Cover plate, module and electronic equipment

Abstract

The invention provides a cover plate, a module and electronic equipment. The cover plate comprises a transparent base material, and the surface of one side of the transparent base material is sequentially provided with a bottom layer, at least one first optical anti-reflection layer and a superhard layer; the first optical anti-reflection layer comprises a first sub-anti-reflection layer and a second sub-anti-reflection layer, the refractive index of the first sub-anti-reflection layer is greater than the transmittance of the second sub-anti-reflection layer, the first sub-anti-reflection layer has a first refractive index, the second sub-anti-reflection layer has a second refractive index, and the first refractive index is different from the second refractive index. According to the cover plate provided by the embodiment of the invention, the hardness of the cover plate can be improved, and the transmittance of the cover plate can also be improved.

Description

Technical Field

[0001] This application relates to the technical field of glass, and particularly to a cover plate, a module, and an electronic device. Background Art

[0002] Glass is an amorphous inorganic solid material mainly composed of silicate compounds. Due to its relatively high hardness and good transparency, various glass products are often used in daily life. These glass products are widely applied in various industrial fields, such as the electronics, optics, and construction industries.

[0003] Generally, the hardness of ordinary glass is about Mohs hardness 5.5 - 6. During daily life and production use, glass scratches and other situations are likely to occur. Especially for some products with higher requirements, such as the glass on the display screens of mobile phones, tablets, TVs, etc., being scratched not only affects the appearance, but also large - area scratches will introduce increased light scattering, resulting in a decrease in display clarity and brightness. Severe scratches will also affect the touch experience. In addition, glass scratches will cause a decrease in glass strength, and in severe cases, the glass will directly break, which greatly affects the use of the glass. If the thickness of the glass is increased to improve hardness, the transmittance of the glass will be reduced. Summary of the Invention

[0004] In view of this, this application provides a cover plate, a module, and an electronic device to solve the problem of the conflict between the high hardness and high transmittance of glass.

[0005] Some embodiments of this application provide a cover plate. This application will be introduced from multiple aspects below, and the embodiments and beneficial effects of the following multiple aspects can be referred to each other.

[0006] In a first aspect, this application provides a cover plate, which includes a transparent substrate, and a primer layer, at least one first optical antireflection layer, and a super - hard layer are sequentially provided on the surface of one side of the transparent substrate; the first optical antireflection layer includes a first sub - antireflection layer and a second sub - antireflection layer, the first sub - antireflection layer has a first refractive index, the second sub - antireflection layer has a second refractive index, and the first refractive index and the second refractive index are different.

[0007] For the cover plate of the embodiment of this application, by providing multiple layers of the first optical antireflection layer, and the two sub - antireflection layers in each layer of the first optical antireflection layer have different refractive indexes, such a structure can effectively improve the transmittance of the cover plate. In addition, when the transmittance can be adjusted, increasing the thickness of the super - hard layer and combining with the antireflection layer can also ensure good hardness. In this way, both the hardness and scratch - resistance of the cover plate can be improved, and the transmittance of the cover plate can also be improved.

[0008] As an embodiment of the first aspect, the first sub - antireflection layer is a compound containing silicon or aluminum, and the second sub - antireflection layer is a compound containing silicon or aluminum. Such compounds of silicon and aluminum not only have a certain hardness, which can improve the hardness of the cover plate, but also have good transmittance.

[0009] As an embodiment of the first aspect, the first sub - antireflection layer or the second sub - antireflection layer contains at least one of silicon nitride, aluminum nitride, silicon oxide, aluminum oxide, silicon oxynitride, and aluminum oxynitride. Such compounds of silicon and aluminum have higher hardness and better transmittance.

[0010] As an embodiment of the first aspect, the Vickers hardness of the material of the first sub - antireflection layer of the first optical antireflection layer is greater than 1500HV, and the Vickers hardness of the material of the second sub - antireflection layer is greater than 900HV. The transmittance of the cover plate with this structure can reach more than 90%, and the Mohs hardness can reach 7.

[0011] As an embodiment of the first aspect, a transition layer and a hydrophobic layer are provided on the surface of the super - hard layer. Among them, the transition layer is provided between the super - hard layer and the hydrophobic layer, and the transition layer at least includes a nitride layer, and the nitride layer is close to the super - hard layer. The nitride layer can isolate the super - hydrophobic layer and the super - hard layer, and the nitride layer does not contain oxygen elements. Therefore, no C - O bonds will be generated with the super - hard layer to reduce the hardness of the super - hard layer.

[0012] As an embodiment of the first aspect, the transition layer further includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer. Since the silicon in the silicon oxide layer and the oxygen in the hydrophobic layer will generate Si - O bonds, it will improve the adhesion of the hydrophobic layer and can effectively improve the friction resistance of the hydrophobic layer. This cover plate has an eraser wear resistance of more than 5000 times and a steel wool wear resistance of more than 5000 times. Even it has an eraser wear resistance of more than 10000 times and a steel wool wear resistance of more than 10000 times.

[0013] As an embodiment of the first aspect, the nitride layer includes silicon nitride, aluminum nitride, and silicon aluminum nitride. This composition not only has a certain transparency but also has high hardness.

[0014] As an embodiment of the first aspect, the thickness of the transition layer is between 1nm and 20nm. The transition layer with this thickness not only isolates the hydrophobic layer and the super - hard layer but also does not affect the hardness of the cover plate due to the excessive thickness of the transition layer.

[0015] As an embodiment of the first aspect, the cover plate further includes at least one second optical antireflection layer. The second optical antireflection layer includes a third sub - antireflection layer, and the refractive index between the third sub - antireflection layer and the adjacent first sub - antireflection layer or second sub - antireflection layer is different. In this way, not only can an even number of sub - antireflection layers be used to improve the transmittance, but also an odd number of sub - antireflection layers can be used to improve the transmittance.

[0016] As an embodiment of the first aspect, the superhard layer includes at least one diamond-like carbon film layer, and this material has a high hardness.

[0017] As an embodiment of the first aspect, the superhard layer contains at least one of amorphous carbon, tetrahedral amorphous carbon, hydrogen-doped amorphous carbon, non-metal-doped amorphous carbon, and non-metal-doped tetrahedral amorphous carbon. These materials not only have a high hardness but also have a good transmittance.

[0018] As an embodiment of the first aspect, the thickness of the first optical antireflection layer is between 100 nm and 1000 nm. The first optical antireflection layer with such a thickness can meet the user's requirements for the transmittance of the cover plate and will not have a great impact on the overall thickness of the cover plate.

[0019] As an embodiment of the first aspect, the thickness of the superhard layer is between 5 nm and 50 nm. It not only meets the thickness requirements but also, with such a thickness, the superhard layer can meet the hardness requirements of the cover plate.

