Alignment method and alignment device for light source assembly and optical device group

Abstract

The invention discloses a light source assembly and optical device group alignment method and alignment device. The light source assembly and optical device group alignment method comprises the following steps: arranging a reflection assembly; adjusting the reflection assembly; arranging a spectroscope; adjusting the spectroscope; arranging an optical device group; and adjusting the optical device group. According to the light source assembly and optical device group alignment method and alignment device, imaging equipment can be omitted through the light source assembly and optical device group alignment method, so that the alignment process of the light source and the optical device is simplified, meanwhile, the alignment efficiency of the light source and the optical device can be improved, and the alignment cost of the light source and the optical device is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of optical systems, and in particular to a method and device for aligning a light source assembly and an optical device assembly. Background Art

[0002] In the process of using optical systems, the alignment of light sources and optical devices is often involved. For example, in the auxiliary lighting optical system of electron beam detection equipment, the optical axis of the light emitted by the light source needs to coincide with the optical axis of the convex lens. When aligning the light source and the optical device, an imaging device is usually set up. However, the imaging device usually takes up more space and affects the layout of other devices in the optical system. In addition, the power supply lines and signal transmission lines related to imaging will also increase the complexity of the system, increase the cost of the alignment process, and reduce the efficiency of the alignment. Summary of the invention

[0003] The embodiments of the present application provide a method and an apparatus for aligning a light source assembly and an optical device assembly, which can simplify the alignment process of the light source and the optical device and improve the alignment efficiency of the light source and the optical device.

[0004] In a first aspect, an embodiment of the present application provides an alignment method of a light source assembly and an optical device group, wherein the light source assembly has a light exit hole, and the alignment method comprises: setting and adjusting the reflection assembly so that an outgoing light beam emitted by the light source assembly is reflected through the reflection assembly to form a first reflected light beam, and the first reflected light beam is emitted into the light exit hole; setting and adjusting a beam splitter between the light source assembly and the reflection assembly so that the outgoing light beam passes through the beam splitter to form a first light beam and a second light beam, the first light beam is reflected through the reflection assembly to form a second reflected light beam, and the second reflected light beam is collinear with the outgoing light beam; setting and adjusting the optical device group between the beam splitter and the reflection assembly so that the first light beam passes through the optical device group to form a third light beam, the third light beam is reflected through the reflection assembly to the optical device group to form a third reflected light beam, the third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam is collinear with the outgoing light beam.

[0005] According to the embodiment of the first aspect of the present application, after setting and adjusting the reflection component and before setting and adjusting the spectrometer, it also includes: setting an aperture component between the light source component and the reflection component, the aperture component including an aperture screen and an aperture hole; adjusting the position and / or angle of the aperture component so that part of the emergent light beam passes through the aperture hole, and the first reflected light beam passes through the aperture hole, and imaging is performed on the aperture screen to obtain diffraction concentric rings.

[0006] According to an embodiment of the first aspect of the present application, the reflective component includes a corner cube prism; setting and adjusting the reflective component includes: adjusting the position and / or angle of the corner cube prism to make the outgoing light beam reflect back through the reflective component to form a first retroreflected light beam, and the first retroreflected light beam is emitted into the light output hole.

[0007] According to an embodiment of the first aspect of the present application, a reflective film is provided on one side surface of the beam splitter; the beam splitter is set and adjusted, including: adjusting the position and / or angle of the beam splitter so that the outgoing light beam passes through the beam splitter to form a first light beam and a second light beam, the first light beam is reflected back through the reflective component to form a second reflected light beam, the second reflected light beam is reflected through the beam splitter to form a first reflected light beam, and the first reflected light beam coincides with the second light beam after being reflected through the reflective film, indicating that the second reflected light beam is collinear with the outgoing light beam.

[0008] According to an embodiment of the first aspect of the present application, the second retroreflected light beam is collinear with the outgoing light beam, and further includes: a light screen is arranged on one side of the beam splitter along the optical axis direction perpendicular to the outgoing light beam, so that the first reflected light beam and the second light beam reflected by the reflective film are both imaged on the light screen, and the image formed by the first reflected light beam on the light screen coincides with the image formed by the second light beam on the light screen, indicating that the second retroreflected light beam is collinear with the outgoing light beam.

[0009] According to an embodiment of the first aspect of the present application, an optical device group is set and adjusted, including: setting an optical device group between a beam splitter and a reflective component, adjusting the position and angle of the optical device group so that a first light beam passes through the optical device group to form a third light beam, the third light beam is reflected back to the optical device group through the reflective component to form a third reflected light beam, the third reflected light beam passes through the optical device group to form a fourth light beam, the fourth light beam is reflected by the beam splitter to form a second reflected light beam, the second reflected light beam is reflected by a reflective film to form an image on a light screen, and the image formed by the second reflected light beam on the light screen coincides with the image formed by the second light beam on the light screen.

[0010] In the second aspect, an embodiment of the present application provides an alignment device, which is used for aligning a light source assembly with an optical device group; the alignment device includes: a beam splitter, which is arranged between the light source assembly and the optical device group, and the beam splitter is used to partially reflect and partially transmit an outgoing light beam emitted by the light source assembly to form a first light beam and a second light beam, and the first light beam passes through the optical device group to form a third light beam; a reflecting assembly, which is arranged on a side of the optical device group away from the beam splitter, and the reflecting assembly is used to reflect the third light beam to form a third reflected light beam, and the third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam and the outgoing light beam are used to determine whether the light source assembly and the optical device group are aligned.

[0011] According to an embodiment of the second aspect of the present application, the reflective component includes a corner cube prism, which includes an incident surface and a cone angle portion; the incident surface is used to receive a third light beam, and the cone angle portion is used to reflect the third light beam and form a third retroreflected light beam, so that the third light beam and the third retroreflected light beam are parallel or overlapped.

