Signal detection device, signal detection method and electronic equipment

Abstract

The embodiment of the invention discloses a signal detection device, a signal detection method and electronic equipment, at least one radio frequency monitoring signal of a monitoring point in the electronic equipment is acquired through an acquisition unit, and each acquired radio frequency monitoring signal is output. Each radio frequency monitoring signal comprises a plurality of dot frequency signals, in order to obtain target signals, each radio frequency monitoring signal output by the acquisition unit can be received through the signal cancellation unit, and one or more dot frequency signals in the radio frequency monitoring signals are taken as the target signals according to the requirements of the electronic equipment; the method comprises the following steps: generating a cancellation signal with a frequency value to be cancelled according to a specific frequency value, enabling the cancellation signal to be generated locally, and then carrying out superposition cancellation on each radio frequency monitoring signal and the cancellation signal to obtain a radio frequency monitoring signal without a dot frequency signal with the frequency value to be cancelled. And outputting the radio frequency monitoring signal after the dot frequency signal with the to-be-cancelled frequency value is removed as a target signal.

Description

Technical Field

[0001] The present application relates to the technical field of signal detection, and in particular to a signal detection device, a signal detection method and an electronic device. Background Art

[0002] During the power transmission process, the load side impedance changes nonlinearly, and the power transmission situation needs to be monitored in real time. The signal detection device can collect the signal at the monitoring point of the transmission line and perform a series of controls based on the collected signal. In actual non-ideal scenarios, the collected signal has interference factors such as intermodulation, harmonics, and noise.

[0003] Currently, interference factors can be removed based on the fast Fourier transform (FFT). However, in order to improve the frequency domain resolution, the FFT points need to be very high, which takes up a lot of hardware resources, and the algorithm has a long delay, which cannot meet the needs of high-precision and fast detection scenarios.

[0004] At present, interference factors can also be removed based on the sine fitting method. However, its single frequency point detection complexity is low and the frequency domain resolution is high. In addition, as the number of frequency points increases, especially when the base frequency is uncertain, the complexity of multi-tone simultaneous processing increases linearly. Summary of the invention

[0005] The embodiments of the present application provide a signal detection device, a signal detection method and an electronic device to meet the scenario requirements of high-precision and rapid detection.

[0006] In the first aspect, an embodiment of the present application provides a signal detection device, which includes: a collection unit and a signal cancellation unit, wherein the signal cancellation unit is connected to the collection unit. In addition, at least one radio frequency monitoring signal of a monitoring point in an electronic device is collected by the collection unit, and each collected radio frequency monitoring signal is output. Each radio frequency monitoring signal may include multiple point frequency signals (each point frequency signal has a single frequency value), and different point frequency signals have different frequency values. Furthermore, the multiple frequency signals include a signal to be retained having at least one frequency value to be retained (i.e., the signal to be retained is a frequency signal) and a signal to be cancelled having at least one frequency value to be cancelled (the signal to be cancelled is a frequency signal). In order to further detect and obtain the target signal as the signal to be retained, each RF monitoring signal output by the acquisition unit can be received by the signal cancellation unit, and a cancellation signal having the above-mentioned at least one frequency value to be cancelled can be generated according to a specific frequency value, so that the cancellation signal is locally generated, and then the signal to be cancelled in each RF monitoring signal is superimposed and cancelled with the cancellation signal to obtain a RF monitoring signal after removing the frequency signal having the above-mentioned frequency value to be cancelled, and the RF monitoring signal after removing the frequency signal having the above-mentioned frequency value to be cancelled is output as a target signal. Thus, according to the requirements of the electronic device, one or more frequency signals in the RF monitoring signal can be output as a target signal. Moreover, the signal detection device can be based on the processing method of the time domain, which occupies less resources and has a smaller algorithm delay than the scheme of the frequency domain FFT. Compared with the scheme based on sine fitting, the complexity can be reduced in the case of simultaneous detection of multiple frequency points. In summary, the signal detection device in the embodiment of the present application meets the scenario requirements of high-precision and rapid detection.

[0007] And, the frequency value to be cancelled includes the frequency value of at least one point frequency signal among the multiple point frequency signals. Since the frequency value of the point frequency signal is a fixed value, the signal detection device in the present application can generate a cancellation signal at the corresponding frequency value as needed, so as to cancel the point frequency signal with one or more fixed frequency values.

[0008] In addition, in the present application, the specific frequency value may include a reference frequency value of a radio frequency signal source in the electronic device that generates the frequency value to be cancelled.

[0009] In some possible implementations, the signal cancellation unit includes: a base generation module and at least one cancellation module. The number of RF monitoring signals collected by the acquisition unit is the same as the number of cancellation modules, and each cancellation module is used to process a corresponding RF monitoring signal. In addition, the base generation module is connected to each cancellation module, and each cancellation module is connected to the acquisition unit. In addition, the base generation module can obtain a specific frequency value, thereby generating a cancellation base signal with a specific frequency value according to the specific frequency value, so that the cancellation base signal in the present application is locally generated, and the generated cancellation base signal is output to each cancellation module. Each cancellation module can receive the cancellation base signal and the corresponding RF monitoring signal, and then generate a cancellation signal with the above-mentioned at least one frequency value to be cancelled according to the cancellation base signal, and superimpose and cancel the signal to be cancelled in the corresponding RF monitoring signal with the generated cancellation signal, and output the corresponding target signal, so as to realize the process of removing the point frequency signal with the above-mentioned frequency value to be cancelled.

[0010] In some possible implementations, in non-ideal scenarios, intermodulation, harmonics, and other specific single-frequency signals to be cancelled may appear. Based on this, the above-mentioned frequency value to be cancelled may be at least one. The cancellation module generates a cancellation signal having a frequency value to be cancelled according to a cancellation base signal, and the process may include but is not limited to: generating at least one cancellation initial signal according to the cancellation base signal, and making the frequency value of at least one cancellation initial signal correspond one-to-one to at least one frequency value to be cancelled, and processing at least one cancellation initial signal to generate a cancellation signal.

[0011] Exemplarily, there may be multiple frequency values ​​to be cancelled, and the cancellation module generates multiple cancellation initial signals with different frequency values ​​according to the cancellation base signal, and makes the frequency values ​​of the multiple cancellation initial signals correspond one-to-one with the multiple frequency values ​​to be cancelled, and generates the cancellation signal after superimposing the multiple cancellation initial signals.

[0012] Exemplarily, the frequency value to be cancelled may also be one, and the cancellation module generates an initial cancellation signal having the same frequency value as the frequency value to be cancelled according to the cancellation base signal, and generates a cancellation signal after processing the initial cancellation signal.

[0013] In some possible implementations, the process of the cancellation module generating the cancellation initial signal according to the cancellation base signal may include but is not limited to: using an adaptive correction algorithm to generate the cancellation initial signal according to the cancellation base signal. Exemplarily, the adaptive correction algorithm includes but is not limited to: Least Mean Square (LMS) algorithm.

[0014] In some possible implementations, the difference between the target signal output by the cancellation module and its mean value can also be used as an error input into an adaptive correction algorithm to correct the adaptive correction algorithm and update the algorithm coefficients in real time, thereby achieving local fitting to generate a cancellation signal at the frequency value to be cancelled of the RF monitoring signal.

[0015] In some possible implementations, the frequency value to be retained may be one, so that the target signal may have a signal to be retained with one frequency value to be retained. Alternatively, the frequency value to be retained may be multiple (i.e., two or more) so that the target signal may have a signal to be retained with multiple frequency values ​​to be retained.

[0016] In some possible implementations, in order to reduce the amount of calculation, the signal detection device may further include: a spectrum shifting unit, so that the acquisition unit is connected to the signal cancellation unit through the spectrum shifting unit. In addition, the spectrum shifting unit may shift the spectrum of each radio frequency monitoring signal and send it to the signal cancellation unit.

[0017] Optionally, the spectrum of the RF monitoring signal may be shifted to the left or to the right. Alternatively, the spectrum of each RF monitoring signal may be shifted to the left, and the spectrum of another RF monitoring signal may be shifted to the right. Alternatively, the spectrum of one RF monitoring signal may be shifted to the right, and the spectrum of another RF monitoring signal may be shifted to the left.

[0018] In some possible implementations, in order to further reduce the amount of calculation, the spectrum shifting unit may also shift the spectrum of each RF monitoring signal to the left, so that the frequency value to be retained of each RF monitoring signal is moved to the set frequency, forming a RF monitoring signal after spectrum shifting. Wherein, the set frequency is 0±Δf, Δf is the error frequency within the error allowable range, and the set frequency can be equivalent to zero frequency, that is, equivalent to moving the frequency value to be retained of the RF monitoring signal to zero frequency, and moving the frequency values ​​to be cancelled of the remaining signals to be cancelled to near zero frequency.

