X-ray measuring device for examining a test object by means of X-ray radiation and method for examining a test object by means of X-ray radiation

Abstract

The invention relates to an X-ray measuring device (1) for examining a test object (20) by means of X-ray radiation, comprising a rotatable receiving device (2), an X-ray examination device (3) having at least one X-ray source (4) and at least one X-ray detector (5), wherein the at least one X-ray source (4) and the at least one X-ray detector (5) are arranged on the rotatable receiving device (2), and at least one positioning device (7) configured to arrange at least one predetermined region of interest (20-1) of the test object (20) in an acquisition region (8) of the X-ray examination device (3) between the at least one X-ray source (4) and the at least one X-ray detector (5) on a rotation axis (9) of the rotatable receiving device (2) and to keep the at least one predetermined region of interest in the acquisition region during the examination. The invention also relates to a method for examining a test object (20) by means of X-ray radiation.

Description

[0001] The present invention relates to an X-ray measuring device for inspecting a test object by X-ray radiation, and to a method for inspecting a test object by X-ray radiation.

[0002] Following production, a common practice in industrial metrology is to use non-invasive inspection methods to perform quality checks on test objects, particularly workpieces, in order to identify deviations from desired characteristics. Specifically, X-ray radiation can be used for this purpose to acquire radiographic images of the test object. If the test object is radiographed from different directions, its internal structure (object volume) can be calculated (reconstructed) within the range of a computed tomography scan.

[0003] Existing technologies have disclosed industrial computed tomography (CT) scanners, which are typically configured such that the X-ray source and X-ray detector are stationary when acquiring radiographs, while the test object to be measured is arranged on a turntable and rotated by said turntable (e.g., the VoluMax series CT scanners from Carl Zeiss AG, https: / / www.zeiss.de / messtechnik / produkte / systeme / computertomographie / volumax.html). Such CT scanners can be integrated into production lines, where, for example, a robotic arm loads the test object through a loading gate and arranges it on the turntable. A disadvantage of this type of CT scanner is that, even with a short CT scan time of approximately 1-2 seconds, a considerable proportion (typically approximately 10 to 20 seconds) is required for loading, opening and closing the gate, and positioning the region of interest (ROI) of the test object on the beam path or on the turntable. The ROI can encompass a portion or the entirety of the test object.

[0004] Medical engineering has disclosed gantry systems (e.g., see EP 1 646 316 B1) or C-arm systems (e.g., see US 7 170 972 B2). In these systems, the X-ray source and X-ray detector rotate about a structurally defined axis of rotation, and the object being measured (in the medical field, a patient) is positioned appropriately on the beam path of a stationary platform and remains stationary during measurement. A substantial drawback of these systems is the significant limitation on access to the measurement area (acquisition area). For example, in the case of a gantry system, the maximum diameter of the object to be measured is limited by the central opening at the middle.

[0005] The problem addressed by this invention is to improve the X-ray measuring apparatus and method for inspecting test objects by X-ray radiation. Specifically, the cycle time should be minimized as much as possible when inspecting the test object.

[0006] According to the invention, this problem is solved by an X-ray measuring apparatus having the features of claim 1 and a method having the features of claim 15. The advantageous configurations of the invention are apparent from the dependent claims.

[0007] One of the basic ideas of this invention is to arrange an X-ray inspection apparatus having at least one X-ray source and at least one X-ray detector on a rotatable receiver mount. In principle, the rotatable receiver mount can have any desired form; preferably, it has the form of a rotatable disk or a rotatable rod. Specifically, the X-ray inspection apparatus is arranged on the rotatable receiver mount such that the axis of rotation (and therefore, particularly the center of rotation) of the rotatable receiver mount extends through the beam path. In the case of a receiver mount designed as a rotatable disk, the average propagation direction of the beam path between at least one X-ray source and at least one X-ray detector extends particularly parallel to the plane of the rotatable disk. In other words, the active detector surface of at least one X-ray detector is particularly perpendicular to the plane of the rotatable disk. Therefore, a test object arranged on the axis of rotation between at least one X-ray source and at least one X-ray detector can be radiographed by the X-ray inspection apparatus. The X-ray inspection apparatus also rotates about the axis of rotation due to the rotation of the rotatable receiver mount, and thus can capture test objects arranged on the axis of rotation (particularly at the center of rotation) in the acquisition area between at least one X-ray source and at least one X-ray detector from different radiation transmission directions. Furthermore, at least one positioning device is provided and configured to arrange at least one predetermined region of interest (ROI) of the test object within an acquisition area of ​​the X-ray examination apparatus located at the axis of rotation of the rotatable receiver mount, between at least one X-ray source and at least one X-ray detector, and to maintain the RIO within the acquisition area during examination. The RIO being examined is specifically maintained at the center of rotation of the X-ray examination apparatus by the positioning device, and thus X-ray images can be acquired from different directions. Therefore, the RIO can be examined specifically by computed tomography (CT) scan.

[0008] Specifically, an X-ray measuring apparatus for inspecting a test object by X-ray radiation has been developed, comprising: a rotatable receiver stand; an X-ray inspection apparatus having at least one X-ray source and at least one X-ray detector arranged on the rotatable receiver stand; and at least one positioning device configured to arrange at least one predetermined region of interest of the test object in an acquisition region of the X-ray inspection apparatus located at the rotation axis of the rotatable receiver stand between the at least one X-ray source and the at least one X-ray detector, and to maintain the region of interest in the acquisition region during inspection.

