Swing Arm Shrapnel Adjustment Method Based on Linear Function

Abstract

The present invention discloses a method for adjusting a swing arm elastic sheet based on a linear function, which relates to the technical field of distance measurement and includes the following steps: starting from a position where the adjustment block has not contacted the swing arm, moving it back and forth multiple times to push the swing arm to move, and successively dividing the elastic sheet deformation curve into an a interval, a c interval, and a b interval according to the characteristics of the elastic sheet deformation curve; calculating the intersection points between the a interval, the c interval, and the b interval and the functions of the a interval, the c interval, and the b interval; presetting the adjustment target position; measuring the position of the swing arm and calculating the elastic sheet adjustment amount, determining the interval to which the elastic sheet adjustment amount belongs and calling the function of the corresponding interval, calculating the corresponding swing arm adjustment distance according to the corresponding function, and pushing the swing arm by the adjustment block according to the swing arm adjustment distance; judging the adjustment effect, and if the adjustment effect is unqualified, repeating the adjustment until the adjustment effect is qualified. The method for adjusting the swing arm elastic sheet based on a linear function of the present invention can adjust the elastic sheet and make up for the problems of elastic sheet processing tolerance and elastic sheet deformation.

Description

Technical Field

[0001] The present invention relates to the technical field of distance measurement, and particularly to a method for adjusting a swing arm elastic sheet based on a linear function. Background Art

[0002] In the wafer sorting of semiconductor devices, a sorter is required for sorting. During the sorting process, a swing arm nozzle mechanism is used to transfer the die. In order to improve the die transfer speed, a swing arm nozzle mechanism with a double swing arm structure is generally used for operation.

[0003] In the related art, the swing arm nozzle mechanism includes a base and two swing arm nozzle assemblies symmetrically arranged along the center of the base. The swing arm nozzle assembly includes a swing arm, a nozzle, and an elastic sheet. The nozzle is arranged at the top end of the swing arm. The elastic sheet is used to connect the bottom end of the swing arm and the base. A spring is arranged between the side wall of the swing arm and the base. The spring is used to drive the top end of the swing arm to swing away from the base. An adjusting screw and an adjusting nut are also arranged on the base. The end of the adjusting screw supports the spring. The adjusting screw and the adjusting nut cooperate to adjust the compression amount of the spring. A limit screw is also arranged on the base. The limit screw is located above the spring. The limit screw is used to limit the swing arm to limit the swing angle of the swing arm away from the base. A limit locking nut is also arranged on the limit screw. The limit locking nut is used to adjust the limiting position of the limit screw on the swing arm.

[0004] When the nozzle sucks the wafer die, the die has a force on the nozzle, and this force also drives the nozzle to move towards the base, thus separating the swing arm from the limit screw. This force is the resultant force under the combined action of the elastic sheet and the spring.

[0005] In order to ensure the consistency of the adsorption effect of the nozzles of the two swing arm nozzle assemblies on the die, it is necessary to make the forces on the nozzles the same when the swing arm separates from the limit screw. In an ideal situation, the elastic sheet is in a free state vertically. When the elastic sheet vertically supports the swing arm, the force of the elastic sheet on the swing arm is zero. By adjusting the compression amounts of the springs to be the same, the forces on the nozzles can be made the same when the swing arm separates from the limit screw.

[0006] However, due to factors such as the processing tolerance of the elastic sheet and the deformation of the elastic sheet, the elastic sheet may not be in a free state vertically. When the elastic sheet vertically supports the swing arm, the force of the elastic sheet on the swing arm is greater than zero, resulting in inconsistent compression amounts of the springs of the two swing arm nozzle assemblies after the forces on the nozzles are adjusted to be the same when the swing arm separates from the limit screw. Thus, the symmetry and consistency of the two swing arm nozzle assemblies are poor, affecting the adjustment efficiency of the forces on the nozzles when the swing arm separates from the limit screw and the sorting effect of the swing arm nozzle mechanism. Summary of the Invention

[0007] The present invention aims to solve at least one of the technical problems existing in the prior art. For this purpose, the present invention proposes a swing arm shrapnel adjustment method based on a linear function, which can adjust the shrapnel, make up for the processing tolerance of the shrapnel and the problem of shrapnel deformation, ensure that the spring compression amounts of the two swing arm nozzle assemblies are the same after the swing arm and the limit screw are separated instantaneously when the nozzle forces are adjusted to be consistent, ensure the symmetry and consistency of the two swing arm nozzle assemblies, and ensure the adjustment efficiency of the nozzle force when the swing arm and the limit screw are separated instantaneously and the sorting effect of the swing arm nozzle mechanism.