[0012] According to an embodiment of the second aspect of the present application, it also includes: an aperture assembly, which is arranged between the light source assembly and the beam splitter, for limiting the diameter of the outgoing light beam and for auxiliary calibration of the light source assembly and the beam splitter.

[0013] According to an embodiment of the second aspect of the present application, the beam splitter partially reflects the third reflected light beam to form a second reflected light beam, and the beam splitter includes a reflective film, which is used to reflect the second reflected light beam; the alignment device also includes: a light screen, which is arranged on one side of the beam splitter component, and the light screen is used to image the second light beam, and is used to image the second reflected light beam after being reflected by the reflective film.

[0014] In the method and device for aligning a light source assembly and an optical device group provided in the embodiment of the present application, an outgoing light beam is emitted by the light source assembly, and a reflective assembly is arranged so that the first reflected light beam reflected by the reflective assembly coincides with the outgoing light beam; a beam splitter is arranged, and a first light beam and a second light beam are formed by the beam splitter, and the first light beam is reflected by the reflective assembly to form a second reflected light beam, and the second reflected light beam is collinear with the outgoing light beam; an optical device group is arranged, and the first light beam passes through the optical device group to form a third light beam, and the third light beam is reflected to the optical device group through the reflective assembly to form a third reflected light beam, and the third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam is collinear with the outgoing light beam, indicating that the light source assembly and the optical device group have been aligned. The method for aligning a light source assembly and an optical device group in the embodiment of the present application can omit the imaging device, thereby simplifying the alignment process of the light source and the optical device, and at the same time, can improve the alignment efficiency of the light source and the optical device, and reduce the cost of aligning the light source and the optical device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 A flow chart of a method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0017] Figure 2 A light path schematic diagram of step S1 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application.

[0018] Figure 3 A light path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application.

[0019] Figure 4A light path schematic diagram of step S3 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application.

[0020] Figure 5 A light path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application.

[0021] Figure 6 A light path schematic diagram of step S5 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0022] Figure 7 Another optical path schematic diagram of step S6 of the method for aligning a light source assembly and an optical device assembly according to an embodiment of the present application.

[0023] Figure 8 Another optical path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0024] Fig. 9 Another optical path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0025] Fig.10 A partial light path schematic diagram of step S1 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0026] Fig.11 A schematic diagram of a partial light path in step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0027] Fig.12 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0028] Fig.13 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0029] Fig.14 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0030] Fig.15 Another optical path schematic diagram of step S6 of the method for aligning a light source assembly and an optical device assembly according to an embodiment of the present application.

[0031] Fig.16 A schematic diagram of the structure of an alignment device according to an embodiment of the present application.

[0032] Fig.17 A schematic diagram of a usage state of an alignment device according to an embodiment of the present application.

[0033] Fig.18 A schematic diagram of the structure of an electron beam detection device according to an embodiment of the present application.

[0034] Fig.19 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0035] Fig. 20 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0036] Fig.21 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0037] Reference numerals:

[0038] 1. Light source components;

[0039] 2. Reflection component; 21. Corner cube prism; 211. Incident surface; 221. Cone corner portion;

[0040] 3. Beam splitter; 31 reflective film;

[0041] 4. Optical device group; 41. Transmission mirror;

[0042] 5. Aperture assembly; 51. Aperture screen;

[0043] 6. Light screen;

[0044] 7. Electron beam source;

[0045] 8. Detection components;

[0046] 9. Tested samples;

[0047] L0, outgoing light beam; L1, first light beam; L2, second light beam; L3, third light beam; L4, fourth light beam; LB1, first retroreflected light beam; LB2, second retroreflected light beam; LB3, third retroreflected light beam; LR1, first reflected light beam; LR2, second reflected light beam; D, electron beam. DETAILED DESCRIPTION

[0048] The features and exemplary embodiments of various aspects of the application will be described in detail below. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the application. However, it is obvious to those skilled in the art that the application can be implemented when some details in these specific details are not needed. The following description of the embodiments is only to provide a better understanding of the application by illustrating the example of the application.

[0049] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The embodiments will be described in detail below in conjunction with the accompanying drawings.

[0050] Relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements that are inherent to such process, method, article, or device. In the absence of further restrictions, the elements defined by the statement "comprising ..." do not exclude the presence of additional identical elements in the process, method, article, or device that includes the elements.

[0051] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean that it is directly on the other layer or another region, or that other layers or regions are included between it and the other layer or another region. Moreover, if the component is turned over, the layer or a region will be "below" or "beneath" another layer or another region.

[0052] In addition, the term "and / or" in this article is only a description of the association relationship between the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0053] It should be understood that in the embodiment of the present application, "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0054] The applicant has found that before using the optical system, it is necessary to adjust the position and angle of the light source and the optical device, and align the light source and the optical device. For example, in the auxiliary lighting system of the electron beam detection equipment, before performing the electron beam detection, the position and angle of the auxiliary light source and the optical device (convex lens, etc.) are adjusted so that the light beam of the auxiliary light source can pass through the convex lens along the optical axis of the convex lens. In the alignment process of the light source and the optical device, an imaging device is usually set to judge whether the light source and the optical device are aligned by comparing the image without the optical device and the real-time image during the adjustment of the optical device. However, the imaging device itself and the corresponding power supply components (power supply and power supply line) and signal processing components (signal line and host) will take up more space, which may affect the layout position of the optical device, and will also significantly increase the complexity of the alignment process of the light source and the optical device and the required devices, thereby reducing the alignment efficiency and alignment cost of the light source and the optical device.

