Piezoelectric vibrator and piezoelectric micropump

Abstract

The invention relates to the technical field of fluid pumps, in particular to a piezoelectric vibrator and a piezoelectric micropump, which comprise a support plate, a flexible plate and piezoelectric ceramic, the piezoelectric ceramic is provided with a first surface, a second surface and a side wall, the first conductive electrode is arranged at the middle part of the first surface and is connected with the peripheral edge of the second surface through the side wall; the second conductive electrode is arranged at the middle part of the second surface and is connected with the peripheral edge of the first surface through the side wall; and the first conductive electrode and the second conductive electrode are mutually insulated and matched on the first surface and the second surface. Through the arrangement, the first surface and the second surface of the piezoelectric ceramic can be provided with two kinds of electrodes at the same time, and the positions of the two kinds of electrodes on the first surface and the second surface are staggered, so that the situation that areas with the same polarity exist on the two surfaces of the piezoelectric ceramic can be avoided, namely, an invalid area of the piezoelectric ceramic is removed; and the utilization rate of the piezoelectric ceramic is effectively improved, so that the output amplitude and efficiency of the piezoelectric vibrator are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid pumps, and particularly to a piezoelectric vibrator and a piezoelectric micropump. Background Art

[0002] Nowadays, in the fields of medical devices, consumer electronics, pharmaceutical industry, etc., products are developing towards miniaturization. The pump in the fluid transmission field is a key component, and the piezoelectric micropump is an important branch. However, the piezoelectric vibrators used in existing piezoelectric micropumps have problems such as low utilization rate of piezoelectric ceramics, low mechanical energy conversion efficiency, or complex structures.

[0003] For example, the piezoelectric vibrators disclosed in the patents with publication numbers WO2022023703A1 and US2022042505A1 both adopt the method of flanging electrodes, resulting in the same polarity on one side of the piezoelectric ceramic and the edge position on the other side, so that the overlapping part of the edge polarities of the piezoelectric ceramic cannot provide the output force of contraction and expansion under the action of an alternating electric field, resulting in a loss of the output amplitude of the vibrator. In the patent with publication number CN108050051A, one side of the piezoelectric ceramic is a positive electrode and the other side is a negative electrode. Although there is no ineffective utilization of the ceramic part, electrodes need to be connected to both sides of the piezoelectric ceramic, resulting in a complex structure. Moreover, the welding points between the electrodes of the flexible plate and the piezoelectric ceramic are very small, so that during the vibration of the piezoelectric ceramic, the connection between the electrodes is likely to fall off, resulting in instability.

[0004] Therefore, there is an urgent need for a piezoelectric vibrator and a piezoelectric micropump to solve the above problems. Summary of the Invention

[0005] To solve the problems in the above background art, the present invention provides a piezoelectric vibrator and a piezoelectric micropump, which can increase the effective utilization area of the piezoelectric ceramic, thereby improving the conversion efficiency from electrical energy to mechanical energy, and further improving the output pressure and output flow rate of the pump body.

[0006] The solution adopted by the present invention to solve its technical problems is: a piezoelectric vibrator, including a support plate, a flexible plate; and

[0007] a piezoelectric ceramic, having a first surface, a second surface oppositely arranged in its thickness direction, and a side wall provided between the first surface and the second surface;

[0008] a first conductive electrode, provided in the middle of the first surface and the outer periphery of the second surface connected through the side wall;

[0009] a second conductive electrode, provided in the middle of the second surface and the outer periphery of the first surface connected through the side wall;

[0010] The first conductive electrode and the second conductive electrode are insulated and cooperated with each other on the first surface and the second surface; the flexible plate is disposed on either the first surface or the second surface and is electrically connected to the first conductive electrode and the second conductive electrode on one side.

[0011] Further, insulating portions for insulating and separating the first conductive electrode and the second conductive electrode are provided on both the first surface and the second surface.

