Target material side face machining tool and machining method

Abstract

The invention provides a target material side face machining tool and a machining method. The target material side face machining tool comprises a tool bar and a diamond tool bit. The included angle between the diamond tool bit and the tool bar is 100-140 degrees; according to the machining method, the target material side face machining tool is adopted, and the side face of the target material is milled under the condition that the feeding speed ranges from 4000 mm / min to 5000 mm / min. The cutter and milling parameters are reasonably designed, so that the cutter lines on the side surface of the target material are effectively reduced, and the side surface of the target material can be normally used.

Description

Technical Field

[0001] The present invention relates to the technical field of target material processing, and in particular to a target material side surface processing tool and a processing method. Background Art

[0002] The sputtering process is a process that bombards the solid surface with particles (ions or neutral atoms, molecules) of a certain energy, so that the atoms or molecules near the solid surface gain enough energy and eventually escape from the solid surface. Sputtering targets have high requirements in terms of surface roughness, resistance value, grain size uniformity, composition and organization uniformity, foreign matter (oxide) content and size, magnetic permeability, ultra-high density and ultra-fine grains, etc.

[0003] CN111408917A discloses a machining process for LCD planar target materials, comprising the following steps: 1) machining both surfaces of a LCD planar target material blank; 2) semi-finishing the sputtering surface of the LCD planar target material; 3) rough machining the side surface of the LCD planar target material; 4) finishing machining the sputtering surface of the LCD planar target material; 5) finishing machining the side surface and arc angle of the LCD planar target material. This method can effectively solve the abnormal discharge phenomenon of the LCD planar target material caused by residual stress, and effectively control the stress layer thickness of the target material after machining.

[0004] CN111421393A discloses a side polishing process for LCD target materials, which includes: fixing the LCD target material, fixing the grinding head on a machine tool, and the machine tool driving the grinding head to polish the side of the LCD target material. The side polishing process for LCD target materials improves the processing efficiency of side polishing of LCD target materials, the processing time of a single target is about 20 to 40 minutes, the roughness is stabilized at 2.5 to 3.5 μm, and the quality stability is guaranteed.

[0005] CN113151798A discloses a target material assembly and a processing method thereof, the processing method comprising the following steps: combining a target material and a back plate and then machining them to obtain a primary target material assembly; knurling the edge of the sputtering surface of the target material in the primary target material assembly and part of the target material side area, and sandblasting the remaining area of ​​the target material side and part of the back plate area to obtain a target material assembly.

[0006] However, none of the above target material processing methods solves the problem of heavy knife marks on the side of the target material. Summary of the invention

[0007] In order to solve the above technical problems, the present invention provides a target material side processing tool and processing method, which effectively reduces the knife marks on the target material side by rationally designing the tool parameters and tool milling processing parameters, thereby ensuring that the target material side can be used normally.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] In a first aspect, the present invention provides a target side machining tool, the target side machining tool comprising a tool rod and a diamond bit; the angle between the diamond bit and the tool rod is 100° to 140°.

[0010] The tool head of the target material side processing tool provided by the present invention is made of diamond material, which can ensure that the roughness of the target material side meets the use requirements; and the angle between the diamond tool head and the tool rod is 100° to 140°. When the tool is used to process the target material side, it can avoid contact friction between the tool rod and the target material, and at the same time avoid the tool entering the target material side to a large depth, thereby affecting the processing quality of the target material side. The target material side processing tool described in the present invention can effectively solve the problem of heavy knife marks on the target material side, and the tool has a long service life, which can greatly reduce the number of tool changes and reduce the overall processing cost of the target material.

[0011] The angle between the diamond bit and the tool rod of the present invention is 100° to 140°, for example, it can be 100°, 105°, 110°, 120°, 125°, 130° or 140°, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0012] In a second aspect, the present invention further provides a target side processing method, the processing method is performed using the target side processing tool described in the first aspect; the processing method comprises the following steps:

[0013] Fixing the target material on a workbench of a grinding and cutting machine, and using the target material side processing tool according to claim 1 to perform milling processing on the side surface of the target material;

[0014] The feed speed of the target material side processing tool is 4000-5000 mm / min.

