Biological feature recognition device, manufacturing method thereof, display panel and manufacturing method thereof

Abstract

The invention provides a biological feature recognition device and a manufacturing method thereof, and a display panel and a manufacturing method thereof. The biological feature recognition device comprises an induction substrate, a lower polar plate and a liquid material layer which are sequentially stacked. The sensing substrate comprises a plurality of light sensing units which are distributed in an array mode, and the lower polar plate at least comprises a control electrode layer and a lower dielectric layer which are stacked in sequence. The biological feature recognition device has a biological feature recognition mode, the liquid material is used for forming a microlens array in the biological feature recognition mode, and the orthographic projection of the center of the microlens on the sensing substrate is located in the range of the light sensing unit. According to the application, the dielectric wetting principle is applied, the liquid material is driven to form the micro-lens array, and the micro-lens array realizes the light collimation effect in the biological feature recognition process, enhances the receiving strength of the biological feature signal, improves the signal recognition efficiency, and achieves the purposes of simplifying the process and reducing the cost.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a biometric identification device, a display panel, a method for manufacturing a biometric identification device, a method for manufacturing a display panel, and an electronic device. Background Art

[0002] With the development of science and technology, fingerprint and palm print recognition has become an important part of terminal products. It has greatly improved the convenience for users in application scenarios such as device unlocking and mobile payment, and is also needed in non-realistic scenarios such as subway palm print payment. Currently, fingerprint and palm print recognition mainly include optical fingerprint recognition, ultrasonic fingerprint recognition, and capacitive fingerprint recognition. Among them, optical fingerprint recognition has great advantages in power consumption, response speed, cost, etc. and is widely used.

[0003] However, there are still some problems with optical fingerprint recognition technology and it needs to be improved. Summary of the invention

[0004] Embodiments of the present application provide a biometric identification device, a display panel, a method for manufacturing a biometric identification device, a method for manufacturing a display panel, and an electronic device, so as to improve the problems existing in optical fingerprint identification technology.

[0005] In a first aspect, a biometric feature recognition device is provided, comprising a sensing substrate, a lower electrode plate and a liquid material layer. The sensing substrate comprises a plurality of light sensing units distributed in an array. The lower electrode plate is arranged on one side of the sensing substrate, and the lower electrode plate comprises at least a control electrode layer and a lower dielectric layer sequentially stacked on the sensing substrate. The liquid material layer is arranged on a side of the lower electrode plate away from the sensing substrate, and the liquid material layer comprises a liquid material.

[0006] The biometric identification device has a biometric identification mode. The liquid material is used to form a microlens array located on the side of the lower electrode away from the sensing substrate in the biometric identification mode. The microlens array includes multiple microlenses distributed in an array. The orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

[0007] In combination with the first aspect, in some implementations of the first aspect, the control electrode layer includes a plurality of microelectrodes distributed in an array.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the orthographic projection of the microelectrode on the sensing substrate is located within the range of the light sensing unit.

[0009] In combination with the first aspect, in certain implementations of the first aspect, orthographic projections of at least two microlenses on the sensing substrate are located within the same light sensing unit range.

[0010] In combination with the first aspect, in certain implementations of the first aspect, the biometric feature recognition device further includes an upper electrode plate, which is located on a side of the liquid material layer away from the sensing substrate, and the upper electrode plate at least includes an upper electrode layer.

[0011] In combination with the first aspect, in some implementations of the first aspect, the upper electrode plate further includes an upper lyophobic material layer, and the upper lyophobic material layer is located on a side of the liquid material layer away from the sensing substrate.

[0012] In combination with the first aspect, in some implementations of the first aspect, the sensing substrate further includes a plurality of electrode driving units distributed in an array, the electrode driving units are electrically connected to the control electrode layer, and the electrode driving units are arranged on the same layer as the light sensing units.

[0013] In combination with the first aspect, in some implementations of the first aspect, a non-biometric feature recognition mode is further included. In the non-biometric feature recognition mode, the liquid material is located around the liquid material layer.

[0014] In combination with the first aspect, in certain implementations of the first aspect, the biometric feature recognition device is adapted to perform at least one of fingerprint recognition and palm print recognition.

[0015] In combination with the first aspect, in some implementations of the first aspect, the lower dielectric layer includes a solid insulating layer.

[0016] In combination with the first aspect, in certain implementations of the first aspect, the solid insulating layer includes but is not limited to polyparaxylene.

[0017] In combination with the first aspect, in some implementations of the first aspect, the lower electrode plate further includes a lower lyophobic material layer, and the lower lyophobic material layer is located between the liquid material layer and the lower dielectric layer.

[0018] In combination with the first aspect, in certain implementations of the first aspect, the lower lyophobic material layer includes but is not limited to polytetrafluoroethylene and silicone.

[0019] A second aspect provides a display panel comprising any of the above-mentioned biometric feature recognition devices and a pixel layer. The pixel layer comprises a plurality of sub-pixels arranged in an array, and the orthographic projections of the sub-pixels on the sensing substrate are located in the gaps between the light sensing units.

