Three-dimensional angle sensor testing device

Abstract

The invention relates to a three-dimensional angle sensor testing device, which belongs to the technical field of three-dimensional angle measurement and comprises a central polarization splitting prism, a first laser generator and a second laser generator, the first laser is transmitted and emitted by the central polarization splitting prism, passes through the first wave plate, is reflected and emitted by the first reflecting mirror, passes through the first wave plate again, and is sequentially incident to the central polarization splitting prism and the detector, so that the first calibration of the position is completed; and the second laser is reflected and emitted by the central polarization splitting prism, passes through the second wave plate, is reflected and emitted by the second reflector, passes through the second wave plate, and sequentially enters the central polarization splitting prism and the detector to finish secondary calibration of the position. According to the invention, three-dimensional angle measurement of a target object can be realized under one detector.

Description

Technical Field

[0001] The present invention relates to the technical field of three-dimensional angle measurement of target objects, and particularly to a three-dimensional angle sensor testing device. Background Art

[0002] In the prior art, real-time measurement and feedback of the spatial three-dimensional angle change of a target object are realized. The currently common methods are as follows: The first solution: As Figure 1 shown, a specific conical mirror 100 is used as a device for transmitting the attitude of the measured part. The laser target emitted by the laser generating device 500 is split into multiple light beams by a beam splitter. The multiple light beams are reflected by a polarization prism 200 to the conical mirror 100, and then reflected by the conical mirror 100 to the first detector 600 and the second detector 700, so as to analyze the three-dimensional angle quantity of the measured device.

[0003] The above solution has the following disadvantages: 1. Two detectors need to be used simultaneously; 2. Under the same photosensitive area of the detector, the actual measurable angle range corresponding to this method is much smaller; 3. When there is an abnormal large-angle movement, the same laser target will cross-talk to different detectors, resulting in abnormal results.

[0004] The second solution: As Figure 2 shown, a right-angle prism 300 is used as a device for transmitting the attitude of the measured part. The cross target generated by the photoelectric autocollimator 400 is emitted through a collimator tube to the right-angle prism 300, and after being reflected by the hypotenuse reflecting surface and the two right-angle surfaces of the right-angle prism 300, two cross targets will be obtained in the CCD image detector of the photoelectric autocollimator 400; the displacement change of one target and the image rotation change of the other target can be used to analyze the three-dimensional angle quantity of the measured device.

[0005] The above solution has the following disadvantages: 1. Based on the cross target, it cannot use a detector to detect, and can only use a CCD image detector, resulting in a low working frequency and being limited in the application of dynamic angle feedback scenarios; 2. When the target generates multi-dimensional changes, the two cross targets will intersect, which easily leads to incorrect target recognition.

[0006] In the patent document with the authorization announcement number "CN211452292U" and the name "A three-dimensional angle measuring device for dynamic targets", it is recorded that: After the beam emitted by the laser passes through the beam expander collimator and the beam splitter, one path is transmitted to the optical attenuator, and the other path is transmitted to the moving part; The moving part is a semi-transparent and semi-reflective mirror or film arranged in front of the long-angle mirror. Part of the beam is reflected and returns to the fixed part and enters the first detector, and the other part of the beam enters the interior of the long-angle mirror for transmission. After being reflected by two total reflection surfaces, it is then transmitted to the fixed part and enters the second detector.

[0007] It can be seen that it has similar disadvantages to the first method, and two detectors also need to be used simultaneously to measure dynamic targets. Summary of the Invention

[0008] In order to solve the problems of high cost and cumbersome operation in the prior art when measuring the spatial three-dimensional angles of target objects, a three-dimensional angle sensor test device is provided, which can realize the three-dimensional angle measurement of target objects under one detector, thereby achieving the purpose of convenient operation and cost reduction.

