Crystal growing furnace and seed crystal replacement process

Abstract

The invention discloses a crystal growth furnace and a seed crystal replacement process, and relates to the technical field of crystal growth, the technical scheme is that the crystal growth furnace comprises an isolation bin, a furnace body and a crystal supply assembly, the crystal supply assembly comprises a storage cylinder, seed crystals are stacked in the storage cylinder, a push plate is arranged in the storage cylinder, a push mechanism and a driving assembly are installed on one side of the push plate, and the driving assembly comprises a driving sleeve; a plurality of extending frames are fixedly mounted on the driving sleeve, a clamping mechanism is mounted on one side of each extending frame, and the driving assembly further comprises a power mechanism; the heat insulation mechanism is used for preventing heat from being dissipated into the insulation bin through the feeding pipe; and the unloading mechanism is used for unloading the waste seed crystals. According to the technical scheme, by arranging the storage barrel and the pushing mechanism, the seed crystals can be stored in a space-saving vertical stacking mode, meanwhile, the seed crystals are pushed upwards through the pushing plate, the damage probability of the seed crystals is greatly reduced, and the completeness of the seed crystals is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal growth, and specifically provides a crystal growth furnace and a seed crystal replacement process. Background Art

[0002] As an important optoelectronic material, sapphire single crystal has a wide range of applications in high-tech fields such as LED chips, optical windows, and lasers. At present, the growth of sapphire single crystal mainly relies on the Kyropoulos method. In the Kyropoulos method, the seed crystal contacts the melt interface and the seed crystal is pulled up at an extremely slow speed, and finally a single crystal ingot is formed. This method has mature technology and low cost, and is suitable for mass production. However, with the progress of technology, the requirements for the quality and size of sapphire single crystal are getting higher and higher, and the traditional sapphire crystal growth furnace has been difficult to meet the current production needs.

[0003] The prior art document with the publication number of CN115558985A provides a seed crystal replacement device, a sapphire crystal growth furnace and a seed crystal replacement method. This device places multiple seed crystals in the furnace chamber of the crystal growth furnace by setting a carrier, and can also prevent the spare seed crystal from being damaged due to being in a high-temperature environment for a long time, ensuring the quality of the seed crystal.

[0004] Although the above prior art solution realizes the separate replacement of the seed crystal, there are still the following defects; the above technical solution stacks the seed crystals to be replaced in a hollow rod, and at the same time uses gravity to transport the seed crystal into the first chuck. During the fall of the seed crystal, the seed crystal is very likely to be damaged, and when the upper seed crystal follows and falls downward, the lower seed crystal will also be impacted, increasing the risk of damage to the seed crystal, which is not conducive to the normal operation of the crystal growth furnace. In view of this, we propose a crystal growth furnace and a seed crystal replacement process. Summary of the Invention

[0005] Aiming at one of the deficiencies of the prior art, the present invention provides a crystal growth furnace and a seed crystal replacement process to solve the problem of seed crystal growth.

[0006] To achieve the above object, the present invention provides the following technical solution: A crystal growth furnace, comprising:

[0007] An isolation chamber, with a cavity inside, which can isolate the external environment, and a sealing cover is inserted at the top of the isolation chamber;

[0008] A furnace body, arranged inside the isolation chamber, the furnace body includes a heat insulation housing, a crucible is installed inside the heat insulation housing, and a feed pipe is arranged on the heat insulation housing;

[0009] A crystal supply component, including a storage cylinder for placing the seed crystal, and the seed crystals are stacked along the length direction of the storage cylinder; a pushing mechanism is arranged inside the storage cylinder, and the pushing mechanism can push out the seed crystal inside the storage cylinder upward;

[0010] The clamping assembly includes an extension frame arranged inside the isolation chamber. A number of clamping mechanisms are arranged at the lower part of the extension frame, and the clamping mechanisms can clamp the seed crystal.

[0011] The driving assembly can drive the extension frame to rotate, rise or fall.

[0012] The discharging mechanism includes a waste cylinder arranged inside the isolation chamber, and the discharging mechanism is used to discharge the waste seed crystal.

[0013] Preferably, the crystal supply assembly further includes:

[0014] A push plate is arranged inside the storage cylinder, and the push plate is slidably connected to the storage cylinder.

[0015] The pushing mechanism is linked with the push plate and can drive the push plate to slide along the length direction of the storage cylinder.

[0016] The push plate is linked with the extension frame, and the sliding distance of the push plate is matched with the rotation angle of the extension frame.

[0017] Preferably, the pushing mechanism includes:

[0018] A reciprocating lead screw is rotatably arranged on one side of the storage cylinder, and one side of the push plate extending outside the storage cylinder is threadedly connected to the reciprocating lead screw.