[0020] As an embodiment of the first aspect, the underlayer contains one or both of silicon oxide and silicon oxynitride. This material has a good hardness.

[0021] As an embodiment of the first aspect, the thickness of the underlayer is between 2 nm and 30 nm. This thickness has a good supporting effect on the overall cover plate and is relatively moderate.

[0022] As an embodiment of the first aspect, the transparent substrate is glass, transparent glass-ceramics, or transparent ceramics.

[0023] As an embodiment of the first aspect, the average transmittance of the cover plate is greater than 88% under the condition that the visible light wavelength is 400 - 700 nm, and the transmittance is greater than 88% under the condition that the visible light wavelength is 940 nm.

[0024] As an embodiment of the first aspect, the Mohs hardness of the cover plate is 7 and the load is 1000 g.

[0025] As an embodiment of the first aspect, the eraser abrasion resistance times of the cover plate reach more than 5000 times, and the steel wool abrasion resistance times reach more than 5000 times.

[0026] As an embodiment of the first aspect, the dynamic friction coefficient of the cover plate is less than 0.05.

[0027] As an embodiment of the first aspect, the difference between the first refractive index and the second refractive index is greater than 0.3. Such a difference value can meet the requirement that, when the sub-antireflection layer is relatively thin, the cover plate can have a good transmittance, which is beneficial to controlling the overall thickness of the cover plate.

[0028] Second aspect, the present application also discloses a cover plate, which includes a transparent substrate. A primer layer, a superhard layer, a transition layer, and a hydrophobic layer are sequentially provided on the surface of one side of the transparent substrate. Among them, the transition layer at least includes a nitride layer, and the nitride layer is adjacent to the superhard layer. The nitride layer plays a good isolation role between the superhard layer and the hydrophobic layer, which is beneficial to protecting the superhard layer and stabilizing the overall hardness of the cover plate.

[0029] As an embodiment of the second aspect, the transition layer further includes a silicon oxide layer, and the silicon oxide layer is adjacent to the hydrophobic layer. This structure effectively improves the friction resistance of the cover plate.

[0030] Third aspect, the present application also provides a module, which includes the cover plate of the first aspect or the second aspect embodiment. The module is a display module or a camera module. According to the module of the embodiment of the present application, it has good hardness, strong scratch resistance, and high transparency.

[0031] Fourth aspect, the present application also discloses an electronic device, which includes the cover plate of the first aspect embodiment or the cover plate of the second invention embodiment. Description of the Drawings

[0032] Figure 1 It is a schematic structural diagram of the cover plate in some embodiments;

[0033] Figure 2 It is a schematic structural diagram of the cover plate in some other embodiments;

[0034] Figure 3A It is an application scenario of the cover plate of the embodiment of the present application;

[0035] Figure 3B It is another application scenario of the cover plate of the embodiment of the present application;

[0036] Figure 4 It is a schematic structural diagram of the cover plate of an embodiment of the present application;

[0037] Figure 5 It is a schematic structural diagram of the cover plate corresponding to the optical antireflection layer with a two-layer structure in an embodiment of the present application;

[0038] Figure 6 It is a schematic structural diagram of the cover plate with a transition layer in an embodiment of the present application;

[0039] Figure 7 It is a schematic structural diagram of the cover plate when the transition layer has a two-layer structure in an embodiment of the present application;

[0040] Figure 8 It is another schematic structural diagram of the cover plate in an embodiment of the present application;

[0041] Figure 9The graph showing the transmittance of the cover plate in Embodiment 1 of the present application varying with wavelength;

[0042] Figure 10 The graph showing the transmittance of the cover plate in Embodiment 2 of the present application varying with wavelength;

[0043] Figure 11 The graph showing the transmittance of the cover plate in Embodiment 3 of the present application varying with wavelength.

[0044] Reference numerals:

[0045] In some embodiments:

[0046] Cover plate 100; Substrate 110; Underlayer 120; Diamond-like carbon film 130;

[0047] In other embodiments:

[0048] Cover plate 200; Substrate 210; Underlayer 220; Tetrahedral amorphous carbon layer 230; Nitride protective layer 240;

[0049] In the embodiments of the present application:

[0050] Cover plate 300;

[0051] Transparent substrate 310;

[0052] Underlayer 320;

[0053] Optical antireflection layer 330; First sub-antireflection layer 331; Second sub-antireflection layer 332;

[0054] Superhard layer 340;

[0055] Interlayer 350; Silicon oxide layer 351; Nitride layer 352;

[0056] Hydrophobic layer 360. Detailed implementation manners

[0057] Next, the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings.

[0058] To facilitate the understanding of the technical solutions of the present application, the technical problems to be solved by the embodiments of the present application will be described below first in conjunction with some embodiments.

[0059] Referring to Figure 1 , Figure 1 which shows a schematic structural diagram of the cover plate in some embodiments. As Figure 1 shown, the cover plate includes a substrate 110, an underlayer 120 is provided on the surface of the substrate 110, and a diamond-like carbon film 130 is provided on the surface of the underlayer 120. Among them, the substrate 110 can be glass or transparent ceramic, and the underlayer 120 is mainly silicon dioxide (SiO2 ) layer, the diamond-like carbon film 130 can be one or more layers. The hardness of this cover plate 100 is relatively low, and the Mohs hardness can reach 6, but it cannot reach 7.

[0060] Reference Figure 2 , Figure 2 shows a schematic structural diagram of a cover plate of some other embodiments. As Figure 2 shown, the cover plate 200 includes a substrate 210, a primer layer 220 is provided on the surface of the substrate 210, and a tetrahedral amorphous carbon layer 230 (tetrahedral amorphous carbon, ta-C), which is also a kind of diamond-like carbon, is provided on the surface of the primer layer 220. A nitride protection layer 240 is provided on the surface of the tetrahedral amorphous carbon layer 230. By means of the nitride protection layer 240, the tetrahedral amorphous carbon is prevented from contacting with oxygen atoms, thereby reducing the hardness of the tetrahedral amorphous carbon and then increasing the hardness. However, the Mohs hardness of the cover plate 200 with this structure only reaches 7, and the load is 500 g. Moreover, the transmittance of this cover plate 200 is relatively poor, and the transmittance can only reach 80-90%.

[0061] It should be noted that the cover plates in the above embodiments can be understood as ordinary glass or ceramic glass. For example, ordinary glass is subjected to special treatment on its surface through chemical or physical processes, such as depositing SiO 2 layer, diamond-like carbon layer, etc., and the obtained glass sheet can also be understood as glass after special treatment.