[0009] A three-dimensional angle sensor test device provided for achieving the purpose of the present invention includes a central polarization beam splitter prism, a first laser generator that emits a first laser towards the central polarization beam splitter prism, and a second laser generator that emits a second laser. The first laser generator and the second laser generator work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitter prism parallel to each other backwards, and the phases of the two lasers are staggered by 90° when they are incident on the central polarization beam splitter prism, so that the first laser is transmitted and emitted backwards, and the second laser is reflected and emitted to the left, and the transmission path of the first laser and the reflection path of the second laser are perpendicular; A first quarter-wave plate and a first mirror are vertically arranged along the emission direction on the transmission path of the first laser; A second quarter-wave plate and a second mirror are vertically arranged along the emission direction on the reflection path of the second laser; A detector for receiving the two lasers is arranged on the right side of the central polarization beam splitter prism; Among them, the first laser is transmitted and emitted by the central polarization beam splitter prism. After passing through the first quarter-wave plate, the transmitted first laser is incident on the first mirror, and after being reflected by the first mirror and emitted, the reflected first laser passes through the first quarter-wave plate again, is incident on the central polarization beam splitter prism, and after being reflected and emitted by the central polarization beam splitter prism, is incident on the detector to complete the first calibration of the position; The second laser is reflected and emitted by the central polarization beam splitter prism. After passing through the second quarter-wave plate, the reflected second laser is incident on the second mirror, and after being reflected by the second mirror and emitted, the reflected second laser passes through the second quarter-wave plate again, is incident on the central polarization beam splitter prism, and after being transmitted and emitted by the central polarization beam splitter prism, is incident on the detector to complete the second calibration of the position.

[0010] With the above technical solution, when in use, the first laser generator and the second laser generator work intermittently and alternately. Since the phases of the first laser and the second laser are 90° out of phase when incident on the central polarization beam splitter prism, when they are incident on the central polarization beam splitter prism parallel to each other and backward, they will be transmitted and reflected respectively, and finally incident on the first reflector and the second reflector. The 90° deflection of the optical paths of the first laser and the second laser is respectively realized through the provided first quarter-wave plate and the second quarter-wave plate. Finally, through reflection / transmission by the central polarization beam splitter prism, an image is formed on the detector, completing two calibrations of the position, and thus realizing the three-dimensional angle measurement of the target object under one detector, achieving the purpose of convenient operation and cost reduction.

[0011] As a further improvement of the above solution, it further includes a first polarization beam splitter prism. The first laser and the second laser are incident on the first polarization beam splitter prism at perpendicular angles, and the first laser / second laser after being transmitted / reflected by the first polarization beam splitter prism respectively are incident on the central polarization beam splitter prism parallel to each other and backward.

[0012] This technical solution provides a different application scenario. In this scenario, the three-dimensional angle measurement of the target object can still be realized through the first laser and the second laser that are perpendicular to each other.

[0013] As a further improvement of the above solution, it further includes a reflection prism. The first laser is incident on the reflection prism and is reflected and emitted by the reflection prism. The first laser after being reflected and emitted and the second laser are incident on the first polarization beam splitter prism at perpendicular angles.

[0014] In this scenario, the three-dimensional angle measurement of the target object can still be realized through the parallel first laser and second laser, providing another scenario for the three-dimensional angle measurement of the target object, and further expanding the adaptability of this technical solution.

[0015] As a further improvement of the above solution, the first laser and the second laser are perpendicularly incident on the central polarization beam splitter prism.

[0016] When the first laser and the second laser are perpendicularly incident on the central polarization beam splitter prism, compared with other incident angles, the optical paths of reflection and refraction of the first laser and the second laser are relatively short. Through the above solution, the overall device can be made more compact, and the situation of limited space can be adapted by shortening the optical paths of reflection and refraction of the first laser and the second laser.

[0017] As a further improvement of the above solution, the centers of the reflection prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, and the first reflector are located on the same vertical line.

[0018] Through this solution, on the one hand, it provides a basis for the installation and positioning of the reflecting prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, and the first mirror; on the other hand, when the first laser is incident parallel to the center of the reflecting prism, after being reflected and emitted by the reflecting prism, the first laser after reflection and emission will be perpendicularly incident on the center of the first polarization beam splitter prism. The first laser after being transmitted by the first polarization beam splitter prism is incident parallel backward on the center of the central polarization beam splitter prism. The first laser is transmitted and emitted by the central polarization beam splitter prism, and the first laser after transmission and emission will be perpendicularly incident on the center of the first quarter-wave plate, and then perpendicularly incident on the center of the first mirror, and is reflected and emitted by the first mirror. The first laser after reflection and emission is perpendicularly incident on the center of the first quarter-wave plate again, perpendicularly incident on the center of the central polarization beam splitter prism, and after being reflected and emitted by the central polarization beam splitter prism, it is incident on the detector to complete the first calibration of the position; As a further improvement of the above solution, the centers of the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector are on the same horizontal line.

