Bracket, inspection device, and method for manufacturing bracket

Abstract

The present invention addresses the problem of aligning a connector provided on a bracket with high precision. This bracket is provided with: a guide member; a moving member for moving the connector with respect to the guide member; the rolling body is located between the guide component and the moving component, and at least one part of the rolling body is embedded into a groove formed in the guide component.

Description

Technical Field

[0001] The present invention relates to a bracket, an inspection device, and a method for manufacturing a bracket. Background Art

[0002] In recent years, CPO (Co-Packaged Optics) has been developed as a semiconductor device. CPO is a device in which optical communication chips are mounted on a substrate. In CPO, as signals transmitted within the substrate, in addition to conventional electrical signals, optical signals are also used.

[0003] Patent Document 1 describes the connection of connectors of a fixing device and a connection unit. An object to be inspected is placed on the fixing device. The connection unit has a unit body, a movable member, and a toggle clamp. A connector is provided on the movable member. The unit body and the movable member can move toward the fixing device by the toggle clamp. The connector provided on the movable member is connected to the connector of the fixing device by the movement of the unit body and the movable member.

[0004] Prior Art Documents

[0005] Patent Documents

[0006] Patent Document 1: Japanese Patent Laid-Open No. 62-30969 Summary of the Invention

[0007] Connectors provided on a socket on which an object to be inspected is mounted and connectors provided on a bracket mounted on the socket may be connected to each other. These sockets may be connected to each other by moving the connector provided on the bracket toward the connector provided on the socket. And signals from a coaxial cable connected to the connector provided on the bracket are transmitted to the object to be inspected via the connected connectors. When moving the connector provided on the bracket to connect it to the connector provided on the socket, for example, in order to reduce signal transmission loss, it is necessary to accurately align the connector provided on the bracket with the connector provided on the socket.

[0008] An example object of the present invention is to accurately align the connector provided on the bracket. Other objects of the present invention will become apparent from the description of this specification.

[0009] One aspect of the present invention is a bracket, which includes:

[0010] a guiding member;

[0011] a moving member for moving a connector relative to the guiding member; and

[0012] rolling elements located between the guiding member and the moving member

[0013] At least a part of the rolling element is buried in a groove provided in the guiding member.

[0014] One aspect of the present invention is an inspection device, which includes:

[0015] a socket for mounting an object to be inspected; and

[0016] the above-mentioned bracket mounted on the socket.

[0017] One aspect of the present invention is a method for manufacturing a bracket, which

[0018] includes a step of assembling a guiding member, a moving member for moving a connector relative to the guiding member, and a rolling element located between the guiding member and the moving member,

[0019] The step of assembling the guiding member, the moving member, and the rolling element includes a step of aligning the moving member by alignment of a jig mounted on the moving member.

[0020] According to the above aspect of the present invention, it is possible to accurately align a connector provided in a bracket. Description of the Drawings

[0021] Figure 1 is a top view of the inspection device according to the embodiment.

[0022] Figure 2 is an exploded perspective view of the bracket according to the embodiment.

[0023] Figure 3 is a cross-sectional view of the cross roller table according to the embodiment.

[0024] Figure 4 is a top view of the cross roller table according to the embodiment.

[0025] Figure 5 is a diagram for explaining an example of the method for manufacturing the bracket according to the embodiment.

[0026] Figure 6 is a diagram for explaining an example of the method for manufacturing the bracket according to the embodiment.

[0027] Figure 7 is a diagram for explaining an example of the method for manufacturing the bracket according to the embodiment.

[0028] Explanation of Reference Numerals

[0029] 10 Inspection device, 20 Semiconductor package, 22 Socket-side connector, 24 Optical cable, 30 Bracket-side connector, 40 Fixture, 42 Fixture body, 44 Fixture protrusion, 100 Socket, 110 Socket body, 110a Socket groove, 120 Inlay, 122 Inlay body, 124 Inlay protrusion, 200 Bracket, 210 Frame, 210a Opening, 212 Partition, 212a Notch groove, 220 Cross roller stage, 221 Guide rail, 221a Rail groove, 222 Slide block, 222a Slide block groove, 223 Slide rail, 224 Roller, 225 Cage, 226 Rail mounting screw, 230 Connector assembly, 232 First holding member, 232a Base, 232b Mounting plate, 234 Second holding member, 236a First assembly screw, 236b Second assembly screw, 236c Pressing screw, 240 Cam follower assembly, 242 Platform, 244 Cam follower, 246 Platform mounting screw, 250 Damper, 252 Damper mounting screw Detailed implementation mode

[0030] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are assigned to the same components, and the description will be appropriately omitted.