[0009] Furthermore, a method for inspecting a test object by X-ray radiation is provided, wherein an X-ray measuring apparatus according to an embodiment described in this disclosure is used, wherein at least one predetermined region of interest of the test object is arranged in an acquisition region of the X-ray inspection apparatus on the rotation axis of a rotatable receiver device between the at least one X-ray source and the at least one X-ray detector, and the region of interest is held in the acquisition region by the at least one positioning device during the acquisition of at least one radiograph.

[0010] The advantage of X-ray measuring devices lies in the possibility of achieving short cycle times, and therefore, in particular, the improvement of in-line inspection and / or testing of workpieces in manufacturing lines. This is especially possible because a rotating stage is no longer required, as at least one positioning device positions the region of interest (ROI) of the test object within the acquisition area and simultaneously holds the RPI in its proper position within that acquisition area while acquiring the X-ray images. In this case, X-ray images are acquired from different directions by rotating a rotatable receiver (e.g., a rotatable disk or rotatable rod), thereby rotating the X-ray inspection device about its rotation axis and, consequently, about the RPI positioned there.

[0011] Furthermore, the disclosed X-ray measuring apparatus advantageously allows for the examination of regions of interest (ROIs) of larger test objects. For example, if the opposite corner of a larger battery or cell should be examined as the corresponding ROI (ROI 1 first, then ROI 2), the battery must be repositioned so that ROI 1 is positioned first, followed by ROI 2, at the center of rotation. For good radiography of the battery corners, the radiation must pass through the battery at an angle. Even for battery dimensions of approximately 500 mm × 150 mm × 50 mm and a tilt angle of 45°, the disclosed X-ray measuring apparatus is possible without issue, whereas a gantry system would require a very large central opening and therefore a greater distance (>1000 mm) between the X-ray source and the X-ray detector. This will result in fewer photons reaching the X-ray detector than in the case of the optimal shorter distance (e.g., approximately 400 mm), and therefore the gantry system will no longer allow for shorter measurement times in this case, especially since the number of photons incident on the X-ray detector is proportional to the square of the distance between the X-ray source and the X-ray detector.

[0012] In particular, the rotatable receiver can be accessed from at least one side (the side where the X-ray inspection equipment is located).

[0013] Specifically, the rotatable receiver device can be designed as a rotatable disk. Specifically, the rotatable disk is a disc, meaning its outer contour is specifically circular. However, the rotatable disk does not necessarily need to be circular in principle; specifically, the outer contour of the rotatable disk can also have any other suitable shape. Specifically, the rotatable disk can also be referred to as a (flat) plate.

[0014] X-ray measuring devices are particularly used in industrial metrology. Typical applications of X-ray measuring devices include quality control of test objects at the end of the production line. Specifically, the test objects being inspected are similar, and the same testing tasks are consistently performed on multiple test objects. However, in principle, X-ray measuring devices can also be used to inspect different test objects. These test objects are, in particular, workpieces.

[0015] Specifically, the X-ray measuring device is configured to allow computed tomography (CT) measurements. Specifically, for this purpose, the X-ray measuring device forms a computed tomography scanner. For this purpose, the X-ray measuring device, and more specifically, the X-ray examination equipment, may also specifically include a control device for performing computed tomography assessment. Specifically, the control device is configured to reconstruct and provide the object volume based on radiographs acquired from different directions.

[0016] Specifically, the test object is arranged from a direction substantially coincident with the axis of rotation by at least one positioning device. Specifically, at least one positioning device is arranged relative to the rotatable receiver device such that the test object can be positioned and removed from a direction perpendicular to the accessible side of the rotatable receiver device, perpendicular to the (accessible) plane, or, in the case of a rotatable disk, perpendicular to the average propagation direction of the beam path of the X-ray inspection device.

[0017] For example, the test object can be a battery or a battery cell. Test objects, particularly batteries or battery cells, are especially elongated test objects, for example, with a side-to-length ratio of approximately 50:15:5. For example, a battery or battery cell can have dimensions of approximately 500mm × 150mm × 50mm.

[0018] Specifically, at least one driver is provided to rotate the rotatable receiver device. For example, the rotatable receiver device may be a disc with an external or lateral gear ring arranged on its outer circumference, in which a pinion connected to the driver meshes. For example, the driver may be an electric motor.

[0019] Electrical connections for supplying power and / or signal lines can have configurations suitable for a particular embodiment. For example, sliding contacts can be provided so that the rotatable receiver device can rotate without restriction. In contrast, if a limitation is set on the range of angles around which the rotatable receiver device can rotate (e.g., at least approximately 180°), the electrical connections and / or signal lines can also be designed as wired connections.

[0020] The embodiment is configured to allow at least one X-ray source and / or at least one X-ray detector to move along a linear axis extending perpendicular to the rotation axis of the rotatable receiver assembly. Specifically, the linear axis extends in the radial direction. This allows for changing the distance between at least one X-ray source and at least one X-ray detector. This allows for increased flexibility in defining magnification, something impossible in gantry and C-arm systems. Due to the movable at least one X-ray source and at least one movable X-ray detector, the magnification and / or resolution of the region of interest of the test object can be flexibly and as required. Specifically, at least one actuator is provided, by which at least one X-ray source and at least one X-ray detector can move along the linear axis. For example, such an actuator could be a linear motor or a spindle drive. If the rotatable receiver assembly is designed as a rotatable disk, it is specifically configured that at least one X-ray source and at least one X-ray detector are movable along a linear axis extending radially relative to the rotatable disk.

