Multi-electrode sample table suitable for ultrahigh vacuum and low-temperature environment

Abstract

The invention relates to the technical field of angular resolution photoelectron spectroscopy sample preparation, in particular to a multi-electrode sample table suitable for ultrahigh vacuum and low-temperature environments, which comprises a sample seat and a sample support, the sample support comprises a mounting table, a placement table, a sample bearing piece and a female head electrode assembly, the placement table is arranged on the mounting table, and the female head electrode assembly is arranged on the placement table. The sample bearing part is used for placing a sample and is detachably connected with the placing table, and the female head electrode assembly is arranged on the mounting table; and the sample seat is used for connecting the mounting table and the sample frame and comprises a male head electrode assembly matched with the female head electrode assembly. After a sample is tested, only the sample bearing piece on the sample support needs to be replaced, the whole sample support does not need to be replaced, and repeated use of the sample support is achieved; and the front part of the sample holder is not shielded, so that incident photons or photoelectrons excited from the sample are prevented from being shielded, and the effective acquisition space of the photoelectron spectroscopy is further improved.

Description

Technical Field

[0001] The invention relates to the technical field of angle-resolved photoelectron spectroscopy sample preparation, and in particular to a multi-electrode sample stage suitable for ultra-high vacuum and low-temperature environments. Background Art

[0002] Angle-resolved photoelectron spectroscopy (ARPES) is one of the most important experimental methods in condensed matter physics research and is widely used to explore and understand the electronic structure of materials. By irradiating the sample with photons of a certain energy, ARPES can detect photoelectrons released from the surface of the material, and by analyzing the kinetic energy and emission angle of these photoelectrons, key information such as the material's energy band structure and electronic state density can be obtained. This technology is of great significance for the study of a variety of cutting-edge topics, and ARPES provides an indispensable perspective.

[0003] In recent years, with the extensive research on two-dimensional materials, the introduction of gate modulation technology in ARPES experiments has greatly broadened its application scope. Gate modulation refers to controlling the electrical properties of materials or devices by applying an external voltage on the surface of the material and adjusting the gate (usually a thin film or electrode). In the study of two-dimensional materials, this technology is particularly important because it can accurately and effectively regulate the carrier concentration, band gap size and electronic structure changes of the material. For two-dimensional semiconductor and conductor materials, gate modulation can not only adjust the number of charge carriers, but also modulate the electronic state of the material, thereby affecting its conductivity, optical properties and transmission characteristics.

[0004] The introduction of gate control technology into the ARPES experiment is of great significance. This combination enables researchers to control the electrical transport properties of two-dimensional materials in real time and in situ under extremely low temperature and ultra-high vacuum environments, and simultaneously observe changes in their band structures. For example, gate control can achieve precise regulation of the carrier concentration of two-dimensional materials, thereby affecting their conductivity. For example, using hexagonal boron nitride as a dielectric layer and thick graphite as a gate, graphene samples can be made into corresponding devices, and the carrier concentration of graphene can be controlled by an external electric field. In addition, through gate control, researchers can dynamically adjust the band gap of the material. In some two-dimensional materials such as transition metal disulfides, gate control can achieve a transition from semiconductor to metal, and even achieve fine adjustment of the band gap size, which provides great flexibility for optimizing device performance. This is of great significance in the development of new semiconductor devices, optoelectronic devices and quantum devices.

[0005] The existing four-electrode sample holder and sample holder designs mostly use side contact of electrodes and most of the electrodes are designed on the front of the sample holder, such as Fig.11As shown in the figure, in the ARPES experiment, the light source needs to be very close to the sample, and the sample needs to be moved to the focus of the analyzer. Therefore, the space in front of the sample holder is very valuable. At the same time, the front shrapnel may block the incident photons or photoelectrons excited from the sample. This design will have a huge impact on the ARPES experiment. At the same time, since the experiment requires a large number of sample holders to be replaced, the existing design is prone to elastic fatigue, resulting in poor contact and difficulty in reuse. Summary of the invention

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a multi-electrode sample stage suitable for ultra-high vacuum and low temperature environments, so as to solve the problem that the sample holder in the prior art is difficult to reuse and the existing electrode design compresses the effective detection range of photoelectrons.

[0007] To achieve the above objectives and other related objectives, the present invention is achieved through the following technical solutions.