[0012] Further, both the first conductive electrode and the second conductive electrode include a central electrode region, a flanging electrode region, and an edge electrode region that are connected in sequence. The central electrode region is disposed in the middle of the first surface or the second surface, and the flanging electrode region is disposed on the side wall so that the edge electrode region is folded to the outer periphery of the second surface or the outer periphery of the first surface.

[0013] Further, the edge electrode region of the first conductive electrode and the edge electrode region of the second conductive electrode respectively surround the central electrode regions of each other on the second surface and the first surface.

[0014] Further, the edge electrode region is an annular structure provided with an inner ring, and the central electrode region of the first conductive electrode and the central electrode region of the second conductive electrode are respectively adapted to the inner ring structures of each other.

[0015] Further, the outer shape structure of the first conductive electrode is the same as the outer shape structure of the second conductive electrode.

[0016] Further, an avoidance opening for avoiding the flanging electrode region is formed on the edge electrode region, and the width of the avoidance opening is adapted to the width of the flanging electrode region.

[0017] In addition, the present invention also provides a piezoelectric micropump, including:

[0018] A pump body having a pump chamber, and a fluid input end and a fluid output end communicating with the pump chamber are formed in the pump body;

[0019] The above-mentioned piezoelectric vibrator is installed in the pump chamber and divides the pump chamber into a first chamber communicating with the fluid input end and a second chamber communicating with the fluid output end;

[0020] One-way valves are respectively installed in the first chamber and the second chamber and are disposed opposite to the center of the piezoelectric vibrator. The one-way valves are configured to close when the piezoelectric vibrator moves toward the fluid input end side; and to open when the piezoelectric vibrator moves toward the fluid output end side.

[0021] Further, a communication channel communicating the first chamber and the second chamber is formed in the pump body.

[0022] Further, there are two pump cavities, and the two pump cavities are connected in series or in parallel.

[0023] In summary, the beneficial effects of the present invention are as follows:

[0024] 1. By providing a first conductive electrode and a second conductive electrode that intersect and surround each other on the first surface and the second surface of the piezoelectric ceramic, both the first surface and the second surface of the piezoelectric ceramic can be provided with two types of electrodes at the same time, and the positions of the two types of electrodes on the first surface and the second surface are staggered from each other, thereby avoiding the existence of regions with the same polarity on the two surfaces of the piezoelectric ceramic, that is, removing the ineffective region of the piezoelectric ceramic, effectively improving the utilization rate of the piezoelectric ceramic, and thus improving the output amplitude and efficiency of the piezoelectric vibrator.

[0025] 2. By making the first conductive electrode and the second conductive electrode surround each other on the two surfaces of the piezoelectric ceramic respectively, both the first surface and the second surface of the piezoelectric ceramic are provided with two types of electrodes. Furthermore, the flexible plate can be electrically connected to the two types of electrodes for power supply on either side at the same time, thereby simplifying the overall structure of the piezoelectric vibrator and facilitating the miniaturization design of the piezoelectric micropump; at the same time, it can also provide a relatively large area of electrodes on the piezoelectric ceramic to contact the electrodes on the flexible plate, reducing the risk of open circuit easily caused by a small electrode contact area.

[0026] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable, the following specifically gives preferred embodiments and, in conjunction with the drawings, details are described as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic structural diagram of the piezoelectric vibrator of this embodiment;

[0028] Figure 2 It is a schematic structural diagram of the second embodiment of the piezoelectric vibrator;

[0029] Figure 3 It is a schematic structural diagram of the third embodiment of the piezoelectric vibrator;

[0030] Figure 4 It is a schematic structural diagram of the fourth embodiment of the piezoelectric vibrator;

[0031] Figure 5 It is a schematic structural diagram of the piezoelectric vibrator applicable to a double-pump cavity;

[0032] Figure 6 It is a schematic structural diagram of the first surface of this embodiment;

[0033] Figure 7 It is a schematic structural diagram of the second surface of this embodiment;