[0031] Figure 1 It is a top view of the inspection device 10 of the embodiment. Figure 2 It is an exploded perspective view of the bracket 200 of the embodiment. Figure 3 It is a cross-sectional view of the cross roller stage 220 of the embodiment. Figure 4 It is a top view of the cross roller stage 220 of the embodiment.

[0032] As Figure 1 shown, the inspection device 10 of the embodiment includes a socket 100 and a bracket 200. As Figure 1 shown, the socket 100 includes a socket body 110 and an inlay 120. As Figure 1 shown, the inlay 120 includes an inlay body 122 and an inlay protrusion 124. As Figure 1 and Figure 2 shown, the bracket 200 includes a frame 210, a pair of cross roller stages 220, a connector assembly 230, a cam follower assembly 240, and a pair of dampers 250. As Figure 1 and Figure 2 shown, the frame 210 defines an opening 210a. As Figures 1 to 4 shown, each cross roller stage 220 includes a guide rail 221, a slide block 222, a pair of slide rails 223, a plurality of rollers 224, and a pair of cages 225. Figure 3 In, for the sake of illustration, a pair of cages 225 are not shown. As Figure 2As shown, the connector assembly 230 includes a first holding member 232 and a second holding member 234. As Figure 2 shown, the cam follower assembly 240 includes a platform 242 and a cam follower 244.

[0033] To illustrate the directions, an X direction, a Y direction, and a Z direction are defined. The Z direction is a direction parallel to the vertical direction. The X direction is one of the horizontal directions perpendicular to the Z direction. The Y direction is one of the horizontal directions perpendicular to the Z direction and the X direction. In an embodiment, the X direction is a direction from the side where one of the socket 100 and the bracket 200 is located toward the side where the other of the socket 100 and the bracket 200 is located. Figure 1 and Figure 4 In, the white circle with a black dot indicating the Z direction indicates that the arrow of the Z axis points forward from the back side of the paper surface. Figure 3 In, the white circle with a black dot indicating the X direction indicates that the arrow of the X axis points forward from the back side of the paper surface.

[0034] Hereinafter, as needed, the side to which the arrow of the X axis points is referred to as the +X side, the opposite side of the side to which the arrow of the X axis points is referred to as the -X side, the side to which the arrow of the Y axis points is referred to as the +Y side, the opposite side of the side to which the arrow of the Y axis points is referred to as the -Y side, the side to which the arrow of the Z axis points is referred to as the +Z side, and the opposite side of the side to which the arrow of the Z axis points is referred to as the -Z side.

[0035] As Figure 1 shown, when viewed from the Z direction, the socket 100 and the bracket 200 are arranged in the X direction. Figure 1 In the example shown, the socket 100 is located on the +X side with respect to the bracket 200, and the bracket 200 is located on the -X side with respect to the socket 100. The socket 100 and the bracket 200 are positioned relative to each other by pins and are mechanically connected to each other by a mechanical connection method such as screw fastening. However, the configuration of the socket 100 and the bracket 200 is not limited to Figure 1 the example shown.

[0036] As Figure 1 shown, on the +Z side surface side of the socket 100, a semiconductor package 20, a pair of socket-side connectors 22, and a plurality of optical cables 24 are mounted via an inlay 120. The semiconductor package 20, the pair of socket-side connectors 22, and the optical cables 24 are CPO (Co-Packaged Optics). As Figure 1 and Figure 2 shown, a pair of bracket-side connectors 30 are provided on the bracket 200. Each socket-side connector 22 serves as a female connector that receives each bracket-side connector 30, and each bracket-side connector 30 serves as a male connector that is inserted into the socket-side connector 22. However, it may also be that the socket-side connector 22 is a male connector and the bracket-side connector 30 is a female connector.Figure 1 In the illustrated example, the end on the -X side of each socket-side connector 22 and the end on the +X side of each bracket-side connector 30 are connected to each other.

[0037] When the inspection device 10 is shipped, the semiconductor package 20, a pair of socket-side connectors 22, a plurality of optical cables 24, and a pair of bracket-side connectors 30 are usually removed from the inspection device 10. Hereinafter, unless otherwise specified, the inspection device 10 means not only the inspection device 10 provided with the semiconductor package 20, a pair of socket-side connectors 22, a plurality of optical cables 24, and a pair of bracket-side connectors 30, but also the inspection device 10 not provided with the semiconductor package 20, a pair of socket-side connectors 22, a plurality of optical cables 24, and a pair of bracket-side connectors 30.

