A detection platform and a method for detecting wafer defects

Abstract

The present invention discloses a detection platform and a method for detecting wafer defects, which relates to the field of visual inspection. The platform comprises a detection box, a visual inspection sensor is provided in the detection box, two storage boxes are provided on the detection box, the storage boxes include a support frame and a box cover, and the support frame can store a number of wafers; the detection box is provided with a vertical push component and a horizontal push component, the vertical push component can push the box cover and the support frame downward out of the storage box, and the horizontal push component can push the wafer in the corresponding support frame out; the detection box is also provided with a clamping and moving component, which clamps and moves the wafer to the position of the visual inspection sensor; the detection box is closed and an air purifier is installed inside. During the transfer and inspection process, the wafer does not come into contact with the external environment, preventing dust and impurities from contacting the wafer during the transfer and inspection process, thereby ensuring the quality of the wafer.

Description

Technical Field

[0001] The present invention relates to the field of visual inspection, and in particular to an inspection platform and a method for detecting wafer defects. Background Art

[0002] Wafers, the fundamental material for semiconductor chip manufacturing, are typically made of semiconductor materials such as silicon. During the manufacturing process, the wafer surface undergoes multiple process steps, including photolithography, etching, and deposition, to form complex circuit patterns and structures. Due to the complexity of the manufacturing process and the influence of environmental factors, the wafer surface is prone to various defects and flaws, such as scratches, particle contamination, open circuits, and short circuits. These defects can affect chip performance and reliability, necessitating rigorous testing and screening.

[0003] Visual inspection is an inspection method based on optical imaging and image processing technology. In wafer manufacturing, visual inspection is primarily used to detect and classify defects and flaws on the wafer surface. A visual inspection system typically includes optical imaging equipment, image processing algorithms, and computers. Optical imaging equipment is used to capture images of the wafer surface, while image processing algorithms are used to process and analyze the images and extract feature information from them. The computer runs the algorithms and displays the inspection results. Visual inspection offers the advantages of being non-contact, highly precise, and highly efficient. It enables rapid inspection and classification of wafer surfaces without damaging the wafer, making it an essential component of the wafer manufacturing process.

[0004] Chinese patent application CN114384088A discloses a multi-wafer inspection device, comprising a plurality of wafer inspection device bodies for inspecting wafers, and an inspection platform. The wafer inspection device bodies are arranged on the inspection platform, and the inspection platform is provided with an inspection box for holding wafers to be inspected and an inspected box for holding inspected wafers. The inspected box is provided with a partition plate for dividing the interior of the inspected box into a space for qualified products and a space for unqualified products, thereby improving the inspection efficiency of the wafers.

[0005] Chinese patent application CN114609148A discloses a wafer inspection device, including a camera for capturing an optical image of a wafer; a lens barrel connected to the camera; a lens group arranged in the lens barrel and used to form an image transmission light path between the camera and the wafer; a bright field illumination component connected to the lens barrel and used to form a bright field illumination light path inside the lens barrel to illuminate the wafer; a dark field illumination component used to form a dark field illumination light path outside the lens barrel to illuminate the wafer; a switching component arranged in the lens barrel and capable of moving to the image transmission light path so that the camera can capture the optical image of the wafer when illuminated by the bright field illumination component, and the switching component can be moved away from the image transmission light path so that the camera can capture the optical image of the wafer when illuminated by the dark field illumination component. Only one lens barrel is needed to simultaneously meet the bright field environment detection and dark field environment detection of the wafer, and the structure is simple and the working efficiency is high.

[0006] The above patents and prior art also have the following defects:

[0007] The production and manufacturing of wafers is relatively precise, and they are easily contaminated with dust during the inspection and transportation process, causing contamination and resulting in unqualified wafer inspections. Some inspection equipment is closed, but it still cannot solve the problem that the wafers are separated from the external environment during the transportation, loading and unloading process, and cannot avoid being contaminated by dust, resulting in quality degradation.

[0008] Therefore, the present application provides a detection platform and a method for wafer defect detection to meet the needs. Summary of the Invention

[0009] The purpose of this application is to provide a detection platform and a method for detecting wafer defects. During the transfer and detection process, the wafers do not come into contact with the external environment, preventing dust and impurities from contacting the wafers during the transfer and detection process, thereby ensuring the quality of the wafers. When the storage box is placed on the detection box, the box cover and the wafers can be pushed down, the storage box is opened and connected to the detection box, and the wafers are pushed into the detection box for detection, which reduces the operation of manual loading and unloading and is more convenient to use. During loading and unloading, the wafers will also not come into contact with the external environment, preventing the wafers from being contaminated and ensuring quality.

