An in-situ measurement device and method for the vibration-thermal coupling of a mirror

Abstract

An in-situ measurement device and usage method for the vibration-force-thermal coupling of a mirror, belonging to the technical field of precision optical instrument measurement. The present invention solves the problem in the prior art of lacking a measurement device that can comprehensively detect the influence of vibration and temperature on the angular change of the mirror. It includes a central control system, a housing, and a vibration platform, an environmental temperature control component, a local heating and temperature measurement component, an image processing device, and three autocollimators that are arranged inside the housing and are signal-connected to the central control system. By setting three mirrors and three autocollimators, it is possible to simultaneously measure the vibration deviation in three degrees-of-freedom directions, thereby effectively improving the measurement accuracy. By setting the vibration platform, the environmental temperature control component, and the local heating and temperature measurement component, it is possible to simulate the stress and thermal load conditions of the mirror under actual working conditions, realize the synchronous monitoring of multi-dimensional deformation, and thereby accurately reflect the true performance of the mirror under dynamic conditions.

Description

Technical Field

[0001] The present invention relates to an in-situ measurement device and a usage method for the vibration-force-thermal coupling of a mirror, belonging to the technical field of precision optical instrument measurement. Background Art

[0002] In multiple key fields of modern science and technology, including but not limited to astronomy, laser ranging, map surveying and mapping, and aerospace engineering, the importance of high-precision measurement has become increasingly prominent. These applications highly rely on the accuracy of the optical system. As one of the core components, the mirror's minute angle change may lead to significant errors. Especially in ultra-long-distance observation and ranging, any minute angle offset will be amplified, thus seriously affecting the accuracy and reliability of the final result.

[0003] Vibration and temperature changes are the main factors affecting the performance of the mirror. In the actual operating environment, especially in the face of extreme conditions, strong vibration may cause the connection between the mirror and the mirror mount to become loose, thereby triggering a change in the mirror's angle. In addition, with the development of laser technology, the application of high-power lasers increases the risk of local heating of the mirror. The thermal expansion characteristics of the material cause the mirror to deform, further leading to an angle offset. In addition, the different thermal expansion sizes due to the unequal thickness of the mirror structure will also cause the mirror to deviate from the mating surface, further leading to an angle offset. Because in many cases, the temperature inside the device is very high, and sometimes there is a situation of local heating of the mirror (for example, when a laser hits the mirror, it will cause local heating of the mirror. Because the mirror material has thermal expansion, especially for mirrors with unequal thickness, the different values of thermal expansion sizes will cause uneven deviation from the fixing plate, and finally will also cause a minute angle offset of the mirror).

[0004] However, in the prior art, in order to measure the mirror, generally the mirror is separated from the mirror mount, and the mirror is measured separately. After the measurement, the mirror is reinstalled back to the mirror mount. This measurement method is not only time-consuming and laborious, but also may introduce additional errors due to minute changes during the reinstallation process. In addition, most of the existing mirror measurement methods cannot simultaneously consider the influence of vibration and temperature changes on the mirror performance. Therefore, there is an urgent need for an in-situ measurement device for the vibration-force-thermal coupling of a mirror to comprehensively detect the influence of vibration and temperature on the angle change of the mirror. Summary of the Invention

[0005] The present invention is to solve the above technical problems, and further provides an in-situ measurement device and a usage method for the vibration-force-thermal coupling of a mirror.

[0006] The technical solution adopted by the present invention to solve the above technical problems is:

[0007] An in-situ measurement device for the vibration-force-thermal coupling of a mirror, comprising a central control system, a housing, and a vibration platform, an environmental temperature control component, a local heating and temperature measurement component, an image processing device, and three autocollimators disposed within the housing and signal-connected to the central control system. Among them, an L-shaped mounting plate is fixedly installed on the vibration platform, a mirror base with a mirror installed thereon is fixedly installed on the horizontal plate of the L-shaped mounting plate, the mirror is arranged parallel to the vertical plate of the L-shaped mounting plate, the first to third mirrors are attached to the L-shaped mounting plate, and the first mirror and the second mirror are respectively arranged parallel to the front side and the upper side of the mirror, the third mirror is arranged parallel to the left side or the right side of the mirror, the three autocollimators are respectively arranged in one-to-one correspondence with the first to third mirrors, and each autocollimator is signal-connected to the image processing device. The change images of the three degrees of freedom of the mirror in the X, Y, and Z directions are measured by the three autocollimators respectively, the temperature environment inside the housing is controlled by the environmental temperature control component, and local heating of the mirror is achieved by the local heating and temperature measurement component.

