Rotary conveying line for empty basket of silicon wafer tool

Abstract

The invention discloses a silicon wafer tool empty basket rotary conveying line, and particularly relates to the field of processing and preparing conveying lines, the silicon wafer tool empty basket rotary conveying line comprises a conveying line and silicon wafer material baskets, the silicon wafer material baskets are conveyed along the conveying line through the conveying line, the conveying line is composed of multiple sets of conveying belts according to the designed length, and material basket guiding assemblies are arranged at the joints of the adjacent conveying belts; a material basket rotating assembly is arranged at the tail end of the conveying line in the conveying direction. Empty silicon wafer material baskets are transported in a point-to-point mode, rapid and accurate conveying of tool baskets is achieved, the silicon wafer material baskets are transferred to the material basket containing table through overturning of the carrying plate, compared with direct grabbing and transferring of the silicon wafer material baskets by mechanical claws, the tedious operation route of the mechanical claws does not need to be arranged, and the production efficiency is improved. Silicon wafer material baskets are precisely conveyed to a to-be-grabbed position at a fixed point in a transverse position in a mode of a conveying belt and a reversing mechanism, and by introducing an automatic conveying technology, the problems of space occupation, low logistics efficiency and material basket recycling in a traditional mode can be effectively solved.

Description

Technical Field

[0001] The invention relates to the technical field of processing and preparing conveyor lines, and more specifically to a silicon wafer tooling empty basket rotary conveyor line. Background Art

[0002] In the process of silicon wafer production, silicon wafers need to go through multiple links such as cleaning, inserting, and wrapping. These links often require tooling baskets (or material baskets) to carry silicon wafers for automated or manual operations. However, in the traditional silicon wafer processing method, the space occupation and logistics efficiency are low: in the traditional silicon wafer cleaning process, there are usually narrow aisles between the cleaning machines, and hand carts are often required near the silicon wafer inserting area and the silicon wafer wrapping area to transport full and empty tooling baskets; this method not only takes up a lot of space, but also leads to low logistics efficiency and increased waste of human resources; during the use of the hand cart, a large number of empty tooling baskets need to be frequently loaded, pushed and emptied between the inserting area and the wrapping area to achieve recycling, but this method often leads to low recycling efficiency of the material baskets, and a large number of material baskets are idle and waiting, which increases the cost of the enterprise.

[0003] In the prior art, in order to solve the above-mentioned problems, more efficient and convenient silicon wafer tooling empty basket rotary conveyor line technology has been explored. By designing a special conveyor line, such as a silicon wafer basket transmission line, the automatic conveying of the tooling basket is realized. This conveyor line usually includes a conveyor belt for carrying the silicon wafer basket and a control device for controlling the operation or stop of the conveyor belt. The forward direction of the conveyor belt is opposite to the feeding direction of the cleaning machine, so that the cleaned empty tooling basket can be directly sent back to the inserting area for reuse. However, when the existing empty basket transfer equipment is in operation, it needs to be in a horizontal position to ensure the operating stability to avoid the tipping and misalignment of the basket during the transportation process. After the assistance of the mechanical claw, the subsequent basket must ensure the longitudinal placement position to adapt to the standard position during the insertion. How to stably transmit the empty basket and flip the standard position during the transmission process to prepare for the subsequent basket grabbing has become an urgent problem to be solved. Summary of the invention

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a silicon wafer tooling empty basket rotary conveyor line. The technical problem to be solved by the present invention is: how to realize an automated conveyor line for fast and accurate conveying of tooling baskets to meet the production needs during silicon wafer processing.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a silicon wafer tooling empty basket rotary conveyor line, comprising a conveying line and a silicon wafer basket, the conveying line transports the silicon wafer basket along a conveying route, the conveying line is composed of multiple groups of conveyor belts according to the designed length, a basket guide assembly is provided at the connection of adjacent conveyor belts, and a basket rotary assembly is provided at the end position of the conveying direction of the conveying line;

