Near-field electromagnetic signal acquisition control equipment

Abstract

The invention relates to the technical field of near-field electromagnetic signal acquisition, in particular to near-field electromagnetic signal acquisition control equipment which comprises a Y-direction linear module, an X-direction linear module and a sliding rail which are arranged on a frame, a fixed cross beam is arranged on a mover of the Y-direction linear module and a sliding block of the sliding rail, the X-direction linear module is arranged on the fixed cross beam, the X-direction linear module is provided with a measuring head, and the Y-direction linear module is provided with a probe. A left frame table and a right frame table are arranged on the frame, a bottom plate is arranged at the bottom in the frame, the left frame table and the right frame table are each provided with a Y-direction linear module and a sliding rail in parallel, the sliding rails are provided with sliding blocks in a matched mode, a top frame is arranged on the frame, a camera irradiating downwards is arranged on the top frame, and a Z-axis cantilever is arranged on a rotor of an X-direction linear module. And a device for fixing a measuring head is arranged at the lower end of the Z-axis cantilever. According to the invention, high-speed, high-precision and anti-interference automatic acquisition of near-field electromagnetic signals is realized.

Description

Technical Field

[0001] The invention belongs to the technical field of detection equipment, and in particular is a near-field electromagnetic signal acquisition and control device. Background Art

[0002] In recent years, with the rapid development of electronic information science, the operating frequency of circuit boards and chips has increased at a geometric rate, and the integration and power level of the devices in which they are located have also become higher and higher, which has brought many problems to the electromagnetic compatibility of circuit boards, chips and even the entire system. In this context, the industry has formulated a large number of standards to limit the electromagnetic radiation intensity of high-speed circuit boards, chips, etc. The standards stipulate that products must pass a series of extremely strict tests before they are released. These tests often require high testing costs and long testing cycles. These existing problems require R&D designers to consider the needs of electromagnetic compatibility in the early stages of system design, so professional equipment is needed to do some necessary tests. For example, Riscure's high-precision electromagnetic probe and electric XYZ workbench can simply clamp the probe to achieve XYZ movement, locate the chip surface, scan a certain point and collect electromagnetic signals, but there are many problems: 1. The positioning accuracy is poor, and only a single measurement of a small number of points can be achieved, and the measurement cannot be marked, and repeated positioning is not accurate enough, and the traceability is poor or cannot be traced; 2. There are many sources of electromagnetic interference, which affects the test results. High-end products should 1. It is difficult to meet the needs; 2. Imported high-precision acquisition equipment can only clamp probes from a single manufacturer, which limits the needs of different test scenarios. The probes currently used in the near field have different shapes and sizes, the probe clamping is unstable, the probes that can be clamped are single, and they are not compatible with probes of various forms and structures, nor can the probes be stably changed in direction; 3. The probe is prone to accidental collision with the protruding components in the uneven circuit board, causing damage to the probe; 4. The structure of the circuit board clamping mechanism is complex, and the poor clamping stability can easily cause position deviation, and the operation process is time-consuming and labor-intensive; 5. The types of chip modules on the tested circuit board are different, and the required near-field test methods also need to be proposed in a targeted manner. Summary of the invention

[0003] In order to solve the problem of rapid, accurate and interference-resistant automatic detection of electromagnetic radiation of a chip, the present invention invents a near-field electromagnetic signal acquisition and control device.

[0004] The present invention adopts the following technical solutions: A near-field electromagnetic signal acquisition and control device comprises a Y-axis linear module, an X-axis linear module and a slide rail arranged on a frame, a fixed crossbeam is arranged on the mover of the Y-axis linear module and the slider of the slide rail, an X-axis linear module is arranged on the fixed crossbeam, a probe is arranged on the X-axis linear module, a left and right frame platforms are arranged on the frame, a bottom plate is arranged at the bottom of the frame, the left and right frame platforms are respectively arranged with the Y-axis linear module and the slide rail in parallel, the slide rail is adapted to be arranged with a slider, a top frame is arranged on the frame, the top frame is arranged with a downward irradiating camera, a Z-axis cantilever is arranged on the mover of the X-axis linear module, and a device for fixing the probe is arranged at the lower end of the Z-axis cantilever.

[0005] The near-field electromagnetic signal acquisition and control equipment also includes a partition assembly and a cover bin. Partition assemblies are arranged under the left and right frame platforms of the frame, and a cover bin is opened and closed on the frame. The closed cover bin, partition assembly and the upper frame body of the frame together form a closed metal cavity. A thinner transition rod with an equilateral square cross-section is arranged in the middle of the Z-axis cantilever; the transition rod section passes through the partition assembly.

