Absolute type space multi-dimensional rotation angular displacement sensor

Abstract

The invention discloses an absolute space multi-dimensional rotation angular displacement sensor which comprises a spherical shell-shaped stator base body and a spherical rotor base body located in a spherical shell, six excitation units are evenly arranged on the inner wall of the spherical shell, and eight induction units are evenly arranged on the rotor base body. Each excitation unit is composed of an even number of excitation pole pieces, and a gap is reserved between every two adjacent excitation pole pieces. The stator supporting shaft is installed on the outer surface of the stator base body, except for the excitation unit corresponding to the stator supporting shaft, through holes penetrating through the inside and the outside are formed in the positions, corresponding to the other five excitation units, of the stator base body, and the axes of four through holes are perpendicular to the stator supporting shaft; at least two adjacent through holes in the four through holes are communicated through a connecting groove and jointly form a rotatable area, and the rotor supporting shaft extends out of the rotatable area. According to the invention, the stator support shaft can completely perform rotation measurement in a corresponding angle of a rotatable area, the angle measurement range is obviously improved, and the application scene of the sensor is greatly expanded.

Description

Technical Field

[0001] The invention relates to a time-grating sensing technology, and in particular to an absolute spatial multi-dimensional rotational angular displacement sensor, belonging to the field of precision angular displacement measurement. Background Art

[0002] In the fields of industrial automation, robotics, aerospace, etc., it is very important to accurately measure the spatial multi-dimensional rotational angular displacement of objects. Traditional angular displacement sensors, such as photoelectric encoders, rotary transformers, etc., can only measure the angular displacement of a single dimension, which is difficult to meet the demand for simultaneous measurement of spatial multi-dimensional angular displacement. In the prior art, there are also some multi-dimensional angular displacement measurement schemes, such as: a combination scheme based on multiple single-axis sensors: multiple single-axis sensors are combined in a specific way to achieve multi-dimensional angular displacement measurement. However, this scheme has problems such as large volume, complex structure, and high cost. A scheme based on visual measurement: a camera is used to capture the image of the target object, and the angular displacement is calculated by an image processing algorithm. However, this scheme is susceptible to ambient light interference, and needs to rely on zero point reset or external reference calibration. It is impossible to directly obtain absolute angular displacement information after power failure or sudden disturbance, and the measurement accuracy and real-time performance are difficult to guarantee. It can be seen that the spatial multi-dimensional rotational angular displacement sensor in the prior art has problems such as large volume, complex structure, high cost, susceptibility to interference, and low measurement accuracy, which is difficult to meet the actual application needs. Therefore, it is of great significance to develop an absolute spatial multi-dimensional rotational angular displacement sensor with simple structure, low cost, strong anti-interference ability and high measurement accuracy.

[0003] In recent years, a time-grating sensor that uses clock pulses as a displacement measurement reference has been developed in China. By applying orthogonal excitation signals to a flat-plate capacitor array to construct an alternating electric field with uniform motion, the conversion of spatial displacement to time reference is realized, and a nano-circular time-grating sensor with an integral accuracy of ±0.06" has been developed. However, the current nano-time-grating sensor can only perform planar angular displacement measurement and cannot achieve multi-dimensional angular displacement measurement in spherical space.

[0004] In view of this, the applicant proposed "a spherical multi-dimensional rotation angle measurement time-grating sensor and its installation structure" and applied for a patent, with the application number 2025100261809. The stator matrix of the sensor is in the shape of a spherical shell, the rotor matrix is ​​in the shape of a spherical shell and is located in the spherical shell of the stator matrix. There is a gap between the surface of the rotor matrix and the inner surface of the stator matrix so that the rotor matrix is ​​suspended and concentric with the stator matrix; 6 excitation units of exactly the same shape and size are evenly distributed on the inner surface of the stator matrix; the center of the 6 excitation units is located at the center of the six faces of the cube tangent to the inner surface of the stator matrix. There are 8 induction units of exactly the same shape and size evenly distributed on the surface of the rotor matrix; the 8 induction units are symmetrically distributed in the 8 quadrants of the spatial rectangular coordinate system with the center of the rotor matrix as the origin. This structure can achieve high-precision multi-dimensional rotation angle measurement in spherical space, and has a simple structure, complete decoupling, and strong anti-interference ability. However, its angle measurement range is usually within 40°, which is limited and cannot meet large-angle measurement requirements, and its application scenarios are restricted. Summary of the invention

