Pipeline path planning method, storage medium and terminal

By obtaining the undirected pipeline path map and optimizing the path selection using the Digestra algorithm, the problem of exhaust pipeline path selection in semiconductor manufacturing is solved, and the pipeline length and construction cost are reduced.

CN119939828APending Publication Date: 2025-05-06SEMICON MFG INT (BEIJING) CORP +1
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Patent Information

Application Number
CN202311452137.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-11-02
Publication Date
2025-05-06

AI Technical Summary

Technical Problem

In the semiconductor manufacturing process, how to choose the most appropriate path to build exhaust pipes, reduce pipeline length, and reduce construction costs.

Method used

By obtaining the undirected pipeline path diagram, the Digestella algorithm is used to find the shortest pipeline path from the supply equipment to each demand equipment, and the path with more demand equipment is preferred when there are paths of the same length.

Benefits of technology

It effectively reduces the length of pipeline paths, reduces construction costs, and further reduces the sum of the lengths of the overall pipeline paths by optimizing path selection.

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Abstract

The invention discloses a pipeline path planning method, a storage medium and a terminal, and the method comprises the steps: obtaining an undirected pipeline path diagram, the undirected pipeline path diagram comprises all existing pipeline paths between a supply device and a plurality of demand devices, and the length of the pipeline path between any two of the supply device and the plurality of demand devices; based on the undirected pipeline path diagram, taking the supply equipment as a source point, taking each demand equipment as a target point, and obtaining the shortest pipeline path between the supply equipment and each demand equipment and the length of the shortest pipeline path by adopting a Dijkstra algorithm, and furthermore, the length of a pipeline path between the supply equipment and each demand equipment is reduced, so that the construction cost is reduced.
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Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a pipeline path planning method, storage medium and terminal. Background Art

[0002] In the semiconductor manufacturing process, a large number of exhaust pipelines are involved due to the complexity of the process. The construction cost / operation cost / maintenance cost of the exhaust equipment is high, and the pressure of a single exhaust fan is limited. If the factory area is too large and the overall pipeline is too long, more costs will be incurred.

[0003] Therefore, how to select the most appropriate path to construct the exhaust pipeline is an important issue in reducing pipeline length, reducing losses in long-distance transmission, and saving construction and operating costs. Summary of the invention

[0004] The technical problem solved by the present invention is to provide a pipeline path planning method, storage medium and terminal to reduce the length of the pipeline path and reduce the construction cost.

[0005] To solve the above problems, the present invention provides a pipeline path planning method, comprising: obtaining an undirected pipeline path graph, the undirected pipeline path graph including all existing pipeline paths connecting a supply device with a plurality of demand devices respectively, and the length of the pipeline path between any adjacent two of the supply device and the plurality of demand devices; based on the undirected pipeline path graph, with the supply device as the source point and each of the demand devices as the target point, using the Dijkstra algorithm to obtain the shortest pipeline path connecting the supply device with each of the demand devices respectively, and the length of the shortest pipeline path.

[0006] Optionally, before obtaining the undirected pipeline path diagram, it also includes: obtaining the actual positions of the supply equipment and the several demand devices; planning the route according to the actual pipeline path, arranging all existing actual pipeline paths connecting the supply equipment with the several demand devices respectively; measuring the length of the actual pipeline path between any adjacent two of the supply equipment and the several demand devices.

[0007] Optionally, the method for obtaining the undirected pipeline path map includes: converting and obtaining the undirected pipeline path map based on all existing real pipeline paths connecting the supply device and each of the demand devices, and the length of the real pipeline path between any adjacent two of the supply device and several of the demand devices.

[0008] Optionally, when converting to obtain the undirected pipeline path diagram, when there are other demand devices in the shortest connected real pipeline path between any two of the supply equipment and the several demand devices, and there are return arrangements in other connected real pipeline paths, or there are other demand devices in each connected real pipeline path, then in the undirected pipeline path diagram, the two cannot be directly connected.

