Composite probe and ultrasonic detection system

Abstract

The invention provides a composite probe and an ultrasonic detection system.The composite probe comprises a sound source transducer, an ultrasonic detector, a clamping structure, a frame combination structure and a liquid medium; the liquid medium is contained in a cavity defined by the frame combination structure and the ultrasonic detector. The frame combination structure is provided with an acoustic window area and a preset track, and the ultrasonic detector is located in the acoustic window area; the frame combination structure is used for flattening the ultrasonic detector; the clamping structure clamps the sound source transducer and is used for moving along the preset track relative to a target object located on the side, away from the sound source transducer, of the ultrasonic detector. The sound source transducer is used for emitting ultrasonic waves and detecting the target object; the ultrasonic detector is used for collecting ultrasonic signals from the target object.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic detection, and in particular to a composite probe and an ultrasonic detection system. Background Art

[0002] Compared with traditional B-ultrasound and color ultrasound imaging, flexible, large-area, array ultrasound detectors based on display semiconductor devices and piezoelectric film materials have advantages such as fine structure, matching target shape, and complete spatial signal. However, they have problems such as poor ultrasound emission performance and inability to maintain posture, which restricts the application of related devices.

[0003] Therefore, how to realize the design based on flexible ultrasonic detector has become a technical problem that needs to be solved urgently. Summary of the invention

[0004] The invention provides a composite probe and an ultrasonic detection system, which are used to improve the use performance of the composite probe designed based on a flexible ultrasonic detector.

[0005] In a first aspect, an embodiment of the present invention provides a composite probe, including:

[0006] Sound source transducer, ultrasonic detector, clamping structure, frame combination structure and liquid medium;

[0007] Wherein, the liquid medium is contained in a cavity surrounded by the frame combination structure and the ultrasonic detector; the frame combination structure is provided with an acoustic window area and a preset track, and the ultrasonic detector is located in the acoustic window area; the frame combination structure is used to flatten the ultrasonic detector; the clamping structure clamps the sound source transducer for moving along the preset track relative to a target object located on a side of the ultrasonic detector away from the sound source transducer; the sound source transducer is used to emit ultrasonic waves and detect the target object; the ultrasonic detector is used to collect ultrasonic signals from the target object.

[0008] In a possible implementation, the frame combination structure includes a first frame and a second frame, the ultrasonic detector is located between the first frame and the second frame, and the preset track is opened on a side of the first frame away from the ultrasonic detector.

[0009] In a possible implementation, the frame combination structure also includes a fixing column located in the peripheral area of ​​the first frame and located on the side of the first frame close to the ultrasonic detector. The first frame is fixedly connected to the second frame through the fixing holes at the corresponding positions of the ultrasonic detector and the second frame through the fixing column.

[0010] In a possible implementation, a threaded hole is provided in a top corner area of ​​the first frame, and the first frame is fixedly connected to the second frame through the threaded hole and through holes penetrating the ultrasonic detector and corresponding positions of the second frame.

[0011] In a possible implementation, the first frame includes a first end and a second end that are relatively arranged, the preset track includes a first sub-section arranged at the first end and a second sub-section parallel to the extension direction of the first sub-section, a third sub-section arranged at the second end and a fourth sub-section parallel to the extension direction of the third sub-section, a first slide groove arranged between the first sub-section and the second sub-section, and a second slide groove arranged between the third sub-section and the fourth sub-section, wherein the extension direction of the first slide groove is parallel to the extension direction of the second slide groove and perpendicular to the extension direction of the clamping structure, and the clamping structure can move along the first slide groove and the second slide groove relative to the target object.

[0012] In a possible implementation, the clamping structure is a sliding rod, which includes a main body and sliders arranged on opposite sides of the main body, wherein the slider can be accommodated in the preset track, and the main body is provided with an opening extending through the thickness direction, and the opening is greater than or equal to the acoustic window of the sound source transducer.

[0013] In a possible implementation, the sliding rod also includes a clamp and a deformable structure accommodated in the main body, wherein the deformable structure is fixedly connected to the clamp and the main body respectively, the clamp is used to clamp the sound source transducer, and the deformable structure can drive the sound source transducer to move.

[0014] In a possible implementation manner, the slider and the main body are formed integrally.

[0015] In a possible implementation, the slider is a bearing structure with a bearing and a bearing hole disposed therein, and the sliding rod also includes rollers disposed on opposite sides of the main body, and the main body is rotatably connected to the slider by the rollers passing through the bearing hole.

[0016] In a possible implementation, along a direction perpendicular to the plane where the ultrasonic probe is located, a cross-sectional shape of the slider is one of a rectangle and a circle.

[0017] In a possible implementation manner, the deformable structure is a spring or a damping rod.

[0018] In a possible implementation, the sound source transducer is a single-element sound source transducer, the clamping structure also includes an auxiliary structure mounted on the outside of the sound source transducer, the auxiliary structure is used to fix the sound source transducer, and the chuck clamps the sound source transducer through the auxiliary structure.

[0019] In a possible implementation, it further includes a signal terminal located in a peripheral area of ​​the ultrasound probe, wherein the signal terminal is used for binding and connecting with a flexible printed circuit board.

[0020] In a possible implementation, it further includes a pin arrangement structure located in the peripheral area of ​​the second frame, the pin arrangement structure extending in a direction perpendicular to the plane where the ultrasonic detector is located, and corresponding to the signal terminals located in the peripheral area of ​​the ultrasonic detector.

[0021] In a possible implementation manner, a length of a side of the needle arrangement structure close to the ultrasonic detector is smaller than a length of a side away from the ultrasonic detector.

[0022] In a possible implementation manner, the ultrasound probe includes a flexible substrate, a pixel circuit located on the flexible substrate, and a piezoelectric film structure located on a side of the pixel circuit away from the flexible substrate.

