Vacuum reconstruction method of proton heavy ion accelerator and vacuum system

Abstract

The invention provides a vacuum reconstruction method of a proton heavy ion accelerator. The vacuum reconstruction method comprises the following steps: S10, monitoring a real-time air pressure value of a vacuum chamber; s20, a medium-low vacuum pump is started, the real-time pumping speed is monitored, and whether the real-time air pressure value conforms to the first time period air pressure curve or not is judged; if not, S30, sending out a first alarm; s40, when the air pressure value drops to the first preset air pressure value, the high vacuum pump is started, the real-time pumping speed of the high vacuum pump is monitored, and whether the real-time air pressure value conforms to the air pressure curve in the second time period or not is judged; if not, S50, sending out a second alarm; if yes, S60, judging whether the real-time air pressure value always conforms to the air pressure curve in the third time period or not during the period of reaching the vacuum balance state; and S70, sending out a third alarm if the judgment result is no. The vacuum reconstruction method can monitor the vacuum reconstruction process and give an alarm when problems occur. The invention also provides a vacuum system for realizing the vacuum reconstruction method.

Description

Technical Field

[0001] The present invention relates to the field of proton and heavy ion accelerators, and particularly to a method for vacuum reconstruction of a proton and heavy ion accelerator, and a vacuum system for implementing the vacuum reconstruction method. Background Art

[0002] After maintenance and repair, the vacuum system of a proton and heavy ion therapy accelerator needs to perform long-term vacuum reconstruction on the vacuum chamber (such as the high-energy transmission section of the accelerator). The vacuum reconstruction mainly relies on a series of medium and low vacuum pumps and high vacuum pumps. In the current vacuum reconstruction process, the medium and low vacuum pumps and the high vacuum pumps are turned on simultaneously. Due to the lack of monitoring, when any one of the medium and low vacuum pumps and the high vacuum pumps fails or there is a leak, the personnel cannot quickly discover the problem and can only find that the vacuum reconstruction fails after a long time, wasting a lot of time. Summary of the Invention

[0003] The purpose of the present invention is to provide a method for vacuum reconstruction of a proton and heavy ion accelerator, which can monitor the vacuum reconstruction process and issue an alarm when a problem occurs, so as to avoid wasting a lot of time when the vacuum reconstruction fails.

[0004] Another purpose of the present invention is to provide a vacuum system for a proton and heavy ion accelerator, which can monitor the vacuum reconstruction process and issue an alarm when a problem occurs, so as to avoid wasting a lot of time when the vacuum reconstruction fails.

[0005] The present invention provides a method for vacuum reconstruction of a proton heavy ion accelerator. The proton heavy ion accelerator includes a vacuum chamber, and a medium-low vacuum pump and a high vacuum pump that are connected in series and communicate with the vacuum chamber. The vacuum reconstruction method includes S10: monitoring the real-time air pressure value of the vacuum chamber; S20: turning on the medium-low vacuum pump and keeping the high vacuum pump closed. Before the real-time air pressure value of the vacuum chamber drops to a first preset air pressure value, continuously monitor the real-time pumping speed of the medium-low vacuum pump to generate a first-period air pressure curve, and determine whether the real-time air pressure value of the vacuum chamber always conforms to the first-period air pressure curve; if the judgment result is no, then enter S30: issue a first alarm; if the judgment result is yes, then enter S40: turn on the high vacuum pump when the air pressure value of the vacuum chamber drops to the first preset air pressure value, and continuously monitor the real-time pumping speed of the high vacuum pump. During the period from when the high vacuum pump reaches full speed to when the air pressure value of the vacuum chamber drops to a second preset air pressure value, generate a second-period air pressure curve according to the real-time pumping speed of the high vacuum pump, and determine whether the real-time air pressure value of the vacuum chamber always conforms to the second-period air pressure curve; if the judgment result is no, then enter S50: issue a second alarm; if the judgment result is yes, then enter S60: during the period when the air pressure value of the vacuum chamber reaches the vacuum equilibrium state from the second preset air pressure value, determine whether the real-time air pressure value of the vacuum chamber always conforms to a third-period air pressure curve; if the judgment result is no, then enter S70: issue a third alarm.

[0006] The method for vacuum reconstruction of the proton heavy ion accelerator provided by the present invention controls the startup of the medium-low vacuum pump and the high vacuum pump in different periods. At the same time, it monitors the real-time air pressure value of the vacuum chamber and the real-time pumping speeds of the medium-low vacuum pump and the high vacuum pump in each period, and judges whether there is an abnormality in the state of vacuum reconstruction by means of the period air pressure curve, and issues an alarm in time when an abnormal state occurs, so as to avoid wasting a lot of time when the vacuum reconstruction fails.

