Fluid control device

Abstract

The invention provides a fluid control device. A fluid control device (10) is provided with a first main plate (21), a second main plate (40), a drive body (30), a frame body (22), a plurality of support bodies (23), a plurality of voids (230), a side wall member (50), a valve diaphragm (61), and a fixing member (62). The pump chamber (100) is formed by a flat plate part, a second main plate (40) and a side wall part (50). The flat plate part is composed of a first main plate (21), a frame body (22) and a plurality of supporting bodies (23). The valve diaphragm (61) is disposed on a main surface (211) of the first main plate (21) on the pump chamber (100) side. The valve membrane (61) is annular and is fixed to the first main plate (21) by a fixing member (62) such that an outer end (611) is a movable end. In plan view, the outer end (611) of the valve membrane (61) overlaps a plurality of voids (230) located between the plurality of supports (23).

Description

[0001] This application is a divisional application of an application filed on February 1, 2021, with application number 2021 8 0016 927.2 (PCT / JP2021 / 003549) and invention name “Fluid Control Device” Technical Field

[0002] The present invention relates to a fluid control device using a piezoelectric body. Background Art

[0003] Conventionally, various designs have been made for fluid control devices that use a piezoelectric body to transport a fluid, as shown in Patent Document 1. The fluid control device shown in Patent Document 1 transports a fluid using vibration of a piezoelectric body.

[0004] The fluid control device disclosed in Patent Document 1 includes a diaphragm valve in a pump chamber. The diaphragm valve is partially fixed and includes a movable end. The movable end moves along with the flow of the fluid in the pump chamber, whereby the fluid control device realizes flow rectification.

[0005] For example, when the film valve is fixed to the vibration plate, the movable end of the film valve moves to abut against the surface of the vibration plate in the downstream. On the other hand, in the reverse flow, the movable end of the film valve moves to abut against the top plate opposite to the vibration plate. Thus, the fluid control device allows the fluid to flow in the downstream and stops the flow of the fluid in the reverse flow.

[0006] Patent Document 1: International Publication No. 2019 / 230159

[0007] However, in the conventional fluid control device disclosed in Patent Document 1, even in the case of downstream flow, a sufficient reduction in flow path resistance may not be achieved. Summary of the invention

[0008] Therefore, an object of the present invention is to provide a fluid control device capable of more reliably reducing the flow path resistance during downstream flow.

[0009] The fluid control device of the present invention comprises a first main board, a second main board, a driving body, a frame, a supporting part, a side wall part, a valve part and a second hole. The first main board has a first main surface and a second main surface. The second main board has a third main surface opposite to the first main surface and a fourth main surface opposite to the third main surface, and has a first hole that passes through the third main surface and the fourth main surface and allows fluid to pass through. The driving body is arranged on the second main surface to vibrate the first main board. The frame is arranged on the outside of the outer edge of the first main board. The supporting part connects the frame to the first main board and supports the first main board so that it can vibrate relative to the frame. The side wall part is connected to the second main board and the frame, and forms a pump chamber between the first main surface and the third main surface. The valve part has a flexible valve membrane and a fixing part that fixes the inner end side of the valve membrane to the first main surface, the inner end is a fixed end, and the outer end is a movable end. The second hole is surrounded by the outer edge of the first main board, the frame and two adjacent supporting parts, so that the inside and outside of the pump chamber are connected and the fluid passes through. When the first main surface is viewed in plan, the outer end of the valve member overlaps with the second hole.

[0010] In this structure, when the fluid flows in the forward direction, that is, when the fluid is sucked into the pump chamber through the first hole, flows from the center to the outer edge in the pump chamber, and is discharged to the outside through the second hole near the outer edge of the pump chamber, the outer end of the valve enters the second hole. As a result, the flow path cross-sectional area near the outer end of the valve membrane can be increased.

[0011] According to the present invention, the flow channel resistance during the downstream flow can be reduced more reliably. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is an exploded perspective view of the fluid control device according to the first embodiment.

