Pipeline and device

Abstract

The invention discloses a pipeline and equipment, and relates to the technical field of equipment pipeline cleaning, the pipeline comprises a medium pipeline, a cleaning pipeline and a first cut-off device, the cleaning pipeline comprises a first cleaning inlet pipe, a cleaning outlet pipe and a second cleaning inlet pipe, one end of the first cleaning inlet pipe is connected to the medium outlet pipe, and one end of the second cleaning inlet pipe is connected to the medium inlet pipe; the other end of the first cleaning inlet pipe and the other end of the second cleaning inlet pipe are cleaning medium inlets, and the first cut-off devices are distributed on the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe and used for cutting off the medium inlet pipe, the medium outlet pipe and the cleaning outlet pipe in the state that the first cleaning inlet pipe and the second cleaning inlet pipe introduce media into the functional device. The flowing path of the cleaning medium is changed through the pipeline design, so that the functional device needing to be cleaned can be bidirectionally cleaned, and the flow of the cleaning medium and the cleaning efficiency are improved.

Description

Technical Field

[0001] The present application relates to the technical field of equipment pipeline cleaning, and in particular to a pipeline and equipment. Background Art

[0002] During the gas transmission process of semiconductor equipment, including the gas distribution box (Gasbox), precursor box (Precurssor box) and downstream transmission pipelines, the residual gas in the transmission pipeline reacts with each other or with the pipe wall, which will produce certain particles. Semiconductor equipment will regularly clean the transmission pipeline with a large flow of clean gas during process intervals. Factors such as the flow rate and feeding method of the clean gas will affect the frequency and time of pipeline cleaning, thereby affecting the production efficiency of semiconductor equipment.

[0003] The existing cleaning methods are mostly to set up cleaning pipelines, clean the pipelines by inputting cleaning gas, and the cleaning gas is discharged through the pipelines and devices to be cleaned. The gas flow and flow rate are limited, and the overall pipeline cleaning efficiency is not high. Summary of the invention

[0004] The present application provides a pipeline and equipment, which can increase the cleaning pressure, increase the discharge pressure difference, and improve the cleaning efficiency and cleaning effect by allowing the cleaning medium to enter in both directions.

[0005] In a first aspect, the present application provides a pipeline, comprising:

[0006] A medium pipeline, comprising a medium inlet pipe and a medium outlet pipe, wherein the medium inlet pipe and the medium outlet pipe are connected to a functional device;

[0007] A cleaning pipeline, comprising a first cleaning inlet pipe, a cleaning outlet pipe and a second cleaning inlet pipe, one end of the first cleaning inlet pipe is connected to the medium outlet pipe, one end of the second cleaning inlet pipe is connected to the medium inlet pipe, the other end of the first cleaning inlet pipe and the other end of the second cleaning inlet pipe are both cleaning medium inlets, the first cleaning inlet pipe, the second cleaning inlet pipe, the medium inlet pipe and the medium outlet pipe are connected to form a cleaning passage, and the cleaning outlet pipe is connected to the cleaning passage;

[0008] The first cut-off device is distributed on the medium inlet pipe, the medium outlet pipe and the clean outlet pipe, and is used to cut off the medium inlet pipe, the medium outlet pipe and the clean outlet pipe when the first clean inlet pipe and the second clean inlet pipe are passing the medium into the functional device.

[0009] The cleaning medium can enter the functional device from both sides of the functional device in the pipeline, and can perform bidirectional cleaning on the functional device, and the double-sided entry can increase the pressure in the functional device more quickly. The present application changes the flow path of the cleaning medium through pipeline design, so that the functional device to be cleaned can be cleaned bidirectionally, thereby improving the flow rate and cleaning efficiency of the cleaning medium.

[0010] After the cleaning medium enters the functional device from two directions for cleaning and reaches a certain pressure difference, the cleaning outlet pipe is opened and in a circulation state. The pressure of the cleaning medium filled near the functional device is greater than the pressure at the cleaning medium outlet. Under the action of the pressure difference, the cleaning gas flows into the cleaning outlet pipe and is finally discharged from the cleaning medium outlet. In addition, the two-way blowing of the cleaning medium makes the pressure of the cleaning medium in the functional device relatively large. The pressure difference between the cleaning medium in the functional device and the pressure at the cleaning medium outlet is large, which increases the outflow speed of the cleaning medium from the functional device to the cleaning medium outlet. The cleaning medium has a stronger ability to flush the inner wall of the functional device and the medium pipeline, which improves the cleaning efficiency and the cleaning effect.

[0011] In a possible implementation, the pipeline further includes a second shutoff device, which is located on the first clean inlet pipe and / or the second clean inlet pipe and is used to shut off the first clean inlet pipe and the second clean inlet pipe. The second medium device can control the flow of the medium pipeline, open when the pipeline transports the process medium, and shut off the two pipe ends of the pipeline when the pipeline is cleaned.

[0012] In a possible implementation, one end of the second clean inlet pipe is connected to the medium inlet pipe via a first three-way valve, the first three-way valve includes a first stop valve port directly connected to the second clean inlet pipe, and the second stop device includes the first stop valve port. The first three-way valve serves as a three-way connection between the second clean inlet pipe and the medium inlet pipe, and also serves as a flow cutoff control for the second clean inlet pipe.

[0013] In a possible implementation, one end of the first clean inlet pipe is connected to the medium outlet pipe via a second three-way valve, the second three-way valve includes a second stop valve port directly connected to the second clean inlet pipe, and the second stop device includes the second stop valve port. The second three-way valve serves as a three-way connection between the first clean inlet pipe and the medium outlet pipe, and also serves as a flow cutoff control for the first clean inlet pipe.

[0014] In a possible implementation, one end of the cleaning outlet pipe is connected to the medium outlet pipe via a third three-way valve, the third three-way valve includes a third stop valve port directly connected to the cleaning outlet pipe, and the first stop device includes the third stop valve port. The third three-way valve serves as a three-way connection between the cleaning outlet pipe and the medium outlet pipe, and also serves as a flow cutoff control of the cleaning outlet pipe.

[0015] In a possible implementation, the first shutoff device includes a first shutoff valve located on the medium inlet pipe; and / or includes a second shutoff valve located on the medium outlet pipe. The first shutoff valve and the second shutoff valve can respectively shut off the medium inlet pipe and the medium outlet pipe to prevent the cleaning medium from entering the front end and the rear end of the pipeline during the cleaning operation.

[0016] In a possible implementation, one end of the medium inlet of the first cleaning inlet pipe and the second cleaning inlet pipe is combined into one cleaning medium inlet. Only one cleaning medium input device may be provided to provide cleaning medium to multiple cleaning inlet pipes.

