Detection equipment for preparing electronic mixed gas

By using the combination of joints, transmission components and other components in the detection equipment, convenient switching and cleaning of joints is achieved, the problem of joint residue affecting detection in the prior art is solved, and the detection accuracy and stability are improved.

CN120064569APending Publication Date: 2025-05-30江苏安瑞森电子材料有限公司
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Patent Information

Application Number
CN202510195897.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-21
Publication Date
2025-05-30

AI Technical Summary

Technical Problem

During continuous inspection by the fixed detection equipment in the prior art, the joints tend to retain gas characteristics or impurities, affecting subsequent detection results, and dust impurities are easily attached when connected, resulting in inaccurate detection.

Method used

A detection device for the preparation of electronic mixed gas is designed, using a combination of joints, transmission components, connection components, rotation components and direction limiting components to achieve convenient switching and cleaning of joints, avoiding gas and impurities residues, and improving detection accuracy.

Benefits of technology

Through convenient joint switching and cleaning, the impact of gases and impurities on subsequent inspections is avoided, the detection accuracy and stability are improved, and the maintenance and operation of equipment is simplified.

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Abstract

The invention discloses detection equipment for preparing electronic mixed gas, and belongs to the technical field of gas detection.The detection equipment comprises a main body module and a conversion module, the main body module comprises a detection instrument main body, the bottom of the detection instrument main body is connected with a test tube, and an L-shaped box is fixedly connected between the bottom and one side of the detection instrument main body; the conversion module comprises a long rod rotationally connected to the top of the inner wall of the L-shaped box, through the arrangement of a connector, a transmission assembly, a joining assembly, a rotating assembly and a direction limiting assembly, the connector is convenient to switch after being connected and used, and the situation that a large number of residues of gas and impurities seriously influence a subsequent detection result is avoided; moreover, the joints do not interfere with each other, the detection accuracy is improved as much as possible, a plurality of joints can be cleaned at the same time after continuous detection is completed, the cleaning is rapid, and subsequent detection and use are facilitated.
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Description

Technical Field

[0001] The present invention relates to the technical field of gas detection, and more specifically, to a detection device for the preparation of electronic mixed gases. Background Art

[0002] An electronic mixed gas refers to a gas containing two or more effective components, or a gas that, although not an effective component, has a content exceeding the specified limit. For example, a thermal oxidation mixed gas: such as a mixed gas of oxygen and nitrogen or argon, which is used to form an oxide layer on the surface of a silicon wafer in semiconductor manufacturing and has important applications in aspects such as insulation isolation of integrated circuits. There is also a diffusion mixed gas: formed by mixing a carrier gas (such as argon, nitrogen) with a gas having a diffusion effect (such as borane, phosphine, etc.). All of these belong to electronic mixed gases, and such gases can be detected by corresponding gas detection devices.

[0003] According to the search, the patent with the patent number CN109752506A discloses a combustible gas detector, including a housing, an air suction pipe fixed at the head end of the housing, and a display screen. A vacuum pump is arranged inside the housing. The air suction pipe is communicated with the vacuum pump inside the housing. A detection module is arranged between the vacuum pump and the air suction pipe. The detection module is electrically connected to the display screen. An installation groove is opened on the housing. The cross-sectional area of the installation groove is larger than the area of the display screen so as to accommodate the display screen inside. The display screen is installed at the notch of the installation groove. One end of the display screen facing the head end of the housing is hinged to the housing, and the other end of the display screen facing the tail end of the housing is a free end. A driving mechanism for pulling the display screen to rotate towards the inside of the installation groove is arranged inside the installation groove. The present invention has the advantage of being able to conveniently and quickly read the numbers on the display screen in an environment with a relatively large light intensity, such as outdoors.