[0013] Figure 2 (A) Figure 2 (B) is a side view showing the structure of the fluid control system according to the first embodiment.

[0014] Figure 3 (A) is a partial enlarged side cross-sectional view showing the deformation state of the valve membrane during downstream flow. Figure 3 (B) is a partially enlarged side cross-sectional view showing the deformation state of the valve membrane during backflow.

[0015] Figure 4 (A) is a side view showing the structure of a fluid control device according to a second embodiment. Figure 4 (B) Yes Figure 4 (A) A partial enlarged view.

[0016] Figure 5 (A) is a side view showing the structure of a fluid control device according to a third embodiment. Figure 5 (B) Yes Figure 5(A) A partial enlarged view.

[0017] Figure 6 It is a side view showing the structure of a fluid control device according to a fourth embodiment.

[0018] Figure 7 It is a side view showing the structure of a fluid control device according to a fifth embodiment.

[0019] Figure 8 It is a side view showing the structure of a fluid control device according to a sixth embodiment.

[0020] Fig. 9 It is a side view showing the structure of a fluid control device according to a seventh embodiment.

[0021] Fig.10 It is a side view showing the structure of a fluid control device according to an eighth embodiment.

[0022] Fig.11 It is a side view showing the structure of a fluid control device according to a ninth embodiment. DETAILED DESCRIPTION

[0023] (First Embodiment)

[0024] A fluid control device according to a first embodiment of the present invention will be described with reference to the drawings. Figure 1 It is an exploded perspective view of the fluid control device according to the first embodiment. Figure 2 (A) Figure 2 (B) is a side view showing the structure of the fluid control system according to the first embodiment. Figure 2 (A) and Figure 2 (B) represents the same structure, but Figure 2 (A) The dimensions are described in a shape close to the actual fluid control device. Figure 2 (B) In order to facilitate understanding of the structure of the fluid control device, the height direction (thickness direction) is particularly emphasized. Figure 2 (B) shows the shape of the vibration generated in the fluid control device. Figure 3 (A) is a partial enlarged side cross-sectional view showing the deformation state of the valve membrane during downstream flow. Figure 3 (B) is a partial enlarged view of a side cross section showing a deformed state of the valve film during backflow. In addition, in these figures and the figures shown in the following embodiments, the shapes of the various components are exaggerated partially or entirely to make the description easier to understand.

[0025] like Figure 1 , Figure 2 (A) Figure 2As shown in FIG. 5B , the first main plate 21 , the frame 22 , a plurality of support bodies 23 , a plurality of gaps 230 , the driving body 30 , the second main plate 40 , the side wall member 50 , the valve film 61 , and the fixing member 62 are provided.

[0026] The first main board 21 is a flat plate having a circular shape when viewed from above. The first main board 21 has a circular main surface 211 and a main surface 212. The main surface 211 corresponds to the "first main surface" of the present invention, and the main surface 212 corresponds to the "second main surface" of the present invention. The main surface 211 and the main surface 212 are parallel to each other. The first main board 21 is made of metal, etc. The first main board 21 can be any component that generates bending vibration through the driving body 30. Bending vibration refers to, for example, Figure 2 As shown in the vibration shape of (B), when the side surface of the first main plate 21 is observed, the main surfaces 211 and 212 vibrate in a wave-like displacement.

[0027] The frame 22 is a flat plate, and is disposed outside the outer edge of the first main board 21. When viewed from above, the frame 22 surrounds the first main board 21. That is, the frame 22 has a circular opening in the center of the flat plate. The shape of the opening is similar to the shape of the first main board 21, and is larger than the shape. The shape of the frame 22 is, for example, Figure 1 The outer shape of the frame 22 is not limited to a rectangle.

[0028] The plurality of supports 23 are in the shape of beams. The plurality of supports 23 are arranged between the first main board 21 and the frame 22. The plurality of supports 23 are connected to the outer edge of the first main board 21 and the inner edge of the frame 22. The plurality of supports 23 are arranged at intervals along the outer edge of the first main board 21. In addition, the number of supports 23 only needs to be three or more, and the plurality of supports 23 are preferably arranged at equal intervals along the outer periphery of the first main board 21.