[0038] The socket body 110 is made of, for example, metal, resin, or ceramic. As Figure 1 shown, when viewed from the Z direction, the socket body 110 has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the socket body 110 is not limited to Figure 1 the example shown.

[0039] The insert 120 is made of, for example, metal, resin, or ceramic. As Figure 1 shown, the insert 120 is buried in a socket groove 110a provided on the +Z side surface of the socket body 110. When viewed from the Z direction, the insert body 122 is located in the substantially central portion of the socket body 110 in the X direction and the Y direction. As Figure 1 shown, when viewed from the Z direction, the insert body 122 has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the insert body 122 is not limited to Figure 1 the example shown. The semiconductor package 20 is mounted on the +Z side surface side of the insert body 122. The insert protrusion 124 protrudes from the -X side edge of the insert body 122 toward the bracket 200. The end on the -X side of the insert protrusion 124 and the portion located on the +X side with respect to the opening 210a of the frame body 210 overlap each other in the Z direction. A pair of socket-side connectors 22 are mounted on the +Z side surface side of the end on the -X side of the insert protrusion 124. The semiconductor package 20 and a pair of socket-side connectors 22 are optically coupled to each other via a plurality of optical cables 24. The plurality of optical cables 24 are mounted on the +Z side surface side of the insert 120 within the range from one of the insert body 122 and the insert protrusion 124 to the other. Therefore, by burying the insert 120 in the socket groove 110a in a state where the plurality of optical cables 24 are held on the +Z side surface side of the insert 120, the semiconductor package 20, a pair of socket-side connectors 22, and a plurality of optical cables 24 can be integrally mounted on the +Z side surface side of the socket body 110.

[0040] In an embodiment, the semiconductor package 20 becomes an object to be inspected by the inspection device 10. The semiconductor package 20 is optically coupled to an external device of the inspection device 10 via a plurality of optical cables 24, a pair of socket-side connectors 22, and a pair of bracket-side connectors 30. Further, the semiconductor package 20 is electrically connected to an unillustrated inspection substrate provided in the inspection device 10 via probes (not shown) provided inside the socket 100.

[0041] The housing 210 is made of metal, for example. As Figure 1 and Figure 2 shown, when viewed from the Z direction, the housing 210 has a substantially rectangular frame shape having a pair of short sides substantially parallel to the X direction and a pair of long sides substantially parallel to the Y direction. However, the shape of the housing 210 is not limited to the example shown in Figure 1 and Figure 2 shown.

[0042] Each guide rail 221 is made of metal, for example. As Figure 1 and Figure 2 shown, when viewed from the Z direction, the pair of guide rails 221 are located on both sides in the Y direction of the opening 210a. As Figure 2 shown, each guide rail 221 extends in the X direction. The two end portions in the X direction of the +Y side guide rail 221 and the +Y side portion of the opening 210a of the housing 210 are fixed to each other by screwing a pair of rail mounting screws 226. The two end portions in the X direction of the -Y side guide rail 221 and the -Y side portion of the opening 210a of the housing 210 are fixed to each other by screwing another pair of rail mounting screws 226.

[0043] Each slider 222 is made of metal, for example. As Figure 2 shown, when viewed from the Z direction, each slider 222 has a substantially rectangular shape having a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of each slider 222 is not limited to the example shown in Figure 2 shown. As Figure 3 shown, a slider groove 222a is provided on the -Z side surface of each slider 222. As Figure 3As shown, when viewed from the X direction, a pair of sliding rails 223 are provided on two inner sides in the Y direction of the slider groove 222a. Each sliding rail 223 is made of metal, for example. The slider 222 and the pair of sliding rails 223 are fixed to each other by screwing. The slider 222 and the pair of sliding rails 223 are integrated and can slide in the X direction relative to the guide rail 221. Therefore, the guide rail 221 serves as a guiding member for guiding the slider 222 and the pair of sliding rails 223 in the X direction. The slider 222 and the pair of sliding rails 223 serve as moving members for moving the bracket-side connector 30 relative to the guide rail 221 in a state where the slider 222 and the connector assembly 230 are mounted to each other.

