Alignment sensor and alignment method thereof

Abstract

The invention discloses an alignment sensor and an alignment method thereof, and relates to the technical field of industrial occasion positioning. The alignment method of the alignment sensor comprises the following steps: fixing the alignment sensor on a horizontal working platform; the alignment sensor comprises light sources emitting in the first direction and the second direction, and the first direction is perpendicular to the second direction. Calibration is realized on the basis that an object to be calibrated enters a calibration area of the alignment sensor, and the calibration area is formed by a first direction light path and a second direction light path; when an object to be calibrated enters a sensor calibration area, a sensor outputs a rising edge signal and transmits position information and width information of the object to be calibrated at the same time; adjusting the position of the to-be-calibrated object based on the rising edge signal and the position and width information so as to realize accurate alignment; the subsequent alignment process can be automatically completed by simply fixing the sensor on the working platform and introducing the object to be calibrated into the calibration area, so that the alignment time is shortened, the operation difficulty is reduced, and the learning cost is reduced.

Description

Technical Field

[0001] This application relates to the technical field of industrial positioning, and particularly relates to a alignment sensor and an alignment method thereof. Background Art

[0002] Laser alignment sensors are widely used in industrial scenarios for automatic calibration and precise positioning tasks. The core of the prior art is to achieve positioning through a center search algorithm. The specific steps include: forming a two-dimensional coordinate system (XY) through two opposed light paths, guiding the object to be calibrated by the robot to search near the center of the sensor, and recording the positions where the object contacts and leaves the laser beam, so as to calculate the center points of the X-axis and Y-axis.

[0003] However, the prior art has the following defects: the calibration process takes a long time, usually several minutes; it is easily affected by the mechanical accuracy of the robot, resulting in positioning deviation; the width information of the calibration object cannot be displayed in real time during the alignment process. Summary of the Invention

[0004] To solve the above problems, this application discloses an alignment method. Simply fixing the sensor on the working platform and introducing the object to be calibrated into the calibration area can obtain the coordinate values of the object to be calibrated, facilitating the machine to automatically complete the subsequent alignment process, greatly reducing the alignment time, improving the alignment accuracy, and reducing the operation difficulty and learning cost; at the same time, a corresponding alignment sensor is proposed to implement the alignment method in different situations.

[0005] The first technical solution adopted by this application is: providing an alignment method for an alignment sensor, including the following steps:

[0006] Fix the alignment sensor on a horizontal working platform; the alignment sensor includes light sources emitting along a first direction and a second direction, and the first direction is perpendicular to the second direction;

[0007] Based on the object to be calibrated entering the calibration area of the alignment sensor to achieve calibration, the calibration area is formed by the light path in the first direction and the light path in the second direction;

[0008] When the object to be calibrated enters the calibration area of the sensor, the sensor outputs a rising edge signal, and at the same time transmits the position information and width information of the object to be calibrated;

[0009] Based on the rising edge signal and the position and width information, adjust the position of the object to be calibrated to achieve precise alignment.

[0010] Wherein, the light path in the first direction and the light path in the second direction of the alignment sensor are perpendicular.

[0011] Among them, it also includes calculating the edge and center positions of the object to be calibrated based on the linear array CCD image.

[0012] Among them, the straight line fitting method module based on the gradient operator specifically includes the following steps:

[0013] Use the gradient operator to find the rough positioning of the image edge, calculate the gradient amplitude as R(i) = |f(i) - f(i - 1)|, and select the position where the gradient maximum value is located as the rough positioning point of the image edge;

[0014] Symmetrically select 4 points in the neighborhood of the gradient maximum point i, denoted as i - 2, i - 1, i + 1, i + 2, together with the gradient maximum point i, a total of 5 points, and use the least squares method for straight line fitting;

[0015] The fitting straight line equation is y = ax + b, and the parameters a and b are obtained based on minimizing the sum of squared errors.

