191 results about "Perfluoroether" patented technology

The invention discloses a perfluoroether raw rubber emulsion as well as a preparation method and application thereof, and particularly provides a preparation method of the perfluoroether raw rubber emulsion, which is characterized by comprising the following steps: (1) in the presence of a water medium, an initiator, an emulsifier and a chain transfer agent, carrying out emulsion polymerization reaction on an initial mixed monomer; (2) continuously supplementing the first-stage mixed monomer into a polymerization reaction system until the total yield of the polymerization reaction is 25-67% of the final yield; the percentage of the final yield is mass percentage; and (3) continuously supplementing the second-stage mixed monomer into the polymerization reaction system until the polymerization reaction accumulates to obtain a final product. Perfluoroether raw rubber further prepared from the perfluoroether raw rubber emulsion prepared by the preparation method has one or more advantages as follows: the perfluoroether raw rubber emulsion is resistant to high temperature, small in permanent compression deformation and good in processability, and rubber obtained after vulcanization of the perfluoroether raw rubber has better performance parameters.

The invention provides a perfluoroether rubber sealing element and a preparation method thereof, and the preparation method comprises the following steps: taking tetrafluoroethylene and perfluoroalkyl vinyl ether as comonomers, and carrying out emulsion polymerization under the condition of a vulcanization point monomer and a chain transfer agent to obtain raw perfluoroether rubber; the preparation method comprises the following steps: mixing the raw perfluoroether rubber, the carboxyl fluorinated modified carbon nanotubes, a filler, a vulcanizing agent and an accelerant, and performing first-stage vulcanization and second-stage vulcanization to obtain the perfluoroether rubber sealing element. According to the perfluoroether rubber sealing element and the preparation method thereof provided by the invention, the compressive deformation resistance of the perfluoroether rubber sealing element is improved by adding the carboxyl fluorinated modified carbon nanotubes, so that the sealing element is ensured to meet the sealing requirement of semiconductor equipment.

The invention discloses a high-adhesion perfluoroether rubber / metal composite part as well as a preparation method and application thereof. Structured and functional modification is carried out on the metal surface through a multi-composite technology, and the fluidity and vulcanization characteristics of the FFKM rubber compound are regulated and controlled through formula and technology optimization, so that the prepared FFKM / metal composite part has high bonding strength and excellent chemical corrosion resistance.

The invention discloses low-temperature-resistant perfluoroether rubber and a preparation method thereof, and the low-temperature-resistant perfluoroether rubber comprises the following raw material components in parts by weight: 80-120 parts of a perfluoroether rubber polymer, 1-5 parts of an additive, 10-30 parts of a filler, 1-3 parts of a cross-linking agent, 1-4 parts of an accelerant, 1-3 parts of a processing aid and 1-3 parts of an acid acceptor. The perfluoroether rubber polymer is prepared through a two-step polymerization method, and then the perfluoroether rubber polymer and all the mixed auxiliary materials are mixed and mixed to prepare the low-temperature-resistant perfluoroether rubber. The perfluoroether rubber provided by the invention not only has relatively high hardness, tensile strength, extrusion deformation resistance, shearing resistance and low temperature resistance, can meet the use requirement of the perfluoroether rubber at-40 DEG C, but also has excellent plasma etching resistance, and can be applied to the semiconductor industry.

The invention provides passivated perfluoroether elastomer rubber as well as a preparation method and application thereof. The passivated perfluoroether elastomer rubber is prepared by sputtering an yttrium oxide passivation layer on the surface of perfluoroether elastomer rubber. The preparation method comprises the following steps: placing the perfluoroether elastomer rubber in a vacuum sputtering cavity, and carrying out sputtering treatment by adopting an yttrium target material to form an yttrium oxide passivation layer with the thickness of 10-100 nm so as to obtain passivated perfluoroether elastomer rubber; and carrying out annealing treatment on the passivated perfluoroether elastomer rubber to eliminate surface stress, and then cleaning and drying for later use. The passivated perfluoroether elastomer rubber is applied to the etching process in the semiconductor manufacturing process, the plasma etching resistance of a perfluoroether elastomer rubber product can be effectively improved by sputtering the yttrium oxide passivation layer, and meanwhile the lubricating performance of the perfluoroether elastomer rubber product is improved.