[0007] In another schematic embodiment of the method for vacuum reconstruction of the proton heavy ion accelerator, the first-period air pressure curve satisfies the following formula relationship:

[0008] ;

[0009] Wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the medium-low vacuum pump, represents the real-time air pressure value of the vacuum chamber, represents the air pressure value of the vacuum chamber when the medium-low vacuum pump starts.

[0010] In still another schematic embodiment of the method for vacuum reconstruction of the proton heavy ion accelerator, the second-period air pressure curve satisfies the following formula relationship:

[0011] ;

[0012] wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the high vacuum pump, represents the real-time air pressure value of the vacuum chamber, represents the air pressure value of the vacuum chamber when the high vacuum pump starts.

[0013] In still another exemplary embodiment of the vacuum reconstruction method for a proton and heavy ion accelerator, S40 further includes:

[0014] During the period when the air pressure value of the vacuum chamber drops from the first preset air pressure value to the second preset air pressure value, after the high vacuum pump is turned on, monitor the pumping speed of the high vacuum pump, and determine whether the pumping speed of the high vacuum pump reaches the full speed within a preset period of time after the high vacuum pump starts. If the determination result is no, then enter S50. By monitoring the real-time pumping speed of the high vacuum pump and the real-time air pressure value of the vacuum chamber simultaneously in this way, abnormal states in vacuum reconstruction can be detected earlier, saving more time.

[0015] In still another exemplary embodiment of the vacuum reconstruction method for a proton and heavy ion accelerator, in S30, turn off the medium and low vacuum pumps after the first alarm is issued; in S50, turn off the high vacuum pump and the medium and low vacuum pumps in sequence after the second alarm is issued; in S70, turn off the high vacuum pump and the medium and low vacuum pumps in sequence after the third alarm is issued. By doing so, vacuum reconstruction can be quickly aborted when an abnormal state occurs in vacuum reconstruction, saving energy consumption.

[0016] The present invention provides a vacuum system for a proton heavy ion accelerator, and the proton heavy ion accelerator includes a vacuum chamber. The vacuum system includes a medium and low vacuum pump, a high vacuum pump, a gas pressure measuring device, and a processor unit. The high vacuum pump is connected in series after the medium and low vacuum pump and can communicate with the vacuum chamber. The gas pressure measuring device can be arranged in the vacuum chamber to measure the real-time gas pressure value of the vacuum chamber. The processor unit is signal-connected to the gas pressure measuring device, the medium and low vacuum pump, and the high vacuum pump. The processor unit is configured to be able to: monitor the real-time gas pressure value of the vacuum chamber by using the gas pressure measuring device. Control the medium and low vacuum pump to start and keep the high vacuum pump closed according to a start instruction. Before the real-time gas pressure value of the vacuum chamber drops to a first preset gas pressure value, continuously monitor the real-time pumping speed of the medium and low vacuum pump to generate a first period gas pressure curve, and judge whether the real-time gas pressure value of the vacuum chamber always conforms to the first period gas pressure curve. If the judgment result is negative, generate a first alarm signal. If the judgment result is positive, when the gas pressure value of the vacuum chamber drops to the first preset gas pressure value, control the high vacuum pump to start, and continuously monitor the real-time pumping speed of the high vacuum pump. During the period from when the high vacuum pump reaches full speed to when the gas pressure value of the vacuum chamber drops to a second preset gas pressure value, generate a second period gas pressure curve according to the real-time pumping speed of the high vacuum pump, and judge whether the real-time gas pressure value of the vacuum chamber always conforms to the second period gas pressure curve. If the judgment result is negative, generate a second alarm signal. If the judgment result is positive, during the period from when the gas pressure value of the vacuum chamber reaches the second preset gas pressure value to when it reaches the vacuum equilibrium state, judge whether the real-time gas pressure value of the vacuum chamber always conforms to a third period gas pressure curve. If the judgment result is negative, generate a third alarm signal.

[0017] In another schematic embodiment of the vacuum system of the proton heavy ion accelerator, the first period gas pressure curve satisfies the following formula relationship:

[0018] ;

[0019] Wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the medium and low vacuum pump, represents the real-time gas pressure value of the vacuum chamber, represents the gas pressure value of the vacuum chamber when the medium and low vacuum pump starts.

