Glass Substrate Defect Detection Device and Its Detection Method

Abstract

The present invention belongs to the technical field of defect detection, specifically relates to the defect detection of transparent materials, and particularly relates to a glass substrate defect detection device and a detection method thereof. Among them, the glass substrate defect detection device protects the glass substrate by setting a receiving groove on the detection plate and adding a liquid into the receiving groove to form a water film. While avoiding scratching the glass substrate, it will not lift the glass substrate, and thus will not interfere with machine vision detection. At the same time, two detection working conditions are set, and through the comparison of the image information of the two detection working conditions, the accurate detection of the scratches on both sides of the glass substrate to be detected is completed. During subsequent cutting, there is no need to avoid the scratches, and only the thinning of the surface where the scratches are located needs to be deepened, thereby improving the raw material utilization rate.

Description

Technical Field

[0001] The present invention belongs to the technical field of defect detection, specifically relates to the defect detection of transparent materials, and particularly relates to a glass substrate defect detection device and a detection method thereof. Background Art

[0002] A glass substrate is a very flat thin glass sheet and is an important basic material in the field of semiconductor packaging. If there are scratches on the surface of the glass substrate, it will cause the insulation performance of the glass substrate to decline, leading to problems such as short circuits or leakage. Therefore, scratch detection of the glass substrate is a key step to ensure product reliability, yield, and performance.

[0003] In the related art, a large glass substrate is cut, thinned, and polished to obtain a glass substrate of the required size. Before cutting, it is necessary to detect the surface scratches of the glass substrate. In order to avoid scratching the glass substrate on the detection table, many support blocks need to be set on the detection table to lift the glass substrate. However, in actual detection, due to the strong light transmittance of the glass substrate (90%-95%), the lifted glass substrate and the detection table will cause interference to machine vision detection. When using machine vision detection, the scratches on the back of the glass substrate will be obtained by vision detection, and the surface where the scratches are located cannot be directly located. During subsequent cutting, only the method of avoiding the scratched area can be used for cutting, resulting in low raw material utilization rate.

[0004] Therefore, how to solve the interference caused by the support blocks to machine vision detection to improve the raw material utilization rate is a technical problem that needs to be solved urgently at present.

[0005] It should be noted that the above information disclosed in this background art section is only used to understand the background art of the concept of this application. Therefore, the above description is not considered as information of the prior art. Summary of the Invention

[0006] The embodiments of the present disclosure at least provide a glass substrate defect detection device and its working method.

[0007] In a first aspect, the embodiments of the present disclosure provide a glass substrate defect detection device, including:

[0008] A detection platform;

[0009] A detection board, which is arranged on the detection platform and is provided with a receiving groove for receiving the glass substrate to be detected;

[0010] A driving component, which is arranged on the detection board and is used to drive the glass substrate to be detected into a first detection working condition and a second detection working condition;

[0011] A liquid supply assembly, which is arranged on the detection platform and is used to inject liquid into the accommodating groove to form a water film for protecting the glass substrate to be detected;

[0012] A vision detection module, which is arranged above the detection plate and is used to obtain image information of the glass substrate to be detected in the accommodating groove;

[0013] A control module, which is configured to obtain first image information of the glass substrate to be detected under a first detection condition and second image information under a second detection condition through the vision detection module;

[0014] And detect scratches on both sides of the glass substrate to be detected according to the comparison result of the first image information and the second image information.

[0015] In an openly disclosed embodiment, the driving assembly includes:

[0016] A pushing cylinder and two moving clamping members;

[0017] The two moving clamping members are arranged oppositely and are arranged at both ends of the detection plate;

[0018] The pushing cylinder is arranged at the bottom of the detection plate, and the piston rod of the pushing cylinder passes through the accommodating groove and is flush with the accommodating groove;

[0019] Wherein, a liquid discharge hole is formed at the bottom of the accommodating groove, and a flange for blocking the liquid discharge hole extends radially outward from the top of the piston rod of the pushing cylinder;

[0020] When the piston rod of the pushing cylinder extends out of the accommodating groove, the liquid discharge hole is opened to discharge the liquid.

[0021] In an openly disclosed embodiment, the control module controls the driving assembly to drive the glass substrate to be detected into the first detection condition, that is:

[0022] Control the liquid supply assembly to inject liquid into the accommodating groove;

[0023] Put the glass substrate into the accommodating groove through the suction cup of an external manipulator;

[0024] Control the two moving clamping members to move towards each other to clamp the glass substrate to be detected, so that the glass substrate to be detected is in a horizontal state.