[0019] A rotating frame is fixedly installed on one side of the storage cylinder, and the reciprocating lead screw is rotatably connected to the rotating frame.

[0020] The driving assembly includes:

[0021] A rotating mechanism that can drive the reciprocating lead screw to rotate; and the rotating mechanism is linked with the extension frame and can drive the extension frame to rotate.

[0022] Preferably, the driving assembly includes:

[0023] A driving sleeve is rotatably arranged inside the isolation chamber. The driving sleeve is fixedly connected to the extension frame, and a number of extension frames are circumferentially and evenly arranged on the periphery of the driving sleeve.

[0024] A power mechanism can drive the extension frame to rise or fall. When the extension frame descends, the clamping mechanism at the lower part of the extension frame can extend into the storage cylinder, the feed pipe or the waste cylinder.

[0025] Preferably, the power mechanism includes a rotating mechanism that can drive the driving sleeve to rotate and a lifting mechanism that can drive the driving sleeve to lift; a spline groove is formed inside the driving sleeve; the rotating mechanism includes:

[0026] A spline rod is slidably connected to the spline groove inside the driving sleeve.

[0027] A groove wheel, sleeved on the outside of the spline rod;

[0028] An electric motor is fixedly arranged inside the isolation chamber;

[0029] A receiving rod is linked with the motor shaft of the electric motor;

[0030] A toggle rod is linked with the receiving rod, and the toggle rod is engaged with the groove wheel;

[0031] The lifting mechanism comprises:

[0032] The lifting drive member is a telescopic cylinder, and the driving sleeve is rotatably connected to the end of the lifting drive member.

[0033] Preferably, the rotating mechanism comprises:

[0034] A driving gear is sleeved on the outside of the receiving rod, and the driving gear is an incomplete gear mechanism;

[0035] A connecting gear, rotatably arranged on one side of the driving gear, and the connecting gear can mesh with the driving gear;

[0036] The synchronous wheels are coaxially and fixedly connected to the connecting gear and the reciprocating screw respectively, and the two synchronous wheels are linked by a synchronous belt.

[0037] Preferably, the clamping mechanism comprises:

[0038] The connecting assembly comprises a mounting tube fixedly mounted on the end of the extension frame, a plurality of limit clamping columns are slidably penetrated on the mounting tube, the ends of the limit clamping columns facing the inside of the mounting tube are arranged in a triangular structure, and a first spring is fixedly connected between the limit clamping column and the mounting tube;

[0039] A chuck is installed at the end of the seed crystal, the outer side of the chuck is made of a heat-insulating material, and the chuck is slidably matched with the inner wall of the feed pipe;

[0040] A connecting block is fixedly mounted on the chuck, the end of the connecting block is provided with a chamfered structure, the end of the connecting block is slidably matched with a limiting clamping column, a plurality of positioning holes are opened on the outer wall of the connecting block, and the limiting clamping column can be clamped with the positioning holes.

[0041] Preferably, a receiving hole is provided at the upper end of the connection block, the inner side of the receiving hole is made of silicone material, and the end of the seed crystal is snap-fitted with the receiving hole.

[0042] Preferably, the unloading mechanism further comprises:

[0043] The magnets are fixedly arranged on both sides above the waste barrel, the ends of the limit clamping column are made of a material that can be attracted by magnets, and the limit clamping column can be attracted by the magnets.

[0044] Preferably, it further includes:

[0045] A heat insulation mechanism for preventing heat from dissipating into the isolation bin through the feed pipe; the heat insulation mechanism includes:

[0046] A closing assembly for closing the lower port of the feed pipe, the closing assembly includes:

[0047] A plugging plate, which is slidably connected to the lower port of the feed pipe;

[0048] A pushing mechanism capable of driving the plugging plate to slide, the pushing mechanism includes:

[0049] An installation box, which is embedded and fixed inside the heat insulation housing;

[0050] A pushing block, which is located inside the installation box and is slidably connected to the installation box; the upper side of the pushing block is an inclined surface;

[0051] A downward pressing rod, which is a vertically arranged rod body and is slidably connected to the heat insulation housing;

[0052] A driving block, which is fixedly arranged at the bottom end of the downward pressing rod; the lower end surface of the driving block is an inclined surface structure corresponding to the upper end surface of the pushing block, and the driving block is slidably connected to the pushing block;

[0053] A second spring, which is arranged between the downward pressing rod and the installation box;

[0054] A pushing frame, which is fixedly arranged on the extension frame and can abut against the upper end of the downward pressing rod.