[0019] In some possible implementations, the electronic device includes at least one RF signal source and at least one transmission line, and the at least one RF signal source and the at least one transmission line are connected one-to-one. In some examples, the acquisition unit is set corresponding to a transmission line. Exemplarily, the acquisition unit and the corresponding transmission line can be directly connected by a signal line connection method (for example, connected by a cable), and the connection between the acquisition unit and the transmission line is used as a monitoring point. Alternatively, it is also possible that no signal line is set between the acquisition unit and the corresponding transmission line, but a coupling method is used to connect them, so that the acquisition unit collects the RF monitoring signal of the monitoring point on the corresponding transmission line, that is, the coupling point can be used as a monitoring point.

[0020] In some examples, the collection unit is provided with a corresponding connection line between the matcher and the load. Exemplarily, the collection unit and the connection line between the corresponding matcher and the load can be directly connected by a signal line connection method (for example, connected by a cable), and the connection point between the collection unit and the connection line between the matcher and the load is used as a monitoring point. Alternatively, the collection unit and the connection line between the corresponding matcher and the load may not be provided with a signal line, but may be connected by coupling, so that the collection unit collects the RF monitoring signal of the monitoring point on the connection line between the corresponding matcher and the load, that is, the coupling point can be used as a monitoring point.

[0021] In some examples, the acquisition unit is set corresponding to a radio frequency signal source. Exemplarily, the acquisition unit and the corresponding radio frequency signal source can be directly connected by a signal line connection method (for example, connected by a cable), and the connection between the acquisition unit and the radio frequency signal source is used as a monitoring point. Alternatively, it is also possible that no signal line is set between the acquisition unit and the corresponding radio frequency signal source, but they are connected by coupling, so that the acquisition unit collects the radio frequency monitoring signal of the monitoring point on the corresponding radio frequency signal source, that is, the coupling point can be used as a monitoring point. Exemplarily, the signal detection device can also be integrated with the corresponding radio frequency signal source, for example, the signal detection device is integrated in the corresponding radio frequency signal source.

[0022] In some examples, the acquisition unit is set corresponding to a matcher. Exemplarily, the acquisition unit and the corresponding matcher can be directly connected by a signal line connection (for example, connected by a cable), and the connection between the acquisition unit and the matcher is used as a monitoring point. Alternatively, it is also possible that no signal line is set between the acquisition unit and the corresponding matcher, but they are connected by coupling, so that the acquisition unit collects the RF monitoring signal of the monitoring point on the corresponding matcher, that is, the coupling point can be used as a monitoring point. Exemplarily, the signal detection device can also be integrated with the corresponding matcher, for example, the signal detection device is integrated in the corresponding matcher.

[0023] In some possible implementations, for the RF monitoring signal after spectrum shifting, when the electronic device includes multiple RF signal sources, there will be intermodulation signals to be cancelled in the signal to be cancelled, then the specific frequency value can include: a first specific frequency value, the first specific frequency value is the reference frequency value of the remaining RF signal sources except the RF signal source corresponding to the acquisition unit among the multiple RF signal sources. With this setting, the frequency value to be cancelled of the intermodulation signal to be cancelled can be obtained according to the first specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value and ±A1*N, the second specific frequency value is the reference frequency value of the RF signal source corresponding to the acquisition unit, A1 represents the first specific frequency value, N is an integer and N≥1; the frequency value to be cancelled includes: the second specific frequency value and the frequency values ​​in ±A1*N except the above-mentioned frequency value to be retained.

[0024] In some possible implementations, for the RF monitoring signal after spectrum shifting, when the electronic device includes one or more RF signal sources, the signal to be cancelled will also contain a harmonic signal to be cancelled, then the specific frequency value can include: a second specific frequency value, and the second specific frequency value is the reference frequency value of the RF signal source corresponding to the acquisition unit. With this setting, the frequency value to be cancelled of the harmonic signal to be cancelled can be obtained according to the second specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value and A2*M, A2 represents the second specific frequency value, M is an integer and M≥1; the frequency value to be cancelled includes: the second specific frequency value and the frequency value in A2*M except the frequency value to be retained.

[0025] In some possible implementations, for the RF monitoring signal after spectrum shifting, when the electronic device includes multiple RF signal sources, the signal to be cancelled will contain both the intermodulation signal to be cancelled and the harmonic signal to be cancelled, then the specific frequency value can include: a first specific frequency value and a second specific frequency value, the first specific frequency value is the reference frequency value of the remaining RF signal sources except the RF signal source corresponding to the acquisition unit among the multiple RF signal sources, and the second specific frequency value is the reference frequency value of the RF signal source corresponding to the acquisition unit. Thus, the frequency value to be cancelled can be obtained according to the first specific frequency value and the second specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value, ±A1*N and A2*M, A1 represents the first specific frequency value, N is an integer and N≥1, A2 represents the second specific frequency value, M is an integer and M≥1; the frequency value to be cancelled includes: the frequency value of the second specific frequency value, ±A1*N and A2*M except the frequency value to be retained.

[0026] In some possible implementations, for RF monitoring signals whose spectrum is not moved, when the electronic device includes multiple RF signal sources, the signal to be cancelled will contain intermodulation signals to be cancelled, then the specific frequency value can include: a first specific frequency value and a second specific frequency value, the first specific frequency value is the reference frequency value of the remaining RF signal sources except the RF signal source corresponding to the acquisition unit among the multiple RF signal sources, and the second specific frequency value is the reference frequency value of the RF signal source corresponding to the acquisition unit. With this setting, the frequency value to be cancelled of the intermodulation signal to be cancelled can be obtained according to the first specific frequency value and the second specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value and A2±A1*P, A1 represents the first specific frequency value, A2 represents the second specific frequency value, P is an integer and P≥1; the frequency value to be cancelled includes: the frequency value of the second specific frequency value and A2±A1*P except the frequency value to be retained.

[0027] In some possible implementations, for a radio frequency monitoring signal whose spectrum is not moved, when the electronic device includes multiple radio frequency signal sources, the signal to be cancelled will contain an intermodulation signal to be cancelled and a harmonic signal to be cancelled, then the specific frequency value can include: a first specific frequency value and a second specific frequency value, the first specific frequency value is the reference frequency value of the remaining radio frequency signal sources except the radio frequency signal source corresponding to the acquisition unit among the multiple radio frequency signal sources, and the second specific frequency value is the reference frequency value of the radio frequency signal source corresponding to the acquisition unit. Thus, the frequency value to be cancelled of the intermodulation signal to be cancelled can be obtained according to the first specific frequency value and the second specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value, A2±A1*P and A2*Q; the frequency value to be cancelled includes: the frequency value of the second specific frequency value, A2±A1*P and A2*Q except the frequency value to be retained, Q is an integer and Q≥2, P is an integer and P≥1, A1 represents the first specific frequency value, and A2 represents the second specific frequency value.

[0028] In some possible implementations, for RF monitoring signals whose spectrum is not moved, when the electronic device includes one or more RF signal sources, the signal to be cancelled will also contain harmonic signals to be cancelled, then the specific frequency value can include: a second specific frequency value, the second specific frequency value is the reference frequency value of the RF signal source corresponding to the acquisition unit. With this setting, the frequency value to be cancelled of the harmonic signal to be cancelled can be obtained according to the second specific frequency value, and the frequency value to be retained includes: at least one of the second specific frequency value and A2*Q, Q is an integer and Q≥2, A2 represents the second specific frequency value; the frequency value to be cancelled includes: the frequency value of the second specific frequency value and A2*Q except the frequency value to be retained.

[0029] In some possible implementations, the electronic device includes at least one RF signal source, the specific frequency value includes: a second specific frequency value, the second specific frequency value is a reference frequency value of the RF signal source corresponding to the acquisition unit, and the frequency value to be cancelled includes the second specific frequency value. With this configuration, a cancellation signal having a second specific frequency value can be generated according to the specific frequency value, and then each RF monitoring signal is superimposed and cancelled with the cancellation signal to remove the point frequency signal having the second specific frequency value.

[0030] Exemplarily, the above-mentioned multiple frequency signals may include a frequency signal having a second specific frequency value and a frequency signal having other frequency values ​​(e.g., W1, W2, and W3). Among them, the frequency value to be retained may include the second specific frequency value, and the frequency value to be canceled may include other frequency values ​​(e.g., W1, W2, and W3). Alternatively, the frequency value to be retained may include other frequency value W1, and the frequency value to be canceled may include the second specific frequency value and other frequency values ​​(e.g., W2 and W3). Alternatively, the frequency value to be retained may include other frequency value W2, and the frequency value to be canceled may include the second specific frequency value and other frequency values ​​(e.g., W1 and W3). Alternatively, the frequency value to be retained may include other frequency value W3, and the frequency value to be canceled may include the second specific frequency value and other frequency values ​​(e.g., W1 and W2).