[0005] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to provide an absolute spatial multi-dimensional rotational angular displacement sensor. The present invention can realize absolute measurement of multi-dimensional rotational angular displacement in spherical space, and has a large angle measurement range, a simple structure, and is easy to install leads and easy to implement.

[0006] The technical solution of the present invention is achieved in this way:

[0007] An absolute spatial multi-dimensional rotary angular displacement sensor comprises a stator matrix and a rotor matrix, wherein an excitation unit is arranged on the stator matrix, and an induction unit is arranged on the rotor matrix; the stator matrix is ​​in the shape of a spherical shell, the rotor matrix is ​​in the shape of a spherical shell and is located in the spherical shell of the stator matrix, and a gap is left between the surface of the rotor matrix and the inner surface of the stator matrix so that the rotor matrix is ​​suspended and concentric with the stator matrix; the excitation units are 6 in number with the same shape and size and are evenly distributed on the inner surface of the stator matrix; the centers of the 6 excitation units are located at the centers of the six faces of a cube tangent to the inner surface of the stator matrix; the induction units are 8 in number with the same shape and size and are evenly distributed on the surface of the rotor matrix; the 8 induction units are symmetrically distributed on the 8 quadrants of a spatial rectangular coordinate system with the center of the rotor matrix as the origin;

[0008] The stator base is provided with a stator support shaft for rotationally connecting with the stator drive turntable, and the excitation electrode is connected with an external excitation source through a signal line penetrating the stator base shell; the rotor base is provided with a rotor support shaft for rotationally connecting with the rotor drive turntable; the signal line of the induction electrode is led out from the stator base through the rotor support shaft; the rotor support shaft and the stator support shaft are perpendicular to each other;

[0009] Each excitation unit is composed of an even number of excitation pole pieces, and all the excitation pole pieces of the same excitation unit are connected to the same signal line; all the excitation pole pieces of the same excitation unit are evenly distributed along the circumference around the center of the excitation unit and there is a gap between adjacent excitation pole pieces; the stator support shaft is fixedly installed on the outer surface of the stator base and at a position corresponding to the center of one of the excitation units; except for the excitation unit corresponding to the stator support shaft, the positions on the stator base corresponding to the remaining five excitation units are all provided with through holes that penetrate inside and outside, and each through hole is centered relative to the corresponding excitation unit, that is, the excitation pole pieces are arranged around the through holes; the axes of four through holes are perpendicular to the stator support shaft; at least two adjacent through holes among the four through holes are connected by providing a connecting groove on the stator base, and the length direction of the connecting groove is perpendicular to the stator support shaft; both ends of the connecting groove pass through the gap in the excitation unit at the end and the width of the connecting groove is greater than the diameter of the rotor support shaft, and the connecting groove and the through hole connected by the connecting groove together constitute a rotatable area; the rotor support shaft extends out of the stator base through the rotatable area, and the rotation angle of the stator support shaft is limited to the rotatable area.

[0010] Furthermore, three adjacent through holes among the four through holes are connected by opening connecting grooves on the stator substrate to achieve an angle measurement range greater than 180°; or all four through holes are connected by connecting grooves to achieve an angle measurement range greater than 270°.

[0011] One end of the rotor support shaft is integrally formed with the surface of the rotor base body and avoids the area where the induction unit is located.

[0012] Specifically, the outer contour shape of all the sensing units is the same spherical triangle, and concave arc edges are formed by cutting at the three vertices of each spherical triangle. The arc edges of any four adjacent sensing units facing the same vertex form a circular blank area. One end of the rotor support shaft is integrally formed with the surface of the rotor base through one of the circular blank areas to avoid the area where the sensing unit is located.