[0025] In an openly disclosed embodiment, the control module controls the driving assembly to drive the glass substrate to be detected into the second detection condition, that is:

[0026] Control the two moving clamping members to move towards the pushing cylinder until one of the moving clamping members passes over the piston rod of the pushing cylinder, and then control the moving clamping member that has passed over the piston rod of the pushing cylinder to continue moving a preset distance. At the same time, control the other moving clamping member to stop moving;

[0027] Control the pushing cylinder to lift one side of the glass substrate to be detected, so that the glass substrate to be detected is in an inclined state.

[0028] In an open embodiment, in the second detection condition, the preset inclination angle of the glass substrate to be detected is α;

[0029] The range of α is between 20° and 50°;

[0030] Wherein, the extension distance L of the piston rod of the pushing cylinder = H * sinα;

[0031] In the formula, L is the extension distance of the piston rod of the pushing cylinder, and H is the length of the glass substrate to be detected.

[0032] In an open embodiment, in the first detection condition, the glass substrate to be detected is in a horizontal state;

[0033] In the second detection condition, the glass substrate to be detected is in an inclined state;

[0034] The control module detects the scratches on both sides of the glass substrate to be detected according to the comparison result of the first image information and the second image information, that is:

[0035] Preprocess the first image information and the second image information;

[0036] Enlarge the second image information by K times along the length direction to make the edge position information of the first image information and the second image information the same, where K is the magnification factor;

[0037] Through the gray threshold segmentation method, obtain the first scratch pixel point coordinate set A1 of the first image information and the second scratch pixel point coordinate set A2 of the second image information according to the first gray threshold;

[0038] Detect the scratches on both sides of the glass substrate to be detected according to the comparison result of the pixel point positions and the number of the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2.

[0039] In an open embodiment, wherein, the calculation method of the magnification factor K is as follows:

[0040] According to the edge detection algorithm, obtain the edge position information of the first image information and the second image information;

[0041] Calculate the graphic length H1 of the second image information based on the edge position information;

[0042] Calculate the ratio K = H / H1 of the length H of the glass substrate to be detected and the graphic length H1;

[0043] Wherein, the graphic length H1 refers to the length of the side corresponding to the long side of the glass substrate (600) in the second image information.

[0044] In an open embodiment, the control module detects the scratches on both sides of the glass substrate to be detected according to the comparison result of the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2, that is:

[0045] First comparison result, if the first scratch pixel point coordinate set A1 is not an empty set, it indicates that there is a scratch on the top surface of the glass substrate to be detected;

[0046] Second comparison result, if the first scratch pixel point coordinate set A1 is not an empty set and A2 - A1 ≠ empty set, it indicates that there is a scratch on the bottom surface of the glass substrate to be detected;

[0047] Third comparison result, if A1 ∪ A2 = empty set, it indicates that there is no scratch on the glass substrate to be detected.

[0048] In an open embodiment, the control module is further configured to:

[0049] When it is detected that there is a scratch on the glass substrate to be detected, control the liquid supply assembly to inject a staining solution into the receiving tank;

[0050] Then, after the scratched surface of the glass substrate to be detected faces the receiving tank through an external vacuum suction cup manipulator, place it into the receiving tank;

[0051] Stain for a preset time;

[0052] Obtain the third image information of the glass substrate to be detected under the second detection condition through the vision detection module;

[0053] Obtain the depth information of the scratch through the third image information for subsequent transfer and use.

[0054] In a second aspect, the embodiments of the present disclosure further provide a detection method applied to the glass substrate defect detection device as described above. The detection method includes:

[0055] Inject a liquid into the receiving tank through the liquid supply assembly to form a water film;

[0056] Place the glass substrate to be detected into the receiving tank;

[0057] The control drive assembly drives the glass substrate to be detected into the first detection condition, and the first image information is obtained through the vision detection module;

[0058] The control drive assembly drives the glass substrate to be detected into the second detection condition. Meanwhile, the liquid in the receiving groove is discharged, and after the liquid is discharged, the second image information is obtained through the vision detection module;

[0059] Detect the scratches on both sides of the glass substrate to be detected based on the first image information and the second image information.

[0060] In an open embodiment, the detection method further includes:

[0061] Screen the glass substrates with scratches;

[0062] Control the liquid supply assembly to inject the staining liquid into the receiving groove;

[0063] Then, after the scratched surface of the glass substrate to be detected faces the receiving groove, it is placed into the receiving groove by an external vacuum suction cup manipulator;

[0064] Stain for a preset time;

[0065] The control drive assembly drives the glass substrate to be detected into the second detection condition. Meanwhile, the liquid in the receiving groove is discharged, and after the liquid is discharged, the third image information is obtained through the vision detection module;

[0066] Obtain the depth information of the scratches through the third image information for subsequent transfer and use.

