An apparatus for manufacturing an IGBT device with inner insulation

Abstract

The application relates to the technical field of semiconductor devices, in particular to a manufacturing device for an internally insulated IGBT device, which comprises a blocking chamber, the inner wall bottom of the blocking chamber is fixedly connected with a base, the top of the base is provided with a conveying caterpillar for conveying the IGBT device, a sliding column for emergency stop of the conveying caterpillar is arranged in the conveying caterpillar, one side of the conveying caterpillar is provided with a conveying assembly for overturning the IGBT device, one side of the conveying assembly is provided with a detection assembly for detecting the IGBT device, the IGBT device is conveyed through the conveying caterpillar, the overturning of the IGBT device is completed through the conveying assembly, and the gate trigger detection of the IGBT device is completed through the detection assembly.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device technology, and more specifically, to an apparatus for manufacturing an internally insulated IGBT device. Background Technology

[0002] IGBTs are power semiconductor devices that combine the high input impedance of MOSFETs and the low on-state voltage drop of GTRs. They possess the advantages of MOSFETs (high input impedance, low drive power, fast switching speed) and GTRs (low on-state voltage drop, high current carrying capacity, high withstand voltage). They are one of the core devices in the field of power electronics and are widely used in motor control, inverters, frequency converters, smart grids, electric vehicles, and many other fields, making them an important part of the power semiconductor market.

[0003] After the IGBT device is manufactured, it undergoes a packaging process. During the packaging process, the process involves cleaning, bonding, potting, curing, and finally forming the final shape. The device then needs to be transported by staff to other equipment for gate trigger testing and appearance inspection. This adds an extra step to the process and requires some manpower and time.

[0004] In view of this, we propose a manufacturing apparatus for internally insulated IGBT devices. Summary of the Invention

[0005] The purpose of this invention is to provide an apparatus for manufacturing an internally insulated IGBT device to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides a manufacturing apparatus for an internally insulated IGBT device, comprising a barrier chamber, a base fixedly connected to the bottom of the inner wall of the barrier chamber, a conveyor belt for conveying the IGBT device being disposed on the top of the base, a sliding column for emergency stopping the conveyor belt being disposed within the conveyor belt, a conveying assembly for flipping the IGBT device being disposed on one side of the conveyor belt, and a detection assembly for detecting the IGBT device being disposed on one side of the conveying assembly, wherein:

[0007] The IGBT device is transported by the conveyor belt, and the IGBT device is flipped using the conveyor assembly. At the same time, the gate trigger detection of the IGBT device is performed using the detection assembly.

[0008] Preferably, the barrier chamber has an inlet on one side and an outlet on the side away from the inlet. A square hole is formed at the top of the barrier chamber. The positions of the inlet and outlet correspond to the positions of the conveyor belts on both sides.

[0009] The surface of the conveyor belt is provided with partitions.

[0010] As a preferred embodiment of the present invention, the base has a support frame, a guard plate, a first support column and a second support column fixedly connected to its top. A first strip groove is formed on the inner side of the guard plate. The conveyor belt is arranged on the inner side of the guard plate. A plurality of second square holes are formed on the outer wall of the conveyor belt. A circular gear is arranged on the inner side of the conveyor belt. The rack of the circular gear is engaged with the plurality of second square holes.

[0011] As a preferred embodiment of the present invention, a transmission belt is provided on the inner side of the conveyor track, a connecting column is fixedly connected between the transmission belt and the conveyor track, and a first protruding column is fixedly connected to the outer side of the connecting column, the diameter of the first protruding column matching the width of the first strip groove.

[0012] As a preferred embodiment of the present invention, a sliding column is slidably connected to the inner side of the second support column, and a first spring is sleeved on the outer wall between the two ends of the sliding column and the second support column.

[0013] As a preferred embodiment of the present invention, the conveying assembly includes a No. 1 motor, the output end of the No. 1 motor is fixedly connected to a No. 1 rotating rod, the end of the No. 1 rotating rod away from the No. 1 motor is fixedly connected to a rotating connecting rod, one end of the rotating connecting rod is fixedly connected to a No. 2 protruding column, and the end of the rotating connecting rod away from the No. 2 protruding column is fixedly connected to a No. 1 sector-shaped component.