[0020] In still another schematic embodiment of the vacuum system of the proton heavy ion accelerator, the second period gas pressure curve satisfies the following formula relationship:

[0021] ;

[0022] Wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated represents the real-time pumping speed of the high vacuum pump represents the real-time air pressure value of the vacuum chamber represents the air pressure value of the vacuum chamber when the high vacuum pump is started

[0023] In still another exemplary embodiment of the vacuum system of the proton heavy ion accelerator, the processor unit is further configured to monitor the pumping speed of the high vacuum pump after the high vacuum pump is turned on, and determine whether the pumping speed of the high vacuum pump reaches the full speed within a preset period of time after the high vacuum pump is started. If the determination result is negative, a second alarm signal is generated. By simultaneously monitoring the real-time pumping speed of the high vacuum pump and the real-time air pressure value of the vacuum chamber, an abnormal state of vacuum reconstruction can be detected earlier, saving more time

[0024] In still another exemplary embodiment of the vacuum system of the proton heavy ion accelerator, the processor unit is further configured to control the medium and low vacuum pumps to close after generating the first alarm signal, control the high vacuum pump and the medium and low vacuum pumps to close in sequence after generating the second alarm signal, and control the high vacuum pump and the medium and low vacuum pumps to close in sequence after generating the third alarm signal. By doing so, the vacuum reconstruction can be quickly aborted when an abnormal state occurs in the vacuum reconstruction, saving energy consumption

[0025] In still another exemplary embodiment of the vacuum system of the proton heavy ion accelerator, the medium and low vacuum pumps and the high vacuum pump respectively have RS-485 communication interfaces, and the processor unit is respectively signal-connected to the medium and low vacuum pumps and the high vacuum pump through the RS-485 communication interfaces to obtain the pumping speeds of the medium and low vacuum pumps and the high vacuum pump, and control the opening and closing of the medium and low vacuum pumps and the high vacuum pump

[0026] In still another exemplary embodiment of the vacuum system of the proton heavy ion accelerator, the vacuum system further includes an alarm device, which can generate different alarm messages in the form of sound, light or display of images. The processor unit is signal-connected to the alarm device, and the processor unit is configured to control the alarm device to generate different alarm messages when generating the first alarm signal, the second alarm signal and the third alarm signal. By doing so, an alarm signal can be directly generated, which is more convenient to use BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The following drawings only schematically illustrate and explain the present invention, and do not limit the scope of the present invention

[0028] Figure 1 is a schematic flow chart of an exemplary embodiment of the vacuum reconstruction method for a proton heavy ion accelerator

[0029] Figure 2 is a schematic diagram of an embodiment of the vacuum reconstruction method for a proton heavy ion accelerator

[0030] Figure 3 It is a curve showing the variation of the real-time air pressure value in the vacuum chamber with time during the vacuum reconstruction process.

[0031] Label description

[0032] 10 Medium and low vacuum pumps

[0033] 20 High vacuum pump

[0034] 30 Air pressure measuring device

[0035] 40 Processor unit

[0036] 50 Vacuum chamber Detailed implementation manners

[0037] For a clearer understanding of the technical features, objectives, and effects of the invention, the specific implementation manners of the invention will now be described with reference to the accompanying drawings. In each figure, the same reference numerals denote components having the same or similar structures but the same functions.

[0038] In this document, "schematic" means "serving as an example, instance, or illustration", and any illustration or implementation manner described as "schematic" in this document should not be construed as a more preferred or more advantageous technical solution.

[0039] In this document, "first", "second", etc. do not indicate their importance or order, etc., but are only used to indicate their differences from each other for the purpose of document description.

[0040] For the sake of simplicity of the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent their actual structures as products.

[0041] The present invention provides a vacuum reconstruction method for a proton heavy ion accelerator. Figure 1 It is a schematic flow chart of an implementation manner of the vacuum reconstruction method for a proton heavy ion accelerator. Figure 2 It is a schematic diagram of an implementation manner of the vacuum reconstruction method for a proton heavy ion accelerator. Refer to Figure 1 and Figure 2 , the proton heavy ion accelerator includes a vacuum chamber and a medium and low vacuum pump and a high vacuum pump connected in series to the vacuum chamber. The vacuum reconstruction method includes the following S10 to S70.

[0042] S10: Monitor the real-time air pressure value in the vacuum chamber. Specifically, the air pressure value in the vacuum chamber can be measured by setting an air pressure measuring device in the vacuum chamber and the measurement result can be read in real time.