[0010] To achieve the above objectives, the present application provides the following technical solutions: an inspection platform, comprising an inspection box, wherein a visual inspection sensor is provided in the inspection box, and two storage boxes are provided on the inspection box, wherein the storage boxes include a support frame and a box cover, and the support frame can store a plurality of wafers;

[0011] The detection box is provided with a vertical pushing component and a horizontal pushing component, the vertical pushing component can push the box cover and the support frame downward out of the storage box, and the horizontal pushing component can push out the wafer in the corresponding support frame;

[0012] The detection box is also provided with a clamping and moving assembly, which clamps the wafer and moves it to the position of the visual detection sensor;

[0013] The detection box is closed and an air purifier is installed inside;

[0014] The storage box further comprises a box body and a return spring. The bottom of the box body is opened, and the return spring presses the box cover onto the box body.

[0015] Preferably, the storage box also includes a fixed block, a fixed frame, a sliding cylinder and a sliding rod, the fixed frame is fixedly mounted on the box cover, the fixed block is fixedly mounted on the side of the box body near the bottom, one end of the return spring is fixedly mounted on the fixed block, the other end of the return spring is fixedly mounted on the fixed frame, the sliding cylinder is fixedly mounted on the side of the box body, the sliding rod is fixedly mounted on the box cover, and the sliding rod is slidably fitted in the sliding cylinder.

[0016] Preferably, the horizontal pushing assembly includes a horizontal pushing cylinder and a horizontal pushing block, the horizontal pushing cylinder is fixedly installed in the detection box, the horizontal pushing block is arc-shaped, and the horizontal pushing block is fixedly installed at the output end of the horizontal pushing cylinder. The horizontal pushing assembly also includes a horizontal transmission motor, a horizontal transmission roller and a horizontal transmission belt, the horizontal transmission motor is fixedly installed in the detection box, the horizontal transmission roller is fixedly installed at the output end of the horizontal transmission motor, and the horizontal transmission belt is connected to the horizontal transmission roller.

[0017] Preferably, the vertical pushing assembly includes a vertical pushing motor, a vertical pushing screw, a vertical pushing block and a vertical limiting plate. A pushing frame is fixedly installed on the detection box, the vertical pushing motor is fixedly installed on the pushing frame, the vertical pushing screw is rotatably connected to the pushing frame, the vertical pushing block is sleeved on the vertical pushing screw and threadedly connected to the vertical pushing screw, the vertical pushing block corresponds to the fixed frame, the vertical limiting plate is fixedly installed on the pushing frame, a limiting slot is provided on the vertical limiting plate, and the vertical pushing block slides in the limiting slot.

[0018] Preferably, the clamping moving assembly includes a moving motor, a moving screw, a moving block, a clamping cylinder, a clamping block and a moving limit plate. The moving motor is fixedly installed in the detection box, the moving screw is rotatably connected in the detection box, the moving screw is fixedly installed at the output end of the moving motor, the moving block is sleeved on the moving screw and threadedly connected to the moving screw, the clamping cylinder is fixedly installed on the moving block, the clamping block is fixedly installed at the output end of the clamping cylinder, the clamping block is arc-shaped, the moving limit plate is fixedly installed in the detection box, a moving groove is provided on the moving limit plate, and the moving block slides in the moving groove.

[0019] Preferably, the support frame includes four columns and a plurality of spacers, the box cover is fixedly mounted on the columns, and a plurality of spacers are fixedly mounted on the columns at equal intervals, and rubber pads are provided on both sides of the spacers.

[0020] Preferably, the detection box is provided with two groups of vertical pushing components and storage boxes, and one side of the two groups of storage boxes is respectively provided with a horizontal pushing component and a horizontal pushing component, the horizontal pushing component includes a horizontal pushing cylinder, a horizontal pushing block and a horizontal pushing plate, the horizontal pushing plate is fixedly installed on the detection box, the horizontal pushing cylinder is fixedly installed on the detection box, the horizontal pushing block is fixedly installed on the output end of the horizontal pushing cylinder, and the horizontal pushing block is arranged in an arc shape.

