Negative pressure circulation temperature control system

Abstract

The invention discloses a negative pressure circulation temperature control system, and relates to the technical field of thermal management. The negative pressure circulation temperature control system comprises a liquid storage tank which is connected with a load end and used for providing a liquid supply medium with a target temperature for the load end; the first vacuum tank is connected with the load end and the liquid storage tank and used for receiving the liquid supply medium of the load end and supplying the liquid supply medium to the liquid storage tank; the second vacuum tank is connected with the load end and the liquid storage tank and is used for receiving the liquid supply medium of the load end and supplying the liquid supply medium to the liquid storage tank; the vacuum pump is connected with the first vacuum tank and the second vacuum tank and is used for alternately constructing a negative pressure environment in the first vacuum tank and the second vacuum tank, so that the first vacuum tank and the second vacuum tank alternately provide a liquid supply medium for the liquid storage tank by utilizing the negative pressure environment; and the temperature control module is connected with the liquid storage tank and used for adjusting the temperature of the liquid supply medium in the liquid storage tank to the target temperature. According to the negative pressure circulation temperature control system, continuous liquid supply to the load end is achieved, it is ensured that the liquid level of the liquid storage tank is stable, and the temperature control efficiency of the negative pressure circulation temperature control system is improved.

Description

Technical Field

[0001] The present invention relates to the field of thermal management technology, and in particular to a negative pressure circulation temperature control system. Background Art

[0002] With the continuous improvement of industrial automation and energy-saving and environmental protection requirements, temperature control circulation systems are widely used in chemical, electronic and construction fields. Traditional temperature control circulation systems generally adopt positive pressure circulation, that is, through gravity or driving circulation pumps to generate positive pressure higher than atmospheric pressure in the pipeline, so that the liquid supply medium circulates in the client equipment and the circulation temperature control system to achieve temperature control. However, there are great safety hazards in the operation of positive pressure circulation temperature control systems. If the pipeline connection becomes loose or falls off, the liquid supply medium is very likely to leak to the outside, causing safety hazards and environmental pollution.

[0003] In contrast, the negative pressure circulation temperature control system uses a vacuum pump to draw gas to form a negative pressure environment inside the system, so that the pressure in the pipeline is always lower than the external atmospheric pressure. Even if the system leaks, the medium will only flow into the system liquid storage chamber and will not flow out, which significantly improves safety and fundamentally avoids the risk of leakage of the liquid supply medium. Therefore, it is gradually favored in industrial applications.

[0004] The existing negative pressure circulation temperature control system mainly relies on vacuum pump suction to generate negative pressure to drive the flow of liquid supply medium. However, the negative pressure that the vacuum pump can provide is limited, and when the liquid supply medium flows through heat exchangers, valves and other components, it will cause a large negative pressure loss, which can easily lead to a small negative pressure difference in the system, resulting in problems such as low liquid supply pressure, slow liquid supply flow rate, and insufficient liquid supply head, affecting the stable operation of the system. In addition, when the liquid level of the liquid supply medium inside the negative pressure circulation temperature control system fluctuates greatly, the temperature of the liquid supply medium is prone to change, thereby affecting the temperature control stability of the client equipment and reducing the temperature control efficiency. Summary of the invention

[0005] The present invention provides a negative pressure circulation temperature control system to realize continuous liquid supply to a load end, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0006] A first aspect of the present invention provides a negative pressure circulation temperature control system, the negative pressure circulation temperature control system comprising: A liquid storage tank connected to the load end and used to provide a liquid supply medium of a target temperature to the load end; A first vacuum tank, connected to the load end and the liquid storage tank, for receiving the liquid supply medium at the load end and providing the liquid supply medium to the liquid storage tank; A second vacuum tank, connected to the load end and the liquid storage tank, for receiving the liquid supply medium at the load end and providing the liquid supply medium to the liquid storage tank; a vacuum pump connected to the first vacuum tank and the second vacuum tank, and used to alternately construct a negative pressure environment in the first vacuum tank and the second vacuum tank, so as to utilize the negative pressure environment to enable the first vacuum tank and the second vacuum tank to alternately provide the liquid supply medium to the liquid storage tank; A temperature control module is connected to the liquid storage tank and is used to adjust the temperature of the liquid supply medium in the liquid storage tank to the target temperature.

[0007] Optionally, the vacuum pump is connected to the gas outlet of the second vacuum tank through a first control valve; The vacuum pump is connected to the gas outlet of the first vacuum tank through a second control valve; The air inlet of the second vacuum tank is connected to the third control valve; The air inlet of the first vacuum tank is connected to the fourth control valve; The liquid inlet of the second vacuum tank is connected to the load end through a fifth control valve; The liquid inlet of the first vacuum tank is connected to the load end through a sixth control valve; The liquid outlet of the second vacuum tank is connected to the liquid inlet of the liquid storage tank through a seventh control valve; The liquid outlet of the first vacuum tank is connected to the liquid inlet of the liquid storage tank through an eighth control valve.

[0008] Optionally, a first liquid level sensor is provided in the first vacuum tank, and the first liquid level sensor is used to detect the liquid level height of the liquid supply medium in the first vacuum tank; A second liquid level sensor is provided in the second vacuum tank, and the second liquid level sensor is used to detect the liquid level height of the liquid supply medium in the second vacuum tank; The negative pressure circulation temperature control system also includes a controller, which is respectively connected to the first liquid level sensor, the second liquid level sensor, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve; The controller is used to control the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve to open or close according to the liquid level height of the liquid supply medium in the first vacuum tank and the liquid level height of the liquid supply medium in the second vacuum tank.

[0009] Optionally, the controller is specifically used for: When the liquid level of the liquid supply medium in the first vacuum tank is greater than a first liquid level lower limit threshold and less than a first liquid level upper limit threshold, the second control valve and the sixth control valve are controlled to be opened, and the first control valve and the fifth control valve are controlled to be closed; When the liquid level of the liquid supply medium in the first vacuum tank is greater than or equal to the first liquid level upper limit threshold, controlling the fourth control valve and the eighth control valve to open; When the liquid level of the liquid supply medium in the first vacuum tank is less than or equal to the first liquid level lower limit threshold, controlling the fourth control valve and the eighth control valve to close; When the liquid level of the liquid supply medium in the second vacuum tank is greater than a second liquid level lower limit threshold and less than a second liquid level upper limit threshold, the first control valve and the fifth control valve are controlled to be opened, and the second control valve and the sixth control valve are controlled to be closed; When the liquid level of the liquid supply medium in the second vacuum tank is greater than or equal to the second liquid level upper limit threshold, controlling the third control valve and the seventh control valve to open; When the liquid level of the liquid supply medium in the second vacuum tank is less than or equal to the second liquid level lower limit threshold, the third control valve and the seventh control valve are controlled to be closed.

[0010] Optionally, the negative pressure circulation temperature control system also includes: Gas filter dryers, steam separators and gas traps; The gas outlet of the gas drying filter is connected to the gas inlet of the first vacuum tank, and is connected to the gas inlet of the second vacuum tank; The air inlet of the steam-water separator is connected to the air outlet of the vacuum pump; the air outlet of the steam-water separator is connected to the air inlet of the gas collector; the liquid outlet of the steam-water separator is connected to the liquid inlet of the liquid storage tank; the steam-water separator is used to separate the water vapor of the liquid supply medium output by the vacuum pump into the liquid supply medium and the liquid supply medium mist, the separated liquid supply medium is recovered into the liquid storage tank through the liquid outlet of the steam-water separator, and the liquid supply medium mist is transmitted to the gas collector through the air outlet of the steam-water separator; The liquid outlet of the gas collector is connected to the liquid inlet of the liquid storage tank; the first air outlet of the gas collector is connected to the air inlet of the gas drying filter; the second air outlet of the gas collector is connected to the external environment; the gas collector is used to cool the liquid supply medium mist, and the liquid supply medium obtained by cooling the liquid supply medium mist is recovered into the liquid storage tank through the liquid outlet of the gas collector.

[0011] Optionally, the temperature control module includes: Heat exchanger, internal circulation pump, cooling water inlet pipeline, cooling water outlet pipeline, heat exchange inlet pipeline, heat exchange outlet pipeline; The heat exchanger comprises a cooling water inlet, a cooling water outlet, a heat exchange inlet and a heat exchange outlet; The internal circulation pump is arranged on the heat exchange liquid inlet pipeline, or the internal circulation pump is arranged in the liquid storage tank; The cooling water inlet pipeline is respectively connected to the cooling water inlet end and the cooling water inlet port; the cooling water outlet pipeline is respectively connected to the cooling water outlet end and the cooling water outlet port; the heat exchange inlet pipeline is respectively connected to the outlet port of the liquid storage tank and the heat exchange inlet port; the heat exchange outlet pipeline is respectively connected to the inlet port of the liquid storage tank and the heat exchange outlet port.

