An electric regulating valve for a semiconductor gumming apparatus and an assembling method thereof

Abstract

The application relates to an electric regulating valve for a semiconductor gluing device and an assembling method thereof. The electric regulating valve comprises a pre-assembled inner box in a dustproof shell, a driving assembly and an elastic pre-tightening module, a sealing diaphragm with a semicircular ring-shaped arc-shaped diaphragm part and an inverted conical sealing boss for sealing a longitudinal valve port, and a valve seat with an inner circular arc spherical surface in an inlet flow channel connected to the lower end of the longitudinal valve port. The electric regulating valve realizes the accurate lifting movement of a diaphragm connecting shaft by driving a regulating screw rod to rotate through a stepping motor, the elastic pre-tightening module provides stable pre-tightening force for the diaphragm connecting shaft, the cooling space in the dustproof shell effectively reduces the operation temperature of the stepping motor, the electric regulating valve has good sealing performance and long-time use durability while realizing high-precision fluid control. The problems of sealing leakage, flow channel pollution, diaphragm damage and poor environmental adaptability in the prior art are solved, high-precision, long-life, zero-pollution flow control is realized, and the technical effect of being applied to the semiconductor gluing device is achieved.

Description

Technical Field

[0001] This invention relates to the field of fluid control devices in semiconductor coating equipment (fluids such as photoresist, developer, organic solvents and other chemical media used in semiconductor processing), and in particular to an electric regulating valve for semiconductor coating equipment and its assembly method. Background Technology

[0002] In the semiconductor manufacturing industry, the performance of flow control equipment directly impacts product quality and production efficiency. With the increasing demand for handling high-purity, specific chemical fluids in the semiconductor manufacturing sector, the market urgently needs flow control devices with higher precision and reliability to cope with complex process conditions. These regulating valves suitable for semiconductor coating equipment, compared to traditional industrial valves, not only need to achieve precise regulation but also need to possess corrosion resistance to adapt to various chemical substances, while maintaining stability during long-term operation, resulting in more stringent specifications. Specifically, in terms of cleanliness and vacuum adaptability, traditional industrial valves do not have strict particle control requirements, often use O-rings for sealing, which may pose a risk of minor leakage, and do not have vacuum environment adaptability requirements. Valve devices suitable for semiconductor coating equipment must meet ISO Class 1 cleanroom standards, with ≤10 particles larger than 0.1μm per cubic meter of air, and the valve body must withstand 10... -6 In a Torr-level vacuum environment, the total volatile organic compounds (TVOC) are <1 μg / m³. Regarding flow control accuracy and response speed, traditional industrial valves typically have a flow accuracy of ±1%–5% FS and a response time in the 100–500 ms range. Valve devices suitable for semiconductor coating equipment require flow control accuracy below ±0.5% FS (full scale), a response time ≤50 ms, and repeatability ≤0.05% FS. In terms of valve durability, traditional industrial valves typically have an operating life of 100,000–500,000 cycles. Valve devices suitable for semiconductor coating equipment require a mechanical operating life ≥1 million cycles. Regarding material compatibility and corrosion resistance, traditional industrial valves only need to meet the requirements for tolerance to conventional acid and alkali media, without ultra-low ion contamination control requirements. Electric regulating valves suitable for semiconductor coating equipment should be able to withstand chemical media such as photoresist, developer, and organic solvents. Components in contact with fluids such as photoresist must avoid metal ion precipitation, and ion contamination must be controlled to the ppb level.

[0003] For such demanding applications, the common approach is to use stepper motors to perform the necessary fluid volume adjustment. Specifically, common practices include, but are not limited to, using products with traditional surface-contact seals, relying on tightening force to ensure airtightness and implement flow rate changes; however, frequent use of stepper motors not only easily generates heat but also produces airborne particles, which adversely affects the cleanliness and vacuum adaptability of semiconductor coating equipment.

[0004] Utility model patent CN203560551U discloses an electrically controlled gas flow regulating valve, including a valve body and a regulating mechanism. The valve body includes an inlet and an outlet, and the regulating mechanism includes a stepper motor and an regulating rod. The output shaft of the stepper motor is connected to the top of the regulating rod. Therefore, a stepper motor is used to drive the regulating rod and a leak-proof rubber plug, achieving precise flow control through a threaded connection. The related technology is characterized by its simple structure and stable regulation, but it lacks protective measures for highly corrosive environments and does not meet the cleanliness and vacuum adaptability requirements of semiconductor coating equipment.

[0005] Utility model patent CN2556449Y relates to an electric flow control valve for a heating system. It includes a valve body, an upper cover, a lower cover, an automatic regulating valve installed in the lower port of the valve body for automatically balancing and setting the flow rate, a regulating valve seat, a regulating valve stem, and a regulating valve disc installed between the inlet and outlet chambers. An electro-hydraulic actuator is located on the upper cover, its drive shaft connected to the regulating valve stem via a coupling. The electro-hydraulic actuator drives the regulating valve stem to achieve automatic flow setting. The advantage of this technology lies in its automated control, but its structure is relatively complex and does not meet the high cleanliness requirements of semiconductor coating equipment.

[0006] Chinese Patent Publication No. CN116097027A discloses a flow control valve that suppresses the ingress of dust particles into the controlled fluid, maintains a high level of cleanliness of the controlled fluid, and can control minute flow rates at high speeds. The flow control valve comprises a valve block, a diaphragm, and an actuator. Utilizing the minute pressure exerted on the diaphragm by the actuator, fluid flowing into a flow path formed in the upstream portion of the valve block passes through the gap between the inner surface of the valve block and the inner surface of the diaphragm, and is discharged from another flow path formed in the downstream portion of the valve block. The peripheral portion of the diaphragm is fused integrally with the upper end face of the valve block. There is no step difference or gap between the inner peripheral surface of the diaphragm and the inner peripheral surface of the valve block at this fused portion; the inner peripheral surface of the diaphragm is flush with the inner peripheral surface of the valve block. The key is the seamless connection between the diaphragm and the valve block to reduce dust contamination, making it suitable for high-cleanliness environments. In related technologies, the inner end of the outlet flow channel is connected to the lower end of the longitudinal valve port. The overall valve structure lacks design for frequent switching and fatigue resistance, which does not meet the high valve switching durability requirements of semiconductor coating equipment. Summary of the Invention

[0007] The main objective of this invention is to provide an electric regulating valve for semiconductor coating equipment. The main improvement lies in its suitability for the vacuum adaptability, high flow control accuracy and fast response speed required by semiconductor coating equipment, as well as the durability of valve switching.

[0008] The second main objective of this invention is to provide an assembly method for an electric regulating valve used in semiconductor coating equipment, wherein the assembled electric regulating valve is suitable for use in semiconductor coating equipment.

[0009] The main objective of this invention is achieved through the following technical solution: an electrically adjustable valve for semiconductor coating equipment is provided, comprising:

[0010] A pre-assembled inner casing is housed within a dustproof outer shell. The pre-assembled inner casing is pre-assembled with a drive assembly and a spring-loaded pre-tightening module. The drive assembly includes a stepper motor mounted on the pre-assembled inner casing, an adjusting screw disposed within the pre-assembled inner casing, and a diaphragm connecting shaft. The stepper motor drives the adjusting screw to rotate within the pre-assembled inner casing. The first portion of the diaphragm connecting shaft slides and moves vertically within the hollow movable space of the pre-assembled inner casing. Both ends of the spring-loaded pre-tightening module elastically contact the first portion of the diaphragm connecting shaft and the inner limiting portion of the pre-assembled inner casing within the hollow movable space, respectively, to apply a vertically downward pre-tightening force to the diaphragm connecting shaft. A cooling space is formed between the pre-assembled inner casing and the dustproof outer shell.

[0011] A sealing diaphragm has an arc-shaped thin film portion and an inverted conical sealing boss integrally provided at the center and protruding downwards. The arc-shaped thin film portion is a semi-circular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke. The center of the sealing boss is connected to a second part of the diaphragm connecting shaft that protrudes from the pre-assembled inner casing.

[0012] The valve seat has an internal longitudinal valve port, an inlet flow channel, and an outlet flow channel. The valve seat has a mounting hole aligned with the longitudinal valve port, and the dustproof housing is mounted on the mounting hole. The lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a dead zone-free flow channel. The inclined sidewall of the sealing boss is used to seal the inner wall of the longitudinal valve port, and the arc-shaped diaphragm portion is aligned with the annular groove connected to the inner end of the outlet flow channel. The sealing boss can extend into or detach from the longitudinal valve port.

[0013] The implementation principle of this basic structural example is to utilize the pre-assembled inner casing of the pre-assembled elastic pre-tightening module, the cooling space formed between the pre-assembled inner casing and the dustproof outer shell, the inverted conical sealing boss of the sealing diaphragm sealing the longitudinal valve port with its sloping sidewall, and the alignment of the arc-shaped thin film portion of the sealing diaphragm with the annular groove connected to the inner end of the outlet flow channel, to achieve high-precision flow regulation and reliable sealing performance of the regulating valve by the semiconductor coating equipment. Specific effects include:

[0014] 1) A drive assembly and a spring pre-tightening module are pre-assembled in a pre-assembled inner box housed in a dustproof housing. A stepper motor is installed on the pre-assembled inner box, and a cooling space is formed between the pre-assembled inner box and the dustproof housing to prevent the valve drive operation of the stepper motor from affecting the cleanliness of the external environment of the dustproof housing, thus meeting the vacuum adaptability requirements for low volatile organic compounds.

