Fluorine-lined vacuum micro-flow regulating valve

Abstract

The invention relates to the technical field of valves, and discloses a fluorine-lined vacuum micro-flow regulating valve which comprises a valve body, a valve seat, a valve core and a valve cover, the valve seat is arranged in the valve body, the valve core is arranged in the valve seat, the valve cover is arranged on the valve seat, and the fluorine-lined vacuum micro-flow regulating valve further comprises a side cover arranged on one side of the valve body. The valve seat comprises an installation part and a limiting ring arranged on the installation part, an installation groove used for containing the limiting ring is formed in the valve body, one end of the valve deck is arranged in the limiting ring, the valve deck is detachably connected with the valve body, and the valve body and the side cover abut against the periphery of the limiting ring to limit the limiting ring. The valve seat is integrally made of polytetrafluoroethylene. The valve seat is integrally made of polytetrafluoroethylene, the limiting ring is fixed in the mounting groove, the fixing block is fixed in the fixing groove, and the effect of improving the sealing performance and corrosion resistance of the adjusting valve is achieved.

Description

Technical Field

[0001] This application relates to the technical field of valves, and in particular to a fluorine-lined vacuum micro-flow regulating valve. Background Art

[0002] A micro-flow regulating valve is a device used to precisely control extremely small flows. Its main function is to control the flow rate of a fluid by adjusting the valve opening, thereby achieving fine adjustment of the fluid. Such valves are usually applied in occasions that require high precision and stability, such as the fields of chemical industry, pharmaceuticals, food and beverage, laboratories, etc.

[0003] In the related art, a regulating valve includes a valve body, a valve seat, a valve core, and a valve cover. The valve seat is integrally formed with the valve body. The valve core is arranged in the valve seat, and the valve cover is arranged on the valve seat. To improve corrosion resistance, a design of lining the metal valve seat with polytetrafluoroethylene is often adopted. Polytetrafluoroethylene has strong acid and corrosion resistance effects.

[0004] However, in a vacuum environment, when the regulating valve works in cooperation with a vacuum coating device, due to the shrinkage rate of polytetrafluoroethylene being significantly higher than that of the metal matrix, after long-term use of the regulating valve, the fluorine-lined layer will be separated from the side wall of the valve seat, forming a gap, resulting in the infiltration of corrosive media into the gap and accelerating the corrosion of the valve seat. Therefore, it needs to be improved. Summary of the Invention

[0005] In order to improve the sealing performance of the regulating valve, this application provides a fluorine-lined vacuum micro-flow regulating valve.

[0006] The fluorine-lined vacuum micro-flow regulating valve provided by this application adopts the following technical solutions: A fluorine-lined vacuum micro-flow regulating valve includes a valve body, a valve seat, a valve core, and a valve cover. The valve seat is arranged in the valve body, the valve core is arranged in the valve seat, the valve cover is arranged on the valve seat, and further includes a side cover arranged on one side of the valve body. The valve seat includes an installation part and a limiting ring arranged on the installation part. An installation groove for accommodating the limiting ring is opened on the valve body. One end of the valve cover is arranged in the limiting ring. The valve cover is detachably connected to the valve body. The valve body and the side cover abut against the circumference of the limiting ring to limit the limiting ring. The whole valve seat is made of polytetrafluoroethylene.

[0007] By adopting the above technical solution, when installing the valve seat, the valve seat can be first inserted into the valve body so that the limiting ring is located in the installation groove, then the valve cover is inserted into the limiting ring, and the valve cover is connected to the installation part. Then, the side cover is installed on one side of the valve body so that the limiting ring is limited between the valve body and the side cover, which is convenient to operate. Moreover, the whole valve seat is made of polytetrafluoroethylene. Even in a vacuum environment, when the whole valve seat shrinks, it is not easy to affect its use effect. Compared with the method of lining the inner side of the valve seat with polytetrafluoroethylene, there will be no gap between the valve seat and the polytetrafluoroethylene layer, so that corrosive media are not easy to penetrate into the gap, resulting in good corrosion resistance of the valve seat and improving the sealing performance of the regulating valve.