[0055] In view of the above analysis, the applicant has proposed a method and device for aligning a light source assembly and an optical device group. The light source assembly is used to emit an outgoing light beam, and a reflective assembly is arranged so that the first reflected light beam reflected by the reflective assembly coincides with the outgoing light beam; a beam splitter is arranged, and a first light beam and a second light beam are formed by the beam splitter. The first light beam is reflected through the reflective assembly to form a second reflected light beam, and the second reflected light beam is collinear with the outgoing light beam; an optical device group is arranged, and the first light beam passes through the optical device group to form a third light beam, and the third light beam is reflected through the reflective assembly to the optical device group to form a third reflected light beam. The third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam is collinear with the outgoing light beam, indicating that the light source assembly and the optical device group have been aligned. The method for aligning a light source assembly and an optical device group of the embodiment of the present application can omit the imaging device, thereby simplifying the alignment process of the light source and the optical device. At the same time, it can improve the alignment efficiency of the light source and the optical device, and reduce the cost of aligning the light source and the optical device.

[0056] Figure 1 A flow chart of a method for aligning a light source assembly and an optical device group according to an embodiment of the present application. Figure 2 A light path schematic diagram of step S1 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application. Figure 3 A light path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application. Figure 4 A light path schematic diagram of step S3 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application. Figure 5 A light path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group in an embodiment of the present application. Figure 6 A light path schematic diagram of step S5 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0057] Figure 7 Another optical path schematic diagram of step S6 of the method for aligning the light source assembly and the optical device assembly according to an embodiment of the present application. Figure 1 , the embodiment of the present application provides a method for aligning a light source assembly and an optical device group, comprising:

[0058] See also Figure 1 , and combined with Figure 2 , step S1, setting the reflection component 2.

[0059] The light source assembly 1 emits an outgoing light beam L0, which is directed toward the reflective assembly 2. The outgoing light beam L0 may be in the form of a laser. The reflective assembly 2 is capable of receiving and reflecting the first light beam L1 to form a first retroreflected light beam LB1.

[0060] Continue reading Figure 1 , and combined with Figure 3 , also includes: step S2, adjusting the reflection component 2.

[0061] Adjust the position of the reflective component 2, illustratively, adjust the position and / or angle of the reflective component 2 until the first retroreflected light beam LB1 enters the light exit hole of the light source component 1, that is, the first retroreflected light beam LB1 coincides with the exit light beam L0. At this point, it can be considered that the position of the light source and the reflective component 2 has been adjusted.

[0062] Continue reading Figure 1 , and combined with Figure 4 , further comprising: step S3, arranging the beam splitter 3.

[0063] A beam splitter 3 is arranged between the light source assembly 1 and the reflective assembly 2. The beam splitter 3 has a beam splitting surface, which can partially reflect light and partially transmit light. Therefore, the beam splitter 3 partially transmits the outgoing light to form a first light beam, and the beam splitter 3 partially reflects the outgoing light beam L0 to form a second light beam. The first light beam L1 is reflected by the reflective assembly 2 to form a second retroreflected light beam LB2.

[0064] Continue reading Figure 1 , and combined with Figure 5 , further comprising: step S4, adjusting the beam splitter 3.

[0065] Adjust the position of the beam splitter 3, illustratively, adjust the position and / or angle of the beam splitter 3 until the second reflected light beam LB2 and the outgoing light beam L0 are collinear. At this point, the positions of the light source assembly 1, the reflective assembly 2 and the beam splitter 3 have been adjusted.

[0066] Continue reading Figure 1 , and combined with Figure 6 , further comprising: step S5, arranging the optical device group 4.

[0067] An optical device group 4 is arranged between the beam splitter 3 and the reflective component 2. Exemplarily, the optical device group 4 includes at least one convex lens or at least one concave lens. After the optical device group 4 is arranged, the optical device group 4 may not be aligned with the light source component 1, and the optical device group 4 may cause the first light beam L1 to be refracted, that is, the third light beam L3 is offset relative to the original first light beam L1. At the reflective component 2, the third reflected light beam LB3 after the offset third light beam L3 is reflected will also be offset relative to the second reflected light beam LB2, and the third reflected light beam LB3 will be further refracted at the optical device group 4, so that the fourth light beam L4 at this time is further offset relative to the second reflected light beam LB2, so that the fourth light beam L4 is not collinear with the outgoing light beam L0. It should be noted that the optical device group 4 is used to diverge and / or converge the first light beam L1 and the second light beam L2, that is, the optical device group 4 includes at least one convex lens and / or at least one concave lens, which will change the divergence degree of the light beam. It can be understood that the optical device group 4 can also include a reflector 42. Considering that the reflector 42 does not affect the divergence degree of the light, it only changes the path of the light, so that the path of the light forms a broken line segment.

[0068] Continue reading Figure 1 , and combined with Figure 7 , further comprising: step S6, adjusting the optical device group 4.

[0069] The position and posture of the optical device group 4 is adjusted, illustratively, the position and / or angle of the optical device group 4 is adjusted until the fourth light beam L4 is collinear with the outgoing light beam L0. At this time, the outgoing light beam L0, the first light beam L1, the third light beam L3, the third reflected light beam LB3, and the fourth light beam L4 are all collinear, and the optical device group 4 is aligned with the light source assembly 1. In the aligned light source assembly 1 and the optical device group 4, the outgoing light emitted by the light source assembly 1 will pass through the optical device along the reference axis of the optical device group 4, and will not produce obvious refraction. Therefore, the third reflected light beam LB3 will also pass through the optical device along the reference axis of the optical device group 4. Therefore, whether the light source assembly 1 and the optical device group 4 are aligned can be judged based on whether the outgoing light beam L0 and the fourth light beam L4 are collinear.

[0070] Since the method for aligning the light source assembly and the optical device group of the embodiment of the present application determines whether the light source assembly 1 and the optical device group 4 are aligned by comparing the initial outgoing light beam L0 of the light source assembly 1 and the fourth light beam L4 finally formed, the use of the imaging device can be omitted, and accordingly, the corresponding power supply assembly (power supply and power supply line) and signal processing assembly (signal line and host) of the imaging device can also be omitted. Therefore, the method for aligning the light source assembly and the optical device group of the embodiment of the present application can simplify the alignment process of the light source and the optical device, and at the same time, it can improve the alignment efficiency of the light source and the optical device and reduce the cost of aligning the light source and the optical device.