[0020] In combination with the second aspect, in certain implementations of the second aspect, the orthographic projection of the microelectrode on the pixel layer is located in the gap between the sub-pixels.

[0021] In combination with the second aspect, in certain implementations of the second aspect, the orthographic projection of the microelectrode on the sensing substrate is located within the range of the light sensing unit.

[0022] In combination with the second aspect, in certain implementations of the second aspect, the pixel layer is located between the sensing substrate and the lower electrode plate.

[0023] In combination with the second aspect, in some implementations of the second aspect, the pixel layer is arranged in the same layer as the light sensing unit.

[0024] In combination with the second aspect, in some implementations of the second aspect, a cover plate is further included, and the cover plate is located on a side of the liquid material layer away from the control electrode layer.

[0025] In combination with the second aspect, in some implementations of the second aspect, the cover plate includes at least one liquid injection hole.

[0026] In a third aspect, a method for manufacturing a biometric identification device is provided, comprising:

[0027] Providing a sensing substrate, the sensing substrate comprising a plurality of light sensing units distributed in an array;

[0028] A control electrode layer and a lower dielectric layer are sequentially prepared on one side of the sensing substrate to form a lower electrode plate;

[0029] A liquid material layer is prepared on the side of the lower electrode plate away from the sensing substrate. The liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state. The microlens array includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

[0030] In a fourth aspect, a method for manufacturing a display panel is provided, comprising:

[0031] Providing a sensing substrate, the sensing substrate comprising a plurality of light sensing units distributed in an array;

[0032] A pixel layer is prepared on one side of the sensing substrate, wherein the pixel layer includes a plurality of sub-pixels arranged in an array, and the orthographic projection of the sub-pixels on the sensing substrate is located in the gap between the light sensing units;

[0033] A control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate to form a lower electrode plate;

[0034] A liquid material layer is prepared on the side of the lower electrode plate away from the sensing substrate. The liquid material layer includes liquid material. The liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state. The microlens array layer includes a plurality of microlenses distributed in an array. The orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

[0035] In combination with the fourth aspect, in certain implementations of the fourth aspect, a control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate to form a lower electrode plate, comprising:

[0036] A control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate;

[0037] A first liquid-repellent material layer is prepared on a side of the lower dielectric layer away from the sensing substrate to form a lower electrode plate.

[0038] In conjunction with the fourth aspect, in certain implementations of the fourth aspect, preparing a liquid material layer on a side of the lower electrode away from the sensing substrate includes:

[0039] Prepare a cover plate on the side of the lower electrode plate away from the sensing substrate;

[0040] forming a liquid injection hole on the cover plate;

[0041] Injecting liquid material into between the control electrode layer and the cover plate through the injection hole to form a liquid material layer;

[0042] Fill the injection hole with optical glue.

[0043] In conjunction with the fourth aspect, in certain implementations of the fourth aspect, an edge sealing layer is prepared on a side of the lower electrode plate away from the sensing substrate, and before the edge sealing layer is arranged around the edge of the lower electrode plate, the method further includes:

[0044] An upper electrode plate is prepared on the side of the lower electrode plate away from the sensing substrate.

[0045] In conjunction with the fourth aspect, in certain implementations of the fourth aspect, preparing an upper electrode plate on a side of the lower electrode plate away from the sensing substrate includes:

[0046] An upper lyophobic material layer is prepared on the side of the lower electrode away from the sensing substrate;

[0047] An upper electrode is prepared on a side of the upper lyophobic material layer away from the sensing substrate to form an upper electrode plate.

[0048] In conjunction with the fourth aspect, in certain implementations of the fourth aspect, before preparing the upper electrode plate on the side of the lower electrode plate away from the sensing substrate, the method further includes:

[0049] An edge sealing layer is prepared on the side of the lower electrode plate away from the sensing substrate, and the edge sealing layer is arranged around the edge of the lower electrode plate.

[0050] In combination with the fourth aspect, in certain implementations of the fourth aspect, forming the liquid injection hole on the cover plate includes:

[0051] The method of forming the injection hole on the cover plate includes at least one of laser drilling or mechanical drilling.

[0052] In a fifth aspect, an electronic device is provided, comprising any of the biometric feature recognition devices described above, or comprising any of the display panels described above.

[0053] The present application provides a biometric identification device, a display panel, a method for manufacturing a biometric identification device, a method for manufacturing a display panel, and an electronic device. The present application provides a biometric identification device, which includes a sensing substrate, a lower electrode plate, and a liquid material layer stacked in sequence. The sensing substrate includes a plurality of light sensing units distributed in an array, the lower electrode plate includes at least a control electrode layer and a lower dielectric layer stacked in sequence on the sensing substrate, and the liquid material layer includes a liquid material. The biometric identification device has a biometric identification mode, and the liquid material is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in the biometric identification mode. The microlens array includes a plurality of microlenses distributed in an array, and the center of the microlens is projected on the sensing substrate within the range of the light sensing unit. The present application applies the dielectric wetting principle to drive the liquid material to form a microlens array. The microlens array achieves a light collimation effect during the biometric identification process, thereby enhancing the light sensing unit's receiving intensity of the biometric signal, improving the signal recognition efficiency, and achieving the purpose of simplifying the process and reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0055] Figure 1 Schematic diagram of the cross-sectional structure of a biometric identification device in one embodiment of the present application.