[0006] The conveying line includes a frame body, at least two sets of supporting legs are arranged at the bottom of the frame body according to the length of the conveying line, a conveying conveyor belt I is arranged inside the frame body, a driving motor I is arranged at the end of the frame body, and the driving motor I is used as the conveying power of the conveying conveyor belt I, and the ends of adjacent conveying conveyor belts I are connected through a basket guide assembly to form a guided transmission of the complete route of the silicon wafer basket;

[0007] The basket rotation assembly includes a carrier plate and a cylinder II, the cylinder II is tiltedly installed at a position of a support leg moving near the driving motor I, a steering seat is fixedly provided at the bottom of the carrier plate, a steering pin shaft I is provided between the output shaft of the cylinder II and the steering seat, a steering pin shaft II is provided between the bottom of the end of the carrier plate and the frame body, a basket placement table is provided at the end of the carrier plate, a cylinder III is fixedly provided at the top of the end of the carrier plate, a clamping claw is fixedly provided on the output shaft of the cylinder III, a longitudinal plate is fixedly provided at one end of the carrier plate away from the cylinder III, a cylinder IV is fixedly provided on the longitudinal plate, and a through hole is opened on the carrier plate at a position corresponding to the output shaft of the cylinder IV;

[0008] The bottom surface of the material basket placement table is fixedly connected to the frame body, and a positioning folding plate is fixedly provided on the top of the material basket placement table, and the positioning folding plate limits the relative position of the silicon wafer material basket and the material basket placement table in the longitudinal position.

[0009] In a preferred embodiment, guide bars are provided on both sides of the frame body, and a knob fixing frame is provided between the outer wall of the frame body and the guide bar, and the guide bar is fixed by the knob fixing frame to be a guide guardrail higher than the top surface of the frame body, and the guide bar is arranged parallel to the frame body;

[0010] An object measuring photoelectric sensor is fixedly provided on the outer wall of the frame body, and a detection end of the object measuring photoelectric sensor is higher than the setting height of the guide bar.

[0011] In a preferred embodiment, the basket guide assembly includes a drive motor II and two sets of drive shafts, the output shaft of the drive motor II is fixedly connected to the drive shaft, and couplings are provided at the connection points between the two ends of the drive shaft and the frame body;

[0012] The outer walls of the two sets of driving shafts are fixed with driving wheels I, a conveyor belt II is sleeved between the driving wheels I, and a transport position limiting mechanism is provided on one side of the driving shaft;

[0013] A driving wheel II is provided at the connection between the outer wall of the driving shaft and the transport conveyor belt I.

[0014] In a preferred embodiment, the transport position limiting mechanism comprises a cylinder I and a mounting plate, and the cylinder I is fixedly mounted on the inner wall of the frame body through the mounting plate;

[0015] A mounting frame is provided on the top of the mounting plate, a steering block is provided inside the mounting frame, the steering block is configured as a triangular plate, and a roller is rotatably provided at one end of the steering block, and a steering shaft is provided between the center of the steering block and the mounting frame;

[0016] The output shaft of the cylinder I passes through the mounting plate and is fixed with a push rod, and a rotation pin is provided between the top end of the push rod and the steering block.

[0017] In a preferred embodiment, the silicon wafer basket includes a basket body and two plates, top and bottom, wherein the silicon wafer basket includes two placement positions: a horizontal position and a vertical position;

[0018] The lateral position of the silicon wafer basket is set to a transport position in which the basket body and the frame body are horizontally arranged;

[0019] The longitudinal position of the silicon wafer basket is set to a position where the bottom plate is placed on the basket placement table to be transferred.