[0008] The swing arm shrapnel adjustment method based on a linear function according to an embodiment of the present invention includes the following steps:

[0009] Use an adjustment block to start moving from a position where it does not contact the swing arm and make multiple round trips to push the swing arm to move. Each time the adjustment block contacts the swing arm, a certain distance is increased, with the shrapnel deformation amount as the abscissa and the effective distance after the adjustment block contacts the swing arm as the ordinate to obtain a shrapnel deformation curve, and divide the shrapnel deformation curve into an a interval, a c interval, and a b interval in sequence according to the characteristics of the shrapnel deformation curve;

[0010] Collect a series of and data, calculate the intersection points between the a interval, the c interval, and the b interval, and the functions of the a interval, the c interval, and the b interval;

[0011] Install the swing arm to be adjusted on the adjustment device and preset the adjustment target position;

[0012] Measure the position of the swing arm and calculate the shrapnel adjustment amount, determine the interval to which the shrapnel adjustment amount belongs, call the function of the corresponding interval, calculate the corresponding swing arm adjustment distance according to the corresponding function, and the adjustment block pushes the swing arm according to the swing arm adjustment distance to adjust the shrapnel;

[0013] Judge the adjustment effect. If the adjustment effect is unqualified, repeat the adjustment until the adjustment effect is qualified.

[0014] The swing arm shrapnel adjustment method based on a linear function according to an embodiment of the present invention has at least the following beneficial effects:

[0015] 1. By measuring and collecting data on the effective distance after the adjustment block contacts the swing arm and the corresponding shrapnel deformation amount, making a shrapnel deformation curve, analyzing the characteristics of the shrapnel deformation curve, dividing the shrapnel deformation curve into an a interval, a c interval, and a b interval in sequence, and collecting a series of and Calculate the intersection points between the a interval, c interval, and b interval, as well as the functions of the a interval, c interval, and b interval. Thus, when adjusting the swing arm to be adjusted, it is only necessary to measure the position of the swing arm and calculate the shim adjustment amount. After determining the interval to which the shim adjustment amount belongs, the corresponding function of the interval can be directly called to calculate the distance that the adjustment block needs to push the swing arm to move. Furthermore, the shim can be quickly adjusted to compensate for the machining tolerance of the shim and the problem of shim deformation, ensuring that the spring compression amounts of the two swing arm nozzle assemblies are the same when the swing arm and the limit screw are separated instantaneously after assembly, guaranteeing the symmetry and consistency of the two swing arm nozzle assemblies, and ensuring the adjustment efficiency of the nozzle force when the swing arm and the limit screw are separated instantaneously and the sorting effect of the swing arm nozzle mechanism.

[0016] 2. By using the function as the adjustment basis for the shim adjustment amount, for the production of the shim deformation curve and the function, it can be completed by collecting a limited number of data, which is beneficial to improving the production efficiency of the adjustment basis. Moreover, using the function as the adjustment basis for the shim adjustment amount can quickly obtain the distance that the adjustment block needs to push the swing arm to move to adjust the shim deformation amount. At the same time, the material properties can be detected while making the function, which is convenient for identifying the material differences in the assembly process.

[0017] According to some embodiments of the present invention, calculating the intersection points between the a interval, c interval, and b interval includes the following steps:

[0018] Starting from Take multiple sets of data to calculate the correlation coefficient of the a interval Starting from Start, Is the maximum value. Take multiple sets of data from large to small to calculate the correlation coefficient of the b interval Compare the correlation coefficients of multiple sets of data Judge the intersection point between the a interval and the c interval, and compare the correlation coefficients of multiple sets of data Judge the intersection point between the b interval and the c interval.

[0019] According to some embodiments of the present invention, starting from Take multiple sets of data to calculate the correlation coefficient of the a interval Starting from Start, Is the maximum value. Take multiple sets of data from large to small to calculate the correlation coefficient of the b interval Includes the following steps:

[0020] Starting from First take 3 data to calculate the correlation coefficient Then gradually increase the data and calculate different correlation coefficients , , For all the selected data The average value of is the average value of all in the selected data;

[0021] Starting from as the maximum value, first take 3 data from large to small, and calculate the correlation coefficient , then gradually increase the data and calculate different correlation coefficients , , , is the average value of all in the selected data, is the average value of all in the selected data.

[0022] According to some embodiments of the present invention, comparing the correlation coefficients of multiple groups of data to determine the intersection point of the a interval and the c interval, and comparing the correlation coefficients of multiple groups of data to determine the intersection point of the b interval and the c interval, including the following steps:

[0023] Set judgment threshold to , , The closer to 1, the better the correlation. When , and , judge as the correlation coefficient at the intersection of the a interval and the c interval, and select as the intersection point of the a interval and the c interval, ;

[0024] Set judgment threshold to , , The closer to 1, the better the correlation. When , and , judge as the correlation coefficient at the intersection of the b interval and the c interval, and select as the intersection point of the b interval and the c interval, .