[0034] Figure 8 Schematic structural diagram of another embodiment of the first surface;

[0035] Figure 9 Schematic structural diagram of another embodiment of the second surface;

[0036] Figure 10 Developed view of the first conductive electrode and the second conductive electrode;

[0037] Figure 11 Developed view of the embodiment in which the central electrode region has a rhombus structure;

[0038] Figure 12 Developed view of the embodiment in which the central electrode region has a triangular structure;

[0039] Figure 13 Developed view of the embodiment in which the piezoelectric ceramic has a square structure;

[0040] Figure 14 Developed view of the embodiment in which the piezoelectric ceramic has a hexagonal structure;

[0041] Figure 15 Comparison diagram of this embodiment and the piezoelectric vibrator of the prior art;

[0042] Figure 16 Comparison diagram of the influence of the radius of the insulating part on the amplitude in this embodiment;

[0043] Figure 17 Schematic structural diagram of the piezoelectric micropump of Embodiment 2;

[0044] Figure 18 Cross-sectional view of the piezoelectric micropump of Embodiment 2;

[0045] Figure 19 Schematic structural diagram of the piezoelectric micropump with a double pump chamber structure;

[0046] Figure 20 Cross-sectional view of the piezoelectric micropump with a double pump chamber structure;

[0047] Figure 21 Cross-sectional view of the piezoelectric micropump with a double pump chamber structure from another angle.

[0048] In the figure: 1, support plate; 2, flexible plate; 3, piezoelectric ceramic; 31, first surface; 32, second surface; 33, side wall; 34, insulating part; 4, first conductive electrode; 5, second conductive electrode; 6, central electrode region; 7, flanged electrode region; 8, edge electrode region; 81, inner ring; 82, avoidance opening; 9, pump body; 91, pump chamber; 92, fluid input end; 93, fluid output end; 94, communication channel; 10, check valve. Detailed implementation manners

[0049] In order to make the content of the present invention easier to be clearly understood, the present invention will be further described below according to specific embodiments in conjunction with the accompanying drawings.

[0050] It should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "inner", "outer", etc. used herein is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present invention. Unless otherwise specified, the meaning of "plurality" is two or more.

[0051] Unless otherwise clearly defined and limited, the terms "mounted", "connected" and "connected" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific situations.

[0052] Embodiment 1:

[0053] As Figures 1 to 9 shown, a piezoelectric vibrator and a piezoelectric micropump can increase the effective utilization area of the piezoelectric ceramic 3, thereby improving the conversion efficiency from electrical energy to mechanical energy, and further improving the output pressure and output flow rate of the piezoelectric micropump. The piezoelectric vibrator of this embodiment includes a support plate 1, a flexible plate 2 and a piezoelectric ceramic 3 arranged in sequence. A conductive electrode is provided on the piezoelectric ceramic 3, and the flexible plate 2 is electrically connected to the conductive electrode on the piezoelectric ceramic 3 to apply an alternating voltage of a certain frequency, so that the piezoelectric ceramic 3 generates an inverse piezoelectric effect under the action of the alternating voltage, and further realizes the vibration of the piezoelectric vibrator to transmit the fluid.

[0054] The flexible plate 2 of this embodiment is composed of an FPC flexible board or a flexible film printed with a circuit, and is connected between the support plate 1 and the piezoelectric ceramic 3 through glue or bonding technology, so as to form a piezoelectric vibrator with the support plate 1 and the piezoelectric ceramic 3 to transmit the fluid; at the same time, the support plate 1 of this embodiment is made of an alloy metal, quartz glass, ceramic or other materials with a temperature expansion coefficient close to that of the piezoelectric ceramic 3, and is pasted on the side of the flexible plate 2 away from the piezoelectric ceramic 3, so as to support the piezoelectric ceramic 3 and prevent the piezoelectric ceramic 3 from cracking, and can effectively improve the service life of the piezoelectric vibrator. As Figure 5As shown, the flexible plate 2 of this embodiment can also be set to two pieces, and piezoelectric ceramics 3 and support plates 1 of this embodiment are arranged on both sides of each flexible plate 2. Thus, the piezoelectric ceramics 3 can act in a piezoelectric micropump with a double cavity, and the flexible plate 2 supplies power to the two piezoelectric ceramics 3 simultaneously, thereby increasing the overall output capacity of the piezoelectric micropump and effectively reducing the overall volume of the piezoelectric micropump, facilitating the miniaturized design of the piezoelectric micropump.