[0067] The beneficial effect of the present invention is that the glass substrate defect detection device and its detection method protect the glass substrate by setting a receiving groove on the detection plate and adding a liquid in the receiving groove to form a water film. While avoiding scratching the glass substrate, it will not lift the glass substrate, and thus will not interfere with machine vision detection. At the same time, two detection conditions are set, and through the comparison of the image information of the two detection conditions, the accurate detection of the scratches on both sides of the glass substrate to be detected is completed. During subsequent cutting, there is no need to avoid the scratches, and only the thinning of the surface where the scratches are located needs to be deepened, thereby improving the raw material utilization rate.

[0068] Other features and advantages of the present invention will be described in the following specification, and, in part, will be obvious from the specification, or will be understood by implementing the present invention. The objectives and other advantages of the present invention are achieved and obtained by the structures specifically pointed out in the specification and the drawings.

[0069] To make the above objectives, features, and advantages of the present invention more obvious and understandable, specific preferred embodiments are hereby given, and in conjunction with the accompanying drawings, the following detailed description is provided. Description of the Drawings

[0070] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0071] Figure 1 Schematic structural diagram of the glass substrate defect detection device provided by the embodiment of the present disclosure;

[0072] Figure 2 Schematic electrical control diagram of the glass substrate defect detection device provided by the embodiment of the present disclosure;

[0073] Figure 3 Top view of the glass substrate defect detection device provided by the embodiment of the present disclosure;

[0074] Figure 4 Front view of the glass substrate defect detection device provided by the embodiment of the present disclosure;

[0075] Figure 5 Schematic diagram of the first image information provided by the embodiment of the present disclosure;

[0076] Figure 6 Schematic diagram of the second image information and the magnified second image information provided by the embodiment of the present disclosure;

[0077] Figure 7 Comparison schematic diagram of the first image information and the second image information provided by the embodiment of the present disclosure;

[0078] Figure 8 Flowchart of the detection method of the glass substrate defect detection device provided by the embodiment of the present disclosure.

[0079] In the figure: 100, detection platform; 200, detection plate; 210, receiving groove; 211, liquid discharge hole; 300, driving assembly; 310, pushing cylinder; 311, piston rod; 312, flanging; 320, moving clamping member; 321, moving plate; 322, driving cylinder; 400, liquid supply assembly; 500, visual detection module; 600, glass substrate. Specific embodiments

[0080] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0081] It has been found through research that when detecting a glass substrate in the related art, multiple support blocks need to be set to lift the glass substrate to avoid scratching the glass substrate during detection. However, there is a large gap between the lifted glass substrate and the detection table. When using machine vision detection to detect the front surface of the glass substrate, scratches on the back surface will interfere with the detection, and it is impossible to accurately locate the surface where the scratches are located. During subsequent cutting, only the method of avoiding the location where the scratches are located can be used for cutting, resulting in waste of raw materials.

[0082] Based on the above research, the embodiments of the present disclosure provide a glass substrate defect detection device and its detection method. By filling the space between the glass substrate and the detection plate with a water film, the glass substrate can be prevented from being scratched during detection, and at the same time, it will not interfere with machine vision detection, and the surface where the scratches are located can be accurately detected, which is convenient for removing the scratches during subsequent polishing, thereby improving the utilization rate of raw materials.

[0083] Regarding the defects existing in the above solutions, they are all the results obtained by the inventor through practice and careful research. Therefore, the process of discovering the above problems and the solutions proposed by the present disclosure in this article for the above problems should all be the contributions made by the inventor to the present disclosure during the process of the present disclosure.

[0084] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0085] The following will describe in detail some embodiments of the present invention with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0086] Please refer to Figure 1 and Figure 2 , at least one embodiment provides a glass substrate defect detection device, including the following structures:

[0087] Detection platform 100.

[0088] The detection board 200 is disposed on the detection platform 100 and is provided with a receiving groove 210 for receiving the glass substrate 600 to be detected. Wherein, the bottom of the receiving groove 210 is a black matte ceramic plate to reduce the reflection of light by the detection board 200, and its surface roughness is less than 0.3 μm, thereby avoiding the interference of the roughness of the detection board 200 on the scratch detection.