[0012] Optionally, the internal circulation pump is a submersible pump.

[0013] Optionally, a ninth control valve is provided in the cooling water inlet pipeline; The negative pressure circulation temperature control system further comprises a temperature sensing unit; the temperature sensing unit is arranged in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end; the temperature sensing unit is used to detect the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank; The negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the ninth control valve and the temperature sensing unit; the controller is used to control the opening of the ninth control valve according to the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

[0014] Optionally, the controller is specifically used for: When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is greater than the target temperature, increasing the opening of the ninth control valve; When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is less than or equal to the target temperature, the opening degree of the ninth control valve is reduced.

[0015] Optionally, the negative pressure circulation temperature control system also includes: a first pressure sensor and a second pressure sensor; the first pressure sensor is disposed in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end, and is used to detect the pressure of the liquid outlet pipeline of the liquid storage tank; the second pressure sensor is disposed in a vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank, and is used to detect the pressure of the vacuum tank liquid inlet pipeline; The vacuum pump comprises a variable frequency vacuum pump; The negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the first pressure sensor, the second pressure sensor and the variable frequency vacuum pump; the controller is used to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank.

[0016] Optionally, the controller is specifically used for: When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank is greater than a threshold negative pressure, reducing the frequency of the variable frequency vacuum pump; When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank is less than or equal to the threshold negative pressure, the frequency of the variable frequency vacuum pump is increased.

[0017] Optionally, the threshold negative pressure ranges from 35Kpa to 75Kpa.

[0018] Optionally, the negative pressure circulation temperature control system also includes: A bubble detection unit; the bubble detection unit is disposed in the vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank, and is used to detect the number of bubbles in the vacuum tank liquid inlet pipeline; The negative pressure circulation temperature control system further includes a controller, which is in communication with the bubble detection unit and is configured to output warning information when the absolute value of the pressure difference between the pressure measured by the first pressure sensor and the pressure measured by the second pressure sensor is less than a normal negative pressure threshold and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than a preset bubble threshold; Alternatively, when the liquid level height of the liquid supply medium in the first vacuum tank detected by the first liquid level sensor is less than the normal liquid level threshold, and / or the liquid level height of the liquid supply medium in the second vacuum tank detected by the second liquid level sensor is less than the normal liquid level threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than the preset bubble threshold, the warning information is output; The warning information is used to indicate that the system negative pressure is abnormal.

[0019] Optionally, the negative pressure circulation temperature control system also includes: A flow detection unit; the flow detection unit is disposed in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end, and is used to detect the flow of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank; The negative pressure circulation temperature control system also includes a controller, which is communicatively connected to the flow detection unit and is used to control the suction volume of the vacuum pump according to the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

[0020] Optionally, the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is in a range of 3:1 to 5:1.

[0021] The technical solution of the present invention is to set a liquid storage tank connected to the load end in the negative pressure circulation temperature control system so that the liquid supply medium stored in the liquid storage tank can be output to the load end. And by setting a first vacuum tank connected to the load end and the liquid storage tank, and setting a vacuum pump connected to the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank, so that the liquid supply medium in the liquid storage tank can be output to the load end and the first vacuum tank in sequence. In addition, by setting a second vacuum tank connected to the load end and the liquid storage tank, and setting a vacuum pump connected to the second vacuum tank, after a certain amount of liquid supply medium is stored in the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the second vacuum tank, and the liquid supply medium in the liquid storage tank can be output to the load end and the second vacuum tank in sequence. While the second vacuum tank forms a high negative pressure environment, the liquid supply medium in the first vacuum tank can be recovered to the liquid storage tank. After a certain amount of liquid supply medium is stored in the second vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank again, so that the liquid supply medium in the liquid storage tank can be output to the load end and the first vacuum tank in turn, and at the same time, the liquid supply medium in the second vacuum tank can be recovered to the liquid storage tank. The vacuum pump alternately constructs a negative pressure environment in the first vacuum tank and the second vacuum tank, so that the first vacuum tank and the second vacuum tank can alternately provide the liquid supply medium to the liquid storage tank, thereby ensuring the stability of the liquid level of the liquid storage tank and realizing the continuous supply of liquid from the liquid storage tank to the load end. In addition, by providing a temperature control module connected to the liquid storage tank in the negative pressure circulation temperature control system, the temperature of the liquid supply medium in the liquid storage tank is always maintained at the target temperature required by the load end, thereby ensuring the stable operation of the negative pressure circulation temperature control system. At the same time, the liquid supply medium in the liquid storage tank is maintained at a relatively constant liquid level, so that the temperature control module can evenly adjust the temperature of the liquid supply medium, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. The temperature of the liquid supply medium is adjusted by the temperature control module, so that the liquid supply medium does not need to pass through the heat exchanger during the process of being transported to the load end, thereby avoiding pressure loss and improving the operating efficiency of the negative pressure circulation temperature control system.

[0022] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 It is a structural schematic diagram of a negative pressure circulation temperature control system provided in an embodiment of the present invention.

[0025] Figure 2 It is a structural schematic diagram of another negative pressure circulation temperature control system provided in an embodiment of the present invention.

[0026] Figure 3 It is a flow chart of the control logic of a negative pressure circulation temperature control system provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0028] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0029] Figure 1 is a schematic diagram of the structure of a negative pressure circulation temperature control system provided by an embodiment of the present invention, such as Figure 1As shown, the negative pressure circulation temperature control system includes a liquid storage tank 1, which is connected to the load end 00 and is used to provide a liquid supply medium of a target temperature for the load end 00; a first vacuum tank 21, which is connected to the load end 00 and is connected to the liquid storage tank 1, and is used to receive the liquid supply medium of the load end 00 and provide the liquid supply medium for the liquid storage tank 1; a second vacuum tank 22, which is connected to the load end 00 and is connected to the liquid storage tank 1, and is used to receive the liquid supply medium of the load end 00 and provide the liquid supply medium for the liquid storage tank 1; a vacuum pump 3, which is connected to the first vacuum tank 21 and is connected to the second vacuum tank 22, and is used to alternately construct a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so as to utilize the negative pressure environment to make the first vacuum tank 21 and the second vacuum tank 22 alternately provide the liquid supply medium for the liquid storage tank 1; a temperature control module 01, which is connected to the liquid storage tank 1, and is used to adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature.

[0030] The liquid storage tank 1 can be specifically understood as a device for storing a liquid supply medium. At the same time, the liquid supply medium stored in the liquid storage tank 1 can be output to the liquid inlet 001 of the load end 00 through the first liquid outlet 101 of the liquid storage tank 1 through the liquid storage tank outlet pipeline 12, thereby meeting the demand for the liquid supply medium during the operation of the load end equipment. The liquid supply medium can be specifically understood as coolant, transformer oil or deionized water, etc.

[0031] Continue to refer Figure 1 The liquid inlet 2101 of the first vacuum tank 21 is connected to the liquid outlet 002 of the load end 00 through the first vacuum tank liquid inlet pipeline 211, and the liquid outlet 2102 of the first vacuum tank 21 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212. At the same time, the gas outlet 2103 of the first vacuum tank 21 is connected to the gas inlet 301 of the vacuum pump 3 through the first vacuum tank gas outlet pipeline 213. Therefore, the vacuum pump 3 can evacuate the first vacuum tank 21 through the first vacuum tank gas outlet pipeline 213, so that the gas pressure inside the first vacuum tank 21 is reduced, forming a high Negative pressure environment, while the liquid storage tank 1 is at a relatively high pressure, thereby forming a pressure difference driving force, so that the liquid supply medium in the liquid storage tank 1 can be output to the liquid inlet 001 of the load end 00 through the first liquid outlet 101 of the liquid storage tank 1 through the liquid storage tank outlet pipeline 12. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, the temperature rises and can be output to the liquid inlet 2101 of the first vacuum tank 21 through the first vacuum tank inlet pipeline 211 through the liquid outlet 002 of the load end 00, so that the used liquid supply medium can be stored in the first vacuum tank 21.

[0032] In addition, the liquid inlet 2201 of the second vacuum tank 22 is connected to the liquid outlet 002 of the load end 00 through the second vacuum tank liquid inlet pipeline 221, and the liquid outlet 2202 of the second vacuum tank 22 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the second vacuum tank liquid outlet pipeline 222. At the same time, the air outlet 2203 of the second vacuum tank 22 is connected to the air inlet 301 of the vacuum pump 3 through the second vacuum tank air outlet pipeline 223. When a certain amount of liquid supply medium is stored in the first vacuum tank 21, the vacuum pump 3 can switch from evacuating the first vacuum tank 21 to evacuating the second vacuum tank 22 through the second vacuum tank outlet pipe 223, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank outlet pipe 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2201 of the second vacuum tank 22 through the second vacuum tank inlet pipe 221, so that the used liquid supply medium can be stored in the second vacuum tank 22, thereby realizing that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, ensuring the continuous supply of liquid from the liquid storage tank 1 to the load end 00.

