A method, apparatus, and terminal device for detecting abnormal events.

Abstract

This application discloses a method, apparatus, and terminal device for detecting abnormal events. By acquiring the refractive index of light waves in a sampling pipeline, it is possible to detect the presence of air bubbles in the sampling pipeline based on the refractive index. Air bubbles can affect the accuracy of concentration measurement equipment in detecting the concentration of a drug sample. Therefore, if the presence of air bubbles in the sampling pipeline is determined based on the refractive index, it is determined that the concentration of the drug sample detected by the concentration measurement equipment is affected, causing a discrepancy between the actual concentration of the drug sample and the concentration detected by the concentration measurement equipment. This triggers an abnormal event, thus enabling the detection of abnormal events that affect the concentration of the drug sample.

Description

Technical Field

[0001] This application belongs to the field of electronic manufacturing technology, and in particular relates to a method, apparatus and terminal equipment for detecting abnormal events. Background Technology

[0002] Wet etching equipment is a device that uses specific chemical solutions (such as strong acids, strong bases, or buffered oxide etchants) to dissolve areas of an object that are not protected by a mask, so that the object can form the desired structure.

[0003] During the operation of wet etching equipment, there may be abnormal situations that affect the concentration of chemical solutions, and different concentrations of chemical solutions will reduce the dissolution effect and efficiency.

[0004] Therefore, in order to ensure the operating effect of the wet etching equipment, it is necessary to detect abnormal situations that affect the concentration of the chemical solution during the operation of the wet etching equipment. Summary of the Invention

[0005] This application provides a method, apparatus, terminal device, and computer program product for detecting abnormal events, aiming to solve the problem that existing methods cannot detect abnormal situations that affect the concentration of chemical solutions.

[0006] In a first aspect, embodiments of this application provide a method for detecting abnormal events. The method is applied to a concentration measuring device, which is used to detect the concentration of a drug sample collected by a sampling pipeline. The method includes:

[0007] Obtain the refractive index of the light wave in the sampling pipeline;

[0008] If the presence of air bubbles in the sampling pipeline is determined based on the refractive index, an abnormal event is triggered; wherein the abnormal event is an event in which the actual concentration of the drug sample does not match the detected concentration obtained by the concentration measuring device from detecting the drug sample.

[0009] In one possible implementation of the first aspect above, obtaining the refractive index of the light wave in the sampling pipeline includes:

[0010] Light waves are output in the sampling pipeline;

[0011] The reflection angle of the light wave in the sampling pipeline is collected;

[0012] The refractive index of the light wave is determined based on the reflection angle.

[0013] In one possible implementation of the first aspect above, determining the triggering of an abnormal event when it is determined that an air bubble exists in the sampling pipeline based on the refractive index includes:

[0014] The refractive index is compared with a preset refractive index threshold;

[0015] When the refractive index is greater than or equal to the refractive index threshold, it is determined that there are air bubbles in the sampling pipeline;

[0016] An abnormal event is triggered when air bubbles are present in the sampling pipeline.

[0017] In one possible implementation of the first aspect above, the concentration detection device is further configured to emit sound waves in the sampling pipeline and acquire feedback signals of the sound waves, wherein determining the presence of air bubbles in the sampling pipeline when the refractive index is greater than or equal to the refractive index threshold includes:

[0018] When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it is determined that there are air bubbles in the sampling pipeline.

[0019] In one possible implementation of the first aspect described above, the method further includes:

[0020] When the refractive index is less than the refractive index threshold, or when the feedback signal is less than the signal threshold, a first probability is determined based on the refractive index, and a second probability is determined based on the feedback signal;

[0021] A third probability is generated by weighting the first probability and the second probability.

[0022] When the third probability is greater than or equal to the preset first probability threshold, it is determined that there is an air bubble in the sampling pipeline.

[0023] In one possible implementation of the first aspect above, the step of weighting the first probability and the second probability to generate the third probability includes:

[0024] Obtain the fluid pressure in the sampling pipeline;

[0025] Determine the fourth probability based on the fluid pressure;

[0026] The first probability, the second probability, and the fourth probability are weighted and calculated to generate the third probability.

[0027] In one possible implementation of the first aspect described above, the method further includes:

[0028] When the third probability is less than the first probability threshold and greater than or equal to the preset second probability threshold, bubble risk information is generated to indicate the risk of bubbles in the sampling pipeline; wherein, the second probability threshold is less than the first probability threshold.

[0029] In one possible implementation of the first aspect described above, the method further includes:

[0030] When air bubbles are present in the sampling pipeline, a measurement compensation value is determined based on the refractive index, and the detection concentration is compensated based on the measurement compensation value.

[0031] In one possible implementation of the first aspect above, determining the measurement compensation value based on the refractive index includes:

[0032] Multiple pre-defined refractive index ranges are determined, and the concentration difference value corresponding to each refractive index range is determined; wherein, the refractive index range includes at least one reference refractive index, and the concentration difference value is determined based on the concentration deviation value corresponding to each reference refractive index, and the concentration deviation value is the difference between the detected concentration corresponding to the reference refractive index and the actual concentration;

[0033] Determine the target refractive index range in which the refractive index is located from the plurality of refractive index ranges;

[0034] The measurement compensation value is determined based on the concentration difference between the target refractive index ranges.

[0035] In one possible implementation of the first aspect above, the determination of at least one preset reference refractive index and the acquisition of a concentration deviation value corresponding to each of the reference refractive indices are described.

[0036] Based on each of the aforementioned reference refractive indices, at least one refractive index range is determined;

[0037] Based on the concentration deviation value corresponding to each of the reference refractive indices, the interval concentration difference value corresponding to each of the refractive index intervals is determined.

[0038] In one possible implementation of the first aspect above, the concentration measuring device is communicatively connected to the display device, and the method further includes:

[0039] When the abnormal event is determined to be triggered, an abnormal prompt message is generated and sent to the display device.

[0040] In one possible implementation of the first aspect described above, the method further includes:

[0041] If it is determined that there are no air bubbles in the sampling pipeline based on the refractive index, it is determined that no abnormal event has been triggered;

[0042] The refractive index is transmitted to the display device so that the refractive index can be displayed by the display device.

[0043] Secondly, embodiments of this application provide an abnormal event detection device, which is applied to a concentration measuring device used to detect the concentration of a drug solution sample collected by a sampling pipeline. The device includes:

[0044] The acquisition module is used to acquire the refractive index of light waves in the sampling pipeline;

[0045] The determination module is used to determine an abnormal event when it is determined that there are air bubbles in the sampling pipeline based on the refractive index; wherein the abnormal event is an event in which the actual concentration of the drug sample does not match the detected concentration obtained by the concentration measuring device from detecting the drug sample.