[0089] The driving assembly 300 is disposed on the detection board 200 and is used to drive the glass substrate 600 to be detected into the first detection condition and the second detection condition.

[0090] The liquid supply assembly 400 is disposed on the detection platform 100 and is used to inject liquid into the receiving groove 210 to form a water film for protecting the glass substrate 600 to be detected.

[0091] Specifically, the liquid supply assembly 400 includes at least one liquid spraying head, and the liquid sprayed by the liquid spraying head is pure water.

[0092] By providing the receiving groove 210 on the detection board 200 and adding liquid into the receiving groove 210 to form a water film to protect the glass substrate 600, while avoiding scratching the glass substrate 600, the glass substrate 600 will not be lifted, and thus will not interfere with the machine vision detection.

[0093] The vision detection module 500 is disposed above the detection board 200 and is used to obtain the image information of the glass substrate 600 to be detected in the receiving groove 210.

[0094] Wherein, the vision detection module 500 is a 5-million-pixel industrial camera with a pixel size of 2 μm and a frame rate of 240 fps.

[0095] The control module is configured to obtain the first image information of the glass substrate 600 to be detected under the first detection condition and the second image information under the second detection condition through the vision detection module 500; and detect the scratches on both sides of the glass substrate 600 to be detected according to the comparison result of the first image information and the second image information. By setting two detection conditions and comparing the image information of the two detection conditions, the accurate detection of the scratches on both sides of the glass substrate 600 to be detected is completed. During subsequent cutting, there is no need to avoid the scratches, and only the thinning of the surface where the scratches are located needs to be deepened, thereby improving the raw material utilization rate.

[0096] Please refer to Figure 3 and Figure 4, the driving assembly 300 includes: a pushing cylinder 310 and two moving clamping members 320; the two moving clamping members 320 are arranged oppositely and are disposed at both ends of the detection plate 200; the pushing cylinder 310 is disposed at the bottom of the detection plate 200, and the piston rod 311 of the pushing cylinder 310 passes through the receiving groove 210 and is flush with the receiving groove 210.

[0097] The position of the glass substrate 600 is adjusted by driving the moving clamping assembly through the control module, and at the same time, assisted by the pushing of the pushing cylinder 310, the glass substrate 600 enters the first detection working condition and the second detection working condition.

[0098] Wherein, a drain hole 211 is formed at the bottom of the receiving groove 210, and a flange 312 for blocking the drain hole 211 extends radially outward from the top of the piston rod 311 of the pushing cylinder 310; when the piston rod 311 of the pushing cylinder 310 extends out of the receiving groove 210, the drain hole 211 is opened to drain the liquid.

[0099] In the second detection working condition, the drain hole 211 is opened, so as to facilitate the drainage of the liquid in the receiving groove 210.

[0100] The following is an explanation of the first working condition and the second working condition:

[0101] The control module controls the driving assembly 300 to drive the glass substrate 600 to be detected into the first detection working condition, that is:

[0102] Control the liquid supply assembly 400 to inject liquid into the receiving groove 210; place the glass substrate 600 into the receiving groove 210 through the suction cup of the external manipulator; control the two moving clamping members 320 to move towards each other to clamp the glass substrate 600 to be detected, so that the glass substrate 600 to be detected is in a horizontal state.

[0103] A schematic diagram of the glass substrate 600 under the first detection working condition is as Figure 3 shown. At this time, the two moving clamping members 320 clamp the glass substrate 600.

[0104] It should be noted that the thickness of the glass substrate 600 is greater than the groove depth of the receiving groove 210, so as to facilitate the clamping of the glass substrate 600 by the moving clamping members 320.

[0105] The control module controls the driving assembly 300 to drive the glass substrate 600 to be detected into the second detection working condition, that is:

[0106] Control the two moving clamping members 320 to move towards the pushing cylinder 310 (the moving direction is as Figure 3As shown in Figure F, until one of the moving clamping members 320 passes over the piston rod 311 of the pushing cylinder 310, control the moving clamping member 320 that has passed over the piston rod 311 of the pushing cylinder 310 to continue moving a preset distance. At the same time, control the other moving clamping member 320 to stop moving; control the pushing cylinder 310 to lift one side of the glass substrate 600 to be detected, so that the glass substrate 600 to be detected is in an inclined state.

[0107] A schematic diagram of the glass substrate 600 under the second detection condition is as Figure 4 shown. At this time, the pushing cylinder 310 pushes upward along the Figure 4 direction shown in Figure F, so that the glass substrate 600 to be detected is inclined.

