Discharge system for generating dust plasma

Abstract

The invention discloses a discharge system for generating dust plasma. The system comprises a particle conveyor, a dust plasma discharge device, an external gas component and a vacuum subsystem, wherein the external gas component is communicated with the second dust particle output port of the particle conveyor and is used for mixing the introduced gas and dust particles into dust gas; a dust gas input end of the dust plasma discharge device is communicated with a second dust particle output port of the particle conveyor through a connecting pipeline, and the dust plasma discharge device is used for discharging dust gas to form dust plasma; and the vacuum subsystem is used for forming a vacuum environment in the system. According to the system, the purity of dust particles and the distribution uniformity of the dust particles in the ionization chamber can be effectively guaranteed, the energy of dust plasma beams is improved, and the parameters of the beams are flexibly controlled.

Description

Technical Field

[0001] The invention belongs to the field of plasma technology, and in particular relates to a discharge system for generating dust plasma. Background Art

[0002] The information provided in this section is for the purpose of generally presenting the background of the present disclosure. To the extent described in this section, the work of the presently named inventors and aspects of the description that may not constitute prior art at the time of filing are neither explicitly nor implicitly admitted to be prior art to the present disclosure.

[0003] Dust plasma has a wide range of applications in basic research and industrial production, such as plasma technology, material processing, semiconductor manufacturing and other fields. Traditional dust plasma discharge devices mainly separate gas and dust and introduce them into the cavity, but this often leads to uneven particle distribution at the initial position. Moreover, all existing dust plasma devices only use post-ionization to generate atmospheric dust plasma, that is, pre-ionizing the gas to form plasma, and then mixing the dust particles into the pre-ionized gas plasma to finally form dust plasma. Although the system is simple to make and has a single structure, it is only suitable for dust plasma application scenarios with low density and low precision, such as qualitatively explaining the transmission problem of electromagnetic waves in dust plasma, but it cannot be applied to situations that require stable discharge or high plasma density and temperature requirements, which seriously limits the scope of application of the equipment.

[0004] Theoretically, the free path of ionized ions and electrons in air is about 100 times shorter than that in vacuum, so the recombination degree of ionized ions is high and the recombination time is short, making it difficult to form a high-density plasma with a long relaxation time. In addition, atmospheric discharge is characterized by high instability, and the stability of the dust plasma beam formed is extremely poor, which is not suitable for most practical scientific research and application scenarios.

[0005] Therefore, achieving effective operation of dust plasma in a vacuum is an urgent solution needed in scientific research and engineering. Summary of the invention

[0006] The purpose of the present invention is to provide a discharge system for generating dust plasma. The system of the present invention can effectively ensure the purity of particles and the uniformity of distribution in the ionization chamber, improve the energy of the dust plasma beam, flexibly control the parameters of the beam, etc.

[0007] In order to achieve the above-mentioned purpose, the present invention provides a discharge system for generating dust plasma, which comprises: a particle transporter, a dust plasma discharge device, an external gas component and a vacuum subsystem; wherein the external gas component is connected to the second dust particle output port of the particle transporter, and is used to mix the introduced gas with dust particles into dust gas; the dust gas input end of the dust plasma discharge device is connected to the second dust particle output port of the particle transporter through a connecting pipe, and is used to discharge the dust gas to form dust plasma; the vacuum subsystem is used to form a vacuum environment in the system; the particle transporter comprises: a transport platform, which has a moving cavity, and the plane of the bottom of the moving cavity is inclined at an angle to the gravity direction, and one end of the bottom of the moving cavity is provided with a second dust particle output port, and a mesh screen is provided at the second dust particle output port to screen the output dust. The particle size of the particles; a particle storage component, which is arranged in the mobile cavity and can move horizontally along the mobile cavity, and the bottom of the particle storage component is provided with a first dust particle output port which is a distance away from the second dust particle output port. When the dust particles are in the output closed state, the first dust particle output port is in contact with the bottom inclined plane of the mobile cavity to close the first dust particle output port; a transparent quartz panel, which is detachably fixed at the opening of the mobile cavity of the transport platform and is used to seal the mobile cavity; a three-way pipe, whose three interfaces are a dust particle input port, a gas input port and a gas output port, and the gas input port and the gas output port correspond to each other, the dust particle input port is connected to the second dust particle output port, and the gas input port is connected to the external gas component; and a vibration table, which is used to control the vibration of the transport platform to transport the dust particles to the second dust particle output port through vibration. The vacuum subsystem comprises: a vacuum chamber, which is connected to the dust plasma output end of the dust plasma discharge device and the moving cavity of the particle transporter respectively; and a vacuum pump, which is connected to the vacuum chamber and is used to achieve a vacuum environment of the vacuum chamber.