[0021] Preferably, a recovery box is provided in the detection box, the top of the recovery box is opened, and an inspection door is installed on the detection box.

[0022] Preferably, two guide bars are fixedly installed on the horizontal push plate, and the guide bars are arranged at an angle. Abutments are fixedly installed on both sides of the box body, and a downward hole is opened on the detection box corresponding to the storage box position, and the abutments are against the detection box.

[0023] A method for detecting wafer defects, using the above-mentioned wafer inspection platform, includes the following steps:

[0024] The wafers are stored in the support frame, the box cover closes the box body to make the storage box closed, and the storage box is placed in the position of the vertical push component corresponding to the detection box;

[0025] The vertical push component drives the box cover and the support frame downward, so that the wafer in the support frame moves to the position of the horizontal push component;

[0026] The horizontal pushing component moves the wafer to the position of the clamping moving component, the clamping moving component clamps the wafer, and moves the wafer to the position of the visual detection sensor;

[0027] Visual inspection sensors inspect wafers;

[0028] After the inspection is completed, the vertical push assembly pushes the box cover and the support frame to continue moving downward, and the next wafer is pushed to the corresponding horizontal push assembly position.

[0029] In summary, the technical effects and advantages of the present invention are as follows:

[0030] 1. In the present invention, the storage box and the inspection box are both in a closed state, and the wafers are placed in the storage box, so that the wafers will not collide with each other during the transfer process. At the same time, the wafers will not come into contact with the external environment during the transfer and inspection process, preventing dust and impurities from contacting the wafers during the transfer and inspection process, thereby ensuring the quality of the wafers. When the storage box is placed on the inspection box, the box cover and the wafers can be pushed down, the storage box can be opened to connect with the inspection box, and the wafers can be pushed into the inspection box for inspection, thereby reducing the manual loading and unloading operations and being more convenient to use. During loading and unloading, the wafers will also not come into contact with the external environment, thereby preventing the wafers from being contaminated and ensuring quality.

[0031] 2. In the present invention, the clamping block releases the clamping of the wafer, and the wafer falls onto the horizontal pushing plate. The horizontal pushing cylinder drives the horizontal pushing block to move, and the horizontal pushing block pushes the wafer into the corresponding storage box. When the wafer that has passed the inspection is transferred away, it is ensured that the wafer is not released from the external environment, and that the loading and unloading of the wafer during the inspection process will not be contaminated by the outside world. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0034] Figure 2 This is one of the internal structure diagrams of the present invention;

[0035] Figure 3 This is the second schematic diagram of the internal structure of the present invention;

[0036] Figure 4 Schematic diagram of the structure of the visual detection sensor and storage box in the present invention;

[0037] Figure 5 For the present invention Figure 4 Enlarged view of part A;

[0038] Figure 6Schematic diagram of the structure of the detection box and visual detection sensor in the present invention;

[0039] Figure 7 For the present invention Figure 6 Enlarged view of part B;

[0040] Figure 8 Schematic diagram of the structure of the horizontal push cylinder, the horizontal push block and the horizontal push plate in the present invention;

[0041] Figure 9 For the present invention Figure 8 Enlarged view of part C;

[0042] Figure 10 It is a structural schematic diagram of the box body and the box cover in the present invention.

[0043] In the figure: 1. Inspection box; 2. Visual inspection sensor; 3. Storage box; 31. Support frame; 32. Box cover; 33. Box body; 34. Return spring; 35. Fixed frame; 36. Sliding cylinder; 37. Sliding rod; 4. Vertical pushing assembly; 41. Vertical pushing motor; 42. Vertical pushing screw; 43. Vertical pushing block; 44. Vertical limiting plate; 5. Horizontal pushing assembly; 51. Horizontal pushing cylinder; 52. Horizontal pushing block; 53. Horizontal transmission motor; 54. Horizontal transmission belt; 6. Clamping and moving assembly; 61. Moving motor; 62. Moving screw; 63. Moving block; 64. Clamping cylinder; 65. Clamping block; 66. Moving limiting plate; 7. Pushing frame; 8. Horizontal pushing assembly; 81. Horizontal pushing cylinder; 82. Horizontal pushing block; 83. Horizontal pushing plate; 9. Recycling box; 10. Guide strip; 11. Stop block. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0045] Example 1: Reference Figures 1-10 The inspection platform shown includes an inspection box 1, a visual inspection sensor 2 is provided in the inspection box 1, and two storage boxes 3 are provided on the inspection box 1. The storage boxes 3 include a support frame 31 and a box cover 32. The support frame 31 can store a plurality of wafers.

