Ultra-high vacuum electrodynamic four-blade slit device

Abstract

The application discloses a kind of high vacuum electric four-knife slit devices, including being arranged in the inside of high vacuum cavity two first blades and two second blades, first slit is formed between two first blades, second slit perpendicular to first slit is formed between two second blades, synchrotron radiation beam enters cavity from one through hole on cavity, respectively pass through first slit and second slit, thereby by four blades around the size of synchrotron radiation beam that slit is restricted, finally from another through hole on cavity, four blades are independently linear one-dimensional motion in its restriction direction, realize the opening and closing adjustment of first slit and second slit, can be adjusted from up and down, left and right, beam line size is adjusted, adjustment is convenient, and adjustment precision is high, assembly precision is high, stability is good, meet the use requirement of beam line.

Description

Technical Field

[0001] This invention belongs to the field of optical experimental equipment technology, and relates to a four-blade slit, specifically a high-vacuum electric four-blade slit device. Background Technology

[0002] X-ray diffraction is an important method for determining protein crystal structures, and the high throughput and good coherence of synchrotron radiation sources provide the material basis for the development of high-resolution and high-yield X-ray interferometric lithography technology. A synchrotron radiation facility mainly consists of a storage ring, a beamline, and experimental stations. The electron storage ring is the main body and core of the synchrotron radiation source, and its performance directly determines the quality of the synchrotron radiation source. To ensure that users receive highly stable synchrotron radiation light in space, the stability of the electron beam trajectory needs to be controlled at the micrometer level.

[0003] A large number of precision slits are required in beamlines to limit the beam angle, block stray light, and improve energy resolution. Typically, a four-slit is used at a certain distance from the light source to define the horizontal and vertical receiving angles of the beamline, eliminating scattered light, ensuring spatial coherence and beam quality, and allowing the size of the opening to be adjusted as needed. As a crucial component of the beamline, the slit's main functions are to limit the beam aperture, improve energy resolution, protect downstream optical components, and define secondary light sources. For slits used in ultra-high vacuum environments, issues such as high precision and high stability need to be addressed. The slit's performance includes the straightness, parallelism, and repeatability of the blade movement. Ensuring these properties are successfully achieved in ultra-high vacuum environments is a problem that needs to be solved. Summary of the Invention

[0004] To address the technical problems existing in the background art, this invention proposes an ultra-high vacuum electric four-blade slit device, which can adjust the size of the beamline from top to bottom and left to right. It is convenient to adjust, has high adjustment accuracy, high assembly precision, and good stability, thus meeting the requirements for the use of the beamline.

[0005] The objective of this invention can be achieved through the following technical solutions:

[0006] A high-vacuum electric four-blade slit device includes: a high-vacuum cavity, two first blades disposed inside the cavity, and two second blades disposed on one side of the two first blades. The two first blades are arranged opposite each other, forming a first slit between them to constrain a light beam passing through the first slit from a first direction. The two second blades are arranged opposite each other, forming a second slit perpendicular to the first slit between them to constrain a light beam passing through the second slit from a second direction. Through holes are provided on the two opposite sidewalls of the cavity. The light beam enters the cavity through one through hole, passes through the first slit and the second slit respectively, and exits the cavity through the other through hole.

[0007] Furthermore, two first blades are respectively mounted on two oppositely arranged first moving mechanisms, and the two first moving mechanisms respectively drive the two first blades to move relative to each other along a first direction to adjust the opening size of the first slit. Two second blades are respectively mounted on two oppositely arranged second moving mechanisms, and the two second moving mechanisms respectively drive the two second blades to move relative to each other along a second direction to adjust the opening size of the second slit.

[0008] Furthermore, the first moving mechanism includes: a linear guide rail, a linear displacement stage, a lead screw, a bearing housing, and a stepper motor. The linear guide rail is arranged in the cavity along a first direction, the linear displacement stage is slidably connected to the linear guide rail along the first direction, the first blade is fixedly installed on the linear displacement stage, the lead screw is arranged parallel to the linear guide rail, the lead screw passes through the linear displacement stage along the first direction and is threadedly connected to the linear displacement stage, one end of the lead screw is rotatably connected to the bearing housing fixedly installed in the cavity, and the other end is driven by the stepper motor.

[0009] Furthermore, a stepper motor is installed outside the cavity, and the stepper motor is connected to the lead screw drive through a magnetic coupling assembly to drive the lead screw to rotate.