[0055] Preferably, the heat insulation mechanism further includes a heat insulation ring, the heat insulation ring is installed below the installation cylinder, a receiving sleeve is fixedly installed on the extension frame, the heat insulation ring is slidably connected to the receiving sleeve, a third spring is fixedly connected between the heat insulation ring and the receiving sleeve, and the heat insulation ring is in abutting fit with the end of the feed pipe.

[0056] A seed crystal replacement process, using the aforementioned crystal growth furnace, includes the following steps:

[0057] S1. The lifting drive runs, and the extension frame takes out the seed crystal from the storage cylinder and the heat insulation housing through the clamping assembly and moves upward until the seed crystal disengages from the feed pipe and the storage cylinder;

[0058] S2. Under the action of the second spring, the plugging plate blocks the feed pipe to prevent heat dissipation;

[0059] S3. The motor runs, and the driving belt drives the extension frame and the seed crystal to rotate until the new seed crystal rotates above the feed pipe;

[0060] S4. During the process of the driving sleeve driving the extension frame and the seed crystal to rotate, the discarded seed crystal falls into the waste bin;

[0061] S5. The lifting drive member drives the extension frame to move downward, the sealing plate gradually disengages from the lower end of the feed pipe, and the corresponding extension frame drives the new seed crystal to move into the heat insulation housing and releases the seed crystal.

[0062] Compared with the prior art, the following beneficial effects are achieved:

[0063] 1. Through the setting of the storage cylinder and the pushing mechanism, the technical solution of the present application can not only store and place the seed crystals in a vertically stacked manner to save space, but also greatly reduce the probability of damage to the seed crystals by pushing the seed crystals upward with the push plate, which is beneficial to ensuring the integrity of the seed crystals.

[0064] 2. Through the setting of the connection component and the connection block, the technical solution of the present application can ensure the stability of the seed crystal during the movement process and prevent the seed crystal from falling during the movement process.

[0065] 3. Through the setting of the waste bin and the magnet, the technical solution of the present application is convenient for the staff to handle the discarded seed crystals on the one hand, and on the other hand, it is also beneficial to the smooth replacement of the subsequent seed crystals.

[0066] 4. Through the setting of the accommodation hole, the technical solution of the present application can not only enable the seed crystal to move stably in the storage cylinder, but also the accommodation hole with the silicone lining can avoid the mutual collision between the seed crystals, effectively improving the protection of the seed crystals and preventing the seed crystals from being damaged during the replacement period.

[0067] 5. Through the setting of the sealing plate and the pushing mechanism, the technical solution of the present application can play a good heat insulation role and prevent heat dissipation. On the one hand, it can improve the energy utilization rate; on the other hand, it can avoid the temperature rise in the isolation chamber and cause damage to the seed crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0068] Figure 1 It is a schematic diagram of the overall structure of the embodiment of the present application;

[0069] Figure 2 It is a schematic diagram of a partial structure inside the isolation chamber of the embodiment of the present application;

[0070] Figure 3 It is a rear view schematic diagram of the partial structure inside the isolation chamber of the embodiment of the present application;

[0071] Figure 4 It is a schematic diagram of the structure when the extension frame of the embodiment of the present application moves downward;

[0072] Figure 5 It is a schematic diagram of the structure of the crystal supply component of the embodiment of the present application;

[0073] Figure 6 This is a schematic cross-sectional view of the structure of the driving sleeve of the embodiment of the present application;

[0074] Figure 7 This is a schematic cross-sectional view of the structure of the installation cylinder and the connection block of the embodiment of the present application;

[0075] Figure 8 This is a schematic diagram of the structure of the closure assembly of an embodiment of the present application;

[0076] Figure 9 This is a partial structural schematic diagram of one side of the heat insulation ring of an embodiment of the present application;

[0077] In the figure:

[0078] 1. Isolation chamber; 2. Insulation shell; 3. Crucible; 4. Sealing cover;

[0079] 5. Connecting assembly; 501. Mounting cylinder; 502. Position limiting column; 503. First spring;

[0080] 6. Crystal supply assembly; 601. Storage cylinder; 602. Push plate; 603. Reciprocating screw rod; 604. Rotating frame; 605. Connecting gear; 606. Driving gear; 607. Synchronous belt; 608. Synchronous wheel;

[0081] 7. Connecting block; 701. Accommodating hole; 702. Positioning hole;

[0082] 8. Closing assembly; 801. Mounting box; 802. Pushing frame; 803. Driving block; 804. Pressing rod; 805. Pushing block; 806. Blocking plate; 807. Second spring;