[0043] S20: Turn on the medium and low vacuum pumps and keep the high vacuum pump off. Before the real-time air pressure value in the vacuum chamber drops to a first preset air pressure value, continuously monitor the real-time pumping speed of the medium and low vacuum pumps to generate a first-period air pressure curve, and determine whether the real-time air pressure value in the vacuum chamber always conforms to the first-period air pressure curve.

[0044] Figure 3 It is the curve of the real-time air pressure value in the vacuum chamber changing with time during the vacuum reconstruction process. Refer to Figure 3 , the vacuum reconstruction includes three important periods. The first period is when the air pressure value in the vacuum chamber drops from atmospheric pressure to the first preset air pressure value V1. In the illustrative embodiment, the first preset air pressure value V1 is 1 mbar. The first period is the period when the medium and low vacuum pumps work alone. It is necessary to continuously monitor the real-time pumping speed of the medium and low vacuum pumps and generate a first-period air pressure curve. The first-period air pressure curve includes the expected air pressure values at each time point in the vacuum chamber. By comparing the real-time air pressure value in the vacuum chamber with the expected air pressure value, it can be determined whether the real-time air pressure value in the vacuum chamber always conforms to the first-period air pressure curve. The first-period air pressure curve satisfies the following formula relationship:

[0045] ;

[0046] Wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the medium and low vacuum pumps, represents the real-time air pressure value in the vacuum chamber, represents the air pressure value in the vacuum chamber when the medium and low vacuum pumps are started.

[0047] If the judgment result is no, then enter S30: Send out a first alarm. During the first period, if the real-time air pressure value in the vacuum chamber is lower than the expected air pressure value, that is, the real-time air pressure value in the vacuum chamber does not conform to the first-period air pressure curve, it means that the working state of the medium and low vacuum pumps does not meet the requirements, or there is a large leak in the vacuum chamber. At this time, a first alarm is sent to remind the personnel to pay attention, stop the vacuum reconstruction in time and find the problem.

[0048] If the judgment result is yes, then enter S40: Turn on the high vacuum pump when the air pressure value in the vacuum chamber drops to the first preset air pressure value V1, and continuously monitor the real-time pumping speed of the high vacuum pump. During the period from when the high vacuum pump reaches full speed to when the air pressure value in the vacuum chamber drops to a second preset air pressure value V2, generate a second-period air pressure curve according to the real-time pumping speed of the high vacuum pump, and determine whether the real-time air pressure value in the vacuum chamber always conforms to the second-period air pressure curve.

[0049] Refer to Figure 3, after the high vacuum pump is turned on, it will continuously accelerate to full speed. The second period of vacuum reconstruction is from when the high vacuum pump reaches full speed until the air pressure value in the vacuum chamber drops to a second preset air pressure value V2. In the illustrative embodiment, the second preset air pressure value V2 is 2*10 -5 mbar. The second time period is the time when the high vacuum pump operates at full speed. It is necessary to continuously monitor the real-time pumping speed of the high vacuum pump and generate a second-period air pressure curve. The second-period air pressure curve includes the expected air pressure values at each time point of the vacuum chamber. By comparing the real-time air pressure value of the vacuum chamber with the expected air pressure value, it can be determined whether the real-time air pressure value of the vacuum chamber always conforms to the second-period air pressure curve. The second-period air pressure curve satisfies the following formula relationship:

[0050] ;

[0051] wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the high vacuum pump, represents the real-time air pressure value of the vacuum chamber, represents the air pressure value of the vacuum chamber when the high vacuum pump is started.

[0052] If the judgment result is no, then go to S50: issue a second alarm. During the second period, if the real-time air pressure value of the vacuum chamber is lower than the expected air pressure value, that is, the real-time air pressure value of the vacuum chamber does not conform to the first-period air pressure curve, it indicates that the working state of the high vacuum pump does not meet the requirements, or there is a small leak in the vacuum chamber. At this time, a second alarm is issued to remind the personnel to pay attention, stop the vacuum reconstruction in time and find the problem.

[0053] If the judgment result is yes, then go to S60: during the period when the air pressure value in the vacuum chamber drops from the second preset air pressure value V2 to reach the vacuum equilibrium state, judge whether the real-time air pressure value of the vacuum chamber always conforms to a third-period air pressure curve.