[0015] 2) By combining the arc-shaped thin film part of the sealing diaphragm with the inverted conical sealing boss, the inner wall of the longitudinal valve port of the valve seat is sealed by the inclined side wall of the sealing boss, forming a short cylindrical annular strip contact seal. The sealing boss can extend into or out of the longitudinal valve port, eliminating eddy currents and greatly improving sealing reliability, effectively solving the problem of easy leakage of traditional circular annular plane contact seal.

[0016] 3) The stepper motor located at the top of the pre-assembly inner casing drives the adjusting screw to rotate, which in turn moves the diaphragm connecting shaft up and down, thereby achieving precise control of the distance between the sealing boss and the longitudinal valve port, and thus achieving precise flow regulation.

[0017] 4) The elastic pre-tightening module, which is set in the pre-assembled inner box in combination with the above-mentioned points 2 and 3, applies a vertically downward pre-tightening force to the diaphragm connecting shaft to ensure that a stable sealing state is maintained in the vibration environment. The flow control accuracy can reach ±0.5% FS (full scale) or less, the response time is ≤50 ms, and the repeatability is ≤0.05% FS.

[0018] 5) The inner end of the valve seat inlet flow channel connected to the longitudinal valve port is designed as a continuous and smooth inner arc spherical surface to form a dead zone-free flow channel, avoiding fluid residue and contamination, and improving equipment cleanliness and service life.

[0019] 6) The arc-shaped film portion of the sealing diaphragm provides a deformation stroke of 1.2 to 1.5 times greater than the effective stroke of the diaphragm connecting shaft, which avoids excessive stretching of the arc-shaped film portion. Furthermore, the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel, which significantly improves the fatigue resistance of the sealing diaphragm and extends the service life of the electric regulating valve. The electric regulating valve can withstand mechanical operation life ≥ 1 million cycles.

[0020] In a preferred embodiment, the present invention may be further configured such that the diameter of the first part of the diaphragm connecting shaft is greater than the diameter of the second part, a photoelectric sensor door is provided inside the dustproof housing, and a photoelectric indicator rod protruding laterally from the hollow movable space is connected to the first part of the diaphragm connecting shaft. As the diaphragm connecting shaft rises until the photoelectric sensor door senses the arrival of the photoelectric indicator rod, the upper dead point of the effective stroke of the sealing boss is determined.

[0021] By adopting the preferred technical features of the above structure, the design of the first part of the diaphragm connecting shaft having a larger rod diameter than the second part creates a significant structural difference, facilitating accurate identification and installation of the elastic pre-tightening module during assembly. The photoelectric sensor door inside the dustproof housing cooperates with the photoelectric indicator rod connected to the first part of the diaphragm connecting shaft. When the photoelectric indicator rod rises with the diaphragm connecting shaft to the predetermined upper stop point, it triggers the photoelectric sensor door inside the dustproof housing to emit a photoelectric sensing signal, cutting off the regulating power supply and fully opening the valve. When the diaphragm connecting shaft descends to the predetermined lower stop point, the continuous sealing force provided by the elastic pre-tightening module is detected, and the photoelectric sensor door feeds back a closing signal, cutting off the regulating power supply and closing the valve. This achieves accurate detection of the effective stroke upper stop point of the sealing boss, ensuring accurate and reliable position feedback in the valve's open state, and improving the automation control level and operational stability of the entire electric regulating valve.

[0022] In a preferred embodiment, the present invention may be further configured such that the outer surface of the dustproof housing has ventilation holes that connect to the cooling space for circulating cooling of the stepper motor.

[0023] By employing the preferred technical features of the aforementioned structure, effective heat dissipation of the stepper motor is achieved through ventilation holes connected to the cooling space. Specifically, cooling air flows through ventilation holes on the outer surface of the dustproof housing to the cooling space, carrying away the heat generated by the stepper motor during operation. This ensures the stability and reliability of the stepper motor under prolonged high-load operation, thereby not only extending the service life of the stepper motor and preventing dust from falling off during operation, but also indirectly improving the overall working efficiency and performance stability of the electric regulating valve.

[0024] In a preferred embodiment, the present invention may be further configured such that the vent includes an air inlet and an exhaust outlet, and the outer surface of the dustproof housing is also provided with a wiring hole for power supply connection to the stepper motor, wherein the wiring hole and the air inlet are located in the housing sub-cavity of the dustproof housing, and the exhaust outlet is located in the part of the main body of the dustproof housing above the housing sub-cavity.

[0025] By adopting the preferred technical features of the above structure, and utilizing the air inlet, exhaust, and wiring holes of the dustproof housing, effective heat dissipation of the stepper motor, isolation to prevent dust leakage, and internal electrical connection are achieved. The air inlet and exhaust holes form an airflow path for cooling the stepper motor. The wiring holes and air inlet are concentrated in the housing sub-cavity, which prevents air from being directly blown into the pre-assembled inner casing by the air inlet. The exhaust hole is located on the upper part of the dustproof housing body, optimizing the airflow path. This not only ensures wiring connection but also prevents dust from settling into critical component areas, thereby improving the overall reliability and safety of the equipment.

[0026] In a preferred embodiment, the sealing diaphragm is made of PTFE (polytetrafluoroethylene), and the surface roughness Ra of the inner arc spherical surface of the inlet channel is ≤0.1μm.

[0027] By employing the optimized technical features of the above-mentioned structure, the PTFE material used in the sealing diaphragm significantly improves the corrosion resistance of the control valve. PTFE material possesses excellent chemical stability, effectively resisting corrosive substances that may be present in high-purity chemicals such as photoresist and ultrapure water, thereby extending the service life of the sealing boss. PTFE material has self-lubricating properties, reducing the frictional resistance between the sealing boss and the valve seat during opening and closing, further improving operational reliability and sensitivity. PTFE material ensures sufficient protection while avoiding the risk of peeling associated with PTFE coatings. The inner arc-shaped spherical surface roughness Ra≤0.1μm of the inlet flow channel effectively reduces frictional resistance during the flow of the chemical fluid, improving fluid flowability and stability, eliminating eddies and stagnant water areas within the flow channel, avoiding bacterial growth and chemical residue problems, significantly improving the cleanliness and service life of the semiconductor coating equipment, and meeting the stringent requirements for handling high-purity chemicals and ultrapure water in semiconductor manufacturing processes.

[0028] In a preferred embodiment, the present invention may be further configured such that the electric regulating valve further includes an anti-corrosion base plate disposed at the bottom of the valve seat; the anti-corrosion base plate, the valve seat, and the dustproof housing are connected by multiple connecting rods; multiple anti-corrosion plugs are disposed on the anti-corrosion base plate and seal the exposed ends of the connecting rods; and multiple corrosion-resistant rubber rings are disposed at the bottom of the anti-corrosion base plate and in the housing gap between the bottom of the valve seat and the top of the anti-corrosion base plate.

[0029] By employing the optimized technical features of the aforementioned structure, the corrosion-resistant base plate located at the bottom of the valve seat enhances the structural stability of the entire electric control valve. Multiple connecting rods firmly connect the corrosion-resistant base plate, valve seat, and dustproof housing together, forming an integrated assembly structure that improves the valve's overall shock resistance and reliability. Multiple corrosion-resistant plugs on the base plate seal the exposed ends of the connecting rods, effectively preventing corrosive liquids from seeping into the interior along the connection points, ensuring long-term stable operation of the electric control valve in harsh chemical environments. Multiple corrosion-resistant rubber rings fill the gap between the bottom of the corrosion-resistant base plate and the bottom of the valve seat and the top of the corrosion-resistant base plate, allowing the connecting rods to pass through, further enhancing the sealing performance and achieving an IP67 protection rating. This prevents external contaminants from entering and meets the semiconductor industry's requirements for high cleanliness and zero leakage.

[0030] In a preferred embodiment, the present invention may be further configured such that a guide groove wall is provided in the hollow movable space of the pre-assembled inner box, and a guide side that cooperates with the guide groove wall is provided at the first part of the diaphragm connecting shaft to limit the rotational degree of freedom of the diaphragm connecting shaft and ensure that the diaphragm connecting shaft can only move up and down in the vertical direction.

[0031] By employing the preferred technical features of the above structure, the rotational freedom of the diaphragm connecting shaft is effectively restricted through the cooperation between the guide groove wall and the guide side, ensuring that it can only move vertically. This avoids sealing problems or transmission failures caused by accidental rotation of the diaphragm connecting shaft during operation, significantly improving the stability and reliability of the equipment. At the same time, this design simplifies the complexity of the transmission system, reduces assembly difficulty, and helps improve production efficiency and reduce maintenance costs.

[0032] The second main objective of this invention is achieved through the following technical solution: a method for assembling an electrically controlled valve for a semiconductor coating equipment, comprising the following steps:

[0033] S1. A pre-assembled inner casing is provided, wherein an adjusting screw, a diaphragm connecting shaft, and a spring pre-tightening module are disposed inside the pre-assembled inner casing. A stepper motor is disposed on the pre-assembled inner casing, and the stepper motor is used to drive the adjusting screw to rotate inside the pre-assembled inner casing, so that the first part of the diaphragm connecting shaft slides up and down in the hollow movable space of the pre-assembled inner casing. The two ends of the spring pre-tightening module respectively elastically contact the first part of the diaphragm connecting shaft and the inner limiting part of the pre-assembled inner casing in the hollow movable space, and are used to apply a vertically downward pre-tightening force to the diaphragm connecting shaft.