[0016] Among them, it also includes the following steps:

[0017] Select the average gray value of the two points i and i + 1 with the maximum gradient as the threshold; the threshold y ee The intersection point of the threshold and the fitting straight line is the image edge point, where

[0018] Among them, it also includes the third direction detection, and based on the third direction detection, it is judged whether the object to be calibrated enters or leaves the effective detection area, so as to achieve precise positioning in three-dimensional space.

[0019] The second technical solution adopted by this application is: providing an alignment sensor, which can apply the alignment method of the alignment sensor described in any one of the above, including:

[0020] The X-axis laser emission end is used to emit a parallel light beam in the horizontal direction;

[0021] The X-axis laser receiving end is used to receive the optical signal in the horizontal direction and detect the position information of the object in the X-axis direction;

[0022] The Y-axis laser emission end is used to emit a parallel light beam in the vertical direction;

[0023] The Y-axis laser receiving end is used to receive the optical signal in the vertical direction and detect the position information of the object in the Y-axis direction;

[0024] The housing is used to encapsulate the X-axis laser emission end, the Y-axis laser emission end, the X-axis laser receiving end and the Y-axis laser receiving end to form an integral structure;

[0025] The sensor fixing hole is used to fix the alignment sensor to the working platform based on the sensor fixing hole.

[0026] Wherein, the X-axis laser emission end and the Y-axis laser emission end respectively adopt a laser tube plus an optical lens to form a parallel light source; the X-axis laser reception end and the Y-axis laser reception end respectively adopt a CMOS linear image sensor plus an optical lens to receive signals, thereby realizing high-sensitivity and high-resolution detection.

[0027] Wherein, it further includes a groove, which is arranged on the top of the housing, and the object to be calibrated can reduce the movement time in the Z-axis direction based on the groove.

[0028] Wherein, a circuit module is arranged inside the housing, which is used to process the received optical signals and calculate the position and width information of the object.

[0029] Due to the adoption of the above technical solutions, compared with the prior art, the present application has at least one of the following beneficial effects:

[0030] 1. Only need to simply fix the sensor on the working platform and introduce the object to be calibrated into the calibration area, then the subsequent alignment process can be automatically completed, reducing the operation difficulty and learning cost.

[0031] 2. Compared with the traditional method that takes several minutes to complete calibration, the method of the present invention can complete alignment in an extremely short time, greatly improving the work efficiency.

[0032] 3. Adopt the straight line fitting method module based on the gradient operator to process the linear CCD image, which can accurately calculate the edge position of the object to be calibrated, provide sub-pixel level positioning accuracy, and the repeat accuracy can reach 0.01 mm.

[0033] 4. It can not only display the X and Y axis coordinates of the object to be calibrated in the needle aligner in real time, but also display the width information of the object, which is particularly important for some application scenarios that require high-precision dimension measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained according to these drawings.

[0035] Wherein:

[0036] Figure 1 is a schematic flowchart of an embodiment of the alignment method of the alignment sensor provided by the present application;

[0037] Figure 2 is a schematic flowchart of an embodiment of the image edge detection algorithm provided by the present application;

[0038] Figure 3 This is a schematic structural diagram of an alignment sensor provided in this application. Detailed implementation manners

[0039] Next, the technical solutions in the embodiments of this application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of this application. It can be understood that the specific embodiments described herein are only used to explain this application, rather than limiting this application. In addition, it should be noted that for the convenience of description, only the parts related to this application rather than all the structures are shown in the accompanying drawings. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0040] The terms "first", "second", etc. in this application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0041] Referring to "embodiment" herein means that a specific feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of this application. The appearance of this phrase in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0042] To solve the problems of the prior art, this application provides an alignment method for an alignment sensor, thereby shortening the calibration time in an industrial scenario, improving the calibration accuracy, and real-time displaying the X and Y axis coordinates and width information of an object to be calibrated in a needle alignment instrument; as Figure 1 shown, Figure 1 This is a schematic flowchart of an embodiment of the alignment method of the alignment sensor provided in this application, including the following steps:

[0043] Step S11: Fix the alignment sensor on the horizontal working platform; ensure that the selected working platform surface is flat and stable to avoid any irregularities or vibrations that may affect the accuracy of the alignment sensor; the alignment sensor includes light sources emitted along a first direction and a second direction, and the first direction and the second direction are perpendicular to each other; in this embodiment, the first direction is the X-axis direction, i.e., the horizontal direction, and the second direction is the Y-axis direction, i.e., the vertical direction; the X-axis and the Y-axis are perpendicular to each other and form a two-dimensional coordinate system, which helps to achieve high-precision position detection and positioning; the installation can be completed simply by fixing the sensor to the working platform without a complex debugging process, greatly simplifying the user experience.