[0009] Optionally, the actual pipeline path between any two adjacent ones of the supply device and the plurality of demand devices is arranged along one or both of a first straight line and a second straight line, and the first straight line and the second straight line are perpendicular to each other.

[0010] Optionally, in the undirected pipeline path diagram, when there are connected pipeline paths of the same length between the supply device and the demand device, the pipeline path passing through more demand devices is selected.

[0011] Optionally, the supply equipment includes: a fan.

[0012] Correspondingly, the technical solution of the present invention also provides a storage medium on which computer instructions are stored, and when the computer instructions are executed, the steps of the method described in any of the above technical solutions are executed.

[0013] Correspondingly, the technical solution of the present invention also provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of the method described in any of the above technical solutions are executed.

[0014] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0015] In the pipeline path planning method of the technical solution of the present invention, based on the undirected pipeline path graph, with the supply equipment as the source point and each of the demand equipment as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply equipment with each of the demand equipment, and the length of the shortest pipeline path, thereby reducing the length of the pipeline path between the supply equipment and each of the demand equipment, thereby reducing the construction cost.

[0016] Furthermore, in the undirected pipeline path diagram, when there are connected pipeline paths of the same length between the supply equipment and the demand equipment, the pipeline path passing through more demand equipment is selected, thereby minimizing the sum of the lengths of the entire pipeline paths and reducing construction costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1is a schematic flow chart of a pipeline path planning method in an embodiment of the present invention;

[0018] Figures 2 to 8 It is a schematic diagram of the structure of each step of the pipeline path planning method in an embodiment of the present invention. DETAILED DESCRIPTION

[0019] As described in the background art, how to select the most appropriate path to construct the exhaust pipeline is an important issue to reduce the length of the pipeline, reduce the loss of long-distance transmission, and save construction and operation costs.

[0020] On this basis, the present invention provides a pipeline path planning method, storage medium and terminal. Based on the undirected pipeline path graph, with the supply device as the source point and each of the demand devices as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply device and each of the demand devices, as well as the length of the shortest pipeline path, thereby reducing the length of the pipeline path between the supply device and each of the demand devices, thereby reducing the construction cost.

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0022] Figure 1 : is a flow chart of a pipeline path planning method in an embodiment of the present invention, comprising:

[0023] Step S101, obtaining an undirected pipeline path diagram, wherein the undirected pipeline path diagram includes all existing pipeline paths respectively connected between a supply device and a plurality of demand devices, and the length of the pipeline path between any two adjacent supply devices and the plurality of demand devices;

[0024] Step S102, based on the undirected pipeline path graph, with the supply device as the source point and each of the demand devices as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply device and each of the demand devices, as well as the length of the shortest pipeline path.

[0025] The steps of the layout correction method are described in detail below with reference to the accompanying drawings.

[0026] Figures 2 to 8 It is a schematic diagram of the structure of each step of the pipeline path planning method in an embodiment of the present invention.

[0027] Obtain an undirected pipeline path diagram, which includes all existing pipeline paths connecting the supply device and the plurality of demand devices, and the length of the pipeline path between any two adjacent supply devices and the plurality of demand devices. For the specific process of obtaining the undirected pipeline path diagram, please refer to Figures 2 to 3 .

[0028] Please refer to Figure 2 , obtain the real positions of the supply device 100 and the several demand devices; plan the route according to the real pipeline path, arrange all the existing real pipeline paths connecting the supply device 100 with the several demand devices respectively; measure the length of the real pipeline path between any two adjacent ones of the supply device and the several demand devices.

[0029] In this embodiment, one supply device 100 and five demand devices, namely, demand device No. 1 101 , demand device No. 2 102 , demand device No. 3 103 , demand device No. 4 104 and demand device No. 5 105 are taken as an example for description.

[0030] In this embodiment, the supply device 100 is a fan, and the corresponding pipeline path is an exhaust pipeline path.