[0004] Regarding the above related technologies, in the currently existing fixed detection devices, during use, a gas-passing pipeline needs to be connected to the connection joint on the detection device, and then disconnected after the detection is completed. However, when disconnecting after the connection and detection and then continuously detecting again, the previously detected joint, after coming into contact with a certain gas, will to a certain extent retain the characteristics of the gas or affect the adsorption, diffusion, etc. behaviors of subsequent gases, which may affect the subsequent detection. At the same time, the attachment of other dust impurities during the connection of the joint may also affect the subsequent detection. For this reason, a detection device for the preparation of electronic mixed gases is proposed. Summary of the Invention

[0005] In order to solve the above problems, the present invention provides a detection device for the preparation of electronic mixed gases, adopting the following technical solutions:

[0006] A detection device for preparing electronic mixed gas, comprising a main body module and a conversion module, the main body module comprising a detection instrument body, a test tube connected to the bottom of the detection instrument body, an L-shaped box fixedly connected between the bottom and one side of the detection instrument body, the conversion module comprising a long rod rotatably connected to the top of the inner wall of the L-shaped box, the bottom end of the long rod extends to the bottom of the L-shaped box and is fixedly connected to a conversion disk, the interior of the conversion disk is annularly provided with a plurality of joints equidistantly, the interior of the L-shaped box is provided with a transmission assembly connected to the long rod, the bottom of the detection instrument body is provided with a connection assembly connected to one of the joints and the test tube, the front end face of the L-shaped box is provided with a rotating assembly connected to the connection assembly, and one side of the L-shaped box is provided with a direction limiting assembly connected to the outer surface of the long rod.

[0007] Furthermore, the connection assembly includes two slide rails fixedly connected to the bottom of the detection instrument body, the interior of the two slide rails is slidably connected with a slider, the front end surfaces of the two sliders are hinged with a connection arm, the bottoms of the two sliders are fixedly connected with a steering rod, one end of the two steering rods is fixedly connected with a sealing arc plate, the inner walls of the two sealing arc plates are in contact with the outer surface of the test tube and one of the joints, the two ends of the two sealing arc plates are fitted with each other, and the adjacent sides of the two sealing arc plates are fixedly connected with two sealing strips.

[0008] Furthermore, the main body module also includes a plurality of annular sealing grooves, which are respectively opened on the outer surfaces of the plurality of joints and one of the test tubes, and the four sealing arc plates are respectively movably clamped in the interior of two of the annular sealing grooves.

[0009] Furthermore, the rotating assembly includes a rotating column rotatably connected to the front end face of the L-shaped box, the interior of the rotating column is movably connected to a movable square bar, the rear end face of the movable square bar is rotatably connected to a center connecting block, a first spring is fixedly connected between the outer surface of the movable square bar and the front end face of the rotating column, a control handle is provided on the front end face of the movable square bar, and one end of the two connecting arms are hinged to the center connecting block.

[0010] Furthermore, the rotating assembly also includes an inner hollow slot box fixedly connected to the front end surface of the L-shaped box, the interior of the inner hollow slot box is movably connected with an L-shaped metal strip, the outer surface of the movable square strip is provided with a slot, the interior of the slot is fixedly connected with a second magnetic block, one end of the L-shaped metal strip is movably connected to the interior of the slot and is magnetically connected to the second magnetic block, the other end of the L-shaped metal strip extends to the outside of the inner hollow slot box, and the interior of the inner hollow slot box is fixedly connected with a first magnetic block.

[0011] Further, the transmission assembly includes a worm gear fixedly connected to the outer surface of the long rod. A worm is rotatably connected between the front end face and the rear end face of the inner wall of the L-shaped box, and the outer surface of the worm is meshed with the outer surface of the worm gear.

[0012] Further, the transmission assembly further includes two transmission rollers respectively fixedly connected to the outer surfaces of the worm and the rotating column, and a transmission belt is drivingly connected between the outer surfaces of the two transmission rollers.

[0013] Further, the limiting component includes a round wheel fixedly connected to the lower part of the outer surface of the long rod. A plurality of one-way ratchet grooves are formed on the outer surface of the round wheel. A hollow block is fixedly connected to one side of the L-shaped box. A one-way ratchet bar is movably connected inside the hollow block. One end of the one-way ratchet bar is movably connected inside one of the one-way ratchet grooves, and a second spring is fixedly connected between the other end of the one-way ratchet bar and the inner wall of the hollow block.