[0025] According to some embodiments of the present invention, starting from to take multiple groups of data to calculate the correlation coefficient of the a interval, starting from , as the maximum value, taking multiple groups of data from large to small to calculate the correlation coefficient of the b interval, including the following steps:

[0026] Starting from Start by sequentially selecting multiple groups of data with a fixed number of data. The fixed number of data for each group is pieces, , and calculate different correlation coefficients , , is the average value of all in the selected data, is the average value of all in the selected data;

[0027] Starting from , is the maximum value. Sequentially select multiple groups of data with a fixed number of data. The fixed number of data for each group is pieces, , and calculate different correlation coefficients , , is the average value of all in the selected data, is the average value of all in the selected data.

[0028] According to some embodiments of the present invention, comparing the correlation coefficients of multiple groups of data to determine the intersection point of the a interval and the c interval, and comparing the correlation coefficients of multiple groups of data to determine the intersection point of the b interval and the c interval, including the following steps:

[0029] Set the judgment threshold to , , The closer to 1, the better the correlation. Compare at least three consecutive values. When , and , determine that is the correlation coefficient at the intersection of the a interval and the c interval, and select as the intersection point of the a interval and the c interval, ;

[0030] Set the judgment threshold to , , The closer to 1, the better the correlation. Compare at least three consecutive values. When , and , determine that is the correlation coefficient at the intersection of the b interval and the c interval, and select as the intersection point of the b interval and the c interval, .

[0031] According to some embodiments of the present invention, the functions for calculating the a interval, the c interval, and the b interval include the following steps:

[0032] For the a interval, let the function of the a interval be , ;

[0033] Wherein, , ;

[0034] By solving, it can be obtained that , ;

[0035] For the b interval, let the function of the b interval be , ;

[0036] Wherein, , ;

[0037] By solving, it can be obtained that , ;

[0038] For the c interval, let the function of the c interval be , ;

[0039] Obtain the data of the points from to When the deformation amount of the elastic piece is the same as , then ;

[0040] When the deformation amount of the elastic piece is between and , then , ;

[0041] By summarizing the functions of the a interval, the b interval, and the c interval, it can be obtained that:

[0042] .

[0043] According to some embodiments of the present invention, the use of the adjustment block to start moving from a position where it does not contact the swing arm and move back and forth multiple times to push the swing arm to move includes:

[0044] The adjusting block pushes the swing arm in the positive direction to obtain the positive shrapnel deformation curve. According to the characteristics of the positive shrapnel deformation curve, the positive shrapnel deformation curve is successively divided into a positive a interval, a positive c interval, and a positive b interval, and the intersection points between the positive a interval, the positive c interval, and the positive b interval, as well as the functions of the positive a interval, the positive c interval, and the positive b interval, are calculated.

[0045] The adjusting block pushes the swing arm in the negative direction to obtain the negative shrapnel deformation curve. According to the characteristics of the negative shrapnel deformation curve, the negative shrapnel deformation curve is successively divided into a negative a interval, a negative c interval, and a negative b interval, and the intersection points between the negative a interval, the negative c interval, and the negative b interval, as well as the functions of the negative a interval, the negative c interval, and the negative b interval, are calculated.

[0046] According to some embodiments of the present invention, when measuring the swing arm position of the swing arm to be adjusted and calculating the shrapnel adjustment amount, the shrapnel adjustment direction is synchronously identified.

[0047] According to some embodiments of the present invention, for judging the adjustment effect, if the adjustment effect is unqualified, the adjustment is repeated until the adjustment effect is qualified, including the following steps:

[0048] Set the maximum number of repeated adjustments. If the adjustment effect is still unqualified after reaching the maximum number of repeated adjustments, a new shrapnel deformation curve is re-made to calculate the intersection points between the a interval, the c interval, and the b interval, as well as the functions of the a interval, the c interval, and the b interval, and then the shrapnel adjustment of the swing arm to be adjusted is carried out again.

[0049] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0051] Figure 1 It is a schematic structural diagram of the swing arm suction nozzle mechanism according to the embodiment of the present invention;

[0052] Figure 2 It is a schematic structural diagram of the swing arm to be adjusted according to the embodiment of the present invention;

[0053] Figure 3 It is a schematic diagram of the swing arm shrapnel adjustment according to the embodiment of the present invention;

[0054] Figure 4Flowchart of the swing arm elastic sheet adjustment method based on a linear function according to an embodiment of the present invention.

[0055] Reference numerals: 100 - base, 110 - swing arm suction nozzle assembly, 120 - swing arm, 130 - suction nozzle, 140 - elastic sheet, 150 - spring, 160 - adjustment screw, 170 - adjustment nut, 180 - limit screw, 190 - limit locking nut, 200 - swing arm to be adjusted, 210 - displacement sensor, 220 - adjustment block. Detailed implementation manners

[0056] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0057] In the description of the present invention, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0058] In the description of the present invention, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood as not including the original number, and above, below, within, etc. are understood as including the original number. If the first and the second are described, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0059] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "mounted, connected and coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0060] The following will be combined with the attached Figures 1-4 Describe the swing arm elastic sheet adjustment method based on a linear function according to an embodiment of the present invention.