[0055] Specifically, as Figures 6 to 9 shown, a first surface 31 and a second surface 32 are oppositely arranged in the thickness direction of the piezoelectric ceramic 3 of this embodiment, and a side wall 33 is connected between the first surface 31 and the second surface 32. In order to enable the flexible plate 2 to supply power to the piezoelectric ceramic 3 to achieve polarization of the piezoelectric ceramic 3, a first conductive electrode 4 and a second conductive electrode 5 are arranged on the piezoelectric ceramic 3 of this embodiment. Among them, the first conductive electrode 4 of this embodiment is arranged at the middle position of the first surface 31 and the outer peripheral edge of the second surface 32 connected through the side wall 33, and the second conductive electrode 5 of this embodiment is arranged at the middle position of the second surface 32 and the outer peripheral edge of the first surface 31 connected through the side wall 33, so that the first conductive electrode 4 and the second conductive electrode 5 are both arranged on the first surface 31 and the second surface 32, and further, the flexible plate 2 can be electrically connected to the two conductive electrodes on any one surface, thereby realizing the single-sided electrical connection between the flexible plate 2 and the piezoelectric ceramic 3, without the need for additional flying wires, simplifying the structure of the piezoelectric vibrator of this embodiment and facilitating the miniaturized design of the piezoelectric micropump.

[0056] Moreover, the positions of the conductive electrodes with the same polarity on the first surface 31 and the second surface 32 of the piezoelectric ceramic 3 of this embodiment are staggered from each other (that is, the positions of the first conductive electrode 4 and the second conductive electrode 5 on the two surfaces of the piezoelectric ceramic 3 correspond to each other), so that both the first surface 31 and the second surface 32 are provided with two conductive electrodes, which not only greatly reduces the area where the same electrodes exist on the first surface 31 and the second surface 32, that is, reduces the ineffective area of the piezoelectric ceramic 3, but also effectively improves the utilization rate of the piezoelectric ceramic 3, thereby improving the output amplitude and efficiency of the piezoelectric vibrator.

[0057] Furthermore, as Figures 6 to 14As shown in the figure, in order to achieve the above arrangement of the first conductive electrode 4 and the second conductive electrode 5 on the piezoelectric ceramic 3, both the first conductive electrode 4 and the second conductive electrode 5 of this embodiment are set to include a central electrode region 6, a flanged electrode region 7, and an edge electrode region 8 that are connected in sequence. The central electrode regions 6 of the first conductive electrode 4 and the second conductive electrode 5 are respectively arranged in the middle of the first surface 31 and the middle of the second surface 32. The flanged electrode region 7 is connected to the central electrode region 6 and is arranged at the side wall 33, and the edge electrode region 8 is folded to the outer peripheral edge of the other surface of the piezoelectric ceramic 3, so that the edge electrode region 8 of the second conductive electrode 5 surrounds the central electrode region 6 of the first conductive electrode 4 on the first surface 31 of the piezoelectric ceramic 3, and the edge electrode region 8 of the first conductive electrode 4 surrounds the central electrode region 6 of the second conductive electrode 5 on the second surface 32 of the piezoelectric ceramic 3. Furthermore, both the first conductive electrode 4 and the second conductive electrode 5 exist simultaneously on the first surface 31 and the second surface 32 of the piezoelectric ceramic 3, enabling the flexible board 2 to be connected and powered simultaneously with the first conductive electrode 4 and the second conductive electrode 5 on one side of the piezoelectric ceramic 3; and it also avoids the existence of regions with the same polarity on the two surfaces of the piezoelectric ceramic 3, thereby removing the ineffective regions of the piezoelectric ceramic 3, effectively improving the utilization rate of the piezoelectric ceramic 3, and thus enhancing the output amplitude and efficiency of the piezoelectric vibrator.

