Wet pumping real-time monitoring method and device based on airbag pump and medium

Abstract

The invention discloses a wet pumping real-time monitoring method and device based on an airbag pump and a medium, and relates to the technical field of airbag pump operation and maintaining.The method comprises the steps that airbag pump real-time parameters are obtained, and airbag pump parameter correction is conducted on the airbag pump real-time parameters to obtain an airbag pump real-time data set; based on the pneumatic driving data, the pneumatic driving stage state is determined through driving state real-time analysis; performing first pressure flow analysis on the pump suction data to obtain a pump suction stage state; performing second pressure flow analysis on the pump discharge data to obtain a pump discharge stage state; performing pressure balance analysis on the pump pressure balance data to obtain a pressure balance stage state; and according to the stage state data of the air bag pump, determining wet pumping real-time monitoring data through pump body circulation stage judgment. By means of the method, the technical problem that real-time monitoring and visualization of the current state of the airbag pump cannot be met during real-time state monitoring of the airbag pump is solved.

Description

Technical Field

[0001] The present application relates to the field of bellows pump operation and maintenance technology, and in particular to a real-time monitoring method, equipment and medium for wet pumping based on a bellows pump. Background Art

[0002] The bellows pump, also known as the pneumatic diaphragm pump, is widely used in the semiconductor manufacturing industry as a key device for liquid transfer in wet semiconductors. Its working principle is mainly based on pneumatic drive, which drives the reciprocating motion of the diaphragm through compressed air or other gases, thereby realizing the suction, discharge and delivery of chemical reagents. Due to its unique structure and design, the bellows pump has the advantages of strong self-priming ability, wide range of conveying media, stable and reliable operation, etc.

[0003] In the process of wet semiconductor preparation, the pumping state of the wind bladder pump determines the quality and effect of wet semiconductor preparation. However, the various components of the wind bladder pump will gradually age and mechanically fatigue over time during use, and the pumping state will not meet the current wet semiconductor preparation requirements. The existing technology for real-time status monitoring of the wind bladder pump cannot meet the real-time monitoring and visualization of the current status of the wind bladder pump. Summary of the invention

[0004] The embodiments of the present application provide a real-time monitoring method, device and medium for wet pumping based on a bellows pump, which solves the technical problem that the real-time status monitoring of the bellows pump in the prior art cannot meet the real-time monitoring and visualization of the current status of the bellows pump.

[0005] In a first aspect, an embodiment of the present application provides a real-time monitoring method for wet pumping based on a bellows pump, characterized in that the method includes: acquiring real-time parameters of the bellows pump, and performing bellows pump parameter correction on the real-time parameters of the bellows pump to obtain a real-time data group of the bellows pump; wherein the real-time data group of the bellows pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; based on the pneumatic drive data, determining the pneumatic drive stage state through real-time analysis of the drive state; performing a first pressure flow analysis on the pump suction data to obtain the pump suction stage state; performing a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state; performing a pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage state; determining the real-time monitoring data of wet pumping through the pump body circulation stage judgment based on the bellows pump stage state data; wherein the real-time monitoring data of wet pumping includes: pneumatic drive stage state, pump suction stage state, pump discharge stage state, and pressure balance stage state.

[0006] In one implementation of the present application, the real-time parameters of the wind sac pump are calibrated to obtain a real-time data group of the wind sac pump, specifically including: based on the real-time parameters of the wind sac pump, a discrete sequence of periodic parameters of the wind sac pump is determined by time series arrangement of parameters; the discrete sequence of periodic parameters of the wind sac pump is subjected to blank data filling processing to obtain periodic parameter data of the wind sac pump; wherein, the blank data filling processing includes: blank data correctness determination and blank data simulation generation; according to the periodic parameter data of the wind sac pump, a real-time data group of the wind sac pump is obtained by data smoothing processing.