[0023] In a second aspect, an embodiment of the present invention further provides an ultrasonic detection system, comprising:

[0024] A composite probe as described in any one of the above items, a host computer electrically connected to the composite probe, a signal source electrically connected to the host computer, and a power amplifier electrically connected to the signal source and the sound source transducer respectively;

[0025] Among them, the host computer is used to generate a trigger signal to control the signal source to generate a target waveform signal; the power amplifier is used to amplify the target waveform signal and transmit it to the sound source transducer, so that the sound source transducer emits ultrasonic waves to detect the target object; and drives the ultrasonic detector to collect ultrasonic signals from the target object according to a preset rule.

[0026] In a possible implementation, the device further includes a pixel driving circuit electrically connected to the host computer and the ultrasonic detector, and a signal acquisition circuit electrically connected to the host computer and the ultrasonic detector, respectively.

[0027] The beneficial effects of the present invention are as follows:

[0028] The embodiment of the present invention provides a composite probe and an ultrasonic detection system, wherein the composite probe includes a sound source transducer, an ultrasonic detector, a clamping structure, a frame combination structure and a liquid medium, and the liquid medium is contained in a cavity surrounded by the frame combination structure and the ultrasonic detector. Exemplarily, the liquid medium is water, an ultrasonic coupling agent, silicone oil, etc., so as to realize the transmission of ultrasonic waves from the sound source transducer to the target object to be measured. Moreover, an acoustic window area and a preset track are provided on the frame combination structure, and the ultrasonic detector is located in the acoustic window area; the frame combination structure is used to flatten the ultrasonic detector. In this way, when the ultrasonic detector is a flexible array detector, the ultrasonic detector can be flattened by the frame combination structure, so as to keep the posture of the ultrasonic detector stable.

[0029] In addition, the clamping structure clamps the sound source transducer to move along a preset track relative to the target object located on the side of the ultrasonic detector away from the sound source transducer. In this way, on the one hand, dynamic scanning of the sound source transducer is realized, thereby ensuring the mobile scanning of the corresponding target object and improving the detection accuracy; on the other hand, the sound source transducer and the ultrasonic detector are two devices independently set from each other, and the ultrasonic transducer can be used as an independent sound source, and the acoustic emission performance of the independent sound source is good; accordingly, the target object is detected by generating ultrasonic waves through the sound source transducer, and the ultrasonic waves will cause phenomena such as transmission and reflection on the surface and internal interface of the target object. The subsequent ultrasonic detector can collect and image the ultrasonic signals from the target object, thereby realizing imaging detection of the target object. In this way, the performance of the composite probe is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of a three-dimensional structure of a composite probe provided in an embodiment of the present invention;

[0031] Figure 2 for Figure 1 A corresponding side view schematic diagram of one of the structures;

[0032] Figure 3 for Figure 1 One of the corresponding decomposition structure diagrams;

[0033] Figure 4 A schematic diagram of a three-dimensional structure of a first frame in a composite probe provided in an embodiment of the present invention;

[0034] Figure 5 for Figure 4 A corresponding schematic diagram of a top view structure;

[0035] Figure 6 For along Figure 5 A schematic diagram of one of the cross-sectional structures in the direction indicated by aa;

[0036] Figure 7 For along Figure 5 A schematic diagram of one of the cross-sectional structures in the direction indicated by bb;

[0037] Figure 8 For along Figure 5 A schematic diagram of one of the cross-sectional structures in the direction indicated by cc;

[0038] Fig. 9 A schematic diagram of a three-dimensional structure of a second frame in a composite probe provided in an embodiment of the present invention;

[0039] Fig.10 for Fig. 9 A corresponding side view schematic diagram of one of the structures;

[0040] Fig.11 A schematic diagram of a top view structure of an ultrasonic detector in a composite probe provided in an embodiment of the present invention;

[0041] Fig.12 A schematic diagram of one structure of a clamping structure in a composite probe provided in an embodiment of the present invention;

[0042] Fig.13 A schematic diagram of the assembly structure between the clamping structure and the sound source transducer in the composite probe provided by an embodiment of the present invention;

[0043] Fig.14 for Fig.13 A schematic diagram of a side view structure corresponding to the clamping structure;

[0044] Fig.15 for Fig.13 A schematic diagram of a top view structure corresponding to the clamping structure;

[0045] Fig.16 A schematic diagram of the assembly structure between the clamping structure and the first frame in the composite probe provided by an embodiment of the present invention;

[0046] Fig.17 A schematic diagram of the front view structure of a slider when the clamping structure in the composite probe provided by an embodiment of the present invention is a sliding rod;

[0047] Fig.18 for Fig.17 A schematic diagram of the side structure of the middle slider;

[0048] Fig.19 A schematic diagram of a top view structure of a slider when the clamping structure in the composite probe provided by an embodiment of the present invention is a sliding rod;

[0049] Fig. 20 for Fig.19 A corresponding side view schematic diagram of one of the structures;

[0050] Fig.21 A schematic diagram of a side view structure of a main body when the clamping structure of the composite probe provided in an embodiment of the present invention is a sliding rod;

[0051] Fig. 22 A schematic diagram of a structure in which the clamping structure of the composite probe provided in an embodiment of the present invention is a sliding rod;

[0052] Fig.23 A schematic diagram of one structure of a clamping structure in a composite probe provided in an embodiment of the present invention;

[0053] Fig.24 for Fig.23 Schematic diagram of the exploded structure between the sound source transducer and the auxiliary structure;

[0054] Fig.25 A schematic diagram of the connection structure between the ultrasonic detector and the flexible circuit board in the composite probe provided in an embodiment of the present invention;

[0055] Fig.26 A schematic diagram of a cross-sectional structure of an ultrasonic detector in a composite probe provided in an embodiment of the present invention;

[0056] Fig. 27 A schematic diagram of a structure of an ultrasonic detection system provided by an embodiment of the present invention;

[0057] Description of reference numerals:

[0058] 10-sound source transducer; 20-ultrasonic detector; 30-clamping structure; 40-frame combination structure; 50-liquid medium; A-sound window area; 60-preset track; 41-first frame; 42-second frame; 410-fixing column; 420-fixing hole; 411-threaded hole; 421-through hole; 412-first end; 413-second end; 61-first sub-section; 62-second sub-section; 63-third sub-section; 64-fourth sub-section; 65-first slide groove; 66-second slide groove; 301-sliding rod; 31-main body; 32-sliding block; 310-opening; 33-chuck; 34-deformable structure; 340-spring; 321-bearing; 322-bearing hole; 320-bearing structure; 35-roller; 341-damping rod; 302-auxiliary structure; 201-signal terminal; 70-flexible circuit board; 80-pin header structure; 202-flexible substrate; 203-pixel circuit; 204-piezoelectric film structure; 2031-active layer; 2032-gate insulation layer; 2033-gate layer; 2034-interlayer insulation layer; 2035-source and drain layer; 2036-passivation layer; 2041-first electrode layer; 2042-first insulation layer; 2043-piezoelectric film layer; 2044-second electrode layer; 100-composite probe; 200-host computer; 300-signal source; 400-power amplifier; 500-pixel drive circuit; 600-signal acquisition circuit. DETAILED DESCRIPTION

[0059] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. And in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present invention.

[0060] Unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Inside", "outside", "upper", "lower" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0061] It should be noted that the sizes and shapes of the figures in the accompanying drawings do not reflect the actual proportions, but are only intended to illustrate the content of the present invention. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions.

[0062] In the related art, the flexible large-area array detector has a high pixel density (Pixels Per Inch, PPI), which can quickly detect the sound field of the measurement surface and ensure that the phase and amplitude of the sound field are not distorted. However, the ultrasonic emission capability of the detector is weak and cannot form an effective detection capability.

[0063] In view of this, the embodiments of the present invention provide a composite probe and an ultrasonic detection system, which are used to improve the performance of the composite probe designed based on a flexible ultrasonic detector and form an effective detection capability.

[0064] Combination Figures 1 to 3 As shown, Figure 1 A schematic diagram of a three-dimensional structure of a composite probe provided in an embodiment of the present invention, Figure 2 for Figure 1 The corresponding side view structure diagram is as follows: Figure 3 for Figure 1 One of the corresponding decomposition structure diagrams. Specifically, the composite probe includes:

[0065] Sound source transducer 10, ultrasonic detector 20, clamping structure 30, frame assembly structure 40 and liquid medium 50 ( Figures 1 to 3 The configuration is not shown in the figure, but can be found in Fig.26 shown);

[0066] Among them, the liquid medium 50 is contained in a cavity surrounded by the frame combination structure 40 and the ultrasonic detector 20; the frame combination structure 40 is provided with an acoustic window area A and a preset track 60, and the ultrasonic detector 20 is located in the acoustic window area A; the frame combination structure 40 is used to flatten the ultrasonic detector 20; the clamping structure 30 clamps the sound source transducer 10 for moving along the preset track 60 relative to the target object located on the side of the ultrasonic detector 20 away from the sound source transducer 10; the sound source transducer 10 is used to emit ultrasonic waves and detect the target object; the ultrasonic detector 20 is used to collect ultrasonic signals from the target object.

[0067] In the specific implementation process, an embodiment of the present invention provides a composite probe, which includes a sound source transducer 10, an ultrasonic detector 20, a clamping structure 30, a frame assembly structure 40, and a liquid medium 50 contained in a cavity surrounded by the frame assembly structure 40 and the ultrasonic detector 20. Exemplarily, the liquid medium 50 is water, an ultrasonic coupling agent, silicone oil, etc. In practical applications, the liquid medium 50 at least immerses the side of the sound source transducer 10 close to the ultrasonic detector 20, thereby ensuring the transmission of ultrasonic waves from the sound source transducer 10 to the target object being measured. In addition, the frame assembly structure 40 is provided with an acoustic window area A and a preset track 60 (not clearly shown in the figure, the relevant structure refers to the description of the corresponding part below), wherein the ultrasonic detector 20 is located in the acoustic window area A, and the frame assembly structure 40 is used to flatten the ultrasonic detector 20. In this way, when the ultrasonic detector 20 is a flexible array detector, the ultrasonic detector 20 can be flattened by the frame assembly structure 40, thereby maintaining the stability of the posture of the ultrasonic detector 20.

[0068] In addition, the clamping structure 30 clamps the sound source transducer 10 to move along the preset track 60 relative to the target object located on the side of the ultrasonic detector 20 away from the sound source transducer 10, wherein the reference numeral 01 in the figure represents the target object to be measured. In this way, on the one hand, the dynamic scanning of the sound source transducer 10 is realized, thereby ensuring the mobile scanning of the corresponding target object and improving the detection accuracy; on the other hand, the sound source transducer 10 and the ultrasonic detector 20 are two devices independently arranged from each other, and the ultrasonic transducer can be used as an independent sound source, and the acoustic emission performance of the independent sound source is good; accordingly, the target object is detected by generating ultrasonic waves through the sound source transducer 10, and the ultrasonic waves will cause phenomena such as transmission and reflection on the surface and internal interface of the target object, and the subsequent ultrasonic detector 20 can collect and image the ultrasonic signals from the target object, thereby realizing the imaging detection of the target object. In this way, the performance of the composite probe is improved.

[0069] It should be noted that a certain distance is maintained between the sound source transducer 10 and the ultrasonic probe 20. In this way, when the target object is detected by the composite probe, even if the target object causes the ultrasonic probe 20 to bulge upward, it will not contact the sound source transducer 10, thereby ensuring the performance of the composite probe. Figure 1 The direction indicated by the arrow x is the extension direction of the clamping structure 30, the direction indicated by the arrow y is the direction in which the clamping structure 30 can move along the preset slide rail 60, and the direction indicated by the arrow z is the direction perpendicular to the plane where the arrows x and y are located, which can be along the thickness direction of the frame combination structure 40.

