Multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes side by side and control method thereof

Abstract

The invention provides a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes side by side and a control method thereof, the multi-dimensional piezoelectric motor is characterized in that the multi-dimensional piezoelectric motor comprises four XYZ piezoelectric tubes, a base, an elastomer and a slip sheet, the four XYZ piezoelectric tubes are fixed on the base in parallel in a quadrangle shape, the first XYZ piezoelectric tube and the third XYZ piezoelectric tube are located at two ends of a diagonal line of the quadrangle, the diagonal line is parallel to the X direction, and the slip sheet is fixed on the base. The second XYZ piezoelectric tube and the fourth XYZ piezoelectric tube are located at the two ends of the other diagonal line of the quadrangle, the diagonal line is parallel to the Y direction, and the sliding piece is elastically pressed at the free ends of the four XYZ piezoelectric tubes through the elastic force of the sliding piece or the elastic force of an elastic body. The maximum static friction force between the slip sheet and the free ends of the four piezoelectric tubes meets the condition that any maximum static friction force is smaller than the sum of the other three maximum static friction forces. The radial size of the four XYZ piezoelectric tubes can be very small, but the radial deformation quantity can be very large, that is, the radial size is reduced by increasing the axial size of the motor.

Description

Technical Field

[0001] The present invention relates to a piezoelectric stepper and a control method thereof, and particularly to a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side and a control method thereof, belonging to the technical field of piezoelectric positioners. Background Art

[0002] A piezoelectric motor is a device that uses piezoelectric materials to generate small, accumulative periodic electrostrictive deformations, thereby achieving micro-nano-level positioning accuracy and macro-centimeter-level stroke. Due to its high precision and small size, it is widely used in semiconductor device processing, precision moving platforms in the optical field, and surface detection in nanoscience research. It is a device applied to high-precision science and technology.

[0003] In recent years, the development trend of piezoelectric motors requires them to have a small structure, large thrust, large stroke, and high precision. It is a development difficulty to have the above indicators in a one-dimensional piezoelectric motor.

[0004] In order to solve the key problem that the existing multi-dimensional piezoelectric motors have a large radial size and are difficult to be applied to extreme conditions with severely limited radial space such as strong magnetic fields, the present invention proposes a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side and a control method thereof. Summary of the Invention

[0005] Aiming at the key problem that the existing multi-dimensional piezoelectric motors have a large radial size and are difficult to be applied to extreme conditions with severely limited radial space such as strong magnetic fields, the present invention proposes a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side and a control method thereof.

[0006] The structural solution for the present invention to achieve the above object is as follows:

[0007] A multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side, including a first XYZ piezoelectric tube, a base, an elastic body, and a sliding piece, characterized by further comprising a second XYZ piezoelectric tube, a third XYZ piezoelectric tube, and a fourth XYZ piezoelectric tube. The 4 XYZ piezoelectric tubes are fixedly arranged on the base in parallel, and the fixing points form a quadrilateral. Among them, the first and third XYZ piezoelectric tubes are located at both ends of a diagonal of the quadrilateral, and this diagonal is parallel to the X direction. The second and fourth XYZ piezoelectric tubes are located at both ends of the other diagonal of the quadrilateral, and this diagonal is parallel to the Y direction. The deformation directions of the X, Y, and Z three dimensions of the 4 XYZ piezoelectric tubes are parallel. The sliding piece is elastically pressed against the free ends of the four XYZ piezoelectric tubes by its own elastic force or the elastic force of the elastic body, and the maximum static friction force between the sliding piece and the free ends of the four XYZ piezoelectric tubes satisfies: any one maximum static friction force is less than the sum of the other three maximum static friction forces.

[0008] The multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side is characterized in that the maximum static friction force between the sliding piece and the free ends of the four XYZ piezoelectric tubes is equal.

[0009] The control method of the multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side is characterized in that the deformation of the four XYZ piezoelectric tubes is controlled by a control signal in the following time sequence to realize that the sliding piece takes one step forward along the X direction relative to the base:

[0010] a. The first XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0011] b. The third XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0012] c. The first and third XYZ piezoelectric tubes deform along the -X direction at the same time, while the other two XYZ piezoelectric tubes perform periodic opposite deformations along the Y direction for more than one cycle.

[0013] The control method of the multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side is characterized in that the deformation of the four XYZ piezoelectric tubes is controlled by a control signal in the following time sequence to realize that the sliding piece takes one step forward along the clockwise direction relative to the base:

[0014] a. The first XYZ piezoelectric tube deforms relative to the base along the counterclockwise direction, while the other three XYZ piezoelectric tubes do not deform.