[0008] Further, the autocollimator is installed at the bottom of the housing through a two-dimensional moving platform to achieve adjustment of the test position of the mirror.

[0009] Further, the local heating and temperature measurement component includes a rotary turntable and a local heating device and a temperature measurement device installed on the rotary turntable.

[0010] Further, the environmental temperature control component includes a refrigeration module, a heating module, and a temperature sensor.

[0011] Further, an air quality detection module and a fan are also arranged inside the housing, and the fan is signal-connected to the air quality detection module.

[0012] Further, the housing includes a bottom plate and a protective cover buckled on the bottom plate, and the autocollimator, the vibration platform, and the local heating and temperature measurement component are all installed on the bottom plate.

[0013] Further, the protective cover is made of a transparent or semi-transparent material.

[0014] Further, electrical connection interfaces are provided on the protective cover for electrical connection between the inside and the outside of the protective cover.

[0015] Further, a window is opened on the housing.

[0016] A method for using the above in-situ measurement device for the vibration force-thermal coupling of a mirror. First, fixedly install the mirror to be measured and its corresponding mirror base on the horizontal plate of the L-shaped mounting plate, and then fixedly install the L-shaped mounting plate on the vibration platform between three autocollimators. Then, adjust the installation angles of the autocollimators so that the images formed by the mirror and the mirror to be measured are both in the middle of the fields of view of the corresponding autocollimators. Finally, start the vibration platform. During the vibration process, real-time monitor the changes in the reflection angles of the mirror and the mirror to be measured. Based on the reflection angle of the mirror, judge the vibration deviation of the mirror to be measured.

[0017] The present invention has the following effects compared with the prior art:

[0018] The first mirror, the second mirror and the third mirror are all used as reference mirrors. Based on the reflection angle of the mirror, judge the vibration deviation of the mirror to be measured. The first mirror and the mirror surface with reflection function on the mirror to be measured are parallel to form a group, and the second mirror and the third mirror are respectively parallel to the two non-reflective surfaces on the top and side of the mirror to be measured to form a group for detecting the vibration deviation. By setting three mirrors and three autocollimators, it is possible to simultaneously measure the vibration deviations in three degrees of freedom directions, thereby effectively improving the measurement accuracy.

[0019] Apply vibration through the vibration platform to simulate the vibration suffered by the mirror in the actual working condition; simulate the thermal load situation of the mirror in the actual working condition, such as the overall ambient temperature or the local heating situation, through the environmental temperature control component and the local heating and temperature measurement component. By setting the vibration platform, the environmental temperature control component and the local heating and temperature measurement component, it is possible to simulate the stress and thermal load situations of the mirror in the actual working condition, realize the synchronous monitoring of multi-dimensional deformation, and thus accurately reflect the true performance of the mirror under dynamic conditions.

[0020] During the test, the mirror and the mirror base are not separated, enabling in-situ measurement and effectively avoiding additional errors introduced by minor changes during the reinstallation process.

[0021] Start the vibration platform through the central control system. During the vibration process, real-time monitor the changes in the angle between the mirror to be measured and the mirror. Measure the change images of the three degrees of freedom of X, Y, and Z through three groups of autocollimators, and transmit the obtained change images of the degrees of freedom to the image processing device through the data acquisition card. After the operation of the image processing device, obtain the relationship between time and the offset of the mirror to be measured caused by vibration.

[0022] Through the present invention, it is possible to accurately measure and control the angular offset of the mirror under vibration and temperature change conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1The first three-dimensional structural schematic diagram of the in-situ measurement device for the vibration-force-thermal coupling of the mirror of the present invention;

[0024] Figure 2 The second three-dimensional structural schematic diagram (the housing is not shown) of the in-situ measurement device for the vibration-force-thermal coupling of the mirror of the present invention;

[0025] Figure 3 The schematic diagram of the positional relationship among the mirror, the first mirror, the second mirror, and the third mirror;

[0026] Figure 4 The three-dimensional structural schematic diagram of the local heating and temperature measurement component.

[0027] In the figure:

[0028] 100, mirror; 101, mirror base; 1, central control system; 2, housing; 201, bottom plate; 202, protective cover; 3, vibration platform; 4, local heating and temperature measurement component; 401, rotary turntable; 402, local heating device; 403, temperature measurement device; 5, image processing device; 6, autocollimator; 7, L-shaped mounting plate; 8, first mirror; 9, second mirror; 10, third mirror; 11, data acquisition card; 12, two-dimensional moving platform; 13, electrical connection interface; 14, refrigeration module; 15, heating module; 16, temperature sensor. Detailed implementation manners

[0029] Detailed implementation manner one: Combining Figures 1 to 4 Describe the technical solutions in the embodiments of the present invention clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0030] It should be noted that the descriptions of the present invention regarding directions such as "front", "rear", "left", "right", "inside", "outside", "left side", "right side", "upper part", "lower part", "top", "bottom", etc. are all defined based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the described structure must be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present invention. In the description of the present invention, "a plurality" means more than two, unless otherwise specifically defined.