[0014] Further, the number of the plurality of one-way ratchet grooves is the same as the number of the plurality of connectors, and the positions of the plurality of one-way ratchet grooves and the plurality of connectors correspond to each other.

[0015] Further, the conversion module further includes a plurality of clamping plates respectively fixedly connected to the outer surfaces of the plurality of connectors. A plurality of installation slots are formed on the outer surface of the conversion disk. The plurality of clamping plates are respectively movably clamped inside the plurality of installation slots. A plurality of installation bolts are threadedly connected to the top of the conversion disk, and the plurality of installation bolts respectively extend into the plurality of clamping plates.

[0016] In summary, the present invention includes the following beneficial technical effects:

[0017] (1) Through the settings of the connectors, the transmission assembly, the connection assembly, the rotating assembly and the limiting assembly, the present invention makes it convenient to switch after the connectors are connected for use, avoids a large amount of residual gas and impurities from seriously affecting the subsequent detection results, and each connector does not interfere with each other, so as to improve the detection accuracy as much as possible. After continuous detection is completed, multiple connectors can be cleaned together, and the cleaning is fast, which is convenient for subsequent detection use;

[0018] (2) Through the settings of the round wheel, the one-way ratchet grooves, the hollow block, the one-way ratchet bar and the second spring, when the one-way ratchet bar enters the next one-way ratchet groove, the one-way ratchet bar will be pushed by the second spring to impact the inner wall of the next one-way ratchet groove to generate a sound, so as to facilitate the staff to stop the operation in time, and then improve the operation accuracy;

[0019] (3) Through the settings of the annular sealing groove and the sealing strip, the sealing performance of the connection can be further improved, so as to avoid gas leakage and improve the stability during detection;

[0020] (4) Through the arrangement of the clamping plate and the mounting bolts in the present invention, it is possible to replace the joint when it is damaged, avoiding the influence of the damaged joint on the overall test effect. Description of the Drawings

[0021] Figure 1 is a schematic front - end face structure diagram of the present invention;

[0022] Figure 2 is a schematic rear - end face structure diagram of the present invention;

[0023] Figure 3 is a schematic sectional structure diagram of the L - shaped box of the present invention;

[0024] Figure 4 is a schematic structure diagram of the conversion module of the present invention;

[0025] Figure 5 is an exploded structure diagram of the connection component of the present invention;

[0026] Figure 6 is a schematic structure diagram of the rotation component of the present invention;

[0027] Figure 7 is a schematic sectional structure diagram of the limiting component of the present invention;

[0028] Figure 8 is a schematic sectional structure diagram of the rotation component of the present invention.

[0029] Explanation of the reference numerals in the drawings:

[0030] 100, main body module; 110, detection instrument main body; 120, L - shaped box; 130, test tube; 140, annular sealing groove; 150, mounting bolt;

[0031] 200, conversion module; 210, long rod; 220, conversion disk; 230, clamping plate; 240, joint; 250, transmission component; 251, worm gear; 252, worm; 253, transmission roller; 254, transmission belt; 260, connection component; 261, slide rail; 262, slider; 263, connection arm; 264, steering rod; 265, sealing arc plate; 266, sealing strip; 270, rotation component; 271, rotation column; 272, movable square bar; 273, first spring; 274, central connection block; 275, control handle; 276, hollow groove box; 277, L - shaped metal bar; 278, first magnetic attraction block; 279, second magnetic attraction block; 280, limiting component; 281, round wheel; 282, one - way ratchet groove; 283, hollow block; 284, one - way ratchet bar; 285, second spring. Detailed Embodiment

[0032] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0033] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "top / bottom end", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0034] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "provided with", "sheathed / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] The following will further elaborate on the present invention Figure 1-8 in further detail.