[0031] It should be noted that, in this embodiment, planning the route according to the actual pipeline path refers to pipeline path planning that takes into account actual pipeline layout environmental factors, such as some paths cannot be arranged with pipelines in the actual environment, or the arrangement of pipelines will affect other equipment.

[0032] In this embodiment, the actual pipeline path between the supply device 100 and any two adjacent ones of the demand devices is arranged along one or both of a first straight line and a second straight line, and the first straight line and the second straight line are perpendicular to each other.

[0033] Please refer to Figure 3 Based on all existing real pipeline paths connecting the supply device 100 and each of the demand devices, and the length of the real pipeline path between any two adjacent supply devices and several of the demand devices, the undirected pipeline path graph is converted and obtained.

[0034] It should be noted that, in the present embodiment, in the undirected pipeline path diagram, the supply device 100 is the source point 0, and several of the demand devices are several target points, that is, demand device No. 1 101 is target point 1, demand device No. 2 102 is target point 2, demand device No. 3 103 is target point 3, demand device No. 4 104 is target point 4, and demand device No. 5 105 is target point 5. Figure 3The number between the source point 0 and any adjacent target points is the actual length measured by the corresponding real pipeline path.

[0035] In this embodiment, when converting and obtaining the undirected pipeline path diagram, when there are other demand devices in the shortest connected real pipeline path between the supply device 100 and any two of the demand devices, and there are return arrangements in other connected real pipeline paths, or there are other demand devices in each connected real pipeline path, then in the undirected pipeline path diagram, the two cannot be directly connected.

[0036] Please continue to refer to Figure 2 For example, between the supply device 100 and the demand device 105 No. 5, there are other demand devices in each connected real pipeline path, so the supply device 100 and the demand device 105 No. 5 cannot be directly connected in the undirected pipeline path graph. Similarly, the demand device 101 No. 1 and the demand device 105 No. 5, and the demand device 102 No. 2 and the demand device 104 No. 4 cannot be directly connected in the undirected pipeline path graph.

[0037] For another example, there are other demand devices in the shortest connected real pipeline path between demand device No. 3 103 and demand device No. 4 104, and there are return arrangements in other connected real pipeline paths between demand device No. 3 103 and demand device No. 4 104 (that is, there are two sections of the path with opposite directions), so demand device No. 3 103 and demand device No. 4 104 cannot be directly connected in the undirected pipeline path graph.

[0038] For another example, although there are other demand devices in the shortest connected real pipeline path between the supply device 100 and the demand device No. 4 104, there is no return arrangement in the other connected real pipeline paths. Therefore, the supply device 100 and the demand device No. 4 104 can be directly connected in the undirected pipeline path diagram.

[0039] Based on the undirected pipeline path graph, with the supply device 100 as the source point 0 and each of the demand devices as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply device 100 and each of the demand devices, as well as the length of the shortest pipeline path. For the specific acquisition process, please refer to Figures 4 to 7 shown.

[0040] In this embodiment, the process of using Dijkstra algorithm to obtain the shortest pipeline path between the supply device 100 and each of the demand devices is shown in Tables 1 to 5:

[0041]

[0042]

[0043] Table 1

[0044] In this embodiment, please refer to Table 1 and combine with reference Figure 4 In the Dijkstra algorithm, when the source point 100 is taken as the source point 0, the pipeline path between the other target points and the source point 0 is first recorded as infinity, and then the source point 0 is marked and the search for each target point adjacent to the source point begins, such as Figure 4 As shown, Figure 4 The target points adjacent to the source point 0 are the target point 1, the target point 2, the target point 3 and the target point 4, and the length of each target point from the source point 0 is indicated, that is, the pipeline path length between the target point 1 and the source point 0 is 250, the pipeline path length between the target point 2 and the source point 0 is 150, the pipeline path length between the target point 3 and the source point 0 is 290, the pipeline path length between the target point 4 and the source point 0 is 495, and the preceding point of each target point is the source point 0.