[0013] Or all the induction units are hollowed out in the center, and one end of the rotor support shaft is integrally formed with the surface of the rotor base through one of the hollowed-out areas to avoid the area where the induction units are located.

[0014] Furthermore, the diameter of the rotor base is smaller than the diameter of the through hole; and the width of the connecting groove is smaller than the diameter of the through hole.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention adopts a fan-shaped excitation pole piece orthogonally arranged in space to realize encoding around the X-axis direction and the Y-axis direction in the spherical space. The same sensing unit adopts two adjacent sensing pole pieces arranged in a differential structure to pick up signals. The output signals of the two adjacent sensing groups are summed by an adder to filter out the coupled signals in the non-measurement direction. The differential signal is differentiated by a subtractor to eliminate the common mode interference, thereby further improving the signal decoupling capability, and the decoupling is thorough and the anti-interference capability is strong, thereby realizing the absolute measurement of multi-dimensional rotational angular displacement in space, and the structure is simple and easy to implement.

[0017] The present invention forms a rotatable area by opening holes and slots on the spherical shell that forms the stator base. At the same time, each excitation unit is composed of an even number (such as 2, 4, or 6) of independent excitation pole pieces. There is a gap between the excitation pole pieces, and the gap corresponds to the rotatable area on the shell. In this way, when the stator support shaft drives the rotatable area to rotate, the excitation unit and the excitation pole piece will not interfere with the rotor support shaft that rotates relatively in the rotatable area. The stator support shaft can be rotated and measured within the corresponding angle of the rotatable area. The angle measurement range is significantly improved, which greatly expands the application scenarios of the sensor.

[0018] In addition, the present invention provides five through holes on the spherical shell, which are connected inside and outside, so as to facilitate the nearby lead wires of the excitation electrodes, so that the lead wires of all the excitation electrodes do not need to be led out through the same channel, and the line connection is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of the sensor in Example 1 of the present invention.

[0020] Figure 2 Schematic diagram of the structure of the stator base and the rotor base in Example 1 of the present invention.

[0021] Figure 3 This is a schematic diagram of the arrangement coding of the excitation pole pieces in Example 1 of the present invention.

[0022] Figure 4 This is a schematic diagram of the arrangement coding of the induction electrodes in Example 1 of the present invention. DETAILED DESCRIPTION

[0023] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] See also Figure 1-Figure 4The present invention discloses an absolute spatial multi-dimensional rotation angular displacement sensor, comprising a stator base 1 and a rotor base 2, wherein an excitation unit is provided on the stator base 1, and a sensing unit is provided on the rotor base 2. The stator base 1 is in the shape of a spherical shell, and the thickness of the spherical shell is h. The rotor base 2 is in the shape of a sphere and is located in the spherical shell of the stator base 1. A gap d is left between the surface of the rotor base and the inner surface of the stator base so that the rotor base is suspended and concentric with the stator base.

[0025] The excitation units are 6 units of exactly the same shape and size and are evenly spaced and distributed on the inner surface of the stator matrix 1 without contacting each other. They are called a, b, c, d, e, and f respectively; the centers of the 6 excitation units are located at the centers of the six faces of the cube tangent to the inner surface of the stator matrix. The 6 excitation units of the present invention are symmetrical about the XOY plane, the XOZ plane, and the YOZ plane, that is, the 6 excitation units are located on the coordinate axes X+, X-, Y+, Y-, Z+, and Z-, respectively, and the 6 excitation units are equidistant from the coordinate origin O. Among the 6 excitation units, it can be considered that 4 excitation units a, b, c, and d rotate around the Z axis, and 4 excitation units a, e, c, and f rotate around the X axis, among which the excitation unit a and the excitation unit c are excitation units shared by the rotation directions around the Z axis and around the X axis. Of course, because of the symmetrical arrangement in the X, Y, and Z directions, other interpretations are also possible, such as four excitation units rotating around the Z axis and four rotating around the Y axis, where two excitation units are shared by the Z and Y axis directions; or four excitation units rotating around the X axis and four rotating around the Y axis, where two excitation units are shared by the X and Y axis directions.