[0015] b. The second XYZ piezoelectric tube deforms relative to the base along the counterclockwise direction, while the other three XYZ piezoelectric tubes do not deform.

[0016] c. The third XYZ piezoelectric tube deforms relative to the base along the counterclockwise direction, while the other three XYZ piezoelectric tubes do not deform.

[0017] d. The fourth XYZ piezoelectric tube deforms relative to the base along the counterclockwise direction, while the other three XYZ piezoelectric tubes do not deform.

[0018] e. The four XYZ piezoelectric tubes deform relative to the base along the clockwise direction at the same time.

[0019] The control method of the multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side is characterized in that the deformation of the four XYZ piezoelectric tubes is controlled by a control signal in the following time sequence to realize that the sliding piece takes one step forward along the X direction relative to the base:

[0020] a. The first XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0021] b. The third XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0022] c. The second XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed.

[0023] d. The fourth XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed.

[0024] e. The four XYZ piezoelectric tubes are deformed along the -X direction simultaneously.

[0025] The working principle of the multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes in parallel and the control method thereof of the present invention is: in the prior art, the two-dimensional XY piezoelectric motor is realized by four sheet-like piezoelectric bodies, and its disadvantage is that the radial dimension is too large. In the present invention, we drive four XYZ piezoelectric tubes in parallel, and the radial dimension of each of them can be very small, but the radial deformation can be very large, because the length of each XYZ piezoelectric tube can be very long without affecting the radial dimension. Therefore, the principle of the present invention is to increase the axial dimension in exchange for a reduction in the radial dimension.

[0026] According to the above principle, the present invention has the following excellent performances:

[0027] 1. The overall radial dimension is very small, only slightly larger than the total radial dimension of four XYZ piezoelectric tubes.

[0028] 2. It can be used in extreme conditions where radial space is severely limited, such as strong magnetic fields.

[0029] 3. In addition to realizing XY two-dimensional stepping, it can also easily realize rotary stepping, becoming a rotary piezoelectric motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the structure of a multi-dimensional piezoelectric motor in which four XYZ piezoelectric tubes are driven in parallel.

[0031] Reference numerals in the figure: 1 first XYZ piezoelectric tube, 2 second XYZ piezoelectric tube, 3 third XYZ piezoelectric tube, 4 fourth XYZ piezoelectric tube, 5 base, 6 slide, 7 elastic body. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] See attached Figure 1, a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes arranged side by side, including a first XYZ piezoelectric tube 1, a base 5, an elastomer 7, and a sliding piece 6, characterized by further including a second XYZ piezoelectric tube 2, a third XYZ piezoelectric tube 3, and a fourth XYZ piezoelectric tube 4. The 4 XYZ piezoelectric tubes are fixedly arranged on the base 5 in parallel, and the fixing points form a quadrilateral. Among them, the first and third XYZ piezoelectric tubes 1 and 3 are located at both ends of a diagonal of the quadrilateral, and this diagonal is parallel to the X direction. The second and fourth XYZ piezoelectric tubes 2 and 4 are located at both ends of the other diagonal of the quadrilateral, and this diagonal is parallel to the Y direction. The deformation directions of the X, Y, and Z dimensions of the 4 XYZ piezoelectric tubes are parallel. The sliding piece 6 is elastically pressed against the free ends of the four XYZ piezoelectric tubes 1, 2, 3, and 4 by its own elastic force or the elastic force of the elastomer 7. The maximum static friction force between the sliding piece 6 and the free ends of the four XYZ piezoelectric tubes satisfies: any one of the maximum static friction forces is less than the sum of the other three maximum static friction forces.

[0034] Working principle: In the prior art, a two-dimensional XY-direction piezoelectric motor is realized by four sheet-shaped piezoelectric bodies, and its disadvantage is that the radial dimension is too large. In the present invention, we drive with four XYZ piezoelectric tubes arranged side by side. Each of them can have a very small radial dimension, but the radial deformation amount can be very large because the length of each XYZ piezoelectric tube can be very long without affecting the radial dimension. Therefore, the principle of the present invention is to increase the axial dimension in exchange for the reduction of the radial dimension.

[0035] Embodiment 1

[0036] This embodiment is used to realize that the sliding piece moves one step further along the X direction relative to the base, and specifically includes the following steps:

[0037] a. The first XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0038] b. The third XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0039] c. The first and third XYZ piezoelectric tubes deform along the -X direction simultaneously, while the other two XYZ piezoelectric tubes perform a periodic opposite deformation along the Y direction for more than one cycle.