[0070] In the embodiment of the present invention, still combined with Figures 1 to 3 As shown, the frame combination structure 40 includes a first frame 41 and a second frame 42, the ultrasonic detector 20 is located between the first frame 41 and the second frame 42, and the preset track 60 is provided on the side of the first frame 41 away from the ultrasonic detector 20. In this way, the ultrasonic detector 20 can be effectively clamped by the first frame 41 and the second frame 42, thereby ensuring the posture stability of the ultrasonic detector 20. In addition, for the specific structure of the first frame 41 and the second frame 42, reference can be made to the description of the relevant parts below, which will not be described in detail here. In addition, in the specific implementation process, the sound source transducer 10 and the ultrasonic detector 20 are fixed by related structural parts. The ultrasonic detector 20 can be first clamped by the first frame 41 and the second frame 42 to allow it to maintain stability on all four sides; the ultrasonic detector 20 can be a flexible array detector, and accordingly, the stability of the flexible array detector is ensured by the first frame 41 and the second frame 42; moreover, the flexible array detector can have limited bending and deformation capabilities; secondly, a clamping structure 30 is installed on the frame combination structure 40, and the clamping structure 30 can fix the ultrasonic transducer thereon, and at the same time, one-dimensional movement or two-dimensional movement can be achieved through the preset track 60 and the clamping structure 30.

[0071] Combine the following Figures 4 to 11 As shown, the structures of the first frame 41, the second frame 42 and the ultrasonic detector 20 in the composite probe in the embodiment of the present invention are explained in detail. Figure 4 FIG. 4 is a schematic diagram of a three-dimensional structure of the first frame 41. Figure 5 for Figure 4 The corresponding schematic diagram of one of the top views is as follows: Figure 6 For along Figure 5 A schematic diagram of one of the cross-sectional structures in the direction indicated by aa. Figure 7 For along Figure 5 A schematic diagram of one of the cross-sectional structures in the direction shown in bb, Figure 8 For along Figure 5A schematic diagram of one of the cross-sectional structures in the direction indicated by cc. Fig. 9 is a schematic diagram of a three-dimensional structure of the second frame 42. Fig.10 for Fig. 9 The corresponding side view structure diagram is as follows: Fig.11 It is a schematic diagram of a top view of the structure of an ultrasonic detector 20 .

[0072] Still combined Figure 2 , Figure 4 , Figure 5 , Fig. 9 and Fig.11 As shown, the frame combination structure 40 also includes a fixing column 410 located in the peripheral area of ​​the first frame 41 and located on the side of the first frame 41 close to the ultrasonic detector 20. The first frame 41 is fixedly connected to the second frame 42 through the fixing holes 420 at the corresponding positions of the ultrasonic detector 20 and the second frame 42 through the fixing column 410. It should be noted that there can be multiple fixing columns 410 located on the side of the first frame 41 close to the ultrasonic detector 20. The specific number and specific distribution of the fixing columns 410 can be set according to the actual application needs and are not limited here. Moreover, according to the setting of the fixing columns 410 on the first frame 41, the fixing holes 420 can be opened at the corresponding positions of the second frame 42 and the ultrasonic detector 20. In this way, the fixing column 410 can be set in the fixing hole 420, thereby ensuring the clamping ability between the first frame 41 and the second frame 42. In this way, the ultrasonic detector 20 can be effectively clamped by the first frame 41 and the second frame 42, which provides the possibility of maintaining the posture stability of the ultrasonic detector 20.

[0073] It should be noted that, in the specific implementation process, the fixing holes 420 can be evenly distributed in the peripheral area of ​​the ultrasonic detector 20, or can be unevenly distributed in the peripheral area of ​​the ultrasonic detector 20, and are arranged corresponding to the fixing holes 420 on the corresponding second frame 42 and the fixing posts 410 on the first frame 41. In practical applications, after the fixing posts 410 are sequentially passed through the fixing holes 420 located on the ultrasonic detector 20 and the fixing holes 420 located on the second frame 42, the first frame 41 and the second frame 42 are effectively clamped on the ultrasonic detector 20.

[0074] In the embodiment of the present invention, a threaded hole 411 is opened at the top corner area of ​​the first frame 41, and the first frame 41 is fixedly connected to the second frame 42 through the threaded hole 411 and a through hole 421 that passes through the ultrasonic detector 20 and the corresponding position of the second frame 42.

[0075] Still combined Figure 5 , Fig. 9 and Fig.11 In the exemplary embodiment shown, threaded holes 411 are provided at the four vertex areas of the first frame 41, through holes 421 are provided at the four vertex areas of the second frame 42, and through holes 421 are provided at the four vertex areas of the ultrasonic detector 20, and the threaded holes 411 and the through holes 421 are arranged in a one-to-one correspondence. In this way, the first frame 41 can be fixedly connected to the second frame 42 through the threaded holes 411 and the through holes 421 that penetrate the ultrasonic detector 20 and the corresponding positions of the second frame 42. In actual applications, bolts can be inserted into the threaded holes 411 and the through holes 421 at the corresponding positions, thereby achieving a fixed connection between the first frame 41 and the second frame 42. It should be noted that the specific arrangement of the threaded holes 411 and the through holes 421 can be arranged according to actual application needs, and is not limited here.

[0076] In the embodiment of the present invention, still combined with Figure 4 , Figures 6 to 8 As shown, the first frame 41 includes a first end 412 and a second end 413 that are arranged opposite to each other, the preset track 60 includes a first sub-portion 61 arranged at the first end 412 and a second sub-portion 62 that is parallel to the extension direction of the first sub-portion 61, a third sub-portion 63 arranged at the second end 413 and a fourth sub-portion 64 that is parallel to the extension direction of the third sub-portion 63, a first slide groove 65 arranged between the first sub-portion 61 and the second sub-portion 62, and a second slide groove 66 arranged between the third sub-portion 63 and the fourth sub-portion 64, wherein the extension direction of the first slide groove 65 is parallel to the extension direction of the second slide groove 66 and is perpendicular to the extension direction of the clamping structure 30, and the clamping structure 30 can move along the first slide groove 65 and the second slide groove 66 relative to the target object. Figure 1 As shown, the direction indicated by arrow x is the extension direction of the clamping structure 30, and the direction indicated by arrow y is the extension direction of the first slide groove 65 and the second slide groove 66. Of course, in addition to the above-mentioned structures, the preset track 60 can also be set with tracks of other structures according to actual scanning needs, which is not limited here.