[0015] The target material side processing method of the present invention adopts a specific target material side processing tool and a specific tool feed speed to perform milling processing on the target material side, which can well improve the processing effect of the target material side and solve the problem of heavy knife marks on the target material side. When the feed speed of the target material side processing tool is low, the tool and the target material side will rub for a long time instead of effective cutting, resulting in edge wear, shortening the tool life, and prolonging the processing time, increasing the overall cost of target material processing; when the feed speed of the target material side processing tool is high, the cutting amount will increase, resulting in a sudden increase in cutting force, which will lead to more knife marks on the target material side.

[0016] The feed speed of the target side processing tool described in the present invention is 4000-5000 mm / min, for example, it can be 4000 mm / min, 4100 mm / min, 4300 mm / min, 4500 mm / min, 4800 mm / min or 5000 mm / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0017] Preferably, the rotation speed of the target side processing tool is 4500-5200r / min, for example, it can be 4500r / min, 4600r / min, 4700r / min, 4800r / min, 4900r / min, 5000r / min or 5200r / min, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] Preferably, the cutting depth of the milling process is 0.05-0.4 mm, for example, it can be 0.05 mm, 0.08 mm, 0.1 mm, 0.15 mm, 0.2 mm, 0.3 mm or 0.4 mm, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] Preferably, the cutting fluid used in the milling process includes oil-based cutting fluid and / or water-based cutting fluid.

[0020] Preferably, the oil-based cutting fluid comprises any one of animal oil, vegetable oil or mineral oil, or a combination of at least two of them, wherein typical but non-limiting combinations include a combination of animal oil and vegetable oil, a combination of mineral oil and animal oil, or a combination of vegetable oil and mineral oil.

[0021] Preferably, during the milling process, spray cooling is also used. Under the condition of a higher feed speed of the tool for machining the side of the target, spray cooling can supplement the cooling blind area of ​​the cutting fluid, thereby effectively reducing thermal deformation of the target and extending the service life of the tool.

[0022] Preferably, the spray cooling is performed using an ethanol solution.

[0023] Preferably, the roughness Ra of the target material side after milling is less than 0.6 μm, for example, it can be 0.59 μm, 0.55 μm, 0.5 μm, 0.4 μm, 0.3 μm, 0.2 μm or 0.1 μm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] As a preferred technical solution of the present invention, the processing method comprises the following steps:

[0025] The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling;

[0026] The feed speed of the target side machining tool is 4000-5000 mm / min; the rotation speed of the target side machining tool is 4500-5200 r / min; the cutting depth of the milling process is 0.05-0.4 mm;

[0027] The cutting fluid used in the milling process includes oil-based cutting fluid and / or water-based cutting fluid; the oil-based cutting fluid includes any one of animal oil, vegetable oil or mineral oil, or a combination of at least two of them;

[0028] The roughness of the target material side surface after the milling process is Ra<0.6 μm.

[0029] Compared with the prior art, the present invention has at least the following beneficial effects:

[0030] (1) The target side processing tool provided by the present invention has a diamond cutter head, and the diamond cutter head and the cutter rod form a specific angle, which effectively solves the problem of heavy cutter marks on the side of the target material, and the tool has a long service life, thereby reducing the overall processing cost of the target material;

[0031] (2) The target material side processing method provided by the present invention is simple to operate, and the feed speed of the target material side processing tool adopts a specific feed speed for milling processing, which improves the processing effect of the target material side and ensures that the target material side can be used normally. DETAILED DESCRIPTION

[0032] For the convenience of understanding the present invention, the present invention lists the following embodiments. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0033] The present invention is further described in detail below. However, the following examples are only simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

[0034] Example 1

[0035] The present embodiment provides a target side surface processing tool, which includes a tool rod and a diamond tool head; the included angle between the diamond tool head and the tool rod is 120°.