[0033] While the vacuum pump 3 is evacuating the second vacuum tank 22, the pressure in the first vacuum tank 21 will be higher than the pressure in the liquid storage tank 1, so that the liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212 via the liquid inlet 2101 of the first vacuum tank 21, thereby realizing the recovery of the used liquid supply medium to the liquid storage tank 1. It can be understood that even if the liquid supply medium in the first vacuum tank 21 enters the liquid storage tank 1, which will cause the air pressure in the liquid storage tank 1 to be balanced to a slight negative pressure, under the vacuum pump 3's evacuation action on the second vacuum tank 22, the air pressure in the liquid storage tank 1 will quickly return to a high negative pressure, so that the liquid supply medium in the first vacuum tank 21 can be continuously input into the liquid storage tank 1.

[0034] After a certain amount of liquid supply medium is stored in the second vacuum tank 22, the vacuum pump 3 can switch from vacuuming the second vacuum tank 22 to vacuuming the first vacuum tank 21 again, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 and the first vacuum tank 21 in sequence under the action of the negative pressure driving force. At the same time, the liquid supply medium in the second vacuum tank 22 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the second vacuum tank liquid outlet pipeline 222 via the liquid outlet 2202 of the second vacuum tank 22. The vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so that the first vacuum tank 21 and the second vacuum tank 22 alternately provide the liquid supply medium to the liquid storage tank 1 by utilizing the negative pressure environment, thereby realizing the circulation of the liquid supply medium, so as to maintain the liquid level of the liquid storage tank 1 stable, ensure the continuous liquid supply from the liquid storage tank 1 to the load end 00, and improve the operating efficiency and stability of the negative pressure circulation temperature control system.

[0035] Continue to refer Figure 1 The temperature control module 01 is connected to the liquid storage tank 1, and can adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature of the liquid supply medium required by the load end 00. Exemplarily, the temperature control module 01 can be a chiller, a temperature control circulator or a plate heat exchanger. The temperature control module 01 can accurately adjust the temperature of the liquid supply medium in the liquid storage tank 1 so that it always remains at the target temperature required by the load end 00, thereby ensuring the stable operation of the negative pressure circulation temperature control system. In addition, the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so that the liquid supply medium in the liquid storage tank 1 can be continuously maintained at a relatively constant liquid level. The temperature control module 01 can evenly adjust the temperature of the liquid supply medium, avoiding the situation where the temperature control efficiency decreases or the temperature is uneven due to the large fluctuation of the liquid level in the liquid storage tank 1, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, the temperature of the liquid supply medium is adjusted by the temperature control module 01, so that the liquid supply medium does not need to pass through the heat exchanger during the process of being transported to the load end 00, avoiding the pressure loss during the liquid supply process to the load end 00, thereby improving the operating efficiency of the negative pressure circulation temperature control system.

[0036] It is also understandable that the negative pressure circulation temperature control system maintains a negative pressure environment. When a pipeline leaks, the external atmospheric pressure is higher than the negative pressure caused by the leak. Under the action of the negative pressure difference, the liquid in the pipeline will not flow out to the external environment, thus avoiding leakage from the source. At the same time, since the negative pressure circulation temperature control system is a negative pressure environment, when the load end needs to replace the connecting pipeline, there is no need to stop the machine to drain the liquid. The connecting pipeline can be disassembled and replaced while the negative pressure circulation temperature control system is running, which improves the convenience of pipeline replacement and saves operation time.

[0037] In this embodiment, a liquid storage tank connected to the load end is provided in the negative pressure circulation temperature control system, so that the liquid supply medium stored in the liquid storage tank can be output to the load end. And by providing a first vacuum tank connected to the load end and the liquid storage tank, and providing a vacuum pump connected to the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank, so that the liquid supply medium in the liquid storage tank can be output to the load end and the first vacuum tank in sequence. In addition, by providing a second vacuum tank connected to the load end and the liquid storage tank, and providing a vacuum pump connected to the second vacuum tank, after a certain amount of liquid supply medium is stored in the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the second vacuum tank, and the liquid supply medium in the liquid storage tank can be output to the load end and the second vacuum tank in sequence. While the second vacuum tank forms a high negative pressure environment, the liquid supply medium in the first vacuum tank can be recovered to the liquid storage tank. After a certain amount of liquid supply medium is stored in the second vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank again, so that the liquid supply medium in the liquid storage tank can be output to the load end and the first vacuum tank in turn, and at the same time, the liquid supply medium in the second vacuum tank can be recovered to the liquid storage tank. The vacuum pump alternately constructs a negative pressure environment in the first vacuum tank and the second vacuum tank, so that the first vacuum tank and the second vacuum tank can alternately provide the liquid supply medium to the liquid storage tank, thereby ensuring the stability of the liquid level of the liquid storage tank and realizing the continuous supply of liquid from the liquid storage tank to the load end. In addition, by providing a temperature control module connected to the liquid storage tank in the negative pressure circulation temperature control system, the temperature of the liquid supply medium in the liquid storage tank is always maintained at the target temperature required by the load end, thereby ensuring the stable operation of the negative pressure circulation temperature control system. At the same time, the liquid supply medium in the liquid storage tank is maintained at a relatively constant liquid level, so that the temperature control module can evenly adjust the temperature of the liquid supply medium, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. The temperature of the liquid supply medium is adjusted by the temperature control module, so that the liquid supply medium does not need to pass through the heat exchanger during the process of being transported to the load end, thereby avoiding pressure loss and improving the operating efficiency of the negative pressure circulation temperature control system.

[0038] Optional, Figure 2 FIG. 1 is a schematic diagram of another negative pressure circulation temperature control system provided by an embodiment of the present invention. Figure 2As shown, the vacuum pump 3 is connected to the air outlet 2203 of the second vacuum tank 22 through the first control valve 51; the vacuum pump 3 is connected to the air outlet 2103 of the first vacuum tank 21 through the second control valve 52; the air inlet 2204 of the second vacuum tank 22 is connected to the third control valve 53; the air inlet 2104 of the first vacuum tank 21 is connected to the fourth control valve 54; the liquid inlet 2201 of the second vacuum tank 22 is connected to the load end 00 through the fifth control valve 55; the liquid inlet 2101 of the first vacuum tank 21 is connected to the load end 00 through the sixth control valve 56; the liquid outlet 2202 of the second vacuum tank 22 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the seventh control valve 57; the liquid outlet 2102 of the first vacuum tank 21 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the eighth control valve 58.

[0039] For details, please refer to Figure 2 A sixth control valve 56 is provided in the first vacuum tank liquid inlet pipeline 211, and a second control valve 52 is provided in the first vacuum tank air outlet pipeline 213. When it is necessary to evacuate the first vacuum tank 21, the sixth control valve 56 and the second control valve 52 are opened, so that the vacuum pump 3 can evacuate the first vacuum tank 21 through the first vacuum tank air outlet pipeline 213, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank liquid outlet pipeline 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2101 of the first vacuum tank 21 through the first vacuum tank liquid inlet pipeline 211, so that the used liquid supply medium can be stored in the first vacuum tank 21.

[0040] A fifth control valve 55 is provided in the second vacuum tank liquid inlet pipeline 221 , and a first control valve 51 is provided in the second vacuum tank gas outlet pipeline 223 . When a certain amount of liquid supply medium is stored in the first vacuum tank 21, the second control valve 52 and the sixth control valve 56 are closed, and the fifth control valve 55 and the first control valve 51 are opened, so that the vacuum pump 3 switches from evacuating the first vacuum tank 21 to evacuating the second vacuum tank 22 through the second vacuum tank outlet pipeline 223, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank outlet pipeline 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2201 of the second vacuum tank 22 through the second vacuum tank inlet pipeline 221, so that the used liquid supply medium can be stored in the second vacuum tank 22, thereby realizing that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, ensuring the continuous supply of liquid from the liquid storage tank 1 to the load end 00.

[0041] The fourth control valve 54 is provided in the first vacuum tank air inlet pipeline 214, and the eighth control valve 58 is provided in the first vacuum tank liquid outlet pipeline 212. When the second control valve 52 and the sixth control valve 56 are closed and the fifth control valve 55 and the first control valve 51 are opened, the fourth control valve 54 and the eighth control valve 58 are opened, and at this time, gas enters the first vacuum tank 21, so that the pressure in the first vacuum tank 21 is higher than the pressure in the liquid storage tank 1, and the liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212 via the liquid inlet 2101 of the first vacuum tank 21, thereby realizing the recovery of the used liquid supply medium to the liquid storage tank 1.