[0006] The bottom plate is an insulator, and a matrix of threaded holes is arranged on the bottom plate, and wire screw sleeves are arranged in the threaded holes. The bottom plate is used to place and fix the measured plate, and the measured plate is adapted to be fixed with a clamping piece for clamping the measured plate.

[0007] The partition assembly includes: a long guide rail, a short guide rail, a long slide plate, a short slide plate, a fixed plate, a lower cover, and an upper cover. Two long guide rails and two short guide rails are spliced ​​in pairs to form a frame. The inner sides of the long guide rails and the short guide rails are provided with grooves for accommodating the long slide plate, the short slide plate, and the fixed plate. The inner sides are provided with a short slide plate that moves laterally, a long slide plate that moves endwise, and a fixed plate that is fixed. A rectangular opening is provided in the fixed plate. The long slide plate and the short slide plate are respectively provided with slots parallel to the extension direction of the plate body. The slots of the long slide plate and the short slide plate cross-intersect and form a rectangular through hole that runs through from top to bottom. The rectangular through hole is adapted to the transition rod of the Z-axis cantilever. When the long slide plate and the short slide plate are moved along the long guide rail When the short guide rail slides, the rectangular through hole formed by the cross intersection of the slot holes of the long skateboard and the short skateboard moves in the X and Y directions within the rectangular opening, and the upper and lower sides of the partition assembly remain shielded. The long skateboard and the short skateboard are respectively provided with circular holes, which are step holes. The step hole of the long skateboard is adapted to be provided with a lower cover, and the step hole of the short skateboard is adapted to be provided with an upper cover. The inner diameter of the step hole of the short skateboard is larger than the outer diameter of the lower cover. When the rectangular through hole formed by the cross intersection of the slot holes of the long skateboard and the short skateboard is within the rectangular opening to a corner, the circular holes provided on the long skateboard and the short skateboard are coaxial, and the camera's viewing angle is projected onto the bottom plate through the circular holes provided on the long skateboard and the short skateboard.

[0008] A light source is arranged in the middle of the top frame and is adapted adjacent to the camera, and an infrared indicator is arranged in the middle of the top frame and is adjacent to the camera.

[0009] The clamping part is provided with multiple steps, the clamping part shaft body is provided with a through hole deviating from the axis, each step of the multiple steps is provided with a U-shaped groove, and the locking screw is adapted to pass through the through hole and be screwed into the wire screw sleeve hole of the bottom plate.

[0010] The device for fixing the probe is a probe fixing device, including: a fixed plate, an upper plate, a lower plate, a guide column, an axle tube, a spring, a vertical clamping plate, and a transverse clamping plate. The fixed plate is vertically arranged for connecting the Z-axis cantilever, the fixed plate is provided with an upper plate and a lower plate in parallel, and a guide column and an axle tube are fixedly arranged in parallel between the upper plate and the lower plate. A vertical clamping plate is arranged in a transverse groove formed between the upper plate and the lower plate, and the vertical clamping plate is provided with a hole-type sliding bearing, which is adapted to the axle tube hole axis to constrain the vertical clamping plate to float up and down in the transverse groove formed between the upper plate and the lower plate, and the axle tube sleeve between the upper plate and the vertical clamping plate is provided with a spring, and the vertical clamping plate is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism.

[0011] A transverse clamping plate is also fixedly arranged under the vertical clamping plate. The transverse clamping plate is provided with front and rear through holes with one end open, and the front and rear through holes are provided with screw locking mechanisms.

[0012] The near-field electromagnetic signal acquisition and control device also includes a tensioning sleeve, which is arranged in the upper and lower through holes and the front and rear through holes. The tensioning sleeve is provided with a radial opening, and a polygonal hole is arranged in the sleeve for clamping an adapted polygonal probe body.