[0007] In one implementation of the present application, based on the pneumatic drive data, the pneumatic drive stage state is determined through real-time analysis of the drive state, specifically including: performing driving air pressure detection on the pneumatic drive data to obtain a first pneumatic drive stage state; based on the first pneumatic drive stage state, determining the second pneumatic drive stage state through pneumatic valve opening and closing detection; performing air pressure threshold evaluation on the first pneumatic drive stage state and the second pneumatic drive stage state to determine the pneumatic drive stage state.

[0008] In one implementation of the present application, a first pressure-flow analysis is performed on the pump suction data to obtain the pump suction stage state, specifically including: determining the pump suction initial pressure based on the pump suction data, and determining the pump suction predicted end pressure based on the pump suction initial pressure through a preset pipetting parameter configuration; performing a wind bag pump suction flow change analysis on the pump suction data to obtain the pump body diaphragm suction movement rate; determining the first pump suction stage state through a pump suction configuration comparison based on the pump body diaphragm suction movement rate; performing a threshold comparison between the pump suction predicted end pressure and the current pump suction end pressure to determine the second pump suction stage state; obtaining the pump suction stage state based on the first pump suction stage state and the second pump suction stage state.

[0009] In one implementation of the present application, a second pressure flow analysis is performed on the pump discharge data to obtain the pump discharge stage state, specifically including: performing a bellows pump discharge flow change analysis on the pump discharge data to obtain the pump body diaphragm discharge movement rate; determining the first pump discharge stage state by comparing the pump suction configuration based on the pump body diaphragm discharge movement rate; performing a pipeline discharge resistance analysis on the pump discharge data to determine the second pump discharge stage state; and obtaining the pump discharge stage state based on the first pump discharge stage state and the second pump discharge stage state.

[0010] In one implementation of the present application, the pump pressure balance data is subjected to a pressure balance analysis to obtain the pressure balance stage state, specifically including: based on the pump pressure balance data, determining the diaphragm operating state by monitoring the internal pressure of the pump chamber; performing motion damping simulation on the diaphragm operating state to determine the current wind bag pump reset operating state; according to the current wind bag pump reset operating state, obtaining the pressure balance stage state by performing a reset pressure balance analysis; wherein, the reset pressure balance analysis includes: reset rate analysis and reset position analysis.

[0011] In one implementation of the present application, based on the stage status data of the bellows pump, the real-time monitoring data of wet pumping is determined by judging the pump body circulation stage, specifically including: smoothing the stage status data of the bellows pump, and drawing a pumping parameter curve for the data after data smoothing to obtain a real-time monitoring curve for wet pumping; based on the real-time monitoring curve for wet pumping, determining the abnormal data of pump body components by judging the correlation of pump body operating parameters; matching the abnormal data of pump body components with abnormal states to determine the real-time monitoring data for wet pumping.

[0012] In one implementation of the present application, after determining the real-time monitoring data of wet pumping based on the stage status data of the wind sac pump through the pump body circulation stage judgment, the method also includes: predicting the periodic parameters of the real-time monitoring data of wet pumping to determine the estimated pumping state of the next cycle; making a judgment on the next cycle pumping state to continue running, and when the next cycle pumping state is to continue running, real-time monitoring of the real-time parameters of the wind sac pump is performed; when the next cycle pumping state is estimated to require maintenance, setting a wind sac pump maintenance node, and determining the wind sac pump operation and maintenance strategy based on the wind sac pump maintenance node.

[0013] In the second aspect, the embodiment of the present application also provides a real-time monitoring device for wet pumping based on a wind bag pump, characterized in that the device includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can: obtain the real-time parameters of the wind bag pump, and perform wind bag pump parameter correction on the real-time parameters of the wind bag pump to obtain a real-time data group of the wind bag pump; wherein the real-time data group of the wind bag pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; perform a first pressure flow analysis on the pump suction data to obtain the pump suction stage state; perform a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state; perform a pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage state; and determine the real-time monitoring data of wet pumping through the pump body circulation stage judgment according to the wind bag pump stage state data.