[0071] Figure 8 Another optical path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0072] Further, see Figure 1 , and combined with Figure 8 , after step S2, an aperture assembly 5 is arranged between the light source assembly 1 and the reflective assembly 2, so that part of the outgoing light beam L0 passes through the aperture assembly 5, so as to appropriately adjust the diameter of the outgoing light beam L0, and limit the divergence and convergence of the outgoing light beam L0, so as to facilitate subsequent observation. At this time, the aperture assembly 5 may not be aligned with the light source assembly 1, so the position and / or angle of the aperture assembly 5 is adjusted so that the first retroreflected light beam LB1 passes through the aperture assembly 5 and is emitted into the light exit hole, indicating that the aperture assembly 5 and the light source assembly 1 have been aligned. In order to make the first light beam L1 closer to parallel light, the aperture assembly 5 can be provided with two apertures, and the two apertures are arranged in sequence. When the outgoing light beam L0 is parallel light, it is more convenient to confirm and observe other light beams.

[0073] Fig. 9 Another optical path schematic diagram of step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0074] Further, see Figure 1 , and combined with Fig. 9 The aperture assembly 5 is, for example, an aperture aperture, including an aperture screen 51 and an aperture hole. Among the multiple apertures, each aperture has an aperture hole for transmitting light. Except for the aperture closest to the beam splitter 3, one of the apertures can be used as the aperture screen 51. In the process of adjusting the position and / or angle of the aperture assembly 5, if the first retroreflected light beam LB1 passes through the aperture holes of the multiple apertures, then on the aperture surface used as the aperture screen 51, the first retroreflected light beam LB1 will be diffracted, thereby presenting a diffraction ring on the aperture screen 51. Therefore, by observing whether there are diffraction concentric rings generated by the first retroreflected light beam LB1 on the aperture screen 51, it can be judged whether the first retroreflected light beam LB1 passes through the aperture hole and is retroreflected into the light exit hole of the light source assembly 1. By observing the imaging of the first retroreflected light beam LB1 on the aperture screen 51, it can be more intuitive to judge whether the first retroreflected light beam LB1 is collinear with the exit light beam L0, and the judgment result is more accurate and reliable, thereby improving the adjustment accuracy of the reflection assembly 2 in step S2.

[0075] Fig.10 A partial light path schematic diagram of step S1 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application. Fig.11 A schematic diagram of a partial light path in step S2 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0076] See also Fig.10 and Fig.11 , continue reading Figures 2 to 6 The reflecting component 2 includes a corner cube prism 21; in the step of adjusting the position of the reflecting component 2 relative to the light source component 1 so that the outgoing light beam L0 of the light source component 1 is reflected back to the light exit hole through the reflecting component 2: the outgoing light beam L0 before being reflected back by the corner cube prism 21 is parallel to the outgoing light beam L0 after being reflected back by the corner cube prism 21; adjusting the position and / or angle of the corner cube prism 21 relative to the light source component 1 so that the outgoing light beam L0 is reflected back through the reflecting component 2 to form a first reflected light beam LB1, and the first reflected light beam LB1 is emitted into the light exit hole.

[0077] In the embodiment of the present application, the reflective component 2 is in the form of a corner cube prism 21. The corner cube prism 21 includes an incident surface 211 and a cone angle portion 221. The first light beam L1 enters the corner cube prism 21 from the incident surface 211. The first light beam L1 entering the corner cube prism 21 is reflected at the cone angle portion 221 and forms a first retroreflected light beam LB1. The first retroreflected light beam LB1 will be emitted from the incident surface 211, and the first retroreflected light beam LB1 emitted from the incident surface 211 is parallel to the first light beam L1. In step S2, after the outgoing light beam L0 is reflected by the corner cube prism 21, the first retroreflected light beam LB1 is formed. The propagation direction of the outgoing light beam L0 is opposite to that of the first retroreflected light beam LB1. At this time, the outgoing light beam L0 is parallel to the first retroreflected light beam LB1. The position and angle of the corner cube prism 21 are adjusted so that the outgoing light beam L0 is directed toward the tip of the corner cube prism 21. At this time, the outgoing light beam L0 and the first retroreflected light beam LB1 overlap, and the first retroreflected light beam LB1 is retroreflected along the original path and will be injected into the light exit hole of the light source assembly 1 again. Considering that the first retroreflected light beam LB1 will present a light spot at the light source assembly 1, when it is observed that the light spot coincides with the light exit hole, it can be considered that the first retroreflected light beam LB1 is injected into the light exit hole.

[0078] Fig.12 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application. Fig.13 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0079] Further, see Figure 1 , and combined with Fig.12 and Fig.13 A reflective film 31 is disposed on one side surface of the beam splitter 3. A reflective film 31 may be plated on one side surface of the existing beam splitter 3. For example, the beam splitting surface of the beam splitter 3 and the reflective film 31 may be at an angle of 45°.

[0080] In step S3, the second retroreflected light beam LB2 may be reflected again on the beam splitting surface of the beam splitter 3 to form a first reflected light beam LR1, and the first reflected light beam LR1 will be emitted to the reflective film 31 and reflected by the reflective film 31. It can be understood that a part of the second retroreflected light beam LB2 will also pass through the beam splitting surface of the beam splitter 3, and after the first reflected light beam LR1 is reflected by the reflective film 31, a part of it will pass through the beam splitting surface, and a part of it will be reflected again on the beam splitting surface.