[0008] Optionally, a fixing block is provided on the side of the installation part away from the valve cover, and a fixing groove for accommodating the fixing block is provided on the side of the valve body away from the valve cover.

[0009] By adopting the above technical solution, when the valve seat is installed in the valve body, the wall of the fixing groove will abut against the fixing block, thereby limiting one end of the valve seat away from the valve cover in the valve body, further strengthening the limiting effect of the valve body on the valve seat.

[0010] Optionally, a receiving groove for accommodating the side cover is provided on the valve body, and the side cover is threadedly connected in the receiving groove.

[0011] By adopting the above technical solution, when the side cover needs to be installed on the valve body, only need to insert the side cover into the receiving groove so that the side cover is threadedly connected in the receiving groove. The operation is simple, and the side cover abuts against the side where the limiting ring moves out of the installation groove and the side where the fixing block moves out of the fixing groove, which can prevent the valve seat from moving out of the valve body.

[0012] Optionally, the valve core is arranged in the valve cover, and a corrugated pipe is provided between the valve core and the valve cover. One end of the corrugated pipe extends into the limiting ring and abuts between the valve cover and the installation part.

[0013] By adopting the above technical solution, during the operation of the regulating valve, the corrugated pipe can wrap the valve core to form an isolation barrier, preventing the medium from leaking out along the valve core, and improving the sealing performance of the regulating valve.

[0014] Optionally, the valve seat is in interference fit with the valve body.

[0015] By adopting the above technical solution, when the regulating valve is applied in a vacuum environment, after the valve seat undergoes a slight shrinkage, the valve seat can still maintain a state of being closely attached to the side wall of the valve body, resulting in good limiting effect of the valve body on the valve seat. The valve seat is not easy to shake in the valve body, and the stability of the valve seat is high.

[0016] Optionally, a rubber ring is provided between the limiting ring and the corrugated pipe.

[0017] By adopting the above technical solution, when the medium flows inside the valve seat, the rubber ring abuts between the limiting ring and the corrugated pipe, making it difficult for the medium to flow out of the valve seat along the gap between the limiting ring and the corrugated pipe, thus improving the sealing performance of the regulating valve.

[0018] Optionally, the valve body includes a first valve body and a second valve body. The first valve body is integrally formed with the valve cover. The first valve body is located on the second valve body and is detachably connected to the second valve body. The first valve body and the second valve body jointly form an installation cavity for accommodating the valve seat. The side cover includes a first side cover and a second side cover. The first side cover is integrally formed with the first valve body, and the second side cover is integrally formed with the second valve body.

[0019] By adopting the above technical solution, when installing the valve seat, first insert the valve seat into the first valve body so that the limiting ring extends into the installation groove, and then fix the second valve body on the first valve body. Compared with fixing the valve seat in the valve body through the side cover, there is no need to separately place the valve cover into the limiting ring, which simplifies the installation steps and improves the installation efficiency.

[0020] Optionally, a sealing groove communicating with the installation groove is formed on the side wall of the valve cover. A plurality of rotating shafts are provided in the sealing groove. A movable member is rotatably provided on each of the plurality of rotating shafts. Each movable member includes a supporting portion and a sealing portion. The sealing portion is arranged on the side of the supporting portion close to the valve seat. A return spring is provided on each supporting portion, and a rubber pad is jointly provided on the sealing portion. The rubber pad includes a vertical portion for abutting against the limiting ring and a horizontal portion for abutting against the groove wall of the sealing groove. The return spring can drive the supporting portion to move into the installation groove. When the limiting ring extends into the installation groove, it can push the supporting portion into the sealing groove. When the supporting portion moves into the sealing groove, it can drive the vertical portion to abut against the limiting ring and the horizontal portion to abut against the groove wall of the sealing groove.