[0021] The embodiment is configured such that the rotatable receiver is arranged such that its axis of rotation extends horizontally. This allows for the horizontal supply and removal of test objects into and from the acquisition area of ​​the X-ray inspection equipment, which is particularly advantageous for integrating test object inspection into the production line. In this case, the horizontal range of the axis of rotation can also include tolerance ranges.

[0022] The embodiment is configured such that the rotatable receiver holder is designed such that there are no limitations on the angle of rotation about the axis of rotation. Specifically, this allows for full rotation, covering an angular range of at least 360° during the acquisition of radiographs. If the rotatable receiver holder can be continuously rotated, this eliminates the need for a drive and gear transmission (teeth, gears, etc.), as management can be performed without acceleration and deceleration when interchanged test objects. In this case, the rotatable receiver holder rotates without stopping while performing all measurements. Electrical connections and / or signal lines are then formed, specifically via sliding contacts.

[0023] The embodiment provides an X-ray measurement apparatus comprising at least two positioning devices that operate independently of each other, and supply and removal devices for supplying and removing test objects to be inspected, each assigned to one of the at least two positioning devices. This can shorten the time the X-ray inspection equipment is not in use, because the placement of test objects can be performed alternately by the at least two positioning devices. While one of the positioning devices removes an inspected test object from the acquisition area and transfers it to the removal device, the other positioning device may have already placed another test object in the acquisition area and held it there. The removal device and the supply device can also be jointly assigned to the at least two positioning devices.

[0024] The embodiments are configured such that at least one positioning device includes a robotic arm. This allows for exceptionally high flexibility, as it can be easily adapted to different regions of interest and / or test objects, particularly without requiring mechanical modifications or reconfiguration. Specifically, the robotic arm is a multi-joint robotic arm with multiple translational and / or rotational degrees of freedom.

[0025] The embodiment is configured such that at least one positioning device includes a positioning turntable. This positioning turntable includes multiple holders and / or compartments. A test object is arranged on or in at least some of the holders and / or compartments. Rotating the positioning turntable allows regions of interest of one of the test objects to be arranged in the acquisition area, along the axis of rotation. It may be configured such that the holders and / or compartments have at least one positioning device. For example, it may be configured such that a rotary table is provided at each holder and / or each compartment, the rotary table allowing the test object to rotate, for example, to enable the arrangement of multiple regions of interest of each test object in the acquisition area.

[0026] The embodiment is configured such that the X-ray measuring apparatus includes a second linear axis, which is arranged perpendicular to both the rotation axis and the linear axis, and at least one X-ray detector of the X-ray inspection apparatus can be displaced along this second linear axis. Specifically, the second linear axis extends parallel to the active detector surface of at least one X-ray detector. Therefore, at least one X-ray detector can be displaced in a direction perpendicular to the rotation axis. In particular, this allows for so-called "half-beam scanning," where the active detector surface of the X-ray detector is not centered relative to the rotation axis, but rather the rotation axis is displaced towards the edge of the active detector surface, or the area of ​​the test object corresponding to the rotation axis is imaged in a manner displaced to the edge. Combined with 360° rotation, this allows for an increase in measurement volume, as if the active detector surface were up to twice its original size.

[0027] The embodiment is configured such that the X-ray measuring apparatus includes at least one third linear axis extending parallel to the axis of rotation, and at least one X-ray source and / or at least one X-ray detector can be displaced along this third linear axis. This allows the beam path to be displaced along the axis of rotation. For example, when using a positioning turntable, this allows for the examination of test objects of different sizes. The beam path can then be flexibly routed by means of displacing the beam path parallel to the axis of rotation via the at least one third linear axis extending parallel to the axis of rotation. Furthermore, this also allows for incremental measurements of larger volumes. In particular, at least one actuator is provided by which at least one X-ray source and at least one X-ray detector can be moved along the third linear axis extending parallel to the axis of rotation. For example, such an actuator can be a linear motor or a spindle drive. The movement of at least one X-ray source and / or at least one X-ray detector can, in principle, be carried out jointly (i.e., mechanically coupled) or individually (i.e., separately from each other).

[0028] The embodiment provides a driver for moving at least one X-ray source and at least one X-ray detector along a linear axis extending perpendicular to the rotation axis of the rotatable receiver mount, positioned outside the rotatable receiver mount. Therefore, the driver does not need to move with the rotatable receiver mount as it rotates, reducing complexity and allowing for cost savings. Since the same testing tasks are typically performed on similar test objects, modifications or relocations are rarely required. However, if this is the case, a driver positioned outside the rotatable receiver mount is used for this purpose. For example, suitable (connecting) elements are provided for this purpose, through which the driver can be connected to and disconnected from the linear axis.

[0029] The embodiments are configured such that the X-ray measuring apparatus includes at least one wireless communication interface, which is arranged on a rotatable receiver mount and configured to provide radiographs and / or evaluation results (e.g., object volume reconstructed from the acquired radiographs) acquired by at least one X-ray detector. This particularly allows for rapid data transmission to the X-ray detector, which can be managed, especially without sliding contacts for signal lines. For example, the communication interface can meet the Wi-Fi 6 standard (IEEE 802.11ax), thus enabling data rates up to 5 Gbit / s. It can also be configured such that at least several portions of the control device for the X-ray measuring apparatus and / or X-ray inspection equipment are arranged on the rotatable receiver mount and communicate with an external operating unit or remote controller via the wireless communication interface.