[0083] 9. Driving assembly; 901. Lifting driving member; 902. Driving sleeve; 903. Spline rod; 904. Receiving rod; 905. Motor; 906. Groove wheel; 907. Toggle rod; 908. Spline groove;

[0084] 10. Insulation ring; 11. Seed crystal; 12. Chuck; 13. Extension frame; 14. Adapter sleeve; 15. Third spring; 16. Feed pipe; 17. Waste barrel; 18. Magnet. DETAILED DESCRIPTION

[0085] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0086] See also Figures 1-9, the present application provides the following technical solutions:

[0087] A crystal growth furnace, which includes an isolation chamber 1, a furnace body, a crystal supply component 6, a driving component 9, a heat insulation mechanism, and a discharging mechanism.

[0088] Among them, the isolation chamber 1 is used to isolate the external environment, and a sealing cover 4 is inserted at the top of the isolation chamber 1; the furnace body is arranged in the isolation chamber 1 and is used for crystal growth. The furnace body includes a heat insulation housing 2, and a crucible 3 is installed inside the heat insulation housing 2. A feed pipe 16 penetrates through the heat insulation housing 2; the crystal supply component 6 includes a storage cylinder 601, and seed crystals 11 are stacked in the storage cylinder 601. A push plate 602 is arranged in the storage cylinder 601, and the push plate 602 is linked with a pushing mechanism. The pushing mechanism is used to drive the push plate 602 to move up and down, so as to drive the seed crystals 11 inside the storage cylinder 601 to move up one by one; the driving component 9 includes a driving sleeve 902, and a plurality of extension frames 13 are fixedly installed on the driving sleeve 902. A clamping mechanism is installed at the lower part of the extension frame 13, and the clamping mechanism is used to clamp the seed crystal 11. The driving component 9 further includes a power mechanism, and the power mechanism is used to replace the seed crystal 11; the heat insulation mechanism is used to prevent heat from dissipating into the isolation chamber 1 through the feed pipe 16; the discharging mechanism is used to discharge the used seed crystal 11.

[0089] This crystal growth furnace is mainly used for the production of sapphire single crystals, and can also be adjusted adaptively to be applied to other types of single crystals. When it is necessary to replace the seed crystal 11, under the control of an external control mechanism, the power mechanism operates, and the driving sleeve 902 drives the clamping mechanism to move downward. One of the extension frames 13 clamps out the seed crystal 11 in the heat insulation housing 2 through the clamping mechanism, and the other extension frame 13 clamps out a new seed crystal 11 in the storage cylinder 601 through the clamping mechanism. Then, the driving sleeve 902 drives the extension frame 13 and the seed crystal 11 to rotate until the new seed crystal 11 is rotated above the feed pipe 16. Subsequently, the extension frame 13 drives the new seed crystal 11 to move downward and sends the new seed crystal 11 into the heat insulation housing 2. After taking out the new seed crystal 11, under the action of the pushing mechanism, the push plate 602 drives the new seed crystal 11 in the storage cylinder 601 to move upward until a part of the uppermost seed crystal 11 is pushed out of the storage cylinder 601. In this way, the seed crystals 11 can be stored and placed in a vertically stacked manner to save space, and at the same time, by pushing the seed crystal 11 upward by the push plate 602, the damage probability of the seed crystal 11 is greatly reduced, which is beneficial to ensuring the integrity of the seed crystal 11.

[0090] On the basis of the above implementation, referring to Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 6The power mechanism of the crystal growth furnace of this scheme includes a rotating mechanism and a lifting mechanism. The rotating mechanism is used to drive the driving sleeve 902 to rotate, and the lifting mechanism is used to drive the driving sleeve 902 to move up and down.

[0091] The rotating mechanism includes a spline rod 903 and a motor 905, a spline groove 908 is provided in the driving sleeve 902, the spline rod 903 is slidably connected to the spline groove 908, and a groove wheel 906 is sleeved on the rod body of the spline rod 903; the output end of the motor 905 is fixedly connected to a receiving rod 904, and the end of the receiving rod 904 is fixedly connected to a toggle rod 907, and the toggle rod 907 is snap-fitted with the groove wheel 906.

[0092] The lifting mechanism includes a lifting drive member 901, a T-shaped rotating block is fixedly installed at the end of the lifting drive member 901, a driving sleeve 902 is provided with a limiting groove, and the driving sleeve 902 is rotatably connected to the end of the lifting drive member 901 through the T-shaped rotating block and the limiting groove.

[0093] Under the action of the motor 905, the toggle rod 907 rotates, and after contacting the groove wheel 906, the spline rod 903 will drive the driving sleeve 902, the extension frame 13 and the seed crystal 11 to rotate a certain angle. After rotating to the appropriate position, under the action of the lifting drive member 901, the driving sleeve 902 can drive the extension frame 13 and the seed crystal 11 to move up and down.

