A piezoelectric drive device

Abstract

The present invention belongs to a fixture for semiconductor production, and particularly relates to a piezoelectric driving device, comprising: a base; an oscillator, the oscillator includes a base portion and a functional portion, the base portion is fixedly connected to the base, the functional portion is flexibly hinged to the base portion, and a power output end is provided on the functional portion; a piezoelectric stack group, connected to the functional portion, the piezoelectric stack group is configured to be able to drive the power output end to vibrate along an elliptical path, and the elliptical path is divided into a first half and a second half with its major axis as the boundary; a holding portion, movably cooperating with the base along a direction parallel to the minor axis of the elliptical path; the holding portion is flexibly connected to the functional portion through a force transmission member. By adding a holding portion to the oscillator and making its movement period consistent with the movement period of the driving end of the oscillator, the present invention can press against the side wall of the slide when the driving end of the oscillator resets, preventing the reverse displacement of the slide, and loosen the side wall of the slide when the driving end of the oscillator drives the slide to feed, reducing the movement resistance of the slide.

Description

Technical Field

[0001] The present invention belongs to the fixtures for semiconductor production, and particularly relates to a piezoelectric driving device. Background Art

[0002] During the production process of semiconductor devices, high-precision fixing and displacement are required. The prior art generally uses a piezoelectric micro-motion platform to achieve this function. The working principle of the piezoelectric micro-motion platform is to utilize the electro-mechanical energy conversion characteristic of piezoelectric materials, and transfer the tiny deformation after the piezoelectric materials are electrified to the displacement platform, so as to realize the nano-level movement of the platform; for example, applying an alternating electric field to the piezoelectric materials to make them vibrate, and this vibration is transferred to the oscillator. The oscillator structure is specially designed to be able to convert the vibration into a reciprocating motion along a specific path, such as Figure 1 the elliptical trajectory motion shown, and on this basis, one half of the elliptical trajectory can be used to drive the displacement platform to move, and the other half to realize the reset of the driving end of the oscillator, as Figure 2 shown. However, in practical applications, the driving end of the oscillator often cannot be separated from the displacement platform in time during the reset process. Due to the short-term adhesion between the driving end of the oscillator and the displacement platform, it will cause the displacement platform to generate a reverse displacement, and the law of its displacement amount changing with time is as Figure 3 shown, which results in the system end being unable to accurately control the displacement amount of the displacement platform, thus affecting the production quality. Summary of the Invention

[0003] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a piezoelectric driving device that can improve the motion accuracy.

[0004] To achieve the above purpose and other related purposes, the present invention provides a piezoelectric driving device, including:

[0005] A base;

[0006] An oscillator, the oscillator includes a base part and a functional part, the base part is fixedly connected to the base, the functional part is flexibly hinged to the base part, and a power output end is provided on the functional part;

[0007] A piezoelectric stack group, connected to the functional part, the piezoelectric stack group is configured to be able to drive the power output end to vibrate along an elliptical path, and the elliptical path is divided into a first half and a second half with its major axis as the boundary;

[0008] A holding part is movably engaged with the base in a direction parallel to the minor axis of the elliptical path; the holding part is flexibly connected to the functional part through a force transmission member, and the force transmission member is configured to: when the power output end moves along the first half stroke, the force transmission member drives the holding part away from the side where the first half stroke is located, and when the power output end moves along the second half stroke, the force transmission member drives the holding part closer to the side where the first half stroke is located.

[0009] In an alternative embodiment of the present invention, the force transmission member includes a swing part and an elastic buffer part. The first end of the swing part is flexibly hinged to the functional part, the second end of the swing part is flexibly hinged to the first end of the elastic buffer part, and the second end of the elastic buffer part is fixedly connected to the holding part; the first area of the swing part is pivotally connected to the base, and the first area is a partial area between the first end and the second end of the swing part.

[0010] In an alternative embodiment of the present invention, a convex part is provided on the side of the swing part away from the first half stroke, a support is provided on the base, and the support is provided with a limiting groove that cooperates with the convex part. The convex part is received in the limiting groove and enables the swing part to swing with the limiting groove as a fulcrum.

[0011] In an alternative embodiment of the present invention, the second end of the swing part is located on the side of the first end of the elastic buffer part close to the first half stroke.