[0030] The embodiment is configured such that at least one X-ray source is a microfocus X-ray source. Therefore, high resolution can be obtained during radiographic acquisition. In this case, a microfocus X-ray source is specifically an X-ray source in which the effective region for generating X-ray radiation has a diameter between 2 μm and 100 μm.

[0031] The embodiment is configured such that at least one X-ray source comprises an integral X-ray tube. This results in the advantage that a high-voltage cable with a large diameter is not required during the rotation of the rotatable receiver assembly. In contrast, the voltage supply via a sliding ring and sliding contacts is sufficient. In the case of an integral X-ray tube, the high-voltage generator is already integrated into the X-ray tube.

[0032] The embodiment is configured such that at least one X-ray detector is implemented as a direct-conversion X-ray detector. Therefore, management can be performed without a scintillation layer. This allows for increased readout rate of at least one X-ray detector, and thus reduces the overall measurement time. Consequently, this allows for shorter cycle times for inspecting the test object. For example, the direct-conversion X-ray detector could be a photon-counting X-ray detector operating with CdTe as the active material. Such an X-ray detector can readout at a readout rate of >1000 frames / second, and therefore reduces motion ambiguity when measuring using a rotatable receiver mount and continuous rotation of the X-ray inspection apparatus.

[0033] The embodiment is configured to provide fluid cooling for at least one X-ray source and / or at least one X-ray detector. This improves the performance of the at least one X-ray source and / or at least one X-ray detector by generating brighter X-ray radiation and / or reducing detector noise. For example, water or oil can be used as the fluid cooling medium. In particular, in this case, the cooling circuit is entirely arranged on a rotatable disk. For example, in the case of water cooling, the cooling medium can be particularly used to distribute localized heat input over a larger area. If passive cooling by simply pumping through the cooling circuit is insufficient, the cooling medium can be cooled efficiently elsewhere.

[0034] The embodiment is configured such that the X-ray measuring apparatus includes at least one doorless radiation lock. This eliminates the time required to open and close the door of the radiation lock, during which X-ray images cannot be acquired. It also eliminates wear and tear caused by the continuous and rapid opening and closing of the door. Specifically, the doorless radiation lock is configured to prevent primary X-ray radiation from passing through it and ensures that scattered radiation is sufficiently attenuated so that no radiation is detected outside the radiation lock. In particular, the doorless radiation lock works in conjunction with screens (displaced relative to each other) that form a channel type through which X-ray radiation cannot pass but through which test objects can be supplied and removed. Therefore, the supply and removal of test objects can be separated from the operation of the X-ray inspection equipment. This reduces cycle time.

[0035] The embodiment is configured such that the X-ray inspection equipment includes multiple X-ray sources and multiple X-ray detectors. This reduces the time required for measurement. In particular, it reduces the cycle time. Specifically, the corresponding beam paths are arranged to be offset around the rotation axis, allowing simultaneous acquisition of multiple radiation transmission directions.

[0036] The embodiment provides an X-ray measuring apparatus comprising at least one collimator and / or at least one aperture element and / or at least one filter element, the at least one collimator and / or at least one aperture element and / or at least one filter element being configured to limit X-ray radiation emitted from at least one X-ray source to the active detector surface of at least one X-ray detector.

[0037] An embodiment of the method is configured such that when at least one predetermined region of interest of the test object is arranged in the acquisition area, a predetermined final segment of the arrangement trajectory extends along the rotation axis of the rotatable receiver mount. This prevents collisions with at least one X-ray source and / or at least one X-ray detector, especially when the rotatable receiver mount rotates during arrangement, such as in the case of continuous rotation of the rotatable receiver mount.

[0038] Another embodiment of the method involves using at least two positioning devices that operate independently of each other, along with supply and removal devices, each assigned to one of the at least two positioning devices for supplying and removing test objects to be inspected, to arrange at least one predetermined region of interest of the test object in the acquisition area, wherein the at least two positioning devices are used alternately during the process. This can increase the measurement time relative to clock time. In particular, this can shorten the time when no test object can be measured. Overall, this can further shorten the inspection cycle time, especially for each test object. In particular, the at least two positioning devices are robotic arms.

[0039] The invention will now be explained in more detail with reference to the accompanying drawings, based on preferred exemplary embodiments. In the drawings:

[0040] Figure 1 A schematic diagram of an embodiment of an X-ray measuring apparatus for inspecting test objects by X-ray radiation is shown;

[0041] Figure 2 A schematic diagram is shown to illustrate the rotational movement of the rotatable receiver device and its movement along a straight axis extending perpendicularly to or radially to the axis of rotation.

[0042] Figure 3 A schematic diagram of another embodiment of an X-ray measuring apparatus for inspecting test objects by X-ray radiation is shown;

[0043] Figure 4 A schematic diagram illustrating the additional linear axis is shown; and

[0044] Figure 5 A schematic flowchart illustrating an embodiment of a method for inspecting a test object by X-ray radiation is shown.