[0042] A third control valve 53 is provided in the second vacuum tank air inlet pipeline 224, and a seventh control valve 57 is provided in the second vacuum tank liquid outlet pipeline 222. When a certain amount of liquid supply medium is stored in the second vacuum tank 22, the first control valve 51, the fourth control valve 54, the fifth control valve 55 and the eighth control valve 58 are closed, and the second control valve 52, the third control valve 53, the sixth control valve 56 and the seventh control valve 57 are opened, so that the vacuum pump 3 can switch from evacuating the second vacuum tank 22 to evacuating the first vacuum tank 21 again, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 and the first vacuum tank 21 in sequence under the action of the negative pressure driving force. At the same time, gas enters the second vacuum tank 22, so that the liquid supply medium in the second vacuum tank 22 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the second vacuum tank liquid outlet pipeline 222 via the liquid outlet 2202 of the second vacuum tank 22.

[0043] By arranging the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 in the negative pressure circulation temperature control system, the vacuum pump 3 can alternately construct a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so that the liquid supply medium in the liquid storage tank 1 can be continuously maintained at a relatively constant liquid level, and the temperature control module 01 can uniformly adjust the temperature of the liquid supply medium, avoiding the situation where the temperature control efficiency is reduced or the temperature is uneven due to the large fluctuation of the liquid level in the liquid storage tank 1, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0044] Optional, continue to refer to Figure 2A first liquid level sensor 61 is provided in the first vacuum tank 21, and the first liquid level sensor 61 is used to detect the liquid level height of the liquid supply medium in the first vacuum tank 21; a second liquid level sensor 62 is provided in the second vacuum tank 22, and the second liquid level sensor 62 is used to detect the liquid level height of the liquid supply medium in the second vacuum tank 22; the negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the first liquid level sensor 61, the second liquid level sensor 62, the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58; the controller is used to control the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 to open or close according to the liquid level height of the liquid supply medium in the first vacuum tank 21 and the liquid level height of the liquid supply medium in the second vacuum tank 22.

[0045] The first liquid level sensor 61 is used to detect the liquid level height of the liquid supply medium in the first vacuum tank 21, and the second liquid level sensor 62 is used to detect the liquid level height of the liquid supply medium in the second vacuum tank 22. The controller can be a programmable logic controller (PLC), an STM32 control chip, an ESP32 control chip, etc. The controller is communicatively connected with the first liquid level sensor 61, the second liquid level sensor 62, the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 respectively, so that the controller can control the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 to open or close according to the liquid level height of the liquid supply medium in the first vacuum tank 21 and the liquid level height of the liquid supply medium in the second vacuum tank 22, so as to realize that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, and can use the negative pressure environment to enable the first vacuum tank 21 and the second vacuum tank 22 to alternately provide liquid supply medium for the liquid storage tank 1.

[0046] Optional, such as Figure 3As shown, the controller is specifically used to: when the liquid level height of the liquid supply medium in the first vacuum tank 21 is greater than the first liquid level lower limit threshold HL1 and less than the first liquid level upper limit threshold HP1, control the second control valve 52 and the sixth control valve 56 to open, and the first control valve 51 and the fifth control valve 55 to close; when the liquid level height of the liquid supply medium in the first vacuum tank 21 is greater than or equal to the first liquid level upper limit threshold HP1, control the fourth control valve 54 and the eighth control valve 58 to open; when the liquid level height of the liquid supply medium in the first vacuum tank 21 is less than or equal to the first liquid level lower limit threshold HL1, control the fourth control valve 54 and the eighth control valve 58 to close. Valve 58 is closed; when the liquid level of the liquid supply medium in the second vacuum tank 22 is greater than the second liquid level lower limit threshold HL2 and less than the second liquid level upper limit threshold HP2, the first control valve 51 and the fifth control valve 55 are controlled to be opened, and the second control valve 52 and the sixth control valve 56 are closed; when the liquid level of the liquid supply medium in the second vacuum tank 22 is greater than or equal to the second liquid level upper limit threshold HP2, the third control valve 53 and the seventh control valve 57 are controlled to be opened; when the liquid level of the liquid supply medium in the second vacuum tank 22 is less than or equal to the second liquid level lower limit threshold HL2, the third control valve 53 and the seventh control valve 57 are controlled to be closed.

[0047] Specifically, when the liquid level of the liquid supply medium in the first vacuum tank 21 is greater than HL1 and less than HP1, the controller can control the second control valve 52 and the sixth control valve 56 to open, and the first control valve 51, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the seventh control valve 57 and the eighth control valve 58 to close, so that the vacuum pump 3 can evacuate the first vacuum tank 21, the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, and the first liquid level sensor 61 can detect the liquid level in the first vacuum tank 21 in real time. When the first liquid level sensor 61 detects that the liquid level height in the first vacuum tank 21 is greater than or equal to HP1, the controller can control the second control valve 52 and the sixth control valve 56 to close, and control the first control valve 51, the fourth control valve 54, the fifth control valve 55 and the eighth control valve 58 to open, so that the liquid supply medium in the first vacuum tank 21 can be output to the liquid storage tank 1. At the same time, the vacuum pump 3 evacuates the second vacuum tank 22, so that the liquid supply medium in the liquid storage tank 1 can be output to the second vacuum tank 22, ensuring the continuous supply of liquid from the liquid storage tank 1 to the load end 00. When the first liquid level sensor 61 detects that the liquid level height in the first vacuum tank 21 is less than or equal to HL1, the controller can control the first control valve 51, the fourth control valve 54, the fifth control valve 55 and the eighth control valve 58 to close, and the second control valve 52 and the sixth control valve 56 to open, so that the liquid supply medium in the first vacuum tank 21 stops being output to the liquid storage tank 1, and the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, so that the liquid level height of the liquid supply medium in the first vacuum tank 21 can be maintained between HL1 and HP1.

[0048] When the liquid level of the liquid supply medium in the second vacuum tank 22 is greater than HL2 and less than HP2, the controller can control the first control valve 51 and the fifth control valve 55 to open, and the second control valve 52 and the sixth control valve 56 to close, so that the vacuum pump 3 can evacuate the second vacuum tank 22, and the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21. The second liquid level sensor 62 can detect the liquid level in the second vacuum tank 22 in real time. When the second liquid level sensor 62 detects that the liquid level in the second vacuum tank 22 is greater than or equal to HP2, the controller can control the first control valve 51 and the fifth control valve 55 to close, and control the second control valve 52, the third control valve 53, the sixth control valve 56 and the seventh control valve 57 to open, so that the liquid supply medium in the second vacuum tank 22 can be output to the liquid storage tank 1. At the same time, the vacuum pump 3 evacuates the first vacuum tank 21, so that the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, ensuring the continuous liquid supply from the liquid storage tank 1 to the load end 00. When the second liquid level sensor 62 detects that the liquid level height in the second vacuum tank 22 is less than or equal to HL2, the controller can control the second control valve 52, the third control valve 53, the sixth control valve 56 and the seventh control valve 57 to close, and the first control valve 51 and the fifth control valve 55 to open, so that the liquid supply medium in the second vacuum tank 22 stops being output to the liquid storage tank 1, and the liquid supply medium in the liquid storage tank 1 can be output to the second vacuum tank 22, so that the liquid level height of the liquid supply medium in the second vacuum tank 22 can be maintained between HL2 and HP2.

[0049] In an optional embodiment, continue to refer to Figure 2 A third liquid level sensor 63 is provided in the liquid storage tank 1, and the third liquid level sensor 63 is used to detect the liquid level height of the liquid supply medium in the third vacuum tank.

[0050] Specifically, when the liquid supply medium in the liquid storage tank 1 is output to the first vacuum tank 21, and the liquid supply medium in the second vacuum tank 22 is output to the liquid storage tank 1, the third liquid level sensor 63 can detect the liquid level height in the liquid storage tank 1 in real time. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is greater than or equal to the third liquid level upper limit threshold, the controller can control the third control valve 53 and the seventh control valve 57 to close, so that the liquid supply medium in the second vacuum tank 22 stops being output to the liquid storage tank 1, and when the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is less than or equal to the third liquid level lower limit threshold, the controller can control the third control valve 53 and the seventh control valve 57 to open again, so that the liquid supply medium in the second vacuum tank 22 can be output to the liquid storage tank 1 again; when the liquid supply medium in the liquid storage tank 1 is output to the second vacuum tank 22, and the liquid supply medium in the first vacuum tank 21 is output to the liquid storage tank 1, the third liquid level sensor 63 can also detect the liquid level height in the liquid storage tank 1 in real time. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is greater than or equal to the third liquid level upper limit threshold, the controller can control the fourth control valve 54 and the eighth control valve 58 to close, so that the liquid supply medium in the first vacuum tank 21 stops being output to the liquid storage tank 1. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is less than or equal to the third liquid level lower limit threshold, the controller can control the fourth control valve 54 and the eighth control valve 58 to open again, so that the liquid supply medium in the first vacuum tank 21 can be output to the liquid storage tank 1 again, so that the liquid level height of the liquid supply medium in the liquid storage tank 1 can be maintained between the third liquid level lower limit threshold and the third liquid level upper limit threshold.

