A swing arm shrapnel adjustment method and device

Abstract

The present invention discloses a method and device for adjusting swing arm shrapnel, which relates to the technical field of distance measurement. A method for adjusting swing arm shrapnel includes the following steps: S1: Measuring a swing arm standard block to define the standard symmetric position of the swing arm; S2: Installing the swing arm to be adjusted, measuring and recording the effective movement distances of multiple motors and the corresponding shrapnel deformation amounts to obtain an adjustment deformation table; S3: Installing the next swing arm to be adjusted and measuring the position of the swing arm; S4: If it is not within the range, finding the corresponding shrapnel deformation amount interval in the adjustment deformation table and calculating the distance that the motor needs to move for adjustment, and the motor moves to adjust the shrapnel; S5: Measuring the position of the swing arm, if it is not within the range, repeating step S4 until it is within the range. The method for adjusting swing arm shrapnel of the present invention can adjust the shrapnel.

Description

Technical Field

[0001] The present invention relates to the technical field of distance measurement, and particularly relates to a method and device for adjusting a swing arm elastic sheet. Background Art

[0002] In the wafer sorting of semiconductor devices, during the sorting process, a sorting machine will use a swing arm suction nozzle mechanism to transfer die. In order to improve the die transfer speed, a swing arm suction nozzle mechanism with a double swing arm structure is used for operation.

[0003] Specifically, the swing arm suction nozzle mechanism with a double swing arm structure includes a base, two swing arm assemblies symmetrically arranged on the base. The swing arm assembly includes a swing arm, a suction nozzle, and an elastic sheet. The swing arm is erected, the elastic sheet is used to connect the bottom end of the swing arm and the base, the suction nozzle is arranged at the top end of the swing arm, a spring is arranged between the swing arm and the base, and the spring is used to drive the swing arm to swing away from the base. A first screw and a first nut are also arranged on the base, and the first screw and the first nut cooperate to adjust the elastic force of the spring. A second screw and a second nut are also arranged between the swing arm and the base, the second screw and the second nut are located above the spring, the second screw is used to limit the position of the swing arm, and the second nut is used to adjust the limiting position of the second screw on the swing arm.

[0004] When the suction nozzle is sucking a wafer die, the die has a force on the suction nozzle, and this force also drives the suction nozzle to move in the reverse direction, so that the swing arm and the second screw are separated. This force is the resultant force under the combined action of the elastic sheet and the spring.

[0005] In order to obtain the adjustment consistency of both sides of the double swing arm, that is, when the compression amounts of the springs on both sides are adjusted to be the same, during separation, the separation forces of the suction nozzles on both sides are the same. It can be understood that when the compression amounts of the springs on both sides are adjusted to be the same and the distances between the suction nozzles on both sides and the central axis of symmetry are the same during separation, the forces of the suction nozzles on both sides are the same.

[0006] However, during the actual assembly process, due to factors such as machining tolerances and elastic sheet deformation, the position states of the suction nozzles when the springs and the second screws are not installed are not at the symmetrical positions of the two suction nozzles. When the second screw and the second nut cooperate to adjust the suction nozzles on the swing arm to the symmetrical positions of the two suction nozzles, it will lead to a situation where the spring compression amounts are different when the separation forces of the two suction nozzles are the same. Therefore, the consistency of the forces when the two suction nozzles suck wafer dice cannot be ensured. Summary of the Invention

[0007] The present invention aims to at least solve one of the technical problems existing in the prior art. For this purpose, the present invention provides a method for adjusting a swing arm elastic sheet, which can adjust the elastic sheet, make up for the problems of machining tolerances or elastic sheet deformation, ensure that when the two suction nozzles are at symmetrical positions and the separation forces of the two suction nozzles are the same, the spring compression amounts are also the same, and ensure the consistency of the forces when the two suction nozzles suck wafer dice.

[0008] The present invention also provides a swing arm shrapnel adjustment device for implementing the above swing arm shrapnel adjustment method.

