In-place detection device and air transport vehicle control method

Abstract

The invention provides an in-place detection device applied to an automatic semiconductor material carrying system and an air transport vehicle control method, and is applied to the technical field of automatic material carrying. Accurate dynamic guidance when the first component and the second component are close to each other is ensured, effective physical protection is provided for the contact sensor and the trigger component, and the overall durability is enhanced. Besides, the trigger component is in stable contact with the contact type sensor at a preset position, so that the contact type sensor can continuously and stably output electric signals, signal interruption caused by unstable contact is effectively avoided, the accuracy and reliability of in-place detection are remarkably improved, and the service life of equipment is prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of automatic material handling, and in particular to an in-place detection device for a semiconductor aerial transport vehicle and an aerial transport vehicle control method. Background Art

[0002] In the automated material handling system (AMHS), the overhead hoist vehicle (OHT) is responsible for transporting front opening unified pods (FOUP) and front opening shipping boxes (FOSB) in semiconductor manufacturing plants. For example, an overhead hoist vehicle (OHT) usually includes a telescopic unit, a lifting unit, and a gripper unit. The gripper unit uses a finger mechanism to pick up and place the front opening unified pod (FOUP) and front opening shipping box (FOSB) located on the loadport and overhead buffer (OHB). The lifting unit is located below the telescopic unit and is connected to the gripper unit through a belt hoist mechanism. The OHT controls the belt hoist mechanism in the lifting unit to complete the gripper unit's functional requirements for picking up and placing FOUP and FOSB boxes.

[0003] During the operation of OHT, when the gripper unit is lifted to the preset position, the sensor needs to be triggered to output an electrical signal to indicate that the gripper unit has reached the preset position and transmit the electrical signal to the controller. After receiving the electrical signal from the sensor, the controller analyzes it and sends an action command to control the deceleration and stop action of the servo motor of the winch mechanism.

[0004] In the current solution, due to the flexible characteristics of the winch belt, the gripper unit is prone to shaking during the rising process, especially when approaching the preset position. This shaking makes it difficult for the sensor sensing rod on the gripper unit to be accurately inserted into the through hole on the lifting unit mounting plate, thereby failing to effectively trigger the photoelectric sensor located on the lifting unit mounting plate. This not only reduces the operating efficiency of the OHT, but also causes the sensing rod to interfere with or collide with the through hole wall or the sensor, increasing the risk of equipment damage and affecting the reliability and stability of the system.

[0005] Based on this, a new arrival detection device and an arrival control method for an aerial transport vehicle are needed. Summary of the invention

[0006] In view of this, the present application provides an arrival detection device and control method applied to a semiconductor aerial transport vehicle, which has a significant role and value in achieving the technical requirements of reliability and stability of the OHT system operation.

[0007] This application provides the following technical solutions: The present application provides an in-place detection device for a semiconductor automatic material handling system, comprising: a first guide portion, a contact sensor, a second guide portion and a trigger component; The first guide portion and the contact sensor are mounted on a first component, and the second guide portion and the trigger component are mounted on a second component; In the process of the first component and the second component approaching each other: the first guide portion and the second guide portion can be dynamically guided by interaction; the contact sensor can be triggered by the trigger component and output an electrical signal; A control unit controls the first component and the second component to stop approaching each other in response to the electrical signal.

[0008] The present application also provides a method for controlling an aerial transport vehicle, the aerial transport vehicle comprising a controller, a walking mechanism, a lifting unit and a gripper unit; Using any one of the in-place detection devices described in the present application to control and monitor the relative positions of the lifting unit and the clamping claw unit; When the aerial transport vehicle is in a state of picking up goods, the gripper unit gradually approaches the lifting unit, and when the distance between the gripper unit and the lifting unit changes from D1 to D3, the first guide part and the second guide part are used for dynamic guidance, and the trigger component is used to trigger the contact sensor to continuously output an electrical signal; the controller controls the gripper unit to stop approaching the lifting unit based on the electrical signal; When the aerial transporter is in a traveling state, the controller determines that the distance between the gripper unit and the lifting unit is maintained at D3 based on the continuous state of the electrical signal.

[0009] Compared with the prior art, the beneficial effects that can be achieved by this application include at least: By installing the contact sensor and the trigger component on the first guide part and the second guide part respectively, not only the precise dynamic guiding is ensured when the first component and the second component are close to each other, but also effective physical protection is provided for the contact sensor and the trigger component, and the overall durability is enhanced. When the components are close to each other to a preset position, the guide part ensures precise alignment, and the trigger component contacts the sensor to generate a sensor signal indicating the relative distance between the components, which not only improves the accuracy and reliability of in-place detection, but also significantly enhances the stability and reliability of the entire system. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0011] Figure 1 This is a schematic diagram of the structure of the OHT gripper unit rising into position; Figure 2 It is a schematic diagram of the structure of the OHT gripper unit during the ascending process; Figure 3 It is the existing solution for OHT Z-axis rise in place; Figure 4 It is the working state 1 of the in-place sensor in this application; Figure 5 It is the working state 2 of the in-place sensor in this application; Figure 6-1 This is a cross-sectional view of a position detection device in the present application when it is working. Figure 1 Figure 6-2 This is a cross-sectional view of a position detection device in the present application when it is working. Figure 2 ; Figure 7 It is a schematic diagram of the structure in which the second guide portion is installed on the clamping jaw unit in the present application; Figure 8 It is an enlarged schematic diagram of a local structure in which the second guide portion is installed on the clamping jaw unit in the present application; Fig. 9 It is a schematic diagram of the structure in which the first guide part is installed on the lifting unit in the present application; Fig.10 It is a schematic diagram of the structure of the OHT gripper unit lifting along the Z axis in the present application; Fig.11 is a schematic diagram of a contact sensor in this application; In the figure: 1. Traveling mechanism; 2. Car body; 3. Telescopic unit; 4. Lifting unit; 5. Gripping unit; 6. Material loader; 61. Cover door; 41. first mounting plate; 411. through hole; 412. photoelectric sensor; 42. belt; 43. first mounting base; 431. first sub-seat; 432. second sub-seat; 44. first guide portion; 441. first guide surface; 442. first through space; 443. first inner wall; 45. contact sensor; 451. contact portion; 452. moving portion; 453. fixing portion; 46. buffer component; 47. connecting member; 48. hoisting mechanism; 51. Second mounting plate; 52. Sensing rod; 53. Second mounting base; 531. Elastic component; 532. Boss; 54. Second guide portion; 541. Second guide surface; 542. First chamber; 543. Second chamber; 5431. Buffer space; 544. Second through space; 545. Second inner wall; 546. Slot; 547. First side surface; 548. Second side surface; 549. Preset space; 55. Trigger component; 551. Trigger portion; 552. Non-trigger portion. DETAILED DESCRIPTION

[0012] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0013] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. The present application can also be implemented or applied through other different specific implementation methods. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0014] The overhead hoist vehicle (OHT) runs on an overhead track (not shown in the figure) and is used to pick up and place the material loader 6 on the transport source; the transport source is a machine, an overhead buffer (OHB), etc.; the material loader 6 is a front opening wafer box (FOUP), a front opening shipping box (FOSB), etc.