[0036] Please refer to Figure 1-8 , a detection device for the preparation of electronic mixed gas, including a main body module 100 and a conversion module 200. The main body module 100 includes a detection instrument main body 110. A test tube 130 is connected to the bottom of the detection instrument main body 110. An L-shaped box 120 is fixedly connected between the bottom and one side of the detection instrument main body 110. The conversion module 200 includes a long rod 210 rotatably connected to the top of the inner wall of the L-shaped box 120. The bottom end of the long rod 210 extends to the bottom of the L-shaped box 120 and is fixedly connected to a conversion disk 220. A plurality of connectors 240 are arranged at equal intervals in a ring shape inside the conversion disk 220. A transmission component 250 connected to the long rod 210 is arranged inside the L-shaped box 120. An adapter component 260 connected to one of the connectors 240 and the test tube 130 is arranged at the bottom of the detection instrument main body 110. A rotation component 270 connected to the adapter component 260 is arranged on the front end face of the L-shaped box 120. A limiting component 280 connected to the outer surface of the long rod 210 is arranged on one side of the L-shaped box 120.

[0037] In use, connect the pipeline through which the gas to be tested flows to one of the connectors 240. The gas enters the detection instrument main body 110 through the connector 240 and the test tube 130 for detection. After the detection is completed, separate the pipeline from the connector 240. When it is necessary to connect the next pipeline, the staff first press the rotation assembly 270 to separate the connection assembly 260 from one of the connectors 240 and the test tube 130. After separation, rotate the rotation assembly 270. The rotation assembly 270 will drive the transmission assembly 250, and the transmission assembly 250 will drive the long rod 210 and the conversion disk 220 to rotate. Stop rotating the rotation assembly 270 after the limiting component 280 makes a sound. At this time, the other connector 240 will move below the test tube 130. Restore the rotation assembly 270 and lock it, so that the connection assembly 260 makes a sealed connection between the other connector 240 and the test tube 130, ensuring the subsequent gas flow, and thus facilitating the switching of the connector 240 and preventing a greater impact on subsequent detections.

[0038] The connection component 260 includes two slide rails 261 both fixedly connected to the bottom of the detection instrument main body 110. A slider 262 is slidably connected inside each of the two slide rails 261. An adapter arm 263 is hinged to the front end face of each of the two sliders 262. A steering rod 264 is fixedly connected to the bottom of each of the two sliders 262. A sealing arc plate 265 is fixedly connected to one end of each of the two steering rods 264. The inner walls of the two sealing arc plates 265 are in contact with the outer surfaces of the test tube 130 and one of the connectors 240. The two ends of the two sealing arc plates 265 are in contact with each other. Two sealing strips 266 are fixedly connected to the adjacent surfaces of the two sealing arc plates 265. The main body module 100 further includes a plurality of annular sealing grooves 140 respectively opened on the outer surfaces of the plurality of connectors 240 and one of the test tubes 130. The four sealing arc plates 265 are respectively movably clamped inside two of the annular sealing grooves 140. The rotating component 270 includes a rotating column 271 rotatably connected to the front end face of the L-shaped box 120. An active square bar 272 is movably connected inside the rotating column 271. A central connection block 274 is rotatably connected to the rear end face of the active square bar 272. A first spring 273 is fixedly connected between the outer surface of the active square bar 272 and the front end face of the rotating column 271. A control handle 275 is arranged on the front end face of the active square bar 272. One end of each of the two adapter arms 263 is hinged to the central connection block 274. The rotating component 270 further includes an inner hollow groove box 276 fixedly connected to the front end face of the L-shaped box 120. An L-shaped metal bar 277 is movably connected inside the inner hollow groove box 276. A card slot is opened on the outer surface of the active square bar 272. A second magnetic attraction block 279 is fixedly connected inside the card slot. One end of the L-shaped metal bar 277 is movably connected inside the card slot and magnetically connected to the second magnetic attraction block 279. The other end of the L-shaped metal bar 277 extends to the outside of the inner hollow groove box 276. A first magnetic attraction block 278 is fixedly connected inside the inner hollow groove box 276. The transmission component 250 includes a worm gear 251 fixedly connected to the outer surface of the long rod 210. A worm 252 is rotatably connected between the front end face and the rear end face of the inner wall of the L-shaped box 120. The outer surface of the worm 252 is meshed with the outer surface of the worm gear 251. The transmission component 250 further includes two transmission rollers 253 respectively fixedly connected to the outer surfaces of the worm 252 and the rotating column 271. A transmission belt 254 is connected in transmission between the outer surfaces of the two transmission rollers 253.