[0056] Figure 2 Schematic diagram of the cross-sectional structure of a biometric identification device in one embodiment of the present application.

[0057] Figure 3 Schematic diagram of the droplet splitting process in one embodiment of the present application.

[0058] Figure 4 It is a schematic diagram of the cross-sectional structure of a biometric identification device in another embodiment of the present application.

[0059] Figure 5 FIG. 1 is a schematic diagram of a cross-sectional structure of a display panel in an embodiment of the present application.

[0060] Figure 6 FIG. 4 is a schematic diagram of a cross-sectional structure of a display panel in another embodiment of the present application.

[0061] Figure 7 FIG. 1 is a schematic diagram of a cross-sectional structure of a display panel in an embodiment of the present application.

[0062] Figure 8 This is a flow chart of a method for manufacturing a biometric identification device in one embodiment of the present application.

[0063] Fig. 9 Detailed description of the invention is a flow chart of a method for manufacturing a display panel in one embodiment of the present application.

[0064] Fig.10 This is a flow chart of a method for manufacturing a display panel in yet another embodiment of the present application. DETAILED DESCRIPTION

[0065] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating examples of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application. The features and exemplary embodiments of various aspects of the present application will be described in detail below.

[0066] As mentioned in the background technology, there are still some problems in the existing optical fingerprint recognition technology, which needs to be improved. Specifically, due to the long distance between the photoelectric sensor of the optical fingerprint in the screen and the fingerprint, the optical signal actually received by the photoelectric sensor is weak and the noise is serious, which affects the fingerprint recognition efficiency. Some existing technologies form a film layer with a microlens structure in the form of nanoimprinting, which is complex and difficult, and will also lead to a sharp increase in costs.

[0067] In view of this, the present application provides a biometric identification device, a display panel, a method for manufacturing a biometric identification device, a method for manufacturing a display panel, and an electronic device. The present application applies the dielectric wetting principle to drive the liquid material to form a microlens array, and the microlens array achieves a light collimation effect during the biometric identification process, thereby enhancing the receiving intensity of the light sensing unit for the biometric signal, improving the signal identification efficiency, and achieving the purpose of simplifying the process and reducing the cost.

[0068] Figure 1 Schematic diagram of the cross-sectional structure of a biometric identification device in one embodiment of the present application. Figure 1As shown, the biometric feature recognition device 1 includes a sensing substrate 10, a lower electrode plate 20 and a liquid material layer 30. The sensing substrate 10 includes a plurality of light sensing units 101 distributed in an array; the lower electrode plate 20 is disposed on one side of the sensing substrate 10, and the lower electrode plate 20 at least includes a control electrode layer 21 and a lower dielectric layer 22 sequentially stacked on the sensing substrate 10; the liquid material layer 30 is disposed on the side of the lower electrode plate 20 away from the sensing substrate 10, and the liquid material layer 30 includes a liquid material.

[0069] The biometric identification device 1 has a biometric identification mode, and the liquid material is used to form a microlens array 310 located on the side of the lower electrode plate 20 away from the sensing substrate 10 in the biometric identification mode. The microlens array 310 includes a plurality of microlenses 311 distributed in an array, and the orthographic projection of the center of the microlens 311 on the sensing substrate 10 is located within the range of the light sensing unit 101.

[0070] Reference Figure 1 It can be seen from the optical path that the multiple microlenses 311 can collimate the light diffusely reflected from the fingerprint, palm print, etc., so that the light can be emitted to the fingerprint sensor at a narrower divergence angle, thereby enhancing the signal reception strength and thus improving the accuracy of fingerprint recognition.

[0071] The present application applies the dielectric wetting principle to drive the liquid material to form a microlens array 310. The microlens array 310 realizes a light collimation effect during the biometric feature recognition process, thereby enhancing the light sensing unit 101's receiving intensity of the biometric feature signal, improving the signal recognition efficiency, and achieving the purpose of simplifying the process and reducing costs.

[0072] The process of driving the liquid material to form the microlens array 310 in the present application applies the principle of electrowetting on the medium. Electrowetting refers to changing the surface tension between the liquid and the solid by adjusting the potential applied between the liquid-solid electrodes, thereby changing the contact angle between the two. Electrowetting on the medium is a driving method of electrically controlling the surface tension. The wetting properties of the medium film layer and the surface liquid are changed by applying an electric potential to the microelectrode array under the medium film layer.

[0073] In one embodiment, the control electrode layer 21 includes a plurality of microelectrodes 211 distributed in an array. The present application applies an electric potential to the plurality of microelectrodes 211 to change the wetting characteristics between the liquid material and the lower dielectric layer 22, thereby splitting the liquid material into a plurality of droplets, and controlling them to form a microlens array 310 at appropriate positions.