[0081] In step S4, the position of the beam splitter 3 is adjusted, illustratively, the position and / or angle of the beam splitter 3 is adjusted until the second retroreflected light beam LB2 and the outgoing light beam L0 are collinear. At this time, the first reflected light beam LR1 and the second light beam L2 are collinear, and the first reflected light beam LR1 coincides with the second light beam L2 after being reflected by the reflective film 31. By observing the second light beam L2 and the reflected first reflected light beam LR1, it can be determined whether the second retroreflected light beam LB2 and the outgoing light beam L0 are collinear, thereby determining whether the beam splitter 3, the light source assembly 1, and the reflective assembly 2 are aligned.

[0082] Fig.14 Another optical path schematic diagram of step S4 of the method for aligning a light source assembly and an optical device group according to an embodiment of the present application.

[0083] Further, see Figure 1 , and combined with Fig.14 , step S4 also includes setting the light screen 6 so that the second light beam L2 irradiates the light screen 6 and forms an image, and at this time, the first reflected light beam LR1 reflected by the reflective film 31 will also form an image on the light screen 6. The position and angle of the beam splitter 3 are adjusted, and when the first reflected light beam LR1 coincides with the second light beam L2 after being reflected by the reflective film 31, the image formed by the first reflected light beam LR1 on the light screen 6 coincides with the image formed by the second light beam L2 on the light screen 6. Therefore, by observing whether the image formed by the first reflected light beam LR1 on the light screen 6 coincides with the image formed by the second light beam L2 on the light screen 6, it can be judged whether the first reflected light beam LR1 coincides with the second light beam L2 after being reflected by the reflective film 31, thereby judging whether the outgoing light beam L0 coincides with the second reflected light beam LB2, and further judging whether the beam splitter 3, the light source assembly 1 and the reflective assembly 2 are aligned. Fig.15 Another optical path schematic diagram of step S6 of the method for aligning a light source assembly and an optical device assembly according to an embodiment of the present application.

[0084] Further, see Figure 1 , and combined with Fig.15In step S5, an optical device group 4 is arranged between the beam splitter 3 and the reflective component 2. The light source component 1 emits an outgoing light beam L0, a part of which is transmitted through the beam splitter 3 to form a first light beam L1, and another part is reflected by the beam splitter 3 to form a second light beam L2, and the second light beam L2 forms an image on the light screen 6; the first light beam L1 passes through the optical device group 4 to form a third light beam L3, and the third light beam L3 is reflected by the reflective component 2 to form a third retroreflected light beam LB3, and the third retroreflected light beam LB3 passes through the optical device group 4 to form a fourth light beam L4, and a part of the fourth light beam L4 is reflected by the beam splitter to form a second reflected light beam LR2, and the second reflected light beam LR2 is reflected by the reflective film 31 and forms an image on the light screen 6.

[0085] In step S6, the position and / or angle of the optical device group 4 is adjusted according to the image formed by the second reflected light beam LR2 on the light screen 6 and the image formed by the second light beam L2 on the light screen 6, until the image formed by the second reflected light beam LR2 on the light screen 6 coincides with the image formed by the second light beam L2 on the light screen 6, indicating that the fourth light beam L4 is colinear with the outgoing light beam L0, thereby indicating that the light source assembly 1, the beam splitter 3, the reflection assembly 2 and the optical device group 4 have been aligned.

[0086] Fig.16 A schematic diagram of the structure of an alignment device according to an embodiment of the present application. Fig.17 A schematic diagram of a usage state of an alignment device according to an embodiment of the present application.

[0087] See also Fig.16 and Fig.17 The embodiment of the present application also provides an alignment device for aligning the light source assembly 1 and the optical device group 4.

[0088] The alignment device of the embodiment of the present application includes a beam splitter 3, which is arranged between the light source assembly 1 and the optical device. The beam splitter 3 is used to partially reflect and partially transmit the outgoing light beam L0 emitted by the light source assembly 1 to form a first light beam L1 and a second light beam L2. The first light beam L1 passes through the optical device to form a third light beam L3; a reflective assembly 2, which is arranged on a side of the optical device away from the beam splitter 3. The reflective assembly 2 is used to reflect the third light beam L3 to form a third reflected light beam LB3. The third reflected light beam LB3 passes through the optical device to form a fourth light beam L4. The fourth light beam L4 and the outgoing light beam L0 are used to determine whether the light source assembly 1 and the optical device group 4 are aligned.

[0089] The alignment device and the light source assembly 1 and the optical device group 4 of the embodiment of the present application can be installed and aligned using the light source assembly and optical device group alignment method of the previous embodiment of the present application, which will not be repeated. In this process, it can be regarded as the initial installation process of the alignment device of the embodiment of the present application. In the process of using the light source assembly 1 and the optical device group 4 of the present application, the optical device group 4 and the light source assembly 1 may be misaligned. At this time, the alignment device of the embodiment of the present application can be used to adjust the optical device group 4 so that the light source assembly 1 and the optical device group 4 are aligned again.

[0090] The light source assembly 1 emits an outgoing light beam L0, a portion of which passes through the beam splitter 3 to form a first light beam L1, and a portion of which is reflected by the beam splitter 3 to form a second light beam L2. The first light beam L1 passes through the optical device group 4 to form a third light beam L3. The third light beam L3 is reflected by the reflective assembly 2 to form a third retroreflected light beam LB3. The third retroreflected light beam LB3 passes through the optical device group 4 to form a fourth light beam L4. The position and / or angle of the optical device group 4 relative to the light source assembly 1 is adjusted according to the outgoing light beam L0 and the fourth light beam L4. When the outgoing light beam L0 and the fourth light beam L4 are collinear again, it means that the light source assembly 1 and the optical device group 4 are aligned again.

[0091] Further, see Fig.16 and Fig.17 The reflective component 2 includes a corner cube prism 21, and the corner cube prism 21 includes an incident surface 211 and a cone angle portion 211; the incident surface 211 is used to receive the third light beam L3, and the cone angle portion 211 is used to reflect the third light beam L3 and form a third retroreflected light beam LB3, so that the third light beam L3 and the third retroreflected light beam LB3 are parallel or overlapped.

