Vibration assembly and piezoelectric pump

Abstract

The invention relates to the technical field of piezoelectric pumps, in particular to a vibration assembly and a piezoelectric pump, the vibration assembly comprises a substrate, the substrate is provided with a first face and a second face in the thickness direction, the second face is parallel to and opposite to the first face, and the substrate is arranged in a deformable mode in the thickness direction; the vibration driving piece is attached to the first face or the second face of the substrate, and the vibration driving piece is used for driving the substrate to do reciprocating vibration action in the thickness direction of the substrate; wherein a hollow area is formed between the first surface and the second surface and / or between the first surface and the second surface. According to the invention, the hollow area is arranged on the substrate, so that the substrate can meet the supporting performance, the stress of the vibration driving part is transmitted to the maximum extent, the energy loss is reduced, the corresponding vibration range is larger under the same vibration driving condition, and compared with the prior art, the vibration range of the substrate is increased, so that the vibration performance of the substrate is improved. Therefore, the dead volume in the pump cavity is reduced, and the flow pumped in and out is also increased.

Description

Technical Field

[0001] The present invention relates to the technical field of piezoelectric pumps, and particularly to a vibration component and a piezoelectric pump. Background Art

[0002] A piezoelectric pump is a micro pump based on the piezoelectric effect, which uses the deformation of piezoelectric materials under the action of an electric field to achieve the transportation of liquids or gases. Due to its small size, fast response speed, low energy consumption, and no mechanical moving parts, piezoelectric pumps are widely used in fields such as medicine, microfluidic control, chemical analysis, and bioengineering. The core component of a piezoelectric pump is a piezoelectric driver, usually a piezoelectric ceramic sheet. When an alternating voltage is applied, the piezoelectric ceramic sheet will deform, pushing the diaphragm to generate periodic vibrations, forming a pressure difference in the pump chamber, thereby driving the flow of the fluid. Through a one-way valve or a flexible channel, the piezoelectric pump realizes the directional transportation of the fluid.

[0003] In a piezoelectric pump, the dead volume refers to the fact that when the piezoelectric vibrator reciprocates, it mostly takes the shape of an arc and cannot fit perfectly with the pump chamber, resulting in some liquid or gas in the pump chamber that cannot be completely pumped in or out. For example, when transporting liquids, when there are trace amounts of bubbles in the liquid, the dead volume will cause the accumulation of bubbles, thereby affecting the output stability and efficiency.

[0004] In the prior art, in order to reduce the dead volume in the pump chamber, the base of the valve chamber is set to be arc-shaped, so that the bottom of the piezoelectric vibrator fits with the arc-shaped base of the valve chamber when moving, thereby reducing the existence of the dead volume. However, the inventor found that on the one hand, the above method reduces the volume of the pump chamber, and on the other hand, it is difficult to achieve perfect fit with the piezoelectric vibrator due to the arc design of the valve chamber base, still affecting the output stability and effect of the piezoelectric pump. Summary of the Invention

[0005] In view of at least one of the above technical problems, the present invention provides a vibration component and a piezoelectric pump, which adopt structural improvements to reduce the dead volume and increase the flow rate of pumping in and out.

[0006] According to a first aspect of the present invention, there is provided a vibration component, comprising: A substrate, the substrate having a first surface and a second surface that is parallel and opposite to the first surface in the thickness direction, and the substrate is deformable in its thickness direction; A vibration driving member, attached to the first surface or the second surface of the substrate, and the vibration driving member is used to drive the substrate to perform a reciprocating vibration action in its thickness direction; Wherein, there is a hollow area between the first surface, the second surface and / or the two, and the actual thickness of the substrate at the hollow area is less than its total thickness, and the hollow area is used to reduce the energy loss of the vibration driving member and expand the vibration range of the substrate.

[0007] In some embodiments of the present invention, the substrate is made of a metal material.

[0008] In some embodiments of the present invention, the vibration driving member is a piezoelectric ceramic.

[0009] In some embodiments of the present invention, the hollow region is disposed within the deformation region of the substrate.

[0010] In some embodiments of the present invention, the hollow region is symmetrically disposed about the center of the substrate.

[0011] In some embodiments of the present invention, the hollow region is disposed on the first surface and / or the second surface, and the hollow region is formed by an etching process.