[0074] The biometric identification device also includes a non-biometric identification mode. In the non-biometric identification mode, the liquid material includes a droplet Lq, and the droplet Lq is spread on the side of the lower dielectric layer 22 away from the sensing substrate 10. Figure 2 As shown, Figure 2Schematic diagram of the cross-sectional structure of a biometric identification device in one embodiment of the present application.

[0075] In the present application, the process of driving the liquid material to form the microlens array 310 applies the principle of electrowetting on the medium. For the specific droplet splitting process, refer to Figure 3 As shown, Figure 3 FIG. 1 is a schematic diagram of the droplet splitting process in an embodiment of the present application. For example, when the droplet Lq is Figure 2 In the state shown, a certain potential is applied to the multiple microelectrodes 211, and the hydrophilicity of the lower electrode 20 corresponding to the microelectrode 211 increases, resulting in a decrease in the contact angle between the droplet Lq and the lower electrode 20, an increase in the radius of curvature of the droplet, and movement toward the electrode plate. Since the lower electrode 20 between two adjacent microelectrodes 211 is not charged, and the volume of the droplet Lq is constant during the entire movement process, the droplet Lq in the middle portion begins to become thinner until it is pulled apart, thereby splitting into two droplets in the direction of the electrode plates on both sides.

[0076] In one embodiment, the orthographic projection of the microelectrode 211 on the sensing substrate 10 is within the range of the light sensing unit 101. In this way, combined with the principle of droplet splitting, the orthographic projection of the center of the microlens 311 formed by the liquid material on the sensing substrate 10 can be controlled to be within the range of the light sensing unit 101. Figure 1 and Figure 3 As shown, after the droplet Lq splits, the center of the orthographic projection of each small droplet on the control electrode layer 21 is located within the range of the microelectrode 211, and the orthographic projection of the microelectrode 211 on the sensing substrate 10 is set to be within the range of the light sensing unit 101. Accordingly, the orthographic projection of the center of the microlens 311 formed by the liquid material on the sensing substrate 10 can be controlled to be within the range of the light sensing unit 101.

[0077] In one embodiment, the orthographic projections of at least two micro lenses 311 on the sensing substrate 10 are located within the same light sensing unit 101. Figure 4 As shown, Figure 4 FIG. 2 is a schematic diagram of the cross-sectional structure of a biometric identification device in another embodiment of the present application. Figure 4 As shown, the orthographic projections of the two microlenses 311 on the sensing substrate 10 are located within the same light sensing unit 101. Obviously, such an arrangement obtains more lens surfaces with a larger area, so more light diffusely reflected from fingerprints, palm prints, etc. can be collimated, so that the amount of light directed to the fingerprint sensor is further increased, thereby further enhancing the signal reception strength and further improving the accuracy of fingerprint recognition.

[0078] In one embodiment, the biometric identification device 1 further includes an upper electrode plate 40, which is located on a side of the liquid material layer 30 away from the sensing substrate 10. The upper electrode plate 40 includes at least an upper electrode layer 41, which is used to form an electric potential acting on the droplet Lq together with the control electrode layer 21.

[0079] In one embodiment, the filling material between the upper electrode plate 40 and the lower electrode plate 20 may be air or silicone oil. The silicone oil may be used as a lubricant to reduce the driving damping of the droplet Lq, lower the driving voltage, and reduce the evaporation of the droplet Lq.

[0080] In one embodiment, the refractive index of the liquid material is higher than the refractive index of the filling material between the upper electrode plate 40 and the lower electrode plate 20. Such an arrangement ensures that the microlens 311 can better achieve the convergence effect of light.

[0081] In one embodiment, the upper electrode plate further includes an upper lyophobic material layer 42, and the upper lyophobic material layer 42 is located on a side of the liquid material layer 30 away from the sensing substrate 10. The upper lyophobic material layer 42 can ensure smoothness and stability of the droplet movement process.

[0082] In one embodiment, the lower electrode plate 20 of the biometric identification device 1 further includes a grounding electrode, which is located on the side of the control electrode layer 21 away from the liquid material layer 30. In this embodiment, the biometric identification device adopts a coplanar electrode design, and no upper electrode plate is provided. The control electrode layer 21 and the grounding electrode are used as positive and negative electrodes, respectively, and are both provided in the lower electrode plate. Such a setting method is not commonly used in current actual use, so it is not described in detail in this application.

[0083] In one embodiment, the sensing substrate 10 further includes a plurality of electrode driving units distributed in an array, the electrode driving units are electrically connected to the control electrode layer 21 , and the electrode driving units are disposed in the same layer as the light sensing units 101 .

[0084] In one embodiment, the sensing substrate 10 further includes a light source for illuminating the corresponding biometric feature, such as illuminating a fingerprint or palm print, in the biometric feature recognition mode. The light source type includes but is not limited to an LED light source and an infrared light source. By arranging the light source to illuminate the biometric feature, more light can be introduced into the light sensing unit 101, thereby improving the accuracy of the biometric feature recognition device.

[0085] In one embodiment, the lower dielectric layer 22 includes a solid insulating layer. The lower dielectric layer 22 has specific dielectric properties, such as a dielectric constant. It can be solid, liquid or gas, but setting the lower dielectric layer 22 to a solid material can effectively simplify the preparation process.