[0008] Preferably, the dust plasma discharge device comprises: a shell; a discharge chamber, which is fixed in the shell and has a dust gas input end and a dust plasma output end, the dust gas input end is connected to the second dust particle output port through a connecting pipe, and the dust plasma output end is connected to the vacuum chamber; a cathode, which is arranged at the input end of the discharge chamber and is used to generate a high voltage to ionize the ionized dust gas; an anode, which is arranged at the output end of the discharge chamber, an insulating layer is arranged between the anode and the shell, and the anode and the shell are grounded respectively; and a DC power supply, whose negative and positive poles are electrically connected to the cathode and the anode respectively.

[0009] Preferably, the cathode is fixed at one end of the shell at a position corresponding to the input end of the discharge chamber, and the anode is fixed at the other end of the shell at a position corresponding to the output end of the discharge chamber; a stainless steel plate is used for the side of the shell connected to the cathode; or / and, the cathode uses a tungsten needle; or / and, the anode is composed of a plurality of annular polytetrafluoroethylene disks and annular copper disks alternately combined, and a gas channel is formed in the middle of the annular polytetrafluoroethylene disk and the annular copper disk; or / and, the discharge chamber is a quartz discharge chamber; or / and, the shell is made of quartz.

[0010] Preferably, the system further comprises: a cooling subsystem, the cooling subsystem comprising a circulating water path arranged on the stainless steel plate, the anode and the vacuum chamber of the shell, and all the water paths are interconnected to form a whole; a plurality of interconnected channels are distributed inside the annular copper disk, and the channels serve as the circulating water path of the anode.

[0011] Preferably, the particle storage component has a funnel-shaped cavity, and the first dust particle output port is arranged at the bottom of the funnel-shaped cavity; or / and, the two side walls of the particle storage component parallel to its moving direction are parallel to and fit with the inner wall of the moving cavity; or / and, the plane of the bottom of the mobile cavity is inclined at an angle of 5~8° to the direction of gravity; or / and, the inclination direction of the bottom of the mobile cavity is that the bottom position of the mobile cavity corresponding to the first dust particle output port is lower than the bottom position of the mobile cavity corresponding to the second dust particle output port; or / and, dust particle flow channels with shrinking openings are arranged on both sides of the bottom of the mobile cavity along the conveying direction of the dust particles.

[0012] Preferably, a two-way valve is provided on the pipeline of the connecting pipeline, a first interface of the two-way valve is connected to the gas output port of the particle transporter, and a second interface thereof is connected to the dust gas input end of the dust plasma discharge device, and the two-way valve is used to control the transmission of the dust gas of the particle transporter to the dust plasma discharge device; or / and, the three-way pipeline is fixedly arranged at the second dust particle output port; or / and, the pipelines where the gas input port and the gas output port are located are inclined at an angle, and the gas input port is higher than the gas output port; or / and, a baffle is provided at the connection between the dust particle input port and the second dust particle output port, and a gap is left between the baffle and the second dust particle output port for the output of dust particles and preventing gas from flowing into the mobile cavity.

[0013] Preferably, a linear moving platform is provided in the moving cavity, and the linear moving platform is fixedly connected to the particle storage component and is used to control the horizontal movement of the particle storage component in the moving cavity.

[0014] Preferably, an adjusting knob is provided on the outer wall of the transport platform, and an end of the adjusting knob passes through the outer wall of the transport platform and is connected to the linear moving platform, so as to drive the horizontal movement of the linear moving platform.

[0015] Preferably, the vibration table is fixed to the bottom of the transport platform, and a vibrator is arranged inside the vibration table for controlling the vibration of the transport platform.

[0016] Preferably, a Langmuir probe is arranged on the side wall of the vacuum chamber for plasma density diagnosis; or / and, a quartz glass window is arranged on the side wall of the vacuum chamber; or / and, a sample holder is arranged in the vacuum chamber, and a displacement platform is arranged on the side wall of the vacuum chamber, and the displacement platform is connected to the sample holder for horizontally moving the sample holder; or / and, the vacuum pump adopts a vacuum pump group, including a Roots pump and a mechanical pump.