[0014] In a third aspect, an embodiment of the present application further provides a non-volatile computer storage medium for real-time monitoring of wet pumping based on a bellows pump, which stores computer executable instructions, and is characterized in that the computer executable instructions are set to: obtain real-time parameters of the bellows pump, and perform bellows pump parameter correction on the real-time parameters of the bellows pump to obtain a real-time data group of the bellows pump; wherein the real-time data group of the bellows pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; perform a first pressure flow analysis on the pump suction data to obtain the pump suction stage state; perform a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state; perform a pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage state; and determine the real-time monitoring data of wet pumping through the pump body circulation stage judgment according to the bellows pump stage state data.

[0015] The embodiments of the present application provide a real-time monitoring method, equipment and medium for wet pumping based on a wind sac pump. By monitoring and analyzing the parameters of each operating state of the wind sac pump, the technical problem that the real-time state monitoring of the wind sac pump in the prior art cannot meet the real-time monitoring and visualization of the current state of the wind sac pump is solved, and real-time operating state monitoring of the wind sac pump in wet semiconductor preparation is realized, which reduces the possibility of sudden abnormality of the wind sac pump during the preparation process leading to preparation abnormality, and improves the operation and maintenance efficiency of the wind sac pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0017] Figure 1 A flow chart of a real-time monitoring method for wet pumping based on a wind bag pump provided in an embodiment of the present application;

[0018] Figure 2 A schematic diagram of the internal structure of a real-time monitoring device for wet pumping based on a bellows pump provided in an embodiment of the present application. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0020] The embodiments of the present application provide a real-time monitoring method, equipment and medium for wet pumping based on a wind sac pump. By monitoring and analyzing the parameters of each operating state of the wind sac pump, the technical problem that the real-time state monitoring of the wind sac pump in the prior art cannot meet the real-time monitoring and visualization of the current state of the wind sac pump is solved, and real-time operating state monitoring of the wind sac pump in wet semiconductor preparation is realized, which reduces the possibility of sudden abnormality of the wind sac pump during the preparation process leading to preparation abnormality, and improves the operation and maintenance efficiency of the wind sac pump.

[0021] The technical solution proposed in the embodiments of the present application is described in detail below with reference to the accompanying drawings.

[0022] Figure 1 The present invention provides a flow chart of a real-time monitoring method for wet pumping based on a bellows pump. Figure 1 As shown, a real-time monitoring method for wet pumping based on a bellows pump provided in an embodiment of the present application specifically includes the following steps:

[0023] Step 101, obtaining real-time parameters of the wind bladder pump, and performing wind bladder pump parameter correction on the real-time parameters of the wind bladder pump to obtain a real-time data set of the wind bladder pump.

[0024] Among them, the real-time data group of the bellows pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data.

[0025] Specifically, it includes: based on the real-time parameters of the wind bag pump, a discrete sequence of the cycle parameters of the wind bag pump is determined through parameter time series arrangement; blank data filling processing is performed on the discrete sequence of the cycle parameters of the wind bag pump to obtain the cycle parameter data of the wind bag pump; wherein, the blank data filling processing includes: blank data correctness judgment, blank data simulation generation; according to the cycle parameter data of the wind bag pump, a real-time data group of the wind bag pump is obtained through data smoothing processing.

[0026] The present invention obtains the real-time parameters of the wind bladder pump and performs wind bladder pump parameter correction on the real-time parameters of the wind bladder pump to obtain the real-time data group of the wind bladder pump, thereby realizing the correction and supplement of the erroneous data of the real-time parameters of the wind bladder pump and improving the

[0027] In the examples of the present application, detailed explanation is given by the following Example 1.

