A reciprocating beam profile on-line measuring device and method

Abstract

The application relates to a reciprocating beam profile on-line measuring device and method, which comprises a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system; the reciprocating transmission system comprises a reciprocating component in a vacuum chamber; the motion angle conversion system converts the horizontal reciprocating linear motion of the reciprocating component into inclined reciprocating motion at a certain angle with the horizontal direction; the beam signal collection system is driven by the motion angle conversion system to make inclined reciprocating motion, so that the signal collection module realizes the collection of profile information of a beam cross section in a working area; and the recovery system removes the signal collection module from the working area in a non-working state. The application realizes the 45-degree direction reciprocating motion of the signal collection module, completes the collection of profile information of an accelerator beam cross section, and simultaneously realizes the recovery of the device in the non-working state, thereby reserving a working space for other devices.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of beam measurement of accelerators, and particularly relates to a reciprocating beam profile online measurement device and method. BACKGROUND

[0002] Beam diagnosis and monitoring technology plays an important role in the operation of an accelerator. In order to ensure long-term stable transmission of the beam of the accelerator, the beam diagnosis and monitoring device needs to provide parameters such as the transverse intensity distribution of the beam, the center and diameter of the beam, and the emittance of the beam when adjusting the beam.

[0003] At present, the traditional beam diagnosis method belongs to an intercepting type, such as a fluorescent target and a Faraday cylinder, which can destroy the beam distribution and cannot show the real-time situation of the beam. Therefore, a non-intercepting type beam diagnosis system is highly valued, and the working space of the beam diagnosis device is limited, which requires the non-intercepting type diagnosis method to have the characteristics of simple structure, small influence on the beam, compact structure and the like.

[0004] The beam profile instrument adopting the non-intercepting diagnosis method needs to complete the measurement of the beam cross-sectional profile of the accelerator in a limited space in a non-intercepting manner, and can intuitively obtain the X and Y coordinate values of the beam cross section to draw the beam cross-sectional profile through simple operation. In addition, the signal collection module can be removed from the working area without being disassembled in a non-working state, so as to leave a working space for other beam monitoring instruments. The existing beam profile online measurement device is difficult to meet the above technical requirements, and needs to be innovatively designed in structure. SUMMARY

[0005] The application aims to solve the technical problems in the prior art, and provides a reciprocating beam profile online measurement device and method, which realizes online real-time measurement of the beam cross-sectional profile in a non-intercepting manner, and realizes recovery of the signal collection module in a non-working state, so as to occupy as little space as possible in the beam diagnosis vacuum chamber.

[0006] In order to achieve the above object, the technical scheme of the application is as follows:

[0007] A reciprocating beam profile online measurement device comprises a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system. The reciprocating transmission system comprises a reciprocating motion component in a vacuum chamber. The motion angle conversion system converts the horizontal reciprocating linear motion of the reciprocating motion component into inclined reciprocating motion at a certain angle with the horizontal direction. The beam signal collection system is driven by the motion angle conversion system to perform inclined reciprocating motion, so that the signal collection module collects the profile information of the beam cross section in the working area. The recovery system removes the signal collection module from the working area in a non-working state.

[0008] Further, the reciprocating beam profile on-line measuring device as described above, wherein,

[0009] The reciprocating transmission system comprises a screw-slid transmission assembly driven by a stepper motor, to realize the reciprocating linear motion of the reciprocating slide in the vacuum chamber.

[0010] The motion angle conversion system comprises a guide slide connected with the reciprocating slide through a sliding groove connector, which can slide along the inclined guide shaft under the driving of the reciprocating slide.

[0011] The beam signal collection system comprises a signal collection module arranged on an adapter block, which is connected with the guide slide and can move along the inclined guide shaft together with the guide slide, so that the signal collection module realizes the collection of the profile information of the beam cross section in the working area.

[0012] The recovery system comprises a recovery pipe capable of reciprocating motion, and a gripper is arranged at the front end of the recovery pipe, which is used to move the signal collection module away from the working area in the non-working state.

[0013] Further, in a specific embodiment, the reciprocating beam profile on-line measuring device as described above, wherein the stepper motor of the reciprocating transmission system is connected with a reciprocating screw arranged in the vacuum chamber through a shaft coupling, the reciprocating slide is arranged on the reciprocating screw, and the rotation of the reciprocating screw drives the reciprocating slide to move linearly; a magnetic fluid seal is arranged on the mounting flange of the vacuum chamber, the output shaft of the stepper motor is connected with the magnetic fluid seal through a shaft coupling I, and the other end of the magnetic fluid seal is connected with the reciprocating screw through a shaft coupling II.