[0044] As Figure 3 and Figure 4 shown, a plurality of rollers 224 are arranged between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223. Hereinafter, as needed, the rollers 224 arranged between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223 are referred to as +Y side rollers 224. The +Y side rollers 224 are made of metal, for example. As Figure 4 shown, the plurality of +Y side rollers 224 are integrally held along the guide rail 221 by a +Y side cage 225 extending in the X direction. Figure 3 and Figure 4 In the example shown, the +Y side rollers 224 whose rotation axes are inclined approximately 45° in the Y direction with respect to the Z direction and the +Y side rollers 224 whose rotation axes are inclined approximately -45° in the Y direction with respect to the Z direction are alternately arranged in the X direction. The +Y side rollers 224 serve as rolling elements that roll between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223. However, as the rolling elements, balls can be used instead of the rollers 224.

[0045] As Figure 3 and Figure 4 shown, a plurality of rollers 224 are arranged between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223. Hereinafter, as needed, the rollers 224 arranged between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223 are referred to as -Y side rollers 224. The -Y side rollers 224 are made of metal, for example. As Figure 4 shown, the plurality of -Y side rollers 224 are integrally held along the guide rail 221 by a -Y side cage 225 extending in the X direction. Figure 3 and Figure 4In the example shown, the rollers 224 on the -Y side with a rotation axis inclined by approximately 45° toward the Y direction with respect to the Z direction and the rollers 224 on the -Y side with a rotation axis inclined by approximately -45° toward the Y direction with respect to the Z direction are alternately arranged in the X direction. The rollers 224 on the -Y side serve as rolling elements that roll between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223. However, as the rolling elements, balls can be used instead of the rollers 224.

[0046] As Figure 2 and Figure 3 shown, a pair of raceway grooves 221a are provided on both side surfaces in the Y direction of each guide rail 221. As Figure 2 shown, each raceway groove 221a extends in the X direction. As Figure 3 shown, at least a part of the +Y side rollers 224 and at least a part of the -Y side rollers 224 are respectively embedded in the +Y side raceway groove 221a and the -Y side raceway groove 221a. Thereby, compared with the case of using a linear bushing having a shaft without a groove corresponding to the raceway groove 221a instead of the guide rail 221, the contact area between the guide rail 221 and the rollers 224 can be increased. Therefore, compared with the case of using a linear bushing, the allowable load of the crossed roller stage 220 can be increased.

[0047] As Figure 1 and Figure 2 shown, the first holding member 232 includes a base 232a and a pair of mounting plates 232b. The base 232a defines a groove for accommodating a pair of bracket side connectors 30. The pair of mounting plates 232b are located on both sides in the Y direction of the base 232a. The base 232a and the pair of mounting plates 232b are, for example, integrally formed metal. As Figure 1 and Figure 2 shown, each mounting plate 232b has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of each mounting plate 232b is not limited to Figure 1 and Figure 2 the example shown. As Figure 1 and Figure 2 shown, each mounting plate 232b and each slider 222 are fixed to each other by screwing with a plurality of first assembly screws 236a. Thereby, the pair of sliders 222 and the first holding member 232 are integrated and can slide in the X direction with respect to the pair of guide rails 221. Figure 1 and Figure 2 In the example shown, four first assembly screws 236a are provided at the four corner portions of each mounting plate 232b. However, the number and arrangement of the first assembly screws 236a are not limited to Figure 1 and Figure 2The example shown.

[0048] The second holding member 234 is made of metal, for example. As Figure 1 and Figure 2 shown, the second holding member 234 covers the +Z side surfaces of a pair of bracket side connectors 30. As Figure 1 and Figure 2 shown, the second holding member 234 has a substantially rectangular shape having a pair of short sides substantially parallel to the X direction and a pair of long sides substantially parallel to the Y direction. However, the shape of the second holding member 234 is not limited to Figure 2 the example shown. The second holding member 234 and the base 232a are fixed to each other by screwing a plurality of second component screws 236b. Therefore, the first holding member 232 and the second holding member 234 are integrated as the connector assembly 230 and become a holding member for holding a pair of bracket side connectors 30. Figure 1 and Figure 2 shown in the example, four second component screws 236b are provided at four corner portions of the second holding member 234. However, the number and arrangement of the second component screws 236b are not limited to Figure 1 and Figure 2 the example shown.