[0026] See also Figure 4 , the sensing units are 8 units with exactly the same shape and size and are evenly spaced and distributed on the surface of the rotor base 2 without contacting each other; the 8 sensing units are respectively called A, B, C, D, A', B', C', D' and are symmetrically distributed in the 8 quadrants of the spatial rectangular coordinate system with the center of the rotor base as the origin (that is, the rotor base 2 divides the spherical surface into eight regions with XOY, XOZ, and YOZ as boundaries, and each region is arranged with a sensing pole piece 21 to form a sensing unit), the 8 sensing units are equidistant from the coordinate origin, and the 8 sensing units are spherically symmetrically distributed relative to the center of the sphere. The 8 sensing units are located inside the sphere composed of 6 excitation units, that is, the outer radius of the sensing unit is smaller than the inner radius of the excitation unit. The spatial phases of two sensing units bounded by any section differ by 90°, and the thickness of the sensing unit is h 2 , the arrangement gap between adjacent sensing units is w.

[0027] The stator base 1 is provided with a stator support shaft 12 for rotationally connecting with the stator drive turntable, and the excitation electrode is connected with an external excitation source through a signal line penetrating the stator base shell. The rotor base 2 is provided with a rotor support shaft 22 for rotationally connecting with the rotor drive turntable; the signal line of the induction electrode is led out from the stator base through the rotor support shaft; the rotor support shaft 22 and the stator support shaft 12 are perpendicular to each other.

[0028] See also Figure 3 Each excitation unit of the present invention is composed of an even number of excitation pole pieces 11, and the thickness of the excitation pole piece 11 is h 1 , all the excitation pole pieces of the same excitation unit are connected to the same signal line. In the embodiment, each excitation unit is composed of 4 excitation pole pieces 11, and 6 excitation units have a total of 24 excitation pole pieces 11. All the excitation pole pieces 11 of the same excitation unit are evenly distributed along the circumference around the center of the excitation unit and gaps are left between adjacent excitation pole pieces; the stator support shaft is fixedly mounted on the outer surface of the stator base and at a position corresponding to the center of one of the excitation units. Except for the excitation unit corresponding to the stator support shaft, positions on the stator base corresponding to the remaining five excitation units are provided with through holes that penetrate inside and outside, and each through hole is centered relative to the corresponding excitation unit, that is, the excitation pole pieces are arranged around the through hole. In the embodiment, the through hole has a radius of r 3 The circular hole is convenient for connecting the excitation pole piece on the inner surface of the spherical shell with the external circuit lead. The axes of the four through holes are perpendicular to the stator support shaft; at least two adjacent through holes among the four through holes are connected by opening a connection groove on the stator base, and the length direction of the connection groove is perpendicular to the stator support shaft; both ends of the connection groove pass through the gap in the excitation unit at the end (that is, the connection groove does not affect the arrangement of the excitation pole piece) and the width L of the connection groove is greater than the diameter L of the rotor support shaft 22 1 The connecting groove and the through hole connected to the connected groove together constitute a rotatable area. The rotor support shaft 22 extends out of the stator base 1 through the rotatable area, and the rotation angle of the stator support shaft 12 is limited to the rotatable area. The gap width between adjacent excitation pole pieces of the present invention is greater than the width of the connecting groove, and the width of the connecting groove is greater than the diameter of the rotor support shaft, so as to ensure that the rotor support shaft can rotate within the rotatable area.

[0029] The symmetry axis of the rotatable area of ​​the present invention along the length direction of the connecting slot is also the symmetry axis of the excitation unit at the location. The excitation pole pieces constituting the excitation unit at the location are arranged half on each side along the symmetry axis. This is why each excitation unit of the present invention is composed of an even number of excitation pole pieces (to facilitate the arrangement of the excitation pole pieces and the opening of the connecting slot). Since each excitation pole piece needs to be connected, the more excitation pole pieces there are, the more complicated the connection is. Therefore, in the actual design, the excitation unit can be composed of two excitation pole pieces, so that the connection is simplest while ensuring the formation of a gap and facilitating the arrangement of the excitation pole pieces.

[0030] All the excitation pole pieces 11 of the present invention are closely attached to the inner surface of the stator matrix 1, that is, the outer surface radius of the excitation unit is equal to the inner surface radius of the stator matrix. Each induction unit is composed of a metal induction pole piece 21 of conductive material, and the eight induction pole pieces 21 corresponding to the eight induction units are closely attached to the outer surface of the rotor matrix 2, and the inner surface radius of each induction unit is equal to the outer surface radius of the rotor matrix.

[0031] One end of the stator support shaft 12 of the present invention is integrally formed with the outer surface of the stator base 1, and the other end of the stator support shaft 12 is connected to the stator drive turntable. According to the patent technology mentioned in the background technology, the rotor support shaft can rotate 360°, but the stator support shaft cannot. The rotation angle of the stator support shaft is limited by the mounting hole on the surface of the stator base. During the rotation of the stator support shaft, the wall of the mounting hole where the rotor support shaft is located will hit the rotor support shaft and limit the rotation range of the stator support shaft. To this end, the present invention forms a rotatable area by opening a connecting groove on the stator base to connect the through holes. Compared with the single through hole angle, the rotatable area has a greatly improved angle range. At the same time, each excitation unit is composed of an even number (such as 2, 4, 6) of independent excitation pole pieces, and there are gaps between the excitation pole pieces, which correspond to the rotatable area on the shell. In this way, when the stator support shaft drives the rotatable area to rotate, the excitation unit and the excitation pole pieces will not interfere with the rotor support shaft that rotates relatively in the rotatable area. The stator support shaft can be rotated and measured within the corresponding angle of the rotatable area. The angle measurement range is significantly improved, which greatly expands the application scenarios of the sensor.

[0032] In addition, the present invention provides five circular through holes on the spherical shell, which are connected inside and outside, so as to facilitate the nearby lead wires of the excitation electrodes, so that the lead wires of all the excitation electrodes do not need to be led out through the same channel, and the line connection is more convenient.

[0033] In a specific implementation, three adjacent through holes among the four through holes are connected by opening a connecting groove on the stator base, so that an angular rotation measurement range of the stator support shaft greater than 180° can be achieved; or all four through holes are connected through the connecting groove, so that an angular measurement range greater than 270° can be achieved. In actual measurement, considering the angle corresponding to the diameter of the through hole itself, when the three through holes are connected, an angular measurement range of approximately 230° can actually be achieved, and when all four through holes are connected, a maximum angular range of 330° can be achieved. How to open the connecting groove specifically, in addition to being related to the angle measurement range of the sensor, also needs to consider the connection strength of the stator base itself after the slotting, that is, the strength of the spherical shell cannot be affected by the slotting. If the material strength of the spherical shell is large enough, the measurement range can approach 350°.

[0034] When the rotor support shaft 22 of the present invention is installed, one end thereof is integrally formed with the surface of the rotor base 2 and needs to avoid the area where the sensing unit is located. In order to avoid the area where the sensing unit is located, the present invention includes but is not limited to the following two implementation methods:

[0035] Method 1: The outer contour shape of all the sensing units (sensing pole pieces 21) is the same spherical triangle. Concave arc edges are formed by cutting at the three vertices of each spherical triangle. The arc edges of any four adjacent sensing units facing the same vertex form a circular blank area. One end of the rotor support shaft 22 is integrally formed with the surface of the rotor base 2 through one of the circular blank areas to avoid the area where the sensing unit is located.

[0036] Mode 2: All the sensing units are hollowed out in the center, and one end of the rotor support shaft 22 is integrally formed with the surface of the rotor base 2 through one of the hollowed-out areas to avoid the area where the sensing units are located.

[0037] All the excitation pole pieces 11 are completely the same fan ring shape. All the excitation pole pieces of each excitation unit form a circular ring shape with a plurality of breaks in the middle, and each break position is formed by the gap between two excitation pole pieces.

[0038] The diameter of the rotor base is smaller than the diameter of the through hole, and the width of the connecting groove is smaller than the diameter of the through hole. This facilitates product installation, and the rotor base can directly enter the spherical shell through the through hole on the spherical shell.

[0039] Example: Figure 2 As shown, the stator base 1 and the rotor base 2 are installed concentrically with a gap of d = 30 cm, and the radius of the stator base 1 is r 1 =80cm, radius r of rotor base 2 2 =50cm, the thickness of the stator base 1 is h=1cm. Except for the side with the stator support shaft 12, the stator base 1 is hollowed out with a radius r on the other 5 sides. 3 =40cm circular hole, which facilitates the connection of the fan-shaped excitation pole piece 11 on the inner surface of the stator matrix 1 with the external circuit lead.

[0040] like Figure 3 As shown, 24 fan-shaped excitation pole pieces 11 are installed on the inner surface of the stator base 1, with a thickness of h 1 =2mm, and every 4 blocks form an excitation unit. Among them, the 4 excitation units (16 excitation pole pieces 11) arranged in the four-sided space around the X axis form the excitation phase around the X axis; the 4 excitation units (16 excitation pole pieces 11) arranged in the four-sided space around the Y axis form the excitation phase around the Y axis, and 2 excitation units with a total of 8 excitation pole pieces are shared in two directions. The excitation phases around the X axis and the Y axis are encoded and recorded as S1, S2, S3, and S4 respectively.

[0041] The angular displacement measurement principle of the present invention is: a coupling capacitor is formed between the induction pole piece and the excitation pole piece. During measurement, four sinusoidal excitation signals with phases of 90° and the same frequency and amplitude are applied to the excitation units in the four-sided space around the X-axis and the Y-axis, respectively, wherein the four fan-shaped excitation pole pieces of each excitation unit are applied with the same excitation signal. The four excitation signals are expressed as: U s﹢ =A m sin(ωt),U c﹢ =A m cos(ωt),U s﹣ =-A m sin(ωt),U c﹣ =-A m cos(ωt), where the signal amplitude Am=5V, and the frequency f=1 / ω=40KHz. When the rotor base 2 rotates relative to the stator base 1, the eight inductive pole pieces 21 of A, B, C, D, A', B', C', and D' generate U respectively through electric field coupling. A , U B , U C , U D , U A' , U B' , U C' , U D' Eight-way sensing signal.

[0042] The eight-channel sensing signals are combined to obtain four-channel measurement signals: A , U B , U C , U D Through the adder to sum, U A' , U B' , U C' , U D' Through the adder, we can get two traveling wave signals U Y+ and U Y- ;Change U A , U A' , U D , U D' Through the adder to sum, U B , U C , U B' , U C' Through the adder, we can get two traveling wave signals U X+ and U X- .

[0043]

[0044] Will U X+ and U X- , U Y+ and UY- The traveling wave signal U rotating around the X axis is obtained by subtracting the difference between them. X and the traveling wave signal U rotating around the Y axis Y ;

[0045]

[0046] The sinusoidal traveling wave signal U around the X axis X and the sinusoidal traveling wave signal U around the Y axis Y After being shaped into a square wave by the shaping circuit, it is sent to the FPGA for phase detection and compared with the reference square wave of the same frequency. The phase difference is represented by the number of interpolated high-frequency clock pulses. After conversion, the rotational angular displacement x of the rotor base 2 relative to the stator base 1 around the X-axis and the rotational angular displacement y around the Y-axis are obtained.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the applicant has described the present invention in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that modifications or equivalent substitutions of the technical solution of the present invention without departing from the purpose and scope of the technical solution should be included in the scope of the claims of the present invention.

Claims

1. An absolute spatial multi-dimensional rotational angular displacement sensor, comprising a stator matrix and a rotor matrix, wherein an excitation unit is arranged on the stator matrix, and an induction unit is arranged on the rotor matrix; the stator matrix is ​​in the shape of a spherical shell, the rotor matrix is ​​in the shape of a spherical shell and is located in the spherical shell of the stator matrix, and a gap is left between the surface of the rotor matrix and the inner surface of the stator matrix so that the rotor matrix is ​​suspended and concentric with the stator matrix; the excitation units are 6 in number with the same shape and size and are evenly distributed on the inner surface of the stator matrix; the centers of the 6 excitation units are located at the centers of the six faces of a cube tangent to the inner surface of the stator matrix; the induction units are 8 in number with the same shape and size and are evenly distributed on the surface of the rotor matrix; the 8 induction units are symmetrically distributed on the 8 quadrants of a spatial rectangular coordinate system with the center of the rotor matrix as the origin; The stator base is provided with a stator support shaft for rotationally connecting with the stator drive turntable, and the excitation electrode is connected with an external excitation source through a signal line penetrating the stator base shell; the rotor base is provided with a rotor support shaft for rotationally connecting with the rotor drive turntable; the signal line of the induction electrode is led out from the stator base through the rotor support shaft; the rotor support shaft and the stator support shaft are perpendicular to each other; Features: Each excitation unit is composed of an even number of excitation pole pieces, and all the excitation pole pieces of the same excitation unit are connected to the same signal line; all the excitation pole pieces of the same excitation unit are evenly distributed along the circumference around the center of the excitation unit and there are gaps between adjacent excitation pole pieces; the stator support shaft is fixedly installed on the outer surface of the stator base and at a position corresponding to the center of one of the excitation units; except for the excitation unit corresponding to the stator support shaft, positions on the stator base corresponding to the remaining five excitation units are provided with through holes that penetrate inside and outside, and each through hole is centered relative to the corresponding excitation unit, that is, the excitation pole pieces are arranged around the through holes; the axes of four through holes are perpendicular to the stator support shaft; at least two adjacent through holes among the four through holes are connected by providing a connecting groove on the stator base, and the length direction of the connecting groove is perpendicular to the stator support shaft; both ends of the connecting groove pass through the gap in the excitation unit at the end and the width of the connecting groove is greater than the diameter of the rotor support shaft, and the connecting groove and the through hole connected by the connecting groove together constitute a rotatable area; The rotor support shaft extends out of the stator base through the rotatable area, and the rotation angle of the stator support shaft is limited by the rotatable area.

2. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 1, characterized in that: Three adjacent through holes among the four through holes are connected by opening connecting grooves on the stator substrate to achieve an angle measurement range greater than 180°; or all four through holes are connected by connecting grooves to achieve an angle measurement range greater than 270°.

3. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 1, characterized in that: One end of the rotor support shaft is integrally formed with the surface of the rotor base body and avoids the area where the induction unit is located.

4. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 3, characterized in that: The outer contour shape of all the sensing units is the same spherical triangle. Concave arc edges are formed by cutting at the three vertices of each spherical triangle. The arc edges of any four adjacent sensing units facing the same vertex form a circular blank area. One end of the rotor support shaft is integrally formed with the surface of the rotor base through one of the circular blank areas to avoid the area where the sensing unit is located.

5. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 3, characterized in that: All the induction units are hollowed out in the center, and one end of the rotor support shaft is integrally formed with the surface of the rotor base through one of the hollowed-out areas so as to avoid the area where the induction units are located.

6. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 1, characterized in that: The excitation pole piece is in the shape of a fan ring.

7. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 1, characterized in that: One end of the stator support shaft is integrally formed with the outer surface of the stator base.

8. The absolute spatial multi-dimensional rotation angle displacement sensor according to claim 1, characterized in that: The diameter of the rotor base is smaller than the diameter of the through hole; and the width of the connecting groove is smaller than the diameter of the through hole.

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