[0014] Further, in a specific embodiment, the reciprocating beam profile on-line measuring device as described above, wherein the reciprocating transmission system further comprises a guide shaft I fixed on the bracket of the vacuum chamber, which passes through the hole on the reciprocating slide, so that the reciprocating slide only moves along the guide shaft without rotating.

[0015] The reciprocating transmission system further comprises a laser position sensor arranged outside the vacuum chamber, which identifies the position of the reciprocating slide through an observation window.

[0016] Further, in a specific embodiment, the reciprocating beam profile on-line measuring device as described above, wherein the sliding groove connector of the motion angle conversion system comprises a sliding groove block and a needle bearing, the sliding groove block is fixed on the reciprocating slide and moves together with the reciprocating slide, a linear sliding groove is opened on the sliding groove block, the bearing end of the needle bearing penetrates into the linear sliding groove, and the other end of the needle bearing is connected with the guide slide.

[0017] Further, the tilt guide shaft of the motion angle conversion system is installed on a fixed block, the angle between the axis direction of the tilt guide shaft and the horizontal direction is 45 degrees, a hole is opened on the guide sliding block, a dry sliding sleeve is inlaid in the hole, the tilt guide shaft passes through the hole in the guide sliding block, and the guide sliding block performs reciprocating motion at an angle of 45 degrees with the horizontal direction along the tilt guide shaft.

[0018] Further, in a specific embodiment, the reciprocating beam profile on-line measurement device as described above, wherein the signal collection module of the beam signal collection system is fixed at one end of the horizontal guide shaft II, a hole is opened on the adapter block, a dry sliding sleeve is inlaid in the hole, the guide shaft II passes through the hole in the adapter block, and the guide shaft II connected with the signal collection module can reciprocate along the tilt guide shaft together with the adapter block and the guide sliding block.

[0019] Further, in a specific embodiment, the reciprocating beam profile on-line measurement device as described above, wherein the signal collection module comprises a U-shaped frame, a plurality of winding columns are arranged along the U-shaped frame, the winding columns are insulated from the U-shaped frame through insulating pads, the plurality of winding columns are divided into two groups, one group is used for mounting and tensioning the X-direction molybdenum wire, and the other group is used for mounting and tensioning the Y-direction molybdenum wire, a conductor plug is inserted on one winding column in each group of winding columns, the conductor plug is connected with a signal receiving plug arranged on the vacuum chamber mounting flange through a lead wire, signals collected by the X-direction molybdenum wire and the Y-direction molybdenum wire are transmitted to the signal receiving plug, and the vacuum chamber outside portion of the signal receiving plug is connected with a signal identifier.

[0020] Further, in a specific embodiment, the reciprocating beam profile on-line measurement device as described above, wherein each group of winding columns for mounting and tensioning the X-direction molybdenum wire or the Y-direction molybdenum wire comprises three independent winding columns, two winding columns are respectively located at the front end and the rear end of different arms of the U-shaped frame for positioning the molybdenum wire, and a third winding column is arranged adjacent to one of the winding columns, a tension spring is arranged on the third winding column for tensioning the molybdenum wire.

[0021] Further, in a specific embodiment, the reciprocating beam profile on-line measurement device as described above, wherein the recovery pipe of the recovery system is connected with the lead screw motor and can reciprocate under the driving of the forward and reverse rotation of the lead screw motor, a bellows is sleeved outside the recovery pipe to ensure the vacuum sealing when the recovery pipe enters and exits the vacuum chamber, a guide shaft III horizontally fixed on the vacuum chamber mounting flange enables the recovery pipe and the bellows to only move in the axial direction; the other end of the guide shaft II connected with the signal collection module is provided with a female block, when the female block is located at the low end of the tilt guide shaft, a gripper arranged at the front end of the recovery pipe can cooperate with the female block to realize the connection or disconnection operation, and in the state that the gripper is connected with the female block, the guide shaft II can slide in the hole of the adapter block under the driving of the recovery pipe, so that the signal collection module moves away from the working area.

[0022] As a specific embodiment, the female block is provided with a spring plug, and a downwardly open groove is formed between the spring plug and the female block body, and a wedge surface of the spring plug faces the gripper; when the recovery tube moves into the vacuum chamber, the gripper at the front end of the recovery tube pushes up the spring plug and continues to move forward, and when the spring plug falls, the gripper is limited in the groove; when the recovery tube moves out of the vacuum chamber, the gripper drives the female block to move, so that the guide shaft II slides in the hole of the adapter block, and the signal collection module moves away from the working area; if the recovery tube moves reversely, the signal collection module will enter the working area; when the guide shaft II moves upward along the inclined guide shaft together with the adapter block and the guide slider, the gripper naturally separates from the lower opening of the groove of the female block.