[0054] Refer to Figure 3 , the third period of vacuum reconstruction is when the air pressure value in the vacuum chamber drops from the second preset air pressure value V2 to reach the vacuum equilibrium state. During the third time period, the air pressure value in the vacuum chamber drops slowly, but the air pressure value in the vacuum chamber and time also approximately satisfy a linear relationship. The third-period air pressure curve can be preset according to the data recorded when the vacuum reconstruction is successful. The third-period air pressure curve includes the expected air pressure values at each time point of the vacuum chamber. During the subsequent vacuum reconstruction process, it is necessary to continuously monitor the air pressure value of the vacuum chamber. By comparing the real-time air pressure value of the vacuum chamber with the expected air pressure value, it can be determined whether the real-time air pressure value of the vacuum chamber always conforms to the third-period air pressure curve

[0055] If the judgment result is negative, then proceed to S70: issue a third alarm. During the third time period, if the real-time air pressure value of the vacuum chamber does not conform to the air pressure curve of the third time period, it indicates that there is a slight leak in the vacuum chamber or the inner surface of the vacuum chamber is contaminated. At this time, a third alarm is issued to alert the personnel, and the vacuum reconstruction is stopped in time to find the problem.

[0056] The vacuum reconstruction method of the proton heavy ion accelerator provided by the present invention controls the start of the medium and low vacuum pumps and the high vacuum pump in time periods, and at the same time monitors the real-time air pressure value of the vacuum chamber and the real-time pumping speed of the medium and low vacuum pumps and the high vacuum pump in each time period. By means of the time period air pressure curve, it is judged whether there is an abnormality in the state of vacuum reconstruction, and an alarm is issued in time when an abnormal state occurs, so as to avoid wasting a lot of time when the vacuum reconstruction fails.

[0057] In the illustrative embodiment, S40 further includes: monitoring the pumping speed of the high vacuum pump after the high vacuum pump is turned on, and judging whether the pumping speed of the high vacuum pump reaches the full speed within a preset time period after the high vacuum pump is started. If the judgment result is negative, then proceed to S50.

[0058] Generally, the high vacuum pump will reach the full speed within 8 minutes after it is turned on. Otherwise, it also indicates that the working state of the high vacuum pump does not meet the requirements, or there is a small leak in the vacuum chamber. At this time, a second alarm can be directly issued to alert the personnel. By monitoring the real-time pumping speed of the high vacuum pump and the real-time air pressure value of the vacuum chamber at the same time, the abnormal state of vacuum reconstruction can be detected earlier and more time can be saved.

[0059] In the illustrative embodiment, in S30, the medium and low vacuum pumps are turned off after the first alarm is issued. In S50, the high vacuum pump is turned off after the second alarm is issued, and the medium and low vacuum pumps are turned off after the pumping speed of the high vacuum pump drops. In S70, the high vacuum pump is turned off after the third alarm is issued, and the medium and low vacuum pumps are turned off after the pumping speed of the high vacuum pump drops. Thereby, the vacuum reconstruction is quickly aborted when an abnormal state occurs in the vacuum reconstruction, saving energy consumption.

[0060] The present invention provides a vacuum system for a proton heavy ion accelerator. Refer to Figure 2 , the proton heavy ion accelerator includes a vacuum chamber 50. The vacuum system includes a medium and low vacuum pump 10, a high vacuum pump 20, a pressure measuring device 30 and a processor unit 40.

[0061] The high vacuum pump 20 is connected in series to the rear stage of the medium and low vacuum pump 10 and can communicate with the vacuum chamber 50. The pressure measuring device 30 can be arranged in the vacuum chamber 50 and measure the real-time air pressure value of the vacuum chamber 50. In the illustrative embodiment, the pressure measuring device 30 is a vacuum gauge.

[0062] The processor unit 40 is signal-connected to the air pressure measuring device 30, the medium-low vacuum pump 10, and the high vacuum pump 20. The processor unit 40 is configured to be able to monitor the real-time air pressure value of the vacuum chamber 50 by using the air pressure measuring device 30. The processor unit 40 controls the medium-low vacuum pump 10 to start and keeps the high vacuum pump 20 closed according to a start instruction. Before the real-time air pressure value of the vacuum chamber 50 drops to a first preset air pressure value V1, continuously monitor the real-time pumping speed of the medium-low vacuum pump 10 to generate a first-period air pressure curve, and determine whether the real-time air pressure value of the vacuum chamber 50 always conforms to the first-period air pressure curve. If the determination result is negative, generate a first alarm signal. The first alarm signal is used to control the alarm device, or is used to be read by the operating system of the proton heavy ion accelerator, and generate an alarm prompt to remind the personnel that the working state of the medium-low vacuum pump does not meet the requirements, or there is a large leakage in the vacuum chamber 50. In a schematic embodiment, the first preset air pressure value V1 is set to 1 mbar, and the first-period air pressure curve satisfies the following formula relationship:

[0063] ;

[0064] wherein, represents time, represents the volume of the area in the vacuum chamber that needs to be evacuated, represents the real-time pumping speed of the medium-low vacuum pump, represents the real-time air pressure value of the vacuum chamber, represents the air pressure value of the vacuum chamber when the medium-low vacuum pump starts.