[0020] Technical effects and advantages of the present invention:

[0021] 1. The present invention uses a conveying line and a basket rotating assembly to transport the silicon wafer basket, and uses a point-to-point method to transport the empty silicon wafer basket. It can be optimized according to the actual situation of the workshop to maximize the space utilization efficiency, reduce the dependence on hand-pushed trolleys, and realize the rapid and accurate transportation of tooling baskets. The silicon wafer basket in a horizontal position is transported to the carrier position by the conveyor belt I, and the position of the silicon wafer basket is fixed by the cylinder IV and the clamping claw. The silicon wafer basket is transferred to the basket placement table after the carrier is flipped. Compared with the direct mechanical grasping claws in the prior art to directly grasp and transfer the silicon wafer basket, there is no need to arrange a complicated running route of the mechanical claws. The silicon wafer basket is accurately transported to the position to be grasped in a horizontal position by a conveyor belt plus a reversing mechanism. By introducing automated conveying technology, the problems of space occupation, low logistics efficiency, and basket recycling in the traditional method can be effectively solved;

[0022] 2. The present invention adds a basket guide assembly at the position of the conveying line. When there is a silicon wafer basket on the top of a group of conveyor belts Ⅰ, the roller blocks the silicon wafer basket on the rear conveyor belt Ⅰ. After a single rotation is completed, the carrier plate is reset and laid flat, and the output shaft of the cylinder Ⅰ extends. The silicon wafer basket on the rear conveyor belt Ⅰ is transferred to the blank conveyor belt Ⅰ in the transmission direction, thereby realizing orderly transportation of the silicon wafer basket, avoiding the concentrated accumulation of the silicon wafer basket, deformation caused by collision, or rushing out of the conveying line. The transportation speed of the silicon wafer basket is determined by the grabbing speed of the basket rotation assembly position, avoiding the concentrated accumulation of the silicon wafer basket or insufficient supply affecting the smooth progress of subsequent work, significantly improving the recycling efficiency of the basket, reducing the idle rate, and reducing manual operation and waiting time. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0024] Figure 2 It is a schematic diagram of the overall second viewing angle (partial) structure of the present invention.

[0025] Figure 3 For the present invention Figure 2 Enlarged view of the structure of part A in the middle.

[0026] Figure 4 It is a schematic diagram of the structure of the conveying line (basket rotating component portion) with silicon wafer basket of the present invention.

[0027] Figure 5 It is a schematic diagram of the structure of the basket guide assembly of the present invention.

[0028] Figure 6 It is a schematic diagram of the structure of the conveying line (basket rotating component part) of the present invention.

[0029] Figure 7 It is a schematic diagram of the structure of the basket rotating assembly of the present invention.

[0030] Figure 8 It is a schematic diagram of the structure of the transport position limiting mechanism of the present invention.

[0031] The reference numerals are: 1 conveying line, 2 silicon wafer basket, 3 basket guide assembly, 4 basket rotation assembly; 11 frame body, 12 support leg, 13 guide bar, 14 knob fixing frame, 15 driving motor I, 16 transport conveyor belt I, 17 object measuring photoelectric sensor, 18 driving wheel II;

[0032] 31 driving motor II, 32 driving shaft, 33 coupling, 34 driving wheel I, 35 transport conveyor belt II, 36 transport position limiting mechanism;

[0033] 361 cylinder I, 362 mounting plate, 363 push rod, 364 mounting frame, 365 steering block, 366 roller, 367 steering shaft;

[0034] 41 carrier plate, 42 steering seat, 43 cylinder II, 44 steering pin shaft I, 45 steering pin shaft II, 46 material basket placement table, 47 positioning and turning plate, 48 cylinder III, 49 clamping claw, 410 longitudinal plate, 411 cylinder IV, 412 through hole. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Embodiment 1:

[0037] The present invention provides Figure 1-7 The silicon wafer tooling empty basket rotary conveyor line shown includes a conveying line 1 and a silicon wafer basket 2. The conveying line 1 transports the silicon wafer basket 2 along the conveying route. The conveying line 1 is composed of multiple groups of conveyor belts according to the designed length. A basket guide assembly 3 is provided at the connection between adjacent conveyor belts. A basket rotary assembly 4 is provided at the end position of the conveying direction of the conveying line 1.