[0017] The discharge system for generating dust plasma of the present invention has the following advantages: (1) The present invention is the first to design a system that can achieve stable output of dust particles, which improves the temporal and spatial uniformity of the flow of dust particles in the pipeline. The key technology is to use piezoelectric vibration to adjust the movement of dust and the uniformity of the movement of particles in the transport channel. The mesh output port is used to ensure the uniformity of the output time of dust particles, and finally ensure that the ratio of dust particles to gas in the formed mixture remains relatively constant. (2) The present invention uses a mixture of dust and gas for the first time to complete discharge under vacuum conditions. The existing technology mainly completes gas discharge under atmospheric conditions and then places dust particles near the nozzle of the plasma beam. The disadvantages are: on the one hand, the density of the plasma is low, which is determined by the free path of the air; on the other hand, it is difficult for the already formed plasma to fully ionize and dissociate with the dust particles in time, and the airflow will also affect the uniformity of the distribution of dust particles, making it difficult to quantitatively evaluate the relationship between the dust plasma parameters and the preset initial conditions. The system of the present invention ensures the spatiotemporal stability of the distribution of dust particles in a vacuum in advance, and designs a connector between the particle transporter and the vacuum chamber so that the two are always in an isobaric state, further ensuring uniform mixing with the ionized gas. Under vacuum conditions, the free path of gas and ions is extended, which means a longer collision time, which is conducive to increasing the density of the dust plasma;

[0018] (3) Traditional research generally assumes that dust particles are in a uniform fully ionized plasma. In fact, in most physical environments, such as the plasma sheath of a hypersonic vehicle and a fusion reactor, dust particles and the plasma formation process exist simultaneously. It is difficult for existing methods to simulate these physical environments. The device of the present invention uses a mixture of dust and gas to complete discharge under vacuum conditions, which is closer to the objective physical environment. (4) The present invention uses transparent glass to design a discharge chamber. The charging and discharging behavior of dust particles in plasma is closely related to factors such as dust size, type, plasma density and temperature. The use of a transparent discharge chamber is conducive to directly collecting corresponding electromagnetic signals and more intuitively studying the physical and chemical process of dust particles and gas molecules forming plasma in the cavity.

[0019] (5) The system of the present invention can ensure that the particle transporter and the plasma discharge chamber are in the vacuum subsystem, realize dust plasma discharge under vacuum conditions, and meet the needs of most dust plasma application scenarios; improve the dust plasma parameters under atmospheric conditions; the free path of the gas in the vacuum environment is relatively long, which is conducive to the full ionization and reaction of dust particles and gases; can realize the emission of dust plasma beams with ultra-long pulse width; realize in-situ dust plasma discharge, that is, the neutral gas and dust particles are pre-evenly mixed and then injected into the discharge chamber at the same time, to ensure the sufficiency and uniformity of the ionization of dust particles and gases; realize the combined discharge of multiple types of gases and dust particles, and can freely obtain multiple types of dust plasma; realize the automatic and uniform transportation of dust particles of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional schematic diagram of the particle transporter of the present invention.

[0021] Figure 2 It is a three-dimensional schematic diagram of the partial structure of the particle transporter of the present invention.

[0022] Figure 3 FIG. 1 is a top view of the particle transporter of the present invention.

[0023] Figure 4 The cross section of the particle transporter of the present invention is Figure 1 .

[0024] Figure 5 The cross section of the particle transporter of the present invention is Figure 2 .

[0025] Figure 6 It is a schematic diagram of the structure of the discharge system for generating dust plasma according to the present invention.

[0026] Label: 100, particle transporter; 110, transport platform; 111, second dust particle output port; 113, baffle; 120, transparent quartz panel; 130, particle storage component; 131, first dust particle output port; 140, three-way pipe; 141, dust particle input port; 142, gas input port; 143, gas output port; 150, vibration table; 210, shell; 220, discharge chamber; 221, cathode; 222, anode; 300, external gas component; 400, connecting pipe; 500, two-way valve; 600, vacuum chamber; 610, Langmuir probe; 620, displacement platform; 630, sample holder; 700, vacuum pump. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] The features mentioned in the present invention can be combined arbitrarily, as long as there is no contradiction in the combination of these features, all possible combinations should be considered as the scope of this specification. Each feature disclosed in the specification can be replaced by any alternative feature that can provide the same, equal or similar purpose. Therefore, unless otherwise specified, the disclosed features are only general examples of equal or similar features.

[0029] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Example 1 A discharge system for producing dust plasma, see Figures 1 to 6The system comprises: a particle transporter 100, a dust plasma discharge device, an external gas component 300 and a vacuum subsystem. Among them, the external gas component 300 is connected to the second dust particle output port 111 of the particle transporter 100, and is used to mix the gas introduced with the dust particles into dust gas; the dust gas input end of the dust plasma discharge device is connected to the second dust particle output port 111 of the particle transporter 100 through a connecting pipe 400, and the dust plasma discharge device is used to discharge the dust gas to form dust plasma; the vacuum subsystem is used to form a vacuum environment in the system. At present, the plasma generated in the atmospheric environment is difficult to meet the requirements for plasma density, and the ions recombine quickly, which cannot meet the simulation requirements, such as the simulation of plasma formed by the sheath of a hypersonic aircraft. The present invention places the entire system in the same vacuum environment, and the free path of electrons in the gas in the vacuum environment is increased, and the electrons are more likely to escape from the electric field, thereby forming a stable plasma.