[0046] The detection box 1 is provided with a vertical pushing component 4 and a horizontal pushing component 5. The vertical pushing component 4 can push the box cover 32 and the support frame 31 downward out of the storage box 3, and the horizontal pushing component 5 can push out the wafer in the corresponding support frame 31;

[0047] A clamping and moving assembly 6 is also provided in the detection box 1, and the clamping and moving assembly 6 clamps the wafer and moves it to the position of the visual detection sensor 2;

[0048] The detection box 1 is a closed setting and an air purifier is installed inside;

[0049] The storage box 3 further includes a box body 33 and a return spring 34 . The bottom of the box body 33 is opened, and the return spring 34 presses the box cover 32 onto the box body 33 .

[0050] The wafer is stored in the support frame 31, and the box cover 32 closes the box body 33 to make the storage box 3 in a closed state. The storage box 3 is placed in the position of the vertical pushing component 4 corresponding to the detection box 1. The vertical pushing component 4 drives the box cover 32 and the support frame 31 to push downward, so that the wafer in the support frame 31 moves to the position of the horizontal pushing component 5. The horizontal pushing component 5 moves the wafer to the position of the clamping moving component 6. The clamping moving component 6 clamps the wafer and moves the wafer to the position of the visual detection sensor 2. The visual detection sensor 2 detects the wafer. After the detection is completed, the vertical pushing component 4 pushes the box cover 32 and the support frame 31 to continue to move downward, and moves the next wafer to the position corresponding to the horizontal pushing component 5.

[0051] The storage box 3 and the inspection box 1 are both in a closed state, and the wafers are arranged in the storage box 3 so that the wafers will not collide with each other during the transfer process. At the same time, the wafers will not come into contact with the external environment during the transfer and inspection process, preventing dust and impurities from contacting the wafers during the transfer and inspection process, thereby ensuring the quality of the wafers. When the storage box 3 is placed on the inspection box 1, the box cover 32 and the wafers can be pushed down, the storage box 3 can be opened to connect with the inspection box 1, and the wafers can be pushed into the inspection box 1 for inspection, which reduces the operation of manual loading and unloading and is more convenient to use. During loading and unloading, the wafers will also not come into contact with the external environment, thereby preventing the wafers from being contaminated and ensuring quality.

[0052] Example 2, reference Figures 1-10 As shown, the difference from the above embodiment is that the storage box 3 also includes a fixed block, a fixed frame 35, a sliding cylinder 36 and a sliding rod 37. The fixed frame 35 is fixedly mounted on the box cover 32, the fixed block is fixedly mounted on the side of the box body 33 near the bottom, one end of the return spring 34 is fixedly mounted on the fixed block, the other end of the return spring 34 is fixedly mounted on the fixed frame 35, the sliding cylinder 36 is fixedly mounted on the side of the box body 33, the sliding rod 37 is fixedly mounted on the box cover 32, and the sliding rod 37 slides in the sliding cylinder 36.

[0053] When the vertical pushing component 4 pushes the box cover 32 to move downward, the box cover 32 drives the sliding rod 37 to move in the sliding cylinder 36, making the box cover 32 more stable and not easy to shake. The box cover 32 and the fixed frame 35 move synchronously, and the fixed frame 35 squeezes the reset spring 34 to store force in the reset spring 34. When the storage box 3 is removed from the detection box 1, the reset spring 34 resets and drives the fixed frame 35 to move upward. The fixed frame 35 drives the box cover 32 to move upward, so that the box cover 32 is against the box body 33, and the storage box 3 is closed.

[0054] Example 3, reference Figures 1-10 As shown, the difference from the above embodiment is that the horizontal pushing component 5 includes a horizontal pushing cylinder 51 and a horizontal pushing block 52. The horizontal pushing cylinder 51 is fixedly installed in the detection box 1. The horizontal pushing block 52 is arc-shaped and fixedly installed at the output end of the horizontal pushing cylinder 51. The horizontal pushing component 5 also includes a horizontal transmission motor 53, a horizontal transmission roller and a horizontal transmission belt 54. The horizontal transmission motor 53 is fixedly installed in the detection box 1. The horizontal transmission roller is fixedly installed at the output end of the horizontal transmission motor 53. The horizontal transmission belt 54 is connected to the horizontal transmission roller.