[0017] In a possible implementation, the pipeline includes a plurality of the medium pipelines, each of which includes the medium inlet pipe, the functional device and the medium outlet pipe that are connected. The plurality of medium pipelines can transport a variety of process media, thereby improving the efficiency and diversity of medium transport.

[0018] In one possible implementation, the pipeline includes multiple medium inlet pipes and multiple process medium inlets located at one end of the medium inlet pipes, and the second clean inlet pipe has multiple interfaces, and the multiple interfaces are connected one-to-one to the multiple medium inlet pipes for introducing medium into each of the medium inlet pipes, and the clean medium can be introduced into the multiple medium inlet pipes through the second clean inlet pipe.

[0019] In a possible implementation, the pipeline includes a plurality of the medium outlet pipes, there are a plurality of the first clean inlet pipes, and one end of the first clean inlet pipe is connected to the plurality of the medium outlet pipes for introducing the medium into each of the medium outlet pipes.

[0020] In a possible implementation, the plurality of medium outlet pipes are divided into a first medium outlet pipe and a second medium outlet pipe, one end of the medium outlet of the second medium outlet pipe is connected to the first medium outlet pipe, and the process medium outlet of the plurality of medium pipelines is one end of the medium outlet of the first medium outlet pipe;

[0021] There are multiple first medium outlet pipes, and the cleaning outlet pipe includes multiple cleaning sub-outlet pipes, one end of each of the multiple cleaning sub-outlet pipes is connected to the cleaning passage formed by the multiple first medium outlet pipes. Each sub-outlet pipe corresponds to the cleaning passage formed by the first medium outlet pipe, and has discharged the cleaning medium in each cleaning passage.

[0022] In a possible implementation, there are multiple first medium outlet pipes and multiple first cleaning inlet pipes, and the multiple first cleaning inlet pipes and the multiple first medium outlet pipes are connected one-to-one to allow cleaning medium to flow into the functional device on one side of each first medium outlet pipe.

[0023] In a possible implementation, the pipeline further includes a negative pressure device connected to one end of the medium outlet of the cleaning outlet pipe. The negative pressure device can extract the cleaning medium in the cleaning outlet pipe when the first cut-off device on the cleaning outlet pipe is closed.

[0024] In a possible implementation, a one-way valve is provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe, and the one-way valve controls the cleaning medium to flow only from the cleaning medium inlet to the medium inlet pipe and the medium outlet pipe to prevent backflow.

[0025] In one possible implementation, a filter is provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe. The filter is located on one side of the one-way valve. The filter can filter the cleaning medium in the cleaning inlet pipe to prevent impurities from contaminating functional components and corresponding pipelines.

[0026] In a possible implementation, a pressure gauge and a pressure regulating valve are provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe, and the pressure gauge and the pressure regulating valve are located on the medium inlet side of the one-way valve, and the pressure regulating valve is located on the medium inlet side of the pressure gauge. The pressure gauge is used to display the pressure value of the cleaning medium in the cleaning inlet pipe, and the pressure regulating valve is used to adjust the pressure value of the cleaning medium in the cleaning inlet pipe to prevent the cleaning inlet pipe from entering the pipeline where the functional device is located at a higher pressure, and to prevent the cleaning medium from having a greater impact on the functional device and damaging the functional device.

[0027] In a second aspect, the present application provides a device, comprising a distribution chamber and any of the above-mentioned pipelines, wherein one end of the medium inlet of the pipeline is connected to the distribution chamber. The beneficial effects of the device in this embodiment are similar to those of the above-mentioned pipeline embodiments, and will not be described in detail in this embodiment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the flow of process medium in a pipeline provided by an embodiment of the present application;

[0029] Figure 2 It is a schematic diagram of the inflow of the cleaning medium in the pipeline provided by the embodiment of the present application;

[0030] Figure 3 It is a schematic diagram of the outflow of the cleaning medium in the pipeline provided by the embodiment of the present application;

[0031] Figure 4 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 1 ;

[0032] Figure 5 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 2 ;

[0033] Figure 6 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 3 ;

[0034] Figure 7 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 4 ;

[0035] Figure 8 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 5 ;

[0036] Fig. 9 This is a schematic diagram of the connection of multiple medium pipelines provided in the embodiment of the present application. Figure 6 ;

[0037] Fig.10 is a schematic diagram of a negative pressure device provided in an embodiment of the present application;

[0038] Fig.11 It is a schematic diagram of a pressure-stabilizing valve, a one-way valve, a pressure gauge and a pressure regulating valve provided in an embodiment of the present application;

[0039] Fig.12 It is a schematic diagram of the equipment provided in the implementation mode of this application.

[0040] Description of reference numerals:

[0041] 100 - medium pipeline; 110 - medium inlet pipe; 120 - medium outlet pipe; 121 - first medium outlet pipe; 122 - second medium outlet pipe; 130 - functional device;

[0042] 110a-process medium inlet; 120a-process medium outlet; 120b-collection point;

[0043] 200-cleaning pipeline; 210-first cleaning inlet pipe; 213-check valve; 214-filter; 215-pressure gauge; 216-pressure regulating valve; 217-hand valve; 220-cleaning outlet pipe; 221-first cleaning sub-outlet pipe; 222-second cleaning sub-outlet pipe; 230-second cleaning inlet pipe;

[0044] 210a cleaning medium inlet; 220a-cleaning medium outlet;

[0045] 300 - first three-way valve; 310 - first stop valve port; 320 - first valve port; 330 - second valve port;

[0046] 400 - second three-way valve; 410 - second stop valve port; 420 - third valve port; 430 - fourth valve port;

[0047] 500 - third three-way valve; 510 - third stop valve port; 520 - fifth valve port; 530 - sixth valve port;

[0048] 600-first stop valve;

[0049] 700-second stop valve; 710-third stop valve;

[0050] 800-negative pressure device;

[0051] 900 - distribution chamber; 910 - distribution cavity. DETAILED DESCRIPTION

[0052] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0053] For ease of understanding, the English abbreviations and related technical terms involved in the embodiments of the present application are explained and described below.

[0054] It should be clear that the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0055] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0056] It should be understood that the term "and / or" used in this article is only a description of the same field of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0057] The word "if" as used herein may be interpreted as "when" or "when" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when determining" or "in response to determining" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)", depending on the context.

[0058] It should be understood that the terms “first”, “second”, etc. used in the present application are only used for the purpose of distinguishing the description, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0059] In the description of the present application, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0060] When used in this application, “within the range of…”, unless it is separately specified that an end value is not included, it is assumed that both end values ​​of the range are included. For example, in the range of 1 to 5, the two values ​​1 and 5 are included.