[0015] like Figures 1 to 3 , Figures 9-10 As shown, the aerial transport vehicle mainly includes the following structures: The traveling mechanism 1 is installed above the vehicle body 2, driving the vehicle body 2 to move along a predetermined travel route on the aerial track (not shown in the figure); the vehicle body 2 is connected to the traveling mechanism 1 and constitutes the main structure of the OHT, carrying other components; the telescopic unit 3 is connected to the vehicle body 2, driving all the mechanisms on the lower side of the telescopic unit 3 to move along the lateral width direction of the vehicle body 2 (i.e., the left and right direction, a direction perpendicular to the travel direction of the vehicle body 2); the lifting unit 4 is connected to the lower side of the telescopic unit 3, and controls the winding amount or release amount of the belt 42 to achieve the lifting and lowering of the clamping unit 5 by a specified amount, so as to clamp the material loader 6 from the conveying source, or release the material loader 6 to the conveying source; the clamping unit 5 is connected to the lifting unit 4 through the belt 42, and can clamp the material loader 6 and keep the material loader 6 in a clamped state; when the aerial transport vehicle is carrying the material loader 6, the cover door 61 of the material loader 6 is in a closed state.

[0016] The lifting unit 4 is provided with a hoisting mechanism 48, one end of the belt 42 is connected to the hoisting mechanism 48, and the other end is connected to the clamping unit 5; the controller of the aerial transport vehicle controls the clamping unit 5 to make the material loader 6 in a clamping state or a non-clamping state or switch between the two states; the controller of the aerial transport vehicle controls the hoisting mechanism 48 to execute a driving command to change the position of the other end of the belt 42 in the vertical direction. When the clamping unit 5 is lifted to the expected position along with the other end of the belt 42, the controller controls the hoisting mechanism 48 to execute a non-driving command to keep the clamping unit 5 at the expected position.

[0017] like Figure 3 As shown, currently, a photoelectric detection method is used to determine whether the clamping jaw unit 5 has moved to the expected position, that is, a through hole 411 is set on the first mounting plate 41 of the lifting unit 4, and a photoelectric sensor 412 is set at a position above the first mounting plate 41 corresponding to the through hole 411, and a sensing rod 52 is set on the clamping jaw unit 5; when the sensing rod 52 rises with the clamping jaw unit 5, it will pass through the through hole 411, and at the same time, it will block the emitted light of the photoelectric sensor 412 and reflect the returned light, and the returned light will trigger the photoelectric sensor 412 to upload an electrical signal, and the controller determines that the clamping jaw unit 5 has moved to the expected position in response to the electrical signal, and then keeps the clamping jaw unit 5 at the expected position. Among them, the photoelectric sensor 412 can be a slot-type photoelectric sensor.

[0018] However, when the clamping unit 5 is lifted in an empty or clamped material loader 6 state, it is easy to shake due to the influence of factors such as the gravity of the material loader 6 and the flexible characteristics of the belt 42. When the weight of the material loader 6 clamped by the clamping unit 5 is different, the tension of the belt 42 changes differently, that is, the degree of shaking of the clamping unit 5 during the lifting process is different; at the same time, the smaller the size difference between the through hole 411 and the size of the sensing rod 52, the easier it is to achieve effective triggering of the photoelectric sensor 412; the above-mentioned various factors make it difficult for the sensor sensing rod 41 to be accurately inserted into the through hole 411 when it is close to the preset position, and even the sensing rod 52 directly interferes with the hole wall of the through hole 411, or collides with the photoelectric sensor 412, thereby causing the controller to fail to obtain the electrical signal that the clamping unit 5 has run to the expected position in time, and continue to control the lifting of the clamping unit 5, which leads to adverse consequences such as overload alarm of the driving motor of the lifting unit 4, damage to the photoelectric sensor 412, collision between the clamping unit 5 and the lifting unit 4, or other functional failures. The material loader 6 may be understood as a wafer box that is empty, partially filled, or completely filled with wafers.

[0019] Based on the above problems, this application proposes a detection device for reaching the target position, and the overall idea is as follows: When the first component and the second component approach each other, dynamic guidance is achieved by the first guide part and the second guide part respectively arranged on the first component and the second component; by making the contact sensor connected to the first guide part and the trigger component connected to the second guide part abut against each other at a preset position, the trigger contact sensor outputs and uploads an electrical signal to the controller, and the controller controls the first component and the second component to approach each other in response to the electrical signal. The speed is slowed down until it stops. The device takes into account the full use of space and the simplicity of operation. The components are compact in structure, which can work effectively in a limited space and ensure the efficient operation of the system, which not only improves the reliability and durability of the system, but also enhances the stability and efficiency of the operation. In addition, the design of the device also has good adaptability and versatility, and can be easily integrated into the existing OHT system without large-scale transformation of existing equipment, thereby reducing the upgrade cost and improving the flexibility of the system.

[0020] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0021] like Figure 4 and Figure 5As shown, the present application provides an in-place detection device applied to a semiconductor aerial transport vehicle, including: a first guide portion 44, the first guide portion 44 is installed on the first component of the aerial transport vehicle; a contact sensor 45, the contact sensor 45 is arranged in whole or in part in the first guide portion 44; a second guide portion 54, the second guide portion 54 is installed on the second component of the aerial transport vehicle; a trigger component 55, the trigger component 55 is arranged in whole or in part in the second guide portion 54; in the process of approaching each other: the first guide portion 44 and the second guide portion 54 can be dynamically guided by interaction; the contact sensor 45 can be triggered by the trigger component 55 and output an electrical signal, and the control unit controls the first component and the second component to stop approaching each other in response to the electrical signal.

[0022] The first guide portion 44 and the contact sensor 45 are mounted on the first component, and the second guide portion 54 and the trigger component 55 are mounted on the second component; when the first component and the second component approach each other to the first preset position, dynamic guidance begins through the interaction between the first guide portion and the second guide portion; when the first component and the second component approach each other under the action of dynamic guidance until the contact sensor 45 is triggered by the trigger component 55 and outputs an electrical signal, the first component and the second component approach each other to the second preset position (or, when the first component and the second component approach each other to the second preset position under the action of dynamic guidance, the contact sensor 45 is triggered by the trigger component 55 and outputs an electrical signal); when the first component and the second component approach each other from the second preset position to the third preset position and remain at the third preset position, the contact sensor 45 is continuously triggered by the trigger component 55 and continuously outputs an electrical signal; wherein the first component and the second component approach each other along the connection direction between the two components; when the first component and the second component approach each other to the first preset position, the second preset position, and the third preset position, the distances between the two components are D1, D2, and D3, respectively, and D1>D2>D3.

