Radio frequency power supply device and control method thereof

Abstract

The invention discloses a radio frequency power supply device and a control method thereof. The radio frequency power supply device comprises a control unit, a signal unit and an impedance matching unit, the control unit is used for switching a transmitting mode and controlling the signal unit to output a radio frequency signal corresponding to the transmitting mode; the impedance matching unit comprises a detection device, an operational amplifier, a logic operation device, an inductor and a capacitor, and is used for adjusting electrical characteristics on a transmission line of the radio frequency signal and the load to realize impedance matching; the detection device is used for detecting electrical characteristic parameter information on a transmission line between the radio frequency signal output by the signal unit and a load; and the logical operation device is used for carrying out logical judgment and operation on the electrical characteristic parameter information, and adjusting the operational amplifier, the inductor and the capacitor based on an operation result so as to realize impedance matching. And the structure is more compact, and the device is more suitable for the underground small-size working environment.

Description

Technical Field

[0001] The present invention relates to the technical field of oil and gas drilling, and in particular to a radio frequency power supply device and a control method thereof. Background Art

[0002] Neutron generators have many uses in the oil and gas and other mineral industries. For example, they play an important role in oil and gas dynamic monitoring, rock physical property analysis, oil and gas pipeline detection, oil and gas field exploration, and geochemical research. In well logging, neutron generators are key equipment used to generate neutrons and then implement a variety of logging methods. Among them, methods such as neutron lifetime logging and pulsed neutron oxygen activation logging can effectively evaluate information such as oil saturation, mineral composition and porosity in the formation. Neutron generators mainly generate neutrons through DD (deuterium-deuterium) or DT (deuterium-tritium) reactions. Among them, DD neutron generators use fusion reactions between deuterium nuclei to generate neutrons. This reaction can accelerate deuterium particles under high voltage to a level sufficient to trigger a nuclear reaction, and then generate neutrons through target shooting.

[0003] The most important part of a neutron generator is the ion source, because the neutrons produced in the neutron generator are achieved through the acceleration, extraction and focusing of ions in the ion source. There are many types of ion sources, one of which is the radio frequency ion source. The advantage of the radio frequency ion source is that most of the ions it produces are atomic ions, so the ion source is more efficient and results in more neutrons.

[0004] The RF ion source needs to be driven by an RF power supply, and the driving process requires a high-voltage, high-frequency RF electric field. Specifically, the ion source in the neutron generator usually uses a Penning source or a gridless ion source. These ion sources require a high-frequency, high-voltage electric field provided by an RF power supply to maintain the stability and extraction of the ions. During the extraction process, the ions need to be accelerated by an accelerator to obtain sufficient energy, and then focused by a magnetic field to ensure the collimation and stability of the ion beam. These processes require a high-frequency, high-voltage electric field provided by an RF power supply to be realized. In actual work, an impedance matching unit is also required for impedance matching to maximize the transmission power and protect the equipment.

[0005] Due to the harsh working environment underground, the RF power supply system needs to be embedded in the narrow space of the drill bit, which places high demands on the size of the RF power supply. Summary of the invention

[0006] Currently, there is no small-sized and compact radio frequency power supply for downhole neutron generators. The existing radio frequency power supplies are generally large in size and cannot be applied to small-sized downhole spaces. Moreover, as the frequency increases, the radio frequency power supply will have higher radiation energy, which will generate electromagnetic interference in a closed system. At the same time, due to environmental conditions, it is impossible to use a fan for air cooling or a water channel for water cooling, and only natural cooling can be used.

[0007] In view of the above problems, the present invention is proposed to provide a radio frequency power supply device and its control method that overcome the above problems or at least partially solve the above problems.

[0008] An embodiment of the present invention provides a radio frequency power supply device, including: a control unit, a signal unit, and an impedance matching unit;

[0009] The control unit is used to switch the emission mode and control the signal unit to output a radio frequency signal corresponding to the emission mode;

[0010] The impedance matching unit includes a detection device, an operational amplifier, a logic operation device, an inductor, and a capacitor, and is used to adjust the electrical characteristics on the transmission line between the radio frequency signal and the load to achieve impedance matching;

[0011] The detection device is used to detect the electrical characteristic parameter information on the transmission line between the radio frequency signal output by the signal unit and the load; the logic operation device is used to perform logical judgment and operation on the electrical characteristic parameter information, and adjust the operational amplifier, inductor, and capacitor based on the operation result to achieve impedance matching.