[0055] The horizontal pushing cylinder 51 drives the horizontal pushing block 52 to move, and the horizontal pushing block 52 pushes the wafer on the support frame 31 to the horizontal conveyor belt 54. The horizontal conveyor motor 53 drives the horizontal conveyor roller to rotate, and the horizontal conveyor roller drives the horizontal conveyor belt 54 to rotate. The horizontal conveyor belt 54 drives the wafer to move and moves the wafer to the position of the clamping moving component 6.

[0056] Example 4, with reference to Figures 1-10 As shown, the difference from the above embodiment is that the vertical pushing assembly 4 includes a vertical pushing motor 41, a vertical pushing screw 42, a vertical pushing block 43 and a vertical limiting plate 44. A pushing frame 7 is fixedly installed on the detection box 1, the vertical pushing motor 41 is fixedly installed on the pushing frame 7, the vertical pushing screw 42 is rotatably connected to the pushing frame 7, the vertical pushing block 43 is sleeved on the vertical pushing screw 42 and threadedly connected to the vertical pushing screw 42, the vertical pushing block 43 corresponds to the fixed frame 35, the vertical limiting plate 44 is fixedly installed on the pushing frame 7, and a limiting groove is provided on the vertical limiting plate 44, and the vertical pushing block 43 slides in the limiting groove.

[0057] The vertical push motor 41 drives the vertical push screw 42 to rotate, and the vertical push screw 42 drives the vertical push block 43 to move. The vertical limit plate 44 limits the vertical push block 43 from rotating. The vertical push block 43 pushes the fixed frame 35 to move downward, and the fixed frame 35 drives the box cover 32 to move downward.

[0058] Example 5, with reference to Figures 1-10As shown, the difference from the above embodiment is that the clamping moving assembly 6 includes a moving motor 61, a moving screw 62, a moving block 63, a clamping cylinder 64, a clamping block 65 and a moving limit plate 66. The moving motor 61 is fixedly installed in the detection box 1, the moving screw 62 is rotatably connected in the detection box 1, the moving screw 62 is fixedly installed at the output end of the moving motor 61, the moving block 63 is sleeved on the moving screw 62 and is threadedly connected to the moving screw 62, the clamping cylinder 64 is fixedly installed on the moving block 63, the clamping block 65 is fixedly installed at the output end of the clamping cylinder 64, the clamping block 65 is arranged in an arc shape, the moving limit plate 66 is fixedly installed in the detection box 1, a moving groove is opened on the moving limit plate 66, and the moving block 63 slides in the moving groove.

[0059] The clamping cylinder 64 drives the clamping block 65 to move, and two groups of clamping moving components 6 are set. The two clamping blocks 65 clamp the wafer on the horizontal conveyor belt 54. The moving motor 61 drives the moving screw 62 to move. The moving block 63 moves on the moving screw 62. The moving limit plate 66 limits the moving block 63 and prevents it from rotating. The moving block 63 drives the clamping cylinder 64 and the clamping block 65 to move. The clamping block 65 drives the wafer to move and moves the wafer to the position of the visual detection sensor 2. The visual detection sensor 2 detects the wafer.

[0060] Example 6, reference Figures 1-10 As shown, the difference from the above embodiment is that the support frame 31 includes four columns and a plurality of spacers, the box cover 32 is fixedly mounted on the columns, and a plurality of spacers are fixedly mounted on the columns at equal intervals, and rubber pads are provided on both sides of the spacers.

[0061] When the box cover 32 moves downward, the box cover 32 drives the pillars to move, the pillars drive the spacers to move, and the spacers drive the wafers therebetween to move downward.

[0062] Example 7, reference Figures 1-10 As shown, the difference from the above embodiment is that two groups of vertical pushing components 4 and storage boxes 3 are provided on the detection box 1, and a horizontal pushing component 5 and a horizontal pushing component 8 are respectively provided on one side of the two groups of storage boxes 3. The horizontal pushing component 8 includes a horizontal pushing cylinder 81, a horizontal pushing block 82 and a horizontal pushing plate 83. The horizontal pushing plate 83 is fixedly installed on the detection box 1, the horizontal pushing cylinder 81 is fixedly installed on the detection box 1, and the horizontal pushing block 82 is fixedly installed at the output end of the horizontal pushing cylinder 81. The horizontal pushing block 82 is arranged in an arc shape.