[0029] The plurality of gaps 230 are disposed between the first main plate 21 and the frame 22. The plurality of gaps 230 are portions between the first main plate 21 and the frame 22 where the plurality of support bodies 23 are not formed.

[0030] Through such a structure, the plurality of gaps 230 connect the space on the main surface 211 side of the first main board 21 with the space on the main surface 212 side. Therefore, the plurality of gaps 230 corresponds to the "second hole" of the present invention. Moreover, the plurality of gaps 230 corresponds to the "recess". In addition, by forming a plurality of support bodies 23 across such a plurality of gaps 230, the plurality of support bodies 23 have elasticity. That is, the plurality of support bodies 23 support the first main board 21 so that it can vibrate relative to the frame body 22. The "support portion" of the present invention is composed of these plurality of support bodies 23 and the plurality of gaps 230.

[0031] In addition, the first main board 21, the frame 22, and the plurality of supports 23 are preferably integrally formed. That is, the first main board 21, the frame 22, and the plurality of supports 23 are preferably realized by punching a flat plate using a prescribed method to form a plurality of gaps 230. Thus, by connecting the first main board 21 and the frame 22 using a plurality of supports 23, a shape having a plurality of gaps 230 can be realized with high precision and easily. However, the first main board 21, the frame 22, and the plurality of supports 23 may not be integrally formed. That is, the first main board 21, the frame 22, and the plurality of supports 23 may also be realized by connecting separate components.

[0032] The driving body 30 is realized by, for example, a piezoelectric element. The piezoelectric element includes a piezoelectric body of a circular plate and driving electrodes. The driving electrodes are formed on both main surfaces of the piezoelectric body of the circular plate.

[0033] The driver 30 is disposed on the main surface 212 of the first main board 21. At this time, when viewed from above, the center of the driver 30 is substantially consistent with the center of the first main board 21. The piezoelectric element of the driver 30 is deformed by applying a driving signal to the driving electrode. Due to this deformation, the first main board 21 vibrates as described above.

[0034] The second main board 40 is a flat plate having a rectangular shape when viewed from above. In addition, the outer shape of the second main board 40 may not be rectangular. The outer shape of the second main board 40 only needs to be at least equal to or greater than the outer shape of the frame 22. The second main board 40 is preferably made of a material and thickness that hardly generates bending vibration.

[0035] The second main board 40 has a main surface 401 and a main surface 402. The main surface 401 and the main surface 402 are parallel to each other.

[0036] The second main plate 40 is arranged such that the main surface 401 faces the main surface 211 of the first main plate 21 .

[0037] The second main board 40 has a plurality of holes 400. The plurality of holes 400 penetrate between the main surface 401 and the main surface 402 of the second main board 40. The plurality of holes 400 correspond to the "first holes" of the present invention. When the second main board 40 is viewed from above, the plurality of holes 400 are arranged in a circle. When the fluid control device 10 is viewed from above, the center of the circle is substantially consistent with the center of the first main board 21.

[0038] The side wall member 50 is an annular column and is preferably made of a material and thickness that hardly generates bending vibration.

[0039] The side wall member 50 is disposed between the frame body 22 and the second main plate 40. One end of the side wall member 50 in the height direction is connected to the frame body 22. The other end of the side wall member 50 in the height direction is connected to the second main plate 40.

[0040] According to this structure, the fluid control device 10 has a space surrounded by a flat plate composed of a first main plate 21, a frame 22, and a plurality of support bodies 23, a second main plate 40, and a side wall member 50. This space becomes a pump chamber 100 of the fluid control device 10. The pump chamber 100 is connected to a plurality of holes 400 and a plurality of gaps 230. In other words, the pump chamber 100 is connected to the external space on the second main plate 40 side of the fluid control device 10 via the plurality of holes 400, and is connected to the external space on the first main plate 21 side of the fluid control device 10 via the plurality of gaps 230.

