Vacuum gate valve resistant to plasma process

Abstract

The invention relates to the technical field of vacuum gate valves, in particular to a plasma-process-resistant vacuum gate valve which comprises a vacuum gate valve body and further comprises a sealing ring, a positioning frame, a moving assembly, an overturning assembly, a valve plate, an auxiliary protection assembly and a protection plate. A sealing cover plate is connected to the front end of the inserting plate movable box, a bolt is connected to the front end of the sealing cover plate, a sealing ring is arranged on the inner side of the vacuum inserting plate valve body, and a pneumatic cylinder is installed at the rear end of the vacuum inserting plate valve body. The plasma protection layers are arranged on the upper face and the lower face of the valve plate correspondingly, the durability of the valve is improved, the pneumatic cylinder is adopted for driving the positioning frame and the moving assembly, then the overturning assembly is matched, rapid and accurate moving and overturning of the valve plate are achieved, the operation flexibility and efficiency are greatly improved, and the valve plate is suitable for large-scale popularization and application. By means of the design, the plasma protection layers can be conveniently switched, maintenance is fast, the downtime is shortened, and the overall working efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum gate valves, and in particular to a vacuum gate valve resistant to plasma processes. Background Art

[0002] SEMI, LCD, LED, SOLARIn industry, remote plasma source RPS (Remote plasma sorce) is an indispensable equipment in ETCH etching and CVD chemical vapor deposition processes. It invests high-efficiency energy in chemical and gas particles to maximize the process effect. Therefore, it can manufacture nanometer (Nm) meter-sized semiconductors. However, in the process of controlling RPS, due to the influence of plasma, etching of all components is inevitable. Vacuum gate valves also play a key role in plasma application equipment.

[0003] However, the core components of the existing vacuum gate valves that maintain the valve vacuum are easily affected by the plasma source, and their durability is sharply reduced. Although a variety of gold plating technologies are currently used, there are still many shortcomings. The RPS vacuum gate valve has a short service life, which leads to the limitation of long-term shutdown of the entire system. In addition, the protection is weak, and the internal valve plate is easily damaged when impacted by external force.

[0004] Therefore, in order to solve the problem that the RPS vacuum gate valve has a short service life and weak protection, a vacuum gate valve resistant to plasma process can be designed. Summary of the invention

[0005] In order to overcome the problem of short service life and weak protection of RPS vacuum gate valve.

[0006] The technical scheme of the present invention is: a vacuum plug valve resistant to plasma process, including a vacuum plug valve body, and also including a sealing ring, a positioning frame, a moving component, a flip component, a valve plate, an auxiliary protection component and a protective plate. A plug movable box is fixed on the outside of the vacuum plug valve body, a sealing cover plate is connected to the front end of the plug movable box, and a bolt is connected to the front end of the sealing cover plate. A sealing ring is arranged on the inside of the vacuum plug valve body, and a pneumatic cylinder is installed at the rear end of the vacuum plug valve body. A positioning frame is fixed to the output end of the pneumatic cylinder, and a moving component is arranged at the front end of the positioning frame. The moving component includes a central column, and a flip component is arranged at the front end of the moving component. The flip component includes a connecting sleeve, and a valve plate is fixed to the front end of the connecting sleeve. A controller is arranged at the rear end of the plug movable box. Mounting brackets are fixed at both ends of the vacuum plug valve body, and damping springs are installed on the upper and lower sides of the vacuum plug valve body. The end of the damping spring away from the plug movable box is connected to the protective plate, and reinforcing ribs are fixed to the upper and lower sides of the protective plate. Auxiliary protection components are arranged on the side of the protective plate close to the plug movable box.

[0007] Preferably, a sealing ring arranged on the inner side of the vacuum plug valve body ensures high sealing of the valve in the closed state, effectively preventing gas leakage, and the positioning frame and the moving assembly are driven by the pneumatic cylinder, and the flipping assembly is cooperated to realize fast and accurate movement and flipping of the valve plate, thereby improving the flexibility and efficiency of operation, and the overall structural strength of the valve is enhanced by the design of the protective plate and the reinforcing ribs thereon, and its ability to resist external impact and wear is improved, and at the same time, the damping spring and auxiliary protective assembly provided during the operation of the valve provide a certain shock absorption and buffering effect, further protecting the plug plate movable box and the area around the valve plate, thereby extending the service life of the valve.

[0008] Preferably, the positioning frame is a "J"-shaped structure, and the moving assembly also includes an electric telescopic rod, the front end of the positioning frame is equipped with the electric telescopic rod, the front end of the electric telescopic rod is fixed with a positioning plate, and the front end of the positioning plate is fixed with a center column.

[0009] Preferably, a connecting sleeve is connected to the surface of the center column, the connecting sleeve is rotatably connected to the center column, and sockets are provided on the surfaces of the connecting sleeve and the center column.