[0014] As a preferred embodiment of the present invention, the conveying assembly includes a first turntable, a second strip groove is formed on the side of the first turntable near the rotating connecting rod, the diameter of the second protrusion matches the width of the second strip groove, and a second sector member is fixedly connected to the first turntable on the side near the rotating connecting rod. The outer wall of the second sector member is formed with an arc groove, which matches the first sector member.

[0015] As a preferred embodiment of the present invention, a second turntable is fixedly connected to the first turntable on the side away from the rotating connecting rod, and a plurality of third square holes are provided on the outer wall of the second turntable, and the third square holes are arranged in an array on the second turntable.

[0016] As a preferred embodiment of the present invention, the detection assembly includes a support plate, which is fixedly connected to the inner side of a first support column. A baffle is fixedly connected to the top of the support plate, and a second motor is fixedly connected to the outer wall of the baffle. A threaded rod is fixedly connected to the output end of the second motor, and a sliding block is threadedly connected to the outer wall of the threaded rod. A telescopic connecting rod is rotatably connected to the top of the sliding block.

[0017] Preferably, a second rotating rod is rotatably connected to the inner side of the upper end of the first support column. A third turntable is fixedly connected to the end of each of the second rotating rods away from the first support column. A pressure rod is fixedly connected between the two third turntables. A detection element is fixedly connected to the second rotating rod through the third turntable. A detection rod is slidably connected to the inner side of the detection element. A pressure plate is fixedly connected to the end of the detection rod near the third turntable. A second spring is sleeved between the pressure plate and the outer wall of the detection element, wherein:

[0018] The telescopic link is rotatably connected to the bottom of the detection piece at the end furthest from the sliding block.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] 1. In the manufacturing apparatus for the internally insulated IGBT device, the first motor drives the first rotating rod and the rotating connecting rod to rotate together. During the rotation of the rotating connecting rod, the second protruding column will rotate together. The second protruding column will drive the first and second turntables to rotate together by an angle. The second turntable will then drive the IGBT device to rotate to the top of the second turntable, so that the three terminals of the IGBT device are connected to the three detection rods for detection. After the detection is completed, the first motor drives the second turntable to rotate by an angle again, conveying the IGBT device to the conveyor belt on the other side and conveying it out from the discharge port.

[0021] 2. In the manufacturing apparatus for the internally insulated IGBT device, the threaded rod is rotated by the drive of motor number two. The threaded rod drives the sliding block to slide. During the sliding of the sliding block, the vertical detection rod is pulled to the horizontal direction, so that the three detection rods are aligned with the three terminals of the IGBT device. Under electric drive, the second rotating rod rotates, causing the third rotating disk to rotate. At the same time, during the rotation of the third rotating disk, the pressure rod pushes the pressure plate and the upper end of the detection rod to slide towards the detection device, and drives the detection rod to penetrate into the three terminals of the IGBT device for gate trigger detection. After the detection is completed, the three horizontal detection rods are rotated to the vertical direction and then stopped by motor number two and electric drive.

[0022] 3. In the manufacturing apparatus for this internally insulated IGBT device, the slight inclination of the top of the protective plate causes the conveyor belt to be pressed down at the entrance of the No. 3 square hole. Due to the influence of the No. 1 protruding post and the No. 1 strip groove, the connecting post will always slide along the No. 1 strip groove. During the bending process of the conveyor belt, the No. 1 protruding post will be driven to rotate. At this time, the conveyor belt and the transmission belt will be misaligned, and the spur gear will tighten with the conveyor belt, causing the conveyor belt and the transmission belt to stop rotating, thus producing an emergency stop effect to prevent the three terminals of the IGBT device from being misaligned with the detection rod. Attached Figure Description

[0023] Figure 1 This is a three-dimensional schematic diagram of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0024] Figure 2 This is a schematic cross-sectional view of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0025] Figure 3 This is a three-dimensional schematic diagram of the internal structure of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0026] Figure 4 This is a three-dimensional schematic diagram of the conveying assembly of the manufacturing apparatus for the internally insulated IGBT device of the present invention;