[0061] The present invention aims to provide embodiments of the swing arm elastic sheet adjustment method based on a linear function.

[0062] Refer toFigure 1 For the swing arm nozzle mechanism, the swing arm nozzle mechanism includes a base 100 and two swing arm nozzle assemblies 110 symmetrically arranged along the center of the base 100. The swing arm nozzle assembly 110 includes a swing arm 120, a nozzle 130, and a shrapnel 140. The nozzle 130 is arranged at the top end of the swing arm 120. The shrapnel 140 is used to connect the bottom end of the swing arm 120 and the base 100. A spring 150 is arranged between the side wall of the swing arm 120 and the base 100. The spring 150 is used to drive the top end of the swing arm 120 to swing away from the base 100. An adjusting screw 160 and an adjusting nut 170 are also arranged on the base 100. The end of the adjusting screw 160 supports the spring 150. The adjusting screw 160 and the adjusting nut 170 cooperate to adjust the compression amount of the spring 150. A limit screw 180 is also arranged on the base 100. The limit screw 180 is located above the spring 150. The limit screw 180 is used to limit the swing arm 120 to limit the angle of the swing arm 120 swinging away from the base 100. A limit locking nut 190 is also arranged on the limit screw 180. The limit locking nut 190 is used to adjust the limiting position of the limit screw 180 on the swing arm 120.

[0063] When the nozzle 130 is sucking the wafer chip, the chip has a force on the nozzle 130, and this force also drives the nozzle 130 to move towards the base 100, so that the swing arm 120 and the limit screw 180 are separated. This force is the resultant force under the combined action of the shrapnel 140 and the spring 150.

[0064] In order to ensure the consistency of the adsorption effect of the nozzles 130 of the two swing arm nozzle assemblies 110 on the chip, it is necessary to make the forces on the nozzles 130 the same when the swing arm 120 and the limit screw 180 are separated. In an ideal situation, the shrapnel 140 is in a free state vertically. When the shrapnel 140 vertically supports the swing arm 120, the force of the shrapnel 140 on the swing arm 120 is zero. By adjusting the compression amounts of the spring 150 to be the same, the forces on the nozzles 130 can be made the same when the swing arm 120 and the limit screw 180 are separated.

[0065] However, due to factors such as the machining tolerance of the shrapnel 140 and the deformation of the shrapnel 140, the shrapnel 140 may not be in a free state vertically. When the shrapnel 140 vertically supports the swing arm 120, the force of the shrapnel 140 on the swing arm 120 is greater than zero, resulting in inconsistent compression amounts of the spring 150 of the two swing arm nozzle assemblies 110 after the forces on the nozzles 130 are adjusted to be the same when the swing arm 120 and the limit screw 180 are separated. Thus, the symmetry and consistency of the two swing arm nozzle assemblies 110 are poor, affecting the adjustment efficiency of the forces on the nozzles 130 when the swing arm 120 and the limit screw 180 are separated and the sorting effect of the swing arm nozzle mechanism.

[0066] To ensure the symmetry and consistency of the two swing arm nozzle assemblies 110, it is necessary to adjust the shrapnel 140 to compensate for the machining tolerance of the shrapnel 140 and the deformation of the shrapnel 140, and ensure that the compression amounts of the springs 150 of the two swing arm nozzle assemblies 110 are the same when the nozzles 130 are under the same force at the moment when the swing arms 120 and the limit screws 180 are separated after assembly, so as to ensure the symmetry and consistency of the two swing arm nozzle assemblies 110, and ensure the adjustment efficiency of the force on the nozzles 130 at the moment when the swing arms 120 and the limit screws 180 are separated and the sorting effect of the swing arm nozzle mechanism.

[0067] Refer to Figure 2 , it should be explained that the swing arm 200 to be adjusted is the state of the swing arm nozzle mechanism without the spring 150 and the limit screw 180 assembled.

[0068] Refer to Figure 3 and Figure 4 , in this embodiment, the swing arm shrapnel adjustment method based on a linear function mainly includes the following steps:

[0069] S1000: Use the adjustment block 220 to start moving from a position where it does not touch the swing arm 120 and move back and forth multiple times to push the swing arm 120 to move. Each time the adjustment block 220 touches the swing arm 120, a certain distance is increased. Using the shrapnel deformation amount as the abscissa and the effective distance of the adjustment block 220 after touching the swing arm 120 as the ordinate, obtain the shrapnel deformation curve, and divide the shrapnel deformation curve into an a interval, a c interval, and a b interval in sequence according to the characteristics of the shrapnel deformation curve.