[0094] On the basis of the above implementation plan, refer to Figure 2 , Figure 4 and Figure 5 The pushing mechanism of the crystal growth furnace of this scheme includes a rotating frame 604 and a rotating mechanism.

[0095] The rotating frame 604 is fixedly installed on one side of the storage tube 601, and the reciprocating screw 603 is rotatably connected to the rotating frame 604. One side of the push plate 602 is sleeved on the outside of the reciprocating screw 603, and the push plate 602 and the reciprocating screw 603 are slidably matched, and the push plate 602 is slidably connected to the storage tube 601; the rotating mechanism is used to drive the reciprocating screw 603 to rotate, and the rotating mechanism includes a driving gear 606 sleeved and fixed on the outside of the receiving rod 904, and one side of the driving gear 606 is meshedly connected with a connecting gear 605, and the driving gear 606 is an incomplete gear mechanism. The connecting gear 605 and the end of the reciprocating screw 603 are fixedly connected with a synchronous wheel 608, and the two synchronous wheels 608 are sleeved with a synchronous belt 607, and the synchronous wheel 608 and the synchronous belt 607 are frictionally transmitted.

[0096] While the toggle rod 907 is toggling the groove wheel 906, the driving gear 606 is disengaged from the connecting gear 605, and the reciprocating screw 603 is in a stationary state. When the toggle rod 907 is disengaged from the groove wheel 906, the driving gear 606 is gradually engaged with the connecting gear 605, the reciprocating screw 603 rotates, and the push plate 602 immediately pushes the seed crystal 11 upward.

[0097] Based on the above embodiments, referring to Figure 2 and Figure 7 , a crystal growth furnace provided by an embodiment of the present application, the clamping mechanism includes a connection component 5, a connection block 7, and a chuck 12.

[0098] The connection component 5 includes a mounting cylinder 501 fixedly installed at the end of the extension frame 13. A plurality of limit clamping columns 502 are slidably inserted through the mounting cylinder 501. The inner end of the limit clamping column 502 is arranged in a triangular structure. A first spring 503 is fixedly connected between the limit clamping column 502 and the mounting cylinder 501.

[0099] The connection block 7 is fixedly installed on the chuck 12. The chuck 12 is installed at the end of the seed crystal 11. The end of the connection block 7 is arranged in a rounded structure. The end of the connection block 7 is slidably matched with the limit clamping column 502. A plurality of positioning holes 702 are opened on the outer wall of the connection block 7. The limit clamping column 502 is clamped and matched with the positioning hole 702.

[0100] When the extension frame 13 drives the mounting cylinder 501 to move downward and sleeved outside the connection block 7, the connection block 7 will first push the limit clamping columns 502 to both sides. When the positioning hole 702 is aligned with the limit clamping column 502, under the reset action of the first spring 503, the clamping column 502 enters the positioning hole 702, which can ensure the stability of the seed crystal 11 during the movement and prevent the seed crystal 11 from falling during the movement.

[0101] Based on the above embodiments, a receiving hole 701 is opened at the upper end of the connection block 7. The inner side of the receiving hole 701 is made of silica gel material. The end of the seed crystal 11 is clamped and matched with the receiving hole 701.

[0102] The setting of the receiving hole 701 can not only allow the seed crystal 11 to move stably in the storage cylinder 601, but also the silica gel-lined receiving hole 701 can avoid the mutual collision between the seed crystals 11, effectively improving the protection of the seed crystal 11 and preventing the seed crystal 11 from being damaged during replacement.

[0103] Based on the above embodiments, referring to Figure 3 and Figure 7 , the discharging mechanism includes a waste cylinder 17. Two magnets 18 are installed on the waste cylinder 17. The end of the limit clamping column 502 is made of magnetic metal. The limit clamping column 502 is magnetically matched with the magnet 18.

[0104] During the process of the driving sleeve 902 driving the extension frame 13 and the seed crystal 11 to rotate, the discarded seed crystal 11 will gradually rotate above the waste bin 17. Under the magnetic force of the magnet 18, the clamping post 502 moves outward and disengages from the receiving hole 701. Then the discarded seed crystal 11 falls into the waste bin 17. On the one hand, it is convenient for the staff to process the discarded seed crystal 11. On the other hand, it is also beneficial to the smooth replacement of the subsequent seed crystal 11.