[0045] Figure 1A schematic diagram of an embodiment of an X-ray measuring device 1 for inspecting a test object 20 by X-ray radiation is shown. The X-ray measuring device 1 includes a rotatable receiver 2 and an X-ray inspection device 3 having at least one X-ray source 4 and at least one X-ray detector 5. The rotatable receiver 2 is designed as a rotatable disk, particularly a circular rotatable disk.

[0046] At least one X-ray source 4 and at least one X-ray detector 5 are arranged on a rotatable receiver 2, wherein the at least one X-ray source 4 and at least one X-ray detector 5 are movable along a straight axis 6 extending perpendicular to the rotation axis 9 of the rotatable receiver 2. In particular, the at least one X-ray source 4 and at least one X-ray detector 5 are movable along a straight axis 6 extending radially along the rotatable disk 2.

[0047] In addition, the X-ray measuring device 1 includes at least one positioning device 7, which is configured to arrange at least one predetermined region of interest 20-1 of the test object 20 in an acquisition region 8 of the X-ray inspection device 3 located at the rotation axis 9 of the rotatable receiver device 2 between at least one X-ray source 4 and at least one X-ray detector 5, and to keep the region of interest in the acquisition region during the inspection.

[0048] In the illustrated embodiment, the X-ray inspection apparatus 3 includes an X-ray source 4 and an X-ray detector 5. The X-ray source 4 and the X-ray detector 5 are each arranged on carriers 10 and 11, which are guided by two combined guide rails 12 on the rotatable receiver 2. Each of the carriers 10 and 11 is connected to a dedicated drive 14, which is specifically designed as a spindle drive. Therefore, the two carriers 10 and 11 with the X-ray source 3 and the X-ray detector 4 can move separately and independently of each other. The illustrated embodiment of this apparatus is chosen by way of example; in principle, the X-ray source 4 and the X-ray detector 5 can also be arranged on the rotatable receiver 2 in other ways.

[0049] In the illustrated embodiment, the positioning device 7 includes a positioning turntable 15 having six holders 16 for the test object 20. Specifically, the holders 16 can be configured to rotate about a rotation axis so that the test object 20 arranged on the holders 16 can be rotated, thereby bringing at least one region of interest 20-1 of the test object 20 to a position suitable for measurement.

[0050] In the illustrated embodiment, a gear ring 17 is arranged on the outer circumference of a rotatable receiver device 2, which is designed as a rotatable disk. For example, a pinion (not shown) of a driver 18 of an electric motor meshes in this gear ring 17, thus allowing the rotatable receiver device 2 to rotate about a rotation axis 9. Therefore, the X-ray inspection device 3 can rotate about a region of interest 20-1 within the acquisition area of ​​the test object 20 arranged on the rotation axis 9, and thus can acquire X-ray images of the region of interest 20-1 from different directions. Figure 2 The schematic diagram illustrates the rotational movement of the rotatable receiver device 2 about the rotation axis 9. Figure 2 Furthermore, the movement of the X-ray source 4 and the X-ray detector 5 along a straight axis 6 extending perpendicular to the rotation axis 9 of the rotatable receiver device 2, particularly along the radially extending straight axis 6, is explained.

[0051] In the illustrated embodiment, the rotatable receiving device 2, designed as a rotatable disk, specifically includes a circular base plate 19. The circular base plate 19 is rotatably mounted on a holding device 21, for example, by means of a shaft and pivot bearing. The holding device 21 is arranged on a base 22. During application, the axis of rotation 9 extends horizontally, while the plane of the rotatable disk extends vertically. This allows for the horizontal supply and removal of the test object 20 from the collection area 8.

[0052] In the X-ray measuring apparatus 1, the acquired radiographs are evaluated in a manner known per se. In particular, the X-ray measuring apparatus 1 can be used to perform computed tomography measurements. The control device configured for this purpose is not shown for obvious reasons, but is configured in a manner known per se, particularly for control and evaluation purposes.

[0053] In the illustrated embodiment, the test object 20 is examined such that the regions of interest 20-1 of the test object 20, particularly the corners of the battery or battery cell, are successively and individually arranged in the acquisition area 8 between the X-ray source 4 and the X-ray detector 5 on the rotation axis 9 by means of the rotation of the positioning turntable 15, and the regions of interest remain in this acquisition area during measurement. Within the measurement range, X-ray images are acquired by rotating the rotatable receiver 2 around the regions of interest 20-1 within an angular range of at least 180°, preferably at least 360°. It is possible to measure multiple regions of interest 20-1 for each test object 20. For this purpose, the holders 16 of the positioning turntable 15 are all rotatable, allowing the test object 20 to rotate, and different regions of interest 20-1 can be arranged in the acquisition area 8 between the X-ray source 4 and the X-ray detector 5 on the rotation axis 9. In particular, for the purpose of rotating the holders 16, a driver (not shown) suitable for the corresponding application can be provided.

[0054] Specifically, the X-ray measuring device 1 can be used for quality control in the production line. Then, uninspected test objects 20 can be supplied to the positioning turntable 16 from the side facing away from the rotatable receiving device 2, and inspected test objects 20 can be removed.

[0055] It can be configured such that the rotatable receiver device 2 is designed so that there is no limitation on the rotation angle of the rotatable receiver device about the rotation axis 9. Then, the electrical connection and / or wired signal line are specifically implemented through sliding contacts.