[0086] In one embodiment, the solid insulating layer includes, but is not limited to, parylene.

[0087] In one embodiment, the lower electrode plate 20 further includes a lower lyophobic material layer 23, and the lower lyophobic material layer 23 is located between the liquid material layer 30 and the lower dielectric layer 22. The lower lyophobic material layer 23 can ensure smoothness and stability of the droplet movement process.

[0088] In one embodiment, the lower lyophobic material layer 23 includes, but is not limited to, polytetrafluoroethylene and silicone.

[0089] In one embodiment, the biometric identification device further includes a device cover plate, which is located on a side of the liquid material layer away from the lower electrode plate and is used to protect various film layers in the biometric identification device, especially the liquid.

[0090] In one embodiment, a liquid injection hole is provided on a side of the device cover away from the sensing substrate 10 for injecting liquid material.

[0091] In one embodiment, the biometric identification device also includes a non-biometric identification mode, in which the liquid material is located around the liquid material layer 30. The position of the liquid material is generally controlled by applying a specific potential to the microelectrode 211. Such a setting is generally adopted in a biometric identification device with a display function, which is conducive to reducing the influence of the liquid material on the display effect.

[0092] In one embodiment, the biometric identification device is at least suitable for performing one of fingerprint identification and palm print identification. In other embodiments, the biometric identification device can also perform personal identification based on other physiological characteristics inherent to the human body (iris, physiognomy, DNA, etc.) or behavioral characteristics (gait, typing habits, etc.). The biometric identification device is mainly used for identity identification and is widely used in access control and attendance of enterprises, video surveillance of crowds in public places such as airports, stadiums, and supermarkets, identity identification in residential security and management, face and iris comparison retrieval, etc. When in use, the biometric identification camera is usually installed at a fixed angle to obtain and identify images of people coming and going, and then the identification data is uploaded. In actual use, different people have different heights and body shapes, so it needs to be adjusted according to actual needs.

[0093] The embodiment of the present application further provides a display panel, the display panel comprising any of the above-mentioned biometric feature recognition devices and a pixel layer, specifically referring to Figure 5 As shown, Figure 5 FIG. 1 is a schematic diagram of a cross-sectional structure of a display panel in an embodiment of the present application. Figure 5As shown, the display panel 2 includes a pixel layer 50, and the pixel layer is located between the sensing substrate 10 and the lower electrode plate 20. The pixel layer 50 includes a plurality of sub-pixels 501 arranged in an array, and the orthographic projection of the sub-pixel 501 on the sensing substrate 10 is located in the gap between the light sensing units 101. Such a configuration can ensure that the light emitted by each sub-pixel 501 and the light entering the light sensing unit 101 after being converged by the microlens 311 are less interfered with each other.

[0094] This embodiment applies the dielectric wetting principle to drive the liquid material to form a microlens array. The microlens array realizes a light collimation effect during the biometric identification process, thereby enhancing the receiving intensity of the light sensing unit for the biometric signal, improving the signal recognition efficiency of the biometric identification device of the display panel, and achieving the purpose of simplifying the process and reducing costs.

[0095] In one embodiment, the orthographic projection of the microelectrode 211 on the pixel layer 50 is located in the gap between the sub-pixels 501. This arrangement can reduce the influence of the control electrode layer 21 on the emitted light of the pixel layer 50, thereby ensuring the display effect of the display panel 2.

[0096] In one embodiment, the orthographic projection of the microelectrode 211 on the sensing substrate 10 is located within the range of the light sensing unit 101 .

[0097] In one embodiment, the display panel 2 further includes an encapsulation layer, which is located on a side of the pixel layer 50 away from the sensing substrate 10 and is used to encapsulate and protect the pixel layer 50 , and also serves as a boundary between the pixel layer 50 and the lower electrode plate 20 .

[0098] In one embodiment, the display panel 2 further includes a pixel driving unit, which is electrically connected to the pixel layer 50 . The pixel driving unit can be integrated into the sensing substrate 10 , and the pixel driving unit is disposed on a side of the pixel layer 50 away from the liquid material layer 30 .

[0099] In one embodiment, preferably, the pixel layer and the light sensing unit are arranged in the same layer, as shown in FIG. Figure 6 As shown, Figure 6 FIG. 4 is a schematic diagram of a cross-sectional structure of a display panel in another embodiment of the present application. Figure 6 The orthographic projections of the sub-pixels 501 of the middle pixel layer 50 on the sensing substrate 10 are located in the gaps between the sub-pixels 501 .

[0100] In one embodiment, the display panel 2 of the biometric identification device further includes a non-biometric identification mode. In the non-biometric identification mode, the liquid material is located around the liquid material layer 30. Figure 7 As shown, Figure 7 FIG. 1 is a schematic diagram of a cross-sectional structure of a display panel in an embodiment of the present application. Figure 7The orthographic projection of the liquid material on the pixel layer 50 does not overlap with the sub-pixel 501. The position of the liquid material is generally controlled by applying a specific potential to the microelectrode 211. Such a setting is conducive to reducing the shielding of the light emitted from the pixel layer 50 by the liquid material in the non-biological feature recognition mode, thereby improving the display effect of the display panel 2.