[0049] As Figure 1 and Figure 2 shown, two pressing screws 236c are screwed at the +X side end of the second holding member 234. The -Z side ends of the respective pressing screws 236c project toward the -Z side from the -Z side surface of the second holding member 234 and press the +Z side surface of the bracket side connector 30. Thereby, the wobbling of the bracket side connector 30 can be suppressed by the pressing screws 236c. However, the number and arrangement of the pressing screws 236c are not limited to Figure 1 and Figure 2 the example shown.

[0050] As Figure 2 shown, when viewed from the Z direction, the platform 242 has a substantially rectangular shape having a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the platform 242 is not limited to Figure 2 the example shown. As Figure 2 shown, the platform 242 is mounted on the -Z side surface of the base 232a. As Figure 2 shown, the base 232a and the platform 242 are fixed to each other by screwing a plurality of platform mounting screws 246. Figure 2 shown in the example, four platform mounting screws 246 are provided at four corner portions of the platform 242. However, the number and arrangement of the platform mounting screws 246 are not limited to Figure 2 the example shown.

[0051] As Figure 2 shown, the cam follower 244 projects from the surface on the -Z side of the platform 242 toward the -Z side and extends in the Z direction. The end on the -Z side of the cam follower 244 is pushed toward the +X side or the -X side by an actuating arm (not shown), whereby the pair of sliders 222, the connector assembly 230, the platform 242, and each bracket-side connector 30 can be moved integrally in the X direction. In addition, the bracket 200 may have, instead of the cam follower 244, a simple shaft body that projects from the surface on the -Z side of the platform 242 toward the -Z side and extends in the Z direction.

[0052] As Figure 1 and Figure 2 shown, the housing 210 has a partition wall 212 on the +X side with respect to the opening 210a. As Figure 1 shown, the partition wall 212 is located between the end on the -X side of the insert projection 124 and the end on the +X side of the connector assembly 230. Thus, the partition wall 212 serves as a restricting member that restricts the movement of the pair of sliders 222, the connector assembly 230, the cam follower assembly 240, and each bracket-side connector 30 toward the +X side. As Figure 2 shown, the partition wall 212 is cut out by a pair of notch grooves 212a that open toward the +Z side. As Figure 1 and Figure 2 shown, the pair of notch grooves 212a are provided in a portion of the partition wall 212 that faces the ends on the +X side of the pair of bracket-side connectors 30. As Figure 1 shown, the ends on the -X side of the pair of socket-side connectors 22 enter into the pair of notch grooves 212a. The partition wall 212 may be cut out by a hole that penetrates the partition wall 212 in the X direction instead of grooves such as the notch grooves 212a. Each socket-side connector 22 can enter not only the notch grooves 212a but also the hole that penetrates the partition wall 212 in the X direction.

[0053] As Figure 1 and Figure 2 shown, a pair of damping members 250 are mounted on the end face on the +X side of the base 232a. As Figure 2As shown, a pair of damping members 250 and a base 232a are fixed to each other by screwing with damping member mounting screws 252. In the embodiment, each damping member 250 is a super engineering plastic such as PEEK (polyetheretherketone). However, each damping member 250 may also be composed of an elastic member such as a spring. In the embodiment, when moving each bracket-side connector 30 toward each socket-side connector 22 to connect each socket-side connector 22 and each bracket-side connector 30 to each other, the +X side surface of each damping member 250 contacts the -X side surface of the partition wall 212. Therefore, the impact of the contact between each socket-side connector 22 and the bracket-side connector 30 is alleviated by each damping member 250. Thus, compared with the case where the damping member 250 is not provided, damage to each socket-side connector 22 and the bracket-side connector 30 during the connection of each socket-side connector 22 and the bracket-side connector 30 can be suppressed. The position where the damping member 250 is provided is not limited to Figure 1 and Figure 2 the example shown. For example, the damping member 250 may be provided on the -X side surface of the partition wall 212 instead of the +X side end surface of the base 232a.

[0054] Next, in order to illustrate the functions of the crossed roller worktable 220 of the embodiment, the embodiment and a comparative example are compared. In the comparative example, a linear bushing is used instead of the crossed roller worktable 220. The linear bushing of the comparative example has a shaft without a groove corresponding to the track groove 221a instead of the guide track 221 of the embodiment.