[0062] Due to the general hardness (Mohs hardness and Vickers hardness) of the cover plates in the above embodiments (such as Figure 1 and Figure 2 shown cover plates) and relatively low transmittance. Therefore, the embodiments of the present application provide a cover plate to solve the problem of the conflict between the high hardness and high transmittance of the cover plate. The cover plate is provided with an optical antireflection layer, and the optical antireflection layer is used to offset the problem of reduced transmittance due to the relatively thick thickness of the superhard layer, so as to ensure the overall hardness of the cover plate while ensuring the transmittance of the cover plate, that is, effectively solve the problem of the conflict between the high hardness and high transmittance of the cover plate.

[0063] The cover plates in the embodiments of the present application can be applied to fields such as electronic devices and buildings. Among them, the electronic devices can include but are not limited to tablet mobile phones, foldable mobile phones, tablet personal computers, e-book readers, laptop computers, personal digital assistants (PDAs), personal computers, notebooks, in-vehicle devices, wearable devices (such as watches, bracelets), speakers, headphones and other electronic devices.

[0064] In some scenarios, the cover plate of the embodiments of the present application can be applied to various components and modules of an electronic device. Here, a mobile phone and a watch are taken as examples of the electronic device for illustration.

[0065] Refer to Figure 3A and Figure 3B , Figure 3A which shows an application scenario diagram of the cover plate. Figure 3B This is another application scenario of the cover plate of the embodiments of the present application. As Figure 3A shown, the cover plate can be applied to the mobile phone 10 as part of the display screen 11, part of the camera module, or the camera back cover 12, or can also be used as the back cover of the mobile phone (also known as the battery cover), or part of the button 14, or the side wall protective shell 15. In addition, it can also be used as the cover plate 21 or the display screen of the watch face of the watch 20 as shown in Figure 3B . In some embodiments, it can also be applied to other devices or fields, and the embodiments of the present application will not list them one by one.

[0066] The following describes the cover plate of the embodiments of the present application with reference to the accompanying drawings.

[0067] Refer to Figure 4 , Figure 4 which shows a schematic structural diagram of the cover plate of the embodiments of the present application. As Figure 4 shown, the cover plate 300 includes a transparent substrate 310, and a primer layer 320, at least one optical antireflection layer 330 (the first optical antireflection layer), and a superhard layer 340 that are sequentially disposed on the surface of the transparent substrate. Among them, the optical antireflection layer 330 can improve the transmittance of the cover plate, and the superhard layer 340 can improve the hardness of the cover plate 300. Since the hardness of the cover plate 300 is closely related to the thickness of the superhard layer 340, increasing the thickness of the superhard layer 340 helps to improve the hardness of the cover plate 300. However, when the thickness of the superhard layer 340 increases, the overall transmittance of the cover plate 300 will be reduced. Therefore, when increasing the thickness of the superhard layer 340 to improve the hardness of the cover plate 300, setting multiple optical antireflection layers 330 can effectively improve the transmittance of the cover plate 300. In addition, since the optical antireflection layer 330 can increase the thickness of the superhard layer 340 when the number of layers increases, this can not only improve the transmittance of the cover plate 300, but also improve the hardness of the cover plate 300.

[0068] It should be noted that in the actual process of preparing the cover plate 300, the number of layers of the optical antireflection layer 330 and the thickness of the superhard layer 340 with reasonable thickness can be reasonably set according to the actual requirements for the transmittance and hardness of the cover plate. In the embodiments of the present application, the thickness of the superhard layer and the number of layers of the optical antireflection layer are not limited.

[0069] In an embodiment of the present application, each optical antireflection layer 330 can be subdivided into two-layer structures with different refractive indices. By utilizing the principle that the refraction angle and direction of light change in substances with different refractive indices, the gray parts existing between the layers can be offset, thereby improving the transmittance. In this way, through the different refractive index differences between the layers, the transmittance of the cover plate 300 can be increased as much as possible under the condition of limited thickness.

[0070] Reference is made below to Figure 5 , Figure 5 which shows a schematic structural diagram of a cover plate corresponding to an optical antireflection layer with a two-layer structure according to an embodiment of the present application. As Figure 5 shown, the cover plate 300 includes a transparent substrate 310, an underlayer 320, an optical antireflection layer 330, and a superhard layer 340. Among them, the transparent substrate 310 can be ordinary glass or transparent ceramic. The underlayer can be deposited on the surface of the transparent substrate through processes such as deposition, so as to better protect the ordinary glass and at the same time facilitate the deposition of other layers. The optical antireflection layer is used to improve the transmittance of the cover plate, so that the transmittance of the entire cover plate is greatly improved. The superhard layer 340 is used to increase the hardness of the cover plate 300. The structures, component compositions, and action principles of each layer will be described below with reference to the accompanying drawings.

[0071] As Figure 5 shown, the optical antireflection layer 330 can include a first sub-antireflection layer 331 and a second sub-antireflection layer 332. The first sub-antireflection layer 331 and the second sub-antireflection layer 332 are components of the optical antireflection layer. Among them, the refractive index (first refractive index) of the first sub-antireflection layer 331 is greater than the refractive index (second refractive index) of the second sub-antireflection layer 332, or the refractive index of the first sub-antireflection layer 331 is less than the refractive index of the second sub-antireflection layer 332. This layer structure formed by combining high and low refractive indices enables the optical antireflection layer to have better transmittance.

[0072] In addition, the first sub-antireflection layer 331 can include nitrides of silicon or aluminum, and the second sub-antireflection layer 332 can include oxides or oxynitrides of silicon or aluminum. Or, the first sub-antireflection layer 331 can include oxides of silicon or aluminum, and the second sub-antireflection layer 332 can include nitrides of silicon or aluminum. Since the refractive index of the silicon or aluminum nitride layer is higher than that of the silicon or aluminum oxide or oxynitride layer, and the compounds of silicon and aluminum have a certain hardness, the cover plate with such a structure not only has better transmittance but also has higher hardness.

[0073] In an embodiment of the present application, the difference between the first refractive index and the second refractive index is greater than 0.3. This difference value can satisfy that the cover plate can have better transmittance under the condition that the sub-antireflection layer is relatively thin, which is beneficial to controlling the overall thickness of the cover plate.

[0074] In an embodiment of the present application, the first anti-reflection layer may be silicon nitride, aluminum nitride or silicon oxynitride, and the second sub anti-reflection layer may be silicon oxide, aluminum oxide, silicon oxynitride or aluminum oxynitride. Among them, the optical anti-reflection layer 330 may include two or more layers of silicon nitride layer and silicon oxide, or may include two or more layers of silicon nitride and silicon oxynitride, or may include two or more layers of silicon nitride and aluminum oxide, etc. Thus, an optical anti-reflection layer with multiple different transmittances is formed. The optical anti-reflection layer obtained by combining two substances with different transmittances has better transmittance and higher hardness.