[0012] In some embodiments of the present invention, the hollow region is disposed on both the first surface and the second surface at the same time. The vibration driving member is attached to the first surface, and the hollow region on the second surface is larger than the hollow region on the first surface.

[0013] In some embodiments of the present invention, the hollow region is disposed between the first surface and the second surface.

[0014] In some embodiments of the present invention, the hollow region is formed by etching the opposite surfaces of two substrates and then welding them relatively.

[0015] In some embodiments of the present invention, the hollow region is circular, annular, regular polygon, a plurality of arc grooves uniformly distributed along the circumferential direction, or a combination of a circle and the plurality of arc grooves.

[0016] According to a second aspect of the present invention, there is also provided a piezoelectric pump, comprising: A bottom plate having an inlet and an outlet on the bottom plate; A valve plate assembly attached to the bottom plate, and having check valves respectively communicating with the inlet and the outlet on the valve plate assembly; A pump chamber plate attached to a side of the valve plate assembly facing away from the bottom plate. The check valve at the inlet opens from the inlet toward the pump chamber plate side, and the check valve at the outlet opens from the pump chamber plate side toward the outlet; The vibration assembly according to any one of the first aspects, attached to a side of the pump chamber plate facing away from the valve plate assembly.

[0017] According to a third aspect of the present invention, there is also provided a piezoelectric pump, comprising: An air inlet plate; An air inlet layer attached to the air inlet plate, and both the air inlet plate and the air inlet layer have air inlet holes at their central positions; The vibration assembly according to any one of the first aspects, one side of the substrate in the vibration assembly facing away from the vibration driving member is attached to the intake layer, and the substrate has a vibration connection tibia gap penetrating in the thickness direction at its vibration edge position; A housing, connected to the side of the vibration assembly facing away from the intake layer, and having an air outlet at the central position of the housing; Wherein, when the vibration assembly vibrates at a set frequency, it drives the intake layer to resonate in the same frequency and in the opposite direction. A negative pressure area is formed at the center of the substrate and the intake layer, and the substrate diffuses the gas inhaled into the negative pressure area to the surroundings in a wave-like vibration manner and discharges it through the vibration connection tibia gap via the air outlet.

[0018] The beneficial effects of the present invention are as follows: By providing a hollow area on the substrate, the present invention enables the substrate to maximize the transmission of the stress of the vibration driving member while meeting the support performance, reduces the energy loss, so that under the same vibration driving conditions, the corresponding vibration range is larger. Compared with the prior art, due to the increase in the vibration range of the substrate, the dead volume in the pump chamber is reduced and the flow rate of pumping in and out also increases. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of the vibration assembly in the embodiment of the present invention; Figure 2 In the embodiment of the present invention Figure 1 It is a schematic cross-sectional structural diagram of the vibration assembly in the A-A direction; Figure 3 In the embodiment of the present invention Figure 2 It is a partial enlarged structural diagram at B in the above; Figure 4 It is a schematic amplitude comparison diagram of the substrate with and without a hollow in the embodiment of the present invention; Figure 5 It is a schematic structural diagram of the first side and the second side both being hollow in the embodiment of the present invention; Figure 6 It is a schematic structural diagram of the hollow area being arranged between the first side and the second side in the embodiment of the present invention; Figure 7 It is a schematic structural diagram of the hollow area being a small circle in the embodiment of the present invention; Figure 8Schematic structural diagram of the large circular hollow area in the embodiment of the present invention; Figure 9 Schematic structural diagram of the annular hollow area in the embodiment of the present invention; Figure 10 Schematic structural diagram of the square hollow area in the embodiment of the present invention; Figure 11 Schematic structural diagram of the arc-shaped grooves evenly distributed along the circumferential direction in the hollow area in the embodiment of the present invention; Figure 12 Schematic structural diagram of the combined structure of a circle and arc-shaped grooves in the hollow area in the implementation of the present invention; Figure 13 Schematic exploded view of the piezoelectric pump in the embodiment of the present invention; Figure 14 Schematic exploded view of another piezoelectric pump in the embodiment of the present invention; Figure 15 In the embodiment of the present invention Figure 14 Cross-sectional structural diagram of the piezoelectric pump therein; Figure 16 Schematic working principle structure diagram of the piezoelectric pump in the embodiment of the present invention.