[0061] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integrated connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0062] This application provides a pipeline, see Figure 1 As shown, Figure 1 A schematic diagram of a pipeline in the present application is shown. The pipeline includes a medium pipeline 100 and a cleaning pipeline 200. The medium pipeline 100 includes a medium inlet pipe 110 and a medium outlet pipe 120, and a functional device 130 is connected between the medium inlet pipe 110 and the medium outlet pipe 120.

[0063] In one embodiment, the functional device 130 may be a device having certain functions in the process reaction flow, such as a gas mass flow meter, a liquid mass flow meter, a diaphragm valve, or a pressure sensor.

[0064] See also Figure 1 As shown, Figure 1 The solid black arrow in the figure indicates the flow direction of the process medium involved in the reaction in the pipeline in the present application. The process medium can be a gas, a liquid, a gas-liquid mixture, a gas-solid mixture, a liquid-solid mixture or a gas-liquid-solid mixture, etc., depending on the actual situation of the reaction. The process medium refers to the medium that needs to circulate in the pipeline during the process, which can be a reaction medium.

[0065] One end of the medium inlet pipe 110 may be a process medium inlet 110a of the pipeline, and the process medium enters the medium inlet pipe 110 from the process medium inlet 110a, passes through the functional device 130, and finally passes through the medium outlet pipe 120, and is discharged from the pipeline from the process medium outlet 120a at one end of the medium outlet pipe 120. It should be noted that the rear end of the medium outlet pipe 120 may also be connected to other pipelines or reaction devices.

[0066] The pipeline described in the present application may also include a pipeline connected to the front end of the process medium inlet 110a, and / or a pipeline connected to the rear end of the process medium outlet 120a, both of which fall within the protection scope defined for the pipeline in the present application.

[0067] The cleaning pipeline 200 includes a first cleaning inlet 210, a cleaning outlet 220 and a second cleaning inlet 230, and one end of the second cleaning inlet 230 can be connected to the first cleaning inlet 210, specifically, it can be connected by a three-way pipe. Alternatively, the first cleaning inlet 210 and the second cleaning inlet 230 are two separated cleaning inlets, and the first cleaning inlet 210 and the second cleaning inlet 230 respectively have a cleaning medium inlet 210a. This application takes the example that one end of the second cleaning inlet 230 is connected to the first cleaning inlet 210, and one end of the medium inlet of the first cleaning inlet 210 and the second cleaning inlet 230 are gathered into a cleaning medium inlet 210a, wherein one end of the first cleaning inlet 210 can be a cleaning medium inlet 210a, and one end of the cleaning outlet 220 can be a cleaning medium outlet 220a, and the cleaning medium can enter the cleaning pipeline 200 from the cleaning medium inlet 210a, and can be discharged from the cleaning medium outlet 220a.

[0068] See also Figure 2 As shown, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can enter the medium pipeline where the functional device 130 is located from both sides of the functional device 130. The first cleaning inlet pipe 210, the second cleaning inlet pipe 230, the medium inlet pipe 110 and the medium outlet pipe 120 are connected to form a cleaning passage. The cleaning passage refers to the pipeline portion filled with the cleaning medium after the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are passed through the cleaning medium. One end of the cleaning outlet pipe 220 is connected to the cleaning passage, and the other end of the cleaning outlet pipe 220 is a cleaning medium outlet 220a, so that when the pressure of the cleaning medium in the cleaning passage reaches a certain pressure, the cleaning medium in the cleaning passage is discharged. This application is explained by taking the cleaning outlet pipe 220 connected to the medium outlet pipe 120 as an example.

[0069] In the present application, the pipeline is further provided with a first cut-off device, which is distributed on the medium inlet pipe 110, the medium outlet pipe 120 and the clean outlet pipe 220. Among them, the first cut-off device distributed on the medium inlet pipe 110 is located on the side of the process medium inlet 110a of the connection point between the second clean inlet pipe 230 and the medium inlet pipe 110; the first cut-off device distributed on the medium outlet pipe 120 is located on the side of the process medium outlet 120a of the connection point between the clean outlet pipe 220 and the medium outlet pipe 120; the first cut-off device distributed on the clean outlet pipe 220 can be located at any position of the clean outlet pipe 220, including the end of the clean outlet pipe 220 connected to the medium outlet pipe 120.

[0070] When the cleaning medium is introduced into the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230, the first shutoff device shuts off the medium inlet pipe 110, the medium outlet pipe 120 and the cleaning outlet pipe 220. At this time, the cleaning passage gradually introduces the cleaning medium, and the pressure of the cleaning medium inside the cleaning passage gradually increases. When the pressure of the cleaning medium gradually increases, the first shutoff device on the cleaning outlet pipe 220 can be opened, and the cleaning outlet pipe 220 is in a flow state to discharge the cleaning medium in the cleaning passage.

[0071] The cleaning medium can enter the functional device 130 from both sides of the functional device 130 in the pipeline, and can perform bidirectional cleaning on the functional device 130. The bidirectional entry can more quickly increase the pressure in the functional device 130. The present application changes the flow path of the cleaning medium through pipeline design, so that the functional device 130 to be cleaned can be cleaned bidirectionally, thereby improving the flow rate and cleaning efficiency of the cleaning medium.

[0072] After the cleaning medium enters the functional device 130 from two directions for cleaning and reaches a certain pressure difference, the cleaning outlet pipe 220 is opened and in a circulation state, and the pressure of the cleaning medium filled near the functional device 130 is greater than the pressure at the cleaning medium outlet 220a. Under the action of the pressure difference, the cleaning gas flows into the cleaning outlet pipe 220 and is finally discharged from the cleaning medium outlet 220a. In addition, the two-way blowing of the cleaning medium makes the pressure of the cleaning medium in the functional device 130 relatively large, and the pressure difference between the pressure of the cleaning medium in the functional device 130 and the pressure at the cleaning medium outlet 220a is large, which increases the outflow speed of the cleaning medium from the functional device 130 to the cleaning medium outlet 220a, and the cleaning medium has a stronger ability to flush the inner wall of the functional device 130 and the medium pipeline 100, which improves the cleaning efficiency and the cleaning effect.

[0073] In some possible implementations, a second cut-off device is further provided on the pipeline, and the second cut-off device can be provided on the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230. When the cleaning operation is completed, the second cut-off device can cut off the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230, and the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 stop passing the cleaning medium into the functional device 130. At this time, the first cut-off device located on the cleaning outlet pipe 220 can maintain a cut-off state, and the first cut-off devices located on the medium inlet pipe 110 and the medium outlet pipe 120 can be closed to be in a flow state. After the cleaning operation is completed, the medium pipeline 100 is connected, and the process medium can be input to the back-end equipment.