[0031] Exemplarily, the external gas component 300 contains high-pressure gas, including argon, helium, nitrogen or hydrogen.

[0032] See also Figures 1 to 5 The particle transporter 100 comprises: a transport platform 110, a particle storage component 130, a transparent quartz panel 120, a three-way pipe 140 and a vibration table 150. The transport platform 110 has a movable cavity, and the plane of the bottom of the movable cavity is inclined at an angle to the gravity direction. A second dust particle outlet 111 is provided at one end of the bottom of the movable cavity, and a mesh screen is provided at the second dust particle outlet 111 to screen the particle size of the output dust particles. The particle storage component 130 is arranged in the movable cavity and can move horizontally along the movable cavity. A first dust particle outlet 131 is provided at its bottom at a distance from the second dust particle outlet 111. When the dust particles are in the output closed state, the first dust particle outlet 131 fits with the inclined plane of the bottom of the movable cavity to close the first dust particle outlet 131. The transparent quartz panel 120 is detachably fixed to the opening of the moving cavity of the transport platform 110, and is used to seal the moving cavity, and the transparent quartz panel is convenient for observing dust particles. The three interfaces of the three-way pipe 140 are respectively a dust particle input port 141, a gas input port 142 and a gas output port 143, and the gas input port 142 corresponds to the gas output port 143. The dust particle input port 141 is connected to the second dust particle output port 111, and the gas input port 142 is connected to the external gas component 300. The vibration table 150 is used to control the vibration of the transport platform 110, so as to transport the dust particles to the second dust particle output port 111 by vibration.

[0033] Exemplarily, the aperture of the mesh may be 0.5 mm, 1 mm, 2 mm, etc. There is no limitation on the aperture size, and meshes with different apertures are selected according to the required dust gas and ionization effect.

[0034] Exemplarily, the entire material of the particle transporter 100 is stainless steel.

[0035] Exemplarily, the transparent quartz panel 120 is fixed to the opening of the moving cavity of the transport platform 110 by means of a fixing nut. The fixing nut may be a 2.5 mm fixing nut.

[0036] For example, the transparent quartz panel 120 may be consistent in size with the top of the transport platform 110 .

[0037] The vacuum subsystem includes: a vacuum chamber 600 and a vacuum pump 700. The vacuum chamber 600 is connected to the dust plasma output end of the dust plasma discharge device and the moving cavity of the particle transporter 100. The vacuum pump 700 is connected to the vacuum chamber 600 to achieve a vacuum environment in the vacuum chamber 600.

[0038] For example, the mobile cavity is connected to the vacuum cavity 600 through a pipe with a diameter of 1 cm to form a vacuum subsystem. In the initial stage, the vacuum gas switch is gradually adjusted to balance the pressure in the cavity. The balanced gas flows at a uniform speed and can be mixed with the dust particles relatively evenly.

[0039] Further, the dust plasma discharge device comprises: a shell 210, a discharge chamber 220, a cathode 221, an anode 222 and a DC power supply. The discharge chamber 220 is fixed in the shell 210, and has a dust gas input end and a dust plasma output end. The dust gas input end is connected to the second dust particle output port 111 through a connecting pipe 400, and the dust plasma output end is connected to the vacuum chamber 600. The cathode 221 is arranged at the input end of the discharge chamber 220, and is used to generate a high voltage to ionize the ionized dust gas. The anode 222 is arranged at the output end of the discharge chamber 220, and an insulating layer is arranged between the anode 222 and the shell 210, and the shell 210 and the anode 222 are grounded respectively. The negative pole of the DC power supply is electrically connected to the cathode 221, and the positive pole thereof is electrically connected to the anode 222.

[0040] Exemplarily, the rated parameters of the DC power supply are 10 kW, 100 A. The DC power supply is connected to the cathode 221 (such as a tungsten needle) to generate a high voltage to ionize the ionized dust gas.

[0041] Furthermore, the cathode 221 is fixed at one end of the shell 210 at a position corresponding to the input end of the discharge chamber 220, and the anode 222 is fixed at the other end of the shell 210 at a position corresponding to the output end of the discharge chamber 220, and an insulating layer is provided between the anode 222 and the shell 210. The side of the shell 210 connected to the cathode 221 is made of a stainless steel plate.