[0021] Reference numerals: 1, substrate; 11, first surface; 12, second surface; 13, hollow area; 14, vibration connection tibia gap; 2, vibration driving member; 3, bottom plate; 31, inlet; 32, outlet; 4, valve plate assembly; 41, check valve; 5, pump chamber plate; 100, air inlet plate; 200, air inlet layer; 201, air inlet hole; 300, outer shell; 301, air outlet hole; 101, groove; 102, air storage window. Detailed implementation manners

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0023] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation manners.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used in the description of this invention are for the purpose of describing specific embodiments only and are not intended to limit the invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0025] As Figures 1 to 4 shown in the vibration assembly, it includes a substrate 1 and a vibration driving member 2. As Figure 1 and Figure 2 shown in, in the embodiments of the present invention, the substrate 1 has a first surface 11 and a second surface 12 that are parallel and opposite to each other in the thickness direction, and the substrate 1 is deformably arranged in its thickness direction; in some embodiments of the present invention, the material of the substrate 1 is selected as a metal material; the vibration driving member 2 is attached to the first surface 11 or the second surface 12 of the substrate 1, and the vibration driving member 2 is used to drive the substrate 1 to perform a reciprocating vibration action in its thickness direction; in the embodiments of the present invention, the vibration driving member 2 has various structural forms and can be selected as a piezoelectric ceramic. When an alternating current is applied to both ends of the piezoelectric ceramic sheet, the piezoelectric ceramic sheet radially contracts under the action of the electric field, and tensile stress is generated inside, thereby causing the piezoelectric ceramic sheet to bend and deform; in the embodiments of the present invention, in order to reduce the dead volume in the pump chamber, a hollow area 13 is added to the substrate 1, that is, as Figure 3 shown in, there is a hollow area 13 between the first surface 11 and the second surface 12, and the actual thickness of the substrate 1 at the hollow area 13 is less than its total thickness. It should be noted here that in the embodiments of the present invention, the total thickness refers to the actual thickness plus the thickness of the hollow area 13. For example, if the total thickness of the substrate 1 is 2 mm and the thickness of the hollow area 13 is 1 mm, then the actual thickness at the hollow area 13 is 1 mm; in the embodiments of the present invention, the hollow area 13 is used to reduce the energy loss of the vibration driving member 2 and expand the vibration range of the substrate 1. Of course, it should be noted here that in the embodiments of the present invention, the hollow area 13 can be as Figure 6 shown in, between the first surface 11 and the second surface 12, or can be as Figure 5 shown in, the hollow area 13 is simultaneously on both the first surface 11 and the second surface 12; or can be as Figure 4 shown in, the hollow area 13 is on the first surface 11 or the second surface 12. Through the setting of the hollow area 13, the deformation of the piezoelectric ceramic can be more completely transmitted through the substrate 1, reducing the energy loss and increasing the amplitude of the piezoelectric ceramic, that is, increasing the amplitude of the substrate 1; as Figure 4As shown, where the dashed line represents the amplitude of the substrate 1 without a hollow, and the solid line represents the amplitude of the substrate 1 with a hollow region 13. By comparison, it can be seen that the vibration range of the substrate 1 with the hollow region 13 is larger, which can reduce the dead volume in the pump chamber. At the same time, since the vibration range is larger, the flow rate of pumping in and out is also increased.

[0026] In the above embodiment, by providing the hollow region 13 on the substrate 1, while the substrate 1 satisfies the support performance, it maximizes the transmission of the stress of the vibration driving member 2, reduces the energy loss, so that under the same vibration driving conditions, the corresponding vibration range is larger. Compared with the prior art, due to the increase in the vibration range of the substrate 1, the dead volume in the pump chamber is reduced and the flow rate of pumping in and out also increases accordingly.