[0063] One storage box 3 is full of wafers, and the other storage box 3 is set as an empty box. The vertical pushing component 4 pushes the wafer downward out of the storage box 3, and the horizontal pushing component 5 pushes the wafer out of the support frame 31. The clamping and moving component 6 clamps the wafer and moves it to the position of the visual detection sensor 2 for inspection. When the inspection is qualified, the clamping and moving component 6 drives the wafer to move above the horizontal pushing plate 83, and the clamping block 65 releases the clamp of the wafer, and the wafer falls on the horizontal pushing plate 83. The horizontal pushing cylinder 51 drives the horizontal pushing block 52 to move, and the horizontal pushing block 52 pushes the wafer into the corresponding storage box 3. When the qualified wafer is transferred away, it is ensured that the wafer is not released from the external environment, and it is ensured that the loading and unloading of the wafer will not be contaminated by the outside world during the inspection process.

[0064] Example 8, reference Figures 1-10 As shown, the difference from the above embodiment is that a recovery box 9 is provided in the detection box 1 , the top of the recovery box 9 is opened, and an inspection door is installed on the detection box 1 .

[0065] When the visual inspection sensor 2 detects that the wafer is unqualified, the clamping moving component 6 drives the wafer to move above the recycling box 9, the clamping block 65 releases the clamping of the wafer, and the wafer falls into the recycling box 9, and the unqualified wafers are collected and recycled.

[0066] Example 9, reference Figures 1-10 As shown, the difference from the above embodiment is that two guide bars 10 are fixedly installed on the horizontal push plate 83, and the guide bars 10 are set at an angle. Abutment blocks 11 are fixedly installed on both sides of the box body 33, and a downward hole is opened on the detection box 1 corresponding to the position of the storage box 3, and the abutment blocks 11 are abutted against the detection box 1.

[0067] The guide bar 10 can prevent the wafer from moving on the horizontal push plate 83 and position it more accurately, so that it can accurately enter the corresponding storage box 3. The block 11 abuts against the inspection box 1, so that the box body 33 will not enter the inspection box 1 and abuts against the bottom of the inspection box 1 to close it, and the box cover 32 can be lowered.

[0068] A method for detecting wafer defects, using the above-mentioned wafer inspection platform, includes the following steps:

[0069] The wafers are stored in the support frame 31, and the box cover 32 closes the box body 33 to make the storage box 3 closed. The storage box 3 is placed in the position of the detection box 1 corresponding to the vertical push component 4;

[0070] The vertical push component 4 drives the box cover 32 and the support frame 31 to push downward, so that the wafer in the support frame 31 moves to the position of the horizontal push component 5;

[0071] The horizontal pushing component 5 moves the wafer to the position of the clamping and moving component 6, and the clamping and moving component 6 clamps the wafer and moves the wafer to the position of the visual detection sensor 2;

[0072] Visual inspection sensor 2 inspects the wafer;

[0073] After the inspection is completed, the vertical pushing assembly 4 pushes the box cover 32 and the support frame 31 to continue to move downward, and moves the next wafer to the position corresponding to the horizontal pushing assembly 5.