[0056] Figure 3 Another embodiment of the X-ray measuring device 1 is shown. In principle, the design of this embodiment is similar to... Figure 1 The example shown. Figure 3 The same reference numerals in the figures indicate the same as those in the preceding figures. Figure 1 and Figure 2 The same features and terminology are used. This embodiment sets up the X-ray measuring apparatus 1 to include at least two positioning devices 7 that operate independently of each other, and a supply and removal device 23 for supplying and removing test objects 20 to be inspected, which is assigned to each of the at least two positioning devices 7 in each case. The supply and removal device 23 includes a total of four conveyor belts. Each positioning device 7 includes a robotic arm 24, particularly a multi-joint robotic arm 24. The robotic arm 24 is configured to hold the test object 20, particularly a battery or battery cell, supplied by the supply and removal device 23, and arrange a predetermined region of interest 20-1 of the test object 20 in an acquisition area 8 on the rotation axis 9 between the X-ray source 4 and the X-ray detector 5. After inspection, i.e., after acquiring a radiograph for reconstructing the volume of the tomographic scan object, the robotic arm 24 transfers the inspected test object 20 back to the supply and removal device 23. In this case, the robotic arms 24 operate alternately, and thus the capabilities of the X-ray inspection apparatus 3 can be optimally utilized in terms of time. In this configuration, the rotation of the rotatable receiver 2 can be set to be continuous even when no X-ray images are being acquired. This prevents repeated acceleration and deceleration of the rotatable receiver 2, and thus prevents increased wear on bearings and drives.

[0057] Figure 4 A portion of another embodiment of the X-ray measuring apparatus 1 is shown. In principle, the design of this embodiment is similar to the foregoing embodiments. In this case, Figure 4 The same reference numerals in the figures indicate the same as those in the preceding figures. Figures 1 to 3The same features and terminology are used. This embodiment provides an X-ray inspection apparatus 1 including a second linear axis 25, which is arranged perpendicular to the rotation axis 9 and perpendicular to the linear axis 6, and at least one X-ray detector 5 of the X-ray inspection apparatus 3 can be displaced along this second linear axis. For example, movement along the second linear axis 25 can be implemented by a suitable drive (not shown), such as a linear motor or spindle drive.

[0058] Figure 4 Another embodiment is also illustrated. In this embodiment, the X-ray measuring device 1 is configured to include at least one third linear axis 26 extending parallel to the rotation axis 9, and the X-ray source 4 and / or X-ray detector 5 can be displaced along the at least one third linear axis. For example, movement along the third linear axis 26 can be implemented by a suitable actuator (not shown), such as a linear motor or spindle drive.

[0059] It can be configured such that a driver for moving at least one X-ray source 4 and at least one X-ray detector 5 along a linear axis 6 extending (particularly radially) perpendicular to the rotation axis 9 of the rotatable receiver 2 is arranged outside the rotatable receiver 2. A coupling device (not shown) is then provided to establish a mechanical connection with the driver if movement along the axis is required.

[0060] It can be configured that the X-ray measuring device 1 includes at least one wireless communication interface (not shown), which is arranged on the rotatable receiver base device 2 and configured to provide X-ray images acquired by at least one X-ray detector 5. In this case, sliding contacts for signal lines are not required.

[0061] It can be configured that at least one X-ray source 4 is a microfocus X-ray source.

[0062] It can be configured that at least one X-ray source 4 includes an integral X-ray tube.

[0063] It can be configured that at least one X-ray detector 5 is implemented as a direct conversion X-ray detector. For example, at least one X-ray detector 5 may include CdTe as the active material.

[0064] It is possible to configure at least one X-ray source 4 and / or at least one X-ray detector 5 to have fluid cooling (not shown). In this case, the fluid cooling element is specifically arranged on the rotatable receiver 2 and moves with it during rotation.

[0065] It can be configured that the X-ray measuring device 1 includes at least one doorless radiation lock 27. This is based on Figure 3 The embodiments shown are illustrated schematically. In particular, the doorless radiation lock 27 includes a plurality of barriers 28 (opaque to the X-ray radiation used) that are arranged such that there is no direct line of sight from the outer region 30 to at least one X-ray source 4, and thus primary radiation from at least one X-ray source 4 cannot escape to the outside, and secondary radiation or scattered radiation can no longer be detected in the outer region 30.

[0066] The X-ray inspection device 3 can be configured to include multiple X-ray sources 4 and multiple X-ray detectors 5. The corresponding beam paths are then arranged to be offset at different angles around the rotation axis 9, and thus X-ray images of the test object 20 can be acquired simultaneously from multiple different directions.

[0067] It can be configured that the X-ray measuring device 1 includes at least one collimator (not shown) and / or at least one aperture element (not shown) and / or at least one filter element (not shown), the at least one collimator and / or at least one aperture element and / or at least one filter element being configured to limit X-ray radiation emitted from at least one X-ray source 4 to the active detector surface of at least one X-ray detector 5.

[0068] Figure 5 A schematic flowchart illustrating an embodiment of a method for inspecting a test object using X-ray radiation is shown. In this embodiment, the method is performed according to... Figure 3 The X-ray measuring apparatus of the illustrated embodiment (i.e., a positioning device using two robotic arms) is used for execution. Method steps 100-103 are performed by the first positioning device, method steps 200-203 are performed by the X-ray inspection apparatus and the rotatable receiver device, and method steps 300-303 are performed by the second positioning device, wherein, as shown in the flowchart and the following description, the steps are synchronized with each other. Within the scope of this method, the test object is examined and / or measured, particularly by computed tomography, and for this purpose, the test object is irradiated from different directions.