[0023] As an example but not a limitation, the first component may be the lifting unit 4, the second component may be the clamping claw unit 5, the transmission part may be the belt 42 provided on the hoisting mechanism 48, and the control part may be the controller of the aerial transport vehicle. The transmission part is provided between the first component and the second component; the control part controls the transmission part to make the first component and the second component approach or move away from each other along the connection direction between the two components.

[0024] In one embodiment, if Figure 5 and Fig.10As shown, the dynamic guidance when the first guide part 44 and the second guide part 54 are close to each other includes: the lifting unit 4 is stationary at a height, the clamping jaw unit 5 is in an empty state or a clamping material loader 6 state and is located at a corresponding position below the lifting unit 4; the clamping jaw unit 5 is gradually lifted by the belt 42 in the vertical direction, and is located at a first preset position H1 and a second preset position H2 in the vertical direction at a first moment T1 and a second moment T2 respectively; when the clamping jaw unit 5 is lifted to the first preset position H1 by the other end of the belt 42, this is the first moment T1 of the dynamic guidance, from the first moment T1, the first guide part 44 and the second guide part 54 gradually cooperate and restrict each other, even if the clamping jaw unit 5 is affected by factors such as the gravity of the material loader 6 and the flexible tension of the belt 42 to produce different degrees of shaking, since the first guide part 44 on the clamping jaw unit 5 is limited to swing in a smaller space, the clamping jaw unit 5 is guided and lifted within the allowed swing range; when the clamping jaw unit 5 is lifted to the second preset position H1 by the other end of the belt 42 When H2 is set, this is the second moment T2 of dynamic guiding. From the second moment T2, the first guide part 44 and the second guide part 54 are in an engaged state, and the trigger component 55 begins to abut the contact sensor 45, that is, the contact sensor 45 is triggered and uploads an electrical signal to the controller, and the controller controls the hoisting mechanism 48 to execute a non-lifting instruction in response to the electrical signal (manifested as the belt 42 no longer drives the clamping jaw unit 5 to rise); or, when the clamping jaw unit 5 is lifted to the second preset position H2 by the other end of the belt 42, although the first guide part 44 and the second guide part 54 are about to be in an engaged state (not yet engaged), from the second moment T2, the trigger component 55 begins to abut the contact sensor 45, the contact sensor 45 is triggered and uploads an electrical signal to the controller, and the controller controls the hoisting mechanism 48 to execute a non-lifting instruction in response to the electrical signal (manifested as the belt 42 no longer drives the clamping jaw unit 5 to rise; that is, the servo motor of the hoisting mechanism 48 is controlled to decelerate to stop, ensuring that the clamping jaw unit 5 stops accurately at the preset height position).

[0025] In another embodiment, if Figure 5 and Fig.10 As shown, the dynamic guiding when the first guide part 44 and the second guide part 54 approach each other also includes: the clamping jaw unit 5 is gradually lifted by the belt 42, and is located at the third preset position H3 along the vertical direction at the third moment T3; from the contact sensor 45 being triggered and uploading an electrical signal to the controller, the controller responds to the electrical signal to control the hoisting mechanism 48 to execute the non-lifting instruction, to the clamping jaw unit 5 completely stopping and maintaining the third preset position H3, a response time period T2~T3 is required, that is, within the time period T2~T3, the clamping jaw unit 5 will still be driven by the belt 42 to lift slowly, then the trigger component 55 installed on the clamping jaw unit 5 continues to abut against the contact sensor 45, so that the contact sensor 45 continues to upload electrical signals to the controller.

[0026] In another embodiment, as Figure 5 and Fig.10 shown, when the first guiding portion 44 and the second guiding portion 54 approach each other, the dynamic guiding further includes: the jaw unit 5 is lifted by the belt 42 to the third preset position H3 and maintained at the third preset position H3; the triggering member 55 mounted on the jaw unit 5 continuously abuts against the contact sensor 45, and the contact sensor 45 continuously uploads an electrical signal to the controller; based on the above state, the controller can determine that the jaw unit 5 has been completely retracted into the vehicle body 2, and then the controller can further control the traveling mechanism 1 to travel on the track system (not shown in the figure). At this time, if the material loader 6 is clamped on the jaw unit 5, the material loader 6 can be transported to the corresponding conveying source.

[0027] Among them, the relationship between T1, T2, and T3 is T1 < T2 < T3, and the height relationship between H1, H2, and H3 in the vertical direction is H1 < H2 < H3.

[0028] In some embodiments, the first component and the second component approach each other along their connection direction, including: when the first component is stationary, the second component gradually approaches the first component; or, when the second component is stationary, the first component gradually approaches the second component; or, the first component and the second component move simultaneously and approach each other; or, the first component and the second component move in different time periods within a period of time and approach each other. Among them, any of the above approaching methods satisfies that when the first component and the second component approach each other to the first preset position, the second preset position, and the third preset position, the distances between them are D1, D2, and D3 respectively, and D1 > D2 > D3.

[0029] In one embodiment, as Figure 5 shown, one end of the first guiding portion 44 close to the second guiding portion 54 is provided with a first guiding surface 441, and one end of the second guiding portion 54 close to the first guiding portion 44 is provided with a second guiding surface 541; the first guiding surface 441 and the second guiding surface 541 perform dynamic guiding when the lifting unit 4 and the jaw unit 5 approach each other.

[0030] Specifically, when the clamping jaw unit 5 is lifted to the first preset position H1 by the other end of the belt 42 at the first moment T1, the first guide surface 441 of the first guide portion 44 begins to enter the restricted space enclosed by the second guide surface 541 of the second guide portion 54, that is, the first guide portion 44 on the clamping jaw unit 5 is restricted to swing in a smaller space, and then the clamping jaw unit 5 is guided and lifted within the allowed swinging range; when the clamping jaw unit 5 is lifted to the second preset position H2 by the other end of the belt 42 at the second moment T2, the first guide surface 441 of the first guide portion 44 and the second guide surface 541 of the second guide portion 54 are always in an interlocking state, such as the first guide surface 441 and the second guide surface 541 form an integral structure; or, when the clamping jaw unit 5 is lifted to the second preset position H2 by the other end of the belt 42 at the second moment T2, the first guide surface 441 of the first guide portion 44 and the second guide surface 541 of the second guide portion 54 are about to be in an interlocking state. When the first guide surface 441 and the second guide surface 541 are in the engaged state, the first guide portion 44 and the second guide portion 54 will no longer move relative to each other.

[0031] In one embodiment, if Figure 5 , Figure 6-1 and Figure 6-2 As shown, the first guide surface 441 encloses a first defined space, and the second guide surface 541 encloses a second defined space; the first defined space and the second defined space are complementary; or, the second defined space is larger than the first defined space; that is, the first guide surface 441 and the second guide surface 541 can fit or fit together; when the lifting unit 4 and the clamping jaw unit 5 approach each other from the first preset position to the second preset position, the gap between the first defined space and the second defined space gradually decreases.