[0074] In one embodiment, a second cut-off device may be provided only on the first cleaning inlet pipe 210. The second cut-off device is located on a portion of the first cleaning inlet pipe 210 between the cleaning medium inlet 210a and the second cleaning inlet pipe 230. After the second cut-off device is opened, the cleaning medium cannot enter the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 in the rear section.

[0075] In one embodiment, see Figure 1-Figure 3 As shown, a first three-way valve 300 is also provided on the pipeline, and the first three-way valve 300 is connected to the medium inlet pipe 110, and the second cleaning inlet pipe 230 is connected to the medium inlet pipe 110 through the first three-way valve 300. The first three-way valve 300 may include three valve ports, namely a first valve port 320, a second valve port 330 and a first stop valve port 310, and the first three-way valve 300 is connected to the medium inlet pipe 110 through the first valve port 320 and the second valve port 330. When the first valve port 320 and the second valve port 330 connected to the medium inlet pipe 110 are in a connected state, the process medium can pass through the first three-way valve 300 and flow in the medium inlet pipe 110.

[0076] The first stop valve port 310 is connected to one end of the second cleaning inlet pipe 230 for connecting with the medium inlet pipe 110. The first stop valve port 310 can be in a stop state when the medium does not need to flow, and can be switched to a flow state when the medium needs to flow.

[0077] In this embodiment, of the two valve ports of the first three-way valve 300 other than the first shut-off valve port 310, the first valve port 320 and the second valve port 330 can both be normally open valve ports, which always maintain a flow state and may not have a shut-off function.

[0078] The second shutoff device located on the second cleaning inlet pipe 230 may include a first shutoff valve port 310, which can shut off the second cleaning inlet pipe 230 when the cleaning operation is finished, so that the second cleaning inlet pipe 230 stops passing the cleaning medium into the medium inlet pipe.

[0079] Alternatively, the first valve port 320 may be a valve port with a cut-off function, and the cut-off functions of the first valve port 320 and the first cut-off valve port 310 may be independently controlled. The first cut-off device located on the medium inlet pipe 110 may include the first valve port 320 with a cut-off function.

[0080] In one embodiment, see Figure 1-Figure 3 As shown, a second three-way valve 400 is further provided on the pipeline, and the second three-way valve 400 is connected to the medium outlet pipe 120. Similar to the first three-way valve 300, the second three-way valve 400 may include three valve ports, namely a third valve port 420, a fourth valve port 430 and a second stop valve port 410. The second three-way valve 400 is connected to the medium outlet pipe 120 through the third valve port 420 and the fourth valve port 430. When the third valve port 420 and the fourth valve port 430 connected to the medium outlet pipe 120 are both in a connected state, the medium can pass through the second three-way valve 400 and flow in the medium outlet pipe 120.

[0081] Among the three valve ports of the second three-way valve 400, one is a second stop valve port 410, and the second stop valve port 410 is connected to one end of the first clean inlet pipe 210. Specifically, the second stop valve port 410 is connected to one end of the first clean inlet pipe 210 for connecting to the medium outlet pipe 120. The second stop valve port 410 can be in a closed state when the medium does not need to flow, and can be switched to a flowing state when the medium needs to flow.

[0082] In this embodiment, in the third valve port 420 and the fourth valve port 430 of the second three-way valve 400 outside the second shut-off valve port 410, the third valve port 420 and the fourth valve port 430 can both be normally-open valve ports, which always maintain a flow state and may not have a shut-off function.

[0083] In one embodiment, see Figure 1-Figure 3 As shown, a third three-way valve 500 is further provided on the pipeline, and the third three-way valve 500 is connected to the medium outlet pipe 120 and is located on the side of the second three-way valve 400 away from the functional device 130. Similar to the first three-way valve 300 and the second three-way valve 400, the third three-way valve 500 may include three valve ports, namely a fifth valve port 520, a sixth valve port 530 and a third stop valve port 510. The third three-way valve 500 is connected to the medium outlet pipe 120 through the fifth valve port 520 and the sixth valve port 530. When the fifth valve port 520 and the sixth valve port 530 connected to the medium outlet pipe 120 are both in a connected state, the medium can pass through the second three-way valve 400 and flow in the medium outlet pipe 120.

[0084] Among the three valve ports of the third three-way valve 500, one of them may be a third stop valve port 510, and the third stop valve port 510 is connected to one end of the cleaning outlet pipe 220; specifically, the third stop valve port 510 is connected to the cleaning outlet pipe 220 for connecting one end of the medium outlet pipe 120. The third stop valve port 510 may be in a stop state when the medium does not need to flow, and may be switched to a flow state when the medium needs to flow.

[0085] In this embodiment, of the two valve ports of the third three-way valve 500 other than the third shut-off valve port 510, the fifth valve port 520 and the sixth valve port 530 may be normally open valve ports, which always maintain a flow state and may not have a shut-off function.

[0086] Alternatively, the sixth valve port 530 may be a valve port with a shutoff function, and the shutoff functions of the sixth valve port 530 and the third shutoff valve port 510 may be independently controlled, and the first shutoff device located on the medium outlet pipe 120 may include the sixth valve port 530 with a shutoff function.

[0087] In one embodiment, a first stop valve 600 is further provided on the pipeline. The first stop valve 600 is arranged on the medium inlet pipe 110. The first stop valve 600 is located on the side of the first three-way valve 300 away from the functional device 130. The process medium needs to first pass through the first stop valve 600 and then enter the first three-way valve 300 and the functional device 130 in sequence.

[0088] The first stop valve 600 has a stop function, and can be in a stop state when the circulating medium is not needed, and can be switched to a circulating state when the circulating medium is needed. The first stop device located on the medium inlet pipe 110 can be the first stop valve 600, and the first stop valve 600 is located on the side of the second cleaning inlet pipe 230 facing the process medium inlet 110a.

[0089] In one embodiment, a second stop valve 700 is further provided on the pipeline, and the second stop valve 700 is arranged on the medium outlet pipe 120. The second stop valve 700 is located on the side of the third three-way valve 500 away from the functional device 130. The process medium flowing out of the process medium functional device 130, the second three-way valve 400 and the third three-way valve 500 must pass through the second stop valve 700 before it can be discharged from the process medium outlet 120a of the medium outlet pipe 120.

[0090] The second stop valve 700 has a stop function, and can be in a stop state when the circulating medium is not needed, and can be switched to a circulating state when the circulating medium is needed. The second stop device located on the medium outlet pipe 120 can be the second stop valve 700, and the second stop valve 700 is located on the side of the third three-way valve 500 facing the process medium outlet 120a.