[0046] Thirdly, embodiments of this application provide a terminal device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the abnormal event detection method as described in the first aspect above.

[0047] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program that, when executed by a processor, implements the abnormal event detection method described in the first aspect above.

[0048] Fifthly, embodiments of this application provide a computer program product, including a computer program that, when run on a computer, causes the computer to execute the abnormal event detection method provided in the first aspect.

[0049] The beneficial effects of the embodiments in this application compared with the prior art are:

[0050] In this embodiment, by obtaining the refractive index of light waves in the sampling pipeline, it is possible to detect whether there are bubbles in the sampling pipeline based on the refractive index. Bubbles can affect the accuracy of the concentration measurement device in detecting the concentration of the drug sample. Therefore, if it is determined that there are bubbles in the sampling pipeline based on the refractive index, it is determined that the concentration of the drug sample detected by the concentration measurement device is affected, causing the actual concentration of the drug sample to be inconsistent with the concentration detected by the concentration measurement device. This triggers an abnormal event, thus realizing the detection of abnormal events that affect the concentration of the drug. Attached Figure Description

[0051] Figure 1 This is a flowchart illustrating the steps of an abnormal event detection method provided in an embodiment of this application;

[0052] Figure 2 This is a schematic diagram of a wet etching apparatus provided in one embodiment of this application;

[0053] Figure 3 This is a schematic diagram of the structure of a concentration measuring device provided in one embodiment of this application;

[0054] Figure 4 This is a schematic diagram of a refractive index provided in an embodiment of this application;

[0055] Figure 5 This is a schematic diagram illustrating the communication link between a concentration measuring device and a display device according to an embodiment of this application;

[0056] Figure 6 This is a flowchart of another method for detecting abnormal events provided in an embodiment of this application;

[0057] Figure 7 This is a schematic diagram of the structure of an abnormal event detection device provided in an embodiment of this application;

[0058] Figure 8 This is a structural block diagram of a terminal device provided in one embodiment of this application. Detailed Implementation

[0059] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0060] Wet etching equipment is a device that uses specific chemical solutions (such as strong acids, strong bases, or buffered oxide etchants) to dissolve areas of an object that are not protected by a mask, so that the object can form the desired structure.

[0061] Currently, wet etching equipment can adjust the concentration of the chemical solution used to preferentially remove target materials (such as silicon and silicon oxide) from the wafer while retaining non-target materials (such as photoresist or other mask layers), thereby forming the desired microstructure. Different concentrations of chemical solutions will reduce the dissolution effect and efficiency, and the concentration of the chemical solution can be affected during the operation of wet etching equipment.

[0062] Therefore, to ensure that the chemical solution can accurately dissolve the material, the concentration of the chemical solution used in the wet etching equipment needs to be monitored in real time. However, there are factors that can affect the accuracy of chemical solution concentration monitoring, making it impossible to accurately detect the actual concentration of the chemical solution, resulting in low accuracy and thus affecting the effectiveness and efficiency of the chemical solution in dissolving the material.

[0063] Based on this, this application provides a method, apparatus, and terminal device for detecting abnormal events. By acquiring the refractive index of light waves in a sampling pipeline, it is possible to detect whether air bubbles exist in the sampling pipeline based on the refractive index. Air bubbles can affect the accuracy of concentration measurement devices in detecting the concentration of drug samples. Therefore, if it is determined that air bubbles exist in the sampling pipeline based on the refractive index, it is determined that the concentration of drug samples detected by the concentration measurement devices is affected, causing the actual concentration of the drug sample to be inconsistent with the concentration detected by the concentration measurement devices. This determines that an abnormal event has been triggered, thus realizing the detection of abnormal events that affect the concentration of drug samples.

[0064] See Figure 1 , Figure 1 This illustration shows a flowchart of an abnormal event detection method according to an embodiment of this application. The method is applied to a concentration measuring device, which is installed in a sampling pipeline for collecting drug solution samples. The sampling pipeline can be installed in a wet etching apparatus. Specifically, the method may include the following steps:

[0065] Step 101: Obtain the refractive index of the light wave in the sampling pipeline.

[0066] Before introducing the various steps of the detection method provided in the embodiments of this application, the wet etching apparatus and concentration measurement equipment involved will be introduced first.

[0067] See Figure 2 , Figure 2 A schematic diagram of a wet etching apparatus according to an embodiment of this application is shown, as follows: Figure 2 As shown, the wet etching device 2 may include a concentration measuring device 21, a sampling pipeline 22, and a wet etching pipeline 23. The wet etching pipeline may be a pipeline for preparing and outputting a chemical solution, and the concentration measuring device 21 may be used to detect the concentration of the drug solution sample collected by the sampling pipeline 22.

[0068] As an example, the concentration measuring device 21 can also be connected to a display device to display the collected concentration.

[0069] See Figure 3 , Figure 3 A schematic diagram of a concentration measuring device according to an embodiment of this application is shown, as follows: Figure 3As shown, the concentration measuring device 3 may include a processor 31, a light-sensing module 32, and a detection module 33. The light-sensing module 32 can output and collect light waves and can be installed in the sampling pipeline. The detection module 33 can collect the drug solution and detect its concentration, and can also be installed in the sampling pipeline. The processor 31 can collect the light waves collected by the light-sensing module 32 and process them to obtain the refractive index between the output light wave and the collected light wave; the processor 31 can also collect data such as concentration and composition detected by the detection module 33 and process the detected concentration data to generate control commands for modulating the concentration of the chemical solution in the wet etching pipeline.

[0070] Specifically, the photosensitive module 32 and the detection module 33 can be respectively installed in the sampling pipeline, and in the flow direction of the drug solution in the sampling pipeline, the detection module 33 is located after the photosensitive module 32. That is, when the drug solution flows in the sampling pipeline, it will first flow through the photosensitive module 32 and then through the detection module 33.

[0071] In practical applications, the detection module 33 can use a neutralization titration method to detect the concentration of the collected drug solution. Specifically, the drug solution can be collected in the sampling pipeline, and a standard solution of known concentration can be added to the collected drug solution to cause an acid-base neutralization reaction between the collected drug solution and the standard solution of known concentration. Acid-base indicators such as methyl orange, methyl red, and phenolphthalein are used to determine whether the neutralization is complete. When the neutralization is complete, the volume of the standard solution added is recorded. Based on the volume of the standard solution added and the concentration of the standard solution, the concentration of the collected drug solution is calculated. The calculated concentration can then be quantified to obtain a digital signal corresponding to the concentration of the collected drug solution. This digital signal is transmitted to the processor 31. The processor 31 can generate control instructions for modulating the concentration of the chemical solution in the wet etching pipeline based on the concentration of the collected drug solution.