[0034] S2. The pre-assembled inner box is housed inside the dustproof outer shell, forming a cooling space between the pre-assembled inner box and the dustproof outer shell;

[0035] S3. Install a sealing diaphragm at the bottom of the dustproof housing; wherein the sealing diaphragm has an arc-shaped thin film portion and an inverted conical sealing boss integrally provided at the center and protruding downwards, the arc-shaped thin film portion is a semi-circular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss is connected to the second part of the diaphragm connecting shaft protruding from the pre-assembled inner casing;

[0036] S4. Combining the valve seat and the dustproof housing, the valve seat has a longitudinal valve port, an inlet flow channel, and an outlet flow channel inside. The valve seat has a mounting hole aligned with the longitudinal valve port, and the dustproof housing is mounted on the mounting hole. The lower end of the longitudinal valve port is connected to the inner end of the inlet flow channel, and the inner end of the inlet flow channel is formed as a continuous and smooth inner arc spherical surface to form a dead zone-free flow channel. The inclined sidewall of the sealing boss is used to seal the inner wall of the longitudinal valve port, and the arc-shaped film portion is aligned with the annular groove connected to the inner end of the outlet flow channel. The sealing boss can extend into or detach from the longitudinal valve port.

[0037] This basic method example demonstrates the efficient assembly of an electric control valve, ensuring that all components work together to achieve high-precision flow control and excellent sealing performance, with the following specific results:

[0038] 1. In step S1, the drive assembly and the elastic pre-tightening module are pre-integrated in the pre-assembled inner box, so that the diaphragm connecting shaft can obtain precise vertical movement capability and appropriate pre-tightening force. The elastic pre-tightening module absorbs possible vibration, and since they are both in the pre-assembled inner box, the elastic pre-tightening module and the drive assembly have consistent displacement, which effectively solves the problem of seal failure caused by vibration in traditional structures and improves the overall stability and reliability of the equipment.

[0039] 2. In step S2, the pre-assembled inner box is placed inside the dustproof outer shell to form a cooling space that can cool and isolate the stepper motor from dust. This not only protects the internal precision parts from external dust and other impurities, but also removes heat through air circulation, ensuring that the stepper motor and other components operate stably for a long time at a suitable temperature.

[0040] 3. In step S3, the arc-shaped diaphragm part with a large deformation stroke and the inverted conical sealing boss combination structure are assembled. The sealing boss is limited by the deformation stroke of the arc-shaped diaphragm part, which is 1.2 to 1.5 times the effective stroke of the diaphragm connecting shaft. This greatly improves the service life and flexibility of the sealing diaphragm as a sealing element, and is especially suitable for application scenarios that require frequent valve opening and closing.

[0041] 4. In step S4, the internal flow channel of the valve seat is designed with a dead zone-free form at the inner end of the inlet flow channel (forming a continuous and smooth inner arc spherical surface) to avoid the risk of contamination or blockage caused by fluid stagnation, which is especially important for handling high-purity chemicals; at the same time, the smooth transition geometry also helps to improve fluid dynamics characteristics and reduce energy loss.

[0042] 5. During the assembly process from steps S1 to S4, the operating procedures for each key step are clearly defined to control product quality from the source, facilitate subsequent maintenance and repair, and lay a solid foundation for the realization of an automated production line.

[0043] In a preferred embodiment, the present invention may be further configured such that step S4 includes:

[0044] Multiple layers of corrosion-resistant rubber rings are installed between the valve seat and the dustproof housing, and locked in place by quick-release clamps;

[0045] An anti-corrosion base plate is installed at the bottom of the valve seat, and the anti-corrosion base plate, the valve seat, and the dustproof housing are fixedly connected by multiple connecting rods;

[0046] A base plate anti-corrosion plug is installed at the exposed end of the connecting rod to ensure the sealing and corrosion resistance of the connection part;

[0047] The assembly method further includes:

[0048] S5. Photoelectric calibration of the upper dead point of the effective stroke of the sealing boss of the sealing diaphragm.

[0049] By employing the preferred technical features of the above method, step S4 achieves the following effect:

[0050] 1. Installing multiple layers of corrosion-resistant rubber rings between the valve seat and the dustproof housing and locking them with quick-release clamps significantly improves the sealing performance at the interface, prevents leakage caused by hard contact, and enhances the corrosion resistance of the equipment, extending its service life.

[0051] 2. An anti-corrosion base plate is added to the bottom of the valve seat, and the anti-corrosion base plate, valve seat, dustproof shell and pre-assembled inner box are fixedly connected in an integrated manner through multiple connecting rods. This optimizes the overall structural stability and achieves easy assembly characteristics, ensuring that each component maintains precise alignment during high-frequency opening and closing, and reducing the negative impact of vibration.

[0052] 3. Install a base plate anti-corrosion plug on the exposed end of the connecting rod to further enhance the sealing and corrosion resistance of the connection, effectively prevent the intrusion of external harmful media, and ensure the long-term stable operation of internal precision components.

[0053] In summary, the technical solutions of the apparatus or method in this invention include at least one of the following technical effects that contribute to the prior art:

[0054] 1. Achieve high-precision flow regulation and zero-leakage sealing. The inverted conical sealing boss, which is integrally connected to the inner ring of the arc-shaped diaphragm, combines with the downward preload provided by the spring. The inclined side wall of the sealing boss and the inner wall of the longitudinal valve port form a Z-direction short cylindrical annular strip contact, which effectively solves the problem of easy leakage of traditional XY plane annular plane contact seals and ensures that stable sealing performance can be maintained even under vibration.

[0055] 2. Significantly improve the service life of the sealing diaphragm by adopting an arc-shaped film part with a semi-circular anti-fatigue structure, so that the maximum deformation stroke of the sealing boss is 1.2 to 1.5 times the effective stroke of the diaphragm connecting shaft, avoiding premature damage caused by excessive stretching of the arc-shaped film part, and enhancing the reliability of the electric regulating valve under frequent opening and closing conditions.

[0056] 3. Improve the stability of fluid flow within the valve seat. The conical flow guide design at the joint between the valve seat and the arc-shaped diaphragm creates a dead-zone-free flow channel, eliminating eddy currents, reducing the risk of contamination, and improving flow control accuracy. Attached Figure Description

[0057] Figure 1 A three-dimensional schematic diagram of an electrically adjustable valve for a semiconductor coating equipment is shown in an embodiment of the present invention;

[0058] Figure 2 An exploded view of the components of the electric regulating valve in an embodiment of the present invention is shown;

[0059] Figure 3 A cross-sectional schematic diagram of the electric regulating valve in the open state is shown in a specific embodiment of the present invention;

[0060] Figure 4 A cross-sectional schematic diagram of the electric regulating valve in the closed state is shown in a specific embodiment of the present invention;

[0061] Figure 5 A schematic diagram illustrating the features of the pre-assembled inner casing of the electric regulating valve in a specific embodiment of the present invention;

[0062] Figure 6 A flow block diagram illustrating an assembly method for an electrically controlled valve in a semiconductor coating apparatus according to an embodiment of the present invention is shown.

[0063] Figure 7 Draw corresponding Figure 6 Assembly diagram for step S1;

[0064] Figure 8 Draw corresponding Figure 6 Assembly diagram for step S2;

[0065] Figure 9 Draw corresponding Figure 6 Assembly diagram for step S3;

[0066] Figure 10 Draw corresponding Figure 6 Assembly diagram for step S4;

[0067] Figure 11 Draw corresponding Figure 6 Assembly diagram for step S5;

[0068] Figure 12 for Figure 9 Enlarged 3D and cross-sectional views of the sealing diaphragm.

[0069] Reference numerals: 10. Pre-assembled inner casing; 10A. Inner limiting part; 10C. Guide groove wall; 11. Drive assembly; 12. Elastic pre-tightening module; 13. Stepper motor; 14. Adjusting screw; 15. Diaphragm connecting shaft; 15A. First part; 15B. Second part; 15C. Guide side; 16. Spacer ring; 17. Cooling space; 18. Photoelectric indicator rod; 20. Dustproof housing; 21. Photoelectric sensor door; 22. 23. Air inlet; 24. Exhaust outlet; 25. Wiring hole; 26. Outer shell cavity; 37. Inner connecting rod; 38. Sealing diaphragm; 39. Arc-shaped diaphragm section; 30. Sealing boss; 41. Valve seat; 42. Longitudinal valve port; 43. Inlet flow channel; 44. Inner arc spherical surface; 45. Outlet flow channel; 46. Mounting hole; 47. Annular groove; 58. Corrosion-resistant base plate; 59. Connecting rod; 50. Corrosion-resistant plug for base plate; 51. Corrosion-resistant rubber ring. Detailed Implementation

[0070] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments for understanding the inventive concept of the present invention, and cannot represent all embodiments, nor are they interpreted as the only embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art under the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0071] In the embodiments and variations of this invention, "pre-assembly" refers to pre-assembly; "pre-tightening" refers to pre-forming elastic force; "inverted cone" indicates that the platform has a contact end with a gradually increasing diameter and inclined sidewalls facing the valve port; "hollow active space" refers to an open, non-enclosed space where specific components can extend and move; "cooling space" refers to an enclosed space isolated from the external environment and capable of ventilation and cooling; "stepper motor" can be a high-precision stepper motor or a known ordinary motor, and its drive component can be a mechanical lead screw or magnetic transmission; "film portion" refers to a relatively thin and flexible deformable part of the sealing diaphragm, and generally the film portion is integrally connected between the sealing boss in the middle of the sealing diaphragm and the peripheral clamping portion on the periphery. It should be noted that if the embodiments of this invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly. To facilitate a better understanding of the technical solution of this invention, the electric regulating valve of this invention will be described and explained in further detail below, but this should not be construed as limiting the scope of protection of this invention.