[0091] The pipeline described in this application, when the process medium flows through the corresponding reaction, refers to Figure 1 As shown, the first stop valve port 310, the second stop valve port 410 and the third stop valve port 510 can all be in the cut-off state, the first valve port 320, the second valve port 330, the third valve port 420, the fourth valve port 430, the fifth valve port 520 and the sixth valve port 530 can all be in the flow state, the first stop valve 600 and the second stop valve 700 are both in the flow state, and the cleaning medium inlet 210a does not flow into the cleaning medium; the process medium can enter the medium inlet pipe 110 from the process medium inlet 110a, and flow through the first stop valve 600, the first three-way valve 300, the functional device 130, the second three-way valve 400, the third three-way valve 500 and the second stop valve 700 in sequence, and finally flow out of the medium outlet pipe 120 from the process medium outlet 120a.

[0092] It should be noted that in all the drawings corresponding to this application, when the valve port of the valve is a blank triangle, it indicates that the valve port is in a flow state. When the valve port of the valve is a black filled triangle, it indicates that the valve port is in a cut-off state.

[0093] When the functional device 130 needs to be cleaned, refer to Figure 2 As shown, the process medium is stopped from entering from the process medium inlet 110a, and the first stop valve 600 is closed. The first stop valve 600 stops the process medium from entering the functional device 130. The first valve port 320, the second valve port 330, the third valve port 420 and the fourth valve port 430 can be in a flow state, the first stop valve port 310 and the second stop valve port 410 can be in a flow state, and the third stop valve port 510 can be in a cut-off state. The cleaning medium can enter the first cleaning inlet pipe 210 from the cleaning medium inlet 210a and be split at the second cleaning inlet pipe 230; a part of the cleaning medium can enter the first stop valve port 310 from the second cleaning inlet pipe 230 and enter the functional device 130 through the second valve port 330; a part of the cleaning medium can enter the second stop valve port 410 from the first cleaning inlet pipe 210 and enter the functional device 130 through the fourth valve port 430. The cleaning medium can enter the functional device 130 from both sides of the functional device 130 in the pipeline, and can perform bidirectional cleaning on the functional device 130. The bidirectional entry can more quickly increase the pressure in the functional device 130. The present application changes the flow path of the cleaning medium through pipeline design, so that the functional device 130 to be cleaned can be cleaned bidirectionally, thereby improving the flow rate and cleaning efficiency of the cleaning medium.

[0094] After the cleaning medium enters the cleaning chamber from two directions of the functional device 130 and reaches a certain pressure, Figure 3As shown, the first valve port 320, the second valve port 330, the third valve port 420 and the fourth valve port 430 can be in a flow state, the first stop valve port 310 and the second stop valve port 410 can be in a flow state, and the third stop valve port 510 can be in a flow state. The pressure of the cleaning medium filled near the functional device 130 is greater than the pressure at the cleaning medium outlet 220a. Under the action of the pressure difference, the cleaning gas flows into the cleaning outlet pipe 220 and is finally discharged from the cleaning medium outlet 220a. In addition, the two-way blowing of the cleaning medium makes the pressure of the cleaning medium in the functional device 130 relatively large, and the pressure difference between the pressure of the cleaning medium in the functional device 130 and the pressure at the cleaning medium outlet 220a is large, which increases the outflow speed of the cleaning medium from the functional device 130 to the cleaning medium outlet 220a, and the cleaning medium has a stronger flushing ability on the inner wall of the functional device 130 and the medium pipeline 100, which improves the cleaning efficiency and the cleaning effect.

[0095] In one embodiment, the cleaning medium may be introduced and discharged repeatedly for multiple times to clean the functional device 130 more thoroughly.

[0096] It should be noted that the functional device 130 described in this embodiment may be an independent single device or a plurality of devices connected in series.

[0097] In one possible implementation, see Figure 4 As shown, the pipeline may include a plurality of medium pipelines 100 , and each medium pipeline 100 includes a medium inlet pipe 110 , a functional device 130 , and a medium outlet pipe 120 that are connected.

[0098] Among them, see Figure 4 As shown, in this embodiment, three medium pipelines 100 are taken as an example. The three medium pipelines 100 have three medium inlet pipes 110, and each medium inlet pipe 110 has a process medium inlet 110a, so as to form in this embodiment, as shown in FIG. Figure 4 The piping structure of the three process medium inlets 110a is shown.

[0099] The process media flowing into the three process medium inlets 110a may be different, so that three kinds of process media may flow into the three process medium inlets 110a at the same time. Alternatively, the same process medium may flow into the three process medium inlets 110a.

[0100] In this embodiment, each of the three medium inlet pipes 110 is provided with a first stop valve 600 to control whether the medium flows through each medium inlet pipe 110 .

[0101] In this embodiment, the second cleaning inlet pipe 230 is further divided into three interfaces, which are respectively connected to the first stop valve port 310 of the first three-way valve 300 set on the three medium inlet pipes 110, and the cleaning medium can enter the corresponding medium inlet pipe 110 through the second cleaning inlet pipe 230.

[0102] In one embodiment, see Figure 5 As shown, among the multiple medium pipelines 100, this embodiment takes three medium pipelines 100 as an example, and one end ports of the three medium inlet pipes 110 can be gathered into one process medium inlet 110a to form a pipeline with only one process medium inlet 110a.

[0103] In this embodiment, the Figure 5 As shown, each of the three medium inlet pipes 110 is provided with a first stop valve 600. The first stop valve 600 provided on each medium inlet pipe 110 controls whether the medium flows through the medium inlet pipe 110 where it is located.

[0104] In one embodiment, see Figure 6 As shown, a first stop valve 600 may be provided on the pipeline where the three medium inlet pipes 110 converge, and the first stop valve 600 may be used to simultaneously control whether the medium flows through the three medium inlet pipes 110 .

[0105] In one embodiment, see Figure 4 and Figure 5 As shown, the three medium pipelines 100 have three medium outlet pipes 120 , and the three medium outlet pipes 120 converge into a process medium outlet 120 a of one of the medium outlet pipes 120 . The process medium in the three medium outlet pipes 120 can be discharged from the one process medium outlet 120 a .

[0106] See also Figure 4 As shown, the three medium outlet pipes 120 can be divided into a first medium outlet pipe 121 and a second medium outlet pipe 122, and one end of the second medium outlet pipe 122 is connected to the first medium outlet pipe 121. Specifically, the process medium outlet 120a of the medium pipeline 100 is one end of the medium outlet of the first medium outlet pipe 121. The two second medium outlet pipes 122 are gathered into the first medium outlet pipe 121, and the process medium can be discharged through the process medium outlet 120a of the first medium outlet pipe 121.