[0019] Through this solution, on the one hand, it provides a basis for the installation and positioning of the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector; on the other hand, when the second laser is incident parallel to the center of the central polarization beam splitter prism, the second laser is reflected and emitted by the central polarization beam splitter prism. The second laser after reflection and emission is perpendicularly incident on the center of the second quarter-wave plate and then perpendicularly incident on the center of the second mirror, and is reflected and emitted by the second mirror. The second laser after reflection and emission passes through the center of the second quarter-wave plate again and then is incident on the center of the central polarization beam splitter prism, and after being transmitted and emitted by the central polarization beam splitter prism, it is incident on the center of the detector to complete the secondary calibration of the position.

[0020] The reflecting prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, the first mirror, the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector are respectively located on two vertical lines, which can make the first laser and the second laser finally incident on the center of the detector, facilitating the calibration of the position and convenient for observation.

[0021] As a further improvement of the above solution, a cemented lens is arranged on the optical path between the central polarization beam splitter prism and the detector.

[0022] The cemented lens converges the light beam transmitted by the central polarization beam splitter prism to the detector to form an image of the object.

[0023] As a further improvement of the above solution, the first mirror and the second mirror are arranged on both sides of an L-shaped bracket with an interior angle of 90°.

[0024] Through the setting of the L-shaped bracket, it is convenient to vertically install the first reflector and the second reflector.

[0025] As a further improvement of the above solution, a data acquisition card is provided at the rear end of the detector, and the data acquisition card is used to collect and store the electrical signal changes generated by the detector.

[0026] As a further improvement of the above solution, the first laser generator and the second laser generator are modulated lasers.

[0027] The beneficial effects of the present invention are as follows: Compared with the prior art, a three-dimensional angle sensor test device provided by the present invention uses two mutually perpendicular first reflectors and second reflectors as attitude transfer devices of the measured object, and adopts the method of alternately working intermittently with the first laser and the second laser emitted by the first laser generator and the second laser generator. With the characteristics of the central polarization beam splitter prism, the first quarter-wave plate, and the second quarter-wave plate, the three-dimensional angle measurement of the target object is realized under one detector. Description of the Drawings

[0028] Figure 1 It is a schematic diagram of the principle of the first solution in the background art of the present invention document; Figure 2 It is a schematic diagram of the principle of the second solution in the background art of the present invention document; Figure 3 It is a schematic diagram of the principle of an embodiment of the present invention document; Figure 4 It is a schematic diagram of the principle of an embodiment of the present invention document with the addition of a first polarization beam splitter prism; Figure 5 It is a schematic diagram of the principle of an embodiment of the present invention document with the addition of a first polarization beam splitter prism and a reflection prism; Figure 6 It is Figure 4 A schematic diagram of the principle with the addition of a cemented lens; Figure 7 It is Figure 5 A schematic diagram of the principle with the addition of a cemented lens; Figure 8 It is Figure 4 A schematic diagram of the principle with the addition of an L-shaped bracket; Figure 9 It is Figure 5 A schematic diagram of the principle with the addition of an L-shaped bracket; Figure 10 It is Figure 9 A schematic diagram of the principle with the addition of a cemented lens; Figure 11 It is a block diagram of the modulation system of the present invention document.

[0029] Description of the Reference Numerals: 1. Central polarization beam splitting prism; 2. Detector; 3. First quarter-wave plate; 4. First mirror; 5. Second quarter-wave plate; 6. Second mirror; 7. Reflecting prism; 8. First polarization beam splitting prism; 9. L-shaped bracket; 10. Glued lens; 11. First laser generator; 12. Second laser generator; 100. Conical mirror; 200. Polarizing prism; 300. Right-angle prism; 400. Photoelectric autocollimator; 500. Laser generating device; 600. First detector; 700. Second detector. Specific embodiments

[0030] Next, in combination with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described. Those skilled in the art should know that the embodiments described below are a part of the disclosed technical solutions of this technical solution, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0031] Next, referring to several representative embodiments of the present invention, the principles and spirits of the present invention will be elaborated in detail.