[0051] The controller controls the opening or closing of the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58, so that the vacuum pump 3 can alternately build a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so that the circulating flow of the liquid supply medium in the negative pressure circulation temperature control system can operate stably, ensuring the continuous supply of liquid from the liquid storage tank 1 to the load end 00, and being able to keep the liquid level of the liquid storage tank 1, the first vacuum tank 21 and the second vacuum tank 22 stable, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0052] Optional, continue to refer to Figure 2The negative pressure circulation temperature control system also includes a gas drying filter 4, a steam-water separator 7 and a gas collector 8; the gas outlet 401 of the gas drying filter 4 is connected to the gas inlet 2104 of the first vacuum tank 21, and is connected to the gas inlet 2204 of the second vacuum tank 22; the gas inlet 701 of the steam-water separator 7 is connected to the gas outlet 302 of the vacuum pump 3; the gas outlet 702 of the steam-water separator 7 is connected to the gas inlet 801 of the gas collector 8; the liquid outlet 703 of the steam-water separator 7 is connected to the liquid inlet of the liquid storage tank 1; the steam-water separator 7 is used to separate the water vapor of the liquid supply medium output by the vacuum pump 3 into the liquid supply medium and the liquid supply medium. The separated liquid supply medium is recovered into the liquid storage tank 1 through the liquid outlet 703 of the steam-water separator 7, and the liquid supply medium mist is transmitted to the gas collector 8 through the gas outlet of the steam-water separator 7; the liquid outlet 802 of the gas collector 8 is connected with the liquid inlet of the liquid storage tank 1; the first gas outlet 803 of the gas collector 8 is connected with the gas inlet 402 of the gas drying filter 4; the second gas outlet 804 of the gas collector 8 is connected with the external environment; the gas collector 8 is used to cool the liquid supply medium mist, and the liquid supply medium obtained by cooling the liquid supply medium mist is recovered into the liquid storage tank 1 through the liquid outlet 802 of the gas collector 8.

[0053] Among them, the air outlet 401 of the gas drying filter 4 is connected to the air inlet 2104 of the first vacuum tank 21 through the first vacuum tank air inlet pipeline 214, so that the gas drying filter 4 can transport the filtered gas to the air inlet 2104 of the first vacuum tank 21 through the first vacuum tank air inlet pipeline 214. After the gas enters the first vacuum tank 21, the pressure in the first vacuum tank 21 is higher than the pressure in the liquid storage tank 1. The liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212 through the liquid inlet 2101 of the first vacuum tank 21, thereby realizing the recovery of the used liquid supply medium to the liquid storage tank 1. The gas outlet 401 of the gas drying filter 4 is connected to the gas inlet 2204 of the second vacuum tank 22 through the second vacuum tank inlet pipeline 224, so that the gas drying filter 4 can deliver the filtered gas to the gas inlet 2204 of the second vacuum tank 22 through the second vacuum tank inlet pipeline 224, and the liquid supply medium in the second vacuum tank 22 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the liquid outlet 2202 of the second vacuum tank 22 through the second vacuum tank liquid outlet pipeline 222. Gas is delivered to the first vacuum tank 21 and the second vacuum tank 22 through the gas drying filter 4, so that the first vacuum tank 21 and the second vacuum tank 22 can alternately provide the liquid supply medium for the liquid storage tank 1, thereby improving the operating efficiency and stability of the negative pressure circulation temperature control system.

[0054] When the vacuum pump 3 constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, it will output water vapor carrying the liquid supply medium. The air inlet 701 of the steam-water separator 7 is connected to the air outlet 302 of the vacuum pump 3, so that the steam-water separator 7 can receive the water vapor carrying the liquid supply medium output by the vacuum pump 3. The steam-water separator 7 can separate the water vapor carrying the liquid supply medium output by the vacuum pump 3 into the liquid supply medium and the liquid supply medium mist. At the same time, the air outlet 702 of the steam-water separator 7 is connected to the air inlet 801 of the gas collector 8, and the liquid outlet 703 of the steam-water separator 7 is connected to the second liquid inlet 103 of the liquid storage tank 1, so that the separated liquid supply medium can be recovered into the liquid storage tank 1 through the liquid outlet 703 of the steam-water separator 7, and the liquid supply medium mist can be transmitted to the gas collector 8 through the air outlet 702 of the steam-water separator 7. Exemplarily, the steam-water separator 7 can be a gravity separation steam-water separator, a cyclone separation steam-water separator or a filtering steam-water separator. The steam-water separator 7 can effectively separate and recover the liquid supply medium contained in the water vapor output by the vacuum pump 3, thereby reducing losses, improving the operating efficiency of the negative pressure circulation temperature control system, and maintaining the liquid level in the liquid storage tank 1 stable, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0055] The gas collector 8 can receive the medium mist separated by the steam-water separator 7. At the same time, the gas collector 8 also includes a first cooling water inlet 805 and a first cooling water outlet 806, so that cooling water can flow through the gas collector through the first cooling water inlet 805 and the first cooling water outlet 806, so that the gas collector 8 can cool the liquid supply medium mist. The liquid outlet 802 of the gas collector 8 is connected to the second liquid inlet 103 of the liquid storage tank 1, so that the gas collector 8 can recover the liquid supply medium formed by cooling the medium mist into the liquid storage tank 1. At the same time, the first gas outlet 803 of the gas collector 8 is connected to the gas inlet 402 of the gas drying filter 4, and the second gas outlet 804 of the gas collector 8 is connected to the external environment, so that the gas collector 8 can recover the gas part of the liquid supply medium to the gas drying filter 4, so that the gas drying filter 4 can dry and filter the gas part and then output it to the first vacuum tank 21 or the second vacuum tank 22, thereby realizing the recycling of waste gas. The gas collector 8 can perform secondary treatment on the medium mist separated by the steam-water separation 7, realize the recycling of the liquid supply medium and waste gas, and improve the operating efficiency of the negative pressure circulation temperature control system. At the same time, the waste gas discharged into the external environment by the gas collector 8 does not contain the liquid supply medium, thereby optimizing the emission of waste gas and reducing pollution.

[0056] Optional, continue to refer to Figure 2The temperature control module 01 includes a heat exchanger 02, an internal circulation pump 03, a cooling water inlet pipeline 011, a cooling water outlet pipeline 012, a heat exchange inlet pipeline 013, and a heat exchange outlet pipeline 014; the heat exchanger 02 includes a cooling water inlet, a cooling water outlet, a heat exchange inlet 023, and a heat exchange outlet 024; the internal circulation pump 03 is arranged on the heat exchange inlet pipeline 013, or the internal circulation pump 03 is arranged in the liquid storage tank 1; the cooling water inlet pipeline 011 is respectively connected to the cooling water inlet end 05 and the cooling water inlet; the cooling water outlet pipeline 012 is respectively connected to the cooling water outlet end 06 and the cooling water outlet; the heat exchange inlet pipeline 013 is respectively connected to the outlet of the liquid storage tank 1 and the heat exchange inlet 023; the heat exchange outlet pipeline 014 is respectively connected to the inlet of the liquid storage tank 1 and the heat exchange outlet 024.

[0057] The heat exchanger 02 is used to adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature of the liquid supply medium required by the load end 00. Figure 2 , the cooling water flows into the second cooling water inlet 021 of the heat exchanger from the cooling water inlet end 05 through the cooling water inlet pipe 011, and the liquid supply medium in the liquid storage tank 1 flows into the heat exchange inlet 023 of the heat exchanger from the second liquid outlet 104 of the liquid storage tank 1 through the heat exchange inlet pipe 013 under the combined action of the internal circulation pump 03 and the negative pressure in the liquid storage tank 1, so that the cooling water and the liquid supply medium can realize heat exchange in the heat exchanger 02, and the liquid supply medium adjusted to the target temperature through the heat exchange outlet pipe 014 can flow back to the third liquid inlet 105 of the liquid storage tank 1 from the heat exchange outlet 024 of the liquid storage tank 1, so that the liquid storage tank 1 can provide the target temperature of the liquid supply medium for the load end 00. At the same time, the coolant after heat exchange flows into the cooling water outlet end 06 from the second cooling water outlet 022 of the heat exchanger through the cooling water outlet pipe 012, so as to realize the recycling of cooling water. The heat exchanger 02 can accurately adjust the temperature of the liquid supply medium in the liquid storage tank 1 so that it always maintains the target temperature required by the load end 00, thereby ensuring the stable operation of the negative pressure circulation temperature control system. In addition, by adjusting the temperature of the liquid supply medium through the heat exchanger 02, the liquid supply medium does not need to pass through the heat exchanger during the process of being transported to the load end 00, avoiding the loss of pressure during the process of supplying liquid to the load end 00, thereby improving the operating efficiency of the negative pressure circulation temperature control system.