[0058] And, as Figure 15 shown, S1 is a piezoelectric vibrator with fully flanged electrodes in the prior art, S2 is a piezoelectric vibrator with partially flanged electrodes in the prior art, and S3 is a piezoelectric vibrator with electrodes arranged in an interlaced and surrounded manner in this embodiment. It can be seen from the figure that compared with the piezoelectric vibrators in the prior art, under the same driving voltage, the amplitude of the piezoelectric vibrator in this embodiment is the largest, so that while retaining the convenience of single-sided connection of the flexible board 2, the amplitude of the piezoelectric vibrator is increased, and thus the output efficiency of the piezoelectric vibrator is improved.

[0059] As Figures 3 to 14As shown, in order to achieve the mutual surrounding of the first conductive electrode 4 and the second conductive electrode 5 on two surfaces of the piezoelectric ceramic 3, the edge electrode regions 8 of the first conductive electrode 4 and the second conductive electrode 5 in this embodiment are both set to an annular structure with an inner ring 81, and the central electrode region 6 of the first conductive electrode 4 is structurally adapted to the inner ring 81 of the edge electrode region 8 of the second conductive electrode 5, and the central electrode region 6 of the second conductive electrode 5 is structurally adapted to the inner ring 81 of the edge electrode region 8 of the first conductive electrode 4. Thus, after the edge electrode regions 8 of the first conductive electrode 4 and the second conductive electrode 5 are folded to the other surface of the piezoelectric ceramic 3 through their respective flanging electrode regions 7, they can just surround the outer periphery of the central electrode region 6, thereby realizing the mutual surrounding of the first conductive electrode 4 and the second conductive electrode 5 on two surfaces of the piezoelectric ceramic 3. And the structure of the central electrode region 6 is structurally adapted to the structure of the inner ring 81, which can also make full use of the surface of the piezoelectric ceramic 3, so as to improve the output amplitude and efficiency of the piezoelectric vibrator.

[0060] Further, as Figures 8 to 14 shown, the outer shape structure of the first conductive electrode 4 in this embodiment is the same as that of the second conductive electrode 5, which is convenient for production, and makes the areas of the first conductive electrode 4 and the second conductive electrode 5 on two surfaces of the piezoelectric ceramic 3 the same, so as to ensure the consistency of the amplitudes on both surfaces of the piezoelectric vibrator.

[0061] As Figures 6 to 14 shown, the outer shape structure of the central electrode region 6 of the first conductive electrode 4 and the outer shape structure of the central electrode region 6 of the second conductive electrode 5 can be circular, triangular, or rhombic. In other embodiments, they can also be any polygon. In this embodiment, it is preferably circular, which is more convenient for production and is conducive to the stable vibration of the piezoelectric vibrator. And, the outer shape structures of the edge electrode regions of the first conductive electrode 4 and the second conductive electrode are structurally adapted to the outer shape structure of the conductive ceramic, and can be any polygon structure such as circular, square, or hexagonal, which is convenient for making full use of the first surface and the second surface, so as to achieve a greater output capacity; the outer shape structure of the piezoelectric ceramic and the outer shape structure of the edge electrode region in this embodiment are preferably circular, which is convenient for production and can improve the vibration stability of the piezoelectric vibrator.