[0031] In the description of the present invention, unless otherwise clearly defined and limited, the terms "installed", "connected", and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] An in-situ measurement device for the vibration-force-thermal coupling of a mirror, comprising a central control system 1, a housing 2, and a vibration platform 3, an environmental temperature control component, a local heating and temperature measurement component 4, an image processing device 5, and three autocollimators 6 disposed within the housing 2 and signal-connected to the central control system 1. Among them, an L-shaped mounting plate 7 is fixedly installed on the vibration platform 3, and a mirror base 101 equipped with a mirror 100 is fixedly installed on the horizontal plate of the L-shaped mounting plate 7. The mirror 100 is arranged parallel to the vertical plate of the L-shaped mounting plate 7. The first to third mirrors are attached to the L-shaped mounting plate 7, and the first mirror 8 and the second mirror 9 are respectively arranged parallel to the front side and the upper side of the mirror 100, and the third mirror 10 is arranged parallel to the left side or the right side of the mirror 100. The three autocollimators 6 are respectively arranged in one-to-one correspondence with the first to third mirrors, and each autocollimator 6 is signal-connected to the image processing device 5. The change images of the mirror 100 in the three degrees of freedom of X, Y, and Z are respectively measured by the three autocollimators 6. The temperature environment inside the housing 2 is controlled by the environmental temperature control component, and the local heating of the mirror 100 is realized by the local heating and temperature measurement component 4.

[0033] The in-situ measurement device for the vibration-force-thermal coupling of the mirror according to the present invention may also be provided with a data acquisition card 11 to improve multi-channel parallel monitoring, and the signals monitored by each device (such as the first to third autocollimators 6 and the image processing device 5, etc.) are transmitted to the central control system 1 for processing to obtain relevant detection data.

[0034] The central control system 1 and the data acquisition card 11 can be installed inside or outside the housing 2 according to actual needs. The central control system 1, the data acquisition card 11, and the image processing device 5 are all prior arts, and their working principles will not be elaborated here.

[0035] The autocollimator 6 is mainly used to measure small angular deviations. It works based on the principle of optical autocollimation, that is, light is emitted from the instrument, reflected by the mirror 100, and then returns to the detector inside the instrument. If there is a slight angular offset of the mirror 100, this offset will cause a change in the position of the returned light, and thus the angular deviation can be calculated. The specific method for calculating the angular deviation is prior art and will not be elaborated here. The autocollimator 6 adopted in the present invention is a large-aperture autocollimator. During the test, the images formed by the mirrors and the image formed by the mirror 100 are both in the middle of the corresponding field of view of the autocollimator 6 to record the included angle between the mirrors and the mirror 100.

[0036] Both the environmental temperature control component and the local heating and temperature measurement component 4 are non-contact type.

[0037] By providing the L-shaped mounting plate 7, it is convenient for the installation of the mirror 100 and each mirror.

[0038] The first mirror 8, the second mirror 9, and the third mirror 10 all serve as reference mirrors. Based on the reflection included angle of the mirrors, the vibration deviation amount of the mirror 100 is judged. The first mirror 8 and the mirror surface with reflection function on the mirror 100 are parallel to form a group. The second mirror 9 and the third mirror 10 are respectively parallel to the two non-reflective surfaces on the top and side of the mirror 100 to form a group for vibration deviation amount detection. By providing three mirrors and three autocollimators 6, it is possible to simultaneously measure the vibration deviation amounts in three degrees of freedom directions, thereby effectively improving the measurement accuracy.

[0039] Vibration is applied through the vibration platform 3 to simulate the vibration suffered by the mirror 100 in the actual working condition; the environmental temperature control component and the local heating and temperature measurement component 4 are used to simulate the heat load situation of the mirror 100 in the actual working condition, such as the overall environmental temperature or the local heating situation. By providing the vibration platform 3, the environmental temperature control component, and the local heating and temperature measurement component 4, it is possible to simulate the stress and heat load situations of the mirror 100 in the actual working condition, realize synchronous monitoring of multi-dimensional deformation, and thus accurately reflect the true performance of the mirror 100 under dynamic conditions.

[0040] During the test, the mirror 100 is not separated from the mirror base 101, enabling in-situ measurement and effectively avoiding additional errors introduced by minor changes during the reinstallation process.