[0055] In the embodiment, in order to connect each socket-side connector 22 and each bracket-side connector 30 to each other, the -Z side end of the cam follower 244 is pushed toward the +X side by an actuating arm (not shown), causing each bracket-side connector 30 to move toward the socket 100. However, if the -Z side end of the cam follower 244 is pushed toward the +X side, a moment is generated that causes the cam follower 244 to rotate clockwise when viewed from the +Y side. If the cam follower 244 rotates clockwise when viewed from the +Y side, each bracket-side connector 30 also rotates clockwise when viewed from the +Y side. If each bracket-side connector 30 rotates clockwise when viewed from the +Y side, the +X side end of each bracket-side connector 30 and the -X side end of each socket-side connector 22 do not become directly opposite in the X direction. If the +X side end of each bracket-side connector 30 and the -X side end of each socket-side connector 22 do not become directly opposite in the X direction, it is difficult to accurately align the +X side end of each bracket-side connector 30 with the -X side end of each socket-side connector 22 with high precision. If the +X side end of each bracket-side connector 30 cannot be accurately aligned with the -X side end of each socket-side connector 22 with high precision, good connection of each socket-side connector 22 and each bracket-side connector 30 may sometimes be difficult.

[0056] As described above, in the embodiment, as Figure 3 shown, at least a part of the roller 224 is buried in the track groove 221a. Thus, in the embodiment, as compared with the comparative example, the contact area between the guide track 221 and the roller 224 can be increased. Therefore, in the embodiment, as compared with the comparative example, the allowable load and the allowable moment of the slider 222 can be increased. Therefore, even if the end portion on the -Z side of the cam follower 244 is pushed toward the +X side and a moment that causes the cam follower 244 to rotate clockwise is generated when viewed from the +Y side, in the embodiment, as compared with the comparative example, it is difficult for the cam follower 244 to rotate clockwise when viewed from the +Y side. Thus, in the embodiment, as compared with the comparative example, the end portion on the +X side of each bracket-side connector 30 can be accurately positioned with respect to the end portion on the -X side of each socket-side connector 22 in all directions including the X direction, the Y direction, and the Z direction.

[0057] Figures 5 to 7 It is a diagram for explaining an example of a method for manufacturing the bracket 200 according to the embodiment. Figures 5 to 7 In the example shown, the bracket 200 is manufactured by assembling a frame 210, a pair of crossed roller tables 220, a connector assembly 230, a cam follower assembly 240, and a pair of dampers 250 as follows.

[0058] First, as Figure 5 shown, the jig 40 is held by the connector assembly 230. Figure 5 In the example shown, the jig 40 has a jig body 42 and a pair of jig protrusions 44. Figure 5 In the example shown, first, with the pair of jig protrusions 44 protruding toward the +X side compared to the end face on the +X side of the base 232a, the jig body 42 is housed in the base 232a. Then, the first holding member 232 and the second holding member 234 are fixed to each other by screwing a plurality of second assembly screws 236b. Then, a plurality of pressing screws 236c are screwed to the second holding member 234, and the end portion on the -Z side of each pressing screw 236c presses the face on the +Z side of the jig body 42 toward the -Z side. Therefore, the shaking of the jig body 42 can be suppressed by the pressing screws 236c. Figure 5 In the example shown, a pair of dampers 250 are fixed to the end face on the +X side of the base 232a by screwing a pair of damper mounting screws 252.

[0059] Then, as Figure 6 shown, the frame 210 and the pair of crossed roller tables 220 are temporarily fixed to each other by temporarily tightening a plurality of track mounting screws 226. Figure 6In the illustrated example, in a state where each slider 222 is moved to the -X side to expose the +X side end portions of the respective guide rails 221, the +X side end portions of the respective guide rails 221 and the portions of the housing 210 that overlap the +X side end portions of the respective guide rails 221 in the Z direction are temporarily fixed by temporarily tightening the rail mounting screws 226. Then, in a state where each slider 222 is moved to the +X side to expose the -X side end portions of the respective guide rails 221, the -X side end portions of the respective guide rails 221 and the portions of the housing 210 that overlap the -X side end portions of the respective guide rails 221 in the Z direction are temporarily fixed by temporarily tightening the rail mounting screws 226.

[0060] Then, as Figure 7 shown, the pair of sliders 222 and the pair of second holding members 234 are fixed to each other by screwing a plurality of first assembly screws 236a. By fixing the pair of sliders 222 and the pair of second holding members 234, the jig 40 is mounted to the pair of sliders 222 via the connector assembly 230.