[0021] By adopting the above technical solution, when the limiting ring extends into the installation groove, the limiting ring will push the supporting portion into the sealing groove, thereby pushing the sealing portion towards the side close to the limiting ring, making the vertical portion abut against the limiting ring and the horizontal portion abut against the groove wall of the sealing groove, so that the rubber pad abuts between the limiting ring and the valve cover, making it difficult for the medium to flow out of the valve seat along the gap between the limiting ring and the valve cover, and making the sealing performance of the regulating valve good. Before the limiting ring extends into the installation groove, the supporting portion will extend into the installation groove under the action of the return spring, the sealing portion is located in the sealing groove, and the supporting portion will move into the sealing groove during the process of the limiting ring extending into the installation groove, making it difficult for the movable member to hinder the limiting ring from extending into the installation groove, and the installation is convenient.

[0022] Optionally, a convex block is provided on one side of the vertical portion away from the horizontal portion. The convex block is integrally formed with the rubber pad. A sliding hole for the convex block to extend into is formed on the limiting ring. The convex block is in interference fit with the sliding hole. A sliding rod is slidably arranged in the sliding hole. A locking hole communicating with the sliding hole is formed on the first valve body. An active rod is slidably arranged in the locking hole. A fastening screw hole communicating with the locking hole is formed on the first valve body. The inner diameter of the fastening screw hole is larger than that of the locking hole. A threaded post is arranged in the fastening screw hole. When the convex block extends into the sliding hole, it can push the sliding rod into the locking hole and the active rod into the fastening screw hole. When the threaded post is tightened in the fastening screw hole, it can press the active rod against the sliding rod and the sliding rod against the convex block.

[0023] By adopting the above technical solution, when the rubber pad abuts against the limiting ring, the convex block will extend into the sliding hole and be in interference fit with the sliding hole, so that the medium is not easily discharged along the sliding hole. At the same time, the convex block pushes the sliding rod into the locking hole, and the sliding rod pushes the active rod into the fastening screw hole. Then the threaded post is tightened in the fastening screw hole. The threaded post will press the active rod against the sliding rod, so as to press the sliding rod against the convex block. At this time, the sliding rod is fixed in the locking hole and the sliding hole at the same time, thus preventing the limiting ring from moving out of the installation groove, and further making it difficult for the valve seat to move relative to the valve body. Through the above setting, both the sealing performance of the regulating valve is improved and the connection strength between the valve seat and the valve body is enhanced.

[0024] Optionally, the movable part further includes a limiting part arranged on the side of the sealing part close to the valve seat. The limiting part is arranged on the side of the vertical portion away from the limiting ring and the side of the horizontal portion close to the supporting part. The limiting part can prevent the rubber pad from moving away from the limiting ring.

[0025] By adopting the above technical solution, when the sliding rod abuts against the convex block, the limiting part can prevent the rubber pad from being squeezed by the sliding rod and moving away from the limiting ring, so that the sealing effect of the rubber pad is good.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. By making the valve seat entirely of polytetrafluoroethylene, and providing an installation groove, a fixing groove and a receiving groove on the valve body, and the valve seat includes an installation part and a limiting ring. During installation, only need to first insert the valve seat into the valve body so that the limiting ring is located in the installation groove, and finally tighten the side cover in the receiving groove. The operation is convenient, and the valve seat is not easily shrunk in a vacuum environment, improving the sealing performance of the regulating valve; 2. A fixing block is fixed on the side of the installation part away from the valve cover. A fixing groove is formed on the valve body. When the valve seat is installed in the valve body, the fixing block is limited in the fixing groove, making it difficult for the valve seat to move relative to the valve body. Description of the Drawings

[0027] Figure 1It is a schematic cross-sectional structure diagram of Embodiment 1 of the present application.

[0028] Figure 2 It is a schematic partial cross-sectional structure diagram of Embodiment 2 of the present application.

[0029] Figure 3 It is a schematic overall structure diagram of Embodiment 3 of the present application.

[0030] Figure 4 It is a schematic partial cross-sectional structure diagram of Embodiment 3 of the present application.