[0069] In method step 100, a first robotic arm grips a test object, particularly a battery or battery cell, from one of the supply or removal devices.

[0070] In method step 101, the predetermined region of interest of the clamped test object, particularly the corner of the battery or battery cell, is arranged in the acquisition area of ​​the X-ray inspection device located on the axis of rotation between the X-ray source and the X-ray detector. In this configuration, when at least one predetermined region of interest of the test object is arranged in the acquisition area, a predetermined final segment of the arrangement trajectory extends along the axis of rotation of the rotatable receiver device to avoid collision with the X-ray source and the X-ray detector. Simultaneously, the rotatable receiver device begins to rotate, or rotates continuously without interruption.

[0071] In method step 200, the region of interest of the test object is measured, wherein the measurement begins when a predetermined angular velocity of the rotatable receiver device has been reached.

[0072] In method step 102, the first robotic arm repositions the test object such that another predetermined region of interest of the test object, particularly the opposite corner of the battery or battery cell, is positioned in the acquisition area between the X-ray source and the X-ray detector on the axis of rotation. Specifically, for this purpose, the test object is removed from the acquisition area along the axis of rotation, repositioned, and subsequently guided back along the axis of rotation to the acquisition area with the other predetermined region of interest. In parallel with this, the rotatable receiver can be accelerated again or kept rotating.

[0073] In method step 201, another predetermined region of interest is measured in a similar manner.

[0074] In method step 103, the test object is removed from the acquisition area again, specifically along the rotation axis, and transferred to the supply and removal device.

[0075] In parallel with this, in method step 300, the second robotic arm grips another test object, particularly another battery or battery cell, from one of the supply or removal devices, and moves the gripped test object to the vicinity of its waiting collection area without obstructing the first robotic arm.

[0076] In method step 301, once the acquisition area has been cleared after method step 103, a predetermined region of interest of the other test object, particularly the corner of another battery or battery cell, is positioned in the acquisition area between the X-ray source and the X-ray detector on the axis of rotation. In this case, it can also be configured such that when at least one predetermined region of interest of the other test object is positioned in the acquisition area, a predetermined final segment of the positioning trajectory extends along the axis of rotation of the rotatable receiver device to avoid collision with the X-ray source and the X-ray detector. Simultaneously, the rotatable receiver device begins to rotate, or rotates continuously without interruption.

[0077] In method step 202, a predetermined region of interest is measured on the other test object, wherein the measurement begins when a predetermined angular velocity of the rotatable receiver device has been reached.

[0078] In method step 302, the second robotic arm repositions the other test object such that another predetermined region of interest of the other test object, particularly the opposite corner of the other battery or battery cell, is positioned in the acquisition area between the X-ray source and the X-ray detector on the axis of rotation. Specifically, for this purpose, the other test object is removed from the acquisition area along the axis of rotation, repositioned, and subsequently guided back along the axis of rotation to the acquisition area with the other predetermined region of interest. In parallel, the rotatable receiver can be accelerated again or its rotational movement can be maintained.

[0079] In method step 203, another predetermined region of interest is measured in a similar manner.

[0080] In method step 303, the other test object is removed from the collection area again, specifically along the rotation axis, and transferred to the supply and removal device.

[0081] The method was then repeated for other test subjects, with the positioning devices alternately positioned and held in place.

[0082] In principle, other positioning devices can be set up, and the procedures are similar in principle.

[0083] The embodiment sets method steps 200 to 203 to be performed in a different order: particularly if, for example, the time taken for changing the movement of the region of interest (method steps 102 and 302) is longer than the exchange of test objects between the two positioning devices, it can be set so that method step 202 is executed first after method step 200, and repositioning (method step 102) is performed in parallel thereafter, followed by method step 201, and method steps 302 and 103 are performed in parallel thereafter. For two test objects each having two regions of interest, the checks are then performed in the following order: checking the first region of interest of the first test object, checking the first region of interest of the second test object, checking the second region of interest of the first test object, and checking the second region of interest of the second test object. The method is similarly performed in the case of other test objects and other regions of interest.

[0084] List of reference numerals

[0085] 1 X-ray measuring device

[0086] 2 Rotatable receiver base device

[0087] 3 X-ray inspection equipment

[0088] 4 X-ray sources

[0089] 5 X-ray detectors

[0090] 6 (First) Straight Axis

[0091] 7. Positioning equipment

[0092] 8. Collection Area

[0093] 9. Rotation axis

[0094] 10 racks

[0095] 11 carriers

[0096] 12 guide rails

[0097] 14 drives

[0098] 15 Positioning Turntables

[0099] 16 Holders

[0100] 17 Gear Ring

[0101] 18 drives

[0102] 19 (circular) base plate

[0103] 20 test subjects

[0104] 20-1 Area of ​​Interest

[0105] 21 Holding device

[0106] 22 Base

[0107] 23 Supply and Removal Devices

[0108] 24 robotic arms

[0109] 25. Second linear axis (direction perpendicular to the axis of rotation)

[0110] 26. The third linear axis (parallel to the axis of rotation)

[0111] 27 Doorless Radiation Lock

[0112] 28 screens

[0113] 30 External Area

[0114] 100-103 Method and Procedure (First Positioning Device)