[0041] The vibration platform 3 is started through the central control system 1. During the vibration process, the change in the angle between the mirror 100 and the mirror is monitored in real time. The change images in the X, Y, and Z degrees of freedom are measured by three sets of autocollimators 6, and the obtained change images of the degrees of freedom are transmitted to the image processing device 5 through the data acquisition card 11. After being calculated by the image processing device 5, the relationship between time and the offset of the mirror 100 caused by vibration is obtained. By combining the change law of vibration with time, the equation of vibration, time, and offset is obtained. The calculation process and the equation can be realized by existing technologies and will not be elaborated here.

[0042] Through the present invention, it is possible to accurately measure and control the angular offset of the mirror 100 under vibration and temperature change conditions.

[0043] The autocollimator 6 is installed at the bottom of the housing 2 through the two-dimensional moving platform 12 to realize the adjustment of the test position of the mirror 100. With such a design, through the two-dimensional moving platform 12, the angular adjustment of the autocollimator 6 in the up, down, left, and right directions can be realized, and thus the adjustment of the test position of the mirror 100 can be realized. The two-dimensional moving platform 12 includes a longitudinal angle adjustment component and a transverse angle adjustment component. The angular adjustment of the autocollimator 6 thereon in the up and down directions is realized through the longitudinal angle adjustment component, and the angular adjustment of the autocollimator 6 thereon in the left and right directions is realized through the transverse angle adjustment component.

[0044] The longitudinal angle adjustment component and the transverse angle adjustment component are fixedly connected up and down as a whole. Specifically, the longitudinal angle adjustment component can be fixedly installed on the transverse angle adjustment component, or the transverse angle adjustment component can be fixedly installed on the longitudinal angle adjustment component. The specific structures of the longitudinal angle adjustment component and the transverse angle adjustment component are existing technologies and will not be elaborated here. For example, it can be that the output shaft of a horizontally arranged driving motor drives the first mounting plate to swing up and down, and then drives the device (such as the autocollimator 6 or the transverse angle adjustment component) fixedly installed on the first mounting plate to perform angular adjustment in the up and down directions. The output shaft of a vertically arranged driving motor drives the second mounting plate to swing left and right, and then drives the device (such as the autocollimator 6 or the longitudinal angle adjustment component) fixedly installed on the second mounting plate to perform angular adjustment in the left and right directions.

[0045] The local heating and temperature measuring component 4 includes a rotary turntable 401 and a local heating device 402 and a temperature measuring device 403 installed on the rotary turntable 401. The temperature measuring device 403 can be an existing conventional device capable of realizing temperature measurement. The rotary turntable 401 can realize a small-range circumferential rotation.

[0046] The environmental temperature control component includes a refrigeration module 14, a heating module 15, and a temperature sensor 16. With such a design, the environmental temperature inside the housing 2 is adjusted by the refrigeration module 14 and the heating module 15, thereby providing the required temperature environment for the mirror 100. Specifically, the data of the temperature sensor 16 is transmitted to the central control system 1, and the central control system 1 issues commands to the refrigeration module 14 or the heating module 15 to achieve temperature regulation.

[0047] An air quality detection module and a fan are also provided inside the housing 2, and the fan is signal-connected to the air quality detection module. With such a design, when the measuring device is in a non-working state, the dust degree inside the housing 2 is detected by the air quality detection module. When dust is detected, the fan is started to clean the dust to ensure the cleanliness inside the measuring device. At the same time, during the measurement process, the fan can also be used for cooling.

[0048] The housing 2 includes a bottom plate 201 and a protective cover 202 buckled on the bottom plate 201. The autocollimator 6, the vibration platform 3, and the local heating and temperature measurement component 4 are all installed on the bottom plate 201. The protective cover 202 can be made of transparent (such as glass), semi-transparent (such as acrylic board), or opaque (such as metal plate) materials, and its main purpose is to provide a protected environment for the devices inside it.

[0049] The protective cover 202 is made of transparent or semi-transparent materials, such as acrylic board or glass, which is convenient for observing the situation inside the protective cover 202.

[0050] An electrical connection interface 13 is provided on the protective cover 202 for electrical connection between the inside and the outside of the protective cover 202.

[0051] A window is opened on the housing 2. With such a design, it is convenient for the installation and position adjustment of the devices inside the housing 2.