[0077] It should be noted that in Figures 6 to 8 In the exemplary embodiment shown, the first sub-section 61 and the third sub-section 63 may be the upper part of the preset slide rail 60, and the second sub-section 62 and the fourth sub-section 64 may be the lower part of the preset slide rail 60. Figure 6 As shown, the preset slide rail 60 may not have an upper portion of the slide rail, and the upper portion of the slide rail here is opened to facilitate the installation of the clamping structure 30, and the size of the opening here may match the structural dimensions set at opposite ends of the clamping structure 30. In addition, in actual applications, the fixing column 410 may be designed as an integral part of the acoustic window boundary area of ​​the first frame 41. Figure 7 and Figure 8 The complete structure of the preset slide rail 60 is shown in the figure, and a slide groove is left between the upper and lower parts of the slide rail. The size of the slide groove matches the structural size of the opposite ends of the clamping structure 30, and the structures at the opposite ends of the clamping structure 30 can slide qualitatively along the corresponding slide groove inside the slide rail. In addition, the threaded hole 411 is usually set in the boundary area of ​​the acoustic window, which effectively avoids the influence on the ultrasonic transmission while ensuring the stability of the structure, thereby taking into account the efficiency of ultrasonic detection.

[0078] In the embodiment of the present invention, the clamping structure 30 may have the following configurations, but is not limited to the following configurations and is not limited here.

[0079] In one exemplary embodiment, Fig.12 As shown, the clamping structure 30 is a sliding rod 301, which includes a main body 31 and sliders 32 arranged on opposite sides of the main body 31, wherein the slider 32 can be accommodated in the preset track 60, and the main body 31 is provided with an opening 310 extending through the thickness direction, and the opening 310 is greater than or equal to the sound window of the sound source transducer 10.

[0080] exist Fig.12 In the exemplary embodiment shown, the main body 31 of the sliding rod 301 is a shell structure, which can be a rectangular parallelepiped structure. The middle area of ​​the main body 31 is grooved, and there is no solid material on the top of the main body 31, so that the sound source transducer 10 can be inserted and installed; the sound window of the sound source transducer 10 is left at the bottom of the main body 31, and accordingly, an opening 310 is opened at the bottom of the main body 31. In practical applications, the width of the opening 310 is greater than or equal to the sound window of the sound source transducer 10, and is smaller than the width of the sound source transducer 10; in this way, on the one hand, the obstruction of ultrasonic propagation is avoided; on the other hand, the sound source positioning is guaranteed. In the actual preparation process, the sliding rod 301 can be made of engineering plastics, and the material of the sliding rod 301 can be acrylic, polycarbonate, nylon, etc., which is not limited here. It should be noted that in this exemplary embodiment, the sound source transducer 10 can move freely along the x-axis direction, and the moving range is large, thereby ensuring the scanning efficiency of the sound source transducer 10.

[0081] In the embodiment of the present invention, the sliding rod 301 further includes a clamp 33 and a deformable structure 34 accommodated in the main body 31, wherein the deformable structure 34 is fixedly connected to the clamp 33 and the main body 31 respectively, the clamp 33 is used to clamp the sound source transducer 10, and the deformable structure 34 can drive the sound source transducer 10 to move. In one exemplary embodiment, the deformable structure 34 is a spring 340. Figures 13 to 15 As shown, Fig.13is a schematic diagram of the assembly structure between the clamping structure 30 and the sound source transducer 10, Fig.14 for Fig.13 A schematic diagram of a side view structure corresponding to the middle clamping structure 30, Fig.15 for Fig.13 A schematic diagram of a top view of the structure corresponding to the middle clamping structure 30.

[0082] exist Figures 13 to 15 In the exemplary embodiment shown, the deformable structure 34 accommodated in the main body 31 is a spring 340, which is fixedly connected to the chuck 33 and the main body 31, respectively. The chuck 33 is used to clamp the sound source transducer 10, and the spring 340 can drive the sound source transducer 10 to move along the x-axis direction. Exemplarily, the contact surface between the chuck 33 and the sound source transducer 10 can be designed to be V-shaped, thereby ensuring that the clamped sound source transducer 10 will not be offset; in addition, the surface of the V-shaped structure can be pasted with elastic materials, such as silicone, rubber, etc., which are not limited here. Accordingly, one end of the spring 340 can be fixed on the plane on the back of the V-shaped structure of the chuck 33, and the other end can be fixed on the inner wall of the main body 31. Of course, the chuck 33 can also be set according to the actual application needs, which is not limited here.

[0083] In the specific implementation process, if the clamping structure 30 is Figures 13 to 15 The sliding rod 301 shown in FIG. 1 and the assembly structure between the sliding rod 301 and the first frame 41 are shown in FIG. Fig.16 In practical applications, the sliders 32 located at opposite sides of the main body 31 can be placed on the preset slide rails reserved on the first frame 41, so as to realize the movement function of the slide rod 301. Specifically, the sliders 32 can be installed in the slide groove between the upper part and the lower part of the slide rail through the opening 310 located at the upper part of the preset slide rail, and move in the corresponding slide groove.

[0084] In the embodiment of the present invention, along a direction perpendicular to the plane where the ultrasonic probe 20 is located, the cross-sectional shape of the slider 32 is one of a rectangle and a circle.

[0085] In the specific implementation process, combined with Figures 13 to 15 In the exemplary embodiment shown, along the direction perpendicular to the plane where the ultrasonic probe 20 is located, the cross-sectional shape of the slider 32 can be rectangular. Accordingly, the slider 32 can be a cuboid structure or a cube structure, which is not limited here. Fig.17 and Fig.18 In the exemplary embodiment shown, the cross-sectional shape of the slider 32 along the direction perpendicular to the plane where the ultrasonic probe 20 is located can also be circular. Fig.17 FIG. 2 is a front view of the structure of the slider 32 in the exemplary embodiment. Fig.18FIG. 3 is a schematic diagram of the side view of the slider 32 in the exemplary embodiment. Fig.17 and Fig.18 In the exemplary embodiment shown, the slider 32 may be a cylinder, so that the sliding rod 301 can not only slide in a direction parallel to the y-axis but also rotate around the x-axis, thereby increasing the scanning range of the sound source transducer 10.