[0108] Among them, the moving clamping member 320 includes a moving plate 321 and a driving cylinder 322. The driving cylinder 322 drives the moving plate 321 to slide on the detection plate 200 to complete the adjustment of the position of the glass substrate 600.

[0109] Please continue to refer to Figure 4 , when in the second detection condition, the preset inclination angle of the glass substrate 600 to be detected is α; the range of α is between 20° - 50°; among them, the extension distance L of the piston rod 311 of the pushing cylinder 310 = H * sinα; in the formula, L is the extension distance of the piston rod 311 of the pushing cylinder 310, and H is the length of the glass substrate 600 to be detected. By inclining the glass substrate 600, subsequent detection of scratches on the back surface of the glass substrate 600 is carried out.

[0110] In a preferred embodiment, α is 45°, so that the scratches on the back surface and the front surface are fully misaligned, facilitating subsequent scratch detection.

[0111] It should be noted that the preset inclination angle is the set angle, not the actual inclination angle of the glass substrate 600. The function of this angle is to confirm the extension distance of the piston rod 311 of the pushing cylinder 310.

[0112] Please continue to refer to Figure 3 and Figure 4 , when in the first detection condition, the glass substrate 600 to be detected is in a horizontal state; when in the second detection condition, the glass substrate 600 to be detected is in an inclined state.

[0113] The control module detects the scratches on both sides of the glass substrate 600 to be detected according to the comparison result of the first image information and the second image information, that is:

[0114] Step S1, preprocess the first image information and the second image information.

[0115] Specifically, the collected color image is converted into a grayscale image, and then the grayscale image is denoised by Gaussian filtering. During this process, the interference caused by the water film to the image is eliminated.

[0116] Step S2: Magnify the second image information by K times along the length direction to make the edge position information of the first image information and the second image information the same, where K is the magnification factor.

[0117] Specifically, since the second image information is taken after the glass substrate 600 is tilted, at this time, the contour of the glass substrate 600 in the obtained second image information is shorter than the contour of the glass substrate 600 in the first image information. It is necessary to magnify the second image information along the length direction according to a certain ratio before the contours of the glass substrate 600 corresponding to the first image information and the second image information are of the same size, so as to facilitate subsequent comparison.

[0118] Among them, the schematic diagram of the first image information is as Figure 5 shown, Figure 5 where a and b in are two scratches existing on the top surface of the glass substrate 600; the schematic diagrams of the second image information and the magnified second image information are as Figure 6 shown, Figure 6 where a and b in are two scratches existing on the top surface of the glass substrate 600, c and d are two scratches existing on the bottom surface of the glass substrate 600, a` and b` are two scratches existing on the top surface of the glass substrate 600 in the magnified second image information, and c` and d` are two scratches existing on the bottom surface of the glass substrate 600 in the magnified second image information.

[0119] Step S3: Through the grayscale threshold segmentation method, obtain the first scratch pixel point coordinate set A1 of the first image information and the second scratch pixel point coordinate set A2 of the second image information according to the first grayscale threshold.

[0120] Among them, the average value A of the first image information and the second image information obtained by the scratch-free glass substrate 600 under the first detection condition and the second detection condition, the first grayscale threshold T = β * A.

[0121] Among them, T is the first grayscale threshold; β is a compensation coefficient, and β < 0.9.

[0122] The pixel points smaller than the first grayscale threshold are screened out and put into the set as the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2.

[0123] For example, in a certain example, A1 = {(100, 99), (101, 100), (101, 101), (102, 101), (102, 102), (102, 103), (102, 104)}, A2 = {(100, 99), (101, 100), (101, 101), (102, 101), (102, 102), (102, 103), (102, 104), (200, 99), (201, 99), (202, 99)}, where (100, 99) indicates that the gray value of the pixel at the 100th row and 99th column is less than the first gray threshold, and so on. (101, 100) indicates that the gray value of the pixel at the 101st row and 100th column is less than the first gray threshold. Similarly, (101, 101)…

[0124] It should be noted that here is just a simple explanation of the data type structure of the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2, and does not represent the number of pixel points in the actual detection process. Step S4: Detect the scratches on both sides of the glass substrate 600 to be detected according to the comparison result between the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2.

[0125] Specifically, for the first comparison result, if the first scratch pixel point coordinate set A1 is not an empty set, it means that there is a scratch on the top surface of the glass substrate 600 to be detected. As Figure 5 shown.