[0032] Specifically, when the first limited space and the second limited space are complementary, the first guide surface 441 forms a convex guide surface, that is, a definite shape similar to a boss is formed and the shape occupies a limited space; the second guide surface 541 forms a concave guide surface, that is, a definite shape similar to a groove is formed and the shape encloses a limited space; when the lifting unit 4 and the clamping jaw unit 5 approach each other from the first preset position to the second preset position, the convex guide surface gradually merges into the limited space enclosed by the concave guide surface until the convex guide surface is completely in contact with the concave guide surface; When the second limited space is larger than the first limited space, when the lifting unit 4 and the clamping jaw unit 5 approach each other from the first preset position to the second preset position, the part of the convex guide surface and the part of the concave guide surface gradually fit together.

[0033] Among them, the first guide surface 441 and the second guide surface 541 can also be conical guide surfaces, for example, the first guide portion 44 is a structural component of a conical pin or a conical sleeve; but no specific limitation is made here; the gap between the first defined space and the second defined space refers to the gap between at least one group of corresponding surfaces gradually decreasing when the two move relative to each other.

[0034] In one embodiment, if Fig.11 As shown, the contact sensor 45 has a preset compression stroke when under pressure; the contact sensor 45 includes a contact portion 451, a movable portion 452 and a fixed portion 453 which are sequentially distributed with the contact portion 451 in the axial direction; when the contact portion 451 is under pressure, the movable portion 452 gradually approaches the fixed portion 453 in the axial direction; wherein the axial direction is parallel to the length direction of the contact sensor 451.

[0035] Specifically, when the clamping jaw unit 5 is lifted to the second preset position H2 at the second moment T2, the trigger component 55 begins to abut against the contact portion 451 of the contact sensor 45, and the contact sensor 45 is triggered and transmits an electrical signal to the controller; when the clamping jaw unit 5 is gradually lifted to the third preset position H3 during the time period T2 to T3, the trigger component 55 continues to abut against the contact portion 451 of the contact sensor 45, causing the contact portion 451 to be compressed, and at the same time, the moving portion 452 gradually approaches the fixed portion 453 along the axial direction of the contact sensor 451 based on the pressure on the contact portion 451, so that the contact sensor 45 continues to transmit an electrical signal to the controller. Among them, the axial direction of the contact sensor 451 is Fig.11 The length direction of the touch sensor 451 is shown.

[0036] In one embodiment, if Figure 5 , Figure 6-1 and Figure 6-2 As shown, the contact portion 451 of the contact sensor 45 is on the same horizontal plane as one end of the first guide surface 441. When the first component and the second component approach each other along the connection direction between the two, the trigger component 55 can accurately contact the contact portion 451 at a predetermined position, reducing the risk of false triggering or missed triggering due to misalignment or offset between the components.

[0037] In one embodiment, the trigger component 55 may be a screw of equal height, and one end of the screw of equal height may be designed as a planar structure, which helps to stably trigger the contact sensor 45 .

[0038] In one embodiment, if Figure 5 , Figure 6-1 , Figure 6-2 , Fig.11As shown, the contact portion 451 is located at one end of the contact sensor 45 close to the first guide surface 441; when the first component and the second component approach each other from the second preset position to the third preset position and remain at the third position, the trigger component continues to press the contact portion, and the movable portion gradually approaches the fixed portion along the axial direction to the extreme stop position; at the same time, the contact sensor continuously outputs an electrical signal and uploads it to the controller; the controller controls the first component and the second component to stop approaching each other in response to the electrical signal.

[0039] Specifically, in order to trigger the contact sensor 45 in time, the contact portion 451 is disposed at one end of the contact sensor 45 close to the first guide surface 441. For example, when the contact portion 451 is a horizontal plane, the horizontal plane may be coplanar with the end surface of the first guide portion close to the second guide portion or have a small spacing therebetween. When the lifting unit 4 and the clamping unit 5 approach each other from the second preset position to the third preset position and remain at the third position, the trigger component continues to press the contact portion 451, and the moving portion 452 gradually approaches the fixed portion 453 along the axial direction to the extreme stop position; at the same time, the contact sensor continuously outputs an electrical signal to the controller; the controller controls the first component and the second component to stop approaching each other in response to the electrical signal.

[0040] The limit stop position is the maximum position allowed for the moving part 452 to move, for example Fig.11 The maximum displacement that the moving portion 452 can move is shown as the distance between the moving portion 452 and the fixed portion 453 .

[0041] By utilizing the characteristic that after the contact sensor 45 is compressed, the moving part 452 will have a certain stroke displacement, thereby ensuring that the contact sensor 45 can continuously and stably output electrical signals during the rising process of the clamping jaw unit 5; or, ensuring that when the OHT is driving at high speed, turning or passing through a fork in the road, the clamping jaw unit 5 is displaced due to a slight shake, and the contact between the contact part 451 of the contact sensor 45 and the trigger component 55 remains stable and will not be intermittent, thereby avoiding signal interruption due to unstable contact and ensuring the continuity and stability of the signal, thereby achieving high-precision control of the clamping jaw unit rising to a preset position and maintaining a preset position on the Z axis, thereby improving the reliability of the entire system.

[0042] The stroke of the moving part 452 can be set according to the dynamic characteristics of the OHT system and the shaking amplitude of the clamping unit, so as to accurately control the clamping unit 5 to stop at a preset position, avoiding misoperation caused by inaccurate position, such as over-lifting or failure to reach the specified position, thereby reducing operational risks.

[0043] The dynamic characteristics of the OHT system and the swing amplitude of the gripper unit include: the dynamic behavior of the OHT when accelerating, decelerating and stopping; the changes in the speed of the gripper unit during the rising and falling processes, and how these changes affect the contact between the trigger component and the contact sensor; considering the different weights of the goods gripped by the gripper unit 5 (empty boxes, wafer boxes partially filled or completely filled with wafers), etc.

[0044] The repeatability of the contact sensor 45 reaches ±0.001 mm, which can reduce the accumulation of errors. For example, in the continuous handling and assembly process, the small errors of each positioning will accumulate, and the high-precision sensor can effectively avoid this situation and ensure the stability and reliability of the OHT in long-term operation.

[0045] When the contact sensor outputs an electrical signal and uploads it to the controller, the controller responds to the electrical signal by controlling the hoisting mechanism 48 to stop winding the belt 47, so that the lifting unit 5 and the clamping claw unit 4 stop approaching each other. The controller continuously monitors the electrical signal output by the contact sensor, and once receiving the electrical signal, the controller immediately analyzes the electrical signal and sends corresponding subsequent control instructions.

[0046] In one embodiment, if Figures 4 and 5 As shown, the contact sensor 45 is disposed in whole or in part in the first guide portion 44; the first guide portion 44 is configured as a hollow structure, the hollow structure forms a first through space 442, and the contact sensor 45 is disposed in the first through space 442. In some embodiments, the contact sensor 45 is connected to the first guide portion 44 in an adjustable position.