[0009] A swing arm shrapnel adjustment method according to the first aspect of the embodiments of the present invention includes the following steps:

[0010] S1: Install the swing arm standard block on the measurement station, measure the swing arm standard block to define the swing arm standard symmetric position , and set the qualified range of the swing arm position as ;

[0011] S2: Install the swing arm to be adjusted on the measurement station, set the single-step spacing of the motor , measure and record the effective movement distances of multiple motors and the corresponding shrapnel deformation amounts to obtain an adjustment deformation table;

[0012] S3: Install the next swing arm to be adjusted on the measurement station, first measure the swing arm position of the swing arm to be adjusted , and judge whether it is within the range of ;

[0013] S4: If is not within the range of , then calculate the shrapnel deformation amount that needs to be adjusted , find the corresponding shrapnel deformation amount interval in the adjustment deformation table and calculate the distance that the motor needs to move for adjustment , and the motor moves to adjust the shrapnel;

[0014] S5: Re-measure the swing arm position of the swing arm to be adjusted after adjusting the shrapnel , and judge whether it is within the range of . If is not within the range of , repeat step S4 until is within the range of , and then adjust the next swing arm.

[0015] A swing arm shrapnel adjustment method according to the first aspect of the embodiments of the present invention has at least the following beneficial effects:

[0016] 1. By installing the swing arm standard block on the measurement station and measuring the swing arm standard block to define the swing arm standard symmetric position , and setting the qualified range of the swing arm position as , It can be understood that the structural design of the swing arm standard block and the swing arm installation method are the same as those of the swing arm to be adjusted. It is an integral metal block, not easily deformed, and the swing arm standard block can ensure the accuracy of the measurement surface through high-precision machining. Therefore, it is beneficial to collect the accurate symmetric position of the swing arm standard. , Furthermore, it makes the standard for subsequent swing arm adjustment more accurate.

[0017] 2. In the present invention, by installing the swing arm to be adjusted on the measurement station and setting the single-step spacing of the motor , measuring and recording the effective movement distances of multiple motors and the corresponding deformation amounts of the elastic pieces , an adjustment deformation table is obtained. It can be understood that using the swing arm to be adjusted to measure the effective movement distances of multiple motors and the corresponding deformation amounts of the elastic pieces, and summarizing the adjustment deformation table enables the data in the adjustment deformation table to provide accurate theoretical adjustment data for subsequent adjustment of the swing arm to be adjusted. Therefore, it is beneficial to accurately adjust the elastic piece, and furthermore, reduce the probability of adjustment errors.

[0018] 3. In the present invention, by setting the next swing arm to be adjusted to be installed on the measurement station, first measure the swing arm position of the swing arm to be adjusted , and judge whether it is within the range; if it is not within the range, then calculate the deformation amount of the elastic piece that needs to be adjusted , find the corresponding elastic piece deformation amount interval in the adjustment deformation table and calculate the distance that the motor needs to move for adjustment , the motor moves to adjust the elastic piece. It can be understood that by measuring the swing arm position of the swing arm to be adjusted , and then after calculating the deformation amount of the elastic piece that needs to be adjusted, it can more accurately find the corresponding elastic piece deformation amount interval in the adjustment deformation table, and then calculate the distance that the motor needs to move for adjustment according to the two end points of the corresponding elastic piece deformation amount interval in the adjustment deformation table . Therefore, the elastic piece can be accurately adjusted, and furthermore, it is beneficial to improve the adjustment efficiency.

[0019] 4. In the present invention, by re-measuring the swing arm position of the swing arm to be adjusted after adjusting the elastic piece , and judge whether it is within the range. If it is not within the range, repeat step S4 until it is within the range, and then proceed to adjust the next swing arm. It can be understood that by re-measuring the swing arm position of the swing arm to be adjusted after adjusting the elastic piece , which is beneficial to confirm the adjustment effect and make the adjustment quality better. If it is still unqualified after adjustment, repeat step S4 for adjustment. Thus, ensure the adjustment is qualified. Furthermore, the present invention can adjust the shrapnel to compensate for the machining tolerance or the problem of shrapnel deformation, ensure that the spring compression amounts are the same when the two suction nozzles are in symmetric positions and the separation forces of the two suction nozzles are the same, and guarantee the consistency of the acting forces when the two suction nozzles pick up the wafer chips.

[0020] According to some embodiments of the present invention, measuring and recording the effective movement distances of multiple motors and the corresponding shrapnel deformation amounts , to obtain an adjustment deformation table, including the following steps:

[0021] Let be the number of steps for the motor to drive the adjustment block to push the swing arm; be the effective movement distance of the motor, ; be the position of the adjustment block when the adjustment block does not contact the swing arm; be the position of the adjustment block when the motor drives the adjustment block to move to contact the swing arm; be from the adjustment block position to the effective movement distance of the adjustment block pushing the swing arm, and the displacement of the th step is ; be the position of the swing arm after and the adjustment block returns to ; be the shrapnel deformation amount after , ;

[0022] The motor drives the adjustment block to push the swing arm, measure the swing arm positions from step 0 to to , and calculate the shrapnel deformation amounts corresponding to each different number of steps to obtain an adjustment deformation table.