[0072] Figure 1 A three-dimensional schematic diagram of an electrically adjustable valve for a semiconductor coating equipment is shown in an embodiment of the present invention; Figure 2 This is an exploded view of the components of the electric regulating valve; Figure 3 This is a cross-sectional diagram of the valve in the open state; Figure 4 This is a cross-sectional view of the valve in the closed state; Figure 5 This is a schematic diagram showing the features of the pre-assembled inner casing, a key component in the electric regulating valve. Figure 6 This is a flow block diagram illustrating the assembly method of an electrically controlled valve that can be used in the embodiments and variations. An electrically controlled valve for semiconductor coating equipment is used in the equipment supply chain of the semiconductor manufacturing industry. Specifically, it can be applied to the precise flow control of photoresist coating equipment or electronic ultrapure water cleaning equipment. The product application requirements for the electrically controlled valve include: precise flow regulation, corrosion resistance, high temperature resistance, a clean valve cavity with no dead zones, extremely close to zero leakage, and sealing performance with virtually no particle and ion precipitation.

[0073] Reference Figure 1 and Figure 2 An electric regulating valve for a semiconductor coating equipment disclosed in this embodiment of the invention includes: a pre-assembled inner casing 10 pre-assembled to form a driving and conducting function; a dustproof outer shell 20 for accommodating the pre-assembled inner casing 10 to provide a dustproof isolation effect; a sealing diaphragm 30 controlled by the driving of the pre-assembled inner casing 10 to close the longitudinal valve port 41; and a valve seat 40 that can provide the longitudinal valve port 41 and the flow channels on both sides of the longitudinal valve port 41.

[0074] Reference Figure 3 and Figure 4 The pre-assembled inner casing 10 is housed within the dustproof outer casing 20, forming a cooling space 17 between the pre-assembled inner casing 10 and the dustproof outer casing 20. This isolated cooling method prevents dust generated by the pre-assembled inner casing 10 from flowing into the external environment of the dustproof outer casing 20. (See reference) Figure 5 and Figure 2The pre-assembled inner casing 10 is pre-assembled with a drive assembly 11 and a spring pre-tightening module 12. The drive assembly 11 includes a stepper motor 13 mounted on the pre-assembled inner casing 10, an adjusting screw 14 mounted inside the pre-assembled inner casing 10, and a diaphragm connecting shaft 15. The rotating shaft of the stepper motor 13 and the adjusting screw 14 rotate synchronously. Specifically, the rotating shaft of the stepper motor 13 has a rotating plate portion, and the adjusting screw 14 has a corresponding notch that accommodates the rotating plate portion. The rotating plate portion of the stepper motor 13 rotates, driving the adjusting screw 14 to rotate. The rotation of the adjusting screw 14 is a stationary rotation, with the longitudinal displacement of the adjusting screw 14 limited by the space between the stepper motor 13 and the spacer ring 16. Therefore, the stepper motor 13 can drive the rotation of the adjusting screw 14 inside the pre-assembled inner casing 10, and the spacer ring 16 is specifically a metal bearing. On the other hand, the external thread of the adjusting screw 14 is screwed into the internal thread of the diaphragm connecting shaft 15; based on the rotation of the adjusting screw 14, the first part 15A of the diaphragm connecting shaft 15 slides and moves up and down in the hollow movable space of the pre-assembled inner casing 10, and the diaphragm connecting shaft 15 is limited and can only move up and down, but cannot rotate; specifically refer to Figure 5 Specifically, the two ends of the compression spring preload module 12 elastically contact the first part 15A of the diaphragm connecting shaft 15 and the inner limiting part 10A of the pre-assembled inner box 10 in the hollow movable space, respectively, to apply a vertically downward preload force to the diaphragm connecting shaft 15. Based on the threaded connection, this preload force is a limited preload on the diaphragm connecting shaft 15 rather than a completely outward elastic force. In addition, multiple inner rods 26 can be used to connect the bottom of the dustproof shell 20 and the bottom of the pre-assembled inner box 10 (e.g., Figure 2 As shown), it is used to connect the pre-assembled inner casing 10 and the dustproof outer casing 20; in a variation, multiple inner connecting rods 26 are positioning rods used to position the pre-assembled inner casing 10 within the dustproof outer casing 20, and the connection between the pre-assembled inner casing 10 and the dustproof outer casing 20 can be achieved by connecting rods 51. The second part 15B of the diaphragm connecting shaft 15 protrudes from the bottom of the pre-assembled inner casing 10 to connect the sealing diaphragm 30. In a more specific example, the pre-assembled inner casing 10 contains a slot of the adjusting screw 14, and a spacer ring 16 is also accommodated therein. The spacer ring 16 is spaced between the adjusting screw 14 and the diaphragm connecting shaft 15, and the connecting part of the adjusting screw 14 can pass through the through hole of the adjusting screw 14 to connect to the first part 15A of the diaphragm connecting shaft 15. During the rotation of the adjusting screw 14, the spacer ring 16 can reduce the friction of the adjusting screw 14 against the bottom of the slot of the pre-assembled inner casing 10.

[0075] Reference Figure 2 , Figure 3 and Figure 4The sealing diaphragm 30 itself has strong extensibility and flexibility. The sealing diaphragm 30 has an arc-shaped film portion 31 and an integrally formed inverted conical sealing boss 32 protruding downwards from the center. The arc-shaped film portion 31 is a semi-circular ring shape with a concave bottom to provide a deformation stroke 1.2 to 1.5 times greater than the effective stroke. The center of the sealing boss 32 is connected to the second part 15B of the diaphragm connecting shaft 15 protruding from the pre-assembled inner casing 10. In this embodiment, the arc-shaped film portion 31 exhibits a semi-circular shape in a zero-stress installation state, close to the valve open state; in the redefined valve open state, the arc-shaped film portion 31 can exhibit an arc-shaped ring that is close to a semi-circular ring. (Refer to...) Figure 3 The semi-circular shape is close to the cross-sectional shape of the arc-shaped diaphragm portion 31 of the electric regulating valve in the valve installation state when the upper dead point of the drive is not defined and the valve is not open, thus having better extensibility and deformation capability. The effective stroke is the vertical movement distance of the diaphragm connecting shaft 15, which is also the operational movement distance of the sealing boss 32 from valve open to valve closed after redefinition; the deformation stroke is the maximum movement distance of the sealing boss 32 exceeding the movement distance from valve open to valve closed under the deformation degree that the arc-shaped diaphragm portion 31 can withstand. In this embodiment, the semi-circular arc-shaped diaphragm portion 31 is used to expand the maximum movement distance (i.e., deformation stroke) of the sealing boss 32; in addition, the upper dead point of the effective stroke can be used to constrain the upper dead point of the diaphragm connecting shaft 15 after assembly, so the deformation stroke can be controlled to be 1.2 to 1.5 times the effective stroke. In this embodiment, the sealing diaphragm 30 also has a peripheral clamping portion, integrally formed on the periphery of the arc-shaped thin film portion 31, and clamped by the dustproof housing 20 and the valve seat 40. In a specific example, the peripheral clamping portion of the sealing diaphragm 30 is clamped in the groove within the mounting hole 44 of the valve seat 40 (visible in...). Figure 11 The bottom protruding ring of the dustproof housing 20 (visible in) Figure 9 Between ), the dustproof housing 20 specifically includes a removable and detachable housing cover to facilitate maintenance of the stepper motor 13.

[0076] Reference Figure 2 , Figure 3 and Figure 4The valve seat 40 has a longitudinal valve port 41, an inlet flow channel 42, and an outlet flow channel 43 inside. The valve seat 40 has a mounting hole 44 aligned with the longitudinal valve port 41, and the dustproof housing 20 is mounted on the mounting hole 44. The lower end of the longitudinal valve port 41 connects to the inner end of the inlet flow channel 42, and the inner end of the inlet flow channel 42 is formed as a continuous and smooth inner arc spherical surface 42A to create a dead-zone-free flow channel. This not only facilitates smooth liquid flow but also greatly reduces the risk of blockage caused by the deposition of fine particles. The inclined sidewall of the sealing boss 32 is used to seal the inner wall of the longitudinal valve port 41. The arc-shaped diaphragm portion 31 is aligned with the annular groove 45 communicating with the inner end of the outlet flow channel 43. Therefore, the arc-shaped diaphragm portion 31 withstands a smaller fluid pressure when the valve is closed. The sealing boss 32 can extend into or detach from the longitudinal valve port 41.