[0061] Then, the pair of jig protrusions 44 are inserted into the pair of notch grooves 212a to align the pair of jig protrusions 44. By aligning the pair of jig protrusions 44, the pair of crossed roller tables 220 and the connector assembly 230 are aligned. The partition wall 212 may also be cut out by having a hole that penetrates the partition wall 212 in the X direction instead of the notch grooves 212a or the like. Through the hole, the pair of jig protrusions 44 can be aligned in the same manner as the notch grooves 212a.

[0062] Then, in a state where the pair of crossed roller tables 220 and the connector assembly 230 are aligned by the alignment of the jig 40, the housing 210 and the pair of guide rails 221 are fixed to each other by officially tightening a plurality of rail mounting screws 226. By fixing the housing 210 and the pair of guide rails 221, the positions of the pair of crossed roller tables 220 and the connector assembly 230 in the Z direction are determined.

[0063] Then, the second holding member 234 is removed from the first holding member 232 by removing a plurality of second assembly screws 236b, and the jig 40 is removed from the first holding member 232. Then, the first holding member 232 and the second holding member 234 are fixed to each other again by screwing a plurality of second assembly screws 236b. Then, the connector assembly 230 and the cam follower assembly 240 are fixed to each other by screwing a plurality of platform mounting screws 246. In a state where the first holding member 232 and the second holding member 234 are fixed to each other again, the connector assembly 230 may not hold the pair of bracket side connectors 30. For example, the bracket 200 is shipped in a state where the connector assembly 230 does not hold the bracket side connectors 30.

[0064] In the embodiment, the bracket-side connector 30 is guided in the X direction by a pair of crossed roller tables 220 arranged parallel to each other. Therefore, if the pair of crossed roller tables 220 are not correctly arranged parallel to the X direction, it may be difficult to smoothly guide the connector assembly 230 in the X direction. However, in the embodiment, the pair of crossed roller tables 220 and the connector assembly 230 are aligned by the alignment of the jig 40. As a result, compared with the case where the jig 40 is not used, the pair of crossed roller tables 220 can be correctly arranged parallel to the X direction. By correctly arranging the pair of crossed roller tables 220 parallel to the X direction, the +X side end of each bracket-side connector 30 can be accurately aligned with the -X side end of each socket-side connector 22 in all directions including the X direction, Y direction, and Z direction.

[0065] Moreover, in the embodiment, it is not necessary to make each bracket-side connector 30 slightly movable in the Y direction by a mechanical element such as a spring, and the +X side end of each bracket-side connector 30 can be aligned with the -X side end of each socket-side connector 22. As a result, compared with the case where this mechanical element is used, the durability of the bracket 200 can be improved.

[0066] Moreover, in the embodiment, in a state where the frame 210 and the pair of guide rails 221 are temporarily fixed, the frame 210 is aligned with the group composed of the pair of crossed roller tables 220 and the connector assembly 230 by the alignment of the jig 40. As a result, by moving the pair of sliders 222 and the connector assembly 230 in the X direction in such a manner that the pair of jig projections 44 enter the pair of notch grooves 212a in a state where the frame 210 and the pair of guide rails 221 are temporarily fixed, the frame 210 can be aligned with the group composed of the pair of crossed roller tables 220 and the connector assembly 230. Therefore, compared with the case where the frame 210 is aligned with the group composed of the pair of crossed roller tables 220 and the connector assembly 230 after the frame 210 and the pair of guide rails 221 are fixedly attached to each other by formal tightening with a plurality of track mounting screws 226, the alignment of the frame 210 with the group composed of the pair of crossed roller tables 220 and the connector assembly 230 can be made with a margin and is easy to perform.

[0067] As described above, the embodiments of the present invention have been described with reference to the drawings. These are examples of the present invention, and various configurations other than the above can also be adopted.

[0068] For example, the guiding device for guiding the bracket-side connector 30 is not limited to the crossed roller table 220 of the embodiment. For example, the guiding device may also be a linear guide in which rolling elements circulate along a circulation path provided inside the guiding device. In the linear guide, at least a part of the rolling elements is buried in a groove provided in the guide rail. Thus, as described in the embodiment, compared with the case of using a linear bushing, the +X-side end of each bracket-side connector 30 can be accurately aligned with the -X-side end of each socket-side connector 22 in all directions including the X, Y, and Z directions.

[0069] The object to be inspected mounted on the socket 100 is not limited to a CPO, and may also be a semiconductor package without optical elements. The connector provided on the bracket 200 may not be an optical connector optically coupled to the object to be inspected mounted on the socket 100, and may be an electrical connector electrically connected to the object to be inspected mounted on the inspection device 10.