[0031] In some possible implementations, the acquisition unit acquires two RF monitoring signals, and the two RF monitoring signals may or may not have a phase difference. In addition, the signal detection device further includes: an output processing unit, which is connected to the signal cancellation unit and is used to: receive the target signal corresponding to the two RF monitoring signals output by the signal cancellation unit, and calculate the parameters of the electronic device transmission signal according to the target signal corresponding to the two RF monitoring signals, wherein the parameters include at least forward power, reverse power and reflection coefficient. With this arrangement, the calculated forward power, reverse power and reflection coefficient can be output to the control device. The control device can adjust the relevant parameters of the matcher or RF signal source according to the parameters such as forward power, reverse power and reflection coefficient to ensure the maximum power transmission of the device. Alternatively, the control device can also determine the abnormal event sent by the load side according to the parameters such as forward power, reverse power and reflection coefficient, so as to timely control the reduction or shut down of the RF signal source, effectively reduce the loss and avoid damage to the equipment.

[0032] In the second aspect, an embodiment of the present application also provides a signal detection method, including: collecting at least one RF monitoring signal from a monitoring point in an electronic device; the at least one RF monitoring signal includes multiple point frequency signals with different frequency values, the multiple point frequency signals include a to-be-retained signal having at least one to-be-retained frequency value and a to-be-cancelled signal having at least one to-be-cancelled frequency value; generating a cancellation signal having at least one to-be-cancelled frequency value according to a specific frequency value, superimposing and canceling the to-be-cancelled signal and the cancellation signal in each RF monitoring signal, and outputting a target signal; the specific frequency value includes a reference frequency value of a RF signal source that generates the to-be-cancelled frequency value in the electronic device.

[0033] In some possible implementations, generating a cancellation signal having at least one frequency value to be cancelled according to a specific frequency value, superimposing and canceling the signal to be cancelled in each RF monitoring signal with the cancellation signal, and outputting a target signal may include: generating a cancellation base signal having a specific frequency value according to the specific frequency value, generating a cancellation signal having at least one frequency value to be cancelled according to the cancellation base signal, superimposing and canceling the signal to be cancelled in the corresponding RF monitoring signal with the generated cancellation signal, and outputting the corresponding target signal.

[0034] In some possible implementations, generating a cancellation signal having at least one frequency value to be cancelled based on a cancellation base signal may specifically include: generating at least one cancellation initial signal based on the cancellation base signal, the frequency value of at least one cancellation initial signal corresponding one-to-one to at least one frequency value to be cancelled, and processing at least one cancellation initial signal to generate the cancellation signal.

[0035] In some possible implementations, generating the cancellation initial signal according to the cancellation basis signal may specifically include: using an adaptive correction algorithm to generate the cancellation initial signal according to the cancellation basis signal.

[0036] In some possible implementations, the method may further include: inputting a difference between a target signal output by the cancellation module and a mean value thereof as an error into an adaptive correction algorithm to correct the adaptive correction algorithm.

[0037] In some possible implementations, the method may further include: after shifting the spectrum of each RF monitoring signal, generating a cancellation signal having at least one frequency value to be cancelled according to a specific frequency value. Exemplarily, the spectrum of each RF monitoring signal is shifted to the left so that the frequency value to be retained of each RF monitoring signal is shifted to a set frequency, the set frequency is 0±Δf, and Δf is an error frequency within an allowable error range.

[0038] In the third aspect, the embodiment of the present application also provides an electronic device, including: one or more radio frequency signal sources, one or more transmission lines, one or more matchers, and one or more signal detection devices such as the first aspect or various embodiments of the first aspect. Among them, the radio frequency signal source, the transmission line and the matcher correspond one to one, and each radio frequency signal source is connected to the corresponding matcher through the corresponding transmission line, and at least one matcher is connected to the load to supply power to the load. In addition, at least one signal detection device corresponds one to one to at least one transmission line, and the acquisition unit in the signal detection device is used to collect the radio frequency monitoring signal of the corresponding transmission line, so as to detect and obtain the target signal through the signal detection device. Since the performance of the above-mentioned signal detection device is good, the performance of the electronic device including the above-mentioned signal detection device is also good. In addition, the principle of solving the problem by the electronic device is similar to that of the aforementioned signal detection device, so the implementation of the electronic device can refer to the implementation of the aforementioned signal detection device, and the repeated parts will not be repeated. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application;

[0040] Figure 2 A schematic diagram of the structure of a signal detection device provided in one embodiment of the present application;

[0041] Figure 3a A schematic diagram of a spectrum of a radio frequency monitoring signal before spectrum migration provided by an embodiment of the present application;

[0042] Figure 3b A schematic diagram of a spectrum of a radio frequency monitoring signal after spectrum shifting provided in an embodiment of the present application;

[0043] Figure 4 A schematic diagram of the structure of a signal detection device provided in yet another embodiment of the present application;

[0044] Figure 5 A signal detection method provided in one embodiment of the present application;

[0045] Figure 6 A schematic diagram of the structure of a signal detection device provided in yet another embodiment of the present application;

[0046] Figure 7 A schematic diagram of the structure of a signal detection device provided in yet another embodiment of the present application;

[0047] Figure 8 A signal detection method provided in yet another embodiment of the present application;

[0048] Fig. 9 A signal detection method is provided in yet another embodiment of the present application.

[0049] Reference numerals:

[0050] 110a / 110b-RF signal source; 120a / 120b-transmission line; 130a / 130b-matching device; 140-load; 150-control device; 200-signal detection device; 210-acquisition unit; 220-spectrum shifting unit; 230-signal cancellation unit; 240-output processing unit; 211-coupler; 212 / 213-signal conditioning circuit; 214-analog-to-digital converter; 221 / 222-spectrum shifting module; 223-digitally controlled oscillator; 231 / 232-cancellation module; 233-base generation module; TD-monitoring point. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. In order to facilitate the understanding of the signal detection device, signal detection method and electronic device provided in the embodiments of the present application, the application scenarios thereof are first introduced below.

[0052] The signal detection device provided in the embodiment of the present application is suitable for scenarios where intermodulation, harmonics and other specific single-frequency signals to be cancelled need to be removed. For example, when it is necessary to monitor the power transfer of an electronic device in real time, the signal detection device provided in the embodiment of the present application can be used to remove the signal to be cancelled based on the time domain processing method to obtain the target signal. It is understandable that the signal detection device proposed in the embodiment of the present application is intended to include but is not limited to application in these and any other suitable types of electronic devices.

[0053] Reference Figure 1 , Figure 1A schematic diagram of the structure of an electronic device provided for an embodiment of the present application. The electronic device may include: RF signal sources 110a, 110b, transmission lines 120a, 120b, matchers 130a, 130b, a load 140, and a control device 150. The RF signal source 110a is connected to the matcher 130a via the transmission line 120a, the RF signal source 110b is connected to the matcher 130b via the transmission line 120b, the matchers 130a, 130b are connected to the load 140, and the control device 150 is connected to the RF signal source 110a and the matcher 130a. Exemplarily, the RF signal source 110a can generate a reference signal having a single reference frequency value (e.g., 13.56MHz) and a certain power, and the RF signal output by the RF signal source 110a is transmitted to the load 140 via the matcher 130a to power the load 140. Furthermore, the RF signal source 110 b may also generate a reference signal having a single reference frequency value (eg, 400 kHz) and a certain power, and the RF signal output by the RF signal source 110 b is transmitted to the load 140 through the matcher 130 b to supply power to the load 140 .

[0054] The present application does not limit the specific structures of the above-mentioned load, transmission line and control device. For example, the load includes but is not limited to: plasma reaction chamber, etc. The transmission line includes but is not limited to: coaxial cable, waveguide, microwave transmission belt, twisted pair, copper wire, etc. The control device includes but is not limited to: central processing unit (CPU), etc.

[0055] The reference frequency value of the RF signal source in this application may change during application, or may not change. The signal detection device provided in the embodiment of this application can be applied to the scenarios where the reference frequency value of the RF signal source changes or does not change.

[0056] During the power transmission process, the impedance on the load side changes nonlinearly, and the power transfer situation needs to be monitored in real time. The embodiment of the present application provides a signal detection device, which can collect the signal at the monitoring point of the transmission line. The signal carries the current voltage, current and phase information at the monitoring point, and uses cancellation to remove the signal to be cancelled, detects the target signal in the signal, and then further converts the target signal into parameters such as forward power, reverse power, and reflection coefficient according to system requirements, and outputs it to the control device. The control device can adjust the relevant parameters of the matcher or the radio frequency signal source according to parameters such as forward power, reverse power, and reflection coefficient to ensure the maximum power transmission of the device. Alternatively, the control device can also determine the abnormal event sent by the load side according to parameters such as forward power, reverse power, and reflection coefficient, so as to timely control the reduction or shutdown of the radio frequency signal source, effectively reduce losses, and avoid damage to electronic equipment.