[0092] When the light source assembly 1 is aligned with the optical device group 4, the third light beam L3 will be incident from the incident surface 211 of the corner cube prism 21, and will be incident on the tip of the cone angle portion 211, and will be reflected at the tip of the cone angle portion 211 to form a third retroreflected light beam LB3. At this time, the third retroreflected light beam LB3 is collinear with the third light beam L3. When the light source assembly 1 is not aligned with the optical device group 4, the third light beam L3 will not be incident on the tip of the cone angle portion 211 after being incident from the incident surface 211, but will be reflected on the side wall of the cone angle portion 211 to form a third retroreflected light beam LB3. At this time, the third retroreflected light beam LB3 is parallel to the third light beam L3.

[0093] Further, see Fig.16 and Fig.17, the alignment device of the embodiment of the present application also includes: an aperture assembly 5, which is arranged between the light source assembly 1 and the beam splitter 3, and can block part of the outgoing light beam L0, so as to limit the diameter of the outgoing light beam L0. When the light source assembly 1 is aligned with the optical device group 4, the fourth light beam L4 is collinear with the outgoing light beam L0, and after the fourth light beam L4 partially passes through the beam splitter 3, it can pass through the aperture assembly 5 again, and form an image on the aperture screen 51, and diffract to form concentric rings. When the light source assembly 1 is not aligned with the optical device group 4, the fourth light beam L4 is not collinear with the outgoing light beam L0, and after part of the fourth light beam L4 passes through the reflector, it will not pass through the aperture, and the position and / or angle of the optical device group 4 can be adjusted by observing whether concentric rings appear on the aperture screen 51, until the fourth light beam L4 is collinear with the outgoing light beam L0, and the light source assembly 1 is aligned with the optical device group 4.

[0094] Further, see Fig.16 and Fig.17 , the beam splitter 3 partially reflects the third reflected light beam LB3 to form a second reflected light beam LR2, and the beam splitter 3 includes a reflective film 31 for reflecting the second reflected light beam LR2. The alignment device of the embodiment of the present application also includes: a light screen 6, which is arranged on one side of the beam splitter component, and the light screen 6 is used for imaging the second light beam L2 and for imaging the second reflected light beam LR2. When the light source component 1 is aligned with the optical device group 4, the fourth light beam L4 is collinear with the outgoing light beam L0, the second light beam L2 is collinear with the second reflected light beam LR2, and the image formed by the second reflected light beam LR2 on the light screen 6 coincides with the image formed by the second light beam L2 on the light screen 6. When the light source component 1 is not aligned with the optical device group 4, the image formed by the second reflected light beam LR2 on the light screen 6 does not coincide with the image formed by the second light beam L2 on the light screen 6, and the position and / or angle of the optical device group 4 can be adjusted according to the relative position of the image formed by the second reflected light beam LR2 on the light screen 6 and the image formed by the second light beam L2 on the light screen 6.

[0095] Fig.18 A schematic diagram of the structure of an electron beam detection device according to an embodiment of the present application.

[0096] See also Fig.18 The embodiment of the present application also provides an electron beam detection device, comprising: an electron beam source 7, used to emit an electron beam D to a sample 9 to be tested; a detection assembly 8, used to detect the electron beam D reflected by the sample 9 to be tested; a light source assembly 1, used to emit an outgoing light beam L0 to the sample 9 to be tested; at the sample 9 to be tested, the irradiation position of the outgoing light beam L0 at least partially overlaps with the irradiation position of the electron beam D; at least one optical device group 4, used to diverge and / or converge the outgoing light beam L0. The light source assembly 1 and the optical device group 4 are aligned by the alignment method of the light source and the optical device of the aforementioned embodiment of the present application.

[0097] The electron beam source 7 emits an electron beam D to the sample 9 under test. The electron beam D is reflected by the sample 9 under test, detected by the detection component 8, and a corresponding image is generated to obtain the parameters of the sample 9 under test, which can be used to determine whether the sample 9 under test has defects or to obtain the size of the microstructure of the sample surface.

[0098] The light source assembly 1 and the optical device group 4 form an auxiliary lighting system for illuminating the sample 9 to be tested. Before performing electron beam detection, the positions of the aligned light source assembly 1 and the optical device group 4 are fixed, and the positions of the electron beam source 7 and the detection assembly 8 are adjusted so that at the sample 9 to be tested, the irradiation position of the outgoing light beam L0 overlaps with the irradiation position of the electron beam D at least partially, so that the light source assembly 1 and the optical device group 4 correspond to the auxiliary lighting system to illuminate the position of the electron beam D when the electron beam detection is performed. In this process, a reflective graticule can be set at the place where the sample to be tested 9 is carried, and the electron beam source 7 and the detection assembly 8 are adjusted according to the reflected light spot of the outgoing light beam L0 on the reflective graticule and the light spot of the electron beam D on the reflective differentiation plate, so that the irradiation position of the first light beam L1 overlaps with the irradiation position of the electron beam D at least partially. After that, the reflective differentiation plate can be removed, and the sample to be tested 9 can be placed at the corresponding position. At this time, at the sample to be tested 9, the irradiation position of the first light beam L1 overlaps with the irradiation position of the electron beam D at least partially.

[0099] Fig.19 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0100] For further information, see Fig.19 The electron beam detection device of the embodiment of the present application also includes: a spectroscope 3, which is arranged between the light source assembly 1 and the optical device, and is used to partially reflect and partially transmit the outgoing light beam L0 emitted by the light source assembly 1 to form a first light beam L1 and a second light beam L2. The first light beam L1 passes through the optical device to form a third light beam L3; a reflection assembly 2, which is arranged on a side of the optical device away from the spectroscope 3. The reflection assembly 2 is used to reflect the third light beam L3 to form a third reflected light beam LB3. The third reflected light beam LB3 passes through the optical device to form a fourth light beam L4. The fourth light beam L4 and the outgoing light beam L0 are used to determine whether the light source assembly 1 is aligned with the optical device group 4.