[0032] Embodiment 1 of a three-dimensional angle sensor testing device provided by the present invention: As Figure 3 shown, a three-dimensional angle sensor testing device provided by the present invention includes a central polarization beam splitting prism 1, a first laser generator 11 that emits a first laser to the central polarization beam splitting prism 1, and a second laser generator 12 that emits a second laser. The first laser generator 11 and the second laser generator 12 work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitting prism 1 parallel to each other backward. When the two lasers are incident on the central polarization beam splitting prism 1, the phases are staggered by 90°, so that the first laser is transmitted and emitted backward, and the second laser is reflected and emitted to the left. And the transmission path of the first laser is perpendicular to the reflection path of the second laser; a first quarter-wave plate 3 and a first mirror 4 are vertically arranged along the emission direction on the transmission path of the first laser; a second quarter-wave plate 5 and a second mirror 6 are vertically arranged along the emission direction on the reflection path of the second laser; a detector 2 for receiving the two lasers is arranged on the right side of the central polarization beam splitting prism 1; Among them, the first laser is transmitted and emitted by the central polarization beam splitting prism 1. The transmitted first laser is perpendicularly incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is perpendicularly incident on the first mirror 4, and is reflected and emitted by the first mirror 4. The reflected first laser is deflected by 45° again by the first quarter-wave plate 3, then is incident on the central polarization beam splitting prism 1, and after being reflected and emitted by the central polarization beam splitting prism 1, it is incident on the detector 2 to complete the first calibration of the position; The second laser beam is reflected and emitted by the central polarization beam splitter prism 1. The reflected and emitted second laser beam is perpendicularly incident on the second quarter-wave plate 5. After being deflected by 45° by the second quarter-wave plate 5, it is perpendicularly incident on the second reflecting mirror 6 and is reflected and emitted by the second reflecting mirror 6. After the reflected and emitted second laser beam is deflected by 45° again by the second quarter-wave plate 5, it is incident on the central polarization beam splitter prism 1. After being transmitted and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the secondary calibration of the position.

[0033] Embodiment 2 of a three-dimensional angle sensor testing device provided by the present invention: As Figure 4 shown, compared with the above Embodiment 1, Embodiment 2 adds a first polarization beam splitter prism 8. The first laser beam and the second laser beam are incident on the first polarization beam splitter prism 8 at mutually perpendicular angles. The first laser beam / second laser beam transmitted / reflected by the first polarization beam splitter prism 8 are incident on the central polarization beam splitter prism 1 parallel to each other backward. Among them, the first laser beam is transmitted and emitted by the central polarization beam splitter prism 1. The transmitted and emitted first laser beam is perpendicularly incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is perpendicularly incident on the first reflecting mirror 4 and is reflected and emitted by the first reflecting mirror 4. After the reflected and emitted first laser beam is deflected by 45° again by the first quarter-wave plate 3, it is incident on the central polarization beam splitter prism 1. After being reflected and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the first calibration of the position; the second laser beam is reflected and emitted by the central polarization beam splitter prism 1. The reflected and emitted second laser beam is perpendicularly incident on the second quarter-wave plate 5. After being deflected by 45° by the second quarter-wave plate 5, it is perpendicularly incident on the second reflecting mirror 6 and is reflected and emitted by the second reflecting mirror 6. After the reflected and emitted second laser beam is deflected by 45° again by the second quarter-wave plate 5, it is incident on the central polarization beam splitter prism 1. After being transmitted and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the secondary calibration of the position.

[0034] In this way, the first laser beam and the second laser beam with mutually perpendicular incident directions can also be used to measure the three-dimensional angle of the target object.

[0035] Embodiment 3 of a three-dimensional angle sensor testing device provided by the present invention: As Figure 5As shown in the figure, compared with the above-mentioned Embodiment 2, in Embodiment 3, a reflection prism 7 is added. The first laser is incident on the reflection prism 7 and is reflected and emitted by the reflection prism 7. The first laser after being reflected and emitted is incident on the first polarization beam splitter prism 8 at an angle perpendicular to the second laser. Among them, the first laser is transmitted and emitted by the central polarization beam splitter prism 1. The transmitted first laser is perpendicularly incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is perpendicularly incident on the first mirror 4 and is reflected and emitted by the first mirror 4. The first laser after being reflected and emitted is deflected by 45° again by the first quarter-wave plate 3 and then is incident on the central polarization beam splitter prism 1. After being reflected and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the first calibration of the position; The second laser is reflected and emitted by the central polarization beam splitter prism 1. The reflected second laser is perpendicularly incident on the second quarter-wave plate 5. After being deflected by 45° by the second quarter-wave plate 5, it is perpendicularly incident on the second mirror 6 and is reflected and emitted by the second mirror 6. The second laser after being reflected and emitted is deflected by 45° again by the second quarter-wave plate 5 and then is incident on the central polarization beam splitter prism 1. After being transmitted and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the second calibration of the position.