The invention discloses a high-temperature-resistant perfluoroether rubber preparation method which comprises the following steps: mixing perfluoroether rubber, modified silicon carbide and modified boron nitride nanosheets, adding a cross-linking agent, uniformly mixing, and carrying out segmented vulcanization to obtain the high-temperature-resistant perfluoroether rubber, wherein in the preparation process of the modified boron nitride nanosheet, nano silicon carbide, the boron nitride nanosheet, polymethyl methacrylate, a catalyst and a solvent are uniformly mixed, the surface of a matrix is coated with the mixture, a thin film is formed through drying, the thin film is sintered and crushed, and an intermediate is obtained; and carrying out graft modification on the intermediate by using a silane coupling agent containing a carbon-carbon double bond to obtain the modified boron nitride nanosheet. The perfluoroether rubber prepared by the invention has good thermal conductivity, high temperature resistance and plasma resistance.

The invention provides a method for separating low-molecular-weight impurities from perfluoroether elastomer emulsion, which is applied to the technical field of perfluoroether elastomers and comprises the following steps: S1, preparing perfluoroether elastomer emulsion containing micro-nano bubbles, the volume of gas in the perfluoroether elastomer emulsion containing micro-nano bubbles being 2-10% of that of a gas-liquid mixture; s2, the perfluoroether elastomer emulsion containing the micro-nano bubbles is subjected to centrifugal separation through a centrifugal separator, perfluoroether elastomer condensation bodies and residual liquid containing impurities are obtained, and hydrophobic varnished cloth is arranged on the inner wall of the centrifugal separator; and S3, washing and drying the perfluoroether elastomer condensation body to obtain the perfluoroether elastomer. The perfluoroether elastomer is prepared through the method for separating the low-molecular-weight impurities from the perfluoroether elastomer emulsion, and the composition of the perfluoroether elastomer is applied to the semiconductor manufacturing process.

The invention discloses a rubber compound for aviation sealing elements and a preparation method thereof, and relates to the technical field of rubber compounds. The rubber compound for the aviation sealing element comprises the following raw material components in parts by weight: 30-50 parts of methyl vinyl phenyl silicone rubber; 50 to 70 parts of perfluoroether rubber; 20-30 parts of a compatible reinforcing agent; 10-20 parts of modified hydrogenated nitrile rubber; 4 to 6 parts of fluorinated graphene; 2-5 parts of a vulcanizing agent; and 2-5 parts of an anti-aging agent. The compatibility enhancer, the modified hydrogenated nitrile rubber and the fluorinated graphene are used for enhancing and improving the rubber compound, so that the comprehensive performance of the prepared rubber compound is more excellent, and the requirements of aviation sealing elements are met.

The invention belongs to the technical field of analysis and detection, and discloses a method for detecting perfluorinated and polyfluoroalkyl substances in cosmetics, which comprises the following steps: (1) mixing a perfluorinated and polyfluoroalkyl substance standard solution and an isotope internal standard solution to obtain a mixed standard solution; detecting the mixed standard solution by adopting a liquid chromatograph-mass spectrometer, drawing a standard curve, and calculating to obtain a linear equation; (2) mixing a cosmetic sample with the isotope internal standard solution, adding an extracting solution, extracting, and filtering to obtain a mixed solution to be detected; detecting the mixed to-be-detected solution by adopting the liquid chromatograph-mass spectrometer to obtain a detection result, and substituting the detection result into the linear equation to obtain the content of the perfluoro and polyfluoroalkyl substances in the mixed to-be-detected solution, the perfluoro and polyfluoroalkyl substances comprise perfluorocarboxylic acid, perfluorosulfonic acid, a fluorine polymer, perfluoroalkyl ether sulfonic acid, saturated fluorine telomere acid and perfluoroether carboxylic acid.

