Gas self-circulation type local cleaning equipment

Abstract

The invention relates to the technical field of dust removal equipment, in particular to gas self-circulation type local cleaning equipment which is internally provided with a purging assembly, a dust suction assembly, a dust filtering assembly and a dust removal cover assembly, the gas inlet end of the dust filtering assembly is connected with the gas outlet end of the dust suction assembly, and the dust removal cover assembly comprises a first dust removal cover and a second dust removal cover. The first dust removal cover is mounted in the second dust removal cover; a gap is reserved between the first dust removal cover and the second dust removal cover, the front end of the gap is open, and the rear end of the gap is communicated with the air inlet end of the dust collection assembly. The air outlet end of the purging assembly is communicated with the first dust removal cover; thus, high-pressure air blown out by the blowing assembly blows up dust in the area of the first dust removal cover, air carrying impurities is formed in the first dust removal cover, and the dust suction assembly generates negative pressure to suck the air carrying the impurities along the gap between the first dust removal cover and the second dust removal cover and send the air to the dust filtering assembly. And stable self-circulation of air is formed in the second dust removal cover, so that disturbance to the air in the workshop is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of dust removal equipment, and in particular to gas self-circulation type local cleaning equipment. Background Art

[0002] Single crystal silicon is the core material for preparing semiconductor materials. The quality of single crystal silicon will have a direct impact on the success or failure of processes such as lithography and etching in the preparation process of semiconductor materials. In the semiconductor single crystal growth workshop, dust will be generated during the operation of the single crystal furnace or during the regular maintenance of the single crystal furnace. The dust will accumulate in the semiconductor single crystal growth workshop. If the dust is not cleaned, it will not only affect the health of the operators, but also reduce the quality of the single crystal silicon. Therefore, it is necessary to clean the dust in the semiconductor single crystal growth workshop to maintain the cleanliness of the semiconductor single crystal growth workshop; however, some dust contains graphite particles. Due to the static electricity on the surface, this type of dust has strong adhesion and is difficult to remove. Moreover, this type of dust also has conductive properties. Once it drifts to electrical equipment areas such as electrical control cabinets and power interfaces, it is very easy to cause circuit short circuits, signal interference and other faults, seriously affecting the stability of equipment operation and resulting in reduced production efficiency of single crystal silicon.

[0003] At present, the commonly used dust cleaning methods in semiconductor single crystal growth workshops are blowing and suction. Blowing is to use high-pressure air to blow dust away from a designated area. However, when cleaning dust, high-pressure air will disturb the air inside the workshop, causing airflow inside the workshop, causing dust to fly around in the workshop; suction is to suck dust from a designated area into a vacuum device. During the vacuuming process, this cleaning method will generate negative pressure at the vacuum port of the vacuum device, disturbing the air inside the workshop, generating airflow to the vacuum port, causing dust to fly around in the workshop; therefore, whether it is blowing or suction, the air in the workshop will be disturbed during the dust cleaning process, causing airflow in the workshop, causing dust to fly around under the influence of the airflow, reducing the overall cleanliness inside the workshop and affecting the production quality of single crystal silicon. At the same time, suspended dust containing graphite particles may also float into electrical equipment under the influence of the airflow, posing an electrical safety hazard. Summary of the invention

[0004] In view of this, it is necessary to provide a gas self-circulating local cleaning equipment that can reduce the disturbance of the air inside the workshop during the dust cleaning process, so as to reduce the generation of airflow inside the workshop, thereby reducing the degree of dust scattering inside the workshop and improving the overall cleanliness inside the workshop.

[0005] The present invention provides a gas self-circulating local cleaning device, comprising a purge component, a dust suction component, a dust filter component and a dust cover component, the air inlet end of the dust filter component is connected to the air outlet end of the dust suction component, the dust cover component comprises a first dust cover and a second dust cover, the first dust cover is installed in the second dust cover, and the front side end face of the second dust cover protrudes from the front side end face of the first dust cover; a gap is left between the first dust cover and the second dust cover, and the front end of the gap is open, and the rear end is connected to the air inlet end of the dust suction component; the air outlet end of the purge component is connected to the first dust cover, and is used to blow out high-pressure air to blow up dust in the first dust cover area, so as to form air entrained with impurities in the first dust cover, and the dust suction component is used to generate negative pressure to suck the air entrained with impurities in the first dust cover along the gap between the first dust cover and the second dust cover, and send it to the dust filter component, so that the impurities in the air entrained with impurities are removed by the dust filter component.