[0041] The valve film 61 is made of a flexible material. The valve film 61 only needs to have elasticity to be deformed by the fluid flowing through the pump chamber 100. The valve film 61 is annular and has a predetermined width (length in the radial direction). The inner diameter of the valve film 61 is larger than the diameter of the arrangement circle of the plurality of holes 400.

[0042] The fixing member 62 is made of an adhesive material such as a double-sided tape. The fixing member 62 is annular and has a predetermined width (length in the radial direction). The width of the fixing member 62 is smaller than the width of the valve membrane 61. The inner diameter of the fixing member 62 is larger than the diameter of the arrangement circle of the plurality of holes 400, and is the same as or substantially the same as the inner diameter of the valve membrane 61. The outer diameter of the fixing member 62 is smaller than the outer diameter of the valve membrane 61.

[0043] The fixing member 62 fixes the valve film 61 to the main surface 211 of the first main board 21. At this time, the center of the fixing member 62 is roughly consistent with the main surface of the main surface 211. In addition, the inner end of the fixing member 62 is roughly consistent with the inner end of the valve film 61. Figure 2 (A) Figure 2 (B) Figure 3 (A) Figure 3 As shown in (B), the inner end of the valve membrane 61 is fixed by the fixing component 62, and the outer end 611 of the valve membrane 61 is not fixed by the fixing component 62. In addition, the inner end of the valve membrane 61 and the inner end of the fixing component 62 are the ends on the center side when they are viewed from above. That is, the valve membrane 61 uses the inner end as a fixed end and the outer end 611 as a movable end, and is fixed to the first main board 21 in a deformable state. In addition, the fixing component 62 can also fix the position of the outer end side of the valve membrane 61 at a specified distance from the inner end. That is, the fixing component 62 only needs to fix the inner end side of the valve membrane 61 in a manner that the outer end 611 of the valve membrane 61 becomes a movable end.

[0044] In such a structure, according to Bernoulli's theorem, the fluid is sucked into the pump chamber 100 from the plurality of holes 400 (downstream state), and the fluid flows from the center to the outer edge in the pump chamber 100. As a result, the outer end 611 of the valve film 61 is pressed toward the first main plate 21. Then, the fluid is discharged to the outside from the plurality of gaps 230.

[0045] On the other hand, if the fluid is sucked into the pump chamber 100 from the plurality of gaps 230 (backflow state), the fluid tends to flow from the outer edge to the center of the pump chamber 100. As a result, the outer end 611 of the valve film 61 is pushed upward toward the second main plate 40 and abuts against the main surface 401 of the second main plate 40. Therefore, it is possible to suppress the fluid from flowing into the center of the pump chamber 100 (refer to Figure 3 (B)).

[0046] Furthermore, by having the above-mentioned structure, in the fluid control device 10, Figure 2 (A) Figure 2 As shown in FIG. 5(B) , in the undeformed state, that is, in the state where no fluid flows in the pump chamber 100 , the outer end 611 of the valve membrane 61 reaches the gap 230 .

[0047] According to this structure, when the fluid flows in the forward direction (in the downstream state), Figure 3 As shown in (A), the outer end 611 of the valve film 61 is pushed by the fluid from the center toward the outer edge of the pump chamber 100 and enters the plurality of gaps 230. As a result, it is possible to suppress the flow path cross-sectional area near the outer edge of the first main plate 21 in the pump chamber 100 from being reduced due to the valve film 61. As a result, the fluid control device 10 can reduce the flow path resistance during downstream flow.

[0048] In addition, in the above structure, the plurality of holes 400 overlap with the vibration nodes, thereby preventing the fluid from leaking to the outside from the plurality of holes 400. Thus, the fluid control device 10 can improve the fluid conveying efficiency.

[0049] In addition, in the above description, an example in which the first main board 21 is circular is shown, but it may also be an ellipse or a polygon such as a regular polygon that is not a complete circle. However, the first main board 21 is circular, and thus the axial symmetry of the first main board 21 based on the axis passing through the center of the pump chamber 100 is improved. As a result, the vibration efficiency is improved, and the length of the flow path is the same in all directions from the center of the pump chamber 100 toward the outer edge, and the fluid delivery efficiency is improved.