[0045] name Whether to mark Pipeline path length to the source point Front point Source 0 √ 0 Source 0 Target point 1 250 Source 0 Target point 2 √ 150 Source 0 Target point 3 290 Target point 2 Target point 4 495 Source 0 Target point 5 430 Target point 2

[0046] Table 2

[0047] Next, please refer to Table 2 and combine it with the reference Figure 5 , find the target point 2 that is closest to the source point 0 among the unmarked target points, then mark the target point 2 and start searching for other unmarked target points that are adjacent to it. Figure 5As shown in the figure, the target points adjacent to the target point 2 and not marked are the target point 1, the target point 3 and the target point 5. At this time, if the pipeline path between the target point 1 and the source point 0 passes through the target point 2, the overall pipeline path length is 450 (i.e., 150+300), which is greater than the pipeline path length 250 recorded in Table 1, so it is not updated. If the pipeline path between the target point 3 and the source point 0 passes through the target point 2, the overall pipeline path length is 290 (i.e., 150+140), which is equal to the pipeline path length 290 recorded in Table 1, so it is not updated. However, in order to reduce the length of the overall pipeline path and reduce the construction cost, when there is a connected pipeline path of the same length between the source point 0 and the target point, the pipeline path that passes through more target points is selected. Therefore, it is necessary to select the pipeline path that passes through the target point 2, that is, the previous point of the target point 3 is updated to the target point 2 in Table 2. If the pipeline path between the target point 5 and the source point 0 passes through the target point 2, the overall pipeline path length is 430 (i.e., 150+280), which is equal to the infinite pipeline path length recorded in Table 1, so it is necessary to update in Table 2, that is, the pipeline path length between the target point 5 and the source point 0 is 430, and the previous point of the target point 5 is the target point 2.

[0048] name Whether to mark Pipeline path length to the source point Front point Source 0 √ 0 Source 0 Target point 1 √ 250 Source 0 Target point 2 √ 150 Source 0 Target point 3 290 Target point 2 Target point 4 495 Source 0 Target point 5 430 Target point 2

[0049] Table 3

[0050] Next, please refer to Table 3 and continue to refer to Figure 5 , find the target point 1 that is closest to the source point 0 among the unmarked target points, then mark the target point 1 and start searching for other unmarked target points that are adjacent to it. Figure 5 As shown in the figure, the target points adjacent to the target point 1 and not marked are the target point 3 and the target point 4. At this time, if the pipeline path between the target point 3 and the source point 0 passes through the target point 1, the overall pipeline path length is 530 (i.e., 250+280), which is greater than the pipeline path length 290 recorded in Table 2, so it is not updated. If the pipeline path between the target point 4 and the source point 0 passes through the target point 1, the overall pipeline path length is 605 (i.e., 250+355), which is equal to the pipeline path length 495 recorded in Table 2, so it is not updated.

[0051]

[0052] Table 4

[0053] Next, please refer to Table 4 and combine it with the reference Figure 6 , find the target point 3 that is closest to the source point 0 among the unmarked target points, then mark the target point 3 and start searching for other unmarked target points that are adjacent to it. Figure 6 As shown, the target point adjacent to and connected to the target point 3 and not marked in the figure is the target point 5. At this time, if the pipeline path between the target point 5 and the source point 0 passes through the target point 3 and the target point 2 (because the previous point of the target point 3 is the target point 2), the overall pipeline path length is 380 (i.e., 150+140+90), which is greater than the pipeline path length 430 recorded in Table 3, so it needs to be updated in Table 4, that is, the pipeline path length between the target point 5 and the source point 0 is 380, and the previous point of the target point 5 is the target point 3.