[0023] According to some embodiments of the present invention, when the swing arm moves outward, the number of steps is , and the displacement of the adjustment block at the th step is ; when the swing arm moves inward, the number of steps is , and the displacement of the th step is ;

[0024] The motor drives the adjustment block to push the swing arm outward, measure the swing arm positions from step 0 to to , and calculate the deformation amount of the shrapnel corresponding to each different number of steps , to obtain a forward adjustment deformation table;

[0025] The motor drives the adjustment block to push the swing arm inward, and measures the swing arm positions when the number of steps is from 0 to to to , and calculate the deformation amount of the shrapnel corresponding to each different number of steps , to obtain a reverse adjustment deformation table.

[0026] According to some embodiments of the present invention, the number of steps, the effective movement distance, and the shrapnel deformation amount in the forward adjustment deformation table and the reverse adjustment deformation table are combined to obtain and save the adjustment deformation table.

[0027] According to some embodiments of the present invention, finding the corresponding shrapnel deformation amount interval in the adjustment deformation table and calculating the distance that the motor needs to move for adjustment includes the following steps:

[0028] Find from the adjustment deformation table and , where , ;

[0029] According to the formula , solving can obtain .

[0030] According to some embodiments of the present invention, in step S5, the distance that the motor needs to move for the th adjustment is , the swing arm position is , the shrapnel deformation amount , .

[0031] According to some embodiments of the present invention, in step S3, when it is judged that is within the range of , directly proceed to the adjustment of the next swing arm.

[0032] According to some embodiments of the present invention, in step S1, is the distance between the displacement measuring head and the suction nozzle above the measuring area of the swing arm standard block.

[0033] A swing arm shrapnel adjustment device according to the second aspect of the embodiments of the present invention is used to implement a swing arm shrapnel adjustment method as described in the first aspect of the embodiments of the present invention, and includes:

[0034] A frame having mutually perpendicular X, Y, and Z directions;

[0035] The mounting base is arranged on the frame and has a measurement station for mounting and positioning the swing arm to be adjusted that swings in the Y direction.

[0036] The displacement measuring head is arranged on the frame and is located on one side of the mounting base in the Y direction for measuring the position of the swing arm.

[0037] The adjustment assembly is arranged on the frame and includes an adjustment block and a motor that drives the adjustment block to move in the Y direction. The adjustment block pushes the swing arm to adjust the deformation amount of the elastic sheet.

[0038] The data processing module is used to collect the measurement data of the displacement measuring head, determine the deformation amount of the elastic sheet, and calculate the adjustment movement distance of the motor.

[0039] The control module is used to receive the information from the data processing module and control the motor to adjust the elastic sheet.

[0040] A swing arm elastic sheet adjustment device according to the second aspect embodiment of the present invention has at least the following beneficial effects:

[0041] By setting the mounting frame, displacement measuring head, adjustment assembly, data processing module and control module, the present invention can automatically collect data to construct an adjustment deformation table, and then automatically calculate the adjustment movement distance of the motor during adjustment based on the adjustment deformation table, enabling the swing arm elastic sheet adjustment device to automatically adjust the elastic sheet, compensating for processing tolerances or elastic sheet deformation problems, ensuring that the spring compression amounts are the same when the two suction nozzles are in symmetric positions and the separation forces of the two suction nozzles are the same, and guaranteeing the consistency of the acting forces when the two suction nozzles pick up the wafer core particles.

[0042] According to some embodiments of the present invention, one side of the adjustment block in the X direction has a first opening, and the two side walls of the first opening in the Y direction are respectively in contact with the swing arm to be adjusted to push the swing arm to be adjusted in the positive and negative directions of the Y direction.

[0043] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0044] In order to more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0045] Figure 1 It is a schematic structural diagram of the swing arm suction nozzle mechanism according to the embodiment of the present invention;

[0046] Figure 2 Structural schematic diagram of the swing arm to be adjusted according to an embodiment of the present invention;

[0047] Figure 3 Flow chart of a swing arm shrapnel adjustment method according to an embodiment of the present invention;

[0048] Figure 4 Structural schematic diagram of a swing arm shrapnel adjustment device according to an embodiment of the present invention;

[0049] Figure 5 is Figure 4 shown top view;

[0050] Figure 6 is Figure 4 shown front view.