[0013] The device for fixing the probe is a universal probe fixing device, including: a horizontal fixing plate, a variable clamping piece, an adjusting nut, a force adjusting spring, a T-bar, a ball spring pin, and a locking screw. The left side of the horizontal fixing plate is used to be fixed to the Z-axis cantilever, and a raised plate is arranged on the right side of the horizontal fixing plate. The plate is provided with a horizontal through hole, and a variable clamping piece is connected to the T-end of the T-bar. The tail rod body of the T-bar is inserted into the through hole of the horizontal fixing plate, and the tail of the T-bar tail rod body passing through the through hole is provided with an external thread, and the tail sleeve of the T-bar tail rod body is provided with An adjusting spring is provided with an adjusting nut screwed on the external thread. Ball spring pins sunk into the body of the horizontal fixing plate are distributed on the adjacent surfaces of the horizontal fixing plate and the clamping piece. Small pits corresponding to the ball spring pins are provided on the adjacent surface of the clamping piece. The clamping piece can freely rotate around the axis of the rod body at the tail of the T-bar. The positioning and limiting are achieved in the up, down, left and right directions through the cooperation of the ball spring pin and the small pit. The clamping piece is provided with a through hole for passing a probe, an opening is provided on one side of the through hole, and a locking screw is provided adjacent to the through hole for locking the clamping probe.

[0014] Compared with the prior art, the present invention can achieve the following technical effects: combining with the visual recognition system to take pictures, realize grid division, guide the module to accurately move and cooperate with the probe to collect data, realize the signal collection, recording and traceability functions corresponding to the coordinate points, can continuously locate and collect the measured target, and can also locate and collect data for a single point. Through the setting of the probe fixing device and the universal probe fixing device, the probe direction can be adjusted at multiple angles to locate and collect data for a certain point in the three-dimensional space, and an elastic floating mechanism and anti-collision mechanism are provided to prevent the probe from accidentally colliding. The probe fixing device The universal probe fixture can take into account probes with different structures and functions, further improving the probe clamping ability and stability. The insulating bottom plate is equipped with a wire screw sleeve to achieve insulation while improving the use effect and life of the threaded hole. A closed metal cavity is formed by setting a cover bin, partition assembly and the upper frame of the frame to isolate interference sources such as motors and cameras, thereby meeting the precise electromagnetic signal acquisition in high-end scenarios and taking into account the camera field of view projection. The special design of the clamp can meet the clamping of plates and chips of different heights and shapes. The U-shaped groove can realize two-way positioning of the plate corners.

[0015] The present invention realizes high-speed, high-precision, and interference-resistant automatic acquisition of near-field electromagnetic signals. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention without the lower cover and the upper cover; Figure 2 It is a schematic diagram of a partial three-dimensional structure of the partition assembly of the present invention after the lower cover and the upper cover are installed; Figure 3 yes Figure 2 The right-hand schematic diagram of Figure 4 yes Figure 2 Schematic diagram of the top view; Figure 5 It is a schematic diagram of the three-dimensional structure of the Z-axis cantilever; Figure 6 It is a schematic diagram of the partition assembly without the lower cover and the upper cover; Figure 7 This is an exploded view of the partition assembly without the lower cover and the upper cover; Figure 8 It is a schematic diagram of the state when the long slide plate and the short slide plate circular holes are aligned and the lower cover and the upper cover are opened; Fig. 9 It is a schematic diagram of the three-dimensional structure of the first device for fixing the measuring head; Fig.10 It is a schematic diagram of the three-dimensional structure of the clamping part; Fig.11 It is a three-dimensional diagram of the second type of fixed probe device and a schematic diagram of the variable working state; Fig.12 yes Fig.11 Right-pointing schematic diagram and variable state schematic diagram; Fig.13 yes Fig.12 Schematic diagram of the AA section; Fig.14 This is a schematic diagram of the installation structure of the second fixed probe in the flipped state of the clamping part; Fig.15 It is a schematic diagram of the structure of fixing the clamping part on the base plate by means of locking screws and wire thread sleeves.

[0017] Among them, 1-frame, 2-bottom plate, 3-frame table, 4-Y-axis linear module, 5-X-axis linear module, 6-slide rail, 7-top frame, 8-camera, 9-light source, 10-infrared indicator, 11-Z-axis cantilever, 12-partition assembly, 13-clamp, 14-locking screw, 15-straight rod point probe, 16-annular probe, 17-cover, 18-probe fixture, 19-plate and chip, 20-universal probe fixture, 1101-transition rod, 1201-long guide rail, 1202-short guide rail, 1203-long slide plate, 1204-short slide plate, 120 5-fixed plate, 1206-lower cover, 1207-upper cover, 1301-multi-step steps, 1302-through hole, 1303-U-shaped groove, 1801-fixed plate, 1802-upper plate, 1803-lower plate, 1804-guide column, 1805-axis tube, 1806-spring, 1807-vertical clamping plate, 1808-horizontal clamping plate, 1809-tensioning sleeve, 2001-horizontal fixed plate, 2002-variable clamping piece, 2003-adjusting nut, 2004-force adjusting spring, 2005-T-rod, 2006-ball spring pin, 2007-locking screw. DETAILED DESCRIPTION