[0101] In one embodiment, the display panel 2 further includes a cover plate 60. Figure 5 As shown, the cover plate 60 is located on a side of the liquid material layer 30 away from the lower electrode plate 20 , and is used to protect the display panel 2 .

[0102] In one embodiment, the cover plate 60 includes at least one injection hole for injecting liquid material into the display panel during the manufacturing process.

[0103] The present application also provides a method for manufacturing a biometric identification device, the specific steps are as follows: Figure 8 As shown, Figure 8 This is a flow chart of a method for manufacturing a biometric identification device in an embodiment of the present application. Figure 8 As shown, the specific steps of the method for manufacturing the biometric identification device in this embodiment are as follows:

[0104] S810: Provide a sensing substrate, wherein the sensing substrate includes a plurality of light sensing units distributed in an array.

[0105] S820: sequentially preparing a control electrode layer and a lower dielectric layer on one side of the sensing substrate to form a lower electrode plate.

[0106] S830: Prepare a liquid material layer on the side of the lower electrode plate away from the sensing substrate. The liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state. The microlens array includes a plurality of microlenses distributed in an array. The orthographic projection of the center of the microlens on the sensing substrate is within the range of the light sensing unit.

[0107] In one embodiment, a control electrode layer and a lower dielectric layer are sequentially prepared on one side of the sensing substrate to form a lower electrode plate, comprising:

[0108] A control electrode layer and a lower dielectric layer are sequentially prepared on one side of the sensing substrate;

[0109] A first liquid-repellent material layer is prepared on a side of the lower dielectric layer away from the sensing substrate to form a lower electrode plate.

[0110] In one embodiment, preparing a liquid material layer on a side of the lower electrode away from the sensing substrate includes:

[0111] Prepare a cover plate on the side of the lower electrode plate away from the sensing substrate;

[0112] forming a liquid injection hole on the cover plate;

[0113] Injecting liquid material into between the control electrode layer and the cover plate through the injection hole to form a liquid material layer;

[0114] Fill the injection hole with optical glue.

[0115] In one embodiment, an edge sealing layer is prepared on a side of the lower electrode plate away from the sensing substrate, and before the edge sealing layer is arranged around the edge of the lower electrode plate, the following steps are further included:

[0116] An upper electrode plate is prepared on the side of the lower electrode plate away from the sensing substrate.

[0117] In one embodiment, preparing an upper electrode plate on a side of the lower electrode plate away from the sensing substrate includes:

[0118] An upper lyophobic material layer is prepared on the side of the lower electrode away from the sensing substrate;

[0119] An upper electrode is prepared on a side of the upper lyophobic material layer away from the sensing substrate to form an upper electrode plate.

[0120] In one embodiment, before preparing the upper electrode plate on the side of the lower electrode plate away from the sensing substrate, the method further includes:

[0121] An edge sealing layer is prepared on the side of the lower electrode plate away from the sensing substrate, and the edge sealing layer is arranged around the edge of the lower electrode plate.

[0122] In one embodiment, forming the injection hole on the cover plate includes:

[0123] The method of forming the injection hole on the cover plate includes at least one of laser drilling or mechanical drilling.

[0124] The present application also provides a method for manufacturing a display panel, the specific steps are as follows: Fig. 9 As shown, Fig. 9 This is a flow chart of a method for manufacturing a display panel in an embodiment of the present application. Fig. 9 As shown, the specific steps of the method for manufacturing the display panel in this embodiment are as follows:

[0125] S910: Provide a sensing substrate, wherein the sensing substrate includes a plurality of light sensing units distributed in an array.

[0126] S920: preparing a pixel layer on one side of the sensing substrate, wherein the pixel layer includes a plurality of sub-pixels arranged in an array, and the orthographic projections of the sub-pixels on the sensing substrate are located in the gaps between the light sensing units.

[0127] S930: preparing a control electrode layer and a lower dielectric layer in sequence on a side of the pixel layer away from the sensing substrate to form a lower electrode plate.

[0128] S940: Prepare a liquid material layer on the side of the lower electrode plate away from the sensing substrate, the liquid material layer includes liquid material, and the liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state, the microlens array layer includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

[0129] pass Fig. 9 The preparation method shown in the figure is as follows Figure 5 The display panel 2 of the structure shown. This embodiment drives liquid material to prepare a microlens array to achieve light collimation effect in the process of biometric identification, enhance signal reception intensity, improve signal identification efficiency, and achieve the purpose of simplifying the process and reducing costs.

[0130] In one embodiment, a control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate to form a lower electrode plate, including:

[0131] A control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate;

[0132] A first liquid-repellent material layer is prepared on a side of the lower dielectric layer away from the sensing substrate to form a lower electrode plate.