[0012] In some optional embodiments, in the impedance matching unit, the first end of the detection device is connected to the logic operation device through a capacitor, the second end of the detection device is connected to the non-inverting input terminal of the operational amplifier, and the other end of the logic operation device is grounded; the output terminal of the operational amplifier is connected to the load through an inductor, and the inverting input terminal of the operational amplifier is grounded.

[0013] In some optional embodiments, it further includes: if the inductor in the impedance matching unit includes a first inductor and a second inductor, and the capacitor includes a first capacitor and a second capacitor;

[0014] The first end of the detection device is connected to the first end of the first capacitor, and the second end of the detection device is connected to the non-inverting input terminal of the operational amplifier;

[0015] The inverting input terminal of the operational amplifier is grounded, and the output terminal of the operational amplifier is connected to the load through the first inductor;

[0016] The second end of the first capacitor is connected in parallel to the first end of the second capacitor and the first end of the logic operation device; the second end of the second capacitor is grounded; the second end of the logic operation device is connected to the first end of the second inductor, and the second end of the second inductor is grounded.

[0017] In some optional embodiments, an isolation cabin is provided between the control unit and the signal unit, and between the signal unit and the impedance matching unit, so as to suppress the heat and electromagnetic spillover generated by the signal unit; the interior of the isolation cabin includes shielding material.

[0018] In some optional embodiments, the signal unit includes: an oscillator, a driving unit, a power amplifier, a filter, a directional coupler, a feedback network unit and a power supply;

[0019] The input end of the oscillator is connected to a power supply, and the output end of the oscillator is connected to the input end of the driving unit, for adjusting the duty cycle of the oscillator to generate an initial signal of a preset radio frequency band, and generating a radio frequency signal with driving capability through the driving unit;

[0020] The output end of the driving unit is connected to the input end of the power amplifier, and the output end of the power amplifier is connected to the input end of the filter, so as to amplify the RF signal with driving capability through the power amplifier, and filter the amplified RF signal based on the filter; the driving unit and the power amplifier are connected to a power supply for power supply;

[0021] The output end of the filter is connected to the input end of the directional coupler, and the output end of the directional coupler is connected to the load, so that the filtered RF signal passes through the directional coupler to obtain the RF signal for driving the load and outputs it to the load;

[0022] The feedback end of the directional coupler is connected to the input end of the feedback network unit, and the output end of the feedback network unit is connected to the control unit, which is used to feed back the RF signal of the driving load to the control unit to determine whether the RF signal needs to be adjusted in real time to achieve a preset power.

[0023] In some optional embodiments, the device further comprises a housing, a data connector and a power connector on the housing;

[0024] The housing provides a natural cooling and heat dissipation channel;

[0025] The data connector is used to send a control signal to the control unit.

[0026] An embodiment of the present invention further provides a control method for the radio frequency power supply device as described above, comprising:

[0027] In the working mode, the control unit switches the transmission mode to pulse transmission, and controls the signal unit to output a radio frequency signal reaching a first preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the transmission line of the load;

[0028] When the working mode ends, the control unit switches the transmission mode to continuous transmission, the control signal unit outputs a radio frequency signal reaching a second preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the transmission line of the load; the first preset power is greater than the second preset power.

[0029] In some optional embodiments, the control signal unit outputs a radio frequency signal reaching a first preset power or a second preset power, comprising:

[0030] Based on the preset first power or second power, the control oscillator generates an initial signal of a preset RF frequency band by adjusting the duty cycle, and generates a RF signal with driving capability through the driving unit; the RF signal with driving capability is amplified by a power amplifier, and the amplified RF signal is filtered based on a filter; the filtered RF signal is passed through a directional coupler to obtain a RF signal for driving a load, and the RF signal is output to the load.

[0031] In some optional embodiments, it also includes: the RF signal that drives the load is fed back to the control unit through the feedback network unit, and the control unit determines whether the power of the signal reaches the first preset power or the first preset power. If not, the control unit generates an initial signal by adjusting the duty cycle of the oscillator, and after passing through the driving unit, the power amplifier, the filter and the directional coupler in sequence, an adjusted RF signal is obtained and output to the load.