[0105] Based on the above embodiments, with reference to Figure 2 、 Figure 4 、 Figure 8 and Figure 9 ,a crystal growth furnace provided by an embodiment of the present application, the heat insulation mechanism includes a sealing component 8 and a heat insulation ring 10. The outside of the chuck 12 is made of heat insulation material, and the chuck 12 is slidably matched with the inner wall of the feed pipe 16.

[0106] The sealing component 8 includes a plugging plate 806, the plugging plate 806 is slidably matched with the feed pipe 16, and the plugging plate 806 is linked with a pushing mechanism. The pushing mechanism is used to drive the plugging plate 806 to move linearly.

[0107] Based on the above embodiments, the pushing mechanism of the crystal growth furnace in this solution includes an installation box 801 embedded and fixed inside the heat insulation housing 2. A pushing block 805 is slidably connected inside the installation box 801. The upper side of the pushing block 805 is arranged in an inclined surface structure. A pressing rod 804 is slidably penetrated through the heat insulation housing 2. The end of the pressing rod 804 is fixedly connected with a driving block 803. The driving block 803 is arranged in a triangular structure. The driving block 803 is slidably connected with the pushing block 805. A second spring 807 is fixedly connected between the pressing rod 804 and the installation box 801. A pushing frame 802 is fixedly installed on the extension frame 13. The pushing frame 802 is in movable contact with the pressing rod 804.

[0108] When the extension frame 13 drives the seed crystal 11 to move into the heat insulation housing 2 through the feed pipe 16, the pushing frame 802 moves along with it and gradually contacts the pressing rod 804. Then the driving block 803 pushes the pushing block 805, and the plugging plate 806 gradually disengages from the lower end of the feed pipe 16, and the seed crystal 11 smoothly enters. When the seed crystal 11 is clamped out, due to the loss of the limit of the pushing frame 802, under the action of the second spring 807, the plugging plate 806 blocks the feed pipe 16, which can play a good heat insulation role and prevent heat dissipation. On the one hand, it can improve the energy utilization rate; on the other hand, it can avoid the temperature rise in the isolation chamber 1 and cause damage to the seed crystal 11.

[0109] On the basis of the above embodiments, the heat insulation ring 10 is installed below the installation cylinder 501. A receiving sleeve 14 is fixedly installed on the extension frame 13. The heat insulation ring 10 is slidably connected to the receiving sleeve 14. A third spring 15 is fixedly connected between the heat insulation ring 10 and the receiving sleeve 14. The heat insulation ring 10 is in abutting cooperation with the end of the feed pipe 16.

[0110] When the extension frame 13 drives the seed crystal 11 to move into the heat insulation housing 2, the heat insulation ring 10 will first contact the end of the feed pipe 16, and then the chuck 12 will gradually move into the feed pipe 16. To a certain extent, the heat dissipated outward from the feed pipe 16 is further reduced, and the effect of protecting the external seed crystal 11 is improved.

[0111] In addition, this solution also provides a seed crystal replacement process, which is applied to the aforementioned crystal growth furnace and includes the following steps:

[0112] S1. The lifting drive member 901 operates, and one of the driving sleeves 902 drives the extension frame 13 and the seed crystal 11 in the heat insulation housing 2 to move upward until the seed crystal 11 disengages from the feed pipe 16.

[0113] S2. Under the action of the second spring 807, the plugging plate 806 plugs the feed pipe 16 to prevent heat dissipation.

[0114] S3. The motor 905 operates, and the driving sleeve 902 drives the extension frame 13 and the seed crystal 11 to rotate until the new seed crystal 11 rotates above the feed pipe 16.

[0115] S4. During the process of the driving sleeve 902 driving the extension frame 13 and the seed crystal 11 to rotate, the discarded seed crystal 11 falls into the waste bin 17.

[0116] S5. Subsequently, the lifting drive member 901 runs in the reverse direction, the plugging plate 806 gradually disengages from the lower end of the feed pipe 16, and the corresponding extension frame 13 drives the new seed crystal 11 to gradually move into the heat insulation housing 2.

[0117] The implementation principle of a crystal growth furnace in an embodiment of the present application is as follows: When the seed crystal 11 needs to be replaced during the use of this technical solution, under the action of the lifting drive member 901, one of the driving sleeves 902 drives the extension frame 13 and the seed crystal 11 in the heat insulation housing 2 to move upward until the seed crystal 11 disengages from the feed pipe 16.

[0118] During this process, the pushing frame 802 loses its limit. Under the action of the second spring 807, the plugging plate 806 plugs the feed pipe 16 to prevent heat dissipation.