[0008] The first aspect of the present invention is to provide a multi-electrode sample stage suitable for ultra-high vacuum and low-temperature environments, the multi-electrode sample stage includes a sample seat and a sample holder, the sample holder includes a mounting table, a placement table, a sample carrier and a female electrode assembly, the placement table is arranged on the mounting table, the sample carrier is used to place samples and is detachably connected to the placement table, the female electrode assembly is arranged on the mounting table; the sample seat is used to connect the mounting table and the sample rack, the sample seat includes a male electrode assembly that cooperates with the female electrode assembly.

[0009] The sample attached to the sample carrier of the present invention may be directly adhered to the surface of the sample carrier.

[0010] The sample holder of the present invention is installed on a sample rack of an angle-resolved photoelectron energy spectrum, and then the sample carrier is installed on a placement table, and then the sample holder with the sample is installed on the sample holder, so that the female electrode assembly and the male electrode assembly on the sample holder cooperate with each other. After the sample is tested, it is only necessary to replace the sample carrier on the sample holder without replacing the entire sample holder, thereby realizing the reuse of the sample holder; in addition, there is no shielding on the side of the sample carrier with the sample, that is, there is no shielding in front of the sample holder, so as to avoid shielding the incident photons or photoelectrons excited from the sample, thereby increasing the effective collection space of the photoelectron energy spectrum.

[0011] In some embodiments of the present invention, the mounting platform includes a base plate and a handle integrally formed with the base plate, and the placement platform is disposed on and connected to the base plate.

[0012] In some embodiments of the present invention, the handle is located at the center of the side of the base plate.

[0013] In some embodiments of the present invention, the placement platform is located at the center of the upper surface of the base plate.

[0014] In some embodiments of the present invention, two corners of the bottom plate on the other side away from the handle are chamfered.

[0015] In some embodiments of the present invention, a limit block is provided on one side of the base plate close to the handle, and the limit block is perpendicular to the direction of the handle; two limit blocks are provided, and the two limit blocks are located on the same horizontal line and distributed on both sides of the base plate.

[0016] In some embodiments of the present invention, the placement table is disposed on a base plate and fixedly connected to the base plate; preferably, the fixed connection method is selected from any one of welding, bonding, and bolting.

[0017] In some embodiments of the present invention, the placement table is slidably connected to the sample carrier, and a locking piece is provided on the mounting table. The locking piece passes through the bottom plate and the placement table in a direction perpendicular to the bottom plate and abuts against the sample carrier, and is used to fix the placement table and the sample carrier. The locking piece is threadedly connected to the bottom plate and the placement table. A slide groove that cooperates with the sample carrier is provided on the placement table, and the slide groove passes through the moving direction of the sample carrier; preferably, the slide groove is a dovetail slide groove; the locking piece is made of non-magnetic material, and preferably, the locking piece is a titanium screw. A locking hole that cooperates with the locking piece is provided on the sample carrier, and the locking hole is connected to the air release groove.

[0018] In some embodiments of the present invention, the female electrode assembly includes a female electrode seat and a plurality of female electrodes, wherein the female electrode is arranged on the female electrode seat and is detachably connected to the female electrode seat, and the female electrode seat is detachably connected to the mounting table; preferably, the female electrodes can be set to one, two, three or more, and specifically, the female electrodes in the present application are set to four.

[0019] In some embodiments of the present invention, the female electrode seat is disposed on the bottom plate and is located on a side away from the handle.

[0020] In some embodiments of the present invention, the side surfaces of the female electrode seat are in contact with the side surfaces of the placement table and the side surfaces of the sample carrier, so as to reduce the possibility that the sample carrier slides out of the slide groove when sliding in the slide groove of the placement table.

[0021] In some embodiments of the present invention, the female electrode holder is connected to the bottom plate with bolts; preferably, the female electrode holder includes a placement portion and a mounting portion, the placement portion and the mounting portion are integrally formed and arranged in a T-shape, the female electrode is installed on the placement portion, and a mounting groove for placing the mounting portion is provided on the bottom plate, and the mounting groove penetrates along the thickness direction of the bottom plate; further preferably, a lap joint is fixedly provided on the bottom plate, the lap joint is located on both sides of the mounting groove, and the protruding end of the placement portion is overlapped on the lap joint and fixed to the bottom plate by bolts;

[0022] In some embodiments of the present invention, the female electrode is a gold-plated beryllium copper electrode.