[0038] like Figure 2-4 As shown, the conveying line 1 includes a frame body 11, at least two groups of supporting legs 12 are provided at the bottom of the frame body 11 according to the length of the conveying line 1, a conveying conveyor belt Ⅰ16 is provided inside the frame body 11, and a driving motor Ⅰ15 is provided at the end of the frame body 11, and the driving motor Ⅰ15 is used as the conveying power of the conveying conveyor belt Ⅰ16, and the ends of adjacent conveying conveyor belts Ⅰ16 are connected through the material basket guide assembly 3 to form a guided transmission of the complete route of the silicon wafer material basket 2; guide bars 13 are provided on both sides of the frame body 11, and a knob fixing frame 14 is provided between the outer wall of the frame body 11 and the guide bar 13, and the knob fixing frame 14 fixes the guide bar 13 into a guide guardrail higher than the top surface of the frame body 11, and the guide bar 13 is arranged parallel to the frame body 11;

[0039] like Figure 7As shown, the basket rotating assembly 4 includes a carrier plate 41 and a cylinder II 43, the cylinder II 43 is tiltedly installed at a position of the support leg 12 moving near the driving motor I 15, a steering seat 42 is fixedly arranged at the bottom of the carrier plate 41, a steering pin shaft I 44 is arranged between the output shaft of the cylinder II 43 and the steering seat 42, a steering pin shaft II 45 is arranged between the bottom of the end of the carrier plate 41 and the frame body 11, a basket placing table 46 is arranged at the end of the carrier plate 41, a cylinder III 48 is fixedly arranged at the top of the end of the carrier plate 41, a clamping claw 49 is fixedly arranged on the output shaft of the cylinder III 48, a longitudinal plate 410 is fixedly arranged at one end of the carrier plate 41 away from the cylinder III 48, a cylinder IV 411 is fixedly arranged on the longitudinal plate 410, and a through hole 412 is opened on the carrier plate 41 at a position corresponding to the output shaft of the cylinder IV 411;

[0040] like Figure 7 As shown, the bottom surface of the basket placing platform 46 is fixedly connected to the frame body 11, and a positioning folding plate 47 is fixedly provided on the top of the basket placing platform 46, and the positioning folding plate 47 limits the relative position of the silicon wafer basket 2 and the basket placing platform 46 in the longitudinal position;

[0041] The silicon wafer basket 2 includes a basket body and two plates, top and bottom, wherein the top and bottom plates are arranged as flat plates of the same shape and are equipped with foot posts, and forming grooves are provided on both the top and bottom plates, wherein the silicon wafer basket 2 includes two placement positions, a horizontal position and a vertical position; the horizontal position of the silicon wafer basket 2 is arranged as a transport position in which the basket body and the rack body 11 are horizontally arranged; the vertical position of the silicon wafer basket 2 is arranged as a position to be transferred in which the bottom plate is placed on the basket placement table 46.

[0042] Specifically, when positioning and transporting the silicon wafer basket 2, the empty basket concentration point is used as the starting end of the conveying line 1, and the grabbing manipulator adapted to the device is used as the end of the conveying line 1. An appropriate group of conveyor belts are correspondingly set, and the basket guide assembly 3 is used as a connecting assembly of adjacent conveyor belts to assemble the conveying line 1 as a whole;

[0043] The silicon wafer basket 2 in the empty basket state is placed in a horizontal position on the top of the frame body 11, and the driving motor Ⅰ15 drives the driving wheel Ⅱ18 to rotate, thereby driving the conveyor belt Ⅰ16 to work, and the silicon wafer basket 2 at this position moves in a horizontal position along the conveying route. When the silicon wafer basket 2 moves forward along the running direction of the conveyor belt Ⅰ16, the guide bars 13 fixed by the knob fixing frame 14 on both sides of the frame body 11 can form a protective guide bar similar to a guardrail on the frame body 11. The continuous guide bar 13 higher than the top surface of the frame body 11 protects the silicon wafer basket 2 in the running process, so as to avoid the silicon wafer basket 2 changing its position during the transportation process, causing it to run off or rush out of the frame body 11. The empty silicon wafer basket 2 is transported in a point-to-point manner, which can be optimized according to the actual situation of the workshop to maximize the space utilization efficiency. Compared with the traditional method, it can reduce the dependence on the hand-pushed trolley, thereby saving space and improving the cleanliness of the workshop, and can realize the fast and accurate transportation of the tooling basket, reducing manual operation and waiting time;