[0039] The staff member toggles the L-shaped metal strip 277 to withdraw it from the card slot and separate it from the second magnetic attraction block 279. At this time, the L-shaped metal strip 277 is connected to the first magnetic attraction block 278. Subsequently, by manipulating the handle 275 to press the movable square bar 272, the first spring 273 will contract, and the central connection block 274 will push the two connecting arms 263. The connecting arms 263 will drive the two sliders 262 to move away from each other, causing the two sealing arc plates 265 to move away, and the sealing strip 266 to withdraw from the annular sealing groove 140. Then, by manipulating the handle 275 to rotate the movable square bar 272, the rotating column 271 will be driven to rotate. When the rotating column 271 rotates, it will drive the worm 252 through the transmission belt 254. The worm 252 will drive the worm wheel 251 to drive the long rod 210 to rotate. The long rod 210 drives the conversion disk 220 and the joint 240 to rotate. When another joint 240 moves to the lower part of the test tube 130, release the handle 275 to let the first spring 273 push the movable square bar 272 to reset, so that the two sealing arc plates 265 approach each other and fit on the outer surfaces of the test tube 130 and the other joint 240. The sealing strip 266 will also be stuck into the annular sealing groove 140 to improve the connection tightness. At this time, toggle the L-shaped metal strip 277 to snap into the card slot and magnetically connect with the second magnetic attraction block 279, and the state of the movable square bar 272 can be locked, thereby locking and maintaining the states of the two sealing arc plates 265 and the sealing strip 266, ensuring the subsequent gas-tight flow, and facilitating the switching of the joint 240.

[0040] The limiting component 280 includes a round wheel 281 fixedly connected to the lower part of the outer surface of the long rod 210. A plurality of one-way ratchet grooves 282 are formed on the outer surface of the round wheel 281. One side of the L-shaped box 120 is fixedly connected with a hollow block 283. A one-way ratchet bar 284 is movably connected inside the hollow block 283. One end of the one-way ratchet bar 284 is movably connected inside one of the one-way ratchet grooves 282. A second spring 285 is fixedly connected between the other end of the one-way ratchet bar 284 and the inner wall of the hollow block 283. The number of the plurality of one-way ratchet grooves 282 is the same as the number of the plurality of joints 240, and the positions of the plurality of one-way ratchet grooves 282 correspond to the positions of the plurality of joints 240.

[0041] When the long rod 210 rotates, the one-way ratchet bar 284 will move out of one of the one-way ratchet grooves 282. When another joint 240 moves to the lower part of the test tube 130, the one-way ratchet bar 284 will be pushed into another one-way ratchet groove 282 by the second spring 285 and make a sound. After making the sound, the staff member stops rotating the handle 275.

[0042] The conversion module 200 also includes a plurality of clamping plates 230 respectively fixedly connected to the outer surfaces of the plurality of joints 240. The outer surface of the conversion disk 220 is provided with a plurality of mounting slots. The plurality of clamping plates 230 are respectively movably clamped in the interior of the plurality of mounting slots. The top of the conversion disk 220 is threadedly connected with a plurality of mounting bolts 150. The plurality of mounting bolts 150 respectively extend to the interior of the plurality of clamping plates 230.

[0043] The joint 240 is installed by installing the bolts 150, the clamping plate 230 and the installation slot, so that the joint 240 can be replaced when it is damaged, thereby preventing the damaged joint 240 from affecting the overall test effect.