[0126] For the second comparison result, if the first scratch pixel point coordinate set A1 is not an empty set and A2 - A1 ≠ empty set, it means that there is a scratch on the bottom surface of the glass substrate 600 to be detected. As Figure 7 shown. In the above example, A2 - A1 = {(200, 99), (201, 99), (202, 99)}, and (200, 99), (201, 99), (202, 99) are the position coordinates of the scratches on the bottom surface.

[0127] For the third comparison result, if A1 ∪ A2 = empty set, it means that there is no scratch on the glass substrate 600 to be detected. That is, if there are no pixel points less than the first gray threshold in both A1 and A2, it indicates that there is no scratch on the glass substrate 600 to be detected.

[0128] It should be noted that the calculation method of the magnification factor K is as follows:

[0129] According to the edge detection algorithm, obtain the edge position information of the first image information and the second image information.

[0130] Calculate the graphic length H1 of the second image information according to the edge position information.

[0131] Calculate the ratio K = H / H1 of the length H of the glass substrate 600 to be detected to the pattern length H1, where the pattern length H1 refers to the length of the side corresponding to the long side of the glass substrate (600) in the second image information.

[0132] The control module is further configured to: when a scratch is detected on the glass substrate 600 to be detected, control the liquid supply assembly 400 to inject a staining solution into the accommodation groove 210; then, after the scratched surface of the glass substrate 600 to be detected faces the accommodation groove 210, place it into the accommodation groove 210; stain for a preset time (20 minutes); obtain third image information of the glass substrate 600 to be detected under the second detection condition through the vision detection module 500; obtain the depth information of the scratch through the third image information for subsequent transfer and use.

[0133] Specifically, when detecting the scratch depth on the scratched surface, the detection is performed by the staining method. According to experimental data, when the scratch is between 5 - 50 μm, the color depth of the scratch is linearly correlated with the 0.8th power of the scratch volume.

[0134] The depth is calculated by the following formula:

[0135] RGBavg = (R + G + B) / 3 = mV 0.8 + b;

[0136] In the formula, RGBavg represents the average color value of the scratch; R represents the color value of the red channel; G represents the color value of the green channel; B represents the color value of the blue channel; m represents the exponential fitting coefficient, ranging from 0.5 - 2; b is the background color value of the detection plate 200, ranging from 50 - 150; V represents the scratch volume (unit: μm 3 )

[0137] Obtain the length (unit: μm) l and width w (unit: μm) of the scratch through image analysis, and further calculate the scratch depth h (unit: μm), where the formula is as follows:

[0138] h = V / (wl).

[0139] Assume that the thickness of the glass substrate 600 is W 总 (unit: μm), and the thickness of the thinned glass substrate 600 is W 实 (unit: μm), and the polishing wear thickness is λ (unit: μm);

[0140] h < W 总 - W 实 - 2λ indicates that the scratch will not affect the normal production of the glass substrate 600 and can meet the subsequent thinning and polishing requirements.

[0141] It should be noted that the scratch detection is divided into two stages. In the first stage, pure water is used to form a water film for the primary screening of the glass substrate 600. After the glass substrates 600 with scratches are screened out, secondary detection is carried out centrally to detect the scratch depth. During the secondary detection, a staining agent is sprayed through another spray head of the liquid supply assembly 400.

[0142] Please refer to Figure 8 , this embodiment of the present disclosure also provides a detection method applied to the glass substrate defect detection device as described above. The detection method includes:

[0143] S110: Inject liquid into the receiving groove 210 through the liquid supply assembly 400 to form a water film.

[0144] S120: Place the glass substrate 600 to be detected into the receiving groove 210.

[0145] S130: Control the driving assembly 300 to drive the glass substrate 600 to be detected into the first detection condition, and obtain the first image information through the vision detection module 500.

[0146] S140: Control the driving assembly 300 to drive the glass substrate 600 to be detected into the second detection condition. At the same time, drain the liquid in the receiving groove 210, and obtain the second image information through the vision detection module 500 after the liquid is drained.

[0147] S150: Detect the scratches on both sides of the glass substrate 600 to be detected based on the first image information and the second image information.

[0148] Steps S110 - S150 are preliminary detections to screen out the glass substrates 600 with scratches. By setting the receiving groove 210 on the detection plate 200 and adding liquid to the receiving groove 210 to form a water film, the glass substrate 600 is protected. While avoiding scratching the glass substrate 600, it will not lift the glass substrate 600, and thus will not interfere with the machine vision detection. At the same time, two detection conditions are set, and through the comparison of the image information of the two detection conditions, the accurate detection of the scratches on both sides of the glass substrate 600 to be detected is completed. During subsequent cutting, there is no need to avoid the scratches, and only the thinning of the surface where the scratches are located needs to be deepened, thereby improving the raw material utilization rate.