[0074] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A testing platform, comprising a testing box, characterized in that: A visual detection sensor is provided in the detection box, and two storage boxes are provided on the detection box. The storage boxes include a support frame and a box cover. The support frame can store a number of objects to be detected; The detection box is provided with a vertical pushing component and a horizontal pushing component. The vertical pushing component can push the box cover and the support frame downward out of the storage box, and the horizontal pushing component can push out the corresponding object to be detected in the support frame; The detection box is also provided with a clamping and moving assembly, which clamps the object to be detected and moves it to the position of the visual detection sensor; The detection box is closed and an air purifier is installed inside; The storage box further comprises a box body and a return spring, the bottom of the box body is open, and the return spring presses the box cover onto the box body; The horizontal pushing assembly includes a horizontal pushing cylinder and a horizontal pushing block, the horizontal pushing cylinder is fixedly installed in the detection box, the horizontal pushing block is arranged in an arc shape, and the horizontal pushing block is fixedly installed at the output end of the horizontal pushing cylinder. The horizontal pushing assembly also includes a horizontal transmission motor, a horizontal transmission roller and a horizontal transmission belt, the horizontal transmission motor is fixedly installed in the detection box, the horizontal transmission roller is fixedly installed at the output end of the horizontal transmission motor, and the horizontal transmission belt is connected to the horizontal transmission roller; The storage box also includes a fixed block, a fixed frame, a sliding cylinder and a sliding rod; The vertical pushing assembly includes a vertical pushing motor, a vertical pushing screw, a vertical pushing block and a vertical limiting plate. A pushing frame is fixedly installed on the detection box, the vertical pushing motor is fixedly installed on the pushing frame, the vertical pushing screw is rotatably connected to the pushing frame, the vertical pushing block is sleeved on the vertical pushing screw and threadedly connected to the vertical pushing screw, the vertical pushing block corresponds to the fixed frame, the vertical limiting plate is fixedly installed on the pushing frame, a limiting slot is provided on the vertical limiting plate, and the vertical pushing block slides in the limiting slot.

2. A detection platform according to claim 1, characterized in that: The fixed frame is fixedly mounted on the box cover, the fixed block is fixedly mounted on the side of the box body near the bottom, one end of the return spring is fixedly mounted on the fixed block, and the other end of the return spring is fixedly mounted on the fixed frame, the sliding cylinder is fixedly mounted on the side of the box body, the sliding rod is fixedly mounted on the box cover, and the sliding rod is slidably fitted in the sliding cylinder.

3. The detection platform according to claim 1, characterized in that: The clamping moving assembly includes a moving motor, a moving screw, a moving block, a clamping cylinder, a clamping block and a moving limit plate. The moving motor is fixedly installed in the detection box, the moving screw is rotatably connected in the detection box, the moving screw is fixedly installed at the output end of the moving motor, the moving block is sleeved on the moving screw and threadedly connected to the moving screw, the clamping cylinder is fixedly installed on the moving block, the clamping block is fixedly installed at the output end of the clamping cylinder, the clamping block is arranged in an arc shape, the moving limit plate is fixedly installed in the detection box, a moving groove is provided on the moving limit plate, and the moving block slides in the moving groove.

4. The detection platform according to claim 1, characterized in that: The support frame includes four columns and a plurality of spacers. The box cover is fixedly installed on the columns. The plurality of spacers are fixedly installed on the columns at equal intervals. Rubber pads are provided on both sides of the spacers.

5. The detection platform according to claim 1, characterized in that: The detection box is provided with two groups of vertical pushing components and storage boxes, and one side of the two groups of storage boxes is respectively provided with a horizontal pushing component and a horizontal pushing component. The horizontal pushing component includes a horizontal pushing cylinder, a horizontal pushing block and a horizontal pushing plate. The horizontal pushing plate is fixedly installed on the detection box, the horizontal pushing cylinder is fixedly installed on the detection box, and the horizontal pushing block is fixedly installed on the output end of the horizontal pushing cylinder. The horizontal pushing block is arranged in an arc shape.

6. The detection platform according to claim 1, characterized in that: A recovery box is provided in the detection box. The top of the recovery box is opened. An inspection door is installed on the detection box.

7. The detection platform according to claim 5, characterized in that: Two guide bars are fixedly installed on the horizontal push plate, and the guide bars are arranged obliquely. Abutment blocks are fixedly installed on both sides of the box body. A downward hole is opened on the detection box corresponding to the storage box position, and the abutment blocks abut against the detection box.

8. A method for detecting wafer defects, using the wafer inspection platform according to any one of claims 1 to 7, characterized in that: The following steps are involved: The wafers are stored in the support frame, the box cover closes the box body to make the storage box closed, and the storage box is placed in the position of the vertical push component corresponding to the detection box; The vertical push component drives the box cover and the support frame downward, so that the wafer in the support frame moves to the position of the horizontal push component; The horizontal pushing component moves the wafer to the position of the clamping moving component, the clamping moving component clamps the wafer, and moves the wafer to the position of the visual detection sensor; Visual inspection sensors inspect wafers; After the inspection is completed, the vertical push assembly pushes the box cover and the support frame to continue moving downward, and the next wafer is pushed to the corresponding horizontal push assembly position.

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