[0101] In the embodiment of the present application, the method for aligning the light source assembly and the optical device group in the aforementioned embodiment of the present application can be used to align the light source assembly 1 and the optical device group 4. After the light source assembly 1 and the optical device group 4 are aligned, the beam splitter 3 and the reflection assembly 2 can be removed, or the beam splitter 3 and the reflection assembly 2 can be retained. When the beam splitter 3 and the reflection assembly 2 are retained, if the light source assembly 1 and the optical device group 4 are misaligned again, the position and / or angle of the optical device group 4 can be adjusted again by the beam splitter 3 and the reflection assembly 2, so that the light source assembly 1 and the optical device group 4 are aligned again.

[0102] The light source assembly 1 emits an outgoing light beam L0, a portion of which passes through the beam splitter 3 to form a first light beam L1, and a portion of which is reflected by the beam splitter 3 to form a second light beam L2. The first light beam L1 passes through the optical device group 4 to form a third light beam L3. The third light beam L3 is reflected by the reflective assembly 2 to form a third retroreflected light beam LB3. The third retroreflected light beam LB3 passes through the optical device group 4 to form a fourth light beam L4. The position and / or angle of the optical device group 4 relative to the light source assembly 1 is adjusted according to the outgoing light beam L0 and the fourth light beam L4. When the outgoing light beam L0 and the fourth light beam L4 are collinear again, it means that the light source assembly 1 and the optical device group 4 are aligned again.

[0103] Further, see Fig.19 The reflective component 2 includes: a corner cube prism 21, the corner cube prism 21 includes an incident surface 211 and a cone angle portion 211; the incident surface 211 is used to receive the third light beam L3, and the cone angle portion 211 is used to reflect the third light beam L3 and form a third retroreflected light beam LB3, so that the third light beam L3 and the third retroreflected light beam LB3 are parallel or overlapped.

[0104] When the light source assembly 1 is aligned with the optical device group 4, the third light beam L3 will be incident from the incident surface 211 of the corner cube prism 21, and will be incident on the tip of the cone angle portion 211, and will be reflected at the tip of the cone angle portion 211 to form a third retroreflected light beam LB3. At this time, the third retroreflected light beam LB3 is collinear with the third light beam L3. When the light source assembly 1 is not aligned with the optical device group 4, the third light beam L3 will not be incident on the tip of the cone angle portion 211 after being incident from the incident surface 211, but will be reflected on the side wall of the cone angle portion 211 to form a third retroreflected light beam LB3. At this time, the third retroreflected light beam LB3 is parallel to the third light beam L3.

[0105] Fig. 20 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0106] For further information, see Fig. 20, the alignment device of the embodiment of the present application further includes: an aperture assembly 5, which is arranged between the light source assembly 1 and the beam splitter 3, and can block part of the outgoing light beam L0, so as to limit the diameter of the outgoing light beam L0. The aperture assembly 5 can also be used for auxiliary calibration between the light source assembly 1 and the optical device group 4. When the light source assembly 1 is aligned with the optical device group 4, the fourth light beam L4 is collinear with the outgoing light beam L0. After the fourth light beam L4 partially passes through the beam splitter 3, it can pass through the aperture assembly 5 again and form an image on the aperture screen 51, and diffract to form concentric rings. When the light source assembly 1 is not aligned with the optical device group 4, the fourth light beam L4 is not collinear with the outgoing light beam L0. After part of the fourth light beam L4 passes through the reflector, it will not pass through the aperture. It can be observed whether concentric rings appear on the aperture screen 51 to adjust the position and / or angle of the optical device group 4 until the fourth light beam L4 is collinear with the outgoing light beam L0, and the light source assembly 1 is aligned with the optical device group 4.

[0107] Fig.21 Another schematic diagram of the structure of the electron beam detection device according to an embodiment of the present application.

[0108] Further, see Fig.21 The beam splitter 3 can also partially reflect the third reflected light beam LB3 to form a second reflected light beam LR2. The beam splitter 3 includes a reflective film 31. The reflective film 31 can reflect the second reflected light beam LR2. When the second reflected light beam LR2 reflected by the reflective film 31 coincides with the second light beam L2, it means that the fourth light beam L4 is colinear with the outgoing light beam L0, and it can be considered that the light source assembly 1 is aligned with the optical device group 4.

[0109] Further, see Fig.21 , the alignment device of the embodiment of the present application further includes a light screen 6. The light screen 6 is arranged on one side of the beam splitter 3 perpendicular to the axial direction of the outgoing light beam L0, and the second reflected light beam LR2 reflected by the reflective film 31 and the second light beam L2 can both be imaged on the light screen 6. By judging whether the image of the second reflected light beam LR2 and the image of the second light beam L2 are overlapped, it is judged whether the second reflected light beam LR2 reflected by the reflective film 31 is overlapped with the second light beam L2, thereby judging whether the fourth light beam L4 is collinear with the outgoing light beam L0, and further judging whether the light source assembly 1 and the optical device group 4 are aligned.

[0110] Further, see Fig.21 The optical device group 4 includes at least one transmission mirror 41, and the transmission mirror 41 is used to diverge and / or converge the outgoing light beam L0. That is, the optical device group 4 includes at least one convex lens and / or at least one concave lens, which will change the divergence degree of the light beam.