[0023] The measurement method of the reciprocating beam profile on-line measurement device is as follows:

[0024] The stepping motor of the reciprocating transmission system transmits the rotary motion to the reciprocating screw through the shaft coupling and the magnetic fluid seal, and the reciprocating slider converts the rotary motion of the reciprocating screw into the reciprocating linear motion in the vacuum chamber.

[0025] The sliding groove block of the sliding groove connecting piece of the motion angle conversion system moves together with the reciprocating slider, and the roller bearing of the sliding groove connecting piece drives the guide slider to slide along the inclined guide shaft through the steering.

[0026] The adapter block of the beam signal collection system moves together with the guide slider, so as to drive the signal collection module to move along the inclined guide shaft through the guide shaft II; the movement of the signal collection module along the inclined guide shaft can be decomposed into the equal-speed sub-movement along the X direction and the Y direction, so as to realize the collection of the X and Y direction profile information of the beam cross section, and transmit the collected information to the signal receiving plug, and realize twice beam profile measurement through one reciprocating motion.

[0027] When the beam profile measurement work is completed, the adapter block of the beam signal collection system moves to the low end of the inclined guide shaft, the gripper at the front end of the recovery tube of the recovery system can cooperate with the female block at the end of the guide shaft II to realize the connection or disconnection operation, in the state that the gripper is connected with the female block, the guide shaft II can slide in the hole of the adapter block under the driving of the recovery tube, so as to move the signal collection module away from the working area, and leave the working space for other beam monitoring instruments.

[0028] Further, the measurement method of the reciprocating beam profile on-line measurement device as described above, wherein the laser position sensor arranged outside the vacuum chamber identifies the position of the reciprocating slider inside the vacuum chamber through the observation window, so as to record the working state of the beam signal collection system.

[0029] The beneficial effects of the present application are as follows: the present application realizes the reciprocating motion of the signal collection module in the 45-degree direction through the cooperation of the reciprocating transmission system, the motion angle conversion system and the beam signal collection system, so as to complete the collection of the profile information of the accelerator beam cross section, realize the online real-time measurement of the beam cross section profile, facilitate the adjustment of the accelerator beam and maintain the long-term stability of the beam. Meanwhile, the recovery system realizes the recovery of the device in the non-working state, and reserves the working space for other devices. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is a shaft side view of a reciprocating beam profile online measurement device in a specific embodiment of the present application;

[0031] Figure 2 It is a structural schematic view of a reciprocating transmission system in a specific embodiment;

[0032] Figure 3 It is a structural schematic view of a motion angle conversion system in a specific embodiment;

[0033] Figure 4 It is a structural schematic view of a beam signal collection system and a recovery system in a specific embodiment;

[0034] Figure 5 It is a structural schematic view of a parent block in a specific embodiment;

[0035] Figure 6 It is a structural schematic view of a signal collection module in a specific embodiment;

[0036] Figure 7 It is a structural schematic view of a recovery pipe in a specific embodiment.

[0037] In the figure, 1 is a support, 2 is a flange, 3 is a transition flange cylinder, 4 is a stepping motor, 5 is a shaft coupling I, 6 is a magnetic fluid seal, 7 is a shaft coupling II, 8 is a reciprocating lead screw, 9 is a reciprocating sliding block, 10 is a guide shaft I, 11 is a laser position sensor, 12 is a sliding groove block, 13 is a needle roller bearing, 14 is a guide sliding block, 15 is an inclined guide shaft, 16 is a fixed block, 17 is a signal collection module, 18 is a signal receiving plug, 19 is an adapter block, 20 is a guide shaft II, 21 is a parent block, 22 is a lead screw motor, 23 is a recovery pipe, 24 is a bellows, 25 is a guide shaft III, 26 is a gripper, 1701 is a U-shaped frame, 1702 is an insulating gasket, 1703 is a winding column, 1704 is an X-direction molybdenum wire, 1705 is a Y-direction molybdenum wire, 1706 is a tension spring, 1707 is a conductor plug, 2101 is a spring plug, 2102 is a parent block body, and 2103 is a groove. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application.

[0039] The present application provides a reciprocating beam profile on-line measuring device, comprising a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system. The entire device is supported by a support, which supports the power components, transmission system and the like of the device, to ensure the normal operation of the device. The flange and the transition flange barrel are used to install the support, and at the same time, the vacuum degree in the accelerator vacuum chamber is ensured through the action of the sealing element between the flange and the transition flange barrel and some parts, and the transition flange barrel side is provided with an observation window for the laser position sensor, so as to facilitate the laser transmission to identify the position of the reciprocating slider inside the vacuum chamber.