[0018] like Figure 1-15, near-field electromagnetic signal acquisition and control equipment, including: a frame 1, a base plate 2, a Y-axis linear module 4, an X-axis linear module 5, a slide rail 6, a top frame 7, a camera 8, a Z-axis cantilever 11, a partition assembly 12, a clamp 13, a locking screw 14, a cover compartment 17, and a probe fixing device 18. The frame 1 is rectangular, and is provided with left and right frame platforms 3 on the frame 1. A bottom plate 2 is provided at the bottom of the frame 1. The left and right frame platforms 3 are respectively provided with Y-axis linear modules 4 and slide rails 6 in parallel. The slide rails 6 are adapted to be provided with sliders. Fixed beams are provided on the movers of the Y-axis linear modules 4 and the sliders of the slide rails 6. The fixed beams are provided with X-axis linear modules 5. The left and right adjacent frame platforms 3 on the frame 1 are provided with gantry-type top frames 7. A downward-illuminating camera 8 is provided in the middle of the top frame 7. A Z-axis cantilever 11 is provided on the mover of the X-axis linear module 5. The Z-axis cantilever 11 extends downward in an "inverted L" shape. A probe fixing device 18 is fixedly provided at the lower end of the Z-axis cantilever 11 for fixing the probe. The probes include: a straight rod point probe 15 and a ring probe 16 for measuring requirements in different directions and different measuring points. , a partition assembly 12 is arranged under the left and right frame platforms 3 of the frame 1, and a cover bin 17 is arranged on the frame 1 for opening and closing. The closed cover bin 17, the partition assembly 12 and the upper frame of the frame 1 together form a closed metal cavity, which is used to isolate the electromagnetic radiation caused by the module motor, camera, light source, etc. from spreading outward, and prevent the generated electromagnetic radiation from interfering with the probe, the measured plate under the partition assembly 12 - the plate body and the chip 19. The bottom plate 2 is an insulator, such as phenolic resin. A matrix of threaded holes is arranged on the bottom plate 2, and wire screw sleeves are arranged in the threaded holes. The bottom plate 2 is used to place and fix the measured plate, and is adapted to be provided with a clamping member 13 for clamping the measured plate. The clamping member 13 is provided with multiple steps 1301 of determined height but different heights, and the axis of the clamping member 13 is provided with a through hole 1302 deviating from the axis, such as Fig.10 Each step of the multi-step steps 1301 is respectively provided with a U-shaped groove 1303 , and the locking screw 14 is adapted to pass through the through hole 1302 and be screwed into the wire screw sleeve hole of the bottom plate 2 .

[0019] A light source 9 is disposed in the middle of the top frame 7 and is adjacent to the camera 8 .

[0020] An infrared indicator 10 is disposed in the middle of the top frame 7 and is adjacent to the camera 8 .

[0021] like Figure 5 , Figure 2 A thinner transition rod 1101 with an equilateral square cross section is provided in the middle of the Z-axis cantilever 11; the transition rod section passes through the partition assembly 12.

[0022] like Figure 2 , Figure 6-7As shown, the partition assembly 12 includes: a long guide rail 1201, a short guide rail 1202, a long slide plate 1203, a short slide plate 1204, a fixed plate 1205, a lower cover 1206, and an upper cover 1207. Two long guide rails 1201 and two short guide rails 1202 are spliced ​​in pairs to form a frame. The inner sides of the long guide rails 1201 and the short guide rails 1202 are provided with grooves for accommodating the long slide plate 1203, the short slide plate 1204, and the fixed plate 1205. Figure 7 , a short slide 1204 that moves laterally, a long slide 1203 that moves endways, and a fixed plate 1205 are stacked on the inner side, a rectangular opening is arranged in the fixed plate 1205, the long slide 1203 and the short slide 1204 are respectively provided with slots parallel to the extension direction of the plate body, the slots of the long slide 1203 and the short slide 1204 cross-intersect and form a rectangular through hole that runs through from top to bottom, the rectangular through hole is adapted to the transition rod 1101 of the Z-axis cantilever 11, when the long slide 1203 and the short slide 1204 slide along the long guide rail 1201 and the short guide rail 1202, the rectangular through hole formed by the cross-intersection of the slots of the long slide 1203 and the short slide 1204 moves in the X and Y directions within the rectangular opening, the upper and lower sides of the partition assembly 12 remain shielded, the long slide 1203 and the short slide 1204 are respectively provided with round holes, such as Figure 7 , the circular hole is a stepped hole, the stepped hole of the long slide 1203 is adapted to be provided with a lower cover 1206, and the stepped hole of the short slide 1204 is adapted to be provided with an upper cover 1207, the inner diameter of the stepped hole of the short slide 1204 is larger than the outer diameter of the lower cover 1206, when the rectangular through hole formed by the cross intersection of the slot holes of the long slide 1203 and the short slide 1204 is within the range of the rectangular mouth to one corner, the circular holes set in the long slide 1203 and the short slide 1204 are coaxial, such as Figure 1 As shown, at this time, the viewing angle of the camera 8 is projected onto the bottom plate 2 through the circular holes set in the long slide plate 1203 and the short slide plate 1204.