[0119] Then, under the action of the electric motor 905, the toggle rod 907 rotates. After contacting the grooved pulley 906, the spline rod 903 drives the driving sleeve 902, the extension frame 13 and the seed crystal 11 to rotate until the new seed crystal 11 rotates above the feed pipe 16.

[0120] Subsequently, the lifting drive member 901 runs in the reverse direction. Accordingly, the extension frame 13 drives the new seed crystal 11 to gradually move into the heat insulation housing 2. During this process, the pushing frame 802 moves along, and gradually contacts the lower pressing rod 804. Then, the driving block 803 pushes the pushing block 805, and the sealing plate 806 gradually disengages from the lower end of the feed pipe 16, and the seed crystal 11 smoothly enters.

[0121] During the process of the driving sleeve 902 driving the extension frame 13 and the seed crystal 11 to rotate, the discarded seed crystal 11 will gradually rotate above the waste bin 17. Under the magnetic force of the magnet 18, the clamping column 502 moves outward and disengages from the receiving hole 701, and the discarded seed crystal 11 then falls into the waste bin 17.

[0122] When the extension frame 13 drives the mounting cylinder 501 to move downward, one of the mounting cylinders 501 will sleeved outside the connecting block 7. Under the reset action of the first spring 503, the clamping column 502 enters the positioning hole 702, which can ensure the stability of the seed crystal 11 during the movement.

[0123] When the toggle rod 907 disengages from the grooved pulley 906, the driving gear 606 and the connecting gear 605 gradually mesh, the reciprocating lead screw 603 rotates, and the push plate 602 will push the seed crystal 11 upward, pushing out the connecting block 7 part of the uppermost seed crystal 11 from the storage cylinder 601.

[0124] In the description of the present application and its embodiments, it should be understood that the orientation or positional relationship indicated by terms such as "top", "bottom", "height", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0125] In the present application and its embodiments, unless otherwise clearly defined and limited, terms such as "set", "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection, or a communication; it can be directly connected, or indirectly connected through an intermediate medium, and can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0126] In this application and its embodiments, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may include direct contact between the first and second features, or may include the first and second features not being in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the horizontal height of the first feature is less than that of the second feature.

[0127] The above disclosure provides many different embodiments or examples for implementing different structures of this application. To simplify the disclosure of this application, the components and settings of specific examples are described above. Of course, they are merely examples and are not intended to limit this application. In addition, this application may repeat reference numerals and / or reference letters in different examples. Such repetition is for the purpose of simplification and clarity, and does not in itself indicate the relationship between the various embodiments and / or settings discussed. In addition, this application provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.

[0128] Although the preferred embodiments of this application have been described, those skilled in the art can make additional changes and modifications once they learn the basic creative concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0129] Obviously, those skilled in the art can make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalent technologies, this application is also intended to include these modifications and variations.

Claims

1. A crystal growth furnace, characterized in that: include: The isolation chamber has a hollow interior that can isolate the external environment; A furnace body is arranged in the isolation chamber, the furnace body comprises a heat-insulating shell, a crucible is installed in the heat-insulating shell, and a feed pipe is arranged on the heat-insulating shell; The crystal supply assembly includes a storage cylinder for placing seed crystals, and the seed crystals are stacked along the length direction of the storage cylinder; a pushing mechanism is arranged in the storage cylinder, and the pushing mechanism can push the seed crystals in the storage cylinder upward; The clamping assembly includes an extension frame arranged inside the isolation chamber, and a plurality of clamping mechanisms are arranged at the lower part of the extension frame, and the clamping mechanisms can clamp the seed crystal; A driving assembly, capable of driving the extension frame to rotate, rise or fall; The unloading mechanism comprises a waste barrel arranged inside the isolation bin, and the unloading mechanism is used for unloading the waste seed crystals.

2. The crystal growth furnace according to claim 1, characterized in that: The crystal supply assembly further comprises: A push plate is arranged inside the storage tube, and the push plate and the storage tube are slidably connected; The pushing mechanism is linked with the pushing plate to drive the pushing plate to slide along the length direction of the storage tube; The push plate and the extension frame are linked, and the sliding distance of the push plate matches the rotation angle of the extension frame.

3. The crystal growth furnace according to claim 2, characterized in that: The pushing mechanism comprises: The reciprocating screw rod is rotatably arranged on one side of the storage cylinder, and the push plate extends to one side outside the storage cylinder and is threadedly connected to the reciprocating screw rod; A rotating frame, the rotating frame is fixedly mounted on one side of the storage tube, and a reciprocating screw rod is rotatably connected to the rotating frame; The drive components include: The rotating mechanism can drive the reciprocating screw rod to rotate; and the rotating mechanism and the extension frame are linked to drive the extension frame to rotate.