[0040] The reciprocating transmission system comprises a lead screw-sliding block transmission assembly driven by a stepping motor, which realizes the reciprocating linear motion of the reciprocating slider in the vacuum chamber.

[0041] The motion angle conversion system comprises a guide slider connected with the reciprocating slider through a sliding groove connector, which can slide along the inclined guide shaft under the driving of the reciprocating slider.

[0042] The beam signal collection system comprises a signal collection module arranged on an adapter block, the adapter block is connected with the guide slider and can reciprocate along the inclined guide shaft together with the guide slider, so that the signal collection module realizes the collection of the profile information of the beam cross section in the working area.

[0043] The recovery system comprises a recovery pipe capable of reciprocating motion, the front end of the recovery pipe is provided with a gripper, which moves the signal collection module away from the working area in the non-working state.

[0044] The specific structure of each system of the entire device is shown in Figures 1-7 .

[0045] Figure 1 In the figure, the support 1 is fixed on the flange 2, the left side of the flange 2 is the external structure of the vacuum chamber, and the right side of the flange is the internal structure of the vacuum chamber. The signal receiving plug 18 is arranged on the flange 2, and the laser position sensor 11 is located outside the observation window of the transition flange barrel 3.

[0046] As shown in Figure 2As shown, the reciprocating transmission system includes stepper motor 4, coupling I 5, magnetic fluid seal 6, coupling II 7, reciprocating screw 8, reciprocating slider 9, guide shaft I 10 and laser position sensor 11. Stepper motor 4 is fixed on the support 1 outside the vacuum chamber, the output shaft of stepper motor 4 and one end of magnetic fluid seal 6 are connected through coupling I 5, magnetic fluid seal 6 is installed on the flange 2 in the form of thread, the rotary motion outside the vacuum chamber is transmitted to the reciprocating screw 8 inside the vacuum chamber, and the vacuum degree of the accelerator vacuum chamber is ensured. The other end of the magnetic fluid seal 6 is connected with the reciprocating screw 8 through the coupling II 7, the reciprocating screw 8 is installed on the support 1, the support 1 is embedded with dry slide bushing, the reciprocating screw 8 penetrates into the slide bushing, so that the rotary friction coefficient of the reciprocating screw 8 can be reduced, the heat of the reciprocating screw 8 is reduced, and the service life of the reciprocating screw 8 is improved. The reciprocating screw 8 is provided with a matched reciprocating slider 9, the rotation of the reciprocating screw 8 can drive the reciprocating slider 9 to move linearly. A circular hole is opened on the reciprocating slider 9, the guide shaft I 10 penetrates into the hole, the reciprocating slider 9 cooperates with the guide shaft I 10 to ensure that the slider only moves in the axial direction and does not rotate; the guide shaft I 10 is connected and fixed with the support 1 through bolts. The laser position sensor 11 is installed on the support 1 outside the observation window through screws, which is used to identify the position of the reciprocating slider 9 in the reciprocating transmission system, when the reciprocating slider 9 returns to the limit position close to the flange 2, the laser sensor outputs a zero return signal, which is convenient for recording the zero point position information of the device.

[0047] As shown in the figure, Figure 3 The motion angle conversion system includes chute block 12, needle roller bearing 13, guide slider 14, inclined guide shaft 15 and fixed block 16. The chute block 12 is installed on the reciprocating slider 9 through screws and moves reciprocally with the reciprocating slider 9. The chute block 12 is provided with a linear chute, the bearing end of the needle roller bearing 13 penetrates into the chute, the chute block 12 and the needle roller bearing 13 form a chute structure, and the other end of the needle roller bearing 13 is connected with the guide slider 14 through thread. The guide slider 14 is provided with a cylindrical hole for embedding a dry slide bushing, the dry slide bushing penetrates the inclined guide shaft 15, and the inclined guide shaft 15 is installed on the fixed block 16.

[0048] In this embodiment, the angle between the axis direction of the inclined guide shaft 15 and the horizontal direction is 45 degrees, and the fixed block 16 is installed on the support 1 through screws. In this way, the horizontal reciprocating movement of the reciprocating slider 9 drives the horizontal reciprocating movement of the chute block 12, the chute block 12 provides reciprocating power for the guide slider 14 through the needle roller bearing 13, and under the guidance of the inclined guide shaft 15 at an angle of 45 degrees with the horizontal direction, the guide slider 14 moves reciprocally at an angle of 45 degrees with the horizontal direction, and the conversion from horizontal reciprocating movement to 45-degree reciprocating movement is completed.