[0086] In the embodiment of the present invention, the slider 32 and the main body 31 are formed in one piece.

[0087] In the actual preparation process, the slider 32 and the main body 31 can be an integrally formed structure, thereby reducing the production cost. Of course, according to actual application needs, the slider 32 and the main body 31 can be prepared separately first, and then the slider 32 is fixed on the main body 31.

[0088] In one exemplary embodiment, in combination Figures 19 to 21 As shown, Fig.19 FIG. 1 is a schematic diagram of a top view of a slider 32. Fig. 20 for Fig.19 The corresponding side view structure diagram, Fig.21 It is a schematic diagram of a side view structure of the main body 31. Specifically, the slider 32 is a bearing structure 320 with a bearing 321 and a bearing hole 322 disposed therein, and the sliding rod 301 also includes rollers 35 disposed on opposite sides of the main body 31, and the main body 31 is rotatably connected to the slider 32 by the rollers 35 passing through the bearing hole 322. In the specific implementation process, the slider 32 can be accommodated in the slide groove of the preset track 60, and accordingly, can slide along the x-axis direction; the roller 35 of the sliding rod 301 can be inserted into the bearing hole 322 of the slider 32; by using the mutual cooperation of the roller 35 and the bearing, it can be ensured that the sliding rod 301 can be rotated along the x-axis, thereby ensuring that the sound source transducer 10 can perform rotational scanning on the target object, thereby improving the detection performance of the composite probe.

[0089] In one exemplary embodiment, the deformable structure 34 may also be a damping rod 341, such as Fig. 22 The figure shows a schematic diagram of one structure of the sliding rod 301. In this way, it is easier to control the movement and position of the sound source transducer 10, and the sound source transducer 10 can move freely in a larger range along the x-axis direction. Of course, the deformable structure 34 can be other structures set according to actual application needs in addition to the spring 340 or the damping rod 341, which is not limited here.

[0090] In one exemplary embodiment, in combination Fig.23 and Fig.24 As shown, Fig.23 is a schematic diagram of one of the assembly structures of the clamping structure 30 and the sound source transducer 10, Fig.24 for Fig.23 Schematic diagram of the exploded structure between the sound source transducer 10 and the auxiliary structure 302. Specifically, the sound source transducer 10 is a single-element sound source transducer 10, and the clamping structure 30 also includes an auxiliary structure 302 sleeved on the outside of the sound source transducer 10, the auxiliary structure 302 is used to fix the sound source transducer 10, and the clamp 33 clamps the sound source transducer 10 through the auxiliary structure 302.

[0091] Still combined Fig.23 In the exemplary embodiment shown, for a single-element sound source transducer 10, its diameter is often small and not easy to be firmly clamped by the clamp 33. In order to improve the firm clamping of the clamping structure 30 on the sound source transducer 10, an auxiliary structure 302 can be sleeved on the outside of the sound source transducer 10. The auxiliary structure 302 is a rectangular parallelepiped shape as a whole, with an opening inside, and threaded holes 411 can be left on both sides for fixing with bolts. In practical applications, the small-diameter single-element sound source transducer 10 can be first fixed to the auxiliary structure 302 through the threaded holes 411 and the corresponding bolts, and then the assembled sound source transducer 10 is placed in the clamp 33. In this way, during the movement, the sound source transducer 10 is prevented from falling off, deviating from the sliding rod 301, and other problems, thereby improving the performance of the composite probe.

[0092] In the embodiment of the present invention, in order to ensure the signal transmission performance of the ultrasonic detector 20, the following methods can be used to set the connection between the external circuit and the ultrasonic detector 20, but are not limited to the following methods.

[0093] In one exemplary embodiment, Fig.25 As shown, the composite probe further includes a signal terminal 201 located in the peripheral area of ​​the ultrasonic probe 20 , and the signal terminal 201 is used for binding and connecting with the flexible printed circuit board 70 .

[0094] In the specific implementation process, the readout signal line and the gate signal line of the pixel circuit 203 can be respectively led out from the peripheral area of ​​the ultrasonic detector 20, and electrically connected to the corresponding signal terminal 201, and then bonded and connected to the flexible circuit board 70 through a bonding process. Fig.25 The figure shows one of the structural forms of the flexible circuit board 70 and the ultrasonic detector 20. Accordingly, the flexible circuit board 70 passes through between the first frame 41 and the second frame 42. It should be noted that the other end of the flexible circuit board 70 can be electrically connected to the pixel circuit 203, and the corresponding electrical signal can be input into the ultrasonic detector 20 through the pixel circuit 203.

[0095] In one exemplary embodiment, still in combination Fig. 9 and Fig.10 As shown, the composite probe also includes a pin header structure 80 located in the peripheral area of ​​the second frame 42 . The pin header structure 80 extends in a direction perpendicular to the plane where the ultrasonic detector 20 is located, and is corresponding to the signal terminal 201 located in the peripheral area of ​​the ultrasonic detector 20 .

[0096] exist Fig. 9 and Fig.10 In the exemplary embodiment shown, the length of the pin header structure 80 at a side close to the ultrasound probe 20 is shorter than the length of the side away from the ultrasound probe 20 .

[0097] In the specific implementation process, the pin row structure 80 located in the peripheral area of ​​the second frame 42 is set in a one-to-one correspondence with the signal terminal 201 on the ultrasonic detector 20. In the process of clamping the ultrasonic detector 20 by the first frame 41 and the second frame 42, the pin row structure 80 can be attached to the signal terminal 201 at the corresponding position. In this way, the pixel driving signal required by the ultrasonic detector 20 can be input through the pin row structure 80, and the signal collected by the ultrasonic detector 20 can also be read out through the pin row structure 80, thereby improving the signal transmission performance of the ultrasonic probe. In one exemplary embodiment, the length of the side of the pin row structure 80 close to the ultrasonic detector 20 can be in the range of 0.01mm to 0.1mm, thereby avoiding the damage of the pin row structure 80 to the ultrasonic detector 20; the length of the side of the pin row structure 80 away from the ultrasonic detector 20 can be in the range of 5mm to 10mm, thereby ensuring the connection efficiency between the subsequent pin row structure 80 and the relevant connector.