[0047] Specifically, in order to make the overall structure more compact and to facilitate installation, maintenance, and ensure the travel of the movable part 452, the contact sensor 45 is connected to the hollow structure of the first guide part 44; and a partial structure of the contact sensor 45 is extended out of one end of the contact sensor 45, but it is not limited to extending the partial structure of the contact sensor 45 out of one end of the contact sensor 45; the first guide part 44 forms a first inner wall 443 based on the hollow structure, and the outer surface size of the movable part 452 of the contact sensor 45 is slightly smaller than the size of the first inner wall 443, so that the movable part 452 can gradually approach the fixed part 453 along the axial direction.

[0048] In one embodiment, if Figure 4 , Figure 6-1 and Figure 6-2As shown, the first guide portion 44 is fixedly connected to the first component via the first mounting base 43; the first mounting base 43 includes a first sub-seat 431 and a second sub-seat 432 that are adjacently distributed, the first sub-seat 431 is fixed to the side of the second sub-seat 432 away from the second guide portion 54 via a connecting member 47, and the second sub-seat 432 is fixed to the first component via the connecting member 47; the contact sensor 45 is positionally adjustable and connected to the first sub-seat 431; a buffer component 46 is provided on the side of the second sub-seat 432 that faces the second guide portion 54, and the buffer component 46 can reduce the impact of external forces on the second sub-seat 432.

[0049] Specifically, Figure 4 , Figure 6-1 , Figure 6-2 and Fig.10 As shown, the first guide portion 44 is fixedly connected to the lifting unit 4 through the first mounting base 43; preferably, as Figures 8-10 As shown, the lifting unit 4 is provided with a first mounting plate 41, and the first guide portion 44 is fixedly connected to the first mounting plate 41 through the second sub-seat 432. The first mounting base 43 includes a first sub-seat 431 and a second sub-seat 432 that are adjacently distributed, for example, distributed up and down; preferably, the size of the first sub-seat 431 is smaller than the size of the second sub-seat 432; the connecting member 47 is a connecting member such as a universal screw; but the connection method between the first sub-seat 431, the second sub-seat 432, and the first mounting plate 41 is not limited to the use of the connecting member 47, and can also be a variety of methods such as snap-fitting, as long as it is satisfied to ensure that the overall position of the contact sensor 45 will not be offset due to vibration or impact; The contact sensor 45 is connected to the first mounting base 43 of the first guide portion 44 in an adjustable position, or the contact sensor 45 is connected to the first mounting base 43 connected to the first guide portion 44 in an adjustable position; specifically, the contact sensor 45 is connected to the first sub-seat 431 in an adjustable position, for example, the contact sensor 45 and the first sub-seat 431 are connected by threaded connection or multi-stage snap-fit ​​connection, etc., so that the position of the contact sensor 45 relative to the first sub-seat 431 can be finely adjusted, that is, the distance between the contact portion 451 and the trigger component 55 can be adjusted by setting the installation position of the contact sensor 45, that is, the triggering timing of the contact sensor 45 can be controlled according to actual needs; A buffer component 46 is provided on the second sub-seat 432. When the space enclosed by the second guide surface 541 of the second guide portion 54 is larger than the volume of the first guide portion 44, when the clamping jaw unit 5 is lifted to the third preset position or the lifting is uncontrolled, the end surface of the second guide portion 54 facing the second sub-seat 432 may impact the second sub-seat 432, and the buffer component 46 can reduce the impact of external force on the second sub-seat 432, so as to extend the service life of the second sub-seat 432.

[0050] In one embodiment, if Figure 5 , Figure 6-1 , Figure 6-2 , Figure 7 , Figure 8 As shown, the trigger component 55 is arranged in whole or in part in the second guide portion 54; the second guide portion 54 includes: a first chamber 542 arranged at one end of the second guide portion 54, a second chamber 543 arranged at the other end of the second guide portion 54, and a second through space 544 connecting the first chamber 542 and the second chamber 543; the trigger component 55 passes through the second through space 544, and the two ends of the trigger component 55 extend to the first chamber 542 and the second chamber 543 respectively; the circumferential dimension of one side of the second through space 544 is smaller than the circumferential dimension of the preset space 549, and the circumferential dimension of the other side of the second through space 544 is smaller than the circumferential dimension of the buffer space 5431; wherein the preset space 549 is the space where the first chamber 542 contacts the second through space 544, and the buffer space 5431 is the space where the second chamber 543 contacts the second through space 544; Or, the second guide portion 54 includes: a first chamber 542 arranged at one end of the second guide portion 54, and a third through space (not shown) penetrating the first chamber 542 and the other end surface of the second guide portion 54; the circumferential dimension of one side of the third through space (not shown) is smaller than the circumferential dimension of the preset space 549, wherein the preset space 549 is the space where the first chamber 542 contacts the third through space; the trigger component 55 passes through the third through space, and both ends of the trigger component 55 extend to the outside of the first chamber 542 and the other end surface of the second guide portion 54, respectively; wherein the trigger component 55 can move in the axial direction, the axial direction is the Y-axis direction, and the circumferential dimension is the dimension formed around the Y-axis.

[0051] Specifically, the second guide portion 54 is provided with a first chamber 542 at one end thereof facing the first guide portion 44. The first chamber 542 includes a second guide surface 541 to enclose a second limited space and a preset space 549. The preset space 549 is a space between the second limited space and the second through space 544 or a space between the second limited space and the third through space (not shown). The circumferential dimension of the second through space 544 is respectively smaller than the circumferential dimensions of the first chamber 542 and the second chamber 543 at the contact points with the first chamber 542 and the second chamber 543. The circumferential dimension of the second through space 544 at the contact points with the second chamber 543 is, for example, the circumferential dimension of the preset space 549. The second chamber 543 The circumferential dimension at the point closest to the second through space 544 or the dimension formed by the second inner wall 545; so that one end of the trigger component 55 that passes through the second through space 544 and extends to the first chamber 542 will not enter the second through space 544 from the first chamber 542 under the influence of external force, and the other end of the trigger component 55 that passes through the second through space 544 and extends to the second chamber 543 has sufficient connection space with other components in the second chamber 543; the second guide portion 54 is provided with a second chamber 543 at its other end away from the first guide portion 44, and the second chamber 543 is formed with an accommodating space for accommodating the trigger component 55 and / or the second mounting base 53.

[0052] Alternatively, the second guide portion 54 includes: a first cavity 542 disposed at one end of the second guide portion 54 facing the first guide portion 44, and a third through space (not shown) penetrating the first cavity 542 and the other end surface of the second guide portion 54 facing away from the first guide portion 44; the circumferential dimension of the third through space is smaller than the circumferential dimension of the first cavity 542 at the contact point with the first cavity 542, for example, smaller than the circumferential dimension of the preset space 549; One end of the trigger component 55 passes through the third through space and is located in the first chamber 542 , and the other end is located outside the other end surface of the second guide portion 54 , so as to connect the other end of the trigger component 55 to the clamping jaw unit 5 .