The invention provides an anti-sticking perfluoroether rubber sealing assembly and a preparation method and application thereof, the preparation method comprises the following steps: mixing perfluoroether rubber with a vulcanizing agent to obtain a rubber compound, and performing high-temperature vulcanization on the rubber compound to obtain a perfluoroether rubber product; carrying out surface roughening treatment on the perfluoroether rubber product; dispersing amorphous fluororesin in the fluorinated liquid to obtain coating slurry; and coating the roughened perfluoroether rubber product with the coating slurry, and carrying out segmented heating and drying to obtain the perfluoroether rubber sealing assembly. According to the anti-sticking perfluoroether rubber sealing assembly as well as the preparation method and the application thereof, the obtained perfluoroether rubber sealing assembly has relatively low friction coefficient, excellent plasma corrosion resistance and relatively small viscous force, shows excellent non-sticking performance, and can be suitable for different environments.

The invention relates to the technical field of sealing ring products, in particular to a plasma-resistant and low-viscous-force metal-free perfluoropolymer and a preparation method thereof. The metal-free perfluoropolymer is prepared from the following raw materials in parts by weight: 100 parts of perfluoroether rubber of a peroxide vulcanization system; 10 to 20 parts of an inorganic nitride; 1-3 parts of peroxide; and 1-6 parts of a crosslinking auxiliary agent. The prepared O-shaped rubber sealing ring is excellent in plasma resistance, no metal particles escape, the compression set is lower than 25%, and the adhesive force is lower than 50N. On semiconductor processing equipment, the sealing ring has the advantages of long service life (plasma resistance and mass loss rate lower than 5%), good sealing performance (compression set lower than 25%), low viscous force and easiness in replacement, the replacement efficiency of the O-shaped rubber ring is improved, and the yield of products (no metal particles escape) is guaranteed.

The invention relates to the technical field of perfluoroether rubber, in particular to a perfluoroether rubber composite material and a preparation method thereof. The perfluoroether rubber composite material provided by the invention comprises modified perfluoroether rubber and a matrix material, a method for obtaining the modified perfluoroether rubber comprises the step of sequentially carrying out plasma activation and surface modification treatment on the perfluoroether rubber, and the surface modification method comprises at least one of coupling agent modification and nanofiller coating. The perfluoroether rubber is treated to obtain the modified perfluoroether rubber, so that the interface energy of the perfluoroether rubber is reduced, and the compatibility of the perfluoroether rubber and a matrix material is effectively improved; uniform nanoscale coarse structures and active sites are formed on the surface of the perfluoroether rubber through plasma activation, and the activated perfluoroether rubber is subjected to surface modification through coupling agent surface modification or nano filler coating, so that the processing stability and the mechanical property of the perfluoroether rubber composite material are improved.

The invention provides a method for decomposing and mineralizing fluorine-containing organic matter wastewater, which is applied to the technical field of treatment of fluorine-containing organic matter wastewater generated in a perfluoroether elastomer emulsion flocculation process, and comprises the following steps: S1, carrying out adsorption and desorption treatment on the fluorine-containing organic matter wastewater to obtain a concentrated solution of the fluorine-containing organic matter wastewater; s2, hydrogen peroxide and ferrous ions are added into a container containing the concentrated solution to obtain a mixed solution, the pH of the mixed solution is adjusted to be 2-4, the concentration mass ratio of the hydrogen peroxide to organic matter contained in the fluorine-containing organic matter wastewater is 1: 1-2, the molar ratio of the hydrogen peroxide to the ferrous ions is 1-6: 1, micro-nano bubbles are introduced into the mixed solution, and ultrasonic treatment is conducted; s3, calcium hydroxide is added into the treated mixed solution, calcium fluoride precipitates are obtained through centrifugal treatment, and the fluorine-containing organic matter in the wastewater can be degraded and mineralized.