[0070] Specifically, for the measurement of the shrapnel deformation amount , the plane of the swing arm 120 above the nozzle 130 can be measured using the displacement sensor 210. The displacement sensor 210 can adopt a triangulation laser displacement sensor, a spectral confocal displacement sensor, etc.

[0071] For the measurement of the effective distance of the adjustment block 220 after touching the swing arm 120, the distance can be converted by the number of movement steps of the motor that drives the adjustment block 220 to move.

[0072] In some specific embodiments, using the adjustment block 220 to start moving from a position where it does not touch the swing arm 120 and move back and forth multiple times to push the swing arm 120 to move includes:

[0073] S1100: The adjustment block 220 pushes the swing arm 120 to move in the positive direction to obtain a positive shrapnel deformation curve. Divide the positive shrapnel deformation curve into a positive a interval, a positive c interval, and a positive b interval in sequence according to the characteristics of the positive shrapnel deformation curve, and calculate the intersection points between the positive a interval, the positive c interval, and the positive b interval and the functions of the positive a interval, the positive c interval, and the positive b interval.

[0074] S1200: The adjusting block 220 pushes the swing arm 120 to move in the negative direction to obtain the negative elastic sheet deformation curve. According to the characteristics of the negative elastic sheet deformation curve, the negative elastic sheet deformation curve is successively divided into a negative a interval, a negative c interval, and a negative b interval, and the intersection points between the negative a interval, the negative c interval, and the negative b interval, as well as the functions of the negative a interval, the negative c interval, and the negative b interval, are calculated.

[0075] S2000: Collect a series of and data, and calculate the intersection points between the a interval, the c interval, and the b interval, as well as the functions of the a interval, the c interval, and the b interval.

[0076] In some specific embodiments, when collecting a series of and data, for the distance increased each time the adjusting block 220 contacts the swing arm 120, that is, the spacing between the effective distances after the adjusting block 220 contacts the swing arm 120 twice adjacent , for the three intervals, the spacing can be equidistant or non - equidistant.

[0077] When setting the spacing to be non - equidistant, a determination value can be set. For example, if the elastic sheet deformation amount is less than , that is, in the a interval, the spacing is , and the elastic sheet deformation amount is between and , that is, in the c interval, the spacing is , and the elastic sheet deformation amount is greater than , that is, in the b interval, the spacing is .

[0078] In order to accurately obtain the points in the middle c interval, can also be set to be the same as or smaller than .

[0079] In some specific embodiments, calculating the intersection points between the a interval, the c interval, and the b interval includes the following steps:

[0080] S2100: Starting from , take multiple groups of data to calculate the correlation coefficient of the a interval. Starting from , is the maximum value. Take multiple groups of data from large to small to calculate the correlation coefficient of the b interval. Compare the correlation coefficients of multiple groups of data to judge the intersection point between the a interval and the c interval. Compare the correlation coefficients Determine the intersection point between the b interval and the c interval.

[0081] Specifically, for calculating the intersection points between the a interval, the c interval, and the b interval, the present invention provides embodiments of two methods.

[0082] Embodiment 1

[0083] From Start taking multiple sets of data to calculate the correlation coefficient of the a interval and from start, is the maximum value, take multiple sets of data from large to small to calculate the correlation coefficient of the b interval , including the following steps:

[0084] S2111: From start by taking 3 data first and calculate the correlation coefficient , then gradually increase the data and calculate different correlation coefficients , , is the average value of all in the selected data, is the average value of all in the selected data.

[0085] Furthermore, for the a interval, it is also necessary to first judge , if , then it is necessary to skip this point and continue to the next point and find the reason, which means that the entire elastic piece 140 has no deformation or sampling anomaly.

[0086] S2112: From start, is the maximum value, take 3 data first from large to small and calculate the correlation coefficient , then gradually increase the data and calculate different correlation coefficients , , is the average value of all in the selected data, is the average value of all in the selected data.

[0087] Furthermore, for the b interval, it is also necessary to first judge , if , then it is necessary to skip this point and continue to the next point and find the reason, which means that the entire elastic piece 140 has no deformation or sampling anomaly.

[0088] Furthermore, compare the correlation coefficients of multiple sets of data Determine the intersection point of interval a and interval c, and compare the correlation coefficients of multiple groups of data Determine the intersection point of interval b and interval c, including the following steps:

[0089] S2113: Set The judgment threshold of is , , The closer to 1, the better the correlation. When , and , judge As the correlation coefficient at the intersection of interval a and interval c, select As the intersection point of interval a and interval c, .

[0090] Specifically, can be set to 0.9.

[0091] S2114: Set The judgment threshold of is , , The closer to 1, the better the correlation. When , and , judge As the correlation coefficient at the intersection of interval b and interval c, select As the intersection point of interval b and interval c, .

[0092] Specifically, can be set to 0.9.