[0036] Embodiment 3 provides a supplement to the application scenario of Embodiment 2. In this scenario, parallel first laser and second laser can realize the three-dimensional angle measurement of the target object. Only by adding one procedure, first let the first laser be incident on the reflection prism 7, and the first laser after being reflected and emitted by the reflection prism 7 is then incident on the first polarization beam splitter prism 8 at an angle perpendicular to the second laser. Then, as described in Embodiment 2, the three-dimensional angle measurement of the target object can be realized through a detector 2.

[0037] Embodiment 4 of a three-dimensional angle sensor test device provided by the present invention: Compared with the above-mentioned Embodiments 1-3, the first laser and the second laser are perpendicularly incident on the central polarization beam splitter prism 1. On the optical path where the first laser is transmitted backward, the positions of the first quarter-wave plate 3 and the first mirror 4 are convenient to arrange. It only needs the mirror surfaces of the first quarter-wave plate 3 and the first mirror 4 to be parallel to the lower end face of the central polarization beam splitter prism 1; similarly, on the optical path where the second laser is reflected and emitted to the left, the positions of the second quarter-wave plate 5 and the second mirror 6 are convenient to arrange. It only needs the mirror surfaces of the second quarter-wave plate 5 and the second mirror 6 to be parallel to the left end face of the central polarization beam splitter prism 1, which provides convenience in specific installation.

[0038] Embodiment 5 of a three-dimensional angle sensor test device provided by the present invention: Embodiment 5 is a further improvement based on Embodiment 3. On the basis of this solution, the centers of the reflection prism 7, the first polarization beam splitter prism 8, the central polarization beam splitter prism 1, the first quarter-wave plate 3, and the first mirror 4 are located on the same vertical line.

[0039] Through this solution, on the one hand, it provides a basis for the installation and positioning of the reflection prism 7, the first polarization beam splitter prism 8, the central polarization beam splitter prism 1, the first quarter-wave plate 3, and the first mirror 4; on the other hand, when the first laser is incident parallel to the center of the reflection prism 7, when the first laser after reflection and emission passes through the first polarization beam splitter prism 8, the central polarization beam splitter prism 1, and the first quarter-wave plate 3 in sequence, it is on the same vertical line. When it is reflected and emitted by the first mirror 4, and the first laser after reflection and emission passes through the first quarter-wave plate 3 and the central polarization beam splitter prism 1 again, its optical path is on the same vertical line, the optical path is shorter, and the space required for the overall device is smaller.

[0040] Embodiment 6 of a three-dimensional angle sensor test device provided by the present invention: Embodiment 6 is a further improvement based on Embodiment 5. On the basis of this solution, the centers of the second mirror 6, the second quarter-wave plate 5, the central polarization beam splitter prism 1, and the detector 2 are located on the same horizontal line. When the second laser reflected and emitted by the central polarization beam splitter prism 1 passes through the second quarter-wave plate 5 and the second mirror 6, its optical path is on the same horizontal line. When the second laser reflected and emitted by the second mirror 6 passes through the second quarter-wave plate 5, the central polarization beam splitter prism 1, and the detector 2 again, its optical path is on the same horizontal line.

[0041] In this way, the optical paths of the first laser and the second laser are relatively short. Through the above solution, the overall device can be made more compact.

[0042] Embodiment 7 of a three-dimensional angle sensor test device provided by the present invention: As Figure 6 、 Figure 7 、 Figure 10 shown, compared with the above Embodiments 1-3, a cemented lens 10 is added in Embodiment 7, and a cemented lens 10 is arranged on the optical path between the central polarization beam splitter prism 1 and the detector 2. The beam transmitted by the central polarization beam splitter prism 1 is converged to the detector 2 through the cemented lens 10 to form an image of the object.