[0044] Step S12: Calibration is achieved based on the object to be calibrated entering the calibration area of the alignment sensor, and the calibration area is formed by the optical paths in the first direction and the second direction; the object to be calibrated moves within the calibration area, and the moving direction can be the first direction, the second direction, and the third direction; it should be clear that the moving direction of the object to be calibrated can be a combined movement in multiple directions, for example, controlling the object to be calibrated to move along the first direction and the second direction simultaneously.

[0045] By emitting light sources in the mutually perpendicular first direction (X-axis) and second direction (Y-axis) and receiving the reflected signals, the position information of the object to be calibrated in these two dimensions can be accurately determined; this two-dimensional positioning method can provide accurate position coordinates, thus achieving high-precision alignment.

[0046] The third direction is perpendicular to the first direction and the second direction; the object to be calibrated can be guided into the calibration area of the alignment sensor by an automated device (such as a robotic arm) or manually. This process requires ensuring that the object can smoothly enter the effective detection range of the sensor; in this embodiment, the third direction is the Z-axis direction, i.e., the third direction is the depth direction perpendicular to the XY plane.

[0047] By controlling the movement of the object within the calibration area, the object can be quickly and accurately guided to the correct alignment position, significantly shortening the calibration time; precisely controlling the movement of the object to be calibrated helps to reduce the positioning deviation caused by the initial position error and improves the accuracy of the final alignment.

[0048] Step S13: When the object to be calibrated enters the sensor calibration area, the sensor outputs a rising edge signal and simultaneously transmits the position information and width information of the object to be calibrated; when the object to be calibrated completely enters the calibration area of the sensor, the sensor will detect this change and output a rising edge signal. If a rising edge signal is received, it indicates that the object has entered the calibration area and is ready for the next operation.

[0049] Based on the rising-edge signal, the system starts to process the data collected by the X-axis laser receiver and the Y-axis laser receiver, and calculates the precise coordinates of the object to be calibrated on the X and Y axes. At the same time, according to the change in the intensity of the received optical signal, the width information of the object is calculated. This information is then transmitted to the control system or other external devices.

[0050] Step S14: Adjust the position of the object to be calibrated based on the rising-edge signal, position, and width information to achieve precise alignment; the control system further fine-tunes the position of the object to be calibrated according to the received position information and width information to ensure that it reaches the optimal alignment state. If everything is normal, the alignment process is completed; if there is a deviation, it needs to be adjusted again until the requirements are met.

[0051] The sensor can provide instant feedback at the moment the object enters the detection area, enabling the operator or the automated system to take immediate action, improving the response speed; the automated data acquisition and analysis process reduces the need for human intervention, simplifies the operation steps, and reduces the error rate.

[0052] In summary, the alignment method of the alignment sensor in this embodiment includes the following steps: fixing the alignment sensor on a horizontal working platform; the alignment sensor includes light sources emitting along a first direction and a second direction, and the first direction is perpendicular to the second direction; based on the object to be calibrated entering the calibration area of the alignment sensor to achieve calibration, the calibration area is formed by the optical path in the first direction and the optical path in the second direction; when the object to be calibrated enters the sensor calibration area, the sensor outputs a rising-edge signal and simultaneously transmits the position information and width information of the object to be calibrated; adjusting the position of the object to be calibrated based on the rising-edge signal, position, and width information to achieve precise alignment; only need to simply fix the sensor on the working platform and introduce the object to be calibrated into the calibration area to automatically complete the subsequent alignment process, reducing the alignment time, operation difficulty, and learning cost.

