reflects the first illumination light to form a first signal light; a second optical component, comprising a second reflector, an imaging component and a first detector, wherein the imaging component is used to image the sample surface to the first detector using the first signal light, the first detector is used to obtain a detection image of the sample surface according to the first signal light, and to form a light spot on the photosensitive surface of the first detector, and the second reflector is used to make the light spot formed by the first signal light reflected from the sample surface at a preset calibration position on the photosensitive surface of the first detector be at a preset position; The adjustment module is used to synchronously adjust the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface, so that the first illumination light reflected by the sample at different heights perpendicular to the surface and at the same point along the sample surface forms a first signal light which is collected at the same position of the first detector.

2. The monitoring system according to claim 1, characterized in that: The adjustment module is used to make the incident position of the first illumination light on the sample have a first change amount along the direction parallel to the converging plane, and the conjugate point of the light spot of the first detector on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector on the object side conjugate plane, and the first change amount is equal to the second change amount.

3. The monitoring system according to claim 2, characterized in that: The second reflector is located in the optical path between the imaging assembly and the first detector. The first reflector and the second reflector rotate in opposite directions. The second change is (d 3* ∠2) / M or (d 3* tan∠2) / M, d3 is the distance between the second reflector and the first detector, ∠2 is the rotation angle of the second reflector, and M is the magnification of the imaging component; Alternatively, the second reflector is located in the optical path between the imaging component and the sample, the first reflector and the second reflector rotate in opposite directions, and the second change is d2*∠2 or d 2* tan∠2; d2 is the distance between the second reflector and the object focal plane of the imaging component; Alternatively, the imaging component includes a first collimator and a second focusing lens, wherein the first collimator is used to collimate the first signal light, and the second focusing lens is used to focus the first signal light; The second reflecting mirror is located in the optical path between the first collimating mirror and the second focusing mirror; The first reflector and the second reflector rotate in opposite directions; the second change amount is f2*tan∠2 or f2*∠2, where f2 is the focal length of the first collimator.

4. The monitoring system according to claim 2, characterized in that: The first optical assembly further includes a first focusing mirror, and the first focusing mirror is used to focus the first illumination light; The first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light, and the first illumination light is incident on the first focusing mirror in parallel; the first change amount is f1*tan∠1 or f1*∠1; ∠1 is the rotation angle of the first reflector, and f1 is the focal length of the first focusing mirror; Alternatively, the first focusing mirror and the first reflecting mirror are arranged along the incident direction of the first illumination light, and the first change amount is d1*tan∠1, or d1*∠1, where d1 is the distance from the first reflecting mirror to the converging surface of the first illumination light.

5. The monitoring system according to claim 4, characterized in that: The imaging assembly includes a first collimator and a second focusing mirror, the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light; the first change amount is f1*tan∠1 or f1*∠1, and the second change amount is f2*tan∠2 or f2*∠2.

6. The monitoring system according to claim 5, characterized in that: The focal length of the first focusing mirror is equal to the focal length of the first collimating mirror; the adjustment directions of the first reflecting mirror and the second reflecting mirror are opposite, and the adjustment amounts are the same.

7. The monitoring system according to any one of claims 1 to 6, characterized in that: The optical path from the first reflector to the sample surface is symmetrical with the optical path from the second reflector to the sample surface about a normal plane of the sample surface.

8. The monitoring system according to claim 1, characterized in that: Also includes: A control system is used to determine whether the light spot deviates from a preset position according to the detection image; if so, the control system controls the adjustment module to synchronously adjust the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface.

9. A monitoring method applied to the monitoring system according to any one of claims 1 to 8, characterized in that: include: Reflecting the first illumination light through a first reflector and making the first illumination light obliquely incident on a sample surface, wherein the sample surface reflects the first illumination light to form a first signal light; Acquiring a detection image of the sample surface through a second optical component; The sample is monitored and processed according to the detection image, and the monitoring and processing includes: if the light spot deviates from a preset position, the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface is synchronously adjusted by an adjustment module, so that the first illumination light reflected by the sample at different heights perpendicular to the surface and at the same point along the sample surface forms a first signal light and is collected at the same position of the first detector.

