A superconducting magnet coil carrying skeleton

Abstract

The application discloses a superconducting magnet coil bearing framework, which comprises a support framework, a magnet coil installation barrel and a magnet coil. The support framework is used for providing support force to the magnet coil along the axial direction of the magnet coil and limiting the displacement of the magnet coil along the axial direction of the magnet coil. The magnet coil installation barrel is fixed on the support framework and is used for installing the magnet coil and providing support force to the magnet coil along the radial direction of the magnet coil and limiting the displacement of the magnet coil along the radial direction of the magnet coil. The magnet coil is arranged on the magnet coil installation barrel, the magnet coil installation barrel can offset the radial force generated by the interaction of the magnet coils, the support framework can avoid the displacement of the magnet coil along the axial direction of the magnet coil, the support framework cooperates with the magnet coil installation barrel, can offset the vibration and braking acceleration during transportation, avoids the generation of magnet coil swing resonance, reduces the influence on the magnet coil, and guarantees the stability of the MCZ process.

Description

Technical Field

[0001] This invention relates to the field of superconducting single crystal furnace magnet technology, specifically to a superconducting magnet coil support frame. Background Technology

[0002] Magnetically Applied Czochralski Method (MCZ) is currently the most important method for producing large-size semiconductor-grade single crystal silicon with a diameter of 300mm or more. Figure 8 The diagram shows the arrangement of the horizontal magnetic field and magnet coils in the MCZ process, with arrows indicating the direction of the magnetic field. The position, strength, and direction of the magnetic field are the most critical technical parameters in the MCZ process. Currently, the overall rigidity of the magnet frame structure is relatively poor, and magnet coils are mostly installed using a suspension method. This suspension structure cannot provide stable support, and the coils generate very large magnetic forces when current flows through them, causing significant deformation and displacement of the frame structure. This affects the strength and direction of the magnetic field lines. Furthermore, vibrations and braking accelerations during transportation can cause the magnet coils to oscillate and resonate, which also has adverse effects. Moreover, if the support force for the magnet coils is insufficient, the electromagnetic force can conversely affect the position of the magnet coils, thus affecting the magnetic field and reducing the stability of the MCZ process. Summary of the Invention

[0003] To address the shortcomings of existing technologies, this invention designs a superconducting magnet coil support frame, comprising: a support frame for providing axial support force to the magnet coil and restricting axial displacement of the magnet coil; and a magnet coil mounting bucket fixed on the support frame for mounting the magnet coil and providing radial support force to the magnet coil, restricting radial displacement of the magnet coil.

[0004] Preferably, the height of the support frame is smaller than the outer diameter of the magnet coil.

[0005] Preferably, the supporting frame is a ring-shaped box structure.

[0006] Preferably, the magnet coil mounting barrel passes through the support frame and extends to the outside of the support frame.

[0007] Preferably, the support frame includes: an inner frame plate; two frame cover plates, respectively installed at the bottom and top of the inner frame plate; and an outer frame plate, whose bottom and top are fixedly connected to the two frame cover plates, and which cooperate with the inner frame plate for installing the magnet coil mounting bucket.

[0008] Preferably, the inner plate of the skeleton is a circular ring structure, and the outer plate of the skeleton is a prism structure.

[0009] Preferably, the outer frame of the frame is provided with shock-absorbing components on the outer plate surface of the magnet coil mounting bucket.

[0010] Preferably, an adjusting element is provided between the outer plate of the skeleton outer plate and the inner plate of the skeleton for mounting the magnet coil mounting bucket, and the adjusting element is used to adjust the angle of the outer plate surface.

[0011] Preferably, the angle between two adjacent mounting surfaces on the outer frame for mounting the magnet coil mounting bucket is 70° or 110°; multiple frame reinforcing ribs are provided between the inner frame plate and the outer frame plate, and the multiple frame reinforcing ribs are evenly distributed between the two frame cover plates.

[0012] Preferably, the magnet coil mounting barrel passes through the support frame and extends to the inside of the support frame.

[0013] Compared with the closest prior art, the beneficial effects of the present invention are as follows:

[0014] 1. In this invention, the magnet coil is placed on the magnet coil mounting barrel. The magnet coil mounting barrel can counteract the radial force generated by the interaction of the magnet coils. The setting of the support frame can prevent the magnet coil from displacing along the axial direction of the magnet coil. The support frame cooperates with the magnet coil mounting barrel to counteract vibration and braking acceleration during transportation, avoid the magnet coil swaying resonance, thereby reducing the impact on the magnet coil and ensuring the stability of the MCZ process.