[0072] In a specific implementation, the processor 31 can compare the concentration of the collected drug solution with the preset target concentration. When the difference between the concentration of the collected drug solution and the preset target concentration is greater than the preset concentration threshold, a control command is generated to modulate the concentration of the chemical solution in the wet etching pipeline based on the difference between the concentration of the collected drug solution and the preset target concentration, so that the difference between the concentration of the chemical solution in the wet etching pipeline and the target concentration is less than or equal to the concentration threshold.

[0073] As an example, the wet etching pipeline may also include a chemical replenishment pipeline, which can be a pipeline for delivering chemical solutions to the wet etching pipeline. The chemical replenishment pipeline may include pipelines for delivering nitric acid, phosphoric acid, acetic acid, etc. When the difference between the collected concentration of the chemical solution and the preset target concentration is greater than the preset concentration threshold, the processor 31 can generate a corresponding control instruction and control the chemical replenishment pipeline to deliver a corresponding volume of chemical solution to the wet etching pipeline through the control instruction, so that the difference between the concentration of the chemical solution in the wet etching pipeline and the target concentration is less than or equal to the concentration threshold.

[0074] In this embodiment, the light wave in the sampling pipeline can be a photon stream in a specific frequency band, specifically a light beam emitted by a light source. The sampling pipeline can be a pipeline used in a wet etching apparatus to collect a drug sample, and the drug sample can be a sample used in the wet etching apparatus to detect concentration. The refractive index can be the ratio between the angle at which the propagation direction of light is deflected when it enters another medium and the angle at which the propagation direction of light is deflected when it returns from that medium; specifically, it can be the ratio between the angle at which the propagation direction of light wave is deflected when it enters the sampling pipeline and the angle at which the propagation direction of light wave is deflected when it returns from the sampling pipeline.

[0075] When the wet etching equipment is running, a chemical solution of appropriate concentration can be prepared and delivered to the location of the object to be dissolved through the wet etching pipeline. At the same time, a portion of the chemical solution in the wet etching pipeline can be introduced into the sampling pipeline to obtain a chemical solution sample. The chemical solution sample can then flow in the sampling pipeline and eventually flow into the wet etching pipeline.

[0076] When a portion of the reagent in the wet etching pipeline is introduced into the sampling pipeline, the angle at which the propagation direction of the light wave is deflected when it enters the sampling pipeline, and the angle at which the propagation direction of the light wave is deflected when it returns from the sampling pipeline, can be obtained. Based on the angle at which the propagation direction of the light wave is deflected when it enters the sampling pipeline and the angle at which the propagation direction of the light wave is deflected when it returns from the sampling pipeline, the refractive index of the light wave in the sampling pipeline can be determined.

[0077] In one embodiment of this application, step 101 may include steps 1011 to 1013:

[0078] Step 1011: Output light waves in the sampling pipeline.

[0079] When a portion of the liquid in the wet etching pipeline is introduced into the sampling pipeline, the photosensitive module installed in the sampling pipeline can output light waves to the sampling pipeline at a preset angle.

[0080] Specifically, the light sensing module may include a light source for emitting light waves, which can then output light waves in the sampling pipeline.

[0081] Step 1012: Collect the reflection angle of the light wave in the sampling pipeline.

[0082] The reflection angle can be the angle at which the light wave deflects its propagation direction when it returns from the sampling pipeline.

[0083] After the light wave is output, it will propagate in the sampling tube and eventually be collected by the photosensitive module. The photosensitive module can then record the angle of the collected light wave to obtain the angle at which the light wave enters the photosensitive module, that is, the reflection angle at which the propagation direction of the light wave is deflected when it returns from the sampling tube.

[0084] Specifically, the light-sensing module may also include a light-sensing device for collecting light beams, such as a light-sensing pressure gauge or a photoelectric sensor.

[0085] Step 1013: Determine the refractive index of the light wave based on the reflection angle.

[0086] After obtaining the reflection angle, the refractive index of the light wave in the sampling tube can be calculated by the processor. The refractive index of the light wave in the sampling tube is obtained by calculating the ratio between the angle at which the light wave enters the sampling tube and the reflection angle.

[0087] join Figure 4 , Figure 4 A schematic diagram of a refractive index provided in an embodiment of this application is shown, as follows. Figure 4 As shown in (1), the light sensing module 32 can output light waves to the sampling pipe 22, and then the light waves propagate in the sampling pipe 22. When there is only one medium in the sampling pipe 22, that is, when there is only a drug sample, the direction of light wave propagation in the sampling pipe 22 is not deflected, and the propagation path a of the light wave in the sampling pipe 22 can be regarded as a straight line.

[0088] like Figure 4 As shown in (2), the photosensitive module 32 can output light waves to the sampling tube 22, and then the light waves propagate in the sampling tube 22. There are bubbles A and B in the sampling tube 22. Bubble A and bubble B are different media from the drug sample, which causes the propagation direction of the light waves in the sampling tube 22 to be deflected, thereby changing the propagation path of the light waves and obtaining the propagation path b. The propagation path b of the light waves in the sampling tube 22 can be regarded as a curve.

[0089] Based on this, the light wave in the sampling pipe 22 can be collected by the light sensing module 32, and the refractive index of the light wave in the sampling pipe can be determined based on the reflection angle and the incident angle in the propagation path of the light wave.

[0090] Specifically, the incident angle can be the angle at which the light wave enters the sampling tube.

[0091] Step 102: If it is determined that there are air bubbles in the sampling pipeline based on the refractive index, an abnormal event is triggered.

[0092] Among them, an abnormal event can be an event in which the actual concentration of the drug sample does not match the detected concentration obtained by the concentration measuring device. The actual concentration can be the actual concentration of the drug sample, and the detected concentration can be the concentration of the drug sample detected by the concentration measuring device.

[0093] After obtaining the refractive index, it can be used to determine whether there are air bubbles in the sampling pipeline, and if it is determined that there are air bubbles in the sampling pipeline, an abnormal event can be triggered.

[0094] In practical applications, when air bubbles are present in the sampling pipeline, their volume reduces the volume of the drug sample collected. Consequently, when using neutralization titration to determine the concentration of the drug sample, the volume of standard solution required for complete acid-base neutralization is also reduced. This results in a decrease in the concentration of the drug sample determined by neutralization titration, causing the detected concentration to differ from the actual concentration of the drug sample and triggering an abnormal event.

[0095] Specifically, a standard solution can be a solution of fixed concentration with properties opposite to those of the drug solution.