[0044] The silicon wafer basket 2 in the horizontal position is transported to the position of the carrier plate 41 by the conveyor belt I16. At this time, the output shaft of the cylinder IV411 extends from the position of the through hole 412 to limit the position of the top plate of the silicon wafer basket 2. The output shaft of the cylinder III48 extends to drive the clamping claw 49 to fix the position of the bottom plate of the silicon wafer basket 2, so that the position of the silicon wafer basket 2 on the carrier plate 41 forms a standard position. Subsequently, with the steering pin II45 as the steering base point, as the output shaft of the cylinder II43 extends through the steering pin I44 and the steering seat 42, the carrier plate 41 is turned 90° along the steering pin II45, and the silicon wafer basket 2 is The bottom plate of the silicon wafer basket 2 is placed on the top of the basket placing platform 46 (the basket placing platform 46 is also provided with an opening of the cylinder III 48 for the carrier plate 41 to flip over), and the specific position of the silicon wafer basket 2 on the basket placing platform 46 is determined by the positioning and turning plate 47, so that the silicon wafer basket 2 is transformed from a horizontal position to a vertical position. At this time, the cylinder III 48 drives the clamping claw 49 to reset and the cylinder IV 411 to reset, leaving the silicon wafer basket 2 at the position of the basket placing platform 46, making good position arrangement for the clamping claw work in the subsequent process, and the cylinder II 43 resets to drive the carrier plate 41 to restore the horizontal position, so as to prepare for the transportation and flipping of the next silicon wafer basket 2;

[0045] Compared with the direct grabbing and transfer of the silicon wafer basket 2 by the mechanical grabbing claw in the prior art, there is no need to arrange the complicated operation route of the mechanical claw, and the layout cost of the conveying line 1 can greatly reduce the enterprise cost compared with the layout cost of the mechanical claw route. The silicon wafer basket 2 is accurately transported to the position to be grabbed in a horizontal position with a conveyor belt + reversing mechanism, and is converted into the longitudinal position required for grabbing during the process.

[0046] Embodiment 2:

[0047] Based on the rotary conveyor line proposed in Example 1, the present invention provides a further technical solution for the conveying line 1 and the basket guide assembly 3.

[0048] See also Figure 5-8 The basket guide assembly 3 provided by the present invention includes a driving motor II 31 and two groups of driving shafts 32, the output shaft of the driving motor II 31 is fixedly connected to the driving shaft 32, and couplings 33 are provided at the connection points between the two ends of the driving shaft 32 and the frame body 11; driving wheels I 34 are fixedly provided at the outer walls of the two groups of driving shafts 32, and a transport conveyor belt II 35 is sleeved between the driving wheels I 34, and a transport position limiting mechanism 36 is provided on one side of the driving shaft 32; a driving wheel II 18 is provided at the connection point between the outer wall of the driving shaft 32 and the transport conveyor belt I 16, and the driving motor II 31 and the driving motor I 15 have the same direction and speed, thereby forming synchronous transportation of the transport conveyor belt II 35 and the transport conveyor belt I 16, and the transport conveyor belt II 35 is used as a connector between the adjacent ends of the transport conveyor belts I 16, forming a complete transportation route for the silicon wafer basket 2 at the top surface of the frame body 11;