[0012] In an alternative embodiment of the present invention, the functional part includes a first vibrating arm and a second vibrating arm. One end of the first vibrating arm and the second vibrating arm is fixedly connected, and they are arranged at an angle to each other. The other ends of the first vibrating arm and the second vibrating arm are respectively flexibly hinged to the base part. The outer corner of the connecting end of the first vibrating arm and the second vibrating arm constitutes the power output end. The force transmission member is connected to the first vibrating arm and / or the second vibrating arm, and the force transmission member is arranged close to the power output end.

[0013] In an alternative embodiment of the present invention, material-reducing holes are respectively provided at one ends of the first vibrating arm and the second vibrating arm close to the base part.

[0014] In an alternative embodiment of the present invention, the piezoelectric stack group includes two piezoelectric stacks. One end of one of the piezoelectric stacks is connected to the first vibrating arm, one end of the other piezoelectric stack is connected to the second vibrating arm, and the other ends of the two piezoelectric stacks are connected to the base part or the base.

[0015] In an alternative embodiment of the present invention, a slide table is further included. The slide table is slidably arranged relative to the base along a direction parallel to the major axis of the elliptical path. The slide table is located beside the oscillator, and the first side wall of the slide table is adjacent to or abuts against the power output end and the holding portion.

[0016] In an alternative embodiment of the present invention, a guard plate parallel to the first side wall is provided on the base at a position adjacent to the first side wall. The guard plate is provided with a notch portion for avoiding the power output end and a limiting groove for defining the movement direction of the holding portion.

[0017] In an alternative embodiment of the present invention, the base includes a first substrate and a second substrate. The slide table is mounted on the first substrate, and the oscillator is mounted on the second substrate. The second substrate is movably connected to the first substrate along a direction parallel to the minor axis of the elliptical path, and a locking mechanism is provided between the second substrate and the first substrate. The locking mechanism is configured to be able to hold the second substrate at multiple positions within the active stroke and to be able to release the second substrate from multiple positions within the active stroke.

[0018] The technical effect of the present invention is as follows: By adding a holding portion to the oscillator and making its movement period consistent with the movement period of the driving end of the oscillator, the present invention can press the side wall of the slide table when the driving end of the oscillator resets, preventing the reverse displacement of the slide table, and can release the side wall of the slide table when the driving end of the oscillator drives the slide table to feed, reducing the movement resistance of the slide table. This design effectively solves the problem of reverse displacement caused by the short-term sticking between the driving end of the oscillator and the side wall of the slide table, significantly improves the overall movement accuracy of the slide table, and thus improves the positioning accuracy and production quality in the production process of semiconductor devices. Description of the Drawings

[0019] Figure 1 is a schematic diagram of the movement trajectory of the driving end of the oscillator of the piezoelectric micro-motion platform in the no-load state;

[0020] Figure 2 is a schematic diagram of the movement trajectory of the driving end of the oscillator of the piezoelectric micro-motion platform when cooperating with the displacement platform;

[0021] Figure 3 is a curve graph of the displacement of the existing piezoelectric micro-motion platform changing with time;

[0022] Figure 4 is a perspective view of the piezoelectric driving device provided by the embodiment of the present invention;

[0023] Figure 5 is a front view of the piezoelectric driving device provided by the embodiment of the present invention;

[0024] Figure 6 is Figure 5Local enlarged view of part I;

[0025] Figure 7 is a perspective view of the assembled state of the oscillator and the piezoelectric stack provided by the embodiment of the present invention;

[0026] Figure 8 is a local enlarged view of the oscillator provided by the embodiment of the present invention. Detailed implementation manners

[0027] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0028] It should be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0029] The piezoelectric driving device provided by the present invention is used to drive the slide 50 to move linearly. The movement trajectory of the driving end of the oscillator 20 in the no-load state can be referred to Figure 1 as shown. When the driving end of the oscillator 20 cooperates with the side wall of the slide 50, due to the constraint of the side wall of the slide 50, part of its trajectory will become a state substantially parallel to the side wall of the slide 50, as Figure 2 shown. This part of the trajectory indicates that the driving end of the oscillator 20 is in close contact with the side wall of the slide 50. At this time, the driving end of the oscillator 20 can drive the slide 50 to displace under the action of friction, while the rest of the trajectory corresponds to the state where the driving end of the oscillator 20 is separated from the side wall of the slide 50. At this time, the driving end of the oscillator 20 can be reset alone. If the driving end of the oscillator 20 cannot be separated from the side wall of the slide 50 in time when resetting, it will cause the slide 50 to move in the reverse direction, as Figure 3As shown in the figure, it affects the overall movement accuracy of the slide table 50. Therefore, the present invention adds a holding part 40 to the oscillator 20. The holding part 40 can press or release the side wall of the slide table 50, and the movement period of the holding part 40 is the same as that of the driving end of the oscillator 20. That is, when the driving end of the oscillator 20 resets, the holding part 40 presses the side wall of the slide table 50 to prevent the reverse displacement of the slide table 50. When the driving end of the oscillator 20 drives the slide table 50 to feed, the holding part 40 releases the side wall of the slide table 50 to reduce the movement resistance of the slide table 50, effectively improving the overall movement accuracy of the slide table 50. The technical solution of the present invention will be described in detail below in conjunction with specific embodiments:

[0030] Please refer to Figures 4-8 As shown in the figure, the piezoelectric driving device provided by the embodiment of the present invention includes a base 10, an oscillator 20, a piezoelectric stack group 30 and a holding part 40; the oscillator 20 includes a base part 21 and a functional part, the base part 21 is fixedly connected to the base 10, the functional part is flexibly hinged to the base part 21, and a power output end 201 is provided on the functional part; the piezoelectric stack group 30 is connected to the functional part, and the piezoelectric stack group 30 is configured to be able to drive the power output end 201 to vibrate along an elliptical path, and the elliptical path is divided into a first half S1 and a second half S2 by its major axis X. The first half S1 is used to drive the displacement of the slide table 50, and the second half S2 is used for the reset of the power output end 201; the holding part 40 is movably matched with the base 10 along a direction parallel to the minor axis Y of the elliptical path; the holding part 40 is flexibly connected to the functional part through a force transmission member 41, and the force transmission member 41 is configured to: when the power output end 201 moves along the first half S1, the force transmission member 41 drives the holding part 40 away from the side where the first half S1 is located, and when the power output end 201 moves along the second half S2, the force transmission member 41 drives the holding part 40 close to the side where the first half S1 is located. By adding a holding part 40 to the oscillator 20 and making its movement period the same as that of the driving end of the oscillator 20, the present invention can press the side wall of the slide table 50 when the driving end of the oscillator 20 resets to prevent the reverse displacement of the slide table 50, and release the side wall of the slide table 50 when the driving end of the oscillator 20 drives the slide table 50 to feed to reduce the movement resistance of the slide table 50. This design effectively solves the problem of reverse displacement caused by the short-term sticking between the driving end of the oscillator 20 and the side wall of the slide table 50 during reset, significantly improves the overall movement accuracy of the slide table 50, and thus improves the positioning accuracy and production quality during the production of semiconductor devices.

[0031] Please refer to Figures 5-8As shown, in an alternative embodiment of the present invention, the force transmission member 41 includes a swinging portion 411 and an elastic buffer portion 412. The first end of the swinging portion 411 is flexibly hinged to the functional portion, the second end of the swinging portion 411 is flexibly hinged to the first end of the elastic buffer portion 412, and the second end of the elastic buffer portion 412 is fixedly connected to the holding portion 40; a first region of the swinging portion 411 is pivotally connected to the base 10, and the first region is a partial region between the first end and the second end of the swinging portion 411. This embodiment utilizes the lever principle of the swinging portion 411 to achieve reverse movement between the holding portion 40 and the driving end of the oscillator 20, with a simple structure and easy control; at the same time, flexible hinges are used between the swinging portion 411, the functional portion, and the elastic buffer portion 412, effectively avoiding interference from the vibration of the functional portion during the movement of the holding portion 40, enabling the holding portion 40 to uniformly contact the side wall of the slide 50, avoiding local wear caused by stress concentration, and improving the service life.

[0032] Please refer to Figure 6 As shown, in an alternative embodiment of the present invention, a convex portion 413 is provided on the side of the swinging portion 411 away from the first half stroke S1. A support 121 is provided on the base 10, and the support 121 is provided with a limiting groove that cooperates with the convex portion 413. The convex portion 413 is received in the limiting groove, enabling the swinging portion 411 to swing with the limiting groove as a fulcrum. This embodiment constrains the swinging path of the swinging portion 411 by providing the convex portion 413 on the swinging portion 411 and cooperating with the limiting groove on the base 10, ensuring stable swinging of the swinging portion 411 with the limiting groove as a fulcrum, thereby achieving effective stress transmission; at the same time, this design further improves the synchronization of the movement between the holding portion 40 and the power output end 201, avoids deviations during the movement process, enhances the reliability and movement accuracy of the device, and ensures the accuracy of the displacement control of the slide 50.