[0023] There are two devices for fixing the probe, a probe fixing device 18 and a universal probe fixing device 20, such as Fig. 9The first probe fixing device 18 includes: a fixing plate 1801, an upper plate 1802, a lower plate 1803, a guide column 1804, a shaft tube 1805, a spring 1806, a vertical clamping plate 1807, a horizontal clamping plate 1808, and a tension sleeve 1809. The fixing plate 1801 is vertically arranged for connecting the Z-axis cantilever 11. The upper plate 1802 and the lower plate 1803 are arranged in parallel under the fixing plate 1801. The guide column 1804 and the shaft tube 1805 are fixedly arranged in parallel between the upper plate 1802 and the lower plate 1803. The upper plate 1802 and the lower plate 1803 form a A vertical clamping plate 1807 is arranged in the transverse groove, and the vertical clamping plate 1807 is provided with a hole-type sliding bearing, which is adapted to the hole axis of the shaft tube 1805 to constrain the vertical clamping plate 1807 to float up and down in the transverse groove formed between the upper plate 1802 and the lower plate 1803. The shaft tube 1805 between the upper plate 1802 and the vertical clamping plate 1807 is sleeved with a spring 1806, and the vertical clamping plate 1807 is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism, and the screw locking can elastically compress the diameter of the upper and lower through holes to realize the placement of the shaft body in the hole.

[0024] Furthermore, a transverse clamping plate 1808 is fixedly arranged under the vertical clamping plate 1807, and is provided with front and rear through holes with one end open. The front and rear through holes are provided with screw locking mechanisms. The screw locking can elastically compress the diameters of the front and rear through holes so as to allow the shaft to be placed in the holes.

[0025] Furthermore, a tension sleeve 1809 is provided in the upper and lower through holes and the front and rear through holes. The tension sleeve 1809 is provided with a radial opening and a polygonal hole is provided in the sleeve for clamping a matching polygonal probe body, such as Fig. 9 The straight rod point probe 15 is shown.

[0026] like Figure 11-14The second universal probe fixing device 20 includes: a horizontal fixing plate 2001, a variable clamping member 2002, an adjusting nut 2003, a force adjusting spring 2004, a T-bar 2005, a ball spring pin 2006, and a locking screw 2007. The left side of the horizontal fixing plate 2001 is used to be fixed to the Z-axis cantilever 11. The right side of the horizontal fixing plate 2001 is provided with a raised plate, and the plate is provided with a horizontal through hole. The T-end of the T-bar 2005 is connected with a variable clamping member 2002. The tail of the T-bar 2005 is inserted into the through hole of the horizontal fixing plate 2001. The tail of the T-bar 2005 passing through the through hole The tail of the rod body is provided with an external thread, and the tail of the rod body of the T-bar 2005 is sleeved with a force adjustment spring 2004, and an adjusting nut 2003 is screwed on the external thread. The adjacent surface of the horizontal fixing plate 2001 and the clamping member 2002 is distributed with ball spring pins 2006 sunk into the plate body of the horizontal fixing plate 2001, and the adjacent surface of the clamping member 2002 is provided with small pits corresponding to the ball spring pins 2006. The clamping member 2002 can rotate freely 360 degrees around the axis of the rod body of the T-bar 2005, wherein the positioning and limiting are realized by the cooperation of the ball spring pins 2006 and the small pits in the up, down, left and right directions. Fig.12 The clamping member 2002 can also be flipped 90 degrees, or temporarily fixed at a certain balance point. The positioning, limiting and flipping force of the clamping member 2002 can be adjusted by screwing the adjusting nut 2003 to compress the force adjusting spring 2004. The clamping member 2002 is provided with a through hole for passing the probe, an opening is provided on one side of the through hole, and a locking screw 2007 is provided adjacent to the through hole for locking the clamping probe.