[0051] Reference numerals: 100 - base, 110 - swing arm assembly, 120 - swing arm, 130 - nozzle, 140 - shrapnel, 150 - spring, 160 - first screw, 170 - first nut, 180 - second screw, 190 - second nut, 200 - swing arm to be adjusted, 210 - frame, 220 - mounting seat, 230 - displacement measuring head, 240 - adjustment assembly, 250 - adjusting block, 260 - motor, 270 - first opening, 280 - lifting frame, 290 - translation frame, 300 - mounting frame, 310 - Z fine tuning knob, 320 - X fine tuning knob. Detailed Description of the Invention

[0052] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0053] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0054] In the description of the present invention, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood not to include the present number, and above, below, within, etc. are understood to include the present number. If the first and second are described, this is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence of the indicated technical features.

[0055] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation, connection, and coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0056] The following Figures 1 - 6 describes a swing arm shrapnel adjustment method and device according to an embodiment of the present invention.

[0057] The present invention aims to provide an embodiment of a swing arm shrapnel adjustment method and device.

[0058] Referring to Figure 1 and Figure 2 , for the swing arm nozzle mechanism with a double swing arm structure, the swing arm nozzle mechanism with a double swing arm structure includes a base 100, two swing arm assemblies 110 symmetrically arranged on the base 100. The swing arm assembly 110 includes a swing arm 120, a nozzle 130, and a shrapnel 140. The swing arm 120 is erected. The shrapnel 140 is used to connect the bottom end of the swing arm 120 and the base 100. The nozzle 130 is arranged at the top end of the swing arm 120. A spring 150 is arranged between the swing arm 120 and the base 100. The spring 150 is used to drive the swing arm 120 to swing away from the base 100. A first screw 160 and a first nut 170 are also arranged on the base 100. The first screw 160 and the first nut 170 cooperate to adjust the elastic force of the spring 150. A second screw 180 and a second nut 190 are also arranged between the swing arm 120 and the base 100. The second screw 180 and the second nut 190 are located above the spring 150. The second screw 180 is used to limit the position of the swing arm 120, and the second nut 190 is used to adjust the limiting position of the second screw 180 on the swing arm 120.

[0059] When the nozzle 130 is sucking a wafer chip, the chip has a force on the nozzle 130, and this force also drives the nozzle 130 to move in the reverse direction, so that the swing arm 120 and the second screw 180 are separated. This force is the resultant force under the combined action of the shrapnel 140 and the spring 150.

[0060] In order to obtain the adjustment consistency on both sides of the double swing arm, that is, when the compression amounts of the springs 150 on both sides are adjusted to be the same, during separation, the separation forces of the nozzles 130 on both sides are the same. It can be understood that when the compression amounts of the springs 150 on both sides are adjusted to be the same and the distances between the nozzles 130 on both sides and the central axis of symmetry are the same during separation, the forces on the nozzles 130 on both sides are the same.

[0061] During the actual assembly process, due to factors such as machining tolerances and the deformation of the elastic piece 140, the position state of the nozzle 130 without installing the spring 150 and the second screw 180 is not at the symmetric position of the two nozzles 130. When the second screw 180 and the second nut 190 are used to adjust the nozzle 130 on the swing arm 120 to the symmetric position of the two nozzles 130, it will result in different compression amounts of the spring 150 when the separation forces of the two nozzles 130 are the same. Therefore, the consistency of the acting forces when the two nozzles 130 pick up the wafer chips cannot be guaranteed.

[0062] To ensure the consistency of the acting forces when the two nozzles 130 of the swing arm nozzle mechanism with a double swing arm structure pick up the wafer chips, it is necessary to adjust the elastic piece 140 to compensate for the machining tolerances or the deformation of the elastic piece 140, and ensure that when the two nozzles 130 are at the symmetric position and the separation forces of the two nozzles 130 are the same, the compression amounts of the spring 150 are also the same, so as to ensure the consistency of the acting forces when the two nozzles 130 pick up the wafer chips.

[0063] It should be noted that the swing arm 200 to be adjusted is the state of the swing arm nozzle mechanism without installing the spring 150, the second screw 180 and the second nut 190.