[0057] In the present application, one or more signal detection devices 200 may be provided, and one signal detection device may be provided corresponding to one transmission line to detect a target signal on the correspondingly provided transmission line. Figure 1 The signal detection device 200 corresponding to the transmission line 120a is used as an example for the description. Of course, another signal detection device may also be provided corresponding to the transmission line 120b.

[0058] Reference Figure 2 , Figure 2 A schematic diagram of the structure of a signal detection device provided by an embodiment of the present application. The signal detection device 200 may include: a collection unit 210, a spectrum shifting unit 220, a signal cancellation unit 230, and an output processing unit 240. The input end of the collection unit 210 and the transmission line 120a are coupled to obtain a signal, and the coupling point between the collection unit 210 and the transmission line 120a is used as a monitoring point TD, the output end of the collection unit 210 is connected to the input end of the spectrum shifting unit 220, the output end of the spectrum shifting unit 220 is connected to the input end of the signal cancellation unit 230, the output end of the signal cancellation unit 230 is connected to the input end of the output processing unit 240, and the output end of the output processing unit 240 is connected to the control device 150. The signal cancellation unit 230 uses a cancellation method to eliminate the point frequency signal with the frequency value to be cancelled in the radio frequency monitoring signal.

[0059] Exemplarily, the spectrum shifting unit 220, the signal cancellation unit 230 and the output processing unit 240 can be formed in a field programmable gate array (FPGA). Exemplarily, the acquisition unit 210 can collect one or more RF monitoring signals of the monitoring point, and the RF monitoring signal includes a plurality of point frequency signals with different frequency values, and the plurality of point frequency signals include a signal to be retained having at least one frequency value to be retained and a signal to be cancelled having at least one frequency value to be cancelled. And the present application takes the acquisition unit 210 collecting two RF monitoring signals with a phase difference as an example. Of course, the acquisition unit 210 and the corresponding transmission line 120a may not be in direct contact, but may be connected in a coupling manner, so that the acquisition unit 210 collects the RF monitoring signal of the monitoring point on the corresponding transmission line, that is, the coupling point can be used as a monitoring point.

[0060] In the embodiment of the present application, the multiple frequency signals include a signal to be retained having one frequency value to be retained and a signal to be cancelled having multiple frequency values ​​to be cancelled.

[0061] Continue to refer to Figure 2The acquisition unit 210 can acquire two RF monitoring signals T1' and T2' in the form of analog signals transmitted on the transmission line 120a. It is understandable that the two RF monitoring signals T1' and T2' may have a phase difference or may not have a phase difference, which is not limited here. The acquisition unit 210 then converts the RF monitoring signals T1' and T2' into digital signal forms through analog-to-digital conversion. Afterwards, the RF monitoring signals T1 and T2 are output to the spectrum shifting unit 220.

[0062] In some examples, the acquisition unit and the corresponding transmission line can be directly connected by a signal line connection (for example, by a cable), and the connection between the acquisition unit and the transmission line is used as a monitoring point. Alternatively, the acquisition unit and the corresponding transmission line can be connected by coupling without setting a signal line, so that the acquisition unit can collect the RF monitoring signal of the monitoring point on the corresponding transmission line, that is, the coupling point can be used as a monitoring point.

[0063] In some examples, the acquisition unit and the connection line between the matcher and the load may also be set correspondingly. Exemplarily, the acquisition unit and the connection line between the corresponding matcher and the load may be directly connected by a signal line connection method (for example, connected by a cable), and the connection point between the acquisition unit and the connection line between the matcher and the load may be used as a monitoring point. Alternatively, the acquisition unit and the connection line between the corresponding matcher and the load may not have a signal line, but may be connected by coupling, so that the acquisition unit collects the RF monitoring signal of the monitoring point on the connection line between the corresponding matcher and the load, that is, the coupling point may be used as a monitoring point.

[0064] In some examples, the acquisition unit is set corresponding to the RF signal source. Exemplarily, the acquisition unit and the corresponding RF signal source can be directly connected by a signal line connection method (for example, connected by a cable), and the connection between the acquisition unit and the RF signal source is used as a monitoring point. Alternatively, no signal line is set between the acquisition unit and the corresponding RF signal source, but a coupling method is used to connect them, so that the acquisition unit collects the RF monitoring signal of the monitoring point on the corresponding RF signal source, that is, the coupling point can be used as a monitoring point. Exemplarily, the signal detection device can also be integrated with the corresponding RF signal source, for example, the signal detection device is integrated in the corresponding RF signal source.

[0065] In some examples, the acquisition unit is set corresponding to the matcher. Exemplarily, the acquisition unit and the corresponding matcher can be directly connected by a signal line connection (for example, connected by a cable), and the connection between the acquisition unit and the matcher is used as a monitoring point. Alternatively, no signal line is set between the acquisition unit and the corresponding matcher, but a coupling method is used to connect them, so that the acquisition unit collects the RF monitoring signal of the monitoring point on the corresponding matcher, that is, the coupling point can be used as a monitoring point. Exemplarily, the signal detection device can also be integrated with the corresponding matcher, for example, the signal detection device is integrated in the corresponding matcher.

[0066] Reference Figure 4 , Figure 4 A schematic diagram of the structure of a signal detection device provided for another embodiment of the present application. The acquisition unit 210 may include: a coupler 211, signal conditioning circuits 212, 213, and an analog to digital converter (ADC) 214. Among them, the input end of the coupler 211 and the transmission line 120a are coupled to obtain the signal, the first output end of the coupler 211 is connected to the signal conditioning circuit 212, the second output end of the coupler 211 is connected to the signal conditioning circuit 213, the output ends of the signal conditioning circuits 212 and 213 are respectively connected to the input end of the ADC 214, and the output end of the ADC 214 is connected to the spectrum shifting unit 220. When working, the coupler 211 acquires two RF monitoring signals T1' and T2' from the transmission line 120a. The RF monitoring signal T1' is input to the signal conditioning circuit 212 for filtering and amplification to obtain the RF monitoring signal T1' in the required frequency range, and then output to the ADC 214 for analog-to-digital conversion to form the RF monitoring signal T1. Similarly, the RF monitoring signal T2 ′ is input to the signal conditioning circuit 213 for filtering and amplification to obtain the RF monitoring signal T2 ′ in the required frequency range, and then output to the ADC 214 for analog-to-digital conversion to form the RF monitoring signal T2 .

[0067] It is understandable that in a non-ideal scenario, the collected RF monitoring signal will be affected by the signal to be cancelled, so that the RF monitoring signals T1' and T2' include not only the reference signal with a reference frequency value (e.g., 13.56MHz) transmitted on the transmission line, but also the interference signal with the interference frequency value. After analog-to-digital conversion, the RF monitoring signals T1 and T2 also include the reference signal in the form of a digital signal with a reference frequency value (e.g., 13.56MHz) and the interference signal in the form of a digital signal with an interference frequency value. Exemplarily, the frequency value to be retained can include a reference frequency value (e.g., 13.56MHz), then the signal to be retained includes a reference signal with a reference frequency value (e.g., 13.56MHz), the frequency value to be cancelled includes an interference frequency value, then the signal to be cancelled includes an interference signal with an interference frequency value. Alternatively, the frequency value to be retained can also include an interference frequency value, then the signal to be retained includes an interference signal with the interference frequency value, the frequency value to be cancelled includes the reference frequency value and the remaining interference frequency values, then the signal to be cancelled includes the reference signal with the reference frequency value and the interference signal with the remaining interference frequency values. The following description is made by taking the frequency value to be retained including the reference frequency value (eg, 13.56 MHz) and the frequency value to be cancelled including the interference frequency value as an example, and the following description uses the reference frequency value as the frequency value to be retained and the reference signal as the signal to be retained.

[0068] Continue to refer to Figure 2 , the spectrum shifting unit 220 receives the RF monitoring signals T1 and T2, and shifts the spectrum of the RF monitoring signals T1 and T2 respectively and then outputs them. Optionally, the spectrum of the RF monitoring signals T1 and T2 can be shifted to the left or to the right respectively. Alternatively, the spectrum of the RF monitoring signal T1 can be shifted to the left, and the spectrum of the RF monitoring signal T2 can be shifted to the right. Alternatively, the spectrum of the RF monitoring signal T1 can be shifted to the right, and the spectrum of the RF monitoring signal T2 can be shifted to the left.

[0069] In the present application, in order to reduce the amount of calculation, the spectrum of the RF monitoring signals T1 and T2 can be shifted to the left as a whole, so that the reference frequency values ​​of the RF monitoring signals T1 and T2 are moved to the set frequency, forming the RF monitoring signals T1", T2" after the spectrum is shifted. Among them, the set frequency is set to 0±Δf, and Δf is the error frequency within the allowable error range, so that the set frequency can be equivalent to zero frequency, that is, it is equivalent to moving the reference frequency values ​​(for example, 13.56MHz) of the RF monitoring signals T1 and T2 to zero frequency, and the frequency values ​​to be cancelled of the remaining signals to be cancelled are moved to near zero frequency.