[0058] The internal circulation pump 03 is arranged on the heat exchange liquid inlet pipeline 013, or the internal circulation pump 03 is arranged in the liquid storage tank 1, so as to increase the flow rate of the liquid supply medium circulating between the heat exchanger 02 and the liquid storage tank 1, so that the liquid supply medium can be more quickly temperature-adjusted through the heat exchanger 02, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, the process of heat exchange of the liquid supply medium in the negative pressure circulation temperature control system is realized through the internal circulation of the liquid storage tank 1, so that the liquid storage tank 1 has a certain cold storage and heat storage capacity, that is, it can store a certain amount of cold or heat. Therefore, when the target temperature required by the load end 00 fluctuates for a short time, the liquid storage tank 1 can avoid drastic changes in the temperature of the liquid supply medium by releasing or absorbing heat, thereby ensuring that the load end 00 can continuously obtain a liquid supply medium with a stable temperature.

[0059] Optionally, the internal circulation pump is a submersible pump.

[0060] Among them, the submersible pump can be specifically understood as a pump that can be completely immersed in the liquid supply medium. The submersible pump has the characteristics of large flow and small head, so that it can increase the flow speed of the liquid supply medium in the heat exchanger 02, and can avoid the excessive head affecting the stability of the negative pressure circulation temperature control system, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, since the pump body of the submersible pump can be directly immersed in the liquid storage tank 1, no additional installation space is required, thereby saving the overall size of the negative pressure circulation temperature control system equipment, and improving the structural compactness and stability of the negative pressure circulation temperature control system.

[0061] Optional, continue to refer to Figure 2 A ninth control valve 59 is provided in the cooling water inlet pipeline 011; the negative pressure circulation temperature control system also includes a temperature sensing unit 91; the temperature sensing unit 91 is provided in the liquid storage tank outlet pipeline 12 between the liquid storage tank 1 and the load end 00; the temperature sensing unit 91 is used to detect the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12; the negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the ninth control valve 59 and the temperature sensing unit 91; the controller is used to control the opening of the ninth control valve 59 according to the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12.

[0062] Among them, the ninth control valve 59 is arranged in the cooling water inlet pipeline 011. The larger the opening of the ninth control valve 59, the faster the cooling water flows into the heat exchanger 02 through the cooling water inlet pipeline 011, thereby enhancing the heat exchange efficiency and allowing the temperature of the liquid supply medium to approach the target temperature faster. On the contrary, the smaller the opening of the ninth control valve 59, the slower the cooling water flows into the heat exchanger 02 through the cooling water inlet pipeline 011, thereby preventing overcooling. The temperature sensing unit 91 can be specifically understood as a temperature measuring thermal resistor. The temperature sensing unit 91 can detect the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 in real time, and can transmit the measured temperature to the controller, so that the controller can control the opening of the ninth control valve 59 according to the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 measured by the temperature sensing unit 91. By precisely controlling the opening of the ninth control valve 59, the cooling water flow in the heat exchanger 02 can be precisely controlled, thereby avoiding excessive or insufficient inflow of cooling water, thereby reducing energy waste and ensuring that the temperature of the liquid supply medium always remains at the target temperature required by the load end 00, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0063] Optional, continue to refer to Figure 3 The controller is specifically used to: when the temperature of the liquid supply medium in the liquid outlet pipeline 12 of the liquid storage tank is greater than the target temperature, increase the opening of the ninth control valve 59; when the temperature of the liquid supply medium in the liquid outlet pipeline 12 of the liquid storage tank is less than or equal to the target temperature, reduce the opening of the ninth control valve 59.

[0064] Specifically, when the temperature of the liquid supply medium in the outlet pipe 12 of the measuring liquid storage tank measured by the temperature sensing unit 91 is greater than the target temperature, it means that the temperature of the liquid supply medium is relatively high at this time, and the heat exchange efficiency of the heat exchanger 02 needs to be enhanced. Therefore, the controller increases the opening of the ninth control valve 59 to increase the speed of the cooling water flowing into the heat exchanger 02 through the cooling water inlet pipe 011, so that the temperature of the liquid supply medium can be reduced to the target temperature. When the temperature of the liquid supply medium in the outlet pipe 12 of the measuring liquid storage tank measured by the temperature sensing unit 91 is less than or equal to the target temperature, it means that the temperature of the liquid supply medium is relatively low at this time, and the inflow of cooling water in the heat exchanger 02 needs to be reduced. Therefore, the controller reduces the opening of the ninth control valve 59 to reduce the speed of the cooling water flowing into the heat exchanger 02 through the cooling water inlet pipe 011, so as to prevent overcooling and increase the temperature of the liquid supply medium to the target temperature. By accurately controlling the opening of the ninth control valve 59, it can be ensured that the temperature of the liquid supply medium is always maintained at the target temperature required by the load end 00, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0065] It can also be understood that the controller can adjust the opening of the ninth control valve 59 by using proportional-integral-derivative (PID) combined with negative cooling control. The PID adjustment method dynamically calculates the error and adjusts the opening of the ninth control valve 59 to accurately stabilize the temperature of the liquid supply medium at the target temperature, ensuring that the temperature requirements of the load end 00 are met. The PID adjustment method can adapt to temperature changes, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. At the same time, the negative cooling control method can reduce temperature fluctuations, avoid overcooling or overheating, and ensure the real-time and stability of the temperature control of the negative pressure circulation temperature control system.

[0066] Optional, continue to refer to Figure 2 The negative pressure circulation temperature control system also includes: a first pressure sensor 92 and a second pressure sensor 93; the first pressure sensor 92 is arranged in the liquid storage tank outlet pipeline 12 between the liquid storage tank and the load end, and is used to detect the pressure of the liquid storage tank outlet pipeline 12; the second pressure sensor 93 is arranged in the vacuum tank inlet pipeline 210 between the load end 00 and the first vacuum tank and the second vacuum tank, and is used to detect the pressure of the vacuum tank inlet pipeline 210; the vacuum pump 3 includes a variable frequency vacuum pump; the negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the first pressure sensor 92, the second pressure sensor 93 and the variable frequency vacuum pump; the controller is used to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210.

[0067] Among them, the first pressure sensor 92 is used to detect the pressure of the liquid storage tank outlet pipeline 12, and the second pressure sensor 93 is used to detect the pressure of the vacuum tank inlet pipeline 210. The vacuum tank inlet pipeline 210 is connected to the first vacuum tank inlet pipeline 211 and the second vacuum tank inlet pipeline 221 respectively. The pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is the negative pressure difference of the negative pressure circulation temperature control system. When the negative pressure difference of the negative pressure circulation temperature control system is too large, it may cause the liquid level in the liquid storage tank 1 to drop rapidly, and may cause bubbles to form inside the liquid storage tank outlet pipeline 12 and the vacuum tank inlet pipeline 210, resulting in unstable liquid supply, which is not conducive to the stable operation of the negative pressure circulation temperature control system; when the negative pressure difference of the negative pressure circulation temperature control system is too small, it will cause the flow rate of the liquid supply medium to decrease, so that the liquid supply of the liquid storage tank 1 to the load end 00 may not meet the operation requirements of the load end equipment.

[0068] The variable frequency vacuum pump can adjust the operating frequency in real time. When the frequency of the variable frequency vacuum pump is high, the pumping rate of the pump increases, the vacuum degree of the first vacuum tank 21 and the second vacuum tank 22 increases, and the negative pressure difference in the negative pressure circulation temperature control system increases; when the frequency of the variable frequency vacuum pump is low, the pumping rate of the pump decreases, the vacuum degree of the first vacuum tank 21 and the second vacuum tank 22 decreases, and the negative pressure difference in the negative pressure circulation temperature control system decreases. Specifically, the controller can adjust the operating frequency of the variable frequency vacuum pump in real time according to the negative pressure difference of the negative pressure circulation temperature control system to ensure that the negative pressure difference of the negative pressure circulation temperature control system remains within a reasonable range, thereby improving the operating efficiency and stability of the negative pressure circulation temperature control system. At the same time, the frequency of the variable frequency vacuum pump is adjusted according to actual needs to avoid the continuous high energy consumption operation of the fixed frequency vacuum pump, thereby improving energy utilization.

[0069] Optional, continue to refer to Figure 3 The controller is specifically used to: reduce the frequency of the variable frequency vacuum pump when the absolute value of the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is greater than the threshold negative pressure; increase the frequency of the variable frequency vacuum pump when the absolute value of the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is less than or equal to the threshold negative pressure.