[0053] Further, the optical path in the first direction and the optical path in the second direction of the alignment sensor are perpendicular; during the production process, the optical paths of the X-axis and the Y-axis are precisely calibrated so that the central optical paths of the two groups of optical paths are perpendicular; in this embodiment, the X-axis optical path and the Y-axis optical path are perpendicular in the same plane, that is, the X-axis optical path and the Y-axis optical path are perpendicular in the XOY plane; in other embodiments, the X-axis optical path and the Y-axis optical path can be perpendicular in a plane different from the XOY plane, and no limitation is made on this; install the calibrated alignment sensor on the working platform and fix it through the fixing holes at the bottom of the sensor; ensure that after installation, the optical paths of the X-axis and the Y-axis still maintain a vertically intersecting state to ensure that the position of the formed calibration area remains unchanged.

[0054] Further, the alignment method further includes calculating the edge and center positions of the object to be calibrated based on the CCD image.

[0055] As Figure 2 shown, Figure 2 This is a schematic flowchart of an embodiment of the image edge detection algorithm provided by this application. The straight line fitting module based on the gradient operator specifically includes the following steps:

[0056] Use a linear array CCD sensor to capture the image of the object to be calibrated, and perform smoothing filtering on the collected original image to reduce the noise impact on the image;

[0057] Use the gradient operator to find the rough positioning of the image edge. Calculate the gradient amplitude as R(i) = |f(i) - f(i - 1)|, and select the position where the gradient maximum value is located as the rough positioning point of the image edge;

[0058] Symmetrically select 4 points in the neighborhood of the gradient maximum point i, denoted as i - 2, i - 1, i + 1, i + 2. Together with the gradient maximum point i, a total of 5 points are used for straight line fitting by the least squares method;

[0059] The fitted straight line equation is y = ax + b, and the parameters a and b are obtained based on minimizing the sum of squared errors; Minimize the squared error as follows:

[0060]

[0061] Let e 2 Take the partial derivatives of a and b, and when they are respectively set to zero, we get:

[0062]

[0063] Furthermore, we get:

[0064]

[0065] Calculate the two parameters a and b, and then the fitted straight line can be obtained.

[0066] The alignment method further includes the following steps:

[0067] Select the average gray value of the two points i and i + 1 with the maximum gradient as the threshold;

[0068] The threshold y ee The intersection point of the fitted straight line is the image edge point, where

[0069] For the convenience of understanding, a set of embodiments are provided to complete the calculation process as follows:

[0070] Data is as follows:

[0071] <![CDATA[x ii > <![CDATA[y ii > 0 10 1 15 2 25 3 33 4 40

[0072] Where R(1) = 5, R(2) = 10, R(3) = 8, R(4) = 7; R(2) is the largest. We select i = 2 (i.e., x = 2) as the center point and symmetrically select four points (i.e., i - 2, i - 1, i + 1, i + 2) in its neighborhood for linear fitting.

[0073] Where

[0074] Substituting the above values gives a = 7.8 and b = 9; the final fitting line equation is y = 7.8x + 9.

[0075] Select the average gray value of the two points with the maximum gradient, i = 2 and i = 3, as the threshold. Substitute the threshold y ee into the fitting line equation to solve for the corresponding x value, x ee ≈ 2.56; that is, the exact edge position is at x = 2.56.

[0076] After obtaining the edge position on one side, repeat the above steps to obtain the edge position on the other side; the width of the object to be calibrated is the difference between the two edge positions, and the center position is at the midpoint of the two edge positions; it should be clear that this embodiment describes obtaining the edge position and center position in the X-axis direction. In other embodiments, the edge position and center position of the object to be calibrated in the Y-axis direction can also be obtained, which will not be elaborated here.

[0077] By combining the gradient operator to find the rough edge location points and further using the least squares method for linear fitting, sub-pixel-level edge detection accuracy can be achieved; the influence of noise on edge detection is reduced, enabling reliable edge position information to be obtained even in the case of low signal-to-noise ratio; after initially determining the edge, fitting is performed on the points within the local area, and this method can reduce the influence of noise on the final edge location to a certain extent, enabling reliable edge position information to be obtained even in the case of low signal-to-noise ratio.