[0075] In an embodiment of the present application, the Vickers hardness of the material of the first sub anti-reflection layer of the first optical anti-reflection layer may be greater than 1500 HV, and the Vickers hardness of the material of the second sub anti-reflection layer may be greater than 900 HV. Such materials are beneficial to improving the overall hardness of the cover plate.

[0076] In some embodiments, the first optical anti-reflection layer 330 may be silicon oxide, and the second sub anti-reflection layer 332 may be silicon nitride. In other embodiments, the first sub anti-reflection layer 331 may also be silicon nitride, and the second sub anti-reflection layer 332 may be silicon oxide. In addition, the first sub anti-reflection layer 331 may also be one of aluminum nitride, aluminum oxide, silicon oxynitride and aluminum oxynitride, and the corresponding second sub anti-reflection layer 332 may be one of aluminum nitride, aluminum oxide, silicon oxynitride and aluminum oxynitride, so as to make a reasonable selection according to different refractive indexes.

[0077] The present application does not limit the arrangement order of the two. When the optical anti-reflection layer is a multi-layer structure, it is equivalent to the alternating superposition of silicon oxide and silicon nitride, so as to obtain an optical anti-reflection layer with a structure of 2 layers, 3 layers, 4 layers or more layers. In this way, the transmittance of the optical anti-reflection layer can be improved through the principles of light refraction and interference. The specific principle can refer to the explanation of the prior art, and the present application will not elaborate on this.

[0078] In some embodiments, the cover plate may further include a single-layer optical anti-reflection layer (second optical anti-reflection layer) with a one-layer structure. This single-layer optical anti-reflection layer may only include one sub anti-reflection layer (third sub anti-reflection layer). The material of this sub anti-reflection layer may be the same as the materials of the above-mentioned first sub anti-reflection layer 331 and second sub anti-reflection layer 332, and form a setting mode with different refractive indexes of high and low with the sub anti-reflection layers of other adjacent layers to improve the transmittance of the optical anti-reflection layer. The present application does not uniquely limit whether the optical anti-reflection layer has an odd or even number of overall layout layers.

[0079] In the embodiments of the present application, the thickness of the optical antireflection layer 330 can be set between 100 nm and 1000 nm. For example, it can be 200 nm, 300 nm, 400 nm, 500 nm, 600 nm, 700 nm, 800 nm, or 900 nm, etc. In some embodiments, the thickness of the optical antireflection layer 330 can be set between 200 nm and 500 nm, such as 250 nm, 350 nm, or 450 nm, etc. The optical antireflection layer 330 with such a thickness can meet the user's requirements for the transmittance of the cover plate and will not have a great impact on the overall thickness of the cover plate 300.

[0080] In some embodiments of the present application, the superhard layer 340 can include at least one layer of diamond-like carbon film layer. The diamond-like carbon film is a thin film with properties close to natural diamond, having a hardness close to that of natural diamond and a high light transmittance within a relatively wide spectrum, which is beneficial to improving the hardness of the cover plate.

[0081] In the embodiments of the present application, the diamond-like carbon film layer can include at least one of amorphous carbon (α-C), tetrahedral amorphous carbon (ta-C), hydrogen-doped amorphous carbon (α-C:H), non-metal-doped amorphous carbon (α-C:X, X = Si, N, B), and non-metal-doped tetrahedral amorphous carbon. The superhard layer of these materials has a relatively high hardness.

[0082] It should be noted that as Figure 5 shown, when the superhard layer 340 is a single layer, it can be any one of the above amorphous carbons. When the superhard layer 340 is multiple layers, it can be a superhard layer with a multi-layer structure obtained by superimposing one of the above amorphous carbons with another substance. For example, the superhard layer can be formed by superimposing two or more of the thin film layers of amorphous carbon (α-C), tetrahedral amorphous carbon (ta-C) thin film layer, and hydrogen-doped amorphous carbon (α-C:H) thin film layer. The present application does not limit the specific number of layers.

[0083] In the embodiments of the present application, the thickness of the superhard layer 340 can be between 5 nm and 50 nm. For example, 10 nm, 20 nm, 30 nm, or 40 nm, etc. In some embodiments, the thickness of the superhard layer 340 is between 5 - 20 nm. For example, 8 nm, 10 nm, 13 nm, 15 nm, or 18 nm, etc. The superhard layer 340 with such a thickness can meet the hardness requirements of the cover plate 300. For example, the Mohs hardness can reach above 7 and the load is above 1000 g.

[0084] In the embodiments of the present application, the underlayer 320 can include silicon oxide (SiO X ), such as SiO 2 , and silicon oxynitride (SiOxNy), such as SiON, etc., one or both of them.

[0085] In an embodiment of the present application, the thickness of the underlayer 320 can be between 2 nm and 30 nm. This thickness provides good support for the overall cover plate 300 and is relatively moderate.

[0086] In an embodiment of the present application, the transparent substrate 310 can be ordinary glass, transparent glass-ceramics, or transparent ceramics, etc.

[0087] In some application scenarios, for example, in the use scenarios of mobile phones, computer displays, cameras, or back covers, etc., in order to improve the touch experience of the cover plate, a hydrophobic layer is usually provided on the outermost layer of the cover plate. The hydrophobic layer has strong hydrophobicity and functions such as anti-oil and anti-fingerprint, which can improve the user experience. However, in some solutions, a silicon oxide intermediate layer and a hydrophobic layer are directly provided on the surface of the diamond-like carbon, which will cause the hardness of the diamond-like carbon to decrease, thereby reducing the hardness of the entire cover plate. Without wishing to be bound by any particular theory, the diamond-like carbon film layer will oxidize at high temperatures, affecting its performance. Similarly, if an oxide layer is directly deposited adjacent to the diamond-like carbon film layer, when experiencing some high-temperature scenarios, the oxygen in the oxide layer will also diffuse into the diamond-like carbon layer, causing the diamond-like carbon film layer to oxidize, resulting in a decrease in its performance, and further affecting the overall hardness of the cover plate.

[0088] To further solve the influence of the hydrophobic layer on the hardness of the entire cover plate, in an embodiment of the present application, a transition layer is further provided between the superhard layer (such as Figure 4 the superhard layer 340 therein) and the hydrophobic layer. The transition layer is used to isolate the oxide layer from direct contact with the superhard layer, thereby preventing the superhard layer from reacting with oxygen and causing a decrease in the hardness of the superhard layer. The cover plate of the embodiment of the present application will be further described in detail below in combination with the specific structure of the cover plate.