[0077] In summary, by utilizing the pre-assembled inner casing 10 of the pre-assembled elastic pre-tightening module 12, the cooling space 17 formed between the pre-assembled inner casing 10 and the dustproof outer casing 20, the inverted conical sealing boss 32 of the sealing diaphragm 30 sealing the longitudinal valve port 41 with its oblique sidewall, and the arc-shaped thin film portion 31 of the sealing diaphragm 30 aligned with the annular groove 45 connected to the inner end of the outlet flow channel 43, the semiconductor coating equipment achieves high-precision flow regulation and reliable sealing performance of the regulating valve.

[0078] A drive assembly 11 and a spring pre-tightening module 12 are pre-assembled in a pre-assembled inner casing 10 housed within the dustproof housing 20. A stepper motor 13 is mounted on the pre-assembled inner casing 10, and a cooling space 17 is formed between the pre-assembled inner casing 10 and the dustproof housing 20 to prevent the valve-driven operation of the stepper motor 13 from affecting the cleanliness of the external environment of the dustproof housing 20, thus meeting the vacuum adaptability requirements for low volatile organic compounds. Through the combined design of the arc-shaped thin film portion 31 of the sealing diaphragm 30 and the inverted conical sealing boss 32, the inclined sidewall of the sealing boss 32 seals the inner wall of the longitudinal valve port 41 of the valve seat 40. A short cylindrical annular strip-shaped contact seal is formed between the sealing boss 32 and the longitudinal valve port 41. The sealing boss 32 can extend into or detach from the sealing diaphragm 30. The longitudinal valve port 41 eliminates eddy currents and significantly improves sealing reliability, effectively solving the problem of easy leakage in traditional circular ring-plane contact seals. The stepper motor 13 located at the top of the pre-assembly inner casing 10 drives the adjusting screw 14 to rotate, causing the diaphragm connecting shaft 15 to move up and down, achieving precise control of the distance between the sealing boss 32 and the longitudinal valve port 41, thereby achieving precise flow regulation. The aforementioned arc-shaped diaphragm part 31, the inverted conical sealing boss 32, and the stepper motor 13 located at the top of the pre-assembly inner casing 10, combined with the elastic pre-tightening module 12 set in the pre-assembly inner casing 10, apply a vertically downward pre-tightening force to the diaphragm connecting shaft 15, ensuring a stable sealing state even in a vibration environment. The flow control accuracy can reach ±0.5% FS (full scale) or less, the response time is ≤50 ms, and the repeatability is ≤0.05% FS. Those skilled in the art should know that when installing new drive components or elastic components, dust can easily fall onto the surface of the drive component 11, the elastic pre-tightening module 12, or the stepper motor 13.

[0079] The inner end of the valve seat 40, which connects to the longitudinal valve port 41 in the inlet channel 42, forms a continuous and smooth inner arc spherical surface 42A, creating a dead-zone-free flow channel. This effectively avoids fluid residue and contamination, improving equipment cleanliness and service life. The arc-shaped film portion 31 of the sealing diaphragm 30 provides a deformation stroke 1.2 to 1.5 times greater than the effective stroke of the diaphragm connecting shaft 15, preventing excessive stretching of the arc-shaped film portion 31. Furthermore, the arc-shaped film portion 31 aligns with the annular groove 45 connected to the inner end of the outlet channel 43. When the valve is closed, the arc-shaped film portion 31 withstands lower fluid pressure, while when the valve is open, it restores its original installation shape under low internal stress as much as possible. This significantly improves the fatigue resistance of the sealing diaphragm 30, extending the service life of the electric regulating valve. The mechanical operating life of the electric regulating valve can reach ≥1 million cycles.

[0080] In a preferred embodiment, refer to Figure 2 and Figure 5The diameter of the first part 15A of the diaphragm connecting shaft 15 is larger than that of the second part 15B. A photoelectric indicator rod 18 protruding laterally from the hollow movable space is connected to the first part 15A of the diaphragm connecting shaft 15. A corresponding photoelectric sensor door 21 is provided inside the dustproof housing 20. As the diaphragm connecting shaft 15 drives the photoelectric indicator rod 18 to rise to a preset upper stop position that the photoelectric sensor door 21 can sense, the upper stop point of the effective stroke of the sealing boss 32 is determined. Utilizing the design that the diameter of the first part 15A of the diaphragm connecting shaft 15 is larger than that of the second part 15B, the elastic pre-tightening module 12 can be accurately identified and installed during assembly. (Refer to...) Figure 3 The photoelectric sensor door 21 inside the dustproof housing 20 works in conjunction with the photoelectric indicator rod 18 connected to the first part 15A of the diaphragm connecting shaft 15. When the photoelectric indicator rod 18 rises with the diaphragm connecting shaft 15 to the predetermined upper stop point, it triggers the photoelectric sensor door 21 inside the dustproof housing 20 to emit a photoelectric sensing signal, cutting off the regulating power supply. At this time, the valve state is set to the fully open state after assembly. (Refer to...) Figure 4 When the diaphragm connecting shaft 15 descends to the predetermined lower stop point, the continuous sealing force provided by the elastic pre-tightening module 12 is detected. At this time, the photoelectric sensor door 21 feeds back a closing signal, cuts off the regulating power supply, and confirms that this is the lower stop point that completely closes the valve after assembly. Once both the upper and lower stop points are determined, the effective stroke of the diaphragm connecting shaft 15 can be confirmed, and the scale of the stepper motor 13 can be calculated and allocated in reverse. This enables accurate detection of the upper stop point of the effective stroke of the sealing boss 32, ensuring the accuracy and reliability of the position feedback in the valve's open state, thereby improving the automation control level and operational stability of the entire electric regulating valve.

[0081] In the preferred embodiment, refer again Figure 2 and Figure 5 The hollow movable space of the pre-assembled inner casing 10 is provided with a guide groove wall 10C, specifically a planar sidewall to prevent rotation. The first part 15A of the diaphragm connecting shaft 15 is provided with a guide side 15C that fits into the guide groove wall 10C (e.g., Figure 5 As shown, the guide groove wall 10C and the guide side 15C are used to restrict the rotational freedom of the diaphragm connecting shaft 15, ensuring that the diaphragm connecting shaft 15 can only move up and down in the vertical direction. Through the cooperation of the guide groove wall 10C and the guide side 15C, the rotational freedom of the diaphragm connecting shaft 15 is effectively constrained, allowing it to move up and down only in the vertical direction (Z-axis). This avoids sealing problems or transmission failures caused by accidental rotation of the diaphragm connecting shaft 15 during operation, significantly improving the stability and reliability of the equipment. At the same time, this design simplifies the complexity of the transmission system, reduces assembly difficulty, and helps improve production efficiency and reduce maintenance costs. In a more specific embodiment, since the peripheral clamping part of the sealing diaphragm 30 is annular (as can be seen in…), Figure 9 and Figure 12 The peripheral clamping part can rotate or not rotate at the same time. The connection between the center of the sealing boss 32 of the sealing diaphragm 30 and the protruding second part 15B of the diaphragm connecting shaft 15 can be freely rotated. There is no forced fixed connection between the sealing boss 32 and the peripheral clamping part of the sealing diaphragm 30. The peripheral clamping part of the sealing diaphragm 30 and / or the sealing boss 32 will naturally rotate to the angle of least stress in order to release the internal torsional stress of the arc-shaped thin film part 31 of the sealing diaphragm 30 as much as possible.

[0082] In a preferred embodiment, refer to Figure 1 and Figure 2 The dustproof housing 20 has vent holes on its outer surface, which are connected to the cooling space 17 for circulating cooling of the stepper motor 13, thereby achieving effective heat dissipation. Specifically, cooling air enters the cooling space 17 through the vent holes on the dustproof housing 20, carrying away the heat generated by the stepper motor 13 during operation. This ensures the stability and reliability of the stepper motor 13 under long-term high-load operation, which not only extends the service life of the stepper motor 13 and prevents dust from falling off the stepper motor 13 during driving, but also indirectly improves the working efficiency and performance stability of the electric regulating valve.

[0083] In a more preferred embodiment, reference is made to Figure 1 and Figure 2The vent includes an air inlet 22 and an exhaust vent 23. The outer surface of the dustproof housing 20 also has a wiring hole 24 for power connection to the stepper motor 13. Specifically, the motor power cable passes through the wiring hole 24 at the side opening and connects to the circuit board of the stepper motor 13. More preferably, the wiring hole 24 and the air inlet 22 are located within the housing sub-cavity 25 of the dustproof housing 20, while the exhaust vent 23 is located on the main body of the dustproof housing 20 above the housing sub-cavity 25. This achieves effective heat dissipation of the stepper motor 13, prevents dust leakage, and ensures internal electrical connections. The air inlet 22 and the exhaust 23 form an airflow path for cooling the stepper motor 13. The wiring hole 24 and the air inlet 22 are concentrated in the housing sub-cavity 25. The housing sub-cavity 25 prevents the airflow entering through the air inlet 22 from blowing directly onto the pre-assembled inner casing 10, forming a tortuous cooling airflow channel (first entering from the side of the air inlet 22 and flowing down to the bottom of the inner wall of the housing sub-cavity 25, then flowing through the housing sub-cavity 25 to the body of the dustproof housing 20 and then upward to the stepper motor 13, exchanging heat, and then being discharged from the exhaust 23). Moreover, the exhaust 23 is located on the upper part of the dustproof housing 20 body, optimizing the airflow path, ensuring wiring connections, and preventing dust from settling into critical component areas, thereby improving the overall reliability and safety of the equipment. The dustproof housing 20 can be made of PFA (tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer), which has excellent chemical stability against corrosion, thermal stability at 260°C, electrical insulation with low dielectric constant and high resistivity, mechanical properties with low coefficient of friction and good self-lubricating properties, and processing performance through injection, extrusion, and calendering processes.

