Calibration method for internal feedback current of direct current power supply system of radio frequency module

Abstract

The invention relates to the technical field of radio-frequency power supplies, in particular to a calibration method for internal feedback current of a radio-frequency module direct-current power supply system, which comprises the following steps of: transmitting target power and measuring the voltage of a measuring point of the radio-frequency module direct-current power supply system; according to the measured voltage value, actual output current is calculated through a known resistance or circuit model; inputting a feedback current instruction, and displaying an internal feedback current value of the frequency display; calculating a proportionality coefficient of the actual output current and the frequency display internal feedback current; inputting a plurality of groups of feedback current instructions, and obtaining corresponding read-back parameter values; according to the proportionality coefficient and the read-back parameter value, constructing a current proportionality function; and taking the actual output current as a target frequency display feedback current, and querying a target read-back parameter. By constructing the current proportional function, accurate calibration of the feedback current is achieved, it is ensured that the feedback current is highly consistent with the actual output current, noise and interference of the radio frequency power supply system are reduced by accurately calibrating the feedback current, and the overall performance is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supply, and in particular to a method for calibrating internal feedback current of a direct current power supply system of a radio frequency module. Background Art

[0002] RF Power is widely used in various RF devices, such as plasma generation, laser driving, high-power signal processing, etc. With the continuous development of RF technology, RF power is facing higher and higher performance requirements, especially in terms of power efficiency, linearity, stability and reliability.

[0003] In the RF module DC power supply system, the accuracy of the feedback current directly affects the stability and performance of the system. However, in the prior art, there is often an inconsistency between the feedback current inside the RF power supply and the actual output current, which leads to reduced system efficiency, increased noise, and even affects the normal operation of the equipment. Traditional calibration methods usually rely on a single data point or empirical value, cannot achieve accurate calibration under different power and load conditions, and lack dynamic adjustment capabilities. Therefore, there is an urgent need for a method that can accurately calibrate the feedback current to improve the performance and stability of the RF power supply system. Summary of the invention

[0004] The purpose of the present invention is to overcome the above problems or at least partially solve the above problems, and to propose a method for calibrating the internal feedback current of a radio frequency module DC power supply system.

[0005] To achieve the above object, the present invention provides the following technical solution: a method for calibrating the internal feedback current of a RF module DC power supply system, comprising the following steps:

[0006] S1, transmit target power and measure the voltage at the measuring point of the DC power supply system of the RF module;

[0007] S2. Calculate the actual output current based on the measured voltage value through a known resistance or circuit model;

[0008] S3, input feedback current command, and display the internal feedback current value of the frequency display;

[0009] S4. Calculate the proportionality coefficient between the actual output current and the internal feedback current of the frequency display;

[0010] S5, input multiple sets of feedback current instructions to obtain corresponding read-back parameter values;

[0011] S6. construct a current proportional function according to the proportional coefficient and the read-back parameter value, and the function can automatically adjust the feedback current according to the input target current;

[0012] S7. Use the actual output current as the target frequency display feedback current, query the target readback parameter, and use the constructed proportional function to accurately adjust the feedback current to keep it consistent with the target feedback current.

[0013] In a preferred embodiment, in step S2, the formula for calculating the actual output current is expressed as:

[0014]

[0015] In the formula, I Actual is the actual output current, V measured is the measured voltage value, and B is the conversion coefficient.

[0016] In a preferred embodiment, in step S4, the formula for calculating the proportionality coefficient is expressed as:

[0017]

[0018] In the formula, I Actual is the actual output current, I readback is the frequency display current value, K is the proportional coefficient, and multiple proportional coefficients K form a proportional coefficient group K n =[K 1 , K 2 …K n ].

[0019] In a preferred embodiment, in step S6, the current proportional function is expressed as:

[0020] S adjust n =S original n *K n

[0021] In the formula, S adjust n It is expressed as the adjustment value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. S original n It is the initial value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. K n It is expressed as a proportional coefficient group, where the number n is the number of DC power supply modules of the RF module.

[0022] In a preferred embodiment, in step S7, the adjustment formula of the feedback current is expressed as:

[0023]

[0024] In the formula, I targetn It is expressed as the nth target frequency display feedback current. The number of n is consistent with the number of adjustment values ​​of the feedback current readback value. *9 and 0.35 is the constant value set for calculation.

[0025] In a preferred embodiment, step S8 is further included to verify the calibration effect by comparing whether the deviation between the actual feedback current and the frequency display feedback current is within a preset range to ensure the consistency between the actual feedback current and the frequency display feedback current.

[0026] A radio frequency module direct current power supply system adopts the method for calibrating internal feedback current of a radio frequency module direct current power supply system to achieve accurate calibration of the feedback current.