[0089] Referring to Figure 6 , Figure 6 shows a schematic structural diagram of a cover plate with a transition layer according to an embodiment of the present application. As Figure 6 shown, the cover plate 300 includes a transparent substrate 310, an underlayer 320, an optical antireflection layer 330, a superhard layer 340, and a transition layer 350 and a hydrophobic layer 360 provided on the surface of the superhard layer 340. Among them, the transition layer 350 is provided between the superhard layer 340 and the hydrophobic layer 360. Among them, the transition layer 350 at least includes a nitride layer. Since the nitride layer does not contain oxygen elements, it will not generate C-O bonds with the superhard layer and reduce the hardness of the superhard layer. The nitride layer plays a good isolation role between the superhard layer and the hydrophobic layer, which is beneficial to protecting the superhard layer and stabilizing the overall hardness of the cover plate.

[0090] It should be noted that Figure 6 the transparent substrate 310, the underlayer 320, the optical antireflection layer 330, and the superhard layer 340 in the cover plate described inFigure 4 The structures, compositions, and functions in the cover plate are the same as those described above, and will not be elaborated here.

[0091] Refer to 7, Figure 7 Fig. 6 shows a schematic structural view of the cover plate when the transition layer of the embodiment of the present application has a two-layer structure. As Figure 7 shown, the transition layer 350 includes a silicon oxide layer 351 and a nitride layer 352. Among them, the nitride layer 352 is disposed adjacent to the superhard layer 340, and the silicon oxide layer 351 is disposed adjacent to the hydrophobic layer 360. Since the silicon in the silicon oxide layer 351 and the oxygen in the hydrophobic layer 360 will form Si-O bonds, the adhesion of the hydrophobic layer can be improved, and the friction resistance of the hydrophobic layer 360 can be effectively improved. Furthermore, the wear resistance of the cover plate 300 is such that it can withstand more than 5000 eraser rubs and more than 5000 steel wool rubs. Even the friction resistance can withstand more than 10000 eraser rubs and more than 10000 steel wool rubs.

[0092] As a comparison, in some embodiments, we take depositing only silicon oxide in the transition layer as a comparative scheme. This scheme has good initial hardness and wear resistance, but after some environmental tests, such as after 10 days of high-temperature and high-humidity tests, both the hardness and wear resistance have decreased significantly, while the embodiment scheme in which the transition layer includes a nitride layer and a silicon oxide layer has no problem of performance degradation. Specifically, see the following comparative examples.

[0093] In some embodiments, the nitride layer 352 includes silicon nitride, aluminum nitride, and silicon aluminum nitride. The transition layer 350 with this composition can not only protect the superhard layer 340, but also has a relatively high hardness itself, avoiding affecting the overall hardness of the cover plate.

[0094] Since the thickness of the transition layer 350 should not be too thick, as too thick will affect the overall hardness of the cover plate 300. Therefore, in some embodiments, the thickness of the transition layer 350 can be between 1 nm and 20 nm. For example, 3 nm, 5 nm, 8 nm, 10 nm, 13 nm, 15 nm, or 18 nm, etc. In some embodiments, the thickness of the transition layer 350 is between 2 nm and 5 nm. For example, 2.5 nm, 3 nm, 3.5 nm, 4 nm, or 4.5 nm, etc. The transition layer 350 with this thickness not only isolates the hydrophobic layer 360 and the superhard layer 340, but also does not affect the hardness of the cover plate due to the excessive thickness of the transition layer 350.

[0095] In some embodiments, the thickness of the hydrophobic layer 360 can be 10 - 50 nm, for example, 15 nm, 20 nm, 25 nm, 30 nm, 35 nm, 40 nm, or 45 nm, etc. Preferably, the thickness of the hydrophobic layer 360 is 20 - 40 nm, for example, 22 nm, 24 nm, 26 nm, or 28 nm, etc. This thickness can achieve a good hydrophobic effect. After being abraded by steel wool for more than 10,000 times, the friction-receiving water droplet angle can still be greater than 100°.

[0096] The average transmittance of the cover plate 300 according to the embodiments of the present application is greater than 88% under the condition that the visible light wavelength is 400 - 700 nm, and the transmittance is greater than 88% under the condition that the visible light wavelength is 940 nm. Hardness test: The Mohs hardness of the cover plate is 7, and the load is 1000 g. Abrasion resistance test: The number of times the cover plate 300 can withstand eraser abrasion reaches more than 10,000 times, the number of times it can withstand steel wool abrasion reaches more than 10,000 times, and the friction-receiving water droplet angle is greater than 100°. Dynamic friction coefficient test: The dynamic friction coefficient of the cover plate 300 is less than 0.05, and even less than 0.03.

[0097] Reference Figure 8 , Figure 8 shows another schematic structural diagram of the cover plate according to the embodiments of the present application. Compared with Figure 6 , this cover plate does not have an optical antireflection layer (such as the optical antireflection layer 330 in Figure 6 ). As shown in Figure 8 , the cover plate 300 includes a transparent substrate 310, and a primer layer 320, a superhard layer 340, a transition layer 350, and a hydrophobic layer 360 that are sequentially arranged on the surface of the transparent substrate 310. Among them, the structures and component compositions of the transparent substrate 310, the primer layer 320, the superhard layer 340, the transition layer 350, and the hydrophobic layer 360 correspond to those of the respective layers described in Figure 6 , and specifically, reference can be made to the description of the corresponding layers in Figure 6 , which will not be elaborated here.

[0098] Since the transition layer 350 is provided between the hydrophobic layer 360 and the superhard layer 340 in the cover plate 300 according to the embodiments of the present application, the superhard layer 340 can be better protected, which is beneficial to improving the hardness of the cover plate 300.

[0099] Combined with Figure 6 shown, when the transition layer 350 is set to a two-layer structure, the abrasion resistance test results of the cover plate 300 are as follows: The number of times the cover plate can withstand eraser abrasion reaches more than 10,000 times, the number of times it can withstand steel wool abrasion reaches more than 10,000 times, and the friction-receiving water droplet angle is greater than 100°.

[0100] The cover plate and the preparation method according to the embodiments of the present application will be further described below with specific embodiments.

[0101] The following first describes the test methods adopted in each embodiment:

[0102] Test method for hardness: Use a Mohs hardness pen and an automatic hardness tester for the device. Apply a certain load, with a loading angle of 45°, a moving speed of 4 - 6 mm / s, and a scratch length of 6 - 7 cm for each scratch. After the test, visually or observe under a microscope magnified 100 times to check if there are scratches on the cover plate.