10. The monitoring method of the monitoring system according to claim 9, characterized in that: Monitoring and processing the sample according to the detection image includes: judging whether the light spot deviates from a preset position according to the detection image; if the light spot deviates from the preset position, determining the rotation direction of the first reflector and the second reflector according to the deviation direction of the light spot from the preset position, and synchronously adjusting the rotation angle of the first reflector and the second reflector relative to the normal plane of the sample surface according to the rotation direction until the light spot is at the preset position.

11. The monitoring method of the monitoring system according to claim 9, characterized in that: There is no reflective element between the first reflector and the sample, and there is no reflective element between the second reflector and the sample surface; or, an even number of reflective elements are provided between the first reflector and the sample, and an even number of reflective elements are provided between the second reflector and the sample surface; Synchronously adjusting the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface by the adjustment module includes: synchronously adjusting the first reflector and the second reflector relative to the normal plane of the sample surface in opposite directions by the adjustment module.

12. The monitoring method of the monitoring system according to claim 10, characterized in that: The method further comprises: synchronously adjusting the rotation angles of the first reflector and the second reflector relative to the normal plane of the sample surface by the adjustment module; The first reflector is adjusted by the adjustment module so that the incident position of the first illumination light on the sample has a first change amount along the direction parallel to the converging surface, and the second reflector is adjusted so that the light spot of the first detector at the conjugate point on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector in the object side conjugate plane, and the first change amount is equal to the second change amount.

13. The monitoring method of the monitoring system according to claim 12, characterized in that: If the optical path from the first reflector to the sample surface is symmetrical with the optical path from the second reflector to the sample surface about the normal plane of the sample surface; Alternatively, the imaging assembly includes a first collimator and a second focusing mirror, the first detector is located at the rear focal plane of the second focusing mirror; the first reflector and the first focusing mirror are arranged along the incident direction of the first illumination light; the second reflector is located between the first collimator and the second focusing mirror; the first illumination light reflected by the first reflector is parallel light, and the focal length of the first focusing mirror is equal to the focal length of the first collimator; The first reflector is adjusted by the adjustment module so that the incident position of the first illumination light on the sample has a first change amount along the direction parallel to the converging surface, and the second reflector is adjusted so that the conjugate point of the first detector light spot on the object side has a second change amount along the direction parallel to the photosensitive surface of the first detector in the object side conjugate plane, and the first change amount is equal to the second change amount, including: adjusting the first reflector and the second reflector by the adjustment module so that the rotation angles of the first reflector and the second reflector are the same.

14. An optical system, characterized in that: include: A monitoring system as claimed in any one of claims 1 to 8; The processing system includes a light source assembly adapted to provide the first illumination light to a first optical assembly.

15. The optical system according to claim 14, characterized in that The first illumination light is also used to form a second signal light after passing through the sample surface; The processing system further includes: a detection module, which is used to collect the second signal light and detect the sample surface according to the second signal light.

16. A method for operating an optical system, characterized in that: include: Providing a first illumination light to the first optical component through the light source component; Using the monitoring method of the monitoring system of any one of claims 9 to 13, the first illumination light reflected from the sample at different heights perpendicular to the surface and at the same point along the sample surface forms the first signal light which is collected at the same position of the first detector; After the monitoring method, the sample is detected by a processing system using the first illumination light.

17. The operating method of the optical system according to claim 16, characterized in that: The first illumination light is also used to form a second signal light after passing through the sample surface; Detecting the sample using the first illumination light by the processing system includes: The second signal light formed by the first illumination light passing through the sample surface is collected by the detection module, and the sample surface is detected according to the second signal light.

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