[0027] Figure 5 A detailed schematic diagram of the conveying assembly of the manufacturing apparatus for the internally insulated IGBT device of the present invention;

[0028] Figure 6 A schematic diagram showing the conveyor belt of the manufacturing apparatus for the internally insulated IGBT device of the present invention;

[0029] Figure 7 This is a three-dimensional schematic diagram of the conveying assembly of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0030] Figure 8 This is a three-dimensional schematic diagram of the testing components of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0031] Figure 9 This is a three-dimensional schematic diagram of the testing components of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0032] Figure 10 This is a cross-sectional perspective view of the testing component of the manufacturing apparatus for the internally insulated IGBT device of the present invention.

[0033] The meanings of the labels in the diagram are as follows:

[0034] 1. Barrier chamber; 11. Inlet; 12. Outlet; 13. Square hole No. 1; 2. Base; 21. Support frame; 22. Guard plate; 221. Strip groove No. 1; 23. Conveyor belt; 231. Square hole No. 2; 232. Circular gear; 233. Transmission belt; 234. Connecting column; 2341. Protruding column No. 1; 24. Support column No. 1; 25. Support column No. 2; 251. Sliding column; 252. Spring No. 1;

[0035] 3. Conveying Components; 31. Motor No. 1; 32. Rotating Rod No. 1; 321. Fixed Column; 33. Rotating Linkage; 331. Protruding Column No. 2; 332. Sector No. 1; 34. Turntable No. 1; 341. Strip Groove No. 2; 342. Sector No. 2; 3421. Arc Groove; 35. Turntable No. 2; 351. Square Hole No. 3; 4. Detection Components; 41. Support Plate; 411. Baffle; 412. Motor No. 2; 413. Threaded Rod; 4131. Sliding Block; 414. Telescopic Linkage; 42. Turntable No. 3; 421. Rotating Rod No. 2; 422. Pressure Rod; 43. Detection Component; 44. Detection Bar; 441. Spring No. 2; 442. Pressure Plate. Detailed Implementation

[0036] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0038] Example 1

[0039] Please see Figures 1-10 As shown, this embodiment provides a manufacturing apparatus for an internally insulated IGBT device, comprising the following steps:

[0040] S1. After the staff prepares the substrate, B ions are implanted into the PN junction using an ion implantation device.

[0041] S2. Then, a mask insulating layer is formed on the substrate using chemical vapor deposition technology, and the insulating film is precisely processed through etching and resist removal.

[0042] S3. Then, P ions are implanted again using an ion implantation device, and trenches are formed on the substrate by etching technology. Then, an insulating film is formed on the substrate by CVD technology and etching is performed to remove the resist.

[0043] S4. Then, an Emitter electrode is formed on the insulating film by sputtering or vapor deposition. Then, a P+FS layer and a B+ region are formed on the substrate by ion implantation. Finally, a Collector is formed on the substrate by sputtering or vapor deposition.

[0044] S5. Finally, pot the IGBT device and cure it, and then test it after final molding.

[0045] like Figures 1-2 As shown, in step S5, the detection component 4 completes the detection of the IGBT device. A base 2 is fixedly connected to the bottom of the inner wall of the isolation chamber 1. A conveyor belt 23 for conveying the IGBT device is provided on the top of the base 2. A sliding column 251 for emergency stop of the conveyor belt 23 is provided inside the conveyor belt 23. A conveyor component 3 for flipping the IGBT device is provided on one side of the conveyor belt 23. A detection component 4 for detecting the IGBT device is provided on one side of the conveyor component 3. The IGBT device is conveyed by the conveyor belt 23, and the IGBT device is flipped by the conveyor component 3. At the same time, the gate trigger detection of the IGBT device is completed by the detection component 4. An inlet 11 is opened on one side of the isolation chamber 1. An outlet 12 is opened on the side of the isolation chamber 1 away from the inlet 11. A square hole 13 is opened on the top of the isolation chamber 1. The positions of the inlet 11 and the outlet 12 are matched with the positions of the conveyor belts 23 on both sides. A partition is provided on the surface of the conveyor belt 23.