[0078] Furthermore, the alignment method also includes a third-direction detection. Based on the third-direction detection, it is determined whether the object to be calibrated enters or leaves the effective detection area, thereby achieving precise positioning in three-dimensional space; in this embodiment, the third direction is the Z-axis direction.

[0079] Set reasonable entry and exit thresholds in the actual application scenario. For example, when the distance of the object along the Z-axis direction is less than a certain specific value, it is considered that the object has entered the effective detection area; otherwise, it is regarded as leaving; once the set threshold condition is reached, the sensor will output a corresponding signal indicating that the object has entered or left the effective detection area.

[0080] By adding the detection in the third direction, the position of the object can be determined more precisely in the three-dimensional space, which is especially suitable for application scenarios that require high-precision operations. Whether the object moves within a plane or floats up and down in space, its position change can be accurately captured, enhancing the flexibility and adaptability of the system.

[0081] This application provides a alignment sensor, which can apply the alignment method of the alignment sensor as described in any one of the above, such as Figure 3 shown Figure 3 is a schematic structural diagram of an embodiment of the alignment sensor provided by this application, including:

[0082] The X-axis laser emitting end is used to emit parallel light beams in the horizontal direction;

[0083] The X-axis laser receiving end is used to receive the optical signal in the horizontal direction and detect the position information of the object in the X-axis direction;

[0084] The Y-axis laser emitting end is used to emit parallel light beams in the vertical direction;

[0085] The Y-axis laser receiving end is used to receive the optical signal in the vertical direction and detect the position information of the object in the Y-axis direction;

[0086] The housing is used to encapsulate the X-axis laser emitting end, Y-axis laser emitting end, X-axis laser receiving end and Y-axis laser receiving end to form an integral structure;

[0087] The sensor fixing hole is used to fix the alignment sensor to the working platform based on the sensor fixing hole.

[0088] Furthermore, the X-axis laser emitting end and Y-axis laser emitting end respectively adopt a laser tube plus an optical lens to form a parallel light source; the X-axis laser receiving end and Y-axis laser receiving end respectively adopt a CMOS linear image sensor plus an optical lens to receive signals, thereby realizing high-sensitivity and high-resolution detection.

[0089] When the object to be calibrated enters the effective detection area, the laser receiving ends of the X-axis and Y-axis start to collect the reflected optical signals and convert them into electrical signals; use the straight line fitting method based on the gradient operator to analyze the collected data, and calculate the position information and width information of the object to be calibrated; according to the processed results, the control system can adjust the position of the object to be calibrated in real time to ensure that it is accurately located at the predetermined position.

[0090] Select a high-sensitivity and high-resolution CMOS linear image sensor, which can provide a fast response time and good signal-to-noise ratio, and is suitable for high-speed and high-precision application scenarios.

[0091] Further, the alignment sensor further includes grooves provided on the top of the housing, and the object to be calibrated reduces the movement time in the Z-axis direction based on the grooves; in this embodiment, the alignment sensor includes four grooves, and in other embodiments, the number of grooves can be 1, 2, 3, 5, etc., without any limitation here; it should be clear that the length, width, and depth of the grooves can be adjusted according to the objects to be calibrated with different sizes and shapes, so as to better reduce the movement time of the object to be calibrated in the Z-axis direction.

[0092] Further, a circuit module (not shown in the figure) is provided inside the housing for processing the received optical signal and calculating the position and width information of the object; the digital signal is analyzed using a method based on the gradient operator to identify the edge position of the object. For example, the gray-scale difference between adjacent pixel points can be calculated to find the point with the largest change in the edge; several points are selected near the preliminarily determined edge point, and the least squares method is used for linear fitting to obtain a more accurate edge position; based on the fitting result, combined with the parameters of the optical system (such as focal length, magnification, etc.), the specific coordinates of the object on the X-axis and Y-axis and its width information are calculated.