[0028] Example 1: In the preparation of wet semiconductors, the movement state of the wind bladder pump generally includes the pneumatic drive stage, the pump suction stage, the pump discharge stage and the pump pressure balance stage. During the periodic liquid transfer process of the wind bladder pump, the real-time parameters of the wind bladder pump can be determined through the outlet flow sensor of the wind bladder pump and the pump body air pressure sensor.

[0029] First, since the real-time parameters of the wind bladder pump obtained are discrete data, during the entire wind bladder pump operation (liquid transfer) cycle, a certain parameter may appear blank or error value due to the suspension of the motion state or insufficient sensitivity of the sensor. The data correctness of the blank value or error value is determined to ensure that the blank value data is the data that should not be blank under the current operating environment. If the data blank here is normal, it does not need to be filled with data.

[0030] When the blank data is determined to be a data error or acquisition error, the average value of the wind bag pump parameters at the same node in the two adjacent cycles is determined, and the average value of the two discrete data adjacent to the blank data in the current cycle is determined; the average value is then averaged with the average value determined in the adjacent cycles to obtain blank simulation data.

[0031] The blank simulation data is added to the corresponding position, and the discrete data is smoothed to meet the continuous change requirements during the operation of the pump.

[0032] Step 102: Based on the pneumatic drive data, determine the pneumatic drive phase state through real-time analysis of the drive state.

[0033] Specifically, it includes: performing driving air pressure detection on pneumatic drive data to obtain the first pneumatic drive stage state; based on the first pneumatic drive stage state, determining the second pneumatic drive stage state through pneumatic valve opening and closing detection; performing air pressure threshold evaluation on the first pneumatic drive stage state and the second pneumatic drive stage state to determine the pneumatic drive stage state.

[0034] The present application is based on pneumatic drive data and determines the pneumatic drive stage state through real-time analysis of the drive state, thereby realizing the state analysis of the pneumatic drive stage of the bellows pump, reducing the probability of problems with the bellows pump in the pneumatic drive stage state, and improving the accuracy of wet semiconductor preparation based on the bellows pump.

[0035] In the examples of the present application, detailed explanation is given by the following Example 2.

[0036] Example 2: The pneumatic drive stage is the first stage of the operation of the bellows pump. When compressed air or other gas is input to the back of a diaphragm of the pump through a pneumatic drive device (such as a pneumatic valve), the air pressure will cause the diaphragm to move forward.

[0037] In this part, the driving air pressure and the corresponding opening and closing state of the driving valve need to be monitored. First, the driving air pressure is detected by the air pressure sensor. If it meets the preset threshold or meets the liquid transfer parameters, the state of the first pneumatic driving stage is determined to be normal, otherwise it is considered abnormal.

[0038] Then, the fluid sensor installed on one side of the pneumatic valve is used to detect the opening state of the pneumatic valve. Since the start of the pneumatic valve takes a certain amount of time and is not instantaneous, the full opening of the pneumatic valve is taken as the start end point, and the monitoring starting point is based on the start signal sent to the pneumatic valve to monitor the state of the pneumatic valve.

[0039] The change of the driving air pressure of the compressed air and the flow concentration of the pneumatic valve reflect the state of the second pneumatic driving stage, thereby realizing the monitoring and analysis of the state of the pneumatic driving stage.

[0040] Step 103: Perform a first pressure flow analysis on the pump suction data to obtain the pump suction stage state.

[0041] Specifically, it includes: determining the initial pump suction pressure based on the pump suction data, and determining the predicted pump suction end pressure according to the initial pump suction pressure through the preset pipetting parameter configuration; analyzing the change of the pump suction flow rate of the bellows pump on the pump suction data to obtain the suction movement rate of the pump body diaphragm; determining the first pump suction stage state according to the pump body diaphragm suction movement rate through the pump suction configuration comparison; performing a threshold comparison between the predicted pump suction end pressure and the current pump suction end pressure to determine the second pump suction stage state; obtaining the pump suction stage state based on the first pump suction stage state and the second pump suction stage state.