The present invention relates to the field of semiconductor material technology, and in particular to a semiconductor sealing ring material and a preparation method and application thereof. The semiconductor sealing ring material includes the following raw materials of components in parts by weight: 100-120 parts of perfluoroether rubber, 1-5 parts of soluble polytetrafluoroethylene, 5-8 parts of fumed silica, 1-2 parts of boron nitride, 1-2 parts of a cross-linking agent, and 0.2-0.5 parts of a co-cross-linking agent. The formula of the present invention does not contain inorganic compounds containing metal ions, and the filler used has high purity and has the advantage of low metal ion content. Inorganic fillers inevitably contain trace amounts of metal ion impurities. The present invention, when using a small amount of inorganic fillers, not only ensures that the comprehensive properties such as hardness, tensile strength, elongation at break, and compression set are good.

The invention discloses perfluoroether rubber as well as a preparation method and application thereof. The perfluoroether rubber has an A1-B1-A2-B2 block structure, and the block A1, the block B1, the block A2 and the block B2 are respectively and independently obtained by polymerizing tetrafluoroethylene and perfluoroalkyl vinyl ether; the molar percentage content of the perfluoroalkyl vinyl ether in the block B1 or the block B2 is higher than the molar percentage content of the perfluoroalkyl vinyl ether in the block A1 and is also higher than the molar percentage content of the perfluoroalkyl vinyl ether in the block A2; the molar percentage content of the perfluoroalkyl vinyl ether in the block B2 is higher than the molar percentage content of the perfluoroalkyl vinyl ether in the block B1. The perfluoroether rubber provided by the invention has an A1-B1-A2-B2 four-block structure, realizes progressive transition of rigidity-flexibility-rigidity-super-flexibility, reduces compression set, prolongs the service life of a plasma environment, has high thermal decomposition temperature, and can be used for a long time at 300 DEG C or above.

The invention provides a metal plate frame and fluororubber sealing assembly and a preparation method thereof, and the preparation method is applied to the technical field of semiconductor sealing and comprises the steps that S1, a metal plate frame is coated with an adhesive, dried and then cooled, and the adhesive is a trithiocyanuric acid derivative solution; s2, a cross-linking agent and an addition agent are added in the thin-passing mixing process of the perfluoroether elastomer, a mixed rubber compound is obtained, the addition agent comprises fluorinated silicon dioxide, fluorinated titanium dioxide or PFA micro powder, and the mass of the addition agent is 2-10% of the mass of the perfluoroether elastomer; and S3, the mixed rubber sheet is placed in a metal plate frame, the metal plate frame with the mixed rubber sheet is placed in a mold to be subjected to hot pressing vulcanization forming, then secondary vulcanization is conducted, then radiation vulcanization is conducted, and the assembly is obtained. The assembly prepared through the method is resistant to plasma etching and high in cleanliness, the bonding performance of the perfluoroether rubber and the metal plate frame is good, and the rate of finished products is high.

The invention provides perfluoroether fluororubber as well as a preparation method and application thereof. The perfluoroether fluororubber is in an A-B-A block form; the A block is formed by polymerizing tetrafluoroethylene and perfluoropropyl vinyl ether, and the molar ratio of the tetrafluoroethylene to the perfluoropropyl vinyl ether is (65 to 80): (20 to 35); the block B is formed by polymerizing tetrafluoroethylene and perfluoromethyl vinyl ether, and the molar ratio of the tetrafluoroethylene to the perfluoromethyl vinyl ether is (35-55): (65-45); and the mass fraction of the block B in the perfluoroether fluororubber is 50%-80%. The perfluoroether fluororubber has excellent high temperature resistance, can resist the high temperature of 320 DEG C, has excellent elongation, and is low in hardness, small in compression deformation and good in medium resistance and processability.

The present invention discloses a low-temperature resistant perfluoroether rubber and a preparation method thereof. In parts by weight, the raw material components include: 80-120 parts of perfluoroether rubber polymer, 1-5 parts of additives, 10-30 parts of fillers, 1-3 parts of cross-linking agents, 1-4 parts of accelerators, 1-3 parts of processing aids, and 1-3 parts of acid absorbers. The present invention prepares a perfluoroether rubber polymer by a two-step polymerization method, and then prepares a low-temperature resistant perfluoroether rubber by mixing the perfluoroether rubber polymer with all mixed auxiliary materials. The perfluoroether rubber provided by the present invention not only has higher hardness, tensile strength, anti-extrusion deformation, shear resistance and low-temperature resistance, can meet the use demand of perfluoroether rubber at 40°C, and also has excellent plasma etching resistance, and can be applied to the semiconductor industry.