[0093] Embodiment 2

[0094] Starting from , calculate the correlation coefficient of interval a for multiple groups of data , starting from , Is the maximum value, and calculate the correlation coefficient of interval b for multiple groups of data from large to small , including the following steps:

[0095] S2121: Starting from , select multiple groups of data with a fixed number of data in sequence. The fixed number of data in each group is pieces, , calculate different correlation coefficients , , Is the average value of all in the selected data , Is the average value of all in the selected data .

[0096] Furthermore, for the a interval, it is also necessary to first judge , if , then it is necessary to skip this point and continue to the next point to find the reason, which means that the entire shrapnel 140 has no deformation or abnormal sampling.

[0097] S2122: Starting from , is the maximum value, and multiple groups of data with a fixed number of data are selected in sequence. The fixed number of data in each group is , , and different correlation coefficients are calculated, , is the average value of all in the selected data, is the average value of all in the selected data.

[0098] Furthermore, for the b interval, it is also necessary to first judge , if , then it is necessary to skip this point and continue to the next point to find the reason, which means that the entire shrapnel 140 has no deformation or abnormal sampling.

[0099] Furthermore, compare the correlation coefficients of multiple groups of data to judge the intersection point between the a interval and the c interval, and compare the correlation coefficients of multiple groups of data to judge the intersection point between the b interval and the c interval, including the following steps:

[0100] S2123: Set the judgment threshold of to , , The closer it is to 1, the better the correlation. Compare at least three consecutive values. When , and , judge as the correlation coefficient at the intersection of the a interval and the c interval, and select as the intersection point between the a interval and the c interval, .

[0101] Specifically, can be set to 0.9.

[0102] S2124: Set the judgment threshold of to , , The closer it is to 1, the better the correlation. Compare at least three consecutive Value, when and judge is the correlation coefficient at the junction of the b interval and the c interval, select as the junction point of the b interval and the c interval, .

[0103] Specifically, can be set to 0.9.

[0104] In some specific embodiments, calculating the functions of the a interval, the c interval, and the b interval includes the following steps:

[0105] S2210: For the a interval, let the function of the a interval be , ;

[0106] Among them, , ;

[0107] Solving gives , .

[0108] S2220: For the b interval, let the function of the b interval be , ;

[0109] Among them, , ;

[0110] Solving gives , .

[0111] S2230: For the c interval, let the function of the c interval be , ;

[0112] Obtain the data of the points from to When the deformation amount of the elastic piece and are the same, then ;

[0113] When the deformation amount of the elastic piece is between and , then , .

[0114] S2240: Summarize the functions of the a interval, the b interval, and the c interval to obtain:

[0115] .

[0116] S300: Install the swing arm 200 to be adjusted on the adjusting device and preset the target position for adjustment.

[0117] S400: Measure the position of the swing arm 120 and calculate the adjustment amount of the elastic piece. Determine the interval to which the adjustment amount of the elastic piece belongs and call the function corresponding to the interval. Calculate the corresponding adjustment distance of the swing arm 120 according to the corresponding function. The adjusting block 220 pushes the swing arm 120 according to the adjustment distance of the swing arm 120 to adjust the elastic piece 140.

[0118] Further, when measuring the position of the swing arm 120 of the swing arm 200 to be adjusted and calculating the adjustment amount of the elastic piece, the adjustment direction of the elastic piece 140 is synchronously identified.

[0119] S500: Judge the adjustment effect. If the adjustment effect is unqualified, repeat the adjustment until the adjustment effect is qualified.

[0120] For the adjustment effect, a valve value can be set. If the difference between the position of the swing arm 120 after adjustment and the target position is less than the valve value, the adjustment is completed; otherwise, it is necessary to recalculate the adjustment amount and adjust.

[0121] In some specific embodiments, judging the adjustment effect, if the adjustment effect is unqualified, repeating the adjustment until the adjustment effect is qualified includes the following steps:

[0122] Set the maximum number of repeated adjustments. If the adjustment effect is still unqualified when the maximum number of repeated adjustments is reached, remake to obtain a new elastic piece deformation curve and calculate the intersection points between the a interval, the c interval and the b interval, as well as the functions of the a interval, the c interval and the b interval, and then perform the adjustment of the elastic piece 140 of the swing arm 200 to be adjusted.

[0123] It can be understood that when the requirements cannot be met even when the maximum number of repeated adjustments is reached, the elastic characteristics of the material change. There may be certain changes due to reasons such as batch, size, thickness and material. At this time, the adjustment effect will be affected, and it is necessary to remake the adjustment function for correction.