[0149] After screening out the glass substrates 600 with scratches, the detection method further includes:

[0150] S210: Screen the glass substrates 600 with scratches.

[0151] S220: Control the liquid supply component 400 to inject the dyeing liquid into the receiving tank 210.

[0152] S230: Then, after the scratched surface of the glass substrate 600 to be detected faces the receiving tank 210, place it into the receiving tank 210 through an external vacuum suction cup manipulator.

[0153] S240: Dye for a preset time.

[0154] S250: Control the driving component 300 to drive the glass substrate 600 to be detected into the second detection working condition. Meanwhile, drain the liquid in the receiving tank 210, and after the liquid is drained, obtain the third image information through the vision detection module 500.

[0155] S260: Obtain the depth information of the scratch through the third image information for subsequent transfer and use.

[0156] By detecting the depth of the scratch, determine whether the scratch depth h meets the usage requirements for subsequent thinning and polishing. When the requirements for thinning and polishing are met, only the thinning of the surface where the scratch is located needs to be deepened, thereby improving the raw material utilization rate.

[0157] In summary, the present invention provides a glass substrate defect detection device and its detection method. By providing a receiving tank 210 on the detection plate 200 and adding a liquid to form a water film in the receiving tank 210 to protect the glass substrate 600, while avoiding scratching the glass substrate 600, it will not lift the glass substrate 600, and thus will not interfere with machine vision detection. At the same time, two detection working conditions are set, and through the comparison of the image information of the two detection working conditions, accurate detection of the scratches on both sides of the glass substrate 600 to be detected is completed. During subsequent cutting, there is no need to avoid the scratches, and only the thinning of the surface where the scratches are located needs to be deepened, thereby improving the raw material utilization rate.

[0158] Inspired by the above ideal embodiments according to the present invention, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A glass substrate defect detection device, characterized in that, Including: A detection platform (100); A detection board (200) which is arranged on the detection platform (100) and is provided with a receiving groove (210) for receiving a glass substrate (600) to be detected; A driving assembly (300) which is arranged on the detection board (200) and is used for driving the glass substrate (600) to be detected into a first detection condition and a second detection condition; A liquid supply assembly (400) which is arranged on the detection platform (100) and is used for injecting liquid into the receiving groove (210) to form a water film for protecting the glass substrate (600) to be detected; A vision detection module (500) which is arranged above the detection board (200) and is used for acquiring image information of the glass substrate (600) to be detected in the receiving groove (210); A control module which is configured to acquire first image information of the glass substrate (600) to be detected in the first detection condition and second image information in the second detection condition through the vision detection module (500); And detect scratches on both sides of the glass substrate (600) to be detected according to the comparison result of the first image information and the second image information; The driving assembly (300) includes: A pushing cylinder (310) and two moving clamping members (320); The two moving clamping members (320) are arranged oppositely and are arranged at both ends of the detection board (200); The pushing cylinder (310) is arranged at the bottom of the detection board (200), and a piston rod (311) of the pushing cylinder (310) passes through the receiving groove (210) and is flush with the receiving groove (210); Wherein, a drain hole (211) is formed at the bottom of the receiving groove (210), and a flange (312) for blocking the drain hole (211) extends radially outwards from the top of the piston rod (311) of the pushing cylinder (310); When the piston rod (311) of the pushing cylinder (310) extends out of the receiving groove (210), the drain hole (211) is opened to drain the liquid; In the first detection condition, the glass substrate (600) to be detected is in a horizontal state; In the second detection condition, the glass substrate (600) to be detected is in an inclined state; The control module detects scratches on both sides of the glass substrate (600) to be detected according to the comparison result of the first image information and the second image information, that is: Preprocess the first image information and the second image information; Enlarge the second image information by K times along the length direction to make the edge position information of the first image information and the second image information the same, where K is the magnification factor; Through the gray threshold segmentation method, obtain a first scratch pixel point coordinate set A1 of the first image information and a second scratch pixel point coordinate set A2 of the second image information according to a first gray threshold; Detect scratches on both sides of the glass substrate (600) to be detected according to the comparison result of the positions and quantities of the pixel points in the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2.