[0096] In practice, when it is determined that there are air bubbles in the sampling pipeline, even if the concentration of the drug sample has not been detected at the current moment, it can be predicted that an abnormal event will be triggered, that is, the abnormal event is determined to be triggered.

[0097] It is important to understand that when the detected concentration of the drug solution sample does not match the actual concentration, it means that the actual concentration of the drug solution sample cannot be accurately detected. Adjusting the concentration of the drug solution in the wet etching pipeline based on the detected concentration that does not match the actual concentration will result in a different concentration of the drug solution in the wet etching pipeline than the desired concentration. This will affect the effectiveness and efficiency of the drug solution in dissolving the material and reduce the yield of the wet etching process.

[0098] Therefore, when an abnormal event is triggered, the operation of the wet etching equipment can be paused and air bubbles in the wet etching equipment can be removed to reduce the impact of air bubbles in the wet etching equipment on the concentration of the detection solution sample and improve the accuracy of the detection solution sample concentration.

[0099] In one embodiment of this application, step 102 may include steps 1021 to 1023:

[0100] Step 1021: Compare the refractive index with a preset refractive index threshold.

[0101] The refractive index threshold can be a threshold used to determine the presence of bubbles by measuring the refractive index. The refractive index threshold can be user-defined or obtained based on experience.

[0102] After obtaining the refractive index, it can be compared with a pre-set refractive index threshold.

[0103] Step 1022: When the refractive index is greater than or equal to the refractive index threshold, it is determined that there are air bubbles in the sampling pipeline.

[0104] When the refractive index is greater than or equal to the refractive index threshold, it can be determined that there are air bubbles in the sampling pipeline.

[0105] In practical applications, when the refractive index is greater than or equal to the refractive index threshold, it can be determined that the light wave is deflected during its propagation in the sampling pipeline. Since the light wave will be deflected when it enters different media, it can be determined that there is a medium different from the drug sample in the sampling pipeline, such as air bubbles. Therefore, if the refractive index is greater than or equal to the refractive index threshold, it can be determined that there are air bubbles in the sampling pipeline.

[0106] Step 1023: When air bubbles are present in the sampling pipeline, an abnormal event is triggered.

[0107] When air bubbles are present in the sampling pipeline, it can be predicted that an abnormal event will be triggered, thus confirming the triggering of an abnormal event.

[0108] In one embodiment of this application, the following steps may also be included:

[0109] When air bubbles are present in the sampling pipeline, a measurement compensation value is determined based on the refractive index, and the detection concentration is compensated based on the measurement compensation value.

[0110] The measurement compensation value can be a value used to compensate for the detected concentration.

[0111] When air bubbles are present in the sampling pipeline, an abnormal event can be triggered, indicating a discrepancy between the detected and actual concentrations. Based on the refractive index of light in the sampling pipeline, a compensation value for the detected concentration can be determined. This compensation value is used to adjust the detected concentration, ensuring that the difference between the compensated and actual concentrations is less than a preset concentration threshold. The compensated detected concentration is then used to generate a control command to adjust the concentration of the chemical solution in the wet etching pipeline. This control command is then used to adjust the concentration of the chemical solution in the wet etching pipeline, ensuring that the adjusted concentration matches the desired concentration or that the difference is less than a preset value.

[0112] In practical applications, the measured compensation value can be added to the detected concentration to obtain the compensated detected concentration.

[0113] In one embodiment of this application, the following steps may also be included:

[0114] When an abnormal event is detected, an abnormal message is generated and sent to the display device.

[0115] Among them, the abnormal prompt information can be used to indicate abnormal events.

[0116] When an abnormal event is determined to be triggered, an abnormal prompt message can be generated to inform the user that the abnormal event is expected to be triggered. The abnormal prompt message is then sent to the display device, which can then display the abnormal prompt message to the user to inform them that the abnormal event is expected to be triggered.

[0117] join Figure 5 , Figure 5 The diagram illustrates a communication link between a concentration measuring device and a display device according to an embodiment of this application. The concentration measuring device can be connected to a communication module, and information can be sent to the display device through the communication module, thus realizing the communication link between the concentration measuring device and the display device.

[0118] For example, the concentration measuring device can send the generated abnormal prompt information to the display device through the communication module, and then the display device can receive the abnormal prompt information from the communication module and display the abnormal prompt information to the user.

[0119] In one embodiment of this application, the following steps may also be included:

[0120] If it is determined that there are no air bubbles in the sampling pipeline based on the refractive index, it is determined that no abnormal event has been triggered. If no abnormal event has been triggered, the refractive index is transmitted to the display device so that the refractive index can be displayed by the display device.

[0121] After obtaining the refractive index, it can be used to determine whether there are air bubbles in the sampling pipeline. If it is determined that there are no air bubbles in the sampling pipeline, it can be determined that no abnormal event has been triggered.

[0122] In practical applications, when the refractive index is less than the refractive index threshold, it can be determined that there are no air bubbles in the sampling pipeline.

[0123] It is important to understand that when the refractive index is less than the refractive index threshold, it can be determined that the light wave does not deflect or deflects at a small angle during its propagation in the sampling pipeline. Since the light wave will deflect when it enters different media, it can be determined that there is no medium different from the drug sample in the sampling pipeline, such as air bubbles. Therefore, when the refractive index is less than the refractive index threshold, it can be determined that there are no air bubbles in the sampling pipeline.

[0124] When no abnormal event is triggered, the refractive index can be transmitted to the display device and displayed. The user can then determine the operating status of the wet etching equipment by the refractive index displayed on the display device. The user can also determine whether there are air bubbles in the sampling pipeline based on the displayed refractive index, that is, determine whether there are air bubbles in the sampling pipeline manually.

[0125] In this embodiment, by obtaining the refractive index of light waves in the sampling pipeline, it is possible to detect whether there are bubbles in the sampling pipeline based on the refractive index. Bubbles can affect the accuracy of the concentration measurement device in detecting the concentration of the drug sample. Therefore, if it is determined that there are bubbles in the sampling pipeline based on the refractive index, it is determined that the concentration of the drug sample detected by the concentration measurement device is affected, causing the actual concentration of the drug sample to be inconsistent with the concentration detected by the concentration measurement device. This triggers an abnormal event, thus realizing the detection of abnormal events that affect the concentration of the drug.

[0126] See Figure 6 , Figure 6 A flowchart illustrating the steps of another abnormal event detection method according to an embodiment of this application is shown. This method is applied to a concentration measuring device, which can be used to detect the concentration of a drug sample collected by a sampling pipeline. The concentration measuring device also includes an acoustic wave module for emitting acoustic waves in the sampling pipeline and collecting the feedback signal of the acoustic waves. The concentration measuring device is communicatively connected to a display device.