[0042] Furthermore, the cathode 221 is made of a tungsten needle.

[0043] Furthermore, the anode 222 is composed of a plurality of annular polytetrafluoroethylene disks and annular copper disks alternately combined, and the dust gas can pass through the channel formed between the annular polytetrafluoroethylene disks and the annular copper disks. The anode 222 serves as an accelerating electrode, and the copper surface is prone to field-induced electron emission (such as thermal electron emission) at high temperatures, providing sufficient free electrons for the plasma and promoting gas ionization. PTFE, as an insulating material, can separate the copper electrode into sections to form multiple independent discharge areas (micro-discharge or short pulse discharge), preventing the arc from directly penetrating the entire electrode, reducing energy consumption and increasing energy density. In addition, the rapid heat dissipation of copper combined with the thermal insulation performance of PTFE reduces thermal stress concentration and prevents the beam electrode from breaking due to excessive temperature gradient.

[0044] Exemplarily, the anode 222 is composed of three annular polytetrafluoroethylene disks with a diameter of 4 cm and a thickness of 2 mm and three annular copper disks of the same size, which are alternately and closely combined side by side. A channel with a diameter of 8 mm is formed in the middle of the annular polytetrafluoroethylene disk and the annular copper disk, and four interconnected channels are distributed inside the annular copper disk for conducting cooling water.

[0045] Furthermore, the discharge chamber 220 is a quartz discharge chamber.

[0046] Furthermore, the shell 210 is made of quartz.

[0047] Furthermore, the system also includes: a cooling subsystem, which includes a circulating water path arranged on the stainless steel plate of the shell 210, the anode 222 and the vacuum chamber 600, and all the water paths are interconnected to form a whole; a plurality of interconnected channels are distributed inside the annular copper disk, and the channels serve as the circulating water path of the anode 222.

[0048] Exemplarily, a 3mm diameter circulating water path is engraved in the stainless steel plate of the housing 210, the anode 222 and the side wall of the vacuum chamber 600. A temperature alarm for monitoring water temperature is provided in the circulating water path, and the highest warning water temperature during operation is 30°.

[0049] Furthermore, the particle storage component 130 has a funnel-shaped cavity, dust particles are added into the funnel-shaped cavity, and the first dust particle output port 131 is arranged at the bottom of the funnel-shaped cavity.

[0050] Exemplarily, the dust particle inlet of the particle storage component 130 is arranged at the top of the funnel-shaped cavity, and a transparent top cover is provided at the dust particle inlet, which can seal the dust particles on the one hand and not affect the observation of the dust particles on the other hand.

[0051] Exemplarily, the funnel-shaped cavity of the particle storage component 130 has a side wall that forms an angle of 45° with the horizontal direction.

[0052] Furthermore, two side walls of the particle storage component 130 parallel to its moving direction are parallel to and in contact with the inner wall of the moving cavity.

[0053] Exemplarily, the funnel-shaped cavity of the particle storage component 130 can be composed of two groups of plates that are opposite to each other, and one group of plates parallel to the dust particle conveying direction fits with the inner wall of the moving cavity to try to prevent the dust particles from propagating to the space far away from the second dust particle output port 111 during the vibration process. The other group of plates is tilted so that the particle storage component 130 is funnel-shaped, and the bottom plane of the group of plates is set to be parallel to the bottom of the moving cavity, so that when the dust particles are in the output closed state, the first dust particle output port 131 can fit well with the inclined plane of the bottom of the moving cavity.

[0054] Furthermore, the plane at the bottom of the mobile cavity is inclined at an angle of 5 to 8 degrees to the direction of gravity, and when the dust particles are in the output closed state, the first dust particle output port 131 is in contact with the inclined plane at the bottom of the mobile cavity to prevent particles from flowing out of the first dust particle output port 131 during the initial stage or when not in use.

[0055] Furthermore, the inclination direction of the bottom of the mobile cavity is such that the bottom position of the mobile cavity corresponding to the first dust particle outlet 131 is lower than the bottom position of the mobile cavity corresponding to the second dust particle outlet 111 .

[0056] Furthermore, dust particle flow channels with narrowing openings are arranged on both sides of the bottom of the moving cavity along the conveying direction of the dust particles.

[0057] Exemplarily, the moving cavity is provided with two opposite triangular fixing plates on both sides of its inner bottom along the conveying direction of the dust particles to form a particle flow channel with a reduced opening.