[0062] As Figures 8 to 14 shown, an avoidance opening 82 is also provided on the edge electrode region 8 in this embodiment, and the widths of the flanging electrode regions 7 of the first conductive electrode 4 and the second conductive electrode 5 are respectively structurally adapted to the avoidance opening 82 of the edge electrode region 8 of the other party, so that when the flanging electrode region 7 folds the edge electrode region 8, it can be fitted into the avoidance opening 82, thereby avoiding short circuit caused by the contact between the first conductive electrode 4 and the second conductive electrode 5.

[0063] Since the flanging electrode region 7 is connected to the central electrode region 6, when the edge electrode region 8 is folded to the other surface of the piezoelectric ceramic 3 through the flanging electrode region 7, an overlapping region will be formed between the flanging electrode region 7 and the edge electrode region 8 on the first surface 31 and the second surface 32 of the piezoelectric ceramic 3, that is, regions with the same polarity are formed on the two surfaces of the piezoelectric ceramic 3. Therefore, in order to ensure the amplitude intensity and output efficiency of the piezoelectric oscillator, the width of the flanging electrode region 7 needs to be as small as possible, so as to reduce the area of the overlapping region between the flanging electrode region 7 and the edge electrode region 8. In this embodiment, the width of the flanging electrode region 7 is preferably 0.3 mm - 5 mm, which can improve the connection strength between the central electrode region 6, the flanging electrode region 7 and the edge electrode region 8 of the first conductive electrode 4 or the second conductive electrode 5 while ensuring the output efficiency of the piezoelectric oscillator, thereby ensuring the vibration life of the piezoelectric oscillator.

[0064] As Figures 6 to 9 shown, the first conductive electrode 4 and the second conductive electrode 5 on the same surface of the piezoelectric ceramic 3 are insulated and cooperated with each other, which can prevent the central electrode region 6 and the edge electrode region 8 of the first conductive electrode 4 and the second conductive electrode 5 from contacting each other and causing a short circuit. Specifically, in this embodiment, insulating portions 34 are provided on both the first surface 31 and the second surface 32, which can insulate and separate the first conductive electrode 4 and the second conductive electrode 5 on the same surface, so as to realize the normal operation of the piezoelectric ceramic 3. And, since no conductive electrode is provided at the position of the insulating portion 34, when the piezoelectric ceramic 3 is powered on, this region will not vibrate and is an ineffective region. In order to reduce the area of the ineffective region and further improve the amplitude intensity and efficiency of the piezoelectric oscillator, the width of the insulating portion 34 in this embodiment is preferably greater than or equal to the thickness of the piezoelectric ceramic 3, so as to reduce the area of the ineffective region while fully ensuring the safety of the piezoelectric ceramic 3 during polarization.

[0065] As Figures 6 to 9 shown, since the edge electrode regions 8 of both the first conductive electrode 4 and the second conductive electrode 5 are annular structures with inner rings 81, and the central electrode region 6 is arranged to be fitted into the inner ring 81 of the edge electrode region 8 of the other conductive electrode when arranged, the insulating portion 34 in this embodiment is arranged as an annular structure and is arranged between the central electrode region 6 and the edge electrode region 8, so that the edge of the inner ring 81 of the edge electrode region 8 contacts the outer edge of the insulating portion 34, and the outer edge of the central electrode region 6 contacts the inner edge of the insulating portion 34, thereby realizing the insulation isolation between the first conductive electrode 4 and the second conductive electrode 5.

[0066] And, as Figure 16From the influence of the insulating parts 34 with different diameters shown on the amplitude of the piezoelectric vibrator, it can be seen that the larger the diameter of the insulating part 34, the greater the improvement in the amplitude of the piezoelectric vibrator, but the trend is gentler. In order to provide a larger area of conductive electrodes for the piezoelectric ceramic 3 to contact the electrodes on the flexible plate 2 and reduce the occurrence of easy open circuit caused by the extremely small electrode contact surface, the diameter of the insulating part 34 in this embodiment is set to be the same as the diameter at the vibration node of the piezoelectric vibrator, that is, preferably the width of the edge electrode region 8 is greater than 0.5 mm, so as to ensure the amplitude strength of the piezoelectric vibrator while realizing the effective connection between the conductive electrode and the flexible plate 2, and further realize the stable operation of the piezoelectric vibrator.