[0027] Based on the above embodiment, it should be noted that in the embodiment of the present invention, in order to increase the vibration range of the substrate 1, the hollow region 13 is arranged in the deformation region of the substrate 1. Here, being arranged in the deformation region means that the hollow region 13 and the deformed part of the substrate 1 have at least an intersecting set part. By setting the hollow region 13, the stiffness of the substrate 1 in the hollow region 13 is appropriately reduced, so that the piezoelectric ceramic can vibrate more fully to exert its performance; in addition, it should also be noted here that in order to ensure the balance of vibration, in the embodiment of the present invention, the hollow region 13 is arranged symmetrically centered on the center of the substrate 1. That is, the center of the substrate 1 coincides with the center of the hollow region 13. In the embodiment of the present invention, the shape of the hollow region 13 has various types. Specifically, please refer to Figures 7 to 12 , the hollow region 13 is a circle, a ring, a regular polygon, a plurality of arc grooves evenly distributed along the circumferential direction, or a combination of a circle and a plurality of arc grooves. The circle here can be, for example, Figure 7 the small circle shown in Figure 8 , or the large circle shown in Figure 9 . Here, the small circle and the large circle refer to, relative to the pump chamber, a circle with a diameter smaller than the diameter of the pump chamber is called a small circle, and a circle with a diameter greater than or equal to the diameter of the pump chamber is called a large circle; by setting the circle, the vibration range of the center of the substrate 1 is larger; the ring is as shown in Figure 10 , its central region remains intact, and a closed ring structure is formed around it. By setting the ring-shaped hollow region 13, the central region can maintain a relatively high rigidity, and the ring part allows a larger amplitude of vibration. The structure of the regular polygon is as shown in Figure 10 . Of course, it should be noted here that the regular polygon is not limited to Figure 10 the square shown in Figure 10 , and can also be other structural forms such as a hexagon, an octagon, etc. By setting the regular polygon, it can provide a certain vibration directionality and more adaptability for the shape of the pump chamber. The structure of a plurality of arc grooves evenly distributed along the circumferential direction is as shown in Figure 11As shown, through the setting of the arc-shaped groove, on the one hand, the balance of vibration can be maintained, and on the other hand, the stiffness of the substrate 1 can be appropriately retained; as Figure 12 As shown, it is a structural form with a circular middle and multiple arc-shaped grooves distributed on the periphery. Through the setting of the above structural form, the symmetry of the circle and the flexibility of the arc-shaped groove are combined, which not only maintains the stability of the vibration center but also enhances the vibration amplitude of the peripheral area.

[0028] In the embodiment of the present invention, the forming process of the hollow region 13 adopts an etching process. In the embodiment of the present invention, a semi-etching process is used to remove a part of the material surface on the surface of the metal substrate 1 without penetrating the substrate 1. Here, the hollow means single-sided grooving, which can be opened on the first surface 11, can also be opened on the second surface 12, or can be opened on both the first surface 11 and the second surface 12 at the same time. It should be noted here that when the hollow region 13 is simultaneously arranged on the first surface 11 and the second surface 12, the vibration driving member 2 is attached to the first surface 11, and the hollow region 13 on the second surface 12 is larger than the hollow region 13 on the first surface 11. As Figure 5 As shown, through the setting of this structural form, on the one hand, the piezoelectric ceramic can be directly fixed in the hollow region 13 of the first surface 11, which can further improve the vibration transmission of the piezoelectric ceramic, and on the other hand, it also provides a limit for the fixation of the piezoelectric ceramic; by expanding the hollow region 13 on the second surface 12, not only the capacity of the pump chamber is increased, but also the vibration range of the substrate 1 is improved, so that the flow rate of pumping in and out is further increased.

[0029] In some embodiments of the present invention, as Figure 6 As shown, the hollow region 13 is arranged in the middle of the first surface 11 and the second surface 12. When specifically forming, the hollow region 13 is formed by etching the opposite surfaces of two substrates 1 and then welding them relatively. In the embodiment of the present invention, diffusion solid-phase welding can be used for welding. Specifically, it means that under the temperature condition lower than the melting point of the base material, pressure is applied to minimize plastic deformation, and atomic diffusion generated on the bonding surface is used for bonding. What inhibits bonding is the oxide on the material surface, and the conditions for the disappearance of the oxide are the same. When clean metals approach each other, even without melting, they can be bonded by atoms. This bonding method has little impact on the product, with firm bonding and low cost. By arranging the hollow region 13 in the middle, it does not affect the space inside the pump chamber driven by the substrate 1, and at the same time increases the vibration range of the substrate 1. Of course, it should be noted here that the size of the hollow region 13 can also be set differently. For example, the area of the hollow region 13 near the piezoelectric ceramic is small, and the area of the hollow region 13 near the pump chamber is larger. Through the setting of this structural form, the service life of the substrate 1 can be improved while reducing the dead volume of the pump chamber and increasing the flow rate of pumping in and out.