[0050] In addition, in the above description, an example in which the outer shape of the valve film 61 is circular is shown, but it can also be an ellipse that is not a complete circle, a polygon such as a regular polygon, etc. However, the valve film 61 is circular, thereby improving the shielding property in all directions. In addition, the state of the flow path is the same in all directions from the center of the pump chamber 100 toward the outer edge, and the delivery efficiency of the fluid is improved.

[0051] In addition, in the above structure, the valve film 61 and the fixing member 62 are annular. Therefore, when the valve film 61 is fixed by the fixing member 62, it is easy to remove bubbles generated between the fixing member 62 and the first main board 21, and between the fixing member 62 and the valve film 61. Therefore, the adhesion of the valve film 61 to the first main board 21 is improved.

[0052] (Second Embodiment)

[0053] A fluid control device according to a second embodiment of the present invention will be described with reference to the drawings. Figure 4 (A) is a side view showing the structure of a fluid control device according to a second embodiment. Figure 4 (B) Yes Figure 4 (A) A partial enlarged view.

[0054] like Figure 4 (A) Figure 4 As shown in FIG. 1B , the fluid control device 10A according to the second embodiment is different from the fluid control device 10 according to the first embodiment in that it includes a protrusion 41A. The other structures of the fluid control device 10A are the same as those of the fluid control device 10 , and description of the same parts will be omitted.

[0055] The fluid control device 10A includes a protrusion 41A. The protrusion 41A is shaped to protrude from the main surface 401 of the second main plate 40. The protrusion 41A is annular in shape having an outer edge 411 and an inner edge 412.

[0056] In a plan view, the outer edge 411 of the protrusion 41A is located closer to the outer edge of the pump chamber 100 than the outer end 611 of the valve film 61. In other words, the outer edge 411 of the protrusion 41A is closer to the inner wall surface of the side wall member 50 than the outer end 611 of the valve film 61. In a plan view, the inner edge 412 of the protrusion 41A overlaps with the fixing member 62.

[0057] With such a structure, the outer end 611 of the valve film 61 overlaps with the protrusion 41A when viewed from above. Figure 4 As shown in (B), the distance between the outer end 611 of the valve film 61 and the protrusion 41A is shorter than that of the fluid control device 10 according to the first embodiment. Therefore, during backflow, the outer end 611 of the valve film 61 easily contacts the protrusion 41A, and the backflow of the fluid can be more reliably suppressed.

[0058] In addition, the thickness of the protrusion 41A is preferably approximately the same as the thickness of the fixing member 62. Thus, the fluid control device 10A can suppress an increase in flow path resistance during forward flow and reliably suppress reverse flow.

[0059] In addition, in the fluid control device 10A, when viewed from above, the protrusion 41A overlaps with the fixing member 62. According to this structure, even if the outer end 611 of the valve film 61 is pressed into the upper part of the fixing member 62 during backflow, the outer end 611 of the valve film 61 and the protrusion 41A are more reliably in contact. As a result, the fluid control device 10A can more reliably suppress backflow. In addition, in this case, it is preferred that the thickness of at least the portion of the protrusion 41A that overlaps with the fixing member 62 is smaller, and with the help of a smaller thickness, the increase in flow resistance during downstream flow can be suppressed.

[0060] (Third Embodiment)

[0061] A fluid control device according to a third embodiment of the present invention will be described with reference to the drawings. Figure 5 (A) is a side view showing the structure of a fluid control device according to a third embodiment. Figure 5 (B) Yes Figure 5 (A) A partial enlarged view.

[0062] like Figure 5 (A) Figure 5 As shown in FIG. 1B , the fluid control device 10B according to the third embodiment differs from the fluid control device 10A according to the second embodiment in the shape of the protrusion 41B. The other structures of the fluid control device 10B are the same as those of the fluid control device 10A, and the description of the same parts is omitted.