[0031] Figure 5 is Figure 4 an enlarged view of part A in

[0032] 1. Valve body; 11. Installation groove; 12. Fixing groove; 13. Accommodating groove; 131. Connecting thread; 14. First valve body; 15. Second valve body; 16. Installation cavity; 17. Locking hole; 171. Movable rod; 18. Tightening screw hole; 181. Threaded column; 2. Valve seat; 21. Limiting hole; 22. Installation part; 23. Limiting ring; 231. Sliding hole; 232. Slide bar; 24. Fixed block; 25. Bellows; 3. Valve core; 4. Valve cover; 41. Sealing groove; 42. Rotating shaft; 43. Movable part; 431. Supporting part; 432. Sealing part; 433. Limiting part; 44. Return spring; 45. Rubber pad; 451. Vertical part; 452. Horizontal part; 46. Protrusion; 5. Side cover; 51. Fixed thread; 52. First side cover; 53. Second side cover; 6. Rubber ring. Detailed implementation manners

[0033] The following further elaborates on the present application in conjunction with the attached Figures 1-5 for a more detailed description.

[0034] Embodiment 1 of the present application discloses a fluorine-lined vacuum micro-flow regulating valve.

[0035] Embodiment 1 Referring to Figure 1 , a fluorine-lined vacuum micro-flow regulating valve includes a valve body 1, a valve seat 2, a valve core 3, a valve cover 4 and a side cover 5. The valve seat 2 is arranged in the valve body 1, the valve core 3 is arranged in the valve seat 2 and the valve cover 4. The valve seat 2 is provided with a limiting hole 21 for accommodating the valve core 3. The valve cover 4 is arranged on the valve seat 2. The valve seat 2 is integrally made of polytetrafluoroethylene. The side cover 5 is arranged on one side of the valve body 1.

[0036] Referring to Figure 1, the valve seat 2 includes an installation part 22 and a limit ring 23 arranged on the installation part 22. The limit ring 23 is arranged on one side of the circumferential side wall of the installation part 22 close to the valve cover 4, and a fixing block 24 is arranged on the side of the installation part 22 away from the valve cover 4. An installation groove 11 for accommodating the limit ring 23, a fixing groove 12 for accommodating the fixing block 24, and an accommodating groove 13 for accommodating the side cover 5 are formed on the valve body 1. One end of the valve cover 4 is arranged in the limit ring 23, and the valve cover 4 is detachably connected to the installation part 22. In this embodiment, the installation part 22 is cylindrical, and the valve body 1 and the side cover 5 abut against the limit ring 23 for one week to limit the limit ring 23.

[0037] Refer to Figure 1 , a water inlet and a water outlet are formed on the valve seat 2. The water inlet is arranged on one axial side wall of the installation part 22, and the water outlet is arranged on the other axial side wall of the installation part 22. The side cover 5 is threadedly connected in the accommodating groove 13, and limits the limit ring 23 in the installation groove 11 and the fixing block 24 in the fixing groove 12, so that the valve seat 2 is not easily removed from the valve body 1. A corrugated pipe 25 is arranged between the valve core 3 and the valve cover 4. One end of the corrugated pipe 25 extends into the limit ring 23 and abuts between the valve cover 4 and the installation part 22, so that the regulating valve has good sealing performance.

[0038] The implementation principle of a fluorine-lined vacuum micro-flow regulating valve in an embodiment of the present application is as follows: When installing the valve seat 2, first insert the valve seat 2 into the valve body 1, so that the limit ring 23 extends into the installation groove 11 and the fixing block 24 extends into the fixing groove 12, and then screw the side cover 5 tightly in the accommodating groove 13. The installation is convenient. When the regulating valve is used in a vacuum environment, since the valve seat 2 is made of polytetrafluoroethylene as a whole, it is not easy to shrink, and the channel for the medium to flow inside the valve seat 2 is not easily separated from the valve seat 2 to generate gaps, improving the sealing performance and corrosion resistance of the regulating valve.

[0039] Embodiment 2 Refer to Figure 2 , the difference between this embodiment and Embodiment 1 is that a rubber ring 6 is fixed between the limit ring 23 and the corrugated pipe 25. In this embodiment, the valve seat 2 and the valve body 1 are in interference fit. Through the above settings, when the regulating valve is used in a vacuum environment, even if the surface of the valve seat 2 undergoes slight shrinkage, it is not easy to generate gaps with the valve body 1, improving the connection stability between the valve seat 2 and the valve body 1.