[0124] In this embodiment, by measuring and collecting data of the effective distance after the adjusting block 220 contacts the swing arm 120 and the corresponding elastic piece deformation amount in multiple groups, making an elastic piece deformation curve, analyzing the characteristics of the elastic piece deformation curve, the elastic piece deformation curve is sequentially divided into an a interval, a c interval and a b interval, and a series of and Calculate the intersection points between the a interval, the c interval, and the b interval, as well as the functions of the a interval, the c interval, and the b interval. Thus, when adjusting the adjustable swing arm 200, it is only necessary to measure the position of the swing arm 120 and calculate the shim adjustment amount. After determining the interval to which the shim adjustment amount belongs, the corresponding function of the interval can be directly called to calculate the distance that the adjustment block 220 needs to push the swing arm 120 to move. Furthermore, the shim 140 can be quickly adjusted to compensate for the machining tolerance of the shim 140 and the problem of shim 140 deformation, ensuring that the compression amounts of the springs 150 of the two swing arm nozzle assemblies 110 are the same when the swing arm 120 and the limit screw 180 are separated instantaneously after assembly, ensuring the symmetry and consistency of the two swing arm nozzle assemblies 110, and ensuring the adjustment efficiency of the force on the nozzle 130 when the swing arm 120 and the limit screw 180 are separated instantaneously and the sorting effect of the swing arm nozzle mechanism.

[0125] In this embodiment, by using the function as the adjustment basis for the shim adjustment amount, for the production of the shim deformation curve and the function, it can be completed by collecting a limited number of data, which is beneficial to improving the production efficiency of the adjustment basis. Moreover, using the function as the adjustment basis for the shim adjustment amount can quickly obtain the distance that the adjustment block 220 needs to push the swing arm 120 to move to adjust the shim deformation amount. At the same time, the material properties can be detected while making the function, which is convenient for identifying material differences in the assembly process.

[0126] In the description of this specification, the description with reference to terms such as "one embodiment, some embodiments, illustrative embodiments, examples, specific examples, or some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0127] The terms "first, second, third, fourth", etc. (if any) in the description of the specification and claims of this application and the above drawings are used to distinguish similar objects and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments described here can be implemented in an order other than that illustrated or described here.

[0128] It should also be noted that in the description of this specification, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0129] In addition, the terms "comprising", "having", and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units clearly listed, but may also include other steps or units not clearly listed or inherent to these processes, methods, products, or apparatuses.

[0130] Moreover, the terms "comprising", "including", or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0131] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A swing arm spring adjustment method based on a linear function, characterized in that: The swing arm nozzle mechanism includes a base and two swing arm nozzle assemblies symmetrically arranged along the center of the base. The swing arm nozzle assembly includes a swing arm, a nozzle and a spring. The nozzle is arranged at the top of the swing arm. The spring is used to connect the bottom end of the swing arm and the base. A spring is arranged between the side wall of the swing arm and the base. The spring is used to drive the top of the swing arm to swing away from the base. When the nozzle is sucking the wafer core grain, the core grain has a force on the nozzle, and the force also drives the nozzle to move in the direction close to the base, so that the swing arm and the limit screw are separated. This force is the resultant force of the combined action of the spring and the spring. In order to ensure the symmetry and consistency of the two swing arm nozzle assemblies, the spring needs to be adjusted. The adjustment method includes the following steps: Use the adjustment block to move from the position where it does not touch the swing arm and move back and forth multiple times to push the swing arm to move. Each time the adjustment block touches the swing arm, it increases a certain distance to adjust the deformation amount of the spring. is the horizontal axis, the effective distance after the adjustment block contacts the swing arm As the ordinate, the deformation curve of the spring fragment is obtained, and the deformation curve of the spring fragment is divided into interval a, interval c and interval b according to the characteristics of the deformation curve of the spring fragment; Collect a series of and Data, calculate the intersection points between interval a, interval c and interval b, and the functions of interval a, interval c and interval b; Install the swing arm to be adjusted on the adjustment device and preset the adjustment target position; Measure the position of the swing arm and calculate the adjustment amount of the spring, determine the interval to which the spring adjustment amount belongs and call the function of the corresponding interval, calculate the corresponding swing arm adjustment distance according to the corresponding function, and the adjustment block pushes the swing arm according to the swing arm adjustment distance to adjust the spring; Determine the adjustment effect. If the adjustment effect is unsatisfactory, repeat the adjustment until the adjustment effect is satisfactory.

2. The swing arm spring piece adjustment method based on linear function according to claim 1 is characterized in that: The step of calculating the intersection points among the interval a, the interval c and the interval b comprises the following steps: from Start taking multiple sets of data to calculate the correlation coefficient of interval a ,from start, is the maximum value, and multiple groups of data are taken from large to small to calculate the correlation coefficient of interval b , compare the correlation coefficients of multiple groups of data Determine the intersection point between interval a and interval c, and compare the correlation coefficients of multiple groups of data Determine the intersection point of interval b and interval c.