The invention relates to the technical field of rubber and its processing technology, and discloses a regenerated perfluoroether rubber and its processing technology. The invention recovers polymer materials in waste perfluoroether rubber, and adds bio-based or degradable polymer materials, surface-modified nanoparticles, functional polymer additives and environmentally friendly cross-linking agents therein to re-prepare regenerated perfluoroether rubber with excellent performance, thereby reducing environmental pollution, realizing the recycling of resources, effectively coping with the problem of resource waste, and reducing the use cost.

The invention discloses a high-purity plasma-corrosion-resistant perfluoroether rubber material which comprises the following components in parts by mass: 100 parts of perfluoroether rubber; 10-20 parts of an organic polymer filler; 0.5-3 parts of a vulcanizing agent; and 1-4 parts of an assistant vulcanizing agent. The invention also provides a preparation method of the rubber material. The preparation method comprises the following steps: preparing a perfluoroether rubber compound and thermally vulcanizing the perfluoroether rubber. The prepared high-purity perfluoroether rubber material is excellent in high-temperature resistance, good in plasma etching resistance and extremely low in metal ion precipitation amount, and has important guiding significance on development of sealing materials.

The invention discloses a crosslinkable perfluoroelastomer and a preparation method and application thereof, the preparation method comprises the following steps: (1) mixing nitrile perfluoroalkyl vinyl ether, a fluorocarbon solvent, deionized water and an emulsifier, and emulsifying to obtain a nitrile perfluoroalkyl vinyl ether microemulsion; (2) adding raw materials containing the nitrile perfluoroalkyl vinyl ether microemulsion, perfluoromethyl vinyl ether, tetrafluoroethylene and an initiator into a high-pressure polymerization kettle, and carrying out a copolymerization reaction; (3) after the copolymerization reaction is finished, cooling, emptying the pressure of the polymerization kettle to normal pressure, and taking out the emulsion in the kettle; and (4) demulsifying, condensing, filtering, washing and drying the emulsion in the kettle to obtain the crosslinkable perfluoroelastomer. The copolymer has higher molecular weight and crosslinking degree, and can be used as a sizing material of the perfluoroether rubber to perform vulcanization reaction in a rubber system without a crosslinking agent or with peroxide as a crosslinking agent, and the obtained perfluoroether rubber has excellent high temperature resistance.

The invention provides anti-cracking perfluoroether rubber as well as a preparation method and application thereof, and relates to the technical field of rubber materials. The anti-cracking perfluoroether rubber is prepared from the following materials in parts by weight: 100 parts of perfluoroether rubber, 10 to 20 parts of fluorine-containing nano SiO2, 20 to 30 parts of BN-coated SiO2, 2 to 5 parts of a silane coupling agent, 1 to 3 parts of a peroxide cross-linking agent, 1 to 3 parts of a bisphenol AF cross-linking agent, 1 to 2 parts of an antioxidant, 1 to 2 parts of a heat stabilizer, 0.5 to 1 part of a lubricating agent and 0.5 to 1 part of a dispersing agent. The invention aims to provide the novel anti-cracking perfluoroether rubber aiming at the defects in the prior art, and the overall anti-cracking performance of the material is improved.

The invention provides a metal plate frame and fluororubber sealing assembly and a preparation method thereof, and the preparation method is applied to the technical field of semiconductor sealing and comprises the steps that S1, a metal plate frame is coated with an adhesive, dried and then cooled, and the adhesive is a trithiocyanuric acid derivative solution; s2, a cross-linking agent and an addition agent are added in the thin-passing mixing process of the perfluoroether elastomer, a mixed rubber compound is obtained, the addition agent comprises fluorinated silicon dioxide, fluorinated titanium dioxide or PFA micro powder, and the mass of the addition agent is 2-10% of the mass of the perfluoroether elastomer; and S3, the mixed rubber sheet is placed in a metal plate frame, the metal plate frame with the mixed rubber sheet is placed in a mold to be subjected to hot pressing vulcanization forming, then secondary vulcanization is conducted, then radiation vulcanization is conducted, and the assembly is obtained. The assembly prepared through the method is resistant to plasma etching and high in cleanliness, the bonding performance of the perfluoroether rubber and the metal plate frame is good, and the rate of finished products is high.