[0044] The implementation principle of the embodiment of the present invention is as follows: when in use, the pipeline with the gas to be tested is connected to one of the joints 240, and the gas enters the detection instrument body 110 through the joint 240 and the test tube 130 for detection. After the detection is completed, the pipeline is separated from the joint 240. When the next pipeline needs to be connected, the staff moves the L-shaped metal strip 277 out of the slot and separates it from the second magnetic block 279. At this time, the L-shaped metal strip 277 is connected to the first magnetic block 278. Subsequently, the handle 275 is operated to press the movable square strip 27 2, the first spring 273 will shrink, and the central connecting block 274 will push the two connecting arms 263, and the connecting arms 263 will drive the two sliders 262 to move in opposite directions, so that the two sealing arc plates 265 are separated, and the sealing strip 266 is withdrawn from the annular sealing groove 140, and then the movable square strip 272 is rotated by the control handle 275, thereby driving the rotating column 271 to rotate. When the rotating column 271 rotates, it will drive the worm 252 through the transmission belt 254, and the worm 252 will drive the worm wheel 251 to drive the long rod 21 0 is rotated, the long rod 210 drives the conversion disk 220 and the joint 240 to rotate, at this time, the one-way ratchet 284 will move out of one of the one-way ratchet grooves 282, and when the other joint 240 moves to the bottom of the test tube 130, the one-way ratchet 284 will be pushed into the other one-way ratchet groove 282 by the second spring 285 and make a sound. After the sound is made, the staff stops rotating the control handle 275, releases the control handle 275, and allows the first spring 273 to push the movable square bar 272 to reset, so that the two sealing arc plates 26 5 are close to each other and fit with the outer surface of the test tube 130 and the other connector 240, and the sealing strip 266 is also inserted into the annular sealing groove 140 to improve the sealing of the connection. At this time, the L-shaped metal strip 277 is moved to insert into the slot and magnetically connect with the second magnetic block 279, so that the state of the movable square strip 272 can be locked, and then the state of the two sealing arc plates 265 and the sealing strip 266 can be locked and maintained, so as to ensure the subsequent gas sealing flow, so as to facilitate the switching of the connector 240 and prevent a significant impact on the subsequent detection.

[0045] The above are all preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby. Therefore, all equivalent changes made according to the structure, shape and principle of the present invention shall be covered within the protection scope of the present invention.

Claims

1. A detection device for preparing electronic mixed gas, comprising a main module (100) and a conversion module (200), characterized in that: The main body module (100) comprises a detection instrument main body (110), a test tube (130) being connected to the bottom of the detection instrument main body (110), and an L-shaped box (120) being fixedly connected between the bottom and one side of the detection instrument main body (110); The conversion module (200) comprises a long rod (210) rotatably connected to the top of the inner wall of the L-shaped box (120); the bottom end of the long rod (210) extends to the bottom of the L-shaped box (120) and is fixedly connected to a conversion disk (220); a plurality of joints (240) are arranged in an annular shape at equal distances inside the conversion disk (220); a transmission assembly (250) connected to the long rod (210) is arranged inside the L-shaped box (120); a connection assembly (260) connected to one of the joints (240) and the test tube (130) is arranged at the bottom of the detection instrument body (110); a rotation assembly (270) connected to the connection assembly (260) is arranged on the front end surface of the L-shaped box (120); and a direction limiting assembly (280) connected to the outer surface of the long rod (210) is arranged on one side of the L-shaped box (120).

2. A detection device for preparing electronic mixed gas according to claim 1, characterized in that: The connection assembly (260) comprises two slide rails (261) fixedly connected to the bottom of the detection instrument body (110); the interior of the two slide rails (261) is slidably connected to a slider (262); the front end surfaces of the two sliders (262) are hingedly connected to a connection arm (263); the bottoms of the two sliders (262) are fixedly connected to a steering rod (264); one end of the two steering rods (264) is fixedly connected to a sealing arc plate (265); the inner walls of the two sealing arc plates (265) are in contact with the outer surfaces of the test tube (130) and one of the joints (240); the two ends of the two sealing arc plates (265) are in contact with each other; and adjacent surfaces of the two sealing arc plates (265) are fixedly connected to two sealing strips (266).