[0042] The present application performs a first pressure flow analysis on the pump suction data to obtain the pump suction stage state, thereby achieving state analysis and real-time monitoring of the pump suction stage, and improving the accuracy of wet semiconductor preparation based on a bellows pump.

[0043] In the examples of the present application, this is explained in detail through the following Example 3.

[0044] Example 3: In the actual preparation process of wet semiconductors, the specific position of the diaphragm of the bellows pump is difficult to monitor directly. The displacement sensor is subject to external influences and its accuracy cannot meet the requirements for monitoring the diaphragm position during the pump suction stage.

[0045] First, determine the initial suction pressure of the pump and the predicted end pressure, and then monitor the suction flow of the pump and the internal pressure of the pump body through the pressure and flow sensors. Since the transfer flow is accumulated over time, the volume change of the transfer can be determined. The change in the internal pressure of the pump body and the change in the transfer volume are proportional to the position of the diaphragm. When the characteristics of the transfer liquid and the inherent parameters of the bellows pump are determined, the state of the first pump suction stage of the bellows pump can be judged, that is, the real-time position change of the pump diaphragm.

[0046] After the end pressure has been predicted, the final pressure result is compared with the predicted result after the pump suction phase is completed. To determine whether the diaphragm has abnormal conditions such as air leakage or liquid leakage.

[0047] Step 104: Perform a second pressure flow analysis on the pump discharge data to obtain the pump discharge phase state.

[0048] Specifically, it includes: analyzing the change of the bellows pump discharge flow rate on the pump discharge data to obtain the discharge movement rate of the pump body diaphragm; determining the first pump discharge stage state by comparing the pump suction configuration according to the pump body diaphragm discharge movement rate; analyzing the pipeline discharge resistance on the pump discharge data to determine the second pump discharge stage state; obtaining the pump discharge stage state based on the first pump discharge stage state and the second pump discharge stage state.

[0049] The present application performs a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state, thereby achieving state analysis and real-time monitoring of the pump discharge stage, and improving the accuracy of wet semiconductor preparation based on the bellows pump.

[0050] In the examples of the present application, a detailed explanation is given by the following Example 4.

[0051] Example 4: First, the discharge flow rate and pump body pressure of the pump are monitored through pressure and flow sensors. Since the transfer flow rate is accumulated over time, the volume change of the transfer can be determined. The change in pump body pressure and transfer volume are proportional to the position of the diaphragm. When the characteristics of the transfer liquid and the inherent parameters of the bellows pump are determined, the state of the first pump discharge stage of the bellows pump can be judged, that is, the real-time position change of the diaphragm during the pump discharge stage.

[0052] At this time, it is necessary to analyze the discharge status of the discharge pipeline of the pump body to prevent the discharge outlet of the pump body from being blocked or semi-blocked, which will affect the pipetting effect or contaminate the pipetting.

[0053] It should be noted that the state of the pump outlet is determined by the outlet flow and pump pressure through resistance analysis. After determining the pipetting properties and the size of the outlet (taking the outlet shape with uniform force as an example), the outlet flow rate and pump pressure during the discharge phase can be used to determine whether the current outlet is blocked or damaged.

[0054] Step 105: Perform pressure balance analysis on the pump pressure balance data to obtain a pressure balance stage state.

[0055] Specifically, it includes: based on the pump pressure balance data, determining the diaphragm operating state by monitoring the internal pressure of the pump chamber; performing motion damping simulation on the diaphragm operating state to determine the current bellows pump reset operating state; according to the current bellows pump reset operating state, obtaining the pressure balance stage state by performing reset pressure balance analysis; wherein, the reset pressure balance analysis includes: reset rate analysis and reset position analysis.

[0056] The present application performs pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage status, thereby realizing the state analysis of the bellows pump in the pressure balance stage, providing a data basis for subsequent periodic operation analysis, and reducing the difficulty of predicting the abnormal state of the bellows pump.