[0032] In some optional embodiments, the impedance matching unit adjusts the electrical characteristics of the transmission line between the radio frequency signal reaching the first preset power or the second preset power and the load, including:

[0033] The detection device detects the electrical characteristic parameter information on the transmission line between the radio frequency signal reaching the first preset power or the second preset power and the load; the logic operation device performs logical judgment and operation on the electrical characteristic parameter information; and adjusts the operational amplifier, inductor and capacitor based on the operation result to achieve impedance matching.

[0034] The beneficial effects of the above technical solution provided by the embodiment of the present invention include at least: the radio frequency power supply device provided by the embodiment of the present invention includes a control unit, a signal unit, an impedance matching unit, and a power supply connector; wherein the impedance matching unit includes a detection device, an operational amplifier, a logic operation device, an inductor and a capacitor, and adopts a circuit topology structure of an integrated operational amplifier to replace a traditional resistive and capacitive load for impedance matching. The traditional resistive and capacitive load includes a large-capacitance capacitor, etc. Compared with the traditional resistive and capacitive load, the volume of the radio frequency power supply device is greatly reduced, making the structure of the entire device more compact and more suitable for a small-sized working environment underground;

[0035] The isolation cabins in the device are distributed between the control unit and the signal unit, and between the signal unit and the impedance matching unit, which can effectively suppress the overflow of heat and electromagnetic energy generated by the signal unit, and at the same time block the influence of external interference on the device;

[0036] The control method of the radio frequency power supply device provided in the embodiment of the present invention switches between two different transmission modes of pulse transmission and continuous transmission. In the pulse transmission mode, the duty cycle is adjusted to achieve the effect of adjusting the heat dissipation time, and the electromagnetic signal and radio frequency signal in the inner cavity can also be reflected to achieve the effect of suppression and elimination; in the non-working mode, it is switched to continuous transmission to provide a stable beam. In this transmission mode, the device works in a low-power, low-load environment to extend the service life.

[0037] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings.

[0038] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0040] Figure 1 This is a schematic diagram of the structure of a radio frequency power supply device in Embodiment 1 of the present invention;

[0041] Figure 2 This is a schematic diagram of the principle of a signal unit in Embodiment 1 of the present invention;

[0042] Figure 3 Schematic diagram of the principle of the impedance matching unit in the first embodiment of the present invention;

[0043] Figure 4 This is a flow chart of a method for controlling a radio frequency power supply device in Embodiment 2 of the present invention. DETAILED DESCRIPTION

[0044] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0045] In order to solve the problem that there is no small-sized RF power supply device for mine use in the prior art, an embodiment of the present invention provides a RF power supply device that can meet the requirements for the size of the RF power supply device under mining conditions and solve the electromagnetic interference problem during the operation of the RF power supply.

[0046] Embodiment 1

[0047] Embodiment 1 of the present invention provides a radio frequency power supply device, the structural diagram of which is shown in FIG. Figure 1 As shown, it includes: a control unit, a signal unit, and an impedance matching unit;

[0048] The control unit includes a built-in program chip for switching the transmission mode and controlling the signal unit to output a radio frequency signal corresponding to the transmission mode;

[0049] The impedance matching unit includes a detection device, an operational amplifier, a logic operation device, an inductor and a capacitor, and is used to adjust the electrical characteristics of the transmission line between the radio frequency signal and the load to achieve impedance matching;

[0050] The detection device is used to detect the electrical characteristic parameter information on the transmission line between the radio frequency signal output by the signal unit and the load; the logic operation device is used to perform logical judgment and operation on the electrical characteristic parameter information, and adjust the operational amplifier, inductor and capacitor based on the operation result to achieve impedance matching.

[0051] like Figure 1 As shown, an isolation cabin is provided between the control unit and the signal unit, and between the signal unit and the impedance matching unit, and the interior of the isolation cabin includes shielding material.