[0036] This embodiment also provides a target side processing method, which is performed using the target side processing tool mentioned above; the processing method comprises the following steps:

[0037] The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling;

[0038] The feed speed of the target side machining tool is 4600 mm / min; the rotation speed of the target side machining tool is 4800 r / min; the cutting depth of the milling process is 0.2 mm;

[0039] The cutting fluid used in the milling process is animal oil.

[0040] Example 2

[0041] This embodiment provides a target material side surface processing tool, which includes a tool rod and a diamond tool head; the angle between the diamond tool head and the tool rod is 100°.

[0042] This embodiment also provides a target material side processing method, which is performed using the target material side processing tool mentioned above; the processing method comprises the following steps:

[0043] The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling;

[0044] The feed speed of the target side machining tool is 4000 mm / min; the rotation speed of the target side machining tool is 5200 r / min; the cutting depth of the milling process is 0.05 mm;

[0045] The cutting fluid used in the milling process is a water-based cutting fluid emulsion.

[0046] Example 3

[0047] The present embodiment provides a target side surface processing tool, which includes a tool rod and a diamond tool head; the included angle between the diamond tool head and the tool rod is 130°.

[0048] This embodiment also provides a target material side processing method, which is performed using the target material side processing tool mentioned above; the processing method comprises the following steps:

[0049] The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling;

[0050] The feed speed of the target side machining tool is 4800 mm / min; the rotation speed of the target side machining tool is 5100 r / min; the cutting depth of the milling process is 0.2 mm;

[0051] The cutting fluid used in the milling process includes vegetable oil.

[0052] Example 4

[0053] The present embodiment provides a target side surface processing tool, which includes a tool rod and a diamond bit; the included angle between the diamond bit and the tool rod is 140°.

[0054] This embodiment also provides a target material side processing method, which is performed using the target material side processing tool mentioned above; the processing method comprises the following steps:

[0055] The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling;

[0056] The feed speed of the target side machining tool is 5000 mm / min; the rotation speed of the target side machining tool is 4500 r / min; the cutting depth of the milling process is 0.4 mm;

[0057] The cutting fluid used in the milling process is mineral oil.

[0058] It can be seen from Examples 1 to 4 that the target side processing tool and processing method provided by the present invention improve the processing effect of the target side, effectively solve the problem of heavy knife marks on the target side, and the roughness of the target side after milling Ra is <0.6μm; moreover, the tool has a long service life, and the overall processing cost of the target is low, which has a prospect of large-scale promotion and application.

[0059] Example 5

[0060] The present embodiment provides a target material side surface processing tool, which includes a tool rod and a diamond tool head; the included angle between the diamond tool head and the tool rod is 100° to 140°.

[0061] This embodiment also provides a method for processing the side of a target material. The processing method is the same as that of Embodiment 1 except that spray cooling is not performed during the milling process.

[0062] In this embodiment, since spray cooling is not performed during the milling process, when the feed speed of the tool for processing the side of the target is 4600 mm / min, thermal deformation of the target will occur, which will lead to more tool marks on the side of the target. After milling, the roughness of the side of the target is large and the service life of the tool is shortened.

[0063] Comparative Example 1

[0064] This comparative example provides a target side processing tool, which includes a tool rod and a diamond bit; the angle between the diamond bit and the tool rod is 80°.

[0065] This comparative example also provides a target material side processing method, which is the same as that of Example 1.

[0066] Comparative Example 2

[0067] This comparative example provides a target side processing tool, which includes a tool rod and a diamond tool head; the angle between the diamond tool head and the tool rod is 160°.

[0068] This comparative example also provides a target material side processing method, which is the same as that of Example 1.