[0015] 2. The outer frame of this invention can be configured with different structures depending on the situation. An adjustment component can be set between the outer plate surface of the outer frame used to install the magnet coil mounting bucket and the inner frame plate to adjust the angle of the outer plate surface. This can increase the upper limit of the magnetic field without changing the magnet structure, thereby adapting to the needs of different field strengths and increasing the applicability of this device. Alternatively, multiple frame reinforcing ribs can be set between the inner frame plate and the outer frame plate to fix the angle after the magnet coil is installed on the superconducting magnet coil support frame. This method can provide more stable support force. The stable structure can ensure a stable coil position by electromagnetic force, thereby ensuring a stable magnetic field and further ensuring the stability of the MCZ process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the superconducting magnet coil support frame of the present invention.

[0017] Figure 2 This is a schematic diagram of the structure of the magnet coil mounting bucket of the present invention.

[0018] Figure 3 This is a schematic diagram of the inner plate of the skeleton of the present invention.

[0019] Figure 4 This is a schematic diagram of the skeleton cover plate of the present invention.

[0020] Figure 5 This is a schematic diagram of the outer frame plate of the present invention.

[0021] Figure 6 This is a schematic diagram of the structure of the adjusting component of the present invention.

[0022] Figure 7 This is a schematic diagram of the skeleton reinforcing rib of the present invention.

[0023] Figure 8 This is a schematic diagram of the arrangement of the horizontal magnetic field and magnet coils in the MCZ process.

[0024] Figure label:

[0025] 1-Magnet coil mounting bucket, 2-Inner frame plate, 3-Frame cover plate, 4-Outer frame plate, 5-Shock absorber, 6-Adjusting component, 61-Mounting block, 62-First adjusting rod, 63-Second adjusting rod, 64-Sliding rod, 65-Connecting rod, 66-First adjusting handle, 67-Third adjusting rod, 68-Second adjusting handle, 7-Frame reinforcing rib, 8-Magnet coil. Detailed Implementation

[0026] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0027] like Figures 1-7 As shown, this invention provides a superconducting magnet coil support frame, comprising: a support frame for providing axial support force to the magnet coil 8 and restricting axial displacement of the magnet coil 8; and a magnet coil mounting bucket 1, fixed to the support frame for mounting the magnet coil 8 and providing radial support force to the magnet coil 8, restricting radial displacement of the magnet coil 8. By placing the magnet coil 8 on the magnet coil mounting bucket 1, the magnet coil mounting bucket 1 can counteract the radial force generated by the interaction of the magnet coil 8, and the support frame can prevent axial displacement of the magnet coil 8. The cooperation between the support frame and the magnet coil mounting bucket 1 can counteract vibration and braking acceleration during transportation, preventing the magnet coil 8 from swaying and resonating, thereby reducing the impact on the magnet coil 8 and ensuring the stability of the MCZ process.

[0028] Preferably, the height of the support frame is less than the outer diameter of the magnet coil 8. This reduces weight while ensuring structural strength meets usage requirements, and also avoids excessive obstruction by the support frame, which could negatively impact the magnet coil 8.

[0029] Preferably, the supporting frame is a ring-shaped box structure.

[0030] Preferably, the magnet coil mounting barrel 1 passes through the support frame and extends to the outside of the support frame.

[0031] Preferably, the support frame includes: an inner frame plate 2; two frame cover plates 3, which are respectively installed at the bottom and top of the inner frame plate 2; and an outer frame plate 4, whose bottom and top are respectively fixedly connected to the two frame cover plates 3, and which cooperate with the inner frame plate 2 to install the magnet coil mounting bucket 1.

[0032] Preferably, the inner frame plate 2 is a circular ring structure, and the outer frame plate 4 is a prism structure.

[0033] Preferably, the outer frame plate 4 is provided with shock-absorbing components 5 on the outer plate surface of the magnet coil mounting bucket 1.

[0034] Preferably, an adjusting member 6 is provided between the outer plate surface of the outer frame 4 (for mounting the magnet coil mounting barrel 1) and the inner frame plate 2. The adjusting member 6 is used to adjust the angle of the outer plate surface. By providing an adjusting member between the outer plate surface of the outer frame 4 (for mounting the magnet coil mounting barrel) and the inner frame plate 2 to adjust the angle of the outer plate surface, the upper limit of the magnetic field can be increased without changing the magnet structure, thereby adapting to the needs of different field strengths and increasing the applicability of this device.