[0065] If the determination result of the above determination is positive, the processor unit 40 controls the high vacuum pump 20 to start when the air pressure value of the vacuum chamber 50 drops to the first preset air pressure value V1, and continuously monitors the real-time pumping speed of the high vacuum pump 20. During the period from when the high vacuum pump 20 reaches full speed to when the air pressure value of the vacuum chamber 50 drops to a second preset air pressure value V2, generate a second-period air pressure curve according to the real-time pumping speed of the high vacuum pump 20, and determine whether the real-time air pressure value of the vacuum chamber 50 always conforms to the second-period air pressure curve. If the determination result is negative, generate a second alarm signal. The second alarm signal is used to control the alarm device, or is used to be read by the operating system of the proton heavy ion accelerator, and generate an alarm prompt to remind the personnel that the working state of the high vacuum pump does not meet the requirements, or there is a small leakage in the vacuum chamber 50. In a schematic embodiment, the second preset air pressure value V2 is set to 2×10 -5 mbar, and the second-period air pressure curve satisfies the following formula relationship:

[0066] ;

[0067] wherein, represents time, Represents the volume of the area in the vacuum chamber that needs to be evacuated. Represents the real-time pumping speed of the high vacuum pump. Represents the real-time air pressure value of the vacuum chamber. Represents the air pressure value of the vacuum chamber when the high vacuum pump starts.

[0068] If the judgment result of the above judgment is yes, the processor unit 40 determines whether the real-time air pressure value of the vacuum chamber 50 always conforms to a third-period air pressure curve during the period when the air pressure value of the vacuum chamber 50 reaches the vacuum equilibrium state from the second preset air pressure value V2. If the judgment result is no, a third alarm signal is generated. The second alarm signal is used to control the alarm device or read by the operating system of the proton heavy ion accelerator, and an alarm prompt is generated to remind the personnel that there is a slight leak in the vacuum chamber 50 or the inner surface of the vacuum chamber 50 is contaminated.

[0069] The vacuum system of the proton heavy ion accelerator provided by the present invention controls the start of the medium and low vacuum pumps and the high vacuum pump in different time periods, and at the same time monitors the real-time air pressure value of the vacuum chamber and the real-time pumping speeds of the medium and low vacuum pumps and the high vacuum pump in each time period. By means of the time-period air pressure curve, it is judged whether there is an abnormality in the state of vacuum reconstruction, and an alarm message is generated in time when an abnormal state occurs, avoiding wasting a lot of time when vacuum reconstruction fails.

[0070] In the schematic embodiment, the processor unit 40 is further configured to monitor the pumping speed of the high vacuum pump 20 after the high vacuum pump 20 is turned on, and determine whether the pumping speed of the high vacuum pump 20 reaches the full speed within a preset time period after the high vacuum pump 20 starts. If the judgment result is no, a second alarm signal is generated. By monitoring the real-time pumping speed of the high vacuum pump and the real-time air pressure value of the vacuum chamber 50 at the same time, the abnormal state of vacuum reconstruction can be detected earlier and more time can be saved.

[0071] In the schematic embodiment, the processor unit 40 is further configured to control the medium and low vacuum pump 10 to close after generating the first alarm signal, control the high vacuum pump 20 to close after generating the second alarm signal, control the medium and low vacuum pump 10 to close again after the pumping speed of the high vacuum pump 20 drops, control the high vacuum pump 20 to close after generating the third alarm signal, and control the medium and low vacuum pump 10 to close again after the pumping speed of the high vacuum pump 20 drops. By doing so, the vacuum reconstruction can be quickly aborted when an abnormal state occurs in the vacuum reconstruction, saving energy consumption.

[0072] In the schematic embodiment, the medium and low vacuum pump 10 and the high vacuum pump 20 respectively have RS-485 communication interfaces, and the processor unit 40 is respectively signal-connected to the medium and low vacuum pump 10 and the high vacuum pump 20 through the RS-485 communication interfaces to obtain the pumping speeds of the medium and low vacuum pump 10 and the high vacuum pump 20, and control the opening and closing of the medium and low vacuum pump 10 and the high vacuum pump 20.