[0107] In this embodiment, a second stop valve 700 can be set on the medium outlet pipe 120 between the converging point 120b of the first medium outlet pipe 121 and the second medium outlet pipe 122. One second stop valve 700 simultaneously controls whether the medium in the three medium outlet pipes 120 flows out from the process medium outlet 120a.

[0108] In this embodiment, refer to Figure 4As shown, the converging point 120b of the first medium outlet pipe 121 and the second medium outlet pipe 122 may be located on the pipeline between the functional device 130 and the second three-way valve 400. Alternatively, see Figure 5 As shown, the confluence point 120b may be located on the pipeline between the second three-way valve 400 and the third three-way valve 500. Alternatively, see Figure 6 As shown, the collection point 120 b may be located on the pipeline between the third three-way valve 500 and the second stop valve 700 .

[0109] The third valve port 420 and the fourth valve port 430 of the second three-way valve 400 are both in a normally open state, and the fifth valve port 520 and the sixth valve port 530 of the third three-way valve 500 are both in a normally open state. When the collection point 120b remains between the functional device 130 and the second stop valve 700, the specific position of the collection point 120b may not be limited.

[0110] For example, see Figure 7 As shown, the two second medium outlet pipes 122 are respectively converged to the first medium outlet pipe 121, and the three medium outlet pipes 120 can have two convergence points 120b. The convergence point 120b where the second medium outlet pipe 122 corresponding to the leftmost functional device 130 and the first medium outlet pipe 121 corresponding to the rightmost functional device 130 converge is located on the pipeline between the third three-way valve 500 and the second stop valve 700, and the convergence point 120b where the second medium outlet pipe 122 corresponding to the middle functional device 130 and the first medium outlet pipe 121 corresponding to the rightmost functional device 130 converge is located on the pipeline between the second three-way valve 400 and the third three-way valve 500.

[0111] Alternatively, the positions of the two collection points 120b can be interchanged. The two collection points 120b can be arbitrarily set on the pipeline between the functional device 130 and the second three-way valve 400, the pipeline between the second three-way valve 400 and the third three-way valve 500, and the pipeline between the third three-way valve 500 and the second stop valve 700.

[0112] In some embodiments, see Figure 8 As shown, the pipeline has a plurality of medium inlet pipes 110, such as Figure 8 The three medium inlet pipes 110 and the three medium outlet pipes 120 shown are converged into a process medium outlet 120a of one of the medium outlet pipes 120 , and the process medium in the three medium outlet pipes 120 can be discharged from the one process medium outlet 120a .

[0113] A second stop valve 700 may be provided on the medium outlet pipe 120 between the process medium outlet 120a and the convergence point 120b of the three medium outlet pipes 120. One second stop valve 700 simultaneously controls whether the medium in the three medium outlet pipes 120 flows out from the process medium outlet 120a. When the second stop valve 700 is closed and the third stop valve port 510 of the third three-way valve 500 is opened, the cleaning medium in the three medium outlet pipes 120 may be discharged from the medium outlet pipes 120.

[0114] In one embodiment, a third stop valve 710 is provided on each of the three medium outlet pipes 120, and each third stop valve 710 can individually control whether the medium in each medium outlet pipe 120 flows, so as to better control the flow of process medium and cleaning medium in each medium outlet pipe 120. Different functional devices 130 can be cleaned with different cleaning media, and the third stop valve 710 can prevent different cleaning media from crosstalking in multiple functional devices 130, causing secondary pollution. For example, some functional devices 130 require anti-corrosion cleaning media, and some functional devices 130 require oxidative cleaning media. The oxidative cleaning media cannot enter the functional device 130 that requires anti-corrosion.

[0115] In one embodiment, the first medium outlet pipe 121 is connected to the second three-way valve 400 and the third three-way valve 500, and the second stop valve port 410 provided on the second three-way valve 400 can be connected to one end of the first cleaning inlet pipe 210. The third stop valve port 510 of the third three-way valve 500 can be connected to one end of the cleaning outlet pipe 220.

[0116] In some possible implementations, see Fig. 9 As shown, the pipeline may include a plurality of medium pipelines 100 , and each medium pipeline 100 includes a medium inlet pipe 110 , a functional device 130 , and a medium outlet pipe 120 that are connected.

[0117] Among them, see Fig. 9 As shown, in this embodiment, three medium pipelines 100 are taken as an example. The three medium pipelines 100 have three medium inlet pipes 110, and each medium inlet pipe 110 has a process medium inlet 110a, so as to form in this embodiment, as shown in FIG. Figure 4 The piping structure of the three process medium inlets 110a is shown.

[0118] The process media flowing into the three process medium inlets 110a may be different, so that three kinds of process media may flow into the three process medium inlets 110a at the same time. Alternatively, the same process medium may flow into the three process medium inlets 110a.

[0119] In this embodiment, each of the three medium inlet pipes 110 is provided with a first stop valve 600 to control whether the medium flows through each medium inlet pipe 110 .

[0120] In this embodiment, there are multiple medium outlet pipes 120. In this embodiment, three medium outlet pipes 120 are taken as an example. The three medium outlet pipes 120 can be divided into a first medium outlet pipe 121 and a second medium outlet pipe 122. One end of the second medium outlet pipe 122 is connected to the first medium outlet pipe 121. Specifically, the process medium outlet 120a of the medium pipeline 100 is one end of the medium outlet of the first medium outlet pipe 121. The two second medium outlet pipes 122 are combined with the first medium outlet pipe 121, and the process medium can be discharged through the process medium outlet 120a of the first medium outlet pipe 121.

[0121] In this embodiment, the second cleaning inlet pipe 230 is further divided into three interfaces, which are respectively connected to the first stop valve port 310 of the first three-way valve 300 set on the three medium inlet pipes 110, and the cleaning medium can enter the corresponding medium inlet pipe 110 through the second cleaning inlet pipe 230.

[0122] In this embodiment, there are two first medium outlet pipes 121, and one end of the medium outlet of the second medium outlet pipe 122 is connected to one of the first medium outlet pipes 121. The two first medium outlet pipes 121 have two process medium outlets 120a, so that the pipeline has two process medium outlets. The pipeline described in this application can transport the reaction medium to two reaction walls in the semiconductor device.