[0053] Among them, Figure 6-1 and Figure 6-2 As shown, the circumferential dimension is the dimension formed around the Y-axis.

[0054] The trigger component 55 can move in the axial direction in the second through space 544 or the third through space (not shown). Figure 6-1 and Figure 6-2 As shown, the axial direction is the Y-axis direction. In other embodiments, the trigger component 55 can move toward the touch sensor 45 along the connection direction between the first component and the second component in the second guide portion 54 and continuously press against the touch sensor 45 .

[0055] Optionally, the trigger component 55 is partially disposed in the second through space 544 of the second guide portion 54 ; and one end of the second mounting base 53 can be disposed in the second chamber 543 .

[0056] Specifically, the other end of the trigger component 55 is connected to one end of the second mounting base 53, and one end of the second mounting base 53 is also arranged inside the second chamber 543; wherein, the trigger component 55 and the second mounting base 53 can be snap-connected, threadedly connected, etc., which are not specifically limited here; along the length direction after the trigger component 55 is connected to the second mounting base 53, the trigger component 55 can adjust the connection position relative to the second mounting base 53 as needed.

[0057] Alternatively, the trigger component 55 passes through the third through space of the second guide portion 54, one end of which is used to abut against the trigger component 55 under specific conditions, and the other end protrudes from the third through space for fixedly connecting the clamping claw unit 5; wherein the trigger component 55 and the wall surface of the third through space can be slidably connected, which is not specifically limited here.

[0058] In one embodiment, if Figure 5 , Figure 8 As shown, the second guide portion 54 is connected to the second component through the second mounting base 53; one end of the second mounting base 53 is slidably connected to the second chamber 543, and the other end is fixedly connected to the second component; Alternatively, the second guide portion 54 is connected to the second component via the trigger component 55 .

[0059] Specifically, the second mounting base 53 is slidably connected to the second guide portion 54, so that the second mounting base 53 can slide along the second wall surface 545 in the second chamber 543; one end of the second mounting base 53 is slidably connected to the second chamber 543, and the other end is fixedly connected to the clamping jaw unit 5; The space design of the second chamber 543 needs to be sufficient to accommodate the second mounting base 53 and the trigger component 55 , while also considering the movement range of the trigger component 55 in the second chamber 543 .

[0060] In order to ensure that the second mounting base 53 does not accidentally fall off during the real-time process, the second mounting base 53 may be disposed at a position half or more than half of the second chamber 543 .

[0061] Or, one end of the trigger component 55 is slidably connected to the second guide portion 54, and the other end is fixedly connected to the clamping jaw unit 5, and the fixed connection method includes screw connection, etc.; Optionally, the clamping jaw unit 5 is provided with a second mounting plate 51, and the other end of the second mounting base 53 is fixedly connected to the second mounting plate 51; or, the clamping jaw unit 5 is provided with a second mounting plate 51, and the other end of the trigger component 55 is fixedly connected to the second mounting plate 51, and the fixed connection method includes screw connection, etc.; Preferably, the first mounting plate 41 is disposed at the lower end of the lifting unit 41 , and the second mounting plate 51 is disposed at the upper end of the clamping jaw unit 5 .

[0062] Optionally, since one end of the second mounting base 53 is slidably connected to the second chamber 543, the second chamber 543 needs to provide sufficient internal space; based on the purpose of setting the sliding of one end of the second mounting base 53 to continuously push the trigger component 55 to trigger the contact portion 451, the sliding stroke of one end of the second mounting base 53 is at least the same as the stroke of the moving portion 452 gradually approaching the fixed portion 453 along the axial direction to the extreme stop position; the space provided by the second chamber 543 is at least larger than the sliding stroke of one end of the second mounting base 53; and the initial position of one end of the second mounting base 53 in the second chamber 543 should be comprehensively considered and determined based on the stroke of one end of the second mounting base 53 in different directions.

[0063] In one embodiment, if Figure 5 , Figure 6-1 and Figure 6-2 As shown, a slot 546 is formed at one end of the second mounting base 53; one end of the trigger component 55 is located in the first chamber 542 for contacting the touch sensor 45, and the other end is located in the second chamber 543 and is connected to the slot 546 in an adjustable position; Alternatively, one end of the trigger component 55 is located in the first chamber 542 for contacting the touch sensor 45 , and the other end is fixedly connected to the second component.

[0064] Specifically, a slot 546 is opened inward from the end surface of one end of the second mounting base 53, and the other end of the trigger component 55 can be connected to the slot 546 in an adjustable position, and the connection method, such as threaded connection, snap connection, etc., is used to control the depth of the other end of the trigger component 55 entering the slot 546 to meet actual needs; preferably, the depth of the slot 546 is greater than the depth of the other end of the trigger component 55 entering the slot 546; or, the other end of the trigger component 55 directly extends out of the third through space and is fixedly connected to the clamping jaw unit 5.

[0065] Optionally, the central axes of the slot 546 , the trigger component 55 , and the second through space 544 are collinear.

[0066] Optionally, the second chamber 543 is provided with a buffer space 5431 near the second through space 544, in which components with head elastic characteristics, such as springs, rubber rings, etc., can be arranged to alleviate the impact on the end face of the second chamber 543 caused by one end of the second mounting base 53 sliding along the second inner wall 545.

[0067] When the clamping jaw unit 5 is lifted from the second preset position to the third preset position: the second mounting base 53 is lifted accordingly and pushes the trigger component 55 to continuously press the contact portion 451 of the contact sensor 45 in the axial direction, and then the moving portion 452 continuously approaches the fixed portion 453 in the axial direction, so that the trigger component 55 continuously uploads electrical signals to the controller; or, the trigger component 55 fixedly connected to the clamping jaw unit 5 is lifted accordingly, and the trigger portion 551 continuously presses the contact portion 451 in the axial direction, and then the moving portion 452 continuously approaches the fixed portion 453 in the axial direction, so that the trigger component 55 continuously uploads electrical signals to the controller.

[0068] Optionally, the trigger component 55 can be a contour screw; one end of the contour screw can be optionally set to a planar structure, and the main body has a thread; the inner wall of the slot 546 is provided with a corresponding screw hole; the planar structure is conducive to stably triggering the contact portion 451 of the contact sensor 45, so that the contact sensor 45 can output an electrical signal in time; the contour screw can be installed in the slot 546 with an adjustable position.

[0069] Optionally, by adjusting the installation position of the other end of the trigger component 55 and the slot 546, the position of the trigger portion 551 in the preset space 549 is adjusted. For example, the end face of the trigger portion 551 can be made to coincide with the interface between the second limited space enclosed by the second guide surface 541 and the preset space 549, or the end face of the trigger portion 551 can be made to be located within the second limited space.