[0030] In some embodiments of the present invention, there is also provided a Figure 13 The piezoelectric pump shown in the figure comprises a bottom plate 3, a valve plate assembly 4, a pump chamber plate 5 and any of the above-mentioned vibration components. It should be pointed out here that the specific structures of the bottom plate 3, the valve plate assembly 4 and the pump chamber plate 5 can be set by those skilled in the art as needed. In the embodiment of the present invention, the shape of the hollow area 13 on the substrate 1 can even be adjusted according to the shape of the pump chamber base, so that the substrate 1 is more closely fitted to the bottom of the valve seat during vibration. In the following embodiments of the present invention, a specific description is given of the structural form of one of the piezoelectric pumps, such as Figure 13 As shown in the figure, the bottom plate 3 has an inlet 31 and an outlet 32; the valve plate assembly 4 is fitted with the bottom plate 3, and the valve plate assembly 4 has a one-way valve 41 which is connected with the inlet 31 and the outlet 32 ​​respectively; the one-way valve 41 here can realize the one-way opening of the valve plate through the valve plate and the window adapted to the valve plate; the pump chamber plate 5 is fitted with the side of the valve plate assembly 4 away from the bottom plate 3, the one-way valve 41 at the inlet 31 opens from the inlet 31 toward the pump chamber plate 5 side, and the one-way valve 41 at the outlet 32 ​​opens from the pump chamber plate 5 side toward the outlet 32; by arranging a hollowed-out part in the middle of the pump chamber plate 5, a pump chamber can be formed by cooperating with the vibration assembly and the valve plate assembly 4, and the vibration assembly is fitted with the side of the pump chamber plate 5 away from the valve plate assembly 4. Thus, when the substrate 1 moves in a direction away from the pump chamber, the volume in the pump chamber increases, and liquid or gas enters the pump chamber through the inlet 31; when the substrate 1 is squeezed in the direction toward the pump chamber, the volume in the pump chamber decreases, the pressure increases, and the liquid or gas in the pump chamber is discharged through the outlet 32; through the continuous reciprocating vibration of the vibration component, the piezoelectric pump can realize continuous delivery of liquid or gas.

[0031] In some embodiments of the present invention, there is also provided Figures 14 to 16 The piezoelectric pump shown in the figure includes an air intake plate 100, an air intake layer 200, the above-mentioned vibration component and a housing 300, as shown in FIG. Figure 14 As shown in, in an embodiment of the present invention, the air intake plate 100 has an air intake hole 201 at the center position for the entry of external air; the air intake layer 200 is attached to the air intake plate 100, and the air intake plate 100 and the air intake layer 200 both have an air intake hole 201 at the center position; it should be pointed out here that the air intake layer 200 is attached to the air intake plate 100 only at the edge, so that the air intake layer 200 can vibrate to a certain extent relative to the air intake plate 100, such as Figure 14As shown in the figure, in order to increase the amplitude of the intake layer 200, a groove 101 can be provided at the central position on the surface of the intake plate 100 facing the intake layer 200; in the embodiment of the present invention, the surface of the substrate 1 of the above vibration assembly facing away from the vibration driving member 2 is attached to the intake layer 200, and the substrate 1 has a vibration connection tibia clearance 14 penetrating in the thickness direction at its vibration edge position; the housing 300 is connected to the surface of the vibration assembly facing away from the intake layer 200, and there is an air outlet hole 301 at the central position of the housing 300; in the embodiment of the present invention, please refer to Figure 15 and Figure 16 , when the vibration assembly vibrates at a set frequency, it drives the intake layer 200 to resonate in the same frequency and in the opposite direction. A negative pressure area is formed at the center of the substrate 1 and the intake layer 200, and the substrate 1 diffuses the gas inhaled into the negative pressure area in all directions in a wave-like vibration manner and discharges it through the vibration connection tibia clearance 14 via the air outlet hole 301. That is, during the process of the intake layer 200 and the substrate 1 resonating in the same frequency and in the opposite direction, when the two are moving away from each other, as Figure 16 shown in the figure, a negative pressure area is formed at the central position of the substrate 1 and the intake layer 200, and the gas enters this negative pressure area through the intake hole 201. Then, when the substrate 1 and the intake layer 200 are approaching each other, they first fit at the central position to form a wave-like shape from the center to the periphery, and then can push the gas to move in all directions. When it moves to the vibration connection tibia clearance 14, it enters the housing 300 through the vibration connection tibia clearance 14, and finally is discharged through the air outlet hole 301 on the housing 300. Thus, through the continuous reciprocating vibration of the vibration assembly, the flow of gas from the intake hole 201 to the air outlet hole 301 can be realized; it should be noted here that in the embodiment of the present invention, as Figure 14 shown in the figure, a gas storage tank can also be provided on the surface of the intake plate 100 facing the intake layer 200, or a gas storage window 102 can be provided on the intake layer 200, thereby increasing the gas pumping in and pumping out volume. In the embodiment of the present invention, the above air pump and liquid pump both use the upper hollow substrate 1, and the difference between the two is the vibration frequency. In the embodiment of the present invention, the vibration frequency of the liquid pump is generally below 600 Hz, while the vibration frequency of the above air pump is 18 - 24 kHz. In addition, in the embodiment of the present invention, in order to better achieve the same-frequency and opposite-direction resonance between the intake layer 200 and the substrate 1, a convex platform can also be provided at the center on the surface of the substrate 1 facing the intake layer 200, or an annular groove can be provided on the periphery of the center, so as to make the two resonate in the same frequency and in the opposite direction.