[0046] like Figure 4 and Figure 6 As shown, a base 2 has a support frame 21, a guard plate 22, a first support column 24, and a second support column 25 fixedly connected to its top. A first strip groove 221 is formed on the inner side of the guard plate 22. A conveyor belt 23 is disposed on the inner side of the guard plate 22. Multiple second square holes 231 are formed on the outer wall of the conveyor belt 23. A circular gear 232 is disposed on the inner side of the conveyor belt 23. The rack of the circular gear 232 engages with the multiple second square holes 231. A transmission belt 233 is provided on the inner side of the belt 23. A connecting column 234 is fixedly connected between the transmission belt 233 and the conveyor belt 23. A first protruding column 2341 is fixedly connected to the outer side of the connecting column 234. The diameter of the first protruding column 2341 matches the width of the first strip groove 221. A sliding column 251 is slidably connected to the inner side of the second support column 25. A first spring 252 is sleeved on the outer wall between the two ends of the sliding column 251 and the second support column 25.

[0047] like Figures 3-5 and Figure 7As shown, the conveying assembly 3 includes a first motor 31, the output end of which is fixedly connected to a first rotating rod 32. A rotating connecting rod 33 is fixedly connected to the end of the first rotating rod 32 away from the first motor 31. A second protruding post 331 is fixedly connected to one end of the rotating connecting rod 33, and a first sector-shaped component 332 is fixedly connected to the end of the rotating connecting rod 33 away from the second protruding post 331. The conveying assembly 3 also includes a first turntable 34, on which a second strip groove 341 is formed on the side near the rotating connecting rod 33. The diameter of the first protrusion 331 matches the width of the second strip groove 341. The first turntable 34 is fixedly connected to the second sector member 342 on the side near the rotating connecting rod 33. The outer wall of the second sector member 342 is provided with an arc groove 3421, which matches the first sector member 332. The first turntable 34 is fixedly connected to the second turntable 35 on the side away from the rotating connecting rod 33. The outer wall of the second turntable 35 is provided with multiple third square holes 351, which are arranged in an array on the second turntable 35.

[0048] like Figures 8-10 As shown, the detection assembly 4 includes a support plate 41, which is fixedly connected to the inner side of the first support column 24. A baffle 411 is fixedly connected to the top of the support plate 41, and a second motor 412 is fixedly connected to the outer wall of the baffle 411. A threaded rod 413 is fixedly connected to the output end of the second motor 412, and a sliding block 4131 is threadedly connected to the outer wall of the threaded rod 413. A telescopic connecting rod 414 is rotatably connected to the top of the sliding block 4131. A second rotating rod 421 is rotatably connected to the inner side of the upper end of the first support column 24. The two second rotating rods 421 are located away from the first support column. One end of each support column 24 is fixedly connected to a third turntable 42. A pressure rod 422 is fixedly connected between the two third turntables 42. A second rotating rod 421 is fixedly connected to a detection element 43 through the third turntable 42. A detection rod 44 is slidably connected to the inner side of the detection element 43. A pressure plate 442 is fixedly connected to the end of the detection rod 44 near the third turntable 42. A second spring 441 is sleeved between the pressure plate 442 and the outer wall of the detection element 43. The telescopic connecting rod 414 is rotatably connected to the bottom of the detection element 43 at the end away from the sliding block 4131.

[0049] Therefore, it can be concluded that, Figure 2-8As shown, the IGBT device from the previous process is flipped and conveyed onto the conveyor belt 23 inside the isolation chamber 1. Under the conveyor belt 23, the IGBT device is conveyed into the third square hole 351 of the second turntable 35. At this time, driven by the first motor 31, the first rotating rod 32 and the rotating connecting rod 33 rotate together. During the rotation of the rotating connecting rod 33, the second protruding column 331 rotates as well. The second protruding column 331 slides within the second strip groove 341, and during its rotation, it is constrained by the second strip groove 341, causing the first turntable 34 to rotate as well. The second protruding column 331 slides out of the second strip groove 341 on one side, and then slides to the second strip groove 341 on the next side, driving the first turntable 34 to rotate 90 degrees. At the same time, the first turntable 34 will drive the second turntable 35 to rotate 90 degrees. At this time, the second turntable 35 will drive the IGBT device to rotate to the top of the second turntable 35, so that the three terminals of the IGBT device are connected to the three detection rods 44 for detection. After the detection is completed, the first motor 31 drives the second turntable 35 to rotate 90 degrees again, conveying the IGBT device to the conveyor belt 23 on the other side and conveying it out from the discharge port 12.