[0070] In one embodiment, if Figure 5 , Figure 6-1 and Figure 6-2 As shown, an elastic component 531 capable of elastic deformation is provided on the second mounting base 53 or the trigger component 55; when the second mounting base 53 or the trigger component 55 follows the second component and the first component to approach each other: in the first stage, the compression change amount of the elastic component 531 is from 0 to Q1; in the second stage, the compression change amount of the elastic component 531 is from Q1 to Q2; in the third stage, the compression change amount of the elastic component 531 is from Q2 to 0; wherein, the first stage is that the second component and the first component approach each other until the second preset position; the second stage is that the second component and the first component approach each other from the second preset position to the third preset position and remain at the third preset position; the third stage is that the first component and the second component change from the state of approaching each other at the third preset position to gradually separating from each other; 0 <Q1<Q2。

[0071] Specifically, an elastic component 531 is provided on the second mounting base 53; an elastic component 531 is provided on the trigger component 55 (this solution is not shown); a boss 532 is also provided on one end of the second mounting base 53 connected to the second component (such as the clamping claw unit 5); the elastic component 531 has the characteristic of being elastically deformable, for example, it is made of a spring, rubber or other materials; the elastic component 531 is restricted between the end surface of the other end of the second guide portion 54 and the boss 532; or, in a solution not shown in the figure, the elastic component 531 is restricted between the end surface of the other end of the second guide portion 54 and the other end of the trigger component 55; When the second mounting base 53 or the trigger component 55 follows the clamping claw unit 5 to approach the lifting unit 4 until the second preset position, the distance between the end surface of the other end of the second guide portion 54 and the boss 532 gradually decreases, and the usable space of the elastic component 531 gradually decreases, thereby generating compression deformation, and the compression change amount is 0 to Q1; In the process that the second mounting base 53 or the trigger component 55 follows the clamping unit 5 and the lifting unit 4 to approach each other from the second preset position to the third preset position and remain at the third preset position: the distance between the end surface of the other end of the second guide portion 54 and the boss 532 is further reduced, and the compression change amount of the elastic component 531 is from Q1 to Q2; The second mounting base 53 or the trigger component 55 follows the clamping jaw unit 5 and the lifting unit 4 from the state of being close to each other at the third preset position to gradually separating from each other, that is, during the process of the clamping jaw unit 5 descending along with the belt 47: the distance between the end surface of the other end of the second guide portion 54 and the boss 532 gradually increases until the initial distance, and the compression change amount of the elastic component 531 is from Q2 to 0, that is, the elastic component 531 gradually breaks away from the external force restriction and returns to the initial state, and at the same time bounces the boss 532 to the original position; Among them, 0 <Q1<Q2。

[0072] In one embodiment, if Figure 5 , Figure 6-1 and Figure 6-2 As shown, in the second stage or the third stage: one end of the second mounting base 53 gradually approaches or moves away from the first side surface 547, and the first side surface 547 is the side surface of the second chamber 543 close to the second through space 544; the other end of the second mounting base gradually approaches or moves away from the second side surface 548, and the second side surface 548 is the side surface of the second guide portion 54 close to the second mounting base 53; the change in the spacing between one end of the second mounting base 53 and the first side surface 547 is the same as the change in the spacing between the other end of the second mounting base 53 and the second side surface 548.

[0073] Specifically, during the process that the second mounting base 53 or the trigger component 55 follows the clamping jaw unit 5 and the lifting unit 4 from the second preset position to approach each other to the third preset position and remain at the third preset position: one end of the second mounting base 53 slides in the second chamber 543 and gradually approaches the buffer space 5341; at the same time, the boss 532 at the other end of the second mounting base 53 pushes the elastic component 531 to compress, that is, the boss 532 gradually approaches the second side surface 548; The sliding stroke of the second mounting base 53 is S1, then S1 is equal to the compression change Q of the elastic component 531; then the axial moving stroke S2=S1=Q of the trigger component 55 connected to the second mounting base 53 is equal; then the trigger part 551 presses against the contact part 451, so that the moving part 452 approaches the fixed part 453 along the axial stroke L1≤S2.

[0074] The second mounting base 53 or the trigger component 55 follows the clamping jaw unit 5 and the lifting unit 4 from the state of being close to each other at the third preset position to gradually separating from each other, that is, during the process of the clamping jaw unit 5 descending with the belt 47: the elastic deformation of the elastic component 531 is used as the main force to push the boss 532 away from the second side 548 and push one end of the second mounting base 53 away from the first side 547; at the same time, an automatic rebound device is also provided inside the trigger sensor 45 to gradually move the moving part 452 away from the fixed part 453. Each stroke changes as L1=S2=Q=S1.

[0075] In one embodiment, the trigger component 55 includes a trigger portion 551 located in the first chamber 542, and a non-trigger portion located in the second through space 544 and the second chamber 543; the circumferential size of the trigger portion 551 is larger than the size of the second through space 544, so that one end of the second mounting base 53 connected to the other end of the trigger component 55 is always located in the second chamber 543.

[0076] Specifically, the trigger component 55 includes a trigger portion 551 located at the end and a non-trigger portion as the main body; the second mounting base 53 or the trigger component 55 follows the clamping jaw unit 5 and the lifting unit 4 from the state of being close to each other in the third preset position to gradually separating from each other, that is, in the process of the clamping jaw unit 5 descending along the belt 47, in order to prevent the elastic deformation force of the elastic component 531 from being too large, the trigger portion 551 is made to slide out of the preset space 549 along the axial direction; first, the circumferential dimension of the second through space 544 is set to be smaller than the circumferential dimension of the preset space 549, and the circumferential dimension of the second through space 544 is set to be smaller than the circumferential dimension of the trigger portion 551, so that in the above-mentioned third stage, the trigger portion 551 of the trigger component 55 is always located in the preset space 549, and one end of the second mounting base 53 connected to the non-trigger portion is always located in the second chamber 543.

[0077] The above structure makes the overall structure of the detection device compact and occupies a small installation space, which is helpful for optimizing the overall design of the OHT.

[0078] Based on the same inventive concept, the present application also provides an aerial transport vehicle control method, the aerial transport vehicle includes a controller (not shown), a walking mechanism 1, a lifting unit 4 and a clamping unit 5; referring to the in-place detection device introduced in any of the above embodiments, the controller controls and monitors the relative positions of the lifting unit 4 and the clamping unit 5; when the aerial transport vehicle is in a picking-up state, the clamping unit 5 gradually approaches the lifting unit 4, and when the distance between the clamping unit 5 and the lifting unit 4 changes from D1 to D3, dynamic guidance is performed through the first guide part 44 and the second guide part 54, and the contact sensor 45 is triggered by the trigger component 55 to continuously output an electrical signal; the controller controls the clamping unit 5 to stop approaching the lifting unit 4 based on the electrical signal; when the aerial transport vehicle is in a moving state, the controller determines that the distance between the clamping unit 5 and the lifting unit 4 is maintained at D3 based on the continuous state of the electrical signal.