[0049] As shown in the figure, Figure 4As shown, the beam signal collection system comprises a signal collection module 17, a signal receiving plug 18, an adapter block 19, a guide shaft II 20 and a connecting female block 21. In this embodiment, the structure of the signal collection module 17 is as shown in Figure 6 As shown, it comprises a U-shaped frame 1701, an insulating gasket 1702, a winding post 1703, an X-direction molybdenum wire 1704, a Y-direction molybdenum wire 1705, a tension spring 1706 and a conductor plug 1707. A plurality of winding posts 1703 are arranged along the two arms of the U-shaped frame 1701, and the winding posts 1703 are insulated from the U-shaped frame 1701 by the insulating gasket 1702. The plurality of winding posts are divided into two groups, one group is used for mounting and tensioning the X-direction molybdenum wire 1704, and the other group is used for mounting and tensioning the Y-direction molybdenum wire 1705.

[0050] In this embodiment, six identical holes are opened on the U-shaped frame 1701, the holes are dumbbell-shaped, and both ends are inserted into the insulating gaskets 1702; the winding posts 1703 are inserted into the holes with the insulating gaskets 1702, so there are six winding posts 1703, and every three winding posts form a group, and the two winding posts in each group are located at the front end and the rear end of different arms of the U-shaped frame respectively, for positioning the molybdenum wire, and the third winding post is arranged adjacent to one of the winding posts, for tensioning the molybdenum wire. Specifically, one end of the winding post 1703 is threaded through the hole of the insulating gasket 1702 and tightened by a nut, so as to realize the insulation of the winding post 1703 from the U-shaped frame 1701, and avoid the interference of the U-shaped frame 1701 on the signal on the molybdenum wire; the other end of the winding post 1703 is provided with a circular groove and a hole on the side surface of the main body of the winding post 1703, for positioning the molybdenum wire and mounting and fixing the tension spring 1706. The X-direction molybdenum wire 1704 and the Y-direction molybdenum wire 1705 are spatially crossed, and each molybdenum wire occupies three winding posts 1703, and one end of the molybdenum wire in two directions is tensioned by the tension spring 1706, and the other end is wound on one winding post 1703 for fastening. The X-direction molybdenum wire winding post and the Y-direction molybdenum wire winding post are insulated, the conductor plug 1707 is inserted above the winding post 1703, and only one winding post occupied by the X-direction molybdenum wire 1704 and one winding post occupied by the Y-direction molybdenum wire 1705 are selected for mounting, for receiving X(Y) direction signals, and a wire is mounted on the conductor plug 1707, and the other end of the wire is connected to the signal receiving plug 18 arranged on the flange 2. In this way, the conductor plug 1707 transmits the signals collected by the X and Y molybdenum wires to the signal receiving plug 18 through the wire.

[0051] In this embodiment, the signal receiving plug 18 is fixed on the flange 2 by bolts, the vacuum outside part of the signal receiving plug 18 is connected with the signal identifier by wires, and the vacuum inside part is connected with the conductor plug 1707 of the signal collecting module 17 by wires. The adapter block 19 is installed on the guide sliding block 14 by screws, and moves reciprocally with the guide sliding block 14 at an angle of 45 degrees with the horizontal direction, the adapter block 19 is provided with a hole for embedding a dry sliding sleeve, the guide shaft II 20 penetrates the hole of the adapter block 19 and is lubricated by the sliding sleeve, one end of the guide shaft II 20 is connected with the signal collecting module 17 by bolts, and the other end of the guide shaft II 20 is connected with the female block 21 by threads, the female block 21 is provided with a spring plug for cooperating with the recovery system. In the working process, no movement occurs inside the signal collecting system, so that the signal collecting system moves reciprocally at an angle of 45 degrees under the driving of the guide sliding block, at this time, the movement at an angle of 45 degrees can be decomposed into equal-speed sub-movements along the X and Y directions, so as to realize the collection of the profile information of the beam cross section in the X and Y directions.

[0052] As shown in Figure 4 , the recovery system comprises a lead screw motor 22, a recovery pipe 23, a bellows 24 and a guide shaft III 25. The nut of the lead screw motor 22 is fixed on one end of the recovery pipe 23 by bolts, so that the lead screw motor 22 can drive the recovery pipe 23 to move reciprocally by the nut. The end of the recovery pipe 23 connected with the nut is fixed on one end of the bellows 24 by bolts, the bellows 24 is sleeved on the inside of the recovery pipe 23 to ensure the vacuum sealing, and the other end of the bellows 24 is installed on the flange 2, so as to realize the reciprocating movement of the recovery pipe 23 under the condition of ensuring the vacuum degree of the vacuum chamber. The guide shaft III 25 is installed on the flange 2 and penetrates the end flange of the bellows 24, which functions to make the bellows 24 and the recovery pipe 23 move only in the axial direction. The other end of the recovery pipe 23 is a fixed gripper 26. In this embodiment, the structure of the gripper 26 is as shown in Figure 7 , which cooperates with the female block 21 connected with one end of the guide shaft II 20. The structure of the female block 21 is as shown in Figure 5 , the female block 21 is provided with a spring plug 2101, a downwardly-opened groove 2103 is formed between the spring plug 2101 and the female block main body 2102, and the wedge surface of the spring plug 2101 faces the gripper 26.