[0064] Embodiment 1

[0065] This embodiment provides a method for adjusting the swing arm elastic piece.

[0066] Referring to Figure 3 , a method for adjusting the swing arm elastic piece according to the first aspect embodiment of the present invention includes the following steps:

[0067] S1: Install the swing arm standard block on the measurement station, measure the swing arm standard block to define the standard symmetric position of the swing arm 120 , and set the qualified range of the swing arm 120 position as .

[0068] It can be understood that the structural design of the swing arm standard block and the installation method of the swing arm 120 are the same as those of the swing arm 200 to be adjusted. The swing arm standard block is a whole metal block, which is not easy to deform, and the swing arm standard block can ensure the accuracy of the measurement surface through high-precision machining. Therefore, it is beneficial to collect the accurate standard symmetric position of the swing arm , and further make the standard for subsequent adjustment of the swing arm 120 more accurate.

[0069] S2: Install the swing arm 200 to be adjusted on the measurement station, set the single-step spacing of the motor 260 , measure and record the effective movement distances of multiple motors 260 and the corresponding elastic piece deformation amounts , and obtain an adjustment deformation table.

[0070] It is understandable that the to-be-adjusted swing arm 200 is used to measure the effective movement distances of multiple motors 260 and the corresponding deflections of the elastic pieces, and a regulation deflection table is summarized, so that the data in the regulation deflection table can provide accurate theoretical regulation data for subsequent adjustment of the to-be-adjusted swing arm 200. Thus, it is beneficial to accurately adjust the elastic piece 140, and further reduce the probability of adjustment errors.

[0071] S3: Install the next to-be-adjusted swing arm 200 at the measurement station, and first measure the position of the swing arm 120 of the to-be-adjusted swing arm 200 , and judge whether it is within the range.

[0072] S4: If it is not within the range, then calculate the deflection of the elastic piece that needs to be adjusted , find the corresponding elastic piece deflection range in the regulation deflection table and calculate the distance that the motor 260 needs to move for regulation , and the motor 260 moves to adjust the elastic piece 140.

[0073] It is understandable that after measuring the position of the swing arm 120 of the to-be-adjusted swing arm 200 , and then calculating the deflection of the elastic piece 140 that needs to be adjusted, it is possible to relatively accurately find the corresponding elastic piece deflection range in the regulation deflection table, and then calculate the distance that the motor 260 needs to move for regulation according to the two end points of the corresponding elastic piece deflection range in the regulation deflection table , thus, it is possible to accurately adjust the elastic piece 140, and further, it is beneficial to improve the adjustment efficiency.

[0074] S5: Re-measure the position of the swing arm 120 of the to-be-adjusted swing arm 200 after adjusting the elastic piece 140 , and judge whether it is within the range. If it is not within the range, repeat step S4 until it is within the range, and then proceed to adjust the next swing arm 120.

[0075] It is understandable that after re-measuring the position of the swing arm 120 of the to-be-adjusted swing arm 200 after adjusting the elastic piece 140 , which is beneficial to confirm the adjustment effect and make the adjustment quality better. If it is still unqualified after adjustment, repeat step S4 for adjustment. Thus, it is ensured that the adjustment is qualified. Furthermore, the present invention can adjust the elastic piece 140 to make up for the machining tolerance or the deformation of the elastic piece 140, ensure that the compression amount of the spring 150 is the same when the two suction nozzles 130 are in symmetric positions and the separation forces of the two suction nozzles 130 are the same, and guarantee the consistency of the acting forces when the two suction nozzles 130 pick up the wafer chips.

[0076] In some specific embodiments, measure and record the effective movement distances of multiple motors 260 and the corresponding elastic piece deformation amounts , and obtain an adjustment deformation table, including the following steps:

[0077] Let be the number of steps for the motor 260 to drive the adjustment block 250 to push the swing arm 120; be the effective movement distance of the motor 260, ; be the position of the adjustment block 250 when the adjustment block 250 does not contact the swing arm 120; be the position of the adjustment block 250 when the motor 260 drives the adjustment block 250 to move to contact the swing arm 120; be the adjustment block 250 from position to the effective movement distance of the adjustment block 250 pushing the swing arm 120 displacement, the displacement of the th step is ; be the position of the swing arm 120 when the adjustment block 250 returns to after ; be the elastic piece deformation amount after , ;

[0078] The motor 260 drives the adjustment block 250 to push the swing arm 120, measure the positions of the swing arm 120 from step 0 to and calculate the elastic piece deformation amount corresponding to each different step number from to , and obtain an adjustment deformation table.