[0006] Preferably, the dust hood assembly further includes at least two connecting members, each of which is evenly arranged in the gap between the first dust hood and the second dust hood, and is used to fix the first dust hood and the second dust hood together.

[0007] Preferably, the purge assembly includes a purge fan and a first purge pipe, the air inlet end of the purge fan is connected to the air outlet end of the dust filter assembly, and the air outlet end is connected to one end of the first purge pipe to extract the filtered air in the dust filter assembly and form high-pressure air to be sent into the first purge pipe, and the other end of the first purge pipe is connected to the first dust hood to send the high-pressure air along the first purge pipe into the first dust hood and then blow it out.

[0008] Preferably, the purge assembly also includes a second purge pipe, which is located in the first dust hood, the air inlet end of the second purge pipe is connected to the first purge pipe, and the air outlet end of the second purge pipe is flush with the front end of the first dust hood, so that the blown high-pressure air can be closer to the dust in the first dust hood area.

[0009] Preferably, the dust suction assembly includes a dust suction fan and a dust suction pipe, one end of the dust suction pipe is connected to the gap between the first dust hood and the second dust hood, and the other end is connected to the air inlet end of the dust suction fan, and the air outlet end of the dust suction fan is connected to the air inlet end of the dust filter assembly to suck the air containing impurities from the gap between the first dust hood and the second dust hood into the dust suction pipe, and send it into the dust filter assembly through the dust suction fan.

[0010] Preferably, the dust filter assembly includes a dust filter canister, a drive motor and a stirring fan blade, the side of the dust filter canister is connected to the dust suction pipe, a connecting tank is provided at the center of the top surface of the dust filter canister, the air inlet end of the purge fan is connected to the side of the connecting tank, the fixed end of the drive motor is installed on the top of the connecting tank, and the driving end extends downward into the dust filter canister, and the stirring fan blade is installed on the driving end of the drive motor to stir the air in the dust filter canister to form a rotating airflow inside the dust filter canister that rotates around the central axis of the dust filter canister as the center, so as to throw impurities onto the canister wall inside the dust filter canister through centrifugal force, so that the central area inside the dust filter canister is clean air, thereby separating impurities from air.

[0011] Preferably, the dust filter assembly also includes a first filter and a second filter, both of which are cylindrical, the first filter is installed in the center of the dust filter tank, and the second filter is mounted on the outside of the first filter to prevent some impurities that cannot be separated from being sucked out by the purge fan along with the clean air.

[0012] Preferably, at least three universal wheels are evenly mounted on the bottom surface of the dust filter tank to facilitate the movement of the dust filter tank.

[0013] Preferably, the purge fan is a fan capable of forward and reverse rotation, so that compressed air is delivered from the connecting tank into the central area inside the dust filter tank by reversing the purge fan, thereby blowing off dust attached to the first filter screen and the second filter screen.

[0014] Preferably, the dust filter assembly further comprises at least one vibrating member, each of which is evenly mounted on the side wall of the dust filter canister and is used to vibrate dust attached to the inner wall of the dust filter canister to facilitate the collection of dust in the dust filter canister.

[0015] The above-mentioned gas self-circulation local cleaning equipment is provided with a purge component, a dust suction component, a dust filter component and a dust hood component. The air inlet end of the dust filter component is connected with the air outlet end of the dust suction component. The dust hood component includes a first dust hood and a second dust hood. The first dust hood is installed in the second dust hood, and the front end surface of the second dust hood protrudes from the front end surface of the first dust hood; a gap is left between the first dust hood and the second dust hood, and the front end of the gap is open, and the rear end is connected with the air inlet end of the dust suction component; the air outlet end of the purge component is connected with the first dust hood, which is used to blow out high-pressure air to blow up dust in the first dust hood area, and form air entrained with impurities in the first dust hood. The dust suction component is used to generate negative pressure to suck the air entrained with impurities in the first dust hood along the gap between the first dust hood and the second dust hood, and send it to the dust filter component, so that the impurities in the air entrained with impurities are removed by the dust filter component Remove; in this way, when cleaning the dust in the workshop, high-pressure air is sent into the first dust hood through the purge component to blow up the dust in the area inside the first dust hood, forming air entrained with impurities in the first dust hood, and at the same time, the negative pressure generated by the dust suction component sucks the air entrained with impurities along the gap between the first dust hood and the second dust hood, and sends it to the dust filter component, and the dust filter component removes impurities in the air entrained with impurities. In this process, the high-pressure air generated by the purge component is sucked in by the dust suction component and will not diffuse to the outside. The dust suction component sucks in the high-pressure air generated by the purge component without having to replenish air from the outside, so that the air forms a stable self-circulation in the second dust hood, reducing the disturbance to the air inside the workshop caused by the dust cleaning process, so as to reduce the generation of airflow inside the workshop, thereby reducing the degree of dust scattering inside the workshop and improving the overall cleanliness inside the workshop. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is an oblique bird's-eye view of the gas self-circulation type local cleaning device of the present application.