[0052] Compared with a switching power supply, a radio frequency power supply will have higher radiation energy as the frequency increases, which will generate electromagnetic interference in a closed system. The radiation energy is caused by electromagnetic radiation generated by accelerating charges, and the frequency is related to the wavelength of the electromagnetic radiation. According to Maxwell's equations, an accelerating charge will generate a changing electric field and magnetic field around it, and the electric and magnetic fields propagate in the form of electromagnetic waves. The radiation power is proportional to the rate of change of the electric and magnetic fields, and this rate of change is related to the frequency of the accelerating charge.

[0053] The isolation chamber can not only inhibit the rapid outward overflow of heat from the signal unit to the control unit and the impedance matching unit, but also play a role in electromagnetic isolation, preventing the outward overflow of radio frequency energy and electromagnetic interference from affecting the normal operation of the control unit and the impedance matching unit. At the same time, the isolation chamber can also block external interference.

[0054] As Figure 1 shown, the radio frequency power supply device further includes a housing and data connectors and power supply connectors at both ends of the housing; due to the influence of the underground mine environment, it is impossible to use a fan for air cooling or a water channel for water cooling, and only natural cooling can be used. The housing protects the device and provides a natural cooling heat dissipation channel at the same time. The data connector is used to send control signals to the control unit.

[0055] The built-in program of the control unit is used to switch the emission mode and control the signal unit to output corresponding radio frequency signals; in the working mode, if the emission mode is pulse emission, the signal unit outputs a radio frequency signal reaching the preset power; when the working mode ends and switches to continuous emission, the signal unit continuously outputs a lower power radio frequency signal. In the continuous emission mode, the radio frequency power supply device operates in an environment of low power consumption and low load and can provide a stable beam current.

[0056] The signal unit includes an oscillator, a drive unit, a power amplifier, a filter, a directional coupler, a feedback network unit, and a power supply, as Figure 2As shown; 1) the input end of the oscillator is connected to the power supply, and the output end of the oscillator is connected to the input end of the driving unit, which is used to adjust the duty cycle of the oscillator to generate an initial signal of a preset RF frequency band, and generate a RF signal with driving capability through the driving unit; 2) the output end of the driving unit is connected to the input end of the power amplifier, and the output end of the power amplifier is connected to the input end of the filter, which is used to amplify the RF signal with driving capability through the power amplifier, and filter the amplified RF signal based on the filter; wherein the driving unit and the power amplifier are connected to the power supply to power them; 3) the output end of the filter is connected to the input end of the directional coupler, and the output end of the directional coupler is connected to the load, and the filtered RF signal passes through the directional coupler to obtain the RF signal that drives the load, and outputs it to the load; 4) the feedback end of the directional coupler is connected to the input end of the feedback network unit, and the output end of the feedback network unit is connected to the control unit, which is used to feed back the RF signal that drives the load to the control unit to determine whether the RF signal needs to be adjusted in real time to reach the preset power.

[0057] In the process of outputting the RF signal to the load, the impedance matching unit continuously adjusts the electrical characteristics of the transmission line between the RF signal and the load to achieve impedance matching, ensuring the maximum power transmission and minimum reflection loss of the RF signal, so that the RF signal can be efficiently transmitted to the load. In the impedance matching unit, the detection device continuously detects the electrical characteristic parameter information on the transmission line between the RF signal output by the signal unit and the load, and transmits the electrical characteristic parameter information to the logic operation device for logical judgment and operation, and adjusts the operational amplifier, inductor and capacitor based on the operation result to achieve impedance matching, and finally transmits the RF signal to the load; optionally, the electrical characteristic parameter information includes incident power, reflected power and phase, etc.

[0058] In the impedance matching unit, the first end of the detection device is connected to the logic operation device through a capacitor, the second end of the detection device is connected to the same-direction input end of the operational amplifier, and the other end of the logic operation device is grounded; the output end of the operational amplifier is connected to the load through an inductor, and the reverse input end of the operational amplifier is grounded.

[0059] Optionally, if the inductor in the impedance matching unit includes a first inductor and a second inductor, and the capacitor includes a first capacitor and a second capacitor, the schematic diagram of the impedance matching unit is as follows: Figure 3As shown: wherein, the first end of the detection device is connected to the first end of the first capacitor, and the second end of the detection device is connected to the same-direction input end of the operational amplifier; the reverse input end of the operational amplifier is grounded, and the output end of the operational amplifier is connected to the load through the first inductor; the second end of the first capacitor is connected to the first end of the second capacitor and the first end of the logic operation device in parallel; the second end of the second capacitor is grounded; the second end of the logic operation device is connected to the first end of the second inductor, and the second end of the second inductor is grounded.