[0027] The cover 17 is connected to the frame 1 by a hinge, or is buckled separately, and no gap is generated at the joint in the process, or the electromagnetic isolation effect is achieved by setting a shielding material such as conductive rubber or polymer composite shielding material at the gap, such as Figure 3 As shown, the cables connecting the motor, camera 8, etc. are led out from the cover compartment 17 to the external controller, and the cables are provided with a shielding layer.

[0028] Implementation method: like Figure 1 , the cover 17 is opened, the controller drives the X-axis linear module 5 and the Y-axis linear module 4 to work, the mover of the Y-axis linear module 4 and the slider of the slide rail 6 and the fixed beam are integrated, the mover of the Y-axis linear module 4 moves along the Y direction, so that the fixed beam and the X-axis linear module 5 move at the same time, and the slider of the slide rail 6 moves with it, so that the Z-axis cantilever 11 stays at the position where it works in the X-axis and Y-axis directions. Figure 1 The upper left corner of the rectangular opening of the fixed plate 1205 is also the working initial position; after the equipment has run for many times and accumulated errors have occurred, the setting of the working initial position can achieve the function of mechanical return to zero and eliminate the accumulated errors.

[0029] like Figure 8, the lower cover 1206 and the upper cover 1207 are opened from the long slide 1203 and the short slide 1204 to meet the illumination observation of the camera and the infrared indicator 10; The infrared indicator 10 is projected onto the bottom plate 2 to guide the installation of the tested board and the chip 19 to be positioned within the field of view of the camera 8, such as Figure 1 , Fig.15 As shown, the board and the chip 19 are clamped by a plurality of clamping members 13, and the locking screw 14 is screwed into the wire screw sleeve hole of the bottom plate 2. The eccentric rotating clamping member 13 is used to make a certain step of the multi-step step 1301 clamp the board and the outer periphery of the chip 19. The multi-step step 1301 is used to lift the board and the chip 19 to meet different heights, so that the distance between the measured surface and the camera 8 is within the optimal field of view clarity of the camera 8. After the position is stable, the locking screw 14 is tightened to make it stable, and the U-shaped groove 1303 is used to adapt and position the right-angle edge of the measured board. When using the probe fixing device 18, adjust the screw locking mechanism to loosen the tension sleeve 1809, and move the polygonal straight rod point probe 15 vertically up and down so that the probe end point is consistent with the height of the fixed plate and the measured surface of the chip 19; when the side head body is a cylinder, the tension sleeve 1809 can be removed and locked directly.

[0030] When the universal probe fixture 20 is used, the probe is installed in the through hole of the clamping member 2002, and the locking screw 2007 is adjusted to lock and clamp the probe, so that it can move vertically up and down, so that the probe end point is consistent with the height of the fixed plate and the measured surface of the chip 19; At this time, the controller controls the camera 8 and the light source 9 to work and take pictures, and the image is processed and grid-divided at the back end. The system automatically establishes the X-axis and Y-axis coordinates of the working initial position, the grid initial position, the scanning path, and the grid end position. The lower cover 1206 and the upper cover 1207 cover the long slide 1203 and the short slide 1204, and the cover bin 17 is closed, so that the electromagnetic interference sources such as the motor and the camera 8 are enclosed in the space inside the cover bin 17. The controller controls the driving of the X-axis linear module 5 and the Y-axis linear module 4 to work, so that the Z-axis cantilever 11 and its probe are scanned according to the predetermined grid initial position, scanning path, and grid end position. For example, the probe performs data acquisition once every 1 mm step, and the acquired data and the coordinate position data are transmitted to the controller, so that the corresponding electromagnetic signal data of the image coordinate point is stored to achieve traceability.

[0031] In addition to the automatic scanning according to the path, the X-axis linear module 5 and the Y-axis linear module 4 can also be manually controlled to work, fixed to a certain point on the measured surface of the plate and the chip 19, store the coordinates and collect the probe data.

[0032] During the above measurement process, when the probe accidentally touches the protrusions of the measured plate and chip 19, the vertical clamping plate 1807 of the probe fixing device 18 compresses the spring 1806 and floats toward the upper plate 1802, thereby avoiding obstacles and preventing contact damage.