[0058] Furthermore, a two-way valve 500 is provided on the pipeline connecting the pipeline 400, and a first interface of the two-way valve 500 is connected to the gas output port 143 of the particle transporter 100, and a second interface thereof is connected to the dust gas input end of the dust plasma discharge device. The two-way valve 500 is used to control the transmission of the dust gas of the particle transporter 100 to the dust plasma discharge device.

[0059] Exemplarily, the connecting pipeline 400 is a hose, and a two-way valve 500 is provided on the hose.

[0060] Furthermore, the three-way pipe 140 is fixedly arranged at the second dust particle output port 111 .

[0061] Exemplarily, the three-way pipe 140 is fixedly disposed below the second dust particle output port 111 , and the dust particles flowing out of the second dust particle output port 111 directly enter the three-way pipe 140 .

[0062] Furthermore, the pipelines where the gas input port 142 and the gas output port 143 are located are inclined at an angle, and the gas input port 142 is higher than the gas output port 143 .

[0063] Furthermore, a baffle 113 is provided at the connection point between the dust particle input port 141 and the second dust particle output port 111 , and a gap is left between the baffle 113 and the second dust particle output port 111 for outputting dust particles and preventing gas from flowing into the moving cavity.

[0064] Furthermore, a linear moving platform is provided in the moving cavity, and the linear moving platform is fixedly connected to the particle storage component 130 and is used to control the horizontal movement of the particle storage component 130 in the moving cavity.

[0065] Exemplarily, the linear moving platform includes a slider and a slideway, the slider is fixedly connected to the particle storage component 130, and the slider moves along the slideway. Before use, the system of the present invention moves the particle storage component 130 to different positions, measures the dust particle flow rate at different positions by fixing the vibration frequency, and measures the dust particle flow rate at different vibration frequencies by fixing the moving position. Before use, the particle storage component 130 is adjusted to the corresponding position in advance according to the required dust particle flow rate. If the dust particle flow rate needs to be adjusted during use, the vibration frequency can be changed.

[0066] Furthermore, an adjusting knob is provided on the outer wall of the transport platform 110, and the end of the adjusting knob passes through the outer wall of the transport platform 110 and is connected to the linear moving platform, so as to drive the horizontal movement of the linear moving platform. The system of the present invention can measure the dust particle flow at different positions and frequencies as described above before use, and can also be provided with an instrument for detecting the dust particle flow at the second dust particle outlet 111 during use, such as using a laser velocimeter to measure the particle movement speed. During use, the particle storage component 130 can be moved to different positions by adjusting the knob, and then the dust particle flow can be measured, so that the particle storage component 130 can be easily adjusted, and it is easy to control during use.

[0067] Exemplarily, the adjusting knob is threadedly connected to the outer wall of the side of the transport platform 110, and the end is located in the moving cavity and is rotationally connected to the slider of the linear moving platform, so that the slider is pushed to perform linear motion during the rotation of the adjusting knob.

[0068] Exemplarily, the adjusting knob is threadedly connected to the outer wall of the side of the transport platform 110, the end is in the movable cavity and a gear is arranged on the circumference of the end, and a chain is arranged on the side wall of the slider along the conveying direction of the dust particles. The chain is meshed with the gear, and the chain is driven to move horizontally during the rotation of the gear.

[0069] Furthermore, the vibration table 150 is fixed to the bottom of the transport platform 110 , and a vibrator is disposed inside the vibration table 150 for controlling the vibration of the transport platform 110 , and a switch for adjusting the vibration frequency and vibration amplitude is disposed on the vibrator.

[0070] Exemplarily, a mounting platform is fixedly provided at the bottom of the transport platform 110, and the mounting platform is at a distance from the bottom of the transport platform 110, and the vibration platform 150 is fixed on the mounting platform. Specifically, the vibration platform 150 is fixed to the mounting platform by screws. Moreover, openings are provided on both sides of the mounting platform to facilitate the installation of screws.

[0071] Furthermore, a Langmuir probe 610 is disposed on the side wall of the vacuum chamber 600 for plasma density diagnosis.

[0072] Exemplarily, a Langmuir probe 610 is vertically disposed on the top of the vacuum chamber 600 , and the Langmuir probe 610 can move vertically inward within a range of 5 to 20 cm.

[0073] Furthermore, a quartz glass window is provided on the side wall of the vacuum chamber 600 .

[0074] Furthermore, a sample holder 630 is disposed in the vacuum chamber 600 , and a displacement platform 620 is disposed on the side wall of the vacuum chamber 600 . The displacement platform 620 is connected to the sample holder 630 and is used to horizontally move the sample holder 630 .