[0035] Preferably, the adjusting component 6 includes: a first adjusting component, which is installed on the inner plate 2 of the skeleton; and a second adjusting component, which is installed on the outer plate surface of the outer plate 4 for mounting the magnet coil mounting bucket 1, and is adjustablely connected to the first adjusting component.

[0036] Preferably, the first adjustment component includes: a mounting block 61 mounted on the inner plate 2 of the frame; and a first adjustment rod 62 mounted on the mounting block 61 and adjustablely connected to the second adjustment component.

[0037] Preferably, the second adjustment component itself is a length-adjustable structure.

[0038] Preferably, the second adjustment component includes: a second adjustment rod 63, which is adjustablely connected to the first adjustment rod 62; multiple sliding rods 64, which are evenly arranged along the other edge of the second adjustment rod 63; a connecting rod 65, which is installed on the outer plate surface of the outer frame 4 for mounting the magnet coil mounting bucket 1, and is slidably connected to the sliding rods 64, and has a first adjustment handle 66 at its end; and a third adjustment rod 67, which is rotatably installed inside the connecting rod 65, and has one end adjustablely connected to the second adjustment rod 63, and the other end has a second adjustment handle 68.

[0039] As an alternative implementation, the angle at which the magnet coil 8 is mounted on the superconducting magnet coil support frame can be fixed. Specifically, the angle between two adjacent mounting surfaces of the magnet coil mounting bucket 1 on the outer frame plate 4 is 70° or 110°, which is the most commonly used angle. Preferably, multiple frame reinforcing ribs 7 are provided between the inner frame plate 2 and the outer frame plate 4, and these reinforcing ribs 7 are evenly distributed between the two frame cover plates 3. By providing multiple reinforcing ribs 7 between the inner frame plate 2 and the outer frame plate 4, and fixing the angle at which the magnet coil 8 is mounted on the superconducting magnet coil support frame, this method provides more stable support. The stable structure ensures a stable coil position under electromagnetic force, thereby ensuring a stable magnetic field and further guaranteeing the stability of the MCZ process.

[0040] As an alternative implementation, the magnet coil mounting barrel 1 penetrates the support frame and extends to the inside of the support frame.

[0041] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0042] Furthermore, the terms "upper" and "lower" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "upper" or "lower" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0043] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0044] In this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0045] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of the claims of the pending application of the present invention.

Claims

1. A superconducting magnet coil carrying former, characterized by, The application relates to a magnet coil mounting barrel (1) for mounting a magnet coil (8) and providing a supporting force for the magnet coil (8) in the axial direction of the magnet coil (8) to limit the displacement of the magnet coil (8) in the axial direction of the magnet coil (8). The height of the supporting framework is smaller than the outer diameter of the magnet coil (8). The supporting framework is a ring-shaped box structure. The magnet coil mounting barrel (1) penetrates through the supporting framework and extends to the outside of the supporting framework. The supporting framework comprises: A framework inner plate (2); Two framework cover plates (3) are respectively arranged at the bottom and top of the framework inner plate (2); A framework outer plate (4) is fixedly connected with the two framework cover plates (3) at the bottom and top and cooperates with the framework inner plate (2) to mount the magnet coil mounting barrel (1). The framework inner plate (2) is a circular ring structure and the framework outer plate (4) is a prism structure. A damping member (5) is arranged on the outer plate surface of the framework outer plate (4) for mounting the magnet coil mounting barrel (1). An adjusting member (6) is arranged between the outer plate surface of the framework outer plate (4) for mounting the magnet coil mounting barrel (1) and the framework inner plate (2), and the adjusting member (6) is used for adjusting the angle of the outer plate surface.

2. The superconducting magnet coil carrying former of claim 1, wherein, The angle between two adjacent mounting surfaces of the framework outer plate (4) for mounting the magnet coil mounting barrel (1) is 70 DEG or 110 DEG.

3. The superconducting magnet coil carrying former of claim 1, wherein, A plurality of framework reinforcing ribs (7) are arranged between the framework inner plate (2) and the framework outer plate (4), and the plurality of framework reinforcing ribs (7) are evenly arranged between the two framework cover plates (3).

4. The superconducting magnet coil carrying former of claim 1, wherein, The magnet coil mounting barrel (1) penetrates through the supporting framework and extends to the inside of the supporting framework. ​ 5. The superconducting magnet coil carrying former of claim 1, wherein, ​

Images