[0033] Please refer to Figure 6 As shown, in an alternative embodiment of the present invention, the second end of the swinging portion 411 is located on the side of the first end of the elastic buffer portion 412 close to the first half stroke S1. By arranging the second end of the swinging portion 411 on the side of the first end of the elastic buffer portion 412 close to the first half stroke S1 in this embodiment, the swinging portion 411 applies a pulling force rather than a pushing force to the elastic buffer portion 412 during the movement process, avoiding fatigue and wear of the flexible hinge caused by bearing compressive force, thereby significantly improving the service life of the flexible hinge, enhancing the durability and reliability of the device, and maintaining the stability and accuracy of the movement at the same time.

[0034] Please refer to Figure 5 、 7As shown in FIGS. 8, in an alternative embodiment of the present invention, the functional part includes a first vibrating arm 22 and a second vibrating arm 23. One end of the first vibrating arm 22 and the second vibrating arm 23 is fixedly connected, and an included angle is formed therebetween. The other ends of the first vibrating arm 22 and the second vibrating arm 23 are respectively flexibly hinged to the base 21. The external angle at the connection end of the first vibrating arm 22 and the second vibrating arm 23 constitutes the power output end 201. The force transmission member 41 is connected to the first vibrating arm 22 and / or the second vibrating arm 23, and the force transmission member 41 is arranged close to the power output end 201. The piezoelectric stack group 30 includes two piezoelectric stacks 31. One end of one piezoelectric stack 31 is connected to the first vibrating arm 22, and one end of the other piezoelectric stack 31 is connected to the second vibrating arm 23. The other ends of the two piezoelectric stacks 31 are connected to the base 21 or the base 10. The two piezoelectric stacks 31 respectively drive the first vibrating arm 22 and the second vibrating arm 23 to vibrate. There is a phase difference between the alternating electric fields of the two piezoelectric stacks 31, so that they alternately expand and contract. The two piezoelectric stacks 31 respectively drive the two vibrating arms to deform. Due to the vibration phase difference and included angle design of the two vibrating arms, the combined movement of the two makes the power output end 201 form an elliptical trajectory movement. Specifically, after the piezoelectric stacks 31 are energized, they respectively drive the two vibrating arms to generate periodic deformations, transmit the vibrations through the flexible hinges, and finally make the power output end 201 vibrate along an elliptical path, thereby realizing high-precision displacement control.

[0035] Please refer to Figure 5 、 7 As shown in FIGS., in an alternative embodiment of the present invention, relief holes 24 are respectively provided at one ends of the first vibrating arm 22 and the second vibrating arm 23 close to the base 21. In this embodiment, relief holes 24 are provided at one ends of the first vibrating arm 22 and the second vibrating arm 23 close to the base 21, and the stiffness distribution of the vibrating arms is adjusted by locally thinning the material, so as to precisely control the deformation trajectory of the vibrating arms and ensure that the power output end 201 can stably move along the designed elliptical path. This design optimizes the vibration characteristics of the vibrating arms, reduces unnecessary deformation interference, improves the movement accuracy and reliability of the device, and enhances the overall performance of the piezoelectric driving device.

[0036] Please refer to Figure 4 、 5, as shown in FIGS. 6, in an alternative embodiment of the present invention, the slide table 50 is slidably disposed relative to the base 10 along a direction parallel to the major axis X of the elliptical path. The slide table 50 is located beside the oscillator 20, and a first side wall of the slide table 50 is adjacent to or abuts against the power output end 201 and the holding portion 40. A guard plate 60 parallel to the first side wall is provided on the base 10 at a position adjacent to the first side wall. The guard plate 60 is provided with a notch portion for avoiding the power output end 201 and a limiting groove for defining the movement direction of the holding portion 40. In this embodiment, by providing the guard plate 60 parallel to the first side wall of the slide table 50 on the base 10 and designing the limiting groove on the guard plate 60, the movement posture of the holding portion 40 is effectively controlled, ensuring that the holding portion 40 uniformly abuts against the side wall of the slide table 50 during the movement process, and avoiding movement deviation or wear caused by uneven force.