[0063] The inner edge 412 of the protrusion 41B is located closer to the outer edge of the pump chamber 100 than the outer edge 621 of the fixing member 62. In other words, the inner edge 412 of the protrusion 41B is closer to the inner wall surface of the side wall member 50 than the outer edge 621 of the fixing member 62. Therefore, the protrusion 41B and the fixing member 62 do not overlap in a plan view.

[0064] Therefore, in the portion of the pump chamber 100 where the fixing member 62 is disposed, an increase in the flow path resistance can be further suppressed.

[0065] (Fourth Embodiment)

[0066] A fluid control device according to a fourth embodiment of the present invention will be described with reference to the drawings. Figure 6 It is a side view showing the structure of a fluid control device according to a fourth embodiment.

[0067] like Figure 6 As shown, the fluid control device 10C according to the fourth embodiment is different from the fluid control device 10 according to the first embodiment in the arrangement positions of the plurality of holes 400. The other structures of the fluid control device 10C are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0068] When viewed from above, the plurality of holes 400 overlap with the fixing member 62. According to this structure, it is possible to suppress the fluid sucked into the pump chamber 100 from the plurality of holes 400 from colliding with the inner edge wall of the fixing member 62. Thus, it is possible to suppress the turbulence of the flow in the pump chamber 100. Therefore, the fluid control device 10C can further improve the conveying efficiency.

[0069] (Fifth Embodiment)

[0070] A fluid control device according to a fifth embodiment of the present invention will be described with reference to the drawings. Figure 7 It is a side view showing the structure of a fluid control device according to a fifth embodiment.

[0071] like Figure 7 As shown, the fluid control device 10D according to the fifth embodiment is different from the fluid control device 10B according to the third embodiment in that it includes a second main plate 40D. The other structures of the fluid control device 10D are the same as those of the fluid control device 10B, and the description of the same parts is omitted.

[0072] The fluid control device 10D includes a second main plate 40D. The second main plate 40D includes a plate serving as a main body, a protrusion 41D, and a side wall protrusion 42D. The plate serving as a main body, the protrusion 41D, and the side wall protrusion 42D are integrally formed. In other words, the plate serving as a main body, the protrusion 41D, and the side wall protrusion 42D are formed by, for example, cutting a single plate.

[0073] The protrusion 41D is similar to the protrusion 41B of the fluid control device 10B and is shaped to protrude from the surface of the flat plate on the first main plate 21 side that is the main body of the second main plate 40D. The protrusion 41D overlaps with the outer end of the valve film 61 .

[0074] The side wall protrusion 42D is shaped so as to protrude from the side of the flat plate constituting the main body of the second main plate 40D that faces the side wall member 50 .

[0075] The end face of the protrusion 41D (the face opposite to the face on the main body side) and the end face of the side wall protrusion 42D (the face opposite to the face on the main body side) are located on the same plane (coplanar). That is, the end face of the protrusion 41D and the joint surface of the second main plate 40D and the side wall member 50 are located on the same plane.

[0076] In such a structure, the distance between the valve film 61 and the protrusion 41D can be stably achieved. Therefore, the fluid control device 10D can achieve stable fluid conveying characteristics.

[0077] In addition, the flat plate that becomes the main body, the protrusion 41D, and the side wall protrusion 42D are preferably formed in one piece, but they may be separate. In this case, after the protrusion 41D and the side wall protrusion 42D are joined to the flat plate that becomes the main body, for example, the end surface of the protrusion 41D and the end surface of the side wall protrusion 42D may be ground at the same time. In this way, the end surface of the protrusion 41D and the end surface of the side wall protrusion 42D can be made coplanar.

[0078] In this structure, the side wall member 50 may be a bonding material. Thus, the height of the pump chamber 100 is determined by the side wall protrusion 42D, and the fluid control device 10D can achieve a more stable shape.

[0079] (Sixth Embodiment)

[0080] A fluid control device according to a sixth embodiment of the present invention will be described with reference to the drawings. Figure 8 It is a side view showing the structure of a fluid control device according to a sixth embodiment.