[0093] In several implementation manners provided in this application, it should be understood that the disclosed method and device can be implemented in other ways. For example, the device implementation manner described above is only illustrative. For example, the division of the modules or units is only a logical function division, and there can be other division manners in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0094] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this implementation manner.

[0095] In addition, each functional unit in various implementation manners of this application can be integrated in a processing unit, or each unit exists physically alone, or two or more units can be integrated in one unit. The above integrated unit can be implemented in the form of hardware or in the form of a software functional unit.

[0096] The above is only the implementation manner of this application, and does not limit the patent scope of this application. Any equivalent structure or equivalent process transformation made using the specification and drawings of this application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of this application.

Claims

1. A method for aligning a sensor, characterized in that: The steps include: Fixing the alignment sensor on a horizontal working platform; the alignment sensor comprises a light source emitting in a first direction and a second direction, wherein the first direction and the second direction are perpendicular to each other; Calibration is performed based on the object to be calibrated entering a calibration area of ​​the alignment sensor, wherein the calibration area is formed by a first directional light path and a second directional light path; When the object to be calibrated enters the sensor calibration area, the sensor outputs a rising edge signal and transmits the position information and width information of the object to be calibrated at the same time; The position of the object to be calibrated is adjusted based on the rising edge signal and the position and width information to achieve precise alignment.

2. The alignment method of the alignment sensor according to claim 1, characterized in that: The first direction light path and the second direction light path of the alignment sensor are perpendicular.

3. The alignment method of the alignment sensor according to claim 2, characterized in that: The method also includes calculating the edge and center position of the object to be calibrated based on the linear array CCD image.

4. The method for aligning a sensor according to claim 3, characterized in that: The linear fitting method module based on the gradient operator specifically comprises the following steps: Use the gradient operator to find the rough location of the image edge, calculate the gradient amplitude as R(i) = |f(i)-f(i-1)|, and select the position of the maximum gradient as the rough location point of the image edge; Four points are symmetrically selected in the neighborhood of the gradient maximum point i, denoted as i-2, i-1, i+1, i+2. Together with the gradient maximum point i, there are a total of five points. The least squares method is used for straight line fitting. The equation of the fitted line is y=ax+b, and the parameters a and b are obtained based on minimizing the sum of squared errors.

5. The alignment method of the alignment sensor according to claim 4, characterized in that: The following steps are also included: Select the mean gray value of the two points i and i+1 with the maximum gradient value as a threshold; Threshold y e The intercept point with the fitting line is the edge point of the image.

6. The method for aligning a sensor according to claim 1, characterized in that: It also includes a third direction detection, based on which it is determined whether the object to be calibrated enters or leaves the effective detection area to achieve accurate positioning in three-dimensional space.

7. A positioning sensor, which can be applied to the positioning method of the positioning sensor as described in any one of claims 1 to 6, characterized in that: include: X-axis laser emitting end, used to emit parallel light beams in the horizontal direction; The X-axis laser receiving end is used to receive the light signal in the horizontal direction and detect the position information of the object in the X-axis direction; The Y-axis laser emitting end is used to emit a parallel light beam in the vertical direction; The Y-axis laser receiving end is used to receive the vertical optical signal and detect the position information of the object in the Y-axis direction; A housing, used to encapsulate the X-axis laser emitting end, the Y-axis laser emitting end, the X-axis laser receiving end and the Y-axis laser receiving end to form an integral structure; A sensor fixing hole is used to fix the alignment sensor to the working platform.

8. The alignment sensor according to claim 7, characterized in that: The X-axis laser emitting end and the Y-axis laser emitting end respectively use a laser tube plus an optical lens to form a parallel light source; the X-axis laser receiving end and the Y-axis laser receiving end respectively use a CMOS linear array image sensor plus an optical lens to receive signals to achieve high-sensitivity and high-resolution detection.

9. The alignment sensor according to claim 8, characterized in that: It also includes a groove, which is arranged on the top of the shell, and the moving time of the object to be calibrated along the Z-axis direction is reduced based on the groove.

10. The alignment sensor according to claim 9, characterized in that: A circuit module is arranged inside the housing for processing received optical signals and calculating the position and width information of the object.

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