[0060] The above-mentioned device of this embodiment adopts the circuit topology structure of integrated operational amplifier to replace the traditional resistive and capacitive load for impedance matching, which greatly reduces the volume of the radio frequency power supply device, making the structure of the entire device more compact and more suitable for small-sized working environments underground; the isolation cabin is distributed between the control unit and the signal unit, and between the signal unit and the impedance matching unit, which can effectively suppress the heat and electromagnetic energy generated by the signal unit, and at the same time block the influence of external interference on the device; at the same time, the outer shell provides a natural cooling and heat dissipation channel.

[0061] Embodiment 2

[0062] Embodiment 2 of the present invention provides a control method for a radio frequency power supply device, the process of which is as follows: Figure 4 As shown, the following steps are included:

[0063] Step S101: In the working mode, the control unit selects the transmission mode as pulse transmission, and controls the signal unit to output a radio frequency signal reaching a first preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the transmission line of the load;

[0064] Step S102: The working mode ends, the control unit switches the transmission mode to continuous transmission, the control signal unit outputs the radio frequency signal reaching the second preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the load on the transmission line; the first preset power is greater than the second preset power.

[0065] Specifically, in the two transmission modes, the working power of the pulse transmission is preset to a first power with a higher power, and the power of the continuous transmission is preset to a second power with a lower power. Based on the preset first power or second power, the oscillator is controlled to generate an initial signal of a preset radio frequency band by adjusting the duty cycle, and a radio frequency signal with driving capability is generated through a driving unit; the radio frequency signal with driving capability is amplified by a power amplifier, and the amplified radio frequency signal is filtered based on a filter; the filtered radio frequency signal is passed through a directional coupler to obtain a radio frequency signal for driving a load, and the radio frequency signal is output to the load;

[0066] The obtained RF signal for driving the load is also fed back to the control unit through the feedback network unit. The control unit determines whether the power of the signal reaches the first preset power or the first preset power. If not, the control unit generates an initial signal by adjusting the duty cycle of the oscillator. After passing through the driving unit, power amplifier, filter and directional coupler in sequence, an adjusted RF signal is obtained and output to the load.

[0067] In the process of outputting the RF signal to the load, an impedance matching unit is required to perform impedance matching. The detection device continuously detects the electrical characteristic parameter information on the transmission line between the RF signal reaching the first preset power or the second preset power and the load. The logic operation device performs logical judgment and operation on the detected electrical characteristic parameter information, and adjusts the operational amplifier, inductor and capacitor based on the operation result to achieve impedance matching.

[0068] For example, in an actual application scenario, the RF power supply device outputs an RF signal in the initially set working mode to excite the neutron generator. The neutron generator measures the porosity of the formation to determine whether it has entered the target formation. If it has entered the target formation, the initial working mode is switched to pulsed emission to measure the target formation information. If the porosity measurement data indicates that it is not in the target formation, it is switched to continuous emission to continuously monitor whether it has entered the target formation. In the continuous emission mode, the low power consumption and low load environment can extend the service life of the neutron generator.

[0069] In this embodiment, by switching between two different emission modes, pulse emission and continuous emission, in the pulse emission mode, the duty cycle is adjusted to achieve the effect of adjusting the heat dissipation time; switching to continuous emission in the non-working mode can provide a stable beam current. In this emission mode, the device works in a low-power, low-load environment to extend its service life.

[0070] Unless otherwise specifically stated, terms such as processing, computing, calculating, determining, displaying, etc. may refer to the actions and / or processes of one or more processing or computing systems, or similar devices, which operate and convert data represented as physical (e.g., electronic) quantities within registers or memories of a processing system into other data similarly represented as physical quantities within memories, registers, or other such information storage, transmission, or display devices of the processing system. Information and signals may be represented using any of a variety of different techniques and methods. For example, data, instructions, commands, information, signals, bits, symbols, and chips mentioned throughout the above description may be represented by voltages, currents, electromagnetic waves, magnetic fields or particles, light fields or particles, or any combination thereof.