[0133] In one embodiment, preparing a liquid material layer on a side of the lower electrode away from the sensing substrate includes:

[0134] Prepare a cover plate on the side of the lower electrode plate away from the sensing substrate;

[0135] forming a liquid injection hole on the cover plate;

[0136] Injecting liquid material into between the control electrode layer and the cover plate through the injection hole to form a liquid material layer;

[0137] Fill the injection hole with optical glue.

[0138] In one embodiment, an edge sealing layer is prepared on a side of the lower electrode plate away from the sensing substrate, and before the edge sealing layer is arranged around the edge of the lower electrode plate, the following steps are further included:

[0139] An upper electrode plate is prepared on the side of the lower electrode plate away from the sensing substrate.

[0140] In one embodiment, preparing an upper electrode plate on a side of the lower electrode plate away from the sensing substrate includes:

[0141] An upper lyophobic material layer is prepared on the side of the lower electrode away from the sensing substrate;

[0142] An upper electrode is prepared on a side of the upper lyophobic material layer away from the sensing substrate to form an upper electrode plate.

[0143] In one embodiment, before preparing the upper electrode plate on the side of the lower electrode plate away from the sensing substrate, the method further includes:

[0144] An edge sealing layer is prepared on the side of the lower electrode plate away from the sensing substrate, and the edge sealing layer is arranged around the edge of the lower electrode plate.

[0145] In one embodiment, forming the injection hole on the cover plate includes:

[0146] The method of forming the injection hole on the cover plate includes at least one of laser drilling or mechanical drilling.

[0147] The present application also provides a method for manufacturing a display panel, the specific steps are as follows: Fig.10 As shown, Fig.10 This is a flow chart of a method for manufacturing a display panel in another embodiment of the present application. Fig.10 As shown, the specific steps of the method for manufacturing the display panel in this embodiment are as follows:

[0148] S1010: providing a sensing substrate, the sensing substrate comprising a plurality of array-distributed light sensing units and a plurality of array-arranged sub-pixels arranged in the same layer, wherein the orthographic projections of the sub-pixels on the sensing substrate are located in the gaps between the light sensing units.

[0149] S1020: preparing a control electrode layer and a lower dielectric layer in sequence on one side of the sensing substrate to form a lower electrode plate.

[0150] S1030: Prepare a liquid material layer on the side of the lower electrode plate away from the sensing substrate, the liquid material layer includes liquid material, and the liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state, the microlens array layer includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

[0151] pass Fig.10 The preparation method shown in the figure is as follows Fig.10 The display panel 2 of the structure shown, the sub-pixels and the light sensing units are arranged in the same layer in the display panel 2. This embodiment drives the liquid material to prepare the microlens array, realizes the light collimation effect in the process of biometric recognition, enhances the signal reception strength, improves the signal recognition efficiency, and achieves the purpose of simplifying the process and reducing the cost.

[0152] The present application also provides an electronic device, comprising any of the above-mentioned biometric feature recognition devices, or comprising any of the above-mentioned display panels.

[0153] In one possible implementation, the electronic device in the embodiment of the present application includes any one of a display, a smart phone, a smart watch, a smart bracelet, a tablet computer, a laptop computer, an all-in-one computer, an access control device, and an electronic door lock.

[0154] Of course, the electronic device may also include other components or modules such as a processor, a memory, a power supply, etc., which is not limited in this application.

[0155] It should be noted that in the drawings of the present application document, the sizes of layers and regions may be exaggerated for clarity of illustration. It is also understood that when an element or layer is referred to as being "on" another element or layer, it may be directly on the other element, or there may be an intermediate layer. In addition, it is understood that when an element or layer is referred to as being "under" another element or layer, it may be directly under the other element, or there may be more than one intermediate layer or element. In addition, it is also understood that when a layer or element is referred to as being "between" two layers or two elements, it may be the only layer between the two layers or two elements, or there may also be more than one intermediate layer or element. Similar reference numerals throughout the text indicate similar elements.

[0156] In addition, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0157] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0158] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A biometric identification device, characterized in that: include: A sensing substrate, comprising a plurality of light sensing units distributed in an array; A lower electrode plate, disposed on one side of the sensing substrate, the lower electrode plate at least comprising a control electrode layer and a lower dielectric layer sequentially stacked on the sensing substrate; and A liquid material layer, disposed on a side of the lower electrode plate away from the sensing substrate, the liquid material layer comprising a liquid material; The biometric identification device has a biometric identification mode, and the liquid material is used to form a microlens array located on the side of the lower electrode away from the sensing substrate in the biometric identification mode. The microlens array includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

2. The biometric feature recognition device according to claim 1, characterized in that: The control electrode layer includes a plurality of microelectrodes distributed in an array; Preferably, the orthographic projection of the microelectrode on the sensing substrate is located within the range of the light sensing unit; Preferably, the orthographic projections of at least two of the microlenses on the sensing substrate are located within the same range of the light sensing unit; Preferably, the biometric feature recognition device further comprises an upper electrode plate, the upper electrode plate is located on a side of the liquid material layer away from the sensing substrate, and the upper electrode plate at least comprises an upper electrode layer; Preferably, the upper electrode plate further comprises an upper lyophobic material layer, and the upper lyophobic material layer is located on a side of the liquid material layer away from the sensing substrate; Preferably, the sensing substrate further comprises a plurality of electrode driving units distributed in an array, the electrode driving units are electrically connected to the control electrode layer, and the electrode driving units are arranged in the same layer as the light sensing units.