[0123] In this embodiment, the number of the first cleaning inlet pipes 210 can be the same as the number of the first medium outlet pipes 121. There can be two first cleaning inlet pipes 210, and one end of the medium outlet of the two first cleaning inlet pipes 210 is connected to the two first medium outlet pipes 121 respectively. In this embodiment, the two first medium outlet pipes 121 can be connected only through the cleaning pipeline 200. Fig. 9 As shown, the left and right first medium outlet pipes 121 are connected through the first cleaning inlet pipe 210 , the second cleaning inlet pipe 230 and the cleaning outlet pipe 220 , and the two first cleaning inlet pipes 210 respectively introduce cleaning medium into the two first medium outlet pipes 121 .

[0124] In one embodiment, the medium inlets of multiple first cleaning inlet pipes 210 can be gathered into one pipeline at one end so that the cleaning pipeline 200 has only one cleaning medium inlet 210a, and only one cleaning medium input device can be set to provide cleaning medium to the multiple first cleaning inlet pipes 210.

[0125] In one embodiment, see Fig. 9 As shown, the cleaning outlet pipe 220 may include a plurality of cleaning sub-outlet pipes, and one end of the plurality of cleaning sub-outlet pipes is connected to the cleaning passage formed by the plurality of first medium outlet pipes 121 .

[0126] For example, in this embodiment, the cleaning outlet pipe 220 may include a first cleaning sub-outlet pipe 221 and a second cleaning sub-outlet pipe 222. One end of the first cleaning sub-outlet pipe 221 is connected to the cleaning passage formed by a part of the first medium outlet pipe 121. In this embodiment, one end of the first cleaning sub-outlet pipe 221 is connected to the third stop valve port 510 provided on the left side of the first cleaning sub-outlet pipe 221. One end of the second cleaning sub-outlet pipe 222 is connected to the cleaning passage formed by the remaining part of the first medium outlet pipe 121. In this embodiment, one end of the second cleaning sub-outlet pipe 222 is connected to the third stop valve port 510 provided on the right side of the first cleaning sub-outlet pipe 221.

[0127] In one embodiment, the multiple cleaning sub-outlet pipes may be multiple independent pipelines, each of which may have a cleaning medium outlet 220a, so that there are multiple cleaning medium outlets 220a in the pipeline, and the negative pressure of the multiple cleaning medium outlets 220a is lower to increase the discharge rate of the cleaning medium.

[0128] In one embodiment, see Fig. 9 As shown, the first cleaning sub-outlet pipe 221 and the second cleaning sub-outlet pipe 222 are combined into a pipeline at one end facing the cleaning medium outlet 220a. The end of the first cleaning sub-outlet pipe 221 facing the cleaning medium outlet 220a can be connected to the second cleaning sub-outlet pipe 222, and the cleaning medium outlet 220a of the overall pipeline is the medium outlet of the second cleaning sub-outlet pipe 222.

[0129] In some possible implementations, see Fig.10 As shown, the pipeline further includes a negative pressure device 800, which is connected to one end of the medium outlet of the cleaning outlet pipe 220. Specifically, the negative pressure device 800 is connected to the cleaning medium outlet 220a of the cleaning outlet pipe 220, and the negative pressure device 800 can draw out the cleaning medium in the cleaning outlet pipe 220 when the first cut-off device on the cleaning outlet pipe 220 is closed.

[0130] The negative pressure device 800 is a device capable of reducing the pressure in the cleaning outlet pipe 220 , and may be, for example, a negative pressure pump.

[0131] In some possible implementations, a one-way valve is provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe. When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipelines, a one-way valve is provided on both the first cleaning inlet pipe and the second cleaning inlet pipe, and the one-way valve controls the cleaning medium in the cleaning inlet pipe to flow only from the cleaning medium inlet to the medium inlet pipe and the medium outlet pipe to prevent backflow.

[0132] See also Fig.11As shown, in this embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are combined into one section at a section facing the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 can be connected to the middle of the first cleaning inlet pipe 210. In this embodiment, a one-way valve 213 can be provided only on the first cleaning inlet pipe 210, and the one-way valve 213 is located between the cleaning medium inlet 210a and the second cleaning inlet pipe 230. Through the one-way valve 213, the cleaning medium can be controlled to flow only from the cleaning medium inlet 210a to the medium inlet pipe 110 and the medium outlet pipe 120 to prevent backflow.

[0133] In some possible implementations, a filter is provided on the first cleaning inlet pipe and / or the second cleaning inlet pipe, and the filter is located on one side of the one-way valve.

[0134] When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipelines, filters are provided on both the first cleaning inlet pipe and the second cleaning inlet pipe, and the filters are used to filter the cleaning medium in the cleaning inlet pipe to prevent impurities from contaminating the functional components and corresponding pipelines.

[0135] See also Fig.11 As shown, in this embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are combined into one section at a section facing the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 can be connected to the middle of the first cleaning inlet pipe 210. In this embodiment, a filter 214 can be provided only on the first cleaning inlet pipe 210, and the filter 214 is located on one side of the one-way valve 213, and is located together with the one-way valve 213 between the cleaning medium inlet 210a and the second cleaning inlet pipe 230, and the cleaning medium entering the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can be filtered simultaneously through one filter 214. Specifically, the filter 214 can be located on the portion of the first cleaning inlet pipe 210 between the one-way valve 213 and the second cleaning inlet pipe 230.

[0136] In some possible implementations, a pressure gauge and a pressure regulating valve are provided on the first clean inlet pipe and / or the second clean inlet pipe. The pressure gauge and the pressure regulating valve are located on the medium inlet side of the one-way valve, and the pressure regulating valve is located on the medium inlet side of the pressure gauge.

[0137] When the first clean inlet pipe and the second clean inlet pipe are two separate pipelines, a pressure gauge and a pressure regulating valve are provided on the first clean inlet pipe and the second clean inlet pipe. The pressure gauge is used to display the pressure value of the cleaning medium in the clean inlet pipe, and the pressure regulating valve is used to adjust the pressure value of the cleaning medium in the clean inlet pipe to prevent the clean inlet pipe from entering the pipeline where the functional device is located under a higher pressure, thereby preventing the cleaning medium from exerting a large impact on the functional device and damaging the functional device.

[0138] See also Fig.11As shown, in this embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are combined into one section at a section facing the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 can be connected to the middle of the first cleaning inlet pipe 210. In this embodiment, a pressure gauge 215 and a pressure regulating valve 216 can be provided only on the first cleaning inlet pipe 210, and the pressure gauge 215 and the pressure regulating valve 216 are both located on the medium inlet side of the one-way valve 213, and the pressure regulating valve 216 is located on the medium inlet side of the pressure gauge 215. The pressure of the cleaning medium in the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can be adjusted simultaneously by a set of pressure gauges 215 and pressure regulating valves 216.

[0139] In some possible implementations, a hand valve is provided on the first clean inlet pipe and / or the second clean inlet pipe, and the hand valve may be located at a medium inlet side of the pressure regulating valve.