[0127] Specifically, the method may include the following steps:

[0128] Step 601: Obtain the refractive index of the light wave in the sampling pipeline.

[0129] Step 602: Compare the refractive index with a preset refractive index threshold.

[0130] Step 603: When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it is determined that there are air bubbles in the sampling pipeline.

[0131] The feedback signal can be the sound wave signal reflected back when a sound wave encounters an object, and the signal threshold can be the threshold for determining whether a bubble exists based on the feedback signal. The signal threshold can be user-defined or obtained based on experience.

[0132] After obtaining the refractive index, an acoustic wave module can be used to emit acoustic waves in the sampling pipeline and collect the acoustic wave signal reflected back in the sampling pipeline to obtain a feedback signal. The feedback signal can then be compared with a preset signal threshold. When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it can be determined that there are air bubbles in the sampling pipeline.

[0133] In practical applications, when the refractive index is greater than or equal to the refractive index threshold, it can be determined that there is a medium in the sampling pipeline that is different from the drug sample, such as bubbles or other drug components. When the feedback signal is greater than or equal to the signal threshold, it can be determined that there is an object in the sampling pipeline that is different from the drug sample, such as bubbles or other floating objects suspended in the drug. When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the signal threshold, it can be determined that there are bubbles in the sampling pipeline.

[0134] In one embodiment of this application, the following steps may also be included:

[0135] When the refractive index is less than the refractive index threshold, or the feedback signal is less than the signal threshold, a first probability is determined based on the refractive index, and a second probability is determined based on the feedback signal. The first and second probabilities are weighted and calculated to generate a third probability. When the third probability is greater than or equal to the preset first probability threshold, it is determined that there is an air bubble in the sampling pipeline.

[0136] The first probability can be the probability of finding an air bubble in the sampling tube based on the refractive index; the second probability can be the probability of finding an air bubble in the sampling tube based on the feedback signal; the third probability can be the probability obtained by weighting the first and second probabilities; and the first probability threshold can be the threshold for determining the probability of finding an air bubble. The first probability threshold can be user-defined or obtained based on experience.

[0137] When the refractive index is less than the refractive index threshold, or the feedback signal is less than the signal threshold, the probability of the presence of bubbles in the sampling pipeline can be evaluated based on the refractive index to obtain a first probability, and the probability of the presence of bubbles in the sampling pipeline can be evaluated based on the feedback signal to obtain a second probability. Then, the first probability and the second probability can be weighted to obtain a third probability, and the third probability can be compared with the first probability threshold. When the third probability is greater than or equal to the first probability threshold, it is determined that there are bubbles in the sampling pipeline.

[0138] It is important to understand that since there are certain errors in determining the refractive index of light waves in the sampling pipeline and the feedback signal of sound waves in the sampling pipeline, determining the presence of air bubbles in the sampling pipeline solely through the refractive index or the feedback signal will reduce the accuracy of air bubble detection. However, by combining the refractive index and the feedback signal to determine the presence of air bubbles in the sampling pipeline, the accuracy of air bubble detection can be improved.

[0139] For example, when the refractive index is less than the refractive index threshold and the feedback signal is greater than the signal threshold, the probability of the presence of bubbles in the sampling pipeline can be determined to be 94% based on the refractive index, i.e., the first probability is 94%. The probability of the presence of bubbles in the sampling pipeline can be determined to be 98% based on the feedback signal rate, i.e., the second probability is 98%. The first probability threshold can be 95%. The first probability and the second probability can be weighted to obtain the third probability of 96%. Since 96% is greater than 95%, it can be determined that the third probability is greater than the first probability threshold, indicating that bubbles exist in the sampling pipeline.

[0140] In practical applications, when performing weighted calculations on the first probability and the second probability, the weight value corresponding to the first probability and the weight value of the second probability can be determined. The weight value corresponding to the first probability and the weight value of the second probability can be predetermined values ​​or user-defined values. Thus, the first probability and the second probability can be weighted and calculated based on the weight value corresponding to the first probability and the weight value of the second probability.

[0141] For example, when the refractive index is greater than the refractive index threshold and the feedback signal is less than the signal threshold, the probability of a bubble in the sampling pipeline can be determined to be 98% based on the refractive index, i.e., the first probability is 98%, and the weight value corresponding to the first probability can be 0.8; the probability of a bubble in the sampling pipeline can be determined to be 90% based on the feedback signal rate, i.e., the second probability is 90%, and the weight value corresponding to the second probability can be 0.2. The first probability threshold can be 95%, so the first probability and the second probability can be weighted to obtain a third probability of 96.4%. Since 96% is greater than 95%, it can be determined that the third probability is greater than the first probability threshold, indicating that a bubble exists in the sampling pipeline.

[0142] In one embodiment of this application, the third probability can be generated in the following manner:

[0143] Obtain the fluid pressure in the sampling pipeline, determine the fourth probability based on the fluid pressure, and generate the third probability by weighting the first, second, and fourth probabilities.

[0144] Among them, fluid pressure can be the pressure between the liquid drugs in the sampling pipeline, that is, the hydraulic pressure in the sampling pipeline, and the fourth probability can be the probability of determining the presence of air bubbles in the sampling pipeline based on the fluid pressure.

[0145] After determining the first probability and the second probability, the fluid pressure in the sampling pipeline can be obtained.

[0146] In practical applications, concentration measurement equipment may include a hydraulic measurement module for measuring the liquid pressure in the sampling pipeline. The hydraulic measurement module can then be used to measure the hydraulic pressure in the sampling pipeline to obtain the fluid pressure of the sampling pipeline.

[0147] After obtaining the fluid pressure in the sampling pipeline, the probability of the presence of air bubbles in the sampling pipeline can be determined based on the fluid pressure, thus obtaining the fourth probability. Then, the first, second, and fourth probabilities can be weighted and calculated to obtain the third probability.

[0148] In one embodiment of this application, the following steps may also be included:

[0149] When the third probability is less than the first probability threshold and greater than or equal to the preset second probability threshold, bubble risk information is generated to indicate the risk of bubbles in the sampling pipeline.

[0150] The second probability threshold can be used to determine the risk of air bubbles in the sampling pipeline. The air bubble risk refers to the risk of air bubbles present in the sampling pipeline. The second probability threshold can be lower than the first probability threshold. Air bubble risk information can be used to indicate the presence of air bubbles in the sampling pipeline.

[0151] When the third probability is less than the first probability threshold, the third probability can be compared with the second probability threshold. When it is greater than or equal to the second probability threshold, although it is not determined that there are bubbles in the sampling pipeline, it can be determined that the risk of bubbles in the sampling pipeline is relatively high. Therefore, bubble risk information can be generated to indicate the risk of bubbles in the sampling pipeline.