[0084] In a preferred embodiment, refer to Figure 2 and Figure 3The sealing diaphragm 30 is made of PTFE (polytetrafluoroethylene); the surface roughness Ra of the inner arc spherical surface 42A of the inlet flow channel 42 is no greater than 0.1 μm. The use of PTFE material in the sealing diaphragm 30 significantly improves the corrosion resistance of the control valve. Due to its excellent chemical stability, PTFE effectively resists high-purity chemicals such as photoresist and corrosive substances that may be present in ultrapure water, thereby extending the service life of the sealing boss 32. PTFE material has self-lubricating properties, which reduces the frictional resistance between the sealing boss 32 and the valve seat 40 during opening and closing, improving the reliability and sensitivity of the operation. Using PTFE material ensures sufficient protection while avoiding the risk of peeling due to the use of coatings. The surface roughness Ra of the inner arc spherical surface 42A of the inlet channel 42 does not exceed 0.1μm. This effectively reduces the frictional resistance when the chemical fluid flows, improves the fluidity and stability, eliminates eddies and dead water areas in the channel, prevents bacterial growth and chemical residues at the longitudinal valve port 41, significantly improves the cleanliness and service life of the semiconductor coating equipment, and meets the stringent requirements for handling high-purity chemicals and ultrapure water fluids in the semiconductor manufacturing process.

[0085] In a preferred embodiment, refer to Figure 2 , Figure 3 and Figure 4 The peripheral clamping portion of the sealing diaphragm 30 is annular and has no mounting hole 44 larger than that of the valve seat 40. The mounting hole 44 of the valve seat 40 has a groove that accommodates the peripheral clamping portion of the sealing diaphragm 30. The dustproof housing 20 has a flange to press against the upper surface of the peripheral clamping portion of the sealing diaphragm 30. The annular peripheral clamping portion of the sealing diaphragm 30 precisely engages with the groove in the mounting hole 44 of the valve seat 40, forming a physical limit to prevent diaphragm displacement or loosening. In addition, the bottom flange of the dustproof housing 20 directly presses against the upper surface of the clamping portion, combined with the support of the groove, forming a bidirectional clamping sealing structure that effectively blocks fluid leakage paths, especially suitable for high vacuum or high pressure differential environments. This nested design of the groove and clamping portion ensures that the sealing diaphragm 30 remains stably aligned under dynamic operating conditions (such as high-frequency opening and closing or vibration), preventing seal failure due to vibration. Furthermore, the clamping force of the flange achieves uniform distribution of the mechanical structure, avoiding localized stress concentration and extending the service life of the sealing diaphragm 30. The tight fit between the slot and the clamping part eliminates gaps that may occur with traditional bolt fixing, preventing particles or contaminants from entering the valve body and meeting ISO Class 1 cleanroom standards. Since the outer diameter of the annular clamping part of the sealing diaphragm 30 does not exceed the diameter of the mounting hole 44 of the valve seat 40, it offers convenient assembly and maintenance, simplifying the installation process of the sealing diaphragm 30, eliminating the need for multiple additional fasteners, and reducing assembly complexity. Disassembly only requires removing the connecting rod 51 to release the bottom flange clamping of the dustproof housing 20, allowing for quick replacement of the sealing diaphragm 30, improving maintenance efficiency. Additionally, refer to... Figure 9 , Figure 12 , Figure 3 and Figure 4 A vent groove is provided on the bottom protruding ring of the valve seat 40 to provide a vent space above the arc-shaped thin film portion 31 of the sealing diaphragm 30. The vent space above the arc-shaped thin film portion 31 can effectively vent and vent during valve opening and closing operations.

[0086] In a preferred embodiment, refer to Figure 1 and Figure 2 The electric regulating valve also includes an anti-corrosion base plate 50, which is disposed at the bottom of the valve seat 40. Multiple connecting rods 51 are used to connect the anti-corrosion base plate 50, the valve seat 40, and the dustproof housing 20, forming an integrated assembly structure. Multiple anti-corrosion plugs 52 are disposed at the bottom of the anti-corrosion base plate 50 to seal the exposed ends of the connecting rods 51, effectively preventing corrosive fluids from penetrating the interior and ensuring long-term stable operation of the electric regulating valve in harsh chemical environments. Furthermore, multiple corrosion-resistant rubber rings 53 are respectively disposed at the bottom of the anti-corrosion base plate 50 and in the housing gap between the bottom of the valve seat 40 and the anti-corrosion base plate 50, allowing the connecting rods 51 to pass through, further enhancing the sealing effect to achieve an IP67 protection rating, preventing the intrusion of external contaminants and meeting the stringent requirements of the semiconductor industry for high cleanliness and zero leakage. The corrosion-resistant base plate 50, located at the bottom of the valve seat 40, enhances the structural stability of the entire electric control valve. Multiple connecting rods 51 pass through the corrosion-resistant base plate 50 and connect to the valve seat 40, then to the dustproof housing 20. These three components are firmly connected, forming an integrated assembly structure. This structural stability enhancement gives the electric control valve better shock resistance and reliability. In a variation example, the connecting rods 51 also pass through the dustproof housing 20 and connect to the pre-assembled inner casing 10. The corrosion-resistant base plate 50, valve seat 40, dustproof housing 20, and pre-assembled inner casing 10 are firmly connected, forming an integrated assembly structure. Furthermore, multiple corrosion-resistant plugs 52 on the base plate seal the exposed ends of the connecting rods 51, effectively preventing corrosive liquids from seeping into the interior along the connection points, ensuring long-term stable operation of the electric control valve in harsh chemical environments. A corrosion-resistant rubber ring 53 fills the gap between the bottom of the corrosion-resistant base plate 50 and the top of the valve seat 40, further enhancing the sealing performance and achieving an IP67 protection rating. This prevents external contaminants from entering and meets the semiconductor industry's requirements for high cleanliness and zero leakage. A corrosion-resistant rubber ring 53 can also be provided between the top of the valve seat 40 and the bottom of the dustproof housing 20 to achieve a seal. The peripheral clamping portion of the sealing diaphragm 30 is clamped and secured by a mounting hole 44 on the top of the valve seat 40 with a non-planar, specific bottom convex ring shape. This clamping portion is located in a groove on the inner periphery of the mounting hole 44 of the valve seat 40.

[0087] Reference Figure 6 This invention also discloses a method for assembling an electrically controlled regulating valve in a semiconductor coating equipment, encompassing steps S1 to S5. Steps S1 to S4 are key steps. Specifically, step S1 involves providing a pre-assembled inner casing containing an adjusting screw, a diaphragm connecting shaft, and a spring pre-tightening module; step S2 places the pre-assembled inner casing within a dustproof housing; step S3 installs a sealing diaphragm at the bottom of the dustproof housing, with the sealing boss of the diaphragm connected to the second part of the diaphragm connecting shaft; step S4 combines the valve seat with the dustproof housing, allowing the sealing boss of the diaphragm to extend into or disengage from the longitudinal valve port of the valve seat. Step S5 is an optional step, indicated by a dashed box, and its function is to redefine the upper dead point of the effective stroke of the diaphragm sealing boss using photoelectric calibration after assembly.

[0088] The operation of step S1 can be referred to Figure 7 A pre-assembled inner casing 10 is provided. The pre-assembled inner casing 10 contains an adjusting screw 14, a diaphragm connecting shaft 15, and a spring-loaded pre-tightening module 12, and is equipped with a stepper motor 13 on top of the pre-assembled inner casing 10. The stepper motor 13, the adjusting screw 14, and the diaphragm connecting shaft 15 constitute a drive assembly 11. The stepper motor 13 drives the adjusting screw 14 to rotate within the pre-assembled inner casing 10. The threaded shaft of the adjusting screw 14 passes through a spacer ring 16, and the threaded portion of the adjusting screw 14 is screwed into the internal threaded hole of the diaphragm connecting shaft 15, allowing the first portion 15A of the diaphragm connecting shaft 15 to slide and rise non-rotatably within the hollow movable space. The two ends of the spring-loaded pre-tightening module 12 elastically contact the first portion 15A of the diaphragm connecting shaft 15 and the inner limiting portion 10A of the pre-assembled inner casing 10, respectively (see reference for details). Figure 5 The pre-assembled inner casing 10 integrates the drive assembly 11 and the elastic pre-tensioning module 12 in step S1 to apply a vertically downward pre-tensioning force to the diaphragm connecting shaft 15. This ensures the diaphragm connecting shaft 15 achieves precise vertical movement and appropriate pre-tensioning force. The elastic pre-tensioning module 12 absorbs potential vibrations, and because it is assembled with the drive assembly 11 within the pre-assembled inner casing 10, they have consistent displacement, effectively solving the problem of seal failure due to vibration in traditional structures and improving the overall stability and reliability of the equipment.