[0010] Preferably, a fixing plate is fixed to the front end of the positioning plate, a locking pin is connected to the inner side of the fixing plate, and the locking pin is slidably connected to the fixing plate.

[0011] Preferably, two locking pins are provided, the locking pins are engaged with the sockets, and a first spring is provided on the surface of the locking pins.

[0012] Preferably, both ends of the upper end of the valve plate are provided with a plasma shielding layer, and the plasma shielding layer is made of a hard anodized film material.

[0013] Preferably, the auxiliary protection component includes a connecting head, and a connecting head is fixed on one side of the protection plate close to the plug-in plate movable box, and connecting arms are connected to the front and rear sides of the connecting head, and the connecting arms are rotatably connected to the connecting head.

[0014] Preferably, slide rails are fixed to both the upper and lower surfaces of the plug-in movable box, the slide rails are slidably connected to the moving rod, a rotating shaft is fixed to one side of the moving rod close to the connecting arm, and the rotating shaft is rotatably connected to the connecting arm.

[0015] Preferably, a damper is installed between the moving rod and the mounting bracket, and a second spring is arranged on the surface of the damper.

[0016] Beneficial effects of the present invention: The vacuum gate valve resistant to plasma process has plasma protection layers arranged on the upper and lower surfaces of the valve plate. For valves working in a plasma environment, the erosion and corrosion of the plasma are effectively resisted, and the durability of the valve is improved. The positioning frame and the moving assembly are driven by a pneumatic cylinder, and the flip assembly is used to achieve rapid and accurate movement and flipping of the valve plate, which greatly improves the flexibility and efficiency of operation. This design is not only convenient for switching the plasma protection layer, rapid maintenance, and shortening downtime, but also effectively reduces the maintenance cost of the valve and improves the overall work efficiency. Furthermore, the valve has a reinforced structural design. The protective plate and the damping spring and auxiliary protective assembly thereon greatly enhance the overall structural strength of the valve, improve its resistance to external impact, and provide shock absorption and buffering effects. This design enables the valve to maintain stable performance and extend its service life when facing harsh working environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The three-dimensional structure of the present invention is shown in FIG. Figure 1 ; Figure 2 Schematic diagram of the three-dimensional structure of the present invention Figure 2 ; Figure 3 This is a schematic diagram of the three-dimensional structure of the valve plate of the present invention; Figure 4 It is a schematic diagram of the cross-sectional three-dimensional structure of the flip assembly of the present invention; Figure 5 It is a schematic diagram of the three-dimensional structure of the auxiliary protection component of the present invention; Figure 6 It is a schematic diagram of the cross-sectional three-dimensional structure of the auxiliary protection component of the present invention.

[0018] Explanation of the accompanying drawings: 1. vacuum plug valve body; 2. plug movable box; 3. sealing cover plate; 4. bolt; 5. sealing ring; 6. pneumatic cylinder; 7. positioning frame; 8. moving assembly; 9. flip assembly; 10. valve plate; 11. plasma shielding layer; 12. controller; 13. mounting bracket; 14. auxiliary protection assembly; 15. slide rail; 16. damping spring; 17. protective plate; 18. reinforcing rib; 801. electric telescopic rod; 802. positioning plate; 803. center column; 901. connecting sleeve; 902. socket; 903. fixing plate; 904. locking pin; 905. first spring; 1401. connector; 1402. connecting arm; 1403. rotating shaft; 1404. moving rod; 1405. damper; 1406. second spring. DETAILED DESCRIPTION

[0019] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0020] See also Figure 1-Figure 6 The present invention provides an embodiment: a vacuum plug valve resistant to plasma process, comprising a vacuum plug valve body 1, a sealing ring 5, a positioning frame 7, a moving component 8, a flipping component 9, a valve plate 10, an auxiliary protection component 14 and a protection plate 17, a plug activity box 2 is fixed to the outside of the vacuum plug valve body 1, a sealing cover plate 3 is connected to the front end of the plug activity box 2, a bolt 4 is connected to the front end of the sealing cover plate 3, a sealing ring 5 is arranged on the inner side of the vacuum plug valve body 1, a pneumatic cylinder 6 is installed at the rear end of the vacuum plug valve body 1, a positioning frame 7 is fixed to the output end of the pneumatic cylinder 6, a moving component 8 is arranged at the front end of the positioning frame 7, the moving component 8 includes a central column 803, a flipping component 9 is arranged at the front end of the moving component 8, the flipping component 9 includes a connecting sleeve 901, a valve plate 10 is fixed to the front end of the connecting sleeve 901, a controller 12 is arranged at the rear end of the plug activity box 2, mounting brackets 13 are fixed to the front and rear ends of the vacuum plug valve body 1, the upper Damping springs 16 are installed on both sides of the lower part, and a protective plate 17 is connected to the end of the damping spring 16 away from the plug-in movable box 2. Reinforcing ribs 18 are fixed on the upper and lower sides of the protective plate 17. Auxiliary protective components 14 are provided on the side of the protective plate 17 close to the plug-in movable box 2. Preferably, the sealing ring 5 arranged on the inner side of the vacuum plug-in valve body 1 ensures the high sealing of the valve in the closed state, effectively preventing gas leakage, and the positioning frame 7 and the moving component 8 are driven by the pneumatic cylinder 6, and the flip component 9 is cooperated to realize the rapid and accurate movement and flipping of the valve plate 10, thereby improving the flexibility and efficiency of the operation. The overall structural strength of the valve is enhanced by the design of the protective plate 17 and the reinforcing ribs 18 thereon, and its ability to resist external impact and wear is improved. At the same time, the damping spring 16 and the auxiliary protective component 14 provided provide a certain shock absorption and buffering effect during the valve operation process, further protecting the plug-in movable box 2 and the area around the valve plate 10, and extending the service life of the valve.