[0069] From Example 1 and Comparative Examples 1 to 2, it can be seen that in Comparative Example 1, due to the smaller angle between the diamond bit and the tool rod, contact friction between the tool rod and the target material will occur, and the tool vibration will be caused, resulting in more knife marks on the side of the target material, and the roughness of the side of the target material after milling is larger; in Comparative Example 2, due to the larger angle between the diamond bit and the tool rod, cutting vibration will also be caused, and the milling effect of the target side will deteriorate, resulting in the target side failing to meet quality requirements.

[0070] Comparative Example 3

[0071] This comparative example provides a target side processing tool, which is the same as that in Example 1.

[0072] This comparative example also provides a target side processing method, which is the same as Example 1 except that the feed speed of the target side processing tool is 3500 mm / min.

[0073] Comparative Example 4

[0074] This comparative example provides a target side processing tool, which is the same as that in Example 1.

[0075] This comparative example also provides a target side processing method, which is the same as Example 1 except that the feed speed of the target side processing tool is 5500 mm / min.

[0076] From Example 1 and Comparative Examples 3 to 4, it can be seen that in Comparative Example 3, due to the low feed speed of the target side processing tool, prolonged friction between the tool and the target side rather than effective cutting will occur, resulting in edge wear, shortened tool life, prolonged processing time, and increased overall target processing cost; in Comparative Example 4, due to the high feed speed of the target side processing tool, the cutting amount will be increased, resulting in a sudden increase in cutting force, which in turn will cause more knife marks on the target side, and the roughness of the target side after milling is relatively large.

[0077] To sum up, the target material side processing tool provided by the present invention is reasonably designed and easy to use, effectively solves the problem of heavy knife marks on the target material side, and the tool has a long service life; the target material side processing method provided by the present invention is simple to operate, improves the processing effect of the target material side, ensures that the target material side meets the use requirements, and is suitable for large-scale promotion and application.

[0078] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A target side processing tool, characterized in that: The target material side surface processing tool comprises a tool rod and a diamond tool head; the angle between the diamond tool head and the tool rod is 100° to 140°.

2. A target material side processing method, characterized in that: The processing method is performed using the target side processing tool according to claim 1; the processing method comprises the following steps: Fixing the target material on a workbench of a grinding and cutting machine, and using the target material side processing tool according to claim 1 to perform milling processing on the side surface of the target material; The feed speed of the target side machining tool is 4000-5000 mm / min.

3. The processing method according to claim 2, characterized in that: The rotation speed of the target side machining tool is 4500-5200 r / min.

4. The processing method according to claim 2 or 3, characterized in that: The cutting depth of the milling process is 0.05 to 0.4 mm.

5. The processing method according to any one of claims 2 to 4, characterized in that: The cutting fluid used in the milling process includes oil-based cutting fluid and / or water-based cutting fluid.

6. The processing method according to claim 5, characterized in that: The oil-based cutting fluid includes any one of animal oil, vegetable oil or mineral oil, or a combination of at least two of them.

7. The processing method according to any one of claims 2 to 6, characterized in that: During the milling process, spray cooling is also adopted.

8. The processing method according to claim 7, characterized in that: The spray cooling is performed using an ethanol solution.

9. The processing method according to any one of claims 2 to 8, characterized in that: The roughness of the target material side surface after the milling process is Ra<0.6 μm.

10. The processing method according to any one of claims 2 to 9, characterized in that: The processing method comprises the following steps: The target material is fixed on a workbench of a grinding and cutting machine, and a target side processing tool is used to perform milling processing on the target side; during the milling process, ethanol is also used for spray cooling; The feed speed of the target side machining tool is 4000-5000 mm / min; the rotation speed of the target side machining tool is 4500-5200 r / min; the cutting depth of the milling process is 0.05-0.4 mm; The cutting fluid used in the milling process includes oil-based cutting fluid and / or water-based cutting fluid; the oil-based cutting fluid includes any one of animal oil, vegetable oil or mineral oil, or a combination of at least two of them; The roughness of the target material side surface after the milling process is Ra<0.6 μm.