[0057] Step 106: Determine the real-time monitoring data of wet pumping according to the stage status data of the bellows pump through the pump body circulation stage determination.

[0058] Specifically, it includes: smoothing the stage status data of the bellows pump, and drawing a pumping parameter curve for the smoothed data to obtain a real-time monitoring curve for wet pumping; based on the real-time monitoring curve for wet pumping, determining the abnormal data of pump body components by judging the correlation of pump body operating parameters; matching the abnormal data of pump body components with abnormal states to determine the real-time monitoring data for wet pumping.

[0059] After determining the real-time monitoring data of wet pumping according to the stage status data of the wind sac pump by judging the pump body circulation stage, the method also includes: predicting the periodic parameters of the real-time monitoring data of the wet pumping to determine the estimated pumping state of the next cycle; making a judgment on the continued operation of the estimated pumping state of the next cycle, and monitoring the real-time parameters of the wind sac pump in real time when the estimated pumping state of the next cycle is to continue to operate; setting a maintenance node for the wind sac pump when the estimated pumping state of the next cycle is that maintenance is required, and determining the operation and maintenance strategy of the wind sac pump based on the maintenance node of the wind sac pump.

[0060] In the examples of the present application, this is explained in detail through the following Example 5.

[0061] Example 5: Perform data smoothing on the stage status data of the bellows pump, and draw a pumping parameter curve on the smoothed data to obtain a real-time monitoring curve for wet pumping.

[0062] Due to the overall structure of the bellows pump, the mutual influence between different components needs to be judged to facilitate the determination of equipment abnormalities corresponding to the stage status data of the bellows pump.

[0063] Through correlation analysis, abnormal data of pump components are determined, and through abnormal matching, real-time monitoring data of wet pumping is determined.

[0064] It should be noted that the correlation (or correlation degree) analysis can be assigned different mathematical methods or modeling according to actual needs, and there is no limitation here.

[0065] Through time series analysis, the real-time monitoring data of wet pumping is used to predict the periodic parameters. Based on the prediction results, it is determined whether the pumping will continue to operate or require maintenance in the next period.

[0066] The above is an embodiment of the method proposed in this application. Based on the same inventive concept, the embodiment of this application also provides a real-time monitoring device for wet pumping based on a wind bag pump, and its structure is as follows: Figure 2 shown.

[0067] Figure 2 This is a schematic diagram of the internal structure of a real-time monitoring device for wet pumping based on a wind bag pump provided in an embodiment of the present application. Figure 2 As shown, the device includes:

[0068] at least one processor 201;

[0069] and, a memory 202 communicatively connected to the at least one processor;

[0070] The memory 202 stores instructions that can be executed by at least one processor, and the instructions are executed by at least one processor 201 to enable at least one processor 201 to:

[0071] Acquire the real-time parameters of the bellows pump, and perform bellows pump parameter correction on the real-time parameters of the bellows pump to obtain the real-time data group of the bellows pump; wherein the real-time data group of the bellows pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; perform a first pressure flow analysis on the pump suction data to obtain the pump suction stage state; perform a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state; perform a pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage state; determine the real-time monitoring data of wet pumping through the pump body circulation stage judgment based on the bellows pump stage state data.

[0072] Some embodiments of the present application provide corresponding Figure 1 A non-volatile computer storage medium for real-time monitoring of wet pumping based on a bellows pump stores computer executable instructions, wherein the computer executable instructions are set as follows:

[0073] Acquire the real-time parameters of the bellows pump, and perform bellows pump parameter correction on the real-time parameters of the bellows pump to obtain the real-time data group of the bellows pump; wherein the real-time data group of the bellows pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; perform a first pressure flow analysis on the pump suction data to obtain the pump suction stage state; perform a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state; perform a pressure balance analysis on the pump pressure balance data to obtain the pressure balance stage state; determine the real-time monitoring data of wet pumping through the pump body circulation stage judgment based on the bellows pump stage state data.