3. The biometric feature recognition device according to claim 1, characterized in that: Also included is a non-biometric feature recognition mode, in which the liquid material is located at a periphery of the liquid material layer; Preferably, the biometric feature recognition device is suitable for at least one of fingerprint recognition and palm print recognition.

4. The biometric feature recognition device according to claim 1, characterized in that: The lower dielectric layer comprises a solid insulating layer; Preferably, the solid insulating layer includes but is not limited to polyparaxylene; Preferably, the lower electrode plate further comprises a lower lyophobic material layer, and the lower lyophobic material layer is located between the liquid material layer and the lower dielectric layer; Preferably, the lower lyophobic material layer includes but is not limited to polytetrafluoroethylene and silicone.

5. A display panel, characterized in that: include: The biometric identification device according to any one of claims 1 to 4; and A pixel layer, wherein the pixel layer includes a plurality of sub-pixels arranged in an array, wherein the orthographic projections of the sub-pixels on the sensing substrate are located in the gaps between the light sensing units.

6. The display panel according to claim 5, characterized in that: The orthographic projection of the microelectrode on the pixel layer is located in the gap between the sub-pixels; Preferably, the orthographic projection of the microelectrode on the sensing substrate is located within the range of the light sensing unit; Preferably, the pixel layer is located between the sensing substrate and the lower electrode plate; Preferably, the pixel layer is arranged in the same layer as the light sensing unit; Preferably, it further comprises a cover plate, wherein the cover plate is located on a side of the liquid material layer away from the control electrode layer; Preferably, the cover plate comprises at least one liquid injection hole.

7. A method for manufacturing a biometric identification device, characterized in that: include: Providing a sensing substrate, the sensing substrate comprising a plurality of light sensing units distributed in an array; A control electrode layer and a lower dielectric layer are sequentially prepared on one side of the sensing substrate to form a lower electrode plate; A liquid material layer is prepared on the side of the lower electrode plate away from the sensing substrate. The liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state. The microlens array includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

8. A method for manufacturing a display panel, characterized in that: include: Providing a sensing substrate, the sensing substrate comprising a plurality of light sensing units distributed in an array; A pixel layer is prepared on one side of the sensing substrate, wherein the pixel layer includes a plurality of sub-pixels arranged in an array, and the orthographic projection of the sub-pixels on the sensing substrate is located in the gap between the light sensing units; A control electrode layer and a lower dielectric layer are sequentially prepared on a side of the pixel layer away from the sensing substrate to form a lower electrode plate; A liquid material layer is prepared on the side of the lower electrode plate away from the sensing substrate, the liquid material layer includes liquid material, and the liquid material layer is used to form a microlens array located on the side of the lower electrode plate away from the sensing substrate in a biometric recognition state, the microlens array layer includes a plurality of microlenses distributed in an array, and the orthographic projection of the center of the microlens on the sensing substrate is located within the range of the light sensing unit.

9. The method for manufacturing a display panel according to claim 8, characterized in that: The step of sequentially preparing a control electrode layer and a lower dielectric layer on a side of the pixel layer away from the sensing substrate to form a lower electrode plate comprises: Sequentially preparing a control electrode layer and a lower dielectric layer on a side of the pixel layer away from the sensing substrate; Prepare a first liquid-repellent material layer on the side of the lower dielectric layer away from the sensing substrate to form a lower electrode plate; Preferably, the step of preparing a liquid material layer on a side of the lower electrode plate away from the sensing substrate comprises: Prepare a cover plate on the side of the lower electrode plate away from the sensing substrate; forming a liquid injection hole on the cover plate; Injecting liquid material into between the control electrode layer and the cover plate through the injection hole to form the liquid material layer; Filling the injection hole with optical glue; Preferably, the step of preparing an edge sealing layer on the side of the lower electrode plate away from the sensing substrate, and before the edge sealing layer is arranged around the edge of the lower electrode plate, further comprises: Prepare an upper electrode plate on the side of the lower electrode plate away from the sensing substrate; Preferably, preparing the upper electrode plate on the side of the lower electrode plate away from the sensing substrate comprises: Preparing an upper lyophobic material layer on a side of the lower electrode away from the sensing substrate; Prepare an upper electrode on a side of the upper lyophobic material layer away from the sensing substrate to form an upper electrode plate; Preferably, before preparing the upper electrode plate on the side of the lower electrode plate away from the sensing substrate, the method further comprises: An edge sealing layer is prepared on a side of the lower electrode plate away from the sensing substrate, and the edge sealing layer is arranged around the edge of the lower electrode plate; Preferably, forming a liquid injection hole on the cover plate comprises: The method of forming the injection hole on the cover plate includes at least one of laser drilling or mechanical drilling.

10. An electronic device, characterized in that: A biometric feature recognition device comprising any one of claims 1 to 4, or a display panel comprising claim 5 or 6.

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