[0103] Test method for abrasion resistance: Use an eraser (diameter 6 mm) or #0000 steel wool (indenter area 10 * 10 mm), a load of 1000 g, a speed of 40 cycle / min, a test stroke of 40 mm. On the coated surface of the cover plate, after reciprocating the test a certain number of times, measure the water contact angle through a water contact angle tester.

[0104] Test method for dynamic friction coefficient: The test instrument is MXD - 02, with a load of 200 g. Fix the test sample, and after the instrument starts, record the data generated by the movement of the load solid.

[0105] Example 1:

[0106] 1) Use transparent glass - ceramic as the substrate. Put the cleaned glass into a multi - chamber magnetron sputtering coating machine. After the coating machine pumps the vacuum to 5E - 3 Pa, use an ion source to further clean the surface of the substrate. The power of the ion source is 1 - 2 kW, and the gases oxygen, argon - oxygen mixture, and argon are used for segmented cleaning treatment for 10 - 30 min.

[0107] 2) Use high - purity Si target as the target material, argon as the sputtering gas, O 2 and N 2 as the reaction gases, and deposit the bottom - layer SiO 2 and multi - layer optical antireflection layers SiN and SiO 2 by reactive sputtering.

[0108] 3) Then, use high - purity graphite target as the target material, argon as the sputtering gas, and N 2 as the reaction gas to deposit the super - hard C layer.

[0109] 4) Then, deposit the Si 3 N 4 and SiO 2 transition layer.

[0110] 5) Finally, deposit the hydrophobic layer by evaporation to obtain the cover plate S1.

[0111] Comparative example: Corresponding to Example 1, when depositing the transition layer, only the SiO 2 layer was deposited, and the preparation processes of the other layers were the same as those in the steps of Example 1 to obtain the cover plate sample R1.

[0112] Among them, the thicknesses of the layers in the cover plate S1 and the cover plate R1 are set as shown in Table 1:

[0113] Table 1 Composition and thickness of each layer corresponding to sample S1

[0114]

[0115]

[0116] The cover plate S1 and the cover plate R1 are tested, and the test results are as follows:

[0117] Reference Figure 9 , Figure 9 shows a curve graph of the transmittance of the cover plate S1 of the present application varying with the wavelength. As Figure 9 shown, the transmittance of the cover plate S1 has an average transmittance of 94.3% when the wavelength is 400 - 700 nm, and a transmittance of 91.3% at 940 nm.

[0118] First, the initial properties of the cover plate S1 and the cover plate R1 are tested.

[0119] The initial hardness data of the cover plate S1 and the cover plate R1 measured by the above hardness test method: Mohs hardness is 7, and the load is 1000 g.

[0120] The friction resistance data of the cover plate S1 and the cover plate R1 measured by the above friction resistance test method: after 10,000 times of rubber friction, the water contact angle is greater than 100°, and after 10,000 times of steel wool friction, the water contact angle is greater than 100°. The dynamic friction coefficient of the cover plate S1 measured by the above dynamic friction coefficient test method is 0.015 - 0.025.

[0121] Secondly, the cover plate S1 and the cover plate R1 are subjected to a temperature chamber test.

[0122] The cover plate S1 and the cover plate R1 are placed in a temperature chamber with a humidity of 85 and a temperature of 85 °C for 10 days and then taken out, and the properties of the cover plate S1 and the cover plate R1 are measured again. The cover plate S1 can maintain the initial hardness and the number of wear-resistant times, but the hardness of the cover plate R1 drops to Mohs hardness 6, the load is 750 g, and the rubber eraser wear resistance and the steel wool wear resistance can only pass 4000 times and 3000 times respectively. The hardness and friction resistance performance of the cover plate R1 are significantly unstable. Therefore, the cover plate S1 in this embodiment has good hardness and friction resistance performance, and the hardness and the number of wear-resistant times can still maintain the original measurement data after being tested under high temperature and high humidity, with high temperature resistance, high humidity resistance, and stronger stability.

[0123] Example 2

[0124] Compared with Example 1, the main differences are as follows: the thickness of the sub-anti-reflection layer in the optical anti-reflection layer is adjusted, and the number of layers and thickness of the super-hard layer are increased. The specific preparation process is as follows:

[0125] 1) Use transparent glass-ceramics as the substrate. Put the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine pumps the vacuum to 5E-3 Pa, use the ion source to further clean the surface of the substrate. The power of the ion source is 1-2 kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning treatment for 10-30 minutes.

[0126] 2) Use high-purity Si target as the target material, use argon as the sputtering gas, O 2 and N 2 as the reaction gases, and deposit the bottom layer SiO 2 and the multi-layer optical anti-reflection layer Si 3 N 4 and SiO 2 by reactive sputtering.

[0127] 3) Then, use high-purity graphite target and silicon-doped graphite target as the target materials respectively, use argon as the sputtering gas, and use N 2 as the reaction gas to deposit the super-hard C layer.

[0128] 4) Then, deposit the Si 3 N 4 and SiO 2 transition layer.

[0129] 5) Finally, deposit the hydrophobic layer by evaporation to obtain the cover plate S2.

[0130] Among them, the thickness settings of each layer in the cover plate S2 are shown in Table 2:

[0131] Table 2 Compositions and thicknesses of each layer corresponding to the cover plate S2

[0132]

[0133]

[0134] Test the cover plate S2, and the test results are as follows:

[0135] Refer to Figure 10 , Figure 10 which shows the curve of the transmittance of the cover plate S2 of the present application changing with the wavelength. As Figure 10 shown, the transmittance of the cover plate S2 has an average transmittance of 92.8% when the wavelength is 400-700 nm and a transmittance of 92.7% at 940 nm.

[0136] The hardness data of the cover plate S2 measured by the above hardness test method: Mohs hardness is 7, and the load is 1200 g.

[0137] The friction resistance data of the cover plate S2 measured by the above friction resistance test method: after 10,000 times of rubber friction, the water contact angle is greater than 100°; after 10,000 times of steel wool friction, the water contact angle is greater than 100°.

[0138] The dynamic friction coefficient of the cover plate S2 measured by the above dynamic friction coefficient test method is 0.015 - 0.025.

[0139] It can be seen that compared with the cover plate S1 and the cover plate S2, after the thickness of the superhard layer is increased, the hardness data is improved. And after the thickness of the optical antireflection layer is adjusted accordingly, the transmittance is still very high, that is, the average transmittance at a wavelength of 400 - 700 nm is 92.8%, and the transmittance at 940 nm is 91.3%.

[0140] Example 3

[0141] The main difference between Example 3 and Example 1 and Example 2 is that: the thickness and number of sub - antireflection layers in the optical antireflection layer are increased, and the thickness of the superhard layer is increased.