[0071] It should be understood that the specific order or hierarchy of steps in the disclosed process is an example of an exemplary method. Based on design preferences, it should be understood that the specific order or hierarchy of steps in the process can be rearranged without departing from the scope of protection of the present disclosure. The attached method claims present the elements of the various steps in an exemplary order and are not intended to be limited to the specific order or hierarchy described.

[0072] In the above detailed description, various features are grouped together in a single embodiment to simplify the disclosure. This method of disclosure should not be interpreted as reflecting an intention that the embodiments of the claimed subject matter require more features than are clearly stated in each claim. On the contrary, as reflected in the appended claims, the invention is in a state of having less than all the features of the disclosed individual embodiments. Therefore, the appended claims are hereby expressly incorporated into the detailed description, with each claim standing on its own as a separate preferred embodiment of the invention.

[0073] Those skilled in the art will also appreciate that the various illustrative logic blocks, modules, circuits, and algorithmic steps described in conjunction with the embodiments herein can all be implemented as electronic hardware, computer software, or a combination thereof. In order to clearly illustrate the interchangeability between hardware and software, various illustrative components, blocks, modules, circuits, and steps are generally described above around their functions. Whether such functions are implemented as hardware or software depends on specific applications and the design constraints imposed on the entire system. A skilled person can implement the described functions in an alternative manner for each specific application, but such implementation decisions should not be interpreted as departing from the scope of protection of the present disclosure.

[0074] The steps of the method or algorithm described in conjunction with the embodiments herein may be directly embodied as hardware, a software module executed by a processor, or a combination thereof. The software module may be located in a RAM memory, a flash memory, a ROM memory, an EPROM memory, an EEPROM memory, a register, a hard disk, a mobile disk, a CD-ROM, or any other form of storage medium well known in the art. An exemplary storage medium is connected to the processor so that the processor can read information from the storage medium and can write information to the storage medium. Of course, the storage medium may also be an integral part of the processor. The processor and the storage medium may be located in an ASIC. The ASIC may be located in a user terminal. Of course, the processor and the storage medium may also be present in a user terminal as discrete components.

[0075] For software implementation, the techniques described in this application can be implemented with modules (e.g., procedures, functions, etc.) that perform the functions described in this application. These software codes can be stored in a memory unit and executed by a processor. The memory unit can be implemented within the processor or outside the processor. In the latter case, it is coupled to the processor in a communication manner via various means, which are well known in the art.

[0076] The above description includes examples of one or more embodiments. Of course, it is impossible to describe all possible combinations of components or methods for the purpose of describing the above embodiments, but it should be recognized by those skilled in the art that the various embodiments may be further combined and arranged. Therefore, the embodiments described herein are intended to cover all such changes, modifications and variations that fall within the scope of protection of the appended claims. In addition, with respect to the term "comprising" used in the specification or claims, the word is covered in a manner similar to the term "including", just as "including," is explained as a transitional word in the claims. In addition, any term "or" used in the specification of the claims is intended to mean "non-exclusive or".

Claims

1. A radio frequency power supply device, characterized in that: include: Control unit, signal unit, impedance matching unit; The control unit is used to switch the transmission mode and control the signal unit to output the radio frequency signal corresponding to the transmission mode; The impedance matching unit includes a detection device, an operational amplifier, a logic operation device, an inductor and a capacitor, and is used to adjust the electrical characteristics of the transmission line between the radio frequency signal and the load to achieve impedance matching; The detection device is used to detect the electrical characteristic parameter information on the transmission line between the radio frequency signal output by the signal unit and the load; the logic operation device is used to perform logical judgment and operation on the electrical characteristic parameter information; based on the operation result, the operational amplifier, inductor and capacitor are adjusted to achieve impedance matching.

2. The radio frequency power supply device according to claim 1, characterized in that: In the impedance matching unit, the first end of the detection device is connected to the logic operation device through a capacitor, the second end of the detection device is connected to the same-direction input end of the operational amplifier, and the other end of the logic operation device is grounded; the output end of the operational amplifier is connected to the load through an inductor, and the reverse input end of the operational amplifier is grounded.