[0033] When the universal probe fixture 20 is used, Figure 11-12 The clamping member 2002 has a multi-directional flipping capability, which can be flipped by compressing the force regulating spring 2004 to stretch the T-bar 2005, or by causing the collision deflection force to exceed the limiting force of the ball spring pin 2006, so that it can be deflected to avoid obstacles and prevent touch damage.

[0034] The clamping member 2002 of the universal probe fixture 20 has multiple direction adjustments, such as Fig.11 The left and right rotation method, such as Fig.12 The up and down swing mode, such as Fig.13 The vertical and horizontal positioning / limiting methods, such as Fig.14 The flipping mode can satisfy the automatic scanning measurement and temporary multi-angle single-point measurement of different working conditions. During the adjustment process, the adjusting nut 2003 can be adjusted to compress the force adjusting spring 2004 for force control.

[0035] The probe fixing device 18 can clamp the horizontal annular probe 16 or the straight rod point probe 15 to meet different measurement requirements.

Claims

1. A near-field electromagnetic signal acquisition and control device, comprising a Y-direction linear module (4), an X-direction linear module (5), and a slide rail (6) arranged on a frame (1), a fixed crossbeam being arranged on a mover of the Y-direction linear module (4) and a slider of the slide rail (6), an X-direction linear module (5) being arranged on the fixed crossbeam, and a probe being arranged on the X-direction linear module (5), wherein: The frame (1) is provided with left and right frame platforms (3), the bottom of the frame (1) is provided with a bottom plate (2), the left and right frame platforms (3) are respectively provided with Y-axis linear modules (4) and slide rails (6) in parallel, the slide rails (6) are adapted to be provided with sliders, the frame (1) is provided with a top frame (7), the top frame (7) is provided with a camera (8) for irradiating downwards, the mover of the X-axis linear module (5) is provided with a Z-axis cantilever (11), and the lower end of the Z-axis cantilever (11) is provided with a device for fixing a probe.

2. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: It also comprises a partition assembly (12) and a cover bin (17), wherein the partition assembly (12) is arranged under the left and right frame platforms (3) of the frame (1), and the cover bin (17) is arranged on the frame (1) for opening and closing, and the closed cover bin (17), the partition assembly (12) and the upper frame body of the frame (1) together form a closed metal cavity, and a thin transition rod (1101) with an equilateral square cross section is arranged in the middle of the Z-axis cantilever (11); the transition rod section passes through the partition assembly (12).

3. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The bottom plate (2) is an insulator. The bottom plate (2) is provided with threaded holes in a matrix. Steel wire screw sleeves are provided in the threaded holes. The bottom plate (2) is used to place and fix the plate to be tested. The plate to be tested is adapted to be provided with a clamping piece (13) for clamping the plate to be tested.

4. The near-field electromagnetic signal acquisition and control device according to claim 2, characterized in that: The partition assembly (12) comprises: a long guide rail (1201), a short guide rail (1202), a long slide plate (1203), a short slide plate (1204), a fixing plate (1205), a lower cover (1206), and an upper cover (1207). The two long guide rails (1201) and the two short guide rails (1202) are spliced ​​in pairs to form a frame. The inner sides of the long guide rails (1201) and the short guide rails (1202) are provided with grooves for accommodating the long slide plate (1203), the short slide plate (1204), and the fixing plate (1205). A short slide plate (1204) that moves laterally, a long slide plate (1203) that moves endwise, and a fixed plate (1205) are additionally provided, wherein a rectangular opening is provided in the fixed plate (1205), and the long slide plate (1203) and the short slide plate (1204) are respectively provided with slots parallel to the extension direction of the plate body, and the slots of the long slide plate (1203) and the short slide plate (1204) cross and form a rectangular through hole that penetrates from top to bottom, and the rectangular through hole is adapted to the transition rod (1101) of the Z-axis cantilever (11), and when the long slide plate When the long guide rail (1201) and the short guide rail (1202) slide, the rectangular through hole formed by the cross-intersection of the slot holes of the long slide plate (1203) and the short slide plate (1204) moves in the X direction and the Y direction within the rectangular opening, and the upper and lower surfaces of the partition assembly (12) remain shielded. The long slide plate (1203) and the short slide plate (1204) are respectively provided with circular holes, which are step holes. The step hole of the long slide plate (1203) is adapted to be provided with a lower cover (1206). The short slide plate (1204) is provided with a lower cover (1206). The stepped hole of the short slide plate (1204) is adapted to be provided with an upper cover (1207), the inner diameter of the stepped hole of the short slide plate (1204) is larger than the outer diameter of the lower cover (1206), when the rectangular through hole formed by the cross-intersection of the slot holes of the long slide plate (1203) and the short slide plate (1204) is within the range of the rectangular opening to a corner, the circular holes provided on the long slide plate (1203) and the short slide plate (1204) are coaxial, and the viewing angle of the camera (8) is projected onto the bottom plate (2) through the circular holes provided on the long slide plate (1203) and the short slide plate (1204).

5. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: A light source (9) is arranged in the middle of the top frame (7) and is adapted to be adjacent to the camera (8); an infrared indicator (10) is arranged in the middle of the top frame (7) and is adjacent to the camera (8).

6. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The clamping member (13) is provided with a plurality of steps (1301), the shaft of the clamping member (13) is provided with a through hole (1302) offset from the axis, each step of the plurality of steps (1301) is provided with a U-shaped groove (1303), and the locking screw (14) is adapted to pass through the through hole (1302) and be screwed into the wire screw sleeve hole of the bottom plate (2).

7. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The device for fixing the probe is a probe fixing device (18), comprising: a fixing plate (1801), an upper plate (1802), a lower plate (1803), a guide column (1804), an axle tube (1805), a spring (1806), a vertical clamping plate (1807), and a horizontal clamping plate (1808). The fixing plate (1801) is vertically arranged for connecting to the Z-axis cantilever (11). The fixing plate (1801) is provided with an upper plate (1802) and a lower plate (1803) in parallel. The guide column (1804) and the axle tube (1805) are fixedly arranged in parallel between the upper plate (1802) and the lower plate (1803). A vertical clamping plate (1807) is arranged in the transverse groove formed between the upper plate (1802) and the lower plate (1803), and the vertical clamping plate (1807) is provided with a hole-type sliding bearing, which is adapted to the hole axis of the shaft tube (1805) to constrain the vertical clamping plate (1807) to float up and down in the transverse groove formed between the upper plate (1802) and the lower plate (1803). The shaft tube (1805) between the upper plate (1802) and the vertical clamping plate (1807) is sleeved with a spring (1806), and the vertical clamping plate (1807) is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism.

8. The near-field electromagnetic signal acquisition and control device according to claim 7, characterized in that: A transverse clamping plate (1808) is also fixedly arranged under the vertical clamping plate (1807), and the transverse clamping plate (1808) is provided with front and rear through holes with one end open, and the front and rear through holes are provided with screw locking mechanisms.

9. The near-field electromagnetic signal acquisition and control device according to claim 8, characterized in that: It also includes a tensioning sleeve (1809), which is arranged in the upper and lower through holes and the front and rear through holes. The tensioning sleeve (1809) is provided with a radial opening, and a polygonal hole is arranged in the sleeve for clamping an adapted polygonal probe body.

10. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The device for fixing the probe is a universal probe fixing device (20), comprising: a transverse fixing plate (2001), a variable clamping piece (2002), an adjusting nut (2003), a force adjusting spring (2004), a T-shaped rod (2005), a ball spring pin (2006), and a locking screw (2007). The left side of the transverse fixing plate (2001) is used for fixing to the Z-axis cantilever (11). The right side of the transverse fixing plate (2001) is provided with a raised plate member, and the plate member is provided with a transverse through hole. The T-shaped end of the T-shaped rod (2005) is connected and provided with a variable clamping piece (2002). The tail rod body of the T-shaped rod (2005) is inserted into the through hole of the transverse fixing plate (2001). The tail of the tail rod body of the T-shaped rod (2005) that passes through the through hole is provided with an external thread. A force regulating spring (2004) is sleeved at the tail of the rod body, and an adjusting nut (2003) is screwed on the external thread. Ball spring pins (2006) sunk into the body of the horizontal fixing plate (2001) are distributed on the adjacent surfaces of the horizontal fixing plate (2001) and the clamping member (2002). A small pit corresponding to the ball spring pin (2006) is arranged on the adjacent surface of the clamping member (2002). The clamping member (2002) can freely rotate around the axis (360) of the rod body at the tail of the T-bar (2005), wherein the ball spring pin (2006) cooperates with the small pit to achieve positioning and limiting in the up, down, left and right directions. The clamping member (2002) is provided with a through hole for penetrating a probe, an opening is arranged on one side of the through hole, and a locking screw (2007) is arranged adjacent to the through hole for locking and clamping the probe.

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