[0053] When the beam signal collection system completes a reciprocating motion measurement, the adapter block 19 of the beam signal collection system moves to the low end of the inclined guide shaft 15. At this time, the bellows 24 is compressed, the recovery tube 23 extends into the designated position, the gripper 26 lifts the spring plug 2101 of the female block 21 connected to the end of the guide shaft II 20 and continues to move forward, and then the spring plug 2101 falls into the groove of the female block body 2102, which limits the gripper 26 in the groove, and the gripper 26 also stops moving at this time, preparing to grab the recovery signal collection system. The existence of the groove limits the relative horizontal movement between the gripper 26 and the connecting female block 21, that is, if the gripper is retracted at this time, the female block 21 will also be retracted. Therefore, during the subsequent process of the recovery tube 23 returning to the initial position, the bellows 24 will be stretched, so that the beam signal collection system will also be retracted with the recovery tube 23, that is, the guide shaft II 20 can slide in the hole of the adapter block 19 under the driving of the recovery tube 23, so that the signal collection module 17 moves away from the working area, so that the signal collection module 17 occupies the beam diagnosis vacuum chamber space as little as possible.

[0054] When the beam cross-section signal collection operation is performed, the recovery tube 23 will again drive the signal collection module 17 to the position before recovery, and then the guide sliding block 14 will move, so that the beam signal collection system moves upward along the 45-degree inclined guide shaft 15. Due to the groove 2103 formed by the spring plug 2101 and the female block body 2102 below the female block 21, the female block 21 naturally separates from the recovery tube 23 while the beam signal collection system moves upward at 45 degrees. After separation, the recovery tube 23 is retracted to the initial position. The entire system will be reset to zero, and then the online measurement of the beam can be performed.

[0055] A complete measurement process of the reciprocating beam profile online measurement device is described as follows:

[0056] The stepping motor 4 of the reciprocating transmission system transmits rotary motion to the reciprocating lead screw 8 through the shaft coupling I 5, the magnetic fluid seal 6 and the shaft coupling II 7, and the reciprocating sliding block 9 converts the rotary motion of the reciprocating lead screw 8 into reciprocating linear motion in the vacuum chamber;

[0057] The sliding block 12 of the sliding groove connecting piece of the motion angle conversion system moves together with the reciprocating sliding block 9, and the needle roller bearing 13 of the sliding groove connecting piece drives the guide sliding block 14 to reciprocate along the inclined guide shaft 15 at an angle of 45 degrees with the horizontal direction;

[0058] The adapter block 19 of the beam current signal collection system moves together with the guide slider 14, so that the signal collection module 17 is driven by the guide shaft II 20 to reciprocate along the inclined guide shaft 15; the movement of the signal collection module 17 along the inclined guide shaft can be decomposed into uniform movements in the X direction and the Y direction, so as to realize the collection of the X and Y direction profile information of the beam cross section, and to transmit the collected information to the signal receiving plug 18, so as to realize twice beam profile measurement through one reciprocation;

[0059] The laser position sensor 11 outside the vacuum chamber identifies the position of the reciprocating slider 9 inside the vacuum chamber through the observation window, and triggers the laser position sensor 11 to output a zero return signal when the reciprocating slider 9 returns to the limit position close to one end of the flange 2, so as to facilitate the recording of the zero point position information of the device;

[0060] When the beam profile measurement work is completed, the adapter block 19 of the beam current signal collection system moves to the low end of the inclined guide shaft 15, the gripper 26 at the front end of the recovery pipe 23 of the recovery system can be connected or disconnected with the female block 21 at the end of the guide shaft II to realize connection or disconnection operation, in the state that the gripper 26 is connected with the female block 21, the guide shaft II 20 can slide in the hole of the adapter block 19 under the driving of the recovery pipe, so as to move the signal collection module 17 away from the working area, and leave a working space for other beam monitoring instruments.

[0061] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the specification and examples be considered as illustrative only of the preferred embodiments of the application and that other embodiments within the scope of the application should be apparent to those skilled in the art from consideration of the specification, examples, and practice of the application. Thus, it is intended that the application not be limited to the particular method of embodiment described but that the application include all embodiments falling within the scope of the application. Accordingly, the application is not to be restricted, except as by the appended claims and their equivalents.