[0070] Take the RF monitoring signal T1 as an example, refer to Figure 3a and Figure 3b , Figure 3aA schematic diagram of a spectrum of a radio frequency monitoring signal before spectrum shifting provided in an embodiment of the present application. Figure 3b A schematic diagram of the spectrum of the RF monitoring signal after spectrum shifting is provided for one embodiment of the present application. f0 represents the reference frequency value of the RF monitoring signal T1 before spectrum shifting (e.g., 13.56 MHz), and f11, f12, f21, and f22 respectively represent the frequency values ​​to be canceled before spectrum shifting. f0' represents the set frequency of the RF monitoring signal T1 after spectrum shifting (e.g., 0 MHz), and f11', f12', f21', and f22' respectively represent the frequency values ​​to be canceled after spectrum shifting. Figure 3a and Figure 3b By shifting the entire spectrum to the left, the reference frequency value f0 and the frequency values ​​to be cancelled f11, f12, f21 and f22 can be uniformly shifted to the left, so that the reference frequency value f0 is moved to the set frequency f0' (for example, 0MHz), and the frequency values ​​to be cancelled f11, f12, f21 and f22 are respectively moved to frequencies f11', f12', f21' and f22' near the zero frequency.

[0071] Reference Figure 4 , the spectrum shifting unit 220 may include: shifting modules 221, 222 and a numerically controlled oscillator (NCO) 223. The input ends of the shifting modules 221, 222 are respectively connected to the output ends of the ADC 214 in the acquisition unit 210, the output ends of the shifting modules 221, 222 are respectively connected to the signal cancellation unit 230, and the NCO 223 is respectively connected to the shifting modules 221, 222. When working, the NCO 223 generates a shifting base signal with a reference frequency value (e.g., 13.56 MHz) according to the reference frequency value (e.g., 13.56 MHz), and outputs the shifting base signal to the shifting modules 221, 222, respectively. The shifting module 221 receives the RF monitoring signal T1, and mixes and filters the RF monitoring signal T1 with the shifting base signal to form a RF monitoring signal T1 after spectrum shifting. Similarly, the shifting module 222 receives the RF monitoring signal T2, and mixes and filters the RF monitoring signal T2 with the shifting base signal to form a RF monitoring signal T2 after spectrum shifting.

[0072] Optionally, the shifting modules 221 and 222 respectively include a connected multiplier and a low-pass filter (LPF). Exemplarily, the LPF includes but is not limited to a parameter-adjustable LPF.

[0073] Continue to refer to Figure 2The signal cancellation unit 230 receives the spectrum-shifted RF monitoring signals T1” and T2” output by the spectrum shifting unit 220. In order to further detect and obtain the target signal, the signal to be cancelled needs to be removed first. The signal cancellation unit 230 can obtain a specific frequency value, and generate a cancellation signal having the above-mentioned frequency values ​​to be cancelled f11', f12', f21' and f22' according to the specific frequency value, so that the cancellation signal in the present application is locally generated. In this way, the signals to be cancelled having the frequency values ​​to be cancelled f11', f12', f21' and f22' in the RF monitoring signals T1” and T2” are superimposed and cancelled with the cancellation signals, and the RF monitoring signals T1”' and T2” are obtained after the signals to be cancelled having the frequency values ​​to be cancelled f11', f12', f21' and f22' are removed, and the RF monitoring signals T1”' and T2”’ are output as target signals.

[0074] In the present application, the specific frequency value includes the reference frequency value of the radio frequency signal source that generates the above-mentioned frequency value to be cancelled in the electronic device. Exemplarily, the source of the specific frequency value is external acquisition or internal frequency self-detection, and the external acquisition includes but is not limited to periodic acquisition and trigger acquisition, wherein the periodic acquisition method includes but is not limited to repeated reception from the external period within a certain time interval; the trigger acquisition method includes but is not limited to sending the latest frequency value to the signal detection device externally when the specific frequency changes. Internal frequency self-detection includes setting a frequency detection module in the signal detection device, performing frequency point analysis through the frequency detection module, and further calculating the specific frequency value.

[0075] In some examples, in non-ideal scenarios, the signals to be cancelled in the RF monitoring signals T1' and T2' will have intermodulation signals to be cancelled based on the reference frequency value of the RF signal source 110b. Similarly, the signals to be cancelled in the RF monitoring signals T1", T2" after spectrum shifting will also have intermodulation signals to be cancelled, and the frequency of the intermodulation signals to be cancelled is the frequency value to be cancelled after spectrum shifting: ±A1*N, where A1 represents a first specific frequency value, and the first specific frequency value is the reference frequency value of the RF signal source 110b (e.g., 400kHz).

[0076] It is understandable that the signal cancellation unit 230 can directly obtain the reference frequency value of the RF signal source 110b. In this way, the specific frequency value obtained by the signal cancellation unit 230 includes the first specific frequency value A1, so that a cancellation signal of the frequency value to be cancelled that needs to be cancelled can be generated according to the first specific frequency value A1.

[0077] Exemplarily, N is an integer and N≥1, and the present application does not limit the specific value of N. For example, taking the first specific frequency value A1 as 400kHz as an example, if it is necessary to cancel the first-order intermodulation signal to be cancelled and the second-order intermodulation signal to be cancelled, f11' is used as the 400kHz first-order intermodulation signal to be cancelled, f12' is used as the -400kHz first-order intermodulation signal to be cancelled, f21' is used as the 800kHz second-order intermodulation signal to be cancelled, and f22' is used as the -800kHz second-order intermodulation signal to be cancelled. Based on this, a cancellation signal having frequency values ​​to be cancelled of ±400kHz and ±800kHz can be generated according to the stored first specific frequency value A1:400kHz, so that the ±400kHz first-order intermodulation signal to be cancelled and the ±800kHz second-order intermodulation signal to be cancelled can be superimposed and cancelled with the cancellation signals having ±400kHz and ±800kHz, respectively, to obtain the RF monitoring signals T1'' and T2'' after removing the intermodulation signals to be cancelled.

[0078] In some other examples, in non-ideal scenarios, the signals to be cancelled in the RF monitoring signals T1' and T2' may also have harmonic signals to be cancelled based on the reference frequency value of the RF signal source 110a. Similarly, the signals to be cancelled in the RF monitoring signals T1", T2" after spectrum shifting may also have harmonic signals to be cancelled, and the frequency of the harmonic signals to be cancelled is the frequency value to be cancelled after spectrum shifting: A2*M, where A2 represents a second specific frequency value, and the second specific frequency value is the reference frequency value of the RF signal source 110a (e.g., 13.56 MHz).

[0079] It is understandable that the signal cancellation unit 230 can directly obtain the reference frequency value of the RF signal source 110a. In this way, the specific frequency value obtained by the signal cancellation unit 230 includes the second specific frequency value A2, so that a cancellation signal of the frequency value to be cancelled that needs to be cancelled can be generated according to the first specific frequency value A2.

[0080] Exemplarily, M is an integer and M≥1, and the specific value of M is not limited in the present application. For example, taking the second specific frequency value A2 as 13.56MHz as an example, if it is necessary to cancel the first harmonic signal to be cancelled and the second harmonic signal to be cancelled, f11' is used as the 13.56MHz first harmonic signal to be cancelled, and f21' is used as the 27.12MHz second harmonic signal to be cancelled. Based on this, cancellation signals with frequency values ​​of 13.56MHz and 27.12MHz to be cancelled can be generated according to 13.56MHz. Thereby, the 13.56MHz first harmonic signal to be cancelled and the 27.12MHz second harmonic signal to be cancelled can be superimposed and cancelled with the cancellation signals with 13.56MHz and 27.12MHz, respectively, to obtain the RF monitoring signals T1"' and T2"' after removing the harmonic signals to be cancelled.

[0081] In some other examples, in non-ideal scenarios, the signals to be cancelled in the RF monitoring signals T1' and T2' may simultaneously contain intermodulation signals to be cancelled and harmonic signals to be cancelled. The specific process of removing the intermodulation signals to be cancelled and the harmonic signals to be cancelled by superposition cancellation processing can be referred to the above description and will not be repeated here.

[0082] Reference Figure 4 The signal cancellation unit 230 may include: a base generation module 233 and cancellation modules 231 and 232. The base generation module 233 is connected to the cancellation modules 231 and 232 respectively. The input end of the cancellation module 231 is connected to the output end of the moving module 221, the input end of the cancellation module 232 is connected to the output end of the moving module 222, and the output ends of the cancellation modules 231 and 232 are connected to the input end of the output processing unit 240.