[0067] Embodiment 2:

[0068] As Figures 17 to 18 shown, this embodiment provides a piezoelectric micropump, which includes a pump body 9, a check valve 10 and the piezoelectric vibrator in Embodiment 1. In this embodiment, a pump chamber 91 is provided in the pump body 9, and a fluid input end 92 and a fluid output end 93 communicating with the pump chamber 91 are opened in the pump body 9. The piezoelectric vibrator is arranged in the pump chamber 91 and divides the pump chamber 91 into a first chamber communicating with the fluid input end 92 and a second chamber communicating with the fluid output end 93, and the central position of the piezoelectric vibrator is aligned with the fluid input end 92 and the fluid output end 93. Two check valves 10 are respectively installed at the ports of the fluid input end 92 and the fluid output end 93, so that when the piezoelectric vibrator moves toward the fluid input end 92 side, the check valve 10 closes; when the piezoelectric vibrator moves toward the fluid output end 93 side, the check valve 10 opens, thereby realizing the transmission of fluid, and the amplitude of the piezoelectric vibrator is large and the efficiency is high, so that the output pressure of the piezoelectric micropump in this embodiment can be improved and the transmission efficiency of the piezoelectric micropump can be improved.

[0069] And, as Figure 17 shown, a communication channel 94 communicating with the first chamber and the second chamber is further provided on the pump body 9, so that after the piezoelectric vibrator vibrates, the fluid can flow through the communication channel 94 between the first chamber and the second chamber, thereby realizing the pumping of the fluid.

[0070] As Figures 19 to 21As shown, in another embodiment, the number of pump chambers 91 in the piezoelectric micropump may also be two, and the piezoelectric vibrators in the first embodiment are installed in both pump chambers 91, so that a plurality of piezoelectric vibrators can be concentrated in one pump body 9, so that when the piezoelectric micropump is working, a plurality of piezoelectric vibrators can vibrate simultaneously, thereby improving the output capacity of the piezoelectric micropump; in addition, the two pump chambers 91 may be connected in series or in parallel, so that the pump body 9 can collect the fluid to the same outlet through the parallel pump chambers 91, thereby increasing the flow rate; the fluid may also be pumped multiple times through a plurality of piezoelectric vibrators through the series pump chambers 91, thereby increasing the output pressure of the fluid; not only can a large output flow rate and a greater output pressure be provided, but also the volume of the pump body 9 under the same output capacity can be greatly reduced, thereby facilitating the miniaturization design of the product.

[0071] In addition, if Figure 21 As shown, the communication channel 94 can also be arranged inside the pump body 9 to allow the fluid to flow between the first chamber and the second chamber, which can effectively reduce the overall external volume of the piezoelectric micropump, thereby facilitating the miniaturization design of the piezoelectric micropump.

[0072] In summary, in this embodiment, the first conductive electrode 4 and the second conductive electrode 5 are respectively folded from one surface of the piezoelectric ceramic 3 to the other surface, so that the first conductive electrode 4 and the second conductive electrode 5 surround each other on the first surface 31 and the second surface 32 of the piezoelectric ceramic 3 respectively, and the parts belonging to the same conductive electrode on the first surface 31 and the second surface 32 of the piezoelectric ceramic 3 are staggered with each other, so that the first surface 31 and the second surface 32 of the piezoelectric ceramic 3 are both configured with two electrodes, which is convenient for the flexible board 2 to perform a large single-sided connection, and the overall volume of the piezoelectric micropump can be reduced; and it also avoids the existence of areas with the same polarity on the two surfaces of the piezoelectric ceramic 3, thereby improving the output amplitude and efficiency of the piezoelectric vibrator, and further improving the overall output capacity of the piezoelectric micropump installed with the piezoelectric vibrator.