[0079] It can be understood that the motor 260 drives the adjustment block 250 to push the swing arm 120 to move with different effective movement distances for different numbers of steps. After each time the swing arm 120 is pushed to move with an effective movement distance, it returns to Position, it can measure the deformation amount of the shrapnel after the effective movement distance of the swing arm 120 is pushed by different steps, so as to conveniently collect a large amount of shrapnel deformation amount data as reference data for adjusting the shrapnel 140, and further make the adjustment of the shrapnel 140 more accurate.

[0080] Further, when the swing arm 120 moves outward, the number of steps is , the th step, the displacement of the adjusting block 250 is ; when the swing arm 120 moves inward, the number of steps is , the th step displacement is ;

[0081] The motor 260 drives the adjusting block 250 to push the swing arm 120 outward, measures the positions of the swing arm 120 from step 0 to to , and calculates the shrapnel deformation amount corresponding to each different number of steps , to obtain the forward adjustment deformation table as shown in Table 1 below;

[0082] The motor 260 drives the adjusting block 250 to push the swing arm 120 inward, measures the positions of the swing arm 120 from step 0 to to , and calculates the shrapnel deformation amount corresponding to each different number of steps , to obtain the reverse adjustment deformation table as shown in Table 2 below.

[0083] It can be understood that in this embodiment, by collecting the data of forward adjustment to make the forward adjustment deformation table and collecting the data of reverse adjustment to make the reverse adjustment deformation table, it is beneficial to improve the accuracy of the collected data.

[0084] Table 1 Forward Adjustment Deformation Table

[0085]

[0086] Table 2 Reverse Adjustment Deformation Table

[0087]

[0088] Furthermore, the number of steps, the effective movement distance and the shrapnel deformation amount in the forward adjustment deformation table and the reverse adjustment deformation table are merged to obtain and save the adjustment deformation table as shown in Table 3 below.

[0089] Table 3 Adjustment Deformation Table

[0090]

[0091] It can be understood that by combining the number of steps, effective movement distance, and shrapnel deformation amount in the forward adjustment deformation table and the reverse adjustment deformation table, obtaining and saving the adjustment deformation table is beneficial for screening important data, making the data type of the adjustment deformation table more concise. Thus, it is convenient to look up the table when adjusting the shrapnel 140.

[0092] In some specific embodiments, to find the corresponding shrapnel deformation amount range in the adjustment deformation table and calculate the distance that the motor 260 needs to move for adjustment , the following steps are included:

[0093] Search in the adjustment deformation table for and , where , ;

[0094] According to the formula , the solution can obtain .

[0095] It can be understood that assuming an equal ratio linear relationship within the minimum spacing of the adjustment deformation table, the formula is obtained by the equal ratio linear method, and then is solved, so that the distance that the motor 260 needs to move for adjustment can be more accurately calculated , and further, the adjustment of the shrapnel 140 of the present invention is made more accurate.

[0096] In some specific embodiments, in step S5, for the th adjustment, the distance that the motor 260 needs to move for adjustment is , the position of the swing arm 120 is , the shrapnel deformation amount , .

[0097] It can be understood that each time the adjustment step is repeated, the adjustment deformation table is rechecked and the distance that the motor 260 needs to move for adjustment is recalculated, so that the accuracy of each adjustment is beneficial.

[0098] In some specific embodiments, in step S3, when it is judged that is within the range of , the adjustment of the next swing arm 120 is directly carried out, so that the adjustment efficiency is improved and invalid adjustment operations are avoided.

[0099] In some specific embodiments, in step S1, is the distance between the displacement measuring head 230 and the measuring area above the nozzle 130 of the swing arm standard block, so that the measuring position of the displacement measuring head 230 on the swing arm standard block is flat, and thus it is beneficial to improve the measuring accuracy of the displacement measuring head 230.

[0100] A method for adjusting the swing arm spring pieces of the present invention adjusts the two swing arm spring pieces of the swing arm to be measured, which can meet the symmetry of the swing arm 120 when the spring 150, the second screw 180 and the second nut 190 are not installed. Good force control and symmetry can be obtained when the spring 150, the second screw 180 and the second nut 190 are installed in the subsequent process, compensating for the assembly differences caused by the tolerances in the assembly and machining of the spring pieces 140, thereby improving the adjustment quality of the swing arm nozzle mechanism. Secondly, due to the use of program automatic measurement and adjustment, rapid calculation and adjustment can be performed according to the algorithm, improving the adjustment efficiency.