[0049] like Figure 5 and 8 As shown, the transport position limiting mechanism 36 includes a cylinder I 361 and a mounting plate 362, and the cylinder I 361 is fixedly mounted on the inner wall of the frame body 11 through the mounting plate 362; a mounting frame 364 is provided on the top of the mounting plate 362, and a steering block 365 is provided inside the mounting frame 364, and the steering block 365 is set as a triangular plate, and a roller 366 is rotatably provided at one end of the steering block 365, and a steering shaft 367 is provided between the center of the steering block 365 and the mounting frame 364; the output shaft of the cylinder I 361 passes through the mounting plate 362 and is fixedly provided with a push rod 363, and a rotation pin is provided between the top of the push rod 363 and the steering block 365;

[0050] An object measuring photoelectric sensor 17 is fixedly provided on the outer wall of the frame body 11 , and a detection end of the object measuring photoelectric sensor 17 is higher than the setting height of the guide bar 13 .

[0051] The specific implementation method is as follows: the additional distribution controller of the conveyor line is configured to detect whether there is a silicon wafer basket 2 on the transport conveyor belt Ⅰ16 under the position by multiple object detection photoelectric sensors 17 on the outer wall of the frame body 11 (the number of object detection photoelectric sensors 17 is set to be multiple, and they are set in different detection positions), and transmit the detection signal to the controller. When a silicon wafer basket 2 already exists on the top of a group of transport conveyor belts Ⅰ16, the transport position limiting mechanism 36 is in a limited position (such as Figure 8), the roller 366 higher than the top surface of the conveyor belt Ⅰ16 blocks the silicon wafer basket 2 of the rear transport conveyor belt Ⅰ16 from continuing to be transported to the next conveyor belt Ⅰ16 or the basket rotating assembly 4, and the transport conveyor belt Ⅰ16 subsequently works to transport the silicon wafer basket 2 to the basket rotating assembly 4, and the basket rotating assembly 4 adjusts the position of the silicon wafer basket 2 to facilitate the subsequent basket grabbing work; after the single rotation work is completed, the carrier 41 is reset and laid flat (when the carrier 41 is in the vertical position, the drive motor Ⅱ31 and the drive motor Ⅰ15 stop working and stop transporting the silicon wafer basket 2), the controller receives the signal to control the output shaft of the cylinder Ⅰ361 to extend, and the push rod 36 3 and the steering block 365, the height of the roller 366 on the top of the triangular plate-shaped steering block 365 is lowered (the limiting position is cancelled), and the silicon wafer basket 2 on the conveyor belt Ⅰ16 on the rear side is transferred to the blank conveyor belt Ⅰ16 in the transmission direction, thereby realizing the orderly transportation of the silicon wafer basket 2, avoiding the concentrated accumulation of the silicon wafer basket 2, deformation caused by collision or rushing out of the conveying line 1, so that the silicon wafer basket 2 is transported one by one in sequence according to the actual needs in the silicon wafer production process, and the transportation speed of the silicon wafer basket 2 is determined by the grabbing speed of the basket rotating component 4, so as to avoid the concentrated accumulation of the silicon wafer basket 2 or insufficient supply affecting the smooth progress of subsequent work.