[0115] 200-203 Methods and Procedures (X-ray Inspection Equipment)

[0116] 300-303 Method and Procedure (Second Positioning Device)

Claims

1. An X-ray measuring device (1) for inspecting a test object (20) by X-ray radiation, comprising: Rotatable receiver base device (2). The X-ray inspection equipment (3) has at least one X-ray source (4) and at least one X-ray detector (5). The X-ray source (4) and the X-ray detector (5) are arranged on the rotatable receiver (2), and at least two positioning devices (7) are configured to position at least one predetermined region of interest (20-1) of the test object (20) in the acquisition area (8) of the X-ray inspection device (3) located at the rotation axis (9) of the rotatable receiver (2) between the X-ray source (4) and the X-ray detector (5), and to maintain the region of interest in the acquisition area during the inspection. Its features include at least two positioning devices (7) that operate independently of each other, and a supply and removal device (23) for supplying and removing test objects to be inspected, which is assigned to each of the at least two positioning devices (7) individually or jointly in their respective cases.

2. The X-ray measuring device as described in claim 1, characterized in that, The X-ray source (4) and / or the X-ray detector (5) can move along a straight axis (6) extending perpendicular to the rotation axis (9) of the rotatable receiver device (2).

3. The X-ray measuring device (1) as described in claim 1 or 2, characterized in that, The rotatable receiver device (2) is arranged such that the axis of rotation (9) of the rotatable receiver device (2) extends horizontally.

4. The X-ray measuring device (1) as described in claim 1, characterized in that, The rotatable receiver device (2) is designed such that there are no restrictions on the rotation angle of the rotatable receiver device around the rotation axis (9).

5. The X-ray measuring device (1) as described in claim 1, characterized in that, The positioning device (7) includes a robotic arm (24).

6. The X-ray measuring device (1) as described in claim 1, characterized in that, The positioning device (7) includes a positioning turntable (15).

7. The X-ray measuring device (1) as described in claim 1, characterized in that, The X-ray measuring device (1) further includes a second linear axis (25) which is arranged in a direction perpendicular to the rotation axis (9) and the direction perpendicular to the linear axis (6), and at least one X-ray detector (4) of the X-ray inspection device (3) is capable of shifting along the second linear axis.

8. The X-ray measuring device (1) as described in claim 1, characterized in that, The X-ray measuring device (1) further includes at least one third linear axis (26) that extends parallel to the rotation axis (9), and the X-ray source (4) and / or the X-ray detector (5) are capable of shifting along the at least one third linear axis.

9. The X-ray measuring device (1) as described in claim 2, characterized in that, A driver (14) for moving the X-ray source (4) and / or the X-ray detector (5) along a straight axis (6) extending perpendicular to the rotation axis (9) of the rotatable receiver (2) is arranged outside the rotatable receiver (2).

10. The X-ray measuring device (1) as claimed in claim 1, characterized in that, The X-ray measuring device (1) also includes at least one wireless communication interface, which is arranged on the rotatable receiver device (2) and configured to provide X-ray images acquired by the X-ray detector (5).

11. The X-ray measuring device (1) as claimed in claim 1, characterized in that, The X-ray measuring device (1) also includes at least one doorless radiation lock (27).

12. The X-ray measuring device (1) as claimed in claim 1, characterized in that, The X-ray inspection equipment (3) includes multiple X-ray sources (4) and multiple X-ray detectors (5).

13. The X-ray measuring device (1) as claimed in claim 1, characterized in that, The X-ray measuring device (1) further includes at least one collimator and / or at least one aperture element and / or at least one filter element, wherein the collimator and / or the aperture element and / or the filter element are configured to limit the X-ray radiation emitted from the X-ray source (4) to the active detector surface of the X-ray detector (5).

14. A method for inspecting a test object (20) by X-ray radiation, in, The inspection was performed using the X-ray measuring apparatus (1) as described in any one of claims 1 to 13. In this process, at least one predetermined region of interest (20-1) of the test object (20) is positioned in the acquisition area (8) of the X-ray inspection device (3) on the rotation axis (9) of the rotatable receiver (2) between the X-ray source (4) and the X-ray detector (5), using the positioning device (7) in the X-ray measuring apparatus, and the region of interest is held in the acquisition area by the positioning device (7) during the acquisition of at least one X-ray image. The feature is that at least two positioning devices (7) that operate independently of each other are used together with a supply and removal device (23) for supplying and removing test objects (20) to be inspected, which is provided separately or jointly to each of the at least two positioning devices (7) in their respective cases, so as to arrange at least one predetermined region of interest (20-1) of the test objects (20) in the acquisition area (8).

15. The method as described in claim 14, characterized in that, The at least two positioning devices (7) are used alternately during the process.

16. The method as described in claim 14 or 15, characterized in that, When at least one predetermined region of interest (20-1) of the test object (20) is arranged in the acquisition area (8), the predetermined last segment of the arrangement trajectory extends along the rotation axis (9) of the rotatable receiver device (2).

17. The method as described in claim 14, characterized in that, At least two positioning devices (7) that operate independently of each other are used together with a supply and removal device (23) assigned to each of the at least two positioning devices (7) for supplying and removing test objects (20) to be inspected, so as to arrange at least one predetermined region of interest (20-1) of the test objects (20) in the acquisition area (8), wherein the at least two positioning devices (7) are used alternately in the process.

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