[0070] According to this specification, the following embodiments of a bracket, an inspection device, and a method for manufacturing a bracket are provided.

[0071] (Embodiment 1)

[0072] In Embodiment 1, the bracket includes: a guiding member; a moving member for moving a connector relative to the guiding member; and rolling elements located between the guiding member and the moving member, at least a part of the rolling elements being buried in a groove provided in the guiding member.

[0073] The "guiding member" corresponds to the "guide rail" in the above embodiment. The "moving member" corresponds to the "slider" and the "sliding rail" in the above embodiment. The "rolling elements" correspond to the "rollers" in the above embodiment.

[0074] According to the above embodiment, compared with the case of using a linear bushing having a shaft without a groove instead of the guiding member, the contact area between the guiding member and the rolling elements can be increased. Thus, compared with the case of using a linear bushing, the allowable torque of the moving member can be increased. Therefore, compared with the case of using a linear bushing, when the connector is moved by the moving member, it is difficult for the connector to rotate. Thus, compared with the case of using a linear bushing, the connector can be accurately aligned.

[0075] (Embodiment 2)

[0076] In Embodiment 2, the bracket further includes a damper that alleviates the impact of contact between the connector and other connectors connected to the connector.

[0077] According to the above method, compared with the case where no damping member is provided, damage to the connector and the other connector when the connector is connected to the other connector can be suppressed.

[0078] (Method 3)

[0079] In Method 3, the bracket further has a partition wall that restricts the movement of the moving member toward the side where the other connector connected to the connector is located, and a portion of the partition wall opposite to the connector is cut out.

[0080] According to the above method, by making at least a part of the jig provided on the moving member enter the cut-out portion of the partition wall, the alignment of the jig can be performed. By aligning the moving member through the alignment of the jig, the connector can be aligned with high precision.

[0081] (Method 4)

[0082] In Method 4, the inspection device includes: a socket for mounting an object to be inspected; and the above-mentioned bracket mounted on the socket.

[0083] In Method 4, similar to Method 1, compared with the case of using a linear bushing, the connector can be aligned with high precision.

[0084] (Method 5)

[0085] In Method 5, the manufacturing method of the bracket includes a process of assembling a guide member, a moving member for moving the connector relative to the guide member, and rolling elements located between the guide member and the moving member. The process of assembling the guide member, the moving member, and the rolling elements includes a process of aligning the moving member through the alignment of a jig mounted on the moving member.

[0086] The "guide member" corresponds to the "guide rail" in the above-mentioned embodiment. The "moving member" corresponds to the "slider" and the "sliding rail" in the above-mentioned embodiment. The "rolling element" corresponds to the "roller" in the above-mentioned embodiment.

[0087] According to the above method, compared with the case where the moving member is not aligned, the connector can be aligned with high precision.

[0088] (Method 6)

[0089] In Method 6, the process of assembling the guide member, the moving member, and the rolling elements further includes a process of temporarily fixing the guide member.

[0090] According to Method 6, the moving part can be aligned by moving the moving part in such a way that the jig is aligned while the guiding part is temporarily fixed. Thus, compared with the case where the moving part is aligned after the guiding part is fixed, the alignment of the moving part can have a margin and is easier to perform.

Claims

1. A bracket, wherein: have: Guide components; a moving member for moving the connector relative to the guide member; and a rolling element located between the guide member and the moving member, At least a portion of the rolling element is embedded in a groove provided in the guide member.

2. The bracket according to claim 1, wherein: A damping member is also provided to mitigate the impact of contact between the connector and another connector connected to the connector.

3. The bracket according to claim 1, wherein: A partition wall is also provided, which limits the movement of the moving part to the side where the other connector connected to the connector is located, A portion of the partition wall facing the connector is cut out.

4. An inspection device, wherein: have: A socket for mounting the inspection object; and The bracket according to any one of claims 1 to 3 mounted on the socket.

5. A method for manufacturing a bracket, wherein: The method comprises the steps of assembling a guide member, a moving member for moving the connector relative to the guide member, and a rolling element located between the guide member and the moving member. The step of assembling the guide member, the moving member, and the rolling element includes a step of aligning the moving member by aligning a jig attached to the moving member.

6. The method for manufacturing a bracket according to claim 5, wherein: The step of assembling the guide member, the moving member, and the rolling element further includes a step of temporarily fixing the guide member.

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