[0010] Furthermore, the magnetic coupling assembly includes an outer magnet and an inner magnet. The outer magnet is disposed outside the cavity, and the inner magnet is disposed inside the cavity. The outer magnet is connected to the output shaft of the stepper motor to transmit motor torque to the inner magnet through the magnetic field. The inner magnet is connected to the lead screw through a coupling to drive the lead screw to rotate.

[0011] Furthermore, the inner magnet is embedded in the mounting hole on the side wall of the cavity, and a sealing plate is provided between the inner magnet and the outer magnet. The rotational torque of the magnet is transmitted through the sealing plate. The sealing plate is installed on the side wall of the cavity to achieve a vacuum seal, and the inner magnet is sealed to the cavity through a rubber ring.

[0012] Furthermore, the first blade and the second blade have the same structure, and the second moving mechanism has the same structure as the first moving mechanism.

[0013] Furthermore, the linear displacement stage includes: a slider, a slider seat, and a nut. The slider is slidably connected to the linear guide along a first direction, the slider seat is fixedly connected to the slider, the nut is fixedly connected to the slider seat, the first blade is mounted on the slider seat, and the nut is threadedly connected to the lead screw.

[0014] Furthermore, each of the two first moving mechanisms is provided with a first upper limit switch and a first lower limit switch on one side to limit the extreme positions of the movement of the two first blades in the first direction, and each of the two second moving mechanisms is provided with a second upper limit switch and a second lower limit switch on one side to limit the extreme positions of the movement of the two second blades in the second direction.

[0015] Furthermore, the cavity has tubes on its two opposing sidewalls that communicate with the through holes. One end of the tube is sealed to the cavity, and the other end is provided with a sealing flange to seal the cavity to the light source and downstream optical components, thus maintaining an ultra-high vacuum environment.

[0016] The beneficial effects of this invention are as follows: The ultra-high vacuum electric four-blade slit device provided in this application includes two first blades and two second blades disposed inside an ultra-high vacuum cavity. A first slit is formed between the two first blades, and a second slit perpendicular to the first slit is formed between the two second blades. A synchrotron radiation beam enters the cavity through a through-hole on the cavity, passes through the first slit and the second slit respectively, thereby constraining the size of the synchrotron radiation beam through the gap formed by the four blades. Finally, the beam exits the cavity through another through-hole on the cavity. The four blades independently perform linear one-dimensional motion in their constraining directions, realizing the opening and closing adjustment of the first slit and the second slit. The beam size can be adjusted from up and down and left and right. The adjustment is convenient, accurate, and stable, meeting the requirements for beam usage. Each blade is driven by a motor installed outside the cavity and driven by magnetic coupling. The structure is simple, reducing the volume of the cavity. It has high sealing performance. The two opposing side walls of the cavity are provided with tubes and sealing flanges communicating with the through-holes, sealing the cavity with the light source and downstream optical components, maintaining the ultra-high vacuum environment of the device. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of the present invention.

[0018] Figure 2 This is a side view of the present invention.

[0019] Figure 3 This is a front view schematic diagram of the present invention.

[0020] Figure 4 for Figure 3 Enlarged schematic diagram of the through hole.

[0021] Figure 5 This is a schematic diagram of the first moving mechanism of the present invention.

[0022] Figure 6 This is a schematic diagram of the second moving mechanism of the present invention.

[0023] Figure 7 This is a schematic diagram of the installation of the linear displacement stage of the present invention.

[0024] Figure 8 This is a schematic diagram of the installation of the magnetic coupling component of the present invention. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] like Figure 1-4 As shown, the present invention provides an ultra-high vacuum electric four-blade slit device, comprising: an ultra-high vacuum cavity 1, two first blades 21 disposed inside the cavity 1, and two second blades 22 disposed on one side of the two first blades 21. The two first blades 21 are arranged opposite to each other, forming a first slit between the two first blades 21 to constrain the beam passing through the first slit from a first direction (i.e., constrain the width of the beam in the first direction). The two second blades 22 are arranged opposite to each other, forming a second slit between the two second blades 22 perpendicular to the first slit to constrain the beam passing through the second slit from a second direction (i.e., constrain the width of the beam in the second direction). Through holes 11 are provided on the two opposite sidewalls of the cavity 1. The through holes 11 are square through holes with a size of 10*10mm. The synchrotron radiation beam enters the cavity 1 through one through hole 11, passes through the first slit and the second slit respectively, and exits the cavity 1 through another through hole 11. The length and width of the synchrotron radiation beam are constrained by the square slit formed by the four blades of the four-blade slit. The cavity 1 has tubes 8 on its two opposite side walls that communicate with the through holes 11. One end of the tube 8 is sealed to the cavity 1, and the other end is provided with a sealing flange 9 to seal the cavity 1 with the light source and downstream optical components, thus maintaining the ultra-high vacuum environment of the device.