[0073] In an illustrative embodiment, the vacuum system further includes an alarm device capable of generating different alarm messages in the form of sound, light, or image display. The processor unit 40 is signal-connected to the alarm device and is configured to control the alarm device to generate different alarm messages when generating the first alarm signal, the second alarm signal, and the third alarm signal. Thereby, an alarm signal can be directly generated, which is more convenient to use.

[0074] It should be understood that although this specification is described according to various embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments understandable by those skilled in the art.

[0075] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the present invention, and they are not intended to limit the protection scope of the present invention. Any equivalent implementation or change made without departing from the technical spirit of the present invention, such as the combination, division, or repetition of features, should be included in the protection scope of the present invention.

Claims

1. A vacuum reconstruction method for a proton and heavy ion accelerator, wherein the proton and heavy ion accelerator comprises a vacuum chamber and a medium and low vacuum pump and a high vacuum pump which are arranged in series and connected to the vacuum chamber, characterized in that: The vacuum reconstruction method comprises: S10: monitoring the real-time air pressure value of the vacuum chamber; S20: Turning on the low-medium vacuum pump and keeping the high-vacuum pump turned off, and before the real-time air pressure value of the vacuum chamber drops to a first preset air pressure value, continuously monitoring the real-time pumping speed of the low-medium vacuum pump to generate an air pressure curve for a first period, and determining whether the real-time air pressure value of the vacuum chamber always meets the air pressure curve for the first period; If the judgment result is no, then enter S30: issue a first alarm; If the judgment result is yes, then enter S40: when the air pressure value of the vacuum chamber drops to the first preset air pressure value, start the high vacuum pump, and continuously monitor the real-time pumping speed of the high vacuum pump, during the period from when the high vacuum pump reaches full speed to when the air pressure value of the vacuum chamber drops to a second preset air pressure value, generate a second period air pressure curve according to the real-time pumping speed of the high vacuum pump, and judge whether the real-time air pressure value of the vacuum chamber always meets the second period air pressure curve; If the judgment result is no, then enter S50: issue a second alarm; If the judgment result is yes, then proceed to S60: during the period from when the air pressure value of the vacuum chamber changes from the second preset air pressure value to when the vacuum chamber reaches the vacuum equilibrium state, determine whether the real-time air pressure value of the vacuum chamber always conforms to an air pressure curve of a third period; and If the judgment result is no, the process proceeds to S70: issuing a third alarm.

2. The vacuum reconstruction method of a proton and heavy ion accelerator according to claim 1, characterized in that: The air pressure curve in the first period satisfies the following formula relationship: ； in, Indicates time, Indicates the volume of the vacuum chamber area that needs to be evacuated. Indicates the real-time pumping speed of the medium and low vacuum pumps. Indicates the real-time pressure value of the vacuum chamber. Indicates the air pressure value of the vacuum chamber when the medium and low vacuum pumps are started.

3. The vacuum reconstruction method of a proton and heavy ion accelerator according to claim 1, characterized in that: The air pressure curve in the second period satisfies the following formula relationship: ； in, Indicates time, Indicates the volume of the vacuum chamber area that needs to be evacuated. Indicates the real-time pumping speed of the high vacuum pump. Indicates the real-time pressure value of the vacuum chamber. Indicates the pressure value of the vacuum chamber when the high vacuum pump is started.

4. The vacuum reconstruction method of a proton and heavy ion accelerator according to claim 1, characterized in that: S40 also includes: monitoring the pumping speed of the high vacuum pump after the high vacuum pump is turned on, and determining whether the pumping speed of the high vacuum pump reaches full speed within a preset time after the high vacuum pump is started. If the determination result is no, entering S50.

5. The vacuum reconstruction method of a proton and heavy ion accelerator according to claim 1, characterized in that: In S30, the medium and low vacuum pumps are turned off after the first alarm is issued; in S50, the high vacuum pump and the medium and low vacuum pumps are turned off in sequence after the second alarm is issued; in S70, the high vacuum pump and the medium and low vacuum pumps are turned off in sequence after the third alarm is issued.