[0021] See also Figure 2-Figure 4, in this embodiment, the positioning frame 7 is in a "ji" - shaped structure. The moving component 8 further includes an electric telescopic rod 801. The electric telescopic rod 801 is installed at the front end of the positioning frame 7. A positioning plate 802 is fixed to the front end of the electric telescopic rod 801, and a central column 803 is fixed to the front end of the positioning plate 802. The setting of the electric telescopic rod 801 enables the moving component 8 to accurately control the secondary movement of the valve plate 10, improving the flexibility of operation. A connecting sleeve 901 is connected to the surface of the central column 803. The connecting sleeve 901 is rotatably connected to the central column 803. Jacks 902 are provided on the surfaces of both the connecting sleeve 901 and the central column 803. This design enables the valve plate 10 to flip flexibly. At the same time, the jacks 902 provide fixed points for the locking pins 904. A fixing piece 903 is fixed to the front end of the positioning plate 802. A locking pin 904 is connected to the inner side of the fixing piece 903. The locking pin 904 is slidably connected to the fixing piece 903. This design constitutes a locking mechanism for the position of the valve plate 10, effectively preventing the valve plate 10 from moving or flipping under unexpected circumstances and improving the safety of the valve. There are two locking pins 904. The locking pins 904 are snap - connected to the jacks 902. A first spring 905 is provided on the surface of the locking pin 904. The first spring 905 provides a certain elastic force to ensure that the locking pin 904 can be firmly fixed in the jack 902 and also helps to easily unlock the locking pin 904 when needed. Plasma protection layers 11 are provided at both ends of the upper part of the valve plate 10. The plasma protection layer 11 is made of a hard anodized film material. The set plasma protection layer 11 can effectively resist the erosion and corrosion of plasma, extending the service life of the valve plate 10 and improving the durability of the valve.

[0022] Please refer to Figure 5-Figure 6 , in this embodiment, the auxiliary protection component 14 includes a connecting head 1401. Connecting heads 1401 are fixed to the side of the protection plate 17 close to the plug - board movable box 2. Connecting arms 1402 are connected to both the front and back sides of the connecting head 1401. The connecting arms 1402 are rotatably connected to the connecting head 1401. These connecting heads 1401 facilitate the fixed - point rotation of the connecting arms 1402. Slide rails 15 are fixed to both the upper and lower surfaces of the plug - board movable box 2. The slide rails 15 are slidably connected to the moving rods 1404. A rotating shaft 1403 is fixed to the side of the moving rod 1404 close to the connecting arm 1402. The rotating shaft 1403 is rotatably connected to the connecting arm 1402. The slide rails 15 facilitate the directional movement of the moving rods 1404 within a certain range, playing a guiding role. A damper 1405 is installed between the moving rod 1404 and the mounting bracket 13. A second spring 1406 is provided on the surface of the damper 1405. Through the installed damper 1405 and the second spring 1406, a certain buffering and shock - absorbing effect can be further provided during the movement of the protection plate 17.

[0023] During operation, the valve plate 10 on the positioning frame 7 is driven by the output end of the pneumatic cylinder 6 to move in a vertical direction along the central axis of the vacuum plug valve body 1, so as to realize the rapid opening or closing of the valve. After the plasma shielding layer 11 on one side of the single-sided valve plate 10 is corroded, the sealing cover plate 3 can be removed, and the positioning plate 802 is driven to move by the extension of the electric telescopic rod 801 until the valve plate 10 is completely moved out of the plug movable box 2, and then the locking pin 904 is pulled outward at the same time. At this time, the locking pin 904 is pulled out by the compression of the first spring 905, and then, the connecting sleeve 901 is rotated on the central column 803, so that the valve plate 10 can be turned over, and then the locking pin 904 is released to reset, so that the valve plate 10 can be fixed and will not rotate. Secondly, the valve plate 10 can be retracted into the plug movable box 2 by the contraction of the electric telescopic rod 801, so that the rapid turning of the valve plate 10 and the rapid replacement of the plasma shielding layer 11 can be realized.