[0040] The implementation principle of a fluorine-lined vacuum micro-flow regulating valve in an embodiment of the present application is as follows: When the medium flows through the regulating valve, the rubber ring 6 can prevent the medium from flowing out of the valve body 1 along the gap between the limit ring 23 and the corrugated pipe 25, so that the regulating valve has good sealing performance.

[0041] Embodiment 3 Refer to Figure 3, The difference between this embodiment and Embodiment 1 lies in that: the valve body 1 includes a first valve body 14 and a second valve body 15. The first valve body 14 is integrally formed with the valve cover 4. The first valve body 14 is located on the second valve body 15, and the first valve body 14 is detachably connected to the second valve body 15. The detachable connection method between the first valve body 14 and the second valve body 15 is a bolt connection. In other embodiments, it can also be a snap connection or other connection methods as long as it can play the role of connecting and disassembling the first valve body 14 and the second valve body 15. It should be noted that in this embodiment, the bolts for connecting the first valve body 14 and the second valve body 15 are arranged on both sides of the water inlet and the water outlet, without affecting the flow of the medium at the water inlet and the water outlet of the valve seat 2.

[0042] Refer to Figure 4 , the first valve body 14 and the second valve body 15 jointly enclose an installation cavity 16 for accommodating the valve seat 2. The side cover 5 includes a first side cover 52 and a second side cover 53. The first side cover 52 is integrally formed with the first valve body 14, and the second side cover 53 is integrally formed with the second valve body 15. A sealing groove 41 communicating with the installation groove 11 is formed on the circumferential side wall of the valve cover 4.

[0043] Refer to Figure 5 , a plurality of rotating shafts 42 are arranged in the sealing groove 41, and a movable member 43 is rotatably arranged on each of the plurality of rotating shafts 42. In this embodiment, the number of the rotating shafts 42 and the movable members 43 is preferably 6. The movable member 43 includes a supporting portion 431 and a sealing portion 432. The sealing portion 432 is arranged on the side of the supporting portion 431 close to the valve seat 2. A return spring 44 is arranged on each of the supporting portions 431, and a rubber pad 45 is arranged on the sealing portion 432. The rubber pad 45 is arranged in a circle along the groove wall of the sealing groove 41. The return spring 44 can drive the supporting portion 431 to move into the installation groove 11. The rubber pad 45 includes a vertical portion 451 and a horizontal portion 452. A convex block 46 is arranged on the side of the vertical portion 451 far from the horizontal portion 452. In this embodiment, the number of the convex blocks 46 is preferably two.

[0044] Refer to Figure 5 , through the above settings, when the limiting ring 23 extends into the installation groove 11, the limiting ring 23 will push the supporting portion 431 into the sealing groove 41, thereby pushing the sealing portion 432 in the direction close to the installation groove 11. At this time, the rubber pad 45 will deform, so that the vertical portion 451 will abut against the limiting ring 23, and the horizontal portion 452 will abut against the groove wall of the sealing groove 41 on the side close to the valve seat 2, so that the gap between the limiting ring 23 and the valve cover 4 is blocked by the rubber pad 45, improving the sealing performance of the regulating valve. For the convenience of installation, in this embodiment, the movable member 43, the rubber pad 45 and the return spring 44 are first installed in the sealing groove 41, and then the first valve body 14 and the valve cover 4 are integrally formed together.

[0045] Refer to Figure 5, a sliding hole 231 for the convex block 46 to extend into is formed on the limiting ring 23, and after the convex block 46 extends into the sliding hole 231, it is in interference fit with the sliding hole 231. A locking hole 17 communicating with the sliding hole 231 and a fastening screw hole 18 communicating with the locking hole 17 are formed on the first valve body 14. An actuating rod 171 is slidably arranged in the locking hole 17, a sliding rod 232 is slidably arranged in the sliding hole 231, the inner diameter of the fastening screw hole 18 is larger than that of the locking hole 17, and a threaded column 181 is threadedly connected in the fastening screw hole 18. In this embodiment, the length of the sliding rod 232 is preferably less than the length of the sliding hole 231.