4. The crystal growth furnace according to claim 3, characterized in that: The drive assembly comprises: A driving sleeve is rotatably arranged inside the isolation chamber, the driving sleeve is fixedly connected to an extension frame, and a plurality of extension frames are evenly arranged around the circumference of the driving sleeve; The power mechanism can drive the extension frame to rise or fall. When the extension frame falls, the clamping mechanism at the lower part of the extension frame can extend into the storage tube, the feed tube or the waste tube.

5. The crystal growth furnace according to claim 4, characterized in that: The power mechanism includes a rotating mechanism that can drive the driving sleeve to rotate, and a lifting mechanism that can drive the driving sleeve to rise and fall; the rotating mechanism includes: A spline rod, slidably connected to the driving sleeve; A groove wheel, sleeved on the outside of the spline rod; An electric motor is fixedly arranged inside the isolation chamber; A receiving rod, linked to the motor shaft of the electric motor; A toggle rod is linked with the receiving rod, and the toggle rod is engaged with the groove wheel; The lifting mechanism comprises: The lifting drive member is a telescopic cylinder, and the driving sleeve is rotatably connected to the end of the lifting drive member.

6. The crystal growth furnace according to claim 5, characterized in that: The rotating mechanism comprises: A driving gear is sleeved on the outside of the receiving rod, and the driving gear is an incomplete gear mechanism; A connecting gear, rotatably arranged on one side of the driving gear, and the connecting gear can mesh with the driving gear; The synchronous wheels are coaxially and fixedly connected to the connecting gear and the reciprocating screw respectively, and the two synchronous wheels are linked by a synchronous belt.

7. The crystal growth furnace according to claim 6, characterized in that: The clamping mechanism comprises: The connecting assembly comprises a mounting tube fixedly mounted on the end of the extension frame, a plurality of limit clamping columns are slidably penetrated on the mounting tube, the ends of the limit clamping columns facing the inside of the mounting tube are arranged in a triangular structure, and a first spring is fixedly connected between the limit clamping column and the mounting tube; A chuck is installed at the end of the seed crystal, the outer side of the chuck is made of a heat-insulating material, and the chuck is slidably matched with the inner wall of the feed pipe; A connecting block is fixedly mounted on the chuck, the end of the connecting block is provided with a rounded structure, the end of the connecting block is slidably matched with a limiting clamping column, a plurality of positioning holes are opened on the outer wall of the connecting block, and the limiting clamping column can be clamped with the positioning holes.

8. The crystal growth furnace according to claim 7, characterized in that: The unloading mechanism also includes: The magnets are fixedly arranged on both sides above the waste barrel, the ends of the limit clamping column are made of a material that can be attracted by magnets, and the limit clamping column can be attracted by the magnets.

9. The crystal growth furnace according to claim 7, characterized in that: Also includes: Heat insulation mechanism, used to prevent heat from being lost into the isolation bin through the feed pipe; The thermal insulation mechanism comprises: A closing component, used to close the lower port of the feed pipe, the closing component comprising: A plugging plate, slidably connected to the lower port of the feed pipe; The pushing mechanism can drive the blocking plate to slide, and the pushing mechanism includes: An installation box is embedded and fixed inside the heat-insulating shell; A push block is located inside the installation box, and the push block is slidably connected to the installation box; the upper side of the push block is an inclined surface; The down-pressing rod is a vertically arranged rod body, and the down-pressing rod is slidably connected to the heat-insulating shell; A driving block is fixedly arranged at the bottom end of the lower pressing rod; the lower end surface of the driving block is an inclined surface structure corresponding to the upper end surface of the pushing block, and the driving block is slidably connected to the pushing block; A second spring is arranged between the pressing rod and the mounting box; The pushing frame is fixedly arranged on the extending frame, and the pushing frame can abut against the upper end of the lower pressing rod.

10. A seed crystal replacement process, using the crystal growth furnace according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, the lifting drive member is running, the extension frame takes out the seed crystal from the storage tube and the heat insulation shell through the clamping assembly and moves upward until the seed crystal is separated from the feed tube and the storage tube; S2, the plugging plate blocks the feed pipe to prevent heat loss; S3, the motor runs, and the driving sleeve drives the extension frame and the seed crystal to rotate until the new seed crystal rotates to the top of the feed pipe; S4, when the driving sleeve drives the extension frame and the seed crystal to rotate, the discarded seed crystal falls into the waste barrel; S5. The lifting drive member drives the extension frame downward, and the blocking plate gradually separates from the lower end of the feed pipe. The corresponding extension frame drives the new seed crystal to move into the heat-insulating shell and releases the seed crystal.

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