[0050] It should be noted that partitions are fixedly installed at equal intervals on the surface of the conveyor belt 23, and IGBT devices are placed on the brackets of two adjacent partitions. After the IGBT device is conveyed into the No. 3 square hole 351 on the side of the inlet 11, the IGBT device will be pushed by the partitions on the surface of the conveyor belt 23, causing the sliding column 251 to slide to the other side. At this time, the sliding column 251 will push the IGBT device near the outlet 12 out of the No. 3 square hole 351, so that the conveyor belt 23 on the side of the outlet 12 will convey the IGBT device out, and when the IGBT device is conveyed to the top of the No. 2 turntable 35, it will rebound under the action of the No. 1 spring 252.

[0051] When the IGBT device is transported to the top of the second turntable 35 for testing, the threaded rod 413 rotates under the drive of the second motor 412. The threaded rod 413 drives the sliding block 4131 to slide. During the sliding process of the sliding block 4131, it pulls the vertical detection rod 44 to the horizontal direction, so that the three detection rods 44 are aligned with the three terminals of the IGBT device. Under the electric drive, the second rotating rod 421 rotates, causing the third turntable 42 to rotate. At the same time, during the rotation of the third turntable 42, it drives the pressure rod 422 to push the pressure plate 442 and the upper end of the detection rod 44 to slide towards the detection element 43, and drives the detection rod 44 to penetrate into the three terminals of the IGBT device for gate trigger detection. After the detection is completed, the three horizontal detection rods 44 are rotated to the vertical direction and then stopped under the drive of the second motor 412.

[0052] Furthermore, when debris obstructs the conveyor belt 23 while it is transporting IGBT devices, under normal circumstances, the conveyor belt 23 will rotate together with the transmission belt 233 to continuously transport the IGBT devices. However, when the IGBT devices are obstructed, due to the slight inclination of the top of the guard plate 22, the conveyor belt 23 will be pressed down at the entrance of the third square hole 351. Because of the influence of the first protruding post 2341 and the first strip groove 221, the connecting post 234 will always slide along the first strip groove 221. During the bending process of the conveyor belt 23, the first protruding post 2341 will be driven to rotate. At this time, the conveyor belt 23 and the transmission belt 233 will be misaligned, and the spur gear 232 will tighten with the conveyor belt 23, causing the conveyor belt 23 and the transmission belt 233 to stop rotating, thus producing an emergency stop effect to prevent the three terminals of the IGBT devices from being misaligned with the detection rod 44.