[0027] A computer-readable storage medium stores a computer program. When the computer program is executed by a processor, a method for calibrating an internal feedback current of a direct current power supply system of a radio frequency module is implemented.

[0028] An electronic device comprises a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, a method for calibrating an internal feedback current of a radio frequency module direct current power supply system is implemented.

[0029] A calibration device for feedback current inside a radio frequency module DC power supply system, which is implemented by a host computer control system and can adjust the feedback current in real time and accurately to ensure that the feedback current is highly consistent with the actual current, including:

[0030] The voltage measurement module is used to measure the voltage of the measuring point of the DC power supply system of the RF module and is connected to the current calculation module;

[0031] A current calculation module is used to calculate the actual output current according to the measured voltage value and is connected to the feedback current input module;

[0032] Feedback current input module, used to input feedback current command and display the feedback current value inside the frequency display, and connected with the proportional coefficient calculation module;

[0033] A proportional coefficient calculation module is used to calculate the proportional coefficient between the actual output current and the internal feedback current of the frequency display, and is connected to the readback parameter acquisition module;

[0034] A readback parameter acquisition module is used to obtain readback parameter values ​​corresponding to multiple sets of feedback current instructions and is connected to a current proportional function construction module;

[0035] A current proportional function building module is used to build a current proportional function according to a proportional coefficient and a read-back parameter value, and is connected to a feedback current adjustment module;

[0036] A feedback current adjustment module is used to adjust the feedback current to keep it consistent with the target feedback current and is connected to the calibration effect verification module;

[0037] The calibration effect verification module is used to verify the calibration effect and ensure the consistency between the actual feedback current and the frequency display feedback current.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] 1. The present invention realizes accurate calibration of feedback current by constructing a current proportional function, ensuring that it is highly consistent with the actual output current;

[0040] 2. The present invention can dynamically adapt to different power and load conditions, thereby improving the stability and adaptability of the RF power supply system;

[0041] 3. The present invention reduces the noise and interference of the RF power supply system and improves the overall performance by accurately calibrating the feedback current;

[0042] 4. The present invention realizes automatic calibration through the host computer control system, reduces manual intervention and improves calibration efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 This is a flow chart of feedback current calibration of the present invention; DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] See also Figure 1 The present invention provides a technical solution: a method for calibrating the internal feedback current of a radio frequency module DC power supply system, comprising the following steps:

[0046] S1. The RF power supply first sets parameters according to the target power and starts transmitting RF signals. Then, a digital multimeter is used to measure the voltage at a certain point of the DC power supply system of the RF module. The corresponding actual output current is calculated using the measured voltage value through a known resistance or circuit model.

[0047] S2. Calculate the actual output current of the RF power supply based on the measured voltage value and known circuit parameters. The actual current calculation will serve as the basic data for calibrating the feedback current. The formula for calculating the actual output current is expressed as:

[0048]

[0049] In the formula, I Actual is the actual output current, V measuredV is the measured voltage value, and B is the conversion coefficient. B is a conversion coefficient obtained through comprehensive analysis of multiple devices in the circuit. For example, in a radio frequency power supply at 400K, the value of B is 0.073. Different radio frequency power supplies have different numbers of radio frequency module DC power supply modules, so there will be multiple Vs measured , and there will be multiple corresponding Is Actual , and B is the common conversion coefficient with a constant value, which is specifically expressed as follows:

[0050]

[0051] …

[0052]

[0053] S3. The user inputs a command to feedback the current through the host computer, and the host computer control system will display the corresponding internal feedback current value of the frequency display. This value will be used as a reference for subsequent calibration and adjustment;

[0054] S4. Compare the measured actual output current with the internal feedback current displayed on the frequency display, calculate their ratio to obtain multiple proportionality coefficients. These proportionality coefficients are used to calibrate the feedback current in the subsequent process to make it closer to the actual output current. The formula for calculating the proportionality coefficient is expressed as:

[0055]

[0056] In the formula, I Actual is the actual output current, I readback is the frequency display current value, K is the proportionality coefficient, and the range of K is within (0.8, 1.2). If it is less than 0.8 or greater than 1.2, there is a problem with the output of the DC power supply system itself and there is no need for calibration. It is necessary to troubleshoot the hardware, such as in step S2, both I Actual and I readback have multiple groups, so there will be the same number of proportionality coefficients K, forming a proportionality coefficient group, which is specifically expressed as follows:

[0057]

[0058] …

[0059]

[0060] Multiple proportionality coefficients K form a proportionality coefficient group K n =[K 1 , K 2 …K n ;

[0061] S5. The host computer inputs multiple different feedback current instructions. The system displays different feedback current values ​​through the frequency display and obtains the corresponding readback parameter values ​​of each group. These readback parameter values ​​are key data in the feedback current regulation process and can help establish the current proportional relationship.