3. A detection device for preparing electronic mixed gas according to claim 2, characterized in that: The main body module (100) further comprises a plurality of annular sealing grooves (140), the plurality of annular sealing grooves (140) being respectively provided on the outer surfaces of the plurality of joints (240) and one of the test tubes (130), and the four sealing arc plates (265) being respectively movably clamped inside two of the annular sealing grooves (140).

4. A detection device for preparing electronic mixed gas according to claim 3, characterized in that: The rotating assembly (270) comprises a rotating column (271) rotatably connected to the front end face of the L-shaped box (120); a movable square bar (272) is movably connected inside the rotating column (271); a rear end face of the movable square bar (272) is rotatably connected to a central connecting block (274); a first spring (273) is fixedly connected between the outer surface of the movable square bar (272) and the front end face of the rotating column (271); a control handle (275) is provided on the front end face of the movable square bar (272); and one end of each of the two connecting arms (263) is hinged to the central connecting block (274).

5. The detection device for preparing electronic mixed gas according to claim 4, characterized in that: The rotating assembly (270) further comprises an inner hollow slot box (276) fixedly connected to the front end surface of the L-shaped box (120); the inner hollow slot box (276) is movably connected to an L-shaped metal strip (277); the outer surface of the movable square strip (272) is provided with a slot; the inner part of the slot is fixedly connected to a second magnetic block (279); one end of the L-shaped metal strip (277) is movably connected to the inside of the slot and is magnetically connected to the second magnetic block (279); the other end of the L-shaped metal strip (277) extends to the outside of the inner hollow slot box (276); the inner part of the inner hollow slot box (276) is fixedly connected to a first magnetic block (278).

6. A detection device for preparing electronic mixed gas according to claim 5, characterized in that: The transmission assembly (250) comprises a worm wheel (251) fixedly connected to the outer surface of the long rod (210), a worm (252) rotatably connected between the front end surface and the rear end surface of the inner wall of the L-shaped box (120), and the outer surface of the worm (252) meshes with the outer surface of the worm wheel (251).

7. A detection device for preparing electronic mixed gas according to claim 6, characterized in that: The transmission assembly (250) further comprises two transmission rollers (253) respectively fixedly connected to the outer surfaces of the worm (252) and the rotating column (271), and a transmission belt (254) is transmission-connected between the outer surfaces of the two transmission rollers (253).

8. The detection device for preparing electronic mixed gas according to claim 7, characterized in that: The direction limiting component (280) comprises a round wheel (281) fixedly connected to the lower part of the outer surface of the long rod (210), the outer surface of the round wheel (281) is provided with a plurality of one-way ratchet grooves (282), a hollow block (283) is fixedly connected to one side of the L-shaped box (120), a one-way ratchet (284) is movably connected inside the hollow block (283), one end of the one-way ratchet (284) is movably connected inside one of the one-way ratchet grooves (282), and a second spring (285) is fixedly connected between the other end of the one-way ratchet (284) and the inner wall of the hollow block (283).

9. A detection device for preparing electronic mixed gas according to claim 8, characterized in that: The number of the one-way ratchet grooves (282) is the same as the number of the joints (240), and the positions of the one-way ratchet grooves (282) and the joints (240) correspond to each other.

10. A detection device for preparing electronic mixed gas according to claim 9, characterized in that: The conversion module (200) further comprises a plurality of clamping plates (230) respectively fixedly connected to the outer surfaces of the plurality of joints (240); the outer surface of the conversion disk (220) is provided with a plurality of mounting slots; the plurality of clamping plates (230) are respectively movably clamped inside the plurality of mounting slots; the top of the conversion disk (220) is threadedly connected with a plurality of mounting bolts (150); the plurality of mounting bolts (150) respectively extend into the interior of the plurality of clamping plates (230).

Citation Information

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