[0074] Each embodiment in this application is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the IoT device and medium embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiments.

[0075] The system and medium provided in the embodiments of the present application correspond one-to-one to the method. Therefore, the system and medium also have similar beneficial technical effects to the corresponding methods. Since the beneficial technical effects of the methods have been described in detail above, the beneficial technical effects of the system and medium will not be repeated here.

[0076] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0077] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0078] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0079] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0080] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0081] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0082] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0083] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0084] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. A real-time monitoring method for wet pumping based on a bellows pump, characterized in that: The method comprises: Acquire real-time parameters of the wind bag pump, and perform wind bag pump parameter correction on the real-time parameters of the wind bag pump to obtain a real-time data group of the wind bag pump; wherein the real-time data group of the wind bag pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; Based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; Performing a first pressure flow analysis on the pump suction data to obtain a pump suction stage state; Performing a second pressure flow analysis on the pump discharge data to obtain a pump discharge stage state; Performing pressure balance analysis on the pump pressure balance data to obtain a pressure balance stage state; According to the stage status data of the bellows pump, the real-time monitoring data of wet pumping is determined by judging the pump body circulation stage; wherein the real-time monitoring data of wet pumping includes: the pneumatic drive stage state, the pump suction stage state, the pump discharge stage state, and the pressure balance stage state.

2. A real-time monitoring method for wet pumping based on a bellows pump according to claim 1, characterized in that: The real-time parameters of the wind bag pump are calibrated to obtain a real-time data set of the wind bag pump, specifically including: Based on the real-time parameters of the wind bladder pump, a discrete sequence of periodic parameters of the wind bladder pump is determined by arranging the parameters in a time sequence; Performing blank data filling processing on the discrete sequence of the wind bag pump cycle parameter to obtain wind bag pump cycle parameter data; wherein the blank data filling processing includes: blank data correctness determination and blank data simulation generation; According to the periodic parameter data of the wind bladder pump, a real-time data group of the wind bladder pump is obtained through data smoothing processing.

3. A real-time monitoring method for wet pumping based on a bellows pump according to claim 1, characterized in that: Based on the pneumatic drive data, the pneumatic drive stage state is determined through real-time analysis of the drive state, specifically including: Performing driving air pressure detection on the pneumatic driving data to obtain a first pneumatic driving stage state; Based on the state of the first pneumatic driving stage, determining the state of the second pneumatic driving stage by detecting the opening and closing of the pneumatic valve; A pneumatic pressure threshold evaluation is performed on the first pneumatic drive phase state and the second pneumatic drive phase state to determine the pneumatic drive phase state.

4. The real-time monitoring method for wet pumping based on a bellows pump according to claim 1 is characterized in that: Performing a first pressure flow analysis on the pump suction data to obtain the pump suction stage state specifically includes: Based on the pump suction data, determine the pump suction initial pressure, and according to the pump suction initial pressure, determine the pump suction predicted end pressure through the preset pipetting parameter configuration; Performing a change analysis of the suction flow rate of the bellows pump on the pump suction data to obtain the suction movement rate of the pump body diaphragm; According to the pump body diaphragm suction movement rate, by comparing the pump suction configuration, determining the first pump suction stage state; Comparing the predicted pump suction end pressure with the current pump suction end pressure by threshold value to determine the state of the second pump suction stage; The pump suction phase state is obtained based on the first pump suction phase state and the second pump suction phase state.

5. The real-time monitoring method for wet pumping based on a bellows pump according to claim 1 is characterized in that: Performing a second pressure flow analysis on the pump discharge data to obtain the pump discharge stage state specifically includes: Performing a bellows pump discharge flow rate change analysis on the pump discharge data to obtain a pump body diaphragm discharge movement rate; According to the pump diaphragm discharge movement rate, the state of the first pump discharge stage is determined by comparing the pump suction configuration; Performing pipeline discharge resistance analysis on the pump discharge data to determine the state of the second pump discharge stage; The pump discharge phase state is obtained based on the first pump discharge phase state and the second pump discharge phase state.