[0152] In practical applications, the generated bubble risk information can be transmitted to a display device, which can then display the bubble risk information to alert the user to the risk of bubbles in the sampling pipeline at the current moment.

[0153] Step 604: When air bubbles are present in the sampling pipeline, an abnormal event is triggered.

[0154] Step 605: When air bubbles are present in the sampling pipeline, determine multiple pre-set refractive index ranges and the concentration difference value corresponding to each refractive index range.

[0155] The refractive index range may include at least one reference refractive index. The refractive index range may be a range of refractive indices determined by the reference refractive index. The reference refractive index may be a refractive index determined based on the trend of concentration deviation value. The concentration difference in the range may be determined based on the concentration deviation value corresponding to each reference refractive index. The concentration deviation value may be the difference between the detected concentration corresponding to the reference refractive index and the actual concentration.

[0156] When air bubbles are present in the sampling pipeline, multiple pre-defined refractive index ranges can be determined, as well as the concentration difference value corresponding to each refractive index range.

[0157] In one embodiment of this application, step 605 may include steps 6051 to 6053:

[0158] Step 6051: Obtain at least one reference refractive index and obtain the concentration deviation value corresponding to each reference refractive index.

[0159] When air bubbles are present in the sampling pipeline, multiple refractive indices can be predetermined, and the concentration deviation value corresponding to each refractive index can be determined experimentally. That is, for each refractive index, the difference between the detected concentration and the actual concentration can be determined. Then, the trend of concentration deviation value can be determined based on the concentration deviation value corresponding to each refractive index, and multiple reference refractive indices can be determined based on the trend of concentration deviation value, as well as the concentration deviation value corresponding to each reference refractive index.

[0160] In practical applications, a fixed change value for the concentration deviation can be defined, and based on the fixed change value and the trend of the concentration deviation, the refractive index corresponding to each increase of the fixed change value for the concentration deviation can be determined, which is the reference refractive index.

[0161] For example, a fixed change value of 0.1% can be determined. Then, based on this fixed change value and the trend of the concentration deviation value, the refractive index corresponding to each 0.1% increase in the concentration deviation value can be determined; this is the reference refractive index. For instance, the refractive index corresponding to a concentration deviation value of 0% can be determined, the refractive index corresponding to a concentration deviation value of 0.1% can be determined, the refractive index corresponding to a concentration deviation value of 0.2% can be determined, and so on, until the refractive index corresponding to a concentration deviation value of 1%, and so on.

[0162] Step 6052: Determine at least one refractive index range based on each reference refractive index.

[0163] After obtaining the reference refractive index, the starting and ending values ​​of each pair of adjacent reference refractive indices can be determined in ascending order to obtain at least one refractive index range.

[0164] For example, the refractive index corresponding to a concentration deviation of 0.1% can be 1%, the refractive index corresponding to a concentration deviation of 0.2% can be 2%, and the refractive index corresponding to a concentration deviation of 0.3% can be 5%. Then, in ascending order, the starting value of the first refractive index interval can be determined as 1% and the ending value as 2%, and the starting value of the second refractive index interval can be determined as 2% and the ending value as 5%, thus obtaining the refractive index intervals [1%, 2%] and [2%, 5%].

[0165] Step 6053: Determine the interval concentration difference value corresponding to each refractive index interval based on the concentration deviation value corresponding to each reference refractive index.

[0166] After obtaining at least one refractive index range, the concentration difference value corresponding to each refractive index range can be determined based on the concentration deviation value corresponding to each reference refractive index.

[0167] In practical applications, for each refractive index range, the average value of all concentration deviations in the range can be determined based on the concentration deviation value corresponding to each reference refractive index in the range. This average value is the range concentration difference corresponding to the range. Alternatively, the median value among all concentration deviations can be determined as the range concentration difference corresponding to the range.

[0168] Step 606: Determine the target refractive index range from multiple refractive index ranges.

[0169] The target refractive index range can be the refractive index range in which the light wave is located in the sampling pipeline at the current moment.

[0170] After obtaining multiple refractive index ranges and the corresponding concentration difference between each refractive index range, the target refractive index range can be determined from among the multiple refractive index ranges based on the refractive index of the light wave in the sampling pipeline.

[0171] For example, multiple refractive index ranges may include refractive index ranges [1%, 2%] and refractive index ranges [2%, 5%]. If the refractive index of the light wave in the sampling pipeline at the current moment is 3%, then it can be determined that 3% of the refractive index is in the refractive index range [2%, 5%]. That is, the refractive index range [2%, 5%] can be the target refractive index range.

[0172] Step 607: Determine the measurement compensation value based on the concentration difference between the target refractive index ranges, and compensate the detected concentration based on the measurement compensation value.

[0173] After obtaining the concentration difference value corresponding to the target refractive index range, a measurement compensation value can be determined based on the concentration difference value corresponding to the target refractive index range, so as to compensate the detected concentration based on the measurement compensation value.

[0174] In practical applications, the concentration difference between the target refractive index ranges can be determined as the measurement compensation value.

[0175] It is important to understand that when an abnormal event is triggered, in order to reduce the impact of air bubbles in the wet etching equipment on the concentration of the detection solution sample and to improve the accuracy of the detection concentration, it is necessary to pause the operation of the wet etching equipment to remove the air bubbles. However, pausing the operation of the wet etching equipment wastes more time on removing air bubbles, thereby reducing the efficiency and cycle time of the wet etching process.

[0176] Based on this, by determining a measurement compensation value for compensating the detection concentration and using this measurement compensation value to compensate the detection concentration, the difference between the compensated detection concentration and the actual concentration is less than a preset concentration threshold. This reduces the impact of air bubbles in the wet etching equipment on the concentration of the detection solution sample, improves the accuracy of the detection solution sample concentration, and reduces the time spent removing air bubbles from the wet etching equipment by pausing its operation, thus reducing wasted time and improving the efficiency and cycle time of the wet etching process.

[0177] In this embodiment, the refractive index of light waves in the sampling pipeline is obtained and compared with a preset refractive index threshold. When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to a preset signal threshold, it is determined that there are air bubbles in the sampling pipeline. This allows for the detection of air bubbles in the sampling pipeline based on the refractive index. Air bubbles can affect the accuracy of the concentration measurement device in detecting the concentration of the drug sample. Therefore, when air bubbles are present in the sampling pipeline, it is determined that the concentration of the drug sample detected by the concentration measurement device is affected, causing the actual concentration of the drug sample to be inconsistent with the concentration detected by the concentration measurement device. This triggers an abnormal event, thus realizing the detection of abnormal events that affect the concentration of the drug sample. Furthermore, when air bubbles are present in the sampling pipeline, multiple preset refractive index intervals are determined, and the interval concentration difference corresponding to each refractive index interval is determined. From the multiple refractive index intervals, the target refractive index interval is determined. Based on the interval concentration difference corresponding to the target refractive index interval, a measurement compensation value is determined to compensate for the detected concentration.