[0046] Referring to Figure 5 , through the above settings, when the convex block 46 extends into the sliding hole 231, the convex block 46 will squeeze the sliding rod 232 towards the side close to the actuating rod 171, so that the actuating rod 171 extends into the fastening screw hole 18. At this time, the threaded column 181 is screwed tightly in the fastening screw hole 18, and the threaded column 181 will press the actuating rod 171 against the sliding rod 232, so as to press the sliding rod 232 against the convex block 46, and make the sliding rod 232 located in both the sliding hole 231 and the locking hole 17 at the same time, so that the limiting ring 23 is not easily disengaged from the mounting groove 11, and further the connection stability between the valve seat 2 and the valve body 1 is high.

[0047] Referring to Figure 5 , in order to prevent the sliding rod 232 from pushing the rubber pad 45 away from the limiting ring 23, the movable member 43 further includes a limiting portion 433 arranged on the side of the sealing portion 432 close to the valve seat 2. The limiting portion 433 is arranged on the side of the vertical portion 451 away from the limiting ring 23 and the side of the horizontal portion 452 close to the supporting portion 431, and the limiting portion 433 is made of high-hardness BOHLERS590 high-speed steel material, which can prevent the rubber pad 45 from moving away from the limiting ring 23. Sealing covers capable of covering their openings are arranged on the hole walls of the sliding hole 231 and the locking hole 17, so that before the limiting ring 23 extends into the mounting groove 11, the sliding rod 232 is not easily slid out of the sliding hole 231, and the actuating rod 171 is not easily slid out of the locking hole 17, improving the overall stability of the regulating valve.

[0048] The implementation principle of a fluorine-lined vacuum micro-flow regulating valve in an embodiment of the present application is as follows: when installing the valve seat 2, the sealing covers on the sliding hole 231 and the locking hole 17 can be disassembled first, and then the limiting ring 23 is extended into the mounting groove 11. When the actuating rod 171 extends into the fastening screw hole 18, it means that the convex block 46 has extended into the sliding hole 231, that is, the rubber pad 45 has sealed the gap between the limiting ring 23 and the valve cover 4. Then the second valve body 15 is connected to the first valve body 14, and finally the threaded column 181 is screwed tightly in the fastening screw hole 18. Through the above installation method, the effects of sealing and fixing the valve seat 2 can be achieved simultaneously, improving the sealing performance and overall structural stability of the regulating valve.

[0049] The above are all preferred embodiments of this application, and the protection scope of this application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of this application shall be covered within the protection scope of this application.

Claims

1. A fluorine-lined vacuum micro-flow regulating valve, comprising a valve body (1), a valve seat (2), a valve core (3) and a valve cover (4), wherein the valve seat (2) is arranged in the valve body (1), the valve core (3) is arranged in the valve seat (2), and the valve cover (4) is arranged on the valve seat (2), characterized in that: The valve seat (2) further comprises a side cover (5) arranged on one side of the valve body (1); the valve seat (2) comprises a mounting portion (22) and a limiting ring (23) arranged on the mounting portion (22); a mounting groove (11) for accommodating the limiting ring (23) is provided on the valve body (1); one end of the valve cover (4) is arranged in the limiting ring (23); the valve cover (4) and the valve body (1) are detachably connected; the valve body (1) and the side cover (5) abut against a circle of the limiting ring (23) to limit the limiting ring (23); and the valve seat (2) is made entirely of polytetrafluoroethylene.

2. A fluorine-lined vacuum micro-flow regulating valve according to claim 1, characterized in that: A fixing block (24) is provided on a side of the mounting portion (22) away from the valve cover (4), and a fixing groove (12) for accommodating the fixing block (24) is provided on a side of the valve body (1) away from the valve cover (4).

3. The fluorine-lined vacuum micro-flow regulating valve according to claim 1, characterized in that: The valve body (1) is provided with a receiving groove (13) for receiving the side cover (5), and the side cover (5) is threadedly connected in the receiving groove (13).