The invention discloses a high-temperature-resistant perfluoroether elastomer composition and a preparation method thereof. The preparation method of the high-temperature-resistant perfluoroether elastomer composition comprises the following steps: S1, carrying out emulsion polymerization on tetrafluoroethylene, perfluoromethyl vinyl ether, a non-conjugated fluorine diene vulcanization point monomer, a phenyl-containing perfluorodiene vulcanization point monomer and a peroxide initiator according to a preset proportion to obtain a perfluoroether elastomer emulsion; s2, condensing, washing and drying the perfluoroether elastomer emulsion to obtain perfluoroether elastomer micro powder; s3, mixing and thin-passing the perfluoroether elastomer micro powder with a filler, an acid acceptor and a vulcanizing agent in a preset proportion to obtain perfluoroether elastomer mixed rubber; and S4, carrying out compression molding on the perfluoroether elastomer rubber compound, and carrying out secondary vulcanization to obtain the perfluoroether elastomer composition with high temperature resistance and water vapor resistance. The perfluoroether elastomer composition prepared by the invention has the characteristics of high temperature resistance, water vapor resistance and low compression set.

The invention provides perfluoroether rubber resistant to strong alkaline solvents as well as a preparation method and application of the perfluoroether rubber, and relates to the technical field of rubber materials. The perfluoroether rubber resistant to the strong alkaline solvent is prepared from the following materials in parts by weight: 70 to 80 parts of perfluoroether rubber, 8 to 12 parts of nano silicon dioxide, 5 to 7 parts of fluorosilane surface modified ZrO2atAl2O3, 4 to 6 parts of silicon carbide, 2 to 4 parts of peroxide cross-linking agent, 2 to 3 parts of bisphenol AF cross-linking agent, 1.5 to 2.5 parts of anti-aging agent, 1.5 to 2.5 parts of antioxidant, 0.3 to 0.5 part of lubricating agent and 0.4 to 0.6 part of dispersing agent. The invention aims to provide the novel perfluoroether rubber resistant to the strong alkaline solvent aiming at the defects in the prior art, and the strong alkaline solvent resistance of the material is improved.

The invention provides a stabilizing treatment method for an unstable end group of fusible polytetrafluoroethylene and application. The stabilizing treatment method comprises the following steps: obtaining fusible polytetrafluoroethylene resin RfCOOH containing carboxyl; the method comprises the following steps: carrying out reduction reaction on carboxyl-containing meltable polytetrafluoroethylene resin and a first reducing agent in a first solvent under the action of a halogenated salt catalyst to obtain fluoroalcohol RfCH2OH; a second reducing agent and halogenated fluoroalkyl carboxylate X (CF2) m + 1COOM are added into the RfCH2OH for a reaction, and carboxyl-terminated perfluoroether RfCH2O (CF2) m + 1COOH is obtained; adding a selective fluorination reagent and a noble metal acid salt into the carboxyl-terminated perfluoroether RfCH2O (CF2) m + 1COOH, and reacting to obtain a fusible polytetrafluoroethylene resin RfCH2O (CF2) mCF3 of which the terminal group is perfluoroether; and treating the fusible polytetrafluoroethylene resin of which the terminal group is perfluoro ether by fluorine-nitrogen mixed gas to obtain the perfluoro fusible polytetrafluoroethylene resin RfCF2O (CF2) mCF3. According to the method, regeneration of unstable end groups in the subsequent processing process is avoided.