[0043] Embodiment 8 of a three-dimensional angle sensor test device provided by the present invention: As Figure 8 、 Figure 9 、 Figure 10As shown in the figure, compared with the above-mentioned Embodiments 1-3, an L-shaped bracket 9 is added in Embodiment 8, and the first reflector 4 and the second reflector 6 are arranged on both sides of the L-shaped bracket 9 with an inner angle of 90°. Through the arrangement of the L-shaped bracket 9, it is convenient to vertically install the first reflector 4 and the second reflector 6.

[0044] Embodiment 9 of a three-dimensional angle sensor testing device provided by the present invention: Compared with the above-mentioned Embodiments 1-3, a data acquisition card is added in Embodiment 9. A data acquisition card is arranged at the rear end of the detector 2, and the data acquisition card is used to collect and store the electrical signal changes generated by the detector 2.

[0045] Embodiment 10 of a three-dimensional angle sensor testing device provided by the present invention: Compared with the above-mentioned Embodiments 1-3, the first laser generator 11 and the second laser generator 12 in Embodiment 10 are modulation lasers. As Figure 11 shown, in this embodiment, the first laser generator 11 and the second laser generator 12 respectively generate the first laser and the second laser. The first laser generator 11 and the second laser generator 12 are respectively triggered to work at the rising edge and the falling edge of a 1KHz modulation signal. The detector 2 collects the test signals of the first laser generator 11 and the second laser generator 12 at the rising edge and the falling edge respectively according to the synchronous modulation signal.

Claims

1. A three-dimensional angle sensor testing device, characterized in that: The invention comprises a central polarization beam splitter prism (1), a first laser generator (11) for emitting a first laser to the central polarization beam splitter prism (1), and a second laser generator (12) for emitting a second laser. The first laser generator (11) and the second laser generator (12) work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitter prism (1) in parallel with each other and are incident on the central polarization beam splitter prism (1) backwards. When the two lasers are incident on the central polarization beam splitter prism (1), their phases are staggered by 90°, so that the first laser is transmitted backwards and the second laser is reflected to the left and is emitted, and the transmission emission light path of the first laser is perpendicular to the reflection emission light path of the second laser. A first ¼ wave plate (3) and a first reflector (4) are arranged perpendicularly along the emission direction of the transmission emission light path of the first laser. A second ¼ wave plate (5) and a second reflector (6) are arranged perpendicularly along the emission direction of the reflection emission light path of the second laser. A detector (2) for receiving the two lasers is arranged on the right side of the central polarization beam splitter prism (1).

2. A three-dimensional angle sensor testing device according to claim 1, characterized in that: It also includes a first polarization beam splitter prism (8), wherein the first laser and the second laser are incident on the first polarization beam splitter prism (8) at mutually perpendicular angles, and the first laser and the second laser are respectively transmitted / reflected by the first polarization beam splitter prism (8) and then incident on the central polarization beam splitter prism (1) in parallel with each other.

3. A three-dimensional angle sensor testing device according to claim 2, characterized in that: A reflecting prism (7) is also included, the first laser is incident on the reflecting prism (7), and is reflected by the reflecting prism (7) and emitted, and the reflected first laser and the second laser are incident on a first polarization beam splitting prism (8) at mutually perpendicular angles.

4. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: The first laser and the second laser are vertically incident on a central polarization beam splitting prism (1).

5. A three-dimensional angle sensor testing device according to claim 3, characterized in that: The centers of the reflecting prism (7), the first polarizing beam splitting prism (8), the central polarizing beam splitting prism (1), the first ¼ wave plate (3), and the first reflecting mirror (4) are located on the same vertical line.

6. A three-dimensional angle sensor testing device according to claim 5, characterized in that: The centers of the second reflector (6), the second ¼ wave plate (5), the central polarization beam splitter prism (1) and the detector (2) are located on the same horizontal line.

7. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: A cemented lens (10) is provided on the optical path between the central polarization beam splitting prism (1) and the detector (2).

8. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: The first reflector (4) and the second reflector (6) are arranged on both sides of an L-shaped bracket (9) having an inner angle of 90°.

9. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: A collection card is provided at the rear end of the detector (2), and the collection card is used to collect and store changes in electrical signals generated by the detector (2).

10. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: The first laser generator (11) and the second laser generator (12) are modulated lasers.

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