[0083] Exemplarily, the basis generation module 233 may obtain a specific frequency value (e.g., 400 kHz), and generate a cancellation basis signal having a specific frequency value (e.g., 400 kHz) according to the obtained specific frequency value (e.g., 400 kHz), and output the generated cancellation basis signal to the cancellation modules 231 and 232. Exemplarily, the basis generation module 233 includes but is not limited to being an NCO.

[0084] Exemplarily, the cancellation module 231 may receive a cancellation base signal and a radio frequency monitoring signal T1″, and may generate a cancellation signal having a frequency value to be cancelled (such as f11', f12', f21' and f22') corresponding to the radio frequency monitoring signal T1″ according to the cancellation base signal, and then superimpose and cancel the signals to be cancelled having frequencies f11', f12', f21' and f22' in the radio frequency monitoring signal T1″ with the generated cancellation signal, to obtain a radio frequency monitoring signal T1″' after removing the signals to be cancelled having frequencies f11', f12', f21' and f22', and output the radio frequency monitoring signal T1″' as a target signal. Optionally, the cancellation module 231 may generate a plurality of cancellation initial signals with different frequencies according to the cancellation base signal and make the frequencies of the plurality of cancellation initial signals correspond one-to-one to the plurality of frequency values ​​to be cancelled, and then superimpose the plurality of cancellation initial signals to generate a cancellation signal. Optionally, an adaptive correction algorithm (for example, a least mean square algorithm) may be used. Square, LMS)) and generate multiple cancellation initial signals with different frequencies according to the cancellation basis signal. Furthermore, in order to update the algorithm coefficients in real time, the difference between the target signal output by the cancellation module 231 and its mean value can also be used as an error input to the adaptive correction algorithm corresponding to the cancellation module 231 to correct the adaptive correction algorithm, thereby realizing the local fitting and generation of the cancellation signal at the frequency value to be cancelled of the RF monitoring signal.

[0085] Similarly, the cancellation module 232 can receive the cancellation base signal and the RF monitoring signal T2", and can generate a cancellation signal having a frequency value to be cancelled (such as f11', f12', f21' and f22') corresponding to the RF monitoring signal T2" according to the cancellation base signal, and then superimpose and cancel the signals to be cancelled having frequencies f11', f12', f21' and f22' in the RF monitoring signal T2" with the generated cancellation signal to obtain the RF monitoring signal T2"' after removing the signals to be cancelled having frequencies f11', f12', f21' and f22', and output the RF monitoring signal T2"' as the target signal. Optionally, the cancellation module 232 can generate a plurality of cancellation initial signals with different frequencies according to the cancellation base signal and make the frequencies of the plurality of cancellation initial signals correspond to the plurality of frequency values ​​to be cancelled one by one, and then superimpose the plurality of cancellation initial signals to generate the cancellation signal. Optionally, an adaptive correction algorithm (for example, a least mean square algorithm) can be used. Square, LMS), and multiple cancellation initial signals with different frequencies are generated according to the cancellation basis signal. Furthermore, in order to update the algorithm coefficients in real time, the difference between the target signal output by the cancellation module and its mean value can also be used as an error input to the adaptive correction algorithm corresponding to the cancellation module 232 to correct the adaptive correction algorithm, thereby realizing the local fitting and generation of the cancellation signal at the frequency value to be cancelled of the RF monitoring signal.

[0086] Exemplarily, the adaptive correction algorithm includes but is not limited to: Least Mean Square (LMS) algorithm.

[0087] Continue to refer to Figure 2 and Figure 4 The output processing unit 240 receives two RF monitoring signals T1'' and T2'' output by the signal cancellation unit, and performs a series of calculations based on the two RF monitoring signals T1'' and T2'' to obtain the parameters of the electronic device transmission signal. The parameters include at least forward power, reverse power and reflection coefficient. In practical applications, other parameters can also be calculated, which are not limited here.

[0088] The signal detection device in the embodiment of the present application is based on the processing method of the time domain. Compared with the frequency domain FFT solution, it occupies less resources and has a smaller algorithm delay. Moreover, compared with the solution based on sine fitting, the complexity can be reduced. In addition, the group delay of the signal detection device 200 in the embodiment of the present application is as low as 1us. In summary, the signal detection device in the embodiment of the present application meets the scene requirements of high-precision and rapid detection, especially it can realize the rapid identification of abnormal events such as arcs in plasma reaction chambers, which is conducive to the timely response of power control and frequency sweeping.

[0089] Reference Figure 5 , Figure 5 The signal detection method provided in one embodiment of the present application can be applied to Figure 2 and Figure 4 The signal detection device shown includes the following steps:

[0090] S110, coupler 211 collects two RF monitoring signals T1' and T2' from transmission line 120a. The RF monitoring signal T1' is input into the signal conditioning circuit 212, and after filtering and amplification, the RF monitoring signal T1' in the required frequency range is obtained. The RF monitoring signal T1' is input into ADC 214, and after analog-to-digital conversion, a RF monitoring signal T1 in the form of a digital signal is formed. Similarly, the RF monitoring signal T2' is input into the signal conditioning circuit 213, and after filtering and amplification, a RF monitoring signal T2' in the required frequency range is obtained. The RF monitoring signal T2' is input into ADC 214, and after analog-to-digital conversion, a RF monitoring signal T2 in the form of a digital signal is formed. Thus, RF monitoring signals T1 and T2 in the form of digital signals are formed, and the RF monitoring signals T1 and T2 are output.

[0091] S120, NCO 223 generates a shifting base signal having a reference frequency value (e.g., 13.56MHz) according to the reference frequency value (e.g., 13.56MHz), and outputs the shifting base signal to the shifting modules 221 and 222, respectively. The shifting module 221 receives the RF monitoring signal T1, and mixes and filters the RF monitoring signal T1 and the shifting base signal to form a RF monitoring signal T1" after spectrum shifting. Similarly, the shifting module 222 receives the RF monitoring signal T2, and mixes and filters the RF monitoring signal T2 and the shifting base signal to form a RF monitoring signal T2" after spectrum shifting. Thus, RF monitoring signals T1" and T2" after spectrum shifting are formed, and the RF monitoring signals T1" and T2" are output.

[0092] S130 , the basis generation module 233 generates a cancellation basis signal according to a specific frequency value (eg 400 kHz).

[0093] S140, the cancellation module 231 can receive the cancellation base signal and the RF monitoring signal T1", generate a cancellation signal corresponding to the RF signal T1" according to the cancellation base signal, superimpose and cancel the RF monitoring signal T1" and the corresponding cancellation signal, and obtain the RF monitoring signal T1"' after removing the signals to be cancelled with the frequency values ​​f11', f12', f21' and f22'. Similarly, the cancellation module 232 can receive the cancellation base signal and the RF monitoring signal T2", generate a cancellation signal corresponding to the RF signal T2" according to the cancellation base signal, superimpose and cancel the RF monitoring signal T2" and the corresponding cancellation signal, and obtain the RF monitoring signal T2"' after removing the signals to be cancelled with the frequency values ​​f11', f12', f21' and f22'. In this way, the RF monitoring signals T1"' and T2"' can be obtained after removing the signals to be cancelled, and the RF monitoring signals T1"' and T2"' can be output.

[0094] For example, the cancellation module 231 adopts LMS to generate an initial cancellation signal having a frequency value f11' to be cancelled, an initial cancellation signal having a frequency value f12' to be cancelled, an initial cancellation signal having a frequency value f21' to be cancelled, and an initial cancellation signal having a frequency value f22' to be cancelled corresponding to the RF monitoring signal T1" according to the interference base, and superimposes these initial cancellation signals to generate a cancellation signal corresponding to the RF monitoring signal T1". The RF monitoring signal T1" and the corresponding cancellation signal are superimposed and cancelled to obtain the RF monitoring signal T1"' after removing the signals to be cancelled having the frequency values ​​f11', f12', f21' and f22' to be cancelled.

[0095] Similarly, the cancellation module 232 adopts LMS to generate an initial cancellation signal having a frequency value f11' to be cancelled, an initial cancellation signal having a frequency value f12' to be cancelled, an initial cancellation signal having a frequency value f21' to be cancelled, and an initial cancellation signal having a frequency value f22' to be cancelled corresponding to the RF monitoring signal T2" according to the interference floor, and superimposes these initial cancellation signals to generate a cancellation signal corresponding to the RF monitoring signal T2". The RF monitoring signal T2" and the corresponding cancellation signal are superimposed and cancelled to obtain the RF monitoring signal T2"' after removing the signals to be cancelled having the frequency values ​​f11', f12', f21' and f22'.

[0096] S150 , the output processing unit 240 receives the radio frequency monitoring signals T1 ′″ and T2 ′″, and calculates the forward power, the reverse power and the reflection coefficient according to the two radio frequency monitoring signals T1 ′″ and T2 ′″.