[0101] Embodiment 2

[0102] Referring to Figure 4 、 Figure 5 and Figure 6 , a swing arm spring piece adjustment device according to an embodiment of the present invention is used to implement a swing arm spring piece adjustment method according to an embodiment of the present invention. The swing arm spring piece adjustment device includes:

[0103] A frame 210 having mutually perpendicular X, Y, and Z directions;

[0104] A mounting seat 220 is provided on the frame 210 and has a measuring station for mounting and positioning the swing arm 200 to be adjusted that swings along the Y direction;

[0105] A displacement measuring head 230 is provided on the frame 210 and is located on one side of the mounting seat 220 along the Y direction for measuring the position of the swing arm 120;

[0106] An adjustment assembly 240 is provided on the frame 210 and includes an adjustment block 250 and a motor 260 that drives the adjustment block 250 to move along the Y direction. The adjustment block 250 pushes the swing arm 120 to adjust the deformation amount of the spring piece;

[0107] A data processing module is used to collect the measurement data of the displacement measuring head 230, determine the deformation amount of the spring piece, and calculate the adjustment movement distance of the motor 260;

[0108] A control module is used to receive the information of the data processing module and control the motor 260 to adjust the spring piece 140.

[0109] In this embodiment, by providing the mounting bracket 300, the displacement measuring head 230, the adjustment assembly 240, the data processing module and the control module, it is possible to automatically collect data to construct an adjustment deformation table, and then, based on the adjustment deformation table, automatically calculate the adjustment movement distance of the motor 260 during adjustment, so that the swing arm shrapnel adjustment device can automatically adjust the shrapnel 140, compensating for the machining tolerance or the deformation of the shrapnel 140, ensuring that when the two suction nozzles 130 are in symmetric positions and the separation forces of the two suction nozzles 130 are the same, the compression amounts of the spring 150 are also the same, and guaranteeing the consistency of the acting forces when the two suction nozzles 130 pick up the wafer chips.

[0110] In some specific embodiments, one side of the adjustment block 250 along the X direction has a first opening 270. The two side walls of the first opening 270 along the Y direction are respectively in contact with the swing arm to be adjusted 200 to push the swing arm to be adjusted 200 in the positive and negative directions along the Y direction. Thus, when the adjustment block 250 moves in the positive and negative directions along the X direction, it can push the swing arm to be adjusted 200 to adjust the shrapnel 140.

[0111] In some specific embodiments, a position adjustment assembly is provided on the frame 210. The position adjustment assembly includes a lifting frame 280, a translation frame 290 and a mounting bracket 300. The lifting frame 280 is slidably connected to the frame 210 in the up and down direction. A Z fine adjustment knob 310 is provided between the frame 210 and the lifting frame 280, and the Z fine adjustment knob 310 is used to finely adjust the height of the lifting frame 280. The translation frame 290 is slidably arranged on the lifting frame 280 along the X direction. An X fine adjustment knob 320 is provided between the translation frame 290 and the lifting frame 280, and the X fine adjustment knob 320 is used to finely adjust the position of the translation frame 290 along the X direction. The mounting bracket 300 is slidably arranged on the translation frame 290 along the Y direction. The adjustment block 250 is arranged on the mounting bracket 300, and the motor 260 is arranged on the translation frame 290. The motor 260 drives the mounting bracket 300 to move to drive the adjustment block 250 to move. Thus, the X direction position and the Z direction position of the adjustment block 250 can be finely adjusted by using the X fine adjustment knob 320 and the Z fine adjustment knob 310. Furthermore, the adjustment block 250 can accurately align with the swing arm 120.

[0112] Furthermore, a lead screw is rotatably arranged on the translation frame 290. The lead screw is threadedly connected to the mounting bracket 300. The motor 260 drives the lead screw to rotate. Thus, it is convenient for the transmission between the motor 260 and the mounting bracket 300.

[0113] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples" or "some examples", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0114] The terms "first", "second", "third", "fourth", etc. (if any) in the description of the specification, claims and the above drawings of the present application are used to distinguish similar objects and do not necessarily have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments described herein can be implemented in an order other than that illustrated or described herein.