[0062] S6. According to multiple proportional coefficients and readback parameter values, a current proportional function is constructed. The function can automatically adjust the feedback current according to the input target current, so that the feedback current output by the system is highly consistent with the actual current. The formula of the current proportional function is expressed as:

[0063] S adjustn =S originaln *K n

[0064] In the formula, S adjustn It is expressed as the adjustment value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. S originaln It is the initial value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. K n It is expressed as a proportional coefficient group, where the number n is the number of RF module DC power supply modules. The formula is expanded as follows:

[0065] S adjust1 =S original1 *K 1

[0066] S adjust2 =S original2 *K 2

[0067] …

[0068] S adjustn =S originaln *K n ;

[0069] S7. When the RF power supply obtains the target output power, the host machine will query the readback parameters of the target feedback current and use the constructed proportional function to adjust the feedback current. Through precise adjustment, the feedback current is kept consistent with the target feedback current, thereby improving the stability of the power supply. The feedback current adjustment formula is expressed as:

[0070]

[0071] In the formula, I target n It is expressed as the nth target frequency display feedback current. The number of n is consistent with the number of adjustment values ​​of the feedback current readback value. -9 With 0.35 as the constant value used for calculation based on the setting in the software, the formula is expanded as follows:

[0072]

[0073] …

[0074]

[0075] S8. After calibration, by comparing whether the deviation between the actual feedback current and the frequency-displayed feedback current is within the preset range, verify the consistency of the actual feedback current and the frequency-displayed feedback current again. If the calibration accuracy meets the requirements, the calibration process is completed, and the system can enter the normal working state.

[0076] A DC power supply system for a radio frequency module, adopting the calibration method for the internal feedback current of the radio frequency module DC power supply system described above, realizes precise calibration of the feedback current.

[0077] A computer-readable storage medium stores a computer program. When the computer program is executed by a processor, it realizes the calibration method for the internal feedback current of the radio frequency module DC power supply system described above.

[0078] An electronic device includes a memory and a processor. The memory stores a computer program. When the processor executes the computer program, it realizes the calibration method for the internal feedback current of the radio frequency module DC power supply system described above.

[0079] A calibration device for the internal feedback current of a radio frequency module DC power supply system, which is realized through a host computer control system, can adjust the feedback current in real time and accurately to ensure that the feedback current is highly consistent with the actual current, and includes:

[0080] A voltage measurement module is used to measure the measured point voltage of the radio frequency module DC power supply system, is connected to the current calculation module, and transmits the measured voltage value to the current calculation module;

[0081] A current calculation module is used to calculate the actual output current according to the measured voltage value, is connected to the feedback current input module, and transmits the actual output current to the feedback current input module;

[0082] A feedback current input module is used to input a feedback current command and display the frequency-displayed internal feedback current value, is connected to the proportional coefficient calculation module, and transmits the frequency-displayed internal feedback current value to the proportional coefficient calculation module;

[0083] A proportional coefficient calculation module is used to calculate the proportional coefficient of the actual output current to the frequency-displayed internal feedback current, is connected to the read-back parameter acquisition module, and transmits the proportional coefficient to the read-back parameter acquisition module;

[0084] A readback parameter acquisition module is used to obtain the readback parameter values ​​corresponding to the multiple sets of feedback current instructions, and is connected to the current proportional function construction module to transmit the readback parameter values ​​to the current proportional function construction module;

[0085] A current proportional function building module is used to build a current proportional function according to a proportional coefficient and a read-back parameter value, and is connected to the feedback current adjustment module to transmit the current proportional function to the feedback current adjustment module;

[0086] A feedback current adjustment module is used to adjust the feedback current to keep it consistent with the target feedback current, and is connected to the calibration effect verification module to transmit the adjusted feedback current to the calibration effect verification module;

[0087] The calibration effect verification module is used to verify the calibration effect and ensure the consistency between the actual feedback current and the frequency display feedback current.

[0088] The present invention can effectively ensure the stability of the output current of the radio frequency power supply through accurate current calibration, reduce the fluctuation of the power supply caused by inaccurate feedback current, thereby improving the working efficiency of the radio frequency module, which not only avoids the energy loss of the power supply, but also improves the performance and stability of the entire radio frequency power supply system; the calibration method can automatically adjust the difference between the feedback current and the actual current, ensure that the power supply can maintain a stable output at different operating frequencies and power levels, avoid the influence of the fluctuation of the power output power of the power supply on the radio frequency equipment, especially in high-frequency and high-power operation, can effectively avoid the distortion and noise caused by current fluctuation, and optimize the stability of the system; because the present invention can accurately calibrate the feedback current, reduce the current fluctuation, thereby reducing the noise and interference generated by the radio frequency module, especially when the radio frequency power is high, the system can maintain low noise characteristics, and effectively suppress high-frequency stray signals and distortion caused by current instability; at the same time, the present invention can also automatically adjust the feedback current according to different load conditions, optimize the working point of the power supply, ensure the stability of the output current and power of the power supply when the load changes, and enhance the load adaptability. This feature is of great significance to the application of radio frequency power supply in complex working environments.