[0053] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An apparatus for manufacturing an internally insulated IGBT device, characterized in that, The system includes a barrier chamber (1), with a base (2) fixedly connected to the bottom of the inner wall of the barrier chamber (1). A conveyor belt (23) for conveying IGBT devices is provided on the top of the base (2). A sliding column (251) for emergency stopping of the conveyor belt (23) is provided inside the conveyor belt (23). A conveyor assembly (3) for flipping IGBT devices is provided on one side of the conveyor belt (23). A detection assembly (4) for detecting IGBT devices is provided on one side of the conveyor assembly (3). The IGBT device is transported by the conveyor belt (23), the IGBT device is flipped by the conveyor assembly (3), and the gate trigger detection of the IGBT device is completed by the detection assembly (4). The conveying assembly (3) includes a second turntable (35). The outer wall of the second turntable (35) is provided with a plurality of third square holes (351). Under the conveying of the conveyor belt (23), the IGBT device is conveyed into the third square hole (351) of the second turntable (35). At this time, the second turntable (35) will drive the IGBT device to rotate to the top of the second turntable (35). The detection component (4) includes a support plate (41), which is fixedly connected to the inner side of the first support column (24). A baffle (411) is fixedly connected to the top of the support plate (41), and a second motor (412) is fixedly connected to the outer wall of the baffle (411). A threaded rod (413) is fixedly connected to the output end of the second motor (412). A sliding block (4131) is threadedly connected to the outer wall of the threaded rod (413), and a telescopic connecting rod (414) is rotatably connected to the top of the sliding block (4131). The upper inner side of the first support column (24) is rotatably connected to the second rotating rod (421). The second rotating rods (421) on both sides are fixedly connected to the third turntable (42) at the end away from the first support column (24). The pressure rod (422) is fixedly connected between the third turntables (42) on both sides. The second rotating rod (421) is fixedly connected to the detection element (43) through the third turntable (42). The detection rod (43) is slidably connected to the inner side of the detection element (43). The detection rod (44) is fixedly connected to the pressure plate (442) at the end near the third turntable (42). The detection rod (44) is fitted with the second spring (441) between the pressure plate (442) and the outer wall of the detection element (43). The telescopic connecting rod (414) is rotatably connected to the bottom of the detection element (43) at the end away from the sliding block (4131).

2. The manufacturing apparatus for an internally insulated IGBT device according to claim 1, characterized in that: The barrier chamber (1) has an inlet (11) on one side and an outlet (12) on the side away from the inlet (11). A square hole (13) is formed at the top of the barrier chamber (1). The positions of the inlet (11) and outlet (12) correspond to the positions of the conveyor belts (23) on both sides. The surface of the conveyor track (23) is provided with partitions.

3. The manufacturing apparatus for an internally insulated IGBT device according to claim 2, characterized in that: The base (2) has a support frame (21), a guard plate (22), a first support column (24) and a second support column (25) fixedly connected to its top. The guard plate (22) has a first strip groove (221) on its inner side. The conveyor belt (23) is located on the inner side of the guard plate (22). The outer wall of the conveyor belt (23) has multiple second square holes (231). The inner side of the conveyor belt (23) is provided with a spur gear (232). The rack of the spur gear (232) is engaged with the multiple second square holes (231).

4. The manufacturing apparatus for an internally insulated IGBT device according to claim 3, characterized in that: A transmission belt (233) is provided on the inner side of the conveyor track (23). A connecting column (234) is fixedly connected between the transmission belt (233) and the conveyor track (23). A first protruding column (2341) is fixedly connected to the outer side of the connecting column (234). The diameter of the first protruding column (2341) matches the width of the first strip groove (221).

5. The manufacturing apparatus for an internally insulated IGBT device according to claim 4, characterized in that: The inner side of the second support column (25) is slidably connected to a sliding column (251), and a first spring (252) is sleeved on the outer wall between the two ends of the sliding column (251) and the second support column (25).

6. The manufacturing apparatus for an internally insulated IGBT device according to claim 5, characterized in that: The conveying assembly (3) includes a first motor (31), the output end of the first motor (31) is fixedly connected to a first rotating rod (32), the first rotating rod (32) is fixedly connected to a rotating connecting rod (33) at the end away from the first motor (31), the rotating connecting rod (33) is fixedly connected to a second protruding column (331) at one end, and the rotating connecting rod (33) is fixedly connected to a first sector-shaped component (332) at the end away from the second protruding column (331).

7. The manufacturing apparatus for an internally insulated IGBT device according to claim 6, characterized in that: The conveying assembly (3) includes a first turntable (34), on which a second strip groove (341) is provided on the side near the rotating connecting rod (33). The diameter of the second protrusion (331) matches the width of the second strip groove (341). A second sector component (342) is fixedly connected to the first turntable (34) on the side near the rotating connecting rod (33). An arc groove (3421) is provided on the outer wall of the second sector component (342), and the arc groove (3421) matches the first sector component (332).

8. The manufacturing apparatus for an internally insulated IGBT device according to claim 7, characterized in that: The first turntable (34) is fixedly connected to the second turntable (35) on the side away from the rotating link (33).

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