[0178] See Figure 7 , Figure 7 The diagram illustrates a structural schematic of an abnormal event detection device according to an embodiment of this application. This device is applied to a concentration measuring device used to detect the concentration of a drug sample collected by a sampling pipeline. Specifically, it may include the following modules:

[0179] The acquisition module 701 is used to acquire the refractive index of light waves in the sampling pipeline;

[0180] The determination module 702 is used to determine the triggering of an abnormal event when it is determined that there are air bubbles in the sampling pipeline based on the refractive index; wherein, the abnormal event is an event in which the actual concentration of the drug sample does not match the detection concentration obtained by the concentration measuring device from detecting the drug sample.

[0181] In one implementation, the acquisition module 701 described above can also be used for:

[0182] Light waves are output in the sampling pipeline;

[0183] The angle of reflection of the light wave in the sampling pipeline is collected;

[0184] The refractive index of light waves is determined based on the reflection angle.

[0185] In one implementation, the determining module 702 described above can also be used for:

[0186] The refractive index is compared with a pre-set refractive index threshold;

[0187] When the refractive index is greater than or equal to the refractive index threshold, it is determined that there are air bubbles in the sampling pipeline;

[0188] An abnormal event is triggered when air bubbles are present in the sampling pipeline.

[0189] In one implementation, the concentration detection device is further used to emit sound waves in the sampling pipeline and collect the feedback signal of the sound waves. The determination module 702 described above can also be used for:

[0190] When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it is determined that there are air bubbles in the sampling pipeline.

[0191] In one implementation, the determining module 702 described above can also be used for:

[0192] When the refractive index is less than the refractive index threshold, or the feedback signal is less than the signal threshold, a first probability is determined based on the refractive index, and a second probability is determined based on the feedback signal.

[0193] The first and second probabilities are weighted and calculated to generate the third probability;

[0194] When the third probability is greater than or equal to the preset first probability threshold, it is determined that there is an air bubble in the sampling pipeline.

[0195] In one implementation, the determining module 702 described above can also be used for:

[0196] Obtain the fluid pressure in the sampling pipeline;

[0197] Determine the fourth probability based on the fluid pressure;

[0198] The first, second, and fourth probabilities are weighted and calculated to generate the third probability.

[0199] In one implementation, the device may further include the following modules:

[0200] The generation module is used to generate bubble risk information when the third probability is less than the first probability threshold and greater than or equal to the preset second probability threshold, so as to indicate the risk of bubbles in the sampling pipeline based on the bubble risk information; wherein the second probability threshold is less than the first probability threshold.

[0201] In one implementation, the determining module 702 described above can also be used for:

[0202] When air bubbles are present in the sampling pipeline, a measurement compensation value is determined based on the refractive index, and the detection concentration is compensated based on the measurement compensation value.

[0203] In one implementation, the determining module 702 described above can also be used for:

[0204] Multiple pre-defined refractive index ranges are determined, as well as the concentration difference value corresponding to each refractive index range; wherein, the refractive index range includes at least one reference refractive index, and the concentration difference value is determined based on the concentration deviation value corresponding to each reference refractive index, and the concentration deviation value is the difference between the detected concentration corresponding to the reference refractive index and the actual concentration.

[0205] Determine the target refractive index range from multiple refractive index ranges;

[0206] The measurement compensation value is determined based on the concentration difference between the target refractive index ranges.

[0207] In one implementation, the determining module 702 described above can also be used for:

[0208] Obtain at least one reference refractive index, and obtain the concentration deviation value corresponding to each reference refractive index;

[0209] Determine at least one refractive index range based on each reference refractive index;

[0210] Based on the concentration deviation value corresponding to each reference refractive index, determine the interval concentration difference value corresponding to each refractive index interval.

[0211] In one implementation, the concentration measuring device is communicatively connected to the display device, and the device may further include the following modules:

[0212] The notification module is used to generate an exception notification message and send it to the display device when an exception event is determined to be triggered.

[0213] In one implementation, the determining module 702 described above can also be used for:

[0214] If it is determined that there are no air bubbles in the sampling pipeline based on the refractive index, it is determined that no abnormal event has been triggered, and the refractive index is transmitted to the display device for display.

[0215] This application also provides an abnormal event detection device, which can be used to implement the various steps in the foregoing method embodiments. For example, the device may be a concentration measuring device as described in the foregoing embodiments, or it may be a unit or module in a related device such as a concentration measuring device that can implement the functions related to the foregoing steps. This application does not limit the scope of the application.

[0216] In this embodiment, by obtaining the refractive index of light waves in the sampling pipeline, it is possible to detect whether there are bubbles in the sampling pipeline based on the refractive index. Bubbles can affect the accuracy of the concentration measurement device in detecting the concentration of the drug sample. Therefore, if it is determined that there are bubbles in the sampling pipeline based on the refractive index, it is determined that the concentration of the drug sample detected by the concentration measurement device is affected, causing the actual concentration of the drug sample to be inconsistent with the concentration detected by the concentration measurement device. This triggers an abnormal event, thus realizing the detection of abnormal events that affect the concentration of the drug.

[0217] It should be noted that the information interaction and execution process between the above-mentioned devices are based on the same concept as the method embodiments of this application. For details on their specific functions and technical effects, please refer to the method embodiments section, which will not be repeated here.

[0218] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0219] See Figure 8 , Figure 8 This application provides a structural block diagram of a terminal device according to an embodiment of the present application. Figure 8As shown, this embodiment provides a terminal device 81, which includes at least one processor 811, a memory 812, and a computer program 8121 stored in the memory 812 and executable on the at least one processor 811. When the processor 811 executes the computer program 8121, it implements the steps in any of the above-described method embodiments. In one example, the terminal device 81 may be a concentration measurement device described in the foregoing method embodiments.

[0220] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can implement the steps in any of the above method embodiments.

[0221] This application provides a computer program product that, when run on a terminal device, enables the terminal device to implement the steps described in the various method embodiments.

[0222] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the methods of the above embodiments of this application can be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or certain intermediate forms. The computer-readable medium can include at least: any entity or device capable of carrying computer program code to a terminal device, a recording medium, a computer memory, a read-only memory (ROM), a random access memory (RAM), an electrical carrier signal, a telecommunication signal, and a software distribution medium.