[0142] 1) Use transparent glass - ceramic as the substrate, put the cleaned glass into a multi - chamber magnetron sputtering coating machine. After the coating machine pumps the vacuum to 5E - 3 Pa, use an ion source to further clean the surface of the substrate. The ion source power is 1 - 2 kW, and the gases oxygen, argon - oxygen mixture and argon are used for segmented cleaning treatment for 10 - 30 min.

[0143] 2) Use high - purity Si target as the target material, use argon as the sputtering gas, O 2 and N 2 as the reaction gases, and deposit the bottom layer SiO 2 and the multi - layer optical antireflection layer Si 3 N 4 and SiO 2 .

[0144] 3) Then, deposit the superhard C layer by filtered cathodic vacuum arc technology.

[0145] 4) Then, deposit the Si 3 N 4 and SiO 2 transition layer by magnetron sputtering.

[0146] 5) Finally, deposit the hydrophobic layer by evaporation to obtain the cover plate S3.

[0147] Among them, the thickness settings of each layer in the cover plate S3 are shown in Table 3:

[0148] Composition and Thickness of Each Layer Corresponding to Cover Plate S3 in Table 3

[0149]

[0150]

[0151] The cover plate S3 was tested, and the test results are as follows:

[0152] Reference Figure 11 , Figure 11 shows a curve graph of the transmittance of the cover plate S3 of the present application varying with the wavelength. As Figure 11 shown, for the cover plate S3, the average transmittance at a wavelength of 400 - 700 nm is 91.5%, and the transmittance at 940 nm is 89.9%.

[0153] The hardness data of the cover plate S3 measured by the above hardness test method: Mohs hardness is 7, and the load is 1500 g.

[0154] The friction resistance data of the cover plate S3 measured by the above friction resistance test method: after 10,000 times of rubber friction, the water contact angle is greater than 100°, and after 10,000 times of steel wool friction, the water contact angle is greater than 100°.

[0155] The dynamic friction coefficient of the cover plate S3 measured by the above dynamic friction coefficient test method is 0.015 - 0.025.

[0156] Combining Table 3 and the test results of the cover plate S3, it can be seen that: when the thickness of the superhard layer increases, by increasing the number of layers of the optical antireflection layer, not only the hardness of the cover plate S3 can be effectively improved, but also a relatively high transmittance can still be maintained.

[0157] Example 4

[0158] The main difference between Example 4 and Example 1 is that the transition layer is set to be a single layer of Si 3 N 4 .

[0159] 1) Use transparent glass-ceramics as the substrate. Put the cleaned and clean glass into a multi-chamber magnetron sputtering coating machine. After the coating machine evacuates to 5E-3 Pa, use an ion source to further clean the surface of the substrate. The ion source power is 1 - 2 kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning treatment for 10 - 30 min.

[0160] 2) Use a high-purity Si target as the target material, use argon as the sputtering gas, O 2 and N 2 as the reaction gases, and deposit the bottom layer SiO by reactive sputtering2 and the multi-layer optical antireflection layer Si 3 N 4 and SiON.

[0161] 3) Next, deposit the super-hard C layer by filtered cathodic vacuum arc technology.

[0162] 4) Then, deposit the Si 3 N 4 transition layer by magnetron sputtering.

[0163] 5) Finally, deposit the hydrophobic layer by evaporation to obtain the cover plate S4.

[0164] Among them, the thicknesses of the layers in the cover plate S4 are set as shown in Table 4:

[0165] Table 4 Compositions and Thicknesses of the Layers Corresponding to the Cover Plate S4

[0166]

[0167] Test the cover plate S4, and the test results are as follows:

[0168] The average transmittance of the cover plate S4 at wavelengths of 400 - 700 nm is 92.6%, and the transmittance at a wavelength of 940 nm is 90.4%.

[0169] The Mohs hardness of the cover plate S4 measured by the above hardness test method is 7, and the load is 1500 g.

[0170] After the cover plate S4 is rubbed 7500 times with rubber measured by the above friction resistance test method, the water contact angle is greater than 100°. After being rubbed 7500 times with steel wool, the water contact angle is greater than 100°.

[0171] The dynamic friction coefficient of the cover plate S4 measured by the above dynamic friction coefficient test method is 0.015 - 0.025.

[0172] Combining Table 4 and the test results of the cover plate S4, it can be seen that: when the transition layer is only Si 3 N 4 , the friction resistance times of the cover plate S4 decrease slightly, but the hardness is at a relatively high level. The slight decrease in the friction resistance times is because compared with Si 3 N 4 , SiO 2 can combine better with the hydrophobic layer, thereby improving the bonding force between the hydrophobic layer and the transition layer, making the friction resistance ability better.

[0173] Example 5

[0174] Compared with Example 4, in Example 5, the transition layer is replaced with AlN, and the number of optical antireflection layers is increased.

[0175] 1) Use transparent glass-ceramics as the substrate. Put the cleaned glass into a multi-chamber magnetron sputtering coating machine. After the coating machine evacuates to 5E-3 Pa, use an ion source to further clean the surface of the substrate. The ion source power is 1-2 kW, and the gases oxygen, argon-oxygen mixture, and argon are used for segmented cleaning treatment for 10-30 minutes.

[0176] 2) Use high-purity Si and Al targets as the target materials, use argon as the sputtering gas, 2 O 2 and N 2 as the reaction gases, and deposit the bottom layer SiO 2 O 3 and multiple layers of optical antireflection layers AlN and Al

[0177] by reactive sputtering.

[0178] 3) Then, deposit the superhard C layer by filtered cathodic vacuum arc technology.

[0179] 4) Then, deposit the AlN transition layer by magnetron sputtering.

[0180] 5) Finally, deposit the hydrophobic layer by evaporation to obtain the cover plate S5.

[0181] Among them, the thickness settings of each layer in the cover plate S5 are shown in Table 5:

[0182]

[0183] Test the cover plate S5, and the test results are as follows:

[0184] The average transmittance of the cover plate S5 at a wavelength of 400-700 nm is 91.4%, and the transmittance at 940 nm is 91.6%.

[0185] The Mohs hardness of the cover plate S5 measured by the above hardness test method is 7, and the load is 1500 g.

[0186] After the cover plate S5 is rubbed 7500 times with a rubber eraser by the above friction resistance test method, the water contact angle is greater than 100°. After being rubbed 7500 times with steel wool, the water contact angle is greater than 100°.

[0187] The dynamic friction coefficient of the cover plate S5 measured by the above dynamic friction coefficient test method is 0.015-0.025.

[0188] Combined with the test results of Table 5 and the cover plate S5, it can be seen that after the transition layer is replaced with AlN, the hardness and friction resistance of the cover plate S5 are comparable to those of the cover plate S5, indicating that the transition layer can adopt aluminum-containing compounds or silicon-containing compounds, both of which can keep the cover plate with high hardness. In addition, the increase in the number of optical antireflection layers makes the transmittance higher at a wavelength of 940 nm, and the transmittance can reach 91.6%.