[0023] In some embodiments of the present invention, the sample holder includes a connecting platform 1, a connecting platform 2 and a spring clip, the male electrode assembly is arranged on the connecting platform 1 and connected to the connecting platform 1, the connecting platform 2 is used to connect the thermal conductive copper braid and the connecting platform 1, the connecting platform 1 is provided with a connecting groove for placing the mounting platform, the spring clip is detachably connected to the connecting platform 1 and is used to fix the connecting platform 1 and the mounting platform, and the mounting platform slides into the connecting groove and is fixed to the connecting platform 1 by the spring clip.

[0024] In some embodiments of the present invention, a placement groove for placing a low-temperature thermometer is provided on the second connecting platform; preferably, the placement groove is arranged in a direction parallel to the first connecting platform and passes through the second connecting platform.

[0025] In some embodiments of the present invention, a plurality of air leakage holes are provided on the second connecting platform; preferably, the air leakage holes are arranged in a direction parallel to the first connecting platform and penetrate the second connecting platform.

[0026] In some embodiments of the present invention, a threaded hole is provided on the second connection platform to cooperate with the heat-conducting copper braid, and the threaded hole is perpendicular to the first connection platform and passes through the second connection platform; preferably, the threaded hole is provided in plurality. The threaded hole can be provided in one, two, three or more, and specifically, the threaded hole is provided in two.

[0027] In some embodiments of the present invention, the connecting platform 1 is vertically arranged on the connecting platform 2 and is integrally formed with the connecting platform 2, and the spring sheet is detachably connected to the connecting platform 1. Preferably, the spring sheet is bolted to the connecting platform 1.

[0028] In some embodiments of the present invention, the spring sheet is a beryllium copper sheet.

[0029] In some embodiments of the present invention, the male electrode assembly includes a male electrode seat and a plurality of male electrodes, wherein the male electrode seat is arranged on a connecting platform 1 and is detachably connected to the connecting platform 1; a hemispherical groove that cooperates with the male electrode is provided at the bottom of the female electrode; preferably, the male electrode is a spring pin.

[0030] In some embodiments of the present invention, an extension groove 1 is provided on the base plate, and an extension groove 2 is provided on the female electrode seat. The center lines of the extension groove 1 and the extension groove 2 are located on the same line and extend to the female electrode. The extension groove 1 and the extension groove 2 cooperate to form a trumpet shape, and the extension groove 1 and the extension groove 2 are both connected to the mounting groove.

[0031] In some embodiments of the present invention, the spring sheet includes a connecting portion and two elastic pressing portions parallel to each other, the connecting portion and the elastic pressing portion are integrally formed, the elastic pressing portion is used to fix the bottom plate and the connecting platform one, the connecting portion is U-shaped and the opening is away from the male electrode assembly, and is used to fix the elastic pressing portion on the connecting platform one; the elastic pressing portion is arranged along the moving direction of the sample carrier.

[0032] In some embodiments of the present invention, the sample holder is selected from a sample holder in angle-resolved photoelectron spectroscopy testing.

[0033] In some embodiments of the present invention, the sample carrier is used to place samples, and the samples are set on the sample carrier by adhesion; preferably, a degassing groove is opened on the side of the sample carrier close to the placement table, and the degassing groove passes through the moving direction of the sample carrier and passes through the side close to the placement table; further preferably, the sample carrier is made of copper.

[0034] The second aspect of the present invention is to provide a multi-electrode sample stage as described above, which is suitable for use in angle-resolved photoelectron spectroscopy in ultra-high vacuum and low-temperature environments.

[0035] As described above, the multi-electrode sample stage of the present invention suitable for ultra-high vacuum and low temperature environment has the following beneficial effects:

[0036] (1) The sample carrier with the sample in the multi-electrode sample stage of the present invention, which is suitable for use in ultra-high vacuum and low temperature environments, has no shielding in front of it, thereby reducing shielding of incident photons or photoelectrons excited from the sample, thereby reducing the impact on sample testing;

[0037] (2) In the multi-electrode sample stage of the present invention, which is suitable for use in ultra-high vacuum and low-temperature environments, when it is necessary to replace the sample or keep a sample, only the sample carrier needs to be replaced, which facilitates the reuse of the sample holder.

[0038] (3) The bottom plate of the multi-electrode sample stage suitable for ultra-high vacuum and low temperature environments of the present invention and the bottom of the female electrode seat form a horn-shaped guide groove, and the male electrode is a spring pin, thereby reducing the subsequent poor contact caused by wear between the male electrode and the bottom plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a schematic diagram showing that the sample stage of the present invention is placed in a sample position adjustment device.

[0040] Figure 2 Shown is a three-dimensional schematic diagram of the overall structure of the sample stage of the present invention.