[0097] Reference Figure 6 and Figure 7 , Figure 6A schematic diagram of the structure of a signal detection device provided in yet another embodiment of the present application is shown. Figure 7 A schematic diagram of the structure of a signal detection device provided in another embodiment of the present application. The signal detection device 200 may include: a collection unit 210, a signal cancellation unit 230, and an output processing unit 240. This embodiment is a modification of the implementation method in the above embodiment. The following only describes the differences between this embodiment and the above embodiment, and the similarities are not repeated here.

[0098] Reference Figure 6 and Figure 7 In the embodiment of the present application, no spectrum shifting unit is provided, but the output end of the acquisition unit 210 is directly connected to the input end of the signal cancellation unit 230, that is, the output end of the ADC 214 is respectively connected to the cancellation modules 231 and 232. With this configuration, the point frequency signals with the frequency values ​​to be cancelled in the RF monitoring signals T1 and T2 can be directly eliminated by cancellation without spectrum shifting.

[0099] For example, in combination Figure 3a The signal cancellation unit 230 receives the RF monitoring signals T1 and T2, and can generate cancellation signals with the frequency values ​​to be cancelled f11, f12, f21 and f22 according to the selected specific frequency values, and then superimposes and cancels the signals to be cancelled with the frequency values ​​to be cancelled f11, f12, f21 and f22 in the RF monitoring signals T1 and T2, to obtain the RF monitoring signals T1"", T2"" after removing the signals to be cancelled with the frequency values ​​to be cancelled f11, f12, f21 and f22, and outputs the RF monitoring signals T1"", T2"" as target signals. Then, the output processing unit 240 can perform a series of calculations based on the two RF monitoring signals T1"", T2"", and can calculate the forward power, reverse power and reflection coefficient.

[0100] In some examples, the frequency value of the intermodulation signal to be cancelled between the RF monitoring signals T1 and T2 can be: A2±A1*P, where A1 represents a first specific frequency value, A2 represents a second specific frequency value, and the first specific frequency value is the reference frequency value of the RF signal source 110b (e.g., 400kHz), and the second specific frequency value is the reference frequency value of the RF signal source 110a (e.g., 13.56MHz).

[0101] Exemplarily, P is an integer and P≥1, and the present application does not limit the specific value of P. For example, taking the first specific frequency value A1 as 400kHz and the second specific frequency value A2 as 13.56MHz as an example, if it is necessary to cancel the first-order intermodulation signal to be cancelled and the second-order intermodulation signal to be cancelled, f11 is used as the first-order intermodulation signal to be cancelled of 13.56MHz+400kHz, f12 is used as the first-order intermodulation signal to be cancelled of 13.56MHz-400kHz, f21 is used as the second-order intermodulation signal to be cancelled of 13.56MHz+800kHz, and f22 is used as the second-order intermodulation signal to be cancelled of 13.56MHz-800kHz. Based on this, according to the stored first specific frequency value A1: 400kHz and the second specific frequency value A2: 13.56MHz, cancellation signals with frequency values ​​to be cancelled of 13.56MHz±400kHz and 13.56MHz±800kHz can be generated, so that the first-order intermodulation signal to be cancelled of 13.56MHz±400kHz and the second-order intermodulation signal to be cancelled of 13.56MHz±800kHz can be superimposed and cancelled with the cancellation signals with 13.56MHz±400kHz and 13.56MHz±800kHz respectively, and then the RF monitoring signals T1"" and T2"" after removing the intermodulation signals to be cancelled are obtained.

[0102] In some other examples, the frequency value of the harmonic cancellation signal in the RF monitoring signals T1 and T2 may be: A2*Q, where A2 represents a second specific frequency value, and the second specific frequency value is a reference frequency value (eg, 13.56 MHz) of the RF signal source 110a.

[0103] Exemplarily, Q is an integer and Q ≥ 2, and the specific value of Q is not limited in the present application. For example, taking the second specific frequency value A2 of 13.56 MHz as an example, if it is necessary to cancel the first harmonic signal to be cancelled and the second harmonic signal to be cancelled, f11 is used as the 27.12 MHz first harmonic signal to be cancelled, and f21 is used as the 40.68 MHz second harmonic signal to be cancelled. Based on this, cancellation signals with frequency values ​​of 27.12 MHz and 40.68 MHz to be cancelled can be generated according to 13.56 MHz. Thereby, the 27.12 MHz first harmonic signal to be cancelled and the 40.68 MHz second harmonic signal to be cancelled can be superimposed and cancelled with the cancellation signals with 27.12 MHz and 40.68 MHz, respectively, to obtain the RF monitoring signals T1"" and T2"" after removing the harmonic signals to be cancelled.

[0104] Reference Figure 8 , Figure 8 The signal detection method provided in one embodiment of the present application can be applied to Figure 6 and Figure 7 The signal detection device shown includes the following steps:

[0105] S210 is basically the same as the above step S110 and will not be described in detail here.

[0106] S220 is basically the same as the above step S130 and will not be described in detail here.

[0107] S230, the cancellation module 231 can receive the cancellation base signal and the RF monitoring signal T1", generate a cancellation signal corresponding to the RF signal T1" according to the cancellation base signal, superimpose and cancel the RF monitoring signal T1" and the corresponding cancellation signal, and obtain the RF monitoring signal T1"' after removing the signals to be cancelled with the frequency values ​​f11, f12, f21 and f22 to be cancelled. Similarly, the cancellation module 232 can receive the cancellation base signal and the RF monitoring signal T2", generate a cancellation signal corresponding to the RF signal T2" according to the cancellation base signal, superimpose and cancel the RF monitoring signal T2" and the corresponding cancellation signal, and obtain the RF monitoring signal T2"' after removing the signals to be cancelled with the frequency values ​​f11, f12, f21 and f22 to be cancelled. In this way, the RF monitoring signals T1"' and T2"' can be obtained after removing the signals to be cancelled, and the RF monitoring signals T1"' and T2"' can be output.

[0108] For example, the cancellation module 231 uses LMS to generate an initial cancellation signal having a frequency value f11 to be cancelled, an initial cancellation signal having a frequency value f12 to be cancelled, an initial cancellation signal having a frequency value f21 to be cancelled, and an initial cancellation signal having a frequency value f22 to be cancelled corresponding to the RF monitoring signal T1" according to the interference base, and superimposes these initial cancellation signals to generate a cancellation signal corresponding to the RF monitoring signal T1". The RF monitoring signal T1" and the corresponding cancellation signal are superimposed and cancelled to obtain a RF monitoring signal T1"' after removing the signals to be cancelled having the frequency values ​​f11, f12, f21 and f22 to be cancelled.

[0109] Similarly, the cancellation module 232 adopts LMS to generate an initial cancellation signal having a frequency value f11 to be cancelled, an initial cancellation signal having a frequency value f12 to be cancelled, an initial cancellation signal having a frequency value f21 to be cancelled, and an initial cancellation signal having a frequency value f22 to be cancelled corresponding to the RF monitoring signal T2" according to the interference floor, and superimposes these initial cancellation signals to generate a cancellation signal corresponding to the RF monitoring signal T2". The RF monitoring signal T2" and the corresponding cancellation signal are superimposed and cancelled to obtain a RF monitoring signal T2"' after removing the signals to be cancelled having frequency values ​​f11, f12, f21 and f22.

[0110] S240 is basically the same as the above step S150 and will not be described in detail here.

[0111] Based on this, the present application also provides a signal detection method, such as Fig. 9 As shown, including:

[0112] S10. Collect at least one radio frequency monitoring signal from a monitoring point in the electronic device; the at least one radio frequency monitoring signal includes a plurality of point frequency signals with different frequency values, and the plurality of point frequency signals include a signal to be retained having at least one frequency value to be retained and a signal to be cancelled having at least one frequency value to be cancelled.

[0113] S20, generating a cancellation signal having at least one frequency value to be cancelled according to a specific frequency value, superimposing and canceling the signal to be cancelled in each RF monitoring signal with the cancellation signal, and outputting a target signal; the specific frequency value includes a reference frequency value of a RF signal source that generates the frequency value to be cancelled in the electronic device.

[0114] It can be understood that the working principle and specific implementation of the above-mentioned signal detection method are the same as the principle and implementation of the signal detection device in the above-mentioned embodiment. Therefore, the working method of the signal detection method can be implemented with reference to the specific implementation of the signal detection device in the above-mentioned embodiment, which will not be repeated here.