[0027] Two first blades 21 are respectively mounted on two opposing first moving mechanisms 3. The two first moving mechanisms 3 drive the two first blades 21 to move relative to each other along a first direction to adjust the opening size of the first slit. The two first blades 21 move symmetrically on both sides of the through hole 11. Two second blades 22 are respectively mounted on two opposing second moving mechanisms 4. The two second moving mechanisms 4 drive the two second blades 22 to move relative to each other along a second direction to adjust the opening size of the second slit. The two second blades 22 move symmetrically on both sides of the through hole 11. Thus, the four blades independently perform linear one-dimensional movements in their constraint directions, realizing the opening and closing adjustment of the first and second slits. The beamline size can be adjusted from up and down and left and right, which is convenient, accurate, and stable, meeting the requirements for beamline use. Each of the two first moving mechanisms 3 is provided with a first upper limit switch 71 and a first lower limit switch 72 on one side to limit the extreme positions of the two first blades 21 in the first direction. Each of the two second moving mechanisms 4 is provided with a second upper limit switch 73 and a second lower limit switch 74 on one side to limit the extreme positions of the two second blades 22 in the second direction. The four moving mechanisms drive one blade to make linear one-dimensional motion in the direction they control, and move linearly within the stroke range specified by the upper and lower limit switches, so that the opening and closing strokes of the first slit and the second slit are both greater than ±5mm. The position of the limit switch can be finely adjusted. The vacuum cable of each limit switch is fixed in the cavity 1 with a copper sheet and finally leads out of the cavity 1 through the DB15 feed connector 10 sealed on one side of the cavity 1.

[0028] like Figure 5-6 As shown, the first moving mechanism 3 includes: a linear guide rail 31, a linear displacement stage 32, a lead screw 33, a bearing seat 34, and a stepper motor 35. The linear guide rail 31 is arranged in the cavity 1 along a first direction. The linear displacement stage 32 is slidably connected to the linear guide rail 31 along the first direction. The first blade 21 is fixedly installed on the linear displacement stage 32. The lead screw 33 is arranged parallel to the linear guide rail 31. The lead screw 33 passes through the linear displacement stage 32 along the first direction and is threadedly connected to the linear displacement stage 32. One end of the lead screw 33 is rotatably connected to the bearing seat 34 fixedly installed in the cavity 1, and the other end is driven by the stepper motor 35. When the stepper motor 35 drives the lead screw 33 to rotate in the bearing seat 34, the linear displacement stage 32 cannot follow the lead screw 33's rotation due to the restriction of the linear guide rail 31. Since the lead screw 33 is threadedly connected to the linear displacement stage 32, the linear displacement stage 32 slides along the linear guide rail 31 on the lead screw 33, driving the first blade 21 to adjust the opening and closing size of the first slit in the first direction. Figure 7As shown, the linear displacement stage 32 includes: a slider 321, a slider seat 322, and a nut 323. The slider 321 is slidably connected to the linear guide rail 31 along the first direction. The slider seat 322 is fixedly connected to the slider 321. The nut 323 is fixedly connected to the slider seat 322. The first blade 21 is mounted on the slider seat 322. The nut 323 is threadedly connected to the lead screw 33.

[0029] Stepper motor 35 is mounted outside cavity 1. Stepper motor 35 is driven by lead screw 33 via magnetic coupling assembly 36, driving lead screw 33 to rotate. Each blade is driven by one stepper motor 35, resulting in a simple structure, reduced volume of cavity 1, and high sealing performance. Figure 8 As shown, the magnetic coupling assembly 36 includes an outer magnet 361 and an inner magnet 362. The outer magnet 361 is disposed outside the cavity 1, and the inner magnet 362 is disposed inside the cavity 1. The outer magnet 361 is connected to the output shaft of the stepper motor 35 to transmit motor torque to the inner magnet 362 through the magnetic field. The inner magnet 362 is connected to the lead screw 33 through a coupling 37 to drive the lead screw 33 to rotate. The inner magnet 362 is embedded in a mounting hole on the side wall of the cavity 1. A sealing plate 5 is provided between the inner magnet 362 and the outer magnet 361 to transmit the rotational torque of the magnet. The sealing plate 5 is sealed on the side wall of the cavity 1 to achieve a vacuum seal. The inner magnet 362 is sealed to the cavity 1 by a rubber ring 6.

[0030] An encoder 38 is installed on one side of the stepper motor 35 for control, which can meet the 1µm / step resolution. The first blade 21 and the second blade 22 have the same structure and both use pure tungsten blades. The second moving mechanism 4 has the same structure as the first moving mechanism 3.