[0040] Embodiment 2

[0041] This embodiment is used to realize that the sliding piece moves one step further in the clockwise direction relative to the base, and specifically includes the following steps:

[0042] a. The first XYZ piezoelectric tube deforms relative to the base in the counterclockwise direction, while the other three XYZ piezoelectric tubes do not deform.

[0043] b. The second XYZ piezoelectric tube deforms counterclockwise relative to the base, while the other three XYZ piezoelectric tubes do not deform.

[0044] c. The third XYZ piezoelectric tube deforms counterclockwise relative to the base, while the other three XYZ piezoelectric tubes do not deform.

[0045] d. The fourth XYZ piezoelectric tube deforms counterclockwise relative to the base, while the other three XYZ piezoelectric tubes do not deform.

[0046] e. The four XYZ piezoelectric tubes deform clockwise relative to the base simultaneously.

[0047] Embodiment 3

[0048] This embodiment is used to realize that the sliding piece moves one step further along the X direction relative to the base, and specifically includes the following steps:

[0049] a. The first XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0050] b. The third XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0051] c. The second XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0052] d. The fourth XYZ piezoelectric tube deforms along the +X direction, while the other three XYZ piezoelectric tubes do not deform.

[0053] e. The four XYZ piezoelectric tubes deform along the -X direction simultaneously.

[0054] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0055] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes in parallel, comprising a first XYZ piezoelectric tube, a base, an elastic body, and a sliding plate, characterized in that: It also includes a second XYZ piezoelectric tube, a third XYZ piezoelectric tube, and a fourth XYZ piezoelectric tube. The four XYZ piezoelectric tubes are fixed on the base in parallel, and the fixing points are in a quadrilateral. The first and third XYZ piezoelectric tubes are located at two ends of a diagonal of the quadrilateral, and the diagonal is parallel to the X direction. The second and fourth XYZ piezoelectric tubes are located at two ends of another diagonal of the quadrilateral, and the diagonal is parallel to the Y direction. The deformation directions of the four XYZ piezoelectric tubes in three dimensions of X, Y, and Z are all parallel. The sliding piece is pressed on the free ends of the four XYZ piezoelectric tubes by its own elastic force or the elastic force of the elastic body. The maximum static friction between the sliding piece and the free ends of the four XYZ piezoelectric tubes satisfies: any maximum static friction is less than the sum of the other three maximum static frictions.

2. The multi-dimensional piezoelectric motor according to claim 1, wherein the four XYZ piezoelectric tubes are driven in parallel. The maximum static friction force between the sliding piece and the free ends of the four XYZ piezoelectric tubes is equal.

3. A control method for a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes in parallel as claimed in claim 1, characterized in that The control signals of the following timing control the deformation of the four XYZ piezoelectric tubes to achieve a step of the slider relative to the base in the X direction: a. The first XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. b. The third XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. c. The first and third XYZ piezoelectric tubes are deformed along the -X direction at the same time, while the remaining two XYZ piezoelectric tubes are deformed towards each other periodically for more than one period along the Y direction.

4. A control method for a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes in parallel as claimed in claim 1, characterized in that The control signals of the following timing control the deformation of the four XYZ piezoelectric tubes, so that the slider takes one step in the clockwise direction relative to the base: a. The first XYZ piezoelectric tube is deformed in the counterclockwise direction relative to the base, while the other three XYZ piezoelectric tubes are not deformed. b. The second XYZ piezoelectric tube is deformed in the counterclockwise direction relative to the base, while the other three XYZ piezoelectric tubes are not deformed. c. The third XYZ piezoelectric tube is deformed in the counterclockwise direction relative to the base, while the other three XYZ piezoelectric tubes are not deformed. d. The fourth XYZ piezoelectric tube is deformed in a counterclockwise direction relative to the base, while the other three XYZ piezoelectric tubes are not deformed. e. The four XYZ piezoelectric tubes are deformed in a clockwise direction relative to the base at the same time.

5. A control method for a multi-dimensional piezoelectric motor driven by four XYZ piezoelectric tubes in parallel as claimed in claim 1, characterized in that The control signals of the following timing control the deformation of the four XYZ piezoelectric tubes to achieve a step of the slider relative to the base in the X direction: a. The first XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. b. The third XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. c. The second XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. d. The fourth XYZ piezoelectric tube is deformed along the +X direction, while the other three XYZ piezoelectric tubes are not deformed. e. The four XYZ piezoelectric tubes are deformed along the -X direction simultaneously.

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