[0024] Through the above steps, the sealing ring can ensure the high sealing performance of the valve in the closed state, and the valve plate is driven to open and close by the pneumatic cylinder. The moving component cooperates with the flip component to realize fast and accurate movement and flipping of the valve plate, thereby improving the flexibility and efficiency of operation. The protective plate, damping spring and auxiliary protective component can provide a certain shock absorption and buffering effect on the valve, effectively extending the service life of the valve, so as to solve the problem that the existing RPS vacuum gate valve has a short service life and weak protection.

[0025] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A vacuum gate valve resistant to plasma process, characterized in that: The invention comprises a vacuum plug valve body (1), a sealing ring (5), a positioning frame (7), a moving assembly (8), a flip assembly (9), a valve plate (10), an auxiliary protection assembly (14) and a protection plate (17); a plug movable box (2) is fixed to the outside of the vacuum plug valve body (1); a sealing cover plate (3) is connected to the front end of the plug movable box (2); a bolt (4) is connected to the front end of the sealing cover plate (3); a sealing ring (5) is arranged on the inside of the vacuum plug valve body (1); a pneumatic cylinder (6) is installed at the rear end of the vacuum plug valve body (1); a positioning frame (7) is fixed to the output end of the pneumatic cylinder (6); a moving assembly (8) is arranged at the front end of the positioning frame (7); the moving assembly (8) comprises a center The movable assembly (8) is provided with a flip assembly (9) at the front end thereof, the flip assembly (9) comprising a connecting sleeve (901), a valve plate (10) being fixed at the front end of the connecting sleeve (901), a controller (12) being provided at the rear end of the plug plate movable box (2), mounting brackets (13) being fixed at the front and rear ends of the vacuum plug plate valve body (1), damping springs (16) being installed at the upper and lower sides of the vacuum plug plate valve body (1), a protective plate (17) being connected to one end of the damping spring (16) away from the plug plate movable box (2), reinforcing ribs (18) being fixed at the upper and lower sides of the protective plate (17), and an auxiliary protective assembly (14) being provided at one side of the protective plate (17) close to the plug plate movable box (2).

2. The plasma-resistant vacuum gate valve according to claim 1, characterized in that: The positioning frame (7) is a "J"-shaped structure, and the moving assembly (8) further comprises an electric telescopic rod (801). The electric telescopic rod (801) is installed at the front end of the positioning frame (7), a positioning plate (802) is fixed at the front end of the electric telescopic rod (801), and a center column (803) is fixed at the front end of the positioning plate (802).

3. The plasma-resistant vacuum gate valve according to claim 2, characterized in that: A connecting sleeve (901) is connected to the surface of the central column (803), the connecting sleeve (901) is rotatably connected to the central column (803), and the surfaces of the connecting sleeve (901) and the central column (803) are both provided with plug holes (902).

4. The plasma-resistant vacuum gate valve according to claim 2, characterized in that: A fixing plate (903) is fixed to the front end of the positioning plate (802), a locking pin (904) is connected to the inner side of the fixing plate (903), and the locking pin (904) is slidably connected to the fixing plate (903).

5. The plasma-resistant vacuum gate valve according to claim 4, characterized in that: Two locking pins (904) are provided, the locking pins (904) are engaged with the insertion holes (902), and a first spring (905) is provided on the surface of the locking pins (904).

6. The plasma-resistant vacuum gate valve according to claim 1, characterized in that: Both ends of the upper end of the valve plate (10) are provided with a plasma protection layer (11), and the plasma protection layer (11) is made of a hard anodized film material.

7. The plasma-resistant vacuum gate valve according to claim 1, characterized in that: The auxiliary protection component (14) comprises a connecting head (1401), a connecting head (1401) is fixed to one side of the protection plate (17) close to the plug-in activity box (2), connecting arms (1402) are connected to the front and rear sides of the connecting head (1401), and the connecting arms (1402) are rotatably connected to the connecting head (1401).

8. The plasma-resistant vacuum gate valve according to claim 1, characterized in that: Slide rails (15) are fixed to both the upper and lower surfaces of the plug-in movable box (2), and the slide rails (15) are slidably connected to the moving rod (1404). A rotating shaft (1403) is fixed to one side of the moving rod (1404) close to the connecting arm (1402), and the rotating shaft (1403) is rotatably connected to the connecting arm (1402).

9. The plasma-resistant vacuum gate valve according to claim 8, characterized in that: A damper (1405) is installed between the moving rod (1404) and the mounting bracket (13), and a second spring (1406) is arranged on the surface of the damper (1405).

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