[0115] The present application also provides an electronic device, comprising: one or more RF signal sources, one or more transmission lines, at least one matcher, and one or more signal detection devices in any of the above technical solutions. The RF signal sources correspond one-to-one to the transmission lines and the matchers, and each RF signal source is connected to the corresponding matcher through the corresponding transmission line, and the matcher is connected to the load to supply power to the load. In addition, at least one signal detection device corresponds one-to-one to at least one transmission line, and the acquisition unit in the signal detection device is used to collect the RF monitoring signal of the corresponding transmission line, so as to detect and obtain the target signal through the signal detection device.

[0116] The above contents are only specific implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. A signal detection device, characterized in that: include: Acquisition unit and signal cancellation unit; The collecting unit is used to collect at least one radio frequency monitoring signal from a monitoring point in the electronic device, and output each of the collected radio frequency monitoring signals, wherein the at least one radio frequency monitoring signal includes a plurality of point frequency signals with different frequency values, and the plurality of point frequency signals include a signal to be retained having at least one frequency value to be retained and a signal to be cancelled having at least one frequency value to be cancelled; The signal cancellation unit is connected to the acquisition unit, and is used to: receive each of the RF monitoring signals output by the acquisition unit, generate a cancellation signal having at least one frequency value to be cancelled according to a specific frequency value, superimpose and cancel the signal to be cancelled in each of the RF monitoring signals with the cancellation signal, and output a target signal; the specific frequency value includes a reference frequency value of a RF signal source in the electronic device that generates the frequency value to be cancelled.

2. The signal detection device according to claim 1, characterized in that: The signal cancellation unit comprises: a base generation module and at least one cancellation module; the number of the at least one RF monitoring signal collected by the collection unit is the same as the number of the at least one cancellation module, and each of the cancellation modules is used to process a corresponding RF monitoring signal; The basis generation module is connected to the at least one cancellation module, and is used to: generate a cancellation basis signal having the specific frequency value according to the specific frequency value, and output the generated cancellation basis signal to the at least one cancellation module; The at least one cancellation module is respectively connected to the acquisition unit, and each of the cancellation modules is used to: receive the cancellation base signal and the corresponding RF monitoring signal, generate a cancellation signal having the at least one frequency value to be cancelled according to the cancellation base signal, and superimpose and cancel the signal to be cancelled in the corresponding RF monitoring signal with the generated cancellation signal, and output the corresponding target signal.

3. The signal detection device according to claim 2, characterized in that: The cancellation module generates a cancellation signal having the at least one to-be-cancelled frequency value according to the cancellation basis signal, specifically comprising: Generate at least one cancellation initial signal according to the cancellation basis signal, wherein a frequency value of the at least one cancellation initial signal corresponds to the at least one frequency value to be cancelled in a one-to-one manner; The cancellation signal is generated after processing the at least one cancellation initial signal.

4. The signal detection device according to claim 3, characterized in that: The cancellation module generates a cancellation initial signal according to the cancellation basis signal, specifically comprising: An adaptive correction algorithm is used to generate a cancellation initial signal according to the cancellation base signal.

5. The signal detection device according to claim 4, characterized in that: The cancellation module is further used for: The difference between the target signal output by the cancellation module and its mean value is input into the adaptive correction algorithm as an error to correct the adaptive correction algorithm.

6. The signal detection device according to any one of claims 1 to 5, characterized in that: The signal detection device further includes: a spectrum shifting unit, through which the acquisition unit is connected to the signal cancellation unit; The spectrum shifting unit is used to shift the spectrum of each of the radio frequency monitoring signals and send the shifted spectrum to the signal cancellation unit.

7. The signal detection device according to claim 6, characterized in that: The spectrum shifting unit is specifically used to: shift the spectrum of each of the RF monitoring signals to the left so that the to-be-retained frequency value of each of the RF monitoring signals is moved to a set frequency, where the set frequency is 0±Δf, and Δf is an error frequency within an allowable error range.

8. The signal detection device according to claim 7, characterized in that: The electronic device includes a plurality of radio frequency signal sources; The specific frequency value includes: a first specific frequency value, which is a reference frequency value of the remaining RF signal sources among the multiple RF signal sources except the RF signal source corresponding to the acquisition unit; The frequency value to be retained includes: at least one of a second specific frequency value and ±A1*N, the second specific frequency value is a reference frequency value of the radio frequency signal source corresponding to the acquisition unit, A1 represents the first specific frequency value, and N is an integer and N≥1; The frequency values ​​to be cancelled include: the second specific frequency value and frequency values ​​in ±A1*N except the frequency value to be retained.

9. The signal detection device according to claim 7, characterized in that: The electronic device includes at least one radio frequency signal source; The specific frequency value includes: a second specific frequency value, the second specific frequency value is a reference frequency value of the radio frequency signal source corresponding to the acquisition unit; The frequency value to be retained includes: at least one of the second specific frequency value and A2*M, where A2 represents the second specific frequency value, and M is an integer and M≥1; The frequency values ​​to be cancelled include: the second specific frequency value and frequency values ​​in A2*M except the frequency value to be retained.

10. The signal detection device according to claim 7, characterized in that: The electronic device includes a plurality of radio frequency signal sources; the specific frequency value includes: a first specific frequency value and a second specific frequency value, the first specific frequency value being a reference frequency value of the remaining radio frequency signal sources among the plurality of radio frequency signal sources except the radio frequency signal source corresponding to the acquisition unit, and the second specific frequency value being a reference frequency value of the radio frequency signal source corresponding to the acquisition unit; The frequency value to be retained includes: the second specific frequency value, at least one of ±A1*N and A2*M, wherein A1 represents the first specific frequency value, N is an integer and N≥1, A2 represents the second specific frequency value, and M is an integer and M≥1; The frequency values ​​to be cancelled include: the second specific frequency value, frequency values ​​among ±A1*N and A2*M except the frequency value to be retained.

11. The signal detection device according to any one of claims 1 to 5, characterized in that: The electronic device includes a plurality of radio frequency signal sources; the specific frequency value includes: a first specific frequency value and a second specific frequency value, the first specific frequency value being a reference frequency value of the remaining radio frequency signal sources among the plurality of radio frequency signal sources except the radio frequency signal source corresponding to the acquisition unit, and the second specific frequency value being a reference frequency value of the radio frequency signal source corresponding to the acquisition unit; The frequency value to be retained includes: at least one of the second specific frequency value and A2±A1*P, wherein A1 represents the first specific frequency value, A2 represents the second specific frequency value, and P is an integer and P≥1; the frequency value to be cancelled includes: the frequency value of the second specific frequency value and A2±A1*P except the frequency value to be retained; or, The frequency value to be retained includes: at least one of the second specific frequency value, A2±A1*P and A2*Q, where Q is an integer and Q≥2; the frequency value to be canceled includes: the frequency values ​​of the second specific frequency value, A2±A1*P and A2*Q except the frequency value to be retained.

12. The signal detection device according to any one of claims 1 to 5, characterized in that: The electronic device includes at least one radio frequency signal source; The specific frequency value includes: a second specific frequency value, the second specific frequency value is a reference frequency value of the radio frequency signal source corresponding to the acquisition unit; The frequency value to be retained includes: at least one of the second specific frequency value and A2*Q, where A2 represents the second specific frequency value, Q is an integer and Q≥2; The frequency values ​​to be cancelled include: the second specific frequency value and frequency values ​​in A2*Q except the frequency value to be retained.

13. The signal detection device according to any one of claims 1 to 12, characterized in that: The number of radio frequency monitoring signals collected by the collection unit is two; The signal detection device also includes: an output processing unit, which is connected to the signal cancellation unit and is used to: receive a target signal corresponding to the two RF monitoring signals output by the signal cancellation unit, and calculate parameters of the electronic device transmission signal based on the target signal corresponding to the two RF monitoring signals, wherein the parameters include at least forward power, reverse power and reflection coefficient.

14. A signal detection method, characterized in that: include: Collecting at least one radio frequency monitoring signal from a monitoring point in the electronic device; The at least one RF monitoring signal includes a plurality of frequency signals with different frequency values, wherein the plurality of frequency signals include a signal to be retained having at least one frequency value to be retained and a signal to be cancelled having at least one frequency value to be cancelled; A cancellation signal having at least one frequency value to be cancelled is generated according to a specific frequency value, the signal to be cancelled in each of the radio frequency monitoring signals is superimposed and cancelled with the cancellation signal, and a target signal is output; the specific frequency value includes a reference frequency value of a radio frequency signal source that generates the frequency value to be cancelled in the electronic device.

15. An electronic device, characterized in that: comprising at least one radio frequency signal source, at least one transmission line, at least one matcher and at least one signal detection device according to any one of claims 1 to 13; The at least one RF signal source, the at least one transmission line and the at least one matcher correspond one to one, and each of the RF signal sources is connected to the corresponding matcher through the corresponding transmission line, the at least one matcher is connected to a load, the at least one signal detection device corresponds one to one to the at least one transmission line, and the acquisition unit in the signal detection device is used to acquire the RF monitoring signal of the corresponding transmission line.

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