[0041] Figure 3 Shown is a schematic three-dimensional structure diagram of the sample holder of the present invention.

[0042] Figure 4 Shown is an exploded view of a sample holder according to the present invention.

[0043] Figure 5 Shown is a back view of a sample holder according to the present invention.

[0044] Figure 6 Shown is a schematic three-dimensional structure diagram of the sample holder of the present invention.

[0045] Figure 7 Shown is an exploded view of a sample holder according to the present invention.

[0046] Figure 8 Shown is a cross-sectional view of the electrode contacts of the sample holder of the present invention.

[0047] Fig. 9 Shown is a side view of a sample holder of the present invention.

[0048] Fig.10 Shown is a schematic diagram of the shrapnel of the present invention.

[0049] Fig.11 Shown is a schematic structural diagram of an existing sample holder involved in the background technology.

[0050] Reference numerals:

[0051] 1. Sample holder; 11. Mounting table; 111. Bottom plate; 112. Handle; 113. Extension slot 1; 114. Mounting slot; 12. Placement table; 121. Slide slot; 13. Sample carrier; 14. Air release slot; 15. Locking piece; 2. Sample holder; 21. Connection table 1; 211. Strip slot; 22. Connection table 2; 221. Placement slot; 222. Threaded hole; 223. Air release hole; 23. Shrapnel; 231. Connection part; 232. Elastic pressing part; 24. Connection slot; 3. Sample holder; 4. Female electrode assembly; 41. Female electrode seat; 411. Placement part; 412. Mounting part; 413. Extension slot 2; 42. Female electrode; 5. Male electrode assembly; 51. Male electrode seat; 52. Male electrode. DETAILED DESCRIPTION

[0052] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0053] See also Figure 1-10 It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0054] See also Figure 1-10 The present invention provides a multi-electrode sample stage suitable for ultra-high vacuum and low temperature environments.

[0055] See also Figure 1-7A multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment, comprising a sample holder 2 and a sample holder 1, wherein the sample holder 1 comprises a mounting table 11, a placing table 12, a sample carrier 13 and a female electrode assembly 4, wherein the placing table 12 is arranged on the mounting table 11 and connected to the mounting table 11, wherein the sample carrier 13 is used to place the sample and is detachably connected to the placing table 12, wherein the female electrode assembly 4 is arranged on the mounting table 11 and connected to the mounting table 11; wherein the sample holder 2 is used to connect the mounting table 11 and the sample rack 3, wherein the sample holder 2 comprises a male electrode assembly 5 which cooperates with the female electrode assembly 4. The sample is adhered to the sample carrier 13, and then the sample carrier 13 containing the sample is mounted on the placing table 12, wherein the placing table 12 is fixed on the mounting table 11, wherein the mounting table 11 is detachably mounted on the sample holder 2 with the sample carrier 13 attached thereto so that the male electrode assembly 5 cooperates with the female electrode assembly 4, and then the sample holder 2 is mounted on the sample rack 3 for subsequent testing. The sample stage designed in the present invention has no obstruction in front of the sample, and will not block the incident photons or photoelectrons excited from the sample, thereby improving the sample preparation and detection effects. In addition, the sample carrier 13 is detachably connected to the placement table 12. Therefore, after the preparation and detection are completed, only the sample carrier 13 needs to be replaced, and there is no need to replace the entire sample holder 1, which is convenient for reusing the sample stage.

[0056] In some embodiments of the present invention, see Figure 2-3 The sample is adhered to the sample carrier 13, and the detection of the sample is carried out in the sample chamber of the angle-resolved photoelectron spectroscopy. The material of the sample carrier 13 of the present invention is usually a material that has no effect on the sample and the sample detection process. Preferably, the material of the sample carrier 13 of the present invention is usually copper. In order to adapt to the ultra-high vacuum experimental conditions, the sample carrier 13 is provided with a degassing groove 14 on one side close to the placement table 12. The degassing groove 14 penetrates along the moving direction of the sample carrier 13 and penetrates on the side close to the placement table 12.