[0032] Those skilled in the art of this industry should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A vibration component, characterized in that: include: A substrate, wherein the substrate has a first surface and a second surface parallel to and opposite to the first surface in a thickness direction, and the substrate is deformable in the thickness direction; A vibration driving member, attached to the first surface or the second surface of the substrate, the vibration driving member is used to drive the substrate to perform reciprocating vibration in the thickness direction of the substrate; There is a hollow area between the first surface, the second surface and / or the two, and the actual thickness of the substrate in the hollow area is less than its total thickness. The hollow area is used to reduce the energy loss of the vibration drive component and expand the vibration range of the substrate.

2. The vibration assembly according to claim 1, characterized in that The substrate is made of metal.

3. The vibration assembly according to claim 1, characterized in that The vibration driving component is piezoelectric ceramic.

4. The vibration assembly according to claim 1, characterized in that The hollow area is arranged in the deformation area of ​​the substrate.

5. The vibration assembly according to claim 1, characterized in that: The hollow area is arranged with the center of the substrate as the symmetric center.

6. The vibration assembly according to claim 1, characterized in that The hollow area is arranged on the first surface and / or the second surface, and the hollow area is formed by an etching process.

7. The vibration assembly according to claim 6, characterized in that The hollow area is arranged on both the first surface and the second surface, the vibration driving component is attached to the first surface, and the hollow area on the second surface is larger than the hollow area on the first surface.

8. The vibration assembly according to claim 1, characterized in that The hollow area is disposed between the first surface and the second surface.

9. The vibration assembly according to claim 8, characterized in that The hollow area is formed by etching the opposite surfaces of the two substrates and then welding them relative to each other.

10. The vibration assembly according to any one of claims 1 to 9, characterized in that: The hollow area is in the shape of a circle, an annular ring, a regular polygon, a plurality of arc grooves evenly distributed along the circumferential direction, or a combination of a circle and the plurality of arc grooves.

11. A piezoelectric pump, characterized in that: include: A bottom plate having an inlet and an outlet; A valve plate assembly is attached to the bottom plate, and the valve plate assembly has a one-way valve connected to the inlet and the outlet respectively; A pump chamber plate is fitted with a side of the valve plate assembly facing away from the bottom plate, the one-way valve at the inlet opens from the inlet toward the pump chamber plate side, and the one-way valve at the outlet opens from the pump chamber plate side toward the outlet; The vibration assembly as claimed in any one of claims 1 to 10 is in contact with a side of the pump chamber plate facing away from the valve plate assembly.

12. A piezoelectric pump, characterized in that: include: Air intake plate; An air intake layer is attached to the air intake plate, and the air intake plate and the air intake layer both have air intake holes at their center positions; The vibration assembly according to any one of claims 1 to 10, wherein a side of the substrate in the vibration assembly facing away from the vibration driving member is attached to the air intake layer, and the substrate has a vibration connection shank gap penetrating in the thickness direction at the vibration edge position thereof; A shell connected to a side of the vibration component away from the air intake layer, and having an air outlet at the center of the shell; in, When the vibration component vibrates at a set frequency, it drives the air intake layer to resonate in the same frequency and in the opposite direction, and a negative pressure zone is formed between the substrate and the center of the air intake layer. The substrate diffuses the gas sucked into the negative pressure zone to the surroundings in a wave-like vibration manner and discharges it through the gap between the vibration connecting shanks and the air outlet.

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