[0054]

[0055]

[0056] Table 5

[0057] Next, please refer to Table 5 and combine it with the reference Figure 7 , find the target point 5 that is closest to the source point 0 among the unmarked target points, then mark the target point 5 and start searching for other unmarked target points that are adjacent to it. Figure 7 As shown in the figure, the target point adjacent to and connected to the target point 5 and not marked is the target point 4. At this time, if the pipeline path between the target point 4 and the source point 0 passes through the target point 5, the target point 3 (because the previous point of the target point 5 is the target point 3) and the target point 2 (because the previous point of the target point 3 is the target point 2), the overall pipeline path length is 445 (i.e., 150+140+90+65), which is greater than the pipeline path length 495 recorded in Table 4, so it needs to be updated in Table 5, that is, the pipeline path length between the target point 4 and the source point 0 is 445, and the previous point of the target point 4 is the target point 5.

[0058] Finally, the target point 4 is marked, and the entire Dijkstra algorithm is completed.

[0059] Please refer to Figure 8 , according to the shortest pipeline path connecting the supply device 100 and each of the demand devices marked in the undirected pipeline path diagram, reverse conversion is performed into the real pipeline path planning diagram.

[0060] In this embodiment, based on the undirected pipeline path graph, with the supply device 100 as the source point 0 and each of the demand devices as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply device 100 with each of the demand devices, as well as the length of the shortest pipeline path, thereby reducing the length of the pipeline path between the supply device 100 and each of the demand devices, thereby reducing the construction cost.

[0061] Correspondingly, an embodiment of the present invention further provides a storage medium on which computer instructions are stored. When the computer instructions are executed, the steps of the method described in any one of the above embodiments are executed.

[0062] Correspondingly, an embodiment of the present invention further provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of the method described in any one of the above embodiments are executed.

[0063] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A pipeline path planning method, characterized in that: include: Obtaining an undirected pipeline path graph, the undirected pipeline path graph including all existing pipeline paths respectively connected between the supply device and the plurality of demand devices, and the length of the pipeline path between any two adjacent supply devices and the plurality of demand devices; Based on the undirected pipeline path graph, with the supply device as the source point and each of the demand devices as the target point, the Dijkstra algorithm is used to obtain the shortest pipeline path connecting the supply device and each of the demand devices, as well as the length of the shortest pipeline path.

2. The pipeline path planning method according to claim 1, characterized in that: Before obtaining the undirected pipeline path diagram, it also includes: obtaining the real positions of the supply equipment and the several demand devices; planning the route according to the real pipeline path, arranging all existing real pipeline paths connecting the supply equipment with the several demand devices respectively; measuring the length of the real pipeline path between any two adjacent ones of the supply equipment and the several demand devices.

3. The pipeline path planning method according to claim 2, characterized in that: The method for obtaining the undirected pipeline path diagram includes: converting and obtaining the undirected pipeline path diagram based on all existing real pipeline paths connecting the supply device and each of the demand devices, and the length of the real pipeline path between any adjacent two of the supply device and several of the demand devices.

4. The pipeline path planning method according to claim 2, characterized in that: When converting and obtaining the undirected pipeline path diagram, when there are other demand devices in the shortest connected real pipeline path between any two of the supply equipment and the several demand devices, and there are return arrangements in other connected real pipeline paths, or there are other demand devices in each connected real pipeline path, then in the undirected pipeline path diagram, the two cannot be directly connected.

5. The pipeline path planning method according to claim 2, characterized in that: The actual pipeline path between any two adjacent ones of the supply device and the plurality of demand devices is arranged along one or both of a first straight line and a second straight line, and the first straight line and the second straight line are perpendicular to each other.

6. The pipeline path planning method according to claim 5, characterized in that: In the undirected pipeline path diagram, when there are pipeline paths of the same length between the supply device and the demand device, the pipeline path passing through more demand devices is selected.

7. The pipeline path planning method according to claim 1, characterized in that: The supply equipment includes: a fan.

8. A storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method according to any one of claims 1 to 7 are executed.

9. A terminal comprising a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, characterized in that: When the processor runs the computer instructions, the steps of the method according to any one of claims 1 to 7 are performed.