[0089] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for calibrating the internal feedback current of a RF module DC power supply system, characterized in that: The following steps are involved: S1, transmit target power and measure the voltage at the measuring point of the DC power supply system of the RF module; S2. Calculate the actual output current based on the measured voltage value through a known resistance or circuit model; S3, input feedback current command, and display the internal feedback current value of the frequency display; S4. Calculate the proportionality coefficient between the actual output current and the internal feedback current of the frequency display; S5, input multiple sets of feedback current instructions to obtain corresponding read-back parameter values; S6. construct a current proportional function according to the proportional coefficient and the read-back parameter value, and the function can automatically adjust the feedback current according to the input target current; S7. Use the actual output current as the target frequency display feedback current, query the target readback parameter, and use the constructed proportional function to accurately adjust the feedback current to keep it consistent with the target feedback current.

2. The method for calibrating the internal feedback current of the RF module DC power supply system according to claim 1, characterized in that: In step S2, the formula for calculating the actual output current is expressed as: In the formula, I Actual is the actual output current, V measured is the measured voltage value, and B is the conversion coefficient.

3. The method for calibrating the internal feedback current of the RF module DC power supply system according to claim 2, characterized in that: In step S4, the formula for calculating the proportionality coefficient is expressed as: In the formula, I Actual is the actual output current, I readback is the frequency display current value, K is the proportional coefficient, and multiple proportional coefficients K form a proportional coefficient group K n =[K1, K2…K n ].

4. The method for calibrating the internal feedback current of the RF module DC power supply system according to claim 3, characterized in that: In step S6, the current proportional function is expressed as: S adjustn =S originaln *K n In the formula, S adjustn It is expressed as the adjustment value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. S originaln It is the initial value of the nth feedback current readback value. The number of n is consistent with the number of proportional coefficients. K n It is expressed as a proportional coefficient group, where the number n is the number of RF module DC power supply modules.

5. The method for calibrating the internal feedback current of the RF module DC power supply system according to claim 4, characterized in that: In step S7, the feedback current adjustment formula is expressed as: In the formula, I targetn It is expressed as the nth target frequency display feedback current. The number of n is consistent with the number of adjustment values ​​of the feedback current readback value. -9 and 0.35 is the constant value set for calculation.

6. A method for calibrating internal feedback current of a RF module DC power supply system according to any one of claims 1 to 5, characterized in that: The method further includes step S8 of verifying the calibration effect by comparing whether the deviation between the actual feedback current and the frequency-display feedback current is within a preset range, thereby ensuring the consistency between the actual feedback current and the frequency-display feedback current.

7. A radio frequency module DC power supply system, characterized in that: The method for calibrating the internal feedback current of the RF module DC power supply system as described in any one of claims 1 to 6 is used to achieve accurate calibration of the feedback current.

8. A computer-readable storage medium, characterized in that: A computer program is stored, and when the computer program is executed by a processor, a method for calibrating the internal feedback current of a radio frequency module DC power supply system as described in any one of claims 1 to 6 is implemented.

9. An electronic device, characterized in that: It comprises a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, it implements a method for calibrating the internal feedback current of a radio frequency module direct current power supply system according to any one of claims 1 to 6.

10. A device for calibrating the internal feedback current of a radio frequency module DC power supply system, characterized in that: The calibration device is implemented by a host computer control system, and can adjust the feedback current in real time and accurately to ensure that the feedback current is highly consistent with the actual current, including: The voltage measurement module is used to measure the voltage of the measuring point of the DC power supply system of the RF module and is connected to the current calculation module; A current calculation module is used to calculate the actual output current according to the measured voltage value and is connected to the feedback current input module; Feedback current input module, used to input feedback current command and display the feedback current value inside the frequency display, and connected with the proportional coefficient calculation module; A proportional coefficient calculation module is used to calculate the proportional coefficient between the actual output current and the internal feedback current of the frequency display, and is connected to the readback parameter acquisition module; A readback parameter acquisition module is used to obtain readback parameter values ​​corresponding to multiple sets of feedback current instructions and is connected to a current proportional function construction module; A current proportional function building module is used to build a current proportional function according to a proportional coefficient and a read-back parameter value, and is connected to a feedback current adjustment module; A feedback current adjustment module is used to adjust the feedback current to keep it consistent with the target feedback current and is connected to the calibration effect verification module; The calibration effect verification module is used to verify the calibration effect and ensure the consistency between the actual feedback current and the frequency display feedback current.

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