[0070] Specifically, when the absolute value of the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is determined to be greater than the threshold negative pressure according to the pressure measured by the first pressure sensor 92 and the second pressure sensor 93, it means that the negative pressure difference in the negative pressure circulation temperature control system is large at this time. Therefore, the controller reduces the frequency of the variable frequency vacuum pump to reduce the vacuum degree of the first vacuum tank 21 and the second vacuum tank 22, thereby reducing the negative pressure difference in the negative pressure circulation temperature control system; when the absolute value of the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is determined to be less than or equal to the threshold negative pressure according to the pressure measured by the first pressure sensor 92 and the second pressure sensor 93, it means that the negative pressure difference in the negative pressure circulation temperature control system is small at this time. Therefore, the controller increases the frequency of the variable frequency vacuum pump to increase the vacuum degree of the first vacuum tank 21 and the second vacuum tank 22, thereby increasing the negative pressure difference in the negative pressure circulation temperature control system. By adjusting the operating frequency of the variable frequency vacuum pump in real time, the negative pressure difference of the negative pressure circulation temperature control system can be kept within a reasonable range, thereby improving the operating efficiency and stability of the negative pressure circulation temperature control system. For example, the operating frequency of the variable frequency vacuum pump can be adjusted between 30HZ and 60HZ.

[0071] Optionally, the threshold negative pressure ranges from 35Kpa to 75Kpa.

[0072] Specifically, when the threshold negative pressure ranges from 35Kpa to 75Kpa, that is, when the absolute value of the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is between 35Kpa and 75Kpa, it can ensure that the negative pressure circulation temperature control system has a stable negative pressure traction force, so that the liquid storage tank 1 can maintain a stable liquid supply frequency, and ensure that the liquid supply medium can be delivered to the load end 00 as needed, and there will be no problems such as insufficient liquid supply due to too low a negative pressure difference, or too fast a flow rate of the liquid supply medium, bubbles, etc. due to too high a negative pressure difference. By controlling the negative pressure difference of the negative pressure circulation temperature control system within the threshold negative pressure range, the temperature control efficiency and stability of the negative pressure circulation temperature control system can be improved, and the energy utilization rate can be improved.

[0073] Optional, continue to refer to Figure 2 The negative pressure circulation temperature control system also includes: a bubble detection unit 94; the bubble detection unit 94 is arranged in the vacuum tank inlet pipeline 210 between the load end 00 and the first vacuum tank 21 and the second vacuum tank 22, and is used to detect the number of bubbles in the vacuum tank inlet pipeline 210; the negative pressure circulation temperature control system also includes a controller, which is in communication with the bubble detection unit 94, and is used to output a warning message when the absolute value of the pressure difference between the pressure measured by the first pressure sensor 92 and the pressure measured by the second pressure sensor 93 is less than the normal threshold value of the negative pressure, and the number of bubbles in the vacuum tank inlet pipeline 210 is greater than the preset bubble threshold number; or, when the liquid level height of the liquid supply medium in the first vacuum tank 21 detected by the first liquid level sensor 61 is less than the normal threshold value of the liquid level, and / or, the liquid level height of the liquid supply medium in the second vacuum tank 22 detected by the second liquid level sensor 62 is less than the normal threshold value of the liquid level, and the number of bubbles in the vacuum tank inlet pipeline 210 is greater than the preset bubble threshold number, output a warning message; the warning message is used to prompt that the system negative pressure is abnormal.

[0074] The bubble detection unit 94 may be specifically a bubble detector, which is used to detect the number of bubbles in the vacuum tank inlet pipeline 210, and can output the detected number of bubbles in the vacuum tank inlet pipeline 210 to the controller, so that the controller can combine the measurement data of the bubble detection unit 94, the first pressure sensor 92, the second pressure sensor 93, the first liquid level sensor 61 and the second liquid level sensor 62 to comprehensively judge whether the negative pressure circulation temperature control system has leakage or abnormal operation. Specifically, when the absolute value of the pressure difference between the pressure measured by the first pressure sensor 92 and the pressure measured by the second pressure sensor 93 is less than the normal threshold value of negative pressure, and the number of bubbles in the vacuum tank inlet pipeline 210 is greater than the preset bubble threshold value, that is, the negative pressure difference of the negative pressure circulation temperature control system is too small, and the number of bubbles increases abnormally, it indicates that the negative pressure circulation temperature control system may have leakage or pipeline damage, and at this time, the controller can output warning information. When the liquid level of the liquid supply medium in the first vacuum tank 21 detected by the first liquid level sensor 61 is less than the normal liquid level threshold, and / or the liquid level of the liquid supply medium in the second vacuum tank 22 detected by the second liquid level sensor 62 is less than the normal liquid level threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline 210 is greater than the preset bubble threshold, that is, the liquid level in the first vacuum tank 21 and / or the second vacuum tank 22 is too low, and the number of bubbles increases abnormally, it indicates that the liquid supply medium has not been replenished in time in the first vacuum tank 21 and / or the second vacuum tank 22, and the negative pressure circulation temperature control system may have leakage or pipeline damage. At this time, the controller can output a warning message. By combining the number of bubbles, negative pressure difference and liquid level height, the controller can accurately determine whether there is leakage, abnormal liquid supply or abnormal negative pressure in the negative pressure circulation temperature control system, and can promptly output warning information under abnormal conditions. The warning information is used to indicate system negative pressure abnormalities, so as to promptly remind operators to inspect the negative pressure circulation temperature control system, thereby effectively avoiding pump damage, negative pressure fluctuations, etc. caused by air entering the internal pipelines of the negative pressure circulation temperature control system, thereby improving the overall safety and reliability of the negative pressure circulation temperature control system.

[0075] In an optional embodiment, the negative pressure circulation temperature control system may further include an early warning unit, and the controller is communicatively connected with the early warning unit so that when the controller detects that an abnormal negative pressure situation exists in the negative pressure circulation temperature control system, it can send early warning information to the early warning unit. The early warning unit can provide early warnings to operators in a timely manner through sound alarms, visual warnings or remote feedback, thereby improving the accuracy, intuitiveness and timeliness of the early warnings of the negative pressure circulation temperature control system, ensuring that operators can respond quickly and inspect and maintain the negative pressure circulation temperature control system, preventing potential faults from further expanding, thereby ensuring the stable operation of the negative pressure circulation temperature control system.

[0076] Optional, continue to refer to Figure 2The negative pressure circulation temperature control system also includes: a flow detection unit 95; the flow detection unit 95 is arranged in the liquid storage tank outlet pipeline 12 between the liquid storage tank 1 and the load end 00, and is used to detect the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12; the negative pressure circulation temperature control system also includes a controller, which is communicated with the flow detection unit 95 and is used to control the suction volume of the vacuum pump 3 according to the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12.

[0077] The flow detection unit 95 may specifically be a flow meter, which is used to detect the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12, and can output the detected flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 to the controller, so that the controller can control the suction volume of the vacuum pump 3 according to the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12. Specifically, when the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 is large, the controller can increase the suction volume of the vacuum pump 3 to maintain the circulation flow of the liquid supply medium in the negative pressure circulation temperature control system; when the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 is small, the controller can reduce the suction volume of the vacuum pump 3, thereby reducing unnecessary energy consumption and avoiding the problem of a large number of bubbles in the pipeline of the negative pressure circulation temperature control system caused by excessive suction. The controller controls the suction volume of the vacuum pump 3 according to the flow rate of the liquid supply medium in the liquid storage tank outlet pipeline 12, thereby improving the operating efficiency and stability of the negative pressure circulation temperature control system, improving energy utilization, and extending the service life of the equipment in the negative pressure circulation temperature control system.

[0078] Optionally, the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank ranges from 3:1 to 5:1.

[0079] Specifically, the controller controls the suction volume of the vacuum pump 3 according to the flow rate of the liquid supply medium in the liquid outlet pipeline 12 of the liquid storage tank, so as to control the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank to be between 3:1 and 5:1. When the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is between 3:1 and 5:1, the negative pressure circulation temperature control system can use a smaller negative pressure driving force to effectively drive more liquid supply medium to circulate, thereby improving the negative pressure circulation temperature control system's ability to convey the liquid supply medium and reducing the workload of the vacuum pump. By controlling the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank within an appropriate range, it is possible to ensure the operating efficiency of the negative pressure circulation temperature control system while taking into account energy saving, stability and safety, which helps to improve the overall performance of the negative pressure circulation temperature control system.

[0080] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution disclosed in the present invention can be achieved, and this document does not limit this.