[0223] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A method for detecting abnormal events, characterized in that, The method is applied to a concentration measuring device, which is used to detect the concentration of a drug solution sample collected by a sampling tube. The method includes: Obtain the refractive index of the light wave in the sampling pipeline; If the presence of air bubbles in the sampling pipeline is determined based on the refractive index, an abnormal event is triggered; wherein, the abnormal event is an event in which the actual concentration of the drug sample does not match the detected concentration obtained by the concentration measuring device from detecting the drug sample; The method further includes: When air bubbles are present in the sampling pipeline, a measurement compensation value is determined based on the refractive index, and the detection concentration is compensated based on the measurement compensation value; wherein, the measurement compensation value is added to the detection concentration to obtain the compensated detection concentration; The step of determining the triggering of an abnormal event when it is determined that air bubbles are present in the sampling pipeline based on the refractive index includes: The refractive index is compared with a preset refractive index threshold; When the refractive index is greater than or equal to the refractive index threshold, it is determined that there are air bubbles in the sampling pipeline; When air bubbles are present in the sampling pipeline, an abnormal event is determined to be triggered. The concentration measuring device is also used to emit sound waves in the sampling pipeline and collect the feedback signal of the sound waves. The step of determining the presence of air bubbles in the sampling pipeline when the refractive index is greater than or equal to the refractive index threshold includes: When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it is determined that there are air bubbles in the sampling pipeline. The method further includes: When the refractive index is less than the refractive index threshold, or when the feedback signal is less than the signal threshold, a first probability is determined based on the refractive index, and a second probability is determined based on the feedback signal; A third probability is generated by weighting the first probability and the second probability. When the third probability is greater than or equal to the preset first probability threshold, it is determined that there is an air bubble in the sampling pipeline; The step of weighting the first probability and the second probability to generate the third probability includes: Obtain the fluid pressure in the sampling pipeline; Determine the fourth probability based on the fluid pressure; A third probability is generated by weighting the first probability, the second probability, and the fourth probability. The method further includes: When the third probability is less than the first probability threshold and greater than or equal to the preset second probability threshold, bubble risk information is generated to indicate the risk of bubbles in the sampling pipeline; wherein, the second probability threshold is less than the first probability threshold.

2. The method for detecting abnormal events as described in claim 1, characterized in that, The acquisition of the refractive index of the light wave in the sampling pipeline includes: Light waves are output in the sampling pipeline; The reflection angle of the light wave in the sampling pipeline is collected; The refractive index of the light wave is determined based on the reflection angle.

3. The method for detecting abnormal events as described in claim 1 or 2, characterized in that, Determining the measurement compensation value based on the refractive index includes: Multiple pre-defined refractive index ranges are determined, and the concentration difference value corresponding to each refractive index range is determined; wherein, the refractive index range includes at least one reference refractive index, and the concentration difference value is determined based on the concentration deviation value corresponding to each reference refractive index, and the concentration deviation value is the difference between the detected concentration corresponding to the reference refractive index and the actual concentration; Determine the target refractive index range in which the refractive index is located from the plurality of refractive index ranges; The measurement compensation value is determined based on the concentration difference between the target refractive index ranges.

4. The method for detecting abnormal events as described in claim 3, characterized in that, The step of determining a plurality of pre-defined refractive index intervals and determining the interval concentration difference value corresponding to each of the refractive index intervals includes: Obtain at least one reference refractive index, and obtain the concentration deviation value corresponding to each of the reference refractive indices; Based on each of the aforementioned reference refractive indices, at least one refractive index range is determined; Based on the concentration deviation value corresponding to each of the reference refractive indices, the interval concentration difference value corresponding to each of the refractive index intervals is determined.

5. The method for detecting abnormal events as described in claim 1, 2, or 4, characterized in that, The concentration measuring device is communicatively connected to the display device, and the method further includes: When the abnormal event is determined to be triggered, an abnormal prompt message is generated and sent to the display device.

6. The method for detecting abnormal events as described in claim 5, characterized in that, The method further includes: If it is determined that there are no air bubbles in the sampling pipeline based on the refractive index, it is determined that no abnormal event has been triggered; The refractive index is transmitted to the display device so that the refractive index can be displayed by the display device.

7. A device for detecting abnormal events, characterized in that, The device is applied to a concentration measuring equipment, which is used to detect the concentration of a drug solution sample collected by a sampling tube. The device includes: The acquisition module is used to acquire the refractive index of light waves in the sampling pipeline; The determination module is used to determine an abnormal event when it is determined that air bubbles are present in the sampling pipeline based on the refractive index; wherein the abnormal event is an event in which the actual concentration of the drug sample does not match the detected concentration obtained by the concentration measuring device from detecting the drug sample; The determining module is further configured to: When air bubbles are present in the sampling pipeline, a measurement compensation value is determined based on the refractive index, and the detection concentration is compensated based on the measurement compensation value; wherein, the measurement compensation value is added to the detection concentration to obtain the compensated detection concentration; The step of determining the triggering of an abnormal event when it is determined that air bubbles are present in the sampling pipeline based on the refractive index includes: The refractive index is compared with a preset refractive index threshold; When the refractive index is greater than or equal to the refractive index threshold, it is determined that there are air bubbles in the sampling pipeline; When air bubbles are present in the sampling pipeline, the abnormal event is determined to be triggered. The concentration measuring device is also used to emit sound waves in the sampling pipeline and collect the feedback signal of the sound waves. The step of determining the presence of air bubbles in the sampling pipeline when the refractive index is greater than or equal to the refractive index threshold includes: When the refractive index is greater than or equal to the refractive index threshold and the feedback signal is greater than or equal to the preset signal threshold, it is determined that there are air bubbles in the sampling pipeline. The determining module is also used for: When the refractive index is less than the refractive index threshold, or when the feedback signal is less than the signal threshold, a first probability is determined based on the refractive index, and a second probability is determined based on the feedback signal; A third probability is generated by weighting the first probability and the second probability. When the third probability is greater than or equal to the preset first probability threshold, it is determined that there is an air bubble in the sampling pipeline; The step of weighting the first probability and the second probability to generate the third probability includes: Obtain the fluid pressure in the sampling pipeline; Determine the fourth probability based on the fluid pressure; A third probability is generated by weighting the first probability, the second probability, and the fourth probability. The device also includes the following modules: The generation module is used to generate bubble risk information when the third probability is less than the first probability threshold and greater than or equal to a preset second probability threshold, so as to indicate the risk of bubbles in the sampling pipeline based on the bubble risk information; wherein the second probability threshold is less than the first probability threshold.

8. A terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the method as described in any one of claims 1 to 6.

9. A computer program product, comprising a computer program, characterized in that, When the computer program is run on a computer, it causes the computer to perform the method as described in any one of claims 1 to 6.

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