[0098] In the embodiment of the present invention, Fig.26 As shown, the ultrasound probe 20 includes a flexible substrate 202 , a pixel circuit 203 located on the flexible substrate 202 , and a piezoelectric film structure 204 located on a side of the pixel circuit 203 away from the flexible substrate 202 .

[0099] In the specific implementation process, the ultrasonic detector 20 includes a flexible substrate 202, which can be used as a carrier of the functional units related to the ultrasonic detector 20, and accordingly, can be used as a strength support material of the ultrasonic detector 20. Exemplarily, the flexible substrate 202 can be a polymer film material such as a polyimide film and a polyethylene film. In addition, the ultrasonic detector 20 also includes a pixel circuit 203 located on the flexible substrate 202, and a piezoelectric film structure 204 located on the side of the pixel circuit 203 away from the flexible substrate 202. Among them, the pixel circuit 203 includes an active layer 2031, a gate insulating layer 2032, a gate layer 2033, and an interlayer insulating layer 2034 sequentially arranged on the flexible substrate 202, and also includes a source and drain layer 2035 that penetrates the interlayer insulating layer 2034 and the gate insulating layer 2032 and is electrically connected to the active layer 2031, and a passivation layer 2036 located on the side of the source and drain layer 2035 away from the flexible substrate 202. In addition, the ultrasonic detector 20 also includes a piezoelectric film structure 204 located on the side of the pixel circuit 203 away from the flexible substrate 202. The piezoelectric film structure 204 includes a first electrode layer 2041, a first insulating layer 2042, a piezoelectric film layer 2043 and a second electrode layer 2044, which are sequentially arranged away from the flexible substrate 202. Among them, the first electrode layer 2041 includes a plurality of electrode blocks; the piezoelectric film structure 204 also includes an insulating material arranged around each electrode block, and accordingly, each electrode block in the plurality of electrode blocks is arranged independently of each other. The piezoelectric film layer 2043 is used to realize the "acoustic-electric" conversion of the acoustic signal and is a sensitive material of the ultrasonic detector 20. Exemplarily, the piezoelectric film layer 2043 can be a piezoelectric polymer material such as PVDF, PVDF-TrFE, and a 1-3 composite piezoelectric material based on a piezoelectric crystal such as PZT, PMN-PT. The material of the first insulating layer 2042 can be SiNx, which is not limited here. Of course, in addition to the membrane layer structure mentioned above, the ultrasonic detector 20 may also include other membrane layer structures, which are not limited here.

[0100] Based on the same inventive concept, Fig. 27 As shown, an embodiment of the present invention further provides an ultrasonic detection system, the ultrasonic detection system comprising:

[0101] The composite probe 100 as described in any of the above, a host computer 200 electrically connected to the composite probe 100, a signal source 300 electrically connected to the host computer 200, and a power amplifier 400 electrically connected to the signal source 300 and the sound source transducer 10 respectively;

[0102] Among them, the host computer 200 is used to generate a trigger signal to control the signal source 300 to generate a target waveform signal; the power amplifier 400 is used to amplify the target waveform signal and transmit it to the sound source transducer 10, so that the sound source transducer 10 emits ultrasonic waves to detect the target object; and drives the ultrasonic detector 20 to collect ultrasonic signals from the target object according to a preset rule.

[0103] In one exemplary embodiment, the signal source 300 and the power amplifier 400 are used to provide a high-voltage electrical pulse signal with a voltage peak of about 100V to 200V. The output electrical signal directly excites the sound source transducer 10 .

[0104] In the embodiment of the present invention, still combined with Fig. 27 As shown, the ultrasonic detection system further includes a pixel driving circuit 500 electrically connected to the host computer 200 and the ultrasonic detector 20 respectively, and a signal acquisition circuit 600 electrically connected to the host computer 200 and the ultrasonic detector 20 respectively.

[0105] In the specific implementation process, the pixel driving circuit 500 is mainly used to provide the ultrasonic detector 20 with a timing signal for controlling the switch of the pixel circuit 203; the signal acquisition circuit 600 is mainly used to collect current signals from the pixel circuit 203 and upload them to the host computer 200.

[0106] In addition, the principle of solving the problem by the ultrasonic detection system is similar to that of the aforementioned composite probe 100100, so the implementation of the ultrasonic detection system can refer to the implementation of the aforementioned composite probe 100100, and the repeated parts will not be repeated.

[0107] The embodiment of the present invention provides a composite probe and an ultrasonic detection system, wherein the composite probe includes a sound source transducer 10, an ultrasonic detector 20, a clamping structure 30, a frame assembly structure 40 and a liquid medium 50, and the liquid medium 50 is contained in a cavity surrounded by the frame assembly structure 40 and the ultrasonic detector 20. Exemplarily, the liquid medium 50 is water, an ultrasonic coupling agent, silicone oil, etc., so as to realize the transmission of ultrasonic waves from the sound source transducer 10 to the target object to be measured. Moreover, an acoustic window area A and a preset track 60 are provided on the frame assembly structure 40, and the ultrasonic detector 20 is located in the acoustic window area A; the frame assembly structure 40 is used to flatten the ultrasonic detector 20, so that when the ultrasonic detector 20 is a flexible array detector, the ultrasonic detector 20 can be flattened by the frame assembly structure 40, so as to keep the posture of the ultrasonic detector 20 stable.