[0081] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A negative pressure circulation temperature control system, characterized in that: include: A liquid storage tank connected to the load end and used to provide a liquid supply medium of a target temperature to the load end; A first vacuum tank, connected to the load end and the liquid storage tank, for receiving the liquid supply medium at the load end and providing the liquid supply medium to the liquid storage tank; A second vacuum tank, connected to the load end and the liquid storage tank, for receiving the liquid supply medium at the load end and providing the liquid supply medium to the liquid storage tank; a vacuum pump connected to the first vacuum tank and the second vacuum tank, and used to alternately construct a negative pressure environment in the first vacuum tank and the second vacuum tank, so as to utilize the negative pressure environment to enable the first vacuum tank and the second vacuum tank to alternately provide the liquid supply medium to the liquid storage tank; A temperature control module is connected to the liquid storage tank and is used to adjust the temperature of the liquid supply medium in the liquid storage tank to the target temperature.

2. The negative pressure circulation temperature control system according to claim 1, characterized in that: The vacuum pump is connected to the gas outlet of the second vacuum tank through a first control valve; The vacuum pump is connected to the gas outlet of the first vacuum tank through a second control valve; The air inlet of the second vacuum tank is connected to the third control valve; The air inlet of the first vacuum tank is connected to the fourth control valve; The liquid inlet of the second vacuum tank is connected to the load end through a fifth control valve; The liquid inlet of the first vacuum tank is connected to the load end through a sixth control valve; The liquid outlet of the second vacuum tank is connected to the liquid inlet of the liquid storage tank through a seventh control valve; The liquid outlet of the first vacuum tank is connected to the liquid inlet of the liquid storage tank through an eighth control valve.

3. The negative pressure circulation temperature control system according to claim 2, characterized in that: A first liquid level sensor is provided in the first vacuum tank, and the first liquid level sensor is used to detect the liquid level height of the liquid supply medium in the first vacuum tank; A second liquid level sensor is provided in the second vacuum tank, and the second liquid level sensor is used to detect the liquid level height of the liquid supply medium in the second vacuum tank; The negative pressure circulation temperature control system also includes a controller, which is respectively connected to the first liquid level sensor, the second liquid level sensor, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve; The controller is used to control the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve to open or close according to the liquid level height of the liquid supply medium in the first vacuum tank and the liquid level height of the liquid supply medium in the second vacuum tank.

4. The negative pressure circulation temperature control system according to claim 3, characterized in that: The controller is specifically used for: When the liquid level of the liquid supply medium in the first vacuum tank is greater than a first liquid level lower limit threshold and less than a first liquid level upper limit threshold, the second control valve and the sixth control valve are controlled to be opened, and the first control valve and the fifth control valve are controlled to be closed; When the liquid level of the liquid supply medium in the first vacuum tank is greater than or equal to the first liquid level upper limit threshold, controlling the fourth control valve and the eighth control valve to open; When the liquid level of the liquid supply medium in the first vacuum tank is less than or equal to the first liquid level lower limit threshold, controlling the fourth control valve and the eighth control valve to close; When the liquid level of the liquid supply medium in the second vacuum tank is greater than a second liquid level lower limit threshold and less than a second liquid level upper limit threshold, the first control valve and the fifth control valve are controlled to be opened, and the second control valve and the sixth control valve are controlled to be closed; When the liquid level of the liquid supply medium in the second vacuum tank is greater than or equal to the second liquid level upper limit threshold, controlling the third control valve and the seventh control valve to open; When the liquid level of the liquid supply medium in the second vacuum tank is less than or equal to the second liquid level lower limit threshold, the third control valve and the seventh control valve are controlled to be closed.

5. The negative pressure circulation temperature control system according to claim 1, characterized in that: Also includes: Gas filter dryers, steam separators and gas traps; The gas outlet of the gas drying filter is connected to the gas inlet of the first vacuum tank, and is connected to the gas inlet of the second vacuum tank; The air inlet of the steam-water separator is connected to the air outlet of the vacuum pump; the air outlet of the steam-water separator is connected to the air inlet of the gas collector; the liquid outlet of the steam-water separator is connected to the liquid inlet of the liquid storage tank; the steam-water separator is used to separate the water vapor of the liquid supply medium output by the vacuum pump into the liquid supply medium and the liquid supply medium mist, the separated liquid supply medium is recovered into the liquid storage tank through the liquid outlet of the steam-water separator, and the liquid supply medium mist is transmitted to the gas collector through the air outlet of the steam-water separator; The liquid outlet of the gas collector is connected to the liquid inlet of the liquid storage tank; the first air outlet of the gas collector is connected to the air inlet of the gas drying filter; the second air outlet of the gas collector is connected to the external environment; the gas collector is used to cool the liquid supply medium mist, and the liquid supply medium obtained by cooling the liquid supply medium mist is recovered into the liquid storage tank through the liquid outlet of the gas collector.

6. The negative pressure circulation temperature control system according to claim 1, characterized in that: The temperature control module comprises: Heat exchanger, internal circulation pump, cooling water inlet pipeline, cooling water outlet pipeline, heat exchange inlet pipeline, heat exchange outlet pipeline; The heat exchanger comprises a cooling water inlet, a cooling water outlet, a heat exchange inlet and a heat exchange outlet; The internal circulation pump is arranged on the heat exchange liquid inlet pipeline, or the internal circulation pump is arranged in the liquid storage tank; The cooling water inlet pipeline is respectively connected to the cooling water inlet end and the cooling water inlet; the cooling water outlet pipeline is respectively connected to the cooling water outlet end and the cooling water outlet; the heat exchange inlet pipeline is respectively connected to the second outlet of the liquid storage tank and the heat exchange inlet; the heat exchange outlet pipeline is respectively connected to the third inlet of the liquid storage tank and the heat exchange outlet.

7. The negative pressure circulation temperature control system according to claim 6, characterized in that: The internal circulation pump is a submersible pump.

8. The negative pressure circulation temperature control system according to claim 6, characterized in that: A ninth control valve is provided in the cooling water inlet pipeline; The negative pressure circulation temperature control system further comprises a temperature sensing unit; the temperature sensing unit is arranged in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end; the temperature sensing unit is used to detect the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank; The negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the ninth control valve and the temperature sensing unit; the controller is used to control the opening of the ninth control valve according to the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

9. The negative pressure circulation temperature control system according to claim 8, characterized in that: The controller is specifically used for: When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is greater than the target temperature, increasing the opening of the ninth control valve; When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is less than or equal to the target temperature, the opening degree of the ninth control valve is reduced.

10. The negative pressure circulation temperature control system according to claim 3, characterized in that: Also includes: a first pressure sensor and a second pressure sensor; the first pressure sensor is disposed in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end, and is used to detect the pressure of the liquid outlet pipeline of the liquid storage tank; the second pressure sensor is disposed in a vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank, and is used to detect the pressure of the vacuum tank liquid inlet pipeline; The vacuum pump comprises a variable frequency vacuum pump; The negative pressure circulation temperature control system also includes a controller, which is respectively communicated with the first pressure sensor, the second pressure sensor and the variable frequency vacuum pump; the controller is used to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank.

11. The negative pressure circulation temperature control system according to claim 10, characterized in that: The controller is specifically used for: When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank is greater than a threshold negative pressure, reducing the frequency of the variable frequency vacuum pump; When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the liquid inlet pipeline of the vacuum tank is less than or equal to the threshold negative pressure, the frequency of the variable frequency vacuum pump is increased.

12. The negative pressure circulation temperature control system according to claim 11, characterized in that: The threshold negative pressure ranges from 35Kpa to 75Kpa.

13. The negative pressure circulation temperature control system according to claim 10, characterized in that: Also includes: A bubble detection unit; the bubble detection unit is disposed in the vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank, and is used to detect the number of bubbles in the vacuum tank liquid inlet pipeline; The negative pressure circulation temperature control system further includes a controller, which is in communication with the bubble detection unit and is configured to output warning information when the absolute value of the pressure difference between the pressure measured by the first pressure sensor and the pressure measured by the second pressure sensor is less than a normal negative pressure threshold and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than a preset bubble threshold; Alternatively, when the liquid level height of the liquid supply medium in the first vacuum tank detected by the first liquid level sensor is less than the normal liquid level threshold, and / or the liquid level height of the liquid supply medium in the second vacuum tank detected by the second liquid level sensor is less than the normal liquid level threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than the preset bubble threshold, the warning information is output; The warning information is used to indicate that the system negative pressure is abnormal.

14. The negative pressure circulation temperature control system according to claim 1, characterized in that: Also includes: A flow detection unit; the flow detection unit is disposed in a liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end, and is used to detect the flow of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank; The negative pressure circulation temperature control system also includes a controller, which is communicatively connected to the flow detection unit and is used to control the suction volume of the vacuum pump according to the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

15. The negative pressure circulation temperature control system according to claim 14, characterized in that: The ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is in a range of 3:1 to 5:1.

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