2. The glass substrate defect detection device according to claim 1, wherein: The control module controls the driving assembly (300) to drive the glass substrate to be detected (600) into the first detection condition, that is: Control the liquid supply assembly (400) to inject liquid into the receiving groove (210); Place the glass substrate to be detected (600) into the receiving groove (210) through the suction cup of the external manipulator; Control the two moving clamping members (320) to move towards each other, clamp the glass substrate to be detected (600), and make the glass substrate to be detected (600) in a horizontal state.

3. The glass substrate defect detection device according to claim 1, wherein: The control module controls the driving assembly (300) to drive the glass substrate to be detected (600) into the second detection condition, that is: Control the two moving clamping members (320) to move towards the pushing cylinder (310) until one of the moving clamping members (320) crosses the piston rod (311) of the pushing cylinder (310), and then control the moving clamping member (320) that crosses the piston rod (311) of the pushing cylinder (310) to continue moving a preset distance. At the same time, control the other moving clamping member (320) to stop moving; Control the pushing cylinder (310) to lift one side of the glass substrate to be detected (600), and make the glass substrate to be detected (600) in an inclined state.

4. The glass substrate defect detection device according to claim 3, wherein: In the second detection condition, the preset inclination angle of the glass substrate to be detected (600) is α; The range of α is between 20° and 50°; Wherein, the extension distance L of the piston rod (311) of the pushing cylinder (310) = H * sinα; In the formula, L is the extension distance of the piston rod (311) of the pushing cylinder (310), and H is the length of the glass substrate to be detected (600).

5. The glass substrate defect detection device according to claim 1, It is characterized in that: Among them, the calculation method of the magnification K is as follows: According to the edge detection algorithm, obtain the edge position information of the first image information and the second image information; Calculate the graphic length H1 of the second image information according to the edge position information; Calculate the ratio K = H / H1 of the length H of the glass substrate to be detected (600) to the graphic length H1; Among them, the graphic length H1 refers to the length of the side corresponding to the long side of the glass substrate to be detected (600) in the second image information.

6. The glass substrate defect detection device according to claim 1, wherein: The control module detects the scratches on both sides of the glass substrate to be detected (600) according to the comparison result between the first scratch pixel point coordinate set A1 and the second scratch pixel point coordinate set A2, that is: First comparison result, if the first scratch pixel point coordinate set A1 is not an empty set (∅), it means that there is a scratch on the top surface of the glass substrate to be detected (600); Second comparison result, if the first scratch pixel point coordinate set A1 is not an empty set (∅) and A2 - A1 ≠ ∅, it means that there is a scratch on the bottom surface of the glass substrate to be detected (600); The third comparison result, A1∪A2 = ∅, indicates that there are no scratches on the glass substrate (600) to be detected.

7. The glass substrate defect detection device according to claim 1, wherein the control module is further configured to: when it is detected that there are scratches on the glass substrate (600) to be detected, control the liquid supply assembly (400) to inject a staining solution into the accommodation groove (210); then, after the scratched surface of the glass substrate (600) to be detected faces the accommodation groove (210) through an external vacuum suction cup manipulator, place it into the accommodation groove (210); stain for a preset time; obtain third image information of the glass substrate (600) to be detected under the second detection condition through the vision detection module (500); obtain the depth information of the scratches through the third image information for subsequent transfer and use.

8. A detection method applied to the glass substrate defect detection device according to any one of claims 1-7, characterized in that, The detection method includes: inject a liquid into the accommodation groove (210) through the liquid supply assembly (400) to form a water film; place the glass substrate (600) to be detected into the accommodation groove (210); control the driving assembly (300) to drive the glass substrate (600) to be detected into the first detection condition, and obtain first image information through the vision detection module (500); control the driving assembly (300) to drive the glass substrate (600) to be detected into the second detection condition. Meanwhile, drain the liquid in the accommodation groove (210), and obtain second image information through the vision detection module (500) after the liquid is drained; detect the scratches on both sides of the glass substrate (600) to be detected based on the first image information and the second image information.

9. The detection method of the glass substrate defect detection device according to claim 8, wherein the detection method further includes: screen the glass substrate (600) to be detected with scratches; control the liquid supply assembly (400) to inject a staining solution into the accommodation groove (210); then, after the scratched surface of the glass substrate (600) to be detected faces the accommodation groove (210) through an external vacuum suction cup manipulator, place it into the accommodation groove (210); stain for a preset time; control the driving assembly (300) to drive the glass substrate (600) to be detected into the second detection condition. Meanwhile, drain the liquid in the accommodation groove (210), and obtain third image information through the vision detection module (500) after the liquid is drained; obtain the depth information of the scratches through the third image information for subsequent transfer and use.

Images