3. The swing arm spring piece adjustment method based on linear function according to claim 2 is characterized in that: Said from Start taking multiple sets of data to calculate the correlation coefficient of interval a ,from start, is the maximum value, and multiple groups of data are taken from large to small to calculate the correlation coefficient of interval b , including the following steps: from First take 3 data and calculate the correlation coefficient , and then gradually increase the data and calculate different correlation coefficients , , For all selected data The average value of For all selected data The average value of from start, For the maximum value, take 3 data from large to small and calculate the correlation coefficient , and then gradually increase the data and calculate different correlation coefficients , , For all selected data The average value of For all selected data The average value of .

4. The swing arm spring piece adjustment method based on linear function according to claim 3 is characterized in that: The correlation coefficient of comparing multiple groups of data Determine the intersection point between interval a and interval c, and compare the correlation coefficients of multiple groups of data Determining the intersection point of interval b and interval c includes the following steps: set up The judgment threshold is , , The closer to 1, the better the correlation. ,and When judging is the correlation coefficient at the junction of interval a and interval c, select is the intersection point between interval a and interval c, ; set up The judgment threshold is , , The closer to 1, the better the correlation. ,and ,judge is the correlation coefficient at the junction of interval b and interval c, select is the intersection point of interval b and interval c, .

5. The swing arm spring piece adjustment method based on linear function according to claim 2, characterized in that: Said from Start taking multiple sets of data to calculate the correlation coefficient of interval a ,from start, is the maximum value, and multiple groups of data are taken from large to small to calculate the correlation coefficient of interval b , including the following steps: from Start by selecting multiple sets of data with a fixed number of data. The fixed number of data in each set of data is indivual, , calculate different correlation coefficients , , For all selected data The average value of For all selected data The average value of from start, is the maximum value, and multiple groups of data with a fixed number of data are selected in turn. The fixed number of data in each group of data is indivual, , calculate different correlation coefficients , , For all selected data The average value of For all selected data The average value of .

6. The swing arm spring piece adjustment method based on linear function according to claim 5 is characterized in that: The correlation coefficient of comparing multiple groups of data Determine the intersection point between interval a and interval c, and compare the correlation coefficients of multiple groups of data Determining the intersection point of interval b and interval c includes the following steps: set up The judgment threshold is , , The closer to 1, the better the correlation. Compare at least three consecutive Value, when ,and When judging is the correlation coefficient at the junction of interval a and interval c, select is the intersection point between interval a and interval c, ; set up The judgment threshold is , , The closer to 1, the better the correlation. Compare at least three consecutive Value, when ,and ,judge is the correlation coefficient at the junction of interval b and interval c, select is the intersection point of interval b and interval c, .

7. The swing arm spring piece adjustment method based on linear function according to claim 4 or 6, characterized in that: Calculating the function of interval a, interval c, and interval b includes the following steps: For interval a, let the function of interval a be , ; in, , ; The solution is, , ; For interval b, let the function of interval b be , ; in, , ; The solution is, , ; For the c interval, let the function of the c interval be , ; Get from arrive The data of the point, when the spring deformation and If the same ; When the spring deformation exist and In between, , ; Summarizing the functions of interval a, interval b, and interval c, we get: 。 8. The swing arm spring piece adjustment method based on linear function according to claim 1, characterized in that: The method of using the adjusting block to move from a position not in contact with the swing arm and to move back and forth multiple times to push the swing arm to move includes: The regulating block pushes the swing arm to move in the positive direction to obtain a positive spring sheet deformation curve, and the positive spring sheet deformation curve is divided into a positive a interval, a positive c interval and a positive b interval according to the characteristics of the positive spring sheet deformation curve, and the intersection points between the positive a interval, the positive c interval and the positive b interval and the functions of the positive a interval, the positive c interval and the positive b interval are calculated; The regulating block pushes the swing arm to move in the negative direction to obtain a negative spring deformation curve. According to the characteristics of the negative spring deformation curve, the negative spring deformation curve is divided into negative a interval, negative c interval and negative b interval in sequence, and the intersection points among the negative a interval, negative c interval and negative b interval and the functions of the negative a interval, negative c interval and negative b interval are calculated.

9. The swing arm spring piece adjustment method based on linear function according to claim 8, characterized in that: When measuring the swing arm position of the swing arm to be adjusted and calculating the spring piece adjustment amount, the spring piece adjustment direction is simultaneously identified.

10. The swing arm spring piece adjustment method based on linear function according to claim 1, characterized in that: The step of judging the adjustment effect, if the adjustment effect is unsatisfactory, repeating the adjustment until the adjustment effect is satisfactory, comprises the following steps: Set the maximum number of repeated adjustments. If the adjustment effect is still unsatisfactory after reaching the maximum number of repeated adjustments, re-make a new spring deformation curve and calculate the intersection points among intervals a, c and b, as well as the functions of intervals a, c and b. Then adjust the spring of the swing arm to be adjusted.

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