[0111] In summary, the embodiment of the present application provides a method and device for aligning a light source assembly and an optical device group. In the method for aligning a light source assembly and an optical device group, an outgoing light beam is emitted by the light source assembly, and a reflective assembly is arranged so that the first reflected light beam reflected by the reflective assembly coincides with the outgoing light beam; a beam splitter is arranged, and a first light beam and a second light beam are formed by the beam splitter, and the first light beam is reflected by the reflective assembly to form a second reflected light beam, and the second reflected light beam is collinear with the outgoing light beam; an optical device group is arranged, and the first light beam passes through the optical device group to form a third light beam, and the third light beam is reflected to the optical device group through the reflective assembly to form a third reflected light beam, and the third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam is collinear with the outgoing light beam, indicating that the light source assembly and the optical device group have been aligned. The method for aligning a light source assembly and an optical device group of the embodiment of the present application can omit the imaging device, thereby simplifying the alignment process of the light source and the optical device, and at the same time, can improve the alignment efficiency of the light source and the optical device, and reduce the cost of aligning the light source and the optical device.

[0112] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for aligning a light source assembly and an optical device assembly, characterized in that: The light source assembly has a light exit hole, and the alignment method comprises: Setting and adjusting the reflective component so that the outgoing light beam emitted by the light source component is reflected back through the reflective component to form a first reflected light beam, and the first reflected light beam is emitted into the light exit hole; A beam splitter is arranged and adjusted between the light source assembly and the reflective assembly, so that the outgoing light beam passes through the beam splitter to form a first light beam and a second light beam, the first light beam is reflected back through the reflective assembly to form a second reflected light beam, and the second reflected light beam is collinear with the outgoing light beam; An optical device group is arranged and adjusted between the beam splitter and the reflective component, so that the first light beam passes through the optical device group to form a third light beam, the third light beam is reflected back to the optical device group through the reflective component to form a third reflected light beam, the third reflected light beam passes through the optical device group to form a fourth light beam, and the fourth light beam is collinear with the outgoing light beam.

2. The method for aligning a light source assembly and an optical device assembly according to claim 1, characterized in that: After the setting and adjusting of the reflective component and before the setting and adjusting of the beam splitter, the method further includes: An aperture assembly is arranged between the light source assembly and the reflection assembly, and the aperture assembly includes an aperture screen and an aperture hole; The position and / or angle of the aperture assembly is adjusted so that part of the outgoing light beam passes through the aperture hole, and the first retroreflected light beam passes through the aperture hole, and is imaged on the aperture screen to obtain diffraction concentric rings.

3. The method for aligning a light source assembly and an optical device assembly according to claim 1, characterized in that: The reflective component includes a corner cube prism; The setting and adjusting of the reflection component comprises: The position and / or angle of the corner cube prism is adjusted so that the outgoing light beam is reflected back through the reflective component to form a first reflected light beam, and the first reflected light beam is emitted into the light exit hole.

4. The method for aligning a light source assembly and an optical device assembly according to claim 1, characterized in that: A reflective film is provided on one side surface of the beam splitter; The step of setting and adjusting the beam splitter comprises: Adjust the position and / or angle of the beam splitter so that the outgoing light beam passes through the beam splitter to form a first light beam and a second light beam, the first light beam is reflected back through the reflective component to form a second reflected light beam, the second reflected light beam is reflected through the beam splitter to form a first reflected light beam, and the first reflected light beam coincides with the second light beam after being reflected through the reflective film, indicating that the second reflected light beam is collinear with the outgoing light beam.

5. The method for aligning a light source assembly and an optical device assembly according to claim 4, characterized in that: The second retroreflected light beam is collinear with the outgoing light beam, further comprising: A light screen is arranged on one side of the beam splitter perpendicular to the optical axis direction of the outgoing light beam, so that the first reflected light beam and the second light beam reflected by the reflective film are imaged on the light screen, and the image of the first reflected light beam on the light screen coincides with the image of the second light beam on the light screen, indicating that the second reflected light beam is collinear with the outgoing light beam.

6. The method for aligning a light source assembly and an optical device assembly according to claim 5, characterized in that: The setting and adjusting of the optical device group includes: An optical device group is arranged between the beam splitter and the reflection component, and the position and angle of the optical device group are adjusted so that the first light beam passes through the optical device group to form a third light beam, the third light beam is reflected back to the optical device group through the reflection component to form a third reflected light beam, the third reflected light beam passes through the optical device group to form a fourth light beam, the fourth light beam is reflected by the beam splitter to form a second reflected light beam, the second reflected light beam is reflected by the reflection film and is imaged on the light screen, and the image formed by the second reflected light beam on the light screen coincides with the image formed by the second light beam on the light screen.

7. An alignment device, characterized in that: The alignment device is used for aligning the light source assembly with the optical device group; the alignment device comprises: a beam splitter, disposed between the light source assembly and the optical device group, the beam splitter being used to partially reflect and partially transmit an outgoing light beam emitted by the light source assembly to form a first light beam and a second light beam, the first light beam passing through the optical device group to form a third light beam; A reflective component is arranged on a side of the optical device group away from the beam splitter, and the reflective component is used to reflect the third light beam to form a third reflected light beam. The third reflected light beam passes through the optical device group to form a fourth light beam. The fourth light beam and the outgoing light beam are used to determine whether the light source component is aligned with the optical device group.

8. The alignment device according to claim 7, characterized in that The reflective component includes a corner cube prism, which includes an incident surface and a cone angle portion; the incident surface is used to receive the third light beam, and the cone angle portion is used to reflect the third light beam and form the third retroreflected light beam, so that the third light beam and the third retroreflected light beam are parallel or overlapped.

9. The alignment device according to claim 7, characterized in that: Also includes: The aperture assembly is arranged between the light source assembly and the beam splitter, and is used to limit the diameter of the emergent light beam and to assist in the calibration of the light source assembly and the optical device group.

10. The alignment device according to claim 7, characterized in that The beam splitter partially reflects the third retroreflected light beam to form a second reflected light beam, and the beam splitter includes a reflective film, and the reflective film is used to reflect the second reflected light beam; The alignment device further includes: a light screen, which is arranged on one side of the beam splitter, and the light screen is used for imaging the second light beam and for imaging the second reflected light beam after being reflected by the reflective film.

Images