[0037] Please refer to Figure 4 , 5 , as shown in FIGS., in an alternative embodiment of the present invention, the base 10 includes a first substrate 11 and a second substrate 12. The slide table 50 is mounted on the first substrate 11, and the oscillator 20 is mounted on the second substrate 12. The second substrate 12 is movably connected to the first substrate 11 along a direction parallel to the minor axis Y of the elliptical path, and a locking mechanism is provided between the second substrate 12 and the first substrate 11. The locking mechanism is configured to be able to hold the second substrate 12 at multiple positions within the movement stroke and be able to release the second substrate 12 from multiple positions within the movement stroke. In this embodiment, by dividing the base 10 into the first substrate 11 and the second substrate 12, mounting the oscillator 20 and the slide table 50 on different substrates respectively, and setting the locking mechanism, the second substrate 12 can be adjusted and locked along the minor axis Y direction of the elliptical path, realizing flexible adjustment and precise positioning of the relative positions between the oscillator 20 and the slide table 50; this design not only improves the adaptability and adjustability of the device, but also ensures the matching accuracy between the driving end of the oscillator 20 and the side wall of the slide table 50, further improving the movement control accuracy of the slide table 50 and the overall performance of the device. In a specific embodiment, the locking mechanism may be a bolt, for example.

[0038] In summary, in the present invention, by adding a holding portion 40 to the oscillator 20 and making its movement period consistent with that of the driving end of the oscillator 20, it is possible to press against the side wall of the slide table 50 when the driving end of the oscillator 20 resets, preventing the reverse displacement of the slide table 50, and releasing the side wall of the slide table 50 when the driving end of the oscillator 20 drives the slide table 50 to feed, reducing the movement resistance of the slide table 50. This design effectively solves the problem of reverse displacement caused by the short-term sticking between the driving end of the oscillator 20 and the side wall of the slide table 50, significantly improves the overall movement accuracy of the slide table 50, and thus enhances the positioning accuracy and production quality in the semiconductor device production process; the reverse movement of the holding portion 40 and the driving end of the oscillator 20 is realized by using the lever principle of the swinging portion 411, with a simple structure and easy control; at the same time, the swinging portion 411 and the functional portion, the elastic buffer portion 412 are flexibly hinged, effectively avoiding the interference of the vibration of the functional portion on the movement process of the holding portion 40, enabling the holding portion 40 to uniformly contact the side wall of the slide table 50, avoiding local wear caused by stress concentration, and improving the service life; by providing a convex portion 413 on the swinging portion 411 and cooperating with the limiting groove on the base 10, the swinging path of the swinging portion 411 is restricted, ensuring that the swinging portion 411 swings stably with the limiting groove as the fulcrum, thereby realizing the effective transmission of stress; at the same time, this design further improves the synchronization of the movement of the holding portion 40 and the power output end 201, avoids deviations during the movement process, enhances the reliability and movement accuracy of the device, and ensures the accuracy of the displacement control of the slide table 50; by arranging the second end of the swinging portion 411 on the side close to the first half stroke S1 of the first end of the elastic buffer portion 412, the swinging portion 411 applies a pulling force rather than a pushing force to the elastic buffer portion 412 during the movement process, avoiding fatigue and wear of the flexible hinge caused by bearing compressive force, thereby significantly improving the service life of the flexible hinge, enhancing the durability and reliability of the device, and maintaining the stability and accuracy of the movement; by providing a guard plate 60 parallel to the first side wall of the slide table 50 on the base 10 and designing a limiting groove on the guard plate 60, the movement posture of the holding portion 40 is effectively controlled, ensuring that the holding portion 40 uniformly contacts the side wall of the slide table 50 during the movement process, avoiding movement deviations or wear caused by uneven force; by dividing the base 10 into a first substrate 11 and a second substrate 12, installing the oscillator 20 and the slide table 50 on different substrates respectively, and setting a locking mechanism, the second substrate 12 can adjust its position along the short axis Y direction of the elliptical path and be locked, realizing the flexible adjustment and precise positioning of the relative position between the oscillator 20 and the slide table 50; this design not only improves the adaptability and adjustability of the device, but also ensures the matching accuracy between the driving end of the oscillator 20 and the side wall of the slide table 50, further enhancing the movement control accuracy of the slide table 50 and the overall performance of the device.

[0039] The above embodiments are only illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

[0040] In the description herein, numerous specific details are provided, such as examples of components and / or methods, to provide a complete understanding of embodiments of the present invention. However, those skilled in the art will recognize that embodiments of the present invention may be practiced without one or more of the specific details or with other devices, systems, components, methods, parts, materials, articles, etc. In other instances, well-known structures, materials, or operations are not specifically shown or described in detail to avoid obscuring aspects of embodiments of the present invention.