[0062] The above-described embodiments are only illustrative of the present application, and the present application can also be implemented in other specific ways or other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the described embodiments should be considered illustrative rather than restrictive in any aspect. The scope of protection of the present application should be subject to the claims, and any changes equivalent to the intent and scope of the claims should also be included in the scope of the present application.

Claims

1. A reciprocating beam profile on-line measuring device, characterized in that, The device comprises a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system.

2. The reciprocating beam profile on-line measuring device according to claim 1, wherein the reciprocating transmission system comprises a screw-slid block transmission assembly driven by a stepper motor (4) to realize the reciprocating linear motion of a reciprocating slid block (9) in the vacuum chamber; the motion angle conversion system comprises a guide slid block (14) connected with the reciprocating slid block (9) through a sliding groove connector, and the guide slid block (14) can reciprocate along an inclined guide shaft (15) under the drive of the reciprocating slid block (9); the beam signal collection system comprises a signal collection module (17) arranged on an adapter block (19), and the adapter block (19) is connected with the guide slid block (14) and can reciprocate along the inclined guide shaft (15) with the guide slid block (14) to realize the profile information collection of the beam cross section by the signal collection module (17) in the working area; and the recovery system comprises a recovery tube (23) capable of reciprocating, and a gripper (26) is arranged at the front end of the recovery tube (23) to remove the signal collection module (17) from the working area in the non-working state. The stepper motor (4) of the reciprocating transmission system is connected with a reciprocating screw (8) arranged in the vacuum chamber through a shaft coupling, and the reciprocating slid block (9) is arranged on the reciprocating screw (8), and the rotation of the reciprocating screw (8) drives the reciprocating linear motion of the reciprocating slid block (9). A magnetic fluid seal (6) is arranged on the mounting flange (2) of the vacuum chamber, the output shaft of the stepper motor (4) is connected with the magnetic fluid seal (6) through a coupling I (5), and the other end of the magnetic fluid seal (6) is connected with the reciprocating screw (8) through a coupling II (7). The reciprocating transmission system further comprises a guide shaft I (10) fixed on the support of the vacuum chamber, and the guide shaft I (10) passes through the hole in the reciprocating slid block (9) to make the reciprocating slid block (9) only move along the guide shaft I without rotating. The reciprocating transmission system further comprises a laser position sensor (11) arranged outside the vacuum chamber, and the laser position sensor (11) identifies the position of the reciprocating slid block (9) through an observation window.

3. The reciprocating beam profile on-line measurement device of claim 2, wherein, ​ 4. The reciprocating beam profile on-line measurement device of claim 3, wherein, ​ 5. The online, reciprocating beam current profile measurement device of claim 2, wherein, ​ 6. The online, reciprocating beam current profile measurement device of claim 2, wherein, ​ 7. The online, reciprocating beam current profile measurement device of claim 2, wherein, The sliding groove connector of the motion angle conversion system comprises a sliding block (12) and a needle roller bearing (13), the sliding block (12) is fixed on the reciprocating sliding block (9) and moves together with the reciprocating sliding block (9), a linear sliding groove is formed on the sliding block (12), and the bearing end of the needle roller bearing (13) penetrates into the linear sliding groove, and the other end of the needle roller bearing (13) is connected with the guide sliding block (14).

8. The on-line reciprocating beam current profile measuring device according to claim 2 or 7, characterized in that The inclined guide shaft (15) of the motion angle conversion system is installed on the fixed block (16), the angle between the axis direction of the inclined guide shaft (15) and the horizontal direction is 45 degrees, a hole is formed on the guide sliding block (14), a dry sliding sleeve is embedded in the hole, and the inclined guide shaft (15) penetrates through the hole of the guide sliding block (14), so that the guide sliding block (14) reciprocates along the inclined guide shaft (15) at an angle of 45 degrees with the horizontal direction.

9. The online, reciprocating beam current profile measurement device of claim 2, wherein, The signal collection module (17) of the beam signal collection system is fixed at one end of the horizontal guide shaft II (20), a hole is formed on the adapter block (19), a dry sliding sleeve is embedded in the hole, and the guide shaft II (20) penetrates through the hole of the adapter block (19), and the guide shaft II (20) connected with the signal collection module (17) can reciprocate along the inclined guide shaft (15) together with the adapter block (19) and the guide sliding block (14).