[0017] Figure 2 It is a cross-sectional view of the top of the second dust hood of the present application.

[0018] Figure 3 It is a cross-sectional view of the back side of the dust cover assembly of the present application.

[0019] Figure 4 It is a cross-sectional view of the gas self-circulating local cleaning device of the present application.

[0020] In the figure: gas self-circulating local cleaning equipment 10, purge assembly 20, purge fan 21, first purge pipe 22, second purge pipe 23, dust suction assembly 30, dust suction fan 31, dust suction pipe 32, dust filter assembly 40, dust filter tank 41, connecting tank 42, drive motor 43, stirring fan blades 44, universal wheel 45, dust cover assembly 50, first dust cover 51, second dust cover 52, gap 53, connecting piece 54. DETAILED DESCRIPTION

[0021] The technical solutions and technical effects of the embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings of the present invention.

[0022] Please refer to Figure 1 The present invention provides a gas self-circulating local cleaning device 10, comprising a purge assembly 20, a dust suction assembly 30, a dust filter assembly 40 and a dust cover assembly 50, wherein the air inlet end of the dust filter assembly 40 is connected to the air outlet end of the dust suction assembly 30, and the dust cover assembly 50 comprises a first dust cover 51 and a second dust cover 52, wherein the first dust cover 51 is installed in the second dust cover 52, and the front side end surface of the second dust cover 52 protrudes from the front side end surface of the first dust cover 51; A gap 53 is left between the first dust cover 51 and the second dust cover 52, and the front end of the gap 53 is open, and the rear end is connected to the air inlet end of the dust collection component 30; the air outlet end of the purge component 20 is connected to the first dust cover 51, which is used to blow out high-pressure air to blow up the dust in the area of ​​the first dust cover 51, and form air entrained with impurities in the first dust cover 51. The dust collection component 30 is used to generate negative pressure to suck the air entrained with impurities in the first dust cover 51 along the gap 53 between the first dust cover 51 and the second dust cover 52, and send it to the dust filter component 40, so as to be sucked into the dust filter component 40 by the first dust cover 51 and the second dust cover 52. The dust filter assembly 40 removes impurities from the air entrained with impurities; in this way, when cleaning the dust in the workshop, the high-pressure air is sent into the first dust hood 51 through the purge assembly 20 to blow up the dust in the area inside the first dust hood 51, and form air entrained with impurities in the first dust hood 51. At the same time, the negative pressure generated by the dust suction assembly 30 sucks the air entrained with impurities along the gap 53 between the first dust hood 51 and the second dust hood 52, and sends it to the dust filter assembly 40, and the impurities in the air entrained with impurities are removed by the dust filter assembly 40. In this process, the high-pressure air generated by the purge assembly 20 is sucked in by the dust suction assembly 30 and will not diffuse to the outside. The dust suction assembly 30 sucks in the high-pressure air generated by the purge assembly 20 without having to replenish air from the outside, so that the air forms a stable self-circulation in the second dust hood 52, thereby reducing the disturbance to the air inside the workshop during the dust cleaning process, so as to reduce the generation of airflow inside the workshop, thereby reducing the degree of dust scattering inside the workshop and improving the overall cleanliness inside the workshop.

[0023] Please refer to Figure 2 Furthermore, the dust cover assembly 50 also includes at least two connecting members 54, each connecting member 54 is evenly arranged in the gap 53 between the first dust cover 51 and the second dust cover 52, and is used to fix the first dust cover 51 and the second dust cover 52 together.