3. The radio frequency power supply device according to claim 1, characterized in that: Also includes: If the inductor in the impedance matching unit includes a first inductor and a second inductor, and the capacitor includes a first capacitor and a second capacitor; The first end of the detection device is connected to the first end of the first capacitor, and the second end of the detection device is connected to the same-direction input end of the operational amplifier; The reverse input terminal of the operational amplifier is grounded, and the output terminal of the operational amplifier is connected to the load via a first inductor; The second end of the first capacitor is connected in parallel to the first end of the second capacitor and the first end of the logic operation device; the second end of the second capacitor is grounded; the second end of the logic operation device is connected to the first end of the second inductor, and the second end of the second inductor is grounded.

4. The radio frequency power supply device according to claim 1, characterized in that: An isolation cabin is provided between the control unit and the signal unit, and between the signal unit and the impedance matching unit, so as to suppress the heat and electromagnetic spillover generated by the signal unit; the interior of the isolation cabin includes shielding material.

5. The radio frequency power supply device according to claim 1, characterized in that: The signal unit includes: an oscillator, a driving unit, a power amplifier, a filter, a directional coupler, a feedback network unit and a power supply; The input end of the oscillator is connected to a power supply, and the output end of the oscillator is connected to the input end of the driving unit, for adjusting the duty cycle of the oscillator to generate an initial signal of a preset radio frequency band, and generating a radio frequency signal with driving capability through the driving unit; The output end of the driving unit is connected to the input end of the power amplifier, and the output end of the power amplifier is connected to the input end of the filter, so as to amplify the RF signal with driving capability through the power amplifier, and filter the amplified RF signal based on the filter; The output end of the filter is connected to the input end of the directional coupler, and the output end of the directional coupler is connected to the load, so that the filtered RF signal passes through the directional coupler to obtain the RF signal for driving the load and outputs it to the load; The feedback end of the directional coupler is connected to the input end of the feedback network unit, and the output end of the feedback network unit is connected to the control unit, which is used to feed back the RF signal of the driving load to the control unit to determine whether the RF signal needs to be adjusted in real time to achieve a preset power.

6. The radio frequency power supply device according to claim 1, characterized in that: The device also includes a housing, a data connector and a power connector on the housing; The housing provides a natural cooling and heat dissipation channel; The data connector is used to send a control signal to the control unit.

7. A control method for a radio frequency power supply device as claimed in claims 1 to 6, characterized in that: include: In the working mode, the control unit switches the transmission mode to pulse transmission, and controls the signal unit to output a radio frequency signal reaching a first preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the transmission line of the load; When the working mode ends, the control unit switches the transmission mode to continuous transmission, the control signal unit outputs a radio frequency signal reaching a second preset power, and the impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power and the transmission line of the load; the first preset power is greater than the second preset power.

8. The method according to claim 7, characterized in that The control signal unit outputs a radio frequency signal reaching a first preset power or a second preset power, comprising: Based on the preset first power or second power, the control oscillator generates an initial signal of a preset RF frequency band by adjusting the duty cycle, and generates a RF signal with driving capability through the driving unit; the RF signal with driving capability is amplified by a power amplifier, and the amplified RF signal is filtered based on a filter; the filtered RF signal is passed through a directional coupler to obtain a RF signal for driving a load, and the RF signal is output to the load.

9. The method according to claim 8, characterized in that Also includes: The RF signal driving the load is fed back to the control unit through the feedback network unit. The control unit determines whether the power of the signal reaches the first preset power or the first preset power. If not, the control unit generates an initial signal by adjusting the duty cycle of the oscillator, and obtains an adjusted RF signal after passing through the driving unit, power amplifier, filter and directional coupler in sequence, and outputs it to the load.

10. The method according to claim 7, characterized in that The impedance matching unit adjusts the electrical characteristics of the radio frequency signal reaching the first preset power or the second preset power and the load on the transmission line, including: The detection device detects the electrical characteristic parameter information on the transmission line between the radio frequency signal reaching the first preset power or the second preset power and the load; the logic operation device performs logic judgment and operation on the electrical characteristic parameter information; Based on the calculation result, the operational amplifier, inductor and capacitor are adjusted to achieve impedance matching.

Images