[0079] Specifically, based on the dynamic cooperation between the first guide part 44 and the second guide part 54 in the first stage, the swing amplitude of the clamping unit 5 during the lifting process is limited, and the accuracy of the clamping unit 5 being located at the specified position below the lifting unit 4 is improved; based on the method that the contact sensor 45 continuously uploads electrical signals to the controller in the second stage, the controller can judge that the walking mechanism 1 is in a normal state in the track system based on the continuous electrical signals; the in-place detection device of the present application can solve: false alarms and erroneous operations caused by swinging and vibration of the walking mechanism 1 when it is driving at high speed, turning, or entering a fork in the road, thereby improving the conveying efficiency; based on the separation of the first guide part 44 and the second guide part 54 in the third stage and the cessation of uploading electrical signals by the contact sensor 45, the controller can judge that the clamping unit 5 has descended, and can subsequently further control the clamping unit 5 to operate the material loader 6 at the conveying source through other monitoring mechanisms and control instructions.

[0080] The present application provides a solution of a high-reliability, high-precision in-place detection device and control method during the lifting process of the OHT gripper unit, which ensures the high reliability of the OHT operating system by improving the stability and reliability of the OHT lifting in-place detection and control.

[0081] It should be noted that the in-place detection device in the present application is not only applicable to vertical lifting mechanisms, but also to mechanisms in horizontal and inclined directions to ensure accurate positioning of each mechanism during movement.

[0082] In this specification, various embodiments may refer to each other, and each embodiment focuses on the differences from other embodiments.

[0083] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A position detection device used in a semiconductor automatic material handling system, characterized in that: include: A first guide portion, a contact sensor, a second guide portion and a trigger component; The first guide portion and the contact sensor are mounted on a first component, and the second guide portion and the trigger component are mounted on a second component; In the process of the first component and the second component approaching each other: the first guide portion and the second guide portion can be dynamically guided by interaction; the contact sensor can be triggered by the trigger component and output an electrical signal; A control unit controls the first component and the second component to stop approaching each other in response to the electrical signal.

2. The in-place detection device according to claim 1, characterized in that: When the first component and the second component approach each other to a first preset position, dynamic guiding begins through the interaction between the first guide portion and the second guide portion; When the first component and the second component approach each other under the action of dynamic guidance until the contact sensor is triggered by the trigger component and outputs an electrical signal, the first component and the second component approach each other to a second preset position; When the first component and the second component move from the second preset position to a third preset position and remain at the third preset position, the contact sensor is continuously triggered by the trigger component and continuously outputs an electrical signal; When the first component and the second component approach each other to the first preset position, the second preset position, and the third preset position, the distances therebetween are D1, D2, and D3, respectively, and D1>D2>D3.

3. The in-place detection device according to claim 1, characterized in that: A first guide surface is provided at one end of the first guide portion close to the second guide portion, and a second guide surface is provided at one end of the second guide portion close to the first guide portion to engage with the first guide surface; In the process of the first component and the second component approaching each other, the first guide surface and the second guide surface are used for dynamic guidance, so that the first component and the second component approach each other along the connection direction thereof.

4. The in-place detection device according to any one of claims 1 to 3, characterized in that: The contact sensor has a preset compression stroke when under pressure; The contact sensor comprises a contact portion, a moving portion and a fixed portion which are sequentially distributed with the contact portion in the axial direction; when the contact portion is pressed, the moving portion gradually approaches the fixed portion in the axial direction; Wherein, the axial direction is parallel to the length direction of the contact sensor.

5. The in-place detection device according to claim 1, characterized in that: The contact sensor is disposed in whole or in part in the first guide portion; The first guide portion is configured as a hollow structure, the hollow structure forms a first through space, and the contact sensor is located in the first through space.

6. The in-place detection device according to claim 1, characterized in that: The first guide portion is fixedly connected to the first component via a first mounting base; The first mounting base comprises a first sub-seat and a second sub-seat which are adjacently distributed, the first sub-seat being fixed to a side of the second sub-seat away from the second guide portion through a connecting member, and the second sub-seat being fixed to the first component through a connecting member; a buffer component is provided on a side of the second sub-seat facing the second guide portion; The contact sensor is connected to the first sub-seat in an adjustable position.

7. The in-place detection device according to claim 1, characterized in that: The trigger component is disposed in whole or in part in the second guide portion; The trigger component can move in the second guide portion along the connection direction of the first component and the second component toward the touch sensor, and continuously press the touch sensor; The second guide portion comprises: a first chamber disposed at one end of the second guide portion, a second chamber disposed at the other end of the second guide portion, and a second through space communicating the first chamber and the second chamber; The trigger component passes through the second through space, and two ends of the trigger component extend to the first chamber and the second chamber respectively; or, The second guide portion comprises: a first chamber provided at one end of the second guide portion, and a third through space penetrating the first chamber and the other end surface of the second guide portion; The trigger component passes through the third through space, and two ends of the trigger component extend to outside the first chamber and the other end surface of the second guide portion respectively.

8. The arrival detection device according to claim 7, characterized in that: The second guide portion is connected to the second component via a second mounting base; One end of the second mounting base is slidably connected to the second chamber, and the other end is fixedly connected to the second component; or, The second guide portion is connected to the second component via the trigger component; An elastic component is provided on the second mounting base or the trigger component.

9. The in-place detection device according to claim 8, characterized in that: A slot is formed at one end of the second mounting base; One end of the trigger component is located in the first chamber and is used to abut against the touch sensor, and the other end is located in the second chamber and is connected to the slot in an adjustable position; or, One end of the trigger component is located in the first chamber and is used to abut against the contact sensor, and the other end is fixedly connected to the second component.

10. The arrival detection device according to claim 7, characterized in that: The trigger component includes a trigger portion located in the first chamber and a non-trigger portion located in the second through space and the second chamber; The circumferential dimension of the trigger portion is larger than the circumferential dimension of the second through space, so that one end of the second mounting base connected to the other end of the trigger component is always located in the second chamber.

11. A method for controlling an aerial transport vehicle, the aerial transport vehicle comprising a controller, a walking mechanism, a lifting unit and a gripper unit; characterized in that: The in-place detection device according to any one of claims 1 to 10 is used to control and monitor the relative positions of the lifting unit and the clamping claw unit; When the aerial transport vehicle is in a state of picking up goods, the gripper unit gradually approaches the lifting unit, and when the distance between the gripper unit and the lifting unit changes from D1 to D3, the first guide part and the second guide part are used for dynamic guidance, and the trigger component is used to trigger the contact sensor to continuously output an electrical signal; the controller controls the gripper unit to stop approaching the lifting unit based on the electrical signal; When the aerial transporter is in a traveling state, the controller determines that the distance between the gripper unit and the lifting unit is maintained at D3 based on the continuous state of the electrical signal.

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