[0031] The above description is merely an example and illustration of the structure of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described, or use similar methods to replace them, as long as they do not deviate from the structure of the invention or exceed the scope defined in the claims, all of which should fall within the protection scope of the present invention.

Claims

1. A high-vacuum electric four-blade slit device, characterized in that, include: The ultra-high vacuum chamber (1) consists of two first blades (21) disposed inside the chamber (1) and two second blades (22) disposed on one side of the two first blades (21). The two first blades (21) are arranged opposite to each other, forming a first slit between the two first blades (21) to constrain the light beam passing through the first slit from a first direction. The two second blades (22) are arranged opposite to each other, forming a second slit perpendicular to the first slit between the two second blades (22) to constrain the light beam passing through the second slit from a second direction. Through holes (11) are provided on the two opposite side walls of the chamber (1). The light beam enters the chamber (1) through one through hole (11), passes through the first slit and the second slit respectively, and exits the chamber (1) through another through hole (11). Two first blades (21) are respectively mounted on two oppositely arranged first moving mechanisms (3). The two first moving mechanisms (3) respectively drive the two first blades (21) to move relative to each other in a first direction to adjust the opening size of the first slit. Two second blades (22) are respectively mounted on two oppositely arranged second moving mechanisms (4). The two second moving mechanisms (4) respectively drive the two second blades (22) to move relative to each other in a second direction to adjust the opening size of the second slit. The first moving mechanism (3) includes: a linear guide rail (31), a linear displacement stage (32), a lead screw (33), a bearing seat (34), and a stepper motor (35). The linear guide rail (31) is arranged in the cavity (1) along the first direction. The linear displacement stage (32) is slidably connected to the linear guide rail (31) along the first direction. The first blade (21) is fixedly installed on the linear displacement stage (32). The lead screw (33) is arranged parallel to the linear guide rail (31). The lead screw (33) passes through the linear displacement stage (32) along the first direction and is threadedly connected to the linear displacement stage (32). One end of the lead screw (33) is rotatably connected to the bearing seat (34) fixedly installed in the cavity (1), and the other end is driven connected to the stepper motor (35). The stepper motor (35) is installed outside the cavity (1). The stepper motor (35) is driven connected to the lead screw (33) through a magnetic coupling assembly (36) to drive the lead screw (33) to rotate. The magnetic coupling assembly (36) includes an outer magnet (361) and an inner magnet (362). The outer magnet (361) is disposed outside the cavity (1), and the inner magnet (362) is disposed inside the cavity (1). The outer magnet (361) is connected to the output shaft of the stepper motor (35) to transmit motor torque to the inner magnet (362) through the magnetic field. The inner magnet (362) is connected to the lead screw (33) through a coupling (37) to drive the lead screw (33) to rotate. The inner magnet (362) is embedded in the mounting hole on the side wall of the cavity (1). A sealing plate (5) is provided between the inner magnet (362) and the outer magnet (361) to transmit the rotational torque of the magnet through the sealing plate (5). The sealing plate (5) is sealed on the side wall of the cavity (1) to achieve vacuum sealing. The inner magnet (362) is sealed to the cavity (1) through a rubber ring (6).

2. The four-blade slit device according to claim 1, characterized in that, The first blade (21) and the second blade (22) have the same structure, and the second moving mechanism (4) has the same structure as the first moving mechanism (3).

3. The four-blade slit device according to claim 1, characterized in that, The linear displacement stage (32) includes: a slider (321), a slider seat (322), and a nut (323). The slider (321) is slidably connected to the linear guide rail (31) along the first direction. The slider seat (322) is fixedly connected to the slider (321). The nut (323) is fixedly connected to the slider seat (322). The first blade (21) is mounted on the slider seat (322). The nut (323) is threadedly connected to the lead screw (33).

4. The four-blade slit device according to claim 1, characterized in that, Each of the two first moving mechanisms (3) is provided with a first upper limit switch (71) and a first lower limit switch (72) on one side to limit the two first blades (21) to move to the limit position in the first direction, respectively. Each of the two second moving mechanisms (4) is provided with a second upper limit switch (73) and a second lower limit switch (74) on one side to limit the two second blades (22) to move to the limit position in the second direction, respectively.

5. The four-blade slit device according to claim 1, characterized in that, The cavity (1) has a pipe (8) on each of its two opposite side walls that communicates with the through hole (11). One end of the pipe (8) is sealed to the cavity (1), and the other end is provided with a sealing flange (9).

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