[0108] In addition, the clamping structure 30 clamps the sound source transducer 10 to move along the preset track 60 relative to the target object located on the side of the ultrasonic detector 20 away from the sound source transducer 10. In this way, on the one hand, dynamic scanning of the sound source transducer 10 is realized, thereby ensuring the mobile scanning of the corresponding target object and improving the detection accuracy; on the other hand, the sound source transducer 10 and the ultrasonic detector 20 are two devices independently set from each other, and the ultrasonic transducer can be used as an independent sound source, and the acoustic emission performance of the independent sound source is good; accordingly, the target object is detected by the ultrasonic wave generated by the sound source transducer 10, and the ultrasonic wave will cause phenomena such as transmission and reflection on the surface and internal interface of the target object. The subsequent ultrasonic detector 20 can collect and image the ultrasonic signal from the target object, thereby realizing imaging detection of the target object. In this way, the performance of the composite probe is improved.

[0109] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0110] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A composite probe, It is characterized in that include: Sound source transducer, ultrasonic detector, clamping structure, frame combination structure and liquid medium; Wherein, the liquid medium is contained in a cavity surrounded by the frame combination structure and the ultrasonic detector; the frame combination structure is provided with an acoustic window area and a preset track, and the ultrasonic detector is located in the acoustic window area; the frame combination structure is used to flatten the ultrasonic detector; the clamping structure clamps the sound source transducer for moving along the preset track relative to a target object located on a side of the ultrasonic detector away from the sound source transducer; the sound source transducer is used to emit ultrasonic waves and detect the target object; the ultrasonic detector is used to collect ultrasonic signals from the target object.

2. The composite probe according to claim 1, It is characterized in that The frame combination structure includes a first frame and a second frame, the ultrasonic detector is located between the first frame and the second frame, and the preset track is opened on a side of the first frame away from the ultrasonic detector.

3. The composite probe according to claim 2, It is characterized in that The frame combination structure also includes a fixing column located in the peripheral area of ​​the first frame and on the side of the first frame close to the ultrasonic detector. The first frame is fixedly connected to the second frame through the fixing holes at corresponding positions of the ultrasonic detector and the second frame through the fixing column.

4. The composite probe according to claim 3, It is characterized in that A threaded hole is provided in the top corner area of ​​the first frame, and the first frame is fixedly connected to the second frame through the threaded hole and through holes penetrating the ultrasonic detector and corresponding positions of the second frame.

5. The composite probe according to any one of claims 2 to 4, It is characterized in that The first frame includes a first end and a second end that are relatively arranged, the preset track includes a first sub-section arranged at the first end and a second sub-section parallel to the extension direction of the first sub-section, a third sub-section arranged at the second end and a fourth sub-section parallel to the extension direction of the third sub-section, a first slide groove arranged between the first sub-section and the second sub-section, and a second slide groove arranged between the third sub-section and the fourth sub-section, wherein the extension direction of the first slide groove is parallel to the extension direction of the second slide groove and is perpendicular to the extension direction of the clamping structure, and the clamping structure can move along the first slide groove and the second slide groove relative to the target object.

6. The composite probe according to any one of claims 1 to 4, It is characterized in that The clamping structure is a sliding rod, which includes a main body and sliders arranged on opposite sides of the main body, wherein the slider can be accommodated in the preset track, and the main body is provided with an opening running through the thickness direction, and the opening is larger than or equal to the sound window of the sound source transducer.

7. The composite probe according to claim 6, It is characterized in that The sliding rod also includes a clamp and a deformable structure accommodated in the main body, wherein the deformable structure is fixedly connected to the clamp and the main body respectively, the clamp is used to clamp the sound source transducer, and the deformable structure can drive the sound source transducer to move.

8. The composite probe according to claim 6, It is characterized in that The slider is integrally formed with the main body.

9. The composite probe according to claim 6, It is characterized in that The slider is a bearing structure with a bearing and a bearing hole disposed therein. The sliding rod also includes rollers disposed on opposite sides of the main body. The main body passes through the bearing hole through the rollers and is rotatably connected to the slider.

10. The composite probe according to claim 6, It is characterized in that Along a direction perpendicular to the plane where the ultrasonic probe is located, the cross-sectional shape of the slider is one of a rectangle and a circle.

11. The composite probe according to claim 7, It is characterized in that The deformable structure is a spring or a damping rod.

12. The composite probe according to claim 7, It is characterized in that The sound source transducer is a single-element sound source transducer, and the clamping structure further includes an auxiliary structure sleeved on the outside of the sound source transducer, the auxiliary structure is used to fix the sound source transducer, and the chuck clamps the sound source transducer through the auxiliary structure.

13. The composite probe according to any one of claims 1 to 4, It is characterized in that It also includes a signal terminal located in the peripheral area of ​​the ultrasonic detector, and the signal terminal is used for binding and connecting with the flexible circuit board.

14. The composite probe according to any one of claims 1 to 4, It is characterized in that It also includes a pin arrangement structure located in the peripheral area of ​​the second frame. The pin arrangement structure is extended in a direction perpendicular to the plane where the ultrasonic detector is located and is corresponding to the signal terminals located in the peripheral area of ​​the ultrasonic detector.

15. The composite probe according to claim 14, It is characterized in that The length of the needle arrangement structure at a side close to the ultrasonic detector is smaller than the length of the side away from the ultrasonic detector.

16. The composite probe according to any one of claims 1 to 4, It is characterized in that The ultrasonic detector comprises a flexible substrate, a pixel circuit located on the flexible substrate, and a piezoelectric film structure located on a side of the pixel circuit away from the flexible substrate.

17. An ultrasonic detection system, It is characterized in that include: The composite probe according to any one of claims 1 to 16, a host computer electrically connected to the composite probe, a signal source electrically connected to the host computer, and a power amplifier electrically connected to the signal source and the sound source transducer respectively; Among them, the host computer is used to generate a trigger signal to control the signal source to generate a target waveform signal; the power amplifier is used to amplify the target waveform signal and transmit it to the sound source transducer, so that the sound source transducer emits ultrasonic waves to detect the target object; and drives the ultrasonic detector to collect ultrasonic signals from the target object according to a preset rule.

18. The system of claim 17, It is characterized in that It also includes a pixel driving circuit electrically connected to the host computer and the ultrasonic detector respectively, and a signal acquisition circuit electrically connected to the host computer and the ultrasonic detector respectively.

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