[0115] It should also be noted that in the description of this specification, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0116] In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that comprises a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may also include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0117] Moreover, the term "comprise", "include" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the said element.

[0118] The embodiments of the present invention have been described in detail above with reference to the drawings, but the present invention is not limited to the above embodiments. Various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the relevant art.

Claims

1. A swing arm spring piece adjustment method, characterized in that: The steps include: S1: Install the swing arm standard block on the measuring station and measure the swing arm standard block to define the standard symmetrical position of the swing arm , and set the swing arm position qualified range to ; S2: Install the swing arm to be adjusted on the measuring station and set the single step spacing of the motor , measure and record the effective movement distance of multiple motors And the corresponding deformation of the spring , get the adjustment deformation table; set up The number of steps that the motor drives the adjustment block to push the swing arm; is the effective movement distance of the motor, ; To adjust the position of the block when the block does not contact the swing arm; The position of the adjusting block when the motor drives the adjusting block to move to the position contacting the swing arm; To adjust the block from The displacement from the position to the effective movement distance of the swing arm pushed by the adjustment block, The displacement of the step is ; For passing After that, the adjustment block returns The position of the swing arm; For passing The deformation of the shrapnel after ; When the swing arm moves outward, the number of steps is , No. The displacement of the adjustment block is ; When the swing arm moves inward, the number of steps is , No. The displacement of the step is ; The motor drives the adjustment block to push the swing arm outwards, and the measurement steps are from 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , get the positive adjustment deformation table; The motor drives the adjustment block to push the swing arm inward, and the measurement steps are 0 to Swing arm position to , and calculate the deformation of the spring corresponding to each different step number , get the reverse adjustment deformation table; The number of steps, the effective movement distance of the motor and the deformation amount of the spring piece in the forward adjustment deformation table and the reverse adjustment deformation table are combined to obtain and save the adjustment deformation table; S3: Install the next swing arm to be adjusted on the measuring station and measure the swing arm position of the swing arm to be adjusted first. ,judge Is it in within the scope; S4: If Not Available If the range is within the range, the deformation of the spring that needs to be adjusted is calculated. , find the corresponding spring deformation range in the adjustment deformation table and calculate the distance the motor needs to move , motor movement To adjust the shrapnel; S5: Re-measure the swing arm position of the swing arm to be adjusted after adjusting the spring piece ,judge Is it in Within the range, if Not Available Repeat step S4 until exist Within the range, adjust the next swing arm.

2. A swing arm spring piece adjustment method according to claim 1, characterized in that: The method of finding the corresponding spring deformation interval in the adjustment deformation table and calculating the distance the motor needs to move , including the following steps: Find it from the adjustment deformation table and ,in, , ; According to the formula , the solution can be obtained .

3. A swing arm spring piece adjustment method according to claim 2, characterized in that: In step S5, The distance that the motor needs to move for the second adjustment is , the swing arm position is , deformation of the spring , .

4. A swing arm spring piece adjustment method according to claim 1, characterized in that: In step S3, when it is determined that exist If it is within the range, the next swing arm will be adjusted directly.

5. A swing arm spring piece adjustment method according to claim 1, characterized in that: In the step S1, It is the distance between the displacement measuring head and the measuring area above the suction nozzle of the swing arm standard block.

6. A swing arm spring piece adjustment device, used to implement a swing arm spring piece adjustment method according to any one of claims 1 to 5, characterized in that: include: The frame has an X direction, a Y direction and a Z direction which are perpendicular to each other; A mounting seat, arranged on the frame, having a measuring station, wherein the measuring station is used to install the swing arm to be adjusted so that the positioning swing arm swings along the Y direction; A displacement measuring head is arranged on the frame and located on one side of the mounting seat along the Y direction, and is used to measure the position of the swing arm; An adjustment component is arranged on the frame, comprising an adjustment block and a motor driving the adjustment block to move along the Y direction, wherein the adjustment block pushes the swing arm to adjust the deformation amount of the spring piece; A data processing module, used for collecting measurement data of the displacement measuring head, determining the deformation amount of the spring piece and calculating the adjustment movement distance of the motor; The control module is used to receive the information of the data processing module and control the motor to adjust the spring.

7. The swing arm spring piece adjustment device according to claim 6, characterized in that: The adjusting block has a first opening on one side along the X direction, and two side walls of the first opening along the Y direction respectively abut against the swing arm to be adjusted to push the swing arm to be adjusted in the positive and negative directions of the Y direction.

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