[0073] The embodiments described above are only preferred implementation modes of the present invention and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and modifications made by those skilled in the art on the basis of the invention shall fall within the protection scope of the present invention.

Claims

1. A piezoelectric vibrator, characterized in that: It comprises a support plate (1), a flexible plate (2); and A piezoelectric ceramic (3) having a first surface (31), a second surface (32) arranged opposite to each other in the thickness direction thereof, and a side wall (33) arranged between the first surface (31) and the second surface (32); A first conductive electrode (4) is disposed at the middle of the first surface (31) and at the outer peripheral edge of the second surface (32) connected via the side wall (33); A second conductive electrode (5) is disposed at the middle of the second surface (32) and at the outer peripheral edge of the first surface (31) connected via the side wall (33); The first conductive electrode (4) and the second conductive electrode (5) are insulated from each other on the first surface (31) and the second surface (32); the flexible board (2) is arranged on either side of the first surface (31) or the second surface (32) and is electrically connected to the first conductive electrode (4) and the second conductive electrode (5) on one side.

2. A piezoelectric vibrator according to claim 1, characterized in that: The first surface (31) and the second surface (32) are both provided with an insulating portion (34) for insulating and separating the first conductive electrode (4) and the second conductive electrode (5).

3. A piezoelectric vibrator according to claim 1, characterized in that: The first conductive electrode (4) and the second conductive electrode (5) both comprise a central electrode region (6), a flanged electrode region (7) and an edge electrode region (8) which are connected in sequence; the central electrode region (6) is arranged in the middle of the first surface (31) or the middle of the second surface (32); the flanged electrode region (7) is arranged on the side wall (33) and the edge electrode region (8) is folded to the outer peripheral edge of the second surface (32) or the outer peripheral edge of the first surface (31).

4. A piezoelectric vibrator according to claim 3, characterized in that: The edge electrode region (8) of the first conductive electrode (4) and the edge electrode region (8) of the second conductive electrode (5) surround each other's central electrode region (6) on the second surface (32) and the first surface (31), respectively.

5. A piezoelectric vibrator according to claim 3, characterized in that: The edge electrode region (8) is an annular structure provided with an inner ring (81), and the central electrode region (6) of the first conductive electrode (4) and the central electrode region (6) of the second conductive electrode (5) are respectively adapted to each other's inner ring (81) structure.

6. A piezoelectric vibrator according to claim 3, characterized in that: The outer shape structure of the first conductive electrode (4) is the same as the outer shape structure of the second conductive electrode (5).

7. A piezoelectric vibrator according to claim 3, characterized in that: The edge electrode area (8) is provided with an avoidance opening (82) for avoiding the flanged electrode area (7), and the width of the avoidance opening (82) is adapted to the width of the flanged electrode area (7).

8. A piezoelectric micropump, characterized in that: include: A pump body (9) having a pump chamber (91), wherein a fluid input end (92) and a fluid output end (93) communicating with the pump chamber (91) are formed in the pump body (9); A piezoelectric vibrator as claimed in any one of claims 1 to 7, installed in the pump chamber (91), and the pump chamber (91) is divided into a first chamber connected to the fluid input end (92) and a second chamber connected to the fluid output end (93); The one-way valve (10) is respectively installed in the first chamber and the second chamber and is arranged opposite to the center of the piezoelectric vibrator. The one-way valve (10) is configured to close when the piezoelectric vibrator moves toward the fluid input end (92); and to open when the piezoelectric vibrator moves toward the fluid output end (93).

9. A piezoelectric micropump according to claim 8, characterized in that: The pump body (9) is provided with a communication passage (94) connecting the first chamber and the second chamber.

10. A piezoelectric micropump according to claim 9, characterized in that: The pump chambers (91) are provided with two, and the two pump chambers (91) are connected in series or in parallel.

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