[0075] For example, the sample holder 630 is made of tungsten, which can withstand the high temperature of plasma. Metal samples can be placed on the sample holder 630 to conduct experiments on the interaction between metal materials and plasma, such as stainless steel, tungsten, lithium, and even uranium for nuclear fission. Research in these fields involves the interaction of plasma beams.

[0076] Furthermore, the vacuum pump 700 uses a vacuum pump group, including a Roots pump and a mechanical pump, which can achieve 10 -3 Vacuum degree of Pa.

[0077] The discharge system for generating dust plasma of the present invention is used in the following manner: First, prepare the water, electricity, gas and other systems to enter a stable working state. In the initial stage, adjust the working mode of the particle transporter 100, that is, set the required transport parameters according to the size and mass of the dust particles. The principle of the particle transporter 100 to adjust the motion parameters of the dust particles lies in the key component: the piezoelectric vibrating piece of the vibrator, whose main function is to transport tiny objects. The speed and uniformity of the transport depend on the relationship between the vibration frequency and intensity and the dust particle parameters. By calculating the amount of dust particles output per unit time under different frequencies, the mass flow rate of the dust transport can be determined.

[0078] During the vibration process, dust particles are output from the second dust particle output port 111 of the particle transporter 100 and mixed with gas to form a gas-dust particle mixture. Since the gas pressure of the gas-dust particle mixture is greater than the internal gas pressure of the vacuum chamber 600, the gas flow is ejected into the discharge chamber of the plasma source after passing through the discharge chamber 220 and the anode 222, and begins to gradually enter the ionization state. Specifically, inside the chamber, the dust particles and the gas begin to ionize at the same time to form dust plasma, and move toward the vacuum chamber 600 under the joint action of the gas flow and the accelerating electrode. Under the action of the accelerating electrode, the charged particles further collide with the neutral gas or the unionized dust particles to form more charged particles, thereby increasing the electron density of the dust plasma and the density of the charged dust particles, and finally the dust plasma is guided to be ejected into the vacuum chamber 600. The discharge chamber 220 is made of transparent glass, and the microscopic process and macroscopic parameters of the dust plasma formation can be directly detected by using relevant scientific instruments.

[0079] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A discharge system for generating dust plasma, characterized in that: The system comprises: a particle transporter (100), a dust plasma discharge device, an external gas component (300) and a vacuum subsystem; The external gas component (300) is connected to the second dust particle output port (111) of the particle transporter (100) and is used to mix the introduced gas with dust particles to form dust gas; the dust gas input end of the dust plasma discharge device is connected to the second dust particle output port (111) of the particle transporter (100) via a connecting pipe (400) and is used to discharge the dust gas to form dust plasma; the vacuum subsystem is used to form a vacuum environment in the system; The particle transporter (100) comprises: The transport platform (110) has a movable cavity, wherein the plane of the bottom of the movable cavity is inclined at an angle to the direction of gravity, and a second dust particle output port (111) is provided at one end of the bottom of the movable cavity. A mesh screen is provided at the second dust particle output port (111) for screening the particle size of the output dust particles; a particle storage component (130) disposed in the movable cavity and movable horizontally along the movable cavity, wherein a first dust particle output port (131) is provided at the bottom thereof and is spaced a distance from the second dust particle output port (111); when the dust particles are in an output closed state, the first dust particle output port (131) is in contact with an inclined plane at the bottom of the movable cavity, thereby closing the first dust particle output port (131); A transparent quartz panel (120) is detachably fixed to the opening of the moving cavity of the transport platform (110) and is used to seal the moving cavity; A three-way pipe (140), wherein the three interfaces thereof are respectively a dust particle input port (141), a gas input port (142) and a gas output port (143), and the gas input port (142) and the gas output port (143) correspond to each other, the dust particle input port (141) is communicated with the second dust particle output port (111), and the gas input port (142) is connected with the external gas component (300); and A vibration table (150) for controlling the vibration of the transport platform (110) so as to transport the dust particles to the second dust particle output port (111) through vibration; The vacuum subsystem comprises: a vacuum chamber (600) which is connected to the dust plasma output end of the dust plasma discharge device and the moving cavity of the particle transporter (100) respectively; and A vacuum pump (700) is connected to the vacuum chamber (600) and is used to achieve a vacuum environment in the vacuum chamber (600).

2. The discharge system for generating dust plasma according to claim 1, characterized in that: The dust plasma discharge device comprises: Housing (210); a discharge chamber (220) fixed in the housing (210), having a dust gas input end and a dust plasma output end, wherein the dust gas input end is connected to the second dust particle output port (111) via a connecting pipe (400), and the dust plasma output end is connected to the vacuum chamber (600); A cathode (221) is arranged at the input end of the discharge chamber (220) and is used to generate a high voltage to ionize the ionized dust gas; an anode (222), which is arranged at the output end of the discharge chamber (220), an insulating layer is provided between the anode and the shell (210), and the anode and the shell (210) are grounded respectively; and A direct current power source, a negative electrode and a positive electrode of which are electrically connected to the cathode (221) and the anode (222) respectively.