[0024] In this embodiment, by blowing high-pressure air toward the area to be cleaned, it is possible to blow away the sticky dust from the designated area.

[0025] Please refer to Figures 1 to 4 Furthermore, the purge component 20 includes a purge fan 21 and a first purge pipe 22. The air inlet end of the purge fan 21 is connected to the air outlet end of the dust filter component 40, and the air outlet end is connected to one end of the first purge pipe 22 to extract the filtered air in the dust filter component and form high-pressure air to be sent into the first purge pipe. The other end of the first purge pipe 22 is connected to the first dust removal hood 51 to send the high-pressure air into the first dust removal hood along the first purge pipe and then blow it out; in this way, the purge fan 21 can extract the clean air filtered by the dust filter component 40, and pressurize it into high-pressure air and then spray it out from the first dust removal hood 51 to blow up the dust in the area to be cleaned, and form air entrained with impurities in the first dust removal hood 51.

[0026] Please refer to Figure 3 Furthermore, the purge assembly 20 also includes a second purge pipe 23, which is located in the first dust hood 51. The air inlet end of the second purge pipe 23 is connected to the first purge pipe 22, and the air outlet end of the second purge pipe 23 is flush with the front end of the first dust hood 51, so that the blown high-pressure air is closer to the dust in the area of ​​the first dust hood 51. In this way, by setting the second purge pipe 23, the blown high-pressure air is closer to the area to be cleaned, thereby improving the purging force of the high-pressure air. At the same time, the air outlet end of the second purge pipe 23 is set to be flush with the front end of the first dust hood 51, so that the high-pressure air can be directly diffused from the first dust hood 51 to the second dust hood 52 after entraining impurities, which is convenient for the dust suction assembly 30 to extract the air entrained with impurities and improve the cleaning efficiency.

[0027] Please refer to Figure 1 Further, the dust suction component 30 includes a dust suction fan 31 and a dust suction pipe 32. One end of the dust suction pipe 32 is connected to the gap 53 between the first dust removal cover 51 and the second dust removal cover 52, and the other end is connected to the air inlet end of the dust suction fan 31. The air outlet end of the dust suction fan 31 is connected to the air inlet end of the dust filter component 40 to suck the air containing impurities from the gap 53 between the first dust removal cover 51 and the second dust removal cover 52 into the dust suction pipe 32, and send it into the dust filter component 40 through the dust suction fan 31. In this way, The high-pressure air blown out by the purge fan 21 forms air entrained with impurities in the first dust hood 51 and flows toward the second dust hood. When the air entrained with impurities passes through the gap 53 between the first dust hood 51 and the second dust hood 52, the dust suction fan 31 sucks the air entrained with impurities along the gap 53 between the first dust hood 51 and the second dust hood 52 and sends it to the dust filter assembly 40, thereby forming a stable internal circulation inside the second dust hood 52 and reducing the disturbance of the air outside the second dust hood 52.

[0028] In this embodiment, the first purge pipe 22 and the dust suction pipe 32 are both soft pipes, so that the operator can move the second dust hood 52 easily; in this way, when the operator moves the second dust hood 52 to the area where dust needs to be cleaned, the first purge pipe 22 and the dust suction pipe 32 can twist with the movement of the second dust hood 52.

[0029] Please refer to Figures 1 to 4 , further, the dust filter assembly 40 includes a dust filter tank 41, a drive motor 43 and a stirring blade 44, the side of the dust filter tank 41 is connected to the dust suction pipe 32, and a connecting tank 42 is provided at the center of the top surface of the dust filter tank 41, the air inlet end of the purge fan 21 is connected to the side of the connecting tank 42, the fixed end of the drive motor 43 is installed on the top of the connecting tank 42, and the driving end extends downward into the dust filter tank 41, and the stirring blade 44 is installed on the driving end of the drive motor 43, and is used to stir the air in the dust filter tank 41, and form a rotating airflow rotating around the central axis of the dust filter tank 41 as the center of the circle inside the dust filter tank 41, so as to throw impurities onto the tank wall inside the dust filter tank 41 through centrifugal force, so that the central area inside the dust filter tank 41 is clean air, thereby separating impurities and air; in this way, after the air carrying impurities is sent into the dust filter tank 41 by the dust suction assembly 30, a rotating airflow is formed under the action of the stirring blade 44, and then, Under the action of centrifugal force, impurities are thrown onto the wall of the dust filter tank 41, and fall to the bottom of the dust filter tank 41 under the action of gravity, and air is drawn out by the purge fan 21 to clean the dust.