10. The online, reciprocating beam current profile measurement device of claim 2, wherein, The signal collection module (17) comprises a U-shaped frame (1701), a plurality of winding columns (1703) are arranged along the U-shaped frame, the winding columns (1703) are insulated from the U-shaped frame (1701) through insulating pads (1702), the plurality of winding columns (1703) are divided into two groups, one group is used for mounting and tensioning X-direction molybdenum wires (1704), and the other group is used for mounting and tensioning Y-direction molybdenum wires (1705), one winding column in each group is inserted with a conductor plug (1707), the conductor plug (1707) is connected with a signal receiving plug (18) arranged on the vacuum chamber mounting flange (2) through a wire, signals collected by the X-direction molybdenum wires and the Y-direction molybdenum wires are transmitted to the signal receiving plug (18), and the vacuum chamber outside portion of the signal receiving plug (18) is connected with a signal identifier.

11. The reciprocating beam current profile on-line measuring device as claimed in claim 10, wherein, Each group of winding columns for mounting and tensioning the X-direction molybdenum wires (1704) or the Y-direction molybdenum wires (1705) comprises three independent winding columns, two winding columns are respectively located at the front end and the rear end of different arms of the U-shaped frame (1701) and are used for positioning the molybdenum wires, and a third winding column is arranged adjacent to one of the winding columns, and a tension spring (1706) is arranged on the third winding column and is used for tensioning the molybdenum wires.

12. The online, reciprocating beam current profile measurement apparatus of claim 2, wherein, The recovery pipe (23) of the recovery system is connected with the screw motor (22) and can reciprocate under the positive and negative rotation of the screw motor (22), the recovery pipe (23) is externally sleeved with the bellows (24) to ensure the vacuum sealing when the recovery pipe (23) enters and exits the vacuum chamber, the guide shaft III (25) horizontally fixed on the vacuum chamber mounting flange (2) enables the recovery pipe (23) and the bellows (24) to only move in the axial direction; the other end of the guide shaft II (20) connected with the signal collection module (17) is provided with the female block (21), when the female block (21) is located at the low end of the inclined guide shaft (15), the gripper (26) arranged at the front end of the recovery pipe (23) can be connected with or separated from the female block (21) to realize the connection or separation operation, in the connected state of the gripper and the female block, the guide shaft II (20) can slide in the hole of the adapter block (19) under the driving of the recovery pipe (23), so that the signal collection module (17) is moved away from the working area.

13. The reciprocating beam profile on-line measurement device of claim 12, wherein, The female block (21) is provided with the spring plug (2101), the spring plug (2101) and the female block main body (2102) form the downwardly-opened groove (2103) therebetween, and the wedge surface of the spring plug (2101) faces the gripper (26); when the recovery pipe (23) moves into the vacuum chamber, the gripper at the front end of the recovery pipe lifts up the spring plug (2101) and continues to move forward, and when the spring plug (2101) falls, the gripper is limited in the groove (2103); when the recovery pipe (23) moves out of the vacuum chamber, the gripper drives the female block (21) to move, so that the guide shaft II (20) slides in the hole of the adapter block (19), and the signal collection module (17) is moved away from the working area, and if the recovery pipe (23) moves reversely, the signal collection module (17) will enter the working area; when the guide shaft II (20) moves upward along the inclined guide shaft (15) together with the adapter block (19) and the guide slider (14), the gripper naturally separates from the lower opening of the groove (2103) of the female block.

14. A measuring method using the reciprocating beam profile on-line measuring device according to any one of claims 2 to 13, characterized in that, The reciprocating transmission system comprises a stepping motor, a magnetic fluid seal, a reciprocating screw, a reciprocating slider and a guide slider; The sliding groove block of the sliding groove connecting piece of the movement angle conversion system moves together with the reciprocating slider, and the needle roller bearing of the sliding groove connecting piece drives the guide slider to reciprocate along the inclined guide shaft through the steering; The adapter block of the beam signal collection system moves together with the guide slider, so as to drive the signal collection module to reciprocate along the inclined guide shaft through the guide shaft II; the movement of the signal collection module along the inclined guide shaft can be decomposed into the equal-speed sub-movements in the X direction and the Y direction, so as to realize the collection of the X and Y direction profile information of the beam cross section and transmit the collected information to the signal receiving plug, and realize twice beam profile measurement through one reciprocating movement. ​ When the beam profile measurement is completed, the adapter block of the beam signal collection system moves to the low end of the inclined guide shaft, the gripper at the front end of the recovery tube of the recovery system can be connected or disconnected with the female block at the end of the guide shaft II, and in the connected state, the guide shaft II can slide in the hole of the adapter block under the drive of the recovery tube, so that the signal collection module moves away from the working area to leave space for other beam monitoring instruments.

15. The measurement method of the reciprocating beam profile on-line measuring apparatus as claimed in claim 14, wherein The laser position sensor arranged outside the vacuum chamber identifies the position of the reciprocating slider inside the vacuum chamber through the observation window, so as to record the working state of the beam signal collection system.

Images