[0057] In some embodiments of the present invention, see Figure 2-4The mounting platform 11 includes a bottom plate 111 and a handle 112 integrally formed with the bottom plate 111, the handle 112 is welded on the bottom plate 111, the placement platform 12 is arranged on the bottom plate 111 and connected to the bottom plate 111, and the placement platform 12 is welded above the bottom plate 111; the handle 112 is located at the center of the side of one side of the bottom plate 111, and the placement platform 12 is located at the center of the upper surface of the bottom plate 111; when the manipulator is clamped, the mounting platform 11 is subjected to an average force, and then the bottom plate 111 is sent into the angle-resolved photoelectron spectroscopy test cavity In order to facilitate the installation of the bottom plate 111 on the sample holder 2, the two corners of the bottom plate 111 on the other side away from the handle 112 are chamfered; a limit block is provided on the side of the bottom plate 111 close to the handle 112, and the extension direction of the limit block is perpendicular to the direction of the handle 112; there are two limit blocks, which are located on the same horizontal line and distributed at both ends of the bottom plate 111, so as to limit the extent to which the sample holder 1 slides into the connecting groove 24, so that it is located at the expected position, thereby improving the installation efficiency of the sample holder 1 on the sample holder 2.

[0058] In some embodiments of the present invention, see Figure 1-4 The placing platform 12 is slidably connected with the sample carrier 13. The placing platform 12 is provided with a slide groove 121 that cooperates with the sample carrier 13. The slide groove 121 penetrates along the moving direction of the sample carrier 13. The slide groove 121 is a dovetail slide groove 121. The mounting platform 11 is provided with a locking member 15. The locking member 15 passes through the bottom plate 111 and the placing platform 12 in a direction perpendicular to the bottom plate 111 and abuts against the sample carrier 13 to fix the placing platform 12 and the sample carrier 13. The locking member 15 is threadedly connected with the bottom plate 111 and the placing platform 12. The sample carrier 13 is provided with a locking hole that cooperates with the locking member 15. The locking hole is communicated with the degassing groove 14. The sample carrier 13 is slidably mounted on the placement table 12 through the slide groove 121. In order to prevent the sample carrier 13 from sliding off the placement table 12 during the movement of the sample rack 3, the locking member 15 passes through the bottom plate 111 and the placement table 12 in a direction perpendicular to the bottom plate 111 and then abuts against the lower surface of the sample carrier 13, thereby fixing the sample carrier 13 and the placement table 12. The locking member 15 is made of non-magnetic material, preferably, the locking member 15 is a titanium screw, which is convenient for reducing the impact on sample detection.

[0059] In some embodiments of the present invention, see Figure 2-4, the female head electrode assembly 4 includes a female head electrode base 41 and a plurality of female head electrodes 42. The number of the female head electrodes 42 can be one, two or more. Specifically, the number of the female head electrodes 42 is four. The female head electrodes 42 are arranged on the female head electrode base 41 and are detachably connected to the female head electrode base 41. The female head electrode base 41 is detachably connected to the mounting table 11. The female head electrode base 41 is arranged on the bottom plate 111 and is located on the side far away from the handle 112, which is convenient for saving space so as to better fix the bottom plate 111 and the sample holder 2. The female head electrode base 41 is bolted to the bottom plate 111. The female head electrode base 41 includes a placement portion 411 and a mounting portion 412. The placement portion 411 and the mounting portion 412 are integrally formed and are arranged in a T shape. The female head electrodes 42 are mounted on the placement portion 411. An installation groove 114 for placing the mounting portion 412 is formed on the bottom plate 111, and the installation groove 114 penetrates along the thickness direction of the bottom plate 111.

[0060] In some embodiments of the present invention, refer to Figure 2-4 , a lapping portion is fixedly arranged on the bottom plate 111. The lapping portion is provided with two. The two lapping portions are distributed on both sides of the installation groove 114. The two ends of the placement portion 411 are lapped on the lapping portion and are fixed to the bottom plate 111 by bolts. The female head electrode 42 is a female head electrode commonly used by those skilled in the art. Preferably, the female head electrode 42 is a gold-plated beryllium copper electrode.

[0061] In some embodiments of the present invention, refer to Figure 6-8 , the sample holder 2 includes a first connecting table 21, a second connecting table 22 and a spring piece 23. The male head electrode assembly 5 is arranged on the first connecting table 21 and is connected to the first connecting table 21. The second connecting table 22 is used to connect the heat-conducting copper braid and the first connecting table 21. A connecting groove 24 for placing the mounting table 11 is formed on the first connecting table 21. The spring piece 23 is detachably connected to the first connecting table 21 and is used to fix the first connecting table 21 and the mounting table 11. The mounting table 11 slides into the connecting groove 24 and is fixed to the first connecting table 21 by the spring piece 23. The mounting table 11 is slid into the connecting groove 24, and then the sample carrier 13 is installed on the first connecting table 21 so as to perform subsequent tests.