Claims

1. A piezoelectric drive device, characterized in that: include: Base (10); A vibrator (20), the vibrator (20) comprising a base (21) and a functional part, the base (21) being fixedly connected to the base (10), the functional part being flexibly hinged to the base (21), and the functional part being provided with a power output end (201); A piezoelectric stack group (30) connected to the functional part, the piezoelectric stack group (30) being configured to be able to drive the power output end (201) to vibrate along an elliptical path, the elliptical path being divided into a first half (S1) and a second half (S2) by its major axis (X); The holding portion (40) is movably matched with the base (10) along a direction parallel to the short axis (Y) of the elliptical path; the holding portion (40) is flexibly connected to the functional portion via a force transmission component (41), and the force transmission component (41) is configured such that: when the power output end (201) moves along the first half-stroke (S1), the force transmission component (41) drives the holding portion (40) away from a side where the first half-stroke (S1) is located; and when the power output end (201) moves along the second half-stroke (S2), the force transmission component (41) drives the holding portion (40) close to a side where the first half-stroke (S1) is located.

2. The piezoelectric drive device according to claim 1, characterized in that: The force transmission component (41) comprises a swinging portion (411) and an elastic buffer portion (412); the first end of the swinging portion (411) is flexibly hinged to the functional portion, the second end of the swinging portion (411) is flexibly hinged to the first end of the elastic buffer portion (412), and the second end of the elastic buffer portion (412) is fixedly connected to the retaining portion (40); a first area of ​​the swinging portion (411) is pivotally connected to the base (10), and the first area is a partial area between the first end and the second end of the swinging portion (411).

3. The piezoelectric drive device according to claim 2, characterized in that: A protrusion (413) is provided on a side of the swing portion (411) away from the first half (S1); a support (121) is provided on the base (10); the support (121) is provided with a limiting groove that cooperates with the protrusion (413); the protrusion (413) is received in the limiting groove, and the swing portion (411) can swing with the limiting groove as a fulcrum.

4. The piezoelectric drive device according to claim 2, characterized in that: The second end of the swing portion (411) is located on a side of the first end of the elastic buffer portion (412) close to the first half (S1).

5. The piezoelectric drive device according to claim 1, characterized in that: The functional part comprises a first vibration arm (22) and a second vibration arm (23); one end of the first vibration arm (22) and the second vibration arm (23) are fixedly connected, and the two are arranged at an angle; the other ends of the first vibration arm (22) and the second vibration arm (23) are respectively flexibly hinged to the base (21); the positive angle of the connecting end of the first vibration arm (22) and the second vibration arm (23) constitutes the power output end (201); the force transmission component (41) is connected to the first vibration arm (22) and / or the second vibration arm (23), and the force transmission component (41) is arranged close to the power output end (201).

6. The piezoelectric drive device according to claim 5, characterized in that: A material reduction hole (24) is provided at one end of the first vibration arm (22) and the second vibration arm (23) close to the base (21).

7. The piezoelectric drive device according to claim 5, characterized in that: The piezoelectric stack group (30) comprises two piezoelectric stack bodies (31), wherein one end of one of the piezoelectric stack bodies (31) is connected to the first vibration arm (22), one end of the other piezoelectric stack body (31) is connected to the second vibration arm (23), and the other ends of the two piezoelectric stack bodies (31) are connected to the base (21) or the pedestal (10).

8. The piezoelectric drive device according to claim 1, characterized in that: It also includes a slide table (50), the slide table (50) being slidably arranged relative to the base (10) along a direction parallel to the major axis (X) of the elliptical path, the slide table (50) being located beside the vibrator (20), and a first side wall of the slide table (50) being arranged adjacent to or in contact with the power output end (201) and the retaining portion (40).

9. The piezoelectric drive device according to claim 8, characterized in that: A guard plate (60) parallel to the first side wall is provided on the base (10) at a position adjacent to the first side wall, and the guard plate (60) is provided with a notch for avoiding the power output end (201) and a limiting groove for limiting the movement direction of the retaining portion (40).

10. The piezoelectric drive device according to claim 8, characterized in that: The base (10) comprises a first substrate (11) and a second substrate (12), the slide table (50) is mounted on the first substrate (11), the vibrator (20) is mounted on the second substrate (12), the second substrate (12) is movably connected to the first substrate (11) along a direction parallel to a short axis (Y) of the elliptical path, and a locking mechanism is provided between the second substrate (12) and the first substrate (11), the locking mechanism being configured to be able to retain the second substrate (12) at a plurality of positions within a movable travel, and to be able to release the second substrate (12) from a plurality of positions within the movable travel.

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