[0081] like Figure 8 As shown, the fluid control device 10E according to the sixth embodiment is different from the fluid control device 10D according to the fifth embodiment in that it includes a second main plate 40E. The other structures of the fluid control device 10E are the same as those of the fluid control device 10D, and the description of the same parts is omitted.

[0082] The fluid control device 10E includes a second main plate 40E. The second main plate 40E includes a flat plate as a main body and a protrusion 41E. The flat plate as a main body and the protrusion 41E are integrally formed.

[0083] The protrusion 41E is formed by connecting and integrating the protrusion 41D and the side wall protrusion 42D according to the fifth embodiment. In other words, the inner edge of the protrusion 41E overlaps with the valve film 61 and the outer edge of the protrusion 41E is substantially consistent with the outer edge of the side wall member 50 when viewed from above.

[0084] In such a structure, the surface of the second main plate 40E near the outer edge of the pump chamber 100 becomes flat. This can suppress turbulence near the outer edge of the pump chamber 100. Therefore, the fluid control device 10E can improve the conveying efficiency of the fluid.

[0085] (Seventh Embodiment)

[0086] A fluid control device according to a seventh embodiment of the present invention will be described with reference to the drawings. Fig. 9 It is a side view showing the structure of a fluid control device according to a seventh embodiment.

[0087] like Fig. 9As shown, the fluid control device 10F according to the seventh embodiment is different from the fluid control device 10E according to the sixth embodiment in that it includes a valve film 61F and a fixing member 62F. The other structures of the fluid control device 10F are the same as those of the fluid control device 10E, and the description of the same parts is omitted.

[0088] The valve film 61F is circular. The fixing member 62F is circular. That is, the valve film 61F and the fixing member 62F are shaped without an opening in the center. Except for the portion of the outer end 611, the valve film 61F is fixed to the first main plate 21 by the fixing member 62F.

[0089] In such a structure, the first main plate 21 side of the pump chamber 100 becomes a flat surface. As a result, the distance between the main surface 401 in the pump chamber 100 and the valve film 61F becomes uniform, and flow disturbance can be suppressed. Therefore, the fluid control device 10F can further improve the fluid delivery efficiency.

[0090] (Eighth Embodiment)

[0091] A fluid control device according to an eighth embodiment of the present invention will be described with reference to the drawings. Fig.10 It is a side view showing the structure of a fluid control device according to an eighth embodiment.

[0092] like Fig.10 As shown, the fluid control device 10G according to the eighth embodiment is different from the fluid control device 10F according to the seventh embodiment in that it has a hole 400G. The other structures of the fluid control device 10G are the same as those of the fluid control device 10F, and the description of the same parts is omitted.

[0093] The fluid control device 10G includes one hole 400G. The hole 400G passes through the second main plate 40E. The opening area of ​​the hole 400G is larger than the opening area of ​​the hole 400 shown in the above embodiments. For example, the diameter of the hole 400G is about the same as the circle in which the plurality of holes 400 are arranged.

[0094] With such a structure, the fluid control device 10G can also achieve the same operational effects as the fluid control device 10F.

[0095] (Ninth Embodiment)

[0096] A fluid control device according to a ninth embodiment of the present invention will be described with reference to the drawings. Fig.11 It is a side view showing the structure of a fluid control device according to a ninth embodiment.

[0097] like Fig.11As shown, the fluid control device 10H according to the ninth embodiment is different from the fluid control device 10 according to the first embodiment in that it includes a recess 210. The other structures of the fluid control device 10H are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0098] The fluid control device 10H includes a recessed portion 210. The recessed portion 210 is recessed from the surface (the aforementioned main surface 211) on the pump chamber 100 side of the first main plate 21. The recessed portion 210 overlaps with the outer end 611 of the valve film 61 in a plan view.

[0099] With such a structure, when the fluid flows downstream, the outer end 611 of the valve film 61 is received in the recess 210. Thus, the flow resistance near the outer end 611 of the valve film 61 can be reduced. In addition, in this case, if the outer end 611 of the valve film 61 is received in the recess 210 when the fluid flows downstream, the recess 210 does not overlap with the outer end 611 of the valve film 61 even when the fluid does not flow, and the same effect as the above structure can be achieved.