[0052] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0053] Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0054] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon wafer tooling empty basket rotary conveyor line, comprising a conveyor line (1) and a silicon wafer basket (2), wherein the conveyor line (1) transports the silicon wafer basket (2) along a conveyor route, and is characterized in that: The conveying line (1) is composed of a plurality of conveyor belts according to the designed length, and a basket guide assembly (3) is provided at the connection between adjacent conveyor belts. A basket rotating assembly (4) is provided at the end position of the conveying direction of the conveying line (1); The conveying line (1) comprises a frame body (11), the bottom of the frame body (11) is provided with at least two groups of supporting legs (12) according to the length of the conveying line (1), a conveying conveyor belt I (16) is provided inside the frame body (11), a driving motor I (15) is provided at the end of the frame body (11), and the driving motor I (15) is used as the conveying power of the conveying conveyor belt I (16), and the ends of adjacent conveying conveyor belts I (16) are connected through a basket guide assembly (3), so as to form a guided transmission of the complete route of the silicon wafer basket (2); The basket rotating assembly (4) comprises a carrier plate (41) and a cylinder II (43), wherein the cylinder II (43) is obliquely installed at a position close to a support leg (12) moved by a driving motor I (15), a steering seat (42) is fixedly provided at the bottom of the carrier plate (41), a steering pin shaft I (44) is provided between an output shaft of the cylinder II (43) and the steering seat (42), and a steering pin shaft II (45) is provided between the bottom of the end of the carrier plate (41) and the frame body (11). A basket placing platform (46) is provided at the end of the carrier plate (41), a cylinder III (48) is fixedly provided at the top of the end of the carrier plate (41), a clamping claw (49) is fixedly provided on the output shaft of the cylinder III (48), a longitudinal plate (410) is fixedly provided at one end of the carrier plate (41) away from the cylinder III (48), a cylinder IV (411) is fixedly provided on the longitudinal plate (410), and a through hole (412) is provided on the carrier plate (41) at a position corresponding to the output shaft of the cylinder IV (411); The bottom surface of the material basket placement platform (46) is fixedly connected to the frame body (11), and a positioning folding plate (47) is fixedly provided on the top of the material basket placement platform (46), and the positioning folding plate (47) limits the relative position of the silicon wafer material basket (2) and the material basket placement platform (46) in the longitudinal position.

2. The silicon wafer tooling empty basket rotary conveyor line according to claim 1 is characterized in that: Guide bars (13) are provided on both sides of the frame body (11); a knob fixing frame (14) is provided between the outer wall of the frame body (11) and the guide bars (13); the knob fixing frame (14) fixes the guide bars (13) to be a guide guardrail higher than the top surface of the frame body (11); and the guide bars (13) are arranged parallel to the frame body (11); An object measuring photoelectric sensor (17) is fixedly provided on the outer wall of the frame body (11), and a detection end of the object measuring photoelectric sensor (17) is higher than the setting height of the guide bar (13).

3. The silicon wafer tooling empty basket rotary conveyor line according to claim 1 is characterized in that: The basket guide assembly (3) comprises a drive motor II (31) and two sets of drive shafts (32), wherein the output shaft of the drive motor II (31) is fixedly connected to the drive shaft (32), and couplings (33) are provided at the connection points between the two ends of the drive shaft (32) and the frame body (11); The outer walls of the two sets of driving shafts (32) are fixedly provided with driving wheels I (34), a transport conveyor belt II (35) is sleeved between the driving wheels I (34), and a transport position limiting mechanism (36) is provided on one side of the driving shaft (32); A driving wheel II (18) is provided at the connection point between the outer wall of the driving shaft (32) and the transport conveyor belt I (16).

4. The silicon wafer tooling empty basket rotary conveyor line according to claim 3 is characterized in that: The transport position limiting mechanism (36) comprises a cylinder I (361) and a mounting plate (362), wherein the cylinder I (361) is fixedly mounted on the inner wall of the frame body (11) via the mounting plate (362); A mounting frame (364) is provided on the top of the mounting plate (362), a steering block (365) is provided inside the mounting frame (364), the steering block (365) is configured as a triangular plate, and a roller (366) is rotatably provided at one end of the steering block (365), and a steering shaft (367) is provided between the center of the steering block (365) and the mounting frame (364); The output shaft of the cylinder I (361) passes through the mounting plate (362) and is fixedly provided with a push rod (363), and a rotation pin is provided between the top end of the push rod (363) and the steering block (365).

5. The silicon wafer tooling empty basket rotary conveyor line according to claim 1, characterized in that: The silicon wafer basket (2) comprises a basket body and two plates, top and bottom, wherein the silicon wafer basket (2) comprises two placement positions: a horizontal position and a vertical position; The silicon wafer basket (2) is arranged in a transverse position to be a transport position in which the basket body and the frame body (11) are arranged horizontally; The longitudinal position of the silicon wafer basket (2) is set to a position to be transferred with the bottom plate placed on the basket placement table (46).

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