The invention discloses a functionally gradient perfluoroether rubber material as well as a preparation method and application thereof. The functional gradient perfluoroether rubber material comprises a contact layer, a transition layer and a supporting layer which are tightly connected in sequence, wherein the contact layer is prepared from raw materials including raw perfluoroether rubber, a filling agent, a vulcanizing agent and a plasticizer; the transition layer is prepared from raw materials including raw perfluoroether rubber, a filling agent and a vulcanizing agent; the supporting layer is prepared from raw materials including raw perfluoroether rubber, a filling agent and a vulcanizing agent; the Shore A hardness of the contact layer is smaller than or equal to the Shore A hardness of the transition layer and smaller than or equal to the Shore A hardness of the supporting layer. Through component gradient design and process regulation and control, continuous gradient distribution of mechanical properties such as hardness and viscoelasticity of the material in space is realized, so that the problem of contradiction between the sealing performance of the elastic membrane of the medical micro-flow electromagnetic valve and the pipetting precision is solved.

The invention relates to the technical field of semiconductor processing, and discloses an energy-saving double-furnace-body vacuum sintering furnace for a quartz waste liquid bottle for a semiconductor, which comprises a nested structure of a heat preservation drying furnace and a high-temperature sintering furnace, a rotary drying frame is arranged between the heat preservation drying furnace and the high-temperature sintering furnace, and the opening and closing of furnace doors are controlled through a guide rail driving mechanism respectively; the high-temperature sintering furnace adopts a molybdenum alloy lining; the vacuum pump combination realizes high vacuum, the furnace door adopts perfluoroether rubber triple sealing, the rotary drying frame and the sintering frame are respectively provided with a quartz boat and a lead screw guide rail driving mechanism to guarantee high-precision positioning, and during working, the two furnace bodies operate cooperatively, waste liquid bottles are dried and preheated in the heat preservation drying furnace firstly and then transferred to the high-temperature sintering furnace to be sintered. The vacuum interlayer is used for heat insulation, so that energy consumption is reduced, impurity volatilization rate is increased, and efficient and energy-saving recovery of the quartz waste liquid bottle is effectively realized.

The invention discloses a preparation method of plasma-resistant perfluoroether rubber, which comprises the following steps: S1, carrying out ball milling on boron nitride nanosheets and silica sol, uniformly mixing, drying, adding a polyvinyl alcohol aqueous solution, uniformly mixing, granulating and calcining to obtain an intermediate 1; uniformly mixing the intermediate 1 with a silane coupling agent solution, carrying out grafting reaction, carrying out solid-liquid separation, and drying to obtain three-dimensional boron nitride nanosheet particles; s2, uniformly mixing tetrafluoroethylene, perfluoroalkyl vinyl ether, a vulcanization point monomer, an initiator, a chain transfer agent, the three-dimensional boron nitride nanosheet particles, an emulsifier, a pH regulator and water, carrying out an in-situ emulsion polymerization reaction to obtain a perfluoroether emulsion, and then carrying out condensation, washing and drying to obtain perfluoroether raw rubber; and mixing the perfluoroether raw rubber, octavinyl silsesquioxane and a vulcanizing agent, and performing segmented vulcanization to obtain the plasma-resistant perfluoroether rubber. The invention also discloses the plasma-resistant perfluoroether rubber. The composite material has good high temperature resistance and plasma resistance.

The utility model discloses an optical path adjustable flow cell which comprises a flow cell cavity, two adjusting seats are oppositely arranged in the flow cell cavity, the two adjusting seats are both in threaded connection with the flow cell cavity, lenses are arranged at the opposite ends of the two adjusting seats, compression screws are arranged on the opposite sides, facing the flow cell cavity, of the lenses, and the compression screws are in threaded connection with the flow cell cavity. A connector is arranged at the tail end of the adjusting seat; the optical path adjusting device is simple in structure and reasonable in design, rotary fine adjustment of the optical path is achieved through threaded connection of the adjusting base and the flow cell cavity, the optical path can be adjusted without disassembling and assembling the flow cell, and convenience of experimental operation is improved. The lens and the cavity are directly matched and installed, the parallelism of the lens is ensured, and the detection precision is improved. In addition, a perfluoroether O-shaped sealing ring is adopted, so that the sealing performance is better, the corrosion resistance and the pressure resistance are stronger, and the stability and the reliability of equipment in a complex environment are ensured.