[0030] In another embodiment, the air inlet end of the purge fan 21 directly draws air from outside the workshop, and the air outlet end of the dust filter tank 41 is directly connected to the outside of the workshop. This arrangement can discharge the filtered air directly to the outside of the workshop, preventing the purge fan from extracting impurities that have not been completely separated in the dust filter tank 41 and sending them to the first dust removal hood 51.

[0031] Please refer to Figure 4 Furthermore, the dust filter assembly 40 also includes a first filter and a second filter. The first filter and the second filter are both cylindrical. The first filter is installed at the center of the dust filter tank 41, and the second filter is mounted on the outside of the first filter to prevent some impurities that cannot be separated from being drawn out by the purge fan 21 along with the clean air; in this way, the separated clean air will pass through the second filter and the first filter in turn when going to the purge fan 21, preventing some impurities from being carried out by the clean air, thereby ensuring that the air blown out from the first purge pipe 22 does not contain impurities.

[0032] In this embodiment, the mesh number of the first filter is higher than that of the second filter, so that impurities with different particle sizes can be filtered through the first filter and the second filter.

[0033] In this embodiment, at least three universal wheels 45 are evenly installed on the bottom surface of the dust filter tank 41 to facilitate the movement of the dust filter tank 41; in this way, when changing the cleaning area, the operator can directly pull the dust filter tank 41 to move in the workshop.

[0034] Furthermore, the purge fan 21 is a fan capable of forward and reverse rotation, for example, an axial flow fan, so that compressed air is delivered from the connecting tank 42 into the central area inside the dust filter tank 41 by reversing the purge fan 21, thereby blowing off the dust attached to the first filter and the second filter.

[0035] In this embodiment, when cleaning the dust attached to the first filter and the second filter, first turn off the dust suction fan 31, the purge fan 21 and the drive motor 43, then start the purge fan 21 and reverse it, send the compressed air from the connecting tank 42 into the dust filter tank 41, and then start the drive motor 43. The air in the dust filter tank 41 forms a rotating airflow rotating around the central axis of the dust filter tank 41 under the stirring of the stirring blades 44, and the air flow direction is from the center of the dust filter tank 41 to the outside. The dust attached to the first filter and the second filter is blown off by the rotating airflow and falls into the dust filter tank 41. Finally, turn off the purge fan 21 and start the motor to complete the cleaning of the first filter and the second filter.

[0036] Furthermore, the dust filter assembly 40 also includes at least one vibrating member, each of which is evenly installed on the side wall of the dust filter tank 41 to vibrate the dust attached to the inner wall of the dust filter tank 41 to facilitate the collection of dust in the dust filter tank 41.

[0037] In this embodiment, the bottom of the dust filter tank 41 is a detachable dust collecting bucket to facilitate cleaning of dust in the dust filter tank 41 .

[0038] Example 1, use process of the gas self-circulating local cleaning device 10 1. Move the dust filter tank 41 to the vicinity of the area to be cleaned; 2. Move the second dust cover 52 to the area to be cleaned; 3. The purge fan 21 and the dust suction fan 31 are started at the same time. The purge fan 21 delivers high-pressure air into the first dust hood 51 along the first purge pipe 22 and the second purge pipe 23, so that air entrained with impurities is formed in the first dust hood 51. At the same time, the negative pressure generated by the dust suction fan 31 sucks the air entrained with impurities along the gap 53 between the first dust hood 51 and the second dust hood 52; 4. Slowly move the second dust cover 52 in the area to be cleaned until the dust in the area is cleaned; 5. Turn off the purge fan 21 and the dust suction fan 31 at the same time; 6. Move the gas self-circulating local cleaning device 10 to its original position.