[0062] In some embodiments of the present invention, refer to Figure 6-8, the connecting platform 1 21 is vertically welded on the connecting platform 2 22 so as to be integrally formed with the connecting platform 2 22, the male electrode assembly 5 includes a male electrode seat 51 and a plurality of male electrodes 52, the male electrode seat 51 is arranged on the connecting platform 1 21 and is detachably connected to the connecting platform 1 21, the detachable connection is bolted, the connecting platform 1 21 is provided with a strip groove 211 for placing the male electrode assembly 5, the end of the male electrode 52 extends out of the strip groove 211, and the bottom of the female electrode 42 is provided with a hemispherical groove that cooperates with the male electrode 52; preferably, the male electrode 52 is a spring pin. The head of the male electrode 52 in contact with the female electrode 42 is smoothed to reduce the friction of the male electrode 52 during the sample transfer process, protect the male electrode, and reduce the poor contact between the male electrode 52 and the female electrode 42; the male electrode seat 51 is an insulating base, specifically, the male electrode seat 51 is an electrode seat made of polyimide material.

[0063] In some embodiments of the present invention, see Figure 6-7 and Fig.10 The spring piece 23 is connected to the connecting platform 21 by bolts, so that when the spring piece 23 is damaged, it can be replaced in time. The material of the spring piece 23 is beryllium copper sheet. The spring piece 23 is U-shaped. When installed and used, the opening faces the end away from the male electrode assembly 5. The inner wall of the side plate of the spring piece 23 is cut to form a connecting part 231 and two elastic pressing parts 232 parallel to each other. The connecting part 231 and the elastic pressing part 232 are integrally formed. The connecting part 231 is U-shaped. When installed and used, it is used to fix the elastic pressing part 232 on the connecting platform 21; the elastic pressing part 232 is long and strip-shaped and is integrally formed with the connecting part 231 at one end close to the opening of the spring piece 23. The elastic pressing part 232 is away from the opening of the spring piece 23. An L-shaped gap is formed between the side surface of one end and the connecting portion 231, and the elastic pressing portion 232 is used to press and fix the bottom plate 111 on the connecting platform 21. In order to facilitate the guiding and transmission of the sample holder 1, the inner corner of the top end of the side plate of the spring sheet 23 is bent at a certain angle, that is, the corner is in a warped shape away from the connecting groove 24, so that the sample holder 1 can be sent to the sample holder 2 more smoothly. When the sample holder 1 is placed on the sample holder 2, the two sides of the bottom plate 111 will be subjected to the pressure of the spring sheet 23, so that the male electrode 52 and the female electrode 42 can be stably matched up and down, thereby realizing the installation of the sample holder 1 and the sample holder 2.

[0064] In some embodiments of the present invention, see Figure 6-9The second connecting platform 22 is provided with a placement groove 221 for placing a low-temperature thermometer; the placement groove 221 is arranged in a direction parallel to the connecting platform 1 21 and passes through the second connecting platform 22; in order to further adapt to the ultra-high vacuum environment, the second connecting platform 22 is provided with a plurality of air leakage holes 223; the air leakage hole 223 can be one, two or three, preferably, the air leakage hole 223 is one, and the air leakage hole 223 passes through the second connecting platform 22 in a direction parallel to the connecting platform 1 21; the second connecting platform 22 is provided with a threaded hole 222 that cooperates with the heat-conducting copper braid, so as to facilitate the adjustment of the temperature change rate of the sample stage.

[0065] In some embodiments of the present invention, see Figure 4 and Figure 5 , the bottom plate 111 is provided with an extension groove 113, and the female electrode holder 41 is provided with an extension groove 213. The center lines of the extension groove 113 and the extension groove 213 are located on the same line and extend to the female electrode 42. The extension groove 113 and the extension groove 213 cooperate to form a trumpet shape, and the extension groove 113 and the extension groove 213 are both connected to the mounting groove 114. When the manipulator transfers the sample holder 1 with the sample to the connecting groove 24 on the sample holder 2, as the female electrode 42 gradually approaches the male electrode 52, the spring ejector pin will be compressed to a certain extent. Under the action of the extension groove 113 and the extension groove 213, the friction between the male electrode 52 and the bottom plate 111 is reduced, so that the female electrode 42 and the male electrode 52 are quickly contacted, so as to smoothly transfer the sample. At the same time, the wear of the male electrode 52 is reduced, and the subsequent poor contact between the male electrode 52 and the female electrode 42 is reduced.