[0189] In summary, for the cover plate of the embodiment of the present application, the average transmittance at a wavelength of 400 - 700 nm can reach over 90.0%, the transmittance at 940 nm can also reach over 90.0%, the Mohs hardness is 7, and the load can be 1500 g. For the friction resistance data, after 10,000 times of rubber friction, the water contact angle is greater than 100°, and after 10,000 times of steel wool friction, the water contact angle is greater than 100°. Such a cover plate can meet the high requirements of users for the transmittance and hardness of the cover plate.

[0190] In addition, some embodiments of the present application also disclose a module, which can be a display module or a camera module. The display screen or lens cover plate of these modules can include the cover plate explained in FIG. 3 of the above embodiments - Figure 7 The cover plate explained. Such a module has high transmittance and hardness.

[0191] Some embodiments of the present application also disclose an electronic device, including the cover plate 300 explained in the above embodiments - Figures 4 - 8 The cover plate explained. The electronic device can be a mobile phone or a watch as shown in FIG. 3, or other electronic devices such as a computer, a tablet, a vehicle-mounted device or a smart bracelet, etc. The present application does not limit the type of the electronic device.

[0192] Among them, the specific structure and preparation method of the cover plate can refer to the description of the above embodiments, which will not be elaborated here. This electronic device has good light transmittance, hardness, etc.

[0193] It should be noted that the ratios of raw materials and the preparation process not mentioned above can refer to the prior art and will not be elaborated here.

[0194] It should be understood that in various embodiments of the present application, the magnitudes of the serial numbers of the above processes do not mean the order of execution. Some or all of the steps can be executed in parallel or sequentially. The execution order of each process should be determined according to its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present application.

[0195] Although the present application has been illustrated and described by referring to some preferred embodiments of the present application, those of ordinary skill in the art should understand that various changes can be made in form and details without departing from the spirit and scope of the present application.

Claims

1. A cover plate, characterized in that, it includes a transparent substrate, and a primer layer, at least one first optical antireflection layer and a superhard layer are sequentially provided on the surface of one side of the transparent substrate; the first optical antireflection layer includes a first sub-antireflection layer and a second sub-antireflection layer, the first sub-antireflection layer has a first refractive index, the second sub-antireflection layer has a second refractive index, and the first refractive index is different from the second refractive index.

2. The cover plate according to claim 1, characterized in that, the first sub-antireflection layer is a compound containing silicon or aluminum, and the second sub-antireflection layer is a compound containing silicon or aluminum.

3. The cover plate according to claim 1, characterized in that, the first sub-antireflection layer or the second sub-antireflection layer contains at least one of silicon nitride, aluminum nitride, silicon oxide, aluminum oxide, silicon oxynitride and aluminum oxynitride.

4. The cover plate according to any one of claims 1-3, characterized in that, the Vickers hardness of the material of the first sub-antireflection layer of the first optical antireflection layer is greater than 1500HV, and the Vickers hardness of the material of the second sub-antireflection layer is greater than 900HV.

5. The cover plate according to any one of claims 1-3, characterized in that, a transition layer and a hydrophobic layer are provided on the surface of the superhard layer, wherein the transition layer is provided between the superhard layer and the hydrophobic layer; the transition layer includes a nitride layer, and the nitride layer is close to the superhard layer.

6. The cover plate according to claim 5, characterized in that, the transition layer further includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer.

7. The cover plate according to claim 5 or 6, characterized in that, the nitride layer includes silicon nitride, aluminum nitride, silicon aluminum nitride and aluminum oxynitride.

8. The cover plate according to claim 5, characterized in that, the thickness of the transition layer is between 1nm and 20nm.

9. The cover plate according to claim 5, characterized in that, it further includes at least one second optical antireflection layer, the second optical antireflection layer includes a third sub-antireflection layer, and the refractive index between the third sub-antireflection layer and the adjacent first sub-antireflection layer or the second sub-antireflection layer is different.

10. The cover plate according to any one of claims 1-9, characterized in that, the superhard layer includes at least one diamond-like carbon film layer.

11. The cover plate according to claim 10, characterized in that, the superhard layer contains at least one of amorphous carbon, tetrahedral amorphous carbon, hydrogen-doped amorphous carbon, non-metal-doped amorphous carbon and non-metal-doped tetrahedral amorphous carbon.

12. The cover plate according to claim 8, characterized in that, the thickness of the first optical antireflection layer is between 100nm and 2000nm.

13. The cover plate according to claim 8, characterized in that, the thickness of the superhard layer is between 5nm and 50nm.

14. The cover plate according to any one of claims 1-13, characterized in that, the primer layer contains one or both of silicon oxide and silicon oxynitride.

15. The cover plate according to any one of claims 1-14, characterized in that, the thickness of the primer layer is between 2nm and 30nm.

16. The cover plate according to any one of claims 1-15, characterized in that, the transparent substrate is glass, transparent glass-ceramics or transparent ceramics.

17. The cover plate according to any one of claims 1-16, characterized in that, the average transmittance of the cover plate under the condition that the visible light wavelength is 400-700 nm is greater than 88%, and the transmittance under the condition that the visible light wavelength is 940 nm is greater than 88%.

18. The cover plate according to any one of claims 5-17, characterized in that, the Mohs hardness of the cover plate is 7 and the load is 1000 g.

19. The cover plate according to any one of claims 5-17, characterized in that, the eraser wear resistance times of the cover plate reach more than 5000 times, and the steel wool abrasion resistance times reach more than 5000 times.

20. The cover plate according to any one of claims 1-19, characterized in that, the dynamic friction coefficient of the cover plate is less than 0.

05.

21. The cover plate according to any one of claims 1-20, characterized in that, the difference between the first refractive index and the second refractive index is greater than 0.

3.

22. A cover plate, characterized in that, it includes a transparent substrate, and a primer layer, a superhard layer, a transition layer and a hydrophobic layer are sequentially arranged on the surface of one side of the transparent substrate, wherein the transition layer includes a nitride layer, and the nitride layer is adjacent to the superhard layer.

23. The cover plate according to claim 22, characterized in that, the transition layer further includes a silicon oxide layer, and the silicon oxide layer is close to the hydrophobic layer.

24. A module, characterized in that, it includes the cover plate according to any one of claims 1-21, or the cover plate according to claim 22 or 23, and the module is a display module or a camera module.

25. An electronic device, characterized in that, it includes the cover plate according to any one of claims 1-21, or the cover plate according to claim 22 or 23.

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