4. A fluorine-lined vacuum micro-flow regulating valve according to claim 2, characterized in that: The valve core (3) is arranged in the valve cover (4), a bellows (25) is arranged between the valve core (3) and the valve cover (4), one end of the bellows (25) extends into the limit ring (23) and abuts between the valve cover (4) and the mounting portion (22).

5. The fluorine-lined vacuum micro-flow regulating valve according to claim 1, characterized in that: The valve seat (2) and the valve body (1) are interference fit.

6. The fluorine-lined vacuum micro-flow regulating valve according to claim 1, characterized in that: A rubber ring (6) is provided between the limiting ring (23) and the bellows (25).

7. The fluorine-lined vacuum micro-flow regulating valve according to claim 1, characterized in that: The valve body (1) comprises a first valve body (14) and a second valve body (15); the first valve body (14) is integrally formed with the valve cover (4); the first valve body (14) is located on the second valve body (15) and is detachably connected to the second valve body (15); the first valve body (14) and the second valve body (15) together form a mounting cavity (16) for accommodating the valve seat (2); the side cover (5) comprises a first side cover (52) and a second side cover (53); the first side cover (52) and the first valve body (14) are integrally formed; and the second side cover (53) and the second valve body (15) are integrally formed.

8. The fluorine-lined vacuum micro-flow regulating valve according to claim 7, characterized in that: A sealing groove (41) communicating with the mounting groove (11) is provided on the side wall of the valve cover (4), a plurality of rotating shafts (42) are provided in the sealing groove (41), and a movable part (43) is rotatably provided on each of the plurality of rotating shafts (42), and each of the movable parts (43) comprises a supporting part (431) and a sealing part (432), and the sealing part (432) is provided on a side of the supporting part (431) close to the valve seat (2), and each of the supporting part (431) is provided with a return spring (44), and the sealing part (432) is provided with a rubber pad (45), and the rubber pad (45 ) comprises a vertical portion (451) for abutting against a limiting ring (23) and a horizontal portion (452) abutting against a groove wall of a sealing groove (41); the return spring (44) can drive the support portion (431) to move into the mounting groove (11); when the limiting ring (23) extends into the mounting groove (11), the support portion (431) can be pushed into the sealing groove (41); when the support portion (431) moves into the sealing groove (41), the vertical portion (451) can be driven to abut against the limiting ring (23) and the horizontal portion (452) can be driven to abut against the groove wall of the sealing groove (41).

9. The fluorine-lined vacuum micro-flow regulating valve according to claim 8, characterized in that: A protrusion (46) is provided on one side of the vertical portion (451) away from the horizontal portion (452), and the protrusion (46) is integrally formed with the rubber pad (45). A sliding hole (231) for the protrusion (46) to extend into is provided on the limiting ring (23), and the protrusion (46) and the sliding hole (231) are interference fit, and a sliding rod (232) is slidably provided in the sliding hole (231). A locking hole (17) connected to the sliding hole (231) is provided on the first valve body (14), and a movable rod (171) is slidably provided in the locking hole (17). The first valve body (14) 4) is provided with a fastening screw hole (18) connected to the locking hole (17), the inner diameter of the fastening screw hole (18) is larger than the inner diameter of the locking hole (17), a threaded column (181) is provided in the fastening screw hole (18), and when the protrusion (46) extends into the sliding hole (231), it can push the sliding rod (232) to extend into the locking hole (17), and the movable rod (171) to extend into the fastening screw hole (18), and when the threaded column (181) is screwed into the fastening screw hole (18), it can press the movable rod (171) against the sliding rod (232), and the sliding rod (232) against the protrusion (46).

10. The fluorine-lined vacuum micro-flow regulating valve according to claim 9, characterized in that: The movable part (43) further comprises a limiting portion (433) arranged on the side of the sealing portion (432) close to the valve seat (2); the limiting portion (433) is arranged on the side of the vertical portion (451) away from the limiting ring (23) and on the side of the horizontal portion (452) close to the supporting portion (431); the limiting portion (433) can prevent the rubber pad (45) from moving in a direction away from the limiting ring (23).

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