[0089] The operation of step S2 can be referred to Figure 8 The pre-assembled inner casing 10 is placed inside the dustproof housing 20, forming a cooling space 17 between them. Specifically, an inner connecting rod 26 passes through the bottom of the dustproof housing 20 and connects to the bottom of the pre-assembled inner casing 10. This structure not only protects the internal precision parts from external dust and other impurities but also removes heat through airflow, ensuring long-term stable operation of the stepper motor 13 and other components at a suitable temperature. In a variation, the inner connecting rod 26 can be used to position the pre-assembled inner casing 10 within the dustproof housing 20.

[0090] The operation of step S3 can be referred to Figure 9 and Figure 12 A sealing diaphragm 30 is installed at the bottom of the dustproof housing 20. The sealing diaphragm 30 has an arc-shaped diaphragm portion 31 and an integrally formed inverted conical sealing boss 32 protruding downwards from the center. In a specific implementation, the diaphragm connecting shaft 15 connects the sealing diaphragm 30 to the external thread of the sealing boss 32 through the internal thread hole of the second part 15B. The arc-shaped diaphragm portion 31 is a semi-circular shape with a concave bottom in the valve open state, providing a deformation stroke 1.2 to 1.5 times greater than the effective stroke; wherein, the center of the sealing boss 32 is connected to the second part 15B of the diaphragm connecting shaft 15 protruding from the pre-assembled inner casing 10. This combined structure significantly improves the service life and flexibility of the sealing diaphragm 30, and is especially suitable for applications requiring frequent valve opening and closing operations.

[0091] The operation of step S4 can be referred to Figure 10 (Refer to) Figure 3 and Figure 4 The valve seat 40 and the dustproof housing 20 are then joined together. The valve seat 40 has a longitudinal valve port 41, an inlet flow channel 42, and an outlet flow channel 43 inside. The valve seat 40 has a mounting hole 44 aligned with the longitudinal valve port 41, and the dustproof housing 20 is mounted on the mounting hole 44 using the connecting rod 51. The lower end of the longitudinal valve port 41 connects to the inner end of the inlet flow channel 42, forming a continuous and smooth inner arc spherical surface 42A to create a dead-zone-free flow channel. The inclined sidewall of the sealing boss 32 is used to seal the inner wall of the longitudinal valve port 41, while the arc-shaped diaphragm portion 31 is aligned with the annular groove 45 communicating with the inner end of the outlet flow channel 43. Figure 4 As shown, in the valve closed state, the arc-shaped diaphragm portion 31 withstands relatively low fluid pressure, and its semi-circular cross-section has a large deformation capacity, resulting in a long service life for the sealing diaphragm 30. The sealing boss 32 can extend into or detach from the longitudinal valve port 41. This combined structure avoids the risk of contamination or blockage caused by fluid stagnation, which is particularly important for handling high-purity chemicals. Simultaneously, the smoothly transitioned geometry also helps improve fluid dynamics and reduce energy loss.

[0092] In a preferred embodiment, step S4 specifically includes: S41, installing multiple layers of corrosion-resistant rubber rings 53 between the valve seat 40 and the dustproof housing 20, and locking them with quick-release clamps, which significantly improves the sealing performance at the interface between the valve seat 40 and the dustproof housing 20, preventing chemical media leakage or external contaminant intrusion. The quick-release clamp design simplifies the disassembly and assembly process, facilitates maintenance or replacement of parts, and ensures the tightness and corrosion resistance of the connection, meeting the requirements of the semiconductor industry for high cleanliness and vacuum environment; S42, installing an anti-corrosion base plate 50 at the bottom of the valve seat 40, and fixing it to the dustproof housing 20 and the dustproof housing 20 by multiple connecting rods 51 passing through the anti-corrosion base plate 50 and the valve seat 40. The pre-assembled inner casing 10 and the installation of the anti-corrosion base plate 50 enhance the corrosion resistance of the bottom of the valve seat 40, preventing corrosive media from eroding the internal components. Multiple connecting rods 51 integrate and fix the anti-corrosion base plate 50, valve seat 40, and dustproof shell 20, improving the overall structure's seismic resistance and stability, and ensuring precise alignment of each component in high-frequency opening / closing or vibration environments. S43: Install anti-corrosion plugs 52 on the exposed ends of the connecting rods 51 to completely seal the connection points, preventing corrosive liquids from seeping into the interior along the gaps, ensuring the long-term stable operation of critical components. Combined with the filling of the corrosion-resistant rubber rings 53, an IP67 protection rating is achieved, meeting the stringent requirements of the semiconductor industry for zero leakage and ultra-low particle emission. When the aforementioned inner connecting rod 26 functions to connect the pre-assembled inner casing 10 and the dustproof shell 20, the connecting rod 51 passes through the anti-corrosion base plate 50 and the valve seat 40 and connects to the dustproof shell 20. When the aforementioned inner connecting rod 26 only has the function of positioning the pre-assembled inner box 10 in the dustproof housing 20, the connecting rod 51 passes through the anti-corrosion base plate 50, valve seat 40 and dustproof housing 20 and is connected to the pre-assembled inner box 10.

[0093] Therefore, the assembly process from steps S1 to S4 clearly defines the operational specifications for each key step, controlling product quality from the source, facilitating subsequent maintenance and repair, and laying a solid foundation for the realization of an automated production line. In a preferred example, the assembly method further includes step S5, which is used to photoelectrically calibrate the upper dead point of the effective stroke of the sealing boss 32 of the sealing diaphragm 30. Step S5 is specifically implemented after step S4, redefining the upper dead point of the valve's effective stroke in the fully open state after valve assembly.

[0094] The electric regulating valve provided in the embodiments and variations of this invention has the following working principle: When the circuit board is powered on, the stepper motor 13 is controlled to reverse at its rated power. The motor shaft block of the stepper motor 13 drives the adjusting screw 14 to rotate. Following the direction of the screw threads, the screw assembly moves upward, which in turn moves the diaphragm connecting shaft 15 upward. The sealing boss 32 of the sealing diaphragm 30 then moves upward and separates from the valve seat 40. After opening to the upper dead point of the effective stroke of the sealing diaphragm 30, the photoelectric indicator rod 18 transmits an electrical signal to the terminal through the photoelectric sensor door 21 to cut off the power, achieving a fully open valve and eliminating assembly errors. Conversely, when the stepper motor 13 rotates forward at its rated power, the motor shaft block of the stepper motor 13 drives the adjusting screw 14 to rotate. Following the direction of the screw threads, the screw assembly moves downward, which in turn moves the diaphragm connecting shaft 15 downward. The sealing boss 32 of the sealing diaphragm 30 then presses downward against the valve seat 40. The photoelectric indicator rod 18 transmits an electrical signal to the terminal through the photoelectric sensor door 21 to cut off the power, achieving a fully closed and sealed valve.

[0095] The specific embodiments and variations provided by the present invention have the following corresponding technical effects to achieve a significant improvement over the prior art:

[0096] 1. Meets the sealing and cleanliness requirements of electric regulating valves for semiconductor coating equipment: A short cylindrical annular strip contact seal design is formed between the inclined sidewall of the inverted conical sealing boss 32 and the inner sidewall of the longitudinal valve port 41. Combined with the constant pre-tightening force of the elastic pre-tightening module 12, zero-leakage sealing is achieved, solving the problem of easy failure of traditional planar seals; the inner arc spherical surface 42A of the valve seat 40 and the dead zone-free flow channel design avoid fluid residue contamination, meeting the ISO Class 1 cleanroom standard and 10 -6 Torr-level vacuum adaptability;

[0097] 2. Corrosion resistance and long service life of electric regulating valves for semiconductor coating equipment: The corrosion-resistant PTFE material of the sealing diaphragm 30 and the surface smoothness of the valve seat flow channel (Ra≤0.1 μm) significantly improve the chemical corrosion resistance and control ion contamination to the ppb level; the arc-shaped thin film part 31 with a semi-circular cross-section provides a deformation stroke design of 1.2 to 1.5 times the effective stroke, with excellent fatigue resistance and a mechanical service life of ≥1 million cycles;

[0098] 3. Meets the high precision and stability requirements of electric regulating valves in semiconductor coating equipment: The precise drive of stepper motor 13 and regulating screw 14, combined with the limiting of diaphragm connecting shaft 15 by guide groove wall 10C, achieves flow control accuracy of ±0.5% FS, response time ≤50 ms, and repeatability accuracy ≤0.05% FS;

[0099] 4. The cooling space 17 inside the dustproof housing 20 is designed with a closed airflow heat dissipation system with vents to ensure the long-term stable operation of the stepper motor 13 and prevent dust from being released from the valve due to overheating.

[0100] 5. Features intelligent and maintainable characteristics: It can also provide real-time feedback on sealing pressure through an integrated monitoring module, automatically compensate for sealing force and remotely alarm, improving active safety; quick-release clamps and modular pre-assembled inner casing 10 design simplify the assembly process, reduce maintenance costs, and adapt to the needs of automated production.

[0101] In summary, this invention, through innovative structural optimization, solves the shortcomings of traditional valves in terms of sealing leakage, flow channel contamination, diaphragm damage, and environmental adaptability, providing a high-precision, long-life, and zero-pollution flow control solution for semiconductor coating equipment.

[0102] The embodiments described herein are preferred embodiments for facilitating understanding or implementation of the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection claimed by the present invention.