6. A real-time monitoring method for wet pumping based on a bellows pump according to claim 1, characterized in that: The pump pressure balance data is subjected to pressure balance analysis to obtain the pressure balance stage state, specifically including: Based on the pump pressure balance data, the operating state of the diaphragm is determined by monitoring the internal pressure of the pump chamber; Performing motion damping simulation on the operating state of the diaphragm to determine the current resetting operating state of the bellows pump; According to the current bellows pump reset operation state, the pressure balance stage state is obtained through reset pressure balance analysis; wherein, the reset pressure balance analysis includes: reset rate analysis and reset position analysis.

7. A real-time monitoring method for wet pumping based on a bellows pump according to claim 1, characterized in that: According to the stage status data of the bellows pump, the real-time monitoring data of wet pumping is determined through the pump body circulation stage judgment, including: Performing data smoothing on the stage state data of the bellows pump, and drawing a pumping parameter curve on the data after the data smoothing, so as to obtain a real-time monitoring curve for wet pumping; Based on the wet pumping real-time monitoring curve, the abnormal data of the pump body components are determined by judging the correlation of the pump body operation parameters; The abnormal state matching is performed on the abnormal data of the pump body components to determine the real-time monitoring data of the wet pumping.

8. The real-time monitoring method for wet pumping based on a bellows pump according to claim 1 is characterized in that: After determining the real-time monitoring data of wet pumping according to the stage status data of the bellows pump through the pump body cycle stage determination, the method further includes: Performing cycle parameter prediction on the real-time monitoring data of the wet pumping to determine the estimated pumping state for the next cycle; Performing a judgment on the next cycle pumping estimated state to continue running, and in the case where the next cycle pumping estimated state is to continue running, performing real-time monitoring on the real-time parameters of the bellows pump; When the estimated pumping state of the next cycle requires maintenance, a bellows pump maintenance node is set, and based on the bellows pump maintenance node, an operation and maintenance strategy for the bellows pump is determined.

9. A real-time monitoring device for wet pumping based on a bellows pump, characterized in that: The device comprises: at least one processor; and, a memory communicatively coupled to the at least one processor; The memory stores instructions that can be executed by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to: Acquire real-time parameters of the wind bag pump, and perform wind bag pump parameter correction on the real-time parameters of the wind bag pump to obtain a real-time data group of the wind bag pump; wherein the real-time data group of the wind bag pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; Based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; Performing a first pressure flow analysis on the pump suction data to obtain a pump suction stage state; Performing a second pressure flow analysis on the pump discharge data to obtain a pump discharge stage state; Performing pressure balance analysis on the pump pressure balance data to obtain a pressure balance stage state; According to the stage status data of the bellows pump, the real-time monitoring data of wet pumping is determined through the pump body circulation stage judgment.

10. A non-volatile computer storage medium for real-time monitoring of wet pumping based on a bellows pump, storing computer executable instructions, characterized in that: The computer executable instructions are configured to: Acquire real-time parameters of the wind bag pump, and perform wind bag pump parameter correction on the real-time parameters of the wind bag pump to obtain a real-time data group of the wind bag pump; wherein the real-time data group of the wind bag pump includes: pneumatic drive data, pump suction data, pump discharge data, and pump pressure balance data; Based on the pneumatic drive data, determine the pneumatic drive stage state through real-time analysis of the drive state; Performing a first pressure flow analysis on the pump suction data to obtain a pump suction stage state; Performing a second pressure flow analysis on the pump discharge data to obtain a pump discharge stage state; Performing pressure balance analysis on the pump pressure balance data to obtain a pressure balance stage state; According to the stage status data of the bellows pump, the real-time monitoring data of wet pumping is determined through the pump body circulation stage judgment.

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