[0140] When the first cleaning inlet pipe and the second cleaning inlet pipe are two separate pipelines, both the first cleaning inlet pipe and the second cleaning inlet pipe are provided with hand valves, and the cleaning pipelines can be cut off by the hand valves when the cleaning pipelines are inspected or shut down.

[0141] See also Fig.11 As shown, in this embodiment, the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 are combined into one section at a section facing the cleaning medium inlet 210a, and specifically, one end of the second cleaning inlet pipe 230 can be connected to the middle of the first cleaning inlet pipe 210. In this embodiment, a hand valve 217 can be provided only on the first cleaning inlet pipe 210, and the hand valve 217 is located on the medium inlet side of the pressure regulating valve 216. The circulation of the cleaning medium in the first cleaning inlet pipe 210 and the second cleaning inlet pipe 230 can be cut off simultaneously by one hand valve 217.

[0142] The present application also provides a device, see Fig.12 As shown, the device has a distribution chamber 900, and the distribution chamber 900 has a distribution chamber 910. The distribution chamber 910 is connected to the process medium inlet 110a of the pipeline. The process medium distributed by the distribution chamber 900 enters the pipeline through the process medium inlet 110a and is then transported to other devices.

[0143] In the present application, the device may be a semiconductor or other related precision device. The distribution chamber 900 may be a gas distribution box in a semiconductor-related device.

[0144] In one embodiment, a precursor box is further connected between the gas distribution box and the process medium inlet 110a, and the precursor box is used to realize vaporization and distribution of the precursor.

[0145] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A pipeline, characterized in that: include: A medium pipeline, comprising a medium inlet pipe and a medium outlet pipe, wherein the medium inlet pipe and the medium outlet pipe are connected to a functional device; A cleaning pipeline, comprising a first cleaning inlet pipe, a cleaning outlet pipe and a second cleaning inlet pipe, one end of the first cleaning inlet pipe is connected to the medium outlet pipe, one end of the second cleaning inlet pipe is connected to the medium inlet pipe, the other end of the first cleaning inlet pipe and the other end of the second cleaning inlet pipe are both cleaning medium inlets, the first cleaning inlet pipe, the second cleaning inlet pipe, the medium inlet pipe and the medium outlet pipe are connected to form a cleaning passage, and the cleaning outlet pipe is connected to the cleaning passage; The first cut-off device is distributed on the medium inlet pipe, the medium outlet pipe and the clean outlet pipe, and is used to cut off the medium inlet pipe, the medium outlet pipe and the clean outlet pipe when the first clean inlet pipe and the second clean inlet pipe are passing the medium into the functional device.

2. The pipeline according to claim 1, characterized in that The pipeline further includes a second cut-off device, which is located on the first clean inlet pipe and / or the second clean inlet pipe and is used to cut off the first clean inlet pipe and the second clean inlet pipe.

3. The pipeline according to claim 2, characterized in that One end of the second clean inlet pipe is connected to the medium inlet pipe via a first three-way valve, the first three-way valve includes a first stop valve port directly connected to the second clean inlet pipe, and the second stop device includes the first stop valve port.

4. The pipeline according to claim 2 or 3, characterized in that: One end of the first clean inlet pipe is connected to the medium outlet pipe via a second three-way valve, the second three-way valve includes a second stop valve port directly connected to the second clean inlet pipe, and the second stop device includes the second stop valve port.

5. The pipeline according to any one of claims 1 to 4, characterized in that: One end of the cleaning outlet pipe is connected to the medium outlet pipe via a third three-way valve, the third three-way valve includes a third stop valve port directly connected to the cleaning outlet pipe, and the first stop device includes the third stop valve port.

6. The pipeline according to any one of claims 1 to 5, characterized in that: The first shut-off device includes a first shut-off valve located on the medium inlet pipe; and / or includes a second shut-off valve located on the medium outlet pipe.

7. The pipeline according to any one of claims 1 to 6, characterized in that: One end of the medium inlet of the first cleaning inlet pipe and the second cleaning inlet pipe is combined into a cleaning medium inlet.

8. The pipeline according to any one of claims 1 to 7, characterized in that: The pipeline includes a plurality of the medium pipelines, and each of the medium pipelines includes the medium inlet pipe, the functional device and the medium outlet pipe which are connected to each other.

9. The pipeline according to claim 8, characterized in that The pipeline includes multiple medium inlet pipes and multiple process medium inlets located at one end of the medium inlet pipes. The second clean inlet pipe has multiple interfaces, and the multiple interfaces are connected one-to-one to the multiple medium inlet pipes for introducing medium into each medium inlet pipe.

10. The pipeline according to claim 8 or 9, characterized in that The pipeline includes a plurality of the medium outlet pipes, and there are a plurality of the first clean inlet pipes. One end of the first clean inlet pipe is connected to the plurality of the medium outlet pipes for introducing the medium into each of the medium outlet pipes.

11. The pipeline according to claim 10, characterized in that The plurality of medium outlet pipes are divided into a first medium outlet pipe and a second medium outlet pipe, one end of the medium outlet of the second medium outlet pipe is connected to the first medium outlet pipe, and the process medium outlet of the plurality of medium pipelines is one end of the medium outlet of the first medium outlet pipe; There are multiple first medium outlet pipes, and the cleaning outlet pipe includes multiple cleaning sub-outlet pipes. One end of the multiple cleaning sub-outlet pipes is connected to the cleaning passage formed by the multiple first medium outlet pipes.

12. The pipeline according to claim 11, characterized in that There are multiple first medium outlet pipes, and there are multiple first clean inlet pipes. The multiple first clean inlet pipes and the multiple first medium outlet pipes are connected one-to-one.

13. The pipeline according to any one of claims 1 to 12, characterized in that: The pipeline also includes a negative pressure device, which is connected to one end of the medium outlet of the cleaning outlet pipe.

14. The pipeline according to any one of claims 1 to 12, characterized in that: The first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a one-way valve.

15. The pipeline according to claim 14, characterized in that The first cleaning inlet pipe and / or the second cleaning inlet pipe is provided with a filter, and the filter is located on one side of the one-way valve.

16. The pipeline according to claim 14 or 15, characterized in that A pressure gauge and a pressure regulating valve are provided on the first clean inlet pipe and / or the second clean inlet pipe. The pressure gauge and the pressure regulating valve are located on the medium inlet side of the one-way valve. The pressure regulating valve is located on the medium inlet side of the pressure gauge.

17. A device, characterized in that It comprises a distribution chamber and the pipeline according to any one of claims 1 to 16, wherein one end of the medium inlet of the pipeline is connected to the distribution chamber.

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