Claims

1. An electrically adjustable valve for semiconductor coating equipment, characterized in that, include: A pre-assembled inner casing (10) is housed within a dustproof outer casing (20). The pre-assembled inner casing (10) is pre-assembled with a drive assembly (11) and a spring pre-tensioning module (12). The drive assembly (11) includes a stepper motor (13) mounted on the pre-assembled inner casing (10), an adjusting screw (14) mounted inside the pre-assembled inner casing (10), and a diaphragm connecting shaft (15). The stepper motor (13) drives the adjusting screw (14) to rotate within the pre-assembled inner casing (10). The diaphragm connecting shaft... The first part (15A) of (15) slides and moves up and down in the hollow movable space of the pre-assembled inner box (10); the two ends of the elastic pre-tightening module (12) respectively elastically contact the first part (15A) of the diaphragm connecting shaft (15) and the inner limiting part (10A) of the pre-assembled inner box (10) in the hollow movable space, for applying a vertically downward pre-tightening force to the diaphragm connecting shaft (15); a cooling space (17) is formed between the pre-assembled inner box (10) and the dustproof outer shell (20). The sealing diaphragm (30) has an arc-shaped thin film portion (31) and an inverted conical sealing boss (32) integrally provided at the center and protruding downwards. The arc-shaped thin film portion (31) is a semi-circular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke. The center of the sealing boss (32) is connected to the second part (15B) of the diaphragm connecting shaft (15) protruding from the pre-assembled inner box (10). The valve seat (40) has a longitudinal valve port (41), an inlet channel (42) and an outlet channel (43) inside. The valve seat (40) has a mounting hole (44) aligned with the longitudinal valve port (41). The dustproof shell (20) is installed on the mounting hole (44). The lower end of the longitudinal valve port (41) is connected to the inner end of the inlet channel (42). The inner end of the inlet channel (42) is formed as a continuous and smooth inner arc spherical surface (42A) to form a dead zone-free channel. The inclined sidewall of the sealing boss (32) is used to seal the inner wall of the longitudinal valve port (41). The arc-shaped film part (31) is aligned with the annular groove (45) connected to the inner end of the outlet channel (43). The sealing boss (32) can extend into or detach from the longitudinal valve port (41). The outer surface of the dustproof housing (20) is provided with ventilation holes that connect to the cooling space (17) for circulating cooling of the stepper motor (13). The ventilation holes include an air inlet (22) and an exhaust hole (23). The outer surface of the dustproof housing (20) is also provided with a wiring hole (24) for power supply connection to the stepper motor (13). The wiring hole (24) and the air inlet (22) are located in the housing sub-cavity (25) of the dustproof housing (20). The exhaust hole (23) is located in the part of the main body of the dustproof housing (20) above the housing sub-cavity (25). The housing sub-cavity (25) blocks the airflow entering through the air inlet (22) from blowing directly onto the pre-assembled inner casing (10), forming a tortuous cooling air passage. The electric regulating valve also includes an anti-corrosion base plate (50) disposed at the bottom of the valve seat (40); the anti-corrosion base plate (50), the valve seat (40) and the dustproof shell (20) are connected by multiple connecting rods (51); multiple anti-corrosion plugs (52) are disposed on the anti-corrosion base plate (50) and seal the exposed ends of the connecting rods (51); multiple corrosion-resistant rubber rings (53) are respectively disposed at the bottom of the anti-corrosion base plate (50) and the housing gap between the bottom of the valve seat (40) and the top of the anti-corrosion base plate (50); multiple layers of corrosion-resistant rubber rings (53) are installed between the valve seat (40) and the dustproof shell (20) and locked by quick-release clamps; The pre-assembled inner box (10) contains a slot for the adjusting screw (14) and also accommodates a spacer ring (16). The spacer ring (16) is spaced between the adjusting screw (14) and the diaphragm connecting shaft (15). The connecting part of the adjusting screw (14) can pass through the through hole of the adjusting screw (14) and connect to the first part (15A) of the diaphragm connecting shaft (15). The spacer ring (16) is specifically a metal bearing. The electric regulating valve further includes: a plurality of internal connecting rods (26), which are positioning rods used to position the pre-assembled inner casing (10) inside the dustproof housing (20); the pre-assembled inner casing (10) and the dustproof housing (20) are connected by a connecting rod (51) passing through the anti-corrosion base plate (50) and the valve seat (40); the second part (15B) of the diaphragm connecting shaft (15) protrudes from the bottom of the pre-assembled inner casing (10) to connect the sealing diaphragm (30). The peripheral clamping portion of the sealing diaphragm (30) is clamped between the groove in the mounting hole (44) of the valve seat (40) and the bottom protruding ring of the dustproof housing (20); a venting groove is provided on the bottom protruding ring of the dustproof housing (20) to provide a venting space above the arc-shaped thin film portion (31) of the sealing diaphragm (30).

2. The electric regulating valve according to claim 1, characterized in that, The diameter of the first part (15A) of the diaphragm connecting shaft (15) is larger than that of the second part (15B). A photoelectric sensor door (21) is provided inside the dustproof housing (20). The first part (15A) of the diaphragm connecting shaft (15) is connected to a photoelectric indicator rod (18) that protrudes laterally from the hollow movable space. As the diaphragm connecting shaft (15) rises until the photoelectric sensor door (21) senses the arrival of the photoelectric indicator rod (18), the upper dead point of the effective stroke of the sealing boss (32) is determined. The photoelectric sensor door (21) is located on the groove surface of the dustproof housing (20) for installing the housing sub-cavity (25).

3. The electric regulating valve according to claim 1, characterized in that, The sealing diaphragm (30) is made of PTFE; the surface roughness Ra of the inner arc spherical surface (42A) of the inlet channel (42) is ≤0.1μm.

4. The electric regulating valve according to claim 1, characterized in that, The hollow movable space of the pre-assembled inner box (10) is provided with a guide groove wall (10C), and the first part (15A) of the diaphragm connecting shaft (15) is provided with a guide side (15C) that cooperates with the guide groove wall (10C) to limit the rotational freedom of the diaphragm connecting shaft (15) and ensure that the diaphragm connecting shaft (15) can only move up and down in the vertical direction.

5. A method for assembling an electrically controlled regulating valve for a semiconductor coating equipment as described in claim 1, characterized in that, Including the following steps: S1. A pre-assembled inner box (10) is provided, wherein an adjusting screw (14), a diaphragm connecting shaft (15), and an elastic pre-tightening module (12) are provided inside the pre-assembled inner box (10). A stepper motor (13) is provided on the pre-assembled inner box (10). The stepper motor (13) is used to drive the adjusting screw (14) to rotate inside the pre-assembled inner box (10), so that the first part (15A) of the diaphragm connecting shaft (15) slides and moves up and down in the hollow movable space of the pre-assembled inner box (10). The two ends of the elastic pre-tightening module (12) respectively elastically contact the first part (15A) of the diaphragm connecting shaft (15) and the inner limiting part (10A) of the pre-assembled inner box (10) in the hollow movable space, and are used to apply a vertically downward pre-tightening force to the diaphragm connecting shaft (15). S2. The pre-assembled inner box (10) is housed in the dustproof outer shell (20), forming a cooling space (17) between the pre-assembled inner box (10) and the dustproof outer shell (20). S3. Install a sealing diaphragm (30) at the bottom of the dustproof housing (20); wherein the sealing diaphragm (30) has an arc-shaped film portion (31) and an inverted conical sealing boss (32) integrally provided at the center and protruding downwards, the arc-shaped film portion (31) is a semi-circular ring shape with a concave bottom to provide a deformation stroke greater than 1.2 to 1.5 times the effective stroke; the center of the sealing boss (32) is connected to the second part (15B) of the diaphragm connecting shaft (15) protruding from the pre-assembled inner casing (10). S4. The valve seat (40) and the dustproof housing (20) are combined. The valve seat (40) has a longitudinal valve port (41), an inlet channel (42) and an outlet channel (43) inside. The valve seat (40) has a mounting hole (44) aligned with the longitudinal valve port (41). The dustproof housing (20) is mounted on the mounting hole (44). The lower end of the longitudinal valve port (41) is connected to the inner end of the inlet channel (42). The inner end of the inlet channel (42) is formed as a continuous and smooth inner arc spherical surface (42A) to form a dead zone-free channel. The inclined sidewall of the sealing boss (32) is used to close the inner wall of the longitudinal valve port (41). The arc-shaped film part (31) is aligned with the annular groove (45) connected to the inner end of the outlet channel (43). The sealing boss (32) can extend into or detach from the longitudinal valve port (41). Step S4 includes: A multi-layer corrosion-resistant rubber ring (53) is installed between the valve seat (40) and the dustproof housing (20) and locked by a quick-release clamp; An anti-corrosion base plate (50) is installed at the bottom of the valve seat (40), and the anti-corrosion base plate (50), the valve seat (40) and the dustproof shell (20) are fixedly connected by multiple connecting rods (51); A base plate anti-corrosion plug (52) is installed at the exposed end of the connecting rod (51) to ensure the sealing and corrosion resistance of the connection.

6. The assembly method according to claim 5, characterized in that, Also includes: S5. Photoelectric calibration of the upper dead point of the effective stroke of the sealing boss (32) of the sealing diaphragm (30).

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