6. A vacuum system of a proton and heavy ion accelerator, the proton and heavy ion accelerator comprising a vacuum chamber (50), characterized in that: The vacuum system comprises: a medium and low vacuum pump (10); a high vacuum pump (20), which is connected in series to the rear stage of the medium and low vacuum pump (10) and can be communicated with the vacuum chamber; An air pressure measuring device (30) capable of being arranged in the vacuum chamber and measuring the real-time air pressure value of the vacuum chamber; and A processor unit (40) whose signal is connected to the air pressure measuring device (30), the medium and low vacuum pump (10) and the high vacuum pump (20), and the processor unit (40) is configured to be able to: Using the air pressure measuring device (30) to monitor the real-time air pressure value of the vacuum chamber; Controlling the low-medium vacuum pump (10) to start and keeping the high-vacuum pump (20) closed according to a start instruction; Before the real-time air pressure value of the vacuum chamber drops to a first preset air pressure value, the real-time pumping speed of the medium-low vacuum pump (10) is continuously monitored to generate an air pressure curve for a first period of time, and it is determined whether the real-time air pressure value of the vacuum chamber always conforms to the air pressure curve for the first period of time; if the determination result is no, a first alarm signal is generated; if the determination result is yes, when the air pressure value of the vacuum chamber drops to the first preset air pressure value, the high vacuum pump (20) is controlled to start, and the real-time pumping speed of the high vacuum pump (20) is continuously monitored; During the period from when the high vacuum pump (20) reaches full speed to when the air pressure value of the vacuum chamber drops to a second preset air pressure value, a second time period air pressure curve is generated according to the real-time pumping speed of the high vacuum pump (20), and it is judged whether the real-time air pressure value of the vacuum chamber always conforms to the second time period air pressure curve; if the judgment result is no, a second alarm signal is generated; if the judgment result is yes, during the period from when the air pressure value of the vacuum chamber changes from the second preset air pressure value to when the vacuum chamber reaches a vacuum equilibrium state, it is judged whether the real-time air pressure value of the vacuum chamber always conforms to a third time period air pressure curve; if the judgment result is no, a third alarm signal is generated.

7. The vacuum system of the proton and heavy ion accelerator according to claim 6, characterized in that: The air pressure curve in the first period satisfies the following formula relationship: ； in, Indicates time, Indicates the volume of the vacuum chamber area that needs to be evacuated. Indicates the real-time pumping speed of the medium and low vacuum pumps. Indicates the real-time pressure value of the vacuum chamber. Indicates the air pressure value of the vacuum chamber when the medium and low vacuum pumps are started.

8. The vacuum reconstruction method of a proton and heavy ion accelerator according to claim 6, characterized in that: The air pressure curve in the second period satisfies the following formula relationship: ； in, Indicates time, Indicates the volume of the vacuum chamber area that needs to be evacuated. Indicates the real-time pumping speed of the high vacuum pump. Indicates the real-time pressure value of the vacuum chamber. Indicates the pressure value of the vacuum chamber when the high vacuum pump is started.

9. The vacuum system of the proton and heavy ion accelerator according to claim 6, characterized in that: The processor unit (40) is further configured to monitor the pumping speed of the high vacuum pump (20) after the high vacuum pump (20) is turned on, and to determine whether the pumping speed of the high vacuum pump (20) reaches full speed within a preset time after the high vacuum pump (20) is started, and if the determination result is no, to generate the second alarm signal.

10. The vacuum system of the proton and heavy ion accelerator according to claim 6, characterized in that: The processor unit (40) is further configured to control the medium and low vacuum pump (10) to be turned off after the first alarm signal is generated, to control the high vacuum pump (20) and the medium and low vacuum pump (10) to be turned off in sequence after the second alarm signal is generated, and to control the high vacuum pump (20) and the medium and low vacuum pump (10) to be turned off in sequence after the third alarm signal is generated.

11. The vacuum system of the proton and heavy ion accelerator according to claim 6, characterized in that: The medium-low vacuum pump (10) and the high vacuum pump (20) are respectively provided with RS-485 communication interfaces, and the processor unit (40) is respectively connected to the medium-low vacuum pump (10) and the high vacuum pump (20) via the RS-485 communication interfaces to obtain pumping speeds of the medium-low vacuum pump (10) and the high vacuum pump (20), and to control the opening and closing of the medium-low vacuum pump (10) and the high vacuum pump (20).

12. The vacuum system of the proton and heavy ion accelerator according to claim 6, characterized in that: The vacuum system further comprises an alarm device, which is capable of generating different alarm information by means of sound, light or image display. The processor unit (40) is connected to the alarm device by signal. The processor unit (40) is configured to control the alarm device to generate different alarm information when generating the first alarm signal, the second alarm signal and the third alarm signal.

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