[0100] Furthermore, the structures of the above-described embodiments can be combined appropriately, and effects corresponding to the respective combinations can be achieved.

[0101] Description of Reference Numerals

[0102] 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H...fluid control device; 21...first main board; 22...frame; 23...support body; 30...driving body; 40, 40D, 40E...second main board; 41A, 41B, 41D, 41E...protrusion; 42D...protrusion for side wall; 50...side wall member; 61, 61F...valve membrane; 62, 62F...fixing member; 100...pump chamber; 210...recess; 211, 212...main surface; 230...gap; 400...hole; 401, 402...main surface; 411...outer edge; 412...inner edge; 611...outer end; 621...outer edge.

Claims

1. A fluid control device, wherein: have: A first main board having a first main surface and a second main surface; A second main plate having a third main surface opposite to the first main surface and a fourth main surface opposite to the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and allowing fluid to pass through; A driving body, disposed on the second main surface, to vibrate the first main board; A frame body, arranged outside the outer edge of the first main board; a support portion connecting the frame body and the first main board and supporting the first main board to be vibratory relative to the frame body; A side wall member connected to the second main board and the frame body and forming a pump chamber between the first main surface and the third main surface; a valve member including a fixing member for fixing a flexible valve membrane to the first main surface, and making an outer end of the valve membrane a movable end; and The second hole is surrounded by the outer edge of the first main board, the frame and the two adjacent support parts, so that the inside and outside of the pump chamber are connected to each other for the fluid to pass through. When the first main surface is viewed from above, the outer end of the valve member overlaps with the second hole. The second main board includes a protrusion protruding from the third main surface, The shape of the valve membrane is circular, In the plan view, the protrusion overlaps with the outer end of the valve membrane. The outer edge of the protrusion is located closer to the inner wall surface of the side wall member than the outer end of the valve member.

2. A fluid control device, wherein: have: A first main board having a first main surface and a second main surface; A second main plate having a third main surface opposite to the first main surface and a fourth main surface opposite to the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and allowing fluid to pass through; A driving body, disposed on the second main surface, to vibrate the first main board; A frame body, arranged outside the outer edge of the first main board; a support portion connecting the frame body and the first main board and supporting the first main board to be vibratory relative to the frame body; A side wall member connected to the second main board and the frame body and forming a pump chamber between the first main surface and the third main surface; a valve member including a fixing member for fixing a flexible valve membrane to the first main surface, and making an outer end of the valve membrane a movable end; and The second hole is surrounded by the outer edge of the first main board, the frame and the two adjacent support parts, so that the inside and outside of the pump chamber are connected to each other for the fluid to pass through. When the first main surface is viewed from above, a portion overlapping with the outer end of the valve member includes a recessed portion recessed from the first main surface. The shape of the valve membrane is circular, The second main board includes a protrusion protruding from the third main surface, In the plan view, the protrusion overlaps with the outer end of the valve film, and the outer edge of the protrusion is located closer to the inner wall surface of the side wall member than the outer end of the valve member.

3. The fluid control device according to claim 1 or 2, wherein: In the plan view, the protrusion does not overlap with the fixing member.

4. The fluid control device according to claim 1 or 2, wherein: The protrusion overlaps the fixing member in the plan view.

5. The fluid control device according to claim 1 or 2, wherein: The protrusion is integrally formed with the second main board.

6. The fluid control device according to claim 1 or 2, wherein: An end surface of the protrusion in the second main plate and a joining surface of the second main plate joined to the side wall member are located on the same plane.

7. The fluid control device according to claim 1 or 2, wherein: In the plan view, the first hole overlaps with the fixing member.

8. The fluid control device according to claim 1 or 2, wherein: The fixing component is annular.

9. The fluid control device according to claim 1 or 2, wherein: The fixing member also has a shape without an opening in the center.

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