3. The discharge system for generating dust plasma according to claim 2, characterized in that: The cathode (221) is fixed at a position at one end of the shell (210) corresponding to the input end of the discharge chamber (220), and the anode (222) is fixed at a position at the other end of the shell (210) corresponding to the output end of the discharge chamber (220); a stainless steel plate is used for one side of the shell (210) connected to the cathode (221); Or / and, the cathode (221) is a tungsten needle; Or / and, the anode (222) is composed of a plurality of annular polytetrafluoroethylene disks and annular copper disks alternately combined, and the middle of the annular polytetrafluoroethylene disks and the annular copper disks form a gas channel; Or / and, the discharge chamber (220) is a quartz discharge chamber; Or / and, the shell (210) is made of quartz.

4. The discharge system for generating dust plasma according to claim 3, characterized in that: The system further comprises: a cooling subsystem, the cooling subsystem comprising a circulating water path provided on the stainless steel plate of the shell (210), the anode (222) and the vacuum chamber (600), and all the water paths are interconnected to form a whole; A plurality of mutually interconnected channels are distributed inside the annular copper disk, and the channels serve as circulating water paths for the anode (222).

5. The discharge system for generating dust plasma according to claim 1, characterized in that: The particle storage component (130) has a funnel-shaped cavity, and the first dust particle output port (131) is arranged at the bottom of the funnel-shaped cavity; Or / and, two side walls of the particle storage component (130) parallel to its moving direction are parallel to and in contact with the inner wall of the moving cavity; Or / and, the plane of the bottom of the movable cavity is inclined at an angle of 5 to 8 degrees to the direction of gravity; Or / and, the inclination direction of the bottom of the movable cavity is such that the bottom position of the movable cavity corresponding to the first dust particle outlet (131) is lower than the bottom position of the movable cavity corresponding to the second dust particle outlet (111); Or / and, dust particle flow channels with narrowing openings are provided on both sides of the bottom of the moving cavity along the conveying direction of the dust particles.

6. The discharge system for generating dust plasma according to claim 1, characterized in that: A two-way valve (500) is provided on the pipeline of the connecting pipeline (400), a first interface of the two-way valve (500) being connected to the gas output port (143) of the particle transporter (100), and a second interface thereof being connected to the dust gas input end of the dust plasma discharge device, and the two-way valve (500) being used to control the transmission of the dust gas of the particle transporter (100) to the dust plasma discharge device; Or / and, the three-way pipe (140) is fixedly arranged at the second dust particle output port (111); Or / and, the pipelines where the gas input port (142) and the gas output port (143) are located are inclined at an angle, and the gas input port (142) is higher than the gas output port (143); Or / and, a baffle (113) is provided at the connection point between the dust particle input port (141) and the second dust particle output port (111), and a gap is left between the baffle (113) and the second dust particle output port (111) for outputting dust particles and preventing gas from flowing into the moving cavity.

7. The discharge system for generating dust plasma according to claim 1, characterized in that: A linear moving platform is arranged in the moving cavity, and the linear moving platform is fixedly connected to the particle storage component (130) and is used to control the particle storage component (130) to move horizontally in the moving cavity.

8. The discharge system for generating dust plasma according to claim 7, characterized in that: An adjustment knob is provided on the outer wall of the transport platform (110), and an end of the adjustment knob passes through the outer wall of the transport platform (110) and is connected to the linear movable platform, so as to drive the horizontal movement of the linear movable platform.

9. The discharge system for generating dust plasma according to claim 1, characterized in that: The vibration table (150) is fixed to the bottom of the transport platform (110), and a vibrator is arranged inside the vibration table (150) for controlling the vibration of the transport platform (110).

10. The discharge system for generating dust plasma according to claim 1, characterized in that: A Langmuir probe (610) is arranged on the side wall of the vacuum chamber (600) for plasma density diagnosis; Or / and, a quartz glass window is provided on the side wall of the vacuum chamber (600); Or / and, a sample holder (630) is disposed in the vacuum chamber (600), a displacement platform (620) is disposed on a side wall of the vacuum chamber (600), and the displacement platform (620) is connected to the sample holder (630) and is used to horizontally move the sample holder (630); Or / and, the vacuum pump (700) adopts a vacuum pump group including a Roots pump and a mechanical pump.

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