[0066] In some embodiments of the present invention, see Figure 1 The sample holder 3 is selected from any one of the sample holders 3 in the molecular beam epitaxy equipment and the sample holders 3 in the angle-resolved photoelectron spectroscopy test.

[0067] Working principle: install the female electrode 42 on the female electrode seat 41, and then install the female electrode seat 41 on the bottom plate 111 by bolts, so that the side of the female electrode seat 41 contacts the placement table 12, slide the sample carrier 13 on the placement table 12, and fix it by the locking piece 15, then the manipulator grasps the handle 112 to slide the mounting table 11 on the connecting groove 24, and then installs it on the connecting table 1 21, and then installs the connecting table 1 21 on the sample rack 3 by bolts, and installs the connecting table 2 22 on the thermal conductive copper braid, and then the control system moves the sample table to a position suitable for testing for testing. After the test is completed, the sample table is moved to the sample transfer position through the control system, and the manipulator grasps the handle 112 to remove the mounting table 11 from the connecting table 1 21, and then removes the sample carrier 13.

[0068] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A multi-electrode sample stage suitable for ultra-high vacuum and low temperature environments, characterized in that: The multi-electrode sample stage comprises a sample holder (2) and a sample holder (1); the sample holder (1) comprises a mounting table (11), a placement table (12), a sample carrier (13) and a female electrode assembly (4); the placement table (12) is arranged on the mounting table (11); the sample carrier (13) is used for placing a sample and is detachably connected to the placement table (12); the female electrode assembly (4) is arranged on the mounting table (11); the sample holder (2) is used for connecting the mounting table (11) and the sample holder (3); the sample holder (2) comprises a male electrode assembly (5) that cooperates with the female electrode assembly (4).

2. A multi-electrode sample stage suitable for ultra-high vacuum and low temperature environments according to claim 1, characterized in that: Also includes one or more of the following characteristics: 1) The mounting platform (11) comprises a bottom plate (111) and a handle (112) integrally formed with the bottom plate (111), and the placement platform (12) is arranged on the bottom plate (111) and connected to the bottom plate (111); 2) The female electrode assembly (4) comprises a female electrode seat (41) and a plurality of female electrodes (42), wherein the female electrodes (42) are arranged on the female electrode seat (41) and are detachably connected to the female electrode seat (41), and the female electrode seat (41) is detachably connected to the mounting platform (11); 3) The sample holder (2) comprises a connection platform 1 (21), a connection platform 2 (22) and a spring sheet (23); the male electrode assembly (5) is arranged on the connection platform 1 (21) and is detachably connected to the connection platform 1 (21); the connection platform 2 (22) is used to connect the heat-conducting copper braid and the connection platform 1 (21); a connection groove (24) for placing the mounting platform (11) is provided on the connection platform 1 (21); the spring sheet (23) is detachably connected to the connection platform 1 (21) and is used to fix the connection platform 1 (21) and the mounting platform (11); the mounting platform (11) slides into the connection groove (24) and is fixed to the connection platform 1 (21) through the spring sheet (23); 4) The sample holder (3) is selected from the sample holder used in angle-resolved photoelectron spectroscopy testing; 5) The sample carrier (13) is used to place samples, and the samples are set on the sample carrier (13) by adhesion; preferably, a venting groove (14) is provided on a side of the sample carrier (13) close to the placement table (12), and the venting groove (14) passes through the moving direction of the sample carrier (13), and the venting groove (14) passes through the side close to the placement table (12); further preferably, the sample carrier (13) is made of copper.

3. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 2, characterized in that: Also includes one or more of the following characteristics: 11) The handle (112) is located at the center of the side of the bottom plate (111); 12) The placement platform (12) is located at the center of the upper surface of the bottom plate (111); 13) The two corners of the bottom plate (111) away from the handle (112) are chamfered; 14) A limit block is provided on one side of the bottom plate (111) close to the handle (112), and the limit block is perpendicular to the direction of the handle (112); two limit blocks are provided, and the two limit blocks are located on the same horizontal line and distributed on both sides of the bottom plate (111); 15) The placement table (12) is arranged on the bottom plate (111) and is fixedly connected to the bottom plate (111); preferably, the fixed connection method is selected from any one of welding, bonding, and bolt connection; 16) The placement table (12) is slidably connected to the sample carrier (13), and a locking piece (15) is provided on the mounting table (11). The locking piece (15) passes through the bottom plate (111) and the placement table (12) in a direction perpendicular to the bottom plate (111) and abuts against the sample carrier (13), so as to fix the placement table (12) and the sample carrier (13). The locking piece (15) is threadedly connected to the bottom plate (111) and the placement table (12); preferably, a locking hole cooperating with the locking piece (15) is provided on the sample carrier (13), and the locking hole is connected to the air release groove (14).

4. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 3, characterized in that: Also includes one or more of the following characteristics: 161) The placement table (12) is provided with a slide groove (121) that cooperates with the sample carrier (13), and the slide groove (121) runs through the moving direction of the sample carrier (13); preferably, the slide groove (121) is a dovetail slide groove; 162) The locking piece (15) is made of non-magnetic material. Preferably, the locking piece (15) is a titanium screw.

5. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 2, characterized in that: Also includes one or more of the following characteristics: 21) The female electrode seat (41) is arranged on the bottom plate (111) and is located on a side away from the handle (112); 22) The side surface of the female electrode seat (41) contacts the side surface of the placement table (12) and the side surface of the sample carrier (13); 23) The female electrode holder (41) is bolted to the bottom plate (111); preferably, the female electrode holder (41) comprises a placement portion (411) and a mounting portion (412), the placement portion (411) and the mounting portion (412) are integrally formed and arranged in a T-shape, the female electrode (42) is installed on the placement portion (411), and a mounting groove (114) for placing the mounting portion (412) is provided on the bottom plate (111), and the mounting groove (114) penetrates along the thickness direction of the bottom plate (111); further preferably, a lap joint is fixedly provided on the bottom plate (111), and the lap joint is located on both sides of the mounting groove (114), and the protruding end of the placement portion (411) is overlapped on the lap joint and fixed to the bottom plate (111) by bolts; 24) The female electrode (42) is a gold-plated beryllium copper electrode; 25) The female electrode seat (41) is an insulating female electrode seat.

6. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 2, characterized in that: Also includes one or more of the following characteristics: 31) The second connecting platform (22) is provided with a placement groove (221) for placing a low-temperature thermometer; preferably, the placement groove (221) is arranged in a direction parallel to the first connecting platform (21) and passes through the second connecting platform (22); 32) The second connecting platform (22) is provided with a plurality of air leakage holes (223); preferably, the air leakage holes (223) are arranged in a direction parallel to the first connecting platform (21) and penetrate the second connecting platform (22); 33) The second connecting platform (22) is provided with a threaded hole (222) that cooperates with the heat-conducting copper braid, and the threaded hole (222) is perpendicular to the first connecting platform (21) and passes through the second connecting platform (22); preferably, the threaded hole (222) is provided in plurality; 34) The connecting platform 1 (21) is vertically arranged on the connecting platform 2 (22) and is integrally formed with the connecting platform 2 (22), and the spring sheet (23) is detachably connected to the connecting platform 1 (21). Preferably, the spring sheet (23) is bolted to the connecting platform 1 (21); 35) The spring piece (23) is a beryllium copper sheet.

7. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 6, characterized in that: The male electrode assembly (5) comprises a male electrode seat (51) and a plurality of male electrodes (52); the male electrode seat (51) is arranged on a connecting platform (21) and is detachably connected to the connecting platform (21); a hemispherical groove is provided at the bottom of the female electrode (42) and cooperates with the male electrode (52); preferably, the male electrode (52) is a spring pin.

8. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 5, characterized in that: An extension groove 1 (113) is provided on the bottom plate (111), and an extension groove 2 (413) is provided on the female electrode seat (41). The center lines of the extension groove 1 (113) and the extension groove 2 (413) are located on the same line and extend to the female electrode (42). The extension groove 1 (113) and the extension groove 2 (413) cooperate to form a trumpet shape. The extension groove 1 (113) and the extension groove 2 (413) are both connected to the mounting groove (114).

9. The multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment according to claim 6, characterized in that: The spring piece (23) comprises a connecting portion (231) and two mutually parallel elastic pressing portions (232); the connecting portion (231) and the elastic pressing portion (232) are integrally formed; the elastic pressing portion (232) is used to fix the bottom plate (111) and the connecting platform (21); the connecting portion (231) is arranged in a U shape and its opening is away from the male electrode assembly (5), and is used to fix the elastic pressing portion (232) on the connecting platform (21); the elastic pressing portion (232) is arranged along the moving direction of the sample carrier (13).

10. Application of the multi-electrode sample stage suitable for ultra-high vacuum and low temperature environment as described in any one of claims 1 to 9 in angle-resolved photoelectron spectroscopy.

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