[0039] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A gas self-circulating local cleaning device, characterized in that: The utility model comprises a purge component, a dust suction component, a dust filter component and a dust cover component, wherein the air inlet end of the dust filter component is connected with the air outlet end of the dust suction component, and the dust cover component comprises a first dust cover and a second dust cover, wherein the first dust cover is installed in the second dust cover, and the front side end face of the second dust cover protrudes from the front side end face of the first dust cover; a gap is left between the first dust cover and the second dust cover, and the front end of the gap is open, and the rear end is connected with the air inlet end of the dust suction component; the air outlet end of the purge component is connected with the first dust cover, and is used for blowing out high-pressure air to blow up dust in the area of ​​the first dust cover, so as to form air entrained with impurities in the first dust cover, and the dust suction component is used for generating negative pressure to suck the air entrained with impurities in the first dust cover along the gap between the first dust cover and the second dust cover, and send it to the dust filter component, so that the impurities in the air entrained with impurities are removed by the dust filter component.

2. The gas self-circulating local cleaning device according to claim 1, characterized in that: The dust cover assembly also includes at least two connecting parts, each of which is evenly arranged in the gap between the first dust cover and the second dust cover, and is used to fix the first dust cover and the second dust cover.

3. The gas self-circulating local cleaning device according to claim 1, characterized in that: The purge assembly includes a purge fan and a first purge pipe, the air inlet end of the purge fan is connected to the air outlet end of the dust filter assembly, and the air outlet end is connected to one end of the first purge pipe to extract the filtered air in the dust filter assembly and form high-pressure air to be sent into the first purge pipe, and the other end of the first purge pipe is connected to the first dust hood to send the high-pressure air along the first purge pipe into the first dust hood and then blow it out.

4. The gas self-circulating local cleaning device according to claim 3, characterized in that: The purge assembly also includes a second purge pipe, which is located in the first dust hood. The air inlet end of the second purge pipe is connected to the first purge pipe, and the air outlet end of the second purge pipe is flush with the front end of the first dust hood so that the blown high-pressure air can be closer to the dust in the first dust hood area.

5. The gas self-circulating local cleaning device according to claim 3, characterized in that: The dust suction assembly includes a dust suction fan and a dust suction pipe, one end of the dust suction pipe is connected to the gap between the first dust hood and the second dust hood, and the other end is connected to the air inlet end of the dust suction fan, and the air outlet end of the dust suction fan is connected to the air inlet end of the dust filter assembly to suck the air containing impurities from the gap between the first dust hood and the second dust hood into the dust suction pipe, and send it into the dust filter assembly through the dust suction fan.

6. The gas self-circulating local cleaning device according to claim 5, characterized in that: The dust filter assembly includes a dust filter canister, a drive motor and a stirring fan blade. The side of the dust filter canister is connected to the dust suction pipe. A connecting can is provided at the center of the top surface of the dust filter canister. The air inlet end of the purge fan is connected to the side of the connecting canister. The fixed end of the drive motor is installed on the top of the connecting canister, and the drive end extends downward into the dust filter canister. The stirring fan blade is installed on the drive end of the drive motor to stir the air in the dust filter canister to form a rotating airflow inside the dust filter canister that rotates with the central axis of the dust filter canister as the center, so as to throw impurities onto the canister wall inside the dust filter canister through centrifugal force, so that the central area inside the dust filter canister is clean air, thereby separating impurities from air.

7. The gas self-circulating local cleaning device according to claim 6, characterized in that: The dust filter assembly also includes a first filter and a second filter. The first filter and the second filter are both cylindrical. The first filter is installed at the center of the dust filter tank, and the second filter is mounted on the outside of the first filter to prevent some impurities that cannot be separated from being sucked out by the purge fan along with the clean air.

8. The gas self-circulating local cleaning device according to claim 6, characterized in that: The bottom surface of the dust filter tank is evenly equipped with at least three universal wheels to facilitate the movement of the dust filter tank.

9. The gas self-circulating local cleaning device according to claim 6, characterized in that: The purge fan is a fan capable of forward and reverse rotation, and can deliver compressed air from the connecting tank into the central area inside the dust filter tank by reversing the purge fan, thereby blowing off the dust attached to the first filter screen and the second filter screen.

10. The gas self-circulating local cleaning device according to claim 6, characterized in that: The dust filter assembly also includes at least one vibrating member, each of which is evenly installed on the side wall of the dust filter tank and is used to vibrate the dust attached to the inner wall of the dust filter tank to collect the dust in the dust filter tank.

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