[0052] A method for using the above-mentioned in-situ measurement device for the vibration force-thermal coupling of the mirror is as follows. First, the mirror 100 to be measured and its mirror base 101 are fixedly installed on the horizontal plate of the L-shaped mounting plate 7, and then the L-shaped mounting plate 7 is fixedly installed on the vibration platform 3 between the three autocollimators 6. Then, the installation angles of the autocollimators 6 are adjusted so that the images formed by the mirror and the mirror 100 are both in the middle of the fields of view of the corresponding autocollimators 6. Finally, the vibration platform 3 is started, and during the vibration process, the changes in the reflection angles of the mirror and the mirror 100 are monitored in real time. Based on the reflection angle of the mirror, the vibration deviation of the mirror 100 is judged.

[0053] The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention should cover within the protection scope of the present invention according to the technical solution and inventive concept of the present invention by making equivalent substitutions or changes.

Claims

1. An in-situ measurement device for the vibration-force-thermal coupling of a mirror, characterized in that: It includes a central control system (1), a housing (2), and a vibration platform (3), an environmental temperature control component, a local heating and temperature measurement component (4), an image processing device (5), and three autocollimators (6) that are arranged inside the housing (2) and are signal-connected to the central control system (1). Among them, an L-shaped mounting plate (7) is fixedly installed on the vibration platform (3), and a mirror base (101) with a mirror (100) installed is fixedly installed on the horizontal plate of the L-shaped mounting plate (7). The mirror (100) is arranged parallel to the vertical plate of the L-shaped mounting plate (7). The first to third mirrors are pasted on the L-shaped mounting plate (7), and the first mirror (8) and the second mirror (9) are respectively arranged parallel to the front side and the upper side of the mirror (100), and the third mirror (10) is arranged parallel to the left side or the right side of the mirror (100). The three autocollimators (6) are respectively arranged in one-to-one correspondence with the first to third mirrors, and each autocollimator (6) is signal-connected to the image processing device (5). The change images of the three degrees of freedom of the mirror (100) in the X, Y, and Z directions are measured by the three autocollimators (6) respectively. The temperature environment inside the housing (2) is controlled by the environmental temperature control component, and the local heating of the mirror (100) is realized by the local heating and temperature measurement component (4).

2. The in-situ measurement device for the vibration-thermal coupling of a mirror according to claim 1, characterized in that: The autocollimator (6) is installed at the bottom of the housing (2) through a two-dimensional moving platform (12) to realize the adjustment of the test position of the mirror (100).

3. The in-situ measurement device for the vibration-thermal coupling of a mirror according to claim 1, wherein: The local heating and temperature measurement component (4) includes a rotary turntable (401) and a local heating device (402) and a temperature measurement device (403) installed on the rotary turntable (401).

4. An in-situ measurement device for the vibration-thermal coupling of a mirror, as claimed in claim 1, wherein: The environmental temperature control component includes a refrigeration module (14), a heating module (15), and a temperature sensor (16).

5. The in-situ measurement device for the vibration-thermal coupling of a mirror according to claim 1, wherein: An air quality detection module and a fan are also arranged inside the housing (2), and the fan is signal-connected to the air quality detection module.

6. The in-situ measurement device for reflecting mirror vibration force and thermal coupling according to claim 1, characterized in that: The housing (2) includes a bottom plate (201) and a protective cover (202) buckled on the bottom plate (201). The autocollimator (6), the vibration platform (3), and the local heating and temperature measurement component (4) are all installed on the bottom plate (201).

7. An in-situ measuring device for the vibration-force-thermal coupling of a mirror, characterized in that: The protective cover (202) is made of a transparent or semi-transparent material.

8. An in-situ measurement device for the vibration-thermal coupling of a mirror, according to claim 6, characterized in that: An electrical connection interface (13) is arranged on the protective cover (202) for the electrical connection between the inside and the outside of the protective cover (202).

9. An in-situ measurement device for the vibration-thermal coupling of a mirror, as claimed in claim 1, wherein: A window is opened on the housing (2).

10. A method for using an in-situ measurement device for the thermo-mechanical coupling of the vibration force of a mirror, characterized in that: Using the in-situ measurement device for the vibration-force-thermal coupling of the mirror according to any one of claims 1 to 9, first, fixedly install the mirror (100) to be measured and its mirror base (101) on the horizontal plate of the L-shaped mounting plate (7), and then fixedly install the L-shaped mounting plate (7) on the vibration platform (3) between the three autocollimators (6); then, adjust the installation angles of the autocollimators (6) so that the images formed by the mirror and the mirror (100) are both in the middle of the fields of view of the corresponding autocollimators (6); finally, start the vibration platform (3), and during the vibration process, monitor in real time the changes in the reflection angles of the